processing device

Abstract

The present invention provides a processing device that does not contaminate a workpiece with oil. The processing device includes a chuck table having a holding surface that holds a workpiece, a horizontal movement mechanism that moves the chuck table in a horizontal direction, the horizontal movement mechanism being supplied with a first oil, and a vertical movement mechanism that moves a processing unit in a vertical direction, the vertical movement mechanism being supplied with a second oil. Before the workpiece is placed on the holding surface, the holding surface is photographed using a camera while light is being irradiated onto the holding surface, and it is checked whether the photographed image emits light. If there is a light-emitting portion in the photographed image, it is determined that oil is attached to the light-emitting portion.

Description

Technical Field

[0001] This invention relates to a processing apparatus. Background Technology

[0002] A machining apparatus of the following type exists, comprising: a chuck table for holding a workpiece; a machining unit for machining the workpiece held by the chuck table; an infeed assembly for moving the workpiece into the chuck table; and an outfeed assembly for removing the workpiece from the chuck table. The infeed and outfeed assemblies each include: a holding part for holding the workpiece; a horizontal movement mechanism for moving the holding part horizontally; and a vertical movement mechanism for moving the holding part vertically.

[0003] In addition, the processing apparatus has a horizontal movement mechanism that reciprocates horizontally between a workpiece loading / unloading position and a processing position where the processing unit performs the processing. Furthermore, the processing apparatus has a vertical movement mechanism that moves the processing unit in a direction perpendicular to the holding surface.

[0004] Such horizontal and vertical movement mechanisms include: a guide rail extending in the direction of movement; a ball screw arranged parallel to the guide rail; and an electric motor that rotates the ball screw. As shown in Patent Document 1, the guide rail and the ball screw are coated with oil.

[0005] Patent Document 1: Japanese Patent Application Publication No. 2017-180602

[0006] When operators supply oil to the guide rails and ball screws, or during adjustment operations, oil may adhere to the operator's hands, etc. If the operator works in the machining chamber without noticing this, the oil from their hands may sometimes remain inside the machining chamber. When a workpiece is processed in the machining chamber with oil adhering to it, the workpiece comes into contact with components of the machining equipment located within the chamber. Furthermore, the oil adhering to these components can transfer to the workpiece through the machining fluid, resulting in oil contamination of the workpiece. Summary of the Invention

[0007] Therefore, the object of the present invention is to provide a processing apparatus that can prevent oil contamination of the workpiece held on the holding surface of the chuck table.

[0008] According to the present invention, a processing apparatus is provided, comprising: a chuck table having a holding surface for holding a workpiece; a processing unit for processing the workpiece held by the holding surface; a horizontal movement mechanism for moving the chuck table horizontally relative to the processing unit, the horizontal movement mechanism being supplied with a first oil containing a first photoluminescent particle; a vertical movement mechanism for moving the processing unit vertically relative to the chuck table, the vertical movement mechanism being supplied with a second oil containing a second photoluminescent particle; a camera for taking an image of the holding surface of the chuck table; and a lamp for illuminating the camera's shooting area, including the holding surface, and capable of detecting whether the first oil and / or the second oil are attached to the holding surface based on the image of the holding surface taken by the camera.

[0009] Preferably, the first photoluminescent particle emits light of a first color when illuminated by the lamp, and the second photoluminescent particle emits light of a second color different from the first color when illuminated by the lamp. By observing the image captured by the camera, the source of oil scattering adhering to the retaining surface can be identified.

[0010] Preferably, the first photoluminescent particle and the second photoluminescent particle have photoluminescence properties.

[0011] According to the present invention, a camera is used to photograph the holding surface of the chuck worktable to determine whether there are first or second photoluminescent particles and to check whether the holding surface is contaminated with oil, thereby preventing oil contamination of the workpiece held on the holding surface.

[0012] Furthermore, since the first and second photoluminescent particles emit different colors of light when illuminated by the lamp, the source of oil scattering on the holding surface can be determined by judging what color of luminescent part is present in the captured image.

[0013] Furthermore, since the first photoluminescent particle, the second photoluminescent particle, or both of them have photoluminescence properties, they can store light irradiated onto the holding surface. Therefore, even after the lamp has stopped irradiating, the phenomenon of continuous light emission for a certain period of time can be used to determine that oil is attached based on the light. Attached Figure Description

[0014] Figure 1 It is a three-dimensional view showing the entire processing device.

[0015] Label Explanation

[0016] 1: Processing device; 10: Base; 100: Thickness measuring unit; 101: Housing; 102: Upper surface height gauge; 11: Column; 12: Box mounting section; 13: Temporary storage area; 14: Cleaning area; 15: Device cover; 16: Internal base;

[0017] 2: Chuck worktable; 20: Adsorption chuck; 200: Holding surface; 21: Frame; 210: Upper surface of the frame; 22: Base; 24: Rotation mechanism; 25: Rotation axis; 27: Cover; 28: Fold; 3: Machining unit; 30: Spindle; 31: Housing; 32: Spindle motor; 33: Mounting base; 34: Grinding wheel; 340: Grinding tool; 342: Grinding surface; 341: Grinding wheel base; 35: Rotation axis; 4: Vertical movement mechanism; 40: Ball screw; 41: Guide rail; 42: Z-axis motor; 43: Lifting plate; 44: Cage; 45: Rotation axis; 5: Horizontal movement mechanism; 50: Ball screw; 51: Guide rail; 52: Y-axis 53: Movable plate; 601: Loading assembly; 602: Unloading assembly; 60: Pad; 61: Arm; 610: Shaft; 62: Annular component; 620: Through hole; 70: Box; 71: Robot; 710: Manipulator; 712: Holding surface; 711: Shaft; 72: Alignment unit; 73: Rotary cleaning unit; 730: Rotary worktable; 732: Holding surface; 731: Cleaning water supply nozzle; 80: Camera; 81: Lamp; 82: Light shielding unit; 821: Guide rail; 823: Connecting support; 824: Angle piece; 825: Shielding part; 9: Judgment unit; 90: Touch panel; 17: Workpiece; 170: Upper surface of workpiece. Detailed Implementation

[0018] 1. Structure of the processing device

[0019] Figure 1 The machining apparatus 1 shown is a machining apparatus that uses machining unit 3 to machine the workpiece 17 held on the holding surface 200 of chuck table 2. The structure of machining apparatus 1 will be described below.

[0020] like Figure 1 As shown, the processing device 1 has a base 10 extending along the Y-axis and a column 11 erected on the +Y direction side of the base 10.

[0021] A cuboid device cover 15 is provided above the base 10. The cuboid space divided by the device cover 15 becomes the space for loading and unloading the workpiece 17 and for grinding.

[0022] A plate-shaped chuck worktable 2 is mounted on the base 10. The chuck worktable 2 is mounted on the base 22 in a detachable manner. The chuck worktable 2 has an adsorption chuck 20 and a frame 21 that supports the adsorption chuck 20. The upper surface of the adsorption chuck 20 serves as a holding surface 200 for holding the workpiece 17. The upper surface 210 of the frame 21 and the holding surface 200 are formed on the same plane.

[0023] The holding surface 200 is connected to an attraction unit (not shown). When the workpiece 17 is placed on the holding surface 200, an attraction force is generated by using an attraction unit (not shown) and the generated attraction force is transmitted to the holding surface 200, thereby attracting and holding the workpiece 17 on the holding surface 200.

[0024] A rotating mechanism 24, including a motor (not shown), is connected to the base 22. By using the rotating mechanism 24, the chuck table 2 can rotate about an axis in the Z-axis direction passing through the center of the chuck table 2.

[0025] An inner base 16 is disposed inside the base 10. A horizontal moving mechanism 5, which moves the chuck table 2 horizontally, is disposed on the inner base 16. The horizontal moving mechanism 5 includes: a ball screw 50 having a rotation axis 55 in the Y-axis direction; a pair of guide rails 51 arranged parallel to the ball screw 50; a Y-axis motor 52 connected to the ball screw 50, causing the ball screw 50 to rotate about the rotation axis 55; and a movable plate 53, the bottom of which is screwed with a nut to the ball screw 50 and moves along the guide rails 51 in the Y-axis direction. A rotating mechanism 24 is disposed on the upper surface 530 of the movable plate 53.

[0026] When the ball screw 50 is driven by the Y-axis motor 52 and rotates around the rotating shaft 55, the movable plate 53 is guided by the guide rail 51 and moves along the Y-axis direction. The rotating mechanism 24 supported by the movable plate 53, the base 22 connected to the rotating mechanism 24, and the chuck table 2 mounted on the base 22 move along the Y-axis direction together with the movable plate 53.

[0027] In addition, a cover 27 and pleats 28 that are telescopically connected to the cover 27 are provided around the chuck table 2. For example, when the chuck table 2 is driven by the horizontal moving mechanism 5 to move along the Y-axis, the cover 27 moves together with the chuck table 2 along the Y-axis, and the pleats 28 extend and retract.

[0028] A vertical moving mechanism 4 is provided on the side of the column 11 in the +X direction, which supports the machining unit 3 so that it can be raised and lowered. The machining unit 3 has: a spindle 30, which has a rotation axis 35 in the Z-axis direction; a housing 31, which supports the spindle 30 so that it can rotate; a spindle motor 32, which drives the spindle 30 to rotate about the rotation axis 35; a circular plate-shaped mounting base 33, which is connected to the lower end of the spindle 30; and a grinding wheel 34, which is detachably mounted on the lower surface of the mounting base 33.

[0029] The grinding wheel 34 has a grinding wheel base 341 and a plurality of grinding tools 340 arranged in a ring on the lower surface of the grinding wheel base 341 in a generally rectangular shape. The lower surface of the grinding tools 340 becomes the grinding surface 342 for grinding the workpiece 17.

[0030] The vertical movement mechanism 4 includes: a ball screw 40 having a rotation axis 45 in the Z-axis direction; a pair of guide rails 41 arranged parallel to the ball screw 40; a Z-axis motor 42 that causes the ball screw 40 to rotate about the rotation axis 45; a lifting plate 43, the nut inside of which is screwed into the ball screw 40 and the side of which is in sliding contact with the guide rails 41; and a retainer 44 that is connected to the lifting plate 43 and supports the processing unit 3.

[0031] When the ball screw 40 is driven by the Z-axis motor 42 and rotates about the rotation axis 45, the lifting plate 43 is guided by the guide rail 41 to move up and down in the Z-axis direction, and the processing unit 3 held by the cage 44 moves in the Z-axis direction.

[0032] The horizontal moving mechanism 5 is coated with a first oil containing the first photoluminescent particles.

[0033] In addition, the vertical moving mechanism 4 is coated with a second oil containing the second photoluminescent particles.

[0034] The first photoluminescent particle is, for example, an oxynitride containing Ce. 3+ The particles, with Eu added to the oxynitrides 2+ Particles, with Eu added to α-Cerone 2+ Particles, or the addition of Eu to CaAlSiN3 2+ Photoluminescent particles are phosphors that emit light when exposed to external light. The second photoluminescent particle is a different type of phosphor from the first photoluminescent particle.

[0035] The first photoluminescent particle is a nitrile compound with Ce added. 3+ The particles, the second photoluminescent particles are those with Eu added to oxynitrides. 2+The particles are not limited to the first photoluminescent particle and the second photoluminescent particle.

[0036] Here, the following is known: When Ce is added to oxynitrides... 3+ When the particles are irradiated with light, they emit blue light. This is especially true when Eu is added to oxynitrides. 2+ When the particles are irradiated with light, they emit green light. This is especially true when Eu is added to α-thiaron. 2 + When the particles are irradiated with light, they emit a yellow light. Additionally, when Eu is added to CaAlSiN3... 2+ When the particles are irradiated with light, they emit red light. Therefore, in this embodiment, when light is irradiated onto the first photoluminescent particle, it emits blue light, and when light is irradiated onto the second photoluminescent particle, it emits green light.

[0037] In addition, the first and second photoluminescent particles have phosphorescence properties, meaning that even after the light is stopped after irradiating the two particles for a specified period of time, the two particles continue to emit light for a certain period of time.

[0038] A thickness measuring unit 100 is provided on the base 10. The thickness measuring unit 100 has, for example, a housing 101 disposed on the -X direction side of the base 10 of the processing apparatus 1. An upper surface height gauge 102 is provided on the side of the housing 101. For example, when the workpiece 17 is held on the holding surface 200, the height of the upper surface 170 of the workpiece 17 can be measured by bringing the probe of the upper surface height gauge 102 into contact with the upper surface 170 of the workpiece 17.

[0039] A box-holding section 12 is provided on the -Y direction side of the base 10. A box 70 is placed on the box-holding section 12. The workpiece 17 before grinding is stored in the box 70. In addition, the workpiece 17 after grinding can also be stored in the box 70.

[0040] A robot 71 is disposed on the +Y direction side of the box 70. The robot 71 has a manipulator 710 and a shaft 711 supporting the manipulator 710 so that it can rotate. The upper surface of the manipulator 710 serves as a holding surface 712 for holding the workpiece 17. The workpiece 17 stored in the box 70 is removed from the box 70 by using the manipulator 710, and the manipulator 710 rotates about the shaft 711, thereby enabling the workpiece 17 to be transported.

[0041] A temporary placement area 13 is provided on the +X direction side of the movable area of ​​the robot arm 710 for temporarily placing the workpiece 17 before grinding, and a cleaning area 14 is provided on the -X direction side of the movable area of ​​the robot arm 710 for cleaning the workpiece 17 after grinding.

[0042] Alignment unit 72 is provided in temporary storage area 13. The workpiece 17, which is taken out of box 70 and placed in temporary storage area 13, is aligned to a specified position by alignment unit 72.

[0043] A rotary cleaning unit 73 is provided in the cleaning area 14. The rotary cleaning unit 73 includes: a rotary table 730 that holds the workpiece 17; and a cleaning water supply nozzle 731 that sprays cleaning water toward the workpiece 17 held by the rotary table 730. The upper surface of the rotary table 730 serves as a holding surface 732 for holding the workpiece 17.

[0044] For example, when the workpiece 17 after grinding is placed on the holding surface 732 of the rotary table 730, the workpiece 17 can be cleaned by supplying cleaning water from the cleaning water supply nozzle 731.

[0045] An infeed assembly 601 is provided adjacent to the temporary storage area 13. This infeed assembly 601 infeeds the workpiece 17, which has been aligned by the alignment unit 72, into the chuck table 2. The infeed assembly 601 has a circular plate-shaped pad 60 and an arm 61 that can freely hold the pad 60 up and down. A cylindrical shaft portion 610 with a rotation axis 65 in the Z-axis direction is connected to the end of the arm 61. For example, a rotation mechanism (not shown) is connected to the shaft portion 610 to rotate the shaft portion 610 about the rotation axis 65.

[0046] An annular member 62 is connected to the end of arm 61 on the side not connected to shaft 610. Three through holes 620 are formed on the annular member 62 at equal intervals around its circumference, for example, for screws 63 (in...). Figure 1 (Only one is shown in the image) Through-hole 620, which then threadedly engages with pad 60. The flange 630 of screw 63 is formed with a diameter larger than that of through-hole 620, and screw 63 is suspended together with pad 60 on annular member 62 with its descent range restricted.

[0047] For example, the configuration is such that when the upper surface 170 of the workpiece 17 is brought into contact with the lower surface of the pad 60 by lowering the pad 60 to the upper surface 170 of the workpiece 17, when a +Z direction thrust is applied from the upper surface 170 of the workpiece 17 to the lower surface of the pad 60, the pad 60 and the screw 63 rise relative to the annular member 62 in the +Z direction.

[0048] A transfer-out assembly 602 is provided on the -X direction side of the transfer-in assembly 601. The transfer-out assembly 602 has the same structure as the transfer-in assembly 601, so it is labeled with the same reference numerals and its description is omitted.

[0049] The processing apparatus 1 has three cameras 80 for capturing images of the holding surface 200 of the suction chuck 20 of the chuck worktable 2, the holding surface 712 of the manipulator 710 of the robot 71, and the holding surface 732 of the rotary worktable 730 of the rotary cleaning unit 73. The cameras 80 are positioned above the holding surfaces 200, 712, and 732. The holding surfaces 200, 712, and 732 constitute the capturing area of ​​the cameras 80.

[0050] The processing apparatus 1 includes a lamp 81 that illuminates the holding surface 200 of the suction chuck 20 of the chuck table 2 (which serves as the shooting area of ​​the camera 80), the holding surface 712 of the manipulator 710 of the robot 71, and the holding surface 732 of the rotary table 730 of the rotary cleaning unit 73. The lamp 81 emits either ultraviolet or visible light. It is possible to select either ultraviolet or visible light for illumination from the lamp 81. The camera 80 is capable of sending information about the image captured by the camera 80 to the judgment unit 9.

[0051] Alternatively, a mixture of ultraviolet and visible light can be used instead of just ultraviolet light or visible light. Furthermore, infrared light can be mixed into the resulting light. In other words, light containing wavelengths that excite photoluminescent particles can be used for illumination.

[0052] The processing apparatus 1 includes a determination unit 9 that determines whether a captured image contains photoluminescent particles. The determination unit 9 is capable of receiving captured images from the camera 80. The determination unit 9 includes an image recognition mechanism or the like, and is capable of determining whether a captured image from the camera 80 contains photoluminescent particles. The determination unit 9 also includes a storage device (not shown) such as a memory, and is capable of storing the captured images from the camera 80 in this storage device.

[0053] A touch panel 90 is provided on the side of the device cover 15 in the -Y direction. The touch panel 90 has functions such as inputting grinding conditions and displaying errors that occur during grinding. For example, the touch panel 90 can display images taken by the camera 80.

[0054] 2. Operation of the processing device

[0055] When grinding the workpiece 17 using the processing device 1, firstly, the robot 71 pulls out one workpiece 17 from the workpiece 17 stored in the box 70 and places it in the temporary storage area 13. When the workpiece 17 is placed in the temporary storage area 13, the alignment unit 72 is used to align the workpiece 17.

[0056] After the workpiece 17 is aligned by the alignment unit 72, the workpiece 17 is placed on the holding surface 200 of the chuck table 2 using the loading assembly 601, and the suction unit (not shown) is activated. The resulting attraction force is transmitted to the holding surface 200, and the workpiece 17 is attracted and held by the holding surface 200.

[0057] Then, with the workpiece 17 held by the holding surface 200, the horizontal moving mechanism 5 moves the chuck table 2 in the +Y direction and positions it below the processing unit 3. Next, the rotating mechanism 24 rotates the chuck table 2 about the rotation axis 25, thereby rotating the workpiece 17 held by the holding surface 200, and the spindle motor 32 rotates the grinding wheel 340 about the rotation axis 35.

[0058] With the workpiece 17 rotating about the rotation axis 25 and the grinding wheel 340 rotating about the rotation axis 35, the vertical movement mechanism 4 lowers the grinding wheel 340 in the -Z direction, bringing the grinding surface 342 of the grinding wheel 340 into contact with the upper surface 170 of the workpiece 17. With the grinding surface 342 in contact with the upper surface 170 of the workpiece 17, the grinding wheel 340 is further lowered in the -Z direction to grind the workpiece 17.

[0059] During the grinding process of workpiece 17, the thickness of workpiece 17 is measured using a thickness measuring unit 100. The grinding process ends when workpiece 17 is ground to a specified thickness. After grinding, workpiece 17 is positioned in cleaning area 14 using a transport assembly 602, and its upper surface 170 is cleaned using a rotary cleaning unit 73. Then, workpiece 17 is stored in box 70 using a robot 71.

[0060] During the processing of the workpiece 17 using the aforementioned processing apparatus 1, before placing the workpiece 17 on the holding surface 200, it is checked whether there is oil contamination on the holding surface 200 of the chuck table 2, etc. The operation of the processing apparatus 1 when checking for oil contamination will be described below.

[0061] First, a darkroom is formed by blocking external light using a light-shielding unit 82, so that external light does not shine on the holding surface 200 of the chuck table 2, which is one of the irradiation areas. Next, while irradiating the holding surface 200 with ultraviolet light using a lamp 81, a camera 80 takes an image of the holding surface 200. The information of the captured image is sent to a judgment unit 9 and stored in a storage device (not shown) or similar device included in the judgment unit.

[0062] Then, the determination unit 9 determines whether the first photoluminescent particle or the second photoluminescent particle exists in the captured image. If the determination unit 9 determines that the first photoluminescent particle or the second photoluminescent particle exists in the captured image, it can be determined that oil is attached to the captured area.

[0063] At this point, due to the addition of Ce to the oxynitride 3+ The first photoluminescent particle emits blue light when irradiated by the light of lamp 81. Therefore, if there is a part emitting blue light in the captured image, it can be known that the first oil containing the first photoluminescent particle is attached to the luminescent part. Thus, it can be known that the source of the first oil is the horizontal moving mechanism 5 coated with the first oil.

[0064] In addition, due to the addition of Eu to the oxynitride 2+ The second photoluminescent particles emit green light when irradiated by the light of lamp 81. Therefore, if a part of the image after maintenance is present, it can be known that the luminescent part is coated with the second oil containing the second photoluminescent particles. Thus, it can be known that the source of the scattering of the second oil is the vertical moving mechanism 4 coated with the second oil.

[0065] In this way, by utilizing the property that the first and second photoluminescent particles emit different colors of light when irradiated by the light from lamp 81, it is possible to determine what color of luminescent part is present in the captured image. Therefore, by knowing in advance the location coated with the first oil containing the first photoluminescent particle and the location coated with the second oil containing the second photoluminescent particle, it is possible to determine the source of oil scattering adhering to the holding surface 200.

[0066] In addition, in the structure for determining whether there is oil contamination in the processing device 1, besides the structure described above where the lamp 81 irradiates the holding surface 200 with ultraviolet light while the camera 80 takes a picture of the holding surface 200, the following structure can also be adopted: after the lamp 81 irradiates the holding surface 200 with ultraviolet light for a predetermined time, the irradiation of ultraviolet light by the lamp 81 is stopped, and then the camera 80 takes a picture of the holding surface 200.

[0067] At this time, when oil adheres to the holding surface 200, the first photoluminescent particle, the second photoluminescent particle, or both of them, which have photoluminescence properties, store ultraviolet light irradiating the holding surface 200. Therefore, even after the ultraviolet light from the stop lamp 81 has irradiated the area, the oil-adhered portion continues to emit light for a certain period of time, thus it can be determined that oil adheres to the emitting portion. In this structure, when a emitting portion exists, by identifying the color of light emitted by the emitting portion, the source of oil scattering adhering to the shooting area can also be determined.

[0068] Alternatively, ultraviolet light can be converted into visible light. Alternatively, it can be light that is a mixture of ultraviolet and visible light. Furthermore, infrared light can be mixed into the resulting light. That is, light containing wavelengths that excite photoluminescent particles can be emitted.

[0069] As a structure for determining whether oil is attached, for example, the captured image can be displayed on the touch panel 90, and the operator can observe the displayed image to identify whether there is a glowing part, thereby determining whether oil is attached in the captured area.

[0070] For example, a luminous part is found in the image captured by camera 80, but it is sometimes difficult to determine whether the luminous part originates from oil contamination. To prevent this problem, for example, before maintenance of processing device 1, in a state where the first oil is not applied to the horizontal moving mechanism 5 and the second oil is not applied to the vertical moving mechanism 4, the following pre-treatment is performed: while irradiating the holding surface 200 with ultraviolet light using lamp 81, the holding surface 200 is photographed using camera 80, and the photographed image is stored in the judgment unit. Then, by comparing the pre-stored image of the oil-free comparison source with the subsequent image of the luminous part captured by the camera, it is easy to determine whether oil is adhering to the luminous part.

[0071] As described above, the camera 80 is used to photograph the holding surface 200 of the chuck table 2 to determine whether there are first or second photoluminescent particles and to check whether the holding surface 200 is contaminated with oil, thereby preventing oil contamination of the workpiece 17 held by the holding surface 200.

[0072] Similarly, the camera 80 can be used to photograph the holding surface 712 of the robot 71 and the holding surface 732 of the rotary cleaning unit 73 to determine whether the first photoluminescent particle or the second photoluminescent particle is present, and to check whether the holding surface 712 and the holding surface 732 are contaminated with oil. Thus, oil contamination of the workpiece 17 can be prevented.

[0073] Similarly, when using camera 80 to photograph the holding surface 712 of robot 71 and the holding surface 732 of rotating cleaning unit 73, by taking the picture from a direction slightly tilted relative to the direction perpendicular to the holding surfaces 712 and 732, even if the photographed part is black, it is possible to determine whether it contains the first photoluminescent particle or the second photoluminescent particle by identifying the color of the oil attached to the black part.

[0074] Furthermore, based on the occurrence of oil contamination, it can be known that the oil supply to the ball screw 50 or guide rail 51 of the horizontal moving mechanism 5 or the ball screw 40 or guide rail 41 of the vertical moving mechanism 4 is inappropriate. This can promote the improvement of the oil supply and prevent malfunction of the horizontal moving mechanism 5 and the vertical moving mechanism 4.

[0075] In addition, in the above embodiment, the illuminating area is made into a darkroom by using the light-shielding unit 82 and the camera 80 is used to take pictures. However, the light-shielding unit 82 is not necessary. If it is possible to determine whether there is oil adhering in the shooting area based on the image taken without forming a darkroom, the light-shielding unit 82 may not be used.

Claims

1. A processing apparatus, wherein, The processing device has the following features: A box, which contains the items being processed; A robot that removes the workpiece from the box and holds it on the robot's holding surface to transport it; A chuck table has a holding surface for holding the workpiece. A processing unit that processes the workpiece held by the holding surface; A rotary cleaning unit that holds the workpiece processed by the processing unit on the holding surface of the rotary cleaning unit for cleaning; A horizontal moving mechanism that moves the chuck table horizontally relative to the machining unit; A vertical movement mechanism that moves the machining unit relative to the chuck table in a vertical direction; Oil is supplied to the horizontal moving mechanism and the vertical moving mechanism; A camera that photographs the robot, the chuck table, and the surfaces holding the workpiece in the rotary cleaning unit; and The lamp shines light onto the area where the camera is shooting. The horizontal moving mechanism is coated with a first oil containing first photoluminescent particles, and the vertical moving mechanism is coated with a second oil containing second photoluminescent particles, the second photoluminescent particles emitting light of a different color than the first photoluminescent particles. In the image of the area captured by the camera under the light of the lamp, the color of the light emitted by the first or second photoluminescent particle indicates whether the oil in the area was dispersed from the horizontal or vertical moving mechanism.

2. The processing apparatus according to claim 1, wherein, The first photoluminescent particle or the second photoluminescent particle has photoluminescence properties.

Images