Rotating mechanism and vacuum coating machine thereof

Abstract

The present invention relates to the field of vacuum coating technology, and in particular to a rotating mechanism and a vacuum coating machine thereof. The rotating mechanism of the vacuum coating machine is used to drive the workpiece to be coated to move relative to the target surface. The workpiece to be coated has a first side and a second side arranged adjacent to each other, and the length of the first side is greater than the length of the second side; the rotating mechanism includes a driving member, a transmission unit, an active self-rotation unit and a driven self-rotation unit, and the driving member is connected to the transmission unit; the active self-rotation unit includes a first rotating shaft and a first elliptical gear, and the driven self-rotation unit includes a second rotating shaft and a second elliptical gear. The first rotating shaft cooperates with the transmission unit, the first elliptical gear is fixed to the first rotating shaft, and the second elliptical gear is fixed to the second rotating shaft and used to carry the workpiece to be coated, and the second elliptical gear is meshed with the first elliptical gear. A vacuum coating machine includes the above-mentioned rotating mechanism. The advantages of the present invention are that the deposited film layer on the outer surface of the workpiece to be coated is uniform and has no color difference, and the performance consistency is good.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to a rotating mechanism and a vacuum coating machine thereof. Background Art

[0002] Vacuum coating refers to a method of forming a thin film by heating metal or non-metal materials under high vacuum conditions to evaporate and condense them on the surface of the coated object (metal, semiconductor or insulator). In the vacuum coating industry, a circular self-rotating structure is generally used to drive the product (the object to be coated) to move relative to the target surface, that is, the large disk drives the rotation axis to move, and its linear speed remains constant. However, during the revolution of the product, due to the complex and changeable shape of the product, the distance between the product and the target surface at different positions is not equal, resulting in the problem of inconsistent film thickness at different positions of the plated product, resulting in color difference and performance differences at different positions of the product. Summary of the invention

[0003] In view of this, it is necessary to provide a rotating mechanism and a vacuum coating machine that can make the color difference of the coated product uniform at different positions and the performance consistent.

[0004] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0005] A rotating mechanism of a vacuum coating machine, arranged in a vacuum chamber, for driving a to-be-coated object to move relative to a target surface, wherein the to-be-coated object has a first side and a second side arranged adjacent to each other, and the length of the first side is greater than the length of the second side;

[0006] The rotating mechanism includes a driving member, a transmission unit, an active rotation unit and a driven rotation unit, the driving member is connected to the transmission unit; the active rotation unit includes a first rotating shaft and a first elliptical gear, the driven rotation unit includes a second rotating shaft and a second elliptical gear, the first rotating shaft cooperates with the transmission unit and rotates under the drive of the transmission unit, the first elliptical gear is fixed to one end of the first rotating shaft and rotates with the first rotating shaft, the second elliptical gear is fixed to one end of the second rotating shaft and is used to carry the part to be coated, the second elliptical gear is meshed with the first elliptical gear, and is located in the same plane as the first elliptical gear, and the major axis of the second elliptical gear is perpendicular to the minor axis of the first elliptical gear or the minor axis of the second elliptical gear is perpendicular to the major axis of the first elliptical gear.

[0007] It can be understood that in the present application, by setting the first elliptical gear and the second elliptical gear, and the major axis of the second elliptical gear is perpendicular to the minor axis of the first elliptical gear or the minor axis of the second elliptical gear is perpendicular to the major axis of the first elliptical gear, and at the same time, the first side of the part to be coated is set parallel to the major axis of the second elliptical gear, and the second side of the part to be coated is set parallel to the minor axis of the second elliptical gear; thereby, the first side of the part to be coated can rotate slowly, and the second side of the part to be coated can rotate quickly, so that the surface deposited film thickness of the part to be coated during the coating process forms a situation in which the first side is thicker and the second side is thinner, thereby compensating for the difference in film thickness between the first side and the second side caused by the difference in distance change between the part to be coated and the target surface, so as to reduce the color difference and performance difference at different positions of the part to be coated.

[0008] In one embodiment, the ratio of the length of the short axis of the first ellipse to the length of the long axis of the first ellipse is 1:(1.1-1.7); and / or the ratio of the length of the short axis of the second ellipse to the length of the long axis of the second ellipse is 1:(1.1-1.7).

[0009] It can be understood that such an arrangement can achieve the optimal speed when the workpiece to be coated moves, further compensate for the difference in distance change between the workpiece to be coated and the target surface, and reduce the color difference and performance difference at different positions of the workpiece to be coated.

[0010] In one embodiment, the rotating mechanism also includes a turntable, and the active self-rotating unit also includes a first bearing and a first bearing seat. The turntable is arranged on one side of the transmission unit, and the transmission unit can rotate relative to the turntable. The first bearing is sleeved on the first rotating shaft, the first bearing seat is sleeved on the first bearing and supports the first bearing, and the first bearing seat is fixed to the turntable.

[0011] In one embodiment, the transmission unit includes a first circular gear and a second circular gear, the first circular gear is connected to the driving member, and the second circular gear is fixed to one end of the first rotating shaft close to the first elliptical gear and meshes with the first circular gear.

[0012] It can be understood that the use of circular gears for transmission not only has high transmission efficiency but also stable and reliable transmission output, which is beneficial to the smooth operation of the parts to be coated and improves the uniformity of the film layer during coating.

[0013] In one embodiment, the transmission unit further includes a rotating member, a mounting groove is provided on a side surface of the first circular gear facing the turntable, the rotating member is installed in the mounting groove, and partially protrudes from a side surface of the first circular gear facing the turntable and abuts against the turntable.

[0014] In one embodiment, the rotating mechanism further includes a base plate, a locking member and an insulating unit, the first circular gear is mounted on the base plate through the locking member, the insulating unit is sleeved on the locking member, and blocks and insulates the base plate and the first circular gear.

[0015] It is understandable that the vacuum furnace (bottom plate) is grounded, the negative pole of the bias is connected to the first circular gear and other components, and the positive pole is connected to the furnace body of the vacuum furnace. Therefore, an insulating unit is arranged in the vacuum chamber to insulate the first circular gear and the components matched therewith, which can improve and control the energy of the charged particles in the vacuum plasma and improve the bonding force between the target material and the part to be coated during the coating process.

[0016] In one embodiment, the insulating unit includes an insulating seat, an insulating sleeve and an insulating cap. A penetrating mounting hole is opened on the first circular gear. The insulating seat is arranged between the first circular gear and the base plate. The insulating sleeve is installed in the mounting hole. One end of the locking piece passes through the mounting hole and passes through the insulating seat, and is connected to the base plate. The insulating cap is arranged on a side surface of the first circular gear close to the turntable and blocks the mounting hole.

[0017] In one embodiment, one end of the insulating sleeve has a first groove and the other end has a boss, one end of the locking member has a head, and the head is received in the first groove after the locking member is connected to the base plate; the end of the insulating seat close to the first circular gear has a second groove, and the boss extends from the mounting hole and is embedded in the second groove.

[0018] In one of the embodiments, the insulating unit further includes a protective cover, which is disposed between the first circular gear and the bottom plate and wraps the insulating seat.

[0019] In one embodiment, the driven rotation unit includes a second bearing and a second bearing seat, the second bearing is sleeved on the second rotating shaft, and the second bearing seat is sleeved on the second bearing and supports the second bearing.

[0020] The present invention also provides the following technical solutions:

[0021] A vacuum coating machine is used for coating a piece to be coated, comprising the above-mentioned rotating mechanism, wherein the piece to be coated is mounted on the rotating mechanism and moves relative to a target surface under the drive of the rotating mechanism.

[0022] Compared with the prior art, the rotating mechanism is provided with a first elliptical gear and a second elliptical gear, and the major axis of the second elliptical gear is perpendicular to the minor axis of the first elliptical gear or the minor axis of the second elliptical gear is perpendicular to the major axis of the first elliptical gear, and at the same time, the first side of the workpiece to be coated is parallel to the major axis of the second elliptical gear, and the second side of the workpiece to be coated is parallel to the minor axis of the second elliptical gear; thereby, the self-rotation speed of the first side of the workpiece to be coated can be slow, and the self-rotation speed of the second side of the workpiece to be coated can be fast, so that the surface deposited film thickness of the workpiece to be coated during the coating process forms a situation in which the first side is thicker and the second side is thinner, thereby compensating for the difference in film thickness between the first side and the second side caused by the difference in distance change between the workpiece to be coated and the target surface, so as to reduce the color difference and performance difference at different positions of the workpiece to be coated. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a structural cross-sectional view of the rotating mechanism provided by the present invention.

[0024] Figure 2 A partial schematic diagram of the meshing of the first circular gear and the second circular gear provided by the present invention.

[0025] Figure 3 A schematic structural diagram of the meshing of the first elliptical gear and the second elliptical gear provided by the present invention from one perspective.

[0026] Figure 4 The present invention provides Figure 3 Structural schematic diagram of the distance between the workpiece to be coated and the target surface in position.

[0027] Figure 5 This is a schematic structural diagram from another perspective of the meshing of the first elliptical gear and the second elliptical gear provided by the present invention.

[0028] Figure 6 The present invention provides Figure 5 Structural schematic diagram of the distance between the workpiece to be coated and the target surface in position.

[0029] Figure 7 A schematic structural diagram of an array of 24 pieces to be coated in the same vacuum furnace provided by the present invention.

[0030] Figure 8 The present invention provides a distribution diagram of each piece to be coated.

[0031] Fig. 9 ΔE* of the first and second sides measured / calculated for the coated product at position 1 94 , ΔL, ΔA, and ΔB values.

[0032] Fig.10ΔE* of the first and second sides measured / calculated for the coated product at position 3 94 , ΔL, ΔA, and ΔB values.

[0033] Fig.11 ΔE* of the first and second sides measured / calculated for the product after coating at position 5 94 , ΔL, ΔA, and ΔB values.

[0034] Fig.12 ΔE* of the first and second sides measured / calculated for the product after coating at position 7 94 , ΔL, ΔA, and ΔB values.

[0035] Among them, 100, rotating mechanism; 101, part to be coated; 101a, first side; 101b, second side; 102, target surface; 10, transmission unit; 11, first circular gear; 111, mounting groove; 112, mounting hole; 12, second circular gear; 13, rotating part; 20, active self-rotating unit; 21, first rotating shaft; 22, first elliptical gear; 23, first bearing; 24, first bearing seat; 25, first limit pin; 26, first clamping nut; 27, first stop washer; 28, first pressure cover; 30, driven rotation unit; 31, second rotating shaft; 32, second elliptical gear; 33, second bearing; 34, second bearing seat; 35, second limit pin; 36, second clamping nut; 37, second stop washer; 38, second pressure cover; 40, turntable; 50, bottom plate; 60, locking piece; 61, head; 70, insulating unit; 71, insulating seat; 711, second sink groove; 72, insulating sleeve; 721, first sink groove; 722, boss; 73, insulating cap; 74, protective cover; 200, bracket. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] It should be noted that when a component is referred to as being "mounted on" another component, it may be directly mounted on the other component or there may be a central component. When a component is considered to be "set on" another component, it may be directly set on the other component or there may be a central component at the same time. When a component is considered to be "fixed to" another component, it may be directly fixed on the other component or there may be a central component at the same time.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "or / and" used herein includes any and all combinations of one or more related listed items.

[0039] like Figure 1 As shown, the present invention provides a vacuum coating machine, which is used to form a thin film layer on the surface of a to-be-coated part, so that the to-be-coated part has new and good physical and chemical properties. Here, the to-be-coated part can be a regular-shaped part such as a rectangle or an ellipse, or can be some irregular-shaped parts.

[0040] Specifically, the vacuum coating machine includes a rotating mechanism 100, a vacuum furnace (not shown) and other structures. The vacuum furnace has a vacuum chamber (not shown). The rotating mechanism 100 is arranged in the vacuum cavity, for carrying the workpiece 101 to be coated, and driving the workpiece 101 to be coated to rotate relative to the target material in the vacuum cavity, so that during the rotation of the workpiece 101 to be coated, the target material is deposited on the surface of the workpiece 101 to be coated to form a film layer, thereby completing the coating of the workpiece 101 to be coated.

[0041] It should be noted that during the rotation process of existing products, due to the complex and changeable shapes of the products, the distances between the products and the target surface at different positions are not equal (see the reference Figure 4 L2 and Figure 5 L3 in the middle), which results in inconsistent film thickness at different positions of the product, causing color difference and performance differences in different positions of the product. For example, taking a rectangular product as an example, when the rectangular product rotates in a vacuum chamber, due to the error in the distance between the long side and the short side of the product and the target surface (target material), the thickness of the film layer plated on the long and short sides of the product is uneven. When the product rotates, the second side is closer to the target surface, and the film deposition is thicker. When the product rotates, the first side is farther from the target surface, and the film deposition is thinner. Therefore, the present invention provides a rotating mechanism 100, which can make the film deposition of the above-mentioned product more uniform in various parts of the product during the film deposition process.

[0042] Specifically, Figure 1 , Figure 3-Figure 6As shown, the rotating mechanism 100 is used to drive the object to be coated 101 to move relative to the target surface 102. The object to be coated 101 has a first side 101a and a second side 101b adjacent to each other. The length of the first side 101a is greater than the length of the second side 101b. The rotating mechanism 100 includes a driving member (not shown), a transmission unit 10, an active self-rotating unit 20 and a driven self-rotating unit 30. The driving member is connected to the transmission unit 10 and serves as a power source to drive the transmission unit 10 to move. The active self-rotating unit 20 includes a first rotating shaft 21 and a first elliptical gear 22. The driven self-rotating unit 30 includes a second rotating shaft 31 and a second elliptical gear 32. The first rotating shaft 21 cooperates with the transmission unit 10 and rotates under the drive of the transmission unit 10. The first elliptical gear 22 is fixed to one end of the first rotating shaft 21 and rotates with the first rotating shaft 21. The second elliptical gear is fixed to one end of the second rotating shaft 31 and is used to carry the workpiece to be coated 101. The second elliptical gear 32 is meshed with the first elliptical gear 22 and is located in the same plane as the first elliptical gear 22. The long axis of the second elliptical gear 32 is perpendicular to the short axis of the first elliptical gear 22 or the short axis of the second elliptical gear 32 is perpendicular to the long axis of the first elliptical gear 22.

[0043] It can be understood that by setting the first elliptical gear 22 and the second elliptical gear 32, and the long axis of the second elliptical gear 32 is perpendicular to the short axis of the first elliptical gear 22 or the short axis of the second elliptical gear 32 is perpendicular to the long axis of the first elliptical gear 22, and the first side 101a of the to-be-coated member 101 is arranged parallel to the long axis of the second elliptical gear 32, and the second side 101b of the to-be-coated member 101 is arranged parallel to the short axis of the second elliptical gear 32; thus, during the coating process, the first side 101a of the to-be-coated member 101 can be made to rotate slowly (combined with the Figure 3 and Figure 4 ), the second side 101b of the coating piece 101 rotates fast (combined with Figure 5 and Figure 6 ), thereby making the deposited film thickness on the first side 101a of the film-to-be-coated object 101, which is farther from the target surface 102, thicker, and the deposited film thickness on the second side 101b, which is closer to the target surface 102, thinner, thereby compensating for the difference in film thickness between the first side 101a and the second side 101b caused by the difference in distance between the film-to-be-coated object 101 and the target surface 102. By averaging the film thickness values ​​of the first side 101a and the second side 101b in the above manner, the film deposition around the film-to-be-coated object 101 will be more uniform, effectively reducing the color difference and performance difference at different positions of the film-to-be-coated object 101.

[0044] It is further necessary to explain that when the elliptical gears are meshed, the linear speed of the outer edge of the ellipse is different when the angular speed of the ellipse remains unchanged. When the first elliptical gear 22 moves at a constant speed, the second elliptical gear 32 meshes with it to move at a variable speed, so that when the first side 101a of the film-coated part 101 is close to the target surface 102, the speed is slow and the deposited film is large, and when the second side 101b of the film-coated part 101 is close to the target surface 102, the speed is fast and the deposited film is small.

[0045] Please continue to refer to Figure 1 The transmission unit 10 includes a first circular gear 11 and a second circular gear 12. The first circular gear 11 is connected to the driving member. The second circular gear 12 is fixed to one end of the first rotating shaft 21 close to the first elliptical gear 22 and meshes with the first circular gear 11. Thus, the driving member drives the first rotating shaft 21 to rotate through the first circular gear 11 and the second circular gear 12 to realize the rotation of the first elliptical gear 22. It can be understood that the transmission by circular gears not only has high transmission efficiency and stable and reliable transmission output, but also is conducive to the smooth operation of the part to be coated 101 and improves the uniformity of the film layer during coating.

[0046] Of course, in this embodiment, the transmission unit 10 adopts a gear transmission method. In other embodiments, the transmission unit 10 may also adopt other structures such as chain transmission and belt transmission.

[0047] Further, the ratio of the length of the short axis of the first elliptical gear 22 to the length of the long axis of the first elliptical gear 22 is 1:(1.1-1.7); and / or, the ratio of the length of the short axis of the second elliptical gear 32 to the length of the long axis of the second elliptical gear 32 is 1:(1.1-1.7). Such an arrangement can achieve the best speed when the object to be coated 101 moves, further compensate for the difference in distance change between the object to be coated 101 and the target surface 102, improve the coating effect, and reduce the color difference and performance difference at different positions of the object to be coated 101.

[0048] Specifically, the ratio of the length of the short axis of the first elliptical gear 22 to the length of the long axis of the first elliptical gear 22 can be 1: 1.1, 1: 1.2, 1: 1.3, 1: 1.4, 1: 1.5, 1: 1.6, 1: 1.7, and the specific value can be selected according to the needs. Similarly, the ratio of the length of the short axis of the second elliptical gear 32 to the length of the long axis of the second elliptical gear 32 can also be 1: 1.1, 1: 1.2, 1: 1.3, 1: 1.4, 1: 1.5, 1: 1.6, 1: 1.7, and the specific value can be selected according to the needs.

[0049] Preferably, the first side 101a of the piece to be coated 101 is parallel to the long axis of the second elliptical gear 32 and is the long side, and the second side 101b of the piece to be coated 101 is parallel to the short axis of the second elliptical gear 32 and is the short side.

[0050] like Figure 1 As shown, the active rotation unit 20 also includes a first bearing 23 and a first bearing seat 24 . The first bearing 23 is sleeved on the first rotating shaft 21 . The first bearing seat 24 is sleeved on the first bearing 23 and carries the first bearing 23 , that is, the first bearing 23 is fixed on the first bearing seat 24 .

[0051] Preferably, the number of the first bearings 23 is at least two, and the two first bearings 23 are arranged on the first rotating shaft 21 at intervals, so as to ensure the reliability and smoothness of the movement of the first rotating shaft 21 .

[0052] Furthermore, the active self-rotating unit 20 further includes a first limit pin 25, a first clamping nut 26, a first stop washer 27 and two first glands 28. The two first glands 28 are respectively arranged at both ends of the first bearing seat 24 and sleeved on the first rotating shaft 21, so as to realize dustproof and other protection for the first bearing 23. The first stop washer 27 is sleeved on the first rotating shaft 21 and abuts against the first gland 28 of the two first glands 28 away from the first elliptical gear 22. The first clamping nut 26 is threadedly connected to the first rotating shaft 21 and abuts against the first stop washer 27, so as to fix the corresponding first gland 28 on the first rotating shaft 21. The first limit pin 25 is arranged at one end of the first rotating shaft 21 close to the first clamping nut 26 to prevent the first clamping nut 26, the first stop washer 27 and other components from being separated from the first rotating shaft 21.

[0053] like Figure 1 As shown, the driven rotation unit 30 includes a second bearing 33 and a second bearing seat 34. The second bearing 33 is sleeved on the second rotating shaft 31. The second bearing seat 34 is sleeved on the second bearing 33 and carries the second bearing 33. That is, the second bearing 33 is fixed on the second bearing seat 34.

[0054] Furthermore, the driven self-rotating unit 30 further includes a second stop pin 35, a second clamping nut 36, a second stop washer 37 and two second glands 38. The two second glands 38 are respectively arranged at both ends of the second bearing seat 34 and sleeved on the second rotating shaft 31, so as to realize dustproof and other protection for the second bearing 33. The second stop washer 37 is sleeved on the second rotating shaft 31 and abuts against the second gland 38 of the two second glands 38 away from the second elliptical gear 32. The second clamping nut 36 is threadedly connected to the second rotating shaft 31 and abuts against the second stop washer 37, so as to fix the corresponding second gland 38 on the second rotating shaft 31. The second stop pin 35 is arranged at one end of the second rotating shaft 31 close to the second clamping nut 36 to prevent the second clamping nut 36, the second stop washer 37 and other components from being separated from the second rotating shaft 31.

[0055] Furthermore, the rotating mechanism 100 also includes a turntable 40, which is arranged on one side of the transmission unit 10, and the transmission unit 10 can rotate relative to the turntable 40, and the first bearing seat 24 is fixed to the turntable 40 by fasteners such as screws to achieve the installation of the first bearing seat 24.

[0056] Furthermore, the transmission unit 10 also includes a rotating member 13, and a mounting groove 111 is opened on the side surface of the first circular gear 11 facing the turntable 40. The rotating member 13 is installed in the mounting groove 111, and partially protrudes from the side surface of the first circular gear 11 facing the turntable 40, and abuts against the turntable 40, so that the rotation of the rotating member 13 is realized without interference between the turntable 40 and the first circular gear 11.

[0057] Preferably, the rotating member 13 is a steel ball, and the mounting groove 111 is filled with grease to make the rotation between the rotating disk 40 and the first circular gear 11 smoother.

[0058] like Figure 1 As shown, further, the rotating mechanism 100 also includes a bottom plate 50, a locking member 60 and an insulating unit 70. The bottom plate 50 is grounded, the first circular gear 11 is mounted on the bottom plate 50 through the locking member 60, the insulating unit 70 is sleeved on the locking member 60, and blocks and insulates the bottom plate 50 from the first circular gear 11, the negative pole of the bias structure (not shown) is connected to the first circular gear 11 and other components, and the positive pole is connected to the furnace body of the vacuum furnace. Therefore, the insulating unit 70 is set in the vacuum chamber to insulate the first circular gear 11 and the components matched therewith, so as to improve and control the energy of the charged particles in the vacuum plasma, and improve the bonding force between the target material and the object to be coated 101 during the coating process.

[0059] Specifically, the insulating unit 70 includes an insulating seat 71, an insulating sleeve 72 and an insulating cap 73. A penetrating mounting hole 112 is opened on the first circular gear 11. The insulating seat 71 is arranged between the first circular gear 11 and the base plate 50. The insulating sleeve 72 is installed in the mounting hole 112. One end of the locking member 60 passes through the mounting hole 112 and passes through the insulating seat 71, and is connected to the base plate 50. The insulating cap 73 is covered on a side surface of the first circular gear 11 close to the turntable 40 and blocks the mounting hole 112.

[0060] Preferably, one end of the insulating sleeve 72 has a first groove 721 and the other end has a boss 722. One end of the locking member 60 has a head 61. After the locking member 60 is connected to the base plate 50, the head 61 is accommodated in the first groove 721. The end of the insulating seat 71 close to the first circular gear 11 has a second groove 711. The boss 722 extends from the mounting hole 112 and is embedded in the second groove 711, thereby forming a complete insulating line as a whole to achieve insulation of the first circular gear 11.

[0061] Furthermore, the insulating unit 70 further includes a protective cover 74 , which is disposed between the first circular gear 11 and the bottom plate 50 and wraps the insulating seat 71 to protect the insulating seat 71 .

[0062] To further illustrate the advantages of the present invention, the following experiments were conducted to collect relevant data and make comparisons:

[0063] like Figure 7 and Figure 8 As shown, in the same vacuum furnace (No.: D19040701), there are 24 racks 200 with the same structure and size arranged on the second elliptical gear 32 in the vacuum furnace in the same circle array, and the adjacent racks 200 are evenly spaced and each rack 200 is hung with the same product to be coated 101. In order to ensure the consistency and accuracy of the experiment. The following regulations are made: The same product to be coated 101 with the same structure, shape and size is hung on the No. 1, No. 3, No. 5, and No. 7 racks 200, and each rack 200 has 12 layers of the product to be coated 101 along the vertical direction (the arrangement method is as follows Figure 8 As shown), the gear carrying the part 101 to be coated at position 1 is a circular gear; the gears carrying the part 101 to be coated at positions 3, 5 and 7 are elliptical gears. Among them, the ratio of the short axis to the long axis of the elliptical gear at position 3 is 1:1.3, the ratio of the short axis to the long axis of the elliptical gear at position 5 is 1:1.4, and the ratio of the short axis to the long axis of the elliptical gear at position 7 is 1:1.5. The vacuum furnace moves clockwise to coat the part 101 to be coated. After the coating is completed, the LAB values ​​of the first and second sides of the coated product are measured respectively, and compared with the standard LAB value, and the ΔE* of the coated product at each position and each layer is calculated respectively.94 , ΔL, ΔA, ΔB, and organize the charts at the same time.

[0064] Needs explanation, Fig. 9 ΔE* of the first and second sides of the coated product hung at position 1 94 , ΔL, ΔA, and ΔB values, where layer represents layer, S1-L represents the first side, and S1-S represents the second side. Fig.10 ΔE* of the first and second sides of the coated product hung at position 3 94 , ΔL, ΔA, and ΔB values, where layer represents layer, S3-L represents the first side, and S3-S represents the second side. Fig.11 ΔE* of the first and second sides of the coated product hung at position 5 94 , ΔL, ΔA, and ΔB values, where layer represents layer, S5-L represents the first side, and S5-S represents the second side. Fig.12 ΔE* of the first and second sides of the coated product hung at position 7 94 , ΔL, ΔA, and ΔB values, where layer represents layer, S7-L represents the first side, and S7-S represents the second side.

[0065] It is understandable that Fig. 9 It can be seen that the ΔE* of the first side of the same layer of coated products 94 Value and ΔE* of the second side 94 The difference between the values ​​is large, which means that there is a large color difference between the first side and the second side. Figure 10-12 It can be seen that the ΔE* of the first side of the same layer of coated products 94 Value and ΔE* of the second side 94 The difference between the values ​​is small, which means that the color difference between the first side and the second side is small. By comparison, it can be seen that the use of the elliptical gear in the present application to carry the part to be coated 101 and drive the part to be coated 101 to operate can improve the uniformity of film deposition at various locations of the product and significantly reduce the color difference and performance difference at different locations of the part to be coated 101 after coating.

[0066] At the same time, by comparison Figure 10-12 It is known that in Fig.11 In the figure, when the ratio of the minor axis to the major axis of the elliptical gear is 1:1.5, the ΔE* of the first side of the same layer of coated product is 94 Value and ΔE* of the second side 94 In other words, when the ratio of the minor axis to the major axis of the elliptical gear is 1:1.5, the uniformity of the film deposition at each location of the coated product is better, the color difference is negligible, and the performance consistency is better.

[0067] The technical features of the above embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0068] Those skilled in the art should recognize that the above embodiments are only used to illustrate the present invention, and are not intended to limit the present invention. As long as they are within the spirit of the present invention, appropriate changes and modifications to the above embodiments are within the scope of protection claimed by the present invention.

Claims

1. A rotating mechanism of a vacuum coating machine, arranged in a vacuum chamber in a vacuum furnace, for driving a to-be-coated object to move relative to a target surface, wherein the to-be-coated object has a first side and a second side arranged adjacent to each other, and the length of the first side is greater than the length of the second side; the rotating mechanism comprises a driving member, a transmission unit, an active self-rotation unit and a driven self-rotation unit, and the driving member is connected to the transmission unit; It is characterized in that The active self-rotating unit includes a first rotating shaft and a first elliptical gear, and the driven self-rotating unit includes a second rotating shaft and a second elliptical gear. The first rotating shaft cooperates with the transmission unit and rotates under the drive of the transmission unit. The first elliptical gear is fixed to one end of the first rotating shaft and rotates with the first rotating shaft. The second elliptical gear is fixed to one end of the second rotating shaft and is used to carry the part to be coated. The second elliptical gear is meshed with the first elliptical gear and is located in the same plane as the first elliptical gear, and the long axis of the second elliptical gear is perpendicular to the short axis of the first elliptical gear or the short axis of the second elliptical gear is perpendicular to the long axis of the first elliptical gear. The rotating mechanism further includes a rotating disk, and the active self-rotating unit further includes a first bearing and a first bearing seat. The rotating disk is arranged at one side of the transmission unit, and the transmission unit can rotate relative to the rotating disk. The first bearing is sleeved on the first rotating shaft, the first bearing seat is sleeved on the first bearing and carries the first bearing, and the first bearing seat is fixed to the rotating disk. The transmission unit comprises a first circular gear and a second circular gear, wherein the first circular gear is connected to the driving member, and the second circular gear is fixed to one end of the first rotating shaft close to the first elliptical gear and meshes with the first circular gear; The driven rotation unit includes a second bearing and a second bearing seat. The second bearing is sleeved on the second rotating shaft. The second bearing seat is sleeved on the second bearing and carries the second bearing.

2. The rotating mechanism of the vacuum coating machine according to claim 1, characterized in that: The ratio of the length of the short axis of the first ellipse to the length of the long axis of the first ellipse is 1:(1.1-1.7); And / or, the ratio of the length of the short axis of the second ellipse to the length of the long axis of the second ellipse is 1:(1.1-1.7).

3. The rotating mechanism of the vacuum coating machine according to claim 1, characterized in that: The transmission unit also includes a rotating member. A mounting groove is formed on a side surface of the first circular gear facing the turntable. The rotating member is mounted in the mounting groove and partially protrudes from a side surface of the first circular gear facing the turntable and abuts against the turntable.

4. The rotating mechanism of the vacuum coating machine according to claim 1, characterized in that: The rotating mechanism also includes a base plate, a locking piece and an insulating unit. The first circular gear is installed on the base plate through the locking piece. The insulating unit is sleeved on the locking piece and blocks and insulates the base plate from the first circular gear.

5. The rotating mechanism of the vacuum coating machine according to claim 4, characterized in that: The insulating unit includes an insulating seat, an insulating sleeve and an insulating cap. A penetrating mounting hole is opened on the first circular gear. The insulating seat is arranged between the first circular gear and the base plate. The insulating sleeve is installed in the mounting hole. One end of the locking member passes through the mounting hole and passes through the insulating seat, and is connected to the base plate. The insulating cap is arranged on a side surface of the first circular gear close to the turntable and blocks the mounting hole.

6. The rotating mechanism of the vacuum coating machine according to claim 5, characterized in that: One end of the insulating sleeve has a first recessed groove, and the other end has a boss, and one end of the locking member has a head, and the head is received in the first recessed groove after the locking member is connected to the bottom plate; The insulating seat has a second recessed groove at one end close to the first circular gear, and the boss extends out from the mounting hole and is embedded in the second recessed groove.

7. A vacuum coating machine for coating a part to be coated, characterized in that: It comprises a rotating mechanism as described in any one of claims 1 to 6, wherein the object to be coated is installed on the rotating mechanism and is driven by the rotating mechanism to rotate on its own or and / or to revolve relative to the target surface.

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