Soft film roller press and nanoimprint press

Abstract

The present invention provides a soft film roller press for nano-imprinting, which comprises: a template fixing platform, on which a product placing mechanism for placing a product to be imprinted is arranged; a first soft film tensioning device, located at one end of the platform and comprising a first clamping mechanism for clamping one end of a soft film; a second soft film tensioning device, located at the other end of the platform opposite to the first soft film tensioning device, the second soft film tensioning device comprising a second clamping mechanism, a tensioning control mechanism and a lifting control mechanism, the second clamping mechanism is used to clamp the other end of the soft film, the tensioning control mechanism is connected to the second clamping mechanism and applies an oblique upward tensioning force to the second clamping mechanism to tension the soft film clamped by the second clamping mechanism, the lifting control mechanism is located below the tensioning control mechanism and is used to control the lifting and lowering of the second clamping mechanism and the tensioning control mechanism; a rolling device, located above the platform, comprising a rolling wheel for rolling the tensioned soft film.

Description

Technical Field

[0001] The invention relates to the field of nano-imprinting, in particular to a soft film roller press and a nano-imprinting machine. Background Art

[0002] In nanoimprinting, soft imprinting is often used. Soft imprinting uses soft films such as PET, PVC, PVA, etc. to imprint patterns on products or substrates. When the soft film is applied to the product or substrate to be imprinted, it needs to be rolled. However, due to the natural stretching of the soft film, if the soft film is rolled directly, there will often be gaps, resulting in poor rolling effect. Summary of the invention

[0003] In order to solve the above technical problems, the present invention discloses a soft film rolling machine and a nano-imprinting machine, which, before rolling the soft film, applies oblique upward pre-tensioning to one end of the soft film through a pre-tensioning control mechanism, and then rolls the pre-tensioned soft film. While rolling, the height of the tensioned end of the soft film is continuously adjusted through a lifting control mechanism, thereby avoiding the formation of a gap between the soft film and the product to be imprinted during rolling, thereby obtaining a better rolling effect.

[0004] To achieve the above-mentioned object, the present invention provides: (1) a soft film roller press for nanoimprinting, wherein the soft film roller press comprises: a template fixing platform, on which a product placement mechanism is provided, the product placement mechanism is used to place the product to be imprinted; a first soft film tensioning device, located at one end of the template fixing platform, and comprising a first clamping mechanism for clamping one end of the soft film; a second soft film tensioning device, located at the other end of the template fixing platform opposite to the first soft film tensioning device, the second soft film tensioning device comprising a second clamping mechanism, a tensioning control mechanism and a lifting control mechanism; The second clamping mechanism is used to clamp the other end of the soft film, the tensioning control mechanism is connected to the second clamping mechanism, and applies an oblique upward force to the second clamping mechanism through tensioning control, thereby controlling the oblique upward movement of the second clamping mechanism to tension the soft film clamped by the second clamping mechanism, the lifting control mechanism is located below the tensioning control mechanism and is used to control the lifting and lowering of the second clamping mechanism and the tensioning control mechanism; a rolling device is located above the template fixing platform, and includes a rolling wheel for rolling the tensioned soft film onto the template fixing platform.

[0005] (2) According to the soft film roller press described in item (1), the tensioning control mechanism includes a bracket, a guide rod and a tensioning force applying member, the bracket has a slope portion arranged to be inclined relative to the plane of the template control platform, one end of the tensioning force applying member is connected to the slope portion, and the other end is connected to the second clamping mechanism, the guide rod is arranged between the slope portion and the second clamping mechanism and is perpendicular to the slope portion, so as to control the movement guidance of the second clamping mechanism.

[0006] (3) According to the soft film rolling machine described in item (2), the tension applying member is a cylinder, and the cylinder is connected to the second clamping mechanism through the inclined surface portion.

[0007] (4) According to the soft film rolling machine described in item (3), the tension control mechanism is arranged on a bottom plate, and the lifting control mechanism is located below the bottom plate and connected to the bottom plate.

[0008] (5) According to any one of items (1) to (4), the soft film roller press is provided with an adsorption groove in the product placement mechanism, and an air adsorption device is provided on the other side of the template fixing platform opposite to the product placement mechanism, so that the product to be printed can be adsorbed on the template fixing platform through the adsorption groove.

[0009] (6) According to the soft film rolling machine described in item (5), adsorption holes arranged in an array are provided around the product placement mechanism, so that the soft film can be adsorbed on the template fixing platform through the adsorption holes.

[0010] (7) According to the soft film rolling machine described in any one of items (1) to (4), the rolling device includes a rolling wheel pre-pressing mechanism, which is connected to the rolling wheel and controls the up and down vertical movement of the rolling wheel, and the rolling wheel pre-pressing mechanism is elastically connected to the rolling wheel through an elastic member.

[0011] (8) According to the soft film roller press described in any one of items (1) to (4), the soft film roller press further includes a soft film translation mechanism, which controls the horizontal movement of the first soft film tensioning device and the second soft film tensioning device through a guide rail, thereby driving the horizontal movement of the soft film.

[0012] The present invention also provides: a nanoimprinter, comprising a light source and a control device and a soft film roller press as described in any one of items (1) to (8).

[0013] Furthermore, the light source and control device are connected to the roller pre-pressing mechanism of the soft film embossing machine, and the lateral movement of the two is simultaneously controlled by the same lateral movement control mechanism, so that the light source irradiation and curing are performed immediately after the roller presses the soft film. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram showing the structure of a nanoimprint machine according to the present invention;

[0015] Figure 2 Schematic diagram showing the structure of a soft film roller press according to the present invention. DETAILED DESCRIPTION

[0016] The technical solution of the present invention is further described below in conjunction with specific embodiments, but the present invention is not limited to these embodiments.

[0017] The technical solution of the present invention provides: (1) a soft film roller press for nanoimprinting, wherein the soft film roller press comprises: a template fixing platform, on which a product placement mechanism is provided, and the product placement mechanism is used to place the product to be imprinted; a first soft film tensioning device, located at one end of the template fixing platform, and comprising a first clamping mechanism for clamping one end of the soft film; a second soft film tensioning device, located at the other end of the template fixing platform opposite to the first soft film tensioning device, and the second soft film tensioning device comprises a second clamping mechanism, a tensioning control mechanism and a lifting control mechanism The second clamping mechanism is used to clamp the other end of the soft film, the tensioning control mechanism is connected to the second clamping mechanism, and applies an oblique upward force to the second clamping mechanism through tensioning control, thereby controlling the oblique upward movement of the second clamping mechanism to tension the soft film clamped by the second clamping mechanism, the lifting control mechanism is located below the tensioning control mechanism and is used to control the lifting and lowering of the second clamping mechanism and the tensioning control mechanism; a rolling device is located above the template fixing platform, and includes a rolling wheel for rolling the tensioned soft film onto the template fixing platform.

[0018] (2) According to the soft film roller press described in item (1), the tensioning control mechanism includes a bracket, a guide rod and a tensioning force applying member, the bracket has a slope portion arranged to be inclined relative to the plane of the template control platform, one end of the tensioning force applying member is connected to the slope portion, and the other end is connected to the second clamping mechanism, the guide rod is arranged between the slope portion and the second clamping mechanism and is perpendicular to the slope portion, so as to control the movement guidance of the second clamping mechanism.

[0019] (3) According to the soft film rolling machine described in item (2), the tension applying member is a cylinder, and the cylinder is connected to the second clamping mechanism through the inclined surface portion.

[0020] (4) According to the soft film rolling machine described in item (3), the tension control mechanism is arranged on a bottom plate, and the lifting control mechanism is located below the bottom plate and connected to the bottom plate.

[0021] (5) According to any one of items (1) to (4), the soft film roller press is provided with an adsorption groove in the product placement mechanism, and an air adsorption device is provided on the other side of the template fixing platform opposite to the product placement mechanism, so that the product to be printed can be adsorbed on the template fixing platform through the adsorption groove.

[0022] (6) According to the soft film rolling machine described in item (5), adsorption holes arranged in an array are provided around the product placement mechanism, so that the soft film can be adsorbed on the template fixing platform through the adsorption holes.

[0023] (7) According to the soft film rolling machine described in any one of items (1) to (4), the rolling device includes a rolling wheel pre-pressing mechanism, which is connected to the rolling wheel and controls the up and down vertical movement of the rolling wheel, and the rolling wheel pre-pressing mechanism is elastically connected to the rolling wheel through an elastic member.

[0024] (8) According to the soft film roller press described in any one of items (1) to (4), the soft film roller press further includes a soft film translation mechanism, which controls the horizontal movement of the first soft film tensioning device and the second soft film tensioning device through a guide rail, thereby driving the horizontal movement of the soft film.

[0025] The present invention also provides: a nanoimprinter, comprising a light source and a control device and a soft film roller press as described in any one of items (1) to (8).

[0026] Furthermore, the light source and control device are connected to the roller pre-pressing mechanism of the soft film embossing machine, and the lateral movement of the two is simultaneously controlled by the same lateral movement control mechanism, so that the light source irradiation and curing are performed immediately after the roller presses the soft film.

[0027] See the present invention Figure 1 and Figure 2 , which respectively show the structural schematic diagram of the nanoimprinter according to the present invention and the structural schematic diagram of the soft film roller press.

[0028] See also Figure 1 and Figure 2The soft film roller press according to the present invention comprises: a template fixing platform 6, on which a product placement mechanism 8 is arranged, and the product placement mechanism is used to place the product to be imprinted (such as a wafer, a silicon chip, a substrate, etc.); a first soft film tensioning device, which is located at one end of the template fixing platform 6 and includes a first clamping mechanism for clamping one end of the soft film; a second soft film tensioning device 4, which is located at the other end of the template fixing platform 6 opposite to the first soft film tensioning device, and the second soft film tensioning device 4 includes a second clamping mechanism, a tensioning control mechanism 10 and a lifting control mechanism 11, and the second The clamping mechanism is used to clamp the other end of the soft film. The tensioning control mechanism 10 is connected to the second clamping mechanism and applies an oblique upward force to the second clamping mechanism through tensioning control, thereby controlling the oblique upward movement of the second clamping mechanism to tension the soft film clamped by the second clamping mechanism. The lifting control mechanism 11 is located below the tensioning control mechanism 10 and is used to control the lifting and lowering of the second clamping mechanism and the tensioning control mechanism 10; the rolling device 12 is located above the template fixing platform 6, and includes a rolling wheel 7 for rolling the tensioned soft film onto the template fixing platform 6.

[0029] In the specific example, the product placement mechanism 8 is configured as a circular structure for placing wafers, but it should be noted that the product placement mechanism is not limited to the circular structure shown in the figure, and it can be flexibly configured according to the specific shape of the product to be imprinted.

[0030] In addition, in a specific example, the first clamping mechanism may include a clamping plate and a slot, so that after clamping one end of the soft film by the clamping plate, the clamping plate is fixed in the slot. The second clamping mechanism may include a clamping plate and a movable slot 9, and after clamping the other end of the soft film by the clamping plate, the clamping plate is fixed in the movable slot 9. As described above, the movable slot 9 is tensioned and controlled by the tension control mechanism 10, so as to control the oblique upward movement of the movable slot 9, and then apply an oblique upward tensioning force to the soft film at one end of the movable slot 9.

[0031] Furthermore, the tension control mechanism 10 comprises a bracket, a guide rod 13 and a tensioning force applying member, see Figure 1 and Figure 2 The bracket has an inclined portion 12 which is arranged obliquely relative to the plane of the template control platform 6, one end of the tensioning force applying member is connected to the inclined portion 12, and the other end is connected to the second clamping mechanism (specifically, the active slot 9), a guide rod 13 is arranged between the inclined portion 12 and the second clamping mechanism (specifically, the active slot 9), and the guide rod 13 is arranged perpendicular to the inclined portion 12, the second clamping mechanism (specifically, the active slot 9) can slide along the guide rod 13, so that the guide rod 13 can be used to control the movement guide of the second clamping mechanism (i.e., the active slot 9).

[0032] In a specific embodiment, the tensioning force applying component can be a cylinder 14 as shown in the figure. The cylinder 14 passes through the inclined surface 12 and is connected to the second clamping mechanism (specifically, the movable slot 9). When the cylinder 14 pops out from the retracted position to the extended position, it drives the movable slot 9 to move obliquely upward, thereby applying an oblique upward tensioning force to one end of the soft film clamped by the movable slot 9.

[0033] Of course, the tensioning force applying member of the present invention is not limited to the cylinder as described above, and it can be any form that can achieve tension control. For example, an electromagnetic adsorption device can also be used as the tensioning force applying member. In this case, one end of the electromagnetic adsorption device is connected to the inclined surface portion 12, and the other end is used to contact the second clamping mechanism (specifically, the active slot 9), so as to achieve the oblique upward tension control of the active slot 9 by passing electricity.

[0034] Furthermore, the second soft film tensioning device 4 includes a base plate 15, the tensioning control mechanism 10 is located on the base plate 15, and the lifting control mechanism 11 is located below the base plate 15 and connected to the base plate 15, so that the lifting and lowering operation of the lifting and lowering control mechanism 11 drives the base plate 15 and the tensioning control mechanism 10 located above the base plate 15 to perform lifting and lowering operations.

[0035] In a specific embodiment, the lifting control mechanism 11 may include an electric cylinder 16, an electric cylinder fixing plate 17 for fixing the electric cylinder 16, and a guide rod 18 for guiding the lifting.

[0036] Of course, the lifting control mechanism of the present invention is not limited to the electric cylinder type lifting control mechanism, and it can be any control mechanism that can realize the lifting operation, for example, it can be a lifting mechanism controlled by a stepping motor.

[0037] Furthermore, the product placement mechanism 8 is provided with an adsorption groove, and an air adsorption device (not shown in the figure) is provided on the other side of the template fixing platform 6 opposite to the product placement mechanism 8, so that the product to be printed can be adsorbed on the template fixing platform 6 through the adsorption groove. For example, when the product placement mechanism 8 is a circular structure for placing wafers, a plurality of annular grooves 19 may be provided thereon.

[0038] Furthermore, adsorption holes 20 arranged in an array may be provided around the product placement mechanism 8, so that the soft film can be adsorbed on the template fixing platform through the adsorption holes 20. Specifically, after the rolling wheel 7 rolls the soft film, the adsorption holes 20 are controlled to perform an adsorption operation. Of course, the adsorption operation of the adsorption holes 20 in each row and column may also be controlled in sequence through a timing control.

[0039] In a specific embodiment, the above-mentioned rolling device 12 also includes a rolling wheel pre-pressing mechanism 2, which is connected to the rolling wheel 7 and controls the up and down vertical movement of the rolling wheel 7. The rolling wheel pre-pressing mechanism 2 can be elastically connected to the rolling wheel through an elastic member (for example, a spring member is arranged along the guide axis direction), so that when the rolling wheel 7 is adjusted up and down to a specified point position through the rolling wheel pre-pressing mechanism 2, the rolling wheel 7 can form an elastic contact with the soft film to be rolled.

[0040] Furthermore, the soft film rolling machine further comprises a soft film translation mechanism 5, which controls the horizontal movement of the first soft film tensioning device and the second soft film tensioning device through a guide rail, thereby driving the horizontal movement of the soft film. Therefore, when the soft film needs to be replaced, it can be horizontally moved out through the soft film translation mechanism 5, and then replaced, and then the replaced soft film can be moved back to the rolling position through the soft film translation mechanism 5.

[0041] A further embodiment of the present invention discloses a nanoimprinter, which includes a light source and a control device 1 and the soft film roller press as described above.

[0042] Preferably, the light source and control device 1 can be connected to the roller pre-pressing mechanism 2 of the soft film embossing machine, and the lateral movement of both can be simultaneously controlled by the same lateral movement control mechanism 3, so that light source irradiation and curing (for example, UV curing) can be performed immediately after the roller 7 rolls the soft film.

[0043] According to the soft film rolling machine of the present invention, after the two ends of the soft film are clamped by the first clamping mechanism and the second clamping mechanism respectively, the tensioning control mechanism first applies oblique upward pre-tensioning to one end of the soft film clamped by the second clamping mechanism, and after the soft film is tensioned, the rolling wheel adjusted to the specified point position is controlled to perform a rolling operation on the soft film, and while rolling, the tensioned end of the soft film is continuously adjusted downward by the lifting control mechanism. Through the cooperation of the tensioning control mechanism and the lifting control mechanism, the soft film can be tightly rolled on the template fixing platform. In addition, while rolling, the soft film being rolled can be adsorbed by the adsorption operation of the adsorption holes. Obviously, according to the soft film rolling machine of the present invention, the formation of a gap between the soft film and the template control platform during the rolling process is avoided, thereby obtaining a better soft film rolling effect.

[0044] In addition, when the imprinting of the product to be imprinted (e.g., wafer) is completed, the end of the soft film clamped by the second clamping mechanism is lifted by the lifting control mechanism, so that the soft film can be peeled off from one end of the soft film, and then the product to be imprinted (e.g., wafer) can be replaced.

[0045] In the nanoimprinter according to the present invention, since the light source and the control device are connected to the rolling device and controlled by the same traverse control mechanism, UV curing can be performed immediately after the soft film is rolled.

[0046] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A soft film roller press for nanoimprinting, characterized in that: The soft film roller press comprises: A template fixing platform, wherein a product placing mechanism is provided on the template fixing platform, and the product placing mechanism is used to place the product to be printed; A first soft film tensioning device is located at one end of the template fixing platform and includes a first clamping mechanism for clamping one end of the soft film; A second soft film tensioning device is located at the other end of the template fixing platform opposite to the first soft film tensioning device, the second soft film tensioning device comprises a second clamping mechanism, a tensioning control mechanism and a lifting control mechanism, the second clamping mechanism is used to clamp the other end of the soft film, the tensioning control mechanism is connected to the second clamping mechanism, and applies an oblique upward force to the second clamping mechanism through tensioning control, thereby controlling the oblique upward movement of the second clamping mechanism to tension the soft film clamped by the second clamping mechanism, and the lifting control mechanism is located below the tensioning control mechanism and is used to control the lifting and lowering of the second clamping mechanism and the tensioning control mechanism; A rolling device is located above the template fixing platform, and includes a rolling wheel for rolling the tensioned soft film onto the template fixing platform, and the rolling device also includes a rolling wheel pre-pressing mechanism; wherein, The tension control mechanism comprises a bracket, a guide rod and a tensioning force applying member, the bracket has an inclined surface portion arranged obliquely relative to the plane of the template fixing platform, one end of the tensioning force applying member is connected to the inclined surface portion, and the other end is connected to the second clamping mechanism, the guide rod is arranged between the inclined surface portion and the second clamping mechanism and is perpendicular to the inclined surface portion, so as to control the movement guide of the second clamping mechanism; and The tension control mechanism is arranged on a bottom plate, and the lifting control mechanism is located below the bottom plate and connected to the bottom plate.

2. The soft film rolling machine according to claim 1, characterized in that: The tensioning force applying member is a cylinder, and the cylinder passes through the inclined surface portion and is connected to the second clamping mechanism.

3. The soft film roller press according to claim 1 or 2, characterized in that: The product placement mechanism is provided with an adsorption groove, and an air adsorption device is provided on the other side of the template fixing platform opposite to the product placement mechanism, so that the product to be printed can be adsorbed on the template fixing platform through the adsorption groove.

4. The soft film rolling machine according to claim 3, characterized in that: Adsorption holes arranged in an array are provided around the product placement mechanism, so that the soft film can be adsorbed on the template fixing platform through the adsorption holes.

5. The soft film roller press according to claim 1 or 2, characterized in that: The roller pressing wheel pre-pressing mechanism is connected to the roller pressing wheel and controls the vertical movement of the roller pressing wheel up and down. The roller pressing wheel pre-pressing mechanism is elastically connected to the roller pressing wheel through an elastic member.

6. The soft film roller press according to claim 1 or 2, characterized in that: The soft film rolling machine further includes a soft film translation mechanism, which controls the horizontal movement of the first soft film tensioning device and the second soft film tensioning device through a guide rail, thereby driving the horizontal movement of the soft film.

7. A nanoimprinter, characterized in that: The invention comprises a light source and a control device and a soft film rolling machine as claimed in any one of claims 1 to 6.

8. The nanoimprinter according to claim 7, characterized in that: The light source and control device are connected to the roller pre-pressing mechanism of the soft film roller press, and the lateral movement of the two is simultaneously controlled by the same lateral movement control mechanism, so that light source irradiation and curing are performed immediately after the roller presses the soft film.

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