Wire saw

Abstract

The present invention provides a wire saw that makes operation more efficient without visually confirming that the wire is hooked on a workpiece. The wire saw (1) cuts a workpiece (W) using a wire (43). The wire saw (1) has a lifting device (3) for lifting the workpiece (W). The wire saw 1 also has: a wire rise detection unit (5) for detecting that the wire (43) is hooked on the workpiece (W) and has risen when the workpiece (W) has been lifted by the lifting device (3) after the workpiece W has been cut using the wire (43); and an alarm unit (9) for sounding an alarm when the wire rise detection unit (5) detects the rise of the wire (43).

Description

Technical Field

[0001] The present invention relates to a wire saw. Background Art

[0002] Generally, a wire saw that cuts a workpiece such as a semiconductor material or a magnetic material with a wire moves a wire wound around a plurality of rollers at a predetermined interval at high speed and pushes the workpiece against the wire to cut the workpiece (see, for example, Patent Document 1).

[0003] Figures 3(a) and 3(b) are diagrams showing a conventional wire saw 100. Figure 3(a) is a schematic diagram showing the state before the workpiece W is cut by the saw wire 430 wound around rollers 410 and 420, and Figure 3(b) is a schematic diagram showing the state after the workpiece W is cut by the saw wire 430.

[0004] As shown in Figures 3(a) and 3(b), during the cutting process of the existing wire saw 100, when the workpiece W is lowered by the lifting device 300 and cut by the saw wire 430 of the processing unit 400, the workpiece W is raised by the lifting device 300, and sometimes the saw wire 430 is hooked on the workpiece W and rises together.

[0005] In order to prevent the wire 430 indicated by the virtual line in FIG. 3( b ) from rising, the wire saw described in Patent Document 1 includes restriction members 49L and 49R for restricting the lifting of the wire 8 .

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Laid-Open No. 8-11047 ( Figure 1 ). Summary of the invention

[0009] Problem that the invention aims to solve

[0010] However, even if the wire saw described in Patent Document 1 includes the limiting members 49L and 49R for limiting the floating of the saw wire 8, the saw wire 8 may be caught on the workpiece W. The saw wire 8 caught on the workpiece W is difficult to be detached from the workpiece W. Therefore, when the saw wire 8 is caught on the workpiece W, the operator removes the caught saw wire 8 from the workpiece W, or the operator cuts the saw wire 8 caught on the workpiece W.

[0011] Under such circumstances, when the workpiece W is cut by the saw wire 8 and raised, the operator needs to visually check whether the saw wire 8 is hooked on the workpiece W. Therefore, it is desired to improve the efficiency of the inspection work performed by the operator when the workpiece W is raised after processing in the wire saw.

[0012] An object of the present invention is to provide a wire saw that can solve the above-mentioned problem and improve the efficiency of work without visually confirming that the wire is caught on a workpiece.

[0013] Solutions to the problem

[0014] In order to solve the above-mentioned problems, the wire saw according to the present invention uses a saw wire to cut a workpiece, and the wire saw is characterized in that it comprises: a lifting device that lifts the workpiece; a wire rise detection unit that detects that the saw wire is hooked on the workpiece and has risen when the workpiece is raised by the lifting device after the workpiece is cut by the saw wire; and an alarm unit that issues an alarm based on the wire rise detection unit detecting the rise of the saw wire.

[0015] Effects of the Invention

[0016] The present invention can provide a wire saw that can improve the efficiency of work without visually confirming that the wire is caught on a workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram showing a wire saw according to an embodiment of the present invention.

[0018] Figure 2 It is a schematic perspective view of the main parts of the wire saw according to the embodiment of the present invention.

[0019] 3( a ) and 3( b ) are diagrams showing a conventional wire saw. FIG. 3( a ) is a schematic diagram showing a state before a workpiece is cut by a wire saw, and FIG. 3( b ) is a schematic diagram showing a state after a workpiece is cut by a wire saw.

[0020] Description of Reference Numerals

[0021] 1 Wire saw

[0022] 2 Clamping device

[0023] 3 Lifting device

[0024] 4 Processing equipment

[0025] 5 Wire rise detection unit

[0026] 6 Processing fluid supply device

[0027] 7 Device body

[0028] 8 Control unit

[0029] 9 Alarm Unit

[0030] 41, 42 Processing rollers

[0031] 43 Saw wire

[0032] 51 Rod-like parts or rollers

[0033] 52 Limit switch

[0034] 54 Force-applying components

[0035] 61 Processing fluid supply nozzle

[0036] L1 Length of the processing roller DETAILED DESCRIPTION

[0037] Reference Figure 1 and Figure 2 A jigsaw 1 according to an embodiment of the present invention will be described.

[0038] In addition, when describing the embodiment of the wire saw 1 of the present invention, for convenience, the wire saw 1 will be viewed from the front side. Figure 1 The description will be made with the side of the processing rollers 41 and 42 shown being the front side.

[0039] <Workpiece>

[0040] like Figure 1 As shown, the workpiece W is made of hard and brittle materials such as semiconductor materials, magnetic materials, ceramics, etc. The workpiece W is cut and severed by being pushed against a saw wire 43 of a processing device 4 provided on the wire saw 1 .

[0041] Wire Saw

[0042] The wire saw 1 is a cutting device that cuts a workpiece W using a wire 43 of a processing portion 40 between processing rollers 41 and 42 of a processing device 4. The wire saw 1 is configured to include a clamping device 2, a lifting device 3, a processing device 4, a wire rise detection unit 5, a processing fluid supply device 6, and a device body 7 (see Figure 2 ), control unit 8 and alarm unit 9.

[0043] Clamping device

[0044] The clamping device 2 is a holding mechanism for clamping the workpiece W when the workpiece W is processed by the processing device 4. The clamping device 2 indirectly clamps the workpiece W sent to the processing room through the workpiece holder 21, and then pushes the workpiece W against the saw wire 43 of the processing device 4 for processing.

[0045] like Figure 2 As shown, a workpiece fixture 21 is detachably mounted on the upper surface of the workpiece W through a plate-like member such as a glass plate or a metal plate. A plurality of clamped portions 21a detachably connected to a workpiece holding member (not shown) of the clamping device 2 are provided on the upper surface of the workpiece fixture 21 .

[0046] Lifting device

[0047] like Figure 1 As shown, the lifting device 3 is a device for lifting the workpiece W, which includes a clamping device 2 that has a workpiece clamp 21 or the like inserted at the lower end to hold the workpiece W. The lifting device 3 lowers the workpiece W toward the saw wire 43 of the processing device 4 and pushes it to perform processing, or lifts the workpiece W. The lifting device 3 is configured to include: a moving mechanism (not shown) including, for example, a ball screw that moves the clamping device 2 up and down; and a moving drive motor (not shown) including a servo motor that operates the moving mechanism.

[0048] 《Processing equipment》

[0049] like Figure 1 and Figure 2 As shown, the processing device 4 is a cutting mechanism for processing the workpiece W clamped by the clamping device 2. The processing device 4 is configured to include: a pair of processing rollers 41 and 42 arranged opposite to each other in the horizontal direction at an appropriate interval; a saw wire 43 wound around the processing rollers 41 and 42; and a driving motor (not shown) for driving the processing rollers 41 and 42 to rotate. The processing device 4 is set on the support frame 71 of the device body 7.

[0050] Above the processing device 4, a clamping device 2 is arranged to be raised and lowered by a lifting device 3 to support the workpiece W. When the processing device 4 is in operation, the wire 43 moves between the processing rollers 41 and 42, and the workpiece W held by the clamping device 2 is lowered by the lifting device 3 and pushed against the wire 43 of the processing portion 40 to be cut.

[0051] The processing rollers 41 and 42 are configured to be rotated by a driven motor (not shown) so that the saw wire 43 moves between the processing rollers 41 and 42. The processing rollers 41 and 42 may be at least a pair, and may be three or more if they are arranged in parallel with each other at intervals. The following description will be made by taking the case where there are two processing rollers 41 and 42 as an example.

[0052] The saw wire 43 is a processing saw wire composed of, for example, a single wire rod. The saw wire 43 is driven by the processing rollers 41 and 42 to repeat a constant forward movement and a constant backward movement so that the entire wire 43 moves forward in steps or moves forward continuously in one direction.

[0053] 《Wire rise detection unit》

[0054] like Figure 1As shown, the wire rise detection unit 5 is a detection device for detecting that the wire 43 has been hooked on the workpiece W and has risen. In addition, the structure of the wire rise detection unit 5 is not particularly limited as long as it can detect the rise of the wire 43. Hereinafter, as an example of the wire rise detection unit 5, a structure including a limit switch 52 will be described.

[0055] The wire rise detection unit 5 includes a rod-shaped member or roller 51 for detecting the rise of the wire, a limit switch 52 , a supporting member 53 , and a biasing member 54 .

[0056] <Rod-Shaped Member or Roller>

[0057] The rod-shaped member or roller 51 for detecting the wire rise is a member pushed upward by the wire 43 when the wire 43 has risen. Figure 2 As shown, the rod-shaped member or roller 51 is composed of a rotatable round rod-shaped member or a cylindrical member, and the round rod-shaped member or the cylindrical member is extended in the direction in which the processing rollers 41 and 42 on which the saw wire 43 is wound at a predetermined pitch interval extend. The rod-shaped member or roller 51 is formed to have a length L2 that is substantially the same as the length L1 across the entire area where the processing rollers 41 and 42 extend and the length L3 across the entire area where the processing liquid supply nozzle 61 extends. Therefore, the length L2 of the rod-shaped member or roller 51 is formed to be longer than the length L4 across the entire area of ​​the saw wire 43 wound on the processing rollers 41 and 42 and extending in the axial direction.

[0058] <Limit switch>

[0059] like Figure 1 As shown, the limit switch 52 is a detector that detects that the rod-shaped member or roller 51 has risen. The limit switch 52 is a switch that indirectly detects the rise of the saw wire 43 by detecting that the support member 53 has risen when the saw wire 43 is hooked on the workpiece W and has risen, and the saw wire 43 pushes the rod-shaped member or roller 51 upward. The limit switch 52 has: a fixed contact (not shown); and a movable contact, when the support member 53 has risen, the movable contact contacts with the fixed contact to become conductive, and when the support member 53 has dropped, the movable contact separates from the fixed contact to become disconnected. The limit switch 52 is mounted on the lower surface of the machining liquid supply nozzle 61, etc. The limit switch 52 is connected to the control unit 81 of the control unit 8.

[0060] <Supporting parts>

[0061] The support member 53 is a member for axially supporting the rod-shaped member or roller 51 so that it can rotate freely. That is, the rod-shaped member or roller 51 is supported so that it can rotate freely relative to the device body 7. One end of the support member 53 supports the rod-shaped member or roller 51 so that it can rotate freely, and the other end of the support member 53 is mounted on a holding portion 63 provided on the machining liquid supply nozzle 61. The support member 53 is arranged so that when the rod-shaped member or roller 51 rises / falls, the base end rotates upward and downward with the holding portion 63 as the center. Figure 2 As shown, the support member 53 is composed of a link-shaped member that connects the front and rear ends of the rod-shaped member or roller 51 and the front and rear ends of the holding portion 63, respectively.

[0062] like Figure 1 As shown, the force member 54 is a member that is interposed between the processing liquid supply nozzle 61 and the rod-shaped member or roller 51, and elastically connects the rod-shaped member or roller 51 to the processing liquid supply nozzle 61. The force member 54 is arranged above the saw wire 43 between the processing roller 41 and the processing roller 42 through an appropriate gap. The force member 54 is an elastic body that elastically supports the rod-shaped member or roller 51 above the saw wire 43 so that it can move up and down. The upper end of the force member 54 is connected to the lower surface of the processing liquid supply nozzle 61, and the lower end of the force member 54 is connected to the rod-shaped member or roller 51.

[0063] The force applying member 54 normally supports the rod-shaped member or roller 51 at a predetermined position above the saw wire 43. When the rod-shaped member or roller 51 is pushed upward by the saw wire 43 and rises to a predetermined height, the force applying member 54 is elastically deformed so that the support member 53 presses the limit switch 52 to turn it on.

[0064] 《Processing fluid supply device》

[0065] The machining fluid supply device 6 is a supply device for supplying machining fluid to the saw wire 43. The machining fluid supply device 6 includes a machining fluid tank (not shown), a machining fluid supply pump 60, a machining fluid supply nozzle 61, a machining fluid supply pipe 62, and a holding portion 63.

[0066] The machining fluid tank (not shown) is a tank for storing machining fluid to be supplied to the saw wire 43 when the saw wire 43 is used to cut the workpiece W. The machining fluid tank (not shown) is placed on a base (not shown).

[0067] The machining liquid supply pump 60 is a pump for sending the machining liquid in a machining liquid tank (not shown) to the machining liquid supply nozzle 61 via a machining liquid supply pipe 62 .

[0068] The processing liquid supply nozzle 61 is a device that sprays processing liquid to the saw wire 43 wound around the processing rollers 41 and 42. The processing liquid supply nozzle 61 is composed of a pair of left and right nozzles that spray processing liquid to the saw wire 43 located near the processing roller 41 on the left side and spray processing liquid to the saw wire 43 located near the processing roller 42 on the right side. The processing liquid supply nozzle 61 is extended along the direction in which the processing rollers 41 and 42 extend, and can supply processing liquid to all the saw wires 43 wound around the processing rollers 41 and 42 at a predetermined interval. The processing liquid supply nozzle 61 is fixed to the support frame 71 by a bracket (not shown).

[0069] like Figure 1 As shown, the machining liquid supply pipe 62 is composed of a pipe or the like that connects the machining liquid supply pump 60 and the left and right machining liquid supply nozzles 61 .

[0070] like Figure 1 and Figure 2 As shown in FIG. 6 , the holding portion 63 is a member for supporting the base end portion of the support member 53 to the machining liquid supply nozzle 61 . The holding portion 63 is fixed to the lower surface of the machining liquid supply nozzle 61 on the base end side.

[0071] 《Device body》

[0072] like Figure 2 As shown, the device body 7 is composed of a column or the like provided on the upper part of the base of the wire saw 1. The device body 7 includes a fixing frame or the like for fixing a supporting frame 71 for supporting the processing rollers 41 and 42.

[0073] Control Unit

[0074] like Figure 1 As shown, the control unit 8 is a control device for driving the clamping device 2, the lifting device 3, the processing device 4, the processing liquid supply device 6 and the alarm unit 9. The control unit 8 is configured to include: a control unit 81, an alarm device driving unit 82, a processing device driving unit 83, a lifting device driving unit 84 and a processing liquid supply pump driving unit 85. In addition, the control unit 8 is connected to a power supply via a control board not shown.

[0075] <Control Unit>

[0076] The control unit 81 has a storage unit for storing various data, and stores a program for controlling the operation of the entire wire saw 1. The control unit 81 is connected to an alarm device driver 82, a machining device driver 83, a lifting device driver 84, and a machining fluid supply pump driver 85.

[0077] <Alarm device drive unit>

[0078] The alarm device driving unit 82 is a device that drives the alarm unit 9 such as an alarm when the wire rise detection unit 5 detects the rise of the saw wire 43 and receives the conduction signal of the limit switch 52 via the control unit 81. The alarm device driving unit 82 can notify the operator that the saw wire 43 is pulled up by the workpiece W by driving the alarm unit 9.

[0079] <Processing device drive unit>

[0080] The processing device driver 83 drives a driving motor (not shown) of the processing device 4 based on a program stored in the control unit 81. The processing device driver 83 drives the driving motor (not shown) to rotate the processing rollers 41 and 42 and move the saw wire 43.

[0081] <Lifting device drive unit>

[0082] The lifting device driving unit 84 is a device that drives the lifting device 3 based on the program stored in the control unit 81. The lifting device driving unit 84 drives the driving motor (not shown) of the lifting device 3 to raise and lower the workpiece W held by the clamping device 2. In addition, the lifting device driving unit 84 also has a function of driving the lifting device 3 through the control unit 81 to raise / lower the workpiece W when the wire rise detection unit 5 (limit switch 52) detects the rise of the saw wire 43.

[0083] <Processing fluid supply pump drive unit>

[0084] The machining liquid supply pump driving unit 85 drives the machining liquid supply pump 60 based on various data and programs stored in the control unit 81. The machining liquid supply pump driving unit 85 drives the machining liquid supply pump 60 to eject the machining liquid from the machining liquid supply nozzle 61.

[0085] <Alarm Unit>

[0086] The alarm unit 9 is an alarm device that issues an alarm through the control unit 81 when the wire rise detection unit 5 detects the rise of the wire 43. The alarm unit 9 is constituted by, for example, an alarm device that generates an alarm sound.

[0087] [The role of wire saw]

[0088] Next, the effect of the wire saw 1 according to the embodiment of the present invention will be described with reference to Figure 1 and Figure 2 Explain the operation steps in order.

[0089] like Figure 1 or Figure 2As shown, the workpiece W clamped by the clamping device 2 via the workpiece holder 21 mounted on the workpiece W is lowered by the lifting device 3, so that the workpiece W is pushed against the saw wire 43 of the processing device 4 for cutting processing.

[0090] When the workpiece W is lifted by the lifting device 3 after the cutting of the workpiece W is completed, the wire 43 may be hooked on the workpiece W and pulled up. In this case, the pulled up wire 43 resists the biasing member 54 to lift the rod-shaped member or roller 51 .

[0091] As the rod or roller 51 rises, the support member 53 rotates upward (in the direction of arrow a) around the base end, pressing the limit switch 52 to turn it on. The on signal of the limit switch 52 is sent to the alarm device driver 82 and the lifting device driver 84 via the control unit 81.

[0092] The alarm device driving unit 82 drives the alarm unit 9 to notify the operator that the saw wire 43 is hooked on the workpiece W and pulled up. The operator does not need to always monitor whether the saw wire 43 is hooked on the workpiece W, but only needs to confirm that the saw wire 43 is hooked on the workpiece W when the alarm unit 9 is driven, and then remove the saw wire 43 from the hook. Therefore, the monitoring operation of the saw wire 43 can be simplified, and the saw wire 43 can be monitored efficiently.

[0093] In addition, when the saw wire 43 is hooked on the workpiece W and pulled up, the lifting device driving unit 84 drives the alarm unit 9, stops the lifting device 3 that is being driven and raised, and then lowers it. As a result, the workpiece W hooked with the saw wire 43 is not further raised upward, so the saw wire 43 can be prevented from being cut, and the hooked saw wire 43 can be easily removed from the workpiece W. Therefore, the inspection work of confirming that the saw wire 43 is hooked on the workpiece W and the removal work of removing the saw wire 43 hooked on the workpiece W can be improved.

[0094] Thus, the wire saw 1 of the present invention is a wire saw 1 that uses a saw wire 43 to cut a workpiece W, and the wire saw 1 comprises: a lifting device 3 that lifts the workpiece W; a wire rise detection unit 5 that detects that when the workpiece W has been lifted by the lifting device 3 after the workpiece W has been cut by the saw wire 43, the saw wire 43 is hooked on the workpiece W and has risen; and an alarm unit 9 that issues an alarm when the wire rise detection unit 5 detects the rise of the saw wire 43.

[0095] According to such a structure, since the wire saw 1 is provided with the wire rise detection unit 5 and the alarm unit 9, when the wire 43 is hooked on the workpiece W and has risen, the wire rise detection unit 5 can detect the rise of the wire 43, and the alarm unit 9 can call the operator to notify that the wire 43 is hooked on the workpiece W. Therefore, the operator only needs to perform the inspection operation to confirm that the wire 43 is hooked on the workpiece, or remove the hooked wire 43 when the alarm is notified by the alarm unit 9. In other words, the operator does not need to keep the wire saw 1 off for a moment and always watch the wire 43 for a long time. As a result, the efficiency of the inspection operation to confirm that the wire is hooked on the workpiece and the removal operation of the wire 43 can be improved and efficiency can be achieved.

[0096] In addition, if Figure 1 and Figure 2 As shown, the wire rise detection unit 5 includes a rod-shaped component or roller 51 for wire rise detection which is pushed upward by the wire 43 when the wire 43 rises. The rod-shaped component or roller 51 is extended along the direction in which the processing rollers 41 and 42 around which the wire 43 is wound at a prescribed pitch interval extend.

[0097] According to such a configuration, in the wire rise detection unit 5, the rod-shaped member or roller 51 that is pushed upward when the wire 43 hooked on the workpiece W rises is extended in the direction in which the processing rollers 41 and 42 extend. Therefore, the entire wire wound around the processing rollers 41 and 42 can be monitored with minimal components.

[0098] In addition, if Figure 1 As shown, the wire rise detection unit 5 includes a limit switch 52 for detecting that the rod-shaped member or roller 51 has risen.

[0099] According to such a structure, the wire rise detection unit 5 can be miniaturized by forming the wire rise detection unit 5 with the limit switch 52. Therefore, the limit switch 52 can be easily provided on the machining fluid supply device 6 or the like, and the rise of the wire 43 can be indirectly detected by detecting the rise of the rod-shaped member or the roller 51.

[0100] In addition, if Figure 2 As shown, the rod-shaped member or roller 51 is formed to have a length L2 that spans the entire area where the processing rollers 41 , 42 extend.

[0101] According to such a configuration, the rod-shaped member or roller 51 is arranged across the entire region where the processing rollers 41 and 42 extend, so that the rise of the plurality of full wires 43 wound around the processing rollers 41 and 42 at appropriate intervals can be monitored and detected.

[0102] In addition, if Figure 1As shown, the wire saw 1 of the present invention comprises: a processing fluid supply nozzle 61, which is extended along the direction in which the processing rollers 41 and 42 extend, and is used to supply processing fluid to the saw wire 43; and a force-applying component 54, which is interposed between the processing fluid supply nozzle 61 and the rod-shaped component or roller 51, and elastically supports the rod-shaped component or roller 51 so that it can move up and down above the saw wire 43.

[0103] According to such a structure, the wire saw 1 can elastically support the rod-shaped member or roller 51 by disposing the force-applying member 54 between the machining liquid supply nozzle 61 and the rod-shaped member or roller 51 so that the rod-shaped member or roller 51 can move up and down according to the lifting and lowering of the saw wire 43. Therefore, even a horizontally long rod-shaped member or roller 51 can be configured to move accurately according to the up and down movement of the saw wire 43.

[0104] In addition, the rod-shaped member or roller 51 is supported rotatably relative to the device body 7 .

[0105] According to such a structure, the rod-shaped member or roller 51 is supported to be freely rotatable relative to the device body 7, so that when the saw wire 43 hooked on the workpiece W is raised by the lifting device 3, the rod-shaped member or roller 51 is pushed by the saw wire 43 and can be supported in a rotatable manner relative to the device body 7. Therefore, when the saw wire 43 pushes the rod-shaped member or roller 51 upward, the rod-shaped member or roller 51 rotates, so that the load applied to the saw wire 43 can be reduced, thereby preventing the saw wire 43 from being cut.

[0106] [First Modification]

[0107] In addition, the present invention is not limited to the above-mentioned embodiment, and various modifications and changes can be made within the scope of the technical concept. Of course, the present invention also relates to the inventions of these modifications and changes.

[0108] For example, in the above-described embodiment, the limit switch 52 that detects that the rod-shaped member or roller 51 has risen is described as an example of the wire rise detection unit 5 , but the present invention is not limited thereto.

[0109] The wire rise detection unit 5 may include a photocoupler for detecting that the wire 43 is hooked on the workpiece W and has risen.

[0110] According to such a structure, the wire saw 1 can detect the rise of the saw wire 43 by using the light emitting element and the light receiving element of the photocoupler, and therefore, the rod-shaped member or roller 51, the limit switch 52, the support member 53, and the force applying member 54 described in the above embodiment are not required. Therefore, the number of parts and the assembly man-hours of the wire saw 1 can be reduced to achieve cost reduction.

[0111] [Second Modification]

[0112] In addition, the wire rise detection unit 5 is not limited to the rod-shaped member or roller 51 and the limit switch 52. The wire rise detection unit 5 may also include an electric wire routed in the direction in which the processing rollers 41 and 42 extend so as to make contact when the wire 43 rises, and a detector that flows a current in the electric wire and detects the rise of the wire 43 based on the current value that changes when the wire 43 comes into contact with the electric wire.

[0113] Even if the wire rise detection unit 5 is configured in this way, the same operational effects as those of the above-described embodiment can be obtained. In this case, the rod-shaped member or roller 51 and the limit switch 52 are not required.

[0114] [Third Modification]

[0115] In addition, the wire saw 1 includes a control unit 8 that drives the lifting device 3 when the wire rise detection unit 5 detects the rise of the wire 43. The control unit 8 can also stop the lifting device 3 or drive the lifting device 3 to descend when the wire rise detection unit 5 detects the rise of the wire 43.

[0116] According to such a structure, the control unit 8 drives the lifting device 3 when the limit switch 52 of the saw wire rising detection unit 5 detects the rising of the saw wire 43. Therefore, when the saw wire 43 is actually hooked on the workpiece W and has risen, the lifting device 3 is lowered, and the saw wire 43 can be easily removed from the workpiece W.

[0117] [Fourth Modification]

[0118] In addition, the wire saw 1 has a control unit 8 that drives the lifting device 3 to rise after driving the lifting device 3 to descend when the wire rising detection unit 5 detects the rising of the saw wire 43. The control unit 8 can also be configured so that when the wire rising detection unit 5 detects the rising of the saw wire 43 multiple times (for example, 2 to 4 times), the control unit 8 drives the alarm device 9.

[0119] According to such a structure, when the wire rise detection unit 5 detects the rise of the wire 43 for multiple times, the control unit 8 drives the alarm device driving unit 82, and the alarm unit 9 notifies the operator that the wire 43 is pulled up by the workpiece W. With such a structure, when the wire 43 is indeed pulled up by the workpiece W, the alarm unit 9 can sound an alarm to notify the operator.

[0120] [Other Modifications]

[0121] in addition, Figure 1 The force applying member 54 shown may also share a contact spring that applies force to the movable contact of the limit switch 52 .

[0122] In addition, the limit switch 52 may be another type of switch (for example, a push switch, etc.) that is turned on when the saw wire 43 rises.

Claims

1. A wire saw that uses a saw wire to cut a workpiece, the wire saw being characterized by comprising: A lifting device, which lifts the workpiece; A wire rise detection unit detects that when the workpiece is raised by the lifting device after the workpiece is cut by the saw wire, the saw wire is hooked on the workpiece and has risen; an alarm unit, which issues an alarm when the wire rise detection unit detects the rise of the saw wire; a processing roller on which the saw wire is wound at a predetermined pitch interval; a processing liquid supply nozzle, which is extended along the extending direction of the processing roller and is used to supply processing liquid to the saw wire; as well as a control unit, which drives the lifting device to rise after driving the lifting device to fall when the wire rise detection unit detects the rise of the saw wire, The wire rise detection unit comprises: a rod-shaped member or a roller for detecting the wire rise, which is pushed upward by the wire when the wire rises; and a limit switch for detecting that the rod-shaped member or the roller has risen. The wire saw further comprises: a biasing member interposed between the machining fluid supply nozzle and the rod-shaped member or the roller, elastically supporting the rod-shaped member or the roller above the saw wire so as to be movable up and down; The control unit drives the alarm unit when the wire rise detection unit detects the rise of the saw wire for a plurality of times.

2. The wire saw according to claim 1, characterized in that The wire rise detection unit includes a photocoupler that detects that the wire has been hooked on the workpiece and has risen.

3. The wire saw according to claim 1, characterized in that The rod-shaped member or the roller is provided to extend along the direction in which the processing roller extends.

4. The wire saw according to claim 3, characterized in that The rod-shaped member or the roller is formed to have a length that spans the entire region where the processing roller extends.

5. The wire saw according to claim 3 or 4, characterized in that: The rod-shaped member or the roller is supported rotatably relative to the device main body.

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