Inspection Fixture and Inspection Device

Abstract

The present invention provides an inspection jig, which includes: a plate-shaped insulating member having a recess; a first substrate having a first electrode; and a wire electrically connected to a contact terminal. A through hole penetrating the bottom of the recess is provided in the insulating member, one end portion of the wire is disposed in the through hole, and the other end portion of the wire is connected to the first electrode.

Description

Technical Field

[0001] The present invention relates to an inspection jig used for inspecting an object to be inspected. Background Art

[0002] An example of an existing probe card device is disclosed in Patent Document 1.

[0003] The probe card device of the above Patent Document 1 functions as an interface between a tester for controlling tests of a DUT and the electronic device. The probe card device has a main subassembly and a probe head.

[0004] The main subassembly includes a wiring structure and a probe head interface. The wiring structure is a printed circuit board or the like. The probe head interface includes electrical terminals on one side, electrical contacts on the other side, and an electrical connection portion from the above electrical terminals to the above electrical contacts. The wiring structure is connected to the above electrical terminals via a cable.

[0005] The probe head includes a probe insertion portion. The probe insertion portion includes a connector on one side of the probe head and probes extending from the other side of the probe head. The electrical connection portion connects the connector and the probes. The number and pattern of the connectors correspond to the number and pattern of the electrical contacts of the probe head interface. Thus, the connectors are electrically connected to the electrical contacts. The number and pattern of the probes correspond to the number and pattern of the terminals of the DUT to be tested.

[0006] Prior Art Documents

[0007] Patent Documents

[0008] Patent Document 1: Japanese Patent Application Laid-Open No. 2016-524139 Summary of the Invention

[0009] Problems to be Solved by the Invention

[0010] The probe head of Patent Document 1 electrically connects probes corresponding to the pattern of the terminals of the DUT and connectors corresponding to the pattern of the electrical contacts of the probe head interface. Therefore, it is considered that it is difficult to start manufacturing if the pattern of the terminals of the DUT cannot be determined.

[0011] Moreover, the above probe head electrically connects probes arranged at positions corresponding to the terminals of the DUT and connectors arranged at positions corresponding to the electrical contacts of the probe head interface. Therefore, it is considered that the manufacturing of the probe head requires a predetermined manufacturing time.

[0012] Therefore, it can be speculated that the manufacturing time of the probe card device in Patent Document 1 becomes long.

[0013] In view of the above circumstances, an object of the present invention is to provide an inspection jig capable of shortening the manufacturing time and an inspection device using the inspection jig.

[0014] Means for Solving the Problem

[0015] An exemplary inspection jig of the present invention is configured to include: a plate-shaped insulating member having a recess; a first substrate having a first electrode; and a wire electrically connected to a contact terminal. A through hole penetrating the bottom of the recess is provided in the insulating member, one end portion of the wire is disposed in the through hole, and the other end portion of the wire is connected to the first electrode.

[0016] Advantageous Effects of the Invention

[0017] The exemplary inspection jig of the present invention can shorten the manufacturing time. Description of the Drawings

[0018] Figure 1 is a schematic longitudinal sectional view of an inspection device according to an embodiment of the present invention.

[0019] Figure 2 is a schematic partial longitudinal sectional perspective view of an inspection jig according to an embodiment of the present invention.

[0020] Figure 3 is an exploded perspective view of an inspection jig according to an embodiment of the present invention as viewed from above.

[0021] Figure 4 is an exploded perspective view of an inspection jig according to an embodiment of the present invention as viewed from below.

[0022] Figure 5 is a diagram showing a process of inserting a wire through a through hole of an insulating member.

[0023] Figure 6 is a diagram showing a process of bending a protruding portion of a wire inserted through a through hole.

[0024] Figure 7 is a diagram showing a process of joining a wire to a first electrode.

[0025] Figure 8 is a diagram showing a process of disposing a curable resin in a recess and a through hole of an insulating member.

[0026] Figure 9 is a diagram showing a process of polishing a cut surface of a wire.

[0027] Figure 10 is a diagram showing a process of performing etching on a wire.

[0028] Figure 11 is a diagram showing a process of plating an end face of a wire. Detailed Description of the Invention

[0029] Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings. In addition, the insulating member 22 described later has a plate shape, and in the drawings, the thickness direction of the insulating member 22 is set as the X direction, one side in the X direction is represented as X1, and the other side in the X direction is represented as X2. In addition, the direction perpendicular to the X direction is set as the Y direction, one side in the Y direction is represented as Y1, and the other side in the Y direction is represented as Y2. In addition, the direction perpendicular to the X direction and the Y direction is set as the Z direction, one side in the Z direction is represented as Z1, and the other side in the Z direction is represented as Z2. In addition, the direction around the central axis J ( Figure 1 , Figure 2 ) extending in the X direction of the insulating member 22 is called the "circumferential direction". In addition, the radial direction with respect to the central axis J is called the "radial direction".

[0030] <1. Overall Structure of the Inspection Device>

[0031] Here, the overall structure of the inspection device according to an embodiment of the present invention will be described with reference to Figures 1 to 4 . As shown in Figure 1 , an inspection device 5 according to an embodiment of the present invention performs an electrical inspection of an inspection object 10. In Figure 1 , one side X1 is the lower side, and the other side X2 is the upper side. In addition, one side Y1 is the left side of the paper surface, and the other side Y2 is the right side of the paper surface. In addition, one side Z1 is the front side of the paper surface, and the other side Z2 is the back side of the paper surface.

[0032] The inspection object 10 is, for example, a semiconductor wafer on which a plurality of circuits are formed on a semiconductor substrate such as silicon. The semiconductor wafer is sliced into semiconductor chips each having one of the above circuits by dicing. In addition, the inspection object 10 can be, for example, an electronic component such as a semiconductor chip, a CSP (Chip size package), or a semiconductor element in addition to the semiconductor wafer.

[0033] In addition, the inspection object 10 can also be a substrate. In this case, the inspection object 10 can be, for example, a printed wiring board, a glass epoxy board, a flexible board, a ceramic multi-layer wiring board, a package board for semiconductor packaging, an intermediate component board, a film carrier, etc., or an electrode plate for a display such as a liquid crystal display, an EL (Electro-Luminescence) display, a touch panel display, or an electrode plate for a touch panel.

[0034] Alternatively, products based on a packaging technology called EMIB (Embedded Multi-die Interconnect Bridge) can also be used as the inspection object 10. In EMIB, a smaller silicon substrate called a silicon bridge is embedded in a packaging resin substrate, and fine and high-density wiring is formed on the surface of the silicon bridge, so that adjacent silicon dies are mounted close to each other on the packaging resin substrate.

[0035] The inspection device 5 includes an inspection jig 2 and an inspection processing unit (scanner) 3. In this embodiment, as an example, the number of inspection processing units 3 is six. However, the number of inspection processing units 3 can be more than six or a single one.

[0036] The inspection jig 2 has a probe head 1. The probe head 1 has a plurality of contact terminals 11 and a support member 12. That is, the inspection jig 2 is provided with contact terminals 11.

[0037] The contact terminals 11 are formed in a rod shape extending in the vertical direction. In this embodiment, as an example, the contact terminal 11 has a cylindrical body 111, a first conductor (plunger) 112, and a second conductor (plunger) 113. The cylindrical body 111 is formed in a cylindrical shape and is formed of a nickel or nickel alloy tube having an outer diameter of about 25 to 300 μm and an inner diameter of about 10 to 250 μm, for example. In addition, a conductive layer such as gold plating is preferably formed on the inner peripheral surface of the cylindrical body 111. Moreover, the outer peripheral surface of the cylindrical body 111 can be insulated and coated as needed.

[0038] The first conductor 112 and the second conductor 113 are formed of a conductive material such as a palladium alloy, for example. The first conductor 112 is inserted into the cylindrical body 111 from one side X1, and the end portion on the one side X1 of the insertion portion is fixed to the cylindrical body 111 by press-fitting or the like. In a state where the first conductor 112 is fixed to the cylindrical body 111, a part of the first conductor 112 is a protruding portion protruding from the cylindrical body 111 toward the one side X1. The end portion on one side of this protruding portion is the one-side end portion 11A of the contact terminal 11. The one-side end portion 11A can be in contact with the inspection point 10A of the inspection object 10.

[0039] The second conductor 113 is inserted into the cylindrical body 111 from the other side X2, and the end portion on the other side X2 of the insertion portion is fixed to the cylindrical body 111 by press-fitting or the like. In a state where the second conductor 113 is fixed to the cylindrical body 111, a part of the second conductor 113 is a protruding portion protruding from the cylindrical body 111 toward the other side X2. The end portion on the other side of this protruding portion is the other-side end portion 11B of the contact terminal 11.

[0040] The cylindrical body 111 has a spring portion in the middle in the vertical direction. Thus, the cylindrical body 111 can expand and contract in the vertical direction. In addition, a conduction path through the first conductor 112, the cylindrical body 111, and the second conductor 113 is formed.

[0041] The support member 12 supports a plurality of contact terminals 11. More specifically, for example, a through-hole penetrating in the vertical direction is formed in the support member 12, and the contact terminal 11 is accommodated in the through-hole. In this case, due to the dimensional relationship between the contact terminal 11 and the through-hole, it is possible to prevent the contact terminal 11 from falling off to one side X1 when the contact terminal 11 is inserted into the through-hole.

[0042] In addition to the probe head 1, the inspection jig 2 includes a first accommodation member 21, an insulating member 22, a first substrate 23, a plurality of wires 24, a fixing portion 25, a second accommodation member 26, an intermediate member 27, a third accommodation member 28, and a second substrate 29.

[0043] As Figure 3 shown, the first accommodation member 21 is a plate-shaped member having a quadrilateral shape in outline when viewed in the vertical direction, and is formed of a metal having aluminum, for example. The first accommodation member 21 has a first accommodation portion 21A formed by being recessed toward the other side X2. The insulating member 22 is accommodated in the first accommodation portion 21A.

[0044] The insulating member 22 is a plate-shaped member having a recess 22A recessed toward one side X1, and is formed of an insulating material. The insulating member 22 is formed of, for example, ceramics, resin, etc. as the insulating material. As an example of this resin, SUMIKASUPER (registered trademark) can be used.

[0045] That is, the inspection jig 2 includes the plate-shaped insulating member 22 having the recess 22A.

[0046] A through-hole 221A penetrating the bottom 221 of the recess 22A is provided in the insulating member 22. A plurality of through-holes 221A are provided, and as an example, they are formed corresponding to the positions of the contact terminals 11.

[0047] One end portion 24A of the wire 24 is inserted into the through-hole 221A. The wire 24 is formed of, for example, an enameled wire. The enameled wire is formed by covering a copper wire with an insulating coating film. That is, the wire 24 has an insulating coating film. Thus, even when the distance between the through-holes 221A is narrow and the wires 24 are likely to contact each other, it is possible to suppress short circuits between the wires 24.

[0048] The end face of one end portion 24A of the wire 24 forms a fifth electrode E5. The fifth electrode E5 is formed on one side face 221S1 of the bottom portion 221. The other end portion of the second conductor 113, that is, the other end portion 11B of the contact terminal 11, is brought into contact with the fifth electrode E5, and the support member 12 is fixed to one side face 221S1 of the bottom portion 221. In this state, the probe head 1 is disposed on one X1 side of the insulating member 22. As a result, the spring portion of the cylindrical body 111 is compressed in the vertical direction, and by the elastic force of the spring portion, the other end portion 11B abuts against the fifth electrode E5. Thereby, the conduction state between the contact terminal 11 and the fifth electrode E5 is stabilized. That is, the inspection jig 2 includes the wire 24 electrically connected to the contact terminal 11.

[0049] In this way, one end portion 24A of one wire 24 is inserted into one through hole 221A, and one contact terminal 11 is electrically connected to the one wire 24. That is, the number of through holes 221A is the same as the number of wires 24 and the number of contact terminals 11.

[0050] The first substrate 23 is disposed on the other side face 21S of the first housing member 21. The first substrate 23 is disposed on the other X2 side of the insulating member 22. As Figure 3 shown, as an example, the first substrate 23 has a quadrilateral shape in outline when viewed in the vertical direction. As Figure 2 shown, the first substrate 23 has a substrate through hole 23A penetrating in the vertical direction at the central position. That is, the first substrate 23 has a substrate through hole 23A penetrating in the thickness direction of the insulating member 22.

[0051] As Figure 2 shown, on the other side face 23S of the first substrate 23, a plurality of first electrode regions 231R in which a plurality of first electrodes 231 are arranged are circumferentially arranged around the substrate through hole 23A. In addition, in Figure 3 , one first electrode 231 in the first electrode region 231R is representatively illustrated, and the same applies to the second electrode 232 and the fourth electrode 292. That is, the inspection jig 2 includes the first substrate 23 having the first electrode 231. The first electrode region 231R is formed in a shape obtained by removing a sector from a triangle. The group of first electrodes 231 disposed in each of the first electrode regions 231R is electrically connected to each of the plurality of inspection processing units 3 (see Figure 1 ). In the present embodiment, the number of inspection processing units 3 is six, and thus the number of first electrode regions 231R is also six.

[0052] In addition, as Figure 2As shown, the first accommodating member 21 has a through-hole 21C penetrating in the vertical direction at the central position. The substrate through-hole 23A is connected to the other X2 side of the through-hole 21C. The wire 24 is led out from the other side surface 221S2 of the bottom 221 to the other X2 side, passes through the through-hole 21C and the substrate through-hole 23A, and is connected to the first electrode 231. That is, the other end portion 24B of the wire 24 is connected to the first electrode 231. Thus, the contact terminal 11 is electrically connected to the first electrode 231 via the wire 24. In other words, the wire 24 is disposed in the substrate through-hole 23A. In a plan view observed from one X1 side, the wire 24 extends from the first electrode 231 radially inward to the substrate through-hole 23A. Thereby, the pitch of the contact terminals 11 electrically connected to the wire 24 can be narrowed to cope with the narrowing of the pitch of the inspection points 10A of the inspection object 10.

[0053] Here, as Figure 1 and Figure 2 shown, the first substrate 23 has a portion disposed on the concave portion 22A side of the insulating member 22 and overlapping the insulating member 22 when observed in the thickness direction of the insulating member 22. In a plan view observed from the X direction (the above thickness direction) in such a structure, the distance between the position of the through-hole 221A and the position of the first electrode 231 is shorter than the case where the first substrate 23 does not overlap with the insulating member 22. Therefore, the length of the wire 24 can be shortened, and the resistance value of the conduction path can be reduced.

[0054] Here, the number of the first electrodes 231 in the first substrate 23 is larger than the number of the wires 24. That is, there are first electrodes 231 to which the other end portions 24B are not connected. Thereby, even if the type of the inspection object 10 or the type of the probe head 1 is switched, the first substrate 23 can be made common, and the manufacturing time of the inspection jig 2 can be shortened.

[0055] In addition, the other end portion 24B of the wire 24 is not limited to being connected to a part of the first electrodes 231 in the first substrate 23, and may be connected to all of the first electrodes 231 in the first substrate 23. That is, the other end portion 24B of the wire 24 is connected to the first electrode 231.

[0056] A part of the fixing portion 25 is placed on the other side surface 221S2 of the bottom 221 and accommodated in the concave portion 22A. As will be described later, the fixing portion 25 is a molded portion formed of a curable resin and has a function of fixing a part of the wire 24 to the insulating member 22.

[0057] In addition, a manufacturing method based on the structure of the insulating member 22, the first substrate 23, the wire 24, the fixing portion 25, and the fifth electrode E5 will be described later.

[0058] As Figure 3As shown, on the other side surface 23S of the first substrate 23, a second electrode region 232R in which a plurality of second electrodes 232 are arranged in three in the Z direction respectively on one Y1 side and the other Y2 side in the Y direction of the first electrode region 231R. Each group of the second electrodes 232 arranged in each of the second electrode regions 232R is electrically connected to each of the plurality of inspection processing units 3 (refer to Figure 1 ). In Figure 3 , the number of the inspection processing units 3 is six, so the number of the second electrode regions 232R is also six. The second electrodes 232 are electrically connected to the first electrodes 231 through wirings (not shown) arranged inside the substrate portion 230 (refer to Figure 7 ) in the first substrate 23.

[0059] That is, the first substrate 23 has the second electrodes 232 that are electrically connected to the first electrodes 231 and arranged on the other side surface 23S of the first substrate 23. Thereby, the electrical connection between the inspection processing units 3 arranged on the other X2 side of the first substrate 23 and the first substrate 23 can be facilitated.

[0060] As Figure 3 shown, the second housing member 26 is plate-shaped with a quadrilateral shape in outline when viewed in the up-down direction, and is formed of a metal such as aluminum having aluminum. The second housing member 26 has a hole portion 26A penetrating in the thickness direction at the central position. When viewed from above, the first electrode region 231R is exposed above through the hole portion 26A. Thereby, the wire 24 can be arranged inside the hole portion 26A.

[0061] The second housing member 26 has second housing portions 26B arranged in three in the Z direction respectively on one Y1 side and the other Y2 side in the Y direction. The second housing portions 26B are hole portions penetrating in the thickness direction (X direction). When viewed from above, the second electrode regions 232R are exposed above through the second housing portions 26B.

[0062] As Figure 4 shown, a part of the intermediate member 27 protrudes from the third housing member 28 toward one X1 side, and has a substantially quadrilateral shape as an outer diameter when viewed in the up-down direction as an example.

[0063] As Figure 1 and Figure 2As shown, the intermediate member 27 has a connecting member 271. The connecting member 271 has, for example, a spring member 2711 that can expand and contract in the vertical direction, a first plunger 2712, and a second plunger 2713. The first plunger 2712 is fixed to one-side end portion 2711A of the spring member 2711. The second plunger 2713 is fixed to the other-side end portion 2711B of the spring member 2711. The spring member 2711, the first plunger 2712, and the second plunger 2713 are formed of a conductive material.

[0064] Two third accommodating members 28 are arranged and disposed in the Y direction. Each of the third accommodating members 28 has a recess 28A that is recessed toward one X1 side, and is formed of a metal having aluminum, for example. Three recesses 28A are arranged and disposed in the Z direction. Each of the second substrates 29 is accommodated in each of the recesses 28A. That is, six second substrates 29 are provided. The third accommodating member 28 has a through-hole 28B that is connected to one X1 side of the recess 28A.

[0065] A third electrode 291 is formed on one side surface 29S1 of the second substrate 29. The second plunger 2713 is brought into contact with the third electrode 291 in the through-hole 28B, and the intermediate member 27 is fixed to the third accommodating member 28. As a result, the spring member 2711 is compressed in the vertical direction, and due to the elastic force of the spring member 2711, the second plunger 2713 abuts against the third electrode 291. Therefore, the conduction state between the second plunger 2713 and the third electrode 291 is stabilized.

[0066] Moreover, each intermediate member 27 is inserted into each second accommodating portion 26B, the first plunger 2712 is brought into contact with the second electrode 232, and the third accommodating member 28 is fixed to the second accommodating member 26. As a result, the spring member 2711 is compressed in the vertical direction, and due to the elastic force of the spring member 2711, the first plunger 2712 abuts against the second electrode 232. Therefore, the conduction state between the first plunger 2712 and the second electrode 232 is stabilized.

[0067] In addition, as Figure 3 shown, a fourth electrode region 292R in which a plurality of fourth electrodes 292 are arranged is disposed on the other side surface 29S2 of each second substrate 29. In each of the substrates 29 on one Y1 side in the Y direction, the fourth electrode region 292R is disposed on one Y1 side in the Y direction. In each of the substrates 29 on the other Y2 side in the Y direction, the fourth electrode region 292R is disposed on the other Y2 side in the Y direction.

[0068] The group of fourth electrodes 292 arranged in each of the fourth electrode regions 292R is electrically connected to each of the plurality of inspection processing units 3 (refer to Figure 1 )). In Figure 3Among them, the number of the inspection and processing units 3 is six, so the number of the fourth electrode regions 292R is also six. The fourth electrode 292 contacts the terminal 3A of the inspection and processing unit 3 (refer to Figure 1 ).

[0069] The third electrode 291 and the fourth electrode 292 are electrically connected through the wiring inside the substrate portion of the second substrate 29. The pitch between the fourth electrodes 292 is determined by the pitch between the terminals 3A of the inspection and processing units 3 and is wider than the pitch between the third electrodes 291.

[0070] That is, the inspection jig 2 includes a connection member 271 extending in the thickness direction of the insulating member 22 and the second substrate 29. The third electrode 291 is disposed on one side surface 29S1 of the second substrate 29. The fourth electrode 292 is disposed on the other side surface 29S2 of the second substrate 29. The third electrode 291 and the fourth electrode 292 are electrically connected. The pitch between the fourth electrodes 292 is wider than the pitch between the third electrodes 291. One end portion 271A of the connection member 271 contacts the second electrode 232. The other end portion 271B of the connection member 271 contacts the third electrode 291.

[0071] Thereby, the pitch between the second electrodes 232 can be changed to the pitch between the fourth electrodes 292 for connection with the inspection and processing unit 3. In addition, the connection member 271 has a spring portion 2711 that can be compressed in the above thickness direction. Thereby, the conduction state between the second electrode 232 and the third electrode 291 can be stabilized.

[0072] With the structure as described above, the contact terminal 11 is electrically connected to the inspection and processing unit 3 via the fifth electrode E5, the wire 24, the first electrode 231, the second electrode 232, the connection member 271, the third electrode 291, and the fourth electrode 292.

[0073] When inspecting the inspection object 10, as Figure 1 shown, one end portion 11A of the contact terminal 11 is brought into contact with the inspection point 10A of the inspection object 10. At this time, since the spring portion of the cylindrical body 111 is compressed in the vertical direction, the one end portion 11A abuts against the inspection point 10A by the elastic force of the spring portion. Thereby, the conduction state between the one end portion 11A and the inspection point 10A is stabilized.

[0074] When inspecting the inspection object 10 in this way, the inspection point 10A and the inspection and processing unit 3 are electrically connected. The inspection and processing unit 3 sequentially outputs inspection signals to the inspection point 10A via the contact terminal 11, and correspondingly obtains inspection signals from the inspection point 10A. Based on these inspection signals, the inspection and processing unit 3 detects the presence or absence of conduction between the inspection points 10A, etc., and inspects the presence or absence of open circuits or short circuits of the inspection object 10, etc.

[0075] Further, in the case of assuming a structure in which the contact terminal 11 is directly electrically connected to the electrode of the second substrate 29 via the wire 24, each time the specifications of the inspection object 10 are changed, the second substrate 29 needs to be replaced. In contrast, in the present embodiment, even if the specifications of the inspection object 10 are changed, only the part having the probe head 1, the first accommodating member 21, the insulating member 22, the first substrate 23, the wire 24, the fixing member 25, and the second accommodating member 26 needs to be replaced, and the part having the intermediate member 27, the third accommodating member 28, and the second substrate 29 does not need to be replaced. Therefore, the six large-sized second substrates 29 can be made common, and only the small-sized first substrate 23 needs to be replaced, so that the operation cost can be reduced. In particular, the pitch between the third electrodes 291 is narrower than the pitch between the fourth electrodes 292. Therefore, the pitch between the connecting members 271 and the pitch between the second electrodes 232 can be narrowed, the size of the first substrate 23 can be made smaller than the size of the six second substrates 28, and the operation cost can be reduced.

[0076] In addition, the contact terminal 11 may be a linear inspection contact having an elastic property that can be bent. The contact terminal 11 is supported by the support member 12 in an inclined posture in the vertical direction. Then, by bringing the inspection point 10A into contact with one end portion 11A of the contact terminal 11, the contact terminal 11 is bent. By supporting the contact terminal 11 obliquely, the bending direction can be determined. By using the above-described linear inspection contact, it is possible to cope with the inspection of the inspection object 10 with higher integration.

[0077] <2. Manufacturing Method of Electrical Connection Structure between Contact Terminal and First Substrate>

[0078] Next, with reference to Figures 5 to 11 The manufacturing process of the structure in which the contact terminal 11 and the first substrate 23 in the inspection jig 2 are electrically connected will be described.

[0079] Further, Figures 5 to 11 the process of

[0080] First, the type of the probe head 1 is switched, and the arrangement position of the contact terminals 11 changes according to the type. When the type of the probe head 1 is determined, through holes 221A are formed at positions corresponding to the arrangement of the contact terminals 11 in the bottom 221 of the insulating member 22. In addition, the through holes 221A can be formed in a matrix shape, and the through holes 221A at positions corresponding to the positions of the contact terminals 11 are used. That is, the number of the through holes 221A is larger than the number of the contact terminals 11. Thus, the insulating member 22 having the matrix-shaped through holes 221A can be prepared in advance, and it is not necessary to manufacture the insulating member 22 after the type of the probe head 1 is determined. In addition, since the thickness of the bottom 221 is thin, the through holes 221A are easily formed. Here, as Figure 5 shown, the through hole 221A has an opening 221A1 on one side surface 221S1 of the bottom 221 and an opening 221A2 on the other side surface 221S2 of the bottom 221. Then, as Figure 5 shown, the wire 24 is inserted through the through hole 221A from the side of the opening 221A2.

[0081] Next, as Figure 6 shown, the protruding portion 24T of the wire 24 protruding from the opening 221A1 is straightened. Thus, the wire 24 can be prevented from falling off from the through hole 221A.

[0082] Then, as Figure 7 shown, a process of joining the joint portion 24S in the middle of the portion of the wire 24 led out from the opening 221A2 to the first electrode 231 of the first substrate 23 is performed. Here, the joining is performed using a wire bonding technique. For example, while pressing the joint portion 24S against the first electrode 231, ultrasonic vibration is applied to the joint portion 24S. Thus, friction is generated at the contact surface between the joint portion 24S and the first electrode 231, and the joint portion 24S and the first electrode 231 are joined by frictional heat. At this time, the joint portion 24S and the first electrode 231 are electrically connected.

[0083] In addition, Figure 7 the first electrode 231 shown is a film-like pad protruding from the substrate portion 230 of the first substrate 23, but is not limited thereto, and may also be a pad disposed inside the substrate portion 230 or the like.

[0084] Then, the side of the wire 24 that is not on the through hole 221A side at the joint portion with the first electrode 231 is cut off from the joint portion.

[0085] Then, a fixing member flows into the peripheral portion of the opening portion 221A2 in the concave portion 22A. The fixing member uses a thermosetting resin or a photocurable resin. The fixing member is in a liquid state before curing. After the fixing member flowing into the concave portion 22A flows into the gap between the through-hole 221A and the wire 24, it reaches one side surface 221S1 of the bottom portion 221. By supplying heat or light, the fixing member in the concave portion 22A cures to become the first fixing member 25A (refer to Figure 8 ). By supplying heat or light, the fixing member in the gap between the through-hole 221A and the wire 24 cures to become the second fixing member 25B (refer to Figure 8 ). By supplying heat or light, the fixing member on one side surface 221S1 cures to become the third fixing member 25C (refer to Figure 8 ).

[0086] After forming the first fixing member 25A, the second fixing member 25B, and the third fixing member 25C, the bent protruding portion 24T in the wire 24 (refer to Figure 8 ) is cut off by a cutting process. Then, the cut surface of the wire 24 and the third fixing member 25C are polished. Thus, as Figure 9 shows, the end surface 241 of the polished wire 24 is flush with one side surface 221S1 of the bottom portion 221. In the state shown in Figure 9 , the fixing member 25 is formed by the first fixing member 25A and the second fixing member 25B.

[0087] In addition, in the above, the third fixing member 25C is removed by polishing, but the third fixing member 25C may not be removed and the first fixing member 25A may be removed, or both the first fixing member 25A and the third fixing member 25C may be removed. Also, in Figure 9 , both the first fixing member 25A and the second fixing member 25B are provided, but either the first fixing member 25A or the second fixing member 25B may be removed.

[0088] Next, as Figure 10 shows, the end surface 24TS of the wire 24 is positioned inside the through-hole 221A closer to the inside than the opening portion 221A1 by etching. Then, nickel plating is performed on such an end surface 24TS to form a first metal layer. The front end of the first metal layer is positioned at a position protruding from the opening portion 221A1. Then, the front end of the first metal layer is polished to be flush with one side surface 221S1.

[0089] Next, gold plating is performed on the first metal layer to form a second metal layer. Thus, as Figure 11As shown, one end portion 24A of the wire 24 is disposed in the through-hole 221A, and a first metal layer M1 and a second metal layer portion M2 are sequentially stacked on one X1 side of the end face 24TS of the one end portion 24A. The fifth electrode E5 is constituted by the end face 24TS, the first metal layer M1, and the second metal layer M2. The other end portion 11B of the contact terminal 11 contacts the second metal layer M2. That is, the contact terminal 11 is electrically connected to the end face 24TS via the second metal layer M2 and the first metal layer M1. That is, the contact terminal 11 is electrically connected to the wire 24.

[0090] In addition, the second metal layer M2 may not be formed, and the fifth electrode E5 may be constituted by the end face 24TS and the first metal layer M1. Alternatively, the first metal layer M1 may not be formed, and the fifth electrode E5 may be constituted by the end face 24TS and the second metal layer M2. Alternatively, neither the first metal layer M1 nor the second metal layer M2 may be formed, and the fifth electrode E5 may be constituted by the end face 24TS.

[0091] Alternatively, instead of performing the etching process, at least one of the first metal layer M1 and the second metal layer M2 may be formed on the end face 241 (see Figure 9 ). Alternatively, instead of performing the etching process, the first metal layer M1 and the second metal layer M2 may not be formed on the end face 241. Alternatively, Figure 8 in the state of

[0092] the protruding portion 24T may be cut, and the cut surface may be set as the fifth electrode E5 without being polished.

[0093] Thus, according to the present embodiment, when the arrangement position of the contact terminal 11 is determined, the through-hole 221A is formed in the insulating member 22 according to the position of the contact terminal 11, one end portion of the wire 24 is disposed in the through-hole 221A, and the other end portion of the wire 24 is connected to the first substrate 23. The first substrate 23 and the insulating member 22 can be prepared in advance. In addition, the processing of the insulating member 22 is completed by forming the through-hole 221A. Moreover, by providing the concave portion 22A, the thickness of the bottom portion 221 of the insulating member 2 is thinned, so that the through-hole 221A can be easily formed. Therefore, it is possible to shorten the manufacturing time of the inspection point 10A of the inspection object 10, and further the manufacturing time of the inspection jig 2 after the arrangement position of the contact terminal 11 is determined. In addition, as described above, in the case where the insulating member 22 in which the matrix-shaped through-holes 221A are formed can be prepared in advance, the manufacturing time can be further shortened.

[0094] Thus, the inspection device 5 of the present embodiment includes an inspection jig 2 and an inspection processing unit 3 electrically connected to the first electrode 231. Thereby, the manufacturing efficiency of the inspection jig for electrically connecting the inspection object 10 and the inspection processing unit 3 can be improved.

[0095] In addition, the inspection jig 2 includes a fixing member 25. The fixing member 25 is disposed in at least one of the concave portion 22A and the through hole 221A, and fixes a part of the wire 24 to the insulating member 22. Thereby, the wire 24 can be prevented from coming off the insulating member 22.

[0096] In addition, the fixing member 25 includes a thermosetting resin or a photocurable resin. Since the thermosetting resin and the photocurable resin are liquid before curing, they easily flow into the gap between the through hole 221A and the wire 24. In addition, when the fixing member 25 is disposed in the concave portion 22A, leakage of the liquid thermosetting resin or photocurable resin to the outside of the insulating member 22 can be suppressed.

[0097] In addition, the fixing member 25 is not limited to the above, and may include a thermoplastic resin or an adhesive. In addition, the fixing member 25 is not essential, and the wire 24 may be fixed to the through hole 221A by press-fitting.

[0098] In addition, the end face 24TS of one end portion 24A of the wire 24 is located inside the through hole 221A. A first metal layer M1 is provided on the end face 24TS. The first metal layer M1 is formed of, for example, nickel and has a higher hardness than copper, which is the conductor of the wire 24 as an enameled wire. That is, the first metal layer M1 has a higher hardness than the wire 24. Since the first metal layer M1 is formed by plating in the through hole 221A, it is easy to increase the thickness of the first metal layer M1. If the thickness of the first metal layer M1 having a higher hardness than the wire 24 increases, wear of the first metal layer M1 can be suppressed and the wire 24 can be prevented from being exposed.

[0099] Furthermore, a second metal layer M2 is connected to the first metal layer M1. Thereby, the surface of the first metal layer M1 is covered by the second metal layer M2, and thus corrosion of the first metal layer M1 can be suppressed.

[0100] <3. Others>

[0101] The embodiments of the present invention have been described above, but various modifications can be made to the embodiments as long as they are within the scope of the gist of the present invention.

[0102] Industrial applicability

[0103] The present invention can be used for electrical inspection of various inspection objects.

[0104] Reference signs

[0105] 1 - Probe head, 11 - Contact terminal, 111 - Cylindrical body, 112 - First conductor, 113 - Second conductor, 12 - Support member, 2 - Inspection jig, 21 - First accommodation member, 22 - Insulating member, 221 - Bottom, 221A - Through hole, 22A - Recess, 23 - First substrate, 231 - First electrode, 232 - Second electrode, 24 - Lead wire, 25 - Fixing member, 26 - Second accommodation member, 27 - Intermediate member, 271 - Connecting member, 28 - Third accommodation member, 29 - Second substrate, 291 - Third electrode, 292 - Fourth electrode, 3 - Inspection processing unit, 5 - Inspection device, 10 - Object to be inspected, E5 - Fifth electrode, M1 - First metal layer, M2 - Second metal layer, J - Central axis.

Claims

1. An inspection fixture, characterized in that, it includes: a plate-shaped insulating member having a recess; a first substrate having a first electrode and a second electrode electrically connected to the first electrode; a wire electrically connected to a contact terminal; and a plate-shaped housing member mounted on the first substrate and having a through-hole and a housing portion penetrating in the thickness direction, the first electrode is exposed through the through-hole, the second electrode is exposed through the housing portion, a through-hole penetrating the bottom of the recess is provided in the insulating member, one end portion of the wire is disposed in the through-hole, the other end portion of the wire is connected to the first electrode.

2. The inspection fixture according to claim 1, characterized in that, it further includes a fixing member disposed in at least one of the recess and the through-hole and fixing a part of the wire to the insulating member.

3. The inspection fixture according to claim 2, characterized in that, the fixing member includes a thermosetting resin or a photocuring resin.

4. The inspection fixture according to claim 1, characterized in that, the end face of the one end portion of the wire is located inside the through-hole, a first metal layer is provided on the end face, the first metal layer is harder than the wire.

5. The inspection fixture according to claim 4, characterized in that, a second metal layer is connected to the first metal layer.

6. The inspection fixture according to claim 1, characterized in that, the wire has an insulating coating.

7. The inspection fixture according to claim 1, characterized in that, the first substrate has a portion disposed on the recess side of the insulating member and overlapping the insulating member when viewed in the thickness direction of the insulating member.

8. The inspection fixture according to claim 7, characterized in that, it further includes a housing member having a first housing portion formed with a recess for housing the insulating member.

9. The inspection fixture according to claim 1, characterized in that, the number of the first electrodes of the first substrate is larger than the number of the wires.

10. The inspection fixture according to claim 1, characterized in that, in the thickness direction of the insulating member, the side of the recess of the recess is set as one side, the first substrate is disposed on the other side of the insulating member, the first substrate has a substrate through-hole penetrating in the thickness direction, the wire is disposed in the substrate through-hole, when viewed in a plan view from one side, the wire extends from the first electrode radially inward to the substrate through-hole.

11. The inspection fixture according to claim 1, characterized in that, in the thickness direction of the insulating member, the side of the recess of the recess is set as one side, the second electrode is disposed on the other side surface of the first substrate.

12. The inspection fixture according to claim 11, characterized in that, it further includes: a connecting member extending in the thickness direction; and a second substrate, a third electrode is disposed on one side surface of the second substrate, a fourth electrode is disposed on the other side surface of the second substrate, The third electrode and the fourth electrode are electrically connected. The distance between the fourth electrodes is wider than the distance between the third electrodes. One end portion of the connecting member contacts the second electrode. The other end portion of the connecting member contacts the third electrode.

13. The inspection jig according to claim 12, wherein, the connecting member has a spring portion that can be compressed in the thickness direction.

14. The inspection jig according to claim 1, wherein, it further includes a contact terminal electrically connected to the wire.

15. An inspection device, wherein, it includes: the inspection jig according to any one of claims 1 to 14; and an inspection processing unit electrically connected to the first electrode.

Images