Solid source precursor container

Abstract

The present disclosure relates generally to a solid source precursor delivery system. More specifically, the present disclosure relates to a solid source precursor container that can be used to vaporize a supply of solid precursor stored within the container. The disclosed source container utilizes a plurality of individual cavities or pockets within the interior of the container. Each individual pocket can be loaded with precursor. In one arrangement, the pockets can be loaded with preformed blocks of compressed precursor material that have a density that is generally higher than that previously achieved when filling solid precursor within a source container. The increased density of the solid precursor material increases the capacity of the source container, resulting in longer intervals between replacement and / or refilling of the source container.

Description

Technical Field

[0001] This disclosure generally relates to gas-phase reactors and systems. More specifically, this disclosure relates to an apparatus for conveying reactant gases from a solid source precursor. Background Technology

[0002] Vapor phase reactor systems, such as chemical vapor deposition (CVD), plasma-enhanced CVD (PECVD), and atomic layer deposition (ALD), can be used in a variety of applications, including depositing and etching materials on substrate surfaces (such as semiconductor wafers). For example, vapor phase reactor systems can be used to deposit and / or etch layers on substrates to form semiconductor devices, flat panel display devices, photovoltaic devices, microelectromechanical systems (MEMS), and so on.

[0003] In a gas-phase reactor system, reactant gases (also referred to herein as “precursor gases”) of different reactants are fed into one or more substrates within a reaction chamber. The reaction chamber typically comprises one or more substrates supported on one or more substrate supports (e.g., a pedestal), wherein the substrates and substrate supports are maintained at a desired processing temperature. The reactant gases may react with each other or with the surface of the substrates to form a thin film on the substrates, wherein the growth rate is particularly controlled by the temperature or quantity of the reactant gases.

[0004] In some applications, reactant gases are stored in gaseous form in reactant source containers. In such applications, reactant vapors are typically gaseous at ambient (i.e., normal) pressure and temperature. Examples of such gases include nitrogen, oxygen, hydrogen, and ammonia. However, in some cases, vapors of source chemicals (“precursors”) that are liquid or solid at ambient pressure and temperature are used. These source chemicals may need to be heated to produce a sufficient amount of vapor for the reaction process. For some solid substances (referred to herein as “solid source precursors”), the vapor pressure at room temperature is so low that they must be heated to produce a sufficient amount of reactant vapor and / or maintained at very low pressures.

[0005] A typical solid-source precursor delivery system includes a solid-source precursor container and a heating system (e.g., a radiant heat lamp, resistance heater, etc.). The container contains the solid precursor (e.g., in powder form). The heating system heats the container to increase the vapor pressure of the precursor gas within it. In other words, the heating system heats the solid precursor to vaporize (e.g., sublimate) it. Therefore, the container is sometimes referred to as a sublimator. The container has an inlet and an outlet for allowing an inert carrier gas (e.g., nitrogen) to flow through it, transporting the vaporized precursor to the substrate reaction chamber. Typically, the path through the container is indirect to increase the distance the carrier gas travels through the container, thereby increasing the saturation of the carrier gas with the vaporized precursor. The carrier gas sweeps the precursor vapor along with the precursor vapor across the container outlet, ultimately reaching the substrate reaction chamber. The container typically includes an isolation valve for fluidly isolating the contents of the container from the outside.

[0006] Any discussion set forth in this section, including discussions of problems and solutions, is included in this disclosure solely for the purpose of providing context for this disclosure and should not be construed as an admission that any or all of the discussions were known in the course of making this invention, or otherwise constitutes prior art. Summary of the Invention

[0007] This summary is provided to present the chosen concepts in a simplified form. These concepts are further described in detail below in a detailed description of exemplary embodiments of this disclosure. This summary is not intended to require identification of key or essential features of the claimed subject matter, nor is it intended to limit the scope of the claimed subject matter.

[0008] This disclosure generally relates to a solid source precursor delivery system. More specifically, this disclosure relates to a solid source precursor container for vaporizing a supply of solid precursors stored within the container. The disclosed source container replaces the supply for storing the precursors and directing carrier gas through a single serpentine channel within the container with multiple individual cavities or recesses inside the container. Each individual recess may be loaded with a precursor. In one arrangement, the recess may be loaded with a preformed block of compressed precursor, typically with a higher density than that achievable when filling the serpentine channel with powdered precursors. The increased density of the solid precursor material increases the capacity of the source container, resulting in longer intervals between replacing and / or refilling the source container.

[0009] In one arrangement, a reactant source container is provided, comprising a container body and a lid. The lid is configured to attach to the container body to enclose an internal region of the container body defined by one or more sidewalls and a bottom surface. A plurality of individual recesses are formed within the internal region of the container body, each recess configured to receive a volume of solid source precursor. In one arrangement, the recesses may have uniform dimensions (e.g., having a common dimension). The individual recesses can have any configuration. For example, the recesses may be cylindrical, rectangular prism-shaped, etc. Typically, each recess has a closed lower end or bottom end, one or more sidewalls, and an open upper end. In such an arrangement, the recesses can receive a preform of compressed solid precursor (e.g., through the open upper end). This arrangement facilitates loading the source container. The plurality of individual recesses within the interior of the source container are each exposed to a fluid flow path that traverses the interior of the container between a fluid path inlet end and a fluid path outlet end. This fluid path passes through each individual recess within the source container to allow delivery of vaporized precursor from the source container. To allow the fluid path to pass through the open end of each recess, the path can be indirect (e.g., serpentine) between the fluid path inlet and the fluid path outlet.

[0010] In one arrangement, the container body has a two-piece construction. In this arrangement, the container body may have a base that accommodates an insert in which multiple recesses are formed. In a further arrangement, the insert may be formed as multiple layers, which are stacked to form multiple recesses. Such an arrangement may be advantageous when using hard and / or brittle materials.

[0011] In another arrangement, multiple recesses can be formed by multiple intersecting partition walls that collectively define a matrix of recesses within the container body. In one arrangement, the partition walls can be uniformly spaced to enhance heat transfer throughout the container body. In this arrangement, the container body can have a high degree of symmetry.

[0012] These and other embodiments will become apparent to those skilled in the art from the following detailed description of certain embodiments with reference to the accompanying drawings; this disclosure is not limited to any particular embodiment disclosed. Attached Figure Description

[0013] A more complete understanding of exemplary embodiments of the present disclosure can be obtained by referring to the detailed description and claims when considered in conjunction with the following illustrative drawings.

[0014] Figure 1 An embodiment of a gas phase reactor system is shown.

[0015] Figure 2 An embodiment of a solid precursor source container is shown.

[0016] Figure 3A and3B The container body of a prior art solid precursor source container is shown.

[0017] Figure 4 An embodiment of a two-piece container body for a solid precursor source container is shown.

[0018] Figure 5A It shows the relationship with Figure 4 An insert used together with a two-piece container body.

[0019] Figure 5B and 5C It shows Figure 5A The first and second cross-sectional views.

[0020] Figure 6 A multi-piece insert is shown.

[0021] Figure 7 An embodiment of a one-piece container body for a solid source precursor container is shown.

[0022] It will be understood that the elements in the accompanying drawings are shown for simplicity and clarity and are not necessarily drawn to scale. For example, the dimensions of some elements in the figures may be enlarged relative to other elements to aid in understanding the embodiments illustrated in this disclosure. Detailed Implementation

[0023] The following description of exemplary embodiments is merely illustrative and for purposes of explanation only; it is not intended to limit the scope of this disclosure or the claims. Furthermore, the enumeration of multiple embodiments having the described features is not intended to exclude other embodiments having additional features or other embodiments combining different features.

[0024] This disclosure generally relates to improved solid source precursor containers, apparatus, and methods. The disclosed embodiments allow for easy access to reactant vapors while providing improved maintainability (e.g., recharging) of the solid source precursor containers.

[0025] Figure 1An exemplary gas-phase reactor system 100 is schematically shown, comprising a reactor 102 including a reaction chamber 104; a base 106 that holds a substrate 116 during processing; a gas distribution system 108 that distributes one or more reactants to the surface of the substrate 116; a solid reactant source 110; a second reactant source 112; and a carrier / purge gas source 114. The reactant source and the carrier / purge gas source are fluidly connected to the reaction chamber 104 via fluid conduits and various valves or controllers. The system also includes a vacuum source 118. The solid reactant source is configured to supply gas-phase reactants generated from a solid precursor source container 20 to the gas-phase reactor 102. The solid source container 20 contains a precursor or source chemical substance (not shown) that is solid under standard conditions (i.e., room temperature and atmospheric pressure). The solid precursor is vaporized within the source container 20, which may be maintained at or above the vaporization temperature of the precursor. The resulting vaporized reactant is then supplied to the reaction chamber 104. Source container 20 may be located within reactant source cabinet 12, and may be individually evacuated and / or thermally controlled. Exemplary system 100 may be used for, but is not limited to, deposition, such as chemical vapor deposition (CVD), plasma-enhanced CVD (PECVD), or atomic layer deposition (ALD).

[0026] like Figure 1 As shown, precursor source container 20 is fluidly connected to reactor 102 via conduit 22. Selective opening of valve 24 in conduit 22 allows the supply of gaseous reactants (e.g., vaporized solid precursors) from precursor source container 20 to reactor 102. Inert or non-reactive gases are preferably used as carrier gases for the vaporized precursors. Carrier gases (e.g., nitrogen or argon) can be supplied to precursor source container 20 via carrier gas supply conduit 26. In this respect, precursor source container 20 includes at least one inlet valve 44 for connection to carrier gas supply conduit 26 and at least one outlet valve 42 for connection to reactor 102 via conduit 22. Carrier gas supply conduit 26 includes at least one valve 28 for fluidly isolating the interior of source container 20 from a carrier gas source (not shown).

[0027] The precursor source container 20 may be positioned within the reactant source cabinet 12. The internal space 18 of the cabinet 12 may be maintained under reduced pressure to, for example, promote radiative heating of the components within the cabinet 12 (e.g., the source container) and thermally insulate these components from each other to promote a uniform temperature field. In other variations, the cabinet is not vented and includes convection enhancement devices (e.g., fans, crossflow, etc.). The cabinet 12 shown includes one or more heating devices 8, such as radiant heaters. Additionally, reflectors (not shown) may be provided, which may be configured to surround the components within the cabinet 12 to reflect the radiant heat generated by the heating devices 8 back to the components located within the cabinet 12. The reflectors may be disposed on the inner wall, ceiling, and / or floor of the cabinet 12. Attached heaters (not shown) are provided to heat the conduit 22 and any valves between the cabinet 12 and the reactor 102 to prevent condensation of the precursor gas.

[0028] Figure 2 An embodiment of a solid precursor source container 20 is shown. As shown, the precursor source container 20 includes a container body 30 and a cap 40. The cap 40 is shown removed from the container body 30. However, it will be understood that during assembly, the cap 40 is fastened to the container body 30. The illustrated container 20 is fastened together by fastening elements (not shown) such as screws or a combination of nuts and bolts. The fastening elements are adapted to extend into or through aligned mating holes (e.g., bolt holes) that surround the periphery of the cap and the periphery of the flange of the container body 30. Those skilled in the art will understand that this assembly can be fastened together by a variety of alternative methods. As described herein, the container body 30 is configured to contain a supply of solid precursors. The cap 40 is configured to guide a gas flow (e.g., a carrier gas) through an internal flow path of the container body to remove vaporized precursors (e.g., reactant gases). When the solid source precursor is depleted and needs replacement, it is customary to replace the entire source container 20 with a new source container fully loaded with the source chemical substance.

[0029] In the illustrated embodiment, the container cap 40 includes an inlet valve 44 and an outlet valve 42. The inlet valve 44 has an inlet that is connected via a carrier gas conduit 26 (see...). Figure 1 The source container 20 receives carrier gas. Inlet valve 44 has an outlet in fluid communication with the inlet end of a flow path through the interior of the container body. That is, when the source container is assembled, the outlet of inlet valve 44 is connected via a cover to a fluid passage that communicates with the interior of the container body. Outlet valve 42 has an inlet in fluid communication with the outlet end of a flow path through the interior of the container body (e.g., via a fluid passage through the cover). The outlet valve has an outlet in fluid communication with a fluid conduit 22 extending between the source container 20 and the reactor. Various valves, manifolds, and conduits may be disposed between the fluid conduit and the outlet valve. In use, carrier gas flows into the source container through inlet valve 44, flows through the interior of the container body 30, and exits through outlet valve 42 where it resides in the source container. In the illustrated embodiment, cover 40 also includes an exhaust valve or purge valve 46 disposed between inlet valve 44 and outlet valve 42. Purge valve 46 has an inlet in fluid communication with the middle portion of a flow path through the interior of the container body (e.g., via a fluid passage through the cover). The purge valve also has an exhaust outlet. In use, the purge valve can be opened to discharge gas from the internal flow path of the container, having an inlet for connection to a purge gas source (not shown) and an outlet in fluid communication with the middle portion of the internal flow path through the container body. In operation, the purge valve can be used to purge gas (e.g., carrier gas and / or reactant gas) from the interior of the source container 20.

[0030] Each valve 42, 44, and 46 (if used) preferably includes valve port blocks 43, 45, and 47, respectively, which include gas flow channels that can be restricted or opened by the valve. For example, port block 45 of inlet valve 44 preferably includes an internal gas flow channel extending from one side of the port block to a flow restrictor region, which includes internal devices (not shown) for restricting gas flow, such as a valve seat and a movable flow restrictor or diaphragm. In one embodiment, the movable internal flow restrictor or diaphragm can be moved manually or automatically by turning a knob (e.g., the larger cylindrical upper part of valve 44). Another internal gas flow channel preferably extends from the flow restrictor region through the opposite side of port block 45 to an inlet channel extending through cap 40 into source container 20.

[0031] Figure 3A and 3B An embodiment of a flow path through the interior of a container body 30 is illustrated. As shown, the container body includes a flow path 38, which is a continuous serpentine path extending between an inlet end 32 and an outlet end 34. When the source container is assembled, the inlet end 32 is positioned below the inlet valve of the cap, and the outlet end 34 is positioned below the outlet valve of the cap. Thus, when the source container is assembled, the inlet end 32 and the outlet end 34 of the flow path 38 are in fluid communication with the inlet valve and outlet valve of the cap, respectively. In the illustrated embodiment, the middle portion of the flow path 38 includes a purge port manifold 36 in fluid communication with a purge valve when the source container is assembled. As shown, the flow path 38 extends between the front and rear walls of the container body in a series of parallel channels that connect at alternating adjacent ends. The flow path defines the tortuous or serpentine path that the carrier gas must travel as it flows through the container body 30. In use, the flow path 38 contains a solid precursor source, such as a powder. For example, a solid source precursor / chemical substance may be filled into the lower part of the channel. When the heating source container is in operation, at least a portion of the solid precursor in the channel may vaporize. The carrier gas is directed through a long, serpentine flow path 38 between the inlet end 32 and the outlet end 34, simultaneously exposing the carrier gas to the vaporized precursor, thus allowing the carrier gas to carry the reactant vapor. That is, because the carrier gas is required to flow along a longer path while simultaneously being exposed to the precursor source, its exposure time to the precursor source is longer, and therefore it is more likely to be saturated by the vaporized precursor.

[0032] Although Figure 3A and 3BThe carrier body shown is effective for generating gaseous reactants from solid precursors, but this carrier body embodiment has several disadvantages. Specifically, the use of narrow, deep channels to form a serpentine flow path makes it difficult to remove and replace the solid source precursor (e.g., compacted powder). Furthermore, the narrow, deep channels limit the amount of solid precursor that can be retained in the container body of the source container. That is, a large portion of the container body's internal volume is used to form the partition walls defining the serpentine flow path. Aspects of this disclosure are based in part on the understanding that increasing the surface area of ​​the solid precursor allows for efficient saturation of the carrier gas over a shorter flow path while allowing the container body to accommodate an increased amount of solid precursor.

[0033] Figure 4 An embodiment of a two-piece container body 130 according to various aspects of this disclosure is shown. Although shown as a two-piece container body, it should be understood that this embodiment is provided as an example and not as a limitation. Along these lines, it will be understood that the container body can be a single-piece container body similar to that described above. It will be further understood that... Figure 4 The container body 130 can replace Figure 2 The main body of the container is 30. That is, Figure 2 A lid may be used for the container body 130. In the illustrated embodiment, the container body 130 includes a base member 132 and an insertion tray 150. The base member 132 is a generally rectangular element having four sidewalls 134a-134d, a bottom surface 136, and a generally open upper surface. These sidewalls and the bottom surface together define an opening / recess (e.g., an interior region) sized to accommodate the insertion tray 150. In the illustrated embodiment, the base member 132 also includes a shelf 138 located within its interior near the front wall 134a. The shelf 138 includes an inlet manifold 144, an outlet manifold 142, and a purge valve manifold 146. When the insertion tray 150 is positioned within the interior of the base member 132, an opening in the sidewall of the inlet manifold 144 leads to an opening 155a at a first end of a flow path (not shown) extending through the insertion tray 150. Similarly, when the insert tray 150 is disposed within the base member 132, the opening in the outlet manifold 142 leads to a second opening 155c at the second end of the flow path extending through the insert tray. Likewise, the opening in the sidewall of the purge manifold 146 leads to a third opening 155b located in the middle portion of the flow path through the insert tray 150. When the cap 40 is attached to the container body (see, for example, see...) Figure 2 The inlet manifold 144 is located below the inlet valve 44, and the outlet manifold 142 is located below the outlet valve 42.

[0034] In the illustrated embodiment, the outer surface of the insertion tray 150 is correspondingly shaped to the inner surface of the base member defined by the sidewalls and bottom surface. When inserted, the upper edge of the insertion tray is generally flush with the upper edge of the base member 132. The insertion tray 150 includes a plurality of individual recesses 152, each configured to receive a supply of solid source precursor. Each recess is formed in the insertion tray, extending from an open upper end near the upper edge of the insertion tray to a closed bottom end near the bottom surface of the insertion tray. In one embodiment, all recesses 152 have the same dimensions (e.g., length, width, and depth), thereby allowing the recesses to receive the same pre-prepared solid precursor supply (e.g., a compressed block). However, this is not a stringent requirement.

[0035] Figures 5A-5C Perspective views of the insertion tray 150 and along the sides are shown respectively. Figure 5A A cross-sectional view of the insertion tray taken along section line A-A' and along... Figure 5A The cross-sectional view of the insert tray is taken along section line B-B'. In the illustrated embodiment, the insert tray 150 includes four outer side walls 154a-d (hereinafter 154, unless otherwise specified) that define a generally rectangular outer perimeter of the insert tray 150. Each outer side wall extends from a solid bottom surface 156 to an upper edge. The upper edge of the insert tray 150 is configured to engage the bottom surface of the lid when assembling the source container. To provide a plurality of recesses 152, the illustrated insert tray includes a first plurality of partition walls 162a-f (hereinafter 162, unless otherwise specified) extending between the front wall 154a and the rear wall 154c of the insert tray 150. The insert tray also includes a second plurality of partition walls 164a-e (hereinafter 164, unless otherwise specified) extending between the side walls 154b and 154d of the insert tray 150. In the illustrated embodiment, the first and second plurality of partition walls 162 and 164 are uniformly spaced between their respective paired outer side walls and are generally parallel to their respective outer side walls. That is, the first plurality of partition walls 162 can be substantially transverse to the second plurality of partition walls 164. In this configuration, the two sets of partition walls 162, 164 define a matrix of equally sized recesses 152. Although discussed as being formed by the intersection of transverse partition walls, it will be understood that the recesses can be defined in other ways. For example, individual recesses can each be cylindrical holes recessed into the insert tray (i.e., if a two-piece container body is used) or recessed into the container body (i.e., if a one-piece container body is used). However, using transverse partition walls that define a matrix of equally sized recesses results in a more symmetrical container body. This symmetry can provide more uniform thermal performance when the heating source container is heated.

[0036] In the illustrated embodiment, each recess 152 has substantially the same cross-sectional dimensions. That is, each recess 152 may have the same length "L" measured between two opposite sidewalls and the same width "W" measured between another pair of opposite sidewalls. See also Figure 5B Furthermore, each cavity may have the same depth “D” measured from the closed bottom surface 156 and the open top surface 158 of the cavity. As shown, using cavities of common size allows the cavities to be filled with a pre-formed amount of solid precursor. That is, instead of filling the bottom of a deep, narrow channel (e.g., a serpentine flow path) with powder and compacting the powder at the bottom of the channel, pre-formed compressed blocks 172 of precursor material can be inserted into each cavity 152. For example, precursor powder can be compressed into blocks 172 sized to fit within the interior of the cavity 152. The use of compressed blocks 172 provides a higher density precursor within the source container. For example, hafnium tetrachloride (HfCl4) precursor powder can be filled into... Figure 3A and 3B The deep, narrow channels of the flow path 38 shown typically result in a maximum precursor density of approximately 2 g / cm³ (g / cc). Precursor densities of 3 g / cc or higher are often achieved using compressed blocks. (Assuming...) Figure 3A The container body 30 and Figure 4 If the internal volume of the container body 130 is equal to that of the source container, then using a pre-compressed precursor block increases the capacity of the source container by 50%. This increase in source container capacity results in longer intervals between replacing and / or refilling the source container. Similarly, this reduces downtime during the manufacturing process.

[0037] It is worth noting that the top edge or open end 158 of each recess 152 is typically positioned below the upper edge of the insertion tray 150 or container 30. More specifically, space must exist above each recess to allow carrier gas to flow across the top surface of the recess between the inlet and outlet of the container body. (As in...) Figure 5A As best shown, partition walls 162, 164 and outer wall 154 collectively define a flow path 170 through the insertion tray 150. This flow path extends over the top surface (e.g., open end 158) of each recess 152, allowing the carrier gas to transport vaporized precursors from each recess when using the source container. The entire height of the outer walls 154 generally causes them to contact the bottom surface of the source container lid during assembly. Partition walls 162 are arranged differently such that their height is equal to the upper edge of the outer wall or has a lower height (e.g., flush with the upper edge of the recess 152) to guide fluid flow through the container. In the illustrated embodiment, each recess 152 is defined by four sidewalls. The entire height of two of the sidewalls causes them to contact the lid with the source container during assembly, while the other two sidewalls have a lower height to define a flow path through the upper surface of the recess 152. Figure 5AA non-limiting embodiment of a flow path 170 is shown, which extends on the top surface of each recess 152 between the inlet and the outlet.

[0038] like Figures 5A-5C As shown, the insert tray 150 can be a monolithically formed component. For example, the insert tray can be milled or cast from a single piece of material. Other manufacturing techniques are possible.

[0039] Figure 6 An alternative embodiment of the insert tray 150 is shown. In this embodiment, the insert tray is formed by three layers of wall fasteners 160a, 160b, and 160c. These wall fasteners 160a-c can be stacked to produce the insert tray. In one embodiment, each wall fastener may define a matrix of recesses having upper and lower open ends. In such an embodiment, the fasteners may be stacked on a flat plate forming the bottom of the insert tray. In another embodiment, the lowest wall fastener 160c may include a bottom surface. Although shown as having three layers, it should be understood that multi-layer insert trays may have more or fewer layers. Constructing the insert tray from separate layers may be particularly advantageous, with the insert tray made of ceramic materials, such as, but not limited to, aluminum nitride and silicon carbide. It will be further understood that the insert tray and / or container body may be made of a variety of materials, including ceramics and stainless steel.

[0040] Figure 7 Another embodiment of the container body 230 is shown. In this embodiment, the container body has a one-piece construction. That is, the recesses 152 are integrally formed within the container body 30. In this arrangement, the recesses 152 may again have common dimensions to facilitate loading the recesses with a common-sized compression precursor block. As shown, the flow path 170 again passes through the open top surface of each recess while passing between the inlet manifold 144 and the outlet manifold 142. As described above, these manifolds are in fluid communication with the inlet and outlet valves when the source container is assembled.

[0041] While exemplary embodiments of this disclosure are set forth herein, it should be understood that this disclosure is not limited thereto. Various modifications, variations, and enhancements may be made to the systems and methods described herein without departing from the spirit and scope of this disclosure. The subject matter of this disclosure includes all novel and non-obvious combinations and sub-combinations of the various systems, components, and constructions disclosed herein, as well as any and all equivalents thereof.

Claims

1. A reactant source container, comprising: A container body having an outer wall and a bottom surface that define the internal region of the container body; Multiple recesses are provided in the internal region of the container body, each of the multiple recesses being configured to accommodate a certain volume of solid source precursor; A lid configured to engage with a container body, which, when attached to the container body, closes off an internal area of ​​the container body. Fluid flow paths within the internal region of the container body, the fluid flow paths being formed above a plurality of recesses and below the bottom surface of the lid, the fluid flow paths extending between the inlet and outlet ends along a path passing through at least a portion of each of the plurality of recesses; as well as An insert is configured to be disposed within an internal region of the container body, wherein the plurality of recesses are formed within the insert. Each of the plurality of recesses includes: Closed bottom; The open upper part; and At least one sidewall surface extending between a closed bottom end and an open top end, wherein the closed bottom end, the open top end, and at least one sidewall surface define the internal volume of the cavity. Two of the sidewalls are of full height, allowing the cap to contact the source container during assembly, while the other two sidewalls have a lower height to define the flow path through the upper surface of the recess. The flow path is a serpentine path, and as the carrier gas passes between the inlet and outlet ends of the flow path, the carrier gas is guided on the top surface of each of the plurality of recesses.

2. The reactant source container according to claim 1, further comprising: An inlet valve and an outlet valve are attached to the top surface of the cover, wherein each valve is connected to a fluid passage through the cover.

3. The reactant source vessel of claim 2, wherein, When the cover is connected to the container body, the inlet valve is in fluid communication with the inlet end of the fluid flow path, and the outlet valve is in fluid communication with the outlet end of the fluid flow path.

4. The reactant source container according to claim 1, wherein, Each of the plurality of recesses has a common size.

5. The reactant source container according to claim 1, wherein, Each of the plurality of recesses comprises a rectangular prism.

6. The reactant source container according to claim 1, wherein, The insert includes at least a first layer and a second layer, wherein the first layer and the second layer are stacked within the internal region of the container body to collectively define the plurality of recesses.

7. The reactant source container according to claim 6, wherein, The first and second layers of the insert are formed of ceramic material.

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