Apparatus for manufacturing display device and method of manufacturing the display device

Abstract

An apparatus for manufacturing a display device and a method of manufacturing the display device are disclosed. The apparatus for manufacturing a display device includes a stage configured to support a substrate, a moving unit configured to move relative to the stage, a head unit arranged on the moving unit and including a nozzle for discharging a droplet onto the substrate, and a sensor unit configured to emit laser light to irradiate the droplet falling from the head unit to the substrate to sense a portion of a planar shape of the droplet. The apparatus is configured to control the moving unit or the head unit based on the sensed portion of the planar shape.

Description

[0001] Cross-references to related applications

[0002] This patent application claims the benefit of priority to Korean Patent Application No. 10-2020-0002143, filed on January 7, 2020, with the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] One or more embodiments relate to apparatus and methods, and more particularly, to apparatus for manufacturing a display device and a method for manufacturing the display device. Background Technology

[0004] Mobile devices are widely used and typically include any handheld computer device. Examples of mobile devices include smartphones and tablet personal computers (PCs).

[0005] Mobile devices include display devices for providing users with visual information such as images. The size of the display device can be greatly increased when the components driving the display device are miniaturized. Summary of the Invention

[0006] One or more embodiments of this disclosure include apparatus for manufacturing a display device and a method for manufacturing the display device.

[0007] According to an exemplary embodiment of the present disclosure, an apparatus for manufacturing a display device includes: a platform configured to support a substrate; a moving unit configured to move relative to the platform; a head unit disposed on the moving unit and including a nozzle for discharging droplets onto the substrate; and a sensor unit configured to emit a laser to irradiate droplets falling from the head unit onto the substrate and to sense a portion of the planar shape of the droplets.

[0008] The sensor unit can direct the laser to a region of a plane perpendicular to the direction of the droplet's fall.

[0009] The sensor unit can configure the laser to have a specific line shape from a number of available line shapes.

[0010] In an exemplary embodiment, the laser is reflected by droplets arranged in a region spaced a first distance from the sensor unit to generate reflected light, and the sensor unit uses the reflected light to determine a portion of the planar shape.

[0011] In an exemplary embodiment, the sensor unit includes multiple sensors that emit laser light to the outside, and the multiple sensors are arranged in a row.

[0012] The sensor unit can be arranged on the mobile unit.

[0013] The sensor unit can include a sensor disposed on the moving unit, generate and emit laser light, and a reflector configured to bend a path of the laser light, the reflector being spaced apart from the sensor.

[0014] The sensor unit can emit the laser light along a plane inclined with respect to a top surface of a substrate on which the droplet falls.

[0015] The droplet can include an organic material.

[0016] The controller of the apparatus can control at least one of whether to operate the head unit, a falling speed of the droplet, and an amount of the droplet, based on a planar shape of the droplet sensed by the sensor unit.

[0017] The controller of the apparatus can synchronize an operation frequency of the head unit with an operation frequency of the laser light.

[0018] The controller of the apparatus can calculate a planar shape of the droplet and a planar center of the droplet with respect to the sensor unit based on a result sensed by the sensor unit.

[0019] The controller of the apparatus can calculate a position of the droplet falling to the substrate based on the planar center of the droplet.

[0020] The head unit can include a plurality of heads, and can determine relative positions between the respective heads based on centers of planar shapes of the droplets falling from each head.

[0021] The apparatus is configured to control the moving unit or the head unit based on a portion of the sensed planar shape.

[0022] According to an exemplary embodiment, a method of manufacturing a display device includes discharging a material from a head unit to drop a droplet of the material onto a substrate, emitting laser light along a certain plane to irradiate the droplet while the droplet falls to the substrate, and measuring a portion of a planar shape of the droplet using light of the laser light reflected from the falling droplet.

[0023] The emitting can emit at least two beams of laser light along a certain plane through which the droplet passes.

[0024] The at least two beams of laser light can be parallel to each other.

[0025] The certain plane can be parallel to a top surface of a substrate onto which the droplet falls.

[0026] The certain plane can be inclined with respect to a top surface of a substrate onto which the droplet falls.

[0027] The droplet can pass through the laser light at a point spaced apart from a point at which the laser light is emitted by a predetermined distance.

[0028] The droplet can include an organic material.

[0029] The method can further include determining a planar position of the measured droplet, determining whether to stop the discharging based on the planar position of the droplet, and controlling the head unit to stop the discharging when it is determined to stop the discharging.

[0030] The method can further include calculating a planar size of the droplet from the result of the measuring, and controlling the head unit to adjust the amount of the discharging of the droplet based on the planar size of the droplet.

[0031] The method can further include controlling the head unit based on the measured part of the planar shape.

[0032] According to an exemplary embodiment of the present disclosure, a method of manufacturing a display device includes arranging a substrate on a stage, discharging a droplet from a head unit, a sensor emitting laser light to irradiate the droplet falling from the head unit onto the substrate, the sensor sensing light of the laser light reflected from the droplet, calculating a part of a planar shape of the droplet by sensing the reflected light, and adjusting a relative position of the stage and the head unit based on the calculated part of the planar shape to adjust a relative position of the substrate and the head unit.

[0033] The method can further include synchronizing an operation frequency (e.g., a discharging frequency) of the head unit with an operation frequency of the sensor.

[0034] A path of the laser light emitted from the sensor can be variable.

[0035] The sensor can be movable with respect to the stage.

[0036] The emitting by the sensor can include emitting at least two parallel laser lights.

[0037] The at least two parallel laser lights can form a plane, and the plane formed by the at least two parallel laser lights can be parallel to a top surface of the substrate or inclined with respect to the top surface of the substrate.

[0038] The method can further include controlling at least one of whether to operate the head unit, a falling speed of the droplet, and an amount of the droplet based on the planar shape of the droplet sensed by the sensor.

[0039] These and / or other aspects will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings in which:

[0040] These and / or other aspects can be implemented by using a system, a method, a computer program, or a combination of specific systems, methods, and computer programs. BRIEF DESCRIPTION OF DRAWINGS

[0041] Exemplary embodiments of the present disclosure will become more fully understood from the following description, taken in conjunction with the accompanying drawings, in which:

[0042] Figure 1is a perspective view of a sensor unit shown in

[0043] Figure 2 is a perspective view of a sensor unit shown in Figure 1

[0044] Figure 3 is a perspective view of a sensor unit shown in Figure 2

[0045] Figure 4 is a plan view showing laser light emitted from a laser generator shown in Figure 2

[0046] Figure 5 is a graph showing a signal sensed by a sensor unit shown in Figure 1

[0047] Figure 6 is a graph showing a center of a droplet calculated from a signal sensed by a sensor unit shown in Figure 1

[0048] Figure 7 is a plan view of a display device manufactured according to an exemplary embodiment of the inventive concept;

[0049] Figure 8 is a cross-sectional view of the display device taken along line C-C' of Figure 7

[0050] Figure 9 is a perspective view of a sensor unit shown in

[0051] Figure 10 is a perspective view of a sensor unit shown in Figure 9

[0052] Figure 11 is a perspective view of a sensor unit shown in

[0053] Figure 12 is a perspective view of a sensor unit shown in Figure 11 DETAILED DESCRIPTION

[0054] ​​​​​​​​Reference will now be made in detail to the exemplary embodiments of the present disclosure, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout. The present embodiments can have different forms and should not be construed as being limited to the description set forth herein. Accordingly, the embodiments are described below by referring to the drawings to explain aspects of the present description. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Throughout this disclosure the expression "at least one of a, b, and c", indicates only a, only b, only c, both a and b, both a and c, both b and c, all of a, b, and c, or variations thereof.

[0055] Hereinafter, the present embodiments are described in detail with reference to the accompanying drawings. In the drawings, like reference numerals are given to like elements or corresponding elements and a repeated description thereof is omitted.

[0056] As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

[0057] It will be understood that when a layer, region, or an element is referred to as being "formed on" another layer, region, or element, it can be directly or indirectly formed on the other layer, region, or element. That is, for example, a middle layer, region, or element can be present.

[0058] In the following examples, the x-axis, y-axis and z-axis do not limit to three axes of a rectangular coordinate system, and can be interpreted in a broader sense. For example, the x-axis, y-axis and z-axis can be perpendicular to each other, or can represent different directions that are not perpendicular to each other.

[0059] When a specific embodiment can be implemented differently, a specific process sequence can be performed differently from the described sequence. For example, two consecutively described processes can be performed substantially at the same time or in an order opposite to the described sequence.

[0060] Figure 1 is a perspective view of an apparatus 100 for manufacturing a display device according to an exemplary embodiment of the present inventive concept. Figure 2 is a perspective view of an apparatus 100 for manufacturing a display device according to an exemplary embodiment of the present inventive concept. Figure 1 is a perspective view of a sensor unit 140 shown in FIG. Figure 3 is a perspective view of a sensor unit 140 shown in FIG. Figure 2 is a rear view of a bottom surface of a laser generator shown in FIG.

[0061] Referring to Figures 1 to 3 The apparatus 100 for manufacturing a display device includes a stage 110, a moving unit 120, a head unit 130, and a sensor unit 140.

[0062] The display substrate D can be disposed on the stage 110. In this case, the stage 110 can be formed in a plate shape. The display substrate D is placed and fixed on the stage 110. In an exemplary embodiment, there is a groove in the stage 110 so that at least a portion of the display substrate D is inserted into the groove. In an exemplary embodiment, there is a recess in the surface of the stage 110 so that at least a portion of the display substrate D is inserted into the recess. In another exemplary embodiment, there is a vacuum hole in the surface of the stage 110, and the stage 110 includes a pump that absorbs gas inside the vacuum hole in cooperation with the vacuum hole. In this case, when the pump operates, the pressure inside the vacuum hole can almost reach a vacuum state, and thus the display substrate D can be fixed to the stage 110. In another embodiment, the stage 110 can include an electrostatic chuck or an adhesive chuck attached to the display substrate D. In another embodiment, the stage 110 can include a protrusion disposed to be ascendable and descendable to fix the display substrate D by applying a force on the top surface of the display substrate D, or a clamp that clamps the side surface of the display substrate D, etc.

[0063] The moving unit 120 can be disposed to move with respect to the stage 110. For example, the stage 110 can be stationary, and the moving unit 120 can perform linear motion in one direction of the stage 110. In another embodiment, the moving unit 120 is stationary, and the stage 110 performs reciprocating motion in one direction with respect to the moving unit 120. In another embodiment, both the stage 110 and the moving unit 120 can be independently movable.

[0064] In Figure 1In an embodiment, a separate linear driver 150 is connected between the moving unit 120 and the gantry 110. In an exemplary embodiment, the linear driver 150 includes a ball screw connected to the moving unit 120 and a motor connected to the ball screw and fixed to the gantry 110. In an exemplary embodiment, the linear driver 150 includes a linear motor connecting the moving unit 120 to the gantry 110. In another embodiment, the linear driver 150 includes a cylinder connecting the moving unit 120 to the gantry 110. In this case, a linear motion guide can be disposed between the moving unit 120 and the gantry 110 to reduce friction while the moving unit 120 moves relative to the gantry 110. Hereinafter, for convenience of description, a case in which the linear driver 150 includes a linear motor, the gantry 110 is stationary, and the moving unit 120 linearly moves in one direction of the gantry 110 is mainly described in detail. In an exemplary embodiment, the moving unit 120 has a portal shape. In an exemplary embodiment, the moving unit 120 is a structure or a bracket including a first portion in the shape of a rectangular cuboid, a second portion in the shape of a rectangular cuboid connected at a right angle to a first side of the first portion and extending toward the gantry 110, and a third portion in the shape of a rectangular cuboid connected at a right angle to a second side of the first portion opposite the first side and also extending toward the gantry 110. The first portion to the third portion can be integrated to form a single portion.

[0065] The head unit 130 (e.g., a head for discharging or ejecting a specific material) and the sensor unit 140 (e.g., a sensor device) can be disposed on the moving unit 120. In one embodiment, the head unit 130 can be fixed to the moving unit 120 or disposed to be linearly movable. In another embodiment, the head unit 130 is connected to the sensor unit 140 and, in a case in which the sensor unit 140 linearly moves, the head unit 130 moves together with the sensor unit 140. Hereinafter, for convenience of description, a case in which the head unit 130 is connected to the moving unit 120 and linearly moves relative to the moving unit 120 is described in detail.

[0066] In a case in which the head unit 130 is connected to the moving unit 120 to be linearly movable, a head driver (not shown) can be disposed between the head unit 130 and the moving unit 120. The head driver can be formed the same as or similar to the linear driver 150 described above. The head unit 130 can include at least one nozzle 131 through which a material is discharged. In an embodiment in which a plurality of nozzles 131 are provided, the plurality of nozzles 131 can be spaced apart from each other. Hereinafter, for convenience of description, a case in which a plurality of nozzles 131 are provided is mainly described in detail.

[0067] The nozzle 131 can discharge a material. For example, the nozzle 131 can discharge the material in a row in a direction perpendicular to a moving direction of the moving unit 120. For example, the nozzle 131 can discharge the material onto the display substrate D. The material can include an organic material. In this case, the organic material can form an intermediate layer (not shown) described below. In another embodiment, the organic material can form an organic layer in a thin film encapsulation layer (not shown) described below.

[0068] The sensor unit 140 can be connected to the moving unit 120 or the head unit 130. In an embodiment in which the sensor unit 140 is disposed on the moving unit 120, the sensor unit 140 can perform linear motion along the moving unit 120. In this case, the sensor unit 140 can be connected to a head driver or can be connected to a separate driver disposed on the moving unit 120. In this case, because the motion of the sensor unit 140 cooperates with the driving of the head unit 130, the sensor unit 140 and the head unit 130 can move together in the same direction and at the same speed. In another embodiment, the sensor unit 140 is connected to the head unit 130 and moves together with the head unit 130. In another embodiment, as described above, the head unit 130 is connected to the sensor unit 140, and when the sensor unit 140 performs linear motion, the head unit 130 performs linear motion together with the sensor unit 140. Hereinafter, for convenience of description, a case in which the head unit 130 is connected to the sensor unit 140 and one of the head unit 130 and the sensor unit 140 is connected to the moving unit 120 to be linearly movable will be mainly described in detail.

[0069] In an exemplary embodiment, the sensor unit 140 emits laser light LA to irradiate the droplet DR in a direction perpendicular to a direction in which the droplet DR falls (for example, a -Z direction of FIG. 1). Figure 1 In an exemplary embodiment, the sensor unit 140 includes a sensor 141 and a reflector 142.

[0070] In an exemplary embodiment, the sensor 141 includes a sensor body portion 141a and a laser emitter 141b.

[0071] The sensor body portion 141a can emit at least two beams of laser light LA to the outside. A cross section of the laser light LA perpendicular to a traveling direction can be a circular shape of a certain diameter or a linear shape. The sensor body portion 141a can be configured to emit laser light LA of a plurality of different diameters in a cross section or having a plurality of different linear shapes. In another embodiment, the sensor body portion 141a can emit only one beam of laser light LA having one linear shape (or planar shape) in a cross section to the outside. Hereinafter, for convenience of description, a case in which the sensor body portion 141a emits at least two beams of laser light LA to the outside will be mainly described in detail.

[0072] The sensor body part 141a can emit a bundle of laser light LA, divide the bundle of laser light LA into a plurality of bundles of laser light LA, and guide the plurality of bundles of laser light LA to the laser light emitter 141b. In addition, the sensor body part 141a can sense an amount of the laser light LA incident to the sensor body part 141a. For example, the laser light LA is emitted from the sensor body part 141a, is reflected from the droplet DR to generate a reflected wave (e.g., reflected laser light), and then the reflected wave is incident to the sensor body part 141a. In an exemplary embodiment, the sensor body part 141a includes a laser light source, an expander, a beam splitting module (e.g., a beam splitter), and a plurality of laser light sensors. The laser light source generates the laser light LA. The expander expands the laser light LA. For example, the expander can increase a diameter of a first parallel output beam (i.e., first laser light) to generate a second parallel output beam (i.e., second laser light) of a larger diameter. The beam splitting module divides (or splits) the expanded laser light LA into the plurality of bundles of laser light LA. The plurality of laser light sensors are used to sense the reflected laser light LA. In another embodiment, the sensor body part 141a includes a plurality of laser light sources each generating a bundle of laser light LA, a plurality of laser light guides guiding each of the laser light sources, and a plurality of laser light sensors sensing the reflected laser light LA. Hereinafter, for convenience of description, a case in which the sensor body part 141a includes the plurality of laser light sources, the plurality of laser light guides, and the plurality of laser light sensors is mainly described in detail.

[0073] In an exemplary embodiment, the laser light emitter 141b includes a plurality of lenses. In this case, the plurality of lenses can be spaced apart from each other. Each of the lenses can be connected to each of the laser light guides and can guide a bundle of laser light LA to the outside. A bundle of laser light LA can be emitted from each of the lenses. In addition, laser light LA or light can be incident to each of the lenses, the laser light LA or light is reflected from the droplet DR and then is incident again.

[0074] In an exemplary embodiment, the sensor 141 includes a chromatic confocal line sensor. In this case, the sensor 141 can be provided as a plurality of sensors and the plurality of sensors can be connected to each other.

[0075] The reflector 142 can change the path of the laser light LA emitted from the laser emitter 141b. In this case, the reflector 142 can be provided as one or more reflectors for guiding the path of the laser light LA. In an embodiment in which a plurality of reflectors 142 are provided, the reflectors 142 can be arranged to correspond to the laser light LA, respectively. In another embodiment in which a plurality of reflectors 142 are provided, some of the reflectors 142 can be arranged at different heights and different positions to correspond to one bundle of laser light LA. In addition, other ones of the plurality of reflectors 142 can be arranged to correspond to another bundle of laser light LA. Still other ones of the plurality of reflectors 142 can be arranged to correspond to yet another bundle of laser light LA. Hereinafter, for the convenience of description, a case in which the reflector 142 simultaneously bends or reflects a plurality of bundles of laser light LA is mainly described in detail. In an exemplary embodiment, the reflector 142 is implemented by a mirror.

[0076] In an exemplary embodiment, the reflector 142 adjusts the paths of the plurality of bundles of laser light LA so that the plurality of bundles of laser light LA advance in a plane perpendicular to the direction in which the droplets DR emitted from the head unit 130 fall. In this case, the plurality of bundles of laser light LA reflected by the reflector 142 can advance above one plane LAA parallel to the top surface of the stage 110.

[0077] In a case in which the display device is manufactured by the apparatus 100, the display substrate D is arranged on the stage 110. In an exemplary embodiment, the apparatus 100 for manufacturing the display device includes a chamber 160 in which the stage 110, the moving unit 120, the head unit 130, and the sensor unit 140 are arranged. In this case, the chamber 160 can have a form having an open portion. An open / closed structure such as a gate valve can be arranged on the open portion of the chamber 160.

[0078] In addition, the apparatus 100 for manufacturing the display device can include a pressure regulator 170 configured to adjust the pressure of the inside of the chamber 160. In this case, the pressure regulator 170 can include a pipe 171 connected to the chamber 160 and a pressure regulating pump 172 arranged on the pipe 171. In this case, the pressure of the inside of the chamber 160 can be adjusted according to the operation of the pressure regulating pump 172. For example, the pressure regulator 170 can be used to reduce or increase the pressure of the inside of the chamber 160.

[0079] In an exemplary embodiment in which the display substrate D is arranged on the stage 110, the pressure regulator 170 makes the pressure of the inside of the chamber 160 lower than the atmospheric pressure. For example, the pressure regulator 170 can maintain the pressure of the inside of the chamber 160 close to or similar to a vacuum.

[0080] In this case, although not shown, the display substrate D can be moved into the chamber 160 from the outside of the chamber 160 by a robot arm disposed inside or outside the chamber 160.

[0081] After the display substrate D is disposed, at least one of the head unit 130 and the moving unit 120 can be moved to dispose the head unit 130 to a position set in advance. Then, droplets DR are discharged through the nozzle 131. For example, a material can be discharged through the nozzle 131 to make one or more droplets DR of the material fall. The droplets DR can fall to correspond to an open area of a pixel defining layer (not shown) of the display substrate D, and form at least one layer in the intermediate layer.

[0082] During the above process, the sensor unit 140 can measure a portion of a planar shape of the falling droplets DR. Specifically, the sensor 141 can emit laser light LA in a direction parallel to a falling direction of the droplets DR. Also, the reflector 142 can reflect a plurality of beams of the laser light LA to one plane LAA parallel to a top surface of the gantry 110. In an exemplary embodiment, the one plane LAA is spaced apart from a top surface of the display substrate D.

[0083] In a case in which the plurality of beams of the laser light LA are spaced apart from each other over the one plane LAA parallel to the top surface of the gantry 110 as described above, the droplets DR can pass through the one plane LAA over which the laser light LA is disposed. In this case, the laser light LA emitted from the sensor 141 can be emitted in synchronization with a discharge frequency of the droplets DR discharged from the nozzle 131 during the discharging. For example, in a case in which the discharge frequency of the droplets DR discharged from the nozzle 131 is about 2 kHz, the sensor 141 can emit the laser light LA at about 2 kHz. In an exemplary embodiment, the sensor 141 emits the laser light LA only when the droplets DR are discharged from the nozzle 131. Because it takes time for the droplets DR to reach a path of the laser light LA after the droplets DR are discharged from the nozzle 131, the laser light LA emitted from the sensor 141 can be emitted from the sensor 141 when a predetermined time elapses after the droplets DR are discharged from the head unit 130. For example, the emission of the laser light LA can be delayed by the predetermined time, and then the emission of the laser light LA can proceed normally.

[0084] The laser light LA reflected by the reflector 142 can collide with the droplets DR and return to the sensor 141. In this case, the sensor 141 can sense the laser light LA that collides with the droplets DR and is then reflected therefrom. For example, the collision of the laser light LA with the droplets DR can cause light of the laser light LA to be reflected back toward the sensor 141, and then the sensor 141 can sense the laser light LA that has collided with the droplets DR based on the received reflected light (e.g., a result of the sensing).

[0085] Based on the result of the sensing, a parameter of the droplet DR (e.g., a shape of the droplet DR, a planar center of the droplet DR, etc.) can be determined. For example, a controller of the apparatus 100 (internal or external to the sensor unit 140) can calculate the parameter. After determining one or more parameters (e.g., a shape of the droplet DR, a planar center of the droplet DR, etc.), whether to move the moving unit 120, whether to move the head unit 130, whether to operate the head unit 130, whether to change a size of the droplet DR discharged from the head unit 130, whether to change a discharge speed of the droplet DR, whether to change a discharge angle of the head unit 130, etc. can be controlled according to the determined parameter(s). In an exemplary embodiment, the controller determines, based on the one or more parameters, that the moving unit 120 or the head unit 130 needs to be moved from its current position to a new and different position, the controller provides a control signal to the linear driver 150 instructing the linear driver 150 to move the corresponding unit to the new position, and then the linear driver 150 moves the corresponding unit to the new position. In an exemplary embodiment, the controller determines, based on the one or more parameters, that the discharge speed needs to be changed from its current speed to a new and different speed, the controller provides a control signal to the head unit 130 instructing the head unit 130 to change the speed to the new speed, and then the head unit 130 starts to discharge the material at the new speed. In an exemplary embodiment, the controller determines, based on the one or more parameters, that the discharge angle needs to be changed from the current angle to a new and different angle, the controller provides a control signal to the head unit 130 instructing the head unit 130 to change the angle to the new angle, and then the head unit 130 starts to discharge the material at the new angle.

[0086] Accordingly, the apparatus 100 for manufacturing a display device can accurately discharge the droplet DR. In addition, the apparatus 100 for manufacturing a display device can measure various information of the droplet DR and control an output of the droplet DR in real time using the measured information to accurately discharge the droplet DR.

[0087] Hereinafter, a method of sensing a discharged droplet DR is described in detail according to an exemplary embodiment of the inventive concept.

[0088] Figure 4 is a plan view illustrating that laser light LA emitted from a laser generator shown in Figure 2 reaches a droplet DR. Figure 5 is a graph illustrating a signal sensed by a sensor unit shown in Figure 1 . Figure 6 is a graph illustrating a center of a droplet DR calculated according to a signal sensed by a sensor unit shown in Figure 1 .

[0089] Reference is made to Figures 4 to 6The sensor unit (not shown) emits laser light LA to the outside, and measures the intensity of the laser light LA that collides with the droplet DR and is then reflected from the droplet DR, and the distance L3 at which the laser light LA collides with the droplet DR. In this case, the distance L3 at which the laser light LA collides with the droplet DR can include the distance from the end of the working distance Ll, which includes the distance of the laser light LA emitted from the sensor (not shown), which cannot be measured. In this case, the working distance Ll can include the distance through which the target of the laser light LA can be sensed. The laser light LA emitted from the sensor can have a measurement distance L2 within a predetermined distance apart from the working distance Ll. For example, the measurement distance L2 can include a distance within about 230 μm from the end of the working distance Ll. The distances Ll, L2 and L3 can be measured along the same axis as the laser light LA.

[0090] In an exemplary embodiment, while the droplet DR falls within the measurement distance L2, the laser light LA reaches the droplet DR and is then reflected by the droplet DR, and can be incident to the sensor unit again. In an exemplary embodiment, the sensor unit determines that the droplet DR has fallen when sensing at least two beams of the laser light LA reflected by the droplet DR.

[0091] When at least two beams of the reflected laser light LA are sensed as described above, the sensor unit can calculate the size of the droplet DR, the shape of the droplet DR, and the center CE of the droplet DR through the reflected laser light LA. For example, the sensor unit can sense the distance up to the droplet DR through the reflected laser light LA. The sensor unit can determine a portion of the circumference of the droplet DR from the signals generated from the at least two beams of the reflected laser light LA. In an exemplary embodiment, a controller (e.g., control circuit) of the sensor unit calculates the distance from the sensor unit to the droplet DR through each beam of the reflected laser light LA, and then determines a position spaced apart from the sensor unit by the calculated distance as the point at which each beam of the laser light LA collides with the droplet DR. In addition, based on the result, the controller can determine the points at which the plurality of beams of the laser light LA collide with the outer surface of the droplet DR, calculate a partial circumference of the shape of the planar outer surface of the droplet DR, and calculate a virtual circle PC corresponding to the planar outer surface of the droplet DR based on the partial circumference. Figure 5 An exemplary signal obtained by sensing the reflected laser light LA is shown in FIG. 4.

[0092] While the droplet DR falls, its planar shape can include a circle. In this case, the virtual circle PC calculated based on the result sensed by the sensor unit can be determined as the planar shape of the droplet DR. Based on this, the center CE of the planar shape of the droplet DR and the size of the droplet DR can be calculated.

[0093] The above operation can be performed at each head unit 130 and each of the plurality of nozzles 131. Then, a determination (e.g., the planar shape, the center CE of the planar shape, or the size of the droplet DR) can be made based on one of the plurality of head units 130. In this case, the position of the head unit 130 used as a reference can be located at one point on the display substrate D to correspond to a predetermined position.

[0094] Based on the position of the droplet DR discharged from the nozzle 131 of the head unit 130 used as a reference, the position of the droplet DR discharged from one of the plurality of nozzles 131 of each head unit 130 can be calculated. Based on the result, the relative displacement of each of the remaining plurality of head units 130 with respect to the one head unit 130 used as a reference can be calculated. For example, the position of the droplet DR discharged from the nozzle 131 of each head unit 130 can be calculated. In this case, the distance between each head unit 130 and the sensor unit can be calculated by the laser LA colliding with and reflecting from the outer surface of the droplet DR discharged from the nozzle 131 of each head unit 130. In addition, the distance apart from the center CE of the planar shape of the droplet DR discharged from the nozzle 131 of the head unit 130 used as a reference can be calculated by calculating the center CE of the planar shape of the droplet DR discharged from the nozzle 131 of each head unit 130. In this case, the positions of the remaining plurality of head units 130 (or heads) corresponding to the position of the head unit 130 used as a reference can be determined. In an exemplary embodiment, the positions of the head units 130 in the Y-axis direction of the first direction (e.g., the direction in which the laser LA advances) are calculated based on the distance between each head unit 130 and the sensor unit. In addition, the distance apart from the head unit 130 used as a reference in the X-axis direction of the second direction (e.g., the direction perpendicular to the direction in which the laser LA advances) is calculated by calculating the distance between an arbitrary straight line parallel to the direction in which the laser LA advances and passing through the center CE of the planar shape of the droplet DR discharged from the nozzle 131 of each head unit 130 and an arbitrary straight line parallel to the direction in which the laser LA advances and passing through the center CE of the planar shape of the droplet DR discharged from the nozzle 131 of the head unit 130 used as a reference. In this case, the relative positions of the remaining plurality of head units 130 can be calculated based on the position of the head unit 130 used as a reference. The positions of each head unit 130 can be calculated by calculating the relative positions of the center CE of the planar shape of the droplet DR discharged from the nozzle 131 of another head unit 130 based on the center CE of the planar shape of the droplet DR discharged from the nozzle 131 of the head unit 130 used as a reference. Figure 1 Figure 1

[0095] ​​Then, based on the position of each head unit 130 calculated through the above process, the position of each head unit 130 can be controlled during a process of discharging droplets DR to the display substrate D. In an exemplary embodiment, the initial position of each head unit 130 is set so that the nozzle 131 of each head unit 130 corresponds to the opening of the pixel defining layer (not shown) of the display substrate D. In this case, each head unit 130 can supply droplets DR to the display substrate D at its predetermined position.

[0096] In an exemplary embodiment, after at least one nozzle 131 of the head unit 130 serving as a reference is matched to the opening region of the pixel defining layer of the display substrate D, the other head units 130 are controlled to correspond to positions that should be arranged by controlling the distance between the other head units 130 and the head unit 130 serving as a reference.

[0097] The above process can be performed individually at each head unit 130. In this case, each nozzle 131 can discharge droplets DR at an accurate position by finely controlling the position of the head unit 130 according to the relative position of the droplets DR discharged from each nozzle 131. In addition to the above case, the nozzle 131 can be arranged to move in the head unit 130. In this case, the head unit 130 can include a nozzle driver that rotates or linearly moves each nozzle 131. In this case, based on the relative position of the droplets DR discharged from each nozzle 131, the position of each nozzle 131 or the discharge direction of the droplets DR discharged from each nozzle 131 can be controlled.

[0098] Based on the above signal, the center CE of the planar shape of the calculated droplets DR can be continuously measured for one head unit 130. This result can be continuously fed back and stored. For example, the sensor unit can include a memory for storing the result.

[0099] It can be determined whether the above result corresponds to a center range BD set in advance. For example, after the droplets DR are discharged from each nozzle 131 of one head unit 130 a plurality of times, it can be determined how many centers CE of the planar shape of the droplets DR are included in the center range BD set in advance. In an exemplary embodiment, when it is determined that the centers CE of the planar shape of the droplets DR greater than a predetermined number are arranged in the center range BD, the operation of the head unit 130 is maintained. In contrast, when it is determined that the centers CE of the planar shape of the droplets DR less than a predetermined number are arranged in the center range BD, the operation of the head unit 130 can be suspended, the position of the head unit 130 can be adjusted (e.g., finely adjusted), the discharge speed of the droplets DR discharged from the head unit 130 can be adjusted, or the discharge amount of the droplets DR discharged from the head unit 130 can be adjusted.

[0100] In the case in which the nozzles 131 are arranged on one head unit 130, the above operation can be individually performed at each nozzle 131. In this case, among the plurality of nozzles 131, the nozzle 131 in which a problem occurs can be closed to prevent the ejection of the droplet DR from the closed nozzle 131.

[0101] The sensor unit can measure the droplet DR ejected from one nozzle 131 and simultaneously measure the droplets DR ejected from the respective nozzles 131. In an exemplary embodiment in which the sensor unit simultaneously measures a plurality of droplets DR, some of the plurality of sensor units can be identified as a group, and the sensor units of the group can sense one droplet DR.

[0102] The sensor unit can sense the position of the display substrate D at which the droplet DR falls. In this case, the sensor unit can emit the laser LA so that the laser LA approaches the outer surface of the display substrate D. For example, the sensor unit can emit the laser LA to be incident at a position that approaches the outer surface of the display substrate D. In particular, the sensor unit can emit the laser LA along a plane spaced apart from the outer surface of the display substrate D on which the droplet DR passes by a predetermined distance, and the sensor unit can sense the planar shape and the center CE of the planar shape of the droplet DR passing through the laser LA.

[0103] Based on the result of the sensing, the point at which the droplet DR falls on the display substrate D can be calculated based on an arbitrary (or imaginary) line connecting the center of the nozzle 131 of the head unit 130 to the center of the planar shape of the droplet DR sensed by the sensor unit and an arbitrary (or imaginary) line passing through the center of the nozzle 131 of the head unit 130 and perpendicular to the display substrate D. In this case, in an embodiment in which the plane through which the laser LA passes approaches the outer surface of the display substrate D so that the distance between the display substrate D and the plane through which the laser LA passes is very small, the center CE of the planar shape of the droplet DR sensed by the sensor unit can be determined as the point at which the droplet DR falls on the display substrate D.

[0104] In another embodiment, the controller calculates a vector (e.g., or imaginary line) connecting the center of the nozzle 131 to the center CE of the planar shape of the droplet DR sensed by the sensor unit, and determines the point at which the vector meets the display substrate D as the point at which the droplet DR falls on the display substrate D.

[0105] Accordingly, an apparatus (not shown) for manufacturing a display device can monitor the parameters (e.g., planar shape, planar center, etc.) of the droplet DR in real time.

[0106] Figure 7 is a plan view of a display device 20 manufactured by an apparatus for manufacturing a display device according to an exemplary embodiment of the inventive concept. Figure 8 along Figure 7A cross-sectional view of the display device 20 taken along the line C-C'.

[0107] Referring to Figure 7 and Figure 8 In the display device 20, a display area DA and a non-display area NDA can be defined in the substrate 21, the non-display area NDA being outside the display area DA. For example, sub-pixels Px can be arranged in the display area DA, and a power supply line (not shown) can be arranged in the non-display area NDA. In addition, a pad area PA can be arranged in the non-display area NDA.

[0108] The display device 20 can include a display substrate D and a sealing member (not shown), the sealing member being arranged on the display substrate D. In this case, the sealing member can include a sealing portion and an encapsulation substrate (not shown), the sealing portion being arranged on the display substrate D, and the encapsulation substrate facing the substrate 21. In another embodiment, the sealing member can include a thin film encapsulation layer E configured to shield at least a portion of the display substrate D.

[0109] As shown in Figure 8 The display substrate D can include the substrate 21, thin film transistors TFT, and organic light emitting diodes 28, the thin film transistors TFT and the organic light emitting diodes 28 being arranged over the substrate 21.

[0110] The substrate 21 can include glass or a polymer resin. The polymer resin can include polyether sulfone, polyacrylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyarylate, polyimide, polycarbonate, or cellulose acetate propionate. The substrate 21 including the polymer resin can be flexible, rollable, or bendable. The substrate 21 can have a multi-layer structure including a layer including the polymer resin and an inorganic layer (not shown).

[0111] The thin film transistors TFT can be formed over the substrate 21. The passivation layer 27 can cover the thin film transistors TFT. The organic light emitting diodes 28 can be formed on the passivation layer 27.

[0112] A buffer layer 22 further formed on a top surface of the substrate 21, the buffer layer 22 including an organic compound and / or an inorganic compound. The buffer layer 22 can include SiO x (x≥1) or SiN x (x≥1).

[0113] An active layer 23 is formed on the buffer layer 22. The active layer 23 can be arranged in a predetermined pattern. Then, the active layer 23 is buried by a gate insulating layer 24. For example, the gate insulating layer 24 can cover a portion of the active layer 23. The active layer 23 includes a source region 23A and a drain region 23C and further includes a channel region 23B between the source region 23A and the drain region 23C.

[0114] The active layer 23 can include various materials. For example, the active layer 23 can include an inorganic semiconductor material such as amorphous silicon or crystalline silicon. In another embodiment, the active layer 23 can include an oxide semiconductor. In another embodiment, the active layer 23 can include an organic semiconductor material. Hereinafter, for convenience of description, a case in which the active layer 23 includes amorphous silicon is mainly described in detail.

[0115] The active layer 23 can be produced by forming an amorphous silicon layer on the buffer layer 22, crystallizing the amorphous silicon layer into a polycrystalline silicon layer, and patterning the polycrystalline silicon layer. The source region 23A and the drain region 23C of the active layer 23 can be doped with impurities depending on the type of thin film transistor TFT such as a driving thin film transistor (not shown) and a switching thin film transistor (not shown).

[0116] The gate electrode 25 and the interlayer insulating layer 26 are formed on a top surface of the gate insulating layer 24, the gate electrode 25 corresponds to the active layer 23, and the interlayer insulating layer 26 buries the gate electrode 25. For example, the interlayer insulating layer 26 can cover a portion of the gate electrode 25.

[0117] In addition, the contact hole H1 is formed in the interlayer insulating layer 26 and the gate insulating layer 24. Then, the source electrode 27A and the drain electrode 27B are formed on the interlayer insulating layer 26 to contact the source region 23A and the drain region 23C, respectively.

[0118] The passivation layer 27 is formed on the thin film transistor TFT. The pixel electrode 28A of the organic light emitting diode 28 is formed on the passivation layer 27. The pixel electrode 28A contacts the source electrode 27A of the thin film transistor TFT through the via hole H2 formed in the passivation layer 27. The passivation layer 27 can include a single layer or at least two layers including an inorganic material and / or an organic material. The passivation layer 27 can be formed as a planarization layer having a planar top surface regardless of the layers thereunder having a bent or curved shape. In contrast, the passivation layer 27 can be formed to be bent or curved along the layers thereunder having a bent or curved shape. In an exemplary embodiment, the passivation layer 27 includes a transparent insulator to achieve a resonance effect.

[0119] After the pixel electrode 28A is formed on the passivation layer 27, the pixel defining layer 29 is formed to cover the pixel electrode 28A and the passivation layer 27. The pixel defining layer 29 includes an organic material and / or an inorganic material and exposes the pixel electrode 28A.

[0120] In addition, the intermediate layer 28B and the counter electrode 28C are formed at least over the pixel electrode 28A. In another embodiment, the counter electrode 28C can be formed over the entire surface of the display substrate D. In this case, the counter electrode 28C can be formed over the intermediate layer 28B and the pixel defining layer 29. Hereinafter, a case in which the counter electrode 28C is formed over the intermediate layer 28B and the pixel defining layer 29 will be mainly described for convenience of description.

[0121] The pixel electrode 28A functions as an anode electrode, and the counter electrode 28C functions as a cathode electrode. The polarities of the pixel electrode 28A and the counter electrode 28C can be reversed.

[0122] The pixel electrode 28A is insulated from the counter electrode 28C by the intermediate layer 28B. When a voltage having different polarity is applied to the intermediate layer 28B, light emission occurs in the organic emission layer.

[0123] The intermediate layer 28B can include an organic emission layer. In another embodiment, the intermediate layer 28B includes an organic emission layer and can further include at least one of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer. However, embodiments of the present disclosure are not limited thereto, and the intermediate layer 28B can include an organic emission layer and further include various other functional layers (not shown).

[0124] The intermediate layer 28B can be provided as a plurality of intermediate layers 28B. The plurality of intermediate layers 28B can constitute the display area DA. In this case, the plurality of intermediate layers 28B can be spaced apart from each other inside the display area DA.

[0125] One unit pixel can include a plurality of sub-pixels Px. The plurality of sub-pixels Px can respectively emit a plurality of beams of light having various colors. For example, the plurality of sub-pixels Px can include sub-pixels Px that respectively emit red light, green light, and blue light, or include sub-pixels Px that respectively emit red light, green light, blue light, and white light. Each sub-pixel Px can include the pixel electrode 28A, the intermediate layer 28B, and the counter electrode 28C described above.

[0126] The apparatus 100 for manufacturing a display device can form various layers over the display substrate D. For example, the apparatus 100 for manufacturing a display device can form at least one layer in the intermediate layer 28B. For example, the apparatus 100 for manufacturing a display device can form at least one of an organic emission layer, a hole injection layer, a hole transport layer, an electron transport layer, an electron injection layer, and a functional layer.

[0127] The thin film encapsulation layer E can include a plurality of inorganic layers, or include inorganic layers and organic layers.

[0128] The organic layer of the thin film encapsulation layer E can include a polymer-based material. The polymer-based material can include polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polyimide, polyethylenesulfonate, polyformaldehyde, polyarylate, hexamethyldisiloxane, an acrylic resin (e.g., polymethyl methacrylate, polymethylacrylate, etc.), or any combination thereof.

[0129] The inorganic layer of the thin film encapsulation layer E can include at least one inorganic insulating material among aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride.

[0130] The uppermost layer of the thin film encapsulation layer E exposed to the outside can include an inorganic layer to prevent moisture transmission of the organic light emitting diode 28.

[0131] The thin film encapsulation layer E can include at least one sandwich structure in which at least one organic layer is disposed between at least two inorganic layers. In another embodiment, the thin film encapsulation layer E can include at least one sandwich structure in which at least one inorganic layer is disposed between at least two organic layers. In another embodiment, the thin film encapsulation layer E can include a sandwich structure in which at least one organic layer is disposed between at least two inorganic layers and a sandwich structure in which at least one inorganic layer is disposed between at least two organic layers.

[0132] The thin film encapsulation layer E can include, in order from above the organic light emitting diode 28, a first inorganic encapsulation layer, a first organic encapsulation layer, and a second inorganic encapsulation layer.

[0133] In another embodiment, the thin film encapsulation layer E can include, in order from above the organic light emitting diode 28, a first inorganic encapsulation layer, a first organic encapsulation layer, a second inorganic encapsulation layer, a second organic encapsulation layer, and a third inorganic encapsulation layer.

[0134] In another embodiment, the thin film encapsulation layer E can include, in order from above the organic light emitting diode 28, a first inorganic encapsulation layer, a first organic encapsulation layer, a second inorganic encapsulation layer, a second organic encapsulation layer, a third inorganic encapsulation layer, a third organic encapsulation layer, and a fourth inorganic encapsulation layer.

[0135] A halogenated metal layer including LiF can be additionally included between the organic light emitting diode 28 and the first inorganic encapsulation layer. The halogenated metal layer can prevent the organic light emitting diode 28 from being damaged while the first inorganic encapsulation layer is formed by a sputtering method.

[0136] In an exemplary embodiment, the area of the first organic encapsulation layer is smaller than the area of the second inorganic encapsulation layer. In an exemplary embodiment, the area of the second organic encapsulation layer is smaller than the area of the third inorganic encapsulation layer.

[0137] In the case where multiple inorganic layers are provided, the inorganic layers can be deposited to make direct contact with each other in the edge area of ​​the display device 20, and the organic encapsulation layer is not exposed to the outside.

[0138] At least one of the intermediate layers 28B and at least one of the organic encapsulation layers of the thin-film encapsulation layer E can be manufactured by the apparatus 100 according to an exemplary embodiment of the present invention. In this case, because the apparatus 100 for manufacturing the display device 20 according to an exemplary embodiment of the present invention can supply droplets DR to the display substrate D in a fine pattern, a display device 20 with uniform quality can be manufactured. In particular, when at least one of the intermediate layers 28B is formed by the apparatus 100 for manufacturing the display device 20 according to an exemplary embodiment of the present invention, because at least one of the intermediate layers 28B is formed in a fine pattern, the display device 20 can display fine images.

[0139] Figure 9 This is a perspective view of an apparatus 200 for manufacturing a display device according to an exemplary embodiment of the present invention. Figure 10 yes Figure 9 The image shows a perspective view of the sensor unit 240 and the droplet DR.

[0140] refer to Figure 9 and Figure 10 The apparatus 200 for manufacturing a display device includes a stand 210, a moving unit 220, a head unit 230, a sensor unit 240, a linear actuator 250, a chamber 260, and a pressure regulator 270. In this case, because the stand 210, moving unit 220, head unit 230, chamber 260, and pressure regulator 270 are related to a reference... Figures 1 to 3 The descriptions are the same or similar, so their detailed descriptions have been omitted.

[0141] Sensor unit 240 may be arranged in chamber 260 or on stand 210. In this case, sensor unit 240 may be arranged on the top surface of stand 210. Sensor unit 240 may be fixed to stand 210. In another embodiment, sensor unit 240 may be arranged on stand 210 to move in the same manner as head unit 230 to cooperate with the movement of head unit 230. In this case, actuator 280 may be arranged on stand 210, and actuator 280 allows sensor unit 240 to perform linear movement. In this case, actuator 280 may be the same as or similar to linear actuator 250. In the following, for ease of description, the case in which sensor unit 240 is movably arranged on stand 210 using actuator 280 will be described in detail.

[0142] In this case, the plurality of beams of laser light LA emitted from the sensor unit 240 can be disposed above a plane parallel to the top surface of the stage 210. That is, the sensor unit 240 can emit the plurality of beams of laser light LA such that the plurality of beams of laser light LA are parallel to the top surface of the stage 210.

[0143] In the case in which the sensor unit 240 is disposed with respect to the chamber 260, the sensor unit 240 can be disposed to pass through the chamber 260, to be fixed to the inside of the chamber 260, to be fixed to the outside of the chamber 260, or to be disposed outside of the chamber 260 such that the sensor unit 240 performs linear motion. In particular, in the case in which the sensor unit 240 is disposed to pass through the chamber 260, to be fixed to the inside of the chamber 260, or to be fixed to the outside of the chamber 260, the sensor unit 240 can be disposed in a line and can sense the droplets DR discharged from the head unit 230 within the range of motion of the head unit 230. In addition, in the case in which the sensor unit 240 is disposed to be fixed to the inside of the chamber 260, to be fixed to the outside of the chamber 260, or to be disposed outside of the chamber 260 such that the sensor unit 240 performs linear motion, the chamber 260 can include a transmission window (e.g., a transparent window) to transmit the laser light LA emitted from the sensor unit 240. Hereinafter, for convenience of description, the case in which the sensor unit 240 is movably disposed on the stage 210 is mainly described in detail. In an exemplary embodiment, the sensor unit 240 moves in a direction perpendicular to the direction in which the moving unit 220 moves or the direction in which the head unit 230 moves.

[0144] The operation of the apparatus 200 for manufacturing a display device is described below. The pressure of the inside of the chamber 260 is adjusted by the pressure regulator 270 and then the display substrate D can be placed and fixed on the stage 210.

[0145] Then, the head unit 230 can be disposed on a predetermined position by operating the linear driver 250 and a head driver (not shown). The head unit 230 can be operable to supply the droplets DR to the display substrate D.

[0146] In this case, the sensor unit 240 can emit the laser light LA to pass through the path in which the droplets DR fall. In this case, the laser light LA can collide with the droplets DR, be reflected by the droplets DR, and be incident to the sensor unit 240 again. The sensor unit 240 can sense the reflected and incident laser light LA.

[0147] The planar shape of the droplets DR can be calculated based on the result of the sensing. The calculation of the result can be performed at the sensor unit 240 or at a controller provided separately. For example, the sensor unit 240 can provide the result to an external controller which can be located inside or outside of the chamber 260. The sensor unit 240 can include a communication unit (not shown) such as a wired or wireless communication unit to communicate with the external controller. Figure 3The sensor body part 241a can be the same as or similar to the sensor body part 141a of the sensor unit 140. For example, the sensor body part 241a can emit several beams of laser light LA. The sensor unit 240 can be different from the sensor unit 140 by excluding the reflector (see, for example, the reflector 142). Figure 2 Figure 2 The sensor unit 240 can be different from the sensor unit 140 by excluding the reflector (see, for example, the reflector 142).

[0148] Based on the result of the calculation, the diameter, the center, and the like of the planar shape of the droplet DR can be calculated. Then, in a case where the diameter of the planar shape of the droplet DR is different from the predetermined diameter, the amount of the droplet DR discharged from the nozzle 231, the speed of the droplet DR, and the like can be controlled so that the diameter of the planar shape of the droplet DR becomes the predetermined diameter. In addition, it is determined whether the calculated center of the planar shape of the droplet DR is included in a center range (not shown) set in advance. When a predetermined number of centers are arranged outside the center range, the operation of the relevant head unit 230 or the operation of the relevant nozzle 231 can be suspended or adjusted.

[0149] Thus, the apparatus 200 for manufacturing a display device, and the method of manufacturing a display device can monitor one or more parameters (e.g., planar shape, etc.) of the droplet DR in real time.

[0150] Figure 11 is a perspective view of a sensor unit 340 of an apparatus for manufacturing a display device according to an exemplary embodiment of the inventive concept. Figure 12 is a side view of the sensor unit shown in Figure 11

[0151] Referring to Figure 11 and Figure 12 , the apparatus (not shown) for manufacturing a display device can include a gantry (not shown), a moving unit (not shown), a head unit (not shown), the sensor unit 340, a linear driver (not shown), a chamber (not shown), and a pressure regulator (not shown). In this case, the gantry, the moving unit, the head unit, the sensor unit 340, the linear driver, the chamber, and the pressure regulator can be the same as or similar to those described in Figure 9 and Figure 10

[0152] In an exemplary embodiment, the sensor unit 340 emits a plurality of beams of laser light LA in a skew direction or at a skew angle with respect to the surface or plane of the display substrate D. For example, the portion of the sensor unit 340 from which the plurality of beams of laser light LA is emitted can be arranged in the skew direction with respect to the XY plane of the display substrate D. Figure 11 In this case, the plurality of beams of laser light LA can advance in different planes. In an exemplary embodiment, the laser light emitter 341b can be arranged in the skew direction in the ZX plane to emit the plurality of beams of laser light LA in the skew direction. In this case, the plurality of beams of laser light LA can advance in different planes. In an exemplary embodiment, the laser light emitter 341b can be arranged in the skew direction in the ZX plane to emit the plurality of beams of laser light LA in the skew direction.​​

[0153] In a case in which the plurality of laser beams LA are arranged on a plane parallel to the stage, each of the laser beams LA can be spaced apart from each other and thus can form a space. However, in a case in which the sensor unit 340 is arranged as described above, the spacing between the plurality of laser beams LA can be denser than the spacing between the plurality of laser beams LA shown in Figures 1 to 3 or Figure 9 and Figure 10 .

[0154] In this case, a method of sensing the droplet DR at the sensor unit 340 can be the same as or similar to the method described above. In an embodiment in which the plurality of laser beams LA are emitted to form a plane inclined with respect to the top surface of the stage, the planar shape of the droplet DR measured by the plurality of laser beams LA can always include a portion of a circle. In particular, as described above, because the plurality of laser beams LA are dense on the plane, the outside of the droplet DR can be more accurately measured.

[0155] A method of manufacturing a display device (not shown) by the apparatus for manufacturing a display device of Figure 11 is the same as or similar to the method described above.

[0156] Accordingly, the apparatus for manufacturing a display device (not shown) and the method of manufacturing a display device can monitor the parameters (e.g., planar shape, etc.) of the droplet DR in real time.

[0157] The apparatus for manufacturing a display device and the method of manufacturing a display device according to the exemplary embodiments of the present disclosure can accurately measure the droplet DR formed at at least one layer when manufacturing a display device. In addition, the apparatus for manufacturing a display device and the method of manufacturing a display device according to the exemplary embodiments of the present disclosure can accurately measure whether the nozzle discharging the droplet DR is malfunctioning. The apparatus for manufacturing a display device and the method of manufacturing a display device according to the exemplary embodiments of the present disclosure can monitor the planar shape of the droplet DR used when manufacturing a display device in real time and repeatedly obtain information of the droplet DR.

[0158] Although one or more embodiments of the present disclosure have been described with reference to the drawings, it will be understood by those of ordinary skill in the art that various changes in form and details can be made therein without departing from the spirit and scope of the inventive concept.

Claims

1. An apparatus for manufacturing a display device, the apparatus comprising: A platform configured to support a substrate; A mobile unit configured to move relative to the platform; A head unit, the head unit being disposed on the moving unit and including a nozzle for discharging droplets onto the substrate; A sensor unit configured to emit a laser to irradiate the droplet as it falls from the head unit onto the substrate to sense a portion of the droplet's planar shape; as well as A controller configured to calculate the planar shape of the droplet and the planar center of the droplet relative to the sensor unit, based on the results sensed by the sensor unit. The head unit includes a plurality of heads, and the relative positions between the heads are determined based on the plane center of the planar shape of the droplet falling from each head.

2. The device of claim 1, wherein the sensor unit directs the laser to a region of a plane perpendicular to the direction of droplet descent.

3. The device of claim 1, wherein the sensor unit configures the laser to have one or more line shapes from a plurality of available line shapes.

4. The device of claim 1, wherein the laser is reflected by the droplet arranged in a region spaced apart from the sensor unit by a first distance to generate reflected light, and the sensor unit uses the reflected light to determine the portion of the planar shape.

5. The device of claim 1, wherein the sensor unit comprises a plurality of sensors that emit the laser to the outside, and the plurality of sensors are arranged in a row.

6. The device according to claim 1, wherein the sensor unit is arranged on the moving unit.

7. The device according to claim 6, wherein the sensor unit comprises: Sensors arranged on the mobile unit generate and emit the laser. as well as A reflector configured to bend the path of the laser, the reflector being spaced apart from the sensor.

8. The device of claim 1, wherein the sensor unit emits the laser along a plane inclined relative to the top surface of the substrate on which the droplet falls.

9. The device according to claim 1, wherein the droplets comprise organic materials.

10. The device of claim 1, wherein the controller of the device controls whether to operate at least one of the head unit, the falling speed of the droplet, and the amount of the droplet based on the planar shape of the droplet sensed by the sensor unit.

11. The device of claim 1, wherein the controller of the device synchronizes the operating frequency of the head unit with the operating frequency of the laser.

12. The device of claim 1, wherein the controller of the device calculates the position of the droplet falling onto the substrate based on the plane center of the droplet.

13. The device of claim 1, wherein the device is configured to control the moving unit or the head unit based on a portion of the sensed planar shape.

14. A method of manufacturing a display device, the method comprising: Material is discharged from the head unit to drop the material onto the substrate; A laser is emitted along a specific plane to irradiate the droplet as it falls onto the substrate; A portion of the planar shape of the droplet is measured using the light of the laser reflected from the falling droplet; The planar shape of the droplet is calculated based on a portion of the planar shape of the droplet; Calculate the plane center of the droplet based on its planar shape; as well as The position of the head unit is adjusted according to the center of the plane of the droplet. The specific plane is parallel to the top surface of the substrate to which the droplet falls or is inclined relative to the top surface of the substrate to which the droplet falls.

15. The method of claim 14, wherein the emission of the laser emits at least two laser beams along the specific plane, and the droplet passes through the specific plane.

16. The method of claim 15, wherein the at least two laser beams are parallel to each other.

17. The method of claim 14, wherein the droplet passes through the laser at a point spaced a predetermined distance from the point where the laser is emitted.

18. The method of claim 14, wherein the droplet comprises an organic material.

19. The method of claim 14, further comprising: Determine the planar position of the droplet being measured; Whether to stop the discharge is determined based on the planar position of the droplet; as well as When it is determined that the discharge should be stopped, the head unit is controlled to stop the discharge.

20. The method of claim 14, further comprising: The planar dimensions of the droplet are calculated from the measurement results; as well as The head unit is controlled to adjust the discharge rate of the droplet based on the planar dimensions of the droplet.

21. The method of claim 14, further comprising: The head unit is controlled based on the measured portion of the planar shape.

22. A method of manufacturing a display device, the method comprising: Arrange the substrate on the stand; Adjust the relative positions of the platform and the head unit to adjust the relative positions of the substrate and the head unit; Droplets are discharged from the head unit; A laser is emitted by a sensor to irradiate the droplet as it falls from the head unit onto the substrate; The sensor senses the light of the laser reflected from the droplet; Calculate a portion of the planar shape of the droplet from the reflected light; The planar shape of the droplet is calculated based on a portion of the planar shape of the droplet; Calculate the plane center of the droplet based on its planar shape; as well as The position of the head unit is adjusted according to the center of the plane of the droplet.

23. The method of claim 22, further comprising synchronizing the operating frequency of the head unit with the operating frequency of the sensor.

24. The method of claim 22, wherein the path of the laser emitted from the sensor is variable.

25. The method of claim 22, wherein the sensor is movable relative to the test bench.

26. The method of claim 22, wherein the emission comprises emitting at least two parallel laser beams.

27. The method of claim 26, wherein the at least two parallel laser beams form a plane, and the plane formed by the at least two parallel laser beams is parallel to or inclined relative to the top surface of the substrate.

28. The method of claim 22, further comprising: Based on the planar shape of the droplet sensed by the sensor, control is exercised over at least one of the following: whether to operate the head unit, the droplet's falling speed, and the amount of the droplet.

Images