A three-axis gyroscope

Abstract

The present invention provides a three-axis gyroscope, which includes: a first drive frame, which is located on the left side and can perform resonant motion in the up and down directions along the Y axis; a second drive frame, which is located on the right side, which is parallel to the first drive frame and spaced a predetermined distance apart, and can perform resonant motion in the opposite direction of the first drive frame along the Y axis; an X / Y gyroscope structure connected between the first drive frame and the second drive frame; a Z gyroscope structure connected to the outside of the first drive frame and the second drive frame; wherein the X / Y gyroscope structure and the Z gyroscope structure are independent of each other, and both the X / Y gyroscope structure and the Z gyroscope structure are driven by the first drive frame and the second drive frame. Compared with the prior art, the X / Y gyroscope structure and the Z gyroscope structure of the three-axis gyroscope in the present invention are driven by the same two drive frames, and the X / Y gyroscope structure and the Z gyroscope structure are independent of each other. Therefore, the three-axis gyroscope in the present invention has the advantages of high integration and small orthogonal error.

Description

[Technical field]

[0001] The present invention relates to the technical field of micro-mechanical systems, and in particular to a lever-type three-axis gyroscope. [Background technology]

[0002] A gyroscope is a sensor used to measure angular rate and is one of the core components of inertial technology. It plays an important role in modern industrial control, aerospace, national defense and military, and consumer electronics.

[0003] The development of gyroscope can be roughly divided into three stages:

[0004] The first stage is the traditional mechanical rotor gyroscope, which has high precision and plays an irreplaceable role in military strategic weapons such as nuclear submarines and intercontinental strategic missiles, but it is large in size, complex in manufacturing process, expensive, long in cycle and not suitable for mass production; the second stage is the optical detection gyroscope, mainly including laser gyroscope and fiber optic gyroscope, which mainly uses the Sagnac effect. Its advantages are no rotating parts and high precision. It plays an important role in navigation and aerospace, but it still faces the problems of large size, high cost and difficulty in integration; the third stage is the micromechanical gyroscope, which was developed in the 1990s. Its research started late, but it has developed rapidly with its unique advantages of small size, low power consumption, light weight, mass production, low price, strong overload resistance and integration. It is suitable for civil fields such as aircraft navigation, automobile manufacturing, digital electronics, industrial equipment and modern national defense and military fields such as drones, tactical missiles, smart bombs, and military aiming systems. It has broad application prospects and is attracting more and more attention.

[0005] As the demand in the consumer market increases, there are higher requirements for the size and performance of MEMS (Micro-Electro-Mechanical System) gyroscopes. Gyroscopes have also changed from single-axis gyroscopes to three-axis gyroscopes. Early three-axis gyroscopes consisted of three independent single-axis gyroscopes and needed to include a separate drive structure, so the overall structure size was large. In current consumer applications, single-chip three-axis gyroscopes are generally used, which are characterized by shared drive and reasonable layout of X / Y / Z gyroscope mass blocks. Despite this, three-axis gyroscopes also face the problems of large size, low integration, and large orthogonal error.

[0006] See Chinese invention patent CN108225295A, which discloses a three-axis gyroscope with tuning fork drive effect. The three-axis gyroscope structure disclosed in the patent cleverly designs the steering structure. The left and right mass blocks are used to detect the Y / Z axis angular velocity, and the central mass block is used to detect the X axis angular velocity. However, it is obvious that its integration is not high, and the Y / Z mass blocks and the shared mass block are prone to coupling; continue to refer to Chinese invention patent CN110926445A, which discloses a three-axis MEMS gyroscope. The micro-gyroscope structure disclosed in the patent is shared drive. Its innovation lies in the novel design of the X / Y gyroscope structure, and the X / Y axis gyroscopes interact and are set in the middle of the drive frame and supported by the central anchor point. The Z axis gyroscopes are distributed on both sides of the X / Y gyroscopes and connected to the middle gyroscope structure. Its overall structural design is novel and reasonable, and its integration is high, but its Z axis gyroscope is not directly decoupled, and it may face the problems of low sensitivity and large orthogonal error.

[0007] Therefore, it is urgent to propose a new technical solution to solve the problems of low integration and large orthogonal error of the three-axis gyroscope in the prior art. [Summary of the invention]

[0008] One of the purposes of the present invention is to provide a three-axis gyroscope, which has the advantages of high integration and small orthogonal error.

[0009] According to one aspect of the present invention, there is provided a three-axis gyroscope, comprising: a first drive frame, which is located on the left side and is capable of performing resonant motion in the up and down directions along the Y-axis; a second drive frame, which is located on the right side, is parallel to the first drive frame and is spaced a predetermined distance apart from the first drive frame, and is capable of performing resonant motion along the Y-axis in the opposite direction to the first drive frame; an X / Y gyroscope structure connected between the first drive frame and the second drive frame; and a Z gyroscope structure connected to the outside of the first drive frame and the second drive frame; wherein the X / Y gyroscope structure and the Z gyroscope structure are independent of each other, and both the X / Y gyroscope structure and the Z gyroscope structure are driven jointly by the first drive frame and the second drive frame.

[0010] Compared with the prior art, the X / Y gyro structure and the Z gyro structure of the three-axis gyroscope in the present invention are driven by the same two drive frames, and the X / Y gyro structure and the Z gyro structure are independent of each other. The overall structure of the three-axis gyroscope is reasonable and compact, and the integration is high. When sensing angular velocities in different directions, due to the Coriolis effect, the X / Y gyro structure and the Z gyro structure are independent of each other and do not affect each other, which can reduce orthogonal errors and improve detection accuracy.

Brief Description of the Drawings

[0011] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0012] Figure 1 is a schematic diagram of the overall structure of a three-axis gyroscope in one embodiment of the present invention;

[0013] Figure 2 For the present invention Figure 1 The structural schematic diagram of the X / Y gyro structure shown;

[0014] Figure 3 For the present invention Figure 1 The structural schematic diagram of the Z gyro structure shown;

[0015] Figure 4 For the present invention Figure 1 The schematic diagram of the structural state of the three-axis gyroscope when it is driven is shown;

[0016] Figure 5 For the present invention Figure 1 The schematic diagram of the structural state of the three-axis gyroscope during X-axis detection is shown;

[0017] Figure 6 For the present invention Figure 1 The schematic diagram of the structural state of the three-axis gyroscope during Y-axis detection is shown;

[0018] Figure 7 For the present invention Figure 1 The schematic diagram of the structural state of the three-axis gyroscope during Z-axis detection is shown;

[0019] Figure 8 for Figure 1 An enlarged schematic diagram of the first drive frame region is shown;

[0020] Fig. 9 for Figure 1 An enlarged schematic diagram of the X / Y center coupling beam area is shown;

[0021] Fig.10 for Figure 1 An enlarged schematic diagram of the Z mass block area is shown.

[0022] Among them, 1a-left driving frame (or first driving frame); 1b-right driving frame (or second driving frame); 2a-upper mass block Y (or first mass block); 2b-lower mass block Y (or second mass block); 2c-left mass block X (or third mass block); 2d-right mass block X (or fourth mass block); 2e-left mass block Z (or first Z mass block); 2f-right mass block Z (or second Z mass block); 2g-left detection frame (or first Z detection frame); 2h-right detection frame (or second Z detection frame);

[0023] 3a.1-3a.6-first driving electrode; 3a.7-3a.12-second driving electrode; 3b.1-first driving feedback electrode; 3b.2-second driving feedback electrode; 3c.1-first Y-axis detection electrode, 3c.2-second Y-axis detection electrode; 3d.1-first X-axis detection electrode, 3d.2-second X-axis detection electrode; 3e.1-first Z-axis detection electrode, 3e.2-second Z-axis detection electrode;

[0024] 4a.1 and 4a.3 - first drive frame support beam, 4a.2 and 4a.4 - second drive frame support beam; 4b.1 - first X / Y drive coupling beam, 4b.2 - second X / Y drive coupling beam; 4c.1 - first Z drive coupling beam, 4c.2 - second Z drive coupling beam; 4d.1 - first X / Y steering beam, 4d.2 - second X / Y steering beam, 4d.3 - third X / Y steering beam, 4d.4 - fourth X / Y steering beam; 4e.1 - first X / Y connecting beam, 4e.2-second X / Y connecting beam, 4e.3-third X / Y connecting beam, 4e.4-fourth X / Y connecting beam; 4f-X / YZ center coupling beam; 4g.1~4g.4-first Z connecting beam, 4g.5~4g.8-second Z connecting beam; 4h.1~4h.4-first Z detection frame support beam, 4h.5~4h.8-second Z detection frame support beam; 4j.1 and 4i.2-lever beams; 4j.1~4j.4 lever support beams;

[0025] 5a.1 and 5a.3 - first drive frame anchor point, 5a.2 and 5a.4 - second drive frame anchor point; 5b.1 - first X / Y steering beam anchor point, 5b.2 - second X / Y steering beam anchor point, 5b.3 - third X / Y steering beam anchor point, 5b.4 - fourth X / Y steering beam anchor point; 5c.1 - 5c.4 - first Z detection frame support beam anchor point, 5c.5 - 5c.8 - second Z detection frame support beam anchor point; 5d.1 - 5d.4 - lever beam anchor point. [Specific implementation method]

[0026] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0027] The term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments. Unless otherwise specified, the words "connected", "connected", and "connected" herein that indicate electrical connection all refer to direct or indirect electrical connection.

[0028] In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore, cannot be understood as limiting the present invention. In the description of the present invention, "plurality" means two or more, unless otherwise clearly and specifically defined.

[0029] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "coupled" and the like should be understood in a broad sense; for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In view of the problems existing in the prior art, the present invention provides a three-axis gyroscope. Figure 1 As shown, it is a schematic diagram of the overall structure of a three-axis gyroscope in one embodiment of the present invention; please refer to Figure 2 As shown, it is the present invention Figure 1 The schematic diagram of the X / Y gyro structure shown in FIG. Figure 3 As shown, it is the present invention Figure 1 The schematic diagram of the Z gyro structure is shown in FIG. Figure 2 and Figure 3 It can be seen that Figure 1The three-axis gyroscope shown includes a first drive frame 1a, a second drive frame 1b, an X / Y gyro structure and a Z gyro structure. The first drive frame 1a is located on the left side, and it can perform resonant motion in the up and down directions along the Y axis. The second drive frame 1b is located on the right side, which is parallel to the first drive frame 1a and spaced a predetermined distance apart, and it can perform resonant motion in the opposite direction of the first drive frame 1a along the Y axis. The X / Y gyro structure is connected between the first drive frame 1a and the second drive frame 1b, and it can sense the X-axis angular velocity and the Y-axis angular velocity. The Z gyro structure is connected to the outside of the first drive frame 1a and the second drive frame 1b, and it can sense the Z-axis angular velocity. Among them, the X / Y gyro structure and the Z gyro structure are independent of each other and are not directly connected to each other. The X / Y gyro structure and the Z gyro structure are both driven by the first drive frame 1a and the second drive frame 1b. The overall structure of the three-axis gyroscope is reasonable and compact, and the integration is high. When sensing angular velocities in different directions, due to the Coriolis effect, the X / Y gyro structure and the Z gyro structure are independent of each other and do not affect each other, thereby reducing orthogonal errors and improving detection accuracy.

[0031] In order to better illustrate the structure of the three-axis gyroscope shown in the present invention, a three-dimensional rectangular coordinate system can be established. Figure 1-Figure 3 In the illustrated embodiment, in the plane where the base of the three-axis gyroscope is located, the direction parallel to the first driving frame 1a and the second driving frame 1b is the Y axis, the direction perpendicular to the first driving frame 1a and the second driving frame 1b is the X axis, the Z axis is determined by the X axis and the Y axis as the coordinate axis, and the center point A of the X / Y gyroscope structure is the coordinate origin. The three-dimensional rectangular coordinate system established by the X axis, the Y axis and the Z axis is Figure 1-Figure 3 It is reflected in.

[0032] like Figure 1-Figure 3 , Figure 8 As shown, the three-axis gyroscope also includes: first drive frame anchor points 5a.1 and 5a.3; first drive frame support beams 4a.1 and 4a.3, which are connected between the first drive frame anchor points 5a.1, 5a.3 and the first drive frame 1a; second drive frame anchor points 5a.2 and 5a.4; second drive frame support beams 4a.2 and 4a.4, which are connected between the second drive frame anchor points 5a.2 and 5a.4 and the second drive frame 1b; first drive electrodes 3a.1-3a.6 and first drive feedback electrodes 3b.1 arranged in the first drive frame 1a; second drive electrodes 3a.7-3a.12 and second drive feedback electrodes 3b.2 arranged in the second drive frame 1b.

[0033] The first drive electrodes 3a.1-3a.6, the first drive feedback electrodes 3b.1, the second drive electrodes 3a.7-3a.12 and the second drive feedback electrodes 3b.2 are fixedly arranged on a substrate (not shown), the first drive frame 1a is connected to the first drive frame anchor points 5a.1 and 5a.3 through the first drive frame support beams 4a.1 and 4a.3, the first drive frame 1a and the first drive frame support beams 4a.1 and 4a.3 are suspended above the substrate, the second drive frame 1b is connected to the second drive frame anchor points 5a.2 and 5a.4 through the second drive frame support beams 4a.2 and 4a.4, the second drive frame 1b and the second drive frame support beams 4a.2 and 4a.4 are suspended above the substrate. Among them, the drive frames 1a and 1b are of the same thickness as the drive frame support beams 4a.1-4a.4, which are suspended structures, while the anchor points 5a.1-5a.4 are non-suspended structures, which are directly connected to the substrate to play a supporting role.

[0034] exist Figure 1-Figure 3 In the specific embodiment shown, the first drive frame 1a and the second drive frame 1b have the same structure and are arranged symmetrically about the Y axis (or symmetrically distributed left and right). The first drive frame 1a is connected to the first drive frame anchor points 5a.1 and 5a.3 through the first drive frame support beams 4a.1 and 4a.3 respectively, and the first drive electrodes 3a.1 to 3a.6 are arranged in sequence along the Y axis direction (or up and down direction) in the first drive frame 1a, and the first drive feedback electrode 3b.1 is located between two adjacent first drive electrodes 3a.3 and 3a.4. The second drive frame 1b is connected to the second drive frame anchor points 5a.2 and 5a.4 through the second drive frame support beams 4a.2 and 4a.4 respectively, and the second drive electrodes 3a.7 to 3a.12 are arranged in sequence along the Y axis direction (or up and down direction) in the second drive frame 1b, and the second drive feedback electrode 3b.2 is located between two adjacent second drive electrodes 3a.9 and 3a.10. The driving frame support beams 4a.1 to 4a.4 all adopt the same U-shaped structure and the opening direction is parallel to the X-axis, wherein the driving frame support beams 4a.1 and 4a.3 are symmetrically distributed about the X-axis, and the driving frame support beams 4a.2 and 4a.4 are symmetrically distributed about the X-axis; the driving frame anchor points 5a.1 and 5a.3 are symmetrically distributed about the X-axis, and the driving frame anchor points 5a.2 and 5a.4 are symmetrically distributed about the X-axis.

[0035] like Figure 4 As shown, by applying a driving voltage to the first driving electrodes 3a.1-3a.6, the first driving frame 1a is driven to perform resonant motion along the Y axis; by applying a driving voltage to the second driving electrodes 3a.7-3a.12, the second driving frame 1b is driven to perform resonant motion along the Y axis in the opposite direction to the first driving frame 1a. Figure 4Only one movement direction of the first driving frame 1a and the second driving frame 1b along the Y axis is given as an example. For a detailed scheme of applying a driving voltage to the driving electrode to drive the driving frame to perform resonant motion along the Y axis, reference can be made to the existing related technology and will not be described in detail in this article.

[0036] In one embodiment, the X / Y gyro structure comprises: a first X / Y driving coupling beam 4b.1, a second X / Y driving coupling beam 4b.2, a first mass block 2a, a second mass block 2b, a third mass block 2c and a fourth mass block 2d, four steering beam anchor points 5b.1 to 5b.4 and four steering beams 4d.1 to 4d.4. The first mass block 2a, the second mass block 2b, the third mass block 2c and the fourth mass block 2d are respectively arranged at four positions of the upper, lower, left and right of the center point A of the X / Y gyro structure, the first mass block 2a is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the second mass block 2b is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the third mass block 2c is connected to the first driving frame 1a through the first X / Y driving coupling beam 4b.1, and the fourth mass block 2d is connected to the second driving frame 2b through the second X / Y driving coupling beam 4b.2. Each steering beam 5b.1-5b.4 is connected to a corresponding steering beam anchor point 4d.1-4d.4, and two adjacent mass blocks are connected through a corresponding steering beam. When the first drive frame 1a performs resonant motion along the Y axis and the second drive frame 1b performs resonant motion in the opposite direction to the first drive frame 1a along the Y axis, the first drive frame 1a drives the third mass block 2c to perform resonant motion along the Y axis through the first X / Y drive coupling beam 4b.1, and the second drive frame 1b drives the fourth mass block 2d to perform resonant motion in the opposite direction to the third mass block 2c along the Y axis through the second X / Y drive coupling beam 4b.2. The third mass block 2c and the fourth mass block 2d drive the first mass block 2a to perform resonant motion along the X axis through the corresponding steering beams (for example, steering beams 4d.1 and 4d.2), and drive the second mass block 2b to perform resonant motion in the opposite direction to the first mass block 2a along the X axis through the corresponding steering beams (for example, steering beams 4d.3 and 4d.4). A certain number of damping holes may be provided on the mass blocks 2a-2d of the X / Y gyro structure to reduce damping and improve the quality factor and sensitivity of the gyro.

[0037] In one embodiment, the X / Y gyro structure also includes: an X / Y center coupling beam 4f located at the center point A of the X / Y gyro structure; four X / Y connecting beams 4e.1 to 4e.4 respectively connected to the inner sides of corresponding mass blocks, each connecting beam being connected to the X / Y center coupling beam 4f; a first Y-axis detection electrode 3c.1 arranged under the first mass block 2a; a second Y-axis detection electrode 3c.2 arranged under the second mass block 2b; a first X-axis detection electrode 3d.1 arranged under the third mass block 2c; and a second X-axis detection electrode 3d.2 arranged under the fourth mass block 2d. When the Y-axis angular velocity input is sensed, the first mass block 2a and the second mass block 2b will move in opposite directions along the Z-axis direction. The first Y-axis detection electrode 3c.1 detects the change in distance from the first mass block 2a, and the second Y-axis detection electrode 3c.2 detects the change in distance from the second mass block 2b. Specifically, after being sensitive to the Y-axis angular velocity, the capacitance of the first Y-axis detection electrode 3c.1 and the capacitance of the second Y-axis detection electrode 3c.2 increase and decrease respectively. The difference between the two is used to obtain the capacitance change caused by the Y-axis angular velocity, and then the input Y-axis angular velocity is obtained. When the X-axis angular velocity input is sensed, the third mass block 2c and the fourth mass block 2d move in opposite directions along the Z-axis direction, the first X-axis detection electrode 3d.1 detects the change in distance from the third mass block 2c, and the second X-axis detection electrode 3d.2 detects the change in distance from the fourth mass block 2d. Specifically, after being sensitive to the X-axis angular velocity, the capacitance of the first X-axis detection electrode 3d.1 and the capacitance of the second X-axis detection electrode 3d.2 increase and decrease respectively, and the difference between the two is used to obtain the capacitance change caused by the X-axis angular velocity, thereby obtaining the input X-axis angular velocity.

[0038] exist Figure 1In the specific embodiment shown, the first X / Y drive coupling beam 4b.1 and the second X / Y drive coupling beam 4b.2 have the same structure and are symmetrical about the Y axis; the four mass blocks 2a~2d in the X / Y gyro structure have the same structure, and all include a rectangular portion and an isosceles trapezoidal portion; the four mass blocks 2a~2d are symmetrical about the X axis and the Y axis as a whole; the four steering beams 4d.1~4d.4 are symmetrical about the X axis and the Y axis as a whole; the four steering beams 4d.1~4d.4 are symmetrical about the X axis and the Y axis as a whole; the four steering beam anchor points 5b.1~5b.4 are symmetrical about the X axis and the Y axis as a whole; the X-axis detection electrodes 3d.1, 3d.2, the Y-axis detection electrodes 3c.1, 3c.2, and the steering beam anchor points 5b.1~5b.4 are fixedly arranged on the substrate; the four mass blocks 2a~2d of the X / Y gyro structure, the four steering beams 4d.1~4d.4, the X / Y drive coupling beams 4b.1, 4b.2, the X / Y center coupling beam 4f, and the four X / Y connecting beams 4e.1~4e.4 are suspended above the substrate. The four steering beams 4d.1 to 4d.4 are respectively located at the four corners of the figure composed of the four mass blocks 2a to 2d in the X / Y gyro structure; the four steering beam anchor points 5b.1 to 5b.4 are respectively located at the four corners of the figure composed of the four mass blocks 2a to 2d of the X / Y gyro structure; the four steering beams 4d.1 to 4d.4 are respectively connected to the four steering beam anchor points 5b.1 to 5b.4 in a one-to-one correspondence; two adjacent mass blocks are connected through a corresponding steering beam, for example, the X / Y steering beam 4d.1 connects the third mass block 2c and the first mass block 2a, the X / Y steering beam 4d.2 connects the first mass block 2a and the fourth mass block 2d, the X / Y steering beam 4d.3 connects the second mass block 2b and the third mass block 2c, and the X / Y steering beam 4d.4 connects the fourth mass block 2d and the second mass block 2b.

[0039] exist Figure 1 In the specific embodiment shown, each steering beam 4d.1~4d.4 is a pentagon formed by removing a corner of a square. In each of the pentagons, one corner is connected to a corresponding steering beam block anchor point, and the other two corners adjacent to the corner are respectively connected to two corresponding adjacent mass blocks in the X / Y gyro structure. The X / Y center coupling beam 4f is a concentric circle structure, and its center is the center point A of the X / Y gyro structure; the four X / Y connecting beams 4e.1~4e.4 have the same structure, and the four X / Y connecting beams 4e.1~4e.4 are symmetrical about the X-axis and the Y-axis as a whole, and each X / Y connecting beam 4e.1~4e.4 includes a plurality of hollow straight beam portions whose lengths gradually decrease from the outside to the inside and a connecting portion connecting the hollow straight beams; wherein, the X / Y connecting beams 4e.1 and 4e.2 located on the left and right sides of the X / Y center coupling beam 4f are placed parallel to the Y-axis (or placed in the up and down direction), and the X / Y connecting beams 4e.3 and 4e.4 located on the upper and lower sides of the X / Y center coupling beam 4f are placed parallel to the X-axis (or placed in the left and right direction).

[0040] like Figure 1 , Figure 3 and Fig.10 As shown, the Z gyro structure includes:

[0041] a first Z-driven coupling beam 4c.1 and a second Z-driven coupling beam 4c.2;

[0042] A first Z detection frame 2g, which is located at a side of the first driving frame 1a away from the X / Y gyro structure, and is connected to the first driving frame 1a via a first Z driving coupling beam 4c.1, and a first Z space is defined therein;

[0043] A first Z mass 2e, which is located in the first Z space and connected to the first Z detection frame 2g via first Z connecting beams 4g.1 to 4g.4;

[0044] The second Z detection frame 2h is located at a side of the second driving frame 1b away from the X / Y gyro structure, and is connected to the second driving frame 1b via a second Z driving coupling beam 4c.2, wherein a second Z space is defined;

[0045] A second Z mass 2f, which is located in the second Z space and connected to the second Z detection frame 2h via second Z connecting beams 4g.5-4g.8;

[0046] Among them, when the first driving frame 1a performs resonant motion along the Y-axis and the second driving frame 1b performs resonant motion along the Y-axis in the opposite direction to the first driving frame 1a, the first driving frame 1a drives the first Z mass block 2e to perform resonant motion along the Y-axis through the first Z driving coupling beam 4c.1, the first Z detection frame 2g, and the first Z connecting beams 4g.1~4g.4, and the second driving frame 1b drives the second Z mass block 2f to perform resonant motion along the Y-axis in the opposite direction to the first Z mass block 2e through the second Z driving coupling beam 4c.2, the second Z detection frame 2h, and the second Z connecting beams 4g.5~4g.8.

[0047] exist Figure 1 , Figure 3 and Fig.10In the specific embodiment shown, the structures of the first Z drive coupling beam 4c.1 and the second Z drive coupling beam 4c.2 are identical and symmetrical about the Y axis; the structures of the first Z detection frame 2g and the second Z detection frame 2h are identical and symmetrical about the Y axis; the structures of the first Z mass block 2e and the second Z mass block 2f are identical and symmetrical about the Y axis; the first Z connecting beam 4g.1~4g.4 and the second Z connecting beam 4g.5~4g.8 are symmetrical about the X axis and the Y axis as a whole. There are four first Z connecting beams 4g.1 to 4g.4, wherein two first Z connecting beams 4g.1 and 4g.3 are respectively located at the upper and lower ends of the left side of the first Z mass block 2e, and the other two first Z connecting beams 4g.2 and 4g.4 are respectively located at the upper and lower ends of the right side of the first Z mass block 2e, and the first Z connecting beams 4g.1 to 4g.4 are placed parallel to the Y-axis direction (or placed along the up-down direction); there are four second Z connecting beams 4g.5 to 4g.8, wherein two second Z connecting beams 4g.5 and 4g.7 are respectively located at the upper and lower ends of the left side of the second Z mass block 2f, and the other two second Z connecting beams 4g.6 and 4g.8 are respectively located at the upper and lower ends of the right side of the second Z mass block 2f, and the second Z connecting beams 4g.5 to 4g.8 are placed parallel to the Y-axis direction (or placed along the up-down direction). A certain number of damping holes may be provided on the first Z mass block 2e and the second Z mass block 2f to reduce damping and improve the sensitivity of the Z-axis gyroscope.

[0048] like Figure 1 , Figure 3 and Fig.10 As shown, the Z gyro structure further includes:

[0049] First Z detection frame support beam anchor points 5c.1 to 5c.4;

[0050] First Z detection frame support beams 4h.1-4h.4, which are connected between the first Z detection frame support beam anchor points 5c.1-5c.4 and the first Z detection frame 2g;

[0051] Second Z detection frame support beam anchor points 5c.5 to 5c.8;

[0052] The second Z detection frame support beams 4h.5~4h.8 are connected between the second Z detection frame support beam anchor points 5c.5~5c.8 and the second Z detection frame 2h.

[0053] exist Figure 1 , Figure 3 and Fig.10In the specific embodiment shown, there are four first Z detection frame support beam anchor points 5c.1~5c.4, of which two first Z detection frame support beam anchor points 5c.1 and 5c.2 are respectively located at the left and right ends of the top of the first Z detection frame 2g, and the other two first Z detection frame support beam anchor points 5c.3 and 5c.4 are respectively located at the left and right ends of the bottom of the first Z detection frame 2g; there are four first Z detection frame support beams 4h.1~4h.4, of which two first Z detection frame support beams 4h.1 and 4h.2 are respectively located at the left and right ends of the top of the first Z detection frame 2g, and the other two first Z detection frame support beams 4h.3 and 4h.4 are respectively located at the left and right ends of the bottom of the first Z detection frame 2g; each first Z detection frame support beam is connected between a corresponding first Z detection frame support beam anchor point and a corresponding corner of the first Z detection frame. There are four second Z detection frame support beam anchor points 5c.5~5c.8, of which two second Z detection frame support beam anchor points 5c.5 and 5c.6 are respectively located at the left and right ends of the top of the second Z detection frame 2h, and the other two second Z detection frame support beam anchor points 5c.7 and 5c.8 are respectively located at the left and right ends of the bottom of the second Z detection frame 2h; there are four second Z detection frame support beams 4h.5~4h.8, of which two second Z detection frame support beams 4h.5 and 4h.6 are respectively located at the left and right ends of the top of the second Z detection frame 2h, and the other two second Z detection frame support beams 4h.7 and 4h.8 are respectively located at the left and right ends of the bottom of the second Z detection frame 2h; each second Z detection frame support beam is connected between a corresponding second Z detection frame support beam anchor point and a corresponding corner of a second Z detection frame. Among them, the first Z detection frame support beam anchor points 5c.1~5c.4 and the second Z detection frame support beam anchor points 5c.5~5c.8 are symmetrical about the X-axis and the Y-axis as a whole; the first Z detection frame support beams 4h.1~4h.4 and the second Z detection frame support beams 4h.5~4h.8 are both U-shaped beams, and the opening direction of the U-shaped beams is parallel to the X-axis; the first Z detection frame support beams 4h.1~4h.4 and the second Z detection frame support beams 4h.5~4h.8 are symmetrical about the X-axis and the Y-axis as a whole.

[0054] like Figure 1 , Figure 3 and Fig.10 As shown, the Z gyro structure further includes:

[0055] A first Z-axis detection electrode 3e.1 disposed in the first Z mass block 2e;

[0056] A second Z-axis detection electrode 3e.2 disposed in the second Z mass block 2f;

[0057] When the Z-axis angular velocity input is sensed, the first Z mass block 2e and the second Z mass block 2f will move in the opposite direction along the X-axis direction, the first Z-axis detection electrode 3e.1 detects the distance change between the first Z-axis detection electrode 3e.1 and the first Z-axis detection electrode 2e, and the second Z-axis detection electrode 3e.2 detects the distance change between the first Z-axis detection electrode 3e.1 and the second Z-axis detection electrode 3e.2. Specifically, after sensing the Z-axis angular velocity, one of the capacitances of the first Z-axis detection electrode 3e.1 and the second Z-axis detection electrode 3e.2 increases, while the other decreases. The difference between the two is used to obtain the capacitance change caused by the Z-axis angular velocity, and then the input Z-axis angular velocity is obtained.

[0058] like Figure 1 , Figure 3 and Fig.10 As shown, the Z gyro structure further includes:

[0059] Lever beam anchor points 5d.1 to 5d.4;

[0060] Lever support beams 4j.1 to 4j.4;

[0061] Lever beams 4i.1 and 4i.2 are connected to the lever beam anchor points 5d.1 to 5d.4 through the lever support beams 4j.1 to 4j.4 (or the lever beams 4i.1 and 4i.2 are suspended on the base through the lever support beams 4j.1 to 4j.4 and the lever beam anchor points 5d.1 to 5d.4), and the lever beams 4i.1 to 4i.2 connect the first Z detection frame 2g and the second Z detection frame 2h. The lever beams 4i.1 to 4i.2 are arranged to cause the first Z detection frame 2g and the second Z detection frame 2h to move in opposite directions along the Y axis.

[0062] exist Figure 1 , Figure 3 and Fig.10 In the specific embodiment shown, there are two lever beams 4i.1 and 4i.2, wherein one lever beam 4i.1 is located at the top of the first Z detection frame 2g and the second Z detection frame 2h, one end of the lever beam 4i.1 is connected to the top of the first Z detection frame 2g, and the other end is connected to the top of the second Z detection frame 2h, and the middle part is connected to the corresponding lever beam anchor points 5d.1 and 5d.2 through the corresponding lever support beams 4j.1 and 4j.2; the other lever beam 4i.2 is located at the bottom of the first Z detection frame 2g and the second Z detection frame 2h, one end of the other lever beam 4i.2 is connected to the bottom of the first Z detection frame 2g, and the other end is connected to the bottom of the second Z detection frame 2h, and the middle part is connected to the corresponding lever beam anchor points 5d.3 and 5d.4 through the corresponding lever support beams 4j.3 and 4j.4.

[0063] exist Figure 1 , Figure 3 and Fig.10In the specific embodiment shown, the two lever beams 4i.1 and 4i.2 are both T-shaped structures, and the T-shaped structure includes a crossbar portion and a vertical bar portion located in the middle of the crossbar, one end of the crossbar portion of the T-shaped structure is one end of the lever beam, the other end of the crossbar portion is the other end of the lever beam, and the vertical bar portion is the middle of the lever beam. There are four lever beam anchor points 5d.1 to 5d.4, and four lever support beams 4j.1 to 4j.4, wherein the two lever beam anchor points 5d.1 and 5d.2 are respectively located on the left and right sides of the vertical bar portion of a T-shaped structure 4i.1, and the two lever support beams 4j.1 and 4j.2 are respectively located on the left and right sides of the vertical bar portion of a T-shaped structure 4i.1, and the two lever beam anchor points 5d.1 and 5d.2 are connected to the one corresponding lever support beam 4j.1 and 4j.2 respectively. The two lever beams 4i.1 and 4i.2 are connected to the vertical rod of the T-shaped structure 4i.1; the other two lever beam anchor points 5d.3 and 5d.4 are respectively located on the left and right sides of the vertical rod of another T-shaped structure 4i.2, and the other two lever support beams 4j.3 and 4j.4 are respectively located on the left and right sides of the vertical rod of another T-shaped structure 4i.2, and the other two lever beam anchor points 5d.3 and 5d.4 are respectively connected to the vertical rod of another T-shaped structure 4i.2 through a corresponding lever support beam 4j.3 and 4j.4. Among them, the two lever beams 4i.1 and 4i.2 are symmetrical about the X axis; the four lever beam anchor points 5d.1 to 5d.4 are symmetrical about the X axis and the Y axis as a whole; the four lever support beams 4j.1 to 4j.4 are symmetrical about the X axis and the Y axis as a whole.

[0064] Among them, the Z-axis detection electrodes 3e.1, 3e.2, the first Z detection frame support beam anchor points 5c.1~5c.4, the second Z detection frame support beam anchor points 5c.5~5c.8, and the lever beam anchor points 5d.1~5d.4 are arranged on the substrate, and the first Z drive coupling beam 4c.1 and the second Z drive coupling beam 4c.2 of the Z gyro structure, the first Z detection frame 2g, the second Z detection frame 2h, the first Z mass block 2e, the second Z mass block 2f, and the two lever beams 4i.1, 4i.2 are suspended above the substrate.

[0065] The present invention is described below Figure 1 The detection principle of the three-axis gyroscope shown.

[0066] 1. X / Y axis gyroscope detection principle

[0067] Please refer to Figure 4 As shown, it is the present invention Figure 1The schematic diagram of the structural state of the three-axis gyroscope when it is driven is shown. By applying a driving voltage, the first drive frame 1a and the second drive frame 1b on the left and right sides will produce reverse resonant motion along the Y-axis direction, which will drive the X / Y gyro structure to move. The specific process is that the first drive frame 1a and the second drive frame 1b drive the third mass block 2c and the fourth mass block 2d to produce reverse resonant motion in the up and down directions along the Y-axis direction through the X / Y drive coupling beams 4b.1 and 4b.2, and the third mass block 2c and the fourth mass block 2d will drive the first mass block 2a and the second mass block 2b to produce reverse resonant motion in the left and right (or horizontal) directions along the X-axis through the X / Y steering beams 4d.1 to 4d.4 arranged around, so that the first mass block 2a, the second mass block 2b, the third mass block 2c and the fourth mass block 2d move in the clockwise or counterclockwise direction as a whole.

[0068] Please refer to Figure 5 As shown, it is the present invention Figure 1 The schematic diagram of the structural state of the three-axis gyroscope during X-axis detection is shown. When the X-axis angular rate input is sensitive, the Coriolis force generated by the Coriolis effect drives the third mass block 2c and the fourth mass block 2d to move in the opposite direction away from the surface along the Z-axis direction, and the X-axis detection electrodes 3d.1 and 3d.2 set under the third mass block 2c and the fourth mass block 2d are sensitive to the change in distance, and then the self-capacitance of the X-axis detection electrodes 3d.1 and 3d.2 will change accordingly, and the magnitude of the X-axis angular rate can be obtained by detecting the change in capacitance.

[0069] Please refer to Figure 6 As shown, it is the present invention Figure 1 The schematic diagram of the structural state of the three-axis gyroscope during Y-axis detection is shown. When the Y-axis angular velocity input is sensitive, the Coriolis force generated by the Coriolis effect drives the first mass block 2a and the second mass block 2b to move in the opposite direction away from the surface along the Z-axis direction, and the Y-axis detection electrodes 3c.1 and 3c.2 arranged under the first mass block 2a and the second mass block 2b are sensitive to the change in distance, and then the self-capacitance of the Y-axis detection electrodes 3c.1 and 3c.2 will change accordingly, and the magnitude of the Y-axis angular velocity can be obtained by detecting the change in capacitance.

[0070] 2. Z-axis gyroscope detection principle

[0071] Please continue to refer to Figure 4As shown, by applying a driving voltage, the first driving frame 1a and the second driving frame 1b on the left and right sides are caused to perform reverse resonant motion along the Y-axis direction, which will drive the Z gyro structure to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the first Z detection frame 2g and the second Z detection frame 2h outside the first driving frame 1a and the second driving frame 1b to produce reverse resonant motion in the up-down direction along the Y-axis direction through the Z driving coupling beams 4c.1 and 4c.2. The first Z detection frame 2g and the second Z detection frame 2h are respectively provided with the first Z mass block 2e and the second Z mass block 2f. The first Z detection frame 2g and the second Z detection frame 2h will drive the first Z mass block 2e and the second Z mass block 2f to perform reverse resonant motion in the up-down direction along the Y-axis direction.

[0072] Please refer to Figure 7 As shown, it is the present invention Figure 1 The schematic diagram of the structural state of the three-axis gyroscope during Z-axis detection is shown. When the Z-axis angular velocity input is sensitive, the Coriolis effect will generate a Coriolis force to drive the first Z mass block 2e and the second Z mass block 2f to move in the opposite direction along the X-axis direction, and the Z detection electrodes 3e.1 and 3e.2 respectively arranged inside the first Z mass block 2e and the second Z mass block 2f are sensitive to the change in distance, and then the capacitance of the Z detection electrodes 3e.1 and 3e.2 will change accordingly, and the magnitude of the Z-axis angular velocity can be obtained by detecting the change in capacitance.

[0073] In summary, in the three-axis gyroscope shown in the present invention, when the first driving frame 1a and the second driving frame 1b drive the masses 2a to 2f to move, the displacement of the masses 2a to 2f in the sensitive direction can be ignored and will not affect the angular velocity signal detection. When the angular velocity in different directions is sensitive, due to the Coriolis effect, the corresponding mass block moves without affecting other mass blocks, so that the three-axis gyroscope designed by the present invention can reduce the orthogonal error and improve the detection accuracy.

[0074] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0075] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify and vary the above embodiments within the scope of the present invention.

Claims

1. A three-axis gyroscope, characterized in that: It includes: A first driving frame, which is located on the left side and can perform resonant motion in the up and down directions along the Y axis; A second driving frame, which is located on the right side, is parallel to the first driving frame and is separated by a predetermined distance, and can perform a resonant motion along the Y axis in the opposite direction to the first driving frame; An X / Y gyro structure connected between the first drive frame and the second drive frame; A Z gyro structure connected to the outer sides of the first driving frame and the second driving frame; The X / Y gyro structure and the Z gyro structure are independent of each other, and both the X / Y gyro structure and the Z gyro structure are driven by the first drive frame and the second drive frame. In the plane where the base of the three-axis gyroscope is located, the direction parallel to the first drive frame and the second drive frame is the Y axis, the direction perpendicular to the first drive frame and the second drive frame is the X axis, and the Z axis is determined by the X axis and the Y axis as coordinate axes. The first drive frame and the second drive frame have the same structure and are symmetrically arranged about the Y axis. The X / Y gyro structure comprises: a first X / Y driving coupling beam and a second X / Y driving coupling beam; The first mass block, the second mass block, the third mass block and the fourth mass block are respectively arranged at four positions of the upper, lower, left and right of the center point A of the X / Y gyro structure, the first mass block is arranged adjacent to the third mass block and the fourth mass block, the second mass block is arranged adjacent to the third mass block and the fourth mass block, the third mass block is connected to the first driving frame through the first X / Y driving coupling beam, and the fourth mass block is connected to the second driving frame through the second X / Y driving coupling beam; Four steering beam anchor points and four steering beams, wherein each steering beam is connected to a corresponding steering beam anchor point, and two adjacent mass blocks are connected via a corresponding steering beam; Wherein, when the first driving frame performs resonant motion along the Y axis and the second driving frame performs resonant motion in the opposite direction to the first driving frame along the Y axis, the first driving frame drives the third mass block to perform resonant motion along the Y axis through the first X / Y driving coupling beam, the second driving frame drives the fourth mass block to perform resonant motion in the opposite direction to the third mass block along the Y axis through the second X / Y driving coupling beam, the third mass block and the fourth mass block drive the first mass block to perform resonant motion along the X axis through the corresponding steering beams, and drive the second mass block to perform resonant motion in the opposite direction to the first mass block along the X axis through the corresponding steering beams, The X-axis and the Y-axis are perpendicular to each other and define a plane where the X / Y gyro structure is located, and the Z-axis is perpendicular to the plane defined by the X-axis and the Y-axis.

2. The three-axis gyroscope according to claim 1, characterized in that: It also includes: First drive frame anchor point; a first drive frame support beam connected between the first drive frame anchor point and the first drive frame; Second drive frame anchor point; a second drive frame support beam connected between the second drive frame anchor point and the second drive frame; A first driving electrode and a first driving feedback electrode disposed in a first driving frame; A second driving electrode and a second driving feedback electrode disposed in the second driving frame; Driving the first driving frame to perform resonant motion along the Y-axis by applying a driving voltage to the first driving electrode; The second driving frame is driven to perform a resonant motion along the Y-axis in the opposite direction to the first driving frame by applying a driving voltage to the second driving electrode.

3. The three-axis gyroscope according to claim 2, characterized in that: The first drive electrode, the first drive feedback electrode, the second drive electrode and the second drive feedback electrode are fixedly arranged on the substrate, the first drive frame is connected to the first drive frame anchor point through the first drive frame support beam, the first drive frame and the first drive frame support beam are suspended above the substrate, the second drive frame is connected to the second drive frame anchor point through the second drive frame support beam, and the second drive frame and the second drive frame support beam are suspended above the substrate.

4. The three-axis gyroscope according to claim 1, characterized in that: The X / Y gyro structure further comprises: an X / Y center coupling beam located at the center point A of the X / Y gyro structure, Four connecting beams are respectively connected to the inner sides of corresponding mass blocks, and each connecting beam is connected to the X / Y central coupling beam.

5. The three-axis gyroscope according to claim 4, characterized in that: The X / Y gyro structure further comprises: A first Y-axis detection electrode disposed below the first mass block; A second Y-axis detection electrode disposed below the second mass block; a first X-axis detection electrode disposed below the third mass block; a second X-axis detection electrode disposed below the fourth mass block; When the Y-axis angular velocity input is sensed, the first mass block and the second mass block will move in the opposite direction along the Z-axis direction, the first Y-axis detection electrode detects the change in distance from the first mass block, the second Y-axis detection electrode detects the change in distance from the second mass block, one of the capacitances of the first Y-axis detection electrode and the second Y-axis detection electrode increases, and the other decreases, and the difference between the two is used to obtain the capacitance change caused by the Y-axis angular velocity, and then the input Y-axis angular velocity magnitude is obtained; similarly, when the X-axis angular velocity input is sensed, the third mass block and the fourth mass block will move in the opposite direction along the Z-axis direction, the first X-axis detection electrode detects the change in distance from the third mass block, the second X-axis detection electrode detects the change in distance from the fourth mass block, one of the capacitances of the first X-axis detection electrode and the second X-axis detection electrode increases, and the other decreases, and the difference between the two is used to obtain the capacitance change caused by the X-axis angular velocity, and then the input X-axis angular velocity magnitude is obtained.

6. The three-axis gyroscope according to claim 5, characterized in that: The four steering beams are respectively located at the four corners of the figure formed by the four mass blocks in the X / Y gyro structure; The four steering beam anchor points are respectively located at the four corners of the figure formed by the four mass blocks of the X / Y gyro structure, The X / Y center coupling beam is a concentric circle structure, the center of which is the center point A of the X / Y gyro structure; Each connecting beam comprises a plurality of hollow straight beam portions whose lengths gradually decrease from the outside to the inside and a connecting portion connecting the hollow straight beams.

7. The three-axis gyroscope according to claim 6, characterized in that: Each steering beam is a pentagon formed by removing one corner of a square. In each of the pentagons, one of its corners is connected to a corresponding one of the steering beam anchor points, and the other two corners adjacent to the corner are respectively connected to two corresponding adjacent mass blocks in the X / Y gyro structure. The four masses in the X / Y gyro structure include a rectangular portion and an isosceles trapezoidal portion. The four mass blocks are symmetrical about the X-axis and the Y-axis as a whole; The four steering beams are symmetrical about the X-axis and the Y-axis as a whole; The four steering beam anchor points are symmetrical about the X-axis and the Y-axis as a whole; A certain number of damping holes are arranged on the mass block of the X / Y gyro structure to reduce damping and improve the quality factor and sensitivity of the gyro. The X-axis detection electrode, the Y-axis detection electrode, and the steering beam anchor point are fixedly arranged on the substrate, and the four mass blocks, four steering beams, the X / Y driving coupling beam, the central coupling beam, and four connecting beams of the X / Y gyro structure are suspended above the substrate.

8. The three-axis gyroscope according to claim 1, characterized in that: The Z gyro structure comprises: a first Z-driven coupling beam and a second Z-driven coupling beam; A first Z detection frame, which is located at a side of the first driving frame away from the X / Y gyro structure, is connected to the first driving frame through a first Z driving coupling beam, and a first Z space is defined therein; A first Z mass block is located in the first Z space and connected to the first Z detection frame through a first Z connecting beam; A second Z detection frame is located at a side of the second driving frame away from the X / Y gyro structure, connected to the second driving frame via a second Z driving coupling beam, and defines a second Z space therein; A second Z mass block is located in the second Z space and connected to the second Z detection frame through a second Z connecting beam; Among them, when the first driving frame performs resonant motion along the Y-axis and the second driving frame performs resonant motion along the Y-axis in the opposite direction to that of the first driving frame, the first driving frame drives the first Z mass block to perform resonant motion along the Y-axis through the first Z driving coupling beam, the first Z detection frame, and the first Z connecting beam, and the second driving frame drives the second Z mass block to perform resonant motion along the Y-axis in the opposite direction to that of the first Z mass block through the second Z driving coupling beam, the second Z detection frame, and the second Z connecting beam.

9. The three-axis gyroscope according to claim 8, characterized in that: The Z gyro structure further comprises: The first Z detection frame support beam anchor point; A first Z detection frame support beam connected between the first Z detection frame support beam anchor point and the first Z detection frame; The second Z detection frame support beam anchor point; The second Z detection frame support beam is connected between the second Z detection frame support beam anchor point and the second Z detection frame.

10. The three-axis gyroscope according to claim 9, characterized in that: There are four anchor points of the first Z detection frame support beam, two of which are located at the left and right ends of the top of the first Z detection frame, and the other two anchor points of the first Z detection frame support beam are located at the left and right ends of the bottom of the first Z detection frame; There are four first Z detection frame support beams, two of which are located at the left and right ends of the top of the first Z detection frame, and the other two are located at the left and right ends of the bottom of the first Z detection frame; Each first Z detection frame support beam is connected between a corresponding anchor point of the first Z detection frame support beam and a corner of the corresponding first Z detection frame; There are four anchor points of the second Z detection frame support beam, two of which are respectively located at the left and right ends of the top of the second Z detection frame, and the other two anchor points of the second Z detection frame support beam are respectively located at the left and right ends of the bottom of the second Z detection frame; there are four second Z detection frame support beams, two of which are respectively located at the left and right ends of the top of the second Z detection frame, and the other two second Z detection frame support beams are respectively located at the left and right ends of the bottom of the second Z detection frame; each second Z detection frame support beam is connected between a corresponding second Z detection frame support beam anchor point and a corresponding corner of a second Z detection frame.

11. The three-axis gyroscope according to claim 8, characterized in that: The Z gyro structure further comprises: a first Z-axis detection electrode disposed in the first Z mass; a second Z-axis detection electrode disposed in the second Z mass; When the Z-axis angular velocity input is sensed, the first Z mass block and the second Z mass block will move in opposite directions along the X-axis direction. The first Z-axis detection electrode detects the change in distance from the first Z mass block, and the second Z-axis detection electrode detects the change in distance from the second Z mass block. The capacitance of the first Z-axis detection electrode and the second Z-axis detection electrode increases and decreases respectively. The difference between the two is used to obtain the capacitance change caused by the Z-axis angular velocity, and then the input Z-axis angular velocity is obtained. A certain number of damping holes are provided on the first Z mass block and the second Z mass block to reduce damping and improve the sensitivity of the Z-axis gyroscope.

12. The three-axis gyroscope according to claim 8, characterized in that: There are four first Z connecting beams, wherein two first Z connecting beams are respectively located at the upper and lower ends of the left side of the first Z mass block, and the other two first Z connecting beams are respectively located at the upper and lower ends of the right side of the first Z mass block; There are four second Z connecting beams, two of which are located at the upper and lower ends of the left side of the second Z mass block, and the other two are located at the upper and lower ends of the right side of the second Z mass block.

13. The three-axis gyroscope according to claim 8, characterized in that: The Z gyro structure further comprises: Lever beam anchor point; Lever support beam; A lever beam is connected to the lever beam anchor point through the lever support beam, the lever beam connects the first Z detection frame and the second Z detection frame, and the setting of the lever beam causes the first Z detection frame and the second Z detection frame to move in opposite directions along the Y axis.

14. The three-axis gyroscope according to claim 13, characterized in that: There are two lever beams. Wherein, a lever beam is located at the top of the first Z detection frame and the second Z detection frame, one end of the lever beam is connected to the top of the first Z detection frame, the other end of the lever beam is connected to the top of the second Z detection frame, and the middle part is connected to the corresponding lever beam anchor point through the corresponding lever support beam; Another lever beam is located at the bottom of the first Z detection frame and the second Z detection frame, one end of the other lever beam is connected to the bottom of the first Z detection frame, and the other end is connected to the bottom of the second Z detection frame, and the middle part is connected to the corresponding lever beam anchor point through the corresponding lever support beam.

15. The three-axis gyroscope according to claim 14, characterized in that: The two lever beams are both T-shaped structures, and the T-shaped structure includes a crossbar portion and a vertical bar portion located in the middle of the crossbar. One end of the crossbar portion of the T-shaped structure is one end of the lever beam, the other end of the crossbar portion is the other end of the lever beam, and the vertical bar portion is the middle of the lever beam. There are four lever beam anchor points and four lever support beams, wherein two lever beam anchor points are respectively located on the left and right sides of a vertical rod portion of a T-shaped structure, two lever support beams are respectively located on the left and right sides of a vertical rod portion of a T-shaped structure, and the two lever beam anchor points are respectively connected to the vertical rod portion of the T-shaped structure through a corresponding lever support beam; the other two lever beam anchor points are respectively located on the left and right sides of the vertical rod portion of another T-shaped structure, the other two lever support beams are respectively located on the left and right sides of the vertical rod portion of another T-shaped structure, and the other two lever beam anchor points are respectively connected to the vertical rod portion of the other T-shaped structure through a corresponding lever support beam.

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