A ceramic flat membrane pressure core part

Abstract

A ceramic flat membrane pressure core part, the core part is in the shape of a round pancake, and a printing positioning hole is set on one side; the back of the core part is sequentially provided with a first electrode printing hole, a second electrode printing hole and a third electrode printing hole, and the first electrode printing hole, the second electrode printing hole and the third electrode printing hole are all stepped arcs; the front of the core part is provided with a first filling hole, a second filling hole and a third filling hole, and the first filling hole, the second filling hole and the third filling hole are all funnel-shaped; the printing positioning hole, the second electrode printing hole and the center of the core part are on the same straight line. The present invention solves the problem of uneven printing slurry, saves costs, and is not easy to break the needle during pressing, which provides convenience for continuous production of products, can improve the qualified rate of finished products of pressure core parts, and reduce operating costs. The front and back error-proofing design makes it easier for people to distinguish the front and back of the product, and the humanized design is more perfect.

Description

Technical Field

[0001] The invention belongs to the technical field of pressure sensors, and in particular relates to a ceramic flat film pressure core part. Background Art

[0002] Pressure sensors are the most commonly used sensors in industrial practice. They are widely used in various industrial automatic control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production automatic control, aerospace, military industry, petrochemicals, oil wells, electricity, ships, machine tools, pipelines and many other industries. Pressure sensors are the most widely used sensors. Traditional pressure sensors are mainly mechanical structure devices, which indicate pressure by the deformation of elastic elements. However, this structure is large in size and heavy in weight, and cannot provide electrical output. With the development of semiconductor technology, semiconductor pressure sensors have also emerged. They are characterized by small size, light weight, high accuracy and good temperature characteristics. Especially with the development of MEMS technology, semiconductor sensors are developing towards miniaturization, and they have low power consumption and high reliability.

[0003] As a high-performance pressure-sensitive component of pressure sensors, pressure core parts are the foundation and core of all pressure sensors. They are components that convert physical signals into receivable and identifiable electrical signals or identifiable physical signals. They adopt an integrated structure, have high static pressure resistance, are stable and reliable, and are gradually being widely used. With the rise of various pressure sensors, all-in-one sensors are gradually occupying the market with their composite functions, and the demand for temperature and pressure core parts, the core components of temperature and pressure sensors, is also increasing.

[0004] At present, the printing of pressure core parts is prone to uneven slurry printing during printing, which affects product performance. The printing holes are generally circular, and vacancies may appear on the glass after printing, resulting in a non-functional product. The filling holes are generally cylindrical, and silver paste is not easy to fill. The mold is prone to breakage when pressing thick sheets, resulting in frequent shutdowns to replace ejectors, low production efficiency, and high costs.

[0005] Therefore, being able to provide a ceramic flat diaphragm pressure core component with low cost, high qualification rate and stable product performance is an urgent problem to be solved by technical personnel in this field. Summary of the invention

[0006] In view of this, the present invention provides a ceramic flat membrane pressure core part, which solves the problem of uneven printing slurry; the funnel design prevents silver paste overflow from contaminating the surface, saving costs, and at the same time, it is not easy for the needle to break during pressing, which provides convenience for continuous production of products, can improve the qualified rate of finished pressure core parts, and reduce operating costs. The front and back anti-error design makes it easier for people to distinguish the front and back of the product, and the humanized design is more perfect.

[0007] In order to achieve the above object, the present invention adopts the following technical solution:

[0008] A ceramic flat film pressure core part, the core part is in a round cake shape and has a printed positioning hole on one side;

[0009] The back side of the core part is provided with a first electrode printing hole, a second electrode printing hole and a third electrode printing hole in sequence, and the first electrode printing hole, the second electrode printing hole and the third electrode printing hole are all in stepped arc shape;

[0010] The front side of the core part is provided with a first filling hole, a second filling hole and a third filling hole at corresponding positions of the first electrode printing hole, the second electrode printing hole and the third electrode printing hole, respectively, and the first filling hole, the second filling hole and the third filling hole are all funnel-shaped;

[0011] The printing positioning hole, the second electrode printing hole and the center of the core part are on the same straight line.

[0012] The present invention is designed as a circular structure, and the center of the printed positioning hole, the center of the middle gold paste printing hole and the center of the thick sheet are designed to be on the same straight line. The product is evenly stressed during printing and the slurry is more evenly distributed. The printing hole is changed to a stepped arc shape, which makes it easier for the gold paste to stick to the hole position, and there is no risk of the hole position not being filled with gold paste, resulting in product short circuit failure. The silver paste filling hole position is changed to a funnel shape, which makes it easier to fill the silver paste, and the overflowing silver paste after the pin is inserted will not overflow onto the surface of the core part, affecting the appearance of the core part or taking time to clean up later. At the same time, the chip mold is not easy to break when pressing.

[0013] Preferably, the filling hole and the printing hole are connected, and the height ratio of the filling hole to the printing hole is 2:0.15.

[0014] Preferably, an error-proofing mark is provided on the front side of the core part.

[0015] The present invention adds anti-mistake marks on the front and back sides, so people do not need to observe the front and back face positions to judge the front and back sides, thereby reducing eye fatigue.

[0016] Preferably, the distance from the cut straight line to the center of the circle on the reverse circular surface of the stepped arc part is 0.725 mm.

[0017] The step arc adopted in the present invention can meet the requirements with a smaller amount of silver paste, and the PIN needle is then connected to the gold paste through the silver paste, without the risk of poor contact or the maximum amount of reduced risk.

[0018] Preferably, the height ratio of the funnel-shaped bucket and the cylindrical part is 1.9:0.1.

[0019] The present invention changes the hole filling position of the silver paste into a funnel shape, so that the silver paste is easier to fill, and the silver paste overflowing after the pin is inserted will not overflow onto the surface of the thick sheet, affecting the appearance of the thick sheet or taking time to clean up later. At the same time, the needle is not easy to break when the thick sheet mold is pressed, and continuous production can be achieved, saving 3% of production costs.

[0020] Preferably, the raw materials of the core parts are: by mass, Al2O3: 96.5±0.5%, Na2O<0.1%, Fe2O3<0.1%, and the rest are impurities such as organic binders and dispersants.

[0021] The sintering temperature of the raw materials of the present invention can be reduced to 1520° C., thus saving production energy.

[0022] Preferably, the moisture loss on ignition of the raw materials is less than 0.5%, and the total moisture loss on ignition is less than 3%.

[0023] Preferably, the filler of the printing hole is gold paste.

[0024] The gold paste used in the present invention has the advantages of thin fired film, uniform composition, stable performance, high resolution, saving precious metals, simple process and good printing quality, low investment and low production cost. The fired film thickness is only a few microns and has good adhesion.

[0025] Preferably, the filler of the filling hole is silver paste.

[0026] The silver paste used in the present invention has good fluidity and good conductivity; because the corresponding product needs to connect the gold paste and the PIN through the hole filling paste, the paste must be a paste with good fluidity and relatively low cost.

[0027] Preferably, the core parts are ground to meet grinding requirements (flatness, roughness).

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] The present invention solves the problem of uneven printing slurry; the funnel design prevents silver paste overflow from contaminating the surface, saving costs; at the same time, the needle is not easily broken during pressing, providing convenience for continuous production of products, improving the qualified rate of finished products of pressure core parts, and reducing operating costs; the front and back side error-proofing design makes it easier for people to distinguish the front and back sides of the product, and the humanized design is more perfect. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0031] Figure 1 It is a front view of a ceramic flat membrane pressure core part of the present invention;

[0032] Figure 2 A top view of a ceramic flat membrane pressure core component of the present invention;

[0033] Figure 3 A bottom view of a ceramic flat membrane pressure core component of the present invention;

[0034] 1, printed positioning hole; 2-1, first electrode printing hole; 2-2, second electrode printing hole; 2-3, third electrode printing hole; 3, error prevention mark; 4-1, first filling hole; 4-2, second filling hole; 4-3, third filling hole. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] like Figure 1-3 As shown, the present invention provides a ceramic flat membrane pressure core part, the core part is in a round cake shape, and a printed positioning hole 1 is provided on one side;

[0037] The back side of the core part is provided with a first electrode printing hole 2-1, a second electrode printing hole 2-2 and a third electrode printing hole 2-3 in sequence. The first electrode printing hole 2-1, the second electrode printing hole 2-2 and the third electrode printing hole 2-3 are all in stepped arc shape, so that the gold paste is easier to stick to the hole position, and there is no risk of the hole position not being filled with gold paste, resulting in product short circuit failure;

[0038] The front side of the core part is provided with a first filling hole 4-1, a second filling hole 4-2 and a third filling hole 4-3 at the corresponding positions of the first electrode printing hole 2-1, the second electrode printing hole 2-2 and the third electrode printing hole 2-3, respectively. The first filling hole 4-1, the second filling hole 4-2 and the third filling hole 4-3 are all funnel-shaped, which makes it easier to fill the silver paste. The overflowing silver paste after the pin is inserted will not overflow onto the surface of the thick sheet, affecting the appearance of the core part or taking time to clean it later. It is not easy to break the needle when the core part mold is pressed;

[0039] Among them, the printing positioning hole 1, the second electrode printing hole 2-2 and the center of the core part are on the same straight line, the product is evenly stressed during printing, and the slurry is more evenly distributed;

[0040] Furthermore, an anti-mistake mark 3 is provided on the front of the core part, which can be an anti-mistake hole. There is no need to observe the front and back surface positions to judge the front and back sides, which reduces eye fatigue.

[0041] Example 1

[0042] A ceramic flat film pressure core part, the core part is in the shape of a round pancake with a diameter of 18 mm, and a printed positioning hole 1 is arranged on one side, and a first electrode printed hole (source electrode) 2-1, a second electrode printed hole (shielding electrode) 2-2 and a third electrode printed hole (measuring electrode) 2-3 are arranged in sequence on the reverse side of the core part, the first electrode printed hole 2-1, the second electrode printed hole 2-2 and the third electrode printed hole 2-3 are all in the shape of a stepped arc, the distance from the straight line cut out of the circular surface of the reverse side of the stepped arc part to the center of the circle is 0.725 mm, the diameter of the printed hole is 1.75 mm, and the height is 0.15 mm;

[0043] The front side of the core part is provided with a first filling hole 4-1, a second filling hole 4-2 and a third filling hole 4-3 at the corresponding positions of the first electrode printing hole 2-1, the second electrode printing hole 2-2 and the third electrode printing hole 2-3, respectively. The first filling hole 4-1, the second filling hole 4-2 and the third filling hole 4-3 are all funnel-shaped, and the diameter of the filling hole is 2.2mm. The height of the funnel is 2.0mm, wherein the height of the funnel and the cylindrical part are 1.9mm and 0.1mm respectively; the filling hole and the printing hole are connected, and the contact surface is a circle with a diameter of 0.85mm;

[0044] Among them, the printing positioning hole 1, the second electrode printing hole 2-2 and the center of the core part are on the same straight line, the product is evenly stressed during printing, and the slurry is more evenly distributed; the front of the core part is provided with an anti-error hole 3;

[0045] A method for preparing a ceramic flat membrane pressure core part, specifically comprising the following steps:

[0046] (1) Select Al2O3: 96.5±0.5%, Na2O<0.1%, Fe2O3<0.1%, and the rest are impurities such as organic binders and dispersants. Select a 16-ton automatic servo tablet press (YST-16, Changzhou Jiuyajiu Machinery Manufacturing Co., Ltd.), which provides automatic powder filling, uniform force and repeated uninterrupted continuous production. The sintering process is shown in Table 1.

[0047] Table 1 Sintering curve

[0048]

[0049] The flatness of the thick slice of the flat film pressure core part after sintering by the present invention is less than 0.003um, and the flatness requirement can be achieved without subsequent grinding by a grinding machine; the density after sintering is 3.7-3.85g / cm3 The maximum sintering temperature is 1520℃, which is lower than the sintering temperature of the existing technology, saving costs, and the qualified rate of sintered products reaches 95%. Compared with the products that need to be ground before, the qualified rate is increased by 15%, and the total cost is reduced by about 10%; the funnel-shaped design of the filling hole is more conducive to slurry filling, and the arc-shaped design around the printing hole is more conducive to slurry printing; the product is more wear-resistant and has a longer service life.

[0050] The various embodiments are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to in detail.

[0051] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A ceramic flat membrane pressure core component, characterized in that: The core part is in the shape of a round pancake, and a printed positioning hole is provided on one side; The back side of the core part is provided with a first electrode printing hole, a second electrode printing hole and a third electrode printing hole in sequence, and the first electrode printing hole, the second electrode printing hole and the third electrode printing hole are all in stepped arc shape; The front side of the core part is provided with a first filling hole, a second filling hole and a third filling hole at corresponding positions of the first electrode printing hole, the second electrode printing hole and the third electrode printing hole, respectively, and the first filling hole, the second filling hole and the third filling hole are all funnel-shaped; The printing positioning hole, the second electrode printing hole and the center of the core part are on the same straight line; The front side of the core part is provided with an error-proofing mark; The distance from the straight line cut out from the circular surface on the reverse side of the stepped arc part to the center of the circle is 0.725 mm.

2. A ceramic flat membrane pressure core component according to claim 1, characterized in that: The height ratio of the funnel-shaped bucket and the cylindrical part is 1.9:0.

1.

3. A ceramic flat membrane pressure core component according to claim 1, characterized in that: The raw materials of the core parts are: by mass, Al2O3: 96.5±0.5%, Na2O<0.1%, Fe2O3<0.1%, and the rest are impurities.

4. A ceramic flat membrane pressure core component according to claim 3, characterized in that: The moisture loss on ignition of the raw materials is <0.5%, and the total loss on ignition is <3%.

5. The ceramic flat membrane pressure core component according to claim 1, characterized in that: The filler of the printing hole is gold paste.

6. A ceramic flat membrane pressure core component according to claim 1, characterized in that: The filler of the filling hole is silver paste.

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