A gyroscope for detecting out-of-plane

Abstract

The present invention provides an out-of-plane detection gyroscope, which includes: a left frame structure, which is located to the left of a center point and can perform resonant motion along the Y-axis; a right frame structure, which is located to the right of the center point and can perform resonant motion along the Y-axis in the opposite direction to the left frame structure; a left movable mass block, which is located in a first space of the left frame structure and connected to the left frame structure via a first inclined flexible beam; a left sensitive mass block, which is located in the first space of the left frame structure and connected to the left movable mass block via a first sensitive flexible beam; a right movable mass block, which is located in a second space of the right frame structure and connected to the right frame structure via a second inclined flexible beam; and a right sensitive mass block, which is located in the second space of the right frame structure and connected to the right movable mass block via a second sensitive flexible beam. Compared with the prior art, the present invention has a reasonable and compact design, good reliability, simple process, and high detection accuracy.

Description

Technical field

[0001] The present invention relates to the technical field of micro-mechanical systems, and in particular to an out-of-plane detection gyroscope with high detection accuracy. [Background Technology]

[0002] A gyroscope is a sensor used to measure angular rate and is one of the core components of inertial technology. It plays an important role in modern industrial control, aerospace, national defense and military, and consumer electronics.

[0003] Traditional off-axis gyroscopes have a single-mass block structure. When driven, the driving frame drives the sensitive mass block to move. During detection, the sensitive mass block moves out of the plane to detect the angular rate of the X / Y axis. Common dual-frame structure gyroscopes are mostly used for in-plane detection and are rarely used to detect off-axis angular rate. See Chinese invention patents CN109737943A and CN108507555A, both of which disclose a dual-frame MEMS gyroscope. The disclosed micro-gyroscope has an ingenious structural design. When driven, it moves in the X-direction. When sensitive to the Coriolis force, the sensitive mass moves in the Y-direction. This structure is mainly used to detect the in-plane Z-axis angular velocity. Continuing with Chinese invention patent CN109059893A, it mainly discloses a monolithic dual-axis gyroscope with an ingenious structural design. When driven, the driving module drives the square frame and the longitudinal strip X-axis detection plate to move along the Y-axis. When sensitive to an angular velocity input on the X-axis, the longitudinal strip X-axis detection plate moves along the Z-axis. The X-axis angular velocity is obtained by detecting the change in the sparse-tooth capacitance on the X-axis. When sensitive to an angular velocity input on the Z-axis, the square frame moves along the Y-axis. The Z-axis angular velocity is obtained by detecting the change in the sparse-tooth capacitance on the Z-axis. However, this gyroscope structure has low off-axis angular velocity detection accuracy.

[0004] Therefore, it is urgent to propose a new technical solution to solve the above problems. [Summary of the invention]

[0005] One of the purposes of the present invention is to provide an out-of-plane detection gyroscope, which adopts a dual-frame structure. On the one hand, its structural design is novel, and off-axis angular rate detection is achieved through an ingenious tilted flexible beam structure and mass block design; on the other hand, its design is reasonable and compact, with good reliability, simple process and high detection accuracy.

[0006] According to one aspect of the present invention, the present invention provides an out-of-plane detection gyroscope, which includes: a left frame structure, which is located on the left side of a center point A and defines a first space therein, and the left frame structure can perform resonant motion along the Y-axis; a right frame structure, which is located on the right side of the center point A and defines a second space therein, the right frame structure is parallel to the left frame structure and spaced a predetermined distance apart, and can perform resonant motion along the Y-axis in the opposite direction to the left frame structure; a left movable mass block, which is located in the first space of the left frame structure and is connected to the left frame structure via a first inclined flexible beam; a left sensitive mass block, which is located in the first space of the left frame structure and is connected to the left movable mass block via a first sensitive flexible beam; a right movable mass block, which is located in the second space of the right frame structure and is connected to the right frame structure via a second inclined flexible beam; and a right sensitive mass block, which is located in the second space of the right frame structure and is connected to the right movable mass block via a second sensitive flexible beam.

[0007] Compared with the prior art, the out-of-plane detection gyroscope designed in the present invention adopts a dual-frame structure and can be used for X / Y axis angular rate detection. The frame structure is cleverly provided with a moving mass block, a sensitive mass block and a flexible beam structure. When driven, the moving mass block drives the sensitive mass block to move; during detection, the moving mass block tilts (or tilts out of the plane), and the sensitive mass block can move vertically up and down along the Z axis (or move out of the plane); the flexible beam structure can convert in-plane motion into out-of-plane motion, thereby making the out-of-plane detection micro-gyroscope designed in the present invention reasonably compact in structure design, reliable, simple in process and high in detection accuracy.

Brief Description of the Drawings

[0008] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive effort. Among them:

[0009] Figure 1 Schematic diagram of the overall structure of an out-of-plane detection gyroscope in one embodiment of the present invention;

[0010] Figure 2 For the present invention Figure 1 Schematic diagram of the three-axis gyroscope in driving state;

[0011] Figure 3 For the present invention Figure 1 The diagram shows the three-axis gyroscope during X-axis detection.

[0012] Among them, 1a-left frame structure; 1b-right frame structure;

[0013] 2a - first mobile mass block; 2b - second mobile mass block; 2c - third mobile mass block; 2d - fourth mobile mass block; 2e - left sensitive mass block; 2f - right sensitive mass block;

[0014] 3a.1 and 3a.2 - first driving electrodes; 3a.3 and 3a.4 - second driving electrodes; 3a.5 and 3a.6 - third driving electrodes; 3a.7 and 3a.8 - fourth driving electrodes; 3b.1 - first driving feedback electrode; 3b.2 - second driving feedback electrode; 3b.3 - third driving feedback electrode; 3b.4 - fourth driving feedback electrode; 3c.1 - first sensitive electrode; 3c.2 - second sensitive electrode;

[0015] 4a.1 to 4a.4 - Left frame structure support beam; 4a.5 to 4a.8 - Right frame structure support beam; 4b.1 to 4b.4 - First inclined flexible beam; 4b.5 to 4b.8 - Second inclined flexible beam; 4c.1 to 4c.4 - First sensitive flexible beam; 4c.5 to 4c.8 - Second sensitive flexible beam; 4d.1 - First coupling beam; 4d.2 - Second coupling beam;

[0016] 5a.1~-5a.4 left frame structure anchor point; 5a.5~-5a.8 right frame structure anchor point; 5b.1-first coupling beam anchor point; 5b.2-second coupling beam anchor point. [Specific implementation method]

[0017] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0018] The term "one embodiment" or "embodiment" herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in various places throughout this specification does not necessarily refer to the same embodiment, nor does it refer to separate or selective embodiments that are mutually exclusive of other embodiments. Unless otherwise specified, the terms "connected," "connected," and "connected" herein, indicating electrical connection, refer to direct or indirect electrical connection.

[0019] In the description of the present invention, it should be understood that the terms "upper," "lower," "left," "right," "top," "bottom," "inner," "outer," and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of the present invention and simplify the description. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limiting the present invention. In the description of the present invention, "plurality" means two or more, unless otherwise expressly and specifically defined.

[0020] In the present invention, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," "fixed," and "coupled" should be interpreted broadly; for example, they may refer to fixed or detachable connections, or integration; mechanical or electrical connections; direct or indirect connections through an intermediary; and may encompass internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of these terms in the present invention based on specific circumstances.

[0021] In view of the problems existing in the prior art, the present invention provides a gyroscope for detecting out-of-plane. Figure 1 As shown in FIG, it is a schematic diagram of the overall structure of an out-of-plane detection gyroscope in one embodiment of the present invention.

[0022] Figure 1 The out-of-plane detection gyroscope shown includes a left frame structure 1a, a right frame structure 1b, left movable mass blocks 2a, 2b, right movable mass blocks 2c, 2d, left sensitive mass block 2e, right sensitive mass block 2f, inclined flexible beams 4b.1~4b.8, and sensitive flexible beams 4c.1~4c.8.

[0023] The left frame structure 1a is located on the left side of the center point A, and a first space is defined therein. The left frame structure 1a can perform resonant motion along the Y axis. The right frame structure 1b is located on the right side of the center point A, and a second space is defined therein. The right frame structure 1b is parallel to the left frame structure 1a and spaced a predetermined distance apart. The right frame structure 1b can perform resonant motion in the opposite direction to the left frame structure 1a along the Y axis. The left movable mass blocks 2a and 2b are located in the first space of the left frame structure 1a, and are connected to the left frame structure 1a via first inclined flexible beams 4b.1 to 4b.4. 1a; the left sensitive mass 2e is located in the first space of the left frame structure 1a and is connected to the left movable masses 2a and 2b via first sensitive flexible beams 4c.1 to 4c.4; the right movable masses 2c and 2d are located in the second space of the right frame structure 1b and are connected to the right frame structure 1b via second inclined flexible beams 4b.5 to 4b.8; the right sensitive mass 2f is located in the second space of the right frame structure 1b and is connected to the right movable masses 2c and 2d via second sensitive flexible beams 4c.5 to 4c.8. Flexible beams can also be called torsion beams.

[0024] In order to better illustrate the structure of the out-of-plane detection gyroscope shown in the present invention, a three-dimensional rectangular coordinate system can be established. Figure 1In the embodiment shown, in the plane where the base of the out-of-plane detection gyroscope is located, the direction parallel to the left frame structure 1a and the right frame structure 1b is the Y axis, the direction perpendicular to the left frame structure 1a and the right frame structure 1b is the X axis, and the Z axis is determined by the X axis and the Y axis as the coordinate axis. The three-dimensional rectangular coordinate system established by the X axis, the Y axis and the Z axis is in Figure 1 This is reflected in the figure, where the X-axis is along the left-right direction, the Y-axis is along the up-down direction, and the coordinate origin is the center point A.

[0025] exist Figure 1 In the specific embodiment shown, the left frame structure 1a and the right frame structure 1b are both semi-enclosed structures with one side open, and the openings of the left frame structure 1a and the right frame structure 1b are arranged opposite to each other;

[0026] The left frame structure 1 a and the right frame structure 1 b each include a frame upper portion 110 , a frame lower portion 130 , and a frame connecting portion 120 , wherein the frame connecting portion 120 is connected between the frame upper portion 110 and the frame lower portion 130 .

[0027] Figure 1 The shown out-of-plane detection gyroscope further includes: left frame structure anchor points 5a.1 to 5a.4; left frame structure support beams 4a.1 to 4a.4 connected between the left frame structure anchor points 5a.1 to 5a.4 and the left frame structure 1a;

[0028] Right frame structure anchor points 5a.5~5a.8; right frame structure support beams 4a.5~4a.8, which are connected between the right frame structure anchor points 5a.5~5a.8 and the right frame structure 1b; first drive electrodes 3a.1, 3a.2 and second drive electrodes 3a.3, 3a.4 respectively arranged on the upper and lower sides of the left frame structure 1a; third drive electrodes 3a.5, 3a.6 and fourth drive electrodes 3a.7, 3a.8 respectively arranged on the upper and lower sides of the right frame structure 1b; first drive feedback electrodes 3b.1 and second drive feedback electrodes 3b.2 respectively arranged on the upper and lower sides of the left frame structure 1a; third drive feedback electrodes 3b.3 and fourth drive feedback electrodes 3b.4 respectively arranged on the upper and lower sides of the right frame structure 1b.

[0029] The first drive electrodes 3a.1, 3a.2, the second drive electrodes 3a.3, 3a.4, the third drive electrodes 3a.5, 3a.6 and the fourth drive electrodes 3a.7, 3a.8 are fixedly arranged on a substrate (not shown); the first drive feedback electrode 3b.1, the second drive feedback electrode 3b.2, the third drive feedback electrode 3b.3 and the fourth drive feedback electrode 3b.4 are fixedly arranged on a substrate (not shown); the left frame structure 1a is connected to the left frame structure anchor points 5a.1 to 5a.4 through the left frame structure support beams 4a.1 to 4a.4, and the left frame structure 1a and the left frame structure support beams 4a.1 to 4a.4 are suspended above the substrate; the right frame structure 1b is connected to the right frame structure anchor points 5a.5 to 5a.8 through the right frame structure support beams 4a.5 to 4a.8, and the right frame structure 1b and the right frame structure support beams 4a.5 to 4a.8 are suspended above the substrate. The left frame structure 1a, the right frame structure 1b and the frame structure support beams 4a.1-4a.8 are of the same thickness and are suspended structures, while the frame structure anchor points 5a.1-5a.8 are non-suspended structures and are directly connected to the base for support.

[0030] exist Figure 1In the illustrated embodiment, the left frame structure 1a and the right frame structure 1b have the same structure and are arranged symmetrically about the Y axis (or symmetrically distributed left and right). First drive electrodes 3a.1 and 3a.2 are arranged on the upper side of the left frame structure 1a and arranged sequentially along the X axis direction (or left and right direction); second drive electrodes 3a.3 and 3a.4 are arranged on the lower side of the left frame structure 1a and arranged sequentially along the X axis direction (or left and right direction); third drive electrodes 3a.5 and 3a.6 are arranged on the upper side of the right frame structure 1b and arranged sequentially along the X axis direction (or left and right direction); fourth drive electrodes 3a.7 and 3a.8 are arranged on the lower side of the right frame structure 1b and arranged sequentially along the X axis direction (or left and right direction), wherein the first drive electrodes 3a.1 and 3a.2, the second drive electrodes 3a.3 and 3a.4, the third drive electrodes 3a.5 and 3a.6, and the fourth drive electrodes 3a.7 and 3a.8 are symmetrical about the X and Y axes as a whole. The first drive feedback electrode 3b.1 is arranged on the upper side of the left frame structure 1a, and on the left and right sides of the first drive electrodes 3a.1 and 3a.2; the second drive feedback electrode 3b.2 is arranged on the lower side of the left frame structure 1a, and on the left and right sides of the second drive electrodes 3a.3 and 3a.4; the third drive feedback electrode 3b.3 is arranged on the upper side of the right frame structure 1b, and on the left and right sides of the third drive electrodes 3a.5 and 3a.6; the fourth drive feedback electrode 3b.4 is arranged on the lower side of the right frame structure 1b, and on the left and right sides of the fourth drive electrodes 3a.5 and 3a.8; wherein, the first drive feedback electrode 3b.1, the second drive feedback electrode 3b.2, the third drive feedback electrode 3b.3 and the fourth drive feedback electrode 3b.4 are symmetrical about the X-axis and the Y-axis as a whole.

[0031] exist Figure 1In the illustrated embodiment, a third space is defined in the upper frame portion 110 of the left frame structure 1a, and a fourth space is defined in the lower frame portion 130 of the left frame structure 1a; a fifth space is defined in the upper frame portion 110 of the right frame structure 1b, and a sixth space is defined in the lower frame portion 130 of the right frame structure 1b; the left frame structure anchor points 5a.1 to 5a.4 are located in the third space of the upper frame portion 110 and the fourth space of the lower frame portion 130 of the left frame structure 1a, and the left frame structure support beams 4a.1 to 4a.4 are located in the third space of the upper frame portion 110 and the fourth space of the lower frame portion 130 of the left frame structure 1a. Each left frame structure anchor point 5a.1~5a.4 is connected to the left frame structure 1a through a corresponding left frame structure support beam 4a.1~4a.4; the right frame structure anchor points 5a.5~5a.8 are located in the fifth space of the upper frame part 110 and the sixth space of the lower frame part 130 of the right frame structure 1b, and the right frame structure support beams 4a.5~4a.8 are located in the fifth space of the upper frame part 110 and the sixth space of the lower frame part 130 of the right frame structure 1b, wherein each right frame structure anchor point 5a.5~5a.8 is connected to the right frame structure 1b through a corresponding right frame structure support beam 4a.5~4a.8.

[0032] exist Figure 1 In the specific embodiment shown, there are four left frame structure support beams 4a.1 to 4a.4, wherein two left frame structure support beams 4a.1 and 4a.2 are respectively located at the left and right ends of the third space of the frame upper portion 110 of the left frame structure 1a, and the other two left frame structure support beams 4a.3 and 4a.4 are respectively located at the left and right ends of the fourth space of the frame lower portion 130 of the left frame structure 1a; there are four right frame structure support beams 4a.5 to 4a.8, wherein two right frame structure support beams 4a.5 and 4a.6 are respectively located at the left and right ends of the fourth space of the frame lower portion 130 of the left frame structure 1a. At the left and right ends of the fifth space of the upper frame part 110 of the right frame structure 1b, the other two left frame structure support beams 4a.7 and 4a.8 are respectively located at the left and right ends of the sixth space of the lower frame part 130 of the right frame structure 1b; the left frame structure support beams 4a.1~4a.4 and the right frame structure support beams 4a.5~4a.8 all adopt the same U-shaped structure and the opening direction is parallel to the X-axis; the left frame structure support beams 4a.1~4a.4 and the right frame structure support beams 4a.5~4a.8 are symmetrical about the X-axis and the Y-axis as a whole.

[0033] exist Figure 1In the illustrated embodiment, there are four left frame structure anchor points 5a.1 to 5a.4, two of which are located at the left and right ends of the third space of the upper frame portion 110 of the left frame structure 1a, and the other two left frame structure anchor points 5a.3 and 5a.4 are located at the left and right ends of the fourth space of the lower frame portion 130 of the left frame structure 1a. There are four right frame structure anchor points 5a.5 to 5a.8, two of which are located at the left and right ends of the fifth space of the upper frame portion 110 of the right frame structure 1b, and the other two right frame structure anchor points 5a.7 and 5a.8 are located at the left and right ends of the fourth space of the lower frame portion 130 of the right frame structure 1b. The left frame structure anchor points 5a.1 to 5a.4 and the right frame structure anchor points 5a5 to 5a.8 are symmetrical about the X and Y axes.

[0034] like Figure 2 As shown, by applying a driving voltage to the first driving electrodes 3a.1, 3a.2 and the second driving electrodes 3a.3, 3a.4, the left frame structure 1a is driven to perform resonant motion along the Y-axis; by applying a driving voltage to the third driving electrodes 3a.5, 3a.6 and the fourth driving electrodes 3a.7, 3a.8, the right driving frame structure 1b is driven to perform resonant motion along the Y-axis in the opposite direction to the left frame structure 1a. For detailed methods for applying driving voltages to the driving electrodes to drive the frame structure to perform resonant motion along the X-axis, reference can be made to existing related technologies and will not be detailed here.

[0035] exist Figure 1In the embodiment shown, there are two left movable masses 2a and 2b, namely the first movable mass 2a and the second movable mass 2b, wherein the first movable mass 2a is located on the left side of the first space of the left frame structure 1a, and the first movable mass 2a is connected to the left frame structure 1a through the first inclined flexible beams 4b.1 and 4b.3; the second movable mass 2b is located on the right side of the first space of the left frame structure 1a, and the second movable mass 2b is connected to the left frame structure 1a through the first inclined flexible beams 4b.2 and 4b.4; the left sensitive mass 2e is connected to the first movable mass 2a and the second movable mass 2e through the first sensitive flexible beams 4c.1 to 4c.4. b; there are two right movable masses 2c and 2d, namely the third movable mass 2c and the fourth movable mass 2d, wherein the third movable mass 2c is located on the left side of the second space of the right frame structure 1b and is connected to the right frame structure 1b via the second inclined flexible beams 4b.5 and 4b.7; the fourth movable mass 2d is located on the right side of the second space of the right frame structure 1b and is connected to the right frame structure 1b via the second inclined flexible beams 4b.6 and 4b.8; the right sensitive mass 2f is connected between the third movable mass 2c and the fourth movable mass 2d via the second sensitive flexible beams 4c.5 to 4c.8. The inclined flexible beams 4b.1 to 4b.8 and the sensitive flexible beams 4c.1 to 4c.8 can convert motion in the X / Y plane into motion outside the X / Y plane.

[0036] exist Figure 1In the embodiment shown, there are four first inclined flexible beams 4b.1 to 4b.4 arranged in the first space of the left frame structure 1a, wherein two first inclined flexible beams 4b.1 and 4b.3 are respectively located at the upper and lower ends of the left side of the first movable mass block 2a to connect the first movable mass block 2a and the left frame structure 1a; the other two first inclined flexible beams 4b.2 and 4b.4 are respectively located at the upper and lower ends of the right side of the second movable mass block 2b to connect the second movable mass block 2b and the left frame structure 1a. frame structure 1a; there are four second inclined flexible beams 4b.5 to 4b.8 arranged in the second space of the right frame structure 1b, wherein two second inclined flexible beams 4b.5 and 4b.7 are respectively located at the upper and lower ends of the left side of the third movable mass block 2c to connect the third movable mass block 2c and the right frame structure 1b; the other two second inclined flexible beams 4b.6 and 4b.8 are respectively located at the upper and lower ends of the right side of the fourth movable mass block 2d to connect the fourth movable mass block 2d and the right frame structure 1b. frame structure 1b; there are four first sensitive flexible beams 4c.1 to 4c.4 arranged in the first space of the left frame structure 1a, wherein two first sensitive flexible beams 4c.1 and 4c.3 are respectively located at the upper and lower ends of the left side of the left sensitive mass block 2e to connect the left sensitive mass block 2e and the first movable mass block 2a; the other two first sensitive flexible beams 4c.3 and 4c.4 are respectively located at the upper and lower ends of the right side of the left sensitive mass block 2e to connect the left sensitive mass block 2e and the second movable mass block 2b There are four second sensitive flexible beams 4c.5 to 4c.8 arranged in the second space of the right frame structure 1b, among which two second sensitive flexible beams 4c.5 and 4c.7 are respectively located at the upper and lower ends of the left side of the right sensitive mass block 2f to connect the right sensitive mass block 2f and the third movable mass block 2c; the other two second sensitive flexible beams 4c.7 and 4c.8 are respectively located at the upper and lower ends of the right side of the right sensitive mass block 2f to connect the right sensitive mass block 2f and the fourth movable mass block 2d.

[0037] Figure 1 The out-of-plane detection gyroscope shown also includes:

[0038] Coupling beam anchor points 5b.1, 5b.2, located between the left frame structure 1a and the right frame structure 1b;

[0039] The coupling beams 4d.1 and 4d.2 are connected to the coupling beam anchor points 5b.1 and 5b.2, and the coupling beams 4d.1 and 4d.2 are connected between the left frame structure 1a and the right frame structure 1b. The coupling beams 4d.1 and 4d.2 are configured to cause the left frame structure 1a and the right frame structure 1b to move in opposite directions along the Y-axis.

[0040] exist Figure 1 In the embodiment shown, there are two coupling beam anchor points 5b.1 and 5b.2, namely, a first coupling beam anchor point 5b.1 and a second coupling beam anchor point 5b.2. The first coupling beam anchor point 5b.1 is located between the frame upper portion 110 of the left frame structure 1a and the frame upper portion 110 of the right frame structure 1b; the second coupling beam anchor point 5b.2 is located between the frame lower portion 130 of the left frame structure 1a and the frame lower portion 130 of the right frame structure 1b; the two coupling beams 4d.1 and 4d.2 are respectively A coupling beam 4d.1 and a second coupling beam 4d.2, wherein the first coupling beam 4d.1 is connected to the first coupling beam anchor point 5b.1, and the first coupling beam 4d.1 is connected between the frame upper part 110 of the left frame structure 1a and the frame upper part 110 of the right frame structure 1b; the second coupling beam 4d.2 is connected to the second coupling beam anchor point 5b.2, and the second coupling beam 4d.2 is connected between the frame lower part 130 of the left frame structure 1a and the frame lower part 130 of the right frame structure 1b.

[0041] exist Figure 1 In the illustrated embodiment, the cross-section of the first coupling beam anchor point 5b.1 and the second coupling beam anchor point 5b.2 is shaped like a two-legged harpoon, formed with a fork groove, the opening of which faces the center point A. The first coupling beam 4d.1 and the second coupling beam 4d.2 are both E-shaped structures, the opening of which faces away from the center point A. The E-shaped structure includes a first deformable beam, a second deformable beam, and a third deformable beam that are parallel to each other, as well as a support beam connecting the first, second, and third deformable beams. The first deformable beam of the first coupling beam 4d.1 is connected to the upper frame portion 110 of the left frame structure 1a, the second deformable beam is accommodated in the fork groove of the first coupling beam anchor point 5b.1 and connected to the first coupling beam anchor point 5b.1, and the third deformable beam is connected to the upper frame portion 110 of the right frame structure 1b.

[0042] The first deformation beam of the second coupling beam 4d.2 is connected to the frame lower part 130 of the left frame structure 1a, its second deformation beam is accommodated in the fork groove of the second coupling beam anchor point 5b.2 and is connected to the second coupling beam anchor point 5b.2, and its third deformation beam is connected to the frame lower part 130 of the right frame structure 1b.

[0043] Figure 1 The out-of-plane detection gyroscope shown also includes:

[0044] A first sensitive electrode 3c.1 provided below the left sensitive mass 2e;

[0045] A second sensitive electrode 3c.2 is provided below the right sensitive mass 2f;

[0046] When the X-axis angular velocity input is sensed, the left sensitive mass block 2e and the right sensitive mass block 2f will move in opposite directions (or off-plane) along the Z-axis direction. The first sensitive electrode 3c.1 detects the change in distance from the left sensitive mass block 2e, and the second sensitive electrode 3c.2 detects the change in distance from the right sensitive mass block 2f. Specifically, after being sensitive to the X-axis angular velocity, the capacitance of the first sensitive electrode 3c.1 and the capacitance of the second sensitive electrode 3c.2 increase and decrease respectively. The difference between the two is used to obtain the capacitance change caused by the X-axis angular velocity, and then the magnitude of the input X-axis angular velocity is obtained.

[0047] Among them, the first sensitive electrode 3c.1 and the second sensitive electrode 3c.2 are arranged on the substrate; the coupling beam anchor points 5b.1 and 5b.2 are fixed on the substrate; the coupling beams 4d.1 and 4d.2 are suspended above the substrate; the left movable mass blocks 2a and 2b, the right movable mass blocks 2c and 2d, the left sensitive mass block 2e and the right sensitive mass block 2f are suspended above the substrate; the first inclined flexible beams 4b.1 to 4b.4, the second inclined flexible beams 4b.5 to 4b.8, the first sensitive flexible beams 4c.1 to 4c.4 and the second sensitive flexible beams 4c.5 to 4c.8 are suspended above the substrate. The first inclined flexible beams 4b.1 to 4b.4 and the second inclined flexible beams 4b.5 to 4b.8 are symmetrical about the X-axis and the Y-axis; the first sensitive flexible beams 4c.1 to 4c.4 and the second sensitive flexible beams 4c.5 to 4c.8 are symmetrical about the X-axis and the Y-axis; the first sensitive electrode 3c.1 and the second sensitive electrode 3c.2 are symmetrical about the Y-axis; the coupling beam anchor points 5b.1 and 5b.2 are symmetrical about the X-axis and the Y-axis; and the coupling beams 4d.1 and 4d.2 are symmetrical about the X-axis and the Y-axis.

[0048] It should be noted that in Figure 1 A certain amount of through holes can be provided on the mass blocks shown (e.g., the left movable mass blocks 2a, 2b, the right movable mass blocks 2c, 2d, the left sensitive mass block 2e, the right sensitive mass block 2f) to reduce squeeze film damping and improve detection sensitivity; Figure 1 The mass blocks shown (e.g., the left movable mass blocks 2a, 2b, the right movable mass blocks 2c, 2d, the left sensitive mass block 2e, the right sensitive mass block 2f) and the flexible beams (e.g., the first inclined flexible beams 4b.1 to 4b.4, the inclined flexible beams 4b.5 to 4b.8, the first sensitive flexible beams 4c.1 to 4c.4, the second sensitive flexible beams 4c.5 to 4c.8) may be provided with limit or buffer devices to prevent the structure from being broken due to excessive impact; Figure 1In the out-of-plane detection gyroscope shown, the overall structure electrodes are not limited to the drive electrodes 3a.1 to 3a.8, the drive feedback electrodes 3b.1 to 3b.4 and the sensitive electrodes 3c.1 and 3c.2, and test electrodes and the like may also be provided.

[0049] The present invention is described below Figure 1 The detection principle of the out-of-plane detection gyroscope shown.

[0050] Please refer to Figure 2 As shown, it is the present invention Figure 1 The schematic diagram of the three-axis gyroscope in the driving state is shown. By applying a driving voltage to the first driving electrodes 3a.1, 3a.2 and the second driving electrodes 3a.3, 3a.4, the left frame structure 1a is driven to perform resonant motion along the Y axis; by applying a driving voltage to the third driving electrodes 3a.5, 3a.6 and the fourth driving electrodes 3a.7, 3a.8, the right frame structure 1b is driven to perform resonant motion along the Y axis in the opposite direction to the left frame structure 1a; when the left frame structure 1a performs resonant motion along the Y axis, the right frame structure 1b performs resonant motion along the Y axis in the opposite direction to the left frame structure 1 During the resonant motion in the opposite direction to axis a, the left frame structure 1a drives the left sensitive mass block 2e to perform resonant motion along the Y-axis through the first inclined flexible beams 4b.1 to 4b.4, the left movable mass blocks 2a and 2b, and the first sensitive flexible beams 4c.1 to 4c.4; the right frame structure 1b drives the right sensitive mass block 2f to perform resonant motion along the Y-axis in the opposite direction to that of the left sensitive mass block 2e through the second inclined flexible beams 4b.5 to 4b.8, the right movable mass blocks 2c and 2d, and the second sensitive flexible beams 4c.5 to 4c.8.

[0051] Please refer to Figure 3 As shown, it is the present invention Figure 1 The diagram shows an out-of-plane detection gyroscope performing X-axis detection. When sensitive to an X-axis angular rate input, the Coriolis effect generates a Coriolis force, which causes the left movable masses 2a, 2b and the right movable masses 2c, 2d to tilt (or tilt out of plane), driving the left sensitive mass 2e and the right sensitive mass 2f to move out of plane in opposite directions along the Z-axis. The first sensitive electrodes 3c.1 and the second sensitive electrodes 3c.2 located below the left sensitive mass 2e and the right sensitive mass 2f sense the change in distance, causing the capacitance of the first sensitive electrodes 3c.1 and the second sensitive electrodes 3c.2 to change accordingly. By detecting this capacitance change, the magnitude of the X-axis angular rate can be determined.

[0052] In summary, the out-of-plane detection gyroscope designed by the present invention adopts a double-frame structure, which includes a left frame structure 1a and a right frame structure 1b. In each frame structure, a moving mass block 2a~2d, a sensitive mass block 2e, 2f and a flexible beam 4c.1~4c.8 are cleverly set. The flexible beam 4c.1~4c.8 is used for connecting the frame structures 1a, 1b, the moving mass blocks 2a~2d, and the sensitive mass blocks 2e, 2f. It can convert the in-plane motion into the out-of-plane motion. The overall structure has a consistent thickness and is simple to process. When driven, the moving mass blocks Blocks 2a-2d drive the sensitive masses 2e and 2f to move. During detection, the mobile masses 2a-2d tilt (or tilt out of plane), allowing the sensitive masses 2e and 2f to move vertically up and down along the Z axis. Electrostatic drive and differential capacitance detection enable differential detection between the two sensitive masses 2e and 2f during detection, effectively improving detection accuracy. Furthermore, a central coupling beam 4d is provided between the dual-frame structures, ensuring that the left and right frame structures 1a and 1b always move in opposite directions along the Y axis, effectively resisting the effects of external linear acceleration. The out-of-plane detection gyroscope of the present invention achieves differential amplification of detection capacitance, suppresses coupling within the micro-gyroscope frame structure, and improves the detection accuracy of the micro-gyroscope. It also features a reasonable and compact design, excellent reliability, and simple manufacturing.

[0053] In the description of this specification, reference to the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification.

[0054] Although embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and are not to be construed as limitations on the present invention, and that those skilled in the art may make changes, modifications and variations to the above embodiments within the scope of the present invention.

Claims

1. An out-of-plane detection gyroscope, characterized in that: It includes: a left frame structure, located to the left of the center point A, defining a first space therein, wherein the left frame structure is capable of resonant motion along the Y-axis; a right frame structure, located to the right of the center point A, defining a second space therein, the right frame structure being parallel to and spaced a predetermined distance from the left frame structure, and capable of performing resonant motion along the Y-axis in a direction opposite to that of the left frame structure; a left movable mass block, located in the first space of the left frame structure and connected to the left frame structure via a first inclined flexible beam; a left sensitive mass block, located in the first space of the left frame structure and connected to the left movable mass block via a first sensitive flexible beam; a right movable mass block, located in the second space of the right frame structure and connected to the right frame structure via a second inclined flexible beam; a right sensitive mass block, located in the second space of the right frame structure and connected to the right movable mass block via a second sensitive flexible beam; a coupling beam anchor point located between the left frame structure and the right frame structure; a coupling beam connected to the coupling beam anchor point, wherein the coupling beam is connected between the left frame structure and the right frame structure, and the arrangement of the coupling beam causes the left frame structure and the right frame structure to move in opposite directions along the Y axis; a first sensitive electrode disposed below the left sensitive mass; a second sensitive electrode disposed below the right sensitive mass; When the X-axis angular velocity input is sensed, the Coriolis effect generates a Coriolis force, which drives the left movable mass block and the right movable mass block to tilt, and drives the left sensitive mass block and the right sensitive mass block to move in opposite directions along the Z-axis. The first sensitive electrode detects the change in distance from the left sensitive mass block, and the second sensitive electrode detects the change in distance from the right sensitive mass block. The capacitance of the first sensitive electrode and the second sensitive electrode increases and decreases respectively. The difference between the two is used to obtain the capacitance change caused by the X-axis angular velocity, and then the input X-axis angular velocity is obtained. The X-axis and the Y-axis are perpendicular to each other and define the plane where the out-of-plane detection gyroscope is located. The Z-axis is perpendicular to the plane defined by the X-axis and the Y-axis. The X-axis is in the left-right direction, and the Y-axis is in the up-down direction. The coordinate origin is the center point A. The left frame structure and the right frame structure are both semi-enclosed structures with one side open, and the openings of the left frame structure and the right frame structure are arranged opposite to each other; The left frame structure and the right frame structure each include a frame upper portion, a frame lower portion and a frame connecting portion, wherein the frame connecting portion is connected between the frame upper portion and the frame lower portion. There are two coupling beam anchor points, namely a first coupling beam anchor point and a second coupling beam anchor point, wherein the first coupling beam anchor point is located between the upper frame portion of the left frame structure and the upper frame portion of the right frame structure; and the second coupling beam anchor point is located between the lower frame portion of the left frame structure and the lower frame portion of the right frame structure; There are two coupling beams, namely a first coupling beam and a second coupling beam. The first coupling beam is connected to the first coupling beam anchor point, and the first coupling beam is connected between the upper frame portion of the left frame structure and the upper frame portion of the right frame structure. The second coupling beam is connected to the second coupling beam anchor point, and the second coupling beam is connected between the lower frame portion of the left frame structure and the lower frame portion of the right frame structure. The cross-sectional shape of the first coupling beam anchor point and the second coupling beam anchor point is a two-legged harpoon type, wherein a fork groove is formed, and the opening direction of the fork groove faces the center point A; The first coupling beam and the second coupling beam are both E-shaped structures, the opening direction of the E-shaped structure is away from the center point A, and the E-shaped structure includes a first deformable beam, a second deformable beam, and a third deformable beam that are parallel to each other, and a support beam connecting the first deformable beam, the second deformable beam, and the third deformable beam; The first deformable beam of the first coupling beam is connected to the upper frame portion of the left frame structure, the second deformable beam is accommodated in the fork groove of the first coupling beam anchor point and is connected to the first coupling beam anchor point, and the third deformable beam is connected to the upper frame portion of the right frame structure; The first deformable beam of the second coupling beam is connected to the lower frame part of the left frame structure, the second deformable beam is accommodated in the fork groove of the second coupling beam anchor point and is connected to the second coupling beam anchor point, and the third deformable beam is connected to the lower frame part of the right frame structure.

2. The out-of-plane detection gyroscope according to claim 1, characterized in that: There are two left movable mass blocks, namely a first movable mass block and a second movable mass block, wherein the first movable mass block is located on the left side of the first space of the left frame structure and is connected to the left frame structure via the first inclined flexible beam; the second movable mass block is located on the right side of the first space of the left frame structure and is connected to the left frame structure via the first inclined flexible beam; the left sensitive mass block is connected between the first movable mass block and the second movable mass block via the first sensitive flexible beam; There are two right movable mass blocks, namely the third movable mass block and the fourth movable mass block, wherein the third movable mass block is located on the left side in the second space of the right frame structure, and is connected to the right frame structure through the second inclined flexible beam; the fourth movable mass block is located on the right side in the second space of the right frame structure, and is connected to the right frame structure through the second inclined flexible beam; the right sensitive mass block is connected between the third movable mass block and the fourth movable mass block through the second sensitive flexible beam.

3. The out-of-plane detection gyroscope according to claim 1, characterized in that: When the left frame structure performs resonant motion along the Y-axis and the right frame structure performs resonant motion in the opposite direction to that of the left frame structure along the Y-axis, the left frame structure drives the left sensitive mass block to perform resonant motion along the Y-axis through the first inclined flexible beam, the left movable mass block and the first sensitive flexible beam; and the right frame structure drives the right sensitive mass block to perform resonant motion along the Y-axis in the opposite direction to that of the left sensitive mass block through the second inclined flexible beam, the right movable mass block and the second sensitive flexible beam.

4. The out-of-plane detection gyroscope according to claim 1, characterized in that: It also includes: Left frame structure anchor point; a left frame structure support beam connected between the left frame structure anchor point and the left frame structure; Right frame structure anchor point; a right frame structure support beam connected between the right frame structure anchor point and the right frame structure; a first driving electrode and a second driving electrode respectively arranged on the upper and lower sides of the left frame structure; a third driving electrode and a fourth driving electrode respectively arranged on the upper and lower sides of the right frame structure; a first driving feedback electrode and a second driving feedback electrode respectively arranged on the upper and lower sides of the left frame structure; a third driving feedback electrode and a fourth driving feedback electrode respectively arranged on the upper and lower sides of the right frame structure; driving the left frame structure to perform resonant motion along the Y-axis by applying a driving voltage to the first driving electrode and the second driving electrode; The right frame structure is driven to perform a resonant motion along the Y-axis in the opposite direction to that of the left frame structure by applying a driving voltage to the third driving electrode and the fourth driving electrode.

5. The out-of-plane detection gyroscope according to claim 4, characterized in that: A third space is defined in the upper portion of the left frame structure, and a fourth space is defined in the lower portion of the left frame structure; A fifth space is defined in the upper portion of the right frame structure, and a sixth space is defined in the lower portion of the right frame structure; The left frame structure anchor point is located in the third space of the upper frame portion and the fourth space of the lower frame portion of the left frame structure, the left frame structure support beam is located in the third space of the upper frame portion and the fourth space of the lower frame portion of the left frame structure, and each left frame structure anchor point is connected to the left frame structure via a corresponding left frame structure support beam; The right frame structure anchor point is located in the fifth space of the upper part of the frame and the sixth space of the lower part of the frame of the right frame structure, and the right frame structure support beam is located in the fifth space of the upper part of the frame and the sixth space of the lower part of the frame of the right frame structure, wherein each right frame structure anchor point is connected to the right frame structure through a corresponding right frame structure support beam.

6. The out-of-plane detection gyroscope according to claim 4, characterized in that: The first driving electrode, the second driving electrode, the third driving electrode and the fourth driving electrode are fixedly arranged on the substrate; The first driving feedback electrode, the second driving feedback electrode, the third driving feedback electrode and the fourth driving feedback electrode are fixedly arranged on the substrate; The left frame structure and the left frame structure support beam are suspended above the base; the right frame structure and the right frame structure support beam are suspended above the base; The left frame structure anchor point is fixedly arranged on the base; the right frame structure anchor point is fixedly arranged on the base; The left movable mass block, the right movable mass block, the left sensitive mass block and the right sensitive mass block are suspended above the base; The first inclined flexible beam, the second inclined flexible beam, the first sensitive flexible beam and the second sensitive flexible beam are suspended above the substrate; The coupling beam anchor point is fixedly arranged on the base; The coupling beam is suspended above the substrate.

7. The out-of-plane detection gyroscope according to claim 6, characterized in that: The first driving electrode, the second driving electrode, the third driving electrode and the fourth driving electrode are symmetrical about the X axis and the Y axis; The first drive feedback electrode, the second drive feedback electrode, the third drive feedback electrode and the fourth drive feedback electrode are symmetrical about the X axis and the Y axis as a whole; The left frame structure and the right frame structure are symmetrical about the Y axis; The left frame structure support beam and the right frame structure support beam are symmetrical about the X axis and the Y axis; The left frame structure anchor point and the right frame structure anchor point are symmetrical about the X axis and the Y axis as a whole; The left movable mass block and the right movable mass block are symmetrical about the X axis and the Y axis; The left sensitive mass block and the right sensitive mass block are symmetrical about the Y axis; The first inclined flexible beam and the second inclined flexible beam are symmetrical about the X axis and the Y axis. The first sensitive flexible beam and the second sensitive flexible beam are symmetrical about the X axis and the Y axis as a whole; The coupling beam is symmetrical about the X-axis and the Y-axis as a whole; The coupling beam anchor point is symmetrical about the X axis and the Y axis as a whole.

8. The out-of-plane detection gyroscope according to claim 2, characterized in that: There are four first inclined flexible beams, wherein two first inclined flexible beams are respectively located at the upper and lower ends of the left side of the first mobile mass, and the other two first inclined flexible beams are respectively located at the upper and lower ends of the right side of the second mobile mass; There are four second inclined flexible beams, wherein two second inclined flexible beams are respectively located at the upper and lower ends of the left side of the third mobile mass, and the other two second inclined flexible beams are respectively located at the upper and lower ends of the right side of the fourth mobile mass; There are four first sensitive flexible beams, wherein two first sensitive flexible beams are respectively located at the upper and lower ends of the left side of the left sensitive mass block; and the other two first sensitive flexible beams are located at the upper and lower ends of the right side of the left sensitive mass block; There are four second sensitive flexible beams, two of which are located at the upper and lower ends of the left side of the right sensitive mass block; and the other two are located at the upper and lower ends of the right side of the right sensitive mass block.

9. The out-of-plane detection gyroscope according to claim 1, characterized in that: The left movable mass block, the right movable mass block, the left sensitive mass block and the right sensitive mass block are provided with through holes to reduce squeeze film damping and improve detection sensitivity; A limit or buffer device is provided on the left movable mass block, the right movable mass block, the left sensitive mass block, the right sensitive mass block, the first inclined flexible beam, the second inclined flexible beam, the first sensitive flexible beam and the second sensitive flexible beam; The out-of-plane detection gyroscope further includes a test electrode.

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