Tilt control device

Abstract

The present invention relates to a tilting control device, comprising: a tilting unit, which is rotatably arranged at a front installation position and a rear waiting position with a first rotation center as a reference; a lifting unit, which is combined with the lower part of the tilting unit, and when the tilting unit is rotated toward the installation position, the lifting unit can be lifted and lowered toward the installation position and the assembly position of the lower part of the lifting unit; and a holding unit, which can be combined with the lifting unit in a locking or unlocking operation, and the locking part of the holding unit located at the lower part of the lifting unit is configured in a linkage manner in the radial direction with a second rotation center as a reference.

Description

Technical Field

[0001] The present invention relates to a tilting control device, and more particularly, to a tilting control device that does not cause bonding errors (skew, etc.) and can reduce damage to bonding parts and particles generated by impact. Background Art

[0002] Typically, in semiconductor processing, etching and cleaning processes are performed on wafers, and a chuck table is used in the process of etching or cleaning the wafers. A wafer is placed on the upper part of the chuck table for cleaning the wafer, and an annular sealing ring is combined with the edge area of ​​the turntable, and a processing liquid is supplied to the wafer placed on the turntable. A plurality of fixing pins are installed on the upper part of the edge side of the chuck table, and a fixing groove is formed on the lower part of the sealing ring so that the fixing pins can be inserted accordingly. When the upper part of the chuck table is combined with the sealing ring, the fixing pins are vertically inserted into the fixing groove. However, when the sealing ring is combined with the existing chuck table, since it is a vacuum adsorption type, there are no fixing pins and fixing grooves, and a large number of installation errors have occurred.

[0003] As a prior art document related to the present invention, there is Korean Patent Publication No. 10-2016-0122067 (October 21, 2016), which discloses a wafer processing device and a sealing ring for the wafer processing device. Summary of the Invention

[0004] Technical problems to be solved

[0005] An object of the present invention is to provide a tilt control device that does not cause coupling errors (such as skew) with a seal ring.

[0006] Another object of the present invention is to provide a tilt control device that can compensate for mechanical deviation even if a coupling error occurs between a seal ring and a table.

[0007] Means of solving technical problems

[0008] The tilt control device according to the present invention includes: a tilt unit, which is configured at a front installation position and a rear waiting position in a manner that can be rotated with a first rotation center as a reference; a lifting unit, which is combined with the lower part of the tilt unit, and when the tilt unit is rotated toward the installation position, the lifting unit can be lifted and lowered toward the installation position and the assembly position below the installation position; and a holding unit, which can be combined with the lifting unit in a locking or unlocking operation, and the locking part of the holding unit located at the lower part of the lifting unit is configured in a radial direction in a linkage manner with a second rotation center as a reference.

[0009] During a locking operation, the holding unit moves the locking component toward a locking position while the sealing ring is located at the lower portion of the lifting unit, thereby pressurizing and supporting the side surface of the sealing ring. During an unlocking operation, the holding unit moves the locking component toward an unlocking position, thereby separating from the sealing ring and positioning the locking component.

[0010] The tilting unit includes: a support platform fixedly coupled to a setting surface; a rotating frame, the rear end of the rotating frame being coupled in a manner capable of rotating toward the installation position and the waiting position with the first rotation center of the support platform as a reference, and the lifting unit being coupled to the lower portion of the rotating frame in a manner capable of being lifted and lowered; a first rotation driving unit being provided on the support platform so as to rotate the rotating frame toward the installation position and the waiting position.

[0011] The lifting unit includes: an upper lifting frame, which is arranged at the lower part of the rotating frame, and a guide beam protruding upward of the upper lifting frame is connected to a lifting hole formed in the rotating frame in a lifting manner; a lifting drive part, which is vertically connected to the rotating frame, and a connecting rod that moves in and out toward the lower part of the lifting drive part is connected to the upper lifting frame; and a lower lifting frame, which is connected to the lower part of the upper lifting frame, and the lower lifting frame is configured so that the locking component can move along the lower edge of the lower lifting frame.

[0012] The lower portion of the rotating frame may include a rotating shaft that is fixedly coupled to the upper lifting frame and the lower lifting frame, thereby forming a second rotation center. The lower lifting frame may further include: a shaft insertion slot for vertically inserting the lower end of the rotating shaft; and an annular bearing coupled to the interior of the shaft insertion slot to support the lower end of the rotating shaft so that it can rotate horizontally. Furthermore, the inner circumferential surface of the bearing may have a diameter larger than that of the rotating shaft, so that the lower lifting frame can move laterally according to a set distance. Furthermore, the lifting unit further includes a position adjustment unit. During the process of the lifting unit being lowered toward the assembly position and positioned, if the sealing ring deviates from the assembly position, the position adjustment unit causes the lower lifting frame to move laterally to compensate for the deviation, and causes the lower lifting frame to return to its original position when the lifting unit is raised toward the installation position.

[0013] The position adjustment unit includes: a setting groove formed inside the lower lifting frame; an elastic component inserted into the setting groove to exert a compressive elastic force in the up and down directions; a spherical ball component elastically supported by the upper end of the elastic component so as to be able to be raised and lowered; a position adjustment groove, which is recessed in the lower surface of the upper lifting frame, the upper end of the ball component elastically contacts the inside of the position adjustment groove, and the diameter gradually decreases as it moves toward the minimum diameter portion at the upper end of the position adjustment groove.

[0014] The holding unit includes: a cam plate configured to be rotatable in a locking direction or an unlocking direction between the upper lifting frame and the lower lifting frame with a second rotation center as a reference, and the cam plate having a guide hole formed therethrough in a radial direction; and a second rotation driving portion provided on the lower lifting frame, so as to rotate the cam plate toward a locking position or an unlocking position.

[0015] In addition, the locking component includes: a guide shaft, the upper end of which is inserted into the guide hole in a slidable manner, and the lower end of the guide shaft is exposed to the lower part of the lower lifting frame through a through hole, and the through hole is formed at the edge of the lower lifting frame; a locking pin that moves from the lower part of the lower lifting frame to a locked position or an unlocked position in a state connected to the lower end of the guide shaft; and a guide roller that is coupled to the lower surface of the lower lifting frame in a horizontally rotatable manner and supports it in a direction at right angles to the moving direction of the locking pin.

[0016] Furthermore, the present invention includes: a first flow path formed inside the lower lifting frame so as to connect to a fluid supply unit; a second flow path formed inside the sealing ring so as to extend upward; and a plurality of injection holes extending from the lower portion of the second flow path and extending downward. Fluid for removing the chemical solution supplied from the fluid supply unit can be ejected downward through the injection holes after passing through the first and second flow paths. When the sealing ring is mounted on the lifting frame, the first and second flow paths can be connected to each other.

[0017] Effects of the Invention

[0018] When the sealing ring is installed, the cam plate rotates, so that multiple locking pins are simultaneously driven to the engagement position with the sealing ring, thereby reducing the engagement error (skewness, etc.) of the sealing ring.

[0019] Furthermore, the present invention compensates for deviations generated during assembly by the position adjustment unit when the installed sealing ring is combined with the fixing pins of the substrate processing apparatus, thereby enabling precise alignment of the fixing groove of the sealing ring and the fixing pins of the chuck table.

[0020] In addition, the present invention compensates for the deviation between the fixing groove of the sealing ring and the fixing pin of the chuck table, so even if a coupling error occurs between the sealing ring and the table, mechanical deviation compensation can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a front view showing a tilt control device according to one embodiment of the present invention.

[0022] Figure 2 FIG. 1 is a side view showing a tilt control device according to an embodiment of the present invention.

[0023] Figure 3 FIG. 1 is a top view showing a tilt control device according to an embodiment of the present invention.

[0024] Figure 4 FIG. 1 is a bottom view of a tilt control device according to an embodiment of the present invention.

[0025] Figure 5 FIG. 1 is a top view showing in detail a lifting unit and a holding unit of a tilt control device according to an embodiment of the present invention.

[0026] Figure 6 FIG. 1 is a bottom view showing in detail a lifting unit and a holding unit of a tilt control device according to an embodiment of the present invention.

[0027] Figure 7 FIG. 1 is a bottom view showing in detail a locking member of a tilt control device according to an embodiment of the present invention.

[0028] Figure 8 FIG. 1 is a diagram showing a position adjustment unit of a tilt control device according to an embodiment of the present invention.

[0029] Figure 9 This is a diagram showing a state in which a ball member of a position adjustment unit of a tilt control device according to an embodiment of the present invention moves downward from a minimum diameter portion of a mounting groove to a side.

[0030] Figure 10 This shows a state in which, in the tilt control device according to one embodiment of the present invention, the fluid for removing the chemical liquid is supplied from the fluid supply portion through the first flow path and the second flow path, and is ejected through the ejection hole.

[0031] Description of Reference Numerals

[0032] 10: Chuck worktable; 11: Fixing pin; 20: Sealing ring; 21: Fixing groove; 100: Tilting unit; 110: Support platform; 120: Rotating frame; 121: Lifting hole; 122: Rotating shaft; 130: First rotation drive unit; 200: Lifting unit; 210: Upper lifting frame; 211: Guide beam; 220: Lifting drive unit; 230: Lower lifting frame; 231: Shaft insertion groove; 232: Bearing; 233: Through hole; 300: Holding unit; 310: Cam plate; 311: Guide hole; 320: Second rotation drive unit ;330: Locking part; 331: Guide shaft; 332: Locking pin; 332a: Pressurizing end; 332b: Guide protrusion; 333: Guide roller; 333a: Guide groove; 400: Position adjustment unit; 410: Setting groove; 420: Elastic part; 430: Ball part; 440: Position adjustment groove; 441: Minimum diameter part; 510: Fluid supply part; 520: First flow path; 530: Second flow path; 540: Injection hole; C1: First rotation center; C2: Second rotation center; G: Interval; G1: Deviation; L: Fluid. DETAILED DESCRIPTION

[0033] Hereinafter, with reference to the accompanying drawings, embodiments of the present invention will be described in detail. The advantages and features of the present invention, as well as methods for realizing them, will be made clearer with reference to the embodiments, which will be described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in a variety of different forms. The provision of this embodiment is only to make the disclosure of the present invention more complete, and to enable persons with common knowledge in the technical field to which the present invention belongs to fully understand the scope of the invention. The present invention is defined only according to the scope of the claims. In addition, in the process of describing the present invention, if the relevant known technology is determined to be likely to obscure the main purpose of the present invention, the detailed description thereof will be omitted.

[0034] Figure 1 1 is a front view showing a tilt control device according to an embodiment of the present invention, Figure 2 is a side view showing a tilt control device according to an embodiment of the present invention, Figure 3 1 is a top view of a tilt control device according to an embodiment of the present invention. Figure 4 is a bottom view showing a tilt control device according to one embodiment of the present invention, Figure 5 is a top view showing in detail the lifting unit and the holding unit of the tilt control device according to one embodiment of the present invention, Figure 6 Detailed bottom view of the lifting unit and the holding unit of the tilt control device according to one embodiment of the present invention. Figure 7 is a bottom view showing in detail a locking component of a tilt control device according to one embodiment of the present invention, Figure 8 FIG. 1 is a diagram showing a position adjustment unit of a tilt control device according to an embodiment of the present invention. Figure 9 This is a diagram showing a state in which a ball member of a position adjustment unit of a tilt control device according to an embodiment of the present invention moves downward from the minimum diameter portion of the mounting groove to the side. Figure 10 This shows a state in which, in the tilt control device according to one embodiment of the present invention, the fluid for removing the chemical liquid is supplied from the fluid supply portion through the first flow path and the second flow path, and is ejected through the ejection hole.

[0035] According to an embodiment of the tilt control device of the present invention, in order to enable the annular sealing ring 20 to be combined with the upper part of the chuck worktable 10, a plurality of fixing pins 11 are vertically installed at the upper end of the edge side of the chuck worktable 10, and a plurality of fixing grooves 21 are formed at the lower end of the edge side of the sealing ring 20 so that the fixing pins 11 can be inserted accordingly when combined with the upper part of the chuck worktable 10.

[0036] like Figures 1 to 10 As shown, the tilt control device according to one embodiment of the present invention includes a tilt unit 100 , a lifting unit 200 , and a holding unit 300 .

[0037] The tilting unit 100 allows the lifting unit 200 and the holding unit 300 to be positioned horizontally at the front installation position, or rotated to the rear waiting position. Figures 1 to 4 As shown, the tilting unit 100 includes a support platform 110 , a rotating frame 120 , and a first rotation driving unit 130 .

[0038] The lower end of the support platform 110 may be fixed to the installation surface by a fastening member, and the upper end of the support platform 110 may be rotatably coupled to the rotating frame 120 .

[0039] The rear end of the rotating frame 120 can be rotatably coupled to the front installation position and the rear waiting position with the first rotation center C1 of the support platform 110 as a reference. In this embodiment, the first rotation center C1 is used as an example for explanation as a horizontal rotation center. Among them, the rotating frame 120 can be set horizontally when rotating toward the front installation position, and can be set vertically when rotating toward the rear waiting position. Of course, when the rotating frame 120 rotates toward the rear waiting position, it can be tilted at the front or rear, or can be set horizontally at the rear. As an embodiment, the rotating frame 120 is formed with a plurality of lifting holes 121 through-and-through, so that the guide beam 211 of the lifting unit 200 described later can be correspondingly inserted.

[0040] The lower portion of the rotating frame 120 is fixedly coupled to the upper lifting frame 210 described later, and a rotating shaft 122 forming a second rotation center C2 is vertically protruded from the lower portion of the rotating frame 120. In this embodiment, the second rotation center C2 is used as an example for description.

[0041] The lower end of the rotating shaft 122 may be fixedly connected to the lower lifting frame 230 through the upper lifting frame 210 described later.

[0042] The first rotation drive unit 130 is provided on the support platform 110 to rotate the turret 120 between the installation position and the waiting position. The first rotation drive unit 130 may use a driving element that utilizes the pressure of a fluid supplied from an external source. One end of the first rotation drive unit 130 is rotatably connected to the support platform 110 in the front-to-back direction, and a connecting rod (rod) that enters and exits the opposite end is rotatably connected to the turret 120 in the front-to-back direction.

[0043] The lifting unit 200 is a structure that is liftably coupled to the lower portion of the tilt unit 100. When the tilt unit 100 is rotated toward the installation position, the lifting unit 200 can be raised and lowered toward the installation position and the lower assembly position. More specifically, the lifting unit 200 includes an upper lifting frame 210, a lifting drive unit 220, and a lower lifting frame 230.

[0044] The upper lifting frame 210 is disposed below the rotating frame 120. A guide beam 211 protruding upward from the upper lifting frame 210 is coupled to the lifting hole 121 in a manner that allows for escalation. The upper end of the upper lifting frame 210 is coupled to the lower end of the rotating frame 120. A hollow space is formed vertically through the upper lifting frame 210 to accommodate the rotating shaft 122.

[0045] The lifting drive unit 220 may utilize a drive element utilizing the pressure of a fluid supplied from an external source to lift the upper lifting frame 210. The lifting drive unit 220 may be vertically coupled to the rotating frame 120. A connecting rod extending toward the lower end of the lifting drive unit 220 may be coupled to the upper lifting frame 210 via the lower end of the rotating frame 120.

[0046] The lower lifting frame 230 is coupled to the lower portion of the upper lifting frame 210. The edge of the lower lifting frame 230 may have a ring shape to form a circumference. The lower lifting frame 230 may have a shaft insertion groove 231 with a fixed width formed inside so that the lower end of the rotating shaft 122 can be vertically inserted.

[0047] The shaft insertion slot 231 can extend upward to accommodate the lower end of the rotating shaft 122 and can be formed at the center of the lower lifting frame 230. An annular bearing 232 can be incorporated into the shaft insertion slot 231. Bearing 232 supports the lower end of the rotating shaft 122 for horizontal rotation. In one embodiment, the inner circumference of bearing 232 has a larger diameter than the rotating shaft 122, allowing the lower lifting frame 230 to move laterally by a set distance. A fixed clearance G can be formed between the hollow space of bearing 232 and the rotating shaft 122, allowing lateral movement of the bearing 232 and the lower lifting frame 230.

[0048] A gap G formed between the hollow portion of the bearing 232 and the rotating shaft 122 is a space for performing a deviation compensation function of the position adjustment unit 400 described later.

[0049] Furthermore, a through hole 233 is formed vertically through the edge of the lower lifting frame 230. The through hole 233 allows a guide shaft 331, described later, to vertically pass therethrough. The through hole 233 may have an elongated shape extending in the direction of the second rotation center C2 of the cam plate 310, described later, to allow the guide shaft 331, described later, to move in the locking or unlocking direction.

[0050] The holding unit 300 can be coupled to the lifting unit 200 in a locking or unlocking operation to hold the sealing ring 20. During the locking operation, the holding unit 300 pressurizes and supports the side surfaces of the sealing ring 20 while positioning the sealing ring 20 below the lifting unit 200. During the unlocking operation, the pressurization of the sealing ring 20 is released.

[0051] In this embodiment, the holding unit 300 is combined with the lifting unit 200 in a manner that the holding unit 300 can be lifted and lowered together, and includes a cam plate 310 , a second rotation driving portion 320 , and a locking component 330 .

[0052] The cam plate 310 is configured to rotate between the upper and lower lift frames 210 and 230 about the second rotation center C2, allowing it to lock or unlock. Guide holes 311 are formed radially and vertically through the cam plate 310. These guide holes 311 can be formed at equal intervals along the radial direction. The guide holes 311 have an elongated shape, with a length inclined along the second rotation center C2 and the radial direction of the cam plate 310. The cam plate 310 can have multiple radial extensions centered about the second rotation center C2, and the guide holes 311 can be formed at the distal ends of the extensions. These guide holes 311 serve as spaces for vertically inserting the upper end of a guide shaft 331, described later, and can be aligned with the through hole 233 of the upper lift frame 210.

[0053] The second rotation drive unit 320 is disposed on the lower lifting frame 230 to rotate the cam plate 310 toward a locked or unlocked position. The second rotation drive unit 320 can utilize a drive element utilizing the pressure of an externally supplied fluid, and multiple second rotation drive units 320 can be used. Alternatively, the second rotation drive unit 320 can be disposed horizontally relative to the rotation direction of the cam plate 310, and can rotate the cam plate 310 toward a locked or unlocked position using a connecting rod that enters and exits at one end. In this case, one end of the second rotation drive unit 320 can be horizontally connected to the lower lifting frame 230, while the connecting rod that enters and exits at the opposite end can be connected to the cam plate 310. Alternatively, one end of the second rotation drive unit 320 can be horizontally connected to the cam plate 310, while the connecting rod that enters and exits at the opposite end can also be connected to the lower lifting frame 230.

[0054] In order to lock or unlock the sealing ring 20 , the locking component 330 includes a guide shaft 331 , a locking pin 332 , and a guide roller 333 .

[0055] The upper end of the guide shaft 331 is vertically inserted into the guide hole 311, while the lower end of the guide shaft 331 extends downward through the through-hole 233, thereby being vertically exposed below the lower lifting frame 230. The upper end of the guide shaft 331 can move along the length of the through-hole 233 while tilting and sliding along the length of the guide hole 311. During movement in the locking or unlocking direction, the guide shaft 331 is guided by the width of the through-hole 233, allowing it to move without shaking. In other words, when the guide shaft 331 is positioned at one end of the through-hole 233 in the longitudinal direction, the locking pin 332, described later, moves to the locked position. When the guide shaft 331 is positioned at the opposite end of the through-hole 233, the locking pin 332, described later, can move to the unlocked position. When the cam plate rotates in the locking direction, the guide shaft 331 is positioned so as to be hooked and positioned at the ends of the guide hole 311 in the longitudinal direction, in the direction of the second rotation center C2 of the cam plate 310. On the contrary, when the cam plate 310 rotates in the unlocking direction, the guide shaft 331 is hooked and positioned in the radial direction of the cam plate 310 at both ends of the guide hole 311 in the longitudinal direction.

[0056] The locking pin 332 is connected to the lower end of the guide shaft 331 and can be moved from the lower portion of the lower lifting frame 230 to a locked position or an unlocked position. The locking pin 332 may have a length along the second rotation center C2 of the cam plate 310, and one end of the locking pin 332 in the longitudinal direction may be formed with a protruding pressing end 332a.

[0057] When the sealing ring 20 is installed at the bottom of the lower lifting frame 230, the pressurizing end 332a is the portion that horizontally abuts against or inserts into the side of the sealing ring 332a with a corresponding projection and recess. The pressurizing end 332a can have a conical shape with a diameter that gradually decreases toward the second rotation center C2 of the cam plate 310. For example, the locking pin 332 is moved in either a locking or unlocking direction via the guide shaft 331, which moves along the length of the guide hole 311 as the cam plate 310 rotates. When the locking pin 332 moves in the locking direction, the protruding tip of the pressurizing end 332a abuts against or inserts into the side of the sealing ring 20 with a corresponding projection and recess, thereby enabling the sealing ring 20 to be installed horizontally at the bottom of the lower lifting frame 230.

[0058] The guide rollers 333 are coupled to the lower surface of the lower lifting frame 230 in a horizontally rotatable manner, supporting the locking pin 332 at right angles to its direction of movement. The locking pin 332 may have a length in the direction of the second rotational center of the cam plate 310, and the guide rollers 333 may be disposed on either side of the locking pin 332 in the width direction. Multiple guide rollers 333 may be disposed along the length of the locking pin 332. In this case, the guide rollers 333 support the locking pin 332 so that it does not move in the width direction.

[0059] In addition, if Figure 7 As shown, the first guide protrusion 332a or the first guide groove can be continuously formed along the length direction in the width direction of the locking pin 332. Figure 7 As shown, the side of the guide roller 333 can be formed with a guide protrusion or guide groove 333a to engage with the guide protrusion 332a or the guide groove. In other words, the width direction of the locking pin 332 corresponds to the convex and concave side of the guide roller 333, thereby increasing the meshing force (increasing the contact area) between the locking pin 332 and the guide roller 333 in the width direction.

[0060] Furthermore, the aforementioned lifting unit 200 may further include a position adjustment unit 400. As the lifting unit 200 descends toward the assembly position, if the sealing ring 20 experiences an assembly position deviation G1, the position adjustment unit 400 moves the lower lifting frame 230 laterally to compensate for the deviation G1. Conversely, as the lifting unit 200 ascends toward the installation position, the position adjustment unit 400 restores the lower lifting frame 230 to its original position. To this end, the position adjustment unit 400 may be comprised of a slot 410, an elastic member 420, a ball member 430, and a position adjustment slot 440.

[0061] The installation groove 410 is formed inside the lower lifting frame 230 and may be formed at a coupling portion contacting the lower end of the upper lifting frame 210 .

[0062] The elastic member 420 is vertically inserted into the setting groove 410 to exert a compressive elastic force in the up and down directions. The elastic member 420 may have a coil spring shape.

[0063] The ball member 430 is spherical and is positioned within the groove 410. The lower end of the ball member 430 is elastically supported by the upper end of the elastic member 420 so that it can be raised and lowered. The upper end of the elastic member 420 may be coupled to a support member for supporting the lower end of the ball member 430. A hook member may also be coupled to the side of the ball member 430 to limit the movement of the ball member 430.

[0064] The position adjustment groove 440 is recessed into the lower surface of the upper lifting frame 210 and can be located above the installation groove 410. The position adjustment groove 440 can have a diameter that gradually decreases toward the top. In this case, a minimum diameter portion 441 having the smallest diameter is formed at the upper end of the position adjustment groove 440. The upper end of the ball component 430 is positioned by being hooked in close contact with the interior of the position adjustment groove 440. The upper end of the ball component 430 is positioned by being hooked in close contact with the minimum diameter portion 441 of the position adjustment groove 440.

[0065] like Figure 9 As shown, when the lifting unit 200 rises toward the installation position, the ball component 430 is hooked and positioned at the minimum diameter portion 441 by the compression force of the elastic component 420. In this state, the ball component 430 is hooked and positioned with the setting groove 410 toward the side, so the lower lifting frame 230 does not move laterally.

[0066] As the lifting unit 200 is lowered toward the assembly position, if the sealing ring 20 experiences misalignment in the assembly position, the ball component 430 moves downward, tilted toward the side of the minimum diameter portion 441. At this point, the lateral force exerted by the ball component 430 compresses the elastic component 420 downward and allows it to move laterally, thereby compensating for any misalignment in the assembly position of the sealing ring 20. In other words, when the sealing ring 20, mounted on the lower portion of the lower lifting frame 230, is engaged with the upper portion of the chuck table 10, any misalignment between the fixing groove 21 of the sealing ring 20 and the fixing pin 11 of the chuck table 10 can be compensated for. This minimizes the impact that might otherwise occur when the fixing groove 21 of the sealing ring 20 and the fixing pin 11 of the chuck table 10 engage in a misaligned position, thereby minimizing damage to the junction between the fixing pin 11 and the fixing groove 21.

[0067] Furthermore, the lower lifting frame 230 can have a first flow path 520 extending vertically therethrough, with the upper end of the first flow path 520 connected to a fluid supply unit 510. Furthermore, the sealing ring 20 can have a second flow path 21 extending vertically therethrough, as well as a plurality of injection holes 540 extending downward from the lower portion of the second flow path 21. For example, when the sealing ring 20 is mounted below the lower lifting frame 230, the open lower portion of the first flow path 520 and the open upper portion of the second flow path 530 are connected. Fluid L for removing the chemical solution, supplied from the fluid supply unit 510, passes through the first and second flow paths 520, 530, and can be ejected downward through the injection holes 540. This fluid L, which is ejected downward through the injection holes 540, can clean chemical solution residue from the inner circumferential surface of the sealing ring 20. The positions, numbers, widths, etc. of the first flow path 520, the second flow path 530, and the injection holes 540 can be variously used as needed.

[0068] As a result, according to an embodiment of the present invention, the tilt control device drives multiple locking pins 332 to the engagement position with the sealing ring 20 at the same time as the cam plate 310 rotates when the sealing ring 20 is installed, so that the engagement error (skewness, etc.) of the sealing ring 20 will not occur.

[0069] In addition, the tilt control device according to one embodiment of the present invention compensates for the deviation generated during assembly through the position adjustment unit 400 when the installed sealing ring 20 is combined with the fixing pin 11 of the chuck worktable 10, so that the fixing groove 21 of the sealing ring 20 and the fixing pin 11 of the chuck worktable 10 can be precisely arranged. The deviation between the fixing groove 21 of the sealing ring 20 and the fixing pin 11 of the chuck worktable 10 is compensated, thereby reducing damage to the joint and particles generated by impact.

[0070] While specific embodiments of the tilt control device according to the present invention have been described so far, it is self-evident that various modifications are possible without departing from the scope of the present invention. Therefore, the present invention is not limited to the embodiments described herein, but is defined within the scope of the following claims and their equivalents. In other words, it should be understood that the aforementioned embodiments are neither exhaustive nor limiting. The scope of the present invention should be understood to be defined not by detailed description but by the following claims, and all modifications and variations that can be derived from the meaning and scope of the claims, as well as their equivalents, are encompassed within the scope of the present invention.

Claims

1. A tilt control device, characterized in that: include: a tilting unit arranged at a front mounting position and a rear waiting position so as to be rotatable about a first rotation center; a lifting unit coupled to a lower portion of the tilting unit, wherein when the tilting unit is rotated and positioned toward the installation position, the lifting unit can be lifted and lowered toward the installation position and an assembly position below the installation position; as well as The holding unit can be combined with the lifting unit in a locking or unlocking operation, and the locking component of the holding unit located at the lower part of the lifting unit is configured in a linkage manner in the radial direction with the second rotation center as the reference. The holding unit includes a cam plate, which can be rotated in a locking direction or an unlocking direction with the second rotation center as the reference and is formed with a guide hole passing through from top to bottom. The locking component includes a guide shaft that can be slidably inserted into the guide hole.

2. The tilt control device according to claim 1, characterized in that: During a locking operation, the holding unit moves the locking component toward a locking position while the sealing ring is located at the lower portion of the lifting unit, thereby pressurizing and supporting the side surface of the sealing ring. During an unlocking operation, the holding unit moves the locking component toward an unlocking position, thereby separating from the sealing ring and positioning the locking component.

3. The tilt control device according to claim 1, characterized in that: The tilting unit comprises: A supporting platform, fixedly coupled to the setting surface; a turret, the rear end of which is coupled to the turret so as to be rotatable toward the mounting position and the waiting position with the first rotation center of the support table as a reference, and the lifting unit is coupled to the lower portion of the turret so as to be liftable; and The first rotation driving unit is provided on the support platform, and causes the rotating frame to rotate toward the installation position and the waiting position.

4. The tilt control device according to claim 3, characterized in that: The lifting unit comprises: an upper lifting frame, disposed at a lower portion of the rotating frame, wherein a guide beam protruding upward of the upper lifting frame is connected to a lifting hole formed in the rotating frame in a manner capable of being raised and lowered; a lifting drive unit vertically coupled to the rotating frame, wherein a connecting rod extending in and out toward a lower portion of the lifting drive unit is coupled to the upper lifting frame; and The lower lifting frame is combined with the lower part of the upper lifting frame, and the lower lifting frame is configured so that the locking component can move along the lower edge of the lower lifting frame.

5. The tilt control device according to claim 4, characterized in that: The lower portion of the rotating frame includes a rotating shaft, and the rotating shaft is fixedly connected to the upper lifting frame and the lower lifting frame to form a second rotation center.

6. The tilt control device according to claim 5, characterized in that: The interior of the lower lifting frame also includes: a shaft insertion slot for vertically inserting the lower end of the rotating shaft; and An annular bearing is coupled to the interior of the shaft insertion groove and supports the lower end of the rotating shaft so as to be horizontally rotatable.

7. The tilt control device according to claim 6, characterized in that: The inner peripheral surface of the bearing has a diameter larger than a diameter of the rotating shaft so that the lower lifting frame can move sideways according to a set distance.

8. The tilt control device according to claim 7, characterized in that: The lifting unit further includes a position adjustment unit. When the sealing ring deviates from the assembly position during the process of the lifting unit descending toward the assembly position, the position adjustment unit moves the lower lifting frame sideways to compensate for the deviation, and restores the lower lifting frame to its original position when the lifting unit ascends toward the installation position.

9. The tilt control device according to claim 8, characterized in that: The position adjustment unit includes: A groove is provided, formed inside the lower lifting frame; an elastic member inserted into the setting groove to exert a compressive elastic force in the up-down direction; a spherical ball member elastically supported by the upper end of the elastic member so as to be movable upward and downward; and The position adjustment groove is concavely formed on the lower surface of the upper lifting frame, the upper end of the ball component elastically contacts the inside of the position adjustment groove, and the diameter gradually decreases toward the minimum diameter portion at the upper end of the position adjustment groove.

10. The tilt control device according to claim 4, characterized in that: The cam plate is configured to be rotatable in a locking direction or an unlocking direction between the upper lifting frame and the lower lifting frame with the second rotation center as a reference; as well as The holding unit further includes: a second rotation driving portion, which is provided on the lower lifting frame and causes the cam plate to rotate toward a locking position or an unlocking position.

11. The tilt control device according to claim 10, characterized in that: The upper end of the guide shaft is slidably inserted into the guide hole, and the lower end of the guide shaft is exposed to the lower part of the lower lifting frame through a through hole formed at an edge of the lower lifting frame; Wherein, the locking component further includes: a locking pin connected to the lower end of the guide shaft and movable from the lower portion of the lower lifting frame to a locked position or an unlocked position; and The guide roller is coupled to the lower surface of the lower lifting frame in a horizontally rotatable manner and supports the locking pin in a direction perpendicular to the moving direction of the locking pin.

12. The tilt control device according to claim 4, characterized in that: include: a first flow path formed inside the lower lifting frame in a manner connected to a fluid supply portion; A second flow path is formed inside the sealing ring in a manner of penetrating upward. as well as A plurality of injection holes extend from a lower portion of the second flow path and penetrate downward.

13. The tilt control device according to claim 12, characterized in that: The fluid for removing the chemical solution supplied from the fluid supply part passes through the first flow path and the second flow path and is then ejected downward through the ejection hole. When the sealing ring is mounted on the lower lifting frame, the first flow path and the second flow path are connected to each other.

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