Transport device with actuator and separation layer

Abstract

A transport device (100) comprises a housing (110), an actuator (130) and a drive (150). The housing has a fluid inlet (111, 113) and a fluid outlet (113, 111). The actuator (130) comprises a magnetic shape memory alloy and is at least partially arranged in the housing (110). The actuator (130) can be deformed by the drive (150) so that at least one cavity (135, 135') for fluid that can be moved by the drive (150) is formed in the actuator (130) so as to transport the fluid in the cavity (135, 135') from the fluid inlet (111, 113) to the fluid outlet (113, 111). At least one section of the actuator (130) has a separation layer (1380), by which direct contact between the fluid and the actuator (130) is prevented in the section of the actuator (130).

Description

Technical Field

[0001] The invention relates to a transport device, wherein the sealing device comprises an actuator comprising a shape memory alloy, wherein the actuator has a separating layer. Background Art

[0002] Shape memory alloys can exist in different crystal structures, wherein the shape of the material is related to the crystal structure in which the alloy exists.

[0003] Special shape memory alloys are magnetic shape memory alloys (MSMA), whose shape can be changed by applying a magnetic field. In this case, the twin grain boundaries in the magnetic shape memory alloy can be moved by the magnetic field, whereby a magnetically induced reorientation of the material occurs. With a perpendicular magnetic field, the material can be stretched, and with a parallel magnetic field, the material can be contracted.

[0004] The basic principle of a magnetic field-induced shape change of an actuator made of a material having twin grain boundaries is disclosed in US Pat. No. 6,515,382 B1.

[0005] The use of magnetic shape memory alloys as actuators in pumps is known from US 2016 / 0211065 A1. An actuator made of MSMA is described therein, which is arranged in a housing having an inlet and an outlet. A plurality of coils are arranged below the actuator, by means of which a magnetic field can be generated. The shape of the MSMA can be changed by generating a magnetic field, so that a cavity is formed, which is connected to the inlet in a communicative manner. A fluid flows into the cavity, and due to the movement of the magnetic field, the cavity filled with the fluid moves. If the filled cavity is connected to the outlet in a communicative manner, the fluid in the cavity flows out of the outlet.

[0006] Known pumps with actuators comprising magnetic shape memory alloys are not suitable for all media to be transported. In particular, such known pumps lack biocompatibility. Summary of the invention

[0007] The object of the present invention is to provide a transport device by means of which a plurality of fluids, including also sensitive fluids, should be conveyed or transported. Increased fluid volume flows should also be conveyed or transported. Another object is to provide a transport device with a sealing structure, by means of which an improved pressure build-up can be achieved. Another object is to provide a transport device with a sealing structure, by means of which leakage during the transport of fluids is reduced. Yet another object is to provide a transport device that can be produced with greater process safety and at the same time at lower costs. The operation of the transport device should be able to be monitored in an improved manner or the operation should be able to be regulated in an improved manner.

[0008] This object is achieved by a transport device according to claim 1 or by a method according to claim 38 .

[0009] A transport device for transporting a fluid comprises a housing, an actuator and a drive. The housing comprises a fluid inlet and a fluid outlet. The actuator comprises a magnetic shape memory alloy (MSMA), which is at least partially arranged in the housing. The drive can deform the actuator so that a cavity for the fluid is formed in the actuator, and the cavity can be moved by the drive in order to transport the fluid in the cavity from the fluid inlet to the fluid outlet. At least one section of the actuator has a separation layer. By the separation layer, direct contact between the fluid and the actuator is prevented on the section of the actuator provided with the separation layer.

[0010] Direct contact refers to contact between actuator and fluid without a separating layer.

[0011] In particular, the transport device can be a fluid mechanical device. A fluid mechanical device can transport or convey incompressible and compressible media. An incompressible medium is understood to be a medium that is barely compressible or substantially incompressible. The compressibility of an incompressible medium is at least several times less than that of a gas.

[0012] The transport device can be a pump device for transporting liquids. In particular, the transport device is a micropump device. The micropump device can have a maximum delivery capacity of a maximum of 10 ml per minute, in particular a maximum of 1 ml per minute.

[0013] The magnetic shape memory alloy can be a nickel-manganese-gallium alloy.

[0014] The actuator (pump actuator) preferably consists of a magnetic shape memory alloy.

[0015] The actuator can be a pump actuator.

[0016] The actuator can be arranged completely in the housing, so that the actuator is completely surrounded by the housing, or, when one or more sides of the housing are open, the actuator can not protrude beyond the one or more sides of the housing.

[0017] The actuator can have two end faces, two side faces and two cavity faces. At least one cavity can be formed in each of the two cavity faces.

[0018] The cavity can be a (closed) hollow space or a recess (constriction or depression) which has one or more openings.

[0019] The actuator can be designed to be essentially cuboid.

[0020] The cavity surface has a significantly larger area than the side or end surface, preferably the area of ​​the cavity surface is several times larger than the area of ​​the side or end surface. By forming the cavity in the actuator, the expansion of the actuator occurs particularly in the direction of the end surface (volumetric stability).

[0021] A uniformly oriented magnetic traveling wave field can be generated by the drive. For this purpose, the drive particularly comprises an electromagnetic coil and / or a permanent magnet. In particular, multiple magnetic traveling wave fields can be generated and moved on the same cavity surface at the same time by the drive.

[0022] The separating layer can extend over the entire side of the actuator. In particular, the separating layer extends over the entire cavity surface of the actuator.

[0023] The actuator can have a total surface, and the separating layer can extend over at least 80% or 90% of the total surface of the actuator.

[0024] In particular, the separating layer extends over the entire surface of the actuator.

[0025] The thickness of the separation layer can be less than the maximum depth of the cavity. In particular, the thickness of the separation layer is the average value of the thickness of the separation layer. The maximum depth of the cavity is the maximum depth that the cavity can form in one of the cavity surfaces.

[0026] The separation layer can be a film. In particular, the separation layer is a plastic film, which comprises polyethylene or polypropylene, for example.

[0027] Between the membrane and the actuator there can be a negative pressure relative to the surroundings of the membrane, so that there is a tight connection between the membrane and the actuator that follows the shape changes of the actuator.

[0028] The membrane can include a valve. In particular, the pressure between the membrane and the actuator can be varied via the valve.

[0029] The film can have a weld. In order to apply the separating layer to the actuator, for example, two film elements can be laid around the actuator and the film elements can be welded to one another so that the film is laid in a gas-tight manner around the actuator.

[0030] A liquid can be present between the membrane and the actuator. In particular, silicone oil can be used as the liquid. The liquid can exert adhesive forces between the membrane and the actuator and reduce the friction that occurs between the membrane and the actuator (when the actuator is deformed).

[0031] The separating layer can be a coating. In particular, the coating is firmly bonded to the actuator.

[0032] The coating can include Parylene.

[0033] Parylene can be a parylene completely substituted by hydrogen (parylene N). Parylene can also be a parylene substituted by halogen. In particular, parylene is a parylene partially substituted by chlorine (parylene C or parylene D). Likewise, parylene can be a parylene partially substituted by fluorine (parylene HT).

[0034] The coating can be applied to the actuator by chemical vapor deposition (CVD), physical vapor deposition (PVD), by sputtering or by resublimation. In particular, the coating is applied to the actuator by resublimation.

[0035] An adhesion promoter can be provided between the actuator and the separating layer. The adhesion promoter can act between the physical and / or chemical properties of the actuator surface and the separating layer.

[0036] The device (transport device) can include a sealing element. The sealing element is designed and arranged between the actuator and the housing in such a way that the chamber is sealed at the edge or at the end during the transport of the fluid from the fluid inlet to the fluid outlet.

[0037] At least one section of the sealing element can have elastic properties. When a cavity is formed in the actuator, the section of the sealing element can bear sealingly against an edge-side or end-side section of the cavity of the actuator.

[0038] Thus, when no cavity is formed, a section of the sealing element can bear against the actuator, and when such a cavity is formed in the actuator, the sealing element can bear against the cavity of the actuator due to the elastic properties of the section of the sealing element.

[0039] The elastic property can be a linear elastic property or a nonlinear elastic property.

[0040] Under the action of a force, the sealing element should be compressible and after the force is removed the sealing element should again at least partially have its original shape. In particular, when compressed by a force, the sealing element should exert a force that opposes the compression. This improves the sealing effect.

[0041] The housing can have a groove, wherein at least a section of the sealing element can be arranged in the groove.

[0042] The opening of the slot can point in the direction of the actuator.

[0043] The groove of the housing can be configured so that the groove surrounds or encloses the face section of the housing. In particular, the groove is continuous and completely surrounds the face section of the housing or completely encloses the face section of the housing.

[0044] The sealing element in the groove can likewise surround or enclose the surface section of the housing, in particular the sealing element can continuously (completely) surround or enclose the surface section of the housing.

[0045] The surface section of the housing which is surrounded or enclosed by the groove or the sealing element can include a fluid inlet and / or a fluid outlet.

[0046] In combination with the sealing element in the groove, an area is obtained on the actuator which (essentially) corresponds to the face section of the housing surrounded by the groove, in which the fluid can be transported from the fluid inlet to the fluid outlet (in the cavity), wherein the area is sealed to the outside even when a cavity is present.

[0047] The actuator can be deformed by the drive so that two chambers for the fluid, which can be moved by the drive, are formed in the actuator. In the chambers, the fluid can be transported from the fluid inlet to the fluid outlet.

[0048] The device can include a sealing element having at least one recess. The sealing element can be arranged in the housing such that during transport of the fluid from the fluid inlet to the fluid outlet, the chamber is at least temporarily (for a limited period of time) connected in fluid communication via the recess.

[0049] By using two chambers in the actuator for transporting the fluid, the volume flow transported by the transport device can be increased.

[0050] Typically, two chambers are formed in the actuator on opposite sides of the actuator. In the region of the recess in the sealing element, the formed chambers are fluidically connected. If the chambers connected in fluid communication with each other are also connected in fluid communication with the fluid inlet, the fluid can flow into both chambers through the fluid inlet. By moving the magnetic field of the drive, the chamber can be moved in the direction of the fluid outlet. If the chamber reaches the fluid outlet, so that one of the chambers is connected in fluid communication with the fluid outlet and the chambers are connected in fluid communication with each other, the transported fluid can flow out of the transport device from both chambers via the fluid outlet.

[0051] The actuator can be deformed in such a way that the cavities are formed on opposite sides of the actuator.

[0052] The sealing element can comprise at least two recesses. In particular, the two recesses can be formed in the sealing element in such a way that a fluid connection between the recesses is not possible when the fluid is transported from the fluid inlet to the fluid outlet.

[0053] In particular, one of the two recesses can be formed in the region of the fluid inlet and the other of the two recesses can be formed in the region of the fluid outlet.

[0054] In particular, the distance between the fluid inlet or diffuser and one of the recesses can be less than 100 mm, in particular less than 50 mm, in particular less than 20 mm, and / or the distance between the fluid outlet or diffuser and one of the recesses can be less than 100 mm, in particular less than 50 mm, in particular less than 20 mm.

[0055] The sealing element can comprise four recesses, in particular two of the recesses can be designed such that during transport of the fluid from the fluid inlet to the fluid outlet the two recesses are at least temporarily connected in a fluid-communicating manner (one chamber or two chambers).

[0056] The other two recesses of the recesses can also be designed to be at least temporarily connected in a fluid-connected manner during the transport of the fluid from the fluid inlet to the fluid outlet. This is also one chamber or two chambers.

[0057] The sealing element can at least partially contact at least two surfaces on different sides of the actuator. In particular, the sealing element can at least partially contact the side surface of the actuator.

[0058] The housing can have an upper side, wherein the upper side is substantially parallel to the side of the actuator in which a majority (at least 50%) of one of the cavities is to be formed. The fluid inlet and / or the fluid outlet can extend from the upper side of the housing. The fluid inlet and / or the fluid outlet can also extend from a side of the housing opposite to the upper side of the housing.

[0059] The transport device can include a first sealing rail and a second sealing rail. The first sealing rail can contact one side of the actuator, and the second sealing rail can contact the other side of the actuator.

[0060] Preferably, the first sealing rail and the second sealing rail contact opposite sides of the actuator.

[0061] The transport device can include a clamping element which has a trapezoidal basic shape and bears against one side of the actuator. The clamping element can be substantially incompressible.

[0062] The clamping element can contact the housing and / or the sealing element.

[0063] A matching structure can be provided in the housing, which is designed to accommodate a trapezoidal clamping element at least in sections. The transport device can also include two clamping elements, each having a trapezoidal basic shape. One of the clamping elements can be in contact with one side of the actuator and the other clamping element can be in contact with the other side of the actuator.

[0064] In particular, one of the clamping elements can bear against one side of the actuator and the other of the clamping elements can bear against the opposite side of the actuator.

[0065] One or more clamping elements can extend over the entire length of the respectively contacted side of the actuator.

[0066] The transport device can include at least one clamping element, which contacts a side surface, in particular an end surface, of the actuator and by which the mechanical resetting of the actuator is ensured. Preferably, the transport device includes two clamping elements, which contact opposite side surfaces, in particular an end surface, of the actuator and enable the mechanical resetting of the actuator.

[0067] If a cavity is formed in the actuator (by the drive), the actuator expands in one or more directions, which typically occurs in the direction of the end face of the actuator. If, for example, the magnetic field of the drive is terminated, the cavity is not reset without cause, but can be reset by the mechanical force action of the clamping element.

[0068] At least one clamping element, preferably both clamping elements, can have a trapezoidal basic shape.

[0069] The device, in particular the housing or the sealing element or the clamping element / elements, can also comprise at least one, preferably at least two magnets, by which magnetic resetting of the magnet actuator is possible. In particular, the magnet(s) can be one or more permanent magnets or electromagnets.

[0070] The magnetic reset of the actuator functions similarly to the mechanical reset of the actuator as described above.

[0071] The device, in particular the housing or the sealing element or the clamping element / elements, can also comprise a magnetomechanical elastomer.

[0072] The housing can comprise at least one diffuser. In particular, the housing comprises two diffusers.

[0073] Since the cavity is usually produced over the entire width of the actuator, a diffuser at the fluid inlet and / or a diffuser at the fluid outlet allows an improved conduction of the fluid from the fluid inlet into the cavity and / or from the cavity to the fluid outlet.

[0074] One diffuser can be connected to the fluid inlet and the other diffuser can be connected to the fluid outlet. In this case, the diffuser cross section at the end of the diffuser closer to the actuator can be larger than the cross section at the end of the diffuser further away from the actuator. This can apply to all diffusers.

[0075] The sealing element can include an elastomer. In particular, the elastomer can be a thermoplastic elastomer. The sealing element can also alternatively or additionally include a foam material. The foam material is in particular a closed-cell foam material.

[0076] The housing can include metal or plastic, preferably the housing consists of metal or of plastic. Preferably, the housing is made of an elastomer (thermoplastic elastomer) or includes an elastomer (thermoplastic elastomer). Alternatively or additionally, the housing can include a gradient material or consist of a gradient material.

[0077] The housing of the transport device can have a PTFE coating (polytetrafluoroethylene coating) at least in sections. Preferably, at least the surface of the housing which is the boundary surface of the cavity is coated with PTFE.

[0078] In the actuator of the transport device, at least two, in particular multiple, cavities can be formed in the actuator at the same time. This is achieved, for example, by a matching design of the drive. At least two cavities can be formed and moved on the same side of the actuator.

[0079] The transport device can include at least one sensor. Preferably, the sensor is fixed on the housing.

[0080] The transport device can include a temperature sensor, which measures the temperature of the actuator. The control unit can change the operation of the transport device, more precisely based on the value detected by the temperature sensor. In particular, the control unit can change the operation of the transport device if the temperature value of the actuator detected by the temperature sensor exceeds and / or falls below a predetermined temperature threshold value.

[0081] The transport device can include an optical sensor, by means of which it is possible to detect whether a cavity is present in the actuator. The optical sensor can be designed in such a way that the frequency of the cavity in the actuator is detected in the region of the actuator. Based on the value detected by the optical sensor, a control unit of the device can change the operation of the transport device. In particular, the volume flow through the transport device of the fluid can be detected by means of the optical sensor and the transport device can be regulated based on the detected value.

[0082] The transport device can include a pressure sensor, which detects the pressure at the fluid inlet or at the fluid outlet. The transport device can also include two pressure sensors, one of which detects the pressure at the fluid inlet and one at the fluid outlet. Based on the value detected by at least one pressure sensor, the operation of the transport device can be changed (for example by a control unit).

[0083] The transport device can also include a differential pressure sensor, which detects or measures the pressure difference between the fluid inlet and the fluid outlet. Here, the differential pressure sensor can include two pressure sensors upstream of the fluid input or two pressure sensors downstream of the fluid output.

[0084] For example, the operation of the transport installation can be changed by the control unit based on the value detected by the pressure difference sensor.

[0085] The device can include at least one piezoelectric sensor, wherein the actuation of the actuator can be detected or measured by the at least one piezoelectric sensor. Based on the value detected or measured by the at least one piezoelectric sensor, the operation of the transport device can be changed, for example by a control unit. The transport device can also include two piezoelectric sensors, which are preferably arranged on opposite sides of the actuator.

[0086] The transport device can include one, preferably two strain gauges. The actuation of the actuator can be detected or measured by at least one strain gauge. In particular, the values ​​detected or measured by one or more strain gauges can be used to change the operation of the transport device.

[0087] An actuator comprising a separating layer can be produced by a method. The actuator comprises a magnetic shape memory alloy. Within the method, an actuator is provided and a separating layer is applied to at least one side of the actuator.

[0088] The separating layer can be applied to at least 80% of the total surface of the actuator. In particular, the separating layer is applied to at least 90% of the total surface of the actuator. Particularly preferably, the separating layer is applied to the entire surface of the actuator.

[0089] The separating layer can be a film, in particular a plastic film. The film can include the valve.

[0090] The film can be arranged or laid around the actuator and a vacuum can be generated between the film and the actuator. Thus, the film is closely attached to the actuator.

[0091] The film can be welded at at least one point.

[0092] A liquid can be introduced between the separating layer and the actuator. In particular, the liquid can be a silicone oil (diorganopolysiloxane).

[0093] The separating layer can be applied to the actuator by a phase change.

[0094] In particular, a phase transition is a change from a gas phase to a solid phase.

[0095] The phase change may in particular be resublimation.

[0096] In particular, Parylene is applied to the actuator in order to form a coating on the actuator. BRIEF DESCRIPTION OF THE DRAWINGS

[0097] Embodiments of the invention are shown by way of example and are not to be attributed to or attributed to the claims in any way limited by the drawings. Identical reference numerals in the drawings denote identical elements.

[0098] Figure 1aA schematic partial cross-sectional view of a transport device 100 is shown;

[0099] Figure 1b shows a schematic front view of a transport device 100;

[0100] Figure 1c shows a schematic side view of a transport device 100;

[0101] Figure 1d A schematic top view of a transport device 100 is shown;

[0102] Figure 2a A schematic partial cross-sectional view of a transport device 200 is shown;

[0103] Figure 2b A schematic front view of a transport device 200 is shown;

[0104] Figure 2c shows a schematic side view of a transport device 200;

[0105] Figure 2d A schematic top view of a transport device 200 is shown;

[0106] Figure 3a A schematic partial cross-sectional view of a transport device 300 is shown;

[0107] Figure 3b A schematic front view of a transport device 300 is shown;

[0108] Figure 3c shows a schematic side view of a transport device 300;

[0109] Figure 3d A schematic top view of a transport device 300 is shown;

[0110] Figure 4 An exploded view of a transport device 400 is shown;

[0111] Figure 5 An exploded view of a transport device 500 is shown;

[0112] Figure 6a A schematic partial cross-sectional view of a transport device 600 is shown;

[0113] Figure 6b shows a schematic front view of a transport device 600;

[0114] Figure 6c shows a schematic side view of a transport device 600;

[0115] Figure 6d A schematic top view of a transport device 600 is shown;

[0116] Figure 7A schematic top view of a transport device 700 with a resetting element 785 is shown;

[0117] Figure 8 shows a schematic top view of a transport device 800 with resetting elements 886, 886';

[0118] Fig. 9 A schematic top view of a transport device 900 with resetting elements 987, 987' is shown;

[0119] Fig.10a A schematic partial cross-sectional view of a transport device 1000 is shown;

[0120] Fig.10b A schematic front view of a transport device 1000 is shown;

[0121] Fig.10c shows a schematic side view of a transport device 1000;

[0122] Fig.10d A schematic top view of a transport device 1000 is shown;

[0123] Fig.11a A schematic partial cross-sectional view of a transport device 1100 is shown;

[0124] Fig.11b A schematic front view of a transport device 1100 is shown;

[0125] Fig.11c A schematic side view of a transport device 1100 is shown;

[0126] Fig.11d A schematic top view of a transport device 1100 is shown;

[0127] Fig.12a A schematic front view of a transport device 1200 having sensors 1290 , 1291 , 1292 , 1293 , 1294 , 1295 is shown;

[0128] Figure 12b A schematic side view of a transport device 1200 having sensors 1290 , 1292 , 1295 is shown;

[0129] Fig.13a An actuator 13330 having a separation layer 1380 is shown;

[0130] Fig.13b An actuator 13330 is shown having a separation layer 1380 and two chambers 1335a, 1335b. DETAILED DESCRIPTION

[0131] exist Figures 1a to 1d One embodiment of a transport device 100 is shown in FIG.

[0132] In particular, the transport device 100 is a pump, more particularly a micro pump. Figure 1a 2 shows a schematic perspective view with several sections of a transport device 100 . The transport device 100 comprises a housing 110 , an actuator 130 , a drive 150 and a sealing element 170 .

[0133] The actuator 130 includes a magnetic shape memory alloy, so that a shape change of the actuator 130 can be induced by an appropriate magnetic field. The actuator 130 can be composed of a magnetic shape memory alloy.

[0134] Typically, the basic shape of the actuator 130 is substantially square, with two side faces, two end faces and two surfaces such as the bottom face, in which a constriction or depression is to be formed as a cavity. The surface in which the cavity is to be formed is also referred to as a cavity surface. The area of ​​the cavity surface is larger than the area of ​​the end faces and the side faces, and preferably, the area of ​​the cavity surface is at least three times larger than the area of ​​the end faces and the side faces.

[0135] Looking at one of the cavity surfaces, a cavity 135 is formed in the actuator 130. The cavity 135 typically extends (in particular completely) between the side surfaces of the actuator 130. Between the end surfaces, the cavity 135 is formed only partially in the cavity surface of the actuator 130. A cavity can also be formed on the cavity surface opposite to the cavity surface being looked at (facing the drive 150).

[0136] The actuator 130 is disposed in the housing 110 . Specifically, the actuator 130 is disposed in the housing 110 such that all surfaces (cavity surface 131 , end surface 132 , side surface 133 ) of the actuator 130 are surrounded by the housing 110 .

[0137] The housing 110 comprises a first housing section 120 and a second housing section 125. The first and second housing sections 120, 125 are connected to the housing 110, for example by screwing. The housing 110 with the first housing section 120 and the second housing section 125 can also be formed in one piece.

[0138] The housing 110 , in particular the second housing portion 125 , has a depression 115 , into which the actuator 130 can be introduced in a matching manner.

[0139] In the housing 110, in particular in the first housing section 120, a groove 117 is provided, into which the sealing element 170 is introduced. The course of the groove 117 is shown in FIG. Figures 1b to 1d Describe in more detail.

[0140] The sealing element 170 has elastic properties. In the region of the cavity surface 131 where no cavity is formed, the sealing element 170 abuts against the cavity surface 131 of the actuator 130, wherein the sealing element 170 is flush with the bottom surface of the first housing section 120, and the sealing element 170 is therefore completely located in the groove 117 and does not protrude from the groove 117. In the region of the cavity surface 131 of the actuator 130 where the cavity 135 is formed, the sealing element 170 also abuts against the cavity surface 131 of the actuator 130, wherein in this region, the sealing element 170 is not flush with the first housing section 120 of the housing 110, and the sealing element 170 is therefore not completely arranged in the groove 117, but partially protrudes from the groove 117.

[0141] If the cavity 135 is displaced from one end face to the other end face, the position of the section of the sealing element 170 that protrudes from the groove 117 and rests against the cavity surface 131 of the actuator 130 in the region of the cavity 135 changes.

[0142] Due to the arrangement and design of the sealing element 170 within the transport device 100, the chamber 135 is always sealed at the edge (toward the side) regardless of its position (within the region). The chamber 135 is bounded during transport by the actuator 130, the sealing element 170 and the housing 110 (specifically by the first housing section 120). If the chamber 135 is formed in a region of the actuator 130 that allows fluid communication with the fluid inlet 111 provided in the housing 110, the fluid can flow into the chamber 135 via the fluid inlet 111 and can be transported to another location.

[0143] Figure 1b The transport device 100 is shown in a schematic front view. The transport device 100 comprises a housing 110, which comprises a first housing section 120 and a second housing section 125, an actuator 130, a drive 150, and a sealing element 170. A fluid inlet 111 and a fluid outlet 113 are arranged in the housing.

[0144] The fluid inlet 111 is connected to the first diffuser 112 and the fluid outlet 113 is connected to the second diffuser 114. The housing 110, in particular the first housing section 120, comprises a groove 117 in which a sealing element is arranged. A cavity 135 is formed in the actuator 130. The drive 150 comprises a plurality of magnets 151, which are arranged along the longitudinal extension of the actuator. The magnets 151 can be electromagnets and / or permanent magnets. The magnets 151 are preferably arranged along the entire length of the actuator 130.

[0145] The movement of the cavity 135 in the actuator 130 is possible by the magnetic field generated by the magnet 151 changing along the actuator 130. In particular, the cavity 135 can move between the fluid inlet 111 and the fluid outlet 113, so that when the cavity 135 is connected to the fluid inlet 111 in fluid communication, the fluid can flow into the cavity 135 via the fluid inlet 111, the cavity 135 filled with the fluid moves in the direction of the fluid outlet 113, and when the cavity 135 is connected to the fluid outlet 113 in fluid communication, the fluid in the cavity 135 can flow out from the fluid outlet 113.

[0146] During the movement of the chamber 135 from the fluid inlet 111 toward the fluid outlet 113 , it is delimited by the actuator 130 , in particular the chamber surface 131 , the housing 110 , in particular the first housing section 120 , and at the edges and / or at the end by the sealing element 170 .

[0147] Two clamping elements 126, 127 are arranged in the housing 110, in particular in the second housing section 125. The first clamping element 126 is arranged in the housing 110 so that it at least partially contacts the end face 132' of the actuator 130, and the second clamping element 127 is arranged in the housing 110 so that it at least partially contacts the other end face 132 of the actuator 130.

[0148] If a cavity is formed in the actuator as a constriction or depression by the driver 150, the actuator 130 expands at other locations, since the constriction or cavity formation takes place in a volume-stable manner. The resetting of the cavity does not take place without cause, but can take place mechanically or magnetically. The clamping elements 126, 127 can have elastic properties, so that when the cavity 135 is formed in the actuator 130 and the actuator 130 has expanded in the direction of the end faces 132, 132', an increasing force is exerted on the actuator 130 at the end sides 132, 132'. By switching off the magnetic field, a force is exerted on the actuator 130 by the clamping elements 126, 127 at the end sides 132, 132', so that the cavity 135 is reset. The resetting can also take place by a magnetic field with a different orientation, for example by magnets in the clamping elements 126, 127, wherein the different orientation relates to the orientation of the magnetic field of the driver 150 that has been generated to form the cavity 125.

[0149] Figure 1c A side view of the transport device 100 is shown schematically and in section.

[0150] The fluid outlet 113 is fluidically connected to the second diffuser 114. The cavity 135 in the actuator 130 is fluidically connected to the diffuser 114 and thus also fluidically connected to the fluid outlet 113. The fluid in the cavity 135 can flow out of the transport device 100 via the diffuser 114 and the fluid outlet 113.

[0151] The cross section of the diffuser is larger at the end of the diffuser facing the actuator 130 than at the end of the diffuser 114 facing away from the actuator 130 .

[0152] The first diffuser 112 of the fluid inlet 111 can be designed identically to the second diffuser 114 of the fluid outlet 113 .

[0153] The sealing element 170 in the groove 117 extends out from the groove 117 so as to contact the actuator 130, in particular the cavity surface 131, because Figure 1c A cavity 135 is present in the actuator 130. The cavity 135 is sealed at the edge by a sealing element 170.

[0154] exist Figure 1d 1 shows a schematic top view of the transport device 100, in which the groove 117 in the housing 110 is indicated. A sealing element 170 is arranged in the groove 117.

[0155] The groove 117 with the sealing element 170 surrounds a surface section or region of the housing 110, in particular the first housing section 120, in which the fluid can be transported from the fluid inlet 111 via the indicated diffuser 112 to the fluid outlet 113 via the indicated diffuser 114. In the direction of the axis between the fluid inlet 111 and the fluid outlet 113, the chamber 135 is sealed at the end side by the sealing element 170, and in the direction of another axis perpendicular to the first axis, the chamber 135 is sealed at the edge side by the sealing element 170. By means of the sealing, leakage of the fluid in the chamber 135 is reduced or even avoided and the hydraulic power of the transport device (pump) is improved.

[0156] The basic shape of the groove 117 and of the sealing element 170 corresponds essentially to the basic shape of the actuator 130 .

[0157] The sealing element 170 can have a rectangular ring-like shape, in particular with rounded corners.

[0158] In particular, one or more surfaces of the housing 100 that can come into contact with, for example, a fluid in a cavity can be coated with PTFE.

[0159] Figures 2a to 2d One embodiment of a transport device 200 is shown.

[0160] The transport device 200 can be a pump, more particularly a micro pump. Figure 2a 2 shows a schematic perspective view of a transport device 200 with a section. The transport device 200 comprises a housing 210 , an actuator 230 , a drive 250 , a first sealing element 270 and a second sealing element 275 .

[0161] The actuator 230 includes a magnetic shape memory alloy, so that a shape change of the actuator 230 can be induced by an appropriate magnetic field. The actuator 230 can be composed of a magnetic shape memory alloy.

[0162] The basic shape of the actuator 230 is substantially square, with two side faces, two end faces and two cavity faces, in which a constriction or depression is to be formed as a cavity. The area of ​​the cavity face is larger than the area of ​​the end faces and the side faces, and preferably, the area of ​​the cavity face is at least three times larger than the area of ​​the end faces and the side faces.

[0163] In one of the cavity surfaces, a cavity 235 is formed in the actuator 230. The cavity 235 typically extends (in particular completely) between the side faces of the actuator 230. Between the end faces, the cavity 235 is formed only partially in the cavity surface of the actuator 230. A cavity can also be formed on the cavity surface opposite to the cavity surface being viewed (facing the drive 250).

[0164] The actuator 230 is disposed in the housing 210 . Specifically, the actuator 230 is disposed in the housing 210 such that all surfaces (cavity surface 231 , end surface 232 , side surface 233 ) of the actuator 230 are surrounded by the housing 210 .

[0165] The housing 210 comprises a first housing section 220 and a second housing section 225. The first and second housing sections 220, 225 are connected to the housing 210, for example by screwing. The housing 210 with the first housing section 220 and the second housing section 225 can also be formed in one piece.

[0166] The housing 210 , in particular the second housing portion 225 , has a depression 215 , into which the actuator 230 can be introduced in a matching manner.

[0167] The housing 210, in particular the first housing section 220, comprises a groove 217. A first sealing element 270 is introduced into the groove.

[0168] The sealing element 270 has elastic properties. In the region of the cavity surface 231 where no cavity is formed, the first sealing element 270 abuts against the cavity surface 231 of the actuator 230, wherein the sealing element 270 is flush with the second sealing element 275 and with a section of the bottom surface of the first housing section 220. Therefore, the first sealing element 270 does not protrude in the direction of the actuator 230 beyond the extension of the second sealing element 275. In the region of the cavity surface 231 of the actuator 230 where the cavity 235 is formed, the first sealing element 270 also abuts against the cavity surface 231 of the actuator 230, wherein in this region, the first sealing element 270 is not flush with the second sealing element 275 and the first housing section 220 of the housing 210. The first sealing element 270 therefore protrudes in the direction of the actuator 230 beyond the extension of the second sealing element 275 (in the same direction).

[0169] When cavity 235 is moved by drive 250 from one end face 232 toward the other end face 232 ′, the position of the section of first sealing element 270 that projects beyond the extension of second sealing element 275 in the direction of actuator 230 and abuts against cavity surface 231 of actuator 230 in the region of cavity 235 changes.

[0170] Due to the arrangement and design of the first sealing element 270 within the transport device 200 , the chamber 235 is always sealed on the edge (in the direction of the side) regardless of its position (within the region).

[0171] The second sealing element 275 also abuts against the region of the actuator 230 in which the chamber 235 is not formed (in addition to the first sealing element 270 ).

[0172] The cavity 235 is bounded during transport by the actuator 230 (cavity surface 231 of the actuator), the first sealing element 270, and the second sealing element 275. If the cavity 235 is formed in a region of the actuator 230 that allows fluid communication with the fluid inlet 211 provided in the housing 210, the fluid can flow into the cavity 235 via the fluid inlet 211 and can be transported to another location.

[0173] The elastic return of the first sealing element 270 can be greater than the elastic return of the second sealing element 275 , so that the cavity 235 is substantially contacted only by the first sealing element 230 .

[0174] The second sealing element 275 can be designed to be flat and can be completely surrounded by the first sealing element 270 .

[0175] The second sealing element 275 can be designed to be thinner than the first sealing element 230 .

[0176] The second sealing element 275 can have a recess which corresponds to the configuration of the fluid inlet 211 and the fluid outlet 213 of the diffuser 212 , 214 , if applicable, connected thereto.

[0177] exist Figure 2b 2 shows a schematic front view of the transport device 200. The transport device 200 comprises a housing 210, which comprises a first housing section 220 and a second housing section 225; an actuator 230; a driver 250; and a sealing element 270. The housing 210 comprises a fluid inlet 211 and a fluid outlet 213.

[0178] The fluid inlet 211 is connected to the first diffuser 212 and the fluid outlet 213 is connected to the second diffuser 214. The housing 210, in particular the first housing section 220, comprises a groove 217 in which a first sealing element 270 is arranged. The second sealing element 275 is arranged on the surface of the housing 210 facing the actuator 230, in particular on the first housing section 220. A cavity 235 is formed in the actuator 230. The drive 250 comprises a plurality of magnets 251, which are arranged along the longitudinal extension of the actuator 230. The magnets 251 can be electromagnets and / or permanent magnets. The magnets 251 are preferably arranged along the entire length of the actuator 230.

[0179] The cavity 235 can be moved along the actuator 230 by the magnetic field generated by the magnet 251. In particular, the cavity 235 can be moved between the fluid inlet 211 and the fluid outlet 213, so that when the cavity 235 is connected in fluid communication with the fluid inlet 211, the fluid can flow into the cavity 235 via the fluid inlet 211, the cavity 235 filled with the fluid moves toward the direction of the fluid outlet 213, and when the cavity 235 is connected in fluid communication with the fluid outlet 213, the fluid in the cavity 235 can flow out from the fluid outlet 213.

[0180] During the movement of the chamber 235 from the fluid inlet 211 toward the fluid outlet 213 , the chamber is bounded by the actuator 230 , in particular by the chamber surface 231 , the second sealing element 275 and at the edge and / or at the end by the first sealing element 270 .

[0181] Two clamping elements 226, 227 are arranged in the housing 210, in particular in the second housing section 225. The first clamping element 226 is arranged in the housing 210 so that it at least partially contacts the end face 232' of the actuator 230, and the second clamping element 227 is arranged in the housing 210 so that it at least partially contacts the other end face 232 of the actuator 230.

[0182] The clamping elements 226, 227 can have elastic properties, so that when the cavity 235 is formed in the actuator 230 and the actuator 230 has expanded in the direction of the end faces 232, 232', an increasing force is exerted on the actuator 230 at the end sides 232, 232'. By switching off the magnetic field, a force is exerted on the actuator 230 at the end sides 232, 232' by the clamping elements 226, 227, so that the cavity 235 is reset. Resetting can also be carried out by a magnetic field oriented in another way, for example by magnets in the clamping elements 226, 227.

[0183] Figure 2c A side view of a transport device 200 is shown schematically and in section.

[0184] The fluid outlet 223 is fluidically connected to the second diffuser 224. The cavity 235 in the actuator 230 is fluidically connected to the diffuser 214 and thus also fluidically connected to the fluid outlet 213. The fluid in the cavity 235 can flow out of the transport device 200 via the diffuser 214 and the fluid outlet 213.

[0185] The cross section of the diffuser is larger at the end of the diffuser facing the actuator 230 than at the end of the diffuser 214 facing away from the actuator 230 .

[0186] The first diffuser of the fluid inlet 210 can be designed identically to the second diffuser 214 of the fluid outlet.

[0187] The second sealing element 275 has a recess which corresponds substantially to the shape of the end of the diffuser 212 , 214 facing the actuator 230 .

[0188] The first sealing element 270 in the groove 217 extends beyond the second sealing element 275 in the direction of the actuator 230 and extends out of the groove 217 to contact the actuator 230, in particular the cavity surface 231, because Figure 2c A cavity 235 is present in the actuator 230. The cavity 235 is sealed at the edge by the first sealing element 270.

[0189] Figure 2d A schematic top view of a transport device 200 is shown. A groove 217 is shown in the housing 210. A first sealing element 270 is arranged in the groove 217, and a second sealing element 275 rests flatly (for a recess for the diffuser) on the housing 210, wherein the first sealing element 270 in particular completely surrounds the second sealing element 275 or surrounds it.

[0190] The groove 217 with the first sealing element 270 surrounds a face section or region of the housing 210, in particular the first housing section 220, in which the fluid can be transported from the fluid inlet 211 via the diffuser 212 indicated toward the fluid outlet 213 via the diffuser 214 indicated. In the direction of the axis between the fluid inlet 211 and the fluid outlet 213, the chamber 235 is sealed at the end side by the first sealing element 270. In the direction of another axis perpendicular to the first axis, the chamber 235 is sealed at the edge side by the first sealing element 270. By means of the sealing, leakage of the fluid in the chamber 235 is reduced or even avoided and the hydraulic power of the fluid device (pump) is improved.

[0191] The basic shape of the groove 217 and of the first sealing element 270 corresponds essentially to the basic shape of the actuator 230 .

[0192] The first sealing element 270 can have a rectangular annular shape, in particular with rounded corners. The second sealing element 270 is preferably planar and has a rectangular basic shape, with rounded corners.

[0193] exist Figures 3a to 3d One embodiment of a transport device 300 is shown in . The transport device 300 can be a pump, more particularly a micropump.

[0194] exist Figure 3a 3 shows a schematic perspective view of a transport device 300 with a section. The transport device 300 comprises a housing 310, an actuator 330, a drive 350 and a sealing element 370. The sealing element 370 comprises a sealing rail 377 and a spring element 376.

[0195] The actuator 330 includes a magnetic shape memory alloy, so that a shape change of the actuator 330 can be induced by an appropriate magnetic field. The actuator 330 can be composed of a magnetic shape memory alloy.

[0196] Typically, the basic shape of the actuator 330 is substantially square, with two side faces, two end faces and two cavity faces, in which a constriction or depression should be formed as a cavity. The area of ​​the cavity face is larger than the area of ​​the end faces and the side faces, and preferably, the area of ​​the cavity face is at least three times larger than the area of ​​the end faces and the side faces.

[0197] Looking at one of the cavity surfaces, a cavity 335 is formed in the actuator 330. The cavity surface opposite the cavity surface under consideration can also have a cavity. The cavity 135 typically extends (especially completely) between the side surfaces of the actuator 330. Between the end surfaces, the cavity 335 is formed only in sections in the cavity surface of the actuator 130.

[0198] The actuator 330 is disposed in the housing 310 . In particular, the actuator 330 is disposed in the housing 310 such that all surfaces (cavity surface 331 , end surface 332 , side surface 333 ) of the actuator 330 are surrounded by the housing 310 , optionally in combination with a sealing element 370 .

[0199] The housing 110 comprises a first housing section 320 and a second housing section 325. The first and second housing sections 320, 325 are connected to the housing 310, for example, by screwing. The housing 310 with the first housing section 320 and the second housing section 325 can also be formed in one piece. A sealing rail 377 of the sealing element 310 is arranged between the first housing section 320 and the second housing section 325.

[0200] The housing 310 , in particular the second housing portion 325 , has a depression 315 , into which the actuator 330 can be introduced in a matching manner.

[0201] In the housing 310, in particular in the first housing section 320, a groove 317 is provided, into which the spring element 376 of the sealing element 370 is introduced. The course of the groove 317 is shown in FIG. Figures 3b to 3d Describe in more detail.

[0202] The sealing rail 377 can have elastic properties. The spring element 376 has elastic (spring) properties, so that the sealing element 370 has elastic properties. The sealing element 370, in particular the sealing rail 377, rests on the cavity surface 331 of the actuator 330 in the region of the cavity surface 331 that does not form a cavity, wherein the sealing rail 377 of the sealing element 370 is flat (without any curvature in the surface) and the spring element 376 is in particular completely located in the groove 317 and does not protrude from the groove 317. In the area of ​​the cavity surface 331 of the actuator 330 where the cavity 335 is formed, the sealing element 370, in particular the sealing rail 377, also rests on the cavity surface 331 of the actuator 330, wherein in said area, the sealing rail 377 is locally arched (non-flat surface) by the spring element 376, and the spring element 376 of the sealing element 370 is not completely arranged in the groove 317, but partially extends out of the groove 317 in the direction of the actuator 330 so as to press the sealing rail 377 into the cavity 335 in sections.

[0203] If cavity 335 is moved from one end face 332 to the other end face 332 , the position of the section of sealing rail 377 which is pressed by spring element 376 in the direction of cavity 335 and which bears against cavity surface 331 of actuator 330 in the region of cavity 335 changes.

[0204] Due to the arrangement and design of the sealing element 370 within the transport device 300 , the chamber 335 is always sealed at the edge (in the direction of the side) regardless of its position (within the region).

[0205] The cavity 335 is bounded during transport by the actuator 330 and the sealing element 370 (sealing rail 377 of the sealing element 370). If the cavity 335 is formed in a region of the actuator 330 that allows fluid communication with the fluid inlet 311 provided in the housing 330, the fluid can flow into the cavity 335 via the fluid inlet 311 and can be transported to another location.

[0206] Figure 3b A schematic front view of a transport device 300 is shown. The transport device 300 comprises a housing 310, which comprises a first housing section 320 and a second housing section 325, an actuator 330, a drive 350, and a sealing element 370, which has a sealing rail 377 and a spring element 376. A fluid inlet 311 and a fluid outlet 313 are provided in the housing 310.

[0207] The fluid inlet 311 is connected to the first diffuser 312 and the fluid outlet 313 is connected to the second diffuser 314. The housing 310, in particular the first housing section 320, comprises a groove 317 in which a sealing element 370, in particular a spring element 376 of the sealing element 370, is arranged. A cavity 335 is formed in the actuator 330. The drive 350 comprises a plurality of magnets 351, which are arranged along the longitudinal extension of the actuator 330. The magnets 351 can be electromagnets and / or permanent magnets. The magnets 351 are preferably arranged along the entire length of the actuator 330.

[0208] The movement of the cavity 335 in the actuator 330 is possible by the magnetic field generated by the magnet 351 changing along the actuator 330. In particular, the cavity 335 can move between the fluid inlet 311 and the fluid outlet 313, so that when the cavity 335 is connected to the fluid inlet 311 in fluid communication, the fluid can flow into the cavity 335 via the fluid inlet 311, the cavity 335 filled with the fluid moves in the direction of the fluid outlet 313, and when the cavity 335 is connected to the fluid outlet 313 in fluid communication, the fluid in the cavity 335 can flow out of the fluid outlet 313.

[0209] During the movement of the cavity 335 from the fluid inlet 311 toward the fluid outlet 313, the cavity is limited by the actuator 330 (in particular the cavity surface 331), the housing 310 (in particular the first housing section 320) and on the edge side and / or on the end side by the sealing rail 377 of the sealing element 370 in combination with the spring element 376 of the sealing element 370.

[0210] Two clamping elements 326, 327 are arranged in the housing 310, in particular in the second housing section 325. The first clamping element 326 is arranged in the housing 310 so that it at least partially contacts the end face 332' of the actuator 330, and the second clamping element 327 is arranged in the housing 310 so that it at least partially contacts the other end face 332 of the actuator 330.

[0211] The resetting of the cavity can be performed mechanically or magnetically. The clamping elements 326, 327 can have elastic properties, so that when the cavity 335 is formed in the actuator 330 and the actuator 330 has expanded in the direction of the end faces 332, 332', an increasing force is exerted on the actuator 330 at the end sides 332, 332'. By switching off the magnetic field, a force is exerted on the actuator 330 at the end sides 332, 332' by the clamping elements 326, 327, so that the cavity 335 is reset. The resetting can also be performed by a magnetic field oriented in another way, for example by magnets in the clamping elements 326, 327.

[0212] exist Figure 3cThe transport device 300 shown schematically and in cross-section in a side view includes a fluid outlet 313, which is connected in fluid communication with a second diffuser 314. A cavity 335 in the actuator 330 is connected in fluid communication with the diffuser 314 and thus also in fluid communication with the fluid outlet 313. The fluid in the cavity 335 can flow out of the transport device 300 via the diffuser 314 and the fluid outlet 313.

[0213] The cross section of the diffuser is larger at the end of the diffuser facing the actuator 330 than at the end of the diffuser 314 facing away from the actuator 330 .

[0214] The first diffuser 312 of the fluid inlet 311 can be designed identically to the second diffuser 314 of the fluid outlet 313 .

[0215] The sealing element 370 comprises a sealing rail 377 and a spring element 376. If there is a cavity 335 in the actuator 330 (in the region of the spring element 376), a section of the spring element 376 presses a corresponding section of the sealing rail 377 in the direction of the cavity 335, so that the section of the sealing rail 377 abuts against the actuator 330 (cavity surface 331 of the actuator 330), and the cavity 335 is sealed at the edge by the sealing element 370. The spring element 376 of the sealing element 370 protrudes from the groove 317 in which it is arranged in the direction of the actuator 330.

[0216] Preferably, the sealing rail 377 is adhesively connected to a section of the housing 310 , in particular to the first housing section 320 . This is done, for example, via an adhesive bond or a material-bonded connection.

[0217] The sealing rail 377 can span or close the open side of the groove 317 in which the spring element 376 is arranged. In particular, the sealing rail 377 can completely span or close the open side of the groove.

[0218] exist Figure 3d 3 shows a schematic top view of a transport device 300, wherein a groove 317 is indicated in the housing 310. A spring element 376 of a sealing element 370 is arranged in the groove 317.

[0219] The groove 317 of the spring element 376 with the sealing element 370 surrounds a surface section or region of the housing 310, in particular the first housing section 320, in which the fluid can be transported from the fluid inlet 311 via the indicated diffuser 312 to the fluid outlet 313 via the indicated diffuser 314. In the direction of the axis between the fluid inlet 311 and the fluid outlet 313, the chamber 335 is sealed at the end side by the sealing element 370, in particular by the sealing rail 377 of the sealing element 370, and in the direction of another axis perpendicular to the first axis, the chamber 335 is sealed at the edge side by the sealing element 370, in particular by the sealing rail 377 of the sealing element 370. By means of this sealing, leakage of the fluid in the chamber 335 is reduced or even avoided and the hydraulic power of the transport device (pump) is improved.

[0220] The basic shape of the groove 317 corresponds essentially to the basic shape of the actuator 330 .

[0221] The spring element 376 of the sealing element 370 can have a rectangular ring-like shape, in particular with rounded corners. The spring element 376 can be designed to be continuous, in particular be arranged in the groove 317 over the entire length of the groove 317 .

[0222] Figure 4 An exploded view of a transport device 400 is shown. The transport device 400 comprises a housing 410 , an actuator 430 , a drive 450 and a sealing element 470 .

[0223] The housing is divided into three housing sections 420, 425, 428. The three housing sections 420, 425, 428 are separate elements (components) that are not connected to each other in a materially bonded manner. At least two of the three housing sections 420, 425, 428 can be formed in one piece or connected to each other in a materially bonded manner.

[0224] The first housing section 420 includes a fluid inlet 411 with a diffuser 412 connected thereto (at Figure 4 ) and a fluid outlet 413 with a connected diffuser 414 (in Figure 4 (indicated in the table).

[0225] The actuator 430 is of cuboid and frame-shaped design, and the end faces and side faces are surrounded in a contacting manner by the sealing element 470. The second housing section 425 is designed to surround or enclose the sealing element 470 together with the enclosed actuator 430.

[0226] The sealing element 470 has four recesses 471, 472, 473, 474 which can extend over the entire height of the sealing element 470. The recesses 471, 471, 473, 474 together with the actuator 430 form a channel, when the cavity is in the area matching the recesses 471, 472, 473, 474 (in Figure 4 ), the channel connects the cavity of the lower cavity surface of the actuator 430 with the cavity of the upper cavity surface of the actuator 430.

[0227] The fluid inlet 411 can be connected in fluid communication with the cavity in the upper cavity surface of the actuator 430 via the diffuser 412. If the cavity of the lower cavity surface is connected in fluid communication with the cavity of the upper cavity surface of the actuator 430, for example via the recesses 473, 474, the fluid can flow into both cavities via the fluid inlet 411.

[0228] Similarly, when the cavities filled with fluid are connected, for example via the recesses 471 , 472 , the fluid can flow out of the device from the fluid outlet 413 via the diffuser 414 .

[0229] The third housing section 428 is preferably thin (thinner than the first housing section 420 and the second housing section 425 ).

[0230] The second housing section 425 is arranged between the first housing section 420 and the third housing section 420 .

[0231] The three housing sections 420 , 425 , 428 can be adhesively bonded or screwed to one another.

[0232] Driver 450 is similar to the drivers described above.

[0233] Figure 5 An exploded view of a transport device 500 is shown. The transport device 500 comprises a housing 510 , an actuator 530 , a drive 500 and a sealing element 570 .

[0234] The components of the transport device are constructed identically to the identical components of the transport device 400, so that Figure 4 The description of the components also applies to Figure 5 The same components of the transport device 500.

[0235] Additionally, the transport device 500 comprises a first sealing rail 578 and a second sealing rail 579. The first sealing rail 578 comprises two recesses 578a, 578b. The recesses 578a, 578b are shaped and positioned in the first sealing rail 578 such that they match the shape of the ends of the diffusers 512, 514 facing the actuator 530.

[0236] Recess 578 a allows fluid to flow into the cavity in the upper cavity surface of actuator 530 via fluid inlet 511 and diffuser 512 and into the cavity in the lower cavity surface of actuator 530 via recesses 573 , 574 in sealing element 570 .

[0237] Similarly, recess 578 b allows fluid from the cavity in the upper cavity surface of actuator 530 to flow out, and recesses 571 , 572 in sealing element 570 allow fluid to flow out of the cavity in the lower cavity surface of actuator 530 via diffuser 514 and fluid outlet 513 .

[0238] The first sealing rail 578 can be arranged between the first housing section 520 and the second housing section 525, in particular so that the first housing section 520 does not directly contact the actuator 530. In addition, the first sealing rail 578 ensures the sealing of the cavity in the upper cavity surface of the actuator 530. The second sealing rail 579 can be arranged between the second housing section 525 and the third housing section 528. As a result, the actuator 530 cannot directly contact the third housing section 528 and ensures the sealing of the cavity in the lower cavity surface of the actuator 530.

[0239] Figures 6a to 6d One embodiment of a transport device 600 is shown. The transport device 600 is particularly a pump, more particularly a micropump.

[0240] exist Figure 6a 6 shows a transport device 600 in a perspective and schematic manner, wherein a section is shown.

[0241] The transport device 600 includes a housing 610, an actuator 630, a driver 650, and a sealing element 670. The actuator 630 includes a magnetic shape memory alloy. The actuator can change its shape by a magnetic field provided by the driver 650. The actuator 630 can be composed of a magnetic shape memory alloy.

[0242] The basic shape of the actuator 630 is substantially square. The actuator 630 includes two side faces, two end faces and two cavity faces, wherein cavities 635, 635' (in Figure 6a Only cavity 635 is shown).

[0243] The area of ​​the cavity surface is larger than the areas of the end surface and the side surface. Preferably, the area of ​​the cavity surface is at least three times larger than the areas of the end surface and the side surface of the actuator 630 .

[0244] A cavity 635 is formed in the cavity surface 631, which cavity extends between the side faces of the actuator 630. The cavity 635 (and also the cavity 635') is formed in sections in the actuator 630 between the end faces.

[0245] The housing 610 includes a first housing section 620, a second housing section 625 and a third housing section 628. The housing sections 620, 625, 628 are not connected in a materially bonded manner, but can be connected to each other by screwing or bonding. A one-piece design of at least two of the housing sections 620, 625, 628 is feasible.

[0246] The housing 610 includes a fluid inlet 611, which is particularly arranged in the first housing section 620 of the housing 610. The third housing section 628 is thinner than the first housing section 620 and / or the second housing section 625. The actuator 630 is arranged in the housing 610. The actuator 630 can therefore be arranged in the housing 610 so that all surfaces of the actuator 630, namely the cavity surface 631, the end surface 632, and the side surface 633, are completely surrounded by the housing.

[0247] The sealing element 670 has recesses 671, 672, 673, 674 (recesses 673 and 674 are located at Figure 6a ). The recesses 671, 672, 673, 674 together with the side of the actuator 630 form a channel each. If a cavity 635 is located near the recesses 671, 672 and another cavity 635' is located on the surface of the actuator 630 opposite to the surface with the cavity 635, the cavities 635, 635' are connected in fluid communication via the recesses 671, 672.

[0248] The transport device 600 can include Figure 5 Sealing rails 578, 579 are described.

[0249] exist Figure 6b , a schematic front view of a transport device 600 is shown. The transport device 600 comprises a housing 610, which has a first housing section 620, a second housing section 625 and a third housing section 628. The transport device 600 further comprises an actuator 630, a drive 650, which has a plurality of magnets 651, and a sealing element 670.

[0250] The housing 610 comprises a fluid inlet 611 and a diffuser 612 as well as a fluid outlet 613 with a connected diffuser 614. The sealing element 670 surrounds the actuator 630 in a plane, in particular in the plane of movement of the chambers 635, 635' in the actuator 630. In this case, the sealing element 670 contacts the end face and the side faces of the actuator 630.

[0251] Recesses 672 and 674 (in Figure 6b614). As shown in FIG. 6 , the cavity 635 is substantially flush with the fluid inlet 611 (diffuser 612) or flush with the outlet 613 (diffuser 614). As a result, when the cavities 635 and 635' have been moved to a position where the fluid communication between the cavity 635 and the diffuser 614 and the fluid outlet 613 can be achieved, the fluid communication between the cavity 635 and the cavity 635' is also ensured, so that the fluid can flow out of the fluid outlet 613 from the two cavities 635 and 635'. Similarly, it is ensured that the fluid flows into the cavities 635 and 635' via the fluid inlet 611 and the diffuser 612.

[0252] exist Figure 6c 6 shows a schematic side view of the transport device 600 , wherein the fluid connections between the cavity 635 ′, the recess 671 , the recess 672 , the cavity 635 , the diffuser 614 and the fluid outlet 613 are shown in this view.

[0253] The sealing element 670 (completely) surrounds the actuator 630 on its sides.

[0254] exist Figure 6d 6 shows a transport device 600 in a schematic top view. The fluid inlet 611 is connected to the diffuser 612. The recesses 673, 674 are flush with the diffuser 612.

[0255] The fluid outlet 613 is connected to the diffuser 614. The recessed portions 671 and 672 are flush with the diffuser 614.

[0256] The sealing element 670 completely surrounds (in one plane) the actuator 630. Likewise, the diffusers 614, 612 are surrounded by the projected sealing element 670.

[0257] The sealing element 670 can have a rectangular ring shape.

[0258] One or more surfaces of the housing 610 that can come into contact with the fluid in one of the chambers 635 , 635 ′ are preferably coated, in particular with a PTFE coating.

[0259] In particular, the surface of the first housing portion 620 which faces the actuator 630 is provided with such a coating.

[0260] The surface of the third housing portion 628 facing the actuator 630 may also be provided with such a coating.

[0261] Figure 7 An actuator 730 and a sealing element 770 are shown, wherein the sealing element 770 surrounds (encircles) the actuator.

[0262] A restoring element 785 is arranged in the sealing element 770. The restoring element 785 is designed as an electromagnet.

[0263] The resetting element 785 serves to (magnetically) re-set the actuator 730 after the cavity has been formed in the actuator 730 , as described above.

[0264] exist Figure 8 Schematically shows a transport device 800 with an actuator 830 and a sealing element 870. The sealing element 870 includes two resetting elements 886, 886'. The resetting elements 886, 886' are arranged in the sealing element 870 and each include a plurality of springs, wherein each resetting element 886, 886' is arranged in the sealing element 870 on opposite sides of the actuator 830. Mechanical resetting of the actuator 830 is ensured by the springs 886, 886', as described above.

[0265] The springs 886, 886' can be metal springs or plastic springs.

[0266] Fig. 9 The transport device 900 is shown in a top view (schematically) with an actuator 930 and a sealing element 970. Two resetting elements 987, 987' are arranged in the sealing element 970. The resetting elements 987, 987' each include a permanent magnet, wherein one resetting element 886, 886' is arranged in the sealing element 970 on opposite sides of the actuator 930. The permanent magnets 987, 987' can achieve magnetic resetting of the actuator 930, as described above.

[0267] Figures 10a to 10d An embodiment of a transport device 1000 is shown. The transport device 1000 can be a pump, in particular a micropump.

[0268] exist Fig.10a The transport device 1000 is shown in perspective and schematically in section.

[0269] The transport device 1000 includes a housing 1010 , an actuator 1030 , a drive 1050 , and a sealing element 1070 .

[0270] The actuator 1030 includes a magnetic shape memory alloy. The actuator can change its shape by a magnetic field provided by the driver 1050. The actuator 1030 can be made of a magnetic shape memory alloy.

[0271] The basic shape of the actuator 1030 is substantially square. The actuator 1030 includes two side faces, two end faces, and two cavity faces, wherein cavities 1035, 1035' (in Fig.10a Only cavity 1035 is shown).

[0272] The area of ​​the cavity surface is larger than the areas of the end surface and the side surface. In particular, the area of ​​the cavity surface is at least three times larger than the areas of the end surface and the side surface of the actuator 1030.

[0273] A cavity 1035 is formed in the cavity surface 1031, which cavity extends between the side faces of the actuator 1030. The cavity 1035 (and also the cavity 1035') is formed in sections in the actuator 1030 between the end faces.

[0274] The housing 1010 includes a first housing section 1020 and a second housing section 1025. The housing sections 1020, 1025 are not connected in a materially bonded manner, but may be connected to one another by screwing or gluing.

[0275] The housing 1010 includes a fluid inlet 1011, which is particularly arranged in a first housing section 1020 of the housing 1010. The second housing section 1025 is thinner than the first housing section 1020. The actuator 1030 is arranged in the housing 1010. The actuator 1030 can be arranged in the housing 1010 so that all surfaces of the actuator 1030, namely the cavity surface 1031, the end surface 1032, and the side surface 1033, are completely surrounded by the housing 1030.

[0276] The sealing element 1070 has recesses 1071, 1072, 1073, 1074 (recesses 1073 and 1074 are located at Fig.10a 1071, 1072, 1073, 1074 together with the side of the actuator 1030 form a channel. If a cavity 1035 is located near the cavity 1071, 1072 and another cavity 1035' is located on the surface of the actuator 1030 opposite to the surface with the cavity 1035, the cavities 1035, 1035' are connected via the cavity 1071, 1072 in a fluid communication manner.

[0277] The transport device 1000 can include Figure 5 The sealing rail 579 described. The sealing rail 579 can be arranged between the first housing section 1020 and the second housing section 1025 .

[0278] exist Fig.10b 1 shows a schematic front view of a transport device 1000. The transport device 1000 comprises a housing 1010, which has a first housing section 1020 and a second housing section 1025. The transport device 1000 further comprises an actuator 1030, a drive 1050, which has a plurality of magnets 1051, and a sealing element 1070.

[0279] The housing 1010 includes a fluid inlet 1011 and a diffuser 1012 , and a fluid outlet 1013 with a connected diffuser 1014 .

[0280] Sealing element 1070 surrounds actuator 1030 in a plane, in particular in the plane of movement of cavities 1035, 1035' in actuator 1030. In addition, sealing element 1070 surrounds one of the cavity surfaces 1031 of actuator 1070, in particular the cavity surface facing fluid inlet 1011 and / or fluid outlet 1013.

[0281] The sealing element 1070 can at least partially contact at least five of the six sides of the actuator 1030, see also Fig.10a and 10c .

[0282] A section of the fluid inlet 1011 and / or a section of the fluid outlet 1013 is surrounded by the sealing element 1070. The diffuser 1012 of the fluid inlet 1011 and / or the diffuser 1014 of the fluid outlet 1013 can also be surrounded in sections by the sealing element 1070.

[0283] Recesses 1072 and 1074 (in Fig.10b 1014) is substantially flush with the fluid inlet 1011 (diffuser 1012) or with the outlet 1013 (diffuser 1014). Thus, when the cavities 1035 and 1035' have been moved to a position where fluid communication between the cavity 1035 and the diffuser 1014 and the fluid outlet 1013 can be achieved, fluid communication between the cavity 1035 and the cavity 1035' is also ensured, so that the fluid can flow out of the fluid outlet 1013 from the two cavities 1035 and 1035'. Similarly, it is ensured that the fluid flows into the cavities 1035 and 1035' via the fluid inlet 1011 and the diffuser 1012.

[0284] exist Fig.10c 1 shows a schematic side view of the transport device 1000 , wherein the fluid connections between the cavity 1035 ′, the recess 1071 , the recess 1072 , the cavity 1035 , the diffuser 1014 and the fluid outlet 1013 are shown in this view.

[0285] The sealing element 1070 (completely) surrounds the actuator 1030 at its side and surrounds the cavity surface 1031 of the actuator 1030 facing the fluid inlet 1011 and / or the fluid outlet 1013. Preferably, the sealing element 1070 does not (substantially) contact the cavity surface of the actuator 1030 facing the driver 1050.

[0286] exist Fig.10d 1000 is shown in a schematic top view. The fluid inlet 1011 is connected to the diffuser 1012. The recesses 1073, 1074 are flush with the diffuser 1012.

[0287] The fluid outlet 1013 is connected to the diffuser 1014. The recesses 1071 and 1072 are flush with the diffuser 1014.

[0288] The sealing element 1070 completely surrounds (in one plane) the actuator 1030. Likewise, the diffusers 1014, 1012 are surrounded by the projected sealing element 1070.

[0289] One or more surfaces of the housing 1010 that can come into contact with the fluid in one of the chambers 1035 , 1035 ′ are preferably coated, in particular with a PTFE coating.

[0290] In particular, the surface of the first housing portion 1020 which faces the actuator 1030 is provided with such a coating.

[0291] The surface of the third housing portion 1028 facing the actuator 1030 may also be provided with such a coating.

[0292] Figures 11a to 11d An embodiment of a transport device 1100 is shown. The transport device 1100 is in particular a pump, more in particular a micropump.

[0293] exist Fig.11a 1 shows a transport device 1100 in a perspective and schematic manner, wherein a section is shown.

[0294] The transport device 1100 includes a housing 1110, an actuator 1130, a driver 1150, and a sealing element 1170. The actuator 1130 includes a magnetic shape memory alloy. The actuator can change its shape by a magnetic field provided by the driver 1150. The actuator 1130 can be composed of a magnetic shape memory alloy.

[0295] The basic shape of the actuator 1130 is substantially square. The actuator 1130 includes two side faces, two end faces, and two cavity faces, wherein cavities 1135, 1135' (in Fig.11a Only cavity 1135 is shown).

[0296] The area of ​​the cavity surface is larger than the areas of the end surface and the side surface. In particular, the area of ​​the cavity surface is at least three times larger than the areas of the end surface and the side surface of the actuator 1130.

[0297] A cavity 1135 is formed in the cavity surface 1131, which cavity extends between the side faces of the actuator 1130. The cavity 1135 (and also the cavity 1135') is formed in sections in the actuator 1130 between the end faces.

[0298] The housing 1110 includes a fluid inlet 1111 and a fluid outlet 1113. The actuator 1130 can be disposed in the housing 1110 such that at least one of the end surface 1132, the side surface 1133 and the cavity surface 1131 is surrounded by the housing 1110.

[0299] The sealing element 1170 has recesses 1171, 1172, 1173, 1174 (recesses 1173 and 1174 are located at Fig.11a 1171, 1172, 1173, 1174 together with the side of the actuator 1130 form a channel. If a cavity 1135 is located near the cavity 1171, 1172 and another cavity 1135' is located on the surface of the actuator 1130 opposite to the surface with the cavity 1135, the cavities 1135, 1135' are connected via the cavity 1171, 1172 in a fluid communication manner.

[0300] The transport device 1100 comprises a sealing rail 1177 which is arranged between the actuator 1130 and the drive 1150 .

[0301] The transport device 1100 comprises two clamping elements 1126, 1127, wherein each clamping element 1126, 1127 contacts a side, in particular an end face 1132, of the actuator 1130. The clamping elements 1126, 1127 can extend over the entire length of the side or face of the actuator 1130 that is contacted in each case.

[0302] The clamping elements 1126, 1127 have a trapezoidal basic shape. At least one side of the clamping elements 1126, 1127 is respectively designed in a trapezoidal shape.

[0303] The clamping elements 1126 , 1127 may contact the sealing element 1170 , the housing 1110 , the actuator 1130 and / or the sealing rail 1177 .

[0304] The clamping elements 1126 , 1127 can be made of an incompressible material.

[0305] exist Fig.11b 2 shows a schematic front view of a transport device 1100 . The transport device 1100 comprises a housing 1110 , an actuator 1130 , a drive 1150 , which has a plurality of magnets 1151 , and a sealing element 1170 .

[0306] The housing 1110 includes a fluid inlet 1111 and a diffuser 1112, and a fluid outlet 1113 having a connected diffuser 1114. The sealing element 1170 surrounds at least one of the cavity surface 1131 and the side surface 1133, in particular, both side surfaces 1133.

[0307] Recesses 1172 and 1174 (in Fig.11b 1114). As shown in FIG. 113, the cavities 1135 and 1135' are substantially flush with the fluid inlet 1111 (diffuser 1112) or flush with the outlet 1113 (diffuser 1114). As a result, when the cavities 1135 and 1135' have been moved to a position where fluid communication between the cavities 1135 and the diffuser 1114 and the fluid outlet 1113 can be achieved, fluid communication between the cavities 1135 and 1135' is also ensured, so that the fluid can flow out of the fluid outlet 1113 from the two cavities 1135 and 1135'. Similarly, it is ensured that the fluid flows into the cavities 1135 and 1135' via the fluid inlet 1111 and the diffuser 1112.

[0308] One of the clamping elements 1126 , 1127 contacts one of the end faces of the actuator 1130 .

[0309] exist Fig.11c 1 shows a schematic side view of the transport device 1100 , wherein the fluid connections between the cavity 1135 ′, the recess 1171 , the recess 1172 , the cavity 1135 , the diffuser 1114 and the fluid outlet 1113 are shown in this view.

[0310] exist Fig.11d 1 shows a transport device 1100 in a schematic top view. The fluid inlet 1111 is connected to the diffuser 1112. The recesses 1173, 1174 are flush with the diffuser 1112.

[0311] The fluid outlet 1113 is connected to the diffuser 1114. The recesses 1171 and 1172 are flush with the diffuser 1114.

[0312] For example, in Fig.12a and 12b 2 shows a transport device 1200 having sensors 1290 , 1291 , 1292 , 1293 , 1294 , 1295 , 1296 .

[0313] Features of sensors 1290, . . . described with reference to transport device 1200 may be incorporated into each of the transport devices 100, . . . described herein.

[0314] The transport device 1200 comprises a housing 1210, which in particular comprises a first housing section 1220 and a second housing section 1225. In addition, the transport device 1200 comprises an actuator 1230, a drive 1250, which in particular has a plurality of magnets 1251, and a sealing element 1270, which is particularly arranged in a groove 1217 of the housing 1210.

[0315] The sensor device of the transport device 1200 includes an optical sensor 1291. The optical sensor 1291 is arranged in the housing 1210 and passes through the housing. The end of the optical sensor 1291 is arranged in the housing so that the surface (especially the cavity surface) of the actuator 1230 can be optically detected by the sensor 1291.

[0316] The end may be one end of a light guide, at the other end of which an evaluation unit or analysis unit of the optical sensor 1291 is arranged.

[0317] The surface of the actuator (cavity surface) can be optically measured by the optical sensor 1291. In particular, the cavity in the actuator 1230 can be detected by the optical sensor 1291. This is related to the geometric properties of the cavity in the actuator 1230 and to the frequency with which the cavity occurs in the actuator 1230.

[0318] The sensor device of the transport device 1200 can also include a pressure sensor 1292 . The pressure sensor 1292 is arranged at least partially at the fluid inlet 1211 and can measure the absolute pressure in the fluid inlet 1211 .

[0319] If a cavity in fluid communication with the fluid inlet 1211 is formed in the actuator 1230, negative pressure occurs so that the fluid can flow into the cavity of the actuator 1230 via the fluid inlet 1211. The pressure in the fluid inlet 1211 can be measured by the pressure sensor 1292.

[0320] The pressure sensor 1292 (also a differential pressure sensor) can include a first pressure sensor 1292a and a second pressure sensor 1292b, so that the pressure difference between the fluid inlet 1211 and the fluid outlet 1213 can be determined. To this end, the two pressure sensors 1292a, 1292b can be arranged upstream of the fluid inlet 1211 or the two pressure sensors can be arranged downstream of the fluid outlet 1213 (not completely at the fluid inlet 1211). Fig.12a and 12b ).

[0321] The operation of the transport device 1200 can be monitored by the data of the pressure sensor 1292 , and the operation of the transport device 1200 can be controlled or regulated based on the data of the pressure sensor 1292 .

[0322] The temperature sensor 1290 is arranged in the transport device 1200 in such a way that the temperature of the actuator 1230 can be detected by the temperature sensor 1290. In particular, the temperature sensor 1290 is (partially) arranged in the housing 1210 of the transport device 1200. The temperature sensor 1290 can contact a surface of the actuator 1230.

[0323] Data from temperature sensor 1290 can be used to monitor, control, or regulate the operation of transport equipment 1200 .

[0324] In particular, the operation of the transport device 1200 is regulated (controlled or regulated) such that the temperature of the actuator 1230 does not exceed a value of 100° C., in particular a temperature of 55° C. The temperature of the actuator 1230 can be controlled, for example, by (not in Fig.12a and 12b ) is adjusted by a heating and / or cooling element, such as a Peltier element, as shown in FIG.

[0325] The piezoelectric sensors 1293 and 1294 can detect the strain (force effect of the actuator 1230) in the direction of the actuator 1230 moving along the cavity between the fluid inlet 1211 and the fluid outlet 1213. The piezoelectric sensors 1293 and 1294 can be arranged on the end surface of the actuator 1230. A piezoelectric sensor 1293 and 1294 can be arranged on one end surface of the actuator 1230.

[0326] Piezoelectric sensors 1293 , 1294 can contact each end face of actuator 1230 and in particular each clamping element 1226 , 1227 .

[0327] The data of piezoelectric sensors 1293, 1294 can be used to monitor, control or regulate the operation of transport device 1200. The volume flow transported by transport device 1200 and / or the aging of actuator 1230 can be inferred from the magnitude and / or frequency of the values ​​measured by the piezoelectric sensors.

[0328] The volume flow conveyed by the transport device 1200 and / or the aging of the actuator 1230 can also be inferred by means of the strain gauges 1295, 1296. The strain gauges 1295, 1296 can be arranged in the housing 1210. In this case, the strain gauges 1295, 1296 can contact each one side of the actuator 1230. One strain gauge 1295, 1296 can be arranged on one side of the actuator 1230 and contact the actuator.

[0329] The data from the strain gauges 1295 , 1296 allow the operation of the transport device 1200 to be monitored, controlled or regulated.

[0330] Fig.13a and 13b An actuator 1330 having a separating layer 1380 is shown.

[0331] Each of the actuators 130 , . . . , 1330 described herein can include a separation layer 1380 .

[0332] exist Fig.13aIn the embodiment of the present invention, no cavity is formed in actuator 1330 . Separating layer 1380 surrounds all sides of actuator 1330 , wherein at least one side of actuator 1330 can also be surrounded by separating layer 1380 .

[0333] The separation layer 1380 includes a first film element 1381 and a second film element 1382. The film elements 1381 and 1382 are connected in an airtight manner via a weld 1398.

[0334] The separating layer 1380 can include a one-piece film element. In particular, a tubular film element can be arranged around the actuator 1330 and one or more open sides of the film element can be welded (gas-tightly) so that the actuator 1330 is especially completely surrounded by the film element.

[0335] The separation layer 1380 comprises a valve 1399. The pressure outside the separation layer 1380 (surrounding the separation layer 1380) and the pressure between the separation layer 1380 and the actuator 1330 can be adjusted via the valve 1399. For example, a membrane element 1381, 1382 or a one-piece membrane can be placed around the actuator 1330 so that the air between the actuator 1330 and the membrane can be sucked in or compressed via the valve 1399. As a result, the membrane is closely attached to the actuator 1330 and the pressure between the actuator 1330 and the separation layer 1380 is reduced relative to the surroundings. The membrane elements 1381, 1382 (or the one-piece membrane) can be welded to each other so that a negative pressure is maintained between the actuator 1330 and the separation layer 1380.

[0336] exist Fig.13b Cavities 1335, 1335' are formed therein, one cavity 1335, 1335' in each case in one of the cavity surfaces of the actuator 1330. The separating layer 1380 adjoins the constriction of the actuator 1330 to form the cavities 1335, 1335'.

[0337] If a fluid is transported in the chamber 1335, 1335' (as described above), the fluid does not directly contact the actuator 1330, but contacts the separation layer 1380. As a result, corrosive or sensitive fluids can also be transported in a transport device 100, ... having an actuator 1330 with a separation layer 1380. In particular, the biocompatibility of such a transport device 100, ... is ensured.

[0338] The thickness sB of the separating layer 1380 can be smaller than the maximum depth sK of the cavity 13330 formed in the actuator 1330 .

[0339] In addition to reference Fig.13a and 13b In addition to the described separating layer 1380 , the separating layer can also be designed as a coating which is firmly bonded to the actuator 1330 .

Claims

1. A transport device for transporting a fluid, the transport device (100) comprising: (a) a housing (110), wherein the housing has a fluid inlet (111, 113) and a fluid outlet (113, 111); (b) an actuator (130), the actuator comprising a magnetic shape memory alloy, wherein the actuator (130) is at least partially disposed in the housing (110); (c) a driver (150), the actuator (130) being capable of being transformed by the driver so that at least one cavity (135, 135') for fluid, which cavity (135, 135') is formed in the actuator (130) and is movable by the driver (150) so as to transport the fluid in the cavity (135, 135') from the fluid inlet (111, 113) to the fluid outlet (113, 111); (d) wherein at least one section of the actuator (130) has a separation layer (1380), by which direct contact between the fluid and the actuator (130) is prevented in the section of the actuator (130), (e) wherein the device comprises a sealing element (170), and wherein at least a section of the sealing element (170) has elastic properties such that when the cavity (135) is formed in the actuator (130) by the drive (150), the section of the sealing element (170) sealingly abuts against a section of the cavity (135) of the actuator (130).

2. The device according to claim 1, The separating layer (1380) extends over the entire side of the actuator (130).

3. The device according to claim 1, The separating layer (1380) extends over at least 80% of the total surface of the actuator (130).

4. The device according to any one of claims 1 to 3, The thickness (sB) of the separation layer (1380) is smaller than the maximum depth (sK) of the cavity (135, 135').

5. The device according to any one of claims 1 to 3, The separation layer is a thin film.

6. The device according to claim 5, There is a negative pressure between the membrane and the actuator (130) relative to the surroundings of the membrane.

7. The device according to claim 5, Wherein the membrane comprises a valve (1339).

8. The device according to claim 5, The film has a welding portion (1398).

9. The device according to claim 5, There is a liquid between the membrane and the actuator (130).

10. The device according to any one of claims 1 to 3, The separation layer (1380) is a coating.

11. The device according to claim 10, Wherein the coating comprises Parylene.

12. The device according to claim 10, The coating is applied to the actuator (130) by chemical vapor deposition, physical vapor deposition, sputtering or resublimation.

13. The device according to any one of claims 1 to 3, An adhesion promoter is applied between the actuator (130) and the separating layer (1380).

14. The device according to any one of claims 1 to 3, The sealing element (170) is designed and arranged between the actuator (130) and the housing (110) such that the chamber (135) is sealed at the edge or at the end during the transport of the fluid from the fluid inlet (111, 113) to the fluid outlet (113, 111).

15. The device according to any one of claims 1 to 3, The housing (110) has a groove (117) in which at least one section of the sealing element (170) is arranged.

16. The device according to claim 15, The groove (117) surrounds or encloses a face section of the housing (110).

17. The device according to claim 16, The surface section of the housing (110) surrounded or enclosed by the groove (117) includes the fluid inlet and / or the fluid outlet.

18. The device according to any one of claims 1 to 3, The actuator (430) is transformed by the driver (450) so that two chambers (635, 635') for fluid that can be moved by the driver (450) are formed in the actuator (450) so as to transport the fluid in the chambers (635, 635') from the fluid inlet (411, 413) to the fluid outlet (413, 411), and the device includes a sealing element (470), wherein the sealing element (470) has at least one recess (471, 472, 473, 474), and wherein the sealing element (470) is arranged in the housing (410) so that during the transportation of the fluid from the fluid inlet (411, 413) to the fluid outlet (413, 411), the chambers (635, 635') are at least temporarily connected in fluid communication via the recesses (471, 472, 473, 474).

19. The device according to claim 18, The actuator (430) is deformable in such a way that the cavities (635, 635') are formed on opposite sides of the actuator (430).

20. The device according to claim 18, The sealing element (470) at least partially contacts at least two surfaces on different sides of the actuator (430).

21. The apparatus according to claim 18, The housing (410) has an upper side which is substantially parallel to a side of the actuator (430) which forms a majority of one of the cavities (635, 635'), and wherein the fluid inlet (411, 413) and / or the fluid outlet (413, 411) extend from the upper side of the housing (410), or the fluid inlet (411, 413) and / or the fluid outlet (413, 411) extend from a side of the housing opposite to the upper side.

22. The apparatus according to claim 18, The device has a first sealing rail (578) and a second sealing rail (579), wherein the first sealing rail (578) contacts one side of the actuator (430) and the second sealing rail (579) contacts the other side of the actuator (430).

23. The device according to claim 22, The contacted side of the actuator (430) is the opposite side.

24. The apparatus according to any one of claims 1 to 3, The housing (110) includes at least one diffuser (112, 114).

25. The device according to claim 24, One diffuser (112) is connected to the fluid inlet (111) and one diffuser (114) is connected to the fluid outlet (113), and the side of each diffuser (112, 114) close to the actuator (130) has a larger cross-section than the side of each diffuser (112, 114) away from the actuator (130).

26. The apparatus according to any one of claims 1 to 3, The sealing element (170) comprises an elastomer and / or a foam material.

27. The apparatus according to any one of claims 1 to 3, The housing (110) comprises metal or plastic.

28. The apparatus according to any one of claims 1 to 3, The housing (110) has a PTFE coating at least in sections.

29. The device according to claim 28, In this case, at least the surface of the housing (110) which delimits the chamber (135) has a PTFE coating.

30. The apparatus according to any one of claims 1 to 3, At least two cavities (135) can be formed simultaneously in the same surface of the actuator (130).

31. The apparatus according to any one of claims 1 to 3, The device has a temperature sensor (1290) by means of which the temperature of the actuator (130) can be detected.

32. The apparatus according to any one of claims 1 to 3, The device has an optical sensor (1291) by means of which the presence of a cavity (135) in the actuator (130) can be detected.

33. The apparatus according to any one of claims 1 to 3, The device has a pressure sensor (1292), by means of which the pressure at the fluid inlet (111) or at the fluid outlet (113) can be detected.

34. The apparatus according to any one of claims 1 to 3, The device has a differential pressure sensor, by means of which a pressure difference between the fluid inlet (111) and the fluid outlet (113) can be detected.

35. The apparatus according to any one of claims 1 to 3, The device has a piezoelectric sensor (1293) by means of which an actuation of the actuator (130) can be detected.

36. The apparatus according to any one of claims 1 to 3, The device has a strain gauge (1295) by means of which an actuation of the actuator (130) can be detected.

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