A three-axis gyroscope

Abstract

The present invention provides a three-axis gyroscope, which includes: a first drive frame, which can perform resonant motion along the Y axis; a second drive frame, which is parallel to the first drive frame and spaced a predetermined distance apart, and which can perform resonant motion in the opposite direction of the first drive frame along the Y axis; an X / Y gyro structure connected between the first drive frame and the second drive frame; a Z gyro structure connected between the first drive frame and the second drive frame and located on one side of the X / Y gyro structure; wherein the X / Y gyro structure and the Z gyro structure are independent of each other, and both the X / Y gyro structure and the Z gyro structure are driven by the first drive frame and the second drive frame. Compared with the prior art, the structure of the three-axis gyroscope in the present invention is overall reasonable and compact, and has a high degree of integration. When sensing angular velocities in different directions, due to the Coriolis effect, the X / Y gyro structure and the Z gyro structure are independent of each other and do not affect each other, which can reduce orthogonal errors and improve detection accuracy.

Description

[Technical field]

[0001] The present invention relates to the technical field of micromechanical systems, and in particular to a three-axis gyroscope. [Background technology]

[0002] A gyroscope is a sensor used to measure angular rate and is one of the core components of inertial technology. It plays an important role in modern industrial control, aerospace, national defense and military, and consumer electronics.

[0003] The development of gyroscope can be roughly divided into three stages:

[0004] The first stage is the traditional mechanical rotor gyroscope, which has high precision and plays an irreplaceable role in military strategic weapons such as nuclear submarines and intercontinental strategic missiles, but it is large in size, complex in manufacturing process, expensive, long in cycle and not suitable for mass production; the second stage is the optical detection gyroscope, mainly including laser gyroscope and fiber optic gyroscope, which mainly uses the Sagnac effect. Its advantages are no rotating parts and high precision. It plays an important role in navigation and aerospace, but it still faces the problems of large size, high cost and difficulty in integration; the third stage is the micromechanical gyroscope, which was developed in the 1990s. Its research started late, but it has developed rapidly with its unique advantages of small size, low power consumption, light weight, mass production, low price, strong overload resistance and integration. It is suitable for civil fields such as aircraft navigation, automobile manufacturing, digital electronics, industrial equipment and modern national defense and military fields such as drones, tactical missiles, smart bombs, and military aiming systems. It has broad application prospects and is attracting more and more attention.

[0005] As the demand in the consumer market increases, there are higher requirements for the size and performance of MEMS (Micro-Electro-Mechanical System) gyroscopes. Gyroscopes have also changed from single-axis gyroscopes to three-axis gyroscopes. Early three-axis gyroscopes consisted of three independent single-axis gyroscopes and needed to include a separate drive structure, so the overall structure size was large. In current consumer applications, single-chip three-axis gyroscopes are generally used, which are characterized by shared drive and reasonable layout of X / Y / Z gyroscope mass blocks. Despite this, three-axis gyroscopes also face the problems of large size, low integration, and large orthogonal error.

[0006] See Chinese invention patent CN108225295A, which discloses a three-axis gyroscope with tuning fork drive effect. The three-axis gyroscope structure disclosed in the patent cleverly designs the steering structure. The left and right mass blocks are used to detect the Y / Z axis angular velocity, and the central mass block is used to detect the X axis angular velocity. However, it is obvious that its integration is not high, and the Y / Z mass blocks and the shared mass block are prone to coupling; continue to refer to Chinese invention patent CN110926445A, which discloses a three-axis MEMS gyroscope. The micro-gyroscope structure disclosed in the patent is shared drive. Its innovation lies in the novel design of the X / Y gyroscope structure, and the X / Y axis gyroscopes interact and are set in the middle of the drive frame and supported by the central anchor point. The Z axis gyroscopes are distributed on both sides of the X / Y gyroscopes and connected to the middle gyroscope structure. Its overall structural design is novel and reasonable, and its integration is high, but its Z axis gyroscope is not directly decoupled, and it may face the problems of low sensitivity and large orthogonal error.

[0007] Therefore, it is urgent to propose a new technical solution to solve the problems of low integration and large orthogonal error of the three-axis gyroscope in the prior art. [Summary of the invention]

[0008] One of the purposes of the present invention is to provide a three-axis gyroscope, which has the advantages of high integration and small orthogonal error.

[0009] According to one aspect of the present invention, the present invention provides a three-axis gyroscope, which includes: a first drive frame, which can perform resonant motion along the Y axis; a second drive frame, which is parallel to the first drive frame and separated by a predetermined distance, and can perform resonant motion along the Y axis in the opposite direction to the first drive frame; an X / Y gyroscope structure connected between the first drive frame and the second drive frame; a Z gyroscope structure connected between the first drive frame and the second drive frame and located on one side of the X / Y gyroscope structure; wherein the X / Y gyroscope structure and the Z gyroscope structure are independent of each other, and the X / Y gyroscope structure and the Z gyroscope structure are both driven jointly by the first drive frame and the second drive frame.

[0010] Compared with the prior art, the X / Y gyro structure and the Z gyro structure of the three-axis gyroscope in the present invention are driven by the same two drive frames, and the X / Y gyro structure and the Z gyro structure are independent of each other. The overall structure of the three-axis gyroscope is reasonable and compact, and the integration is high. When sensing angular velocities in different directions, due to the Coriolis effect, the X / Y gyro structure and the Z gyro structure are independent of each other and do not affect each other, which can reduce orthogonal errors and improve detection accuracy.

Brief Description of the Drawings

[0011] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0012] Figure 1 is a schematic diagram of the overall structure of a three-axis gyroscope in one embodiment of the present invention;

[0013] Figure 2 For the present invention Figure 1 The structural schematic diagram of the X / Y gyro structure shown;

[0014] Figure 3 For the present invention Figure 1 The structural schematic diagram of the X / Y center coupling beam structure shown;

[0015] Figure 4 For the present invention Figure 1 The structural schematic diagram of the Z gyro structure shown;

[0016] Figure 5 For the present invention Figure 1 The schematic diagram of the three-axis gyroscope in the driving state shown;

[0017] Figure 6 For the present invention Figure 1 The schematic diagram of the three-axis gyroscope during X-axis detection is shown;

[0018] Figure 7 For the present invention Figure 1 The schematic diagram of the three-axis gyroscope Y-axis detection is shown;

[0019] Figure 8 For the present invention Figure 1 The schematic diagram of the three-axis gyroscope Z-axis detection is shown;

[0020] Fig. 9 for Figure 1 An enlarged schematic diagram of the drive frame region is shown;

[0021] Fig.10 for Figure 1 An enlarged schematic diagram of the diagonal beam area is shown;

[0022] Fig.11 for Figure 1 An enlarged schematic diagram of the Z mass block area is shown.

[0023] Among them, 1a-upper driving frame (or first driving frame); 1b-lower driving frame (or second driving frame); 2a-X upper mass block (or first mass block); 2b-X lower mass block (or second mass block); 2c-Y left mass block (or third mass block); 2d-Y right mass block (or fourth mass block); 2e-Z upper mass block (or first Z mass block); 2f-Z lower mass block (or second Z mass block); 2g-upper detection frame (or first Z detection frame); 2h-lower detection frame (or second Z detection frame);

[0024] 3a.1~3a.16-driving electrodes; 3b.1~3b.8-driving feedback electrodes; 3c.1 and 3c.2-X-axis detection electrodes; 3d.1 and 3d.2-Y-axis detection electrodes; 3e.1-first Z-axis detection electrode, 3e.2-second Z-axis detection electrode;

[0025] 4a.1~4a.8-driving frame support beam; 4b.1-first X / Y driving coupling beam, 4b.2-second X / Y driving coupling beam; 4b.3-first Z driving coupling beam 4b.3; 4b.4-second Z driving coupling beam; 4c.1~4c.4-X mass block support beam; 4d.1~4d.4-Y mass block support beam; 4e.1~4e.4-oblique beam; 4f.1 and 4f.2-X mass block coupling beam (or X / Y mass block coupling beam); 4g.1 and 4g.2-Y mass block coupling beam (or X / Y mass block coupling beam); 4h-X / Y center coupling mechanism; 4i-X / Y center coupling beam; 4i.1-cross-shaped coupling center beam 4i.1; 4i.2-first coupling folding beam; 4i.3-second coupling folding; 4i.4-L-type intermediate support beam; 4j.1~4j.8-Z detection frame support beam; 4k.1~4k.8-Z detection frame coupling beam; 4L.1~4L.4-first Z mass block coupling beam; 4L.5~4L.8-second Z mass block coupling beam; 4m.1 and 4m.2-T-type levers;

[0026] 5a.1~5a.6-driving frame support beam anchor point; 5b.1~5b.4-X mass block anchor point; 5c.1~5c.4-Y mass block anchor point; 5d.1~5d.4-X / Y center coupling beam anchor point; 5e.1~5e.5-Z detection frame support beam anchor point; 5f.1~5f.6-Z detection frame coupling beam anchor point. [Specific implementation method]

[0027] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] The term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments. Unless otherwise specified, the words "connected", "connected", and "connected" herein that indicate electrical connection all refer to direct or indirect electrical connection.

[0029] In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore, cannot be understood as limiting the present invention. In the description of the present invention, "plurality" means two or more, unless otherwise clearly and specifically defined.

[0030] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "coupled" and the like should be understood in a broad sense; for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] In view of the problems existing in the prior art, the present invention provides a three-axis gyroscope. Figure 1 As shown, it is a schematic diagram of the overall structure of a three-axis gyroscope in one embodiment of the present invention.

[0032] Figure 1The three-axis gyroscope shown includes a first drive frame 1a, a second drive frame 1b, an X / Y gyro structure and a Z gyro structure. The first drive frame 1a can perform resonant motion along the Y axis. The second drive frame 1b is parallel to the first drive frame 1a and is spaced a predetermined distance apart, and can perform resonant motion along the Y axis in the opposite direction to the first drive frame 1a. The X / Y gyro structure is connected between the first drive frame 1a and the second drive frame 1b, and can sense the X-axis angular velocity and the Y-axis angular velocity. The Z gyro structure is connected between the first drive frame 1a and the second drive frame 1b and is located on one side of the X / Y gyro structure, and can sense the Z-axis angular velocity. Among them, the X / Y gyro structure and the Z gyro structure are independent of each other and are not directly connected to each other. The X / Y gyro structure and the Z gyro structure are both driven by the first drive frame 1a and the second drive frame 1b. The overall structure of the three-axis gyroscope is reasonable and compact, and the integration is high. When sensing angular velocities in different directions, due to the Coriolis effect, the X / Y gyro structure and the Z gyro structure are independent of each other and do not affect each other, thereby reducing orthogonal errors and improving detection accuracy.

[0033] In order to better illustrate the structure of the three-axis gyroscope shown in the present invention, a three-dimensional rectangular coordinate system can be established. Figure 1 In the illustrated embodiment, in the plane where the base of the three-axis gyroscope is located, the direction parallel to the first driving frame 1a and the second driving frame 1b is the X-axis, the direction perpendicular to the first driving frame 1a and the second driving frame 1b is the Y-axis, the Z-axis is determined by the X-axis and the Y-axis as the coordinate axes, and the center point A of the X / Y gyroscope structure is the coordinate origin. A three-dimensional rectangular coordinate system established by the X-axis, the Y-axis and the Z-axis is in Figure 1 This is reflected in the figure, where the X-axis is along the left-right direction and the Y-axis is along the up-down direction.

[0034] like Figure 1 and Fig. 9 As shown, the three-axis gyroscope also includes: first drive frame support beam anchor points 5a.1, 5a.2 and 5a.5; first drive frame support beams 4a.1, 4a.2, 4a.5 and 4a.6, which are connected between the first drive frame support beam anchor points 5a.1, 5a.2, 5a.5 and the first drive frame 1a; second drive frame support beam anchor points 5a.3, 5a.4 and 5a.6; second drive frame support beams 4a.3, 4a.4, 4a.7 and 4a.8, which are connected between the second drive frame support beam anchor points 5a.3, 5a.4, 5a.6 and the second drive frame 1b; first drive electrodes 3a.1-3a.8 and first drive feedback electrodes 3b.1-3b.4 arranged on both sides of the first drive frame 1a; second drive electrodes 3a.9-3a.16 and second drive feedback electrodes 3b.5-3b.8 arranged on both sides of the second drive frame 1b.

[0035] The first drive electrodes 3a.1-3a.8, the first drive feedback electrodes 3b.1-3b.4, the second drive electrodes 3a.9-3a.16 and the second drive feedback electrodes 3b.5-3b.8 are fixedly arranged on a substrate (not shown); the first drive frame 1a is connected to the first drive frame support beam anchor points 5a.1, 5a.2 and 5a.5 through the first drive frame support beams 4a.1, 4a.2, 4a.5 and 4a.6, and the first drive frame 1a and the first drive frame support beams 4a.1, 4a.2, 4a.5 and 4a.6 are suspended above the substrate; the second drive frame 1b is connected to the second drive frame support beam anchor points 5a.3, 5a.4 and 5a.6 through the second drive frame support beams 4a.3, 4a.4, 4a.7 and 4a.8, and the second drive frame 1b and the second drive frame support beams 4a.3, 4a.4, 4a.7 and 4a.8 are suspended above the substrate. The driving frames 1a, 1b are of the same thickness as the driving frame support beams 4a.1-4a.8 and are suspended structures, while the anchor points 5a.1-5a.8 are non-suspended structures and are directly connected to the base for support.

[0036] exist Figure 1 and Fig. 9 In the specific embodiment shown, the first driving frame 1a and the second driving frame 1b have the same structure, are arranged symmetrically about the X-axis (or symmetrically distributed up and down), and the first driving frame 1a and the second driving frame 1b are placed parallel to the X-axis.

[0037] exist Figure 1 and Fig. 9In the specific embodiment shown, there are eight first drive electrodes 3a.1-3a.8, among which four first drive electrodes 3a.1, 3a.3, 3a.5 and 3a.7 are located on the upper side (or top side) of the first drive frame 1a and are placed parallel to the X-axis in sequence, and the other four first drive electrodes 3a.2, 3a.4, 3a.6 and 3a.8 are located on the lower side (or bottom side) of the first drive frame 1a and are placed parallel to the X-axis in sequence, and the first drive electrodes located on the upper and lower sides of the first drive frame 1a are opposite to each other in pairs, for example, the first drive electrodes 3a.1 and 3a.2 located on the upper and lower sides of the first drive frame 1a are opposite to each other, the first drive electrodes 3a.3 and 3a.4 are opposite to each other, the first drive electrodes 3a.5 and 3a.6 are opposite to each other, and the first drive electrodes 3a.7 and 3a.8 are opposite to each other. There are eight second drive electrodes 3a.9-3a.16, among which four second drive electrodes 3a.9, 3a.11, 3a.13 and 3a.15 are located on the lower side (or bottom side) of the second drive frame 1b and are placed parallel to the X-axis in sequence, and the other four second drive electrodes 3a.10, 3a.12, 3a.14 and 3a.16 are located on the upper side (or top side) of the second drive frame 1b and are placed parallel to the X-axis in sequence. The second drive electrodes located on the upper and lower sides of the second drive frame 1b are opposite to each other in pairs. For example, the second drive electrodes 3a.9 and 3a.10 located on the upper and lower sides of the second drive frame 1b are opposite to each other, the second drive electrodes 3a.11 and 3a.12 are opposite to each other, the second drive electrodes 3a.13 and 3a.14 are opposite to each other, and the second drive electrodes 3a.15 and 3a.16 are opposite to each other.

[0038] It should be noted that, in other embodiments, the number of first drive electrodes may be 2, 4, 6 or more even numbers; the number of second drive electrodes may be 2, 4, 6 or more even numbers. That is, the number of first drive electrodes may be 2m, wherein m first drive electrodes are located on the upper side of the first drive frame 1a and are sequentially placed parallel to the X-axis, and the other m first drive electrodes are located on the lower side of the first drive frame 1a and are sequentially placed parallel to the X-axis, and the first drive electrodes located on the upper and lower sides of the first drive frame 1a are opposite to each other; the number of second drive electrodes may be 2m, wherein m second drive electrodes are located on the upper side of the second drive frame 1b and are sequentially placed parallel to the X-axis, and the other m second drive electrodes are located on the lower side of the second drive frame 1b and are sequentially placed parallel to the X-axis, and the second drive electrodes located on the upper and lower sides of the second drive frame 1b are opposite to each other, wherein m is a natural number greater than or equal to 1.

[0039] exist Figure 1 and Fig. 9In the specific embodiment shown, there are four first drive feedback electrodes 3b.1-3b.4, among which two first drive feedback electrodes 3b.1 and 3b.3 are located on the upper side (or top side) of the first drive frame 1a and are placed parallel to the X-axis in sequence, and the other two first drive feedback electrodes 3b.2 and 3b.4 are located on the lower side (or bottom side) of the first drive frame 1a and are placed parallel to the X-axis in sequence, and the first drive feedback electrodes located on the upper and lower sides of the first drive frame 1a are opposite to each other, for example, the first drive feedback electrodes 3b.1 and 3b.2 located on the upper and lower sides of the first drive frame 1a are opposite to each other, and the first drive feedback electrodes 3b.3 and 3b.4 are opposite to each other. There are four second drive feedback electrodes 3b.5-3b.8, among which two second drive feedback electrodes 3b.5 and 3b.7 are located on the upper side (or top side) of the second drive frame 1b and are placed parallel to the X-axis in sequence, and the other two second drive feedback electrodes 3b.6 and 3b.8 are located on the lower side (or bottom side) of the second drive frame 1b and are placed parallel to the X-axis in sequence. The second drive feedback electrodes located on the upper and lower sides of the second drive frame 1b are opposite to each other, for example, the second drive feedback electrodes 3b.5 and 3b.6 located on the upper and lower sides of the second drive frame 1b are opposite to each other, and the second drive feedback electrodes 3b.7 and 3b.8 are opposite to each other.

[0040] It should be noted that, in other embodiments, the number of first drive feedback electrodes may be 2, 6 or more even numbers; the number of second drive feedback electrodes may be 2, 6 or more even numbers. That is to say, the number of first drive feedback electrodes may be 2n, wherein n first drive feedback electrodes are located on the upper side of the first drive frame 1a and are placed in parallel to the X-axis in sequence, and the other n first drive feedback electrodes are located on the lower side of the first drive frame 1a and are placed in parallel to the X-axis in sequence, and the first drive feedback electrodes located on the upper and lower sides of the first drive frame are opposite to each other in pairs; the number of second drive feedback electrodes may be 2n, wherein n second drive feedback electrodes are located on the upper side of the second drive frame 1b and are placed in parallel to the X-axis in sequence, and the other n second drive feedback electrodes are located on the lower side of the second drive frame 1b and are placed in parallel to the X-axis in sequence, and the second drive feedback electrodes located on the upper and lower sides of the second drive frame are opposite to each other in pairs, wherein n is a natural number greater than or equal to 1.

[0041] exist Figure 1 and Fig. 9In the specific embodiment shown, the first drive frame 1a is a T-shaped structure, which includes a crossbar portion and a vertical bar portion connected to the middle of the crossbar; 8 first drive electrodes 3a.1-3a.8 are distributed on the upper and lower sides of the middle of the crossbar portion of the first drive frame 1a; 4 first drive feedback electrodes 3b.1-3b.4 are distributed on the upper and lower sides of both ends of the crossbar portion of the first drive frame 1a. The second drive frame 1b is a T-shaped structure, which includes a crossbar portion and a vertical bar portion connected to the middle of the crossbar portion; 8 second drive electrodes 3a.9-3a.16 are distributed on the upper and lower sides of the middle of the crossbar portion of the second drive frame 1b; 4 second drive feedback electrodes 3b.5-3b.8 are distributed on the upper and lower sides of both ends of the crossbar portion of the second drive frame 1b.

[0042] exist Figure 1 and Fig. 9In the specific embodiment shown, there are three first drive frame support beam anchor points 5a.1, 5a.2, and 5a.5, wherein two first drive frame support beam anchor points 5a.1 and 5a.2 are respectively located at the two ends of the crossbar portion of the first drive frame 1a, and another first drive frame support beam anchor point 5a.5 is located near the vertical bar portion of the first drive frame 1a; there are four first drive frame support beams 4a.1, 4a.2, 4a.5, and 4a.6, wherein two first drive frame support beams 4a.1 and 4a.2 are respectively located at the first drive frame 1a. The two ends of the cross bar portion of the frame 1a; the other two first driving frame support beams 4a.5 and 4a.6 are respectively located on the left and right sides of the vertical bar portion of the first driving frame 1a; wherein, the two first driving frame support beam anchor points 5a.1 and 5a.2 are respectively connected to the two ends of the cross bar portion of the first driving frame 1a through the two first driving frame support beams 4a.1 and 4a.2, and the other first driving frame support beam anchor point 5a.5 is connected to the vertical bar portion of the first driving frame 1a through the other two first driving frame support beams 4a.5 and 4a.6. There are three second drive frame support beam anchor points 5a.3, 5a.4, and 5a.6, of which two second drive frame support beam anchor points 5a.3 and 5a.4 are respectively located at the two ends of the crossbar of the second drive frame 1b, and another second drive frame support beam anchor point 5a.6 is located near the vertical bar of the second drive frame 1b; there are four second drive frame support beams 4a.3, 4a.4, 4a.7, and 4a.8, of which two second drive frame support beams 4a.3 and 4a.4 are respectively located at the Both ends of the cross bar; the other two second drive frame support beams 4a.7 and 4a.8 are respectively located on the left and right sides of the vertical bar of the second drive frame 1b; among them, the two second drive frame support beam anchor points 5a.3 and 5a.4 are respectively connected to the two ends of the cross bar of the second drive frame 1b through the two second drive frame support beams 4a.3 and 4a.4, and the other second drive frame support beam anchor point 5a.6 is connected to the vertical bar of the second drive frame 1b through the other two second drive frame support beams 4a.7 and 4a.8.

[0043] It should be noted that, in another embodiment, the first driving frame support beam anchor point 5a.5 can be two ( Figure 1 The first drive frame support beam anchor points 5a.5 shown in the figure can be regarded as two first drive frame support beam anchor points of an integrated structure), and the two first drive frame support beam anchor points 5a.5 are respectively connected to the vertical rod part of the first drive frame 1a through the other two first drive frame support beams 4a.5 and 4a.6; the second drive frame support beam anchor point 5a.6 can be two ( Figure 1The second drive frame support beam anchor points 5a.6 shown can be regarded as two second drive frame support beam anchor points of an integrated structure), and the two second drive frame support beam anchor points 5a.6 are respectively connected to the vertical rod parts of the second drive frame 1b through the other two second drive frame support beams 4a.7 and 4a.8.

[0044] exist Figure 1 and Fig. 9 In the specific embodiment shown, the first drive frame support beams 4a.1, 4a.2, 4a.5, 4a.6 and the second drive frame support beams 4a.3, 4a.4, 4a.7, 4a.8 are all U-shaped beams, and the opening direction of the U-shaped beams is parallel to the X-axis; the two ends of the cross bar portion of the first drive frame 1a are respectively formed with a first receiving area and a second receiving area, and the two first drive frame support beams 4a.1 and 4a.2 are respectively placed in the first receiving area and the second receiving area; the two ends of the cross bar portion of the second drive frame 1b are respectively formed with a third receiving area and a fourth receiving area, and the two second drive frame support beams 4a.3 and 4a.4 are respectively placed in the third receiving area and the fourth receiving area. Among them, the first drive frame support beams 4a.1, 4a.2, 4a.5, 4a.6 and the second drive frame support beams 4a.3, 4a.4, 4a.7, 4a.8 are symmetrically distributed about the X-axis; the first drive frame support beam anchor points 5a.1, 5a.2, 5a.5 and the second drive frame support beam anchor points 5a.3, 5a.4, 5a.6 are symmetrically distributed about the X-axis; the first drive electrodes 3a.1~3a.8 and the second drive electrodes 3a.9~3a.16 are symmetrically distributed about the X-axis; the first drive feedback electrodes 3b.1~3b.4 and the second drive feedback electrodes 3b.5~3b.8 are symmetrically distributed about the X-axis.

[0045] like Figure 5 As shown, by applying a driving voltage to the first driving electrodes 3a.1-3a.8, the first driving frame 1a is driven to perform resonant motion along the Y axis; by applying a driving voltage to the second driving electrodes 3a.9-3a.16, the second driving frame 1b is driven to perform resonant motion along the Y axis in the opposite direction to the first driving frame 1a. Figure 5 Only one movement direction of the first driving frame 1a and the second driving frame 1b along the Y axis is given as an example. For a detailed scheme of applying a driving voltage to the driving electrode to drive the driving frame to perform resonant motion along the Y axis, reference can be made to the existing related technology and will not be described in detail in this article.

[0046] exist Figure 1 , Figure 2 and Fig.10In the illustrated embodiment, the X / Y gyro structure includes: a first X / Y drive coupling beam 4b.1, a second X / Y drive coupling beam 4b.2, a first mass block 2a, a second mass block 2b, a third mass block 2c, a fourth mass block 2d, four oblique beams 4e.1 to 4e.4, eight mass block support beams 4c.1 to 4c.4 and 4d.1 to 4d.4, and eight mass block anchor points 5b.1 to 5b.4 and 5c.1 to 5c.4. Among them, the first mass block 2a, the second mass block 2b, the third mass block 2c and the fourth mass block 2d are respectively arranged at four positions of the upper, lower, left and right of the center point A of the X / Y gyro structure, the first mass block 2a is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the second mass block 2b is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the first mass block 2a is connected to the first driving frame 1a through the first X / Y driving coupling beam 4b.1, and the second mass block 2b is connected to the second driving frame 2b through the second X / Y driving coupling beam 4b.2. The mass block anchor points 5b.1~5b.4 and 5c.1~5c.4 are located on the outside of the four mass blocks 2a~2d of the X / Y gyro structure; the mass block support beams 4c.1~4c.4 and 4d.1~4d.4 are located on the outside of the four mass blocks 2a~2d of the X / Y gyro structure, and each mass block of the X / Y gyro structure is connected to the mass block anchor point on its outside through the mass block support beam on its outside; the four oblique beams 4e.1~4e.4 are respectively located between each two adjacent mass blocks in the X / Y gyro structure, and each two adjacent mass blocks in the X / Y gyro structure are connected through the oblique beam located between them. Among them, when the first driving frame 1a performs resonant motion along the Y-axis and the second driving frame 1b performs resonant motion along the Y-axis in the opposite direction to that of the first driving frame 1a, the first driving frame 1a drives the first mass block 2a to perform resonant motion along the Y-axis through the first X / Y driving coupling beam 4b.1, and the second driving frame 1b drives the second mass block 2b to perform resonant motion along the Y-axis in the opposite direction to that of the first mass block 2a through the second X / Y driving coupling beam 4b.2, and the first mass block 2a and the second mass block 2b drive the third mass block 2c to perform resonant motion along the X-axis through the corresponding oblique beams (for example, oblique beams 4e.1 and 4e.3), and drive the fourth mass block 2d to perform resonant motion along the X-axis in the opposite direction to that of the third mass block 2c through the corresponding oblique beams (for example, oblique beams 4e.2 and 4e.4).

[0047] Please refer to Figure 5As shown, when the first driving frame 1a drives the first mass block 2a to approach the center point A of the X / Y gyro structure along the Y axis through the first X / Y driving coupling beam 4b.1, and the second driving frame 1b drives the second mass block 2b to approach the center point A of the X / Y gyro structure along the Y axis through the second X / Y driving coupling beam 4b.2, the first mass block 1a and the second mass block 1b drive the third mass block 2c and the fourth mass block 2d to approach the center point A of the X / Y gyro structure along the X axis through the corresponding oblique beams 4e.1 to 4e.4; when When the first driving frame 1a drives the first mass block 2a away from the center point A of the X / Y gyro structure along the Y axis through the first X / Y driving coupling beam 4b.1, and the second driving frame 1b drives the second mass block 2b away from the center point A of the X / Y gyro structure along the Y axis through the second X / Y driving coupling beam 4b.2, the first mass block 2a and the second mass block 2b drive the third mass block 2c and the fourth mass block 2d away from the center point A of the X / Y gyro structure along the X axis through the corresponding inclined beams 4e.1~4e.4.

[0048] In one embodiment, the X / Y gyro structure also includes: an X / Y center coupling beam structure (not marked) located at the center point A of the X / Y gyro structure; four X / Y mass block coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2 respectively connected to the inner sides of the corresponding mass blocks, each X / Y mass block coupling beam is connected to the X / Y center coupling beam structure; a first X-axis detection electrode 3c.1 arranged under the first mass block 2a; a second X-axis detection electrode 3c.2 arranged under the second mass block 2b; a first Y-axis detection electrode 3d.1 arranged under the third mass block 2c; and a second Y-axis detection electrode 3d.2 arranged under the fourth mass block 2d. When the X-axis angular velocity input is sensed, the first mass block 2a and the second mass block 2b will move in opposite directions along the Z-axis direction. The first X-axis detection electrode 3c.1 detects the change in distance from the first mass block 2a, and the second X-axis detection electrode 3c.2 detects the change in distance from the second mass block 2b. Specifically, after being sensitive to the X-axis angular velocity, the capacitance of the first X-axis detection electrode 3c.1 and the capacitance of the second X-axis detection electrode 3c.2 increase and decrease respectively, and the difference between the two is used to obtain the capacitance change caused by the X-axis angular velocity, and then the input X-axis angular velocity is obtained. When the Y-axis angular velocity input is sensed, the third mass block 2c and the fourth mass block 2d move in opposite directions along the Z-axis direction, and the first Y-axis detection electrode 3d.1 detects the change in distance from the third mass block 2c, and the second Y-axis detection electrode 3d.2 detects the change in distance from the fourth mass block 2d. Specifically, after being sensitive to the Y-axis angular velocity, the capacitance of the first Y-axis detection electrode 3d.1 and the capacitance of the second Y-axis detection electrode 3d.2 increase and decrease respectively, and the difference between the two is used to obtain the capacitance change caused by the Y-axis angular velocity, and then the input Y-axis angular velocity is obtained.

[0049] exist Figure 1 , Figure 2 and Fig.10 In the specific embodiment shown, the four inclined beams 4e.1 to 4e.4 are all U-shaped beams, one end of which is connected to one of the corresponding two adjacent mass blocks, and the other end of which is connected to the other of the corresponding two adjacent mass blocks, and the opening of the U-shaped beam points to the center point A of the X / Y gyro structure. For example, the inclined beam 4e.1 is located between the first mass block 2a and the third mass block 2c, one end of which is connected to the first mass block 2a, and the other end of which is connected to the third mass block 2c, and the opening of the inclined beam 4e.1 points to the center point A of the X / Y gyro structure; the inclined beam 4e.2 is located between the first mass block 2a and the fourth mass block 2d, one end of which is connected to the first mass block 2a, and the other end of which is connected to the fourth mass block 2d, and the opening of the inclined beam 4e.2 points to the center point of the X / Y gyro structure. A; the inclined beam 4e.3 is located between the second mass block 2b and the third mass block 2c, one end of which is connected to the second mass block 2b, the other end of which is connected to the third mass block 2c, and the opening of the inclined beam 4e.3 points to the center point A of the X / Y gyro structure; the inclined beam 4e.4 is located between the second mass block 2b and the fourth mass block 2d, one end of which is connected to the second mass block 2b, the other end of which is connected to the fourth mass block 2d, and the opening of the inclined beam 4e.4 points to the center point A of the X / Y gyro structure. A certain number of damping holes can be set on the mass blocks 2a~2d of the X / Y gyro structure to reduce damping and improve the quality factor and sensitivity of the gyro.

[0050] exist Figure 1 , Figure 2 and Fig.10 In the specific embodiment shown, the four X / Y mass block coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2 have the same structure, and the four X / Y mass block coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2 are symmetrical about the X-axis and the Y-axis as a whole, and each of the X / Y mass block coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2 includes a plurality of hollow straight beam portions whose lengths gradually decrease from the outside to the inside, and a connecting portion connecting the hollow straight beams; wherein the X / Y mass block coupling beams 4f.1 and 4f.2 located on the upper and lower sides of the X / Y central coupling beam structure are placed parallel to the X-axis (or placed in the left-right direction), and the X / Y mass block coupling beams 4g.1 and 4g.2 located on the left and right sides of the X / Y central coupling beam structure are placed parallel to the Y-axis (or placed in the up-down direction).

[0051] exist Figure 1 , Figure 2 and Fig.10In the specific embodiment shown, there are 8 mass block anchor points 5b.1~5b.4 and 5c.1~5c.4, and every two mass block anchor points correspond to a mass block in the X / Y gyro structure and are located outside the mass block, wherein the mass block anchor points 5b.1 and 5b.2 are located outside the first mass block 2a, the mass block anchor points 5b.3 and 5b.4 are located outside the second mass block 2b, the mass block anchor points 5c.1 and 5c.3 are located outside the third mass block 2c, and the mass block anchor points 5c.2 and 5c.4 are located outside the fourth mass block 2d; there are 8 mass block support beams 4c.1~4c.4 and 4d.1~4d.4, and every two mass block support beams correspond to a mass block in the X / Y gyro structure and are located outside the mass block, wherein the mass block support beams 4c.1 and 4c.2 are located outside the first mass block 2a, and the mass block support beams 4c.3 and 4d.4 are located outside the c.4 is located on the outside of the second mass block 2b, the mass block support beams 4d.1 and 4d.3 are located on the outside of the third mass block 2c, and the mass block support beams 4d.2 and 4d.4 are located on the outside of the fourth mass block 2d; each mass block in the X / Y gyro structure is connected to the two mass block anchor points on its outside through the two mass block support beams on its outside, wherein the first mass block 2a is connected to the mass block anchor points 5b.1 and 5b.2 respectively through the mass block support beams 4c.1 and 4c.2, the second mass block 2b is connected to the mass block anchor points 5b.3 and 5b.4 respectively through the mass block support beams 4c.3 and 4c.4, the third mass block 2c is connected to the mass block anchor points 5c.1 and 5c.3 respectively through the mass block support beams 4d.1 and 4d.3, and the fourth mass block 2d is connected to the mass block anchor points 5c.2 and 5c.4 respectively through the mass block support beams 4d.2 and 4d.4.

[0052] Among them, the two mass block support beams 4c.1 and 4c.2 outside the first mass block 2a are respectively located at the left and right ends of the first X / Y drive coupling beam 4b.1; the two mass block anchor points 5b.1 and 5b.2 outside the first mass block 2a are respectively located at the left and right ends of the first X / Y drive coupling beam 4b.1; the two mass block support beams 4c.3 and 4c.4 outside the second mass block 2b are respectively located at the left and right ends of the second X / Y drive coupling beam 4b.2; the two mass block anchor points 5b.3 and 5b.4 outside the second mass block 2b are respectively located at the left and right ends of the second X / Y drive coupling beam 4b.2; the two mass block support beams 4d.1 and 4d.3 outside the third mass block 2c are respectively located at the upper and lower ends of the outside of the third mass block 2c; the two mass block anchor points 5c.1 outside the third mass block 2c and 5c.3 are respectively located at the upper and lower ends of the outer side of the third mass block 2c; the two mass block support beams 4d.2 and 4d.4 on the outer side of the fourth mass block 2d are respectively located at the upper and lower ends of the outer side of the fourth mass block 2d; the two mass block anchor points 5c.2 and 5c.4 on the outer side of the fourth mass block 2d are respectively located at the upper and lower ends of the outer side of the fourth mass block 2d; the two mass block support beams 4c.1, 4c.2 on the outer side of the first mass block 2a and the two mass block support beams 4c.3, 4c.4 on the outer side of the second mass block 2b are all U-shaped beams, and the opening direction of the U-shaped beam is parallel to the X-axis; the two mass block support beams 4d.1, 4d.3 on the outer side of the third mass block 2c and the two mass block support beams 4d.2, 4d.4 on the outer side of the fourth mass block 2d are folding beams, and the opening direction (or folding direction) of the folding beam is parallel to the Y-axis.

[0053] exist Figure 1 and Figure 2In the specific embodiment shown, the first X / Y drive coupling beam 4b.1 and the second X / Y drive coupling beam 4b.2 have the same structure and are symmetrical about the X-axis; the four mass blocks 2a~2d in the X / Y gyro structure have the same structure, and all include a rectangular portion and an isosceles trapezoidal portion; the four mass blocks 2a~2d are symmetrical about the X-axis and the Y-axis as a whole; the four oblique beams 4e.1~4e.4 are symmetrical about the X-axis and the Y-axis as a whole; the two mass block support beams 4c.1 and 4c.2 outside the first mass block 2a and the two mass block support beams 4c.3 and 4c.4 outside the second mass block 2b are symmetrical about the X-axis and the Y-axis as a whole. Symmetrical; the two mass block anchor points 5b.1 and 5b.2 on the outside of the first mass block 2a and the two mass block anchor points 5b.3 and 5b.4 on the outside of the second mass block 2b are symmetrical about the X-axis and the Y-axis as a whole; the two mass block support beams 4d.1 and 4d.3 on the outside of the third mass block 2c and the two mass block support beams 4d.2 and 4d.4 on the outside of the fourth mass block 2d are symmetrical about the X-axis and the Y-axis as a whole; the two mass block anchor points 5c.1 and 5c.3 on the outside of the third mass block 2c and the two mass block anchor points 5c.2 and 5c.4 on the outside of the fourth mass block 2d are symmetrical about the X-axis and the Y-axis as a whole. Among them, the Y-axis detection electrodes 3d.1 and 3d.2, the X-axis detection electrodes 3c.1 and 3c.2, and the mass block anchor points 5b.1~5b.4 and 5c.1~5c.4 are fixedly arranged on the substrate; the four mass blocks 2a~2d of the X / Y gyro structure, the inclined beams 4e.1~4e.4, the X / Y drive coupling beams 4b.1 and 4b.2, the X / Y mass block coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2, and the mass block support beams 4c.1~4c.4 and 4d.1~4d.4 are suspended above the substrate.

[0054] exist Figure 1 and Figure 3 In the embodiment shown, the X / Y center coupling beam structure includes:

[0055] An X / Y center coupling mechanism 4h, in which an X / Y space is defined;

[0056] An X / Y center coupling beam 4i, which is located in the X / Y space;

[0057] X / Y center coupling beam anchor points 5d.1 to 5d.4, which are located in the X / Y space;

[0058] Among them, the X / Y center coupling mechanism 4h is connected to the X / Y center coupling beam anchor points 5d.1~5d.4 through the X / Y center coupling beam 4i, and the X / Y center coupling mechanism 4h is connected to the four mass blocks 2a~2d of the X / Y gyro structure through the four X / Y mass block coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2 respectively.

[0059] exist Figure 1 and Figure 3 In the specific embodiment shown, the X / Y center coupling beam 4i includes a cross-shaped coupling center beam 4i.1, a first coupling folded beam 4i.2 and a second coupling folded beam 4i.3, wherein the intersection of the cross-shaped coupling center beam 4i.1 is located at the center point A of the X / Y gyroscope structure. There are four X / Y center coupling beam anchor points 5d.1~5d.4, which are respectively located in the four areas divided by the cross-shaped coupling center beam 4i.1, wherein the first X / Y center coupling beam anchor point 5d.1 is located in the upper left area of ​​the cross-shaped coupling center beam 4i.1, the second X / Y center coupling beam anchor point 5d.2 is located in the upper right area of ​​the cross-shaped coupling center beam 4i.1, the third X / Y center coupling beam anchor point 5d.3 is located in the lower left area of ​​the cross-shaped coupling center beam 4i.1, and the fourth X / Y center coupling beam anchor point 5d.4 is located in the lower right area of ​​the cross-shaped coupling center beam 4i.1; the first coupling folding beam 4i.2 is connected between the first X / Y center coupling beam anchor point 5d.1 and the third X / Y center coupling beam anchor point 5d.3, and the first coupling folding beam 4i.2 is connected between the first X / Y center coupling beam anchor point 5d.1 and the third X / Y center coupling beam anchor point 5d.3. The midpoint of beam 4i.2 is connected to one end of the cross bar portion of the cross-shaped coupling center beam 4i.1, and the first coupling folded beam 4i.2 is symmetrical about the cross bar portion of the cross-shaped coupling center beam 4i.1 (or symmetrical about the X-axis); the second coupling folded beam 4i.3 is connected between the second X / Y center coupling beam anchor point 5d.2 and the fourth X / Y center coupling beam anchor point 5d.4, and the midpoint of the second coupling folded beam 4i.3 is connected to the other end of the cross bar portion of the cross-shaped coupling center beam 4i.1, and the second coupling folded beam 4i.3 is symmetrical about the cross bar portion of the cross-shaped coupling center beam 4i.1 (or symmetrical about the X-axis); one end and the other end of the vertical bar portion of the cross-shaped coupling center beam 4i.1 are respectively connected to the X / Y center coupling mechanism 4h. The X / Y center coupling beam 4i also includes four L-shaped intermediate support beams 4i.4, which are respectively located in the four areas divided by the cross-shaped coupling center beam 4i.1, one end of each L-shaped intermediate support beam 4i.4 is connected to the horizontal bar portion of the cross-shaped coupling center beam 4i.1 in the area where it is located, and the other end is connected to the vertical bar portion of the cross-shaped coupling center beam 4i.1 in the area where it is located, and its opening direction is toward the center point A of the X / Y gyroscope structure, and the four L-shaped intermediate support beams 4i.4 are connected end to end in sequence to form a field-shaped structure with the cross-shaped coupling center beam 4i.1 at the center point A of the X / Y gyroscope structure.

[0060] exist Figure 1 and Figure 3In the specific embodiment shown, the first coupling folding beam 4i.2 includes a first "J"-shaped elastic beam and a third "J"-shaped elastic beam, wherein one end of the first "J"-shaped elastic beam is connected to the first X / Y center coupling beam anchor point 5d.1, the other end of the first "J"-shaped elastic beam is connected to the other end of the third "J"-shaped elastic beam, and one end of the third "J"-shaped elastic beam is connected to the third X / Y center coupling beam anchor point 5d.3; one end of the cross bar portion of the cross-shaped coupling center beam 4i.1 is connected to the other end of the first "J"-shaped elastic beam and the other end of the third "J"-shaped elastic beam, and the first "J"-shaped elastic beam and the third "J"-shaped elastic beam are symmetrical about the cross bar portion of the cross-shaped coupling center beam 4i.1 (or symmetrical about the X-axis). The second coupling folding beam 4i.3 includes a second "J"-shaped elastic beam and a fourth "J"-shaped elastic beam, wherein one end of the second "J"-shaped elastic beam is connected to the second X / Y center coupling beam anchor point 5d.2, the other end of the second "J"-shaped elastic beam is connected to the other end of the fourth "J"-shaped elastic beam, and one end of the fourth "J"-shaped elastic beam is connected to the fourth X / Y center coupling beam anchor point 5d.4; the other end of the crossbar portion of the cross-shaped coupling center beam 4i.1 is connected to the other end of the second "J"-shaped elastic beam and the other end of the fourth "J"-shaped elastic beam, and the second "J"-shaped elastic beam and the fourth "J"-shaped elastic beam are symmetrical about the crossbar portion of the cross-shaped coupling center beam 4i.1 (or symmetrical about the X axis). The X / Y center coupling mechanism 4h is a rhombus structure with an X / Y space defined inside, and the four corners of the rhombus structure are respectively connected to the four X / Y mass block coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2.

[0061] exist Figure 1 and Figure 3 In the specific embodiment shown, the X / Y center coupling mechanism 4h is symmetrical about the X-axis and the Y-axis as a whole; the cross-shaped coupling center beam 4i.1 is symmetrical about the X-axis and the Y-axis; the first coupling folding beam 4i.2 and the second coupling folding beam 4i.3 are symmetrical about the X-axis and the Y-axis as a whole; and the four X / Y center coupling beam anchor points 5d.1 to 5d.4 are symmetrical about the X-axis and the Y-axis as a whole.

[0062] like Figure 1 , Figure 4 and Fig.11 As shown, the Z gyro structure includes:

[0063] A first Z-driven coupling beam 4b.3 and a second Z-driven coupling beam 4b.4;

[0064] A first Z detection frame 2g, which is connected to the first drive frame 1a via a first Z drive coupling beam 4b.3, and defines a first Z space therein;

[0065] A first Z mass 2e, which is located in the first Z space and connected to the first Z detection frame 2g via first Z mass coupling beams 4L.1 to 4L.4;

[0066] A second Z detection frame 2h, which is connected to the second driving frame 1b via a second Z driving coupling beam 4b.4, and defines a second Z space therein;

[0067] A second Z mass 2f, which is located in the second Z space and connected to the second Z detection frame 2h through second Z mass coupling beams 4L.5-4L.8;

[0068] When the first driving frame 1a performs resonant motion along the Y axis and the second driving frame 1b performs resonant motion in the opposite direction to the first driving frame 1a along the Y axis, the first driving frame 1a drives the first Z mass block 2e to perform resonant motion along the Y axis through the first Z driving coupling beam 4b.3, the first Z detection frame 2g, and the first Z mass block coupling beams 4L.1 to 4L.4, and the second driving frame 1b drives the second Z mass block 2f to perform resonant motion in the opposite direction to the first Z mass block 2e along the Y axis through the second Z driving coupling beam 4b.4, the second Z detection frame 2h, and the second Z mass block coupling beams 4L.5 to 4L.8. Figure 5 As shown, when the first driving frame 1a drives the first Z mass block 2e to approach the second Z detection frame 2h along the Y axis through the first Z driving coupling beam 4b.3, the first Z detection frame 2g, and the first Z mass block coupling beams 4L.1~4L.4, the second driving frame 1b drives the second Z mass block 2f to approach the first Z detection frame 2g along the Y axis through the second Z driving coupling beam 4b.4, the second Z detection frame 2h, and the second Z mass block coupling beams 4L.5~4L.8; when the first driving frame 1a drives the first Z mass block 2e to move away from the second Z detection frame 2h along the Y axis through the first Z driving coupling beam 4b.3, the first Z detection frame 2g, and the first Z mass block coupling beams 4L.1~4L.4, the second driving frame 1b drives the second Z mass block 2f to move away from the first Z detection frame 2g along the Y axis through the second Z driving coupling beam 4b.4, the second Z detection frame 2h, and the second Z mass block coupling beams 4L.5~4L.8.

[0069] exist Figure 1 , Figure 4 and Fig.11In the specific embodiment shown, the first Z driving coupling beam 4b.3 and the second Z driving coupling beam 4b.4 have the same structure and are symmetrical about the X axis; the first Z detection frame 2g and the second Z detection frame 2h have the same structure and are symmetrical about the X axis; the first Z mass block 2e and the second Z mass block 2f have the same structure and are symmetrical about the X axis; the first Z mass block coupling beams 4L.1 to 4L.4 and the second Z mass block coupling beams 4L.5 to 4L.8 have the same overall structure and are symmetrical about the X axis. Among them, there are four first Z mass block coupling beams 4L.1 to 4L.4, among which two first Z mass block coupling beams 4L.1 and 4L.3 are respectively located at the upper and lower ends of the left side of the first Z mass block 2e, and the other two first Z mass block coupling beams 4L.2 and 4L.4 are respectively located at the upper and lower ends of the right side of the first Z mass block 2e, and the first Z mass block coupling beams 4L.1 to 4L.4 are all U-shaped beams, and the first Z mass block coupling beams L.1 to 4L.4 are placed parallel to the Y axis direction (or placed along the up and down direction) There are four second Z mass block coupling beams 4L.5 to 4L.8, of which two second Z mass block coupling beams 4L.5 and 4L.7 are respectively located at the upper and lower ends of the left side of the second Z mass block 2f, and the other two second Z mass block coupling beams 4L.6 and 4L.8 are respectively located at the upper and lower ends of the right side of the second Z mass block 2f. The second Z mass block coupling beams 4L.5 to 4L.8 are all U-shaped beams, and the second Z mass block coupling beams 4L.5 to 4L.8 are placed parallel to the Y-axis direction (or placed along the up and down direction). A certain number of damping holes can be set on the first Z mass block 2e and the second Z mass block 2f to reduce damping and improve the sensitivity of the Z-axis gyroscope.

[0070] like Figure 1 , Figure 4 and Fig.11 As shown, the Z gyro structure further includes:

[0071] A first Z-axis detection electrode 3e.1 disposed in the first Z mass block 2e;

[0072] A second Z-axis detection electrode 3e.2 disposed in the second Z mass block 2f;

[0073] When the Z-axis angular velocity input is sensed, the first Z mass block 2e and the second Z mass block 2f will move in opposite directions along the X-axis direction. The first Z-axis detection electrode 3e.1 detects the change in distance from the first Z mass block 2e, and the second Z-axis detection electrode 3e.2 detects the change in distance from the second Z mass block 2f. Specifically, after being sensitive to the Z-axis angular velocity, the capacitance of the first Z-axis detection electrode 3e.1 and the second Z-axis detection electrode 3e.2 increases and decreases respectively. The difference between the two is the capacitance change caused by the Z-axis angular velocity, and then the input Z-axis angular velocity is obtained.

[0074] exist Figure 1and Figure 4 In the embodiment shown, the Z gyro structure further includes:

[0075] Z detection frame support beam anchor points 5e.1 to 5e.5, which are located outside the first Z detection frame 2g and the second Z detection frame 2h;

[0076] The Z detection frame support beams 4j.1-4j.8 are located outside the first Z detection frame 2g and the second Z detection frame 2h. The Z detection frame support beams 4j.1-4j.4 located outside the first Z detection frame 2g are connected between the first Z detection frame 2g and the Z detection frame support beam anchor points 5e.1-5e.3 located outside the first Z detection frame 2g; the Z detection frame support beams 4j.5-4j.8 located outside the second Z detection frame 2h are connected between the second Z detection frame 2h and the Z detection frame support beam anchor points 5e.3-5e.5 located outside the second Z detection frame 2h;

[0077] Z detection frame coupling beam anchor points 5f.1 to 5f.6, which are located outside the first Z detection frame 2g and the second Z detection frame 2h;

[0078] The Z detection frame coupling beams 4k.1~4k.8 are located on the outside of the first Z detection frame 2g and the second Z detection frame 2h. The Z detection frame coupling beams 4k.1~4k.4 located on the outside of the first Z detection frame 2g are connected between the first Z detection frame 2g and the Z detection frame coupling beam anchor points 5f.1~5f.4 located on the outside of the first Z detection frame 2g; the Z detection frame coupling beams 4k.5~4k.8 located on the outside of the second Z detection frame 2h are connected between the second Z detection frame 2h and the Z detection frame coupling beam anchor points 5f.3~5f.6 located on the outside of the second Z detection frame 2h.

[0079] For example, the Z detection frame support beam anchor points 5e.1 to 5e.5 are located on the upper and lower sides of the first Z detection frame 2g and the second Z detection frame 2h; the Z detection frame support beams 4j.1 to 4j.8 are located on the upper and lower sides of the first Z detection frame 2g and the second Z detection frame 2h, and the Z detection frame support beams 4j.1 to 4j.4 located on the upper and lower sides of the first Z detection frame 2g are connected between the first Z detection frame 2g and the Z detection frame support beam anchor points 5e.1 to 5e.3 located on the upper and lower sides of the first Z detection frame 2g; the Z detection frame support beams 4j.5 to 4j.8 located on the upper and lower sides of the second Z detection frame 2h are connected to the second Z detection frame 2h and the Z detection frame support beam anchor points 5e.1 to 5e.3 located on the upper and lower sides of the second Z detection frame 2h 5e.3~5e.5; the Z detection frame coupling beam anchor points 5f.1~5f.6 are located at the corners of the first Z detection frame 2g and the second Z detection frame 2h; the Z detection frame coupling beams 4k.1~4k.8 are located at the corners of the first Z detection frame 2g and the second Z detection frame 2h, and the Z detection frame coupling beams 4k.1~4k.4 located at the corners of the first Z detection frame 2g are connected between the first Z detection frame 2g and the Z detection frame coupling beam anchor points 5f.1~5f.4 located at the corners of the first Z detection frame 2g; the Z detection frame coupling beams 4k.5~4k.8 located at the corners of the second Z detection frame 2h are connected between the second Z detection frame 2h and the Z detection frame coupling beam anchor points 5f.3~5f.6 located at the corners of the second Z detection frame 2h.

[0080] exist Figure 1 and Figure 4In the specific embodiment shown, there are five Z detection frame support beam anchor points 5e.1~5e.5, among which the first Z detection frame support beam anchor point 5e.1 and the second Z detection frame support beam anchor point 5e.2 are located on the upper side of the first Z detection frame 2g, the third Z detection frame support beam anchor point 5e.3 is located between the first Z detection frame 2g and the second Z detection frame 2h, and the fourth Z detection frame support beam anchor point 5e.4 and the fifth Z detection frame support beam anchor point 5e.5 are located on the lower side of the second Z detection frame 2h. There are 8 Z detection frame support beams 4j.1~4j.8, among which the first Z detection frame support beam 4j.1 and the second Z detection frame support beam 4j.2 are located on the upper side of the first Z detection frame 2g; the third Z detection frame support beam 4j.3 and the fourth Z detection frame support beam 4j.4 are located on the lower side of the first Z detection frame 2g; the fifth Z detection frame support beam 4j.5 and the sixth Z detection frame support beam 4j.6 are located on the upper side of the second Z detection frame 2h; the seventh Z detection frame support beam 4j.7 and the eighth Z detection frame support beam 4j.8 are located on the lower side of the second Z detection frame 2h. Among them, the first Z detection frame support beam 4j.1 and the second Z detection frame support beam 4j.2 located on the upper side of the first Z detection frame 2g are connected to the upper side of the first Z detection frame 2g via the first Z detection frame support beam anchor point 5e.1 and the second Z detection frame support beam anchor point 5e.2 respectively; the third Z detection frame support beam 4j.3 and the fourth Z detection frame support beam 4j.4 located on the lower side of the first Z detection frame 2g are connected to the lower side of the first detection frame 2g via the third Z detection frame support beam anchor point 5e.3 located between the first Z detection frame 2g and the second Z detection frame 2h. The fifth Z detection frame support beam 4j.5 and the sixth Z detection frame support beam 4j.6 located on the upper side of the second detection frame 2h are connected to the upper side of the second detection frame 2h via the third Z detection frame support beam anchor 5e.3 located between the first Z detection frame 2g and the second Z detection frame 2h; the seventh Z detection frame support beam 4j.7 and the eighth Z detection frame support beam 4j.8 located on the lower side of the second Z detection frame 2g are connected to the lower side of the second Z detection frame 2h via the fourth Z detection frame support beam anchor 5e.4 and the fifth Z detection frame support beam anchor 5e.5 respectively.

[0081] exist Figure 1 and Figure 4In the specific embodiment shown, the first Z detection frame support beam anchor point 5e.1 and the second Z detection frame support beam anchor point 5e.2 located on the upper side of the first Z detection frame 2g are respectively located on the left and right sides of the first Z drive coupling beam 4b.3, and the fourth Z detection frame support beam anchor point 5e.4 and the fifth Z detection frame support beam anchor point 5e.5 located on the lower side of the second Z detection frame 2h are respectively located on the left and right sides of the second Z drive coupling beam 4b.4, and the five Z detection frame support beam anchor points 5e.1~5e.5 are symmetrical about the X-axis as a whole. The first Z detection frame support beam 4j.1 and the second Z detection frame support beam 4j.2 located on the upper side of the first Z detection frame 2g are respectively located on the left and right sides of the first Z drive coupling beam 4b.3; the third Z detection frame support beam 4j.3 and the fourth Z detection frame support beam 4j.4 located on the lower side of the first Z detection frame 2g are respectively located on the left and right sides of the third Z detection frame support beam anchor point 5e.3; the fifth Z detection frame support beam 4j.5 and the sixth Z detection frame support beam 4j.6 located on the upper side of the second Z detection frame 2h are respectively located on the left and right sides of the third Z detection frame support beam anchor point 5e.3; the seventh Z detection frame support beam 4j.7 and the eighth Z detection frame support beam 4j.8 located on the lower side of the second Z detection frame 2h are respectively located on the left and right sides of the second Z drive coupling beam 4b.4. Among them, the Z detection frame support beams 4j.1~4j.8 are all U-shaped beams, and the opening direction of the U-shaped beam is parallel to the X-axis (or the U-shaped beam is placed parallel to the X-axis); the Z detection frame support beams 4j.1~4j.8 are symmetrically distributed about the X-axis as a whole.

[0082] exist Figure 1 and Figure 4In the specific embodiment shown, there are six Z detection frame coupling beam anchor points 5f.1~5f.6, among which the first Z detection frame coupling beam anchor point 5f.1 and the second Z detection frame coupling beam anchor point 5f.2 are respectively located at the left corner and the right corner of the upper side of the first Z detection frame 2g; the third Z detection frame coupling beam anchor point 5f.3 and the fourth Z detection frame coupling beam anchor point 5f.4 are located between the first Z detection frame 2g and the second Z detection frame 2h, and are respectively close to the left corner and the right corner of the first Z detection frame 2g and the second Z detection frame 2h; the fifth Z detection frame coupling beam anchor point 5f.5 and the sixth Z detection frame coupling beam anchor point 5f.6 are respectively located at the left corner and the right corner of the lower side of the second Z detection frame 2h. There are eight Z detection frame coupling beams 4K.1 to 4K.8, wherein the first Z detection frame coupling beam 4K.1 to the fourth Z detection frame coupling beam 4K.4 are respectively located at the four corners of the first Z detection frame 2g, and the fifth Z detection frame coupling beam 4K.5 to the eighth Z detection frame coupling beam 4K.8 are respectively located at the four corners of the second Z detection frame 2h. Each Z detection frame coupling beam includes two U-shaped beams connected in sequence, one of which is parallel to one side of the corner where it is located, and the other is parallel to the other side of the corner where it is located. For example, the Z detection frame coupling beam 4K.1 is located at the left corner of the upper side of the first Z detection frame 2g, one of which is parallel to the upper side of the left corner, and the other is parallel to the left side of the left corner.

[0083] exist Figure 1 and Figure 4In the illustrated embodiment, the Z gyro structure also includes a first T-shaped lever 4m.1 and a second first T-shaped lever 4m.2. The first T-shaped lever 4m.1 and the second first T-shaped lever 4m.1 are located between the first Z detection frame 2g and the second Z detection frame 2h, and are close to the left corner and the right corner of the first Z detection frame 2g and the second Z detection frame 2h, respectively. The first T-shaped lever 4m.1 includes a crossbar and a vertical bar, the two ends of which are respectively connected to the third Z detection frame coupling beam 4K.3 located at the left corner of the lower side of the first Z detection frame 2g and the fifth Z detection frame coupling beam 4K.5 located at the left corner of the upper side of the second Z detection frame 2h, and the vertical bar is connected to the third Z detection frame coupling beam anchor point 5f.3; the second T-shaped lever 4m.2 includes a crossbar and a vertical bar, the two ends of which are respectively connected to the fourth Z detection frame coupling beam 4K.4 located at the right corner of the lower side of the first Z detection frame 2g and the fifth Z detection frame coupling beam 4K.5 located at the right corner of the upper side of the second Z detection frame 2h, and the vertical bar is connected to the fourth Z detection frame coupling beam anchor point 5f.4. The first T-shaped lever 4m.1 and the second T-shaped lever 4m.2 are configured to cause the first Z detection frame 2g and the second Z detection frame 2h to move in opposite directions along the X-axis. In addition, the first Z detection frame coupling beam 4K.1 located at the left corner of the upper side of the first Z detection frame 2g is connected to the left corner of the upper side of the first Z detection frame 2g through the first Z detection frame coupling beam anchor point 5f.1; the second Z detection frame coupling beam 4K.2 located at the right corner of the upper side of the first Z detection frame 2g is connected to the right corner of the upper side of the first Z detection frame 2g through the second Z detection frame coupling beam anchor point 5f.2; the seventh Z detection frame coupling beam 4K.7 located at the left corner of the lower side of the second Z detection frame 2h is connected to the left corner of the lower side of the second Z detection frame 2h through the fifth Z detection frame coupling beam anchor point 5f.5; the eighth Z detection frame coupling beam anchor point 4K.8 located at the right corner of the lower side of the second Z detection frame 2h is connected to the right corner of the lower side of the second Z detection frame 2h through the sixth Z detection frame coupling beam anchor point 5f.6. Among them, the Z detection frame coupling beam anchor points 5f.1~5f.6 are symmetrical about the X-axis as a whole; the Z detection frame coupling beams 4K.1~4K.8 are symmetrical about the X-axis as a whole.

[0084] The present invention is described below Figure 1 The detection principle of the three-axis gyroscope shown.

[0085] 1. X / Y axis gyroscope detection principle

[0086] Please refer to Figure 5 As shown, it is the present invention Figure 1The schematic diagram of the three-axis gyroscope in the driving state shown. By applying a driving voltage, the first drive frame 1a and the second drive frame 1b on the upper and lower sides are caused to produce reverse resonant motion along the Y-axis direction, which will drive the X / Y gyro structure to move. The specific process is that the first drive frame 1a and the second drive frame 1b drive the first mass block 2a and the second mass block 2b to produce reverse resonant motion in the up and down directions along the Y-axis direction through the X / Y drive coupling beams 4b.1 and 4b.2, and the first mass block 2a and the second mass block 2b will drive the third mass block 2c and the fourth mass block 2d to produce reverse resonant motion in the left and right directions along the X-axis through the oblique beams 4e.1~4e.4 set between the mass blocks, so that the movement of the four mass blocks 2a~2d in the X / Y gyro structure is similar to the overall outward or inward movement of the "heart".

[0087] Please refer to Figure 6 As shown, it is the present invention Figure 1 The schematic diagram of the three-axis gyroscope during X-axis detection is shown. When the X-axis angular rate input is sensitive, the Coriolis effect will generate a Coriolis force to drive the first mass block 2a and the second mass block 2b to move in the opposite direction away from the surface along the Z-axis direction, and the X-axis detection electrodes 3c.1 and 3c.2 set below the first mass block 2a and the second mass block 2b will be sensitive to the change in distance, and then the self-capacitance of the X-axis detection electrodes 3c.1 and 3c.2 will change accordingly, and the size of the X-axis angular rate can be obtained by detecting the change in capacitance.

[0088] Please refer to Figure 7 As shown, it is the present invention Figure 1 The schematic diagram of the three-axis gyroscope during Y-axis detection is shown. When the Y-axis angular velocity input is sensitive, the Coriolis force generated by the Coriolis effect drives the third mass block 2c and the fourth mass block 2d to move in the opposite direction away from the surface along the Z-axis direction, and the Y-axis detection electrodes 3d.1 and 3d.2 set under the third mass block 2c and the fourth mass block 2d are sensitive to the change in distance, and then the self-capacitance of the X-axis detection electrodes 3d.1 and 3d.2 will change accordingly, and the magnitude of the X-axis angular velocity can be obtained by detecting the change in capacitance.

[0089] 2. Z-axis gyroscope detection principle

[0090] Please continue to refer to Figure 5As shown, by applying a driving voltage, the first driving frame 1a and the second driving frame 1b on the upper and lower sides are caused to perform reverse resonant motion along the Y-axis direction, which will drive the Z gyro structure to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the first Z detection frame 2g and the second Z detection frame 2h to generate reverse resonant motion in the up and down directions along the Y-axis direction through the Z driving coupling beams 4b.3 and 4b.4. The first Z detection frame 2g and the second Z detection frame 2h are respectively provided with the first Z mass block 2e and the second Z mass block 2f. The first Z detection frame 2g and the second Z detection frame 2h will drive the first Z mass block 2e and the second Z mass block 2f to perform reverse resonant motion in the up and down directions along the Y-axis direction.

[0091] Please refer to Figure 8 As shown, it is the present invention Figure 1 The schematic diagram of the three-axis gyroscope during Z-axis detection is shown. When the Z-axis angular velocity input is sensed, the Coriolis effect will generate a Coriolis force to drive the first Z mass block 2e and the second Z mass block 2f to move in the opposite direction along the X-axis direction, and the Z detection electrodes 3e.1 and 3e.2 respectively arranged inside the first Z mass block 2e and the second Z mass block 2f are sensitive to the change in distance, and then the capacitance of the Z detection electrodes 3e.1 and 3e.2 will change accordingly, and the magnitude of the Z-axis angular velocity can be obtained by detecting the change in capacitance.

[0092] In summary, in the three-axis gyroscope shown in the present invention, when the upper driving frame 1a and the lower driving frame 1b drive the masses 2a to 2f to move, the displacement of each mass block 2a to 2f in the sensitive direction can be ignored and will not affect the angular velocity signal detection. When the angular velocity in different directions is sensitive, due to the Coriolis effect, the corresponding mass block moves without affecting other mass blocks, so that the three-axis gyroscope designed by the present invention can reduce the orthogonal error and improve the detection accuracy.

[0093] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0094] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify and vary the above embodiments within the scope of the present invention.

Claims

1. A three-axis gyroscope, characterized in that: It includes: A first driving frame capable of resonant motion along the Y-axis; A second driving frame, which is parallel to the first driving frame and spaced a predetermined distance apart, and is capable of performing a resonant motion along the Y axis in a direction opposite to that of the first driving frame; An X / Y gyro structure connected between the first drive frame and the second drive frame; A Z gyro structure connected between the first drive frame and the second drive frame and located on one side of the X / Y gyro structure; The X / Y gyro structure and the Z gyro structure are independent of each other, and both the X / Y gyro structure and the Z gyro structure are driven by the first driving frame and the second driving frame; the first driving frame serves as an upper driving frame, and the second driving frame serves as a lower driving frame, and the first driving frame and the second driving frame are symmetrically arranged up and down; the Z gyro structure is arranged on the right side of the X / Y gyro structure, The X / Y gyro structure comprises: a first X / Y driving coupling beam and a second X / Y driving coupling beam; The first mass block, the second mass block, the third mass block and the fourth mass block are respectively arranged at four positions of the upper, lower, left and right of the center point A of the X / Y gyro structure, the first mass block is arranged adjacent to the third mass block and the fourth mass block, the second mass block is arranged adjacent to the third mass block and the fourth mass block, the first mass block is connected to the first driving frame through the first X / Y driving coupling beam, and the second mass block is connected to the second driving frame through the second X / Y driving coupling beam; A mass anchor point located outside the four masses of the X / Y gyro structure; A mass block support beam, which is located outside the four mass blocks of the X / Y gyro structure, and each mass block of the X / Y gyro structure is connected to its outer mass block anchor point through the outer mass block support beam; Four oblique beams, which are respectively located between each two adjacent mass blocks in the X / Y gyro structure, and each two adjacent mass blocks in the X / Y gyro structure are connected by the oblique beam located therebetween; Wherein, when the first driving frame performs resonant motion along the Y axis and the second driving frame performs resonant motion in the opposite direction to the first driving frame along the Y axis, the first driving frame drives the first mass block to perform resonant motion along the Y axis through the first X / Y driving coupling beam, and the second driving frame drives the second mass block to perform resonant motion in the opposite direction to the first mass block along the Y axis through the second X / Y driving coupling beam, the first mass block and the second mass block further drive the third mass block to perform resonant motion along the X axis through the corresponding oblique beams, and further drive the fourth mass block to perform resonant motion in the opposite direction to the third mass block along the X axis through the corresponding oblique beams, The X-axis and the Y-axis are perpendicular to each other and define a plane where the X / Y gyro structure is located, and the Z-axis is perpendicular to the plane defined by the X-axis and the Y-axis.

2. The three-axis gyroscope according to claim 1, characterized in that: It also includes: a first drive frame support beam anchor point; A first driving frame support beam connected between the first driving frame support beam anchor point and the first driving frame; A second drive frame support beam anchor point; a second drive frame support beam connected between the second drive frame support beam anchor point and the second drive frame; First driving electrodes arranged on both sides of the first driving frame; First driving feedback electrodes are arranged on both sides of the first driving frame; Second driving electrodes arranged on both sides of the second driving frame; Second driving feedback electrodes arranged on both sides of the second driving frame; Driving the first driving frame to perform resonant motion along the Y-axis by applying a driving voltage to the first driving electrode; The second driving frame is driven to perform a resonant motion along the Y-axis in the opposite direction to the first driving frame by applying a driving voltage to the second driving electrode.

3. The three-axis gyroscope according to claim 2, characterized in that: The first driving electrode, the first driving feedback electrode, the second driving electrode and the second driving feedback electrode are fixedly arranged on the substrate, the first driving frame is connected to the first driving frame support beam anchor point through the first driving frame support beam, the first driving frame and the first driving frame support beam are suspended above the substrate, the second driving frame is connected to the second driving frame support beam anchor point through the second driving frame support beam, and the second driving frame and the second driving frame support beam are suspended above the substrate; The X-axis and the Y-axis are perpendicular to each other; The X-axis is along the left-right direction, and the Y-axis is along the up-down direction; The two sides of the first driving frame are an upper side and a lower side of the first driving frame; The two sides of the second driving frame are an upper side and a lower side of the second driving frame.

4. The three-axis gyroscope according to claim 1, characterized in that: The X / Y gyro structure further comprises: an X / Y center coupling beam structure located at a center point A of the X / Y gyro structure, Four X / Y mass block coupling beams are respectively connected to the inner sides of corresponding mass blocks, and each X / Y mass block coupling beam is connected to the X / Y central coupling beam structure.

5. The three-axis gyroscope according to claim 4, characterized in that: The X / Y gyro structure further comprises: a first X-axis detection electrode disposed below the first mass block; a second X-axis detection electrode disposed below the second mass block; A first Y-axis detection electrode disposed below the third mass block; a second Y-axis detection electrode disposed below the fourth mass block; When the X-axis angular velocity input is sensed, the first mass block and the second mass block will move in the opposite direction along the Z-axis direction, the first X-axis detection electrode detects the change in distance from the first mass block, the second X-axis detection electrode detects the change in distance from the second mass block, one of the capacitances of the first X-axis detection electrode and the second X-axis detection electrode increases, and the other decreases, and the difference between the two is obtained to obtain the capacitance change caused by the X-axis angular velocity, and then the input X-axis angular velocity magnitude is obtained; when the Y-axis angular velocity input is sensed, the third mass block and the fourth mass block will move in the opposite direction along the Z-axis direction, the first Y-axis detection electrode detects the change in distance from the third mass block, the second Y-axis detection electrode detects the change in distance from the fourth mass block, one of the capacitances of the first Y-axis detection electrode and the second Y-axis detection electrode increases, and the other decreases, and the difference between the two is obtained to obtain the capacitance change caused by the Y-axis angular velocity, and then the input Y-axis angular velocity magnitude is obtained.

6. The three-axis gyroscope according to claim 4, characterized in that: The inclined beam is a U-shaped beam, one end of which is connected to one of the two adjacent mass blocks, and the other end of which is connected to the other of the two adjacent mass blocks, and the opening of the U-shaped beam points to the center point A of the X / Y gyro structure; Each X / Y mass coupling beam comprises a plurality of hollow straight beam portions whose lengths gradually decrease from the outside to the inside and a connecting portion connecting the hollow straight beams.

7. The three-axis gyroscope according to claim 1, characterized in that: The four masses in the X / Y gyro structure include a rectangular portion and an isosceles trapezoidal portion. The four mass blocks are symmetrical about the X-axis and the Y-axis as a whole; The four oblique beams are symmetrical about the X-axis and the Y-axis as a whole; A certain number of damping holes may be provided on the mass block of the X / Y gyro structure to reduce damping and improve the quality factor and sensitivity of the gyro.

8. The three-axis gyroscope according to claim 4, characterized in that: The X / Y center coupling beam structure comprises: An X / Y center coupling mechanism, in which an X / Y space is defined; An X / Y center coupling beam located in the X / Y space; An X / Y center coupling beam anchor point located in the X / Y space; The X / Y center coupling mechanism is connected to the X / Y center coupling beam anchor point through the X / Y center coupling beam, and the X / Y center coupling mechanism is connected to the four mass blocks of the X / Y gyro structure through the four X / Y mass block coupling beams.

9. The three-axis gyroscope according to claim 8, characterized in that: The X / Y center coupling beam comprises a cross-shaped coupling center beam, a first coupling folding beam and a second coupling folding beam, wherein the intersection of the cross-shaped coupling center beam is located at the center point A of the X / Y gyro structure. There are four X / Y center coupling beam anchor points, which are respectively located in the four areas divided by the cross-shaped coupling center beam, wherein the first X / Y center coupling beam anchor point is located in the upper left area of ​​the cross-shaped coupling center beam, the second X / Y center coupling beam anchor point is located in the upper right area of ​​the cross-shaped coupling center beam, the third X / Y center coupling beam anchor point is located in the lower left area of ​​the cross-shaped coupling center beam, and the fourth X / Y center coupling beam anchor point is located in the lower right area of ​​the cross-shaped coupling center beam; The first coupling folded beam is connected between the first X / Y center coupling beam anchor point and the third X / Y center coupling beam anchor point, the midpoint of the first coupling folded beam is connected to one end of the cross bar portion of the cross-shaped coupling center beam, and the first coupling folded beam is symmetrical about the cross bar portion of the cross-shaped coupling center beam; The second coupling folded beam is connected between the second X / Y center coupling beam anchor point and the fourth X / Y center coupling beam anchor point, the midpoint of the second coupling folded beam is connected to the other end of the cross bar portion of the cross-shaped coupling center beam, and the second coupling folded beam is symmetrical about the cross bar portion of the cross-shaped coupling center beam; One end and the other end of the vertical rod portion of the cross-shaped coupling center beam are respectively connected to the X / Y center coupling mechanism.

10. The three-axis gyroscope according to claim 9, characterized in that: The X / Y center coupling beam further includes four L-shaped intermediate support beams, which are respectively located in the four areas divided by the cross-shaped coupling center beam, one end of each L-shaped intermediate support beam is connected to the cross bar portion of the cross-shaped coupling center beam in the area where it is located, and the other end is connected to the vertical bar portion of the cross-shaped coupling center beam in the area where it is located, and the opening direction thereof is toward the center point A of the X / Y gyro structure; The X / Y center coupling mechanism is a diamond structure with an X / Y space defined inside, and the four corners of the diamond structure are respectively connected to the four X / Y mass block coupling beams; The first coupling folded beam comprises a first "J"-shaped elastic beam and a third "J"-shaped elastic beam, wherein one end of the first "J"-shaped elastic beam is connected to the first X / Y center coupling beam anchor point, the other end of the first "J"-shaped elastic beam is connected to the other end of the third "J"-shaped elastic beam, and one end of the third "J"-shaped elastic beam is connected to the third X / Y center coupling beam anchor point; one end of the crossbar portion of the cross-shaped coupling center beam is connected to the other end of the first "J"-shaped elastic beam and the other end of the third "J"-shaped elastic beam, and the first "J"-shaped elastic beam and the third "J"-shaped elastic beam are symmetrical about the crossbar portion of the cross-shaped coupling center beam; The second coupled folded beam includes a second "J"-shaped elastic beam and a fourth "J"-shaped elastic beam, wherein one end of the second "J"-shaped elastic beam is connected to the anchor point of the second X / Y center coupling beam, the other end of the second "J"-shaped elastic beam is connected to the other end of the fourth "J"-shaped elastic beam, and one end of the fourth "J"-shaped elastic beam is connected to the anchor point of the fourth X / Y center coupling beam; the other end of the cross bar portion of the cross-shaped coupling center beam is connected to the other end of the second "J"-shaped elastic beam and the other end of the fourth "J"-shaped elastic beam, and the second "J"-shaped elastic beam and the fourth "J"-shaped elastic beam are symmetrical about the cross bar portion of the cross-shaped coupling center beam.

11. The three-axis gyroscope according to claim 1, characterized in that: The Z gyro structure comprises: a first Z-driven coupling beam and a second Z-driven coupling beam; A first Z detection frame, which is connected to the first driving frame via a first Z driving coupling beam, and defines a first Z space therein; a first Z mass block located in the first Z space and connected to the first Z detection frame via a first Z mass block coupling beam; A second Z detection frame, which is connected to the second driving frame via a second Z driving coupling beam, and defines a second Z space therein; a second Z mass block located in the second Z space and connected to the second Z detection frame via a second Z mass block coupling beam; Among them, the first Z detection frame serves as an upper detection frame, and the second Z detection frame serves as a lower detection frame; when the first driving frame performs resonant motion along the Y-axis and the second driving frame performs resonant motion along the Y-axis in the opposite direction to the first driving frame, the first driving frame drives the first Z mass block to perform resonant motion along the Y-axis through the first Z driving coupling beam, the first Z detection frame, and the first Z mass block coupling beam, and the second driving frame drives the second Z mass block to perform resonant motion along the Y-axis in the opposite direction to the first Z mass block through the second Z driving coupling beam, the second Z detection frame, and the second Z mass block coupling beam.

12. The three-axis gyroscope according to claim 11, characterized in that: The Z gyro structure further comprises: A Z detection frame support beam anchor point, which is located outside the first Z detection frame and the second Z detection frame; A Z detection frame support beam, which is located outside the first Z detection frame and the second Z detection frame, wherein the Z detection frame support beam located outside the first Z detection frame is connected between the first Z detection frame and an anchor point of the Z detection frame support beam located outside the first Z detection frame; the Z detection frame support beam located outside the second Z detection frame is connected between the second Z detection frame and an anchor point of the Z detection frame support beam located outside the second Z detection frame; A Z detection frame coupling beam anchor point, which is located outside the first Z detection frame and the second Z detection frame; A Z detection frame coupling beam, which is located outside the first Z detection frame and the second Z detection frame, the Z detection frame coupling beam located outside the first Z detection frame is connected between the first Z detection frame and the Z detection frame coupling beam anchor point located outside the first Z detection frame; the Z detection frame coupling beam located outside the second Z detection frame is connected between the second Z detection frame and the Z detection frame coupling beam anchor point located outside the second Z detection frame; The Z detection frame support beam anchor points are located at the upper and lower sides of the first Z detection frame and the second Z detection frame; The Z detection frame support beams are located at the upper and lower sides of the first Z detection frame and the second Z detection frame, wherein the Z detection frame support beams located at the upper and lower sides of the first Z detection frame are connected between the first Z detection frame and the anchor points of the Z detection frame support beams located at the upper and lower sides of the first Z detection frame; the Z detection frame support beams located at the upper and lower sides of the second Z detection frame are connected between the second Z detection frame and the anchor points of the Z detection frame support beams located at the upper and lower sides of the second Z detection frame; The Z detection frame coupling beam anchor point is located at the corners of the first Z detection frame and the second Z detection frame; The Z detection frame coupling beam is located at the corners of the first Z detection frame and the second Z detection frame. The Z detection frame coupling beam located at the corner of the first Z detection frame is connected between the first Z detection frame and the anchor point of the Z detection frame coupling beam located at the corner of the first Z detection frame; the Z detection frame coupling beam located at the corner of the second Z detection frame is connected between the second Z detection frame and the anchor point of the Z detection frame coupling beam located at the corner of the second Z detection frame.

13. The three-axis gyroscope according to claim 12, characterized in that: There are five Z detection frame support beam anchor points, wherein the first Z detection frame support beam anchor point and the second Z detection frame support beam anchor point are located on the upper side of the first Z detection frame, the third Z detection frame support beam anchor point is located between the first Z detection frame and the second Z detection frame, and the fourth Z detection frame support beam anchor point and the fifth Z detection frame support beam anchor point are located on the lower side of the second Z detection frame; There are 8 Z detection frame support beams, wherein the first Z detection frame support beam and the second Z detection frame support beam are located on the upper side of the first Z detection frame; the third Z detection frame support beam and the fourth Z detection frame support beam are located on the lower side of the first Z detection frame; the fifth Z detection frame support beam and the sixth Z detection frame support beam are located on the upper side of the second Z detection frame; the seventh Z detection frame support beam and the eighth Z detection frame support beam are located on the lower side of the second Z detection frame; Wherein, the first Z detection frame support beam and the second Z detection frame support beam are connected to the upper side of the first Z detection frame via the first Z detection frame support beam anchor point and the second Z detection frame support beam anchor point respectively; the third Z detection frame support beam and the fourth Z detection frame support beam are connected to the lower side of the first Z detection frame via the third Z detection frame support beam anchor point; the fifth Z detection frame support beam and the sixth Z detection frame support beam are connected to the upper side of the second Z detection frame via the third Z detection frame support beam anchor point; the seventh Z detection frame support beam and the eighth Z detection frame support beam are connected to the lower side of the second Z detection frame via the fourth Z detection frame support beam anchor point and the fifth Z detection frame support beam anchor point respectively; The first Z detection frame support beam anchor point and the second Z detection frame support beam anchor point located on the upper side of the first Z detection frame are respectively located on the left and right sides of the first Z driving coupling beam, and the fourth Z detection frame support beam anchor point and the fifth Z detection frame support beam anchor point located on the lower side of the second Z detection frame are respectively located on the left and right sides of the second Z driving coupling beam; The first Z detection frame support beam and the second Z detection frame support beam located on the upper side of the first Z detection frame are respectively located on the left and right sides of the first Z driving coupling beam; the third Z detection frame support beam and the fourth Z detection frame support beam located on the lower side of the first Z detection frame are respectively located on the left and right sides of the anchor point of the third Z detection frame support beam; the fifth Z detection frame support beam and the sixth Z detection frame support beam located on the upper side of the second Z detection frame are respectively located on the left and right sides of the anchor point of the third Z detection frame support beam; the seventh Z detection frame support beam and the eighth Z detection frame support beam located on the lower side of the second Z detection frame are respectively located on the left and right sides of the second Z driving coupling beam; The Z detection frame support beam is a U-shaped beam, and the opening direction of the U-shaped beam is parallel to the X-axis; There are six Z detection frame coupling beam anchor points, wherein the first Z detection frame coupling beam anchor point and the second Z detection frame coupling beam anchor point are respectively located at the left corner and the right corner of the upper side of the first Z detection frame; the third Z detection frame coupling beam anchor point and the fourth Z detection frame coupling beam anchor point are located between the first Z detection frame and the second Z detection frame, and are respectively close to the left corner and the right corner of the first Z detection frame and the second Z detection frame; the fifth Z detection frame coupling beam anchor point and the sixth Z detection frame coupling beam anchor point are respectively located at the left corner and the right corner of the lower side of the second Z detection frame; There are eight Z detection frame coupling beams, wherein the first Z detection frame coupling beam to the fourth Z detection frame coupling beam are respectively located at the four corners of the first Z detection frame, and the fifth Z detection frame coupling beam to the eighth Z detection frame coupling beam are respectively located at the four corners of the second Z detection frame; Each Z detection frame coupling beam includes two U-shaped beams connected in sequence, one of which is parallel to one side of the corner where it is located, and the other U-shaped beam is parallel to the other side of the corner where it is located.

14. The three-axis gyroscope according to claim 13, characterized in that: The Z gyro structure further includes a first T-shaped lever and a second first T-shaped lever, wherein the first T-shaped lever and the second first T-shaped lever are located between the first Z detection frame and the second Z detection frame and are close to the left corner and the right corner of the first Z detection frame and the second Z detection frame, respectively. The first T-shaped lever includes a horizontal bar portion and a vertical bar portion, the two ends of the horizontal bar portion are respectively connected to the third Z detection frame coupling beam located at the left corner of the lower side of the first Z detection frame and the fifth Z detection frame coupling beam located at the left corner of the upper side of the second Z detection frame, and the vertical bar portion is connected to the anchor point of the third Z detection frame coupling beam; The second T-shaped lever includes a crossbar portion and a vertical bar portion, the two ends of the crossbar portion are respectively connected to the fourth Z detection frame coupling beam located at the lower right corner of the first Z detection frame and the fifth Z detection frame coupling beam located at the upper right corner of the second Z detection frame, and the vertical bar portion is connected to the anchor point of the fourth Z detection frame coupling beam, The first T-shaped lever and the second T-shaped lever are configured to cause the first Z detection frame and the second Z detection frame to move in opposite directions along the X-axis.

15. The three-axis gyroscope according to claim 11, characterized in that: The Z gyro structure further comprises: a first Z-axis detection electrode disposed in the first Z mass; a second Z-axis detection electrode disposed in the second Z mass; When the Z-axis angular velocity input is sensed, the first Z mass block and the second Z mass block will move in opposite directions along the X-axis direction, the first Z-axis detection electrode detects the change in distance from the first Z mass block, and the second Z-axis detection electrode detects the change in distance from the second Z mass block. The capacitance of the first Z-axis detection electrode and the second Z-axis detection electrode increases and decreases, and the difference between the two is used to obtain the capacitance change caused by the Z-axis angular velocity, and then the input Z-axis angular velocity is obtained; A certain number of damping holes may be provided on the first Z mass block and the second Z mass block to reduce damping and improve the sensitivity of the Z-axis gyroscope.

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