Conveyance system

Abstract

This invention provides a conveyor road that can efficiently and safely transport workpieces. A conveyor trolley transports workpieces to a processing device via this conveyor road, which has a road surface panel disposed above the processing device and having a flat upper surface. A conductive component is exposed on the upper surface of the road surface panel at a location where it contacts the wheels of the conveyor trolley. Preferably, the conductive component covers the entire area of ​​the upper surface of the road surface panel. More preferably, the conductive component comprises carbon fiber reinforced plastic. Further preferably, the conductive component is grounded. Further preferably, multiple road surface panels are connected in a direction parallel to the upper surface. This invention can suppress static electricity generated by friction between the conveyor road and the wheels of the conveyor trolley, as well as the accumulation of such static electricity, thereby preventing adverse effects on the workpieces.

Description

Technical Field

[0001] This invention relates to a conveying path used in the transport of workpieces. Background Technology

[0002] In the manufacturing process of device chips assembled in electronic devices, various processing equipment is used to process plate-shaped workpieces, such as semiconductor wafers or resin encapsulation substrates. When transporting workpieces to this processing equipment, a box capable of holding multiple workpieces is typically used. When the processing equipment accepts a box containing multiple workpieces, the workpieces are sequentially removed from the box and processed.

[0003] To improve the efficiency of processing the workpiece, multiple processing devices are sometimes used in parallel. In this case, the workpiece must be transferred to each of the multiple processing devices at appropriate times. Therefore, a transfer system has been proposed that connects multiple processing devices through a transfer path (transfer path) to realize the transfer of the workpiece to each processing device (see, for example, Patent Document 1).

[0004] Patent Document 1: Japanese Patent Application Publication No. 6-177244

[0005] Furthermore, in order to maximize the capabilities of multiple processing units, it is important to efficiently and safely transport the workpieces to each unit. However, due to the structural limitations of the various devices involved in transporting the workpieces, smooth transport of the workpieces is sometimes impossible. Summary of the Invention

[0006] The present invention was made in view of this problem and its purpose is to provide a conveying path that can efficiently and safely transport the workpiece.

[0007] According to one aspect of the invention, a transport path is provided, on which a transport vehicle that transports workpieces to a processing device travels. The transport path has a road surface panel disposed above the processing device and having a flat upper surface. Conductive components are exposed on the upper surface of the road surface panel at the positions where it contacts the wheels of the transport vehicle.

[0008] In this transport path, preferably the conductive component covers the entire area of ​​the upper surface of the road surface panel.

[0009] In addition, the conductive component in the conveying path preferably comprises carbon fiber reinforced plastic.

[0010] Furthermore, in this conveying path, it is preferable that the conductive component is grounded.

[0011] Furthermore, in this transport path, it is preferable that multiple road surface panels are connected in a direction parallel to the upper surface.

[0012] In one embodiment of the present invention, the conveyor path includes a road surface panel disposed above the processing device and having a flat upper surface. A conductive component is exposed on the upper surface of this road surface panel at a position where it contacts the wheels of the conveyor vehicle. Therefore, static electricity generated by friction between the conveyor path and the wheels of the conveyor vehicle, as well as the accumulation of such static electricity, can be suppressed, thereby preventing adverse effects on the workpiece.

[0013] Therefore, by using a conveying path according to one aspect of the present invention, the workpiece can be conveyed efficiently and safely. Attached Figure Description

[0014] Figure 1 This is a top view showing an example of the structure of a conveying system.

[0015] Figure 2 This is a function block diagram illustrating an example of the connection relationships within a conveying system.

[0016] Figure 3 This is a schematic side view illustrating an example of the structure of a loader / unloader.

[0017] Figure 4 (A) is a partial sectional side view showing the outer door closed and the inner door open. Figure 4 (B) is a partial sectional side view showing the outer door open and the inner door closed.

[0018] Figure 5 (A) is a partial sectional side view showing a box-mounted platform, etc. Figure 5 (B) is a bottom view showing the box-mounted stage.

[0019] Figure 6 (A) is a partial cross-sectional side view showing the case where the box stand is pulled outward from the internal storage area. Figure 6 (B) is a partial cross-sectional side view showing the roller detaching from the support. Figure 6 (C) is a partial sectional side view showing the situation where the box stand is turned back to the internal storage area.

[0020] Figure 7 (A) is a partial cross-sectional side view showing the workpiece unit temporarily placed on the two upper guide rails. Figure 7 (B) is a partial cross-sectional side view showing the case where the workpiece unit is temporarily placed on the two lower guide rails.

[0021] Figure 8 (A) is a top view showing two upper guide rails, etc. Figure 8 (B) is a top view showing the narrowing of the gap between the two upper guide rails.

[0022] Figure 9 (A) is a perspective view showing the upper surface of the transport vehicle. Figure 9 (B) is a perspective view showing the bottom side of the transport vehicle 10.

[0023] Figure 10 This is an enlarged perspective view showing the front end of the transport vehicle.

[0024] Figure 11 (A) is a three-dimensional view showing the container. Figure 11 (B) is the front view showing the container.

[0025] Figure 12 This is a perspective view of a transport vehicle showing the container being placed in the loading area.

[0026] Figure 13 This is a perspective view of a transport vehicle in which a container is connected to a suspension component via an elastic member (telescopic member).

[0027] Figure 14 (A) is a top view showing a structural example of a lifting unit. Figure 14 (B) is a side view showing a structural example of the lifting unit.

[0028] Figure 15 (A) is a top view showing other structural examples of the lifting unit. Figure 15 (B) is a side view showing another structural example of a lifting unit.

[0029] Figure 16 (A) is a top view showing the reel. Figure 16 (B) is a side view showing the reel.

[0030] Figure 17 This is an enlarged three-dimensional view of the cover.

[0031] Figure 18 (A) is a side view of the cover showing the state of the storage area without any containers stored. Figure 18 (B) is a side view showing the state of the container stored in the storage area.

[0032] Figure 19 (A) is a side view showing a transport vehicle placing containers stored in the storage area into the placement area. Figure 19 (B) is a graph showing the current value of the motor when the container is descending.

[0033] Figure 20 (A) is a side view showing a transport vehicle storing containers placed in the loading area in the storage area. Figure 20 (B) is a graph showing the current value of the motor when the container rises.

[0034] Figure 21 It is a perspective view showing the appearance of the processing equipment and the conveying path.

[0035] Figure 22 It is a perspective view showing the internal structure of the processing device.

[0036] Figure 23 This is a perspective view showing a portion of the conveyor path installed in the processing device.

[0037] Figure 24 (A) and Figure 24 (B) is a perspective view showing the lower frame units that constitute the lower frame.

[0038] Figure 25 This is a top view showing the configuration of the lower frame units that make up the lower frame.

[0039] Figure 26 (A) and Figure 26 (B) is a perspective view showing the upper frame units that constitute the upper frame.

[0040] Figure 27 This is a top view showing the configuration of the upper frame units that make up the upper frame.

[0041] Figure 28 It is a top view showing a transport road composed of multiple road surface panels arranged side by side.

[0042] Figure 29 This is a functional block diagram showing the control unit of the transport vehicle.

[0043] Figure 30 This diagram illustrates an example of a control method for a conveying system.

[0044] Figure 31 This is a perspective view showing the internal structure of the processing apparatus according to Embodiment 2.

[0045] Label Explanation

[0046] 2: Conveying system; 4: Processing device (cutting device); 4a: Processing device; 4b: Processing device; 6: Conveying path; 6a: Opening; 8: Loader / unloader (conveying device); 10: Conveying vehicle; 10a: Conveying vehicle; 10b: Conveying vehicle; 12: Control unit; 21: Piping; 22: Housing; 22a: Roof; 22b: Opening; 24: Box storage mechanism; 24a: First box storage mechanism; 24b: Second box storage mechanism; 26: Support platform; 26a: Upper surface; 26b: Outer surface; 28: Box placement platform; 28a: Lower surface; 28b: Upper surface; 28c: Through hole; 30: Box; 30a: First box; 30b: Second box; 32: Inlet / outlet; 34: Outer door (second door); 36: Rotating connecting component; 38a: External loading / unloading area (external area); 38b: Internal storage area (internal area); 40: Inner door (first door); 42: Lifting mechanism; 42a: Cylinder; 42b: Piston rod; 42c: Connecting component; 44: First sensor; 44a: Magnet; 46: Control device; 48: Second sensor; 48a: Magnet; 50: Stop component; 50a: Square bar; 50b: Roller; 52: Shaft mechanism; 52a: Rotating shaft; 52b: Bearing; 54: Pin (pressing part); 54a: Ring; 54b: Button; 56: Lifting mechanism; 56a: Support column; 58: Lifting platform; 60: Temporary storage unit; 62: Housing; 62a: Upper plate; 62b: Lower plate; 62c: Side plate; 62c1: First side plate; 62c2: Second side plate; 62d: Opening; 62e1: First opening; 62e2: Second opening; 64: Transfer unit (transfer mechanism); 64a: First transfer unit; 64b: Second transfer unit; 66: Platform; 68: Receiver; 70: Transmitter; 72a: Upper guide rail (first temporary placement section); 72b: Lower guide rail (second temporary placement section); 72c: Spacing; 74a: First air actuator; 74b: Second air actuator; 76a: First guide mechanism; 76b: Second guide mechanism; 78: Spacing adjustment mechanism; 82: Frame; 84: Axle; 86: Wheel (front wheel); 88: Wheel (rear wheel); 90: Drive unit; 92: Electric motor; 9 2a: Rotating shaft (output shaft); 94: Pulley; 96: Battery (secondary battery); 98: Wiring (charging wiring); 100: Terminal (power receiving terminal); 102: Container (box); 102a: Storage section (storage space); 102b: Opening; 102c: Top wall; 102d: Bottom wall; 104: Storage area; 106: First guide rail; 106a: Holding surface; 106b: Side; 108: Second guide rail; 108a: Holding surface; 110: Lifting unit (lifting mechanism); 112: Suspension component; 114: Drive mechanism; 116: Contact component; 118: Elastic component (telescopic component); 120: Cover; 122: First sensor; 124: Second sensor; 126: Third sensor;128: Support platform; 130: Control unit (control unit); 130a: First sensor control unit; 130b: Driving indicator unit; 130c: Second sensor control unit; 130d: Turning indicator unit; 130e: Entry control unit; 130f: Parking control unit; 132: Receiver; 134: Transmitter; 142: Electric motor; 142a: Rotary shaft (output shaft); 144a: First rotating shaft (first axis); 144b: Second rotating shaft (second axis); 146: Pulley; 148: Connecting component; 150a: Pulley; 150b: Pulley; 152: Connecting component; 154a: Reel; 154b: Reel; 156a: Roller; 156b: Roller; 162: Drive mechanism; 164: Electric motor Motion; 164a: Rotating shaft (output shaft); 166a: First rotating shaft (first axis); 166b: Second rotating shaft (second axis); 166c: Third rotating shaft (third axis); 168: Pulley; 170: Connecting component; 172: Reel; 172a: Groove (recess); 172b: Protrusion (convex part); 174: Fixing component; 176: Guide; 182: Cover; 182a: Plate-shaped component; 182b: Flexible component; 184: Contact part; 184a: Fixing component; 184b: Roller; 186: Fixing block; 188: Connecting block (L-shaped block); 188a: Connecting part; 188b: Fixing part; 190: Connecting shaft; 202: Base; 202a: Recess; 202b: Recess; 202c: Piping connection; 204: Lifting table; 206: X-axis moving mechanism (machining feed unit); 206a: Worktable cover; 206b: Dustproof and drip-proof cover; 208: Chuck worktable; 208a: Holding surface; 210: Fixture; 212: Guide rail; 214: First support structure; 216: First track; 218: First moving mechanism; 220: First holding unit; 220a: Holding mechanism; 222: Second track; 224: Second moving mechanism; 226: Second holding unit; 228: Second support structure; 230: Y-axis and Z-axis moving mechanism (indexing feed unit, infeed feed unit); 232: Machining unit (cutting unit); 234: Cutting tool; 236: Imaging unit (camera) ); 238: Cleaning unit; 240: Rotary worktable; 242: Spray nozzle; 244: Cover; 244a: Canopy; 244b: Door; 246: Control device; 248: Receiver; 250: Transmitter; 262: Lower frame; 264: Upper frame; 266: Road surface panel; 268: Screw; 270: Lower frame unit; 270a: Lower frame unit; 270b: Lower frame unit; 270c: Lower frame unit; 270d: Lower frame unit; 272: Upper frame unit; 272a: Upper frame unit; 272b: Upper frame unit; 274a: Bridging panel; 274b: Bridging panel; 276: Guide section; 278: Driving area; 280: Parking area;282: Opening; 284: Standby area; 286: Mark; 286a: First mark; 286b: Second mark; 286c: Third mark; 286d: Fourth mark; 288: Terminal (power supply terminal); 290: Terminal support; 292: Wiring (power supply wiring); 302: Control unit; 304: Receiver; 306: Transmitter; 402: Processing device (cutting device); 404: Lifting platform; 406: Box storage mechanism; 406a: First box storage mechanism; 406b: Second box storage mechanism; 11: Added Workpiece; 13: Belt (dicing belt); 15: Frame; 17: Workpiece unit; 17a: Workpiece unit; 17b: Workpiece unit; A: Placement area; A1a: First placement area; A1b: First placement area; A2: Second placement area; B1a: First conveying area; B1b: First conveying area; B2: Second conveying area; C1: Arrow; C2: Arrow; C3: Arrow; D1: Arrow; D2: Arrow; D3: Arrow; E1: Arrow; E2: Arrow; F1: Arrow; F2: Arrow; G: Arrow. Detailed Implementation

[0047] The embodiments of the present invention will be described with reference to the accompanying drawings. Furthermore, in the following embodiments, the case where multiple processing devices serving as the destination for transporting the workpiece are all cutting devices will be described; however, the transport system only needs to be configured to transport the workpiece to any type of processing device. That is, the destination for transporting the workpiece can be a processing device other than a cutting device.

[0048] For example, a transport system is sometimes configured to transport workpieces to multiple laser processing units. Additionally, a transport system may sometimes be configured to sequentially transport workpieces to multiple types of processing units used in a series of processes. Furthermore, a transport system can be configured to transport workpieces to various devices used in any subsequent processing accompanying the processing of the workpieces. That is, the destination of the workpieces, etc., may include bonding devices, ultraviolet irradiation devices, cleaning devices, etc., that are not intended for processing the workpieces.

[0049] (Implementation Method 1)

[0050] Figure 1 This is a top view showing a structural example of the conveying system 2 according to this embodiment. Figure 2 This is a functional block diagram illustrating an example of the connection relationships in conveying system 2. For example... Figure 1 As shown, the conveying system 2 of this embodiment includes a plate-shaped workpiece 11 (see reference 4) for processing by the processing device (cutting device) 4. Figure 8 (A) Figure 8 (B) etc.) The transport route 6 is used for transporting.

[0051] The workpiece 11 is, for example, a disk-shaped wafer formed from a semiconductor material such as silicon. The front side of the workpiece 11 is divided into multiple small regions by multiple intersecting predetermined dividing lines (spacers), and devices such as ICs (Integrated Circuits) and MEMS (Micro Electro Mechanical Systems) are formed in each small region.

[0052] A strip (slicing strip) 13 with a diameter larger than that of the workpiece 11 is attached to the back side of the workpiece 11. The outer periphery of the strip 13 is fixed to the annular frame 15 surrounding the workpiece 11. Thus, in the conveying system 2 of this embodiment, the workpiece 11 is conveyed to the processing apparatus 4 in the state of workpiece unit 17 supported by the frame 15 by means of the strip 13.

[0053] Furthermore, in this embodiment, the workpiece 11 is a disk-shaped wafer formed from a semiconductor material such as silicon, but there are no limitations on the material, shape, structure, size, etc. of the workpiece 11. For example, a substrate formed from other semiconductor, ceramic, resin, metal, or other materials may also be used as the workpiece 11.

[0054] Similarly, there are no restrictions on the type, quantity, shape, structure, size, or arrangement of the devices. Devices may not even be formed on the workpiece 11. Furthermore, in this embodiment, the workpiece unit 17, obtained by supporting the workpiece 11 on the frame 15 using the belt 13, is used as the transport object. However, sometimes workpieces 11 without the belt 13 attached, or workpieces 11 not supported on the frame 15, are also used as transport objects.

[0055] The size of the frame 15 is set according to the size of the workpiece 11 (such as the diameter of the workpiece 11). For example, the outer diameter of the frame 15 supporting a workpiece 11 with a diameter of approximately 300 mm is larger than the outer diameter of the frame 15 supporting a workpiece 11 with a diameter of approximately 200 mm. That is, when using a larger workpiece 11, the outer diameter of the workpiece unit 17 also increases.

[0056] Furthermore, the processing device 4, which processes the workpiece 11, is connected to the transport system 2 as the destination for transporting the workpiece 11, but it is not necessarily a component of the transport system 2. Therefore, the processing device 4 can be changed or omitted depending on how the transport system 2 is used, as described above.

[0057] In addition, Figure 1 For ease of explanation, only one processing device 4a is shown in the diagram. Figure 2The diagram shows two processing devices 4a and 4b, but in this embodiment, more than two processing devices 4 are required as the destination for transporting the workpiece 11. That is, the number of processing devices 4 connected to the transport system 2 is more than two.

[0058] The transport path 6 is arranged on the upper part of each processing device 4 in a manner that connects multiple processing devices 4. The workpiece 11 is transported to each processing device 4 through the transport path 6. In addition, the transport path 6 is arranged above the processing device 4, so the transport path 6 will not interfere with the piping 21 or the like connected to the side of each processing device 4.

[0059] Below the transport path 6, in addition to the processing device 4, there is also a loader / unloader (transport device) 8 for storing the workpiece 11 before or after processing. The workpiece 11 stored in the loader / unloader 8 before processing is moved into the transport vehicle 10 at any time.

[0060] The transport vehicle 10 travels on the transport path 6 to move the workpiece 11 received from the loader / unloader 8 before processing into each processing unit 4. In addition, when the transport vehicle 10 receives the processed workpiece 11 from the processing unit 4, it travels on the transport path 6 to move the processed workpiece 11 to the loader / unloader 8.

[0061] However, when multiple types of devices (processing devices 4, etc.) are connected to the conveying system 2, when the conveyor 10 receives the processed workpiece 11 from a certain processing device 4, it sometimes travels on the conveying path 6 to transport the processed workpiece 11 to the device used in the next process. Furthermore, in Figure 1 and Figure 2 The image shows two transport vehicles 10a and 10b, but there is no limit to the number of transport vehicles 10.

[0062] like Figure 2 As shown, the processing unit 4, the loader / unloader 8, the conveyor 10, and the control unit 12 that controls their movements are wirelessly connected. However, the control unit 12 can be configured to control the movements of the processing unit 4, the loader / unloader 8, the conveyor 10, etc., and is sometimes connected to them via a wired connection.

[0063] Figure 3 This is a schematic side view illustrating a structural example of the loader / unloader 8. Additionally, in Figure 3 In this example, some of the constituent elements are represented using functional blocks. Figure 3 As shown, the loader / unloader 8 includes a housing 22 that houses various components. Additionally, in Figure 3 For ease of explanation, the housing 22 is shown only in outline.

[0064] Box storage mechanisms 24 are respectively provided at two different heights along the height direction (Z1 axis direction) within the housing 22. That is, the loader / unloader 8 of this embodiment includes a first box storage mechanism 24a and a second box storage mechanism 24b disposed above the first box storage mechanism 24a. However, there is no limitation on the number of box storage mechanisms 24 in the loader / unloader 8. The loader / unloader 8 only needs to have one or more box storage mechanisms 24.

[0065] Each box storage mechanism 24 has a flat support platform 26. A guide mechanism (not shown) is provided on the upper surface of the support platform 26, on which a flat box mounting platform 28 is mounted so as to be able to slide along the depth direction (Y1 axis direction) of the housing 22.

[0066] A box 30 capable of holding multiple (e.g., more than 10) workpieces 11 is placed on the upper surface of the box placement platform 28. The box 30 is used when multiple workpiece units 17 are transferred together. By using such a box 30, the operator can transfer multiple workpiece units 17 together to the loader / unloader 8.

[0067] A loading / unloading outlet 32 ​​is formed on the housing 22 at a position corresponding to each box storage mechanism 24, allowing the box placement platform 28 on which the box 30 is placed to pass through. When the box 30 is loaded or unloaded, the box placement platform 28 on which the box 30 is placed slides, so that the box 30 passes through the loading / unloading outlet 32.

[0068] An outer door (second door) 34 is provided on the housing 22 at a position corresponding to each loading / unloading outlet 32, which can close each loading / unloading outlet 32. The lower part of the outer door 34 is connected to the outer end of the support platform 26 by means of a rotating connecting member 36 such as a hinge with a horizontal rotating axis, and the outer door 34 is opened and closed by rotating about the rotating axis of the rotating connecting member 36.

[0069] With the outer door 34 open, the box-loading platform 28 can be pulled out to the external loading / unloading area (outer area) 38a, which is located outside the loading / unloading outlet 32 ​​(see reference). Figure 6 (A, etc.). In addition, an air-driven locking mechanism (not shown) is provided at the position of the housing 22 corresponding to each loading and unloading outlet 32 ​​to fix the outer door 34 in a way that prevents it from opening when closed.

[0070] For example, the operator places the delivered box 30 onto the box placement platform 28, which is pulled out to the external loading / unloading area 38a. Then, when the operator pushes the box placement platform 28 into the interior of the housing 22, the box placement platform 28 and the box 30 move to the internal storage area (internal area) 38b, located inside the loading / unloading outlet 32 ​​(see reference). Figure 6 (A) etc.

[0071] Additionally, in this specification, the internal storage area 38b is sometimes referred to as the first placement area of ​​the box 30. When removing the box 30 from the box storage mechanism 24, after opening the outer door 34, the box placement platform 28 can be pulled from the internal storage area 38b to the external moving-in / moving-out area 38a.

[0072] Each storage unit 24 has an inner door (first door) 40 located on the side opposite to the loading / unloading outlet 32, opposite to its internal storage area 38b. The inner door 40 of the first storage unit 24a moves between a closed position above and an open position below, adjacent to its internal storage area 38b. The inner door 40 of the second storage unit 24b moves between an open position above and a closed position below, adjacent to its internal storage area 38b. Thus, the two inner doors 40 do not interfere with each other.

[0073] Figure 4 (A) is a partial cross-sectional side view of the first box storage mechanism 24a, showing the outer door 34 closed and the inner door 40 open. Additionally, in Figure 4 In (A), the components of a portion of the loader / unloader 8 are shown by function blocks. Except for the movement of the inner door 40, the construction and operation of the second box storage mechanism 24b are the same as those of the first box storage mechanism 24a.

[0074] like Figure 4 As shown in (A), a lifting mechanism 42 is connected to the inner door 40. The lifting mechanism 42 is, for example, an air actuator (cylinder) that moves an object using air pressure, and has a cylinder 42a and a piston rod 42b that can move relative to the cylinder 42a.

[0075] A piston (not shown) is connected to the base end of the piston rod 42b housed in the cylinder 42a. In addition, a connecting member 42c is connected to the front end of the piston rod 42b exposed from the cylinder 42a and fixed to the surface of the inner door 40 on the side opposite to the inner storage area 38b.

[0076] If the intake and exhaust of the cylinder 42a are controlled to move the piston and piston rod 42b from top to bottom, the inner door 40 of the first box storage mechanism 24a moves from the closed position to the open position. Conversely, if the piston and piston rod 42b are moved from bottom to top, the inner door 40 of the first box storage mechanism 24a moves from the open position to the closed position. Alternatively, the lifting mechanism 42 can also be implemented using other mechanisms such as a rodless cylinder.

[0077] A first sensor 44 for detecting whether the inner door 40 is open is provided on the support platform 26 facing the inner door 40. The first sensor 44 is, for example, a magnetic sensor that detects whether the inner door 40 is open by means of a magnet 44a installed at a predetermined position on the inner door 40 (see reference). Figure 4 The strength of the magnetic field of (B) is detected.

[0078] For example, Figure 4 As shown in (A), when the inner door 40 is opened and the magnet 44a moves away from the first sensor 44, the strength of the magnetic field of the magnet 44a weakens at the position of the first sensor 44. Therefore, it is possible to determine whether the inner door 40 is open by using the strength of the magnetic field detected by the first sensor 44.

[0079] A control device 46, which controls the various components of the loader / unloader 8, is connected to the first sensor 44. The first sensor 44 sends information related to the strength of the detected magnetic field to the control device 46. When the strength of the magnetic field detected by the first sensor 44 is weaker than a reference, the control device 46 determines that the inner door 40 is open; when the strength of the magnetic field detected by the first sensor 44 is stronger than the reference, it determines that the inner door 40 is closed. Alternatively, the first sensor 44 can also be connected to the control device 46 wirelessly.

[0080] The control device 46 is, for example, a computer, which includes a processing unit such as a CPU (Central Processing Unit), a main storage device such as DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as flash memory. The processing unit and the like are operated according to software stored in the auxiliary storage device, thereby realizing the function of the control device 46.

[0081] A second sensor 48 is provided on the housing 22 at a position corresponding to the loading / unloading outlet 32 ​​for detecting whether the outer door 34 is open. The second sensor 48 is, for example, a magnetic sensor that detects the strength of the magnetic field of a magnet 48a installed at a predetermined position on the outer door 34. The second sensor 48 is connected to the control device 46. Alternatively, the second sensor 48 can also be connected to the control device 46 wirelessly.

[0082] Figure 4 (B) is a partial sectional side view showing the outer door 34 open and the inner door 40 closed. Additionally, in Figure 4 In (B), the control device 46 is shown using function blocks. For example... Figure 4 As shown in (B), when the outer door 34 is opened and the magnet 48a is moved away from the second sensor 48, the strength of the magnetic field of the magnet 48a weakens at the position of the second sensor 48.

[0083] Therefore, the strength of the magnetic field detected by the second sensor 48 can be used to determine whether the outer door 34 is open. Specifically, the second sensor 48 sends information related to the strength of the detected magnetic field to the control device 46. When the strength of the magnetic field detected by the second sensor 48 is weaker than a reference, the control device 46 determines that the outer door 34 is open, and when the strength of the magnetic field detected by the second sensor 48 is stronger than the reference, it determines that the outer door 34 is closed.

[0084] The control device 46 functions as a first safety mechanism to restrict access from the outside of the loader / unloader 8 to the inside. The first safety mechanism is achieved by the control device 46 appropriately controlling an air-driven locking mechanism that secures the outer door 34 in a manner that prevents it from opening when closed.

[0085] Specifically, when it is determined that the outer door 34 is closed and the inner door 40 is open, the control device 46 uses a locking mechanism to fix the outer door 34 in a way that prevents it from opening. In this way, by controlling whether the outer door 34 can be opened or closed, the operator can be prevented from accidentally accessing movable parts or other moving parts located inside the loader / unloader 8.

[0086] Furthermore, the control device 46 functions as a second safety mechanism to restrict access from the outside to the inside of the loader / unloader 8. This second safety mechanism is implemented by the control device 46 appropriately managing the power supply to the loader / unloader 8. Specifically, if it is determined that the outer door 34 is open and the inner door 40 is closed, and the inner door 40 is opened for some reason, the control device 46 cuts off the power supply to the loader / unloader 8.

[0087] The loader / unloader 8 is stopped by the second safety mechanism when both the outer door 34 and the inner door 40 are open. This proper management of the power supply to the loader / unloader 8 via the control device 46 prevents the operator from accidentally accessing movable parts or other moving parts located inside the loader / unloader 8.

[0088] Figure 5 (A) is a partial sectional side view showing the box-mounted stage 28, etc. Figure 5(B) is a bottom view showing the box holder 28. A stop member 50 is disposed on the lower surface 28a side of the box holder 28. The stop member 50 has, for example, a square bar 50a that is longer in the depth direction. However, the length of the square bar 50a in the depth direction is shorter than the length of the box holder 28 in the depth direction. In addition, the square bar 50a is formed of a metal such as stainless steel. However, there are no particular limitations on the material or shape of the square bar 50a.

[0089] At one end of the square bar 50a located on the inner side in the depth direction (i.e., the end on the inner door 40 side), a rotation axis (not shown) is provided along the width direction (X1 axis direction) which is approximately perpendicular to the height and depth directions. A roller 50b is rotatably supported on this rotation axis. The diameter of the roller 50b is smaller than the distance between the lower surface 28a of the box-mounted platform 28 and the upper surface 26a of the support platform 26.

[0090] A shaft mechanism 52 is provided between one inner end and the other outer end of the square bar 50a to rotatably support the square bar 50a. The shaft mechanism 52 has a rotation shaft 52a along the width direction. The rotation shaft 52a is connected to a position on the other end (outer side) of the square bar 50a in the length direction (depth direction) from the center.

[0091] The two ends of the rotating shaft 52a in the width direction are inserted into the bearing holes of a pair of bearings 52b fixed to the lower surface 28a side of the box-mounted platform 28. Thus, the square bar 50a is supported on the bearings 52b in such a way that it can rotate about the rotating shaft 52a in a plane parallel to the height and depth directions (in a plane perpendicular to the width direction).

[0092] As described above, the rotation axis 52a is connected to the square bar 50a at a position closer to the other end than the center. Therefore, the torque of the gravity acting on the stop member 50 about the rotation axis 52a is directed in a direction that causes one end of the square bar 50a to move downwards. That is, unless sufficient force is applied to the square bar 50a, the position of one end of the square bar 50a will be lower than the position of the other end of the square bar 50a due to gravity.

[0093] Therefore, for example, when the box-mounted platform 28 is positioned entirely within the internal storage area 38b, the roller 50b contacts the upper surface 26a of the support platform 26. Furthermore, when the box-mounted platform 28 is moved above the support platform 26, the roller 50b rotates on the upper surface 26a of the support platform 26.

[0094] The lower end of a pin (pressing part) 54, which is longer in the height direction, is connected to the other end of the square bar 50a. A through hole 28c, which penetrates the box mounting platform 28 in the height direction, is formed at the position corresponding to the pin 54, and the pin 54 is inserted into the through hole 28c. The through hole 28c is formed to a size that does not obstruct the degree of movement of the inserted pin 54 in the height direction.

[0095] The length of pin 54 in the height direction is greater than the thickness of the box-mounted platform 28. Therefore, when roller 50b is in contact with the upper surface 26a of support platform 26, the upper part of pin 54 is exposed on the upper surface 28b side of box-mounted platform 28. A disc-shaped button 54b is fixed to the exposed part of pin 54, and the button 54b has an outer diameter larger than the diameter of pin 54.

[0096] When the button 54b, which is fixed to the pin 54, is pressed from above, one end of the square bar 50a moves downward and the other end moves upward. That is, the roller 50b moves upward. In addition, a ring 54a is fixed near the lower part of the pin 54, and the ring 54a has an outer diameter larger than the diameter of the through hole 28c.

[0097] Figure 6 (A) is a partial cross-sectional side view showing the case where the box-mounted platform 28 is pulled outward from the internal storage area 38b. The box-mounted platform 28 is installed in such a way that it can slide relative to the support platform 26 via the aforementioned guide mechanism (not shown), and is pulled outward toward the loading / unloading outlet 32.

[0098] When the box-mounted platform 28 slides outward, causing the roller 50b to extend beyond the outer end of the upper surface 26a of the support platform 26, one end of the square bar 50a moves downward due to the torque exerted by the gravity of the stop member 50 about the rotation axis 52a. That is, the roller 50b falls off the support platform 26.

[0099] Figure 6 (B) is a partial cross-sectional side view showing the roller 50b detaching from the support 26. When the roller 50b detaches from the support 26, it is positioned lower than the upper surface 26a. As a result, the inward movement of the cassette holder 28 is restricted by the stop member 50 contacting the outer surface 26b of the support 26. Additionally, as the roller 50b detaches, the pin 54 rises, and the ring 54a contacts the lower surface 28a of the cassette holder 28.

[0100] Thus, when the box-mounted platform 28 is pulled out, the stop member 50 and the shaft mechanism 52 function as movement restriction mechanisms to limit the inward movement of the box-mounted platform 28. By providing movement restriction mechanisms, it is easier to move relatively heavy boxes 30 in and out, thereby reducing the risk of damage to the workpiece 11 stored in the box 30 during handling.

[0101] That is, when the box 30 is placed (moved) on the box placement platform 28, the risk of the operator causing the box 30 to fall and the risk of the operator causing the box 30 to collide with the outer door 34 increases when the box placement platform 28 moves inward. However, by restricting the movement of the box placement platform 28 inward by the movement restriction mechanism, these risks are sufficiently suppressed.

[0102] In addition, when the operator removes the box 30 from the box placement platform 28, the risk of collision between the box 30 to be removed and a part of the housing 22 located above the loading / unloading outlet 32 ​​increases as the box placement platform 28 moves inward. However, by restricting the movement of the box placement platform 28 inward by the movement restriction mechanism, this risk is also sufficiently suppressed.

[0103] The movement restriction mechanism in this embodiment is implemented by rotating a square bar 50a in a plane parallel to the height and depth directions. Therefore, unlike the case where the movement restriction mechanism is provided on the outer part of the box-mounted platform 28 in the width direction, the box storage mechanism 24 does not increase in width. Thus, compared to the case where the movement restriction mechanism is provided on the outer part of the box-mounted platform 28 in the width direction, it is easier to achieve a compact box storage mechanism 24 in the width direction.

[0104] Furthermore, the length of the square bar 50a, the position of the shaft mechanism 52, and other conditions are set such that the area of ​​the box 30 on the box-mounting platform 28 is fully exposed from the housing 22 when the square bar 50a is detached from the support platform 26. Therefore, the operator can place (move) the box 30 onto the box-mounting platform 28 with the box 30 fully exposed from the housing 22.

[0105] Figure 6 (C) is a partial cross-sectional side view showing the case where the cassette holder 28 is returned to the inner storage area 38b. When returning the cassette holder 28 to the inner storage area 38b, the operator presses button 54b. The operator presses button 54b, for example, until the lower part of button 54b contacts the upper surface 28b of the cassette holder 28. This presses pin 54 downwards, and roller 50b moves to a position above the upper surface 26a of the support table 26.

[0106] Roller 50b rises, for example, to contact the lower surface 28a of the box-mounted platform 28. As a result, the restriction on the inward movement of the box-mounted platform 28 is lifted, allowing it to return to the internal storage area 38b. The operator can push the box-mounted platform 28 into the internal storage area 38b while button 54b is pressed.

[0107] Furthermore, the box storage mechanism 24 is not limited to the example described above. For example, stop members 50 may be provided at two different positions in the width direction of the box mounting platform 28. In this case, through holes 28c are formed at positions corresponding to each pin 54. In addition, in this case, the two square bars 50a constituting the two stop members 50 can be connected to each other at any position. If the two square bars 50a are connected to each other, the pin 54 of one of them may be omitted.

[0108] Alternatively, a through hole 28c may be formed in the area of ​​the box holder 28 where the box 30 is disposed. In this case, when the box 30 is placed on the box holder 28, the weight of the box 30 will press down the pin 54. That is, the stop member 50 does not need to be released by the operator pressing down the pin 54.

[0109] like Figure 3 As shown, the loader / unloader 8 has a lifting mechanism 56 located on the side of the inner door 40 opposite to the internal storage area 38b. The lifting mechanism 56 has a support column 56a that is longer in the height direction. A pair of guide rails (not shown) are provided on the inner door 40 side of the support column 56a along the length direction (i.e., the height direction) of the support column 56a.

[0110] A plate-shaped lifting platform 58 is mounted on a pair of guide rails of the lifting mechanism 56 in a manner that allows it to slide in the height direction. The upper surface of the lifting platform 58 is formed to be approximately flat. The lifting platform 58 slides along the pair of guide rails in the height direction while keeping its upper surface approximately perpendicular to the height direction.

[0111] A motor (not shown) and a drive pulley (not shown) connected to the motor's rotating shaft are installed at the lower part of the support column 56a. A driven pulley (not shown) is installed at the upper part of the support column 56a. A toothed annular belt (not shown) is mounted on the drive pulley and the driven pulley, and a portion of this toothed annular belt is fixed to the lifting platform 58. Therefore, when the motor's rotating shaft is rotated in one direction, the lifting platform 58 rises; when the motor's rotating shaft is rotated in the other direction, the lifting platform 58 descends.

[0112] A temporary placement unit 60 is provided on the upper surface of the lifting platform 58 for temporarily placing workpieces 11 that are moved out of the box 30 in the box storage mechanism 24 or for placing workpieces 11 that are to be moved into the box 30 in the box storage mechanism 24. The temporary placement unit 60 has a square cylindrical housing 62 with an opening formed on the side of the box storage mechanism 24. Inside the housing 62 are arranged multiple conveying units (conveying mechanisms) 64 that can hold the workpieces 11 and move in the depth direction.

[0113] When the workpiece unit 17 is transferred between the temporary placement unit 60 and the first box 30a of the first box storage mechanism 24a, the height of the temporary placement unit 60 is aligned with the height of the first box storage mechanism 24a. That is, the temporary placement unit 60 is positioned in the first transport area B1a adjacent to the inner door 40 side in the depth direction relative to the first placement area A1a of the first box storage mechanism 24a.

[0114] When the temporary storage unit 60 is positioned in the first transport area B1a and the inner door 40 of the first box storage mechanism 24a is opened, the transport unit 64 can access the first box 30a in the first placement area A1a. For example, the transport unit 64 can grasp the workpiece unit 17 stored in the first box 30a and pull the workpiece unit 17 out to the temporary storage unit 60.

[0115] Additionally, the conveying unit 64 holds the workpiece unit 17 temporarily placed in the temporary storage unit 60 and stores the workpiece unit 17 in the first box 30a. In this way, the conveying unit 64 can convey the workpiece 11 between the temporary storage unit 60 in the first conveying area B1a and the first box 30a in the first placement area A1a.

[0116] When the workpiece unit 17 is transferred between the temporary placement unit 60 and the second box 30b of the second box storage mechanism 24b, the height of the temporary placement unit 60 is aligned with the height of the second box storage mechanism 24b. That is, the temporary placement unit 60 is positioned in the first transport area B1b adjacent to the inner door 40 side in the depth direction relative to the first placement area A1b of the second box storage mechanism 24b.

[0117] When the temporary storage unit 60 is positioned in the first transport area B1b and the inner door 40 of the second box storage mechanism 24b is opened, the transport unit 64 can access the second box 30b in the first placement area A1b. For example, the transport unit 64 can grasp the workpiece unit 17 stored in the second box 30b and pull the workpiece unit 17 out to the temporary storage unit 60.

[0118] Additionally, the conveying unit 64 holds the workpiece unit 17 temporarily placed in the temporary storage unit 60 and stores the workpiece unit 17 in the second box 30b. In this way, the conveying unit 64 can convey the workpiece 11 between the temporary storage unit 60 in the first conveying area B1b and the second box 30b in the first placement area A1b.

[0119] A platform 66 is provided above the second storage mechanism 24b. Furthermore, an opening 22b, penetrating the top 22a of the housing 22, is provided directly above the platform 66. Additionally, an opening 6a, penetrating the vertical transport path 6, is provided directly above the platform 66 and the opening 22b.

[0120] When the workpiece unit 17 is transferred between the transfer cart 10 and the temporary storage unit 60, the transfer cart 10, which has a container (box) 102 capable of holding the workpiece unit 17, is first moved to above the opening 6a. Then, the container 102 is lowered in a manner that allows it to be suspended by the suspension member 112 and placed on the upper surface of the placement platform 66 (second placement area A2).

[0121] Furthermore, the height of the temporary placement unit 60 is aligned with the height of the container 102 placed on the loading table 66. That is, the temporary placement unit 60 is positioned in the second transport area B2 adjacent to the loading table 66 in the depth direction. As a result, the transport unit 64 can access the container 102 placed in the second loading area A2. For example, the transport unit 64 can grasp the workpiece unit 17 housed in the container 102 and pull the workpiece unit 17 out to the temporary placement unit 60.

[0122] Furthermore, the conveying unit 64 holds the workpiece unit 17 temporarily placed in the temporary storage unit 60 and stores the workpiece unit 17 in the container 102. In this way, the conveying unit 64 can convey the workpiece 11 between the temporary storage unit 60 in the second conveying area B2 and the container 102 placed on the loading platform 66. Additionally, the lifting mechanism 56 that raises and lowers the temporary storage unit 60 and the conveying unit 64 within the temporary storage unit 60 are connected to the aforementioned control device 46. The operation of the lifting mechanism 56 and the conveying unit 64 is controlled by the control device 46.

[0123] A receiver 68 and a transmitter 70 are also connected to the control device 46. The receiver 68 receives signals (information) from the outside and sends them to the control device 46, while the transmitter 70 sends the signals (information) received from the control device 46 to the outside. For example, the receiver 68 receives signals from the control unit 12 of the conveying system 2 and sends them to the control device 46.

[0124] Control device 46 controls the operation of each component of loader / unloader 8 based on signals received from receiver 68. Additionally, control device 46 generates notification signals and sends them to transmitter 70. Transmitter 70, for example, sends the signals received from control device 46 to control unit 12 of transport system 2.

[0125] The loader / unloader 8 of this embodiment can transport the workpiece units 17 between the box 30 containing multiple workpiece units 17 and the container 102 of the transport vehicle 10 by means of the temporary placement unit 60. As a result, the workpiece units 17 can be transported to each processing device 4 in a timely manner, and the workpiece units 17 processed by each processing device 4 can be recycled in a timely manner.

[0126] Figure 7(A) is a partial cross-sectional side view showing the case where the workpiece unit 17 is temporarily placed on the upper layer of the temporary placement unit 60. Figure 7 (B) is a partial cross-sectional side view showing the case where the workpiece unit 17 is temporarily placed on the upper layer of the temporary placement unit 60. The housing 62 of the temporary placement unit 60 includes, for example, an upper plate 62a disposed at the upper part and a lower plate 62b disposed at the lower part.

[0127] The upper ends of columns (not shown) are connected to both ends of the upper plate 62a in the width direction. Similarly, the lower ends of columns are connected to both ends of the lower plate 62b in the width direction. That is, the upper plate 62a and the lower plate 62b are connected to each other by two sets of columns. A pair of side plates 62c, separated in the width direction, are arranged in the space between the upper plate 62a and the lower plate 62b. Furthermore, an opening 62d is formed at the end of the housing 62 on the side of the box storage mechanism 24.

[0128] On the inner side of a pair of side plates 62c, at the same height, there are upper guide rails (first temporary placement parts) 72a that are longer in the depth direction. Each upper guide rail 72a has a support surface that supports the workpiece unit 17 (frame 15) from below and a side surface that defines the position of the workpiece unit 17 (frame 15) in the width direction.

[0129] Inside a pair of side plates 62c, at a position lower than the upper guide rail 72a, are respectively arranged lower guide rails (second temporary placement parts) 72b that are longer in the depth direction. Each lower guide rail 72b has a support surface that supports the workpiece unit 17 (frame 15) from below and a side surface that defines the position of the workpiece unit 17 (frame 15) in the width direction.

[0130] Thus, with upper guide rail 72a and lower guide rail 72b at different heights inside the housing 62, the temporary storage unit 60 can simultaneously accommodate two workpiece units 17. Therefore, compared to the case where the temporary storage unit can only accommodate one workpiece unit 17, the workpiece unit 17 can be efficiently transported between the container 102 or box 30 of the transport vehicle 10 and the temporary storage unit 60.

[0131] For example, the upper guide rail 72a is used to store the workpiece unit 17 before processing, and the lower guide rail 72b is used to store the workpiece unit 17 after processing. However, there are no restrictions on the way the workpiece unit 17 is stored. It is also possible that the upper guide rail 72a is used to store the workpiece unit 17 after processing, and the lower guide rail 72b is used to store the workpiece unit 17 before processing.

[0132] A first conveying unit 64a is provided at a height corresponding to the upper guide rail 72a, and a second conveying unit 64b is provided at a height corresponding to the lower guide rail 72b. Each conveying unit 64b has a holding part, which includes two plate members arranged vertically. The two plate members are arranged such that the lower surface of the upper plate member is approximately parallel to the upper surface of the lower plate member.

[0133] Each conveying unit 64 also includes an actuator (not shown) for adjusting the spacing between the two plate components. This actuator narrows the spacing between the two plate components, thereby gripping the frame 15 of the workpiece unit 17. Conversely, it widens the spacing between the two plate components, thereby releasing the frame 15 of the workpiece unit 17 from the two plate components.

[0134] In addition, each conveying unit 64 has a horizontal moving mechanism (not shown) that moves the holding part in the depth direction. The horizontal moving mechanism has a linear guide (not shown) provided along the depth direction. The conveying unit 64 is slidably connected to the linear guide.

[0135] For example, a driven pulley (not shown) with a rotating shaft that is substantially parallel to the width direction is provided at one end of the linear guide. Additionally, a drive pulley (not shown) with a rotating shaft that is substantially parallel to the width direction is provided at the other end of the linear guide; and an electric motor (not shown) whose rotating shaft is connected to the drive pulley.

[0136] A toothed annular belt (not shown) is mounted on the driven pulley and the drive pulley, and a portion of the toothed annular belt is fixed to the gripping part. Therefore, when the rotation axis of the motor is rotated in one direction, the gripping part moves to one side in the depth direction, and when the rotation axis of the motor is rotated in the other direction, the gripping part moves to the other side in the depth direction.

[0137] When the workpiece unit 17 is temporarily placed on the upper guide rail 72a, as Figure 7 As shown in (A), the height of the temporary placement unit 60 is first adjusted by the lifting mechanism 56 so that the height of the upper guide rail 72a is aligned with the height of the container 102 or box 30 that houses the workpiece unit 17.

[0138] Next, the gripping part of the first conveying unit 64a is moved into the interior of the container 102 or box 30. The gripping part of the first conveying unit 64a then grips the frame 15 of the workpiece unit 17 housed in the container 102 or box 30. Then, the gripping part of the first conveying unit 64a is moved away from the container 102 or box 30. This places the workpiece unit 17 onto the upper guide rail 72a.

[0139] The operation of storing the workpiece unit 17 temporarily placed on the upper guide rail 72a in the container 102 or box 30 is the same. In this case, after holding the workpiece unit 17 temporarily placed on the upper guide rail 72a with the holding part of the first conveying unit 64a, the holding part of the first conveying unit 64a can be moved into the interior of the container 102 or box 30.

[0140] When the workpiece unit 17 is temporarily placed on the lower guide rail 72b, as Figure 7 As shown in (B), the height of the temporary placement unit 60 is first adjusted using the lifting mechanism 56 so that the height of the lower guide rail 72b is aligned with the height of the container 102 or box 30 that houses the workpiece unit 17.

[0141] Next, the gripping part of the second conveying unit 64b is moved into the interior of the container 102 or box 30. The gripping part of the second conveying unit 64b then grips the frame 15 of the workpiece unit 17 housed in the container 102 or box 30. Then, the gripping part of the second conveying unit 64b is moved away from the container 102 or box 30. This places the workpiece unit 17 onto the lower guide rail 72b.

[0142] The operation of storing the workpiece unit 17, which is temporarily placed on the lower guide rail 72b, in the container 102 or box 30 is the same. In this case, after holding the workpiece unit 17, which is temporarily placed on the lower guide rail 72b, using the holding part of the second transfer unit 64b, the holding part of the second transfer unit 64b can be moved into the container 102 or box 30.

[0143] The actions involved in transferring the workpiece unit 17 between box 30 and container 102 are as follows. First, the height of the temporary placement unit 60 is adjusted using the lifting mechanism 56, and the workpiece unit 17, which is stored in box 30 before processing, is pulled out to the upper guide rail 72a. Next, the temporary placement unit 60 is raised using the lifting mechanism 56, and the workpiece unit 17, which is stored in container 102 on the platform 66 after processing, is pulled out to the lower guide rail 72b.

[0144] Furthermore, the height of the temporary placement unit 60 is adjusted using the lifting mechanism 56, and the workpiece unit 17, which is temporarily placed on the upper guide rail 72a before processing, is stored in the container 102 on the platform 66. Through this action, the workpiece unit 17 after processing is efficiently removed from the container 102 (retrieval), and the workpiece unit 17 before processing is moved into the container 102 (distribution). However, the actions involved in the transport of the workpiece unit 17 are not limited to this. In addition, the relationship between the upper guide rail 72a and the lower guide rail 72b can be changed as needed.

[0145] Figure 8(A) is a top view of the two upper guide rails 72a, etc. The upper guide rail 72a and the lower guide rail 72b located on one side in the width direction are fixed to the first side plate 62c1. In addition, the upper guide rail 72a and the lower guide rail 72b located on the other side in the width direction are fixed to the second side plate 62c2.

[0146] A first opening 62e1 extending vertically through one side of the lower plate 62b in the depth direction and a second opening 62e2 extending vertically through the other side of the lower plate 62b in the width direction are formed on one end side of the lower plate 62b. A portion of one end side of the first side plate 62c1 in the depth direction is inserted into the first opening 62e1, and a portion of one end side of the second side plate 62c2 in the depth direction is inserted into the second opening 62e2.

[0147] The bases of the first air actuator 74a and the second air actuator 74b are fixed to the lower surface of the lower plate 62b in the region adjacent to the first opening 62e1 and the second opening 62e2. A movable portion (e.g., a piston rod) of the first air actuator 74a is connected to a portion of the first side plate 62c1 inserted into the first opening 62e1. A movable portion (e.g., a piston rod) of the second air actuator 74b is connected to a portion of the second side plate 62c2 inserted into the second opening 62e2.

[0148] A first guide mechanism 76a and a second guide mechanism 76b are provided at the other end of the lower plate 62b in the depth direction. The first guide mechanism 76a includes: a guide rail fixed to the upper surface of the lower plate 62b, which is longer in the width direction; and a slider fixed to the lower side of the first side plate 62c1, which is mounted on the guide rail in a state that allows it to slide in the width direction. The second guide mechanism 76b includes: a guide rail fixed to the upper surface of the lower plate 62b; and a slider fixed to the lower side of the second side plate 62c2, which is mounted on the guide rail in a state that allows it to slide in the width direction.

[0149] Therefore, if the spacing between the first side plate 62c1 and the second side plate 62c2 is changed using the first air actuator 74a and the second air actuator 74b, the spacing between the two upper guide rails 72a can be changed while maintaining their parallel state, and the spacing between the two lower guide rails 72b can be changed while maintaining their parallel state.

[0150] That is, the first side plate 62c1, the first air actuator 74a, the first guide mechanism 76a, the second side plate 62c2, the second air actuator 74b, and the second guide mechanism 76b function as an interval adjustment mechanism 78 for adjusting the interval between the two upper guide rails 72a and the interval between the two lower guide rails 72b.

[0151] The operation of the first air actuator 74a and the second air actuator 74b is controlled by the control device 46. That is, the control device 46 controls the operation of the first air actuator 74a and the second air actuator 74b according to the size of the workpiece unit 17 (workpiece 11), thereby adjusting the interval between the two upper guide rails 72a and the interval between the two lower guide rails 72b.

[0152] For example, if the diameter of the workpiece 11 is 300 mm, a frame 15 with a width of approximately 400 mm is used. In this case, the control device 46 operates the first air actuator 74a and the second air actuator 74b in such a way that the distance 72c between the sides of the two upper guide rails 72a (the distance 72c between the sides of the two lower guide rails 72b) is slightly larger than 400 mm (e.g., a few mm).

[0153] Alternatively, for example, if the diameter of the workpiece 11 is 200 mm, a frame 15 with a width of approximately 300 mm is used. In this case, the control device 46 operates the first air actuator 74a and the second air actuator 74b in such a way that the distance 72c between the sides of the two upper guide rails 72a (and the distance 72c between the sides of the two lower guide rails 72b) is slightly larger than 300 mm (e.g., a few mm).

[0154] Figure 8 (B) is a top view showing the narrowing of the gap between the two upper guide rails 72a. Furthermore, when the gap between the two upper guide rails 72a is narrowed, the gap between the two lower guide rails 72b also narrows. Thus, by adjusting the gap between the two upper guide rails 72a and the gap between the two lower guide rails 72b according to the diameter of the workpiece 11, workpieces 11 of different sizes can be temporarily placed in the temporary storage unit 60. That is, a single temporary storage unit 60 can handle the transport of workpiece units 17 of multiple sizes.

[0155] Figure 9 (A) is a perspective view showing the upper surface of a transport vehicle 10 that travels on transport path 6 and transports the workpiece unit 17. Figure 9 (B) is a perspective view showing the bottom side of the transport vehicle 10. (See diagram below.) Figure 9 (A) and Figure 9 As shown in (B), the transport vehicle 10 has a plate-shaped frame 82 that carries various components. A pair of axles 84 are arranged at both ends of the front side of the frame 82. The axles 84 are mounted on the lower surface of the frame 82 such that one end protrudes from the side of the frame 82.

[0156] A pair of wheels (front wheels) 86 are fixed to one end of each axle 84. That is, the pair of wheels 86 are positioned at two locations separated in the width direction (vehicle width direction) of the frame 82. Additionally, a pair of wheels (rear wheels) 88 are positioned at two locations separated in the width direction at the rear end of the frame 82. The wheels 88 are, for example, casters capable of rotating 360° around a rotation axis along the height direction, and are mounted on the lower surface of the frame 82. The wheels 86 and 88 are the wheels used for the transport vehicle 10 when it travels on the transport path 6.

[0157] A drive unit 90 for driving a pair of wheels 86 is mounted at the front end of the frame 82. The drive unit 90 has a pair of electric motors 92 that are connected to the wheels 86 via axles 84, etc. The electric motors 92 have a rotating shaft (output shaft) 92a and generate power to rotate the wheels 86.

[0158] like Figure 9 As shown in (B), a pulley 94 is provided at the other end of the axle 84. A ring-shaped connecting component (not shown), such as a belt or chain, is mounted on the rotating shaft 92a of the motor 92 and the pulley 94. A power transmission mechanism is formed by the rotating shaft 92a of the motor 92, the pulley 94, and the connecting component, connecting the axle 84 and the motor 92. Thus, the power (rotational force) generated by the motor 92 is transmitted to the wheel 86, causing the wheel 86 to rotate.

[0159] The drive unit 90 independently controls the rotation direction of a pair of wheels 86 via a pair of electric motors 92. Rotating the pair of wheels 86 in the same direction causes the transport vehicle 10 to move forward or backward. Alternatively, rotating the pair of wheels 86 in opposite directions allows the transport vehicle 10 to rotate about a rotation axis along the height direction, thus controlling the direction of travel of the transport vehicle 10. Furthermore, there are no limitations on the construction of the wheels 86 and 88. For example, the wheels 86 and 88 can be made using so-called Mecanum wheels, which consist of multiple inclined, barrel-shaped (cylindrical) rotating bodies mounted on the outer peripheral surface in contact with the transport path 6.

[0160] A battery (secondary battery) 96, which supplies power to the motor 92, is connected to the drive unit 90 via power supply wiring (not shown). The battery 96 is mounted, for example, at the front end of the frame 82, and supplies power to the motor 92 to rotate the wheels 86. A lithium-ion battery or the like is used as the battery 96.

[0161] Figure 10This is an enlarged perspective view of the front end of the transport vehicle 10. A pair of terminals (power receiving terminals) 100, connected to the battery 96, are provided on the lower surface of the front end of the frame 82 via charging wiring (charging wiring) 98. The pair of terminals 100 are connected, for example, to power supply terminals located externally to the transport vehicle 10, to receive power for charging the battery 96. The details of charging the battery 96 using the terminals 100 will be described later.

[0162] like Figure 9 (A) and Figure 9 As shown in (B), a storage area 104 is provided on the lower side of the frame 82 for storing a container (box) 102 for storing workpiece units 17. The storage area 104 is surrounded by a pair of wheels 86 and a pair of wheels 88 and is located above the lower ends of the wheels 86 and 88. A container 102 capable of holding one or more workpiece units 17 is arranged in the storage area 104.

[0163] Figure 11 (A) is a perspective view showing container 102. Figure 11 (B) is a front view showing the container 102. The container 102 is, for example, formed as a hexagonal prism in plan view, and has a storage section (storage space) 102a inside that can accommodate the workpiece unit 17. The storage section 102a is connected to the external space of the container 102 by means of a slit-like opening 102b on one side of the container 102. The workpiece unit 17 is moved into the storage section 102a through the opening 102b and is moved out of the storage section 102a through the opening 102b.

[0164] like Figure 11 As shown in (B), the container 102 is configured, for example, to accommodate two different sized workpiece units 17a and 17b. The storage section 102a of the container 102 is provided with a pair of first guide rails 106 for holding the workpiece unit 17a and a pair of second guide rails 108 for holding the workpiece unit 17b.

[0165] A pair of first guide rails 106 are fixed to the upper wall 102c of the storage section 102a at predetermined intervals. Each pair of first guide rails 106 has a holding surface 106a that holds the lower surface of the workpiece unit 17a from below, and a side surface 106b that defines the horizontal position of the workpiece unit 17a. Additionally, a pair of second guide rails 108 are fixed to the bottom wall 102d of the storage section 102a at predetermined intervals. Each pair of second guide rails 108 has a holding surface 108a that holds the lower surface of the workpiece unit 17b from below. Furthermore, the horizontal position of the workpiece unit 17b is defined by the side surface inside the container 102.

[0166] The spacing between the pair of first guide rails 106 is narrower than the spacing between the pair of second guide rails 108. Therefore, the pair of first guide rails 106 can hold a workpiece unit 17a that is smaller than the workpiece unit 17b held by the second guide rails 108. For example, a workpiece 11 with a diameter of approximately 200 mm (8 inches) can be held by the pair of first guide rails 106, and a workpiece 11 with a diameter of approximately 300 mm (12 inches) can be held by the pair of second guide rails 108.

[0167] As described above, container 102 is not configured to hold multiple workpiece units 17 of the same type (same size). In this respect, the function and purpose of container 102 are significantly different from those of box 30, which is capable of holding multiple workpiece units 17 of the same type.

[0168] However, there are no restrictions on the construction of the container 102 and the storage section 102a. For example, the storage section 102a may sometimes be configured to hold one or more workpiece units 17. Alternatively, the storage section 102a may also be configured to hold multiple workpiece units 17 of the same type.

[0169] When the workpiece unit 17 is transported via the transport vehicle 10, such as Figure 9 As shown in (A), container 102 is stored in storage area 104. At this time, the lower surface of container 102 is positioned above the lower end of wheel 86 or the lower end of wheel 88. Therefore, container 102 will not come into contact with transport path 6 during the movement of transport vehicle 10.

[0170] A lifting unit (lifting mechanism) 110 is provided on the upper surface of the frame 82 located above the storage area 104 to suspend and raise the container 102. The lifting unit 110 lowers the container 102 stored in the storage area 104 and places it in a designated placement area. In addition, the lifting unit 110 raises the container 102 placed in the designated placement area and stores the container 102 in the storage area 104.

[0171] Figure 12 This is a perspective view of a transport vehicle 10 showing the container 102 placed in the loading area A. The lifting unit 110 includes: a suspension member 112, one end (lower end) of which is connected to the container 102; and a drive mechanism 114 that winds and delivers the suspension member 112. Furthermore, the loading area A is, for example, the upper surface of the loading platform 66 of the loader / unloader 8 (second loading area A2, see reference). Figure 3 ).

[0172] like Figure 12As shown, the lifting unit 110 has four suspension members 112. For example, a belt with a specified width is used as one of the suspension members 112. The front ends (lower ends) of the four suspension members 112 are respectively connected to four positions on the upper surface side of the container 102.

[0173] When the suspension member 112 is delivered by the drive mechanism 114 while the container 102 is stored in the storage area 104, the container 102 descends and is placed in the placement area A. Alternatively, when the suspension member 112 is wound by the drive mechanism 114 while the container 102 is placed in the placement area A, the container 102 rises and is stored in the storage area 104.

[0174] When using a belt as a suspension component 112, such as Figure 12 As shown, it is preferable to pre-adjust the orientation of the belt relative to the container 102 in the direction of the workpiece unit 17 as it is moved out of the storage section 102a, along the width direction of the belt. This prevents the container 102 from easily swaying in the width direction of the belt, thus reducing the likelihood of the workpiece unit 17 flying out of the opening 102b during the lifting and lowering of the container 102.

[0175] Furthermore, the orientation of the belt relative to the container 102 can be adjusted so that the width direction of the belt is aligned with the orientation of the workpiece unit 17 through the opening 102b when it is moved into the receiving section 102a. In this embodiment, the belt and the container 102 are connected in such a way that the width direction of the belt is perpendicular to the surface containing the opening 102b of the container 102. Additionally, as the suspension member 112, a component other than the belt, such as a wire rope capable of winding and feeding, can also be used.

[0176] like Figure 9 As shown in (B), a plurality of contact members 116 are provided on the lower surface side of the frame 82, which contact the upper surface side of the container 102. The plurality of contact members 116 are each formed into a column shape of approximately the same height and are fixed to the frame 82 in such a way that they protrude downward from the lower surface of the frame 82. When the container 102 is stored in the storage area 104, the upper surface side of the container 102 contacts the lower ends of the plurality of contact members 116, thereby pushing each contact member 116 upward.

[0177] The contact member 116 is formed, for example, by an elastic member that undergoes elastic deformation when pushed by the container 102. That is, the contact member 116 is made of an elastic body that deforms along the shape of the upper surface side of the container 102 when pushed by the container 102 stored in the storage area 104, and generates a restoring force that pushes the container 102 downward.

[0178] When the contact component 116 uses an elastic component, the impact when the container 102 comes into contact with the contact component 116 is mitigated, and the container 102 or the workpiece unit 17 inside the container 102 is less likely to break. In addition, when the transport vehicle 10 travels on the transport path 6, the contact component 116 also acts as a buffer component, so that the vibration of the frame 82 is less likely to be transmitted to the container 102 or the workpiece unit 17.

[0179] As the contact member 116, a cylindrical component made of rubber (polyurethane rubber, silicone rubber, etc.), sponge, etc., can be used, for example. In particular, by using a contact member 116 made of rubber with high frictional force acting between it and the container 102, it is possible to suppress the positional displacement of the container 102 during transport. In addition, the contact member 116 does not necessarily need to be entirely made of elastic material; at least the area of ​​the contact member 116 that contacts the container 102 (the lower end) needs to be made of elastic material.

[0180] Furthermore, it is preferable that the contact member 116 contacts the upper surface of the container 102 at three or more locations. In this embodiment, as... Figure 9 As shown in (B), three columnar contact members 116 are provided on the frame 82. In this case, the upper surface of the container 102 is arranged along the plane containing the lower ends of the three contact members 116, so the container 102 is not easily tilted. However, the shape, number, arrangement, and other conditions of the contact members 116 can be arbitrarily changed. For example, a pair of linear (strip-like) contact members 116 arranged approximately parallel to each other can be provided on the frame 82.

[0181] In addition, to prevent vibrations of the frame 82 from being easily transmitted to the container 102, the container 102 can be connected to the suspension component 112 by means of an elastic component. Figure 13 This is a perspective view of a transport vehicle 10 in which the container 102 is connected to the suspension member 112 via an elastic member (telescopic member) 118. Additionally, in this case, the contact member 116 can be omitted.

[0182] An elastic member 118 is provided between the front end (lower end) of the suspension member 112 and the container 102. The elastic member 118 is a member that extends and retracts along the length of the suspension member 112 when the suspension member 112 sways. For example, it is a retractable elastic body such as rubber or a spring. Alternatively, a retractable member such as a telescopic joint can also be used as the elastic member 118.

[0183] When the container 102 is stored in the storage area 104, the winding amount of the suspension member 112 is adjusted so that the upper surface of the container 102 does not contact the frame 82 or the contact member 116. Therefore, even if the frame 82 vibrates, the vibration will not be directly transmitted to the container 102. Furthermore, vibrations transmitted from the frame 82 via the lifting unit 110 and the suspension member 112 are mitigated by the expansion and contraction of the elastic member 118, thus making them less likely to be transmitted to the container 102. In this way, the elastic member 118 functions as a shock-absorbing component.

[0184] However, with the contact member 116 provided on the lower surface of the frame 82, the amount of winding of the suspension member 112 can be adjusted so that the container 102 is stored in the storage area 104 while in contact with the contact member 116. In this case, the transmission of vibration from the frame 82 to the container 102 is mitigated by the contact member 116, and the transmission of vibration from the suspension member 112 to the container 102 is mitigated by the elastic member 118.

[0185] A cover 120 is provided on the lower side of the rear end of the frame 82. The cover 120 covers the opening 102b of the container 102 (see reference 102b) when the container 102 is stored in the storage area 104. Figure 11 (A) Covering. When the opening 102b is covered by the cover 120, it can prevent foreign objects from entering the storage part 102a of the container 102 during the movement of the transport vehicle 10, and can prevent foreign objects from adhering to the workpiece unit 17.

[0186] Furthermore, even if the container 102 tilts or vibrates while the conveyor 10 is in motion, the cover 120 prevents the workpiece unit 17 from flying out of the opening 102b. The details of the structure and operation of the cover 120 will be described later (see [reference]). Figure 17 , Figure 18 (A) Figure 18 (B)

[0187] A pair of first sensors 122 are provided at the front and rear ends of the frame 82. That is, the pair of first sensors 122 are located at two positions separated in the length direction (vehicle length direction) of the frame 82. In addition, a pair of second sensors 124 are provided at both ends of the frame 82. That is, the pair of second sensors 124 are located at two positions separated in the width direction (vehicle width direction) of the frame 82.

[0188] The first sensor 122 and the second sensor 124 are installed opposite to the transport path 6 traveled by the transport vehicle 10, and detect the markers set on the transport path 6. Based on the detection results of the markers by the first sensor 122 and the second sensor 124, the movement, steering, and stopping of the transport vehicle 10 are controlled. The detailed control of the transport vehicle 10 using the first sensor 122 and the second sensor 124 will be described later.

[0189] The specific positions of the first sensor 122 and the second sensor 124 are adjusted according to the specifications of the transport path 6 traveled by the transport vehicle 10. For example, the pair of first sensors 122 are respectively installed near the center of the width direction of the frame 82 at the front end and the rear end of the frame 82. In addition, the pair of second sensors 124 are respectively installed near the center of the length direction of the frame 82 at both ends of the frame 82.

[0190] Additionally, a pair of second sensors 124 can be fixed to the frame 82 in a parallel arrangement along a straight line passing through the pair of wheels 86. For example, the pair of second sensors 124 can be positioned on the outside of the pair of wheels 86 such that they clamp the pair of wheels 86 in the width direction of the frame 82. Alternatively, the pair of second sensors 124 can be positioned on the inside of the pair of wheels 86 such that they are clamped by the pair of wheels 86 in the width direction of the frame 82.

[0191] Thus, by arranging a pair of second sensors 124 on a straight line passing through a pair of wheels 86, the pair of second sensors 124 can detect a marker simultaneously with the passing of the wheel 86. Therefore, if the transport vehicle 10 is turned or stopped at the moment the marker is detected, the movement of the transport vehicle 10 can be properly controlled without any correction.

[0192] On the other hand, when the pair of second sensors 124 are separated from the straight line passing through the pair of wheels 86, in addition to using the timing of detecting the mark, the distance between the pair of second sensors 124 and the pair of wheels 86 (pair of axles 84), the speed of the transport vehicle 10, etc., can be used to control the steering and stopping timing of the transport vehicle 10.

[0193] In addition, such as Figure 10 As shown, a third sensor 126 for detecting collisions between the transport vehicle 10 and obstacles is provided at the front end of the frame 82. For example, a pair of third sensors 126 are installed on both sides of the front end of the frame 82. As the third sensor 126, a push-button switch is used, for example.

[0194] When the front end of the transport vehicle 10 collides with an obstacle, the third sensor 126 activates to detect the collision. Furthermore, when the third sensor 126 detects the collision, the transport vehicle 10 stops operating. Additionally, there are no limitations on the construction or type of the third sensor 126, as long as it can detect the collision of the transport vehicle 10.

[0195] Sometimes the transport vehicle 10 is covered by a soft outer cover, for example, capable of reducing impacts caused by collisions. In this case, when the outer cover covering the front end of the transport vehicle 10 collides with an obstacle, the outer cover deforms and comes into contact with the third sensor 126, thereby detecting the collision of the transport vehicle 10.

[0196] like Figure 9 (A) and Figure 9 As shown in (B), a plate-shaped support platform 128 fixed to the frame 82 is provided on the upper side of the lifting unit 110. A control unit (control unit) 130 for controlling the movement of the transport vehicle 10 is fixed on the upper surface of the support platform 128. The control unit 130 is connected to each component of the transport vehicle 10 (drive unit 90, lifting unit 110, first sensor 122, second sensor 124, third sensor 126, etc.) and controls the movement of each component.

[0197] The control unit 130 is, for example, a computer, which includes a processing device such as a CPU (Central Processing Unit), a main storage device such as DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as flash memory. The processing device and the like are operated according to software stored in the auxiliary storage device, thereby realizing the function of the control unit 130.

[0198] Additionally, a receiver 132 and a transmitter 134 are fixed on the support platform 128. The receiver 132 receives signals (information) from the outside and transmits them to the control unit 130, while the transmitter 134 transmits the signals (information) received from the control unit 130 to the outside. The receiver 132 and the transmitter 134 are respectively connected to the control unit 130.

[0199] Receiver 132 receives, for example, signals from control unit 12 of transport system 2 and transmits them to control unit 130. Control unit 130 controls the operation of transport vehicle 10 based on the signals received from receiver 132. Additionally, control unit 130 generates notification signals and transmits them to transmitter 134. Transmitter 134 transmits the signals received from control unit 130 to control unit 12 of transport system 2 (see reference 134). Figure 2 ).

[0200] In addition, each component of the transport vehicle 10 (lifting unit 110, first sensor 122, second sensor 124, third sensor 126, control unit 130, receiver 132, transmitter 134, etc.) is connected to the battery 96 via power supply wiring and operates by means of power supplied from the battery 96.

[0201] Figure 14 (A) is a top view showing a structural example of the lifting unit 110. Figure 14 (B) is a side view showing a structural example of the lifting unit 110. As described above, the lifting unit 110 has a drive mechanism 114 for winding and feeding multiple suspension components 112. The drive mechanism 114 includes a motor 142 having a rotating shaft (output shaft) 142a.

[0202] The electric motor 142 rotates the rotating shaft 142a, thereby generating power for winding and delivering the suspension component 112. A first rotating shaft (first axis) 144a and a second rotating shaft (second axis) 144b, which are arranged substantially parallel to each other, are provided at two positions where the electric motor 142 is clamped.

[0203] A pulley 146 is provided at one end of the first rotating shaft 144a. A ring-shaped connecting member 148, such as a belt or chain, is mounted on the rotating shaft 142a of the motor 142 and the pulley 146. A power transmission mechanism is formed by the rotating shaft 142a of the motor 142, the pulley 146, and the connecting member 148, connecting the motor 142 and the first rotating shaft 144a. On the other hand, no pulley or the like is provided at one end of the second rotating shaft 144b for connecting to the motor 142.

[0204] A pulley 150a is provided at one end of the first rotating shaft 144a, and a pulley 150b with the same diameter as the pulley 150a is provided at the other end of the second rotating shaft 144b. A ring-shaped connecting component 152, such as a belt or chain, is mounted on the pulleys 150a and 150b. The pulleys 150a and 150b, along with the connecting component 152, constitute a power transmission mechanism that connects the first rotating shaft 144a and the second rotating shaft 144b.

[0205] At both ends of the first rotating shaft 144a, cylindrical reels 154a for winding the suspension member 112 are fixed. Additionally, cylindrical rollers 156a, which support the suspension member 112, are rotatably arranged at two positions outside (opposite to the motor 142) and below each reel 154a. The rotation axis of each roller 156a is substantially parallel to the first rotating shaft 144a.

[0206] On the other hand, cylindrical reels 154b for winding the suspension member 112 are fixed at both ends of the second rotating shaft 144b. Additionally, cylindrical rollers 156b supporting the suspension member 112 are rotatably arranged at two positions, one on the outer side (opposite to the motor 142) and one below the reels 154b. The rotation axis of each roller 156b is substantially parallel to the second rotating shaft 144b.

[0207] The base end of a suspension member 112 is fixed to both reels 154a and 154b. The suspension member 112 fixed to reel 154a hangs downward while in contact with the outer side of roller 156a. Similarly, the suspension member 112 fixed to reel 154b hangs downward while in contact with the outer side of roller 156b.

[0208] In addition, such as Figure 14 As shown in (B), the suspension member 112 fixed to the reel 154a passes over the upper side of the reel 154a and is supported on the roller 156a. On the other hand, the suspension member 112 fixed to the reel 154b passes over the lower side of the reel 154b and is supported on the roller 156b.

[0209] When the rotating shaft 142a of the motor 142 is directed in the first direction ( Figure 14 When rotating in the direction indicated by arrow C1 in (B), the reel 154a fixed to the first rotating shaft 144a moves in the direction that sends the suspension component 112 out ( Figure 14 (B) rotates in the direction indicated by arrow C2. As a result, the suspension component 112 is fed out from the reel 154a by means of roller 156a.

[0210] Additionally, the torque of the first rotating shaft 144a is transmitted to the second rotating shaft 144b via the connecting member 152, and the reel 154b fixed to the second rotating shaft 144b is directed in the direction of sending out the suspension member 112. Figure 14 (B) rotates in the direction indicated by arrow C3. As a result, the suspension component 112 is fed out from the reel 154b by means of the roller 156b.

[0211] On the other hand, when the rotating shaft 142a of the motor 142 is directed in a second direction opposite to the first direction ( Figure 14 When rotating in the direction indicated by arrow D1 in (B), the reel 154a fixed to the first rotating shaft 144a rotates in the direction that the suspension component 112 is wound around ( Figure 14 (B) rotates in the direction indicated by arrow D2. As a result, the suspension component 112 is wound onto the reel 154a by means of roller 156a.

[0212] Additionally, the torque of the first rotating shaft 144a is transmitted to the second rotating shaft 144b via the connecting member 152, and the reel 154b fixed to the second rotating shaft 144b is wound in the direction of the suspension member 112 ( Figure 14 (B) rotates in the direction indicated by arrow D3. As a result, the suspension component 112 is wound onto the reel 154b by means of the roller 156b.

[0213] When each suspension component 112 is delivered from the drive mechanism 114, the container 102 connected to the front end of the suspension component 112 descends. This allows the container 102 to be placed in the placement area A (see reference). Figure 12 Additionally, when each suspension component 112 is wound by the drive mechanism 114, the container 102 connected to the front end of the suspension component 112 rises. This allows the container 102 to be stored in the storage area 104 of the transport vehicle 10 (see reference). Figure 9 (A)).

[0214] Alternatively, a lifting unit 110 equipped with a different drive mechanism than the drive mechanism 114 described above can also be used. Figure 15 (A) is a top view showing another structural example of the lifting unit 110. Figure 15 (B) is a side view showing another structural example of the lifting unit 110. Figure 15 (A) and Figure 15 The lifting unit 110 shown in (B) is equipped with a drive mechanism 162 instead of the drive mechanism 114 described above.

[0215] The drive mechanism 162 includes a motor 164 having a rotating shaft (output shaft) 164a, and a first rotating shaft (first axis) 166a, a second rotating shaft (second axis) 166b, and a third rotating shaft (third axis) 166c arranged substantially parallel to each other. The first rotating shaft 166a is disposed between the second rotating shaft 166b and the third rotating shaft 166c.

[0216] The electric motor 164 is, for example, disposed between the first rotating shaft 166a and the second rotating shaft 166b, to rotate the rotating shaft 164a, thereby generating power for winding and delivering the suspension component 112. However, the electric motor 164 may also be disposed between the first rotating shaft 166a and the third rotating shaft 166c.

[0217] A pulley 168 is provided at one end of the first rotating shaft 166a. A ring-shaped connecting component 170, such as a belt or chain, is mounted on the rotating shaft 164a of the motor 164 and the pulley 168. A power transmission mechanism is formed by the rotating shaft 164a of the motor 164, the pulley 168, and the connecting component 170, connecting the motor 164 and the first rotating shaft 166a.

[0218] A plurality of cylindrical reels 172 for winding the suspension components 112 are fixed to the first rotating shaft 166a. Specifically, a pair of reels 172 are fixed to both ends of the first rotating shaft 166a. Two suspension components 112 are fixed to each reel 172 and wound in the same direction.

[0219] Figure 16 (A) is a top view showing reel 172. Figure 16 (B) is a side view showing the reel 172. The lifting unit 110 has a cylindrical fixing member 174 for fixing the suspension member 112 to the reel 172, through which the two suspension members 112 are combined and fixed to the reel 172.

[0220] like Figure 16 As shown in (B), a groove (recess) 172a is provided on a portion of the outer periphery of the reel 172 along the rotation axis (i.e., the first rotation axis 166a) of the reel 172. The inner surface of the groove 172a is formed into a curved surface. In addition, the two ends of the groove 172a reach the two ends in the rotation axis direction of the reel 172. The two suspension members 112 are arranged in the same orientation such that their base ends overlap with the groove 172a.

[0221] The fixing member 174 has a curved outer peripheral surface that corresponds to the shape of the inner surface of the groove 172a. The fixing member 174 is inserted into the groove 172a with the base ends of the two suspension members 112 overlapping with the groove 172a, so that the base ends of the two suspension members 112 are pressed towards the inner surface of the groove 172a. Thus, the base ends of the two suspension members 112 are clamped and fixed to the reel 172 by the inner surface of the groove 172a and the outer peripheral surface of the fixing member 174.

[0222] In addition, such as Figure 16 As shown in (A), a pair of protrusions (protrusions) 172b are provided on the outer periphery of the reel 172 in such a way that the two suspension members 112 fixed to the reel 172 are clamped in the width direction. The pair of protrusions 172b function as guides to prevent the suspension members 112 from shifting in the width direction. By rotating the reel 172 configured in this way, the two suspension members 112 can be wound or delivered.

[0223] like Figure 15 (A) and Figure 15 As shown in (B), one of the two suspension members 112 fixed to the reel 172 hangs downward while in contact with the second rotation shaft 166b. The other of the two suspension members 112 fixed to the reel 172 hangs downward while in contact with the third rotation shaft 166c.

[0224] The second rotating shaft 166b and the third rotating shaft 166c are supported in a manner that allows them to rotate easily with an externally applied force, and their outer peripheral surfaces are in contact with the suspension member 112. A pair of guides 176 are provided on both sides of the areas of the second rotating shaft 166b and the third rotating shaft 166c that are in contact with the suspension member 112 to prevent the suspension member 112 from shifting in the width direction.

[0225] When the rotating shaft 164a of the motor 164 is directed in the first direction ( Figure 15 When the reel 172 rotates in the direction indicated by arrow E1 in (B), it moves in the direction that sends the suspension component 112 out ( Figure 15 (B) and Figure 16 (B) rotates in the direction indicated by arrow E2. As a result, the two suspension components 112 are sent out from the reel 172 via the second rotating shaft 166b and the third rotating shaft 166c, and as a result, the container 102 connected to the suspension components 112 descends.

[0226] On the other hand, when the rotation shaft 164a of the motor 164 is directed in a second direction opposite to the first direction ( Figure 15 When rotating in the direction indicated by arrow F1 in (B), the reel 172 winds in the direction that the suspension component 112 is wound around ( Figure 15 (B) and Figure 16 (B) rotates in the direction indicated by arrow F2. As a result, the two suspension components 112 are wound onto the reel 172 by means of the second rotation axis 166b and the third rotation axis 166c, and as a result, the container 102 connected to the suspension components 112 rises.

[0227] As mentioned above, Figure 15 The drive mechanism 162 shown in (A) has two reels 172 fixed on the first rotating shaft 166a, and two suspension members 112 are fixed on each of the two reels 172. Therefore, the feeding and winding of the four suspension members 112 are controlled by the rotation of the first rotating shaft 166a. As a result, the number of components constituting the drive mechanism 114 can be reduced, thereby achieving weight reduction of the transport vehicle 10, reducing the possibility of failure, and reducing costs.

[0228] By using the lifting unit 110 as described above, the container 102 that houses the workpiece unit 17 can be raised and lowered between the storage area 104 and the placement area A located below the storage area 104. The details of the lifting unit 110 can be modified within a range that allows the container 102 to be raised and lowered appropriately.

[0229] Additionally, the second rotating shaft 166b and the third rotating shaft 166c can be fixed in a non-rotating state. In this case, the suspension member 112 moves while sliding on the outer circumferential surface of the second rotating shaft 166b or the third rotating shaft 166c, and is fed from or wound onto the reel 172.

[0230] Figure 17 This is an enlarged perspective view showing the cover 120. The cover 120 is disposed at the rear end of the lower surface side of the frame 82, opposite to one side (rear) of the container 102 stored in the storage area 104. The cover 120 includes a lid 182 that is rotatably connected to the frame 82. The lid 182 is formed to cover the opening 102b of the container 102 (see reference). Figure 18 The shape and size of (B). In addition, a plurality of contact portions 184 are fixed on the upper part of the cover portion 182 in such a way as to contact the upper surface side of the container 102.

[0231] As the container 102 rises toward the storage area 104, the upper surface of the container 102 contacts the lower end of the contact portion 184, pushing the contact portion 184 upward. As a result, the lid 182 moves (rotates) toward the container 102, covering the opening 102b of the container 102.

[0232] Figure 18 (A) is a side view showing the state of the cover 120 in storage area 104 without container 102 stored. Figure 18 (B) is a side view showing the state in which the container 102 is stored in the storage area 104. A fixing block 186 is fixed to the lower surface of the frame 82. A connecting block (L-shaped block) 188, which is L-shaped when viewed from the width direction (vehicle width direction) of the frame 82, is rotatably connected to the fixing block 186.

[0233] The connecting block 188 includes a connecting portion 188a on the upper side (frame 82 side) and a fixing portion 188b located below the connecting portion 188a. A through hole extending along the width direction of the frame 82 is provided in the connecting portion 188a, and a connecting shaft 190 fixed to the fixing block 186 is inserted into this through hole. Thus, the connecting block 188 is connected to the fixing block 186 in a state where it can rotate around the connecting shaft 190.

[0234] A cover 182 is fixed to the storage area 104 side (front side) of the fixing part 188b. In addition, the connecting shaft 190 inserted into the through hole is approximately parallel to the width direction of the frame 82, so the cover 182 and the connecting block 188 rotate together along a plane that is approximately perpendicular to the width direction of the frame 82.

[0235] The cover 182 has a plate-shaped member 182a that is fixed to the fixing part 188b of the connecting block 188. A flexible member 182b is provided on the surface of the plate-shaped member 182a on the storage area 104 side (front side). The flexible member 182b is shaped and sized to cover the entire opening 102b of the container 102.

[0236] Additionally, a contact portion 184 is disposed on the storage area 104 side (front side) of the plate-shaped member 182a. The contact portion 184 includes, for example, a fixing member 184a, which is fixed to the plate-shaped member 182a at a position above the flexible member 182b; and a roller 184b, which is supported on the storage area 104 side (front side) of the fixing member 184a.

[0237] The roller 184b is formed of an elastic component such as rubber and is supported on the fixed member 184a in such a way that it can rotate about a rotation axis that is substantially parallel to the width direction of the frame 82. Furthermore, the lower end of the roller 184b is positioned below the lower end of the fixed member 184a. Therefore, when the upper surface of the container 102 is in contact with the roller 184b, the roller 184b also rotates according to the rotation of the cover 182.

[0238] For example, when container 102 rises toward storage area 104, the upper surface of container 102 contacts roller 184b of contact portion 184, pushing contact portion 184 upward. Then, the lower end of cover 120 moves toward container 102 about connecting shaft 190. Figure 18 Rotating in the direction indicated by arrow G in (B), the surface of the storage area 104 side (front side) of the plate-shaped member 182a is approximately parallel to the lower surface of the frame 82. Furthermore, the flexible member 182b of the cover 182 contacts one side (rear part) of the container 102 to seal the opening 102b.

[0239] Furthermore, with the opening 102b of the container 102 stored in the storage area 104 exposed, foreign objects such as dust may enter the storage section 102a of the container 102. In particular, during the movement of the transport vehicle 10, due to static electricity generated by the friction between the transport path 6 and the wheels 88, there is a high possibility that foreign objects, which are rarely present in the cleanroom where the transport path 6 is installed, will be attracted by the transport vehicle 10 and enter the storage section 102a.

[0240] Therefore, in this embodiment, when the container 102 is stored in the storage area 104, the opening 102b of the container 102 is covered by the cover 120, so that foreign objects will not enter the storage section 102a of the container 102 while the transport vehicle 10 is moving. In addition, even if the container 102 tilts or vibrates while the transport vehicle 10 is moving, the workpiece unit 17 will not fly out of the container 102.

[0241] On the other hand, during the lifting of the container 102 by the lifting unit 110, static electricity is not generated due to the friction between the transport road 6 and the wheels 88, and foreign objects are not rolled up due to the movement of the transport vehicle 10. Therefore, even if the opening 102b of the container 102 is not covered during the lifting of the container 102, the possibility of foreign objects entering the storage section 102a is low.

[0242] Furthermore, a flexible member 182b is provided in the area of ​​the cover 120 corresponding to the opening 102b. The flexible member 182b deforms, for example, upon collision with the workpiece unit 17 housed in the container 102, thereby mitigating the impact acting on the workpiece unit 17. In other words, the flexible member 182b functions as a cushioning member. Through this flexible member 182b, the workpiece 11 contained in the workpiece unit 17 is less likely to break.

[0243] There are no restrictions on the material or construction of the soft component 182b. For example, a soft component 182b that can mitigate impact to the extent that the workpiece 11 of the workpiece unit 17 is not damaged can be used. More specifically, as the soft component 182b, components made of sponge, rubber, cotton, cloth, etc., expanded polystyrene, bubble cushioning materials, etc. can be used.

[0244] In particular, the sponge is soft and easily deformable, so when the sponge is used as the soft part 182b, it can effectively cushion the impact acting on the workpiece unit 17. In addition, when the sponge is used as the soft part 182b, the soft part 182b deforms appropriately along the shape of the side of the container 102 to reliably seal the opening 102b.

[0245] Adjust the weight of each part of the cover 120 so that, as Figure 18 As shown in (A), when container 102 is lowered from storage area 104, cover 120, by its own weight, causes its lower end to move away from storage area 104 (as shown in (A)). Figure 18 The direction of rotation is opposite to that indicated by arrow G in (B). As a result, when the container 102 is not stored in the storage area 104, the surface of the plate member 182a on the storage area 104 side (front side) is inclined relative to the lower surface of the frame 82.

[0246] Furthermore, there are no limitations on the number and arrangement of the covers 120. For example, in addition to the rear end of the frame 82, covers 120 that contact the sides of the container 102 can also be provided at the front end of the frame 82. In this case, when the container 102 is stored in the storage area 104, the two sides (front and rear) of the container 102 are held by a pair of covers 120. This suppresses the shaking (vibration) of the container 102. In addition, in this case, it is particularly easy to suppress the shaking (vibration) of the container 102 in the longitudinal direction (front-back direction) of the frame 82.

[0247] Alternatively, covers 120 can be provided at the front, rear, and side ends of the frame 82. In this case, the four sides (front, rear, and side) of the container 102 stored in the storage area 104 contact the covers 120. This suppresses the shaking (vibration) of the container 102. Furthermore, in this case, it is particularly easy to suppress the shaking (vibration) of the container 102 in both the longitudinal (front-to-back) and width directions of the frame 82.

[0248] When the container 102 is raised or lowered, the rotation of the motor 142 and the like in the lifting unit 110 is controlled by the control unit 130. Figure 19 (A) is a side view showing the transport vehicle 10 when the container 102 stored in storage area 104 is placed in placement area A. When the container 102 is placed in placement area A, the rotation direction and speed of the motor 142 are controlled so that the suspension member 112 is delivered from the drive mechanism 114 at an arbitrary speed. For example, the control unit 130 controls the current value of the motor 142 in a way that maintains the speed of the motor 142.

[0249] Figure 19 (B) is a graph showing the current value of motor 142 when container 102 descends. When container 102 descends and reaches the placement area A, container 102 is supported from below in placement area A. As a result, the load acting on the rotating shaft 142a of motor 142 is reduced, and the current value of motor 142 decreases.

[0250] The control unit 130 stops the rotation of the motor 142 based on the change in the current value of the motor 142 when the container 102 is placed in the placement area A. For example, a predetermined threshold is pre-stored in the control unit 130, and the control unit 130 compares the threshold value with the current value of the motor 142. If the current value of the motor 142 is below the threshold value (or less than the threshold value), the control unit 130 stops the rotation of the motor 142. Thus, the placement of the container 102 into the placement area A is completed.

[0251] Figure 20(A) is a side view showing the transport vehicle 10 storing the container 102 placed in the placement area A in the storage area 104. When storing the container 102 in the storage area 104, the rotation direction and speed of the motor 142 are controlled such that the suspension member 112 is wound around the drive mechanism 114 at an arbitrary speed. For example, the control unit 130 controls the current value of the motor 142 in a way that maintains the speed of the motor 142.

[0252] Figure 20 (B) is a graph showing the current value of the motor 142 when the container 102 rises. When the container 102 rises and reaches the storage area 104, the container 102 is pushed against a plurality of contact parts 116 provided on the lower surface side of the frame 82. As a result, the load acting on the rotating shaft 142a of the motor 142 increases, and the current value of the motor 142 increases.

[0253] The control unit 130 stops the rotation of the motor 142 based on the change in the current value of the motor 142 when the container 102 comes into contact with the contact member 116. For example, a predetermined threshold is pre-stored in the control unit 130, and the control unit 130 compares this threshold with the current value of the motor 142. Furthermore, if the current value of the motor 142 is above the threshold (or exceeds the threshold), the control unit 130 stops the rotation of the motor 142. Thus, the storage of the container 102 into the storage area 104 is completed.

[0254] As described above, since the operation of the motor 142, which raises and lowers the container 102, is controlled based on the current value of the motor 142, there is no need to install a sensor for detecting the container 102 in the storage area 104 or the loading area A. This simplifies the construction of the transport vehicle 10 or the loading area A, etc. Furthermore, the weight of the transport vehicle 10 is also reduced.

[0255] However, there are no limitations on the control method for the motor 142. For example, a sensor (such as a push-button switch) can be provided on the lower surface of the frame 82 or the upper surface of the mounting area A to detect the presence of the container 102. In this case, when the container 102 is detected by the sensor, the control unit 130 stops the rotation of the motor 142. Alternatively, both sensor-based detection and current-based detection of the motor 142 can be used together.

[0256] Additionally, when a container 102 is detected only on the loading area A side (e.g., the loader / unloader 8 side), the control unit 12 of the conveying system 2 (refer to...) Figure 2After being notified from the placement area A that container 102 has been placed in placement area A, an instruction is given to the transport vehicle 10 to stop the rotation of motor 142. Then, the control unit 130 of the transport vehicle 10 stops the rotation of motor 142.

[0257] In contrast, when the transport vehicle 10 detects that a container 102 is placed in the loading area A as described above, the control unit 130 of the transport vehicle 10 stops the rotation of the motor 142 based on its own judgment without waiting for instructions from the control unit 12 of the transport system 2. This reduces the time interval between the container 102 being placed in the loading area A and the motor 142 stopping its rotation.

[0258] Furthermore, the lifting speed of container 102 may not be constant. For example, the rotational speed of motor 142 can be reduced before container 102 is placed in placement area A or stored in storage area 104, thereby slowing down container 102. This mitigates the impact when container 102 comes into contact with placement area A or contact member 116. In this case, control unit 130 can monitor the height of container 102, for example, based on the rotational speed of motor 142.

[0259] When container 102 is placed in placement area A, control unit 130 generates a signal indicating that placement of container 102 is complete, and sends it from transmitter 134 to control unit 12 of transfer system 2. Similarly, when container 102 is stored in storage area 104, control unit 130 generates a signal indicating that storage of container 102 is complete, and sends it from transmitter 134 to control unit 12 of transfer system 2 (see reference). Figure 2 Alternatively, these signals can also be sent to processing device 4.

[0260] Figure 21 This is a perspective view showing the appearance of the processing device 4 and the conveying path 6. Figure 22 This is a perspective view showing the internal structure of the processing device 4. Additionally, in Figure 21 In this context, function blocks are used to represent a portion of the constituent elements. For example... Figure 21 and Figure 22 As shown, the processing device 4 has a base 202 that supports each of the constituent elements.

[0261] A recess 202a is formed at the corner of the base 202, and a lifting platform 204, which is raised and lowered by a lifting mechanism (not shown), is disposed in the recess 202a. The container 102 of the transport vehicle 10 is placed in the placement area A on the upper surface of the lifting platform 204. In addition, a plurality of position limiting members (not shown) are provided on the upper surface of the lifting platform 204 to define the horizontal position of the container 102. The container 102 descending from the transport vehicle 10 is placed in the placement area A defined by the plurality of position limiting members.

[0262] Each position-limiting component, for example, has a curved guide surface that guides the descending container 102 toward the placement area A, and is fixed to a position on the lifting platform 204 corresponding to the side of the container 102. When the container 102 is descended toward the lifting platform 204, the container 102 is guided by the guide surfaces of each position-limiting component. Therefore, even if the container 102 sways in the horizontal direction, the container 102 can be placed in the placement area A.

[0263] For example, a storage area is formed in a region below the loading area A of the lifting platform 204, which can temporarily store the processed workpiece unit 17. The processed workpiece unit 17, after being processed by the processing device 4, is stored in this storage area until preparations are made for its transfer to the container 102 of the transport vehicle 10. In addition, sometimes, in addition to the storage area, an irradiation unit for irradiating ultraviolet light, a detection unit for detecting the position of notches, and a barcode reading unit are also provided in the region below the loading area A of the lifting platform 204.

[0264] A recess 202b, elongated in the X2 axis direction (front-back direction, machining feed direction), is formed on the side of the recess 202a. A ball screw-type X-axis movement mechanism (machining feed unit) 206, which moves an X-axis moving worktable (not shown) in the X2 axis direction, is disposed within the recess 202b. A worktable cover 206a is disposed above the X-axis moving worktable. Furthermore, corrugated dust and drip protectors 206b are installed at the front and rear of the worktable cover 206a.

[0265] A chuck table 208 for holding the workpiece 11 is arranged on the upper part of the X-axis moving table, exposed from the table cover 206a. The chuck table 208 is connected to a rotary drive source (not shown) such as an electric motor and rotates about a rotation axis that is substantially parallel to the Z2 axis direction (vertical direction, feed direction). In addition, the chuck table 208 moves in the X2 axis direction (machining feed) via the aforementioned X-axis moving mechanism 206.

[0266] The upper surface of the chuck table 208 serves as a holding surface 208a for holding the workpiece 11 across the belt 13. The holding surface 208a is connected to a suction source (not shown) via suction paths (not shown) formed inside the chuck table 208. Furthermore, four clamps 210 are provided around the chuck table 208 to secure the frame 15 supporting the workpiece 11 from all four sides.

[0267] Above the recess 202b, a pair of guide rails 212 are provided, which approach and move away while maintaining a state parallel to the Y2 axis direction (left-right direction, indexing feed direction). The pair of guide rails 212 each have a support surface from the lower support frame 15 and a side surface that is approximately perpendicular to the support surface, and clamp the workpiece unit 17 (frame 15) pulled out of the container 102 in the placement area A in the X2 axis direction and align it in a predetermined position.

[0268] A first support structure 214 in the shape of a gate is arranged above the base 202 in a manner that spans the recess 202b. A first track 216 along the Y2 axis is fixed on the front surface (the surface on the side of the guide rail 212) of the first support structure 214, and a first holding unit 220 is connected to the first track 216 by means of a first moving mechanism 218, etc.

[0269] The first holding unit 220 contacts the upper surface of the frame 15 to adsorb the frame 15, is raised and lowered by the first moving mechanism 218, and moves along the first track 216 in the Y2 axis direction. A holding mechanism 220a for holding the frame 15 is provided on the lifting platform 204 side of the first holding unit 220.

[0270] For example, if the frame 15 is held by the holding mechanism 220a and the first holding unit 220 is moved in the Y2 axis direction, the workpiece unit 17 can be pulled out from the container 102 in the placement area A to the pair of guide rails 212, or the workpiece unit 17 on the pair of guide rails 212 can be inserted into the container 102 in the placement area A. Furthermore, after aligning the frame 15 using the pair of guide rails 212, the first holding unit 220 is used to attract the frame 15 and move the workpiece unit 17 into the chuck table 208.

[0271] Furthermore, a second track 222 along the Y2 axis is fixed above the first track 216 on the front surface of the first support structure 214. A second holding unit 226 is connected to this second track 222 by means of a second moving mechanism 224, etc. The second holding unit 226 contacts the upper surface of the frame 15 to attract the frame 15, for example, moves up and down by the second moving mechanism 224, and moves along the second track 222 in the Y2 axis direction.

[0272] A portal-shaped second support structure 228 is disposed behind the first support structure 214. Two sets of machining units (cutting units) 232 are respectively provided on the front surface of the second support structure 228 (the surface on the side of the first support structure 214) via Y-axis and Z-axis moving mechanisms (indexing feed unit, infeed feed unit) 230. Each machining unit 232 moves in the Y2 axis direction (indexing feed) and in the Z2 axis direction (infeed feed) via its corresponding Y-axis and Z-axis moving mechanism 230.

[0273] Each machining unit 232 has a spindle (not shown) that serves as a rotation axis substantially parallel to the Y2 axis. A ring-shaped cutting tool 234 is mounted on one end of each spindle. A rotation drive source (not shown), such as an electric motor, is connected to the other end of each spindle. In addition, a nozzle for supplying cutting fluid, such as pure water, to the workpiece 11 or the cutting tool 234 is arranged next to the cutting tool 234.

[0274] While supplying cutting fluid from the nozzle, the rotating cutting tool 234 cuts into the workpiece 11 held by the chuck table 208, thereby enabling machining (cutting) of the workpiece 11. An imaging unit (camera) 236 for photographing the workpiece 11 held by the chuck table 208 is provided adjacent to the machining unit 232. This imaging unit 236 also moves in the Y2 axis direction and the Z2 axis direction via the Y-axis and Z-axis movement mechanisms 230.

[0275] A cleaning unit 238 is disposed on the side opposite to the lifting platform 204 relative to the recess 202b. The cleaning unit 238 has a rotary table 240 that holds the workpiece 11 within a cylindrical cleaning space. A rotary drive source (not shown) is connected to the lower part of the rotary table 240 to rotate the rotary table 240 at a predetermined speed.

[0276] Above the rotary table 240 is a spray nozzle 242 that sprays a cleaning fluid (typically a mixture of water and air) toward the workpiece 11 held by the rotary table 240. By rotating the rotary table 240 holding the workpiece 11, the cleaning fluid is sprayed from the spray nozzle 242, thereby cleaning the workpiece 11.

[0277] After the workpiece 11 is cut using the processing unit 232, the workpiece unit 17 is moved into the cleaning unit 238 by adsorbing the frame 15 using the second holding unit 226, for example. After the workpiece 11 is cleaned using the cleaning unit 238, the workpiece unit 17 is placed on a pair of guide rails 212 by adsorbing the frame 15 using the first holding unit 220, and then the frame 15 is held by the holding mechanism 220a to store the workpiece unit 17 in the container 102 of the placement area A.

[0278] like Figure 21 As shown, the upper surface of the base 202 is covered by a cover 244, and the aforementioned components are housed inside the cover 244. An opening (not shown) through the top 244a of the cover 244 is provided directly above the recess 202a. The container 102 of the transport vehicle 10 moves from the outside to the inside of the cover 244 through this opening, and also moves from the inside to the outside of the cover 244 through this opening. There are no restrictions on the shape or size of the opening, but the opening must be configured to allow at least the container 102 to pass through.

[0279] Each component of the aforementioned processing apparatus 4 is connected to the control device 246. The control device 246 is, for example, a computer, which includes a processing unit such as a CPU (Central Processing Unit), a main storage device such as DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as flash memory. The processing unit and the like are operated according to the software stored in the auxiliary storage device, thereby realizing the function of the control device 246.

[0280] A receiver 248 and a transmitter 250 are also connected to the control device 246. The receiver 248 receives signals (information) from the outside and sends them to the control device 246, while the transmitter 250 sends the signals (information) received from the control device 246 to the outside. For example, the receiver 248 receives signals (control signals) sent from the control unit 12 of the conveying system 2 and sends them to the control device 246.

[0281] The control device 246 controls the operation of each component of the processing device 4, for example, based on signals received from the receiver 248. Additionally, the control device 246 generates a notification signal and sends it to the transmitter 250, for example. The transmitter 250, for example, sends the signal received from the control device 246 to the control unit 12 of the conveying system 2.

[0282] A pipe connection portion 202c for connecting various pipes 21 is provided on the side wall of the base 202. In addition, a door 244b for opening and closing during maintenance is provided on the side wall of the cover 244. Furthermore, an operation panel (not shown) for inputting instructions to the control device 246 and a display (not shown) for displaying various information related to the processing device 4 can be provided on the side wall of the cover 244.

[0283] The processing device 4 operates in conjunction with the conveying system 2 of this embodiment. For example, when the conveyor 10 stops in the parking area on the conveying path 6, it places the container 102 containing the workpiece unit 17 on the upper surface (placement area A) of the lifting platform 204 of the processing device 4. When the container 102 is placed on the lifting platform 204, the control unit 130 of the conveyor 10 generates a signal to notify the user and sends it to the transmitter 134. This signal is then sent from the transmitter 134 to the control unit 12 of the conveying system 2.

[0284] The control unit 12 generates a signal, based on a signal sent from the transmitter 134 of the transport vehicle 10, instructing the processing device 4 to remove the workpiece unit 17 before processing from the container 102 and to move the processed workpiece unit 17 into the container 102. When the receiver 248 of the processing device 4 receives the signal from the control unit 12 and the control device 246 receives an instruction based on that signal, the control device 246 removes the workpiece unit 17 before processing from the container 102, which is placed on the upper surface (placement area A) of the lifting platform 204, to the first holding unit 220. This pulls the workpiece unit 17 onto a pair of guide rails 212, and processing of the workpiece 11 begins.

[0285] For example, when processing of workpiece 11 begins, control device 246 adjusts the height of lifting platform 204, pulling the processed workpiece unit 17 from the storage area located below the placement area A onto a pair of guide rails 212. Then, the processed workpiece unit 17 on the pair of guide rails 212 is stored in container 102 on lifting platform 204.

[0286] When the processed workpiece unit 17 is placed in the container 102, the control device 246 of the processing apparatus 4 generates a signal to indicate this intention and sends it from the transmitter 250 to the control unit 12 of the transfer system 2. The control unit 12 generates a signal to instruct the transfer vehicle 10 to proceed to the next destination based on the signal sent from the transmitter 250 of the processing apparatus 4.

[0287] When the receiver 132 of the transport vehicle 10 receives a signal from the control unit 12 and the control unit 130 receives an instruction based on that signal, the control unit 130 causes the transport vehicle 10 to move toward the next destination. In this way, by utilizing the transport system 2, the processing device 4 can accept the workpiece unit 17 before processing in a timely manner, and can also retrieve the workpiece unit 17 after processing in a timely manner.

[0288] like Figure 1 and Figure 21 As shown, the conveying path 6 constituting the conveying system 2 is provided on the upper surface of the canopy 244a of the cover 244 of each processing device 4, and on the upper surface of the canopy 22a of the housing 22 of the loader / unloader 8. That is, the conveying path 6 is arranged directly above the processing device 4, the loader / unloader 8, etc., in a manner that connects the multiple processing devices 4, the loader / unloader 8, etc.

[0289] Therefore, the conveyor path 6 will not interfere with the piping connection 202c, door 244b, or other structures located on the side of the processing unit 4. In other words, the structure of the side of the processing unit 4 does not need to be considered when designing the conveyor path 6. This allows for easy construction of the conveyor system 2. Furthermore, the conveyor path 6 is positioned lower than the factory ceiling, thus simplifying the installation work.

[0290] Furthermore, when constructing a transport path 6 in an environment where multiple processing units 4 are already installed, it is not necessary to move the processing units 4 to ensure working space, as is the case when a transport path is installed on the ceiling of a factory. In addition, the existing processing units 4 serve as the base for the transport path 6, thus reducing the working time compared to cases where a new base is installed.

[0291] Figure 23 This is a perspective view showing a portion of the transport path 6 installed on the processing unit 4. Furthermore, the structure of the transport path 6 installed above the loader / unloader 8 is substantially the same as that of the transport path 6 installed above the processing unit 4. A lower frame 262 is fixed to the roofs 244a of the multiple processing units 4, the roof 22a of the loader / unloader 8, etc., by screws, bolts, etc.

[0292] The lower frame 262 is, for example, a composite of rod-shaped frame components made of a material including metals such as aluminum, and is assembled, for example, into a shape that connects adjacent processing devices 4 and loaders / unloaders 8. The lower frame 262 is fixed to the roof 244a of each processing device 4, the roof 22a of the loader / unloader 8, etc., thereby forming the base of the transport path 6.

[0293] In addition, when fixing the lower frame 262 to each processing device 4, loader / unloader 8, etc., the height of the lower frame 262 relative to each processing device 4, loader / unloader 8, etc. is adjusted so that the upper surface of the lower frame 262 is approximately horizontal and the height of the upper surface of the lower frame 262 is approximately equal.

[0294] Therefore, even when the heights of the canopies 244a of each processing unit 4, the canopy 22a of the loader / unloader 8, etc., are not exactly equal, the transport path 6 can be formed horizontally and at the same height. There are no restrictions on the method for adjusting the height of the lower frame 262 relative to the processing unit 4, the loader / unloader 8, etc. For example, a height adjustment component can be arranged between the canopies 244a of each processing unit 4, the canopy 22a of the loader / unloader 8, etc., and the lower surface of the lower frame 262.

[0295] Of course, the height of the processing device 4 and the loader / unloader 8 can also be adjusted. For example, a height adjustment mechanism can be provided at the lower end (legs) of the processing device 4 and the loader / unloader 8. Thus, if the height of the processing device 4 and the loader / unloader 8 is adjusted using this adjustment mechanism and the heights of the canopy 244a of each processing device 4 and the canopy 22a of the loader / unloader 8 are made equal, a lower frame 262 suitable for the platform of the transport road 6 can be realized.

[0296] The upper frame 264 is fixed to the upper surface of the lower frame 262 by screws, bolts, etc. The upper frame 264 is, for example, a composite of rod-shaped frame components made of a material including metals such as aluminum, and is assembled into a shape that conforms to the configuration of the transport path 6 in a way that can properly fix the transport path 6.

[0297] A transport path 6 is provided above the upper frame 264. The transport path 6 is formed, for example, by arranging multiple flat road surface panels 266 in a horizontal direction. In this way, the transport path 6 is formed by combining multiple road surface panels 266, thereby easily realizing various transport paths 6 corresponding to the configuration of multiple processing devices 4, loaders / unloaders 8, etc.

[0298] The road surface panel 266 is formed into a rectangular shape when viewed from above, using lightweight and high-strength materials such as polyamide, polycarbonate, or CFRP (Carbon Fiber Reinforced Plastic). The road surface panel 266 has a flat upper surface suitable for the movement of the transport vehicle 10. In addition, through holes are formed at the ends of the road surface panel 266, extending vertically through the panel.

[0299] On the other hand, on the upper surface of the upper frame 264, a threaded hole (not shown) with a diameter corresponding to the diameter of the screw 268 is opened at a position corresponding to the through hole of the road surface panel 266. Therefore, if the road surface panel 266 is placed on the upper surface of the upper frame 264 and the screw 268 is screwed into the threaded hole of the upper frame 264 through the through hole (not shown), the road surface panel 266 can be fixed to the upper frame 264.

[0300] The lower frame 262 is formed, for example, by combining a plurality of lower frame units 270, each comprising a plurality of rod-shaped frame components. Similarly, the upper frame 264 is formed, for example, by combining a plurality of upper frame units 272, each comprising a plurality of rod-shaped frame components.

[0301] In the case where multiple lower frame units 270 are used to form a lower frame 262 and multiple upper frame units 272 are used to form an upper frame 264, the frame components are transported to factories or other facilities equipped with processing devices 4 in a manner using the lower frame units 270 and the upper frame units 272.

[0302] That is, high-quality lower frame unit 270 and upper frame unit 272, produced in a stable environment, are used to form high-quality lower frame 262 and upper frame 264. Furthermore, the cumbersome operation of connecting rod-shaped frame components above the processing device 4 is avoided. Thus, a high-quality transport path 6 can be formed in a short time.

[0303] Figure 24 (A) is a perspective view showing the lower frame unit 270a constituting the lower frame 262. Figure 24 (B) is a perspective view showing the lower frame unit 270b that constitutes the lower frame 262. The lower frame units 270a and 270b are used selectively, for example, according to the pattern of the conveyor path 6.

[0304] Figure 25 This is a top view showing the configuration of the lower frame units 270 that constitute the lower frame 262. Figure 25 The diagram shows a transport path 6 that can transport the workpiece unit 17 between a total of eight devices (processing device 4, loader / unloader 8, etc.). For example, a lower frame unit 270a is used in the area of ​​the transport path 6 that corresponds to the portion other than the corner (the straight area of ​​the transport path 6), and a lower frame unit 270b is used in the area of ​​the transport path 6 that corresponds to the corner.

[0305] In addition, Figure 25The lower frame 262 uses both a lower frame unit 270c, which flips the lower frame unit 270a, and a lower frame unit 270d, which flips the lower frame unit 270b. That is, in Figure 25 In the lower frame 262, two of each of the four types of lower frame units 270 are used. Each lower frame unit 270 is arranged such that the rod-shaped frame component does not intersect with the opening 282 formed in the conveying path 6 (see reference). Figure 28 Equivalent to Figure 3 The openings 6a) are formed by overlapping.

[0306] When forming the lower frame 262, adjacent lower frame units 270 can be connected to each other, for example, after the lower frame units 270 are fixed to the processing device 4, loader / unloader 8, etc. The connection of adjacent lower frame units 270 can be achieved, for example, using a joint. However, the lower frame units 270 can also be fixed to the processing device 4, loader / unloader 8, etc., after being connected.

[0307] Figure 26 (A) is a perspective view showing the upper frame unit 272a constituting the upper frame 264. Figure 26 (B) is a perspective view showing the upper frame unit 272b that constitutes the upper frame 264. The upper frame units 272a and 272b are used selectively, for example, according to the pattern of the conveyor path 6.

[0308] Figure 27 This is a top view showing the configuration of the upper frame units 272 that constitute the upper frame 264. Figure 27 In the middle, it is shown that the use Figure 25 The lower frame 262 is used to form the transport path 6. For example, the upper frame unit 272a is used in a part of the area connecting adjacent processing devices 4, loaders / unloaders 8, etc., and the upper frame unit 272b is used in the area directly above the processing devices 4 and loaders / unloaders 8.

[0309] That is, in Figure 27 The upper frame 264 uses two upper frame units 272a and eight upper frame units 272b. Each upper frame unit 272 is a rod-shaped frame component that does not intersect with the opening 282 formed in the transport path 6 (see reference). Figure 28 It is constructed by overlapping.

[0310] When forming the upper frame 264, for example, the upper frame unit 272 is fixed to the lower frame 262. Furthermore, two adjacent upper frame units 272 may be separated rather than connected. Additionally, upper frame units 272 with structures that flip upper frame unit 272a and upper frame unit 272b may be used as needed.

[0311] Figure 28 This is a schematic top view illustrating a transport road 6 composed of multiple road surface panels 266 arranged side by side. Figure 28 In the middle, it is shown that the use Figure 25 The lower frame 262 and Figure 27 The upper frame 264 is used to construct the transport path 6. Additionally, in... Figure 28 In the diagram, the boundaries of adjacent pavement panels 266 are shown by dashed lines.

[0312] When forming the transport path 6, for example, the road surface panel 266 is fixed to the upper frame 264. Additionally, in Figure 27 In the upper frame 264, for example, a small gap is formed between adjacent upper frame units 272a and 272b, and a larger gap is formed between two adjacent upper frame units 272b. Therefore, it is impossible to form the transport path 6 in the portion corresponding to this gap using only the rectangular road surface panel 266 viewed from above. That is, gaps will also be formed on the transport path 6.

[0313] Therefore, flat bridging panels 274a and 274b are used to fill these gaps. Smaller bridging panels 274a are disposed at smaller gaps between adjacent upper frame units 272a and 272b. Larger bridging panels 274b are disposed at larger gaps between two adjacent upper frame units 272b.

[0314] Bridging panels 274a or 274b are fixed to the upper frame 264, for example, to minimize the gaps or step differences formed in the transport path 6. This reduces the impact on the moving transport vehicle 10 and prevents damage to the workpiece 11, etc. Furthermore, if small gaps remain in the transport path 6, they can be sealed, for example, using a belt with a core material along the direction of travel of the transport vehicle 10.

[0315] Alternatively, bridging panels with beveled edges formed at both ends in the direction of travel of the transport vehicle 10 can be used instead of bridging panels 274a or 274b. In this case, for example, bridging panels can be used overlapping above road surface panels 266, thus alleviating the size requirements for the bridging panels. Therefore, the bridging panels are highly versatile. Alternatively, flexible, thin-plate-like bridging panels can be used to connect adjacent road surface panels 266.

[0316] When the transport vehicle 10 travels on the transport path 6 configured as described above, static electricity may be generated due to friction between the wheels 86 of the transport vehicle 10 and the transport path 6, which may adversely affect the workpiece 11 stored in the container 102 of the transport vehicle 10. For example, if a semiconductor device is formed on the workpiece 11, the semiconductor device may be damaged by static electricity.

[0317] Therefore, it is preferable to expose the conductive components at the points on the upper surface of the pavement panel 266, which serves as the transport path 6, where they come into contact with the wheels 86 and the like. For example, CFRP (carbon fiber reinforced plastic) is used as the conductive component, in addition to metals such as aluminum or copper. Furthermore, if the pavement panel 266 is made of CFRP, the CFRP is also exposed on the upper surface of the pavement panel 266. That is, the conductive components are exposed on the upper surface of the pavement panel 266.

[0318] By exposing the conductive components on the upper surface of the road surface panel 266 beforehand, the generation and accumulation of static electricity due to friction can be suppressed, thereby preventing adverse effects on the workpiece 11. Furthermore, the conductive components exposed on the upper surface of the road surface panel 266 can be grounded via a wire (not shown). In this case, static electricity generated by the contact between the wheel 86 and the road surface panel 266 is discharged through the wire and will not accumulate on the road surface panel 266. Therefore, the workpiece 11 can be transported more safely by the transport vehicle 10.

[0319] In the conveying system 2 of this embodiment, as a principle, the operation of the conveyor 10 is controlled so that the conveyor 10 does not reach the end of the conveying path 6. However, in the event of any malfunction in the conveyor 10 or the control unit 12, there is a possibility that the conveyor 10 may reach the end of the conveying path 6 and fall off from that end.

[0320] Therefore, it is preferable to... Figure 23 As shown, a protective section 276 is provided at the end of the transport path 6 as a barrier to prevent the transport vehicle 10 from falling off the transport path 6. This protective section 276 is formed, for example, of a material containing metals such as aluminum, and is fixed to the upper frame 264 or the road surface panel 266. The height from the upper surface of the road surface panel 266 to the upper end of the protective section 276 is, for example, greater than the radius of the wheels 86 of the transport vehicle 10. Preferably, it is greater than the diameter of the wheels 86.

[0321] Furthermore, the protective section 276 can be configured to contact the third sensor 126 or the outer cover of the transport vehicle 10. In this case, when the protective section 276 contacts the third sensor 126 or the outer cover of the transport vehicle 10, the transport vehicle 10 detects a collision with an obstacle and stops. Therefore, the transport vehicle 10 can be driven more safely.

[0322] like Figure 28 As shown, the transport route 6 includes: a travel area 278 mainly for the movement of the transport vehicle 10; a parking area 280 mainly for the parking of the transport vehicle 10; and a standby area 284 mainly for the standby of the transport vehicle 10. The workpiece unit 17 is transported between the transport vehicle 10 parked in the parking area 280 and the processing device 4, loader / unloader 8, etc. located below the parking area 280.

[0323] The travel area 278 is, for example, formed in a ring shape along the arrangement of the processing device 4, the loader / unloader 8, etc. The transport vehicle 10 travels, for example, in one direction along the ring-shaped travel area 278, and does not travel in the other direction (i.e., travels in one direction only). Thus, the transport vehicle 10 can be safely driven with simple control.

[0324] However, there are no restrictions on the shape of the travel area 278 or the mode of travel of the transport vehicle 10. For example, the travel area 278 may sometimes be configured to allow the transport vehicle 10 to travel in both directions. In addition, the travel area 278 does not need to be formed as a loop without an end; for example, it can be formed as a straight line with an end.

[0325] On the other hand, an opening 282 for a vertically penetrating passageway panel 266 is provided in the parking area 280. The opening 282 is, for example, slightly larger than the upper and lower surfaces of the container 102, allowing the container 102 to pass through vertically. Furthermore, the width of the opening 282 in the direction perpendicular to the direction in which the transport vehicle 10 enters the parking area 280 is narrower than the distance between the pair of wheels 86 of the transport vehicle 10. Therefore, if the direction in which the transport vehicle 10 enters the parking area 280 is appropriate, the wheels 86 will not fall off into the opening 282.

[0326] The standby area 284 is, for example, located in an area where the transport vehicle 10 is highly likely to be in standby mode. By having the transport vehicle 10 standby in the standby area 284, other transport vehicles 10 can overtake the standby transport vehicle 10. Furthermore, when bidirectional travel of the transport vehicle 10 is permitted, by temporarily having the transport vehicle 10 standby in the standby area 284, two transport vehicles 10 can be staggered. Additionally, the transport route 6 may not necessarily include the standby area 284.

[0327] On the upper surfaces of the road surface panel 266, bridging panel 274a, bridging panel 274b, etc., constituting the transport path 6, various guide markings 286, which are detected by sensors provided by the transport vehicle 10, are provided (see reference). Figure 23 The transport vehicle 10 controls its movement, steering, and parking based on various markers 286 detected by the sensors.

[0328] like Figure 23As shown, marking 286 is configured, for example, as a straight line having a different color than other areas of the upper surface of the pavement panel 266, etc. In this embodiment, as... Figure 28 As shown, the first label 286a, the second label 286b, the third label 286c, and the fourth label 286d are used as the label 286.

[0329] However, there are no restrictions on the way the marking 286 is made. The marking 286 can include curves or be composed of dashed lines. Furthermore, text, numbers, patterns, etc., can be used as the marking 286. There are also no restrictions on the color of the marking 286. For example, multiple markings 286 of different colors can be used, and the transport vehicle 10 can be configured according to various control methods based on the colors of the markings 286.

[0330] A first mark 286a is provided in the travel area 278 along the direction of travel of the transport vehicle 10. The first mark 286a is formed, for example, in the area that the transport vehicle 10 traveling in the travel area 278 is to pass through. More specifically, the first mark 286a is provided directly below a pair of first sensors 122 of the transport vehicle 10 traveling in the travel area 278.

[0331] Figure 29 This is a functional block diagram showing the control unit 130 of the transport vehicle 10. (Example) Figure 29 As shown, the control unit 130 of the transport vehicle 10 includes: a first sensor control unit 130a, which uses a pair of first sensors 122 to monitor the upper surface of the travel area 278 (transport path 6) to detect the first mark 286a; and a travel instruction unit 130b, which determines the orientation indicated by the first mark 286a detected by the first sensor 122 and causes the transport vehicle 10 to travel along that orientation.

[0332] A pair of first sensors 122 detect the first mark 286a according to control signals input from the first sensor control unit 130a. Information related to the first mark 286a detected by the first sensor 122 is transmitted to the driving instruction unit 130b via the first sensor control unit 130a.

[0333] The driving instruction unit 130b determines the orientation indicated by the first marker 286a based on information from the first marker 286a sent from the first sensor control unit 130a. Furthermore, the driving instruction unit 130b controls the drive unit 90 to cause the transport vehicle 10 to travel along the determined orientation. That is, the transport vehicle 10 can detect the first marker 286a using a pair of first sensors 122 and travel along the first marker 286a on the transport path 6.

[0334] like Figure 28As shown, in a designated portion of the travel area 278, two straight first markers 286a intersect. While the transport vehicle 10 travels along one of the first markers 286a, the second sensor 124 detects the first marker 286a of the other side that intersects with it. When the second sensor 124 detects the first marker 286a of the other side, the transport vehicle 10 turns as needed.

[0335] That is, the direction of travel of the transport vehicle 10 is changed at any intersection point where the two straight first markers 286a intersect. Thus, a portion of the other first marker 286a detected by the second sensor 124 functions as a second marker 286b indicating the turning position of the transport vehicle 10. Furthermore, there is a number of second markers 286b on the transport path 6 corresponding to the number of intersection points where the two first markers 286a intersect. That is, in Figure 28 There are multiple second markers 286b on transport route 6.

[0336] like Figure 29 As shown, the control unit 130 of the transport vehicle 10 includes: a second sensor control unit 130c, which uses a second sensor 124 to monitor the upper surface of the travel area 278 (transport path 6) and detects the second mark 286b; and a steering indicator unit 130d, which counts the number of the second mark 286b detected by the second sensor 124 and steers the transport vehicle 10 according to the count of the second mark 286b.

[0337] The second sensor 124 detects the second marker 286b according to the control signal input from the second sensor control unit 130c. Furthermore, the second sensor control unit 130c, for example, notifies the steering indicator unit 130d of the control unit 130 whenever the second sensor 124 detects the second marker 286b.

[0338] The steering indicator 130d counts the number of second markers 286b detected by the second sensor 124 based on a notification from the second sensor control unit 130c, and compares this count with the number of second markers 286b corresponding to the instruction from the control unit 12 of the transport system 2 (a predetermined number). Furthermore, when the number of second markers 286b detected by the second sensor 124 reaches the number of second markers 286b corresponding to the instruction from the control unit 12, the steering indicator 130d controls the drive unit 90 to steer the transport vehicle 10.

[0339] That is, the turn indicator 130d changes the orientation of the transport vehicle 10 according to the number of the detected second markers 286b. In this way, the transport vehicle 10 can detect the second markers 286b using the second sensor 124 and change its orientation as needed. In addition, the second markers 286b are provided, for example, at the corner of the driving area 278 (the corner of the transport road 6), the portion of the driving area 278 adjacent to the parking area 280, the portion of the driving area 278 adjacent to the standby area 284, etc.

[0340] Furthermore, when a pair of second sensors 124 are arranged on a straight line passing through a pair of wheels 86, the second mark 286b can be detected by the pair of second sensors 124 at the same time that the wheel 86 passes the second mark 286b. Therefore, when the second mark 286b is detected, the transport vehicle 10 is turned so that the pair of first sensors 122 does not deviate significantly from the first mark 286a to be detected after the turn. That is, the transport vehicle 10 can be turned properly even without any correction.

[0341] like Figure 28 As shown, a third mark 286c is provided in the parking area 280 along the direction in which the transport vehicle 10 enters. That is, the third mark 286c indicates the orientation of the transport vehicle 10 as it enters the parking area 280. This third mark 286c is formed, for example, at two locations that sandwich the opening 282 in a direction perpendicular to the direction in which the transport vehicle 10 enters, and is detected by the second sensor 124 of the transport vehicle 10.

[0342] like Figure 29 As shown, the control unit 130 of the transport vehicle 10 includes an entry control unit 130e, which causes the transport vehicle 10 to enter the parking area 280 along the direction indicated by the third mark 286c detected by the second sensor 124. The entry control unit 130e is connected to the second sensor control unit 130c.

[0343] The second sensor control unit 130c uses the second sensor 124 to monitor the upper surface of the parking area 280 (transportation road 6) and detects the third mark 286c. Information related to the third mark 286c detected by the second sensor 124 is sent to the entry control unit 130e via the second sensor control unit 130c.

[0344] The entry control unit 130e determines the orientation indicated by the third mark 286c based on the information from the third mark 286c input from the second sensor control unit 130c. Then, the entry control unit 130e controls the drive unit 90 to cause the transport vehicle 10 to enter the parking area 280 along the determined orientation. The third mark 286c is typically provided in the area where the wheels 86 of the transport vehicle 10 will pass. However, there are no restrictions on the arrangement of the third mark 286c.

[0345] like Figure 28 As shown, in the direction in which the transport vehicle 10 enters relative to the parking area 280 (or standby area 284), a fourth mark 286d is provided on the rear side (near the front side) of the parking area 280 (or standby area 284), intersecting with the first mark 286a or the third mark 286c. This fourth mark 286d indicates the position of the parking area 280 (or standby area 284).

[0346] like Figure 29 As shown, the control unit 130 of the transport vehicle 10 includes a parking control unit 130f, which stops the transport vehicle 10 when the fourth mark 286d is detected by a first sensor 122 (one of a pair of first sensors 122) located at the rear of the transport vehicle 10 in the direction of travel. The parking control unit 130f is connected to the first sensor control unit 130a.

[0347] The first sensor control unit 130a uses the first sensor 122 to monitor the upper surface of the driving area 278 or parking area 280 (transportation road 6) and detects the fourth mark 286d using the first sensor 122. When the fourth mark 286d is detected by the first sensor 122, this information is communicated to the parking control unit 130f via the first sensor control unit 130a.

[0348] When the first sensor control unit 130a notifies the parking control unit 130f that the fourth mark 286d has been detected, the parking control unit 130f controls the drive unit 90 to bring the transport vehicle 10 to a rapid stop. That is, when the transport vehicle 10 detects the fourth mark 286d, for example, using the rear-side first sensor 122, it stops immediately.

[0349] Alternatively, the fourth marker 286d can also be positioned in front of (inside) the parking area 280 (or standby area 284) in the direction in which the transport vehicle 10 enters relative to the parking area 280 (or standby area 284). In this case, the transport vehicle 10 will stop immediately when it detects the fourth marker 286d using the first sensor 122 on the front side.

[0350] Additionally, the fourth marker 286d can be positioned at a location detectable by the second sensor 124. In this case, Figure 29 The parking control unit 130f shown is connected to the second sensor control unit 130c. Furthermore, when the second sensor 124, controlled by the second sensor control unit 130c, detects the fourth mark 286d, the parking control unit 130f controls the drive unit 90 to stop the transport vehicle 10.

[0351] Additionally, the parking control unit 130f can also stop the transport vehicle 10 after a predetermined time has elapsed since the fourth marker 286d was detected by the first sensor 122 or the second sensor 124. The time from the detection of the fourth marker 286d to the stopping of the transport vehicle 10 can be adjusted, for example, based on the distance between the fourth marker 286d and the parking area 280, the speed of the transport vehicle 10, etc.

[0352] like Figure 28 As shown, in the direction in which the transport vehicle 10 enters, a power supply terminal (power supply terminal) 288, connected to a power source (not shown), is arranged at the front (inner) side of the parking area 280 and the standby area 284. For example, if the transport vehicle 10 is parked in the parking area 280 or the standby area 284 and the terminal (power receiving terminal) 100 of the transport vehicle 10 is in contact with the terminal 288, charging power is supplied to the battery (secondary battery) 96 via the terminal 100 and the charging wiring (charging wiring) 98. That is, the battery 96 can be charged.

[0353] like Figure 23 As shown, terminal 288 is supported by terminal support 290 fixed to the road surface panel 266 or the upper frame 264, and is connected to power supply wiring (power supply wiring) 292. That is, terminal 288 is connected to the power source by means of power supply wiring 292.

[0354] The terminal support portion 290 may include, for example, a force-applying member (not shown) that applies force to the terminal 288 toward the parking area 280 or the standby area 284. By applying force to the terminal 288 by the force-applying member, the terminal 288 can be properly connected to the terminal 100. However, there are no limitations on the construction of the terminal 288 or the terminal support portion 290.

[0355] For example, after the transport vehicle 10 stops in the parking area 280, the container 102 is raised or lowered by the lifting unit 110. In this embodiment, a power supply terminal 288 is provided in the parking area 280, so the battery 96 can be charged while the container 102 is being raised or lowered. As a result, the large amount of power consumed by the lifting unit 110 when the container 102 is being raised or lowered can be adequately supplied.

[0356] Furthermore, in this embodiment, a terminal 288 is also provided in the standby area 284. Therefore, for example, when the transport vehicle 10 is in standby mode in the standby area 284, the battery 96 can be charged. This extends the operating time of the transport vehicle 10 and improves the efficiency of transporting the workpiece 11.

[0357] The operation of moving the transport vehicle 10 from one location (starting point) to another location (destination) on the transport route 6 is as follows. First, the control unit 12 of the transport system 2 sends a signal to the transport vehicle 10, which is the object of the movement, corresponding to an instruction to move from the starting point to the destination.

[0358] Upon receiving instructions from the control unit 12, the control unit 130 of the transport vehicle 10 first determines the path to the destination using its current position as the starting point. Along this path, it calculates the number of second markers 286b between the starting point and each position where the transport vehicle 10 needs to turn, as well as the direction of turn at each position. Furthermore, the control unit 130 of the transport vehicle 10 controls the drive unit 90 and the like based on the number of second markers 286b and the direction of turn it has calculated.

[0359] For example, the control unit 130 of the transport vehicle 10 drives the transport vehicle 10 while monitoring the upper surface of the transport path 6 using the first sensor 122 and the second sensor 124. That is, the control unit 130 drives the transport vehicle 10 in the direction indicated by the first mark 286a detected by the first sensor 122, while using the second sensor 124 to detect the second mark 286b that the second sensor 124 passes through.

[0360] When the number of second markers 286b passed by the second sensor 124 reaches the desired number of second markers 286b, the control unit 130 causes the transport vehicle 10 to turn in the desired direction. Then, the control unit 130 causes the transport vehicle 10 to travel again in the direction indicated by the first marker 286a. When the transport vehicle 10 reaches its destination, the control unit 130 sends a signal to the control unit 12 to indicate this.

[0361] Furthermore, when the transport vehicle 10 enters the parking area 280, the control unit 130 uses the second sensor 124 to detect the third mark 286c and meticulously adjusts the direction of travel of the transport vehicle 10. This prevents the wheels 86 of the transport vehicle 10 from falling off into the opening 282. At this time, the travel speed can be kept lower compared to when the transport vehicle 10 travels in the direction indicated by the first mark 286a. Then, the control unit 130 uses the first sensor 122 to detect the fourth mark 286d and stops the transport vehicle 10 in the parking area 280.

[0362] As a general rule, the transport vehicle 10 travels with its wheels 86 in front of the direction of travel and its wheels 88 behind the direction of travel. However, when moving from the parking area 280 or the standby area 284 to the driving area 278, the transport vehicle 10 travels with its wheels 86 behind the direction of travel and its wheels 88 in front of the direction of travel.

[0363] When the transport vehicle 10 stops in the parking area 280, the container 102 is positioned directly above the opening 282. Additionally, the terminal 100 on the transport vehicle 10 side contacts the terminal 288 on the transport path 6 side. Thus, the transport vehicle 10 can lower the container 102 while charging the battery 96, placing the container 102 in the placement area A located below the opening 282.

[0364] Furthermore, in the aforementioned operation, the control unit 130 determines the number of the second markers 286b and the direction of turning, but the determination of the control unit 130 can also be limited to a minimum. In this case, for example, the control unit 12 sends a signal containing information related to the number of the second markers 286b present between the departure point and the positions to be turned on the transport vehicle 10, as well as the direction of turning at each position. In this operation, the control unit 130 may not need to determine the number of the second markers 286b and the direction of turning, thus simplifying the control unit 130.

[0365] Next, an example of the control method of the conveying system 2 in this embodiment will be described. Figure 30 This diagram illustrates an example of the control method for the conveying system 2. For instance, when the control device 246 of the processing unit 4 reaches a state where the workpiece 11 requires processing, a signal (workpiece request signal) is generated to indicate this intention. The signal (workpiece request signal) generated by the control device 246 is sent from the transmitter 250 to the control unit 12.

[0366] like Figure 30 As shown, the control unit 12 includes a control unit (signal generation unit) 302 that generates signals for performing various controls. This control unit 302 is, for example, a computer, which includes a processing device such as a CPU (Central Processing Unit), a main storage device such as DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as flash memory. The processing device and the like are operated according to software stored in the auxiliary storage device, thereby realizing the function of the control unit 302.

[0367] A receiver 304 and a transmitter 306 are connected to the control unit 302. The receiver 304 receives signals from the processing device 4, the loader / unloader 8, the transport vehicle 10, etc., and the transmitter 306 sends signals to the processing device 4, the loader / unloader 8, the transport vehicle 10, etc.

[0368] When the receiver 304 of the control unit 12 receives a notification signal (workpiece request signal) sent from the transmitter 250 of the processing device 4, it sends the signal to the control unit 302. When the control unit 302 confirms the notification signal (workpiece request signal) from the processing device 4, it instructs any transport vehicle 10 to move to the parking area 280 directly above the loader / unloader 8 and place the container 102 on the upper surface of the loading platform 66 of the loader / unloader 8 (second loading area A2). Specifically, the control unit 302 generates a control signal (first loading instruction signal) corresponding to the instruction and sends it from the transmitter 306 to the transport vehicle 10.

[0369] When the receiver 132 of the transport vehicle 10 receives a signal (first placement indication signal) from the control unit 12, it sends the signal to the control unit 130. The control unit 130 controls the drive unit 90 and the like based on the signal (first placement indication signal), causing the transport vehicle 10 to travel along the transport path 6. When the transport vehicle 10 stops in the parking area 280 directly above the loader / unloader 8, the container 102 is positioned directly above the opening 282.

[0370] With the transport vehicle 10 parked in the parking area 280, the control unit 130 controls the lifting unit 110 to send out the suspension component 112. As a result, the container 102 can be lowered through the opening 282 and placed on the upper surface of the loading platform 66.

[0371] After the container 102 is placed on the upper surface of the placement platform 66, the control unit 130 generates a signal (first placement completion signal) to indicate that the placement of the container 102 on the upper surface of the placement platform 66 is complete. The signal (first placement completion signal) generated by the control unit 130 is sent from the transmitter 134 to the control unit 12.

[0372] When the receiver 304 of the control unit 12 receives a signal (first loading completion signal) sent from the transmitter 134 of the transport vehicle 10, it sends the signal to the control unit 302. When the control unit 302 confirms the signal (first loading completion signal) from the transport vehicle 10, it notifies the loader / unloader 8 that the loading of the container 102 onto the upper surface of the loading platform 66 has been completed. Specifically, the control unit 302 generates a notification signal (second loading completion signal) to notify the loader / unloader 8 that the loading of the container 102 onto the upper surface of the loading platform 66 has been completed and sends it from the transmitter 306 to the loader / unloader 8.

[0373] When the receiver 68 of the loader / unloader 8 receives a signal (second loading completion signal) from the control unit 12, it sends the signal to the control device 46. Upon receiving the signal (second loading completion signal), the control device 46 controls the operation of each component to move the workpiece 11 before processing into the container 102. Furthermore, when the processed workpiece 11 is stored in the container 102, after removing the processed workpiece 11 from the container 102, the workpiece 11 before processing is moved into the container 102.

[0374] When the workpiece 11 is moved into the container 102 before processing, the control device 46 generates a signal (first transfer completion signal) to indicate that the transfer of the workpiece 11 into the container 102 has been completed. The signal (first transfer completion signal) generated by the control device 46 is sent from the transmitter 70 to the control unit 12.

[0375] When the receiver 304 of the control unit 12 receives a signal (first transfer completion signal) sent from the transmitter 70 of the loader / unloader 8, it sends the signal to the control unit 302. When the control unit 302 confirms the signal (first transfer completion signal) from the loader / unloader 8, it instructs the transfer vehicle 10 to move to the parking area 280 directly above the processing unit 4 and place the container 102 on the upper surface of the lifting platform 204 of the processing unit 4 (placement area A). Specifically, the control unit 302 generates a control signal (second placement instruction signal) corresponding to this instruction and sends it from the transmitter 306 to the transfer vehicle 10.

[0376] When the receiver 132 of the transport vehicle 10 receives a signal (second placement indication signal) from the control unit 12, it sends the signal to the control unit 130. The control unit 130 controls the lifting unit 110 based on this signal (second placement indication signal), causing the suspension member 112 to wind up. This allows the container 102 to rise and be stored in the storage area 104 via the opening 282, etc. Then, the control unit 130 controls the drive unit 90, etc., to make the transport vehicle 10 travel along the transport path 6.

[0377] When the transport vehicle 10 stops in the parking area 280 directly above the processing device 4, the container 102 is positioned directly above the opening 282. With the transport vehicle 10 stopped in the parking area 280, the control unit 130 controls the lifting unit 110 to extend the suspension component 112. This allows the container 102 to be lowered via the opening 282 and placed on the upper surface of the lifting platform 204 of the processing device 4.

[0378] After the container 102 is placed on the upper surface of the lifting platform 204, the control unit 130 generates a signal (third placement completion signal) to indicate that the placement of the container 102 on the upper surface of the lifting platform 204 has been completed. The signal (third placement completion signal) generated by the control unit 130 is sent from the transmitter 134 to the control unit 12.

[0379] When the receiver 304 of the control unit 12 receives a signal (third loading completion signal) sent from the transmitter 134 of the transport vehicle 10, it sends the signal to the control unit 302. When the control unit 302 confirms the signal (third loading completion signal) from the transport vehicle 10, it notifies the processing device 4 that the loading of the completed container 102 onto the upper surface of the lifting platform 204 is complete. Specifically, the control unit 302 generates a notification signal (fourth loading completion signal) to notify the completed container 102 of the loading onto the upper surface of the loading table 66 and sends it from the transmitter 306 to the processing device 4.

[0380] When the receiver 248 of the processing apparatus 4 receives a signal (fourth loading completion signal) from the control unit 12, it sends the signal to the control device 246. Upon receiving the signal (fourth loading completion signal), the control device 246 controls the operation of each component to remove the workpiece 11 before processing from the container 102. Alternatively, if a processed workpiece 11 is present in the processing apparatus 4, after removing the workpiece 11 before processing from the container 102, the processed workpiece 11 is moved into the container 102.

[0381] When the workpiece 11 to be processed is removed from the container 102, for example, the control device 246 generates a signal (second transfer completion signal) to indicate that the workpiece 11 has been removed from the container 102. The signal (second transfer completion signal) generated by the control device 246 is sent from the transmitter 250 to the control unit 12.

[0382] Following these steps, the workpiece 11 stored in the loader / unloader 8 before processing can be transferred to any processing device 4. Furthermore, this description primarily focuses on the steps for transferring the workpiece 11 from the loader / unloader 8 to the processing device 4, but the steps for transferring the workpiece 11 from the processing device 4 to the loader / unloader 8 are the same.

[0383] Furthermore, the above steps can be arbitrarily changed within the range that allows for the proper transport of the workpiece 11. For example, multiple steps included in the above steps can be performed simultaneously, and the order of steps can be switched within the range that does not hinder the transport of the workpiece 11. Similarly, any steps can be added, changed, or omitted within the range that does not hinder the transport of the workpiece 11.

[0384] As described above, the conveying path 6, loader / unloader (conveyor) 8, conveyor trolley 10, box storage mechanism 24, and lifting unit (lifting mechanism) 110 of this embodiment are all configured to efficiently and safely convey the workpiece 11. Therefore, by using the conveying system 2 assembled with them, the workpiece 11 can be conveyed efficiently and safely.

[0385] (Implementation Method 2)

[0386] In this embodiment, a processing apparatus that differs from the embodiments described above will be described. Figure 31 This is a perspective view showing the internal structure of the processing apparatus (cutting device) 402 of this embodiment. Furthermore, in the following description, the same reference numerals are used for components common to the above-described embodiment, and detailed descriptions are omitted.

[0387] The container 102 of the transport vehicle 10 is not placed on the lifting platform 404 of the processing device 402. Instead, a two-layer box storage mechanism 406 (first box storage mechanism 406a and second box storage mechanism 406b) is provided on the lifting platform 404 of the processing device, which is the same as the two-layer box storage mechanism 24 (i.e., the first box storage mechanism 24a and the second box storage mechanism 24b) of the loader / unloader 8 in the above embodiment.

[0388] That is, the processing apparatus 402 of this embodiment is used to move the box 30. Furthermore, the processing apparatus 402 is also equipped with a movement restriction mechanism consisting of a stop member 50 and a shaft mechanism 52. This facilitates the loading and unloading of the relatively heavy box 30, thus reducing the risk of damage to the workpiece 11 stored in the box 30 during loading and unloading. Additionally, a compact box storage mechanism 406 in the width direction can be easily achieved.

[0389] Furthermore, the processing apparatus 402 of this embodiment also includes a first safety mechanism and a second safety mechanism to restrict entry from the outside of the processing apparatus 402 into the inside. This prevents the operator from accidentally accessing movable parts or the like located inside the processing apparatus 402 during operation.

[0390] Furthermore, the processing apparatus 402 of this embodiment can be independent of the aforementioned conveying system 2. That is, the processing apparatus 402 of this embodiment may not be connected to the aforementioned conveying system 2.

[0391] The box storage mechanism 406 of this embodiment is configured similarly to the box storage mechanism 24 of the above embodiment to efficiently and safely transport the workpiece 11. Therefore, by using the processing device 4 equipped with this box storage mechanism 406, the workpiece 11 can be transported efficiently and safely.

[0392] In addition, the above-described embodiments or variations, as well as their structures and methods, can be appropriately modified and implemented as long as they do not depart from the scope of the present invention.

Claims

1. A conveyance system having a conveyance path on which a conveyance cart that conveys a workpiece to a processing device travels, characterized by, the conveyance path having a road surface panel provided above the processing device and having a flat upper surface, a conductive member being exposed at a position on the upper surface of the road surface panel that contacts a wheel of the conveyance cart, the conveyance cart having: a frame to which a wheel for traveling is attached; a container that accommodates the workpiece; a lifting unit provided to the frame that lifts the container by suspending the container in such a manner that the container passes through an opening in the conveyance path in an up-and-down direction; and a cover provided to the frame, the container having an opening through which the workpiece passes when the workpiece is carried into or out of the container, the lifting unit arranging the container in a storage area when the workpiece is conveyed on the conveyance path, the cover having: a cover portion that covers the opening of the container, the cover portion being linked to the frame in such a manner that the cover portion is rotatable relative to the frame; and a contact portion that is fixed to the cover portion in such a manner that the contact portion contacts the container arranged in the storage area, the cover portion moving to a position that covers the opening of the container in conjunction with movement of the contact portion when the container is arranged in the storage area and contacts the contact portion, thereby covering the opening of the container arranged in the storage area.

2. The conveyance system according to claim 1, characterized in that, the conductive member covers an entire area of the upper surface of the road surface panel.

3. The conveyance system according to claim 1 or 2, characterized in that, the conductive member includes carbon fiber reinforced plastic.

4. The conveyance system according to claim 1 or 2, characterized in that, the conductive member is grounded.

5. The conveyance system according to claim 1 or 2, characterized in that, a plurality of the road surface panels are connected in a direction parallel to the upper surface. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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