Substrate lifting drive unit, manufacturing apparatus and method of display device having the same

Abstract

A substrate lift driving unit, a manufacturing apparatus of a display device provided with the same, and a method for manufacturing a display device, which can increase manufacturing efficiency by minimizing wear of a manufacturing apparatus to increase the life of the manufacturing apparatus and also can supply a lubricant to the manufacturing apparatus during operation of the manufacturing apparatus, are provided. The substrate lift driving unit includes a shaft extending in a first direction, a main body sliding along the shaft, a friction reducing portion between an outer circumferential surface of the shaft and an inner surface of the main body, and a power portion connected to the shaft and providing power for relative movement of the shaft and the main body. The shaft includes an inlet at one end portion of the shaft, an outlet at an outer circumferential surface of the shaft, a first flow path formed inside the shaft and extending from the inlet in the first direction, and a second flow path extending from the first flow path in a second direction crossing the first direction to the outlet and in fluid communication with the first flow path.

Description

Technical Field

[0001] This disclosure relates to a substrate lifting drive unit, an apparatus for manufacturing a display device having the same, and a method for manufacturing a display device. Background Technology

[0002] Mobile electronic devices are widely used, and as mobile electronic devices, in addition to small electronic devices such as mobile phones, tablet computers have recently become widely used.

[0003] To support various functions, these mobile electronic devices include display devices for providing visual information such as images or videos to users. Recently, with the miniaturization of other components used to drive the display devices, the proportion of display devices in electronic devices has been gradually increasing, and structures that can be bent to a predetermined angle in a flat state are also under development.

[0004] In manufacturing such a display device, a manufacturing apparatus that lifts or transports the substrate can be used. This apparatus can be located in a confined space or small area, such as a chamber. In this case, difficulties in supplying lubricant to the manufacturing apparatus may affect its lifespan. Summary of the Invention

[0005] An objective of one embodiment of this disclosure is to provide a substrate lifting drive unit, a display device manufacturing apparatus having the same, and a display device manufacturing method that can extend the lifespan of the display device manufacturing apparatus and reduce equipment loss. However, this subject matter is exemplary, and the scope of this disclosure is not limited thereto.

[0006] According to one aspect of this disclosure, a substrate lifting drive unit is provided, comprising: a shaft extending along a first direction; a body sliding along the shaft; a friction-reducing portion located between an outer peripheral surface of the shaft and an inner surface of the body; and a power unit connected to the shaft and providing power for relative movement between the shaft and the body, the shaft having: an inlet located at one end of the shaft; an outlet located on the outer peripheral surface of the shaft; a first flow path formed inside the shaft and extending from the inlet along the first direction; and a second flow path extending from the first flow path along a second direction intersecting the first direction to the outlet and in fluid communication with the first flow path.

[0007] According to this embodiment, the shaft may include a groove formed on the outer peripheral surface, the friction-reducing part may include a ball that rolls against the groove, and the outlet may be located on the groove.

[0008] According to this embodiment, the grooves may extend along the first direction and be spaced apart from each other on the outer peripheral surface of the shaft.

[0009] According to this embodiment, the grooves may be arranged at equal intervals on the outer circumferential surface of the shaft.

[0010] According to this embodiment, when the main body is placed far from the inlet of the shaft, the outlet is disposed in the area occupied by the friction-reducing part on the shaft.

[0011] According to this embodiment, the substrate lifting drive unit may further include a lubrication supply unit, which supplies lubricant to the first flow path through the inlet.

[0012] According to this embodiment, the lubrication supply unit may include: a supply pipe having flexibility; and a connector portion for airtightly connecting the supply pipe and the first flow path.

[0013] According to another aspect of this disclosure, a manufacturing apparatus for a display device is provided, comprising: a worktable having a through hole and on which a substrate is placed; a substrate lifting unit having a lifting pin passing through the through hole and lifting the substrate; and a substrate lifting drive unit connected to the substrate lifting unit, the substrate lifting drive unit comprising: a shaft extending along a first direction; a body sliding along the shaft; a friction reducing part located between an outer peripheral surface of the shaft and an inner surface of the body; and a power unit connected to the shaft and providing power for relative movement between the shaft and the body, the shaft comprising: an inlet located at one end of the shaft; an outlet located on the outer peripheral surface of the shaft; a first flow path formed inside the shaft and extending from the inlet along the first direction; and a second flow path extending from the first flow path along a second direction intersecting the first direction to the outlet and in fluid communication with the first flow path.

[0014] According to this embodiment, the shaft may include a groove formed on the outer peripheral surface, the friction-reducing part may include a ball that rolls against the groove, and the outlet may be located on the groove.

[0015] According to this embodiment, the grooves may extend along the first direction and be spaced apart from each other on the outer peripheral surface of the shaft.

[0016] According to this embodiment, the grooves may be arranged at equal intervals on the outer circumferential surface of the shaft.

[0017] According to this embodiment, when the main body is placed far from the inlet of the shaft, the outlet is disposed in the area occupied by the friction-reducing part on the shaft.

[0018] According to this embodiment, the substrate lifting drive unit may further include a cover portion located between the substrate lifting portion and the main body to cover the shaft, and extending and retracting with the relative movement of the shaft and the main body.

[0019] According to this embodiment, the substrate lifting drive unit may further include a lubrication supply unit, which supplies lubricant to the first flow path through the inlet.

[0020] According to this embodiment, the lubrication supply unit may include: a supply pipe having flexibility; and a connector portion for airtightly connecting the supply pipe and the first flow path.

[0021] According to another aspect of this disclosure, a method for manufacturing a display device is provided, comprising: placing a substrate on a height adjustment portion; lowering the height adjustment portion to place the substrate on a worktable; raising the height adjustment portion to separate the substrate from the worktable; transporting the substrate out; and supplying lubricant to the height adjustment portion, the height adjustment portion comprising: a shaft extending along the lifting direction of the substrate and including a groove on its outer surface; and a body sliding along the shaft and including balls that roll and rub against the groove, the step of supplying lubricant supplying lubricant to the groove on its outer surface through a flow path formed inside the shaft.

[0022] According to this embodiment, the flow path may include: a first sub-flow path extending along the lifting direction of the substrate; and a second sub-flow path extending from the first flow path to the groove along a transverse direction intersecting the lifting direction.

[0023] According to this embodiment, the step of supplying the lubricant may involve directly supplying the lubricant to the friction surface of the groove rubbed by the rolling friction of the balls.

[0024] According to this embodiment, the step of supplying the lubricant may involve supplying the lubricant during the descent or ascent of the height adjustment section.

[0025] According to this embodiment, the step of supplying the lubricant may involve automatically supplying a certain amount of the lubricant at certain time intervals.

[0026] Other aspects, features, and advantages beyond those foregoing will become apparent from the following detailed description, claims, and drawings used to implement the disclosure.

[0027] This general and specific aspect can be implemented using systems, methods, computer programs, or a combination of systems, methods, and computer programs.

[0028] (The effect of public disclosure)

[0029] According to an embodiment of the present disclosure configured as described above, a substrate lifting drive unit, a display device manufacturing apparatus equipped with the same, and a display device manufacturing method are provided, which can achieve the goal of minimizing wear on the manufacturing apparatus and increasing its lifespan, and can also supply lubricant to the manufacturing apparatus during operation to reduce equipment loss. Of course, the scope of the present disclosure is not limited to these effects. Attached Figure Description

[0030] Figure 1 This is a side view schematically showing a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0031] Figure 2a and Figure 2b It is a general overview Figure 1 A cross-sectional view of a part of the manufacturing apparatus for a display device.

[0032] Figure 3 This is a perspective view schematically illustrating a portion of a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0033] Figure 4 This is a perspective view schematically illustrating a portion of a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0034] Figure 5 This is a perspective view schematically illustrating a portion of a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0035] Figure 6 It is a general overview Figure 5 A cross-sectional view of a part of the manufacturing apparatus for a display device.

[0036] (Explanation of reference numerals in the attached diagram)

[0037] 1: Manufacturing apparatus for display devices

[0038] 10: Substrate lifting drive unit

[0039] 20: Substrate lifting section

[0040] 21: Support plate

[0041] 22: Lifting pin

[0042] 30: Workbench

[0043] 110: Shaft

[0044] 110h: Tank section

[0045] 111: First flow path

[0046] 112: Second Flow Path

[0047] 113: Inlet

[0048] 114: Outlet

[0049] 120: Main Body

[0050] 130: Friction Reduction Section

[0051] 140: Covering section

[0052] 150: Power Department

[0053] 160: Head

[0054] 170: Lubrication Supply Department

[0055] 170T: Supply pipe

[0056] 170N: Connector section Detailed Implementation

[0057] This disclosure can be modified in various ways and can have various embodiments. Specific embodiments are illustrated in the accompanying drawings and described in detail in the accompanying description. The effects, features, and methods of achieving this disclosure can be found by referring to the accompanying drawings. Figure 1 The details of the embodiments described below will become clear. However, this disclosure is not limited to the embodiments disclosed below and can be implemented in various forms.

[0058] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. When describing the contents with reference to the drawings, the same or corresponding constituent elements will be given the same reference numerals, and repeated descriptions of them will be omitted.

[0059] In the following embodiments, the terms "first," "second," etc., are used for the purpose of distinguishing one constituent element from another, rather than having a limiting meaning.

[0060] In the following embodiments, singular expressions include plural expressions unless explicitly indicated in the context as having a different meaning.

[0061] In the following embodiments, the terms "including" or "having" refer to the presence of features or constituent elements described in the specification, and do not preclude the possibility of additional features or constituent elements.

[0062] In the following embodiments, when a part referred to as a membrane, region, constituent element, etc. is on or on another part, it includes not only the case where it is directly on the other part, but also the case where other membranes, regions, constituent elements, etc. are interspersed therein.

[0063] For ease of explanation, the size of the constituent elements may be enlarged or reduced in the accompanying drawings. For example, the sizes and thicknesses of the various components shown in the drawings are arbitrarily illustrated for ease of explanation, and therefore this disclosure is not necessarily limited to the illustrations.

[0064] When an embodiment can be implemented differently, the specific process sequence can also be performed differently from the described sequence. For example, two processes described consecutively can be performed substantially simultaneously or in the reverse order of the description.

[0065] In this specification, "A and / or B" means either A, or B, or both A and B. Also, "at least one of A and B" means either A, or B, or both A and B.

[0066] In the following embodiments, when referred to as "connected membranes, regions, constituent elements, etc.", it includes cases where the membranes, regions, or constituent elements are directly connected and / or cases where the membranes, regions, or constituent elements are indirectly connected through other membranes, regions, or constituent elements. For example, when referred to as "electrical connection of membranes, regions, constituent elements, etc." in this specification, it indicates cases where the membranes, regions, or constituent elements are directly electrically connected and / or cases where they are indirectly electrically connected through other membranes, regions, or constituent elements.

[0067] The x-axis, y-axis, and z-axis are not limited to the three axes of a rectangular coordinate system; their meanings can be interpreted in a broader sense. For example, the x-axis, y-axis, and z-axis can be orthogonal to each other, but they can also refer to non-orthogonal and different directions.

[0068] Figure 1 This is a side view schematically showing a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0069] Reference Figure 1 The manufacturing apparatus 1 for the display device may include a chamber C, a substrate lifting drive unit 10, a substrate lifting part 20, and a worktable 30.

[0070] The chamber C can form an internal space, and can also be formed as a part of the chamber C with an opening. For example, a gate valve G can be provided at the opening of the chamber C to selectively open and close the opening of the chamber C. The substrate P can be placed into the chamber C through the opening, for example, using a robotic arm. Additionally, the chamber C may include a through hole on one side, through which the shaft 110 of the substrate lifting drive unit 10 (described later) can pass.

[0071] The substrate lifting drive unit 10 may include a shaft 110, a main body 120, a friction reducing part 130, a power part 150, and a lubrication supply part 170.

[0072] The shaft 110 can extend along a first direction DR1. The first direction DR1 can be the direction in which the substrate P rises or falls. The length of the shaft 110 can be determined according to the height to which the substrate P rises or falls; for example, it can be about 210 mm.

[0073] The cross-sectional shape of shaft 110 can be circular, as one example, but it can also be varied into various shapes such as ellipse, quadrilateral, or polygon. For ease of explanation, the following description focuses on the case where the cross-section of shaft 110 is circular. The diameter of shaft 110 can be approximately 20 mm, and can be determined by considering the required rigidity of the substrate lifting drive unit 10, the position and number of shafts 110, and the size and weight of the substrate P and the substrate lifting section 20.

[0074] The main body 120 can slide along the axis 110 as a relative movement. The main body 120 can be fixed to the bottom plate of the chamber C, in which case the axis 110 can essentially slide relative to the fixed main body 120.

[0075] The friction-reducing part 130 can be disposed inside the main body 120. The friction-reducing part 130 can be located between the outer peripheral surface of the shaft 110 and the inner surface of the main body 120. The friction-reducing part 130 reduces the motion resistance caused by the friction between the main body 120 and the shaft 110, thereby enabling smooth relative movement between them.

[0076] The power unit 150 can be connected to one side of the shaft 110 to provide power for the relative movement of the shaft 110 and the main body 120. As an example, the power unit 150 can be a pneumatic cylinder, a hydraulic cylinder, a linear motor, etc. Figure 1 The diagram shows the power unit 150 disposed outside the chamber C, but this is exemplary and it can be disposed inside the chamber C.

[0077] The lubrication supply unit 170 supplies lubricant to ensure smooth relative movement between the main body 120 and the shaft 110. For example, the lubrication supply unit 170 can be an oil pump. The lubricant can be lubricating oil or grease. The lubrication supply unit 170 can be located outside the chamber C. Therefore, even in situations where the internal space of the chamber C is limited, the lubrication supply unit 170 can be conveniently located externally for easy lubrication filling.

[0078] The substrate lifting drive unit 10 may also include a cover 140. The cover 140 may be located between the main body 120 and a portion of the substrate lifting unit 20 (described later) and cover the shaft 110. The cover 140 may include a retractable material that extends and retracts with the relative movement of the shaft 110 and the main body 120. As an example, the cover 140 may be a bellows made of metal or rubber.

[0079] The cover 140 can be airtightly connected to the body 120 on one side and to the head 160 (see reference) on the other side. Figure 2a Airtight connection. The head 160 can be connected to one end of the shaft 110 and fixed to a part of the substrate lifting part 20. Thus, the cover 140 can prevent external gas or foreign objects from flowing into the chamber C through the gap between the shaft 110 and the body 120 and causing adverse effects on the substrate P.

[0080] The substrate lifting drive unit 10 may have one or more. As an example, the substrate lifting drive unit 10 may have four.

[0081] The substrate lifting part 20 may include a support plate 21 and a lifting pin 22.

[0082] A base plate lifting drive unit 10 may be disposed on at least one side of the support plate 21. As an example, Figure 1 The diagram shows substrate lifting drive units 10 arranged on both sides of a support plate 21. A portion of the support plate 21 can be connected to the substrate lifting drive unit 10. For this purpose, a portion of the support plate 21 can be bent to be positioned above the substrate lifting drive unit 10. This configuration is exemplary, and other configurations are also possible as long as the support plate 21 can rise and fall along the first direction DR1 via the substrate lifting drive unit 10.

[0083] A lifting pin 22 can extend along the first direction DR1 and be disposed on the support plate 21. The lifting pin 22 can rise and fall through the support plate 21. The lifting pin 22 can pass through a through hole 30H formed in the worktable 30 as described later. One end of the lifting pin 22 can be fixed to the support plate 21, and the other end can be in direct contact with the substrate P on the worktable 30. As the support plate 21 rises and falls with the help of the substrate lifting drive unit 10, the lifting pin 22 also rises and falls. With the lifting pin 22 passing through the through hole 30H of the worktable 30, the substrate P on the worktable 30 can be raised and lowered. Thus, the height of the substrate P can be adjusted.

[0084] The lifting pin 22 can be one or more. For example, when the substrate P is in the form of a flat plate, the lifting pin 22 can be at least three. As an example, 16 lifting pins 22 can be provided on the support plate 21. The arrangement of the lifting pins 22 can be varied, for example, they can be arranged in multiple columns or in a zigzag pattern on a plane. The cross-sectional shape of the lifting pin 22 can be various shapes such as circles, ellipses, quadrilaterals, or polygons.

[0085] A worktable 30 can be disposed on the substrate lifting unit 20. A substrate P, which is to be placed into the chamber C, can be placed on the worktable 30. Various processes for manufacturing display devices can be performed on the substrate P placed on the worktable 30. For example, vapor deposition processes such as chemical vapor deposition and electron beam vapor deposition, inkjet printing processes, etc., for forming organic or inorganic layers on the substrate P, can be performed. Alternatively, UV curing processes, such as drying the coated or printed ink by irradiation with ultraviolet light, can be performed.

[0086] The worktable 30 may have through holes 30H. The lifting pins 22 of the substrate lifting unit 20 can rise or fall through the through holes 30H. The number of through holes 30H may be the same as the number of lifting pins 22 of the substrate lifting unit 20. The arrangement of the through holes 30H may correspond to the arrangement of the lifting pins 22. The cross-sectional shape of the through holes 30H may be various shapes such as circles, ellipses, quadrilaterals, or polygons. When both the through holes 30H and the lifting pins 22 have circular cross-sectional shapes, the diameter of the through holes 30H may be at least larger than the diameter of the lifting pins 22.

[0087] Figure 2a and Figure 2b It is a general overview Figure 1 A cross-sectional view of a part of the manufacturing apparatus for a display device. Figure 2a and Figure 2b and Figure 1 Corresponding to part II, a cross-section of a portion of the substrate lifting drive unit is shown. Figure 2a This shows the state in which the shaft and support plate are raised by the power unit. Figure 2b This indicates a decreasing state.

[0088] Reference Figure 2a The main body 120 of the substrate lifting drive unit 10 can be disposed on the inner surface of the chamber C. The main body 120 can be fixed to the chamber C. The shaft 110 of the substrate lifting drive unit 10 can pass through a through hole formed in the chamber C. A friction-reducing part 130 can be disposed between the outer peripheral surface of the shaft 110 and the inner surface of the main body 120.

[0089] The inlet 113 may be located at one end of the shaft 110. An outlet 114 may be disposed on the outer circumferential surface of the shaft 110. A first flow path 111 extending from the inlet 113 along a first direction DR1 may be formed inside the shaft 110. A second flow path 112 extending from the first flow path 111 along a second direction DR2 intersecting the first direction DR1 to the outlet 114 may be formed inside the shaft 110. That is, the second flow path 112 may branch from and be fluidly connected to the first flow path 111.

[0090] The length of the first flow path 111 can be half the length of the shaft 110. For example, the length of the first flow path 111 can be 105 mm. Additionally, as an example, the diameter of the first flow path 111 is 4 mm. On the other hand, the diameter of the second flow path 112 can be at least 0.5 mm.

[0091] According to one embodiment of this disclosure, lubricant can be dispensed into the inlet 113. The dispensed lubricant can flow along the first flow path 111 and the second flow path 112, and reach the outer peripheral surface of the shaft 110 through the outlet 114. A portion of the outer peripheral surface of the shaft 110 may include a friction surface that slides in direct contact with the friction-reducing part 130. By providing lubricant to the friction surface, the frictional resistance between the shaft 110 and the friction-reducing part 130 is reduced, enabling smooth sliding. This reduces wear on the shaft 110 and increases its lifespan.

[0092] Furthermore, since lubricant can be supplied from outside the chamber C via the first flow path 111 and the second flow path 112 inside the shaft 110, lubricant can be supplied smoothly even when the substrate lifting drive unit 10 is disposed in the confined space inside the chamber C. Therefore, it has the advantage of being able to supply lubricant without interrupting the operation of the display device manufacturing apparatus 1 or without disassembling it. This saves maintenance time for supplying lubricant and extends the operating time of the manufacturing apparatus, thereby reducing equipment loss and improving manufacturing efficiency.

[0093] The other end of the shaft 110, located opposite to the end where the inlet 113 is configured, can be connected to the head 160. The head 160 can be fixed to a portion of the support plate 21.

[0094] The cover 140 can be located between the main body 120 and the head 160, covering the shaft 110. The cover 140 is capable of extending and retracting in a first direction DR1. The shaft 110 is powered by a power unit 150. Figure 1 As the head 160 and support plate 21 rise, the cover 140 can extend in the first direction DR1.

[0095] Reference Figure 2b Shaft 110 is powered by power unit 150 ( Figure 1 As the head 160 and support plate 21 descend, the cover 140 can retract in the first direction DR1. Thus, during the relative movement of the shaft 110 with respect to the body 120, the shaft 110 can be sealed relative to the interior space of the chamber C. This protects the substrate P inside the chamber C from external gases and foreign matter that may flow in along the outer peripheral surface of the shaft 110.

[0096] If the shaft 110 is fully lowered, the main body 120 can be positioned furthest from the inlet 113 of the shaft 110. In this state, the length of the first flow path 111 and the position of the second flow path 112 can be determined such that the outlet 114 is positioned in the area OA occupied by the friction-reducing part 130 on the shaft 110. In this structure, if the shaft 110 is fully raised and the main body 120 is located closest to the inlet 113, the outlet 114 can be covered by the cover part 140. This ensures that lubricant is always present in the chamber C regardless of the shaft 110's position, reducing lubricant waste and maximizing lubricant utilization.

[0097] Figure 3 This is a perspective view schematically illustrating a portion of a manufacturing apparatus for a display device according to an embodiment of the present disclosure.

[0098] Reference Figure 3 The shaft 110 may include grooves 110h formed on its outer peripheral surface 110s. The grooves 110h may extend along a first direction and be spaced apart from each other on the outer peripheral surface 110s of the shaft 110. According to one embodiment of this disclosure, the grooves 110h may be equally spaced on the outer peripheral surface of the shaft 110. Figure 3 The example shown has 5 slots 110h, but it is not limited to this and can have 4 or fewer or 6 or more.

[0099] For reference Figure 4 As will be described later, the friction-reducing part 130 may include balls 133 that roll against the groove 110h. When the shaft 110 and the main body 120 move relative to each other, the groove 110h and the balls 133 can substantially come into contact with and slide against each other. At this time, the groove 110h and the balls 133 can roll against each other. Therefore, the substantial friction surface of the shaft 110 can be placed on the surface of the groove 110h.

[0100] The outlet 114 can be located on the groove 110h. In this way, lubricant is directly supplied to the surface of the groove 110h, which serves as a friction surface, thus further improving lubrication and minimizing frictional resistance. This minimizes wear on the shaft 110, thereby extending the life of the manufacturing apparatus.

[0101] The number of outlets 114 may be equal to or greater than the number of channels 110h. As an example, at least one outlet 114 may be located in one channel 110h. The number of second flow paths 112 is the same as the number of outlets 114.

[0102] Figure 4 This is a perspective view schematically illustrating a portion of a manufacturing apparatus for a display device according to an embodiment of the present disclosure. Figure 4 This shows a portion of the shaft and the interior of the friction-reducing section.

[0103] Reference Figure 4 The friction-reducing part 130 may include an outer cylinder 131, an inner cylinder 132, a ball bearing 133, a retaining ring 134, and a sealing component 135.

[0104] As an example, the ball 133 can be spherical, but this disclosure is not limited to this. It can be any shape as long as it can roll and rub against the groove 110h. As another example, it can be cylindrical. Hereinafter, for ease of explanation, the case where the ball 133 is spherical will be described.

[0105] The inner cylinder 132 can be disposed between the outer cylinder 131 and the shaft 110. Multiple ball paths can be formed in the inner cylinder 132. The ball paths constitute closed curves including straight sections extending along a first direction DR1, along which the balls 133 can roll and circulate.

[0106] The retaining ring 134 can keep the outer cylinder 131 and the inner cylinder 132 connected and secure them together so that they do not come apart.

[0107] The sealing component 135 can maintain airtightness, so that the lubricant supplied to the outer peripheral surface 110s of the shaft 110 will not leak out of the chamber C along the shaft 110.

[0108] Figure 5 This is a perspective view schematically illustrating a portion of a manufacturing apparatus for a display device according to an embodiment of the present disclosure. Figure 6 It is a general overview Figure 5 A cross-sectional view of a part of the manufacturing apparatus for a display device. Figure 5 and Figure 6 Can be with Figure 1 The V part corresponds to this.

[0109] Reference Figure 5 and Figure 6 One end of the shaft 110 can be connected to a portion of the power unit 150. A flange or similar device can be used for the connection between the shaft 110 and the portion of the power unit 150. An inlet 113 can be located at said one end of the shaft 110. A through hole can be formed in said portion of the power unit 150.

[0110] The lubrication supply unit 170 may include a flexible supply pipe 170T and a connector 170N that airtightly connects the supply pipe 170T to the first flow path 111. The supply pipe 170T may be configured to pass through a through hole formed in the aforementioned portion of the power unit 150 and the inlet 113 of the shaft 110. A connector CE may be included to securely fix the supply pipe 170T to the through hole. Furthermore, the supply pipe 170T may be configured to be in fluid communication with the first flow path 111. In this case, the connector 170N maintains airtightness between the supply pipe 170T and the first flow path 111. Therefore, the lubricant supplied through the supply pipe 170T can flow into the first flow path 111 without leakage. Because the supply pipe 170T is flexible, it can bend with the up-and-down movement of the portion of the power unit 150 and the shaft 110.

[0111] The lubrication supply unit 170 can be configured outside the chamber C and automatically supply a certain amount of lubricant to the substrate lifting drive unit 10 at regular time intervals. Of course, lubricant can also be supplied manually instead of the lubrication supply unit 170.

[0112] Since the lubrication supply unit 170 can be disposed outside the chamber C, the lubrication supply unit 170 can be used even if the internal space of the chamber C is small. In addition, it is not necessary to stop the operation of the display device manufacturing apparatus 1 to fill the lubrication supply unit 170 with lubricant.

[0113] Hereinafter, a method for manufacturing a display device using the manufacturing apparatus of a display device according to an embodiment of the present disclosure described above will be described.

[0114] According to one embodiment of this disclosure, a substrate P can be placed into a chamber C and positioned on a height adjustment unit. The height adjustment unit may include a substrate lifting drive unit 10 and a substrate lifting part 20. The substrate P may be placed on a lifting pin 22 of the height adjustment unit.

[0115] Then, the height adjustment unit can be lowered to place the substrate P on the worktable 30. Various processes can be performed on the substrate P placed on the worktable 30. For example, vapor deposition processes such as chemical vapor deposition and electron beam vapor deposition, inkjet printing processes, etc., can be performed to form an organic or inorganic layer on one side of the substrate P. Alternatively, UV curing processes such as irradiating ultraviolet light to dry the coated or printed ink can be performed.

[0116] After the process is completed, the height adjustment unit can be raised to separate the substrate P from the worktable 30. Then, the substrate P can be transported out. While a robotic arm or similar device can be used to place and transport the substrate P, it may be necessary to separate the substrate P from the worktable 30 in order to avoid contaminating one side of the substrate P that has undergone the process and to stably hold the substrate P during transport. For this purpose, the height adjustment unit of this disclosure allows the substrate P to be raised and lowered.

[0117] According to one embodiment of the present disclosure, the process may include supplying lubricant to the height adjustment section. In one embodiment, lubricant may be supplied to the groove 110h on the outer peripheral surface 110s of the shaft 110 via a flow path formed on the inner side of the shaft 110. The flow path may include a first flow path 111 and a second flow path 112. In one embodiment, lubricant may be supplied directly to the friction surface of the groove 110h, which is subjected to rolling friction by the balls 133. As a comparative example, when lubricant is injected through the body 120 disposed on the outer side of the shaft 110, it is not possible to directly supply lubricant to the friction surface of the shaft 110. However, according to the present disclosure, by directly supplying lubricant to the friction surface via a flow path formed on the inner side of the shaft 110, the lubrication function is improved, thereby minimizing frictional resistance. In this way, wear on the shaft 110 is minimized, thereby extending the life of the manufacturing apparatus.

[0118] According to one embodiment of this disclosure, lubricant can be supplied during the raising or lowering of the height adjustment section. That is, lubricant can be supplied during the operation of the display device manufacturing apparatus 1. Since lubricant can be supplied from the outside of the cavity C through the flow path inside the shaft 110, lubricant can be supplied smoothly even if the substrate lifting drive unit 10 is arranged in the confined space inside the cavity C. Furthermore, it has the advantage of being able to supply lubricant without interrupting the operation of the display device manufacturing apparatus 1 or without disassembling it. In this way, maintenance time for supplying lubricant can be saved and the operating time of the manufacturing apparatus can be extended, thereby improving manufacturing efficiency.

[0119] In another embodiment, a certain amount of lubricant can be automatically supplied at regular time intervals. Regardless of whether the operation of the display device manufacturing apparatus 1 is interrupted, an optimal lubricant supply can be formed according to the operating conditions of the display device manufacturing apparatus 1, thereby extending the life of the display device manufacturing apparatus 1.

[0120] This disclosure is illustrated with reference to the embodiments shown in the figures, but these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent embodiments can be made therefrom. Therefore, the true scope of protection of this disclosure should be determined by the technical concept of the appended claims.

Claims

1. A substrate lift driving unit that causes a support plate to rise and fall, wherein, The substrate lifting drive unit includes: a shaft extending in a first direction; a body sliding along the shaft; a friction-reducing portion between an outer circumferential surface of the shaft and an inner surface of the body; and a power portion connected to the shaft and providing power for relative movement of the shaft and the body, The shaft has: an inlet located at one end of the shaft; an outlet located on the outer circumferential surface of the shaft; a first flow path formed inside the shaft and extending from the inlet in the first direction; and a second flow path extending from the first flow path to the outlet in a second direction intersecting the first direction and in fluid communication with the first flow path.

2. The substrate lifting drive unit according to claim 1, wherein the shaft includes a groove portion formed on the outer circumferential surface, the friction-reducing portion includes a ball that rolls in friction with the groove portion, the outlet is located on the groove portion.

3. The substrate lifting drive unit according to claim 2, wherein the groove portion extends in the first direction and is arranged apart from each other on the outer circumferential surface of the shaft.

4. The substrate lifting drive unit according to claim 3, wherein the groove portions are arranged at equal intervals on the outer circumferential surface of the shaft.

5. The substrate lifting drive unit according to claim 1, wherein when the body is disposed away from the inlet of the shaft, the outlet is arranged in an area occupied by the friction-reducing portion on the shaft.

6. The substrate lifting drive unit according to claim 1, wherein the substrate lifting drive unit further includes: a lubricant supply portion that supplies a lubricant to the first flow path through the inlet.

7. The substrate lifting drive unit according to claim 6, wherein the lubricant supply portion includes: a supply tube having flexibility; and a joint portion that airtightly connects the supply tube and the first flow path.

8. A manufacturing apparatus of a display device, wherein, including: a worktable having a through-hole and on which a substrate is placed; a substrate lifting portion having a jack that passes through the through-hole and lifts the substrate; and a substrate lifting drive unit connected to the substrate lifting portion, The substrate lifting drive unit includes: a shaft extending in a first direction; a body sliding along the shaft; a friction-reducing portion between an outer circumferential surface of the shaft and an inner surface of the body; and a power portion connected to the shaft and providing power for relative movement of the shaft and the body, The shaft includes: an inlet located at one end of the shaft; an outlet located on the outer circumferential surface of the shaft; a first flow path formed inside the shaft and extending from the inlet in the first direction; and a second flow path extending from the first flow path to the outlet in a second direction intersecting the first direction and in fluid communication with the first flow path.

9. The manufacturing apparatus of a display device according to claim 8, wherein the shaft includes a groove portion formed on the outer circumferential surface, the friction-reducing portion includes a ball that rolls in friction with the groove portion, the outlet is located on the groove portion.

10. The manufacturing apparatus of a display device according to claim 9, wherein ​ The groove portions extend along the first direction and are arranged apart from each other on the outer peripheral surface of the shaft.

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