Superheated water vapor generating device

Abstract

The present application provides a kind of superheated water vapor generating device, make the generation of superheated water vapor large capacity, superheated water vapor generating device (100) is heated to the water vapor from the guide inlet (P1) is guided and is exported from guide outlet (P2) superheated water vapor, the superheated water vapor generating device (100) has: multiple or multiple group superheated water vapor generating part (2), water vapor is heated to generate superheated water vapor;Distribution pipe (3), the water vapor from guide inlet (P1) is distributed and imported multiple or multiple group superheated water vapor generating part (2);And convergence pipe (4), the superheated water vapor generated by multiple or multiple group superheated water vapor generating part (2) is converged and is exported from guide outlet (P2).

Description

TECHNICAL FIELD

[0001] The present application relates to a superheated water vapor generating apparatus. BACKGROUND

[0002] In recent years, a superheated water vapor treatment apparatus that uses superheated water vapor to clean, dry, or sterilize an object to be treated has been considered (for example, Patent Literature 1).

[0003] This superheated water vapor generating apparatus is provided with a saturated water vapor generating section that generates saturated water vapor by heating water, and a superheated water vapor generating section that generates superheated water vapor by heating the saturated water vapor. Also, there are superheated water vapor generating apparatuses that do not have a saturated water vapor generating section and supply saturated water vapor generated externally and generate superheated water vapor.

[0004] In order to increase the capacity of the superheated water vapor generated in these superheated water vapor generating apparatuses, it is possible to consider upsizing the superheated water vapor generating section. For example, in the case where the superheated water vapor generating section is inductively heating or electrically heating a conductor tube, it is possible to consider increasing the diameter of the conductor tube or the like.

[0005] However, if the diameter of the conductor tube is increased, the bending processing of the conductor tube becomes difficult, resulting in a loss of freedom in design. Also, if one superheated water vapor generating section is upsized, the test equipment used in the product inspection of the superheated water vapor generating section also becomes large, and its manufacture is difficult.

[0006] PRIOR ART DOCUMENTS

[0007] Patent Literature 1: Japanese Patent Application Laid-Open No. 2006-226561 SUMMARY

[0008] Therefore, the present application is an application made to solve the above-described problems, and the main object of the present application is to increase the capacity of the generation of superheated water vapor without upsizing one superheated water vapor generating section.

[0009] That is, the superheated water vapor generating apparatus of the present application heats water vapor introduced from an introduction port and discharges superheated water vapor from a discharge port, and is provided with a plurality of or a plurality of sets of superheated water vapor generating sections that generate superheated water vapor by heating water vapor, a distribution pipe that distributes and introduces water vapor introduced from the introduction port to the plurality of or the plurality of sets of superheated water vapor generating sections, and a merging pipe that merges superheated water vapor generated by the plurality of or the plurality of sets of superheated water vapor generating sections and discharges it from the discharge port.

[0010] If it is such a superheated steam generating device, since water vapor is distributed to a plurality of or a plurality of groups of superheated steam generating portions, superheated steam generated by a plurality of or a plurality of groups of superheated steam generating portions is merged and discharged, so that the generation of superheated steam can be made large capacity without making one superheated steam generating portion large.

[0011] The water vapor flows to the distribution pipe, but if the water vapor is liquefied in the distribution pipe, it is possible that the liquefied water is eventually discharged from the discharge port.

[0012] In order to prevent the liquefaction of water vapor, it is preferable that the superheated steam generating device further has a distribution pipe heating portion that heats the distribution pipe. In addition, it is preferable that the distribution pipe heating portion heats the distribution pipe to 100°C or higher.

[0013] The superheated steam flows to the merging pipe, but if the water vapor is liquefied in the merging pipe, it is possible that the liquefied water is eventually discharged from the discharge port. In addition, it results in that the superheated steam of the desired temperature cannot be discharged from the discharge port.

[0014] In order to prevent the liquefaction of water vapor and discharge the superheated steam of the desired temperature, it is preferable that the superheated steam generating device further has a merging pipe heating portion that heats the merging pipe. In addition, it is preferable that the merging pipe heating portion heats the merging pipe to the set temperature of the superheated steam.

[0015] As a specific embodiment, it can be considered that the plurality of groups of superheated steam generating portions are pairs, and the plurality of groups of superheated steam generating portions are arranged in two columns on the left and right in such a manner that the respective superheated steam discharge ports face each other.

[0016] If it is this configuration, since the superheated steam discharge ports of the superheated steam generating portions in the two columns on the left and right are arranged to face each other, it is possible to make the connection of each superheated steam discharge port to the merging pipe simple.

[0017] In order to make the handling of the piping of the entire device simple, it is preferable that the plurality of groups of superheated steam generating portions are arranged in two columns in such a manner that they are bilaterally symmetrical, and the merging pipe passes between the two columns of superheated steam generating portions on the left and right and is connected to the plurality of groups of superheated steam generating portions.

[0018] To prevent the liquefied water from being discharged from the superheated water vapor generating device, it is preferable that the superheated water vapor generating device further has a water discharge prevention mechanism that prevents the water vapor after being liquefied from being discharged from the discharge port, the water discharge prevention mechanism having: a temperature sensor that detects the temperature of the superheated water vapor generating portion; and a control device that controls the superheated water vapor generating portion, the control device controlling the superheated water vapor generating portion so that the detected temperature of the temperature sensor becomes 100°C or higher before the water vapor is introduced into the introduction port.

[0019] If this configuration, the water vapor is introduced into the introduction port after the temperature on the discharge port side is heated to 100°C or higher by the water discharge prevention mechanism, so it is possible to prevent the water vapor after being liquefied from being discharged from the discharge port. As a result, it is possible to suppress the bad influence of the water after being liquefied on the processed object that is heat-treated using the superheated water vapor.

[0020] Specifically, the superheated water vapor generating portion has a connection port that is connected to the merging pipe.

[0021] Moreover, to prevent the water after being liquefied from being discharged from the discharge port, it is necessary to prevent the water after being liquefied from being discharged from the superheated water vapor generating portion, so it is necessary to make the temperature of the discharge port 100°C or higher at least in the superheated water vapor generating portion. Therefore, it is preferable that the temperature sensor is provided on the discharge port side on the conductor pipe.

[0022] It is possible to consider that the superheated water vapor generating device of the present application is configured to have an on-off electromagnetic valve provided on the introduction port side.

[0023] In this configuration, to automatically make the water discharge prevention function work, it is preferable that, when the detected temperature of the temperature sensor becomes 100°C or higher, the control device makes the on-off electromagnetic valve open and introduces the water vapor into the introduction port. In addition, even in the case of being configured as a device that is separate from the saturated water vapor generating device, it is possible to control on the introduction port side of the superheated water vapor generating device so that the water vapor is not introduced until the superheated water vapor generating device becomes 100°C or higher.

[0024] To moderate the thermal shock of the superheated water vapor generating device, it is preferable that the on-off electromagnetic valve is an electric proportional valve, and the control device makes the electric proportional valve open in such a manner that the valve opening degree of the electric proportional valve gradually becomes larger.

[0025] In addition, it is preferable that the superheated water vapor generating device of the present application further has a discharge side collection mechanism that is provided on the discharge port side and collects the water after being liquefied.

[0026] If this configuration, it is possible to further prevent the water after being liquefied from being discharged from the superheated water vapor generating device.

[0027] Further, in the present application, it is preferable that the superheated steam generating device further has a collection mechanism on the introduction side, which is provided on the introduction side and collects water after the water vapor is liquefied.

[0028] If this configuration, it is possible to prevent water after the water vapor is liquefied from being introduced into the superheated steam generating device, and it is possible to further prevent the water after the water vapor is liquefied from being guided out of the superheated steam generating device.

[0029] As a specific embodiment of the superheated steam generating section, it is preferable that the superheated steam generating section has a conductor pipe of a cylindrical shape wound in a spiral shape, and the conductor pipe is inductively heated or electrically heated.

[0030] In the case of increasing the capacity of the superheated steam generating section having this configuration, it is possible to consider increasing the diameter of the conductor pipe, but if the diameter of the conductor pipe is increased, it is difficult to bend the conductor pipe, and thus it is not practical. In order to easily deform the conductor pipe, the winding diameter is usually made to be about 10 times the pipe diameter. For example, in order to wind a pipe having a diameter of 100 mm in a spiral shape, the winding diameter needs to be made to be about 1000 mm, and thus it is very difficult to manufacture.

[0031] On the other hand, in the present application, since there are a plurality of or a plurality of groups of superheated steam generating sections, it is easy to increase the capacity without increasing the diameter of the conductor pipe of each superheated steam generating section.

[0032] It is possible to consider that the superheated steam generating section of the present application has a so-called transformer type configuration. Specifically, it is possible to consider that the superheated steam generating section shorts a conductor pipe of a cylindrical shape wound in a spiral shape in the axial direction, and inductively heats the conductor pipe by a magnetic flux generating mechanism provided on the inner side and the outer side or one side of the conductor pipe, heats water vapor flowing through the conductor pipe, and generates superheated steam.

[0033] In order to improve the heating efficiency of each of the plurality of superheated steam generating sections, and to simplify the configuration of the plurality of superheated steam generating sections, it is preferable that the magnetic flux generating mechanism has an induction coil and a core provided on the inner side of the induction coil, and two or more of the cores in the plurality of superheated steam generating sections are connected by a connecting core to form a closed magnetic circuit.

[0034] Since the superheated steam generating section, the branch pipe, and the merging pipe are different in temperature, the degree of thermal expansion of each of them is different. Therefore, it is preferable that the superheated steam generating device further has a thermal expansion absorbing structure that absorbs the difference in thermal expansion of each of the superheated steam generating section, the distribution pipe, and the merging pipe.

[0035] To be able to change the capacity of generated superheated steam, a configuration can be considered in which the distribution pipe has branch pipes corresponding to the plurality of superheated steam generation sections, and on the branch pipes, on-off valves are provided, and the number of superheated steam generation sections to which water vapor is distributed or the water vapor distribution flow rate ratio can be changed. In addition, if this configuration, water vapor can not be distributed to superheated steam generation sections that need to be maintained.

[0036] Preferably, the distribution pipe has branch pipes corresponding to the plurality of or groups of superheated steam generation sections, and by adjusting the pipe diameter and length of the branch pipes, the water vapor flow rate introduced into each of the superheated steam generation sections is made the same.

[0037] In this way, by making the water vapor flow rate introduced into each superheated steam generation section the same, each superheated steam generation section can be collectively controlled, and superheated steam of the same temperature can be easily obtained.

[0038] In addition, it is preferable that the superheated steam generation device of the present application be provided with a temperature sensor on the outlet side of each of the superheated steam generation sections, and control be performed based on the detection temperature of the temperature sensor so that the temperature of the superheated steam output from each of the superheated steam generation sections becomes the same.

[0039] In this configuration, the superheated steam temperature from the superheated steam generation device is power-controlled based on the detection temperature of the temperature sensor on the outlet side, and balanced in a manner that makes the superheated steam temperature output from each of the superheated steam generation sections the same based on the detection temperature of the individual temperature sensor provided on each of the superheated steam generation sections.

[0040] According to the present application configured in this way, it is possible to increase the capacity of superheated steam generation without making one superheated steam generation section large. BRIEF DESCRIPTION OF DRAWINGS

[0041] Figure 1 is a diagram schematically showing the configuration of a superheated steam generation device of one embodiment of the present application.

[0042] Figure 2 is a perspective view schematically showing the detailed configuration of a superheated steam generation section of the same embodiment.

[0043] Figure 3 is a cross-sectional view schematically showing the detailed configuration of a superheated steam generation section of the same embodiment.

[0044] Figure 4 is a perspective view schematically showing the detailed configuration of a conductor pipe of the same embodiment.

[0045] Figure 5is a sectional view showing a core configuration of a magnetic flux generating mechanism of the embodiment.

[0046] Figure 6 is a schematic view showing a configuration of a distribution pipe of the embodiment.

[0047] Figure 7 is a schematic view showing a configuration of a merging pipe of the embodiment.

[0048] Figure 8 is a view showing an operation from a stop state to a state where water vapor is introduced into an introduction port of the embodiment.

[0049] Figure 9 is a view schematically showing a configuration of a superheated water vapor generating apparatus of a modified embodiment.

[0050] Figure 10 is a view schematically showing a configuration of a superheated water vapor generating apparatus of a modified embodiment.

[0051] Explanation of Reference Numerals

[0052] 100 superheated water vapor generating apparatus

[0053] P1 introduction port

[0054] P2 discharge port

[0055] 21 conductor pipe

[0056] 5 water discharge prevention mechanism

[0057] 51 temperature sensor

[0058] 52 control device

[0059] 53 on-off electromagnetic valve (electric proportional valve)

[0060] 6 discharge side collection mechanism

[0061] 7 introduction side collection mechanism DETAILED DESCRIPTION

[0062] One embodiment of a superheated water vapor generating apparatus of the present application will be described below with reference to the drawings.

[0063] <1. Apparatus Configuration>

[0064] The superheated water vapor generating apparatus 100 of the present embodiment heats water vapor generated outside and generates superheated water vapor exceeding 100°C (200°C to 2000°C). In addition, as an apparatus for generating water vapor outside (water vapor generating apparatus), various boilers can be used as long as the apparatus is capable of generating water vapor from water.

[0065] As Figure 1 shown, the superheated steam generating device 100 of the present embodiment heats the water vapor introduced from the introduction port P1 to generate superheated steam, and leads the superheated steam out from the lead-out port P2.

[0066] Specifically, the superheated steam generating device 100 is provided with: a plurality of superheated steam generating sections 2 that heat water vapor to generate superheated steam; a distribution pipe 3 that distributes and introduces water vapor introduced from the introduction port P1 to the plurality of superheated steam generating sections 2; and a merging pipe 4 that merges superheated steam generated by the plurality of superheated steam generating sections 2 and leads it out from the lead-out port P2. The present embodiment is configured with six superheated steam generating sections 2, but the number of superheated steam generating sections is not limited thereto. In addition, the plurality of superheated steam generating sections 2, the distribution pipe 3, and the merging pipe 4 are housed inside a housing, and the introduction port P1 and the lead-out port P2 protrude from the side surface of the housing.

[0067] First, the superheated steam generating section 2 will be described.

[0068] As Figure 1 shown, the superheated steam generating section 2 is provided in an even number, and three superheated steam generating sections are connected as one group by a connecting core (not shown in the drawing). Furthermore, the two groups of superheated steam generating sections 2 are arranged in two rows in a left-right symmetrical manner. The plurality of groups of superheated steam generating sections 2 thus configured can be arranged in multiple stages. Figure 1

[0069] As Figure 2 and Figure 3 shown, each superheated steam generating section 2 short-circuits a cylindrical conductor pipe 21 that is spirally wound in the axial direction, and inductively heats it by a magnetic flux generating mechanism 22 provided on the inner side and the outer side, or one of them, of the conductor pipe 21, to heat water vapor flowing through the conductor pipe 21 and generate superheated steam.

[0070] The conductor pipe 21 is a water vapor housing section that has an introduction-side connection port P3 and a lead-out-side connection port P4. The conductor pipe 21 is cylindrical and short-circuits in the axial direction by spirally winding a pipe having electrical conductivity. The conductor pipe 21 has: the introduction-side connection port P3 that is connected to the distribution pipe 3 to introduce water vapor; and the lead-out-side connection port P4 that is connected to the merging pipe 4 to lead out superheated steam. The lead-out-side connection port P4 forms a superheated steam lead-out port. In addition, the winding portions corresponding to one turn of the conductor pipe 21 are in contact with or close to each other. As the material of the conductor pipe 21, for example, Austenitic stainless steel, Inconel alloy can be used. In addition, the detailed configuration of the conductor pipe 21 is described later.

[0071] ​A magnetic flux generating mechanism 22 is disposed on the inner and outer sides of the conductor tube 21 to inductively heat the conductor tube 21, and has an induction coil 221 disposed along the inner and outer surfaces of the conductor tube 21. An AC voltage is applied to the induction coil 221 by an AC power supply at the power frequency (50Hz or 60Hz).

[0072] In the superheated steam generating device 100 configured in this way, by applying an AC voltage of 50Hz or 60Hz to the induction coil 221, an induced current flows through the conductor tube 21, and the conductor tube 21 generates Joule heat. Moreover, the water vapor flowing through the conductor tube 21 receives heat from the inner surface of the conductor tube 21 and is thus heated, thereby generating superheated steam.

[0073] Furthermore, in the superheated steam generating apparatus 100 of this embodiment, such as Figure 2 as well as Figure 4 As shown, the inlet-side connection port P3 of the conductor tube 21 is provided at both ends of the conductor tube 21 along the axial direction, and the outlet-side connection port P4 of the conductor tube 21 is provided at the center of the conductor tube 21 along the axial direction. In this embodiment, the outlet-side connection port P4 is provided at a position that divides the conductor tube 21 into two equal parts along the axial direction, but it is not limited to this.

[0074] Specifically, such as Figure 4 As shown, the conductor tube 21 is divided into two conductor tube components 211 and 212 at its axial center. Furthermore, the inlet-side connection port P3 is located at the outer axial ends 211a and 212a of each conductor tube component 211 and 212, and the outlet-side connection port P4 is located at the inner axial ends 211b and 212b of each conductor tube component 211 and 212. By continuously arranging these two conductor tube components 211 and 212 along the axial direction, the inlet-side connection port P3 of the conductor tube 21 is located at both axial ends of the conductor tube 21, and the outlet-side connection port P4 of the conductor tube 21 is located at its axial center.

[0075] The adjacent wound portions of each conductor tube component 211, 212 are electrically connected, for example, by welding, and the adjacent opposing portions of two conductor tube components 211, 212 are electrically connected, forming a short-circuit circuit as a whole conductor tube. Thus, conductor tube 21 becomes a one-turn secondary coil. Furthermore, while each conductor tube component 211, 212 in this embodiment has the same number of turns, it is not limited to this.

[0076] Here, the circumferential portion of the two conductor tube components 211 and 212, except for the outlet-side connection port P4, is joined by a first conductive joining member (not shown). This first joining member can be formed by welding.

[0077] In this embodiment, such as Figure 4As shown, the axial inner side end portions 211b, 212b of the respective conductor pipe members 211, 212 are bent with a curvature radius of 2 times the pipe diameter to form the lead-out side connection ports P4 of the respective conductor pipe members 211, 212. Here, the lead-out side connection ports P4 are formed by bending the coiled portions of the respective conductor pipe members 211, 212 to the radially outer side.

[0078] The axial inner side end portion 211b of one of the conductor pipe members 211 and the axial inner side end portion 212b of the other of the conductor pipe members 212 are constituted so as to be close to each other in the circumferential direction, and the lead-out side connection ports P4 of the two conductor pipe members 211, 212 are disposed in contact with or close to each other. These two lead-out side connection ports P4 are electrically joined to each other by the second joining member 213 having electrical conductivity. In the present embodiment, the space formed between the two lead-out side connection ports P4 is filled in and joined by the second joining member 213. The second joining member 213 is of the same material or substantially the same physical properties as the conductor pipe 21.

[0079] As shown in Figs. 1 and 2, the lead-out side connection ports P4 of the two conductor pipe members 211, 212 are electrically joined to each other by the second joining member 213 having electrical conductivity. Figure 1 As shown in Figs. 1 and 2, the lead-out side connection ports P4 of the two conductor pipe members 211, 212 are electrically joined to each other by the second joining member 213 having electrical conductivity. Figure 2 As shown in Figs. 1 and 2, the lead-out side connection ports P4 of the two conductor pipe members 211, 212 are electrically joined to each other by the second joining member 213 having electrical conductivity.

[0080] As shown in Figs. 1 and 2, the lead-out side connection ports P4 of the two conductor pipe members 211, 212 are electrically joined to each other by the second joining member 213 having electrical conductivity. Figure 5 As shown in Figs. 1 and 2, the lead-out side connection ports P4 of the two conductor pipe members 211, 212 are electrically joined to each other by the second joining member 213 having electrical conductivity.

[0081] Next, the distribution pipe 3 that distributes water vapor to the above-described plurality of superheated water vapor generating portions 2 will be described with reference to Figs. 3 and 4. Figure 6 Next, the distribution pipe 3 that distributes water vapor to the above-described plurality of superheated water vapor generating portions 2 will be described with reference to Figs. 3 and 4. Figure 6

[0082] ​The distribution pipe 3 has a guide inlet P1 at one end portion, and distributes water vapor guided from the guide inlet P1 to the plurality of superheated water vapor generation portions 2.

[0083] The distribution pipe 3 has a main pipe 31 having the guide inlet P1, and branch pipes 32 branched from the main pipe 31. The branch pipes 32 are provided in accordance with the number of the superheated water vapor generation portions 2, and have connection ports P5 connected to the guide-in side connection ports P3 of the superheated water vapor generation portions 2.

[0084] In the present embodiment, the main pipe 31 of the distribution pipe 3 is arranged in a manner passing between the superheated water vapor generation portions 2 arranged symmetrically in two columns of left and right, and the branch pipes 32 extend from the main pipe 31 to the guide-in side connection ports P3 of the respective superheated water vapor generation portions 2. Here, the guide-in side connection ports P3 of the respective superheated water vapor generation portions 2 are directed toward the left and right outer sides, the branch pipes 32 are branched from the main pipe 31 to the left and right sides, and the superheated water vapor generation portions 2 are connected to the guide-in side connection ports P3 from the left and right outer sides. Here, it is preferable to adjust the pipe diameter and length of the branch pipes 32 of the distribution pipe 3 so that the water vapor flow rates guided into the respective superheated water vapor generation portions become the same.

[0085] In addition, the distribution pipe 3 is heated to 100°C or higher by a distribution pipe heating portion 30. The distribution pipe heating portion 30 can be a configuration using an external heat source (for example, a heater), or a configuration in which the distribution pipe 3 is used as a conductor pipe and in which the distribution pipe 3 is inductively heated or electrically heated. By the distribution pipe heating portion 30, it is possible to prevent water vapor from being liquefied before being supplied to the plurality of superheated water vapor generation portions 2.

[0086] Next, the superheated water vapor generation portion 2 will be described with reference to Figure 7 The superheated water vapor generation portion 2 will be described with reference to Figure 7 The configuration of a portion thereof is omitted in the following description.

[0087] The distribution pipe 3 has a guide inlet P1 at one end portion, and distributes water vapor guided from the guide inlet P1 to the plurality of superheated water vapor generation portions 2.

[0088] The distribution pipe 3 has a guide inlet P1 at one end portion, and distributes water vapor guided from the guide inlet P1 to the plurality of superheated water vapor generation portions 2.

[0089] In this embodiment, the main pipe 41 of the manifold 4 is arranged between two rows of superheated steam generating units 2 arranged symmetrically on the left and right sides, and branch pipes 42 extend from the main pipe 41 to the outlet-side connection port P4 of each superheated steam generating unit 2. Here, the outlet-side connection ports P4 (superheated steam outlets) of the two rows of superheated steam generating units 2 are arranged opposite each other on the left and right inner sides, and the main pipe 41 of the manifold 4 is arranged between these outlet-side connection ports P4. Moreover, each branch pipe 42 extends linearly from the main pipe 41 and connects to each outlet-side connection port P4.

[0090] Furthermore, the manifold 4 is heated to a set temperature for superheated steam by the manifold heating unit 40. The manifold heating unit 40 can be configured to use an external heat source (e.g., a heater), or it can be configured to use the manifold 4 as a conductor and subject it to induction heating or electrical heating. The manifold heating unit 40 prevents the superheated steam from liquefying and allows superheated steam at the desired temperature to be discharged from the outlet P2.

[0091] <2. Water Outflow Prevention Mechanism>

[0092] However, as Figure 1 As shown, the superheated steam generating device 100 of this embodiment includes a water discharge prevention mechanism 5, which prevents water liquefied from steam from being discharged from the outlet P2.

[0093] The water leakage prevention mechanism 5 includes: a temperature sensor 51, which is installed on the conductor tube 21 to detect the temperature of the conductor tube 21; and a control device 52, which controls induction heating so that the temperature detected by the temperature sensor 51 becomes a set temperature of 100°C or higher.

[0094] Temperature sensor 51 is provided on the conductor tube 21 at the outlet-side connection port P4. Here, temperature sensor 51 is provided on the conductor tube 21 of a representative superheated steam generating unit 2 among the plurality of superheated steam generating units 2. In addition, when temperature sensor 51 is provided at the outlet-side connection port P4, it can be provided not only on the protruding part (the part protruding from the spiral part) of the conductor tube 21 with outlet-side connection port P4, but also on the spiral part (the wound part) of the conductor tube 21 adjacent to outlet-side connection port P4, or on the branch tube 42 of the manifold 4 connected to outlet-side connection port P4.

[0095] The control device 52 has a CPU, a memory, an A / D converter, a D / A converter, and the like, and controls the induction heating of the plurality of superheated water vapor generation sections 2 based on the detected temperature of the temperature sensor 51 to make the detected temperature of the temperature sensor 51 the set temperature of 100°C or higher before the water vapor is introduced into the introduction port P1. In addition, the set temperature of 100°C or higher is set in a manner that the entire conductor pipe 21 reliably becomes 100°C or higher, and for example, the set temperature of 100°C or higher is set to 150°C.

[0096] Here, the water discharge prevention mechanism 5 further has an on-off electromagnetic valve 53 provided on the introduction port P1 side of the distribution pipe 3. Here, the on-off electromagnetic valve is provided on the main pipe 31 of the distribution pipe 3. In addition, in the case where the on-off electromagnetic valve 53 is provided on the introduction port P1 side, the on-off electromagnetic valve can be provided on a connection pipe (not shown) connected to the introduction port P1 in addition to being provided on the main pipe 31 of the distribution pipe 3 provided with the introduction port P1.

[0097] Furthermore, as shown in FIG. 6, for example, in the case where the detected temperature of the temperature sensor 51 becomes the set temperature of 100°C or higher after the start of operation from the stopped state, the control device 52 automatically opens the on-off electromagnetic valve 53 to introduce the water vapor into the introduction port P1. The on-off electromagnetic valve 53 of the present embodiment is an electric proportional valve, and the control device 52 opens the electric proportional valve 53 in a manner that the valve opening degree of the electric proportional valve 53 gradually increases. Figure 8 The opening and closing time (time from the closed state to the opened state) of the electric proportional valve 53 can be adjusted based on the difference between the temperature of the introduced water vapor and the detected temperature of the temperature sensor 51, and the like. For example, if the difference between the temperature of the water vapor and the detected temperature is small, the influence of thermal shock is small, and thus the opening and closing time can be considered to be shortened, and if the difference between them is large, the influence of thermal shock is also large, and thus the opening and closing time can be considered to be lengthened.

[0098] In addition, as shown in FIG. 6, in the present embodiment, a discharge side collection mechanism 6 that collects water after the water vapor is liquefied is provided on the discharge port P2 side. The discharge side collection mechanism 6 has a storage section 61 that stores the water after the water vapor is liquefied, and a discharge section 62 that discharges the water stored in the storage section 61. In addition, in the case where the discharge side collection mechanism 6 is provided on the discharge port P2 side, the discharge side collection mechanism can be provided on a connection pipe connected to the discharge port P2 in addition to being provided on the merging pipe 4 provided with the discharge port P2. Here, the discharge side collection mechanism 6 is preferably provided at a position as close as possible to the superheated water vapor discharge port of the superheated water vapor generation device 100.

[0099] Figure 1

[0100] ​​Further, the introduction-side collection mechanism 7 is provided on the side of the introduction port P1, and collects water after the water vapor is liquefied. The introduction-side collection mechanism 7 has a storage portion 71 that stores the liquefied water, and a discharge portion 72 that discharges the water stored in the storage portion 71. Further, in the case where the introduction-side collection mechanism 7 is provided on the side of the introduction port P1, the introduction-side collection mechanism 7 can be provided on the distribution pipe 3 on which the introduction port P1 is provided, or on a connection pipe connected to the introduction port P1. Here, the introduction-side collection mechanism 7 is preferably provided at a position as close as possible to the introduction-side connection port P3 of the superheated water vapor generation portion 2.

[0101] <3. Effects of the Present Embodiment>

[0102] According to the superheated water vapor generation apparatus 100 configured as described above, the water vapor is distributed to a plurality of or a plurality of groups of the superheated water vapor generation portions 2, and the superheated water vapor generated by the plurality of or the plurality of groups of the superheated water vapor generation portions 2 is merged and discharged, so that the superheated water vapor generation can be made large in capacity without making one superheated water vapor generation portion 2 large.

[0103] Further, the water vapor is introduced into the introduction port P1 after the temperature on the side of the discharge port P2 is heated to 100°C or higher by the water discharge prevention mechanism 5, so that the water after the water vapor is liquefied can be prevented from being discharged from the discharge port P2. As a result, the water after the water vapor is liquefied can be prevented from adversely affecting the object to be treated that is subjected to the heat treatment using the superheated water vapor.

[0104] In the case where the detected temperature of the temperature sensor 51 becomes the set temperature of 100°C or higher, the control device 52 opens the on-off electromagnetic valve 53, and introduces the water vapor into the introduction port P1, so that the water discharge prevention function can be automatically activated. Further, in the case where the superheated water vapor generation apparatus is configured as a separate apparatus from the saturated water vapor generation apparatus, the introduction port side of the superheated water vapor generation apparatus can be controlled so that the water vapor is not introduced until the superheated water vapor generation apparatus becomes 100°C or higher.

[0105] Since the discharge-side collection mechanism 6 is provided on the side of the discharge port P2, the water after the water vapor is liquefied can be further prevented from being discharged from the superheated water vapor generation apparatus 100. Further, since the introduction-side collection mechanism 7 is provided on the side of the introduction port P1, the water after the water vapor is liquefied can be prevented from being introduced into the superheated water vapor generation apparatus 100, and the water after the water vapor is liquefied can be further prevented from being discharged from the superheated water vapor generation apparatus 100.

[0106] <4. Effects of the Present Embodiment>

[0107] Further, the present application is not limited to the above-described embodiments.

[0108] For example, in the described embodiment, Joule heating is generated in the conductor tube by induction heating, but it can also be generated by direct electrical heating. Alternatively, it can be configured to heat the water vapor flowing through the tube by heating the tube with an external heat source (e.g., a heater) instead of generating Joule heating in the conductor tube.

[0109] In addition, the temperature sensor 51 in the above embodiment is located on the outlet P2 side, but it can be located anywhere that can detect the temperature of the conductor tube 2.

[0110] Furthermore, in addition to being configured to be installed on the conductor tube 21 of a representative superheated steam generating unit 2, the temperature sensor 51 can also be installed on the conductor tubes 21 of multiple superheated steam generating units 2. In this case, it is conceivable that when the detected temperatures of multiple temperature sensors 51 all reach the set temperature of 100°C or higher, the control device 52 opens the solenoid valve 53.

[0111] Alternatively, temperature sensors can be individually installed on each outlet side of the superheated steam generation unit 2, and control can be performed based on the temperature detected by each individual temperature sensor to make the temperature of the superheated steam output from each superheated steam generation unit 2 the same.

[0112] The temperature of the superheated steam output from the superheated steam generating device 100 is electrically controlled based on the temperature detected by the temperature sensor on the outlet P2 side, and the superheated steam output from each superheated steam generating unit 2 is controlled and balanced in a way that the temperature detected by the individual temperature sensors installed in each superheated steam generating unit 2 is the same.

[0113] In addition, such as Figure 9 As shown, it can also be configured such that a switch valve 32V is installed on each branch pipe 32 of the distribution pipe 3, which can change the superheated steam generating unit 2 to which the distributed steam is generated. For example, it is possible to close the switch valve 32V corresponding to a superheated steam generating unit 2 that requires maintenance, etc., and not distribute steam. Alternatively, it is possible to change the number of superheated steam generating units 2 in operation by manually or automatically selecting the switch valve 32V that is opened according to the required superheated steam capacity. Furthermore, it is possible to change the steam distribution ratio to each superheated steam generating unit 2 by manually or automatically adjusting the opening degree of the switch valve 32V.

[0114] In addition, such as Figure 10As shown, the superheated water vapor generating portion 2, the distribution pipe 3, and the merging pipe 4 can also have a thermal expansion absorbing structure 8 that absorbs differences in thermal expansion of each other. As the thermal expansion absorbing structure 8, for example, a constitution in which a flexible pipe such as a bellows pipe is provided between the distribution pipe 3 and the superheated water vapor generating portion 2 and between the superheated water vapor generating portion 2 and the merging pipe 4 can be considered. In addition, the thermal expansion absorbing structure 8 can be provided on the distribution pipe 3, the superheated water vapor generating portion 2, or the merging pipe 4.

[0115] Further, the electromagnetic switch valve of the embodiment is provided in the superheated water vapor generating device, but can also be provided on the leading side of a water vapor generating device that supplies water vapor to the superheated water vapor generating device.

[0116] Further, the constitution of the conductor pipe is not limited to the embodiment, and can also be a constitution in which one conductor pipe is spirally wound.

[0117] In addition, the superheated water vapor generating device can also have a water vapor generating portion that generates water vapor by heating water, in addition to the constitution of the embodiment.

[0118] In addition, the present application is not limited to the embodiment, and various modifications can of course be made within the scope of the gist thereof.

Claims

1. A superheated steam generating device, which heats steam introduced from an inlet and discharges superheated steam from an outlet, characterized in that it comprises: Multiple superheated steam generation units heat water vapor to generate superheated steam; The distribution pipe distributes the steam introduced from the inlet to the plurality of superheated steam generating units; and The manifold pipe collects and discharges the superheated steam generated by the multiple superheated steam generating units from the outlet. The superheated steam generating unit short-circuits the spirally wound cylindrical conductor tube axially. Induction heating is achieved through a magnetic flux generating mechanism located on the inner or outer side of the conductor tube, or on one side, heating the water vapor flowing through the conductor tube to generate superheated steam. The magnetic flux generating mechanism includes an induction coil and an iron core disposed inside the induction coil. The iron cores of two or more of the plurality of superheated steam generating units are connected together to form a group. The superheated steam generating device has multiple sets of superheated steam generating units connected by the connecting iron core.

2. The superheated steam generating device according to claim 1, characterized in that, It also includes a distribution pipe heating section for heating the distribution pipe.

3. The superheated steam generating device according to claim 1, characterized in that, It also includes a manifold heating section for heating the manifold.

4. The superheated steam generating device according to claim 1, characterized in that, The multiple sets of superheated steam generating units are even-numbered sets. The multiple sets of superheated steam generating units are arranged in two columns, left and right, with their respective superheated steam outlets facing each other.

5. The superheated steam generating device according to claim 4, characterized in that, The multiple sets of superheated steam generating units are arranged in two rows in a left-right symmetrical manner. The confluence pipe passes between the two columns of superheated steam generating units on the left and right, and is connected to the multiple sets of superheated steam generating units.

6. The superheated steam generating device according to claim 1, characterized in that, It also includes a water outlet prevention mechanism to prevent the water vapor from being discharged from the outlet. The water leakage prevention mechanism includes: a temperature sensor for detecting the temperature of the superheated steam generating section; and a control device for controlling the superheated steam generating section. The control device controls the superheated steam generation unit to make the temperature detected by the temperature sensor reach 100°C or higher before the steam is introduced into the inlet.

7. The superheated steam generating device according to claim 6, characterized in that, The superheated steam generating unit has a connection port that connects to the manifold. The temperature sensor is mounted on the connection port side of the superheated steam generation unit.

8. The superheated steam generating device according to claim 6, characterized in that, A solenoid valve is provided on the inlet side. When the temperature detected by the temperature sensor becomes above 100°C, the control device opens the solenoid valve.

9. The superheated steam generating device according to claim 8, characterized in that, The solenoid valve is an electric proportional valve. The control device opens the electric proportional valve by gradually increasing the valve opening degree.

10. The superheated steam generating device according to claim 1, characterized in that, It also has an outlet-side collection mechanism, which is located on the outlet side to collect the water after the water vapor has liquefied.

11. The superheated steam generating device according to claim 1, characterized in that, It also has an inlet-side collection mechanism, which is located on the inlet side to collect the water after the water vapor is liquefied.

12. The superheated steam generating device according to claim 1, characterized in that, It also has a thermal expansion absorption structure that absorbs the difference in thermal expansion between the superheated steam generating section, the distribution pipe and the confluence pipe.

13. The superheated steam generating device according to claim 1, characterized in that, The distribution pipe has branch pipes corresponding to the plurality of superheated steam generation sections. A switch valve is provided on the branch pipe, which can change the number of superheated steam generating units or the steam distribution ratio.

14. The superheated steam generating device according to claim 1, characterized in that, The distribution pipe has branch pipes corresponding to the plurality of superheated steam generation sections. By adjusting the diameter and length of the branch pipes, the flow rate of water vapor introduced into each of the superheated steam generation sections is made the same.

15. The superheated steam generating device according to claim 1, characterized in that, Each of the superheated steam generating sections is individually equipped with a temperature sensor on its outlet side. Control is performed based on the temperature detected by the temperature sensor so that the temperature of the superheated steam output from each of the superheated steam generating units is the same.

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