A three-axis gyroscope

Abstract

The present invention provides a three-axis gyroscope, which includes: a first X / Y mass block, a second X / Y mass block, a third X / Y mass block and a fourth X / Y mass block, which are respectively arranged at four positions of the left, right, top and bottom of a center point A; four steering beam anchor points and four steering beams, wherein each steering beam is connected to a corresponding steering beam anchor point, and two adjacent X / Y mass blocks are connected through a corresponding steering beam; a first drive electrode and a first drive feedback electrode arranged in the first X / Y mass block; a second drive electrode and a second drive feedback electrode arranged in the second X / Y mass block; a first Z mass block, which is arranged in a first Z space defined in the third X / Y mass block and is connected to the third X / Y mass block through a first Z detection beam; a second Z mass block, which is arranged in a second Z space defined in the fourth X / Y mass block and is connected to the fourth X / Y mass block through a second Z detection beam. Compared with the prior art, the three-axis gyroscope of the present invention has reasonable design, compact structure and high integration.

Description

[Technical field]

[0001] The present invention relates to the technical field of micromechanical systems, and in particular to a highly integrated three-axis gyroscope. [Background technology]

[0002] A gyroscope is a sensor used to measure angular rate and is one of the core components of inertial technology. It plays an important role in modern industrial control, aerospace, national defense and military, and consumer electronics.

[0003] The development of gyroscope can be roughly divided into three stages:

[0004] The first stage is the traditional mechanical rotor gyroscope, which has high precision and plays an irreplaceable role in military strategic weapons such as nuclear submarines and intercontinental strategic missiles, but it is large in size, complex in manufacturing process, expensive, long in cycle and not suitable for mass production; the second stage is the optical detection gyroscope, mainly including laser gyroscope and fiber optic gyroscope, which mainly uses the Sagnac effect. Its advantages are no rotating parts and high precision. It plays an important role in navigation and aerospace, but it still faces the problems of large size, high cost and difficulty in integration; the third stage is the micromechanical gyroscope, which was developed in the 1990s. Its research started late, but it has developed rapidly with its unique advantages of small size, low power consumption, light weight, mass production, low price, strong overload resistance and integration. It is suitable for civil fields such as aircraft navigation, automobile manufacturing, digital electronics, industrial equipment and modern national defense and military fields such as drones, tactical missiles, smart bombs, and military aiming systems. It has broad application prospects and is attracting more and more attention.

[0005] As the demand in the consumer market increases, there are higher requirements for the size and performance of MEMS (Micro-Electro-Mechanical System) gyroscopes. Gyroscopes have also changed from single-axis gyroscopes to three-axis gyroscopes. Early three-axis gyroscopes consisted of three independent single-axis gyroscopes and needed to include a separate drive structure, so the overall structure size was large. In current consumer applications, single-chip three-axis gyroscopes are generally used, which are characterized by shared drive and reasonable layout of X / Y / Z gyroscope mass blocks. Despite this, three-axis gyroscopes also face the problems of large size, low integration, and large orthogonal error.

[0006] See Chinese invention patent CN108225295A, which discloses a three-axis gyroscope with tuning fork drive effect. The three-axis gyroscope structure disclosed in the patent cleverly designs the steering structure. The left and right mass blocks are used to detect the Y / Z axis angular velocity, and the central mass block is used to detect the X axis angular velocity. However, it is obvious that its integration is not high, and the Y / Z mass blocks share the mass block and are prone to coupling. Continue to refer to Chinese invention patent CN110926445A, which discloses a three-axis MEMS gyroscope. The micro-gyroscope structure disclosed in the patent is shared drive. Its innovation lies in the novel design of the X / Y gyroscope structure, and the X / Y axis gyroscopes interact and are set in the middle of the drive frame and supported by the central anchor point. The Z axis gyroscope is distributed on both sides of the X / Y gyroscope and connected to the middle gyroscope structure. Its overall structural design is novel and reasonable, and its integration is high.

[0007] Therefore, it is urgent to propose a new technical solution to solve the problem of low integration of three-axis gyroscopes in the prior art. [Summary of the invention]

[0008] One of the purposes of the present invention is to provide a three-axis gyroscope having the advantage of high integration.

[0009] According to one aspect of the present invention, the present invention provides a three-axis gyroscope, comprising: a first X / Y mass block, a second X / Y mass block, a third X / Y mass block and a fourth X / Y mass block, which are respectively arranged at four positions of the left, right, top and bottom of the center point A of the three-axis gyroscope, the first X / Y mass block is arranged adjacent to the third X / Y mass block and the fourth X / Y mass block, and the second X / Y mass block is arranged adjacent to the third X / Y mass block and the fourth X / Y mass block; four steering beam anchor points and four steering beams, wherein each steering beam is connected to a corresponding one of the steering beam anchor points, and adjacent Two X / Y mass blocks are connected through a corresponding steering beam; a first drive electrode and a first drive feedback electrode are arranged in the first X / Y mass block; a second drive electrode and a second drive feedback electrode are arranged in the second X / Y mass block; a first Z mass block is arranged in a first Z space defined in the third X / Y mass block and connected to the third X / Y mass block through a first Z detection beam; a second Z mass block is arranged in a second Z space defined in the fourth X / Y mass block and connected to the fourth X / Y mass block through a second Z detection beam.

[0010] Compared with the prior art, in the three-axis gyroscope of the present invention, the first drive electrode and the first drive feedback electrode are arranged in the first X / Y mass block; the second drive electrode and the second drive feedback electrode are arranged in the second X / Y mass block; the first Z mass block is arranged in the third X / Y mass block; and the second Z mass block is arranged in the fourth X / Y mass block, so that the three-axis gyroscope of the present invention has a reasonable structural design, a compact structure, and a high degree of integration.

Brief Description of the Drawings

[0011] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0012] Figure 1 is a schematic diagram of the overall structure of a three-axis gyroscope in a first embodiment of the present invention;

[0013] Figure 2 For the present invention Figure 1 The schematic diagram of the three-axis gyroscope in the driving state shown;

[0014] Figure 3 For the present invention Figure 1 The schematic diagram of the three-axis gyroscope during X-axis detection is shown;

[0015] Figure 4 For the present invention Figure 1 The schematic diagram of the three-axis gyroscope Y-axis detection is shown;

[0016] Figure 5 For the present invention Figure 1 The schematic diagram of the three-axis gyroscope Z-axis detection is shown;

[0017] Figure 6 For the present invention Figure 1 The schematic diagram of the structure of the central coupling beam structure in the second embodiment is shown;

[0018] Figure 7 For the present invention Figure 1 The schematic diagram of the structure of the central coupling beam structure in the third embodiment is shown;

[0019] Figure 8 For the present invention Figure 1 The central coupling beam structure shown is a schematic structural diagram of the fourth embodiment.

[0020] Among them, 1a-left X mass block (or first X / Y mass block); 1b-right X mass block (or second X / Y mass block); 1c-upper Y mass block (or third X / Y mass block); 1d-lower Y mass block (or fourth X / Y mass block); 1e-upper Z mass block (or first Z mass block); 1f-lower Z mass block (or second Z mass block);

[0021] 2a.1~2a.12-driving electrodes; 2b.1~2b.8 driving feedback electrodes; 2c.1~2c.2-X axis detection electrodes; 2d.1~2d.2-Y axis detection electrodes; 2e.1~2e.2-Z axis detection electrodes;

[0022] 3a.1~3a.4-steering beam; 3b.1~3b.2-X detection beam (or X / Y detection beam); 3c.1~3c.2-Y detection beam (or X / Y detection beam); 3d-center coupling beam structure; 3e.1~3e.8-Z detection beam; 3f-center coupling mechanism; 3g-center coupling beam, cross-type coupling center beam 3g.1, coupled folding beam 3g.2, 3g.3-L-type intermediate support beam;

[0023] 4a.1~4a.4-steering beam anchor points; 4b, 4b.1~4b.4-center coupling beam anchor points. [Specific implementation method]

[0024] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] The term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments. Unless otherwise specified, the words "connected", "connected", and "connected" herein that indicate electrical connection all refer to direct or indirect electrical connection.

[0026] In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore, cannot be understood as limiting the present invention. In the description of the present invention, "plurality" means two or more, unless otherwise clearly and specifically defined.

[0027] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "coupled" and the like should be understood in a broad sense; for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] In view of the problems existing in the prior art, the present invention provides a highly integrated three-axis gyroscope. Figure 1 As shown, it is a schematic diagram of the overall structure of a three-axis gyroscope in one embodiment of the present invention.

[0029] Figure 1 The three-axis gyroscope shown includes: a first X / Y mass block 1a, a second X / Y mass block 1b, a third X / Y mass block 1c, a fourth X / Y mass block 1d, a first Z mass block 1e, and a second Z mass block 1f; first drive electrodes 2a.1~2a.6, second drive electrodes 2a.7~2a.12, first drive feedback electrodes 2b.1, 2b.2, second drive feedback electrodes 2b.3, 2b.4; first Z detection beams 3e.1~3e.4, second Z detection beams 3e.5~3e.8; four steering beams 3a.1~3a.4; four steering beam anchor points 4a.1~4a.4.

[0030] In order to better illustrate the structure of the three-axis gyroscope shown in the present invention, a three-dimensional rectangular coordinate system can be established. Figure 1 In the illustrated embodiment, in the plane where the base of the three-axis gyroscope is located, the direction parallel to the first X / Y mass block 1a and the second X / Y mass block 1b is the Y axis, the direction parallel to the third X / Y mass block 1c and the fourth X / Y mass block 1d is the X axis, the Z axis is determined by taking the X axis and the Y axis as coordinate axes, and the Figure 1 The center point A of the three-axis gyroscope shown is the origin of the coordinate system, and the three-dimensional rectangular coordinate system established by the X-axis, Y-axis and Z-axis is Figure 1 This is reflected in the figure, where the X-axis is along the left-right direction and the Y-axis is along the up-down direction.

[0031] The first X / Y mass block 1a, the second X / Y mass block 1b, the third X / Y mass block 1c and the fourth X / Y mass block 1d are respectively arranged at four positions of the left, right, top and bottom of the center point A of the three-axis gyroscope, the first X / Y mass block 1a is arranged adjacent to the third X / Y mass block 1c and the fourth X / Y mass block 1d, and the second X / Y mass block 1b is arranged adjacent to the third X / Y mass block 1c and the fourth X / Y mass block 1d. Each steering beam 3a.1-3a.4 is connected to a corresponding steering beam anchor point 4a.1-4a.4, and two adjacent X / Y mass blocks are connected through a corresponding steering beam. The first Z mass block 1e is arranged in the first Z space defined in the third X / Y mass block 1c, and is connected to the third X / Y mass block 1c through the first Z detection beams 3e.1 to 3e.4; the second Z mass block 1f is arranged in the second Z space defined in the fourth X / Y mass block 1d, and is connected to the fourth X / Y mass block 1d through the second Z detection beams 3e.5 to 3e.8. The first drive electrodes 2a.1 to 2a.6 and the first drive feedback electrodes 2b.1 and 2b.2 are arranged in the first X / Y mass block 1a; the second drive electrodes 2a.7 to 2a.12 and the second drive feedback electrodes 2b.3 and 2b.4 are arranged in the second X / Y mass block 1b.

[0032] The first drive electrodes 2a.1-2a.6, the first drive feedback electrodes 2b.1-2b.2, the second drive electrodes 2a.7-2a.12, the second drive feedback electrodes 2b.3-2b.4 and the steering beam anchor points 4a.1-4a.4 are fixedly arranged on a substrate (not shown). The first X / Y mass block 1a, the second X / Y mass block 1b, the third X / Y mass block 1c, the fourth X / Y mass block 1d, the first Z mass block 1e, the second Z mass block 1f and the X / Y steering beams 3a.1-3a.4 are suspended above the substrate.

[0033] like Figure 2 As shown, a driving voltage is applied to the first driving electrodes 2a.1~2a.6 to drive the first X / Y mass block 1a to perform resonant motion in the up and down directions along the Y axis; and a driving voltage is applied to the second driving electrodes 2a.7~2a.12 to drive the second X / Y mass block 1b to perform resonant motion along the Y axis in the opposite direction to the first X / Y mass block 1a. Figure 2 Only one movement direction of the first X / Y mass block 1a and the second X / Y mass block 1b along the Y axis is given as an example. For a detailed scheme of applying a driving voltage to the driving electrode to drive the first X / Y mass block 1a and the second X / Y mass block 1b to perform resonant motion along the Y axis, reference can be made to the existing related technology, which will not be described in detail in this article.

[0034] like Figure 2As shown, when the first X / Y mass block 1a performs a resonant motion in the up-down direction along the Y axis, and the second X / Y mass block 1b performs a resonant motion in the opposite direction to the first X / Y mass block 1a along the Y axis, the first X / Y mass block 1a and the second X / Y mass block 1b drive the third X / Y mass block 1c to perform a resonant motion in the left-right direction along the X axis through corresponding steering beams (for example, steering beams 3a.1 and 3a.2), and drive the fourth X / Y mass block 1d to perform a resonant motion in the left-right direction along the X axis through corresponding steering beams (for example, steering beams 3a.3 and 3a.4). The X / Y mass block 1c performs resonant motion in the opposite direction; when the third X / Y mass block 1c performs resonant motion in the left and right directions along the X-axis, the third X / Y mass block 1c drives the first Z mass block 1e to perform resonant motion in the left and right directions along the X-axis through the first Z detection beams 3e.1~3e.4; when the fourth X / Y mass block 1d performs resonant motion in the opposite direction to that of the third X / Y mass block 1c along the X-axis, the fourth X / Y mass block 1d drives the second Z mass block 1f to perform resonant motion in the opposite direction to that of the first Z mass block 1e along the X-axis through the second Z detection beams 3e.5~3e.8.

[0035] exist Figure 1 In the specific embodiment shown, the four X / Y mass blocks 1a-1d have the same structure, and all include a rectangular portion and an isosceles trapezoidal portion; the four X / Y mass blocks 1a-1d are symmetrical about the X-axis and the Y-axis as a whole; the four steering beams 3a.1-3a.4 are symmetrical about the X-axis and the Y-axis as a whole; the four steering beam anchor points 4a.1-4a.4 are symmetrical about the X-axis and the Y-axis as a whole; the four steering beams 3a.1-3a.4 are respectively located at the four corners of the figure formed by the four X / Y mass blocks 1a-1d; the four steering beam anchor points 4a.1-4a.4 are respectively located at the four corners of the figure formed by the four X / Y mass blocks 1a-1d; the four steering beam anchor points 4a.1-4a.4 are respectively located at the four corners of the figure formed by the four X / Y mass blocks 1a- 1d; four steering beams 3a.1 to 3a.4 are connected to four steering beam anchor points 4a.1 to 4a.4 respectively; two adjacent mass blocks are connected through a corresponding steering beam, for example, steering beam 3a.1 connects the third X / Y mass block 1c and the first X / Y mass block 1a, steering beam 3a.2 connects the third X / Y mass block 1c and the second X / Y mass block 1b, steering beam 3a.3 connects the first X / Y mass block 1a and the fourth X / Y mass block 1d, and steering beam 4a.4 connects the second X / Y mass block 1b and the fourth X / Y mass block 1d. A certain number of damping holes can be set on the X / Y mass blocks 1a to 1d to reduce damping and improve the quality factor and sensitivity of the gyroscope.

[0036] exist Figure 1In the specific embodiment shown, each steering beam 3a.1~3a.4 is a pentagon formed by removing a corner of a square. In each of the pentagons, one corner is connected to a corresponding steering beam block anchor point, and the other two corners adjacent to the corner are respectively connected to corresponding two adjacent X / Y mass blocks.

[0037] exist Figure 1 In the illustrated embodiment, the three-axis gyroscope further includes: third drive feedback electrodes 2b.5, 2b.6 disposed in the third X / Y mass block 1c; fourth drive feedback electrodes 2b.7, 2b.8 disposed in the fourth X / Y mass block 1d, wherein the third drive feedback electrodes 2b.5, 2b.6 and the fourth drive feedback electrodes 2b.7, 2b.8 are fixedly disposed on the substrate.

[0038] exist Figure 1 In the specific embodiment shown, the first driving electrodes 2a.1-2a.6 and the second driving electrodes 2a.7-2a.12 have the same structure and are symmetrical about the X-axis and the Y-axis as a whole; the driving feedback electrodes 2b.1-2b.8 have the same structure and are symmetrical about the X-axis and the Y-axis as a whole. Among them, the first drive electrodes 2a.1~2a.6 are arranged in the middle of the first X / Y mass block 1a, and the first drive electrodes 2a.1~2a.6 are arranged in sequence parallel to the Y-axis direction; the first drive feedback electrodes 2b.1 and 2b.2 are arranged at the upper and lower ends of the first X / Y mass block 1a; the second drive electrodes 2a.7~2a.12 are arranged in the middle of the second X / Y mass block 1b, and the second drive electrodes 2a.7~2a.12 are arranged in sequence parallel to the Y-axis direction; the second drive feedback electrodes 2b.3 and 2b.4 are arranged at the upper and lower ends of the second X / Y mass block 1b; the third drive feedback electrodes 2b.5 and 2b.6 are arranged at the left and right ends of the third X / Y mass block 1c; the fourth drive feedback electrodes 2b.7 and 2b.8 are arranged at the left and right ends of the fourth X / Y mass block 1d.

[0039] exist Figure 1In the specific embodiment shown, the first Z mass block 1e and the second Z mass block 1f have the same structure and are symmetrical about the X-axis and the Y-axis as a whole; the first Z detection beam 3e.1~3e.4 and the second Z detection beam 3e.5~3e.8 have the same structure and are symmetrical about the X-axis and the Y-axis as a whole. There are four first Z detection beams 3e.1 to 3e.4, wherein two first Z detection beams 3e.1 and 3e.2 are respectively located at the left and right ends of the top of the first Z mass block 1e, and the other two first Z detection beams 3e.3 and 3e.4 are respectively located at the left and right ends of the bottom of the first Z mass block 2e, and the first Z detection beams 3e.1 to 3e.4 are placed parallel to the X-axis direction (or placed along the left and right directions); there are four second Z detection beams 3e.5 to 3e.8, wherein two second Z detection beams 3e.5 and 3e.6 are respectively located at the left and right ends of the top of the second Z mass block 1f, and the other two second Z detection beams 3e.7 and 3e.8 are respectively located at the left and right ends of the bottom of the second Z mass block 1f, and the second Z detection beams 3e.5 to 3e.8 are placed parallel to the X-axis direction (or placed along the left and right directions). A certain number of damping holes may be provided on the first Z mass block 1e and the second Z mass block 1f to reduce damping and improve the sensitivity of the Z-axis gyroscope.

[0040] exist Figure 1 In the illustrated embodiment, the three-axis gyroscope further includes: a central coupling beam structure 3d located at the center point A; four X / Y detection beams 3b.1, 3b.2, 3c.1, and 3c.2 respectively connected to the inner sides of corresponding X / Y mass blocks 1a to 1d, each X / Y detection beam being connected to the central coupling beam structure 3d; a first X-axis detection electrode 2c.1 disposed under the first mass block 1a; a second X-axis detection electrode 2c.2 disposed under the second mass block 1b; a first Y-axis detection electrode 2d.1 disposed under the third mass block 1c; a second Y-axis detection electrode 2d.2 disposed under the fourth mass block 1d; a first Z-axis detection electrode 2e.1 disposed in the first Z mass block 1e; and a second Z-axis detection electrode 2e.2 disposed in the second Z mass block 1f.

[0041] like Figure 3 As shown, when the X-axis angular velocity input is sensed, the first X / Y mass block 1a and the second X / Y mass block 1b will move in opposite directions along the Z-axis direction, the first X-axis detection electrode 2c.1 detects the change in distance from the first X / Y mass block 1a, and the second X-axis detection electrode 2c.2 detects the change in distance from the second X / Y mass block 1b, and the capacitance of the first X-axis detection electrode 2c.1 and the second X-axis detection electrode 2c.2 increases and decreases respectively, and the difference between the two is used to obtain the capacitance change caused by the X-axis angular velocity, thereby obtaining the input X-axis angular velocity.

[0042] like Figure 4As shown, when the Y-axis angular velocity input is sensed, the third X / Y mass block 1c and the fourth X / Y mass block 1d move in opposite directions along the Z-axis direction, the first Y-axis detection electrode 2d.1 detects the change in distance from the third X / Y mass block 1c, and the second Y-axis detection electrode 2d.2 detects the change in distance from the fourth X / Y mass block 1d. The capacitance of the first Y-axis detection electrode 2d.1 and the capacitance of the second Y-axis detection electrode 2d.2 increase and decrease respectively, and the difference between the two is used to obtain the capacitance change caused by the Y-axis angular velocity, thereby obtaining the input Y-axis angular velocity.

[0043] like Figure 5 As shown, when the Z-axis angular velocity input is sensed, the first Z mass block 1e and the second Z mass block 1f will move in opposite directions along the Y-axis direction, the first Z-axis detection electrode 2e.1 detects the change in distance from the first Z mass block 1e, and the second Z-axis detection electrode 2e.2 detects the change in distance from the second Z mass block 1f, and the capacitance of the first Z-axis detection electrode 2e.1 and the second Z-axis detection electrode 2e.2 increases and decreases respectively. The difference between the two is the capacitance change caused by the Z-axis angular velocity, and then the input Z-axis angular velocity is obtained.

[0044] exist Figure 1 In the specific embodiment shown, the central coupling beam structure 3d is symmetrical about the X-axis and the Y-axis; the four X / Y detection beams 3b.1, 3b.2, 3c.1, and 3c.2 are symmetrical about the X-axis and the Y-axis as a whole. The central coupling beam structure 3d is a concentric circle structure, and the center of the circle is the center point A of the three-axis gyroscope; the four X / Y detection beams 3b.1, 3b.2, 3c.1, and 3c.2 have the same structure, and each X / Y connecting beam X / Y detection beam 3b.1, 3b.2, 3c.1, and 3c.2 includes a plurality of hollow straight beams arranged in parallel from the outside to the inside and a connecting portion connecting the hollow straight beams; the X / Y detection beams 3c.1 and 3c.2 on the upper and lower sides of the central coupling beam structure 3d are placed parallel to the X-axis (or placed in the left-right direction), and the X / Y detection beams 3b.1 and 3b.2 on the left and right sides of the central coupling beam structure 3d are placed parallel to the Y-axis (or placed in the up-down direction).

[0045] Please refer to Figure 6 As shown, it is the present invention Figure 1 The central coupling beam structure 3d shown is a schematic diagram of the structure of the second embodiment. Please refer to Figure 7 As shown, it is the present invention Figure 1 The central coupling beam structure 3d shown is a schematic diagram of the structure of the third embodiment. Please refer to Figure 8 As shown, it is the present invention Figure 1 The central coupling beam structure 3d shown is a schematic structural diagram of the fourth embodiment. Figure 6 , Figure 7 and Figure 8 The central coupling beam structures shown in the figure all include: a central coupling mechanism 3f, in which a coupling space is defined; a central coupling beam 3g, which is located in the coupling space; and a central coupling beam anchor point 4b, which is located in the coupling space, wherein the central coupling mechanism 3f is connected to the central coupling beam anchor point 4b through the central coupling beam 3g, and the central coupling mechanism 3f is connected to the four X / Y mass blocks 1a to 1d through the four X / Y detection beams 3b.1, 3b.2, 3c.1, and 3c.2, respectively. The central coupling mechanism 3f and the central coupling beam 3g are suspended above the substrate, and the central coupling beam anchor point 4b is fixed on the substrate.

[0046] exist Figure 6 In the specific embodiment shown, the central coupling beam 3g includes a cross-shaped coupling central beam 3g.1 and a coupling folding beam 3g.2, wherein the intersection of the cross-shaped coupling central beam 3g.1 is located at the central point A. There are four central coupling beam anchor points 4b, which are respectively located in the four areas divided by the cross-shaped coupling central beam 3g.1, wherein the first central coupling beam anchor point 4b.1 is located in the upper left area of ​​the cross-shaped coupling central beam 3g.1, the second central coupling beam anchor point 4b.2 is located in the upper right area of ​​the cross-shaped coupling central beam 3g.1, the third central coupling beam anchor point 4b.3 is located in the lower left area of ​​the cross-shaped coupling central beam 3g.1, and the fourth central coupling beam anchor point 4b.4 is located in the lower right area of ​​the cross-shaped coupling central beam 3g.1. The four connecting ends of the cross-shaped coupling center beam 3g.1 include the two ends of its horizontal bar portion and the two ends of its vertical bar portion. The four connecting ends of the cross-shaped coupling center beam 3g.1 are all connected to the central coupling mechanism 3f; each connecting end of the cross-shaped coupling center beam 3g.1 is connected to the central coupling beam anchor points on both sides of the connecting end via the corresponding coupling folding beam 3g.2.

[0047] exist Figure 6In the specific embodiment shown, the central coupling mechanism 3f is a diamond structure with a coupling space defined inside, and the four corners of the diamond structure are respectively connected to the four X / Y detection beams 3b.1, 3b.2, 3c.1, and 3c.2; there are eight coupling folding beams 3g.2, which are respectively located at the upper, lower, left, and right four connecting ends of the cross-shaped coupling central beam 3g.1 in pairs of two, each coupling folding beam 3g.2 is a U-shaped elastic beam, and the opening direction of each coupling folding beam 3g.2 is away from the central point A. Each connecting end of the cross-shaped coupling central beam 3g.1 is connected to a central coupling beam anchor point on one side of the connecting end through a corresponding coupling folding beam 3g.2, and is connected to a central coupling beam anchor point on the other side of the connecting end through another corresponding coupling folding beam 3g.2. For example, the top of the vertical rod of the cross-shaped coupling center beam 3g.1 is connected to the center coupling beam anchor point 4b.1 on one side of the top of the vertical rod through a corresponding coupling folding beam 3g.2, and is connected to the center coupling beam anchor point 4b.2 on the other side of the top of the vertical rod through another corresponding coupling folding beam 3g.2. Among them, the center coupling mechanism 3f is symmetrical about the X-axis and the Y-axis, the eight center coupling beams 3g are symmetrical about the X-axis and the Y-axis as a whole, and the four center coupling beam anchor points 4b.1 to 4b.4 are symmetrical about the X-axis and the Y-axis as a whole.

[0048] exist Figure 6 In the specific embodiment shown, the central coupling beam 3g also includes four L-shaped intermediate support beams 3g.3, which are respectively located in the four areas divided by the cross-shaped coupling central beam 3g.1, one end of each L-shaped intermediate support beam 3g.3 is connected to the horizontal bar portion of the cross-shaped coupling central beam 3g.1 in the area where it is located, and the other end is connected to the vertical bar portion of the cross-shaped coupling central beam 3g.1 in the area where it is located, and the opening direction is toward the center point A of the three-axis gyroscope structure.

[0049] exist Figure 7 In the illustrated embodiment, the central coupling beam anchor point 4b is located at the central point A, and the central coupling beam 3g is located around the central coupling beam anchor point 4b.

[0050] exist Figure 7In the specific embodiment shown, the central coupling mechanism 3f is a diamond structure with a coupling space defined inside, and the four corners of the diamond structure are respectively connected to the four X / Y detection beams 3b.1, 3b.2, 3c.1, and 3c.2; the central coupling beams 3g are eight, and two of them are located in four directions of the upper, lower, left, and right of the central coupling beam anchor point 4b, wherein each central coupling beam 3g is connected between the central coupling beam anchor point 4b and the central coupling mechanism 3f; each central coupling beam 3g is S-shaped. The central coupling mechanism 3f is symmetrical about the X-axis and the Y-axis, the eight central coupling beams 3g are symmetrical about the X-axis and the Y-axis, and the central coupling beam anchor point 4b is symmetrical about the X-axis and the Y-axis.

[0051] Figure 8 and Figure 7 The structure is basically the same. Figure 8 and Figure 7 The main difference is that Figure 8 The central coupling mechanism 3f shown is a square structure with a coupling space defined inside, and the four sides of the square structure are respectively connected to the four X / Y detection beams 3b.1, 3b.2, 3c.1, 3c.2.

[0052] The present invention is described below Figure 1 The detection principle of the three-axis gyroscope shown.

[0053] Please refer to Figure 2 As shown, it is the present invention Figure 1 The schematic diagram of the three-axis gyroscope in the driving state shown. By applying a driving voltage to the driving electrodes 2a.1~2a.12, the first X / Y mass block 1a and the second X / Y mass block 1b are caused to perform reverse resonant motion in the up-down direction along the Y axis, and then the steering beams 3a.1~3a.4 arranged around the X / Y mass blocks 1a~1d drive the third mass block 1c and the fourth mass block 1d to produce reverse resonant motion in the left-right direction (or horizontal direction) along the X axis, so that the four X / Y mass blocks 1a~1d rotate counterclockwise or clockwise along the Z axis as a whole. The first Z mass block 1e arranged inside the third X / Y mass block 1c and the second Z mass block 1f arranged inside the fourth X / Y mass block 1d, together with the third mass block 1c and the fourth mass block 1d, produce reverse resonant motion in the left-right direction along the X axis.

[0054] Please refer to Figure 3 As shown, it is the present invention Figure 1The schematic diagram of the three-axis gyroscope during X-axis detection is shown. When the X-axis angular rate input is sensitive, the Coriolis force generated by the Coriolis effect drives the third mass block 2c and the fourth mass block 2d to move in the opposite direction away from the surface along the Z-axis direction, and the X-axis detection electrodes 2c.1 and 2c.2 set under the first X / Y mass block 1a and the second X / Y mass block 1b are sensitive to the change in distance, and then the self-capacitance of the X-axis detection electrodes 2c.1 and 2c.2 will change accordingly, and the size of the X-axis angular rate can be obtained by detecting the change in capacitance.

[0055] Please refer to Figure 4 As shown, it is the present invention Figure 1 The schematic diagram of the three-axis gyroscope during Y-axis detection is shown. When the Y-axis angular velocity input is sensed, the Coriolis force will be generated due to the Coriolis effect to drive the third X / Y mass block 1c and the fourth X / Y mass block 1d to move in the opposite direction away from the surface along the Z-axis direction, and the Y-axis detection electrodes 2d.1 and 2d.2 set under the third X / Y mass block 1c and the fourth X / Y mass block 1d will sense the change in distance, and then the self-capacitance of the Y-axis detection electrodes 2d.1 and 2d.2 will change accordingly, and the magnitude of the Y-axis angular velocity can be obtained by detecting the change in capacitance.

[0056] Please refer to Figure 5 As shown, it is the present invention Figure 1 The schematic diagram of the three-axis gyroscope during Z-axis detection is shown. When the Z-axis angular velocity input is sensed, the Coriolis effect will generate a Coriolis force to drive the first Z mass block 1e and the second Z mass block 1f to move in the opposite direction along the Y-axis direction. The Z-axis detection electrodes 2e.1 and 2e.2 respectively set inside the first Z mass block 1e and the second Z mass block 1f are sensitive to the change in distance, and then the capacitance of the Z-axis detection electrodes 2e.1 and 2e.2 will change accordingly. The magnitude of the Z-axis angular velocity can be obtained by detecting the change in capacitance.

[0057] In summary, the three-axis gyroscope shown in the present invention includes: a first X / Y mass block 1a, a second X / Y mass block 1b, a third X / Y mass block 1c and a fourth X / Y mass block 1d, which are respectively arranged at four positions of the left, right, top and bottom of the center point A of the three-axis gyroscope; four steering beam anchor points 4a.1~4a.4 and four steering beams 3a.1~3a.4, wherein each steering beam is connected to a corresponding steering beam anchor point, and two adjacent X / Y mass blocks are connected through a corresponding steering beam; first drive electrodes 2a.1~2a.6 and first drive feedback electrodes 2b.1~2b.2 are arranged in the first X / Y mass block 1a; and The second drive electrodes 2a.7~2a.12 and the second drive feedback electrodes 2b.3~2b.4 in the second X / Y mass block 1b; the first Z mass block 1e, which is arranged in the first Z space defined in the third X / Y mass block 1c, and is connected to the third X / Y mass block 1c through the first Z detection beams 3e.1~3e.4; the second Z mass block 1f, which is arranged in the second Z space defined in the fourth X / Y mass block 1d, and is connected to the fourth X / Y mass block 1d through the second Z detection beams 3e.5~3e.8, so that the three-axis gyroscope described in the present invention has a reasonable structural design, a compact structure, and a high degree of integration.

[0058] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0059] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify and vary the above embodiments within the scope of the present invention.

Claims

1. A three-axis gyroscope, characterized in that: It includes: A first X / Y mass block, a second X / Y mass block, a third X / Y mass block and a fourth X / Y mass block are respectively arranged at four positions of the left, right, top and bottom of the center point A of the three-axis gyroscope, the first X / Y mass block is arranged adjacent to the third X / Y mass block and the fourth X / Y mass block, and the second X / Y mass block is arranged adjacent to the third X / Y mass block and the fourth X / Y mass block; Four steering beam anchor points and four steering beams, wherein each steering beam is connected to a corresponding steering beam anchor point, and two adjacent X / Y mass blocks are connected via a corresponding steering beam; a first drive electrode and a first drive feedback electrode disposed within the first X / Y mass; a second drive electrode and a second drive feedback electrode disposed within the second X / Y mass; a first Z mass block disposed in a first Z space defined within the third X / Y mass block and connected to the third X / Y mass block via a first Z detection beam; A second Z mass block is disposed in a second Z space defined in the fourth X / Y mass block and connected to the fourth X / Y mass block via a second Z detection beam, Applying a driving voltage to the first driving electrode to drive the first X / Y mass block to perform resonant motion in an up-and-down direction along the Y axis; Applying a driving voltage to the second driving electrode to drive the second X / Y mass block to perform a resonant motion along the Y axis in the opposite direction to that of the first X / Y mass block; When the first X / Y mass block performs resonant motion along the Y axis, and the second X / Y mass block performs resonant motion in the opposite direction to that of the first X / Y mass block along the Y axis, the first X / Y mass block and the second X / Y mass block drive the third X / Y mass block to perform resonant motion in the left-right direction along the X axis through the corresponding steering beams, and drive the fourth X / Y mass block to perform resonant motion in the opposite direction to that of the third X / Y mass block along the X axis through the corresponding steering beams; When the third X / Y mass block performs a resonant motion in the left-right direction along the X-axis, the third X / Y mass block drives the first Z mass block to perform a resonant motion in the left-right direction along the X-axis through the first Z detection beam; when the fourth X / Y mass block performs a resonant motion in the opposite direction to that of the third X / Y mass block along the X-axis, the fourth X / Y mass block drives the second Z mass block to perform a resonant motion in the opposite direction to that of the first Z mass block along the X-axis through the second Z detection beam, Among them, the X-axis and the Y-axis are perpendicular to each other and define the plane where the three-axis gyroscope is located, the Z-axis is perpendicular to the plane defined by the X-axis and the Y-axis, the direction parallel to the first X / Y mass block and the second X / Y mass block is the Y-axis, the direction parallel to the third X / Y mass block and the fourth X / Y mass block is the X-axis, the center point A is the coordinate origin, the X-axis is along the left-right direction, and the Y-axis is along the up-down direction.

2. The three-axis gyroscope according to claim 1, characterized in that: It also includes: a third drive feedback electrode disposed in the third X / Y mass; a fourth drive feedback electrode disposed within the fourth X / Y mass; A central coupling beam structure located at the central point A; Four X / Y detection beams are respectively connected to the inner sides of corresponding X / Y mass blocks, and each X / Y detection beam is connected to the central coupling beam structure.

3. The three-axis gyroscope according to claim 2, characterized in that: The first driving electrode is disposed in the middle of the first X / Y mass block; The first driving feedback electrodes are arranged at the upper and lower ends of the first X / Y mass block; The second driving electrode is disposed in the middle of the second X / Y mass block; The second driving feedback electrodes are arranged at the upper and lower ends of the second X / Y mass block; The third driving feedback electrode is arranged at the left and right ends of the third X / Y mass block; The fourth driving feedback electrodes are arranged at left and right ends of the fourth X / Y mass block.

4. The three-axis gyroscope according to claim 2, characterized in that: It also includes: a first X-axis detection electrode disposed below the first X / Y mass block; a second X-axis detection electrode disposed below the second X / Y mass block; a first Y-axis detection electrode disposed below the third X / Y mass block; a second Y-axis detection electrode disposed below the fourth X / Y mass block; a first Z-axis detection electrode disposed in the first Z mass; a second Z-axis detection electrode disposed in the second Z mass block; When the X-axis angular velocity input is sensed, the first X / Y mass block and the second X / Y mass block will move in opposite directions along the Z-axis direction, the first X-axis detection electrode detects the change in distance from the first X / Y mass block, the second X-axis detection electrode detects the change in distance from the second X / Y mass block, one of the capacitances of the first X-axis detection electrode and the second X-axis detection electrode increases, and the other decreases, and the difference between the two is used to obtain the capacitance change caused by the X-axis angular velocity, and then the input X-axis angular velocity is obtained; When the Y-axis angular velocity input is sensed, the third X / Y mass block and the fourth X / Y mass block move in opposite directions along the Z-axis direction, the first Y-axis detection electrode detects the change in distance from the third X / Y mass block, the second Y-axis detection electrode detects the change in distance from the fourth X / Y mass block, the capacitance of the first Y-axis detection electrode and the capacitance of the second Y-axis detection electrode increase, and the capacitance decreases, and the difference between the two is used to obtain the capacitance change caused by the Y-axis angular velocity, and then the input Y-axis angular velocity is obtained; When the Z-axis angular velocity input is sensed, the first Z mass block and the second Z mass block will move in opposite directions along the Y-axis direction. The first Z-axis detection electrode detects the change in distance from the first Z mass block, and the second Z-axis detection electrode detects the change in distance from the second Z mass block. The capacitance of the first Z-axis detection electrode and the second Z-axis detection electrode increases and decreases respectively. The difference between the two is the capacitance change caused by the Z-axis angular velocity, and then the input Z-axis angular velocity is obtained.

5. The three-axis gyroscope according to claim 2, characterized in that: The four steering beams are respectively located at the four corners of the figure formed by the four X / Y mass blocks; The four steering beam anchor points are respectively located at the four corners of the figure formed by the four X / Y mass blocks; Each X / Y detection beam includes a plurality of hollow straight beam portions arranged in parallel from the outside to the inside and a connecting portion connecting the hollow straight beams; A certain number of damping holes are provided on the four X / Y mass blocks to reduce damping so as to improve the quality factor and sensitivity of the gyroscope; A certain number of damping holes are provided on the first Z mass block and the second Z mass block for reducing damping to improve the quality factor and sensitivity of the gyroscope.

6. The three-axis gyroscope according to claim 4, characterized in that: The first driving electrode, the second driving electrode, the first driving feedback electrode, the second driving feedback electrode, the third driving feedback electrode, and the fourth driving feedback electrode are fixedly disposed on the substrate; The X-axis detection electrode and the Y-axis detection electrode are fixedly arranged on the substrate; The first X / Y mass block, the second X / Y mass block, the third X / Y mass block and the fourth X / Y mass block are suspended above the substrate; The X / Y detection beam is suspended above the base; the steering beam anchor point is fixedly arranged on the base; the steering beam is suspended above the base; The first Z mass and the second Z mass are suspended above the substrate; The first Z detection beam and the second Z detection beam are suspended above the substrate.

7. The three-axis gyroscope according to claim 4, characterized in that: Each steering beam is a pentagon formed by removing a corner of a square; In each of the pentagons, one of its corners is connected to a corresponding one of the steering beam anchor points, and the other two corners adjacent to the corner are respectively connected to two corresponding adjacent X / Y mass blocks; The four X / Y mass blocks each include a rectangular portion and an isosceles trapezoidal portion.

8. The three-axis gyroscope according to claim 4, characterized in that: The four X / Y mass blocks are symmetrical about the X-axis and the Y-axis as a whole; The four steering beams are symmetrical about the X-axis and the Y-axis as a whole; The four steering beam anchor points are symmetrical about the X-axis and the Y-axis as a whole; The first driving electrode and the second driving electrode are symmetrical about the X-axis and the Y-axis as a whole; The first drive feedback electrode, the second drive feedback electrode, the third drive feedback electrode, and the fourth drive feedback electrode are symmetrical about the X-axis and the Y-axis as a whole; The first Z mass block and the second Z mass block are symmetrical about the X axis and the Y axis as a whole; The first Z detection beam and the second Z detection beam are symmetrical about the X axis and the Y axis as a whole; The central coupling beam structure is symmetrical about the X-axis and the Y-axis as a whole; The four X / Y detection beams are symmetrical about the X-axis and the Y-axis as a whole.

9. The three-axis gyroscope according to claim 1, characterized in that: There are four first Z detection beams, wherein two first Z detection beams are located at the left and right ends of the top of the first Z mass block, and the other two first Z detection beams are located at the left and right ends of the bottom of the first Z mass block; There are four second Z detection beams, two of which are located at the left and right ends of the top of the second Z mass block, and the other two are located at the left and right ends of the bottom of the second Z mass block.

10. The three-axis gyroscope according to claim 2, characterized in that: The central coupling beam structure is a concentric circle structure, the center of which is the central point A; or The central coupling beam structure comprises: a central coupling mechanism, wherein a coupling space is defined; a central coupling beam located in the coupling space; a central coupling beam anchor point located within the coupling space; Wherein, the central coupling mechanism is connected to the central coupling beam anchor point through the central coupling beam, and the central coupling mechanism is connected to the four X / Y mass blocks respectively through the four X / Y detection beams.

11. The three-axis gyroscope according to claim 10, characterized in that: The central coupling beam comprises a cross-shaped coupling central beam and a coupling folding beam, wherein the intersection of the cross-shaped coupling central beam is located at the central point A. There are four central coupling beam anchor points, which are respectively located in the four areas divided by the cross-shaped coupling central beam, wherein the first central coupling beam anchor point is located in the upper left area of ​​the cross-shaped coupling central beam, the second central coupling beam anchor point is located in the upper right area of ​​the cross-shaped coupling central beam, the third central coupling beam anchor point is located in the lower left area of ​​the cross-shaped coupling central beam, and the fourth central coupling beam anchor point is located in the lower right area of ​​the cross-shaped coupling central beam; The four connecting ends of the cross-shaped coupling center beam include two ends of its cross bar portion and two ends of its vertical bar portion, and the four connecting ends of the cross-shaped coupling center beam are all connected to the central coupling mechanism; Each connection end of the cross-shaped coupling central beam is connected to the central coupling beam anchor points on both sides of the connection end via a corresponding coupling folding beam.

12. The three-axis gyroscope according to claim 11, characterized in that: The central coupling beam also includes four L-shaped intermediate support beams, which are respectively located in the four areas divided by the cross-shaped coupling central beam. One end of each L-shaped intermediate support beam is connected to the horizontal bar portion of the cross-shaped coupling central beam in the area where it is located, and the other end is connected to the vertical bar portion of the cross-shaped coupling central beam in the area where it is located, and its opening direction is toward the center point A of the three-axis gyroscope.

13. The three-axis gyroscope according to claim 10, characterized in that: The central coupling beam anchor point is located at the central point A; The central coupling beam is located around the central coupling beam anchor point.

14. The three-axis gyroscope according to claim 10, characterized in that: The central coupling mechanism is a diamond structure with a coupling space defined inside, and the four corners of the diamond structure are respectively connected to the four X / Y mass block detection beams; or The central coupling mechanism is a square structure with a coupling space defined inside, and the four sides of the square structure are respectively connected to the four X / Y mass block detection beams.

Images