Display device manufacturing equipment

Abstract

A display device manufacturing apparatus is provided. According to one embodiment, the display device manufacturing apparatus includes: a first plate including a first internal flow path arranged inside the first plate; a second plate arranged on the first plate and including a plurality of exhaust ports and a second internal flow path, the plurality of exhaust ports opening to the outside; the second internal flow path arranged inside the second plate and spatially connecting each of the exhaust ports to the first internal flow path, wherein the first internal flow path includes a first flow path tube, the second internal flow path includes a second flow path tube and a first air chamber and a second air chamber, the internal widths of the first air chamber and the second air chamber being greater than the internal widths of the first flow path tube and the second flow path tube, the first air chamber being spatially connected to the first flow path tube, and the second flow path including: an inter-chamber moving flow path tube spatially connecting the first air chamber and the second air chamber; and an exhaust flow path tube spatially connecting the second air chamber and each of the exhaust ports.

Description

Technical Field

[0001] The present invention relates to a manufacturing equipment for a display device. Background Art

[0002] With the development of multimedia, the importance of display devices has been increasing, and accordingly, various types of display devices such as organic light emitting display (OLED) and liquid crystal display (LCD) are being used.

[0003] The display panels that make up a display device are cut from panel substrates. However, during the cutting process, particles and smoke may be generated. These particles and smoke can be attracted to the pads, causing poor contact. To prevent this, air blowers are used to remove these particles and smoke by spraying air.

[0004] When removing particles or smoke using an air blower, directly spraying air onto the display panel may cause the display panel to shake, which may cause problems in the display panel cutting process. Summary of the Invention

[0005] Technical problems solved

[0006] The problem to be solved by the present invention is to provide a manufacturing apparatus for a display device, which can minimize the shaking phenomenon of a panel substrate and can adjust the flow rate (or pressure) of air ejected from each exhaust flow path pipe.

[0007] Problems of the present invention are not limited to the above-mentioned problems, and other problems not mentioned will be clearly understood by those skilled in the art through the following description.

[0008] Solution to the problem

[0009] A manufacturing device for a display device according to an embodiment for solving the above-mentioned problem includes: a first plate, including a first internal flow path arranged inside the first plate; and a second plate, arranged on the first plate, and including a plurality of exhaust ports and a second internal flow path, the plurality of exhaust ports opening to the outside, the second internal flow path being arranged inside the second plate and spatially connecting each of the exhaust ports to the first internal flow path, wherein the first internal flow path includes a first flow path tube, the second internal flow path includes a second flow path tube and a first air chamber and a second air chamber, the internal widths of the first air chamber and the second air chamber are greater than the internal widths of the first flow path tube and the second flow path tube, the first air chamber is spatially connected to the first flow path tube, and the second flow path tube includes: an inter-chamber moving flow path tube that spatially connects the first air chamber and the second air chamber; and an exhaust flow path tube that spatially connects the second air chamber and each of the exhaust ports.

[0010] The second plate may include a main body portion and a protrusion portion, wherein a width of the protrusion portion is smaller than a width of the main body portion and the protrusion portion extends outside the main body portion.

[0011] The protrusion may include a first protrusion and a second protrusion, a lower surface of the first protrusion may include a curved surface, and a curved space may be defined between the lower surface of the first protrusion and an upper surface of the second protrusion.

[0012] The discharge flow path pipe may be disposed within the second protrusion and may be spatially connected to the curved space.

[0013] In a plan view, the discharge port may be covered by the first protrusion.

[0014] The first air chamber and the second air chamber may each have a shape extending in a first direction, and the inter-chamber moving flow path tube may extend in a second direction intersecting the first direction.

[0015] The discharge flow path tube may extend in a third direction that is perpendicular to a plane defined by the first direction and the second direction.

[0016] A manufacturing device for a display device according to another embodiment for solving the above-mentioned problem includes: a first plate; and a second plate, arranged on the first plate and having a through hole in the shape of a closed curve in a plan view, wherein the first plate includes a first internal flow path having a first flow path tube, the second plate includes a plurality of discharge ports and a second internal flow path, the plurality of discharge ports are arranged around the through hole, the second internal flow path spatially connects each of the discharge ports to the first internal flow path, the second internal flow path includes a second flow path tube and a first air chamber and a second air chamber, the internal widths of the first air chamber and the second air chamber are greater than the internal widths of the first flow path tube and the second flow path tube, the first air chamber is spatially connected to the first flow path tube, and the second flow path tube includes: an inter-chamber moving flow path tube that spatially connects the first air chamber and the second air chamber; and an discharge flow path tube that spatially connects the second air chamber and each of the discharge ports.

[0017] The second plate may include a main body portion and a protrusion portion, the protrusion portion has a width smaller than that of the main body portion, and the protrusion portion extends outside the main body portion.

[0018] The protrusion may include a first protrusion and a second protrusion, a lower surface of the first protrusion may include a curved surface, and a curved space may be defined between the lower surface of the first protrusion and an upper surface of the second protrusion.

[0019] Specific details of other embodiments are included in the detailed description and accompanying drawings.

[0020] Beneficial effects

[0021] According to an embodiment of the present invention, air can be indirectly sprayed through the curved lower surface of the first protrusion, thereby reducing the flow rate (or pressure) of the air through the Coanda effect. Therefore, the shaking phenomenon of the panel substrate can be minimized.

[0022] Furthermore, in the internal flow path, the flow rate (or pressure) of air ejected from each exhaust flow path pipe can be adjusted by arranging a first air chamber having a width greater than that of the first flow path pipe and a plurality of inter-chamber moving flow path pipes connecting the first and second air chambers.

[0023] The effects according to the embodiments of the present invention are not limited to those shown above, but more effects are included in this specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a plan view showing a display device according to an embodiment.

[0025] Figure 2 FIG. 1 is a schematic partial cross-sectional view of a display device according to an embodiment.

[0026] Figure 3is a perspective view of a manufacturing apparatus for a display device according to an embodiment.

[0027] Figure 4 2 is a cross-sectional view illustrating an inner adsorption flow path and an outer adsorption flow path of a display device manufacturing apparatus according to an embodiment.

[0028] Figure 5 is a cross-sectional view illustrating an internal flow path and a lower suction flow path of a display device manufacturing apparatus according to an embodiment.

[0029] Figure 6 is a perspective view of a second plate and a third plate according to an embodiment.

[0030] Figure 7 yes Figure 5 Magnified view of the mid-Q region.

[0031] Figure 8 This is a schematic diagram highlighting an internal flow path according to one embodiment.

[0032] Figure 9 is a plan view illustrating a second internal flow path according to an embodiment.

[0033] Figure 10 and Figure 11 This is a schematic diagram showing the process of removing fine particles.

[0034] Figure 12 is a plan view showing a second internal flow path according to another embodiment.

[0035] Figure 13 is a plan view showing a second internal flow path according to still another embodiment.

[0036] Figure 14 is a plan view showing a second internal flow path according to still another embodiment.

[0037] Figure 15 is a plan view showing a second internal flow path according to still another embodiment.

[0038] Figure 16 is a plan view showing a second internal flow path according to still another embodiment. DETAILED DESCRIPTION

[0039] The advantages and features of the present invention and methods for achieving these advantages and features will become apparent by reference to the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in a variety of different forms. These embodiments are provided only to make the disclosure of the present invention more complete and to fully inform those skilled in the art of the present invention of the scope of the present invention. The present invention is defined solely by the scope of the claims.

[0040] It will be understood that when an element or layer is referred to as being "on" another element or layer, it includes both the case where it is directly on the other element or layer or another layer or another element is interposed therebetween. Throughout the specification, the same reference numerals represent the same constituent elements.

[0041] Although the terms "first," "second," and so on are used to describe various components, it is clear that these components are not limited by these terms. These terms are merely used to distinguish one component from another. Therefore, it is clear that within the scope of the technical concept of the present invention, the first component mentioned below can also be the second component.

[0042] Hereinafter, embodiments will be described with reference to the accompanying drawings.

[0043] Figure 1 is a plan view showing a display device according to an embodiment. Figure 2 FIG. 1 is a schematic partial cross-sectional view of a display device according to an embodiment.

[0044] exist Figure 1 In the plan view of FIG, for ease of explanation, the upper, lower, left, and right directions are defined. The upper and lower directions are vertical directions or column directions, and the left and right directions are horizontal directions or row directions. In the specification, the "upper edge", "lower edge", "left edge", and "right edge" of a display panel, etc. refer to the edges or ends located at the upper side, lower side, left side, and right side, respectively, on the plane of the display panel, etc. The directions mentioned in the embodiments should be understood as references to relative directions, and the embodiments are not limited to the mentioned directions.

[0045] Reference Figure 1 and Figure 2 , the display device DD is a device for displaying dynamic images or still images. The display device DD can be used not only as a portable electronic device such as a mobile phone, a smart phone, a tablet PC (Personal Computer), a smart watch, a watch phone, a mobile communication terminal, an electronic notebook, an electronic book, a PMP (Portable Multimedia Player), a navigator, an UMPC (Ultra Mobile PC), etc., but also as a display screen for various products such as a television, a notebook, a monitor, an advertising board, the Internet of Things, etc. Examples of the display device DD may include an organic light-emitting display device, a liquid crystal display device, a plasma display device, a field emission display device, an electrophoretic display device, an electrowetting display device, a quantum dot light-emitting display device, a micro LED display device, etc. In the following, an organic light-emitting display device will be described as an example of a display device, but it is not limited thereto.

[0046] The display device DD may include a display panel DP. The display panel DP may include a flexible substrate, and the flexible substrate may include a flexible polymer material such as polyimide, etc. Therefore, the display panel DP may be bent, curved, folded, or rolled.

[0047] The display panel DP may include a main region MR and a bending region BD connected to one side of the main region MR. The display panel DP may further include a sub region SR connected to the bending region BD and overlapping the main region MR in a thickness direction.

[0048] If the portion of the display panel DP that displays the screen is defined as a display area DA, and the portion that does not display the screen is defined as a non-display area NDA, then the display area DA of the display panel DP is arranged within the main region MR. The portion other than the display area DA becomes the non-display area NDA of the display panel DP. In one embodiment, the peripheral edge portion of the display area DA, the entire bending area BD, and the entire sub-region SR in the main region MR may be the non-display area NDA. However, this is not limited to this, and the bending area BD and / or the sub-region SR may also include the display area DA.

[0049] The main region MR may have a shape substantially similar to the planar outer shape of the display device DD. The main region MR may be a flat region located on a single plane. However, this is not limiting, and in the main region MR, at least one of the remaining edges, excluding the edge (side) connected to the bending region BD, may be curved to form a curved surface or bent in a vertical direction.

[0050] The display area DA of the display panel DP may be arranged in the central portion of the main region MR. The display area DA may include a plurality of pixels. The display area DA may have a rectangular shape or a rectangular shape with rounded corners. However, this is not limited thereto, and the display area DA may have various shapes, such as a square, other polygonal shapes, a circle, an ellipse, etc.

[0051] In the main region MR, if at least one of the remaining edges, excluding the edge (side) connected to the bending region BD, is curved or bent, the display area DA may be arranged at that edge. However, the present invention is not limited thereto, and a non-display area NDA where no screen is displayed may be arranged at the curved or bent edge, or both the display area DA and the non-display area NDA may be arranged.

[0052] The non-display area NDA may be located around the display area DA in the main region MR. The non-display area NDA of the main region MR may be located in a region extending from the outer boundary of the display area DA to the edge of the display panel DP. Signal wiring or a drive circuit for applying signals to the display area DA may be arranged in the non-display area NDA of the main region MR. Furthermore, a peripheral black matrix may be arranged in the non-display area NDA of the main region MR, but the present invention is not limited thereto.

[0053] The bending region BD may be arranged between the main region MR and the sub-region SR, and at least one of the two peripheral lines may include a curved portion. For example, in the bending region BD, the two peripheral lines connecting one side of the main region MR and one side of the sub-region SR may be curved portions having the same curvature. The distance between the two peripheral lines may decrease from the main region MR toward the sub-region SR.

[0054] In the bending region BD, the display panel DP may have a curvature in the thickness-direction downside, that is, in the direction opposite to the display surface. The bending region BD may have a constant radius of curvature, but is not limited thereto. The bending region BD may also have different radii of curvature depending on the section. As the display panel DP bends in the bending region BD, the surface of the display panel DP is reversed. Specifically, one surface of the display panel DP facing upward may be turned outward through the bending region BD and then reversed to face downward.

[0055] The sub-region SR extends from the bending region BD. The sub-region SR may extend parallel to the main region MR from the location where the bend ends. The sub-region SR may overlap with the main region MR in the thickness direction of the display panel DP. The sub-region SR may overlap with the non-display area NDA at the edge of the main region MR and may further overlap with the display area DA of the main region MR. The width of the sub-region SR may be equal to the width of the bending region BD, but is not limited thereto.

[0056] The driver chip IC may be arranged in the sub-region SR of the display panel DP. The driver chip IC may include an integrated circuit for driving the display panel DP. In one embodiment, the integrated circuit may be a data driver integrated circuit that generates and provides data signals, but is not limited thereto. The driver chip IC may be mounted on the display panel DP in the sub-region SR. The driver chip IC is mounted on a surface of the display panel DP that is the same surface as the display surface, and as described above, the driver chip IC may be mounted on a surface of the display panel DP that faces downward in the thickness direction as the bending region BD bends and flips, such that the upper surface of the driver chip IC faces downward. The driver chip IC may be attached to the display panel DP via an anisotropic conductive film, or may be attached to the display panel DP via an ultrasonic bonding method. The width of the driver chip IC in the lateral direction may be smaller than the width of the display panel DP in the lateral direction. The driver chip IC may be arranged in the central portion of the sub-region SR in the lateral direction, and the left and right edges of the driver chip IC may be spaced apart from the left and right edges of the sub-region SR, respectively.

[0057] A pad portion PAD may be disposed at an end of the sub-region SR of the display panel DP, and a printed circuit board PCB may be connected to the pad portion PAD. The printed circuit board PCB may be a flexible printed circuit board or a film.

[0058] Figure 3 is a perspective view of a manufacturing apparatus for a display device according to an embodiment.

[0059] Reference Figure 3 ,exist Figure 3 The shape of the panel substrate PS before cutting, indicated by the solid line in the figure, can be rectangular. To form a display device DD with four rounded corners and an L-shaped portion where the main region MR and the curved region BD connect, a laser beam LB can be used to cut along a cutting line CL. The cutting line CL can be the edge of the display panel DP after cutting. The panel substrate PS before cutting can include a central portion arranged inside the cutting line CL, which becomes the display panel DP after cutting, and an edge portion arranged outside the cutting line CL, which becomes the dummy portion DM after cutting.

[0060] The display device manufacturing apparatus 1 according to an embodiment may include a laser module 10, an optical system 20, an upper suction unit 30, and a stage unit STU. The display device manufacturing apparatus 1 may be an apparatus capable of cutting a panel substrate PS by irradiating a laser beam LB onto the panel substrate PS.

[0061] The laser module 10 may emit a laser beam LB capable of cutting the panel substrate PS. In an exemplary embodiment, the laser beam LB may be irradiated along a cutting line CL of the panel substrate PS. The laser beam LB emitted from the laser module 10 may be a CO2 laser, a green laser, an infrared laser, or an ultraviolet laser.

[0062] The optical system 20 allows the laser beam LB emitted from the laser module 10 to reach the panel substrate PS. Specifically, the laser beam LB can reach the panel substrate PS along the cutting line CL formed on the panel substrate PS. In an exemplary embodiment, the laser beam LB can be irradiated while the laser module 10 and the panel substrate PS are fixed, and the optical path of the laser beam LB can be adjusted using the optical system 20 while performing the laser cutting process. For example, the optical system 20 can include a galvano scanner or a polygon mirror.

[0063] The stage unit STU may support the panel substrate PS. The stage unit STU may include a first plate 100, a second plate 200 and a third plate 300 disposed on the first plate 100. The second plate 200 and the third plate 300 may overlap the first plate 100 in the third direction DR3. In addition, the stage unit STU may further include an internal flow path ABL (refer to FIG. Figure 4 and Figure 5 ). Reference Figure 4 and Figure 5 , the internal flow path ABL may include a first internal flow path ABL1 included in the first plate 100 and a second internal flow path ABL2 included in the second plate 200 .

[0064] The panel substrate PS may be mounted on the second plate 200 and the third plate 300. The second plate 200 may support the central portion of the panel substrate PS and may be attached to the panel substrate PS through the inner suction holes 251 (refer to FIG. Figure 4 ) provides negative pressure to secure the central portion of the panel substrate PS. The second plate 200 may have substantially the same shape as the display panel DP and may be larger than, but is not limited to, the display panel DP. The edges of the second plate 200 may be substantially parallel to the edges of the display panel DP and positioned inboard of the edges of the display panel DP. Specifically, the edges of the second plate 200 may be substantially parallel to the cut line CL of the panel substrate PS and positioned inboard of the cut line CL. The shape of the second plate 200 will be described in detail later.

[0065] The edge of the panel substrate PS may be placed on the third plate 300. That is, the third plate 300 supports the edge portion of the panel substrate PS and fixes the panel substrate PS to the outer surface of the panel substrate PS through the outer suction holes 351 (refer to FIG. Figure 4 ) provides negative pressure to fix the edge portion of the panel substrate PS.

[0066] The third plate 300 may be arranged spaced outward from the second plate 200. The third plate 300 may be arranged to surround the second plate 200. A recess 130 may be disposed in the space between the second plate 200 and the third plate 300. The recess 130 may be a space defined by the outer side of the second plate 200 as one side wall, the inner side of the third plate 300 as another side wall, and the upper surface of the first plate 100 as the bottom surface. The cut line CL on the panel substrate PS may overlap with the recess 130 in the third direction DR3.

[0067] The panel substrate PS may be supported on the second plate 200 and the third plate 300. A central portion of the panel substrate PS may be supported on the second plate 200, and an edge portion of the panel substrate PS may be supported on the third plate 300.

[0068] The stage unit STU may further include a fourth plate 400 disposed on the first plate 100 and arranged outwardly relative to the third plate 300. The fourth plate 400 may cover the upper surface of the first plate 100 disposed outwardly of the third plate 300. The fourth plate 400 may overlap with the first plate 100 in the third direction DR3. In other words, the fourth plate 400 may cover the upper surface of the first plate 100 that does not overlap with the second plate 200 and the third plate 300 in the third direction DR3. The fourth plate 400 may be spaced outwardly from the third plate 300.

[0069] The upper suction unit 30 can be arranged between the optical system 20 and the stage unit STU. When the panel substrate PS is cut along the cutting line CL by the laser beam LB, microparticles may be generated, and these microparticles can be sucked in and discharged to the outside through the upper suction unit 30. Specifically, the upper suction unit 30 can provide negative pressure to the upper suction part 31 at the lower part of the upper suction unit 30 through the upper suction pipe 32 connected to the vacuum motor (not shown) to suck in the microparticles. When cutting the panel substrate PS, microparticles may be generated at the upper and lower parts of the panel substrate PS. The microparticles generated at the upper part of the panel substrate PS can be mainly sucked in and discharged to the outside through the upper suction unit 30. Hereinafter, reference will be made to Figure 10 and Figure 11 The operation of discharging fine particles is described in detail.

[0070] Figure 4 2 is a cross-sectional view illustrating an inner adsorption flow path and an outer adsorption flow path of a display device manufacturing apparatus according to an embodiment. Figure 5 is a cross-sectional view illustrating an internal flow path and a lower suction flow path of a display device manufacturing apparatus according to an embodiment. Figure 6 is a perspective view of a second plate and a third plate according to an embodiment.

[0071] Reference Figures 4 to 6 The second plate 200 may include a main body 280 and protrusions 260 and 270. The protrusions 260 and 270 have a width smaller than that of the main body 280 and extend toward the other side of the main body 280 in the second direction DR2. The protrusions 260 and 270 may include a first protrusion 260 and a second protrusion 270.

[0072] A plurality of internal adsorption holes 251 may be arranged in the upper surface 281 of the main body 280. The plurality of internal adsorption holes 251 may be arranged in a lattice form along the first direction DR1 and the second direction DR2, but is not limited thereto and may be arranged in various forms. Figure 6 The second plate 200 is shown in which 30 internal adsorption holes 251 are formed in the upper surface 281 of the body part 280 , but the number of the internal adsorption holes 251 is not limited thereto.

[0073] The internal adsorption hole 251 can be connected to the internal adsorption motor IV via an internal adsorption flow path IVL formed through the interior of the second plate 200 and the first plate 100. The internal adsorption flow path IVL may include a second internal adsorption tube 250 formed through the interior of the second plate 200 and a first internal adsorption tube 151 formed through the interior of the first plate 100. In one embodiment, the internal adsorption flow path IVL may be cylindrical with a circular cross-section, but is not limited thereto and may have various cross-sectional shapes, such as a triangle or a quadrilateral. One end of the second internal adsorption tube 250 is connected to the internal adsorption hole 251, and the other end is connected to one end of the first internal adsorption tube 151, described later.

[0074] As described above, protrusions 260 and 270 extending toward the other side of the second direction DR2 may be disposed on the other side of the main body 280 in the second direction DR2. The protrusions 260 and 270 may include a first protrusion 260 and a second protrusion 270. The upper surface of the first protrusion 260 may include a flat surface, while the lower surface 261 of the first protrusion 260 may include a curved surface. A curved space may be defined between the lower surface 261 of the first protrusion 260 and the upper surface 271 of the second protrusion 270. In a plan view, the first protrusion 260 may cover the discharge port 241.

[0075] The first protrusion 260 and the second protrusion 270 may be arranged spaced apart from each other in the third direction DR3. Specifically, the first protrusion 260 may be arranged on one side of the body 280 in the third direction DR3, and the second protrusion 270 may be arranged on the other side of the body 280 in the third direction DR3.

[0076] Since the lower surface 261 of the first protrusion 260 is formed in a curved shape, the flow of the air ejected from the lower portion can be controlled by the Coanda effect. Figure 11 This will be described in more detail. The upper surface of the first protrusion 260 may be flat. The thickness of the first protrusion 260 in the third direction DR3 may decrease toward the other side of the second direction DR2. That is, the thickness of the first protrusion 260 in the third direction DR3 may decrease toward the outer side of the second plate 200.

[0077] The second protrusion 270 may be spaced apart from the other side of the first protrusion 260 toward the third direction DR3. As described later, the second protrusion 270 may include a second air chamber 220 and a discharge flow path pipe 240 spatially connected to the curved space.

[0078] The spacing distance between the lower surface 261 of the first protrusion 260 and the upper surface 271 of the second protrusion 270 may vary depending on the region. The distance between the lower surface 261 of the first protrusion 260 and the upper surface 271 of the second protrusion 270 may increase toward the other side of the second direction DR2. That is, the spacing distance between the lower surface 261 of the first protrusion 260 and the upper surface 271 of the second protrusion 270 may increase toward the outer side of the second plate 200. One side of the lower surface 261 of the first protrusion 260 in the second direction DR2 may be connected to one side of the upper surface 271 of the second protrusion 270 in the second direction DR2, but is not limited to this. The other end of the first protrusion 260 in the second direction DR2 and the other end of the second protrusion 270 in the second direction DR2 may be aligned in the third direction DR3, but is not limited to this.

[0079] The second plate 200 may include a second internal flow path ABL2 arranged inside the second plate 200 and a plurality of exhaust ports 241 open to the outside. The second internal flow path ABL2 may include a first air chamber 210, a second air chamber 220, an inter-chamber moving flow path pipe 230 connecting the first air chamber 210 and the second air chamber 220, and an exhaust flow path pipe 240 that spatially connects the second air chamber 220 and the exhaust ports 241. Specifically, the first air chamber 210 may be arranged inside the main body 280, and the second air chamber 220 may be arranged inside the second protrusion 270. The first air chamber 210 and the second air chamber 220 may have a shape extending in the first direction DR1, and the inter-chamber moving flow path pipe 230 may have a shape extending in the second direction DR2. Figures 7 to 9 The internal flow path ABL is described in detail.

[0080] The third plate 300 may be arranged outside the second plate 200. The third plate 300 may fix the edge portion of the panel substrate PS through a plurality of external suction holes 351 arranged on the upper surface 301 of the third plate 300. In an exemplary embodiment, after cutting, a dummy portion DM may be arranged on the third plate 300. The outer surface of the second plate 200 and the inner surface of the third plate 300 may be arranged to face each other and be spaced apart.

[0081] The external adsorption holes 351 may be connected to the external adsorption motor OV through an external adsorption flow path OVL formed through the inside of the third plate 300 and the inside of the first plate 100. The third plate 300 may include a second external adsorption pipe 350 disposed therein.

[0082] The external adsorption flow path OVL may include a second external adsorption tube 350 formed through the interior of the third plate 300 and a first external adsorption tube 152 formed through the interior of the first plate 100. In one embodiment, the external adsorption flow path OVL may be cylindrical with a circular cross-section, but is not limited thereto and may have various cross-sectional shapes, such as a triangle or a quadrilateral. One end of the second external adsorption tube 350 may be connected to the external adsorption hole 351, and the other end may be connected to one end of the first external adsorption tube 152.

[0083] Although Figure 4 It is shown that the first internal adsorption tube 151 is arranged below the first external adsorption tube 152 inside the first plate 100, but is not limited to this, and the first internal adsorption tube 151 can be arranged above the first external adsorption tube 152, or the first internal adsorption tube 151 and the first external adsorption tube 152 can be arranged on the same plane.

[0084] As described above, the second plate 200, the third plate 300, and the fourth plate 400 may be arranged on the first plate 100. The first plate 100 may include a first internal adsorption tube 151 and a first external adsorption tube 152 arranged therein. One end of the first internal adsorption tube 151 may be connected to the other end of the second internal adsorption tube 250, and the other end may be connected to the internal adsorption motor IV. One end of the first external adsorption tube 152 may be connected to the other end of the second external adsorption tube 350, and the other end may be connected to the external adsorption motor OV.

[0085] The first plate 100 may further include a first flow tube 110 and a lower suction tube 122 disposed therein. One end of the first flow tube 110 may be connected to the first air chamber 210, and the other end may be connected to the blower unit AB. The blower unit AB may supply air to the first flow tube 110. One end of the lower suction tube 122 may be connected to the lower suction unit 120 (described later), and the other end may be connected to the lower suction unit BS.

[0086] The lower suction flow path BSL may include a lower suction portion 120 disposed on the first plate 100, a lower suction pipe 122 connected to the lower suction portion 120, and a lower suction unit BS providing negative pressure to the lower suction pipe 122. The lower suction flow path BSL may be formed using a five-axis machining device.

[0087] The lower suction portion 120 may be disposed in the upper surface of the bottom surface of the groove portion 130 defined in the first plate 100, and may be in contact with the other side surface of the second plate 200 in the second direction DR2 and the side surface of the third plate 300 in the second direction DR2. When the panel substrate PS is cut along the cutting line CL by the laser beam LB, microparticles may be generated at the upper and lower portions of the panel substrate PS. The microparticles generated at the lower portion of the panel substrate PS may be mainly sucked in and discharged to the outside by the lower suction portion 120. Hereinafter, reference will be made to Figure 10 and Figure 11 The discharge operation of the fine particles is described in detail.

[0088] The lower suction portion 120 may include a lower suction hole 121 that is disposed therein and opens to the outside. That is, the upper surface of the first plate 100 defining the bottom surface of the groove portion 130 may include the lower suction hole 121. Figure 6 , the lower suction portion 120 is shown to be provided with two lower suction holes 121, but the number of the lower suction holes 121 is not limited thereto. The lower suction hole 121 may be circular, but is not limited thereto, and may have various shapes such as a triangle or a rectangle.

[0089] The lower suction pipe 122 may be disposed inside the first plate 100. One end of the lower suction pipe 122 may be open to the outside through the lower suction hole 121, and the other end may be connected to the lower suction unit BS disposed outside the first plate 100. That is, the lower suction hole 121 may be connected to the lower suction unit BS through the lower suction pipe 122.

[0090] The lower suction unit BS may provide negative pressure to the lower suction hole 121 through the lower suction pipe 122. In one embodiment, the lower suction pipe 122 may extend from the lower suction hole 121 to the other side of the third direction DR3 and bend to extend to one side of the second direction DR2, but is not limited thereto.

[0091] Figure 7 yes Figure 5 Magnified view of the “Q” region in the middle. Figure 8 This is a schematic diagram highlighting an internal flow path according to one embodiment. Figure 9 is a plan view illustrating a second internal flow path according to an embodiment.

[0092] As described above, the internal flow path ABL may include a first internal flow path ABL1 included in the first plate 100 and a second internal flow path ABL2 included in the second plate 200. The first internal flow path ABL1 may include a first flow path pipe 110 connected to the blower unit AB. The second internal flow path ABL2 may include a first air chamber 210 spatially connected to the first flow path pipe 110, a second air chamber 220 spatially connected to the first air chamber 210, and second flow path pipes 230 and 240. The second flow path pipes 230 and 240 may include an inter-chamber moving flow path pipe 230 connecting the first air chamber 210 and the second air chamber 220, and an exhaust flow path pipe 240 spatially connected between the second air chamber 220 and the exhaust port 241. The internal flow path ABL may be formed using a five-axis machining device.

[0093] The first flow tube 110 may be disposed inside the first plate 100 . One end of the first flow tube 110 may be directly connected to the first air chamber 210 , and the other end may be connected to the blower unit AB disposed on one side surface of the first plate 100 .

[0094] In one embodiment, the first flow tube 110 may extend from the blower unit AB toward the other side of the second direction DR2, bend toward the first direction DR1 at the other end of the second direction DR2, bend toward the second direction DR2 at one end of the first direction DR1, bend toward the third direction DR3 at one end of the second direction DR2, and thereby connect to the first air chamber 210, but is not limited thereto. The width of the first flow tube 110 may be constant depending on the region, but is not limited thereto, and may also vary depending on the region. The direction in which the first flow tube 110 extends from the blower unit AB may be the direction in which air provided through the first flow tube 110 travels.

[0095] First air chamber 210 may have a width greater than that of first flow tube 110 and second flow tubes 230 and 240, and may be a space initially filled with air moving from first flow tube 110. Blower hole 211 may be disposed between first air chamber 210 and first flow tube 110. The width of first air chamber 210 in first direction DR1 may be greater than the width of first flow tube 110 in first direction DR1. The width of first air chamber 210 may be constant depending on the region, but is not limited thereto, and may also have different widths depending on the region. First air chamber 210 may be in the shape of a rectangular parallelepiped with long sides extending in first direction DR1, but is not limited thereto.

[0096] The first air chamber 210 may be a space connected to the first flow tube 110 in the internal flow path ABL and having a width that widens in a first direction DR1 perpendicular to the direction of travel of the internal flow path ABL. Specifically, the width may widen starting from the blower hole 211. The portion of the first flow tube 110 connected to the first air chamber 210 may extend in the third direction DR3. The first air chamber 210 may be a space that widens in the first direction DR1. Therefore, air entering the first air chamber 210 from the first flow tube 110 can diffuse to one side and the other side of the first direction DR1.

[0097] The inter-chamber moving flow pipe 230 may extend from the first air chamber 210 toward the second air chamber 220. The inter-chamber moving flow pipe 230 may spatially connect the first air chamber 210 and the second air chamber 220. The width of the inter-chamber moving flow pipe 230 in the first direction DR1 may be smaller than the widths of the first and second air chambers 210 and 220 in the first direction DR1. The width of the inter-chamber moving flow pipe 230 in the first direction DR1 may be constant, but is not limited thereto, and may vary depending on the region. One side of the inter-chamber moving flow pipe 230 in the second direction DR2 may be connected to the first air chamber 210, and the other side in the second direction DR2 may be connected to the second air chamber 220. The inter-chamber moving flow pipe 230 may extend perpendicularly to the direction of extension of the first flow pipe 110 and perpendicularly to the direction of extension of the exhaust flow pipe 240. Furthermore, the inter-chamber moving flow pipe 230 may not overlap with the first flow pipe 110 in the direction of extension.

[0098] There may be a plurality of inter-chamber moving flow passage pipes 230. The plurality of inter-chamber moving flow passage pipes 230 may be arranged along the first direction DR1. The inter-chamber moving flow passage pipes 230 may be arranged to be spaced apart from each other in parallel. Figure 8 and Figure 9 , three inter-chamber moving flow tubes 230 are shown connecting the first air chamber 210 and the second air chamber 220, arranged in the first direction DR1. However, the number and arrangement of the inter-chamber moving flow tubes 230 are not limited thereto. In an exemplary embodiment, one inter-chamber moving flow tube 230 may be arranged at the center of each of the first air chamber 210 and the second air chamber 220, and one inter-chamber moving flow tube 230 may be arranged on one side and one on the other side of the first direction DR1. The width of each of the plurality of inter-chamber moving flow tubes 230 may be constant, but is not limited to this, and may also have different widths. The width of each inter-chamber moving flow tube 230 may be smaller than the width of the first flow tube 110, but is not limited to this, and may have a width greater than or equal to the width of the first flow tube 110.

[0099] The second air chamber 220 may be a space having a width greater than that of the inter-chamber moving flow passage tube 230, and air moving from the inter-chamber moving flow passage tube 230 may be filled into the second air chamber 220. The width of the second air chamber 220 in the first direction DR1 may be greater than the width of the inter-chamber moving flow passage tube 230 in the first direction DR1. The second air chamber 220 may have a cylindrical shape extending in the first direction DR1, but is not limited thereto. One end and the other end of the second air chamber 220 in the first direction DR1 may each have a hemispherical shape.

[0100] The second air chamber 220 may be a space connected to the inter-chamber moving flow path pipe 230 in the internal flow path ABL and having a width that widens in a first direction DR1 perpendicular to the direction of travel of the internal flow path ABL. Specifically, the portion of the inter-chamber moving flow path pipe 230 connected to the second air chamber 220 may extend in the second direction DR2. The second air chamber 220 may be a space in the internal flow path ABL that widens in the first direction DR1. Therefore, air entering the second air chamber 220 from the inter-chamber moving flow path pipe 230 can diffuse both to one side and to the other side in the first direction DR1.

[0101] A plurality of exhaust manifolds 240 may be arranged along the first direction DR1 on one side of the second air chamber 220 in the third direction DR3. Each exhaust manifold 240 may spatially connect the second air chamber 220 to an exhaust port 241 that opens to the outside. The exhaust manifolds 240 may extend in the third direction DR3, but are not limited thereto. Each exhaust manifold 240 may have a cylindrical shape, but is not limited thereto, and may have various three-dimensional shapes, such as a triangular prism or a quadrangular prism.

[0102] Looking at the flow of air within the internal flow path ABL, the air traveling from the blower unit AB may move along the first flow path tube 110 .

[0103] Air moving along the first flow tube 110 can enter the first air chamber 210 through the blower hole 211. The air entering the first air chamber 210 diffuses toward one side and the other side of the first direction DR1, and can fill the first air chamber 210. The flow rate (or pressure) of the air inside the first air chamber 210 can be lower than the flow rate (or pressure) of the air in the first flow tube 110. When the amount of air traveling is constant, the flow rate (or pressure) of the air can decrease as the cross-sectional area perpendicular to the direction of air travel increases, and can increase as the cross-sectional area decreases.

[0104] The air filling the first air chamber 210 may enter the inter-chamber moving flow tube 230. The flow rate (or pressure) of the air in the inter-chamber moving flow tube 230 may be greater than the flow rate (or pressure) of the air in the first air chamber 210 and greater than the flow rate (or pressure) of the air in the first flow tube 110, but is not limited thereto. The air passing through the inter-chamber moving flow tube 230 may enter the second air chamber 220.

[0105] The air entering the second air chamber 220 diffuses toward one side and the other side in the first direction DR1 and may fill the second air chamber 220. The flow rate (or pressure) of the air in the second air chamber 220 may be lower than the flow rate (or pressure) of the air in the inter-chamber moving flow path tube 230. The flow rate (or pressure) of the air in the second air chamber 220 may be substantially the same as the flow rate (or pressure) of the air in the first air chamber 210, but is not limited thereto and may have a different value from the flow rate (or pressure) of the air in the first air chamber 210.

[0106] The air filling the second air chamber 220 may be ejected to the outside through a plurality of exhaust flow path pipes 240 and exhaust ports 241 formed at one side of the second air chamber 220 in the third direction DR3 .

[0107] In one embodiment, the exhaust flow pipe 240 may extend toward one side of the third direction DR3. In this case, the air ejected through the exhaust flow pipe 240 and the exhaust port 241 may be ejected toward one side of the third direction DR3. The flow rate (or pressure) of the air ejected to the outside through the exhaust flow pipe 240 and the exhaust port 241 may be greater than the flow rate (or pressure) of the air in the second air chamber 220. As described later, by the strong air flow ejected through the exhaust flow pipe 240 and the exhaust port 241, the microparticles may be more easily sucked into the lower suction hole 121 of the lower suction portion 120 and removed. Figure 10 and Figure 11 The flow of the air after being ejected through the exhaust flow path pipe 240 and the exhaust port 241 will be described in detail.

[0108] Figure 10 and Figure 11 This is a schematic diagram showing the process of removing fine particles.

[0109] Reference Figure 10 and Figure 11 The laser beam LB emitted from the laser module 10 can be irradiated onto the cutting line CL on the panel substrate PS through the optical system 20. The panel substrate PS irradiated with the laser beam LB can generate fine particles P and can be cut. Here, the fine particles P may refer to fine particles of a size observable to the naked eye, but are not limited thereto, and may also refer to fume generated when the laser beam LB is irradiated onto the panel substrate PS.

[0110] As the laser beam LB is irradiated on the upper portion of the panel substrate PS, fine particles P may be generated mainly on the upper portion of the panel substrate PS in the initial stage of the cutting process. The fine particles P generated on the upper portion may be removed mainly by the upper suction unit 30. Specifically, the fine particles P may be sucked in by the upper suction portion 31 disposed at the lower portion of the upper suction unit 30, and may be discharged to the outside through the upper suction pipe 32 connected to the upper suction unit 30. The negative pressure of the upper suction unit 30 for sucking the fine particles P may be provided by a vacuum motor (not shown) connected to the upper suction pipe 32.

[0111] Since the laser beam LB penetrates the panel substrate PS in the thickness direction of the panel substrate PS during the cutting process, particles P may be generated not only in the upper portion of the panel substrate PS but also in the lower portion of the panel substrate PS. Even in this case, particles P generated in the upper portion of the panel substrate PS can be removed primarily by the upper suction unit 30. However, particles P generated in the lower portion of the panel substrate PS can be removed primarily by the inner flow path ABL and the lower suction flow path BSL.

[0112] As reference Figures 7 to 9 As described above, the internal flow path ABL may include a first internal flow path ABL1 included in the first plate 100 and a second internal flow path ABL2 included in the second plate 200. The first internal flow path ABL1 may include a first flow path pipe 110 connected to the blower unit AB. The second internal flow path ABL2 may include a first air chamber 210 spatially connected to the first flow path pipe 110, a second air chamber 220 spatially connected to the first air chamber 210, and second flow path pipes 230 and 240. The second flow path pipes 230 and 240 may include an inter-chamber moving flow path pipe 230 connecting the first air chamber 210 and the second air chamber 220, and an exhaust flow path pipe 240 spatially connecting the second air chamber 220 and the exhaust port 241.

[0113] In addition, as reference Figure 5 As described, the lower suction flow path BSL may include the lower suction portion 120 disposed on the first plate 100 , the lower suction pipe 122 connected to the lower suction portion 120 , and the lower suction unit BS providing negative pressure to the lower suction pipe 122 .

[0114] The particles P generated in the lower portion of the panel substrate PS may be located within the recessed portion 130. The particles P located within the recessed portion 130 may be discharged to the outside by air supplied by the internal flow path ABL and negative pressure provided by the lower suction flow path BSL. Hereinafter, the process of removing the particles P generated in the lower portion of the panel substrate PS will be described from the perspective of air flow.

[0115] Reference above Figures 7 to 9The flow of air before being ejected through the exhaust flow pipe 240 and the exhaust port 241 is described. Thereafter, the air ejected through the exhaust flow pipe 240 may be ejected toward the lower surface 261 of the first protrusion 260 in a curved shape. That is, the air ejected through the exhaust flow pipe 240 may not be ejected directly toward the panel substrate PS. As described above, since the lower surface 261 of the first protrusion 260 forms a curved shape, the air may move along the curved surface by the Coanda effect. The air moving along the lower surface 261 of the first protrusion 260 may move toward the lower surface of the panel substrate PS. The flow rate (or pressure) of the air near the lower surface of the panel substrate PS may be less than the flow rate (or pressure) of the air when being ejected through the exhaust flow pipe 240. The air moving toward the lower surface of the panel substrate PS may move toward the lower suction portion 120 together with the microparticles P generated on the lower surface of the panel substrate PS. The air and the fine particles P may be moved toward the lower suction part 120 by the negative pressure provided by the lower suction unit BS.

[0116] A portion of the particles P moving toward the lower suction portion 120 may be sucked into the lower suction hole 121 of the lower suction portion 120. The particles P sucked into the lower suction hole 121 may be discharged to the outside through the lower suction pipe 122. Another portion of the particles P that is not sucked into the lower suction hole 121 of the lower suction portion 120 may rise to the panel substrate PS side. At this time, the air flow ejected from the exhaust flow pipe 240 and moving along the lower surface 261 of the first protrusion 260 may act as an air curtain, thereby preventing the particles P from rising. As a result, the particles P are caused to descend again toward the lower suction portion 120 side, making it possible to easily remove the particles P.

[0117] When air ejected from the exhaust flow pipe 240 is directly ejected toward the panel substrate PS, the panel substrate PS may vibrate due to the high flow rate (or pressure) of the air ejected from the exhaust flow pipe 240. The display device manufacturing apparatus 1 according to one embodiment indirectly ejects air so that the air passes through the curved lower surface 261 of the first protrusion 260, thereby reducing the flow rate (or pressure) of the air through the Coanda effect. Therefore, the panel substrate PS can be minimized from vibrating.

[0118] Furthermore, the display device manufacturing apparatus 1 according to one embodiment can adjust the flow rate (or pressure) of air ejected from each exhaust flow tube 240 by arranging a first air chamber 210 and a plurality of inter-chamber movable flow tubes 230 connecting the first air chamber 210 and the second air chamber 220 within the internal flow path ABL, wherein the width of the first air chamber 210 is greater than the width of the first flow tube 110. Specifically, air entering the first air chamber 210 is diffused throughout the first air chamber 210 before being exhausted, thereby adjusting the amount of air exhausted through each inter-chamber movable flow tube 230. Furthermore, by arranging a plurality of inter-chamber movable flow tubes 230, the amount of air entering the second air chamber 220 from the first air chamber 210 can be adjusted according to the region. For example, the flow rate (or pressure) of the air ejected from each exhaust flow tube 240 can be uniformly adjusted.

[0119] Hereinafter, another embodiment of the manufacturing apparatus of the display device will be described. In the following embodiment, for the same structure as the embodiment already described, its description is omitted or simplified, and the difference is mainly described.

[0120] Figure 12 is a plan view showing a second internal flow path according to another embodiment.

[0121] Reference Figure 12 The display device manufacturing apparatus 1_1 according to this embodiment differs from the display device manufacturing apparatus 1 according to the first embodiment in that the inter-chamber moving flow path pipes 230_1 include a first inter-chamber moving flow path pipe 231_1 and a second inter-chamber moving flow path pipe 232_1, and the first inter-chamber moving flow path pipe 231_1 and the second inter-chamber moving flow path pipe 232_1 have different widths. In other words, the inner diameters of the inter-chamber moving flow path pipes 230_1 arranged along a direction can increase from the center toward the outside of the arrangement.

[0122] The display device manufacturing apparatus 1_1 according to this embodiment indirectly sprays air through the curved lower surface 261_1 of the first protrusion 260_1, thereby reducing the flow rate (or pressure) of the air through the Coanda effect. Therefore, the shaking phenomenon of the panel substrate PS_1 can be minimized.

[0123] In addition, the manufacturing equipment 1_1 of the display device according to this embodiment can adjust the flow rate (or pressure) of the air ejected from each exhaust flow pipe 240_1 through the first air chamber 210_1 in the internal flow path ABL_1 and multiple inter-chamber mobile flow pipes 230_1 connecting the first air chamber 210_1 and the second air chamber 220_1, wherein the width of the first air chamber 210_1 is greater than the width of the first flow pipe 110_1.

[0124] Figure 13is a plan view showing a second internal flow path according to still another embodiment.

[0125] Reference Figure 13 The display device manufacturing apparatus 1_2 according to this embodiment differs from the display device manufacturing apparatus 1 according to the first embodiment in that the display device manufacturing apparatus 1_2 according to this embodiment includes a greater number of inter-chamber moving flow path pipes 230_2. The display device manufacturing apparatus 1_2 according to this embodiment may include five inter-chamber moving flow path pipes 230_2, but is not limited thereto and may include more inter-chamber moving flow path pipes 230_2.

[0126] The display device manufacturing apparatus 1_2 according to this embodiment indirectly sprays air through the curved lower surface 261_2 of the first protrusion 260_2, thereby reducing the flow rate (or pressure) of the air through the Coanda effect. Therefore, the shaking of the panel substrate PS_2 can be minimized.

[0127] In addition, the manufacturing equipment 1_2 of the display device according to this embodiment can adjust the flow rate (or pressure) of the air ejected from each exhaust flow tube 240_2 through the first air chamber 210_2 in the internal flow path ABL_2 and multiple inter-chamber mobile flow tubes 230_2 connecting the first air chamber 210_2 and the second air chamber 220_2, wherein the width of the first air chamber 210_2 is greater than the width of the first flow tube 110_2.

[0128] Figure 14 is a plan view showing a second internal flow path according to still another embodiment.

[0129] Reference Figure 14 The display device manufacturing apparatus 1_3 according to this embodiment differs from the display device manufacturing apparatus 1 according to one embodiment in that the plurality of inter-chamber moving flow path tubes 230_3 are arranged not to overlap with the blower holes 211_3 in the second direction DR2.

[0130] The display device manufacturing apparatus 1_3 according to this embodiment can indirectly spray air through the curved lower surface 261_3 of the first protrusion 260_3, thereby reducing the flow rate (or pressure) of the air through the Coanda effect. Therefore, the shaking phenomenon of the panel substrate PS_3 can be minimized.

[0131] In addition, the manufacturing equipment 1_3 of the display device according to this embodiment can adjust the flow rate (or pressure) of the air ejected from each exhaust flow pipe 240_3 through the first air chamber 210_3 in the internal flow path ABL_3 and multiple inter-chamber mobile flow pipes 230_3 connecting the first air chamber 210_3 and the second air chamber 220_3, wherein the width of the first air chamber 210_3 is greater than the width of the first flow pipe 110_3.

[0132] Figure 15 is a plan view showing a second internal flow path according to still another embodiment.

[0133] Reference Figure 15 The manufacturing equipment 1_4 of the display device according to this embodiment is different from the manufacturing equipment 1 of the display device according to one embodiment in that the blower hole 211_4 is set in plurality, and the plurality of inter-chamber moving flow path tubes 230_4 are arranged so as not to overlap with the blower hole 211_4 in the second direction DR2.

[0134] The display device manufacturing apparatus 1_4 according to this embodiment indirectly sprays air through the curved lower surface 261_4 of the first protrusion 260_4, thereby reducing the flow rate (or pressure) of the air through the Coanda effect. Therefore, the shaking phenomenon of the panel substrate PS_4 can be minimized.

[0135] In addition, the manufacturing equipment 1_4 of the display device according to this embodiment can adjust the flow rate (or pressure) of the air ejected from each exhaust flow tube 240_4 through the first air chamber 210_4 in the internal flow path ABL_4 and multiple inter-chamber mobile flow tubes 230_4 connecting the first air chamber 210_4 and the second air chamber 220_4, wherein the width of the first air chamber 210_4 is greater than the width of the first flow tube 110_4.

[0136] Figure 16 is a plan view showing a second internal flow path according to still another embodiment.

[0137] Reference Figure 16 The display device manufacturing apparatus 1_5 according to this embodiment may further include a through hole HIAA disposed within the second plate 200_5 and having a closed curve shape in plan view. The first plate 100_5 may be exposed within the inner region of the through hole HIAA. The through hole HIAA may prevent the second plate 200_5 from being damaged by the laser beam LB when the panel substrate PS_5 is cut along the cutting line CL_HIAA.

[0138] The display device manufacturing apparatus 1_5 according to this embodiment differs from the display device manufacturing apparatus 1 according to the first embodiment in that it not only includes a second air chamber 220a_5 and a first exhaust port 241a_5 for removing particles P generated by the cutting process performed on one side of the second plate 200_5, but also includes a third air chamber 220b_5 and a second exhaust port 241b_5 for removing particles P generated by the cutting process performed on the through-hole HIAA side. The third air chamber 220b_5 and the second exhaust port 241b_5 can be arranged around the through-hole HIAA. The second air chamber 220a_5 can be arranged on the other side of the first air chamber 210_5 in the second direction DR2, and the third air chamber 220b_5 can be arranged on the one side of the first air chamber 210_5 in the second direction DR2. That is, the first air chamber 210_5 can be arranged between the second air chamber 220a_5 and the third air chamber 220b_5, but this is not limited to this. The display device manufacturing apparatus 1_5 according to this embodiment may include a first inter-chamber moving flow path pipe 230a_5 connecting the first air chamber 210_5 and the second air chamber 220a_5, and a second inter-chamber moving flow path pipe 230b_5 connecting the first air chamber 210_5 and the third air chamber 220b_5. Structures corresponding to the first protrusion 260 and the second protrusion 270 of the display device manufacturing apparatus 1 according to one embodiment may also be arranged in the area where the third air chamber 220b_5 and the second exhaust port 241b_5 are arranged.

[0139] The display device manufacturing apparatus 1_5 according to this embodiment indirectly sprays air through the curved lower surface 261_5 of the first protrusion 260_5, thereby reducing the flow rate (or pressure) of the air through the Coanda effect. Therefore, the shaking phenomenon of the panel substrate PS_5 can be minimized.

[0140] In addition, the manufacturing equipment 1_5 of the display device according to this embodiment can adjust the flow rate (or pressure) of the air ejected from each exhaust flow pipe 240_5 through the first air chamber 210_5 in the internal flow path ABL_5 and multiple inter-chamber mobile flow pipes 230a_5 and 230b_5 connecting the first air chamber 210_5 and the second air chamber 220a_5 and the first air chamber 210_5 and the third air chamber 220b_5, wherein the width of the first air chamber 210_5 is greater than the width of the first flow pipe 110_5.

[0141] The present invention has been described above with the embodiments of the present invention as the center, but this is only an example and does not limit the present invention. It should be understood by those skilled in the art that various modifications and applications can be made without departing from the essential characteristics of the embodiments of the present invention. For example, the various components specifically shown in the embodiments of the present invention can be implemented in a modified manner. In addition, differences related to these modifications and applications should be interpreted as being included within the scope of the present invention as defined in the appended claims.

[0142] Description of Reference Signs

[0143] 1: Display device manufacturing equipment

[0144] DD: Display Device

[0145] DP: Display Panel

[0146] 100: First board

[0147] 200: Second board

[0148] 210: First air chamber

[0149] 220: Second air chamber

[0150] 230: Inter-chamber mobile flow tube

[0151] 300: Third board

[0152] 400: Fourth board

Claims

1. Display device manufacturing equipment, comprising: a first plate comprising a first internal flow path disposed within the interior of the first plate; as well as a second plate disposed on the first plate and including a plurality of discharge ports opening to the outside and a second internal flow path disposed inside the second plate and spatially connecting each of the discharge ports to the first internal flow path, Wherein, the first internal flow path includes a first flow path tube, The second internal flow path includes a second flow path tube and a first air chamber and a second air chamber, wherein the inner widths of the first air chamber and the second air chamber are greater than the inner widths of the first flow path tube and the second flow path tube. The first air chamber space is connected to the first flow pipe, and The second flow path pipe includes: an inter-chamber moving flow path pipe that spatially connects the first air chamber and the second air chamber; and a discharge flow path pipe that spatially connects the second air chamber and each of the discharge ports. wherein the second plate includes a main body portion and a protruding portion, the width of the protruding portion is smaller than the width of the main body portion, and the protruding portion extends outside the main body portion; and The protrusion includes a first protrusion and a second protrusion, a lower surface of the first protrusion includes a curved surface, and a curved space is defined between the lower surface of the first protrusion and an upper surface of the second protrusion.

2. The manufacturing equipment of the display device according to claim 1, wherein: The discharge flow path pipe is arranged in the second protrusion and is spatially connected to the curved space.

3. The manufacturing equipment of the display device according to claim 2, wherein: In a plan view, the discharge port is covered by the first protrusion.

4. The manufacturing equipment of the display device according to claim 1, wherein: The first air chamber and the second air chamber each have a shape extending in a first direction, and the inter-chamber moving flow path tube extends in a second direction intersecting the first direction.

5. The manufacturing equipment of the display device according to claim 4, wherein: The discharge flow path pipe extends in a third direction that is perpendicular to a plane defined by the first direction and the second direction.

6. Display device manufacturing equipment, including: First board; as well as a second plate, arranged on the first plate and having a through hole in a closed curve shape in a plan view, wherein the first plate comprises a first internal flow path having a first flow path tube, The second plate includes a plurality of discharge ports arranged around the through hole and a second internal flow path spatially connecting each of the discharge ports to the first internal flow path. The second internal flow path includes a second flow path tube and a first air chamber and a second air chamber, wherein the inner widths of the first air chamber and the second air chamber are greater than the inner widths of the first flow path tube and the second flow path tube. The first air chamber space is connected to the first flow pipe, and The second flow path pipe includes: an inter-chamber moving flow path pipe that spatially connects the first air chamber and the second air chamber; and a discharge flow path pipe that spatially connects the second air chamber and each of the discharge ports. wherein the second plate includes a main body portion and a protruding portion, the width of the protruding portion is smaller than the width of the main body portion, and the protruding portion extends outside the main body portion; and The protrusion includes a first protrusion and a second protrusion, a lower surface of the first protrusion includes a curved surface, and a curved space is defined between the lower surface of the first protrusion and an upper surface of the second protrusion.

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