Scribing head and scoring device

Abstract

The object of the present invention is to provide a scoring head and a scoring device capable of suppressing the variation of the load of a cutter wheel on a substrate. The scoring head (10) comprises: a cutter wheel (101) for forming a scoring line on a surface (F1) of a substrate (F); a driving mechanism (600) for making the cutter wheel (101) abut against the surface (F1) of the substrate (F), the driving mechanism (600) comprising: a servo motor (610); a screw shaft (631) which is rotated around an axis by the servo motor (610); a nut (632) which is screwed with the screw shaft (631) and makes the cutter wheel (101) approach and leave the surface (F1) of the substrate (F) by the rotation of the screw shaft (631), and the positive efficiency and the reverse efficiency of the screw shaft (631) and the nut (632) are the same.

Description

Technical Field

[0001] The invention relates to a scribing head and a scribing device for forming scribing lines on a substrate. Background Art

[0002] The dividing process of dividing a brittle material substrate such as a glass substrate comprises the following steps: a scribing process of forming a scribing line on the surface of the substrate; and a breaking process of dividing the substrate along the formed scribing line. In the scribing process, a scribing device having a scribing head is used.

[0003] The scoring head disclosed in the following patent document 1 comprises a base plate, a top plate and a bottom plate installed vertically relative to the base plate, a blade holder for holding a scoring wheel, and a lifting mechanism for lifting the blade holder. The lifting mechanism is composed of a servo motor, a coupling, a ball screw, a slider, and a linear guide. The lifting mechanism is arranged between the top plate and the bottom plate.

[0004] The ball screw shaft is mounted on the motor shaft of the servo motor via a coupling, and the slider is mounted between the top plate and the bottom plate via a linear guide so that it can move freely in the up and down directions. Since the nut of the ball screw is mounted on the slider, when the servo motor rotates, the ball screw shaft rotates and the nut moves in the up and down directions. Therefore, the slider with the nut mounted can move in the up and down directions.

[0005] Below the slider, a blade holder is provided downwardly through the bottom plate. Therefore, when the slider moves in the up-down direction, the scoring wheel held by the blade holder abuts against the substrate, and a load (scoring load) is applied to the substrate, while a scoring line is formed on the substrate.

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Publication No. 2012-025595.

[0009] Problem that the invention aims to solve

[0010] The scribing head of Patent Document 1 forms scribing lines on a substrate by the above-mentioned structure. However, when scribing is performed using such a scribing head, the following problems arise.

[0011] It is usually difficult to place a substrate on a mounting table in a completely horizontal state. As a result, a height difference may occur on the surface of the substrate, and minute undulations (concavities and convexities) may occur on the surface of the substrate itself.

[0012] In this case, for example, when the cutter wheel descends from the convex portion of the substrate to the concave portion, the inertial force acts on the cutter wheel, and the cutter wheel becomes a state of floating from the surface of the substrate instantly. In this way, since the cutter wheel is separated from the surface of the substrate, the load from the cutter wheel is not applied to the substrate, and the so-called "load loss" phenomenon occurs.

[0013] On the other hand, when the cutter wheel rises from the concave portion to the convex portion, the inertial force acts on the cutter wheel, and the cutter wheel becomes sunken into the surface of the substrate. Therefore, a load greater than the initially set load is applied to the substrate. In this way, a load change occurs on the surface of the substrate.

[0014] When such load fluctuation occurs, the scribe lines cannot be formed satisfactorily, which may affect the quality of the substrate. Summary of the invention

[0015] In view of such a problem, an object of the present invention is to provide a scribing head and a scribing device capable of suppressing a variation in a load of a cutter wheel on a substrate.

[0016] Solutions for solving problems

[0017] The first mode of the present invention relates to a scoring head for forming a scoring line on the surface of a substrate. The scoring head involved in this mode has: a cutter wheel, which is used to form a scoring line on the surface of the substrate; a driving mechanism, which makes the cutter wheel abut against the surface of the substrate, and the driving mechanism includes: a servo motor; a screw shaft, which is rotated around the axis by the servo motor; a nut, which is screwed with the screw shaft, and the cutter wheel is moved closer to and away from the surface of the substrate by the rotation of the screw shaft, and the positive efficiency and reverse efficiency of the screw shaft and the nut are the same.

[0018] According to the scoring head involved in this method, since the positive efficiency and negative efficiency of the screw shaft and the nut are the same, the rotational driving force of the screw shaft is equal when the cutter wheel presses the substrate and when the cutter wheel is subjected to the reaction force from the substrate. Therefore, the responsiveness of the cutter wheel is improved, and as a result, the compliance of the cutter wheel to the substrate surface is improved. Therefore, the change of the scoring load relative to the shape of the substrate surface is suppressed. Therefore, the specified scoring load can be maintained at any position on the surface of the substrate.

[0019] In the scribing head according to the present embodiment, the lead angle of the screw shaft can be 45°.

[0020] According to the scribing head of this embodiment, since the lead angle of the screw shaft is set to 45 degrees, the ratio of the forward efficiency to the reverse efficiency of the screw shaft and the nut is 1: 1. Therefore, the forward efficiency and the reverse efficiency can be set to be the same.

[0021] In the scoring head according to this aspect, the screw shaft and the nut can constitute a sliding screw.

[0022] According to the scoring head involved in this embodiment, a sliding screw is used as a means to make the positive efficiency and negative efficiency of the screw shaft and the nut the same. A sliding screw with a lead angle of 45° is a widely used component and can be easily obtained. Therefore, a drive mechanism can be easily constructed.

[0023] The scribing head according to this aspect may further include another driving mechanism for moving the cutter wheel toward and away from the substrate.

[0024] According to the scribing head involved in this method, by applying a driving force in a direction that causes the cutter wheel to move away from the substrate through other driving mechanisms, the load applied to the substrate can be finely adjusted in a low load range according to the difference in driving force between the driving mechanism and the other driving mechanisms. Therefore, scribing lines can be well formed on substrates with small thickness.

[0025] In the engraving head involved in this method, it can be constructed that the other driving mechanism also has: a moving mechanism; a pressure applying part, which supplies air pressure to the moving mechanism, and the moving mechanism includes: a first moving member; a second moving member, which is arranged at a position closer to the substrate than the first moving member; a supporting part, which supports the first moving member and the second moving member at a specified interval; a cylinder, which accommodates the first moving member, the second moving member and the supporting part, and has an opening connected to the outside at a position between the first moving member and the second moving member; a transmission part, which is used to transmit the movement of the first moving member and the second moving member to the cutter wheel, and a gap is provided between the first moving member and the second moving member and the inner surface of the cylinder, and the pressure applying part supplies air pressure to at least the second space of the first space and the second space, wherein the first space is a space on the opposite side of the supporting part relative to the first moving member, and the second space is a space on the opposite side of the supporting part relative to the second moving member.

[0026] According to the scoring head involved in this method, the difference between the load generated by the driving force of the servo motor and the load generated by the air pressure supplied to the second space by the pressure applying portion can be set as the scoring load applied to the cutter wheel. At this time, a part of the air supplied to the second space flows through the gap between the second movable member and the inner side surface of the barrel and is discharged from the opening. In this way, through the air flowing through the gap, the second movable member is subjected to pressure in the direction of leaving the inner side surface of the barrel and is aligned to the position where the pressure is balanced. In addition, a part of the air supplied to the second space flows through the gap between the first movable member and the inner side surface of the barrel. Therefore, the first movable member is also aligned.

[0027] Therefore, the first movable member and the second movable member are supported at the centering position in a state separated from the inner side surface of the barrel. In this way, since the first movable member and the second movable member are supported in a state not contacting the inner side surface of the barrel, they are not subject to friction resistance when moving. Therefore, the driving force can be stably applied to the cutter wheel through other driving mechanisms.

[0028] Therefore, the scribing load of the cutter wheel can be finely and stably adjusted by the difference between the load generated by the driving force of the servo motor and the load generated by the air pressure supplied to the second space by the pressure applying portion.

[0029] In this way, since the scribing load of the cutter wheel can be finely and stably adjusted, the scribing load of the cutter wheel on the substrate remains constant at any position on the surface of the substrate.

[0030] In the scribing head according to this aspect, the first movable member and the second movable member may be balls, and the inner side surface of the tube may be a cylindrical shape.

[0031] According to the scoring head that this mode relates to, because the gap between the first moving member and the second moving member and the inner side of the barrel portion gradually decreases, air can be circulated smoothly in these gaps. In addition, in the inner space, because the gap can be made even on the full circumference of the latitude of the maximum diameter, the centering of the first moving member and the second moving member can be carried out smoothly, and the state of non-contact can be carried out on the full circumference. Therefore, the first moving member and the second moving member can be moved smoothly with the state of non-contact.

[0032] In the scribing head according to this aspect, the first movable member and the second movable member may have the same diameter, and the diameter of the inner surface of the cylindrical portion may be fixed.

[0033] According to this structure, since the same type of balls are used for the first movable element and the second movable element, the structure of the movable mechanism can be simplified, and the assembly work of the movable mechanism becomes easy.

[0034] In the scribing head according to this aspect, the first movable member and the second movable member may be formed of a magnetic material, and the support portion may include magnets at both ends in a direction in which the first movable member and the second movable member are separated from each other.

[0035] According to this structure, the first movable member and the second movable member can move in the vertical direction relative to the supporting portion. Therefore, even if the supporting portion cannot move in the diameter direction of the barrel, the first movable member and the second movable member also move relatively to the supporting portion through the flow of air in the gap and are positioned at the centering position.

[0036] Furthermore, it can be configured so that the contact surfaces of the magnet with the first movable member and the second movable member are flat surfaces.

[0037] According to this structure, since the first movable member and the second movable member are in point contact with the magnet, the first movable member and the second movable member become easy to move relative to the supporting portion. Therefore, the first movable member and the second movable member can be smoothly moved to the centering position by the pressure of the air flowing through the gap between the first movable member and the second movable member and the inner side surface of the barrel.

[0038] In the scribing head according to this aspect, the transmission portion can be configured to be connected to the support portion via the opening.

[0039] According to the scribing head according to this aspect, since the opening formed in the cylindrical portion is used both for exhausting air and for connecting the transmission portion to the support portion, the structure of the cylindrical portion can be simplified.

[0040] The scribing head according to this aspect may further include a measuring unit that measures a load of the cutter wheel on the substrate.

[0041] According to the scribing head of this embodiment, since the measuring unit is provided, the load of the cutter wheel on the substrate can be measured immediately before the scribe line is formed. Therefore, the reliability of the scribe load when the scribe line is formed can be improved.

[0042] A second embodiment of the present invention relates to a scoring device for scoring a substrate. The scoring device involved in this embodiment has: a loading portion, which carries a substrate; a scoring head, which is used to form a scoring line on the substrate; and a conveying portion, which moves the scoring head. Here, the scoring head has: a cutter wheel, which is used to form a scoring line on the surface of the substrate; and a driving mechanism, which makes the cutter wheel abut against the surface of the substrate. In addition, the driving mechanism includes: a servo motor; a screw shaft, which is rotated around an axis by the servo motor; and a nut, which is screwed with the screw shaft, and the cutter wheel is moved close to and away from the surface of the substrate by the rotation of the screw shaft. Moreover, the positive efficiency and the reverse efficiency of the screw shaft and the nut are the same.

[0043] The scribing device involved in this embodiment has the same effect as the first embodiment.

[0044] Effects of the Invention

[0045] As described above, according to the present invention, it is possible to provide a scribing head and a scribing device capable of suppressing fluctuations in the load of a cutter wheel on a substrate.

[0046] The effects and significance of the present invention will be further clarified by the description of the following embodiments. However, the following embodiments are merely examples of implementing the present invention, and the present invention is not limited in any way to the contents described in the following embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 It is a diagram schematically showing the structure of a scribing device according to an embodiment.

[0048] Figure 2 It is a perspective view showing the structure of a scribing head according to an embodiment.

[0049] Figure 3 (a) to (c) are diagrams for explaining the structure of a cutting mechanism of a scribing head according to an embodiment. Figure 3 (a) is a stereoscopic view showing the structure of the cutting mechanism involved in the embodiment. Figure 3 (b) is a cross-sectional view of a portion of the cutting mechanism of the scribing head according to the embodiment as viewed from the positive side of the X-axis. Figure 3 (c) is a side view of a part of the cutting mechanism of the scribing head involved in the embodiment as viewed from the positive side of the Y axis.

[0050] Figure 4 (a) is an exploded perspective view showing the structure of a driving mechanism of the scribing head according to the embodiment. Figure 4 (b) is a perspective view showing the structure of the driving mechanism of the scribing head involved in the embodiment.

[0051] Figure 5 It is an exploded perspective view showing the structure of a moving mechanism of the scribing head according to the embodiment.

[0052] Figure 6 (a) and (b) are diagrams for explaining the structure of the moving mechanism of the scribing head involved in the embodiment. Figure 6 (a) is an exploded perspective view of the components housed in the cylindrical portion of the scribing head according to the embodiment. Figure 6 (b) is from Figure 5 A perspective view of a transmission unit in a moving mechanism according to an embodiment when viewed from a different direction.

[0053] Figure 7 (a) and (b) are diagrams for explaining the structure of the moving mechanism of the scribing head involved in the embodiment. Figure 7 (a) is a cross-sectional view of the moving mechanism of the scribing head according to the embodiment as viewed from the negative side of the Y axis. Figure 7 (b) is a top view of the moving mechanism of the scribing head involved in the embodiment.

[0054] Figure 8 It is a perspective view showing the structure of a moving mechanism of the scribing head according to the embodiment.

[0055] Fig. 9 It is a perspective view showing the structure of a scribing head according to an embodiment.

[0056] Fig.10 (a) is a schematic diagram of a screw shaft and a nut provided in the scoring head involved in the embodiment.

[0057] Fig.10 (b) is a schematic diagram of a screw shaft and a nut provided in an existing scoring head.

[0058] Fig.11 (a) and (b) are diagrams for explaining a moving mechanism of a scribing head according to an embodiment.

[0059] Fig.11 (a) is a cross-sectional view when the moving mechanism involved in the embodiment is viewed from the negative side of the X-axis. Fig.11 (b) is to Fig.11 Schematic diagram of an enlarged portion of (a).

[0060] Fig.12 It is a block diagram showing the structure of a scribing head according to an embodiment.

[0061] Fig.13 It is a side view of the scribing head involved in embodiment.

[0062] Fig.14 (a) and (b) are front views for explaining the operation of the moving mechanism of the scribing head and the operation of the measuring unit, respectively, according to the embodiment. DETAILED DESCRIPTION

[0063] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In addition, for the convenience of description, mutually orthogonal X-axis, Y-axis and Z-axis are marked in each figure. The Z-axis is parallel to the vertical direction. The top and the bottom correspond to the positive side of the Z-axis and the negative side of the Z-axis, respectively.

[0064] In addition, in the present embodiment, the substrate F is placed parallel to the X-Y plane, and the scribing head operates in a manner that the cutter wheel 101 approaches and leaves the surface F1 of the substrate F. In the following description, the direction approaching the surface F1 of the substrate F is referred to as "downward", and the direction leaving the surface F1 of the substrate F is referred to as "upward". Therefore, in the present embodiment, the so-called movement of each structure of the scribing head in the up-down direction is the same as approaching and leaving the surface F1 of the substrate F.

[0065] <Implementation Method>

[0066] Figure 1 It is a diagram schematically showing the structure of the scribing device 1.

[0067] like Figure 1 As shown, the scoring device 1 has a moving table 2 and a scoring head 10. The moving table 2 is screwed with a ball screw 3. The moving table 2 is supported by a pair of guide rails 4 so as to be movable in the Y-axis direction. The ball screw 3 is driven by a motor 5 to rotate, so that the moving table 2 moves along the pair of guide rails 4 in the Y-axis direction.

[0068] A motor 5 is provided on the upper surface of the moving stage 2. The motor 5 rotates the upper mounting portion 6 in the X-Y plane and positions it at a predetermined angle. The mounting portion 6 that can be horizontally rotated by the motor 5 has a vacuum adsorption unit (not shown). The substrate F mounted on the mounting portion 6 is held on the mounting portion 6 by the vacuum adsorption unit.

[0069] The bridge 7 of the scribing device 1 is mounted on the pillars 8a and 8b in a manner spanning the movable table 2 and the loading portion 6 on the movable table 2. A rail 9 is mounted on the bridge 7. The rail 9 is connected to the scribing head 10 via a conveying portion 11, and the conveying portion 11 slides on the rail 9, so that the scribing head 10 is configured to move in the X-axis direction.

[0070] When forming a scribed line on the front surface F1 of the substrate F using the scribing device 1 , first, the holder unit 110 to which the cutter wheel 101 is attached is mounted on the scribing head 10 .

[0071] The scribing device 1 moves the scribing head 10 to a predetermined position, applies a predetermined load to the cutter wheel 101, and makes it contact with the surface F1 of the substrate F. Then, the scribing device 1 forms a scribed line on the substrate F by moving the scribing head 10 in the X-axis direction.

[0072] The scribing device 1 can rotate the carrier 6 or move it in the Y-axis direction as needed. In the above description, although the scribing device 1 is shown in which the scribing head 10 moves in the X-axis direction and the carrier 6 moves and rotates in the Y-axis direction, any scribing device 1 can be used as long as the scribing head 10 and the carrier 6 move relative to each other. For example, the scribing device 1 can also be used in which the scribing head 10 is fixed and the carrier 6 moves and rotates in the X-axis and Y-axis directions.

[0073] Next, the structure of the scribing head 10 will be described.

[0074] Figure 2 It is a perspective view showing the structure of the scribing head 10 .

[0075] like Figure 2 As shown, the scribing head 10 includes: a plate 12, a mounting plate 13, a stopper 14, a cutting mechanism 100, a moving mechanism 200, a camera unit 400, and a driving mechanism 600. In addition, the scribing head 10 includes a measuring unit 300 (see Fig. 9 ) and a pressure applying portion 500 ( Fig.12 ).

[0076] The plate 12 supports the scribing head 10. The scribing head 10 is mounted on the conveying portion 11 of the scribing device 1 while being supported by the plate 12 (see Figure 1 ).

[0077] The cutting mechanism 100 holds the cutter wheel 101 (see Figure 3(a) to (c)), which forms a scribed line on the surface F1 of the substrate F. The moving mechanism 200 causes the cutter wheel 101 to approach and leave the surface F1 of the substrate F. The measuring unit 300 (see Fig. 9 ) The load (scratching load) of the cutter wheel 101 on the substrate F is measured. The imaging unit 400 is used to align the substrate F with the mounting unit 6. Each structure is described below.

[0078] Figure 3 (a) is a perspective view showing the structure of the cutting mechanism 100.

[0079] like Figure 3 As shown in FIG. 1 ( a ), the cutting mechanism 100 includes a holder unit 110 , a joint 120 , a receiving portion 130 , a block member 140 , and a cover 150 . The cutter wheel 101 is held by the holder unit 110 .

[0080] Figure 3 (b) is a cross-sectional view of the cross section when the retainer unit 110 and the joint 120 are cut by a plane parallel to the YZ plane as viewed from the positive side of the X axis. Figure 3 In (b), only the portion where the holder unit 110 is attached to the joint 120 is shown. In addition, the portion of the holder unit 110 that protrudes from the joint 120 is shown in a side view. Figure 3 (c) is a cross-sectional view of a portion of the holder unit 110 protruding from the joint 120 , as viewed from the positive side of the Y axis, cut along a plane parallel to the XZ plane.

[0081] like Figure 3 As shown in (b) and (c) of FIG. 1 , the retainer unit 110 includes: the above-mentioned cutter wheel 101 , the retainer 111 and the pin 112 .

[0082] The upper portion 111a of the retainer 111, which is formed with an inclined surface 111c, is mounted on the joint 120. The lower portion 111b of the retainer 111 is formed with side walls 113a and 113b for retaining the cutter wheel 101 facing the X-axis direction. The side walls 113a and 113b are formed in a trapezoidal shape whose width narrows toward the lower end when viewed from the X-axis direction. A groove 114 is formed between the side walls 113a and 113b.

[0083] At the lower ends of the side walls 113a, 113b, circular holes 115a, 115b are coaxially formed in a manner spanning the groove 114. The central axes of the holes 115a, 115b are parallel to the X-axis. The cutter wheel 101 is inserted into the groove 114 in a manner that the holes 115a, 115b and the hole 101a of the cutter wheel 101 are arranged on the same straight line. Then, a pin 112 having a smaller diameter than the holes 101a, 115a, 115b passes through the holes 115a, 115b and the hole 101a of the cutter wheel 101. The two ends of the pin 112 are respectively fixed by the side walls 113a, 113b. In this way, the cutter wheel 101 can be rotatably held in the retainer unit 110.

[0084] In addition, Figure 3 In (c), the pin 112 is represented by a dotted line, and the holes 115a and 115b are represented by a dotted line.

[0085] The upper portion 111a and the lower portion 111b of the holder 111 are integrally formed. Alternatively, the upper portion 111a and the lower portion 111b may be separate.

[0086] like Figure 3 As shown in (b) and (c) of FIG. 1 , a circular hole 121 opening upward (on the positive side of the Z axis) is formed on the lower surface of the joint 120. A magnet 122 is provided at the deepest portion 121a of the hole 121. In addition, a positioning pin 123 is provided inside the hole 121 in a direction perpendicular to the central axis G1 of the hole 121. The upper portion 111a of the retainer 111 is inserted into the hole 121, so that the retainer unit 110 is mounted on the joint 120.

[0087] At least the upper portion 111 a of the holder 111 is formed of a magnetic material. Therefore, when the upper portion 111 a is inserted into the hole 121 , the upper portion 111 a is attracted by the magnet 122 , and the inclined surface 111 c of the upper portion 111 a abuts against the pin 123 .

[0088] Furthermore, a bolt 124 is inserted below the joint 120 on the opposite side of the positioning pin 123 across the central axis G1 toward the upper portion 111a of the retainer 111. Thus, the inclined surface 111c of the retainer 111 is in contact with the positioning pin 123 as appropriate.

[0089] like Figure 3 As shown in (a) of FIG. 1 , the receiving portion 130 is a cylindrical member, and a hole 131 is formed on the lower surface. The joint 120 is inserted into the hole 131. The block member 140 is provided above the receiving portion 130 via a connecting member 141.

[0090] The cover 150 is an L-shaped member, and is mounted on the block member 140. A hole (not shown) is formed on the upper surface 151 of the cover 150, and a nut 632 (see FIG. 1 ) of the drive mechanism 600 described later is mounted on the hole. Figure 2). A limiter 14 is also provided on the upper surface 151. Fig.13 The stopper 14 will be described. In addition, the side surface of the cover 150 on the negative side of the X axis is connected to the moving mechanism 200 (see Figure 2 ).

[0091] Figure 4 (a) is an exploded perspective view for explaining the structure of the driving mechanism 600.

[0092] like Figure 4 As shown in (a) of FIG. 6 , the drive mechanism 600 includes a servomotor 610 , a coupling 620 , and a slide screw 630 . The slide screw 630 includes a screw shaft 631 and a nut 632 . The nut 632 includes a shaft portion 633 and a flange portion 634 .

[0093] A bearing 611 is attached to a lower surface 610a of the servo motor 610. The servo motor 610 has a shaft 612 that is provided so as to penetrate a hole 611a of the bearing 611. The shaft 612 is a rotating shaft of the servo motor 610.

[0094] The screw shaft 631 is fitted into the nut 632. The screw shaft 631 and the shaft 612 are respectively fixed to the coupling 620. Figure 4 The driving mechanism 600 is shown in (b).

[0095] In addition, a mounting plate 13 (see Figure 2 ).

[0096] Figure 5 It is an exploded perspective view for explaining the structure of the moving mechanism 200 .

[0097] like Figure 5 As shown, the moving mechanism 200 includes a cylinder 210 , a first moving member 220 , a second moving member 221 , a support portion 222 , magnets 223 and 224 , and a transmission portion 230 .

[0098] The barrel 210 is a shape that is integrally provided with a projection 211 along the Z-axis direction at the side 210a of the negative side of the X-axis of a rectangular box. The barrel 210 is formed with an inner space 212 from the upper surface to the lower surface, which is used to accommodate the first moving member 220 and the second moving member 221. The shape of the inner side 212a of the barrel 210 that forms the inner space 212 is a cylindrical shape, and in addition, the diameter of the inner side 212a of the barrel 210 is fixed along the Z-axis direction. In addition, the openings on the upper surface and the lower surface of the barrel 210 are respectively provided with a lid 213.

[0099] An oval-shaped opening 214 is formed in the center of the side surface 211 a on the positive side of the X axis of the protrusion 211. The opening 214 is formed to communicate with the internal space 212. Thus, the internal space 212 communicates with the outside of the cylinder 210 through the opening 214.

[0100] The side surface 210b on the negative side of the Y axis of the cylinder 210 is formed with holes 210c and 210d communicating with the internal space 212 (see Figure 8 ). The tubes 501 and 502 are installed in the holes 210c and 210d. In this embodiment, the pressure applying unit 500 (see Fig.12 ) is supplied from the tube 502 to the internal space 212 of the cylinder 210. In the tube 501, the air pressure is not supplied from the pressure applying unit 500, and the atmospheric pressure is open.

[0101] Figure 6 (a) is an exploded perspective view showing the structure of each component accommodated in the internal space 212 of the cylinder 210. Figure 6 (b) is viewed from the negative side of the X axis Figure 5 The transmission unit 230 shown is a perspective view of the transmission unit 230 .

[0102] like Figure 5 , Figure 6 As shown in (a), the first movable member 220 and the second movable member 221 are balls formed of magnetic material and are formed to have the same diameter. The diameter of the first movable member 220 and the second movable member 221 is slightly smaller than the diameter of the inner side surface 212a of the cylinder 210.

[0103] The supporting part 222 supports the first moving member 220 and the second moving member 221 so that they are separated by a predetermined distance. The supporting part 222 is a cylindrical member, and a hole 225 that penetrates in the X-axis direction is formed at the central part in the Z-axis direction. In the present embodiment, the supporting part 222 is formed to be smaller than the diameter of the first moving member 220 and the second moving member 221. In addition, if the diameter of the supporting part 222 is smaller than the diameter of the inner side surface 212a of the barrel 210, then it can also be the same or larger than the diameter of the first moving member 220 and the second moving member 221.

[0104] Circular recessed portions 222a and 222b are formed at both ends of the support portion 222 and communicate with the hole 225. Screw holes 222c and 222d (see FIG. 222 ) that communicate with the hole 225 are formed in the recessed portions 222a and 222b. Figure 7 In (a)), magnets 223 and 224 are embedded in recesses 222a and 222b.

[0105] In addition, a pin 232 (see Figure 6In order to make the pin 232 stay in the hole 225, the screw 226 is used. The screw 226 is inserted into the screw hole 222d (refer to Figure 7 (a)) and tighten.

[0106] The magnets 223 and 224 are cylindrical in shape, and the first movable member 220 and the second movable member 221 are in contact with the magnets 223 and 224, respectively. The first movable member 220 is in contact with the upper surface 223a of the magnet 223. The second movable member 221 is in contact with the lower surface 224a of the magnet 224. The upper surface 223a and the lower surface 224a are formed on a surface parallel to the X-Y plane. In addition, the magnets 223 and 224 have the same size.

[0107] like Figure 5 , Figure 6 As shown in (b), the transmission part 230 has a groove 231 extending in the Z-axis direction formed on the side surface on the negative side of the X-axis. The width and depth of the groove 231 are fixed. The width of the groove 231 is greater than Figure 5 The width of the protrusion 211 is slightly larger. A pin 232 is provided at the central portion of the bottom surface 231a of the groove 231. The pin 232 is inserted into the hole 225 formed in the support portion 222. Therefore, the pin 232 is formed to have the same diameter as or slightly smaller than the diameter of the hole 225.

[0108] The transmission part 230 is formed such that the side walls 233 and 234 face each other in the Y-axis direction via the groove 231. The length of the groove 231 in the Y-axis direction is the same as the length of the protrusion 211 of the cylinder 210 in the Y-axis direction (see Figure 7 (b) Figure 8 ).

[0109] Next, the assembly of the moving mechanism 200 will be described.

[0110] Figure 7 (a) is a cross-sectional view of a cross section when the moving mechanism 200 and the plate 12 are cut along a plane parallel to the XZ plane, as viewed from the positive side of the Y axis.

[0111] like Figure 7 As shown in (a), the support portion 222 is accommodated in the internal space 212 of the barrel 210. At this time, the support portion 222 is accommodated in the internal space 212 in a manner that the hole 225 of the support portion 222 can be observed and confirmed from the opening 214 of the barrel 210. In addition, the support portion 222 is accommodated in the internal space 212 in a manner that the central axis of the support portion 222 is consistent with the central axis of the internal space 212.

[0112] The pin 232 of the transmission part 230 is inserted into the hole 225 of the support part 222 configured in this way. At this time, the end of the pin 232 on the negative side of the X axis is inserted so as not to protrude from the negative side of the X axis of the hole 225. In this way, when the pin 232 is inserted into the hole 225, the screw 226 is inserted into the screw hole 222d of the support part 222, and the pin 232 is pressed upward in the hole 225 by the screw 226. Thus, the pin 232 is fixed to the support part 222. Therefore, the transmission part 230 and the support part 222 are connected via the pin 232.

[0113] Thus, when the pin 232 is fixed in the hole 225 of the support portion 222 , the end of the pin 232 on the negative side of the X axis does not protrude from the negative side of the hole 225 , and therefore the pin 232 does not contact the inner side surface 212 a of the cylinder 210 .

[0114] When support part 222 is accommodated in internal space 212, magnet 223 is inserted into recess 222a of support part 222 so that upper surface 223a of magnet 223 is exposed from recess 222a. Similarly, magnet 224 is inserted into recess 222b of support part 222 so that lower surface 224a of magnet 224 is exposed from recess 222b.

[0115] The magnets 223 and 224 are arranged on the support part 222, and the first movable member 220 is accommodated in the internal space 212. The first movable member 220 is formed of a magnetic material, and is therefore supported on the support part 222 via the magnet 223 by being attracted by the magnet 223. At this time, the first movable member 220 does not leave the magnet 223 in the Z-axis direction. The second movable member 221 is also supported on the support part 222 via the magnet 224.

[0116] As described above, when the first movable member 220, the second movable member 221, the supporting portion 222 and the magnets 223 and 224 are accommodated in the internal space 212 of the cylinder 210, a gap is formed between the entire circumference of the first movable member 220 and the second movable member 221 and the internal space 212, and a gap is formed between the entire circumference of the supporting portion 222 and the internal space 212.

[0117] Figure 7 (b) is viewed from the positive side of the Z axis Figure 7 (a) is a top view of the moving mechanism 200.

[0118] As described above, the pin 232 inserted into the hole 225 of the support portion 222 is pressed by the screw 226 inserted into the screw hole 222d of the support portion 222 so as not to protrude from the hole 225 (see Figure 7 Therefore, if Figure 7As shown in (b), when the groove 231 of the transmission part 230 is embedded in the protrusion 211 of the cylinder 210, a gap is generated between the side surface 211a of the cylinder 210 and the bottom surface 231a of the groove 231. Therefore, a gap is also generated between the side walls 233 and 234 of the transmission part 230 and the side surface 210a of the cylinder 210. In addition, Figure 7 The arrows in (b) indicate the locations where gaps are formed.

[0119] In this way, after the first moving member 220, the second moving member 221, the support portion 222 and the magnets 223 and 224 are accommodated in the internal space 212 of the cylinder 210, Figure 5 The two covers 213 shown are installed on the openings of the upper surface and the lower surface of the internal space 212 to block the upper surface and the lower surface of the internal space 212. Figure 8 As shown, the assembly of the moving mechanism 200 is completed.

[0120] Thus, when the moving mechanism 200 is assembled, the side surface of the cylinder 210 on the negative side of the X axis is attached to the plate 12. Thus, the moving mechanism 200 is fixed to the plate 12 (see Figure 2 ).

[0121] In addition, Figure 7 In (a), although the screw 226 is inserted into the screw hole 222d of the support part 222, and the pin 232 is pressed from the bottom by the screw 226, the screw 226 may be inserted into the screw hole 222c. In this case, the pin 232 is pressed from the top by the screw 226. In addition, the screw 226 may be inserted into the screw holes 222c and 222d, respectively, and the pin 232 is pressed from the top and bottom and fixed in the hole 225 of the support part 222.

[0122] Fig. 9 FIG. 1 is a perspective view showing the structure of the scribing head 10. However, for the sake of convenience, Fig. 9 The cutting mechanism 100, the camera unit 400 and the driving mechanism 600 are omitted.

[0123] like Fig. 9 As shown, the measuring unit 300 includes a load sensor 310 , a contact member 320 , and a stage 330 .

[0124] The load sensor 310 measures the scribing load applied by the cutter wheel 101 to the substrate F when the cutter wheel 101 abuts against the surface F1 of the substrate F. A protrusion 311 is provided on the upper surface of the load sensor 310 .

[0125] The contact member 320 is a block member that contacts the protrusion 311 of the load sensor 310. In addition, a nut 321 is provided on the lower surface of the contact member 320. The stand 330 is a stand on which the load sensor 310 is placed, and is fixed to the plate 12.

[0126] In addition, Fig. 9 The middle figure shows a state where the nut 321 of the abutting member 320 abuts against the protrusion 311 of the load sensor 310. The operation of the measuring unit 300 will be described later. Figure 13-14 (b) is described below.

[0127] Back to Figure 2 The imaging unit 400 is mounted on the plate 12. The imaging unit 400 is used when positioning the substrate F in the mounting unit 6. The user can understand whether the substrate F is properly positioned in the mounting unit 6 through the image captured by the imaging unit 400.

[0128] The cutting mechanism 100 , the moving mechanism 200 , the measuring unit 300 , and the driving mechanism 600 are connected as follows.

[0129] like Figure 5 , Fig. 9 As shown, the side surface of the cover 150 of the cutting mechanism 100 on the negative side of the X axis (refer to Figure 2 , Figure 3 (a)) abuts against the side surface of the transmission part 230 on the positive side of the X axis, and the transmission part 230 and the cover 150 are fixed with bolts not shown. Figure 1 As shown, the cutting mechanism 100 is connected to the moving mechanism 200 .

[0130] In addition, if Fig. 9 As shown, the side surface of the abutting member 320 on the negative side of the Y axis abuts against the side surface of the transmission part 230 on the positive side of the Y axis, and a bolt (not shown) is inserted from a hole formed on the side surface of the abutting member 320 on the positive side of the Y axis, thereby connecting the transmission part 230 and the abutting member 320. Figure 2 As shown, the cutting mechanism 100 and the abutting member 320 are connected to the transmission part 230 of the moving mechanism 200 .

[0131] like Figure 2 As shown, the connection between the cutting mechanism 100 and the driving mechanism 600 is first to connect the servo motor 610 to the mounting plate 13. The mounting plate 13 is an L-shaped plate member, and a hole (not shown) is formed in the Z-axis direction in the upper wall 13a parallel to the X-Y plane. The bearing 611 (see FIG. 1 ) mounted on the lower surface 610a of the servo motor 610 is Figure 4 The upper wall 13a and the lower surface 610a are screwed together by means of screws (a) and (b) which are not shown in the figure, so as to fit into the hole.

[0132] Next, the shaft portion 633 is inserted into a hole (not shown) formed on the upper surface 151 of the cover 150 of the cutting mechanism 100, and the flange portion 634 of the nut 632 is closely attached to the hole (see FIG. Figure 4 At this time, the screw shaft 631 is in meshing engagement with the nut 632.

[0133] Then, the servo motor 610 connected to the mounting plate 13 is connected to the screw shaft 631 via the coupling 620 (see Figure 4 Finally, the side wall 13b extending from the edge of the upper wall 13a of the mounting plate 13 toward the negative side of the Z axis is screwed to the plate 12 by screws not shown. In this way, the drive mechanism 600 is fixed to the plate 12 via the mounting plate 13 when mounted on the cutting mechanism 100.

[0134] When the servo motor 610 is driven, the shaft 612 is driven to rotate. The rotational driving force of the shaft 612 is transmitted to the screw shaft 631 via the coupling 620. As a result, the screw shaft 631 rotates, and based on the rotation of the screw shaft 631, the nut 632 moves in the up-down direction. Since the nut 632 is connected to the cover 150 of the cutting mechanism 100, when the nut 632 moves in the up-down direction, the cutting mechanism 100 also moves in the up-down direction. As a result, the cutter wheel 101 can be brought close to and away from the surface F1 of the substrate F.

[0135] The drive mechanism 600 has a significant feature in the structure of the sliding screw 630 (screw shaft 631 and nut 632). The inventors found that by providing the sliding screw 630 in the scribing head 10, the scribing load of the cutter wheel 101 on the substrate F remains constant at any position on the surface F1 of the substrate F.

[0136] Below, refer to Fig.10 (a) and (b) illustrate the structure of the sliding screw 630 and the scratching load of the cutter wheel 101 on the substrate F.

[0137] Fig.10 (a) is a diagram schematically showing the sliding screw 630. Fig.10 (b) is a diagram schematically showing a ball screw 700 applied to a conventional scribing head (comparative example).

[0138] like Fig.10 As shown in (a), the slide screw 630 is designed so that the lead angle of the screw shaft 631 is 45 degrees. When the screw shaft 631 is set at such an angle, the forward efficiency and the reverse efficiency of the slide screw 630 are the same.

[0139] As described in "Problems to be Solved by the Invention", in the conventional scribing head, the scribing load of the cutter wheel 101 on the substrate F varies according to the position of the surface F1 of the substrate F. This is because the cutter wheel 101 does not work in accordance with the shape of the surface F1 of the substrate F. On the contrary, it can be considered that if the cutter wheel 101 works in accordance with the shape of the surface F1 of the substrate F, the scribing load does not vary.

[0140] The main reason why the cutter wheel 101 does not follow the shape of the surface F1 of the substrate F is as follows. Fig.10 (b) shows the relationship between the forward efficiency and the reverse efficiency of the ball screw 700 provided in a plurality of conventional scribing heads.

[0141] As we all know, the positive efficiency of a ball screw refers to the conversion efficiency from the rotational motion of the screw shaft to the linear motion of the nut, and the negative efficiency refers to the conversion efficiency from the linear motion of the nut to the rotational motion of the screw shaft.

[0142] When the screw shaft of the ball screw is rotated by the drive of the servo motor and the nut moves in the up-down direction, the cutter wheel presses the substrate and applies a scoring load to the substrate F. In this way, the operation of the cutter wheel is related to the positive efficiency of the ball screw.

[0143] On the other hand, when a scribing load is applied from the cutter wheel to the substrate F, a reaction force (resistance) is applied from the substrate to the cutter wheel to overcome the applied scribing load. Since this reaction force is opposite to the direction of the scribing load, in order to prevent the scribing load from being reduced by the reaction force, the servo motor further applies a scribing load to the substrate.

[0144] Specifically, the reaction force applied from the substrate to the cutter wheel presses the cutter wheel and the nut. As a result, the nut moves linearly and the screw shaft rotates, and the reaction force is transmitted to the servo motor. When the reaction force from the substrate is transmitted to the servo motor, a scoring load corresponding to the reaction force is applied to the substrate. In this way, the transmission of the reaction force to the servo motor is related to the inverse efficiency of the ball screw.

[0145] Therefore, for example, in a ball screw whose forward efficiency and reverse efficiency are inconsistent, when the forward efficiency is good but the reverse efficiency is lower than the forward efficiency, the rotation of the screw shaft of the ball screw and the linear motion of the nut are carried out smoothly, and the cutter wheel smoothly abuts against the base plate.

[0146] When the cutter wheel is subjected to a reaction force from the substrate, the reaction force pushes the nut upward via the cutter wheel, causing the screw shaft to rotate. At this time, the rotational driving force of the screw shaft is smaller than the rotational driving force of the screw shaft with positive efficiency. Therefore, the transmission of the reaction force to the servo motor is slow, and the timing of applying the load relative to the reaction force is also delayed. As a result, the cutter wheel cannot properly abut against the surface of the substrate.

[0147] like Fig.10 As shown in (b), the ball screw 700 used for the scoring head of Patent Document 1, etc. is composed of a screw shaft 701 and a nut 702. The lead angle of the screw shaft 701 is about 33° at most, and the positive efficiency and reverse efficiency of the ball screw 700 are different. In the case of such a lead angle, the reverse efficiency of the ball screw 700 is lower than the positive efficiency.

[0148] In the case where the positive efficiency and the negative efficiency of the ball screw 700 are different, especially in the case of Fig.10 In the case where the reverse efficiency shown in (b) is lower than the forward efficiency, the rotational driving force E3 of the screw shaft 701 when the cutter wheel 101 presses the substrate F is different from the rotational driving force E4 of the screw shaft 701 when it receives the reaction force from the substrate F, and the rotational driving force E4 is smaller than the rotational driving force E3.

[0149] Therefore, when the ball screw 700 is used, the responsiveness of the cutter wheel 101 when it moves in the up-down direction relative to the surface F1 of the substrate F becomes low, and the compliance of the cutter wheel 101 to the surface F1 of the substrate F is low. Therefore, when the surface F1 of the substrate F is displaced up-down, the cutter wheel 101 cannot properly maintain contact with the surface F1 of the substrate F, resulting in load fluctuation.

[0150] In contrast, in this embodiment, if Fig.10 As shown in (a), the sliding screw 630 is composed of a screw shaft 631 with a lead angle designed to be 45° and a nut 632. When the lead angle of the screw shaft 631 is 45°, the ratio of the positive efficiency to the negative efficiency of the sliding screw 630 is 1:1, and the positive efficiency is the same as the negative efficiency.

[0151] When such a screw shaft 631 is used, the magnitude of the rotational driving force E1 of the screw shaft 631 when the cutter wheel 101 presses the substrate F and the rotational driving force E2 of the screw shaft 631 when receiving the reaction force from the substrate F are the same.

[0152] As a result, the responsiveness of the cutter wheel 101 to the surface F1 of the substrate F is improved, and the compliance of the cutter wheel 101 to the surface F1 of the substrate F is improved. Therefore, the variation of the scratching load relative to the shape of the surface F1 of the substrate F is suppressed. As a result, a predetermined scratching load can be maintained at any position on the surface F1 of the substrate F.

[0153] In addition, in this embodiment, a sliding screw 630 including a screw shaft 631 designed with a lead angle of 45° is used instead of a ball screw. This is because the sliding screw 630 including a screw shaft 631 designed with a lead angle of 45° is a widely used component and is easily available.

[0154] By driving the driving mechanism 600 having the above-mentioned sliding screw 630, the cutter wheel 101 can be moved close to and away from the surface F1 of the substrate F. In this embodiment, there is also another structure for moving the cutter wheel 101 close to and away from the surface F1 of the substrate F. This structure is referred to Figures 5 to 9 The structure of the moving mechanism 200 described above and the pressure applying unit 500 described later (see Fig.12 ).

[0155] In addition, “other driving mechanisms” in the claims correspond to a combination of the moving mechanism 200 and the pressure applying unit 500 .

[0156] Next, refer to Fig.11 and refer to Figures 5 to 9 The specific operation of the moving mechanism 200 will be described.

[0157] As reference Fig. 9 As described above, the cutting mechanism 100 and the contact member 320 are connected to the transmission part 230 of the moving mechanism 200. Therefore, in the moving mechanism 200, when the transmission part 230 moves in the vertical direction relative to the surface F1 of the substrate F, the cutting mechanism 100 and the contact member 320 also move in the vertical direction relative to the surface F1 of the substrate F. Figure 7 As described in (a), the transmission part 230 is connected to the support part 222 via the pin 232, and the support part 222 supports the first moving member 220 and the second moving member 221. Therefore, the movement of the transmission part 230 causes the movement of the first moving member 220 and the second moving member 221. Here, the movement of the first moving member 220 and the second moving member 221 is described.

[0158] Fig.11 (a) and (b) are diagrams for explaining the movement of the first movable element 220 and the second movable element 221 in the internal space 212 of the cylinder 210 and the flow of air supplied to the internal space 212 .

[0159] Fig.11 (a) is a cross-sectional view of the cross section of the cylinder 210 containing the first movable member 220 and the like in the internal space 212, as viewed from the positive side of the X-axis, with the plane parallel to the YZ plane. Fig.11 In (a), the pin 232 of the transmission part 230 is embedded in the hole 225 of the support part 222. That is, the support part 222 is connected to the transmission part 230. Fig.11 In (a), tubes 501 and 502 are omitted. Fig.11 (b) is to Fig.11 (a) is an enlarged schematic diagram of the vicinity of the second moving member 221 shown.

[0160] In addition, in the following description, "on the opposite side of the support portion 222 relative to the first moving member 220" means "the positive side of the Z axis of the first moving member 220", and is sometimes only recorded as "the upper side of the first moving member 220" or "the upper side of the first moving member 220". In addition, "on the opposite side of the support portion 222 relative to the second moving member 221" means "the negative side of the Z axis of the second moving member 221", and is sometimes only recorded as "the lower side of the second moving member 221" or "the lower side of the second moving member 221".

[0161] like Fig.11 As shown in (a), the first moving member 220, the second moving member 221, the support portion 222, and the magnets 223 and 224 are accommodated in the internal space 212 of the cylinder 210, and the pin 232 of the transmission portion 230 is inserted into the hole 225 of the support portion 222. In such an internal space 212, the pressure applying portion 500 (see Fig.12 ) In the direction of the arrow, air pressure is supplied to the second space R2 arranged on the opposite side of the support portion 222 relative to the second movable member 221. In this embodiment, air pressure is not supplied to the first space R1 arranged on the opposite side of the support portion 222 relative to the first movable member 220.

[0162] like Fig.11 As shown in the direction of the arrow in (b), from the pressure applying portion 500 (refer to Fig.12 ) is supplied with, and supplies to the second space R2 from pipe 502 through hole 210d.In the second space R2, a gap is generated between the second mobile member 221 and the inner space 212 (the inner side 212a of barrel 210).Therefore, the air supplied to the second space R2 passes this gap.In addition, as mentioned above, because the opening 214 of barrel 210 is formed to be communicated with inner space 212, the part of the air that therefore passes the gap between the second mobile member 221 and the inner space 212 is discharged from the outside of barrel 210 from opening 214.

[0163] In addition, from the pressure applying unit 500 (refer to Fig.12 ) A portion of the air supplied to the second space R2 passes through the gap between the support portion 222 and the internal space 212 and the gap between the first moving member 220 and the internal space 212, and flows into the first space R1. Fig.11 The hole 210c shown in (a) is discharged from the tube 501.

[0164] For the sake of convenience, Fig.11 (b) shows the gap between the second moving member 221 and the internal space 212 and the gap between the support portion 222 and the internal space 212, but the actual gap is very small. Fig.12 ) When air pressure is supplied to the second space R2, the air pressure presses the second movable member 221 toward the supporting portion 222.

[0165] The second movable member 221 is supported by the support portion 222 via the magnet 224, and the first movable member 220 is supported by the support portion 222 via the magnet 223. Therefore, when the second movable member 221 is pressed by the air pressure in the second space R2, the second movable member 221, the support portion 222, and the first movable member 220 move upward.

[0166] As reference Figure 2 , Fig. 9 As described, the cutting mechanism 100 is connected to the supporting portion 222 via the transmission portion 230. Therefore, the movement of the first moving member 220 and the second moving member 221 is transmitted to the cutting mechanism 100 via the transmission portion 230. Therefore, the cutting mechanism 100 moves with the movement of the first moving member 220 and the second moving member 221. In the above case, the cutting mechanism 100 and the cutter wheel 101 move upward.

[0167] In this way, the first moving member 220 and the second moving member 221 move upward by the air pressure supplied from the pressure applying part 500 to the moving mechanism 200. Since the movement is transmitted to the cutting mechanism 100 via the transmission part 230, the cutter wheel 101 moves upward. In this way, the air pressure supplied from the pressure applying part 500 to the second space R2 applies an upward driving force to the cutter wheel 101.

[0168] On the other hand, when the servo motor 610 of the driving mechanism 600 is driven in the direction (downward) in which the cutter wheel 101 moves toward the substrate F side, the sliding lead screw 630 applies a driving force to the cutting mechanism 100. As a result, the cutting mechanism 100 moves downward. In this way, the driving force of the servo motor 610 applies a downward driving force to the cutter wheel 101.

[0169] At this time, the cutting mechanism 100 moves downward, and the movement is transmitted to the supporting part 222 via the transmission part 230. Therefore, the first moving member 220 and the second moving member 221 move downward together with the cutting mechanism 100.

[0170] In this way, driving forces in different directions are applied to the cutter wheel 101 in the scribing head 10. Then, the cutter wheel 101 approaches and moves away from the surface F1 of the substrate F based on the driving force.

[0171] When the pressure applying unit 500 applies air pressure, the driving force generated by the air pressure applied by the pressure applying unit 500 to the second space R2 is set to be smaller than the driving force generated by the servo motor 610. In this case, the first moving member 220 and the second moving member 221 move downward, and the cutting mechanism 100 also moves downward. As a result, the cutter wheel 101 can abut against the surface F1 of the substrate F.

[0172] Therefore, the scoring load of the cutter wheel 101 can be set by the difference between the driving force generated by the servo motor 610 and the driving force generated by the air pressure applied to the second space R2 by the pressure applying unit 500 .

[0173] In this way, a scribing load can be obtained from the difference between two driving forces in different directions, and the scribing load can be applied to the substrate F from the cutter wheel 101 .

[0174] In addition, as described above, when the pressure applying unit 500 (see Fig.12 ) When air pressure is supplied to the second space R2, the supplied air passes through the gap between the second movable member 221 and the inner side surface 212a of the cylinder 210. In addition, although a part of the air passing through this gap is discharged to the outside of the cylinder 210 from the opening 214, the remaining air flows into the first space R1 through the gap generated between the second movable member 221 and the inner side surface 212a of the cylinder 210, and is discharged from the hole 210c.

[0175] Therefore, by air passing through the above-mentioned gap, the first movable member 220 and the second movable member 221 are subjected to pressure in the direction of the inner side surface 212a away from the barrel 210, and are centered to the position where the pressure is balanced. Therefore, the first movable member 220 and the second movable member 221 are supported at the aligning position in a state of leaving the inner side surface 212a of the barrel 210.

[0176] Thus, the first moving member 220 and the second moving member 221 are supported on the supporting portion 222 in a state of not contacting the inner side surface 212a of the barrel 210, so that they are not subject to frictional resistance when moving. Therefore, when the first moving member 220 and the second moving member 221 move in the up-down direction of the internal space 212, they can move smoothly without being hindered by frictional resistance. Thus, the scribing load of the cutter wheel 101 on the substrate F can be finely and stably adjusted.

[0177] Fig.12 : is a block diagram showing the structure of the scribing head 10 .

[0178] like Fig.12 As shown, the scoring head 10 has Figure 2 as well as Fig.13 The illustrated plate 12 , mounting plate 13 , stopper 14 , cutting mechanism 100 , moving mechanism 200 , measuring unit 300 , imaging unit 400 , and driving mechanism 600 further include a control unit 510 , a pressure applying unit 500 , and a driving unit 520 .

[0179] The pressure applying unit 500 includes a compressed air source (not shown) and supplies air pressure to the second space R2 of the internal space 212 of the cylinder 210 .

[0180] The driving unit 520 moves the plate 12 in the vertical direction relative to the substrate F. As described above, the cylinder 210 of the moving mechanism 200 and the stage 330 of the measuring unit 300 are fixed to the plate 12. In addition, the driving mechanism 600 is fixed to the plate 12 via the mounting plate 13. Therefore, when the plate 12 moves in the vertical direction, the cylinder 210, the stage 330, the load sensor 310 placed on the stage 330, and the driving mechanism 600 also move in the vertical direction.

[0181] The control unit 510 includes a calculation processing circuit such as a CPU, a ROM, a RAM, a hard disk, and other memories. The control unit 510 controls each part according to a program stored in the memory.

[0182] Next, refer to Figure 13-14 (b) will explain the operation of the scribing head 10. Fig.12 The control unit 510 is performed.

[0183] Fig.13 This is a side view of the scribing head 10 when the cutter wheel 101 is in contact with the surface F1 of the substrate F, as viewed from the negative side of the Y axis. Fig.14 (a) and (b) are side views of the scribing head 10 viewed from the positive side of the X-axis. Fig.14 In (a) and (b), the cutting mechanism 100, the imaging unit 400, and the driving mechanism 600 are omitted, and only the plate 12, the moving mechanism 200, and the measuring unit 300 are shown.

[0184] When the scribing head 10 starts scribing, the control unit 510 drives the servo motor 610 (see Figure 1 , Figure 4 (a) and (b)), the cutter wheel 101 is temporarily retracted relative to the surface F1 of the substrate F. In this case, the control unit 510 drives the servo motor 610 to move the cutting mechanism 100 upward.

[0185] Then, the control unit 510 drives the servo motor 610 (see Figure 1 , Figure 4 (a), (b)) The cutter wheel 101 is close to the surface F1 of the substrate F. That is, the control unit 510 causes the servo motor 610 to drive the cutting mechanism 100 to move downward. Furthermore, the control unit 510 causes the pressure applying unit 500 to supply a specified air pressure to the second space R2. In this way, the driving force generated by the servo motor 610 and the driving force generated by the air pressure applied to the second space R2 by the pressure applying unit 500 are supplied to the cutter wheel 101.

[0186] like Fig.13 As shown, the control unit 510 controls the pressure applying unit 500 and the servo motor 610 by the difference between the two driving forces, so that the cutter wheel 101 abuts against the surface F1 of the plate F.

[0187] like Fig.14 As shown in (a) of FIG. 1 , the nut 321 of the contact member 320 contacts the protrusion 311 of the load sensor 310 until the cutter wheel 101 contacts the surface F1 of the substrate F. During this period, the load sensor 310 measures the load of the cutter wheel 101 .

[0188] Then, when the cutter wheel 101 abuts against the surface F1 of the substrate F (see Fig.13), the plate 12 moves downward from the position N0 to the position N1 relative to the surface F1 of the substrate F. Since the stage 330 supporting the load sensor 310 is connected to the plate 12, the stage 330 also moves when the plate 12 moves. As a result, the load sensor 310 supported by the stage 330 also moves, and the load sensor 310 is separated from the protrusion 311 of the contact member 320.

[0189] In this way, when the cutter wheel 101 abuts against the surface F1 of the substrate F, the load sensor 310 is separated from the abutting member 320. That is, the load sensor 310 measures the load of the cutter wheel 101 until the cutter wheel 101 abuts against the surface F1 of the substrate F. Therefore, the load measured when the load sensor 310 is about to leave the abutting member 320 is the load when the cutter wheel 101 abuts against the surface F1 of the substrate F. That is, the measured value at this time is the scratching load of the cutter wheel 101 on the substrate F.

[0190] The control unit 510 compares the measurement result of the load sensor 310 (the scratching load measured when the load sensor 310 is about to come out of contact with the member 320) with a preset scratching load, and corrects the scratching load.

[0191] In addition, if Figure 2 As shown, the scoring head 10 is provided with a stopper 14 on the upper surface 151 of the cover 150 of the cutting mechanism 100. The stopper 14 is provided to limit excessive upward movement of the cutting mechanism 100. In the case where the driving force generated by the air pressure applied by the pressure applying part 500 to the second space R2 is too large compared with the driving force generated by the servo motor 610, although the cutting mechanism 100 wants to move upward, the cutting mechanism 100 cannot continue to move upward because the stopper 14 abuts against the upper wall 13a of the mounting plate 13. In this way, the upward movement of the cutting mechanism 100 is limited by the stopper 14.

[0192] Next, correction of the scratch load will be described.

[0193] In order to make the difference between the driving force generated by the servo motor 610 and the driving force generated by the air pressure applied to the second space R2 by the pressure applying unit 500 equal to a predetermined scoring load, the control unit 510 causes the pressure applying unit 500 to supply air pressure to the second space R2. In addition, the control unit 510 drives the servo motor 610. The air pressure and driving force required to obtain such a predetermined scoring load can be calculated in advance.

[0194] However, even if the theoretically calculated air pressure is supplied to the second space R2, there may be a case where the prescribed scratching load cannot be obtained, for example, due to the type of substrate F, the specification and state of the cutter wheel 101, etc. The same is true for the driving force generated by the servo motor 610. To this end, in order to obtain the prescribed scratching load, a data table is prepared by repeating experiments in advance, etc., in which correction values ​​of the air pressure supplied to the second space R2 and the driving force of the servo motor 610 are calculated. Such a data table is stored in the control unit 510 for controlling the scratching head 10. When setting the prescribed scratching load, the control unit 510 refers to the data table and causes the pressure applying unit 500 to supply an appropriate air pressure to the second space R2. In addition, the control unit 510 drives the servo motor 610. In this way, when the control unit 510 has a data table, it can be set to the prescribed scratching load.

[0195] On the other hand, Fig.14 As shown in FIG. 1 ( a ), the load sensor 310 mounted in the present embodiment continues to measure the load of the cutter wheel 101 until the cutter wheel 101 comes into contact with the surface F1 of the substrate F while coming into contact with the contact member 320 .

[0196] Then, when the cutter wheel 101 abuts against the surface F1 of the substrate F (see Fig.13 ),like Fig.14 As shown in (b), the load sensor 310 is separated from the contact member 320. Therefore, the load measured when the contact member 320 is about to separate from the load sensor 310 is equivalent to the load when the cutter wheel 101 contacts the surface F1 of the substrate F, that is, the scratching load.

[0197] The control unit 510 compares the thus measured scribing load with the set scribing load, causes the pressure applying unit 500 to supply appropriate air pressure, and drives the servo motor 610, so that the predetermined scribing load is applied to the substrate F.

[0198] Thus, the scribing head 10 of this embodiment can measure the scribing load when the scribing line is about to be formed. That is, since the scribing load must be measured when forming the scribing line, an appropriate air pressure is supplied to the second space R2 each time to drive the servo motor 610. Therefore, the above-mentioned data table is not required.

[0199] Furthermore, when the scribing load is adjusted with reference to the data table, there is a case where the scribing load is not remeasured immediately before the scribing operation is performed. In this case, although the scribing load is applied to the substrate F, it is unclear whether the prescribed scribing load is actually applied.

[0200] In contrast, the scribing head 10 of the present embodiment always measures the scribing load immediately before the scribing operation is performed. Therefore, the reliability of the scribing load is improved, and a scribing line can be formed with the set scribing load.

[0201] <Effects of implementation>

[0202] According to this embodiment, the following effects can be obtained.

[0203] like Figure 4 (a), (b), Fig.10 As shown in (a), the positive efficiency and the reverse efficiency of the sliding screw 630 are configured to be the same. Through this structure, the rotational driving forces E1 and E2 of the screw shaft 631 are equal when the cutter wheel 101 presses the substrate F and when it is subjected to the reaction force from the substrate F. Therefore, the responsiveness of the cutter wheel 101 is improved, and as a result, the compliance of the cutter wheel 101 to the surface F1 of the substrate F is improved. As a result, the variation of the scratching load relative to the shape of the surface F1 of the substrate F can be suppressed. Therefore, the specified scratching load can be maintained at any position on the surface F1 of the substrate F.

[0204] In addition, the lead angle of the screw shaft 631 is designed to be 45 degrees. Based on this structure, the ratio of the forward efficiency and the reverse efficiency of the slide screw 630 is 1: 1. Therefore, the forward efficiency and the reverse efficiency of the slide screw 630 can be set to be the same.

[0205] As described above, the scribing head 10 uses the slide screw 630. The slide screw 630 having a lead angle of 45° is a widely used member and can be easily obtained. Therefore, the drive mechanism 600 can be easily configured.

[0206] like Figure 1 , Figures 5 to 9 As shown, the scribing head 10 further includes other driving mechanisms for making the cutter wheel 101 approach and leave the surface F1 of the substrate F. In this case, the other driving mechanisms are the moving mechanism 200 and the pressure applying part 500 .

[0207] Based on this structure, a driving force in a direction to move the cutter wheel 101 away from the surface F1 of the substrate F can be applied by the moving mechanism 200 and the pressure applying unit 500, and the scribing load applied to the substrate F can be finely adjusted within a low load range by the difference between the driving mechanism 600 and the driving force. Therefore, scribing lines can be well formed on a substrate F with a small thickness.

[0208] like Figure 2 , Figure 7 As shown in (a) and (b) of FIG. 1 , the scribing head 10 supplies air pressure from the pressure applying portion 500 to the second space R2 .

[0209] Based on this structure, the difference between the driving force generated by the servo motor 610 and the driving force generated by the air pressure applied by the pressure applying part 500 to the second space R2 can be set as the scoring load applied to the cutter wheel 101. At this time, a portion of the air supplied to the second space R2 passes through the gap between the second movable member 221 and the inner side surface 212a of the barrel 210, and is discharged from the opening 214. In this way, as the air passes through the gap, the second movable member 221 is subjected to pressure in the direction away from the inner side surface 212a of the barrel 210, and is aligned to the position where the pressure is balanced. In addition, a portion of the air supplied to the second space R2 passes through the gap between the first movable member 220 and the inner side surface 212a of the barrel 210. As a result, the first movable member 220 is also aligned.

[0210] Therefore, the first movable member 220 and the second movable member 221 are supported in the centering position in a state of being away from the inner side surface 212a of the barrel 210. In addition, the first movable member 220 is also arranged on the supporting portion 222 in a manner of providing a gap between the first movable member 220 and the inner side surface 212a of the barrel 210. In this way, the first movable member 220 and the second movable member 221 are supported in a non-contact state relative to the inner side surface 212a of the barrel 210, and therefore are not subject to frictional resistance when moving. Therefore. A driving force can be stably applied to the cutter wheel 101 through the moving mechanism 200 and the pressure applying portion 500.

[0211] Therefore, the scoring load of the cutter wheel 101 can be finely and stably adjusted by the difference between the driving force generated by the servo motor 610 and the driving force generated by the air pressure applied to the second space R2 by the pressure applying unit 500.

[0212] In this way, since the scribing load of the cutter wheel 101 can be finely and stably adjusted, the scribing load of the cutter wheel 101 on the substrate F remains constant at any position on the surface F1 of the substrate F.

[0213] like Figure 5 As shown, the first moving member 220 and the second moving member 221 are balls, and the inner space 212 of the cylinder 210 is cylindrical.

[0214] Based on this structure, because the gap of the inner side 212a of the first moving member 220 and the second moving member 221 and the barrel 210 gradually decreases, the air supplied to the second space R2 from the pressure applying portion 500 can be circulated smoothly. In addition, because the gap on the full circumference of the latitude of the maximum diameter of the inner side 212a of the barrel 210 can be made even, the centering of the first moving member 220 and the second moving member 221 can be carried out smoothly, and the first moving member 220 and the second moving member 221 can be made to be the state of non-contact on the full circumference. Therefore, the first moving member 220 and the second moving member 221 can be made to move smoothly in the up-down direction with the state of non-contacting inner space 212.

[0215] like Figure 7 As shown in (a), the first movable member 220 and the second movable member 221 are formed to have the same diameter, and the diameter of the inner side surface 212a of the cylinder 210 is fixed.

[0216] According to this structure, since the same type of balls are used as the first movable element 220 and the second movable element 221 , the structure of the movable mechanism 200 can be simplified and the assembly work can be easily performed.

[0217] Furthermore, the first movable member 220 and the second movable member 221 are formed of a magnetic material, and the support portion 222 has magnets 223 and 224 at both ends in a direction in which the first movable member 220 and the second movable member 221 are separated from each other.

[0218] Based on this structure, the first moving member 220 and the second moving member 221 can move in the direction perpendicular to the departure direction relative to the supporting portion 222. Therefore, even if the supporting portion 222 can not move in the diameter direction of the barrel 210, the first moving member 220 and the second moving member 221 also move relatively to the supporting portion 222 through the gap by air flow, and are positioned in the centering position. Therefore, the first moving member 220 and the second moving member 221 can be smoothly and appropriately aligning. As a result, in the inner space 212, the first moving member 220 and the second moving member 221 can be more appropriately set to the non-contact state.

[0219] like Figure 6 As shown in (a), the upper surface 223a of the magnet 223 and the lower surface 224a of the magnet 224 are flat surfaces relative to the first movable member 220 and the second movable member 221.

[0220] Based on this structure, since the first movable member 220 and the second movable member 221 are in point contact with the magnets 223 and 224, the first movable member 220 and the second movable member 221 become easy to move relative to the support portion 222. Therefore, the pressure of the air flowing through the gap between the first movable member 220 and the second movable member 221 and the inner side surface 212a of the cylinder 210 can make the first movable member 220 and the second movable member 221 move smoothly to the centering position.

[0221] like Figure 5 , Figure 7 As shown in FIG. 2( a ), the transmission portion 230 is connected to the support portion 222 via the opening 214 .

[0222] According to this structure, since the opening 214 is commonly used for the discharge of the air supplied to the second space R2 and the connection with the transmission part 230 , the structure of the cylinder 210 can be simplified.

[0223] In addition, for example, when the driving force generated by the air pressure applied by the pressure applying unit 500 to the second space R2 is too high compared to the driving force generated by the servo motor 610, the cutting wheel 101 is in contact with the substrate F, but a scribing load is still applied to the substrate F. In such a case, an excessive scribing load may be applied to the substrate F, thereby causing damage to the substrate F, etc.

[0224] However, the pin 232 of the transmission part 230 can move within the range of the opening 214. That is, the movement of the transmission part 230 is limited. Therefore, in the above-mentioned case, even if the first moving member 220 and the second moving member 221 move downward, since the pin 232 abuts against the lower end of the opening 214, the first moving member 220 and the second moving member 221 cannot continue to move downward. Thus, no excessive scribing load is applied to the substrate F.

[0225] like Figure 7 As shown in (a) and (b), when the pin 232 is fixed in the hole 225 of the support part 222 by the screw 226, the end of the pin 232 does not protrude from the hole 225, so the pin 232 does not contact the inner side surface 212a of the cylinder 210. In addition, when the pin 232 of the transmission part 230 is inserted into the hole 225 of the support part 222, a gap is generated between the side surface 211a of the cylinder 210 and the bottom surface 231a of the groove 231, and the groove 231 of the transmission part 230 is embedded in the protrusion 211 in a manner that a gap is also generated between the side walls 233 and 234 of the transmission part 230 and the side surface 210a of the cylinder 210.

[0226] Based on such a structure, the contact area between the transmission part 230 and the barrel 210 is reduced. Therefore, when the first movable member 220 and the second movable member 221 move, the transmission part 230 also moves, and the friction resistance between the transmission part 230 and the barrel 210 is reduced. Therefore, the scoring load of the cutter wheel 101 can be adjusted more finely.

[0227] like Figure 13-14 As shown in (b), when the cutter wheel 101 contacts the surface F1 of the substrate F, the load sensor 310 is separated from the contact member 320. The load sensor 310 measures the load of the cutter wheel 101 when the contact member 320 is about to leave. This load is the scribing load of the cutter wheel 101 on the substrate F.

[0228] Thus, when the scribing load value set by the user is different from the scribing load value measured when the load sensor 310 is about to leave the abutting member 320, the control unit 510 causes the pressure applying unit 500 to supply an appropriate pressure to the second space R2 according to the measured value of the load sensor 310. In this way, an appropriate scribing load is adjusted. Thus, the scribing head 10 can form a scribing line in a state where the reliability of the scribing load is improved.

[0229] In addition, the scribing load is measured at the start of the scribing operation. Based on the measurement, the pressure applying unit 500 supplies air pressure to the second space R2 to apply a predetermined scribing load to the substrate F. In addition, the driving force is output by the servo motor 610. Therefore, it is not necessary to carry a data table that digitizes the correction value of the scribing load on the scribing head 10.

[0230] In addition, in order to detect the position (0-point position) where the cutter wheel abuts against the substrate, a sensor is usually provided at the top of the cutter wheel. Thus, when the cutter wheel abuts against the substrate, the sensor contacts the substrate and detects the 0-point position. However, in the process where the sensor contacts the substrate multiple times, there are cases where the sensor deteriorates and cannot correctly detect the 0-point position. In such a case, the position of the surface of the substrate is not determined, and the specified scribing line cannot be formed.

[0231] In this regard, as described above, in the scribing head 10 of the present embodiment, the load sensor 310 continues to measure the load of the cutter wheel 101 until the cutter wheel 101 abuts against the surface F1 of the substrate F. Then, when the cutter wheel 101 abuts against the surface F1 of the substrate F, the load sensor 310 leaves the abutting member 320. When the load sensor 310 is about to leave the abutting member 320, the load value changes. That is, the time point when the load value changes is the time point when the cutter wheel 101 abuts against the surface F1 of the substrate F, and the position of the cutter wheel 101 at this time is the 0 o'clock position.

[0232] Therefore, the 0-point position is detected while obtaining the scribing load by the load sensor 310. In this way, the 0-point position of the cutter wheel 101 can be detected with high accuracy without using a sensor.

[0233] Furthermore, when the cutter wheel 101 comes into contact with the surface F1 of the substrate F, the plate 12 moves downward, and the nut 321 of the contact member 320 and the protrusion 311 of the load sensor 310 separate from each other.

[0234] Thus, the cutter wheel 101 can form the scribed lines on the substrate F while moving in the up-down direction following the undulations (concavities and convexities) generated on the surface F1 of the substrate F.

[0235] Furthermore, even when the scoring head 10 is not in use, a fixed air pressure can be applied to the second space R2 from the pressure applying unit 500. Thus, the cutting mechanism 100 is always positioned at the top. That is, the cutter wheel 101 is always positioned at the top relative to the substrate F, the mounting unit 6, etc. Therefore, when the scoring head 10 is not in use, it is possible to reliably prevent the scoring head 10 from falling due to its own weight, thereby causing the cutter wheel 101 to collide with the substrate F, the mounting unit 6, etc. and be damaged.

[0236] <Modification>

[0237] Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made to the embodiment of the present invention other than the above.

[0238] For example, in the above-described embodiment, the driving force generated by the servo motor 610 is applied to the cutter wheel 101 from above, and the air pressure generated by the pressure applying unit 500 is applied from below.

[0239] In the modified example, in addition to applying the driving force generated by the servo motor 610 from above to the cutter wheel 101, the air pressure generated by the pressure applying unit 500 is also applied. This configuration can be changed to form the scribed lines with a high load.

[0240] In this case, the composition is Figure 2 , Figure 5 The tube 501 shown is connected to the pressure applying unit 500 by a pipe (not shown), and supplies air pressure from a compressed air source to the first space R1 and the second space R2, respectively.

[0241] In addition, if Fig.11 As shown in (a), the air pressure supplied to the first space R1 presses the first movable member 220 and the second movable member 221 downward. In addition, as described above, the direction of the driving force generated by the servo motor 610 is the direction in which the cutter wheel 101 moves toward the substrate F side (downward). In contrast, the driving force generated by the air pressure applied by the pressure applying unit 500 to the second space R2 is upward.

[0242] That is, the difference between the driving force generated by the air pressure supplied to the first space R1 and the driving force generated by the servo motor 610 and the driving force generated by the air pressure supplied to the second space R2 corresponds to the scribing load of the cutter wheel 101 on the substrate F.

[0243] As described above, the servo motor 610 of the present invention is equipped with a ball screw with equal forward and reverse efficiencies. Therefore, when a driving force generated by air pressure is added in addition to the servo motor 610, a larger scribing load can be applied to the substrate F more efficiently.

[0244] For example, since a substrate formed of ceramic is hard, a scribe line cannot be properly formed using a low-load scribing load. In view of this, when the scribing head 10 is constructed in the above manner, since the cutter wheel 101 can apply a larger scribing load to the substrate F, a scribe line can be properly formed even on a hard substrate or a thick substrate.

[0245] In addition, when air pressure is supplied to the first space R1, a portion of the air supplied to the first space R1 passes through the gap between the first movable member 220 and the internal space 212 and is discharged from the opening 214 to the outside of the barrel 210. At this time, the first movable member 220 is subjected to pressure in the direction away from the inner side surface 212a of the barrel 210, and is centered to the position where the pressure is balanced. Therefore, the first movable member 220 is reliably supported at the centered position in a state away from the inner side surface 212a of the barrel 210.

[0246] In addition, for example, a thin substrate requires a lower scribing load. Therefore, when a low scribing load is desired to be applied to the substrate F, the pressure applying unit 500 may apply air pressure instead of the servo motor 610 .

[0247] In this case, as described above, the pipes not shown are connected as shown in the figure. Figure 2 , Figure 5 The pipe 501 and the pressure applying unit 500 shown in the figure supply air pressure from a compressed air source to the first space R1 and the second space R2, respectively. Thus, a scribing load can be obtained by the pressure difference between the first space R1 and the second space R2, and a slight scribing load can be applied to the substrate F.

[0248] In the above embodiment, the lead angle of the screw shaft 631 is designed to be 45°, but the screw shaft 631 may be designed so that the forward efficiency and the reverse efficiency are substantially equal. For example, the lead angle may be designed to be an angle within a range of several degrees from 45°.

[0249] In addition, in the above embodiment, the slide screw 630 is used as the feed screw, but as long as it is a feed screw including a screw shaft designed so that the forward efficiency and the reverse efficiency are substantially equal, it is not limited to the slide screw 630 of the above embodiment.

[0250] For example, a dedicated ball screw including a screw shaft designed with a lead angle of about 45° may be used.

[0251] In the above-mentioned embodiment, the substrate F can be rotated by rotating the mounting portion 6 to change the direction of the scribed line formation by 90°. However, as a modified example, the cutter wheel 101 itself can also be rotated by 90°. In this case, the substrate F can be rotated by rotating the mounting portion 6 to change the direction of the scribed line formation by 90°. Figure 3 The holder unit 110 of the cutter wheel 101 shown in (a) to (c) is configured to be rotatable.

[0252] Furthermore, the embodiments of the present invention can be variously modified as appropriate within the scope of the technical concept shown in the claims.

[0253] Description of Reference Numerals

[0254] 1: Scratching device

[0255] 6: Loading part

[0256] 11: Transportation Department

[0257] 10: Scratching head

[0258] 100: Cutting mechanism

[0259] 101: Knife wheel

[0260] 200: Mobile mechanism

[0261] 210: barrel

[0262] 212: Inner Space

[0263] 212a: Inner surface of the tube

[0264] 214: Opening

[0265] 220: First moving part

[0266] 221: Second moving part

[0267] 222: Supporting part

[0268] 223, 224: Magnet

[0269] 223a: Upper surface (contact surface)

[0270] 224a: Lower surface (contact surface)

[0271] 225: Hole

[0272] 230: Transmission Department

[0273] 232: Pin

[0274] 300: Measurement Department

[0275] 310: Load sensor

[0276] 320: Abutment member

[0277] 500: Pressure applying part

[0278] 600: Driving mechanism

[0279] 610: Servo motor

[0280] 630: Sliding screw

[0281] 631: Screw shaft

[0282] 632: Nut

[0283] F:Substrate

[0284] F1: Surface of substrate

[0285] R1: First Space

[0286] R2: Second Space

Claims

1. A scribing head, characterized in that: have: A cutter wheel for forming a scribe line on the surface of the substrate; A driving mechanism that causes the cutter wheel to abut against the surface of the substrate; as well as another driving mechanism, which causes the knife wheel to approach and leave the substrate, The driving mechanism comprises: Servo motor; a screw shaft that is rotated about an axis by the servomotor; and a nut, which is screwed with the screw shaft, and the cutter wheel is moved toward and away from the surface of the substrate by the rotation of the screw shaft, The positive efficiency and negative efficiency of the screw shaft and the nut are the same. The other driving mechanism comprises: Mobile mechanism; and a pressure applying unit that supplies air pressure to the moving mechanism, The moving mechanism comprises: a first moving member; a second moving member disposed at a position closer to the substrate than the first moving member; a support portion that supports the first movable member and the second movable member at a predetermined interval; a cylindrical portion that accommodates the first movable member, the second movable member, and the supporting portion, and has an opening that communicates with the outside at a position between the first movable member and the second movable member; and a transmission part, which is used to transmit the movement of the first moving member and the second moving member to the cutter wheel, A gap is provided between the first moving member, the second moving member and the inner side surface of the cylinder. The pressure applying part supplies air pressure to at least the second space of the first space and the second space, wherein the first space is a space on the opposite side of the support part relative to the first movable member; and the second space is a space on the opposite side of the support part relative to the second movable member.

2. The scoring head according to claim 1, characterized in that: The lead angle of the screw shaft is 45°.

3. The scoring head according to claim 1 or 2, characterized in that: The screw shaft and the nut constitute a sliding screw.

4. The scoring head according to claim 1, characterized in that: The first moving member and the second moving member are balls, The inner side surface of the cylinder is cylindrical.

5. The scoring head according to claim 1, characterized in that: The first moving member and the second moving member have the same diameter, The diameter of the inner side surface of the cylindrical portion is constant.

6. The scoring head according to claim 1, characterized in that: The first moving member and the second moving member are formed of magnetic material, The support portion has magnets at both ends in a direction in which the first movable member and the second movable member are separated from each other.

7. The scoring head according to claim 6, characterized in that: The contact surfaces of the magnet with the first moving member and the second moving member are respectively flat.

8. The scoring head according to claim 1, characterized in that: The transmission portion is connected to the support portion via the opening.

9. The scoring head according to claim 1 or 2, characterized in that: A measuring unit is further provided to measure the load of the cutter wheel on the substrate.

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