Hybrid multispectral device

Abstract

The invention relates to a hybrid multispectral device (1) comprising a substrate (100) having a first surface (101) and a second surface (102), at least one first functional element (10a-d) having a first functional layer (11) adapted to detect or emit light of a first wavelength range, and at least one second functional element (20a-c) having a second functional layer (21) adapted to detect or emit light of a second wavelength range different from the first wavelength range. The first functional element is arranged on the first surface of the substrate and the second functional element is arranged on the second surface of the substrate. The first functional element is arranged in a first lateral area (110) of the multispectral device and the second functional element is arranged in a second lateral area (120) of the multispectral device. The first lateral area and the second lateral area are arranged laterally offset with respect to each other such that light of the second wavelength range reaches the second functional element or light of the second wavelength range emitted by the second functional element exits the multispectral device on the first surface of the substrate without passing through the first functional layer.

Description

Technical Field

[0001] The present invention relates to a hybrid multispectral device suitable for detecting and / or emitting light in different spectral ranges. Background Technology

[0002] To enable the detection of different spectral ranges of light (e.g., visible, infrared, and / or UV ranges) using photodetector devices, devices with multiple sensors are known, each having different functional layers and thus detecting light from different spectral ranges. For example, DE102015109044A1 describes a component having a substrate on one side with a first functional layer for detecting light from a first wavelength range and a second functional layer for detecting light from a second wavelength range on the other side of the substrate. Here, the functional layers always overlap each other, thereby achieving a high fill factor, i.e., a large number of sensor elements per unit area. The first functional layer and the substrate are configured to be transparent to light in the second wavelength range.

[0003] US2003 / 0209651A1 describes a color-sensitive device for detecting light of different wavelengths, particularly red, green, and blue light in the visible light range. The device includes a first light-receiving portion adapted to detect light in a first wavelength range and a second light-receiving portion adapted to detect light in a second wavelength range. The first and second portions are configured such that incident light passes through the first portion and is then received by the second portion. The center wavelength of the first wavelength range is here greater than the center wavelength of the second wavelength range.

[0004] The disadvantage of this structure is that the choice of wavelength range is limited by the materials of the functional layer and the substrate, the required transparency of the first functional layer and the substrate for light in the second wavelength range, and the limited spectral resolution. Summary of the Invention

[0005] Therefore, the objective of this invention is to provide a hybrid multispectral device that reduces the disadvantages of the prior art.

[0006] Therefore, the present invention proposes a hybrid multispectral device, which includes:

[0007] - A substrate having a first surface and a second surface, wherein the second surface is opposite to the first surface.

[0008] - At least one first functional element, the at least one first functional element having a first functional layer adapted to detect or emit light in a first wavelength range, the at least one first functional element being disposed on a first surface of the substrate.

[0009] - At least one second functional element having a second functional layer adapted to detect or emit light in a second wavelength range different from the first wavelength range, the at least one second functional element being disposed on a second surface of the substrate.

[0010] Wherein, at least one first functional element is disposed in at least one first lateral region of the hybrid multispectral device, and at least one second functional element is disposed in at least one second lateral region of the hybrid multispectral device. The at least one first lateral region and the at least one second lateral region are disposed laterally offset from each other, such that light of a second wavelength range reaches the at least one second functional element, or light of a second wavelength range emitted by the at least one second functional element leaves the hybrid multispectral device on a first surface of the substrate without passing through the first functional layer, and at least one of the functional elements is a light-emitting element.

[0011] The hybrid multispectral device according to the invention includes a substrate, at least one first functional element, and at least one second functional element. The first functional element is disposed on a first surface of the substrate and includes a first functional layer adapted to detect or emit light in a first wavelength range. The second functional element is disposed on a second surface of the substrate opposite to the first surface and includes a second functional layer adapted to detect or emit light in a second wavelength range. Here, the second wavelength range differs from the first wavelength range, but may partially overlap with it. In the context of the invention, light is understood in both cases as electromagnetic radiation having wavelengths in the range of 250 nm (UV range) to approximately 10 μm (infrared range). The first and second wavelength ranges are sub-ranges of the range, respectively. Of course, the first and second functional elements may also include additional layers, such as electrode layers, in addition to the first or second functional layer. Furthermore, the first and / or second functional layers may also be layer structures composed of multiple layers.

[0012] "Set on a surface" means that the functional element is directly adjacent to the corresponding surface, or that one or more layers of the functional element are completely or partially constructed in the substrate region adjacent to the surface. Additionally, another layer may be disposed between the functional element and the corresponding surface.

[0013] One or more layers adjacent to the surface or functional element are wholly or partially constructed in the substrate region adjacent to the surface. Additionally, another layer may be disposed between the functional element and the corresponding surface.

[0014] According to the present invention, a first functional element is disposed in a first lateral region of the multispectral device, while a second functional element is disposed in a second lateral region of the multispectral device. Here, the first and second lateral regions are laterally offset from each other, such that light in a second wavelength range reaches the second functional element without passing through the first functional layer. In other words, light reaching the second functional element passes through the substrate and, if necessary, through other layers present (described later) on its path to the second functional element, but does not pass through the first functional layer or, if necessary, the other layers of the first functional element.

[0015] Here, the substrate and, if necessary, an additional layer of the second functional element serve as an optical filter. This optical filter reflects or absorbs a specific wavelength component of the incident light through its optical properties, while other wavelength components within the second wavelength range transmit with little or no change. This is important in selecting the substrate material and, if necessary, the additional layer located between the second functional layer and the emitting light source, as well as its thickness. Advantageously, the detection result of the second functional element, or the light emitted by the second functional element, is unaffected by the first functional layer and, if necessary, the additional layer of the first functional element.

[0016] The multispectral device according to the invention enables the simultaneous and spectrally selective detection and / or emission of light components in two different wavelength ranges, wherein the light detected or emitted by the first and / or second functional elements is incident on or exits the same side of the device. Here, the following feasibility exists for designing the multispectral device according to the invention: the first functional element is an emitting element and the second functional element is a detecting element; the first functional element is a detecting element and the second functional element is an emitting element; both the first and second functional elements are detecting elements; both the first and second functional elements are emitting elements.

[0017] If at least the first or second functional element is a detection element, the light detected in that functional element can be emitted from a single light source or from multiple different light sources. In the second case, the light from different light sources can be superimposed or incident on the multispectral device sequentially in time. Even if multiple light sources exist, they will be referred to simply as a single light source. When the corresponding functional element is configured as an emitting element, the first or second functional element, which is not used as a detection element, can also provide light, wherein the light to be detected is reflected by the sample to be examined. In a further process, this reflecting sample should be understood as a light source, even if it does not produce light itself but only (alternatively or unalternatively) reflects the light. Such a detection device can be used, for example, in the fields of health, pharmaceuticals, food technology, and equipment or engine monitoring in industry to qualitatively and quantitatively determine the contents of food or other materials.

[0018] If there are multiple such first and / or second functional elements, then all conclusions regarding the first functional element or the second functional element or the first lateral region and the second lateral region apply to all first functional elements or all second functional elements.

[0019] Preferably, at least one optical filter layer is disposed on the first and / or second surface of the substrate in the second lateral region, i.e., between the second functional layer and, for example, a light source. The optical filter layer is used to further control the wavelength range of light incident on the second functional layer and is preferably made of one or more dielectric materials that are sufficiently transparent in the corresponding spectral range, such as organic materials, fluorides, or silicon dioxide (SiO₂). x ) or titanium dioxide (TiO) x It is composed of materials that can be used for optical filtering due to their absorption properties.

[0020] Alternatively or additionally, the second lateral region is preferably surrounded by an optical light-shielding layer on the side of the substrate opposite to the first surface. This means that, for example, a layer of a first functional element disposed on the first surface of the substrate in the first lateral region has a lateral light-shielding layer. However, if the second lateral region is not adjacent to the first lateral region on at least one side, the optical light-shielding layer may also be constructed separately or, if necessary, on the side of an optical filter layer present in the second lateral region. Here, the light-shielding layer reduces or completely blocks scattered light, for example, from the first functional layer in the first lateral region, from entering the second lateral region. The light-shielding layer is made of, for example, silver (Ag), aluminum (Al), tungsten, or similar CMOS-compatible materials.

[0021] These two measures can improve the spectral resolution of the second functional element. Furthermore, the optical effects of the substrate, particularly the filtering effect, can be further enhanced in a targeted manner through appropriate material selection for the optical filter layer and the optical shielding layer, independent of the material of the first functional layer. In addition, these layers also serve to protect integrated active components or circuit elements from unwanted scattered light, which may exist in a lateral region of the substrate different from the second lateral region.

[0022] Preferably, an additional layer is disposed on the side of the first functional layer facing away from the first surface of the substrate, the additional layer serving as an optical filter, a reflector, or a DBR (distributed Bragg reflector). Therefore, the wavelength range defined by the first functional layer can be filtered from light incident from the light source or from light emitted by the first functional layer, and the spectral resolution of the first functional element can be improved.

[0023] Preferably, the substrate includes integrated active components (e.g., transistors) or circuit elements for processing or continuing to transmit signals obtained by the first and / or second functional elements when probed light and / or manipulating the first and / or second functional elements when they emit light. Here, wiring and vias should be understood as circuit elements, but passive components, such as resistors, should also be understood as circuit elements. As a result, complex digital or analog circuits can be constructed in the substrate, for example, using CMOS or thin-layer techniques. The described components or circuit elements are disposed within one or more lateral regions within the substrate that do not correspond to or exclude a second lateral region. In other words, the described elements are disposed outside the second lateral region, and particularly preferably within the first lateral region.

[0024] Preferably, the substrate comprises a semiconductor layer. Particularly preferably, the substrate is a semiconductor substrate. Preferably, the semiconductor layer or semiconductor substrate is made of single-crystal or polycrystalline silicon, amorphous silicon, or indium gallium zinc oxide (IGZO). Preferably, the integrated active components or circuit elements described above are at least partially constructed in the semiconductor layer or semiconductor substrate.

[0025] In embodiments of the invention, the substrate is a composite substrate and comprises multiple layers made of one or more different materials. For example, the substrate may consist of two semiconductor substrates interconnected by bonding, adhesive bonding, or other suitable joining methods, or of semiconductor layers applied to an insulator or joined to an insulator by a suitable joining method (silicon-on-insulator, SOI). Additionally, through-silicon via (TSV) technology and bonding can be used to interconnect contact connections, components, and switching elements or circuits in the various layers of the composite substrate. Materials used for TSV connections include, for example, tantalum (Ta), tungsten (W), and gold (Au). Of course, other materials (e.g., glass, plastic, or plastic films) may also be used as the composite substrate or as layers of the composite substrate.

[0026] Preferably, the first functional layer comprises or is composed of an inorganic layer. The inorganic layer may be, for example, a semiconductor layer composed of silicon, aluminum gallium arsenide, gallium phosphide, silicon carbide, zinc selenide, or indium gallium nitride. Therefore, a semiconductor photodiode (detector) or a semiconductor light-emitting diode (LED) known in the prior art can be used as the first functional element.

[0027] Preferably, the second functional layer comprises an organic layer, a layer composed of nanomaterials, a layer composed of quantum nanoparticles, or is composed of such layers. Such functional layers are also known in the prior art, and corresponding functional elements are described, for example, in EP3152785B1 as organic photodetectors or charge-transfer photodetectors (CT photodetectors). Known organic light-emitting diodes (OLEDs) can be used as the emitting functional element. In addition to the photoactive layer, other electronic components, such as transistors or resistors, can also be constructed within the organic functional layer, allowing for additional circuitry.

[0028] In an embodiment of the hybrid multispectral device according to the invention, the substrate is configured as a composite substrate consisting of a semiconductor substrate and a glass substrate or a plastic substrate, wherein the semiconductor substrate and the glass substrate or plastic substrate are interconnected by means of an adhesive layer, a bonding layer, or other connecting layer. A first functional element is constructed on or in the semiconductor substrate, wherein the first functional layer has an inorganic layer. A second functional element is constructed on the glass substrate or the plastic substrate, wherein the second functional layer comprises an organic layer or a layer composed of nanomaterials or a layer composed of quantum nanoparticles.

[0029] Of course, the substrate may also consist solely of a semiconductor substrate, with a thick insulating layer applied to one surface of the semiconductor substrate. Here, the first functional element is constructed on or within the semiconductor substrate, wherein the first functional layer has an inorganic layer, while the second functional element is constructed on the insulating layer, wherein the second functional layer comprises an organic layer or a layer composed of nanomaterials or a layer composed of quantum nanoparticles.

[0030] In addition to the first and second functional elements, in a preferred embodiment, the multispectral device according to the invention further includes at least one third functional element having a third functional layer. The third functional layer is adapted to detect or emit light in a third wavelength range different from the first and second wavelength ranges. The third functional element is disposed on a first surface of the substrate or on a second surface of the substrate in a lateral region different from the second lateral region.

[0031] Preferably, the third functional element is disposed in the first lateral region such that light of the third wavelength range reaches the third functional element, or light of the third wavelength range emitted by the third functional element leaves the multispectral device after passing through the first functional layer. In other words, the third functional element is disposed in the first lateral region on the side of the first functional element facing away from the light source, or on the side of the first functional element facing the substrate. Here, the first functional layer is transparent to light of the third wavelength range. Of course, it is not necessary to construct the third functional element in all first lateral regions of the multispectral device.

[0032] Alternatively or additionally, the third functional element having a third functional layer may also be constructed in a third lateral region different from the first and second lateral regions, wherein light incident on the third functional layer does not pass through the first functional layer before leaving the multispectral device, or light emitted by the third functional layer does not pass through the first functional layer.

[0033] In various embodiments, at least a first or second functional element is adapted to detect light and is present in the multispectral device in a quantity greater than 1. Preferably, in this case, different first functional elements adapted to detect light and / or different second functional elements adapted to detect light are adapted to detect light with wavelengths different from each other in a first or second wavelength range. Thus, further spectral resolution of the first or second wavelength range can be achieved, wherein different first functional elements or different second functional elements can, for example, detect light with a bandwidth of less than or equal to 10 nm for different wavelengths in the UV range, the visible range, or the infrared range. Such detection of light in different portions of the first or second wavelength range can be adjusted, for example, by the thickness of the corresponding functional layer or by limiting the lateral extension range of the corresponding functional layer, which is achieved, for example, by structuring and is referred to as optical surrounding or optical enclosure. When limiting the lateral extension range, the extension range of the functional layer in one or more lateral directions extending in a plane perpendicular to the thickness of the functional layer is limited to a value on the order of the wavelength of the light detected or emitted by the functional layer. Here, values ​​between half the wavelength and 50 times the wavelength are considered to be on the order of the wavelength. Therefore, for example, the lateral extension range of the functional layer in the lateral direction can be in the range of 0.5 μm to 50 μm for a wavelength of 1 μm to be detected or emitted, but not in the range of less than 0.5 μm or greater than 50 μm.

[0034] As already described, the multispectral device according to the invention preferably includes a plurality of first functional elements and a plurality of second functional elements, namely a plurality of first lateral regions and a plurality of second lateral regions. Here, the first lateral regions and the second lateral regions are arranged in a grid-like, row-like, or concentric distribution on the surface of the multispectral device.

[0035] In the context of this invention, the embodiments used to design the multispectral device or their various features can also be combined with each other, as long as they are not mutually exclusive. Attached Figure Description

[0036] The invention will now be explained in detail with reference to the accompanying drawings. In the drawings:

[0037] Figure 1 A first embodiment of the multispectral device with a semiconductor substrate according to the present invention is shown in cross-section.

[0038] Figure 2A second embodiment of the multispectral device with a composite substrate according to the present invention is shown in cross-section.

[0039] Figure 3 A third embodiment of the multispectral device with a third functional element according to the present invention is shown in cross-section.

[0040] Figures 4A to 4C Different exemplary arrangements of the first and second functional elements are shown in a top view facing the first surface of the substrate, and

[0041] Figures 5A to 5D A schematic view illustrating a feasible embodiment of the multispectral device according to the present invention relates to detection and emission functional elements. Detailed Implementation

[0042] Figure 1 A first embodiment 1 of the hybrid multispectral device according to the present invention is shown. The multispectral device includes, for example, four first functional elements 10a to 10d and three second functional elements 20a to 20c, and a substrate 100. The substrate 100 has a first surface 101 and a second surface 102 opposite to the first surface 101. The first functional elements 10a to 10d are disposed on the first surface 101, while the second functional elements 20a to 20c are disposed on the second surface 102. The first functional elements 10a to 10d have a first functional layer 11, adapted to detect light in a first wavelength range λ1, for example, by photoelectric conversion. The second functional elements 20a to 20c have a second functional layer 21, adapted to detect light in a second wavelength range λ2, different from the first wavelength range λ1. Here, photoelectric conversion of energy may also be utilized, for example. The first functional layer 11 may be, for example, a semiconductor layer, such as a silicon semiconductor layer, capable of detecting light in the UV range or the visible range, while the second functional layer 21 may be, for example, an organic layer capable of detecting light in the infrared range. Figure 1The light, indicated by the arrow, is emitted from light source 30 or from a different light source and always incident on the multispectral device 1 on the side adjacent to the first surface 101. An optical functional layer, such as a first DBR layer 12, may be disposed on the side of the first functional layer 11 facing the incident light, i.e., the side not adjacent to the first surface 101 of the substrate 100. The optical functional layer may be different for different first functional elements 10a to 10d and perform different filtering functions, such that, for example, only the blue component of the incident light (i.e., light in the wavelength range 380 nm ≤ λ11 ≤ 490 nm) is detected in the first functional element 10a, while only the red component of the incident light (i.e., light in the wavelength range 585 nm ≤ λ12 ≤ 750 nm) is detected in the second functional element 10b. Other wavelength ranges may also be selected. The optical functional layer can be directly applied to one or more first functional elements 10a to 10d using known separation methods. Alternatively, the optical functional layer for one, multiple, or all of the first functional elements may be disposed on or constructed in a separate substrate, wherein the separate substrate is then connected to one or more first functional elements by means of a bonding method (e.g., adhesive or gluing).

[0043] In addition to the second functional layer 21, the second functional elements 20a to 20c also have two electrode layers 22 and 23. One electrode 23 is disposed on the side of the second functional layer 21 facing the second surface 102 of the substrate 100 and is transparent to light in the second wavelength range λ2. The other electrode 23 is disposed on the side of the second functional layer 21 away from the second surface 102 and may be opaque in the second wavelength range λ2.

[0044] According to the present invention, first functional elements 10a to 10d are disposed in a first lateral region 110 of a substrate 100, while second functional elements 20a to 20c are disposed in a second lateral region 120 of the substrate 100, which is different from the first lateral region 110. The first lateral region 110 and the second lateral region 120 do not overlap, such that the first functional elements 10a to 10d and the second functional elements 20a to 20c are disposed laterally offset from each other. This means that light reaching the second functional elements 20a to 20c does not pass through the first functional layer 11. The first and second lateral regions 110 and 120 can have any shape (profile) and any lateral size and can be arbitrarily distributed in the xy direction along an extended dimension of the substrate 100, wherein the shape and size are determined in a top view (i.e., in the xy plane) toward the first or second surface 101 or 102 of the substrate 100. The first and second lateral regions 110 and 120 extend as a whole over the entire extension of the multispectral device 1 perpendicular to the lateral extension of the substrate 100 (i.e., along the z-direction) and may be laterally adjacent to or spaced apart from each other.

[0045] In the first lateral region 110, in the first embodiment 1 shown, integrated active components 103 are formed in a substrate 100, such as a silicon-based semiconductor substrate. These active components are used, for example, to process signals from the first and / or second functional elements 10a to 10d or 20a to 20c, or to manipulate different functional elements.

[0046] In the second lateral region 120, the substrate 100 is transparent to incident light at least in the second wavelength range λ2. Therefore, no integrated active component 103 is constructed there. However, a first filter layer 24 may be disposed on the first surface 101 in the second lateral region 120, while a second filter layer 25 may be disposed on the second surface 102 between the second surface 102 and the second functional elements 20a to 20c. The second filter layer 25 may also extend beyond the second lateral region 120 and, for example, be disposed over the entire or nearly the entire second surface 102. The first and second filter layers 24 and 25 are transparent to incident light at least in a subrange of the second wavelength range λ2. Of course, the first filter layer 24 and / or the second filter layer 25 may be designed differently in different second lateral regions 120 such that different components of the second wavelength range λ2 can be detected in different second functional elements 20a to 20c. The second filter layer 25 also serves as electrical insulation between the electrode 23 and the substrate 100.

[0047] The second lateral region 120, on the side of the multispectral device 1 adjacent to the first surface 101, is surrounded in the lateral direction, that is, in all directions of the xy plane, by a light-shielding layer 40, which reduces the influence of light incident on the second functional elements 20a to 20c due to, for example, scattered light from the first lateral region 110. The light-shielding layer 40 may also extend through the substrate 100 to the second surface 102, as shown in... Figure 1 As shown in the diagram. Furthermore, even on the side where the second lateral region 120 is not provided, the light-shielding layer 40 can completely surround the first lateral region 110 (i.e., the first functional elements 10a to 10d, the integrated active component 103, and the first DBR layer 12). This reduces the loss caused by scattered light from the first functional elements 10a to 10d.

[0048] The second functional elements 20a to 20c can be connected to the integrated active component 103 via contact conductive portion 50, such as conductive through hole, wherein the contact conductive portion 50 is adjacent to the electrode 23 and passes through the second filter layer 25.

[0049] The second functional elements 20a to 20c are surrounded by a housing 60 adjacent to the second filter layer 25 or the second surface 102 of the substrate 100 and isolated from the surrounding environment. Alternatively, the second functional elements 20a to 20c may also be protected from environmental influences by a coating having a suitable encapsulation material (e.g., a thin layer made of glass or an alternating thin-layer solution made of polymers and oxides or similar materials). The housing 60 is preferably made of glass or cavity glass, but it can also be made of different foils and polymers in a thin-layer composite.

[0050] Multispectral devices in Figure 2 The difference between the second embodiment 2 and the first embodiment 1 is that the substrate 100 is implemented as a composite substrate composed of a semiconductor substrate 104 and a glass substrate 105, which are connected to each other by adhesive or gluing methods. Of course, other substrates, such as a plastic substrate, can also be used instead of the glass substrate 105. Since the optical properties of the substrate 100' are now different from those of the substrate 100, the first and second filter layers 24' and 25' can also be different from the corresponding filter layers 24 and 25 in the first embodiment 1, or they can be omitted individually or jointly. The contact conductive portion 50 also passes through the glass substrate 105 to establish an electrical contact between the electrode 23 and the integrated electrical component 103 in the semiconductor substrate 104.

[0051] Figure 3A third embodiment 3 of the multispectral device is shown, which includes third functional elements 70a to 70d in addition to the first and second functional elements 10a to 10d and 20a to 20c. The third functional elements 70a to 70d are respectively constructed on the side of the multispectral device 3 containing the first surface 101 and are either disposed in the first lateral region 110 on the side of the first functional elements 10a to 10c facing away from the incident light (as shown for the third functional elements 70b to 70d), or disposed in the third lateral region 130 (as shown for the third functional element 70a). Therefore, the second lateral region 120 remains unchanged relative to the previous embodiments 1 and 2. The third functional elements 70a to 70d have a third functional layer 71 capable of detecting light in a third wavelength range λ3, wherein the third wavelength range λ3 differs from the first and second wavelength ranges λ1 and λ2. Light that has passed through the first functional layer 11 of the first functional elements 10a to 10c is evaluated in the third functional elements 70b to 70d. An electrode 80 or other intermediate layer may be disposed between the first functional layer 11 and the third functional layer 71. However, this is not necessary. An optical functional layer, such as a second DBR layer 72, may be disposed in the third lateral region 130, which may be different from the first DBR layer 12. Furthermore, an integrated active component 103 may also be constructed in the substrate 100 in the third region.

[0052] However, the third functional element may also be disposed on the second surface 102 of the substrate 100 in the first lateral region 100 or the third lateral region 130. However, in this case, the substrate 100 is constructed to be transparent to light in the third wavelength range 103 in this region, such that, for example, an integrated active component 103 is not allowed to exist in this lateral region.

[0053] exist Figures 4A to 4C In the top view facing the first surface 101 of the substrate, three different arrangements of the first and second functional elements 10, or 20, are exemplarily shown. Because the second functional elements 20 may be visually invisible when the substrate is not transparent in the visible light region, since they are disposed on the second surface of the substrate, the second functional elements 20 are shown only as dashed outlines. For clarity, possible filter layers disposed on the first functional element 10 or the second functional element 20 are not shown in these figures. However, for the intermediate first and second functional elements 10 and 20, in Figure 4A The image partially shows a light-shielding layer 40 surrounding a first functional element 10 and enclosing a second lateral region, in which a second functional element 20 is constructed.

[0054] exist Figure 4AThe diagram shows a grid-like arrangement of first and second functional elements 10 and 20, wherein the first and second functional elements 10 or 20 alternate in each row and each column.

[0055] And in Figure 4B The diagram shows a row-shaped arrangement structure, wherein each row is provided with only a first functional element 10 or only a second functional element 20, and different functional elements are constructed in adjacent rows.

[0056] exist Figure 4C The diagram shows a concentric arrangement of functional elements, wherein a second functional element 20 is located in a first circle surrounding a central first functional element 10a, and the first functional element 10a is located in a second circle. The two circles have the same center point, and the second circle has a larger radius than the first circle.

[0057] exist Figure 4A and 4B The diagram shows a functional element 10 or 20 with a square outline, while... Figure 4C Functional elements 10 or 20 have a circular profile. However, these are merely examples. Other possible profiles are: oval, elliptical, oblong, triangular, other quadrilaterals, and polygons, where these shapes can be regular or irregular, respectively. Furthermore, different first and / or second functional elements can also have different profiles. Similarly, the dimensions of the functional elements can differ from each other. Typically, a functional element has a diameter of 5 μm. 2 Up to 100mm 2 The area within the specified range.

[0058] exist Figures 1 to 3 An embodiment of the multispectral device according to the present invention is shown, wherein all functional elements are configured as detection elements. Now, in Figures 5A to 5D The diagram schematically illustrates all theoretically feasible variations of the implementation of the first and second functional elements. Here, arrows indicate the direction of light, i.e., whether light enters or exits the functional element. Of course, other implementations are also possible, for example, by combining the first detecting functional element and the first emitting functional element with the second detecting functional element, or by using different designs of the third functional element.

[0059] Figure 5A schematically shown Figures 1 to 3 In one embodiment, not only the first functional elements 10a to 10c but also the second functional elements 20a and 20b are detection elements.

[0060] exist Figure 5B In the case shown, the first functional elements 10a to 10c are emitting elements, while the second functional elements 20a and 20b are light-detecting elements.

[0061] exist Figure 5C The design schemes of first functional elements 10a to 10c as elements of probe light and second functional elements 20a and 20b as elements of emitter light are shown.

[0062] at last, Figure 5D The following embodiment is shown, in which the first functional elements 10a to 10c and the second functional elements 20a and 20b are all configured as light-emitting elements.

[0063] Figure Labels

[0064] 1. First implementation of a multispectral device

[0065] 2. A second implementation of the multispectral device

[0066] 3. A third implementation of the multispectral device

[0067] 10, 10a-10d First functional element

[0068] 11 First Functional Layer

[0069] 12 First DBR layer

[0070] 20, 20a-10c Second functional element

[0071] 21 Second Functional Layer

[0072] Electrodes 22 and 23

[0073] 24, 24' First filter layer

[0074] 25, 25' Second filter layer

[0075] 30 Light Sources

[0076] 40 light-blocking layer

[0077] 50 Contact Conductive Part

[0078] 60 Housing

[0079] 70a-70d Third functional element

[0080] 71 Third Functional Layer

[0081] 72 Second DBR layer

[0082] 80 electrode

[0083] 100, 100' substrate

[0084] 101 First surface of substrate

[0085] 102 The second surface of the substrate

[0086] 103 Integrated active components

[0087] 104 Semiconductor Substrate

[0088] 105 glass substrate

[0089] 110 First Horizontal Region

[0090] 120 Second Horizontal Area

[0091] 130 Third Horizontal Region

Claims

1. A hybrid multispectral device, comprising: - A substrate having a first surface and a second surface, wherein the second surface is opposite to the first surface. - At least one first functional element, the at least one first functional element having a first functional layer adapted to detect or emit light in a first wavelength range, the at least one first functional element being disposed on a first surface of the substrate. - At least one second functional element having a second functional layer adapted to detect or emit light in a second wavelength range different from the first wavelength range, the at least one second functional element being disposed on a second surface of the substrate. In this configuration, at least one first functional element is disposed in at least one first lateral region of the hybrid multispectral device, and at least one second functional element is disposed in at least one second lateral region of the hybrid multispectral device. The at least one first lateral region and the at least one second lateral region are arranged laterally offset from each other, such that light of a second wavelength range reaches the at least one second functional element, or light of a second wavelength range emitted by the at least one second functional element exits the hybrid multispectral device on a first surface of the substrate without passing through the first functional layer. At least one of the functional elements is a light-emitting element. The substrate includes a semiconductor substrate and a glass substrate or a plastic substrate, the at least one first functional element is constructed on the semiconductor substrate, the at least one second functional element is constructed on the glass substrate or the plastic substrate, and the semiconductor substrate and the glass substrate or the plastic substrate are interconnected by means of an adhesive layer, a bonding layer or other connecting layer.

2. The hybrid multispectral device according to claim 1, characterized in that, At least one optical filter layer is disposed on the first surface and / or the second surface of the substrate in the at least one second lateral region.

3. The hybrid multispectral device according to claim 1, characterized in that, The at least one second lateral region is surrounded by an optical light-shielding layer on the side of the first surface.

4. The hybrid multispectral device according to claim 1, characterized in that, An additional layer is disposed on the side of the first functional layer facing away from the first surface of the substrate, the additional layer serving as an optical filter, a reflector, or a DBR.

5. The hybrid multispectral device according to claim 1, characterized in that, The substrate includes integrated active components or circuit elements, but the integrated active components or circuit elements are disposed outside the at least one second lateral region.

6. The hybrid multispectral device according to claim 1, characterized in that, The substrate includes a semiconductor layer.

7. The hybrid multispectral device according to claim 1, characterized in that, The first functional layer includes an inorganic layer.

8. The hybrid multispectral device according to claim 1, characterized in that, The second functional layer contains an organic layer.

9. The hybrid multispectral device according to claim 1, characterized in that, The hybrid multispectral device also includes at least one third functional element having a third functional layer adapted to detect or emit light in a third wavelength range different from the first and second wavelength ranges, wherein the at least one third functional element is disposed on a first surface of the substrate or on a second surface of the substrate in a lateral region different from the second lateral region.

10. The hybrid multispectral device according to claim 9, characterized in that, The third functional element is disposed in the at least one first lateral region such that light of the third wavelength range reaching the at least one third functional element or light of the third wavelength range emitted by the at least one third functional element exiting the hybrid multispectral device on the first surface of the substrate after passing through the first functional layer, wherein the first functional layer is transparent to light of the third wavelength range.

11. The hybrid multispectral device according to claim 1, characterized in that, The first or second functional element is adapted to detect light and is present in the hybrid multispectral device in a quantity greater than 1.

12. The hybrid multispectral device according to claim 11, characterized in that, Different first functional elements suitable for detecting light or different second functional elements suitable for detecting light are suitable for detecting light with wavelengths that are different from each other in a first or second wavelength range.

13. The hybrid multispectral device according to claim 1, characterized in that, The hybrid multispectral device includes multiple first lateral regions and multiple second lateral regions, and the first lateral regions and the second lateral regions are arranged in a grid-like, row-like, or concentric pattern.

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