Tool changing device and adjustment method of tool changing device

Abstract

Provided are a tool replacement device and an adjustment method for the tool replacement device, which can properly hold a cutting tool. The tool replacement device replaces a cutting tool that is fixed to the front end of a spindle of a cutting device and cuts a workpiece, and comprises: a tool storage portion, which has a movable storage portion for storing the cutting tool on the front side of a transparent support member; a conveying unit, which has a holding portion for holding the cutting tool and a moving mechanism for moving the holding portion between the storage portion and the spindle to convey the cutting tool; a camera, which is arranged on the back side of the support member and photographs the holding portion positioned on the front side of the support member through the support member; a control unit, which has an action control portion for controlling the actions of the tool storage portion and the conveying unit and a position registration portion for registering the positions of the storage portion and the holding portion when the cutting tool is loaded and unloaded from the tool storage portion, the storage portion having a first marking portion that can be photographed by the camera, and the holding portion having a second marking portion that can be photographed by the camera.

Description

Technical Field

[0001] The present invention relates to a tool changing device for replacing a cutting tool mounted on a cutting device and an adjustment method for the tool changing device. Background Art

[0002] In the manufacturing process of device chips, a wafer is used in which devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are respectively formed in a plurality of regions divided by a plurality of mutually intersecting dicing lines (scribe lanes). By dicing the wafer along the dicing lines, a plurality of device chips each having a device can be obtained. The device chips are mounted on various electronic devices such as mobile phones and personal computers.

[0003] In the dicing of workpieces represented by the above-mentioned wafers, a cutting device is used. The cutting device includes: a chuck table that holds the workpiece; and a cutting unit that performs cutting on the workpiece. The cutting unit has a spindle that fixes a ring-shaped cutting tool for dicing the wafer, and the cutting tool is fixed to the front end of the spindle by a nut. By rotating the cutting tool mounted on the cutting unit and cutting into the workpiece, the workpiece is cut and diced.

[0004] Since the cutting tool is worn due to cutting of the workpiece, it needs to be replaced regularly. When replacing the cutting tool, first, the nut that fixes the cutting tool is loosened and removed, and thus the used cutting tool is removed. Then, a replacement cutting tool is mounted on the front end of the spindle, and the replacement cutting tool is fixed using the nut. When manually performing this cutting tool replacement operation, it takes time and effort, and the cutting tool and the nut may accidentally fall during the operation. Therefore, attempts have been made to automatically replace the cutting tool.

[0005] A tool changing device that automatically replaces a cutting tool is disclosed in Patent Document 1. The tool changing device has a mechanism (tool loading and unloading member) for loading and unloading the cutting tool and a mechanism (nut loading and unloading member) for loading and unloading the nut for fixing the cutting tool to the spindle. In addition, a position adjustment jig for aligning the tool changing device with the spindle is disclosed in Patent Document 2.

[0006] Patent Document 1: Japanese Patent Laid-Open No. 6-326186

[0007] Patent Document 2: Japanese Patent Laid-Open No. 2016-144838

[0008] The tool changing device has a tool holding part that holds a used cutting tool fixed to the front end of the spindle and a replacement cutting tool (unused cutting tool) stored in a specified tool storage part. For example, the tool holding part holds the cutting tool by clamping the cutting tool with a plurality of holding members (holding claws).

[0009] When replacing the cutting tool, first, the tool holding part holds the replacement cutting tool stored in the tool storage part. At this time, if the alignment between the tool holding part and the tool storage part is not accurately performed, it is difficult to properly hold the replacement cutting tool with the tool holding part.

[0010] In addition, sometimes a tool holding part having a mechanism for attracting and holding the cutting tool is used instead of the tool holding part that holds the cutting tool with a plurality of holding members. Since this tool holding part can attract any position of the cutting tool, even if there is a slight error in the alignment between the tool holding part and the tool storage part, the replacement cutting tool can be attracted and held. On the other hand, in a state where the replacement cutting tool is attracted and held by the tool holding part, the positional relationship between the replacement cutting tool and the tool holding part is likely to deviate.

[0011] When there is a deviation in the position of the replacement cutting tool relative to the tool holding part, when the replacement cutting tool is mounted on the spindle, the positional relationship between the replacement cutting tool and the spindle also deviates. As a result, when the replacement cutting tool is brought close to the spindle, sometimes the cutting tool and the spindle come into inappropriate contact, causing damage to the cutting tool or the spindle, or debris of the cutting tool adheres to the spindle, hindering the cutting tool replacement operation. Summary of the Invention

[0012] The present invention has been completed in view of the above problems, and an object thereof is to provide a tool changing device capable of properly holding a cutting tool and an adjustment method for the tool changing device.

[0013] According to one aspect of the present invention, there is provided an adjustment method for a tool changing device that replaces a cutting tool fixed to the front end of a spindle of a cutting device and cuts a workpiece. The tool changing device includes: a tool storage unit having a movable storage unit for storing the cutting tool on the front side of a transparent support member; a transfer unit having a holding unit for holding the cutting tool and a moving mechanism for moving the holding unit between the storage unit and the spindle to transfer the cutting tool; a camera disposed on the back side of the support member for photographing the holding unit positioned on the front side of the support member through the support member; and a control unit having an operation control unit and a position registration unit. The operation control unit controls the operations of the tool storage unit and the transfer unit, and the position registration unit registers the positions of the storage unit and the holding unit when loading and unloading the cutting tool with respect to the tool storage unit. The storage unit has a first marking portion that can be photographed by the camera, and the holding unit has a second marking portion that can be photographed by the camera. The adjustment method for the tool changing device includes the following steps: a registration step of obtaining an image including the first marking portion and the second marking portion by photographing the first marking portion with the camera and photographing the second marking portion through the support member, and registering the positions of the storage unit and the holding unit when the first marking portion and the second marking portion are arranged in a specified positional relationship as a specified position in the position registration unit according to the image; a determination step of moving the storage unit and the holding unit so as to be arranged at the specified position registered in the position registration unit, and determining whether the first marking portion and the second marking portion are arranged in the specified positional relationship; and an overwrite step of, when it is determined in the determination step that the first marking portion and the second marking portion are not arranged in the specified positional relationship, adjusting the positions of the storage unit or the holding unit so that the first marking portion and the second marking portion are arranged in the specified relationship, and then overwriting the positions of the storage unit and the holding unit as the specified position in the position registration unit.

[0014] In addition, preferably, the holding unit is a suction holding unit that suction holds the cutting tool or a gripping unit that grips the cutting tool.

[0015] Further, according to another aspect of the present invention, there is provided a tool changing device for replacing a cutting tool that is fixed to the front end of a spindle of a cutting device and cuts a workpiece, wherein the tool changing device includes: a tool storage unit having a movable storage unit for storing the cutting tool on the front side of a transparent support member; a transfer unit having a holding unit for holding the cutting tool and a moving mechanism for moving the holding unit between the storage unit and the spindle to transfer the cutting tool; a camera disposed on the back side of the support member for photographing the holding unit positioned on the front side of the support member through the support member; and a control unit having an operation control unit and a position registration unit, the operation control unit controlling the operations of the tool storage unit and the transfer unit, the position registration unit registering the positions of the storage unit and the holding unit when loading and unloading the cutting tool relative to the tool storage unit. The storage unit has a first marking portion that can be photographed by the camera, and the holding unit has a second marking portion that can be photographed by the camera.

[0016] Further, preferably, the holding unit is a suction holding unit that suction holds the cutting tool or a gripping unit that grips the cutting tool.

[0017] The tool changing device according to one aspect of the present invention includes: a storage unit provided with a first marking portion that can be photographed by a camera; and a holding unit provided with a second marking portion that can be photographed by the camera. Thus, it is possible to determine whether the first marking portion and the second marking portion are arranged in a specified positional relationship based on the image obtained by the camera, and thereby confirm whether the positional relationship between the storage unit and the holding unit is appropriate.

[0018] Moreover, when it is determined that the first marking portion and the second marking portion are not arranged in a specified positional relationship, the positional relationship between the storage unit and the holding unit can be adjusted, and the positions of the storage unit and the holding unit at this time are overwritten as specified positions in the registration unit. Thus, the appropriate positional relationship between the storage unit and the holding unit is periodically updated, and the state in which the cutting tool stored in the storage unit can be appropriately held by the holding unit is maintained. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a perspective view showing a cutting device.

[0020] Figure 2 is a perspective view showing a cutting unit.

[0021] Figure 3 is a perspective view showing a tool changing device.

[0022] Figure 4 is a perspective view showing a tool storage unit.

[0023] Figure 5 It is a perspective view showing a transfer unit.

[0024] Figure 6 It is a perspective view of a tool changing device showing a state where a tool storage unit and a tool suction unit face each other.

[0025] Figure 7 It is a front view of the tool changing device in the registration step.

[0026] Figure 8 (A) thereof is an image diagram showing an image obtained in the registration step, Figure 8 (B) thereof is an image diagram showing an image including a first marking portion and a second marking portion that do not overlap each other.

[0027] Figure 9 (A) thereof is an image diagram showing an image obtained in the determination step, Figure 9 (B) thereof is an image diagram showing an image including a first marking portion and a second marking portion arranged in a prescribed positional relationship.

[0028] Figure 10 It is a perspective view showing a tool loading and unloading unit.

[0029] Reference Numeral Explanation

[0030] 11: Workpiece; 13: Tape (dicing tape); 15: Frame; 2: Cutting device; 4: Base; 4a: Opening; 4b: Opening; 6: Cassette holding table; 8: Cassette; 10: Moving mechanism; 10a: Moving table; 12: Dust and drip-proof cover; 14: Chuck table (holding table); 14a: Holding surface; 16: Fixture; 18: Guide rail; 20: First support structure; 22: Track; 24: Moving mechanism; 26: Holding unit; 26a: Gripping mechanism; 28: Track; 30: Moving mechanism; 32: Holding unit; 34: Second support structure; 36A, 36B: Moving mechanism; 38A, 38A: Cutting unit; 40: Housing; 42: Spindle (rotating shaft); 44: Mounting seat; 46: Flange portion; 46a: Front surface; 46b: Protrusion; 46c: Front end surface; 48: Support shaft; 48a: Threaded portion; 48b: Recess; 50: Cutting tool; 52: Base; 52a: Opening; 52b: Protrusion; 54: Cutting edge; 56: Nut; 56a: Opening; 56b: Through hole; 60: Camera (imaging unit); 62: Cleaning unit; 62a: Rotary table; 62b: Nozzle; 64: Tool changing device (tool changing mechanism); 66: Control unit (control section); 66a: Position registration section (position storage section); 66b: Motion control section; 70A, 70B: Tool storage section (tool rack); 72: Support structure; 74: Rotating shaft; 76: Support member; 76a: Front surface; 76b: Rear surface; 76c: Opening; 78: Storage section; 80: Support member; 80a: Front surface; 82: Boss portion (support shaft); 84: First marking section; 86: Camera (imaging unit); 88: Transfer unit (transfer mechanism); 90: Moving mechanism; 90a: Base; 92: Ball screw; 94: Moving block; 96: Support member; 96a: Upper wall portion; 96b: Side wall portion; 96c: Support portion; 98: Loading and unloading unit (loading and unloading mechanism); 100: Tool loading and unloading unit; 102: Motor; 102a: Housing; 102b: Pulley; 104: Power transmission mechanism; 104a: Housing; 104b: Pulley; 104c: Through hole; 106: Shaft; 108: Connecting member; 110A, 110B: Tool holding unit; 112: Support member; 114A, 114B: Tool suction unit; 116: Holding section (suction holding section); 116a: Holding surface; 116b: Groove (recess); 118: Second marking section; 130: Nut loading and unloading unit; 132: Motor; 132a: Housing; 132b: Pulley; 134: Power transmission mechanism; 134a: Housing; 134b: Pulley; 134c: Through hole; 136: Shaft; 138: Connecting member; 140A, 140B: Nut holding unit; 142: Rotating member; 142a: Front surface; 144: Holding pin; 146: Gripping member; 146a: Claw portion; 148: Cover; 160: Image; 162: Image;170A, 170B: Tool holding unit; 172: Support member; 174A, 174B: Tool gripping unit; 176: Holding part (gripping part); 176a: Front face; 178: Positioning pin; 180: Gripping member; 180a: Contact part; 182: Second marking part; Detailed implementation mode

[0031] Hereinafter, an implementation mode of one aspect of the present invention will be described with reference to the drawings. First, a structural example of the cutting device of the present implementation mode will be described. Figure 1 is a perspective view showing the cutting device 2. In addition, in Figure 1 the X-axis direction (machining feed direction, first horizontal direction, front-rear direction) and the Y-axis direction (indexing feed direction, second horizontal direction, left-right direction) are perpendicular directions to each other. In addition, the Z-axis direction (vertical direction, up-down direction, height direction) is a direction perpendicular to the X-axis direction and the Y-axis direction.

[0032] The cutting device 2 has a base 4 that supports or houses each structural element constituting the cutting device 2. An opening 4a is formed at the front corner of the base 4, and a cassette holding table 6 that is lifted and lowered by a lifting mechanism (not shown) is provided inside the opening 4a. A cassette 8 capable of accommodating a plurality of workpieces 11 is disposed on the upper surface of the cassette holding table 6. In addition, in Figure 1 the outline of the cassette 8 is indicated by a two-dot chain line.

[0033] The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The front side of the workpiece 11 is divided into a plurality of regions by a plurality of dividing predetermined lines (scribe lanes) arranged in a lattice pattern in a crosswise manner, and devices such as ICs and LSIs are formed in each region. When the workpiece 11 is cut and divided along the dividing predetermined lines by the cutting device 2, a plurality of device chips each having a device can be obtained.

[0034] A circular tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is adhered to the back surface (lower surface) side of the workpiece 11. As the tape 13, a sheet material having a film-like base material formed in a circular shape and an adhesive layer (paste layer) provided on the base material can be used. For example, the base material is made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate, and the adhesive layer is made of an epoxy-based, acrylic-based, or rubber-based adhesive or the like. In addition, the adhesive layer may also use an ultraviolet curable resin that is cured by irradiation with ultraviolet rays.

[0035] In addition, the outer peripheral portion of the belt 13 is adhered to the annular frame 15, which is made of metal or the like and has a circular opening in the central portion. The diameter of the opening of the frame 15 is larger than the diameter of the workpiece 11, and the workpiece 11 is disposed inside the opening of the frame 15. When the belt 13 is adhered to the workpiece 11 and the frame 15, the workpiece 11 is supported by the frame 15 via the belt 13. Then, the workpiece 11 supported by the frame 15 is housed in the cassette 8.

[0036] In addition, there are no restrictions on the material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may also be a wafer made of a semiconductor other than silicon (such as GaAs, InP, GaN, SiC, etc.), ceramic, resin, metal, etc. In addition, there are no restrictions on the type, number, shape, structure, size, arrangement, etc. of the devices formed on the workpiece 11, and no devices may be formed on the workpiece 11.

[0037] A rectangular opening 4b whose longitudinal direction is along the X-axis direction is provided on the side of the opening 4a. Inside the opening 4b, a ball screw type moving mechanism 10 and a corrugated dust and drip-proof cover 12 are disposed. The dust and drip-proof cover 12 covers the upper portion of the moving mechanism 10 and can expand and contract along the X-axis direction. The moving mechanism 10 has a flat moving table 10a and moves the moving table 10a along the X-axis direction.

[0038] A chuck table (holding table) 14 for holding the workpiece 11 is provided on the moving table 10a. The chuck table 14 is connected to a rotational drive source such as a motor (not shown) and rotates about a rotation axis substantially parallel to the Z-axis direction. In addition, the chuck table 14 moves (machining feed) along the X-axis direction together with the moving table 10a via the moving mechanism 10.

[0039] The upper surface of the chuck table 14 constitutes a holding surface 14a for holding the workpiece 11. The holding surface 14a is connected to an attracting source such as an ejector via an attracting path (not shown), a valve (not shown), etc. formed inside the chuck table 14. In addition, a plurality of jigs 16 are provided around the chuck table 14, and the plurality of jigs 16 grip and fix the frame 15 supporting the workpiece 11.

[0040] Above the opening 4b, a pair of guide rails 18 arranged along the Y-axis direction is provided. The pair of guide rails 18 has a supporting surface for supporting the frame 15 supporting the workpiece 11 from below and a side surface substantially perpendicular to the supporting surface, and moves in a manner of approaching and separating from each other while maintaining a state substantially parallel to the Y-axis direction. The pair of guide rails 18 sandwiches the frame 15 with the side surfaces, thereby disposing the workpiece 11 and the frame 15 at a prescribed position (alignment).

[0041] Above the base 4, a gate-shaped first support structure 20 is arranged across the opening 4b. A rail 22 is fixed along the Y-axis direction on the front surface side (rail 18 side) of the first support structure 20. The rail 22 is connected to a holding unit 26 that holds the workpiece 11 via a moving mechanism 24.

[0042] The moving mechanism 24 moves the holding unit 26 along the rail 22 in the Y-axis direction. In addition, the moving mechanism 24 has a cylinder, and a rod that moves up and down along the Z-axis direction is built in the cylinder. The holding unit 26 is fixed to the lower end of the rod of the cylinder.

[0043] The holding unit 26 holds the frame 15 aligned by a pair of rails 18 and transports it to the chuck table 14. For example, the holding unit 26 has a plurality of suction pads that suck and hold the upper surface side of the frame 15 that supports the workpiece 11. By sucking the frame 15 with the suction pads, the workpiece 11 is held by the holding unit 26.

[0044] In addition, a holding mechanism 26a for holding the end of the frame 15 is provided at the end of the holding unit 26 on the opening 4a side (box holding table 6 side). In a state where the frame 15 stored in the box 8 is held by the holding mechanism 26a, by moving the holding unit 26 in the Y-axis direction away from the box 8, the frame 15 is pulled out from the box 8 onto a pair of rails 18. In addition, in a state where the frame 15 arranged on a pair of rails 18 is held by the holding mechanism 26a, by moving the holding unit 26 in the Y-axis direction toward the box 8 side, the frame 15 is stored in the box 8.

[0045] In addition, a rail 28 is fixed along the Y-axis direction on the front surface side of the first support structure 20. The rail 28 is connected to a holding unit 32 that holds the workpiece 11 via a moving mechanism 30.

[0046] The moving mechanism 30 moves the holding unit 32 along the rail 28 in the Y-axis direction. In addition, the moving mechanism 30 has a cylinder, and a rod that moves up and down along the Z-axis direction is built in the cylinder. The holding unit 32 is fixed to the lower end of the rod of the cylinder.

[0047] For example, the holding unit 32 has a plurality of suction pads that suck and hold the upper surface side of the frame 15 that supports the workpiece 11. By sucking the frame 15 with the suction pads, the workpiece 11 is held by the holding unit 32.

[0048] A gantry-shaped second support structure 34 is disposed behind the first support structure 20 so as to straddle the opening 4b. A pair of moving mechanisms 36A and 36B are fixed to both end portions on the front surface side (the first support structure 20 side) of the second support structure 34. A cutting unit 38A is fixed to the lower portion of the moving mechanism 36A, and a cutting unit 38B is fixed to the lower portion of the moving mechanism 36B.

[0049] The moving mechanism 36A is a ball screw type moving mechanism that moves the cutting unit 38A in the Y-axis direction and the Z-axis direction. Through the moving mechanism 36A, the positions of the cutting unit 38A in the Y-axis direction and the Z-axis direction are controlled. In addition, the moving mechanism 36B is a ball screw type moving mechanism that moves the cutting unit 38B in the Y-axis direction and the Z-axis direction. Through the moving mechanism 36B, the positions of the cutting unit 38B in the Y-axis direction and the Z-axis direction are controlled.

[0050] Figure 2 It is a perspective view showing the cutting unit 38A. The cutting unit 38A has a cylindrical housing 40, and a cylindrical main shaft (rotating shaft) 42 arranged in the Y-axis direction is accommodated in the housing 40. The front end portion (one end side) of the main shaft 42 protrudes to the outside of the housing 40, and a mounting base 44 is fixed to the front end portion. In addition, a rotation drive source such as a motor (not shown) that rotates the main shaft 42 is connected to the base end portion (the other end side) of the main shaft 42.

[0051] The mounting base 44 has a disk-shaped flange portion 46 and a cylindrical support shaft 48 protruding from the central portion of the front surface 46a of the flange portion 46. A ring-shaped convex portion 46b protruding from the front surface 46a is provided on the outer peripheral portion of the flange portion 46 on the front surface 46a side. The front end surface 46c of the convex portion 46b is formed substantially parallel to the front surface 46a.

[0052] A threaded portion 48a is formed on the outer peripheral surface of the support shaft 48. In addition, a concave portion 48b is formed in the central portion of the front end surface of the support shaft 48. A ring-shaped cutting tool 50 for cutting the workpiece 11 is mounted on the support shaft 48.

[0053] The cutting tool 50 has a ring-shaped base 52 made of metal or the like and a ring-shaped cutting edge 54 formed along the outer edge portion of the base 52. A cylindrical opening 52a penetrating the base 52 in the thickness direction is provided in the central portion of the base 52. In addition, a ring-shaped convex portion 52b protruding in the thickness direction of the base 52 is formed around the opening 52a of the base 52.

[0054] The cutting edge 54 is formed, for example, by fixing abrasive grains made of diamond or the like using a nickel plating layer. However, the materials of the abrasive grains and the bonding material of the cutting edge 54 are not limited, and can be appropriately selected according to the material of the workpiece 11 and the processing purpose.

[0055] A ring-shaped nut 56 for fixing the cutting tool 50 is fastened to the threaded portion 48a of the support shaft 48. A circular opening 56a corresponding to the diameter of the support shaft 48 is formed in the central portion of the nut 56. A thread groove corresponding to the threaded portion 48a formed in the support shaft 48 is formed in the opening 56a. In addition, a plurality of through holes 56b penetrating the nut 56 in the thickness direction are formed in the nut 56 at substantially equal intervals along the circumferential direction of the nut 56.

[0056] The cutting tool 50 is mounted on the mounting seat 44 in such a manner that the support shaft 48 is inserted into the opening 52a of the base 52. Then, in a state where the cutting tool 50 is mounted on the mounting seat 44, when the nut 56 is screwed and fastened to the threaded portion 48a of the support shaft 48, the cutting tool 50 is clamped by the front end face 46c of the flange portion 46 and the nut 56. Thus, the cutting tool 50 is fixed to the front end portion of the main shaft 42.

[0057] In addition, the structure of the cutting unit 38A has been described here, but the structure of the cutting unit 38B is also the same as that of the cutting unit 38A. Moreover, the cutting tool 50 mounted on the cutting unit 38A and the cutting tool 50 mounted on the cutting unit 38B are arranged to face each other.

[0058] As Figure 1 shown, cameras (imaging units) 60 are respectively provided at positions adjacent to the cutting units 38A and 38B, and the cameras 60 image the workpiece 11 held by the chuck table 14 and the like. For example, the camera 60 is composed of a visible light camera having an imaging element that receives visible light and converts it into an electrical signal, or an infrared camera having an imaging element that receives infrared light and converts it into an electrical signal. For example, based on the image obtained by imaging the workpiece 11 on the chuck table 14 using the camera 60, alignment of the workpiece 11 with the cutting units 38A and 38B is performed.

[0059] A cleaning unit 62 is arranged on the side of the opening 4b (the side opposite to the opening 4a). The cleaning unit 62 has a rotary table 62a that holds the workpiece 11 in a cylindrical cleaning space. In addition, the rotary table 62a is connected to a rotary drive source (not shown) such as a motor that rotates the rotary table 62a about a rotation axis substantially parallel to the Z-axis direction.

[0060] Above the rotary table 62a, a nozzle 62b is disposed, and the nozzle 62b sprays a cleaning fluid (e.g., a mixed fluid formed by mixing water and air) toward the workpiece 11 held by the rotary table 62a. While rotating the rotary table 62a that holds the workpiece 11, the fluid is sprayed from the nozzle 62b toward the workpiece 11, thereby cleaning the workpiece 11.

[0061] On the back side (rear side) of the second support structure 34, a tool changing device (tool changing mechanism) 64 for changing the cutting tool 50 is provided. The tool changing device 64 replaces the used cutting tool 50 mounted on the cutting units 38A and 38B with a replacement cutting tool 50 (unused cutting tool 50), and also performs the loading and unloading of a nut 56 (see Figure 2 ) for fixing the cutting tool 50 to the front end of the spindle 42. In addition, the details of the structure of the tool changing device 64 will be described later.

[0062] Each structural element (the moving mechanism 10, the chuck table 14, the fixture 16, the guide rail 18, the moving mechanism 24, the holding unit 26, the moving mechanism 30, the holding unit 32, the moving mechanisms 36A and 36B, the cutting units 38A and 38B, the camera 60, the cleaning unit 62, the tool changing device 64, etc.) constituting the cutting device 2 is respectively connected to a control unit (control section) 66. The control unit 66 generates control signals for controlling the operations of the respective structural elements of the cutting device 2, thereby controlling the operation of the cutting device 2.

[0063] For example, the control unit 66 is constituted by a computer, and includes: a processing section that performs various processes (operations, etc.) required for the operation of the cutting device 2; and a storage section that stores various information (data, programs, etc.) for the processing of the processing section. The processing section is configured to include a processor such as a CPU (Central Processing Unit). In addition, the storage section is configured to include various memories constituting a main storage device, an auxiliary storage device, etc.

[0064] The cutting process of the workpiece 11 is performed by the above-described cutting device 2. When machining the workpiece 11, first, the workpiece 11 to be machined is accommodated in the cassette 8. Then, the cassette 8 is placed on the upper surface of the cassette holding table 6.

[0065] The workpiece 11 stored in the cassette 8 is taken out of the cassette 8 by the holding unit 26. Specifically, the holding unit 26 moves in the X-axis direction away from the cassette 8 while the holding mechanism 26a holds the end of the frame 15. Thereby, the workpiece 11 is pulled out of the cassette 8 and disposed on the pair of guide rails 18. Then, the workpiece 11 is clamped by the pair of guide rails 18, and thus the alignment of the workpiece 11 is performed.

[0066] Next, the upper surface side of the frame 15 is held by the holding unit 26, and the workpiece 11 is transported onto the chuck table 14. The workpiece 11 is disposed on the chuck table 14 with the tape 13 interposed therebetween. In addition, the frame 15 is fixed by a plurality of jigs 16. In this state, when the negative pressure of the suction source acts on the holding surface 14a, the workpiece 11 is attracted and held by the chuck table 14 with the tape 13 interposed therebetween.

[0067] Then, the cutting tools 50 mounted on the cutting units 38A and 38B rotate and cut into the workpiece 11 to perform cutting on the workpiece 11. For example, the workpiece 11 is cut by the cutting tool 50 along the dividing predetermined line and thus divided into a plurality of device chips.

[0068] When the processing of the workpiece 11 is completed, the upper surface side of the frame 15 is held by the holding unit 32, and the workpiece 11 is transported from the chuck table 14 to the cleaning unit 62. Then, the workpiece 11 is cleaned by the cleaning unit 62.

[0069] When the cleaning of the workpiece 11 is completed, the upper surface side of the frame 15 is held by the holding unit 26 and transported onto the pair of guide rails 18. Then, the frame 15 is clamped by the pair of guide rails 18, and thus the alignment of the workpiece 11 and the frame 15 is performed. After that, the holding unit 26 moves toward the cassette 8 side while the holding mechanism 26a holds the frame 15, and the workpiece 11 is stored in the cassette 8.

[0070] In this way, the workpiece 11 is processed by the cutting device 2. In addition, a program describing a series of operations of the cutting device 2 is stored in the storage unit of the control unit 66. Moreover, when the operator instructs the cutting device 2 to process the workpiece 11, the processing unit of the control unit 66 reads out and executes the program from the storage unit, and sequentially generates control signals for controlling the operations of the respective components of the cutting device 2.

[0071] Here, the cutting tools 50 mounted on the cutting units 38A and 38B are gradually worn due to cutting the workpiece 11, and thus need to be replaced regularly. The replacement of the cutting tools 50 is automatically performed by the tool changing device 64.

[0072] Figure 3is a perspective view showing the tool changing device 64. The tool changing device 64 has a pair of tool storage parts (tool racks) 70A and 70B that hold and store a plurality of cutting tools 50. The tool storage parts 70A and 70B are arranged to face each other along the Y-axis direction. In the tool storage parts 70A and 70B, the used cutting tools 50 for cutting the workpiece 11 and the replacement cutting tools 50 (unused cutting tools 50) are stored respectively.

[0073] The tool storage parts 70A and 70B each have a columnar support structure 72 arranged along the Z-axis direction. For example, the support structure 72 is provided behind the second support structure 34 (refer to Figure 1 ) and fixed to the upper surface of the base 4. However, the installation location of the support structure 72 is not limited.

[0074] A cylindrical rotating shaft 74 arranged along the Y-axis direction is housed in the support structure 72. The front end (one end side) of the rotating shaft 74 protrudes from the side surface of the support structure 72, and a rotation drive source such as a motor (not shown) is connected to the base end (the other end side) of the rotating shaft 74. In addition, a disk-shaped support member 76 is fixed to the front end of the rotating shaft 74. The support member 76 rotates around a rotation axis substantially parallel to the Y-axis direction by the power transmitted from the rotation drive source via the rotating shaft 74.

[0075] Figure 4 is a perspective view showing the tool storage part 70A. In addition, the structure of the tool storage part 70A will be described below, but the tool storage part 70B is also configured in the same way as the tool storage part 70A.

[0076] The support member 76 has a front surface 76a and a back surface 76b that are substantially parallel to each other, and the front end of the rotating shaft 74 is fixed to the back surface 76b side of the support member 76. Moreover, a plurality of movable storage parts 78 for storing the cutting tools 50 are provided on the front surface 76a side of the support member 76.

[0077] Specifically, a plurality of circular openings 76c penetrating the support member 76 in the thickness direction are provided on the support member 76. For example, the plurality of openings 76c are formed at substantially equal intervals along the circumferential direction of the support member 76. And a disk-shaped support member 80 made of a transparent material for supporting the cutting tool 50 is inserted into the opening 76c, and the support member 80 is fixed to the support member 76 inside the opening 76c.

[0078] A cylindrical boss portion (support shaft) 82 protruding from the front surface 80a of the support member 80 is provided at the central portion of the support member 80. For example, the boss portion 82 is made of the same transparent material as the support member 80 and is fixed to the central portion of the support member 80. The boss portion 82 is formed such that its diameter corresponds to the diameter of the opening 52a (refer to Figure 2 ) provided in the base 52 of the cutting tool 50 and can be inserted into the opening 52a of the base 52.

[0079] When the boss portion 82 is inserted into the opening 52a of the base 52, the cutting tool 50 is supported by the front surface 80a of the support member 80 and the boss portion 82. In this way, the storage portion 78 is constituted by the front surface 80a of the support member 80 and the boss portion 82.

[0080] In addition, a first marking portion 84 indicating the position of the storage portion 78 is provided on the storage portion 78, respectively. For example, the first marking portion 84 is a mark in the region (bottom surface portion of the boss portion 82) overlapping with the boss portion 82 on the front surface 80a side of the support member 80. Figure 4 The storage portion 78 with a cross-shaped mark added as the first marking portion 84 is shown.

[0081] In addition, a camera (imaging unit) 86 capable of imaging the first marking portion 84 is provided on the back surface 76b side of the support member 76. For example, the camera 86 is constituted by a visible light camera having an imaging element that receives visible light and converts it into an electrical signal, or an infrared camera having an imaging element that receives infrared light and converts it into an electrical signal, etc., and is fixed to the side surface of the support structure 72.

[0082] The camera 86 is arranged at a position overlapping with the support member 76 in the Y-axis direction and images the storage portion 78 located at a position facing the camera 86. When the storage portion 78 is imaged by the camera 86, the first marking portion 84 is also imaged through the transparent support member 80, and an image showing the first marking portion 84 is obtained.

[0083] In addition, when the support member 76 is rotated, the storage portion 78 moves along the circumferential direction of the support member 76, and the storage portion 78 facing the camera 86 is changed. Thus, the storage portion 78 to be the imaging object of the camera 86 is selected.

[0084] The material of the support member 80 is appropriately selected according to the type of the camera 86. For example, when the camera 86 is a visible light camera, the support member 80 is made of a member that transmits visible light. Specific examples of the material of the support member 80 include plastics, glass (quartz glass, borosilicate glass, etc.). In addition, the boss portion 82 can also use the same material as the support member 80.

[0085] In addition, as long as the first marking portion 84 can be photographed by the camera 86, there are no restrictions on the type and shape of the first marking portion 84. For example, the first marking portion 84 is added by coloring or processing the front surface 80a side of the support member 80. Additionally, the structure of the storage portion 78 itself (e.g., the contour of the opening 76c, the contour of the support member 80, the contour of the boss portion 82, etc.) can be used as the first marking portion 84, thereby replacing the newly provided first marking portion 84.

[0086] In addition, as long as the first marking portion 84 can be photographed by the camera 86, there are no restrictions on the position of the first marking portion 84 either. For example, the first marking portion 84 can also be provided on the back side (the camera 86 side) of the support member 80. However, when the first marking portion 84 is provided on the front surface 80a side (the bottom surface portion of the boss portion 82) of the support member 80, foreign matter is not easily attached to the first marking portion 84, and the first marking portion 84 is not easily removed, so this is preferred.

[0087] Furthermore, instead of providing the opening 76c and the support member 80 on the support member 76, the support member 76 itself can be constituted by a transparent member made of plastic, glass, etc. In this case, a plurality of boss portions 82 protruding from the front surface 76a of the support member 76 are provided, and the storage portion 78 is constituted by the front surface 76a of the support member 76 and the boss portions 82. Moreover, the first marking portion 84 is provided on the front surface 76a side or the back surface 76b side of the support member 76.

[0088] As Figure 3 shown, the tool storage portions 70A and 70B are arranged in a separated state such that the front surface 76a of the support member 76 of the tool storage portion 70A faces the front surface 76a of the support member 76 of the tool storage portion 70B. Moreover, when viewed from the front, a conveying unit (conveying mechanism) 88 for holding and conveying the cutting tool 50 is provided between the tool storage portions 70A and 70B.

[0089] The conveying unit 88 has a moving mechanism 90 that moves a later-described loading and unloading unit (loading and unloading mechanism) 98. The moving mechanism 90 has a plate-shaped base 90a arranged substantially parallel to the X-axis direction and the Y-axis direction. The base 90a is arranged, for example, behind the second support structure 34 (refer to Figure 1 ).

[0090] A ball screw 92 arranged along the X-axis direction is fixed to the lower surface side of the base 90a. Additionally, a rectangular parallelepiped-shaped moving block 94 is screwed onto the ball screw 92, and a support member 96 formed in a "C" shape when viewed from the side is fixed to the lower surface side of the moving block 94. The support member 96 supports the loading and unloading unit 98 that performs the loading and unloading of the cutting tool 50 and the nut 56 (refer to Figure 2 ).

[0091] The moving mechanism 90 is connected with a pulse motor (not shown) at the end of the ball screw 92. When the ball screw 92 is rotated by the pulse motor, the loading and unloading unit 98 supported by the supporting member 96 moves along the ball screw 92 in the X-axis direction. Thereby, the position of the loading and unloading unit 98 in the X-axis direction is controlled. In addition, the moving mechanism 90 has a ball screw type Y-axis moving mechanism (not shown) for moving the base 90a in the Y-axis direction. Through this Y-axis moving mechanism, the position of the loading and unloading unit 98 in the Y-axis direction is controlled.

[0092] Figure 5 Fig. shows a perspective view of the loading and unloading unit 98. The supporting member 96 that supports the loading and unloading unit 98 has: a plate-shaped upper wall portion 96a fixed to the lower surface side of the moving block 94; a columnar side wall portion 96b protruding downward from the end portion on the rear side of the upper wall portion 96a; and a plate-shaped supporting portion 96c protruding forward from the lower end portion of the side wall portion 96b and disposed substantially parallel to the upper wall portion 96a. The loading and unloading unit 98 is supported by the supporting portion 96c of the supporting member 96.

[0093] The loading and unloading unit 98 has: a tool loading and unloading unit 100 for loading and unloading the cutting tool 50; and a nut loading and unloading unit 130 for loading and unloading the nut 56 (refer to Figure 2 ) for fixing the cutting tool 50. The tool loading and unloading unit 100 and the nut loading and unloading unit 130 are fixed on the supporting portion 96c of the supporting member 96.

[0094] The tool loading and unloading unit 100 has: a motor 102 constituting a rotational drive source; and a power transmission mechanism 104 connected to the motor 102. The motor 102 and the power transmission mechanism 104 are arranged adjacent to each other along the X-axis direction.

[0095] The motor 102 is formed in a hollow cubic shape and has: a housing 102a that houses structural elements such as a rotor and a stator; and a rotating shaft connected to the rotor and arranged along the Z-axis direction. The front end portion of the rotating shaft of the motor 102 exposes from the upper surface of the housing 102a, and a disk-shaped pulley 102b is fixed to the front end portion of the rotating shaft.

[0096] The power transmission mechanism 104 has: a housing 104a formed in a hollow cubic shape; and a rotating shaft housed in the housing 104a and arranged along the Z-axis direction. The front end portion of the rotating shaft of the power transmission mechanism 104 exposes from the upper surface of the housing 104a, and a disk-shaped pulley 104b is fixed to the front end portion of the rotating shaft.

[0097] A through hole 104c penetrating the housing 104a in the left-right direction (Y-axis direction) is formed in the housing 104a. A cylindrical shaft 106 is inserted into the through hole 104c so as to penetrate the housing 104a, and both end portions of the shaft 106 project from both side surfaces of the housing 104a. The shaft 106 is held in a state where it can rotate about a rotation axis substantially parallel to the Y-axis direction, and is connected to the rotation axis of the power transmission mechanism 104 inside the housing 104a.

[0098] Specifically, a conversion mechanism is provided inside the housing 104a, and the conversion mechanism converts the rotational power of the rotation axis of the power transmission mechanism 104 arranged along the Z-axis direction into the rotational power of the shaft 106 arranged along the Y-axis. This conversion mechanism is constituted by, for example, bevel gears (spiral bevel gears, straight bevel gears, etc.) and hypoid gears.

[0099] The electric motor 102 and the power transmission mechanism 104 are connected by an annular connecting member 108 constituted by a belt, a chain, etc. Specifically, the connecting member 108 is wound so as to be in contact with the side surface of the pulley 102b of the electric motor 102 and the side surface of the pulley 104b of the power transmission mechanism 104, and is oval in a plan view.

[0100] When power is supplied to the electric motor 102, the power of the electric motor 102 is transmitted to the rotation axis of the power transmission mechanism 104 via the pulley 102b, the connecting member 108, and the pulley 104b. In addition, through the conversion mechanism provided inside the housing 104a, the power of the rotation axis of the power transmission mechanism 104 is transmitted to the shaft 106, thereby rotating the shaft 106. In this way, the power of the electric motor 102 is transmitted to the shaft 106 through the power transmission mechanism 104.

[0101] A tool holding unit 110A is fixed to one end side of the shaft 106, and the tool holding unit 110A holds the cutting tool 50 mounted on the cutting unit 38A (refer to Figure 1 ) and the cutting tool 50 newly mounted on the cutting unit 38A. In addition, a tool holding unit 110B is fixed to the other end side of the shaft 106, and the tool holding unit 110B holds the cutting tool 50 mounted on the cutting unit 38B (refer to Figure 1 ) and the cutting tool 50 newly mounted on the cutting unit 38B.

[0102] The tool holding units 110A and 110B each have: a plate-shaped support member 112, which is formed in an oval shape when viewed from the side and is fixed to the front end of the shaft 106; and tool suction units 114A and 114B, which are provided on the surface side of the support member 112 on the side opposite to the power transmission mechanism 104. The tool suction unit 114A is fixed to one end side of the support member 112, and the tool suction unit 114B is fixed to the other end side of the support member 112.

[0103] The tool suction units 114A and 114B each have a cylindrical holding portion (suction holding portion) 116 fixed to the support member 112. The surface of the holding portion 116 on the side opposite to the power transmission mechanism 104 constitutes a circular holding surface 116a for holding the cutting tool 50.

[0104] A ring-shaped groove (recess) 116b is formed along the outer peripheral edge of the holding portion 116 on the holding surface 116a side of the outer peripheral portion of the holding portion 116. The groove 116b is connected to a suction source (not shown) such as an injector via a flow path (not shown), a valve (not shown), etc. formed inside the holding portion 116. In a state where the holding surface 116a of the holding portion 116 is in contact with the convex portion 52b of the base 52 of the cutting tool 50 (refer to Figure 2 ), when the negative pressure of the suction source acts on the groove 116b, the cutting tool 50 is suction-held by the holding portion 116.

[0105] In addition, a second marking portion 118 indicating the position of the holding portion 116 is provided on the holding portion 116. For example, the second marking portion 118 is a mark attached to the center of the holding surface 116a side of the holding portion 116 and can be photographed by a camera 86 (refer to Figure 4 ). Figure 5 The holding portion 116 to which a cross-shaped mark is attached as the second marking portion 118 is shown.

[0106] In addition, as long as the second marking portion 118 can be photographed by the camera 86, the type, shape, position, etc. of the second marking portion 118 are not limited. For example, the second marking portion 118 is attached by coloring or processing the holding surface 116a side of the holding portion 116. In addition, the structure of the holding portion 116 itself (such as the groove 116b, etc.) can be used as the second marking portion 118 instead of newly providing the second marking portion 118. In addition, the second marking portion 118 can also be attached to a position offset by a predetermined distance from the center of the holding surface 116a side of the holding portion 116.

[0107] When replacing the cutting tool 50 installed in the cutting units 38A and 38B, the cutting tool 50 is loaded and unloaded by the tool holding units 110A and 110B. In addition, the specific operations of the tool holding units 110A and 110B when replacing the cutting tool 50 will be described later.

[0108] A nut loading and unloading unit 130 is provided in front of the tool loading and unloading unit 100. The nut loading and unloading unit 130 includes a motor 132 constituting a rotational drive source and a power transmission mechanism 134 connected to the motor 132. The motor 132 and the power transmission mechanism 134 are arranged along the X-axis direction adjacent to each other.

[0109] The structures of the motor 132 and the power transmission mechanism 134 are the same as those of the motor 102 and the power transmission mechanism 104 of the tool loading and unloading unit 100, respectively. Specifically, the motor 132 has a housing 132a and a pulley 132b fixed to the front end of the rotating shaft of the motor 132. In addition, the power transmission mechanism 134 has a housing 134a and a pulley 134b fixed to the front end of the rotating shaft of the power transmission mechanism 134.

[0110] A through hole 134c penetrating the housing 134a in the left-right direction (Y-axis direction) is formed in the housing 134a. A cylindrical shaft 136 is inserted into the through hole 134c so as to penetrate the housing 134a, and both end portions of the shaft 136 protrude from both side surfaces of the housing 134a. The shaft 136 is held in a state where it can rotate about a rotation axis substantially parallel to the Y-axis direction and is connected to the rotation axis of the power transmission mechanism 134 inside the housing 134a.

[0111] The motor 132 and the power transmission mechanism 134 are connected by an annular connecting member 138 formed of a belt, a chain, or the like. Specifically, the connecting member 138 is wound in contact with the side surface of the pulley 132b of the motor 132 and the side surface of the pulley 134b of the power transmission mechanism 134 so as to be oblong in a top view.

[0112] When power is supplied to the motor 132, the power of the motor 132 is transmitted to the rotation axis of the power transmission mechanism 134 via the pulley 132b, the connecting member 138, and the pulley 134b. In addition, through a conversion mechanism provided inside the housing 134a, the power of the rotation axis of the power transmission mechanism 134 is transmitted to the shaft 136, causing the shaft 136 to rotate. In this way, the power of the motor 132 is transmitted to the shaft 136 through the power transmission mechanism 134.

[0113] A nut holding unit 140A is fixed to one end side of the shaft 136, and the nut holding unit 140A holds a nut 56 (seeFigure 2 ) is held and rotated. Additionally, a nut holding unit 140B is fixed to the other end side of the shaft 136. The nut holding unit 140B holds and rotates a nut 56 for fixing a cutting tool 50 to a spindle 42 of a cutting unit 38B.

[0114] The nut holding units 140A and 140B each have a cylindrical rotating member 142 fixed to the front end portion of the shaft 136. The rotating member 142 is biased by a spring or the like toward the side opposite to the power transmission mechanism 134 and is configured to be movable in the Y-axis direction by applying an external force. Additionally, the rotating member 142 has a front surface 142a facing the side opposite to the power transmission mechanism 134.

[0115] Four holding pins 144 protruding from the front surface 142a are provided on the rotating member 142. The holding pins 144 are formed corresponding to the positions and sizes of through holes 56b of the nut 56 (refer to Figure 2 ) and can be inserted into the through holes 56b. Additionally, the number of the holding pins 144 is appropriately set according to the number of the through holes 56b.

[0116] Additionally, a plurality of holding members 146 for gripping the nut 56 are arranged around the rotating member 142 at substantially equal intervals in the circumferential direction of the rotating member 142. The holding members 146 are each formed in a columnar shape, and the base end portions (one end sides) of the holding members 146 are fixed to the outer peripheral surface of the rotating member 142. Figure 5 An example is shown in which four holding members 146 for gripping the outer peripheral surface of the nut 56 from all around are provided.

[0117] The front end portions (the other end sides) of the holding members 146 protrude from the front surface 142a of the rotating member 142, and claw portions 146a bent toward the center side of the rotating member 142 are formed at the front end portions. Additionally, the holding members 146 are biased by a spring or the like toward the outer side in the radial direction of the rotating member 142, and the claw portions 146a are configured to be movable in the radial direction of the rotating member 142.

[0118] Furthermore, a hollow cylindrical cover 148 is provided around the rotating member 142. The base end sides (the power transmission mechanism 134 side) of the rotating member 142 and the holding members 146 are accommodated inside the cover 148. When the rotating member 142 is pressed toward the inside of the cover 148, the spring biasing the rotating member 142 contracts, and the rotating member 142 and the plurality of holding members 146 are pressed into the inside of the cover 148 together.

[0119] When the rotating member 142 is pressed into the inner side of the cover 148, the front end sides (claw portion 146a sides) of the plurality of gripping members 146 come into contact with the inner wall of the cover 148 and are pressed, and the springs that apply force to the gripping members 146 contract. As a result, the front end sides of the plurality of gripping members 146 move toward the inner side in the radial direction of the rotating member 142. Moreover, the plurality of gripping members 146 are arranged in a state where their longitudinal directions are along the inner wall of the cover 148. At this time, the claw portion 146a of the gripping member 146 is arranged, for example, at a position on the inner side in the radial direction of the rotating member 142 with respect to the outer peripheral edge of the rotating member 142 (closed state).

[0120] On the other hand, when the external force applied to the rotating member 142 is released, the rotating member 142 moves toward the outer side of the cover 148, and the state where the front end sides of the gripping members 146 are pressed by the inner wall of the cover 148 is released. As a result, the front end sides of the plurality of gripping members 146 move toward the outer side in the radial direction of the rotating member 142. Moreover, the front end sides of the plurality of gripping members 146 are in a state where they are arranged on the outer side in the radial direction of the rotating member 142 compared to the closed state. At this time, the claw portion 146a of the gripping member 146 is arranged, for example, at a position on the outer side in the radial direction of the rotating member 142 with respect to the outer peripheral edge of the rotating member 142 (open state).

[0121] The above-described nut holding units 140A and 140B hold the nut 56 and rotate it. Specifically, first, the nut 56 is brought into contact with the front surface 142a of the rotating member 142 in such a manner that the holding pin 144 of the rotating member 142 is inserted into the through hole 56b of the nut 56 (refer to Figure 2 ). In this state, when the rotating member 142 is pressed into the inner side of the cover 148, the plurality of gripping members 146 are in the closed state, and the claw portion 146a comes into contact with the outer peripheral surface of the nut 56, thereby gripping the nut 56.

[0122] In a state where the nut 56 is held by the plurality of gripping members 146, when the motor 132 is driven, the power of the motor 132 is transmitted to the shaft 136 via the power transmission mechanism 134, causing the shaft 136 to rotate. As a result, the rotating member 142 rotates, and the nut 56 held by the gripping member 146 also rotates.

[0123] By using the nut holding units 140A and 140B to hold the nut 56 and rotate it, it is possible to automatically perform the fastening and removal of the nut 56 when replacing the cutting tool 50 mounted on the cutting units 38A and 38B. In addition, the specific operation of the nut loading and unloading unit 130 when replacing the cutting tool 50 will be described later.

[0124] By using the above-described tool changing device 64, it is possible to automatically perform the operation of the cutting units 38A and 38B (refer toFigure 1 ) replacement of the cutting tool 50. Hereinafter, a specific example of the operation of the tool changing device 64 when replacing the cutting tool 50 will be described.

[0125] In addition, hereinafter, the operation in the case of replacing the used cutting tool 50 mounted on the cutting unit 38A and the replacement cutting tool 50 stored in the tool storage unit 70A will be specifically described. However, the operation in the case of replacing the used cutting tool 50 mounted on the cutting unit 38B and the replacement cutting tool 50 stored in the tool storage unit 70B is the same.

[0126] First, the loading and unloading unit 98 is moved by the moving mechanism 90 (refer to Figure 3 ) so that the tool attracting unit 114B provided in the tool holding unit 110A faces the replacement cutting tool 50 held by the storage unit 78 of the tool storage unit 70A.

[0127] Figure 6 FIG. is a perspective view of the tool changing device 64 showing a state where the tool storage unit 70A faces the tool attracting unit 114B. At this time, alignment of the storage unit 78 of the tool storage unit 70A and the holding unit 116 of the tool attracting unit 114B is performed. The alignment of the storage unit 78 and the holding unit 116 is adjusted by rotating the rotating shaft 74 of the tool storage unit 70A to adjust the position of the storage unit 78, and by the moving mechanism 90 (refer to Figure 3 ) to adjust the position of the loading and unloading unit 98 (the position of the tool attracting unit 114B).

[0128] The positions of the storage units 78 of the tool storage units 70A and 70B and the positions of the holding units 116 of the tool attracting units 114A and 114B are controlled by the control unit 66 (refer to Figure 1 ). For example, the control unit 66 has a position registration unit (position storage unit) 66a that registers (stores) the positions of the storage units 78 of the tool storage units 70A and 70B and the positions of the holding units 116 of the tool attracting units 114A and 114B. In addition, the control unit 66 has an operation control unit 66b that controls the operations of the tool storage units 70A and 70B and the transfer unit 88. The functions of the position registration unit 66a and the operation control unit 66b are implemented using the processor and memory provided in the control unit 66.

[0129] The positions (designated positions) of the storage unit 78 and the holding unit 116 when loading and unloading the cutting tool 50 with respect to the tool storage units 70A and 70B are registered in the position registration unit 66a. For example, the positions of the storage unit 78 and the holding unit 116 when the center position of the storage unit 78 storing the cutting tool 50 overlaps with the center position of the holding unit 116 in the Y-axis direction are registered as designated positions in the position registration unit 66a.

[0130] The motion control unit 66b reads out the designated positions registered in the position registration unit 66a and generates control signals for respectively arranging the storage unit 78 and the holding unit 116 at the designated positions. Through these control signals, the operations of the tool storage units 70A and 70B and the transfer unit 88 are controlled, and the storage unit 78 and the holding unit 116 are arranged at the designated positions. As a result, alignment between the storage unit 78 and the holding unit 116 is performed.

[0131] After that, the tool suction unit 114B is moved along the Y-axis direction by the moving mechanism 90, whereby the holding unit 116 is brought close to the storage unit 78, and the holding surface 116a of the holding unit 116 contacts the convex portion 52b of the base 52 of the replacement cutting tool 50 stored in the storage unit 78 (refer to Figure 2 ). In this state, when the negative pressure of the suction source acts on the groove 116b of the holding unit 116, the replacement cutting tool 50 is sucked and held by the tool suction unit 114B.

[0132] Next, the loading and unloading unit 98 is moved along the X-axis direction by the moving mechanism 90, and the loading and unloading unit 98 is arranged at a position facing the cutting unit 38A via the lower sides of the first support structure 20 and the second support structure 34 (refer to Figure 1 ). First, the loading and unloading unit 98 is positioned such that the nut holding unit 140A faces the mounting base 44 of the cutting unit 38A (refer to Figure 2 ). In addition, the positional relationship between the cutting unit 38A and the nut holding unit 140A is adjusted by the moving mechanism 36A and the moving mechanism 90 (refer to Figure 1 ).

[0133] After that, the cutting unit 38A is moved toward the nut holding unit 140A by the moving mechanism 36A. Thereby, the nut 56 (refer to Figure 2 ) fixing the cutting tool 50 mounted on the cutting unit 38A is pressed against the front surface 142a of the rotating member 142 of the nut holding unit 140A. At this time, a plurality of holding pins 144 of the nut holding unit 140A are inserted into the through holes 56b of the nut 56 (refer to Figure 2 ).

[0134] When the rotating member 142 is pressed by the nut 56, the rotating member 142 is pressed into the inner side of the cover 148, and the plurality of holding members 146 are in a closed state. As a result, the nut 56 is held by the claw portions 146a of the plurality of holding members 146.

[0135] Next, the shaft 136 is rotated by the power of the electric motor 132, and the nut holding unit 140A is rotated in the first direction (for example, the direction indicated by the arrow A). As a result, the nut 56 held by the nut holding unit 140A rotates and becomes loose, and is removed from the support shaft 48 of the mounting base 44 (refer to Figure 2 ).

[0136] After that, the cutting unit 38A is moved in the Y-axis direction to separate the cutting unit 38A from the nut holding unit 140A. In addition, the nut holding unit 140A is configured to be able to maintain the state in which the rotating member 142 is pressed into the inner side of the cover 148, and the nut 56 is also held by the nut holding unit 140A after being removed from the support shaft 48.

[0137] Next, the loading and unloading unit 98 is moved by the moving mechanism 90 so that the tool attracting unit 114A of the tool holding unit 110A faces the used cutting tool 50 mounted on the cutting unit 38A. Then, the cutting unit 38A is moved toward the tool attracting unit 114A by the moving mechanism 36A so that the holding surface 116a of the holding portion 116 of the tool attracting unit 114A contacts the convex portion 52b of the base 52 of the used cutting tool 50 (refer to Figure 2 ).

[0138] In this state, when the negative pressure of the suction source acts on the groove 116b of the holding portion 116, the used cutting tool 50 is attracted and held by the tool attracting unit 114A. After that, the cutting unit 38A is moved in the Y-axis direction to separate the cutting unit 38A from the tool attracting unit 114A. As a result, the used cutting tool 50 is removed from the cutting unit 38A.

[0139] Next, the shaft 106 is rotated 180° by the power of the electric motor 102. As a result, the support member 112 rotates, and the positions of the tool attracting unit 114A and the tool attracting unit 114B are swapped. As a result, the tool attracting unit 114B that holds the replacement cutting tool 50 faces the mounting base 44 of the cutting unit 38A.

[0140] After that, the cutting unit 38A is moved toward the tool attracting unit 114B by the moving mechanism 36A to bring the cutting unit 38A close to the tool attracting unit 114B. As a result, the opening 52a of the replacement cutting tool 50 held by the tool attracting unit 114B (refer to Figure 2)Insert the support shaft 48 of the mounting base 44 (refer to Figure 2 ).

[0141] In this state, when the tool suction unit 114B releases the suction of the replacement cutting tool 50, the replacement cutting tool 50 is mounted on the front end of the main shaft 42. Then, the cutting unit 38A is moved in the Y-axis direction to separate the cutting unit 38A from the tool suction unit 114B.

[0142] Next, the loading and unloading unit 98 is moved by the moving mechanism 90, and the nut holding unit 140A holding the nut 56 (refer to Figure 2 ) is positioned opposite to the mounting base 44 of the cutting unit 38A (refer to Figure 2 ). Then, the cutting unit 38A is moved toward the nut holding unit 140A by the moving mechanism 36A. As a result, the nut 56 held by the nut holding unit 140A is positioned at the front end of the support shaft 48 of the mounting base 44.

[0143] In this state, the shaft 136 is rotated by the power of the motor 132, and the nut holding unit 140A is rotated in the second direction opposite to the first direction (for example, the direction indicated by the arrow B). As a result, the nut 56 rotates and is fastened to the thread portion 48a of the support shaft 48 formed on the mounting base 44 (refer to Figure 2 ). As a result, the replacement cutting tool 50 is clamped by the front end face 46c of the convex portion 46b of the mounting base 44 (refer to Figure 2 ) and the nut 56, and thus is fixed to the cutting unit 38A.

[0144] After that, the cutting unit 38A is moved in the Y-axis direction to separate the cutting unit 38A from the nut holding unit 140A. At this time, the rotating member 142 moves toward the outside of the cover 148, and the plurality of holding members 146 are in an open state. As a result, the holding of the nut 56 by the plurality of holding members 146 is released.

[0145] Next, the loading and unloading unit 98 is moved in the Y-axis direction by the moving mechanism 90, so that the tool suction unit 114A holding the used cutting tool 50 is opposed to the storage portion 78 of the tool storage unit 70A. At this time, the storage portion 78 of the tool storage unit 70A and the holding portion 116 of the tool suction unit 114A are aligned. In addition, the alignment method is the same as the alignment method between the storage portion 78 of the tool storage unit 70A and the holding portion 116 of the tool suction unit 114B described above.

[0146] Then, at the opening 52a of the used cutting tool 50 held by the tool suction unit 114A (refer to Figure 2)The boss portion 82 of the storage unit 78 is inserted therein. Thus, the used cutting tool 50 is held and stored by the storage unit 78. In this way, the holding portions 116 of the tool attracting units 114A and 114B that hold the cutting tool 50 are moved between the storage unit 78 of the tool storage unit 70A and the main shaft 42 by the moving mechanism 90, and the cutting tool 50 is replaced by the tool changing device 64.

[0147] In the above-described method for replacing the cutting tool 50, alignment of the tool storage units 70A and 70B and the tool attracting units 114A and 114B is performed according to the designated positions pre-registered in the position registration unit 66a (see Figure 1 ) of the control unit 66. However, for various reasons (for example, secular deterioration of the tool storage units 70A and 70B, the moving mechanism 90, the loading and unloading unit 98, etc.), even if the storage unit 78 of the tool storage units 70A and 70B and the holding portions 116 of the tool attracting units 114A and 114B are respectively arranged at the designated positions, the positional relationship between the storage unit 78 and the holding portion 116 may sometimes deviate.

[0148] Therefore, in the present embodiment, the first marking portion 84 provided on the storage unit 78 of the tool storage units 70A and 70B and the second marking portion 118 provided on the holding portion 116 of the tool attracting units 114A and 114B are used to confirm the positional relationship between the storage unit 78 and the holding portion 116, and the designated positions registered in the position registration unit 66a are updated. By periodically performing this process at a prescribed timing (for example, during maintenance of the tool changing device 64), the accuracy of alignment between the tool storage units 70A and 70B and the tool attracting units 114A and 114B can be maintained.

[0149] Hereinafter, a specific example of the adjustment method of the tool changing device of the present embodiment will be described. In addition, hereinafter, as an example, the steps in the case of adjusting the positional relationship between the storage unit 78 of the tool storage unit 70A and the holding portion 116 of the tool attracting unit 114A included in the tool holding unit 110A will be described. However, the following steps can be applied to the alignment of any storage unit 78 and any holding portion 116.

[0150] First, the positions of the storage unit 78 and the holding portion 116 when the storage unit 78 of the tool storage unit 70A and the holding portion 116 of the tool attracting unit 114A are arranged in a prescribed positional relationship are registered as designated positions in the position registration unit 66a of the control unit 66 (registration step). Figure 7 is a front view of the tool changing device 64 in the registration step.

[0151] In the registration step, first, by the moving mechanism 90 (see Figure 3)Move the loading and unloading unit 98 so that the tool attracting unit 114A of the tool holding unit 110A faces the storage unit 78 of the tool storage unit 70A. At this time, when the cutting tool 50 is stored in the storage unit 78 facing the tool attracting unit 114A, the tool attracting unit 114A is arranged at a position where it is desired to appropriately hold the cutting tool 50 by the tool attracting unit 114A. For example, the tool attracting unit 114A is arranged such that the center position of the holding unit 116 overlaps with the center position of the storage unit 78 in the Y-axis direction.

[0152] Next, photograph the storage unit 78 with the camera 86. When the storage unit 78 is photographed from the back surface 76b side of the support member 76 by the camera 86, through the transparent support member 80 (refer to Figure 6 ), and the transparent boss portion 82, the holding unit 116 of the tool attracting unit 114A is also photographed at the same time. As a result, an image including the first marking portion 84 attached to the front surface 80a side (the bottom surface portion of the boss portion 82) of the support member 80 and the second marking portion 118 attached to the holding unit 116 is obtained.

[0153] Figure 8 The (A) of [] shows an image diagram of the image 160 obtained in the registration step. When the camera 86 is photographed in a state where the center position of the storage unit 78 and the center position of the holding unit 116 overlap in the Y-axis direction, as shown in (A) of Figure 8 , an image 160 in a state where the first marking portion 84 and the second marking portion 118 overlap can be obtained.

[0154] Then, the positions (designated positions) of the storage unit 78 and the holding unit 116 in a state where the first marking portion 84 and the second marking portion 118 overlap are registered in the position registration unit 66a of the control unit 66 (refer to Figure 1 ). As the designated position of the storage unit 78, for example, the rotation angle of the rotation shaft 74 (the rotation angles of the support members 76 and 80), the center coordinates of the boss portion 82, etc. are registered. In addition, as the designated position of the holding unit 116, for example, the center coordinates of the holding unit 116, the state of the moving mechanism 90 (refer to Figure 3 ) (the coordinates of the moving block 94, the rotation speed of the ball screw 92, etc.), etc. are registered.

[0155] In addition, the first marking portion 84 may sometimes be provided at a position deviated from the center of the storage portion 78, and the second marking portion 118 may sometimes be provided at a position deviated from the center of the holding portion 116. For example, when the light transmissivity of the boss portion 82 is low and it is difficult for the camera 86 to photograph the holding portion 116 through the boss portion 82, the second marking portion 118 is attached to a position separated from the center of the holding portion 116 by a predetermined distance (equal to or greater than the radius of the boss portion 82). In this case, an image 160 in a state where the first marking portion 84 and the second marking portion 118 do not overlap is obtained.

[0156] Figure 8 (B) of FIG. is an image diagram showing the image 160 including the non-overlapping first marking portion 84 and second marking portion 118. When the position of the second marking portion 118 is deviated from the center of the holding portion 116, in the image 160, the first marking portion 84 and the second marking portion 118 are shown at positions separated by a predetermined distance.

[0157] As described above, the positions of the storage portion 78 and the holding portion 116 when the first marking portion 84 and the second marking portion 118 are arranged in a predetermined positional relationship are registered in the position registration portion 66a as designated positions. Then, using this designated position, the cutting tool 50 is replaced by the tool changing device 64.

[0158] When replacing the cutting tool 50, the storage portion 78 and the holding portion 116 are aligned by arranging the storage portion 78 and the holding portion 116 at the designated positions registered in the position registration portion 66a. In addition, the specific operation of the tool changing device 64 when replacing the cutting tool 50 is as described above.

[0159] Then, after the tool changing device 64 has been used for a certain period, maintenance of the tool changing device 64 is performed. At this time, the storage portion 78 and the holding portion 116 are moved so as to be arranged at the designated positions registered in the position registration portion 66a, and it is determined whether the first marking portion 84 and the second marking portion 118 are arranged in a predetermined positional relationship (determination step).

[0160] In the determination step, first, the operation of the tool storage portion 70A and the moving mechanism 90 (see Figure 3 ) is controlled by the operation control portion 66b so that the storage portion 78 of the tool storage portion 70A and the holding portion 116 of the tool attracting unit 114A are arranged at the designated positions registered in the position registration portion 66a. Then, in the same manner as in the registration step, the storage portion 78 is photographed by the camera 86. Thereby, an image including the first marking portion 84 and the second marking portion 118 is obtained.

[0161] Here, even if the control is performed in such a manner that the storage unit 78 and the holding unit 116 are arranged at the designated positions registered in the position registration unit 66a, due to reasons such as aging deterioration, sometimes the positional relationship between the storage unit 78 and the holding unit 116, that is, the positional relationship between the first marking unit 84 and the second marking unit 118 also deviates. Therefore, in the determination step, it is determined whether the first marking unit 84 and the second marking unit 118 are arranged in accordance with the specified positional relationship (the positional relationship between the first marking unit 84 and the second marking unit 118 in the registration step).

[0162] Figure 9 The (A) of is an image diagram showing the image 162 obtained in the determination step. In the image 162, the first marking unit 84 and the second marking unit 118 are shown at different positions. In this case, it is determined that the first marking unit 84 and the second marking unit 118 are not arranged in accordance with the specified positional relationship, and the positional relationship between the first marking unit 84 and the second marking unit 118 deviates.

[0163] The above determination is performed by image processing such as pattern matching, for example. Specifically, a reference image in a state where the first marking unit 84 and the second marking unit 118 are in the desired positional relationship (refer to (A) of Figure 8 and (B) of Figure 8 ) is obtained in advance and stored in the control unit 66. Then, the control unit 66 compares the image 162 obtained by the camera 86 in the determination step with the reference image to determine whether the first marking unit 84 and the second marking unit 118 are in the specified positional relationship. Figure 8 and Figure 8 of Figure 8 and stores it in the control unit 66. Then, the control unit 66 compares the image 162 obtained by the camera 86 in the determination step with the reference image to determine whether the first marking unit 84 and the second marking unit 118 are in the specified positional relationship.

[0164] However, the method of determination is not limited. For example, it may be such that the image 162 obtained by photographing with the camera 86 is displayed on a touch panel (not shown) provided in the cutting device 2, and the operator refers to the image 162 displayed on the touch panel to determine whether the first marking unit 84 and the second marking unit 118 are arranged in the specified positional relationship.

[0165] In the determination step, when it is determined that the first marking unit 84 and the second marking unit 118 are not arranged in the specified positional relationship, the positions of the storage unit 78 and the holding unit 116 are adjusted so that the first marking unit 84 and the second marking unit 118 are arranged in the specified positional relationship.

[0166] For example, the adjustment of the positions of the storage unit 78 and the holding unit 116 is performed by the operator operating the touch panel to change the position of the storage unit 78 or the holding unit 116 while referring to the image 162 displayed on the touch panel (not shown). Then, after the positions of the storage unit 78 and the holding unit 116 are adjusted, when photographing is performed again with the camera 86, an image 162 in a state where the first marking unit 84 and the second marking unit 118 are arranged in the specified positional relationship is obtained.Figure 9 The (B) is an image diagram showing an image 162 including a first marking portion 84 and a second marking portion 118 arranged in a prescribed positional relationship.

[0167] Then, with the first marking portion 84 and the second marking portion 118 arranged in a prescribed positional relationship, the positions of the storage portion 78 and the holding portion 116 are registered in the position registration portion 66a as designated positions. Thus, the designated positions registered in the position registration portion 66a in the registration step are overwritten by newly acquired designated positions (overwriting step).

[0168] When the overwriting step is implemented, the designated positions for arranging the storage portion 78 and the holding portion 116 in a desired positional relationship are updated. After that, the tool changing device 64 operates again, and the replacement of the cutting tool 50 in a state where the storage portion 78 and the holding portion 116 are accurately arranged is restarted.

[0169] As described above, the tool changing device 64 of the present embodiment has: a storage portion 78 provided with a first marking portion 84 that can be photographed by a camera 86; and a holding portion 116 provided with a second marking portion 118 that can be photographed by a camera 86. Thus, it is possible to determine whether the first marking portion 84 and the second marking portion 118 are arranged in a prescribed positional relationship based on the image 162 obtained by the camera 86, and thereby it is possible to confirm whether the positional relationship between the storage portion 78 and the holding portion 116 is appropriate.

[0170] Moreover, in the case where it is determined that the first marking portion 84 and the second marking portion 118 are not arranged in a prescribed positional relationship, the positional relationship between the storage portion 78 and the holding portion 116 can be adjusted, and the positions of the storage portion 78 and the holding portion 116 at this time are overwritten as designated positions in the position registration portion 66a. Thus, the appropriate positional relationship between the storage portion 78 and the holding portion 116 is updated regularly, and the state in which the cutting tool 50 stored in the storage portion 78 can be appropriately held by the holding portion 116 is maintained.

[0171] In addition, the structure of the tool changing device 64 can be appropriately changed within the range where the cutting tool 50 can be replaced. For example, the tool loading and unloading unit 100 mounted on the tool changing device 64 may also have a pair of tool holding units for holding the cutting tool 50.

[0172] Figure 10 is a perspective view showing the tool loading and unloading unit 100. Figure 10 The shown tool loading and unloading unit 100 has tool holding units 170A and 170B instead of Figure 5 the shown tool holding units 110A and 110B.

[0173] A tool holding unit 170A is fixed to one end side of the shaft 106. The tool holding unit 170A holds the cutting tool 50 mounted on the cutting unit 38A (see Figure 1 ) and the cutting tool 50 newly mounted on the cutting unit 38A. In addition, a tool holding unit 170B is fixed to the other end side of the shaft 106. The tool holding unit 170B holds the cutting tool 50 mounted on the cutting unit 38B (see Figure 1 ) and the cutting tool 50 newly mounted on the cutting unit 38B.

[0174] The tool holding units 170A and 170B each have: a plate-like support member 172, which is formed in an oval shape in a side view and is fixed to the front end of the shaft 106; and tool gripping units 174A and 174B, which are provided on the side of the surface of the support member 172 facing away from the power transmission mechanism 104. The tool gripping unit 174A is fixed to one end side of the support member 172, and the tool gripping unit 174B is fixed to the other end side of the support member 172.

[0175] The tool gripping units 174A and 174B each have a cylindrical holding portion (gripping portion) 176 fixed to the support member 172. The holding portion 176 has a front surface 176a facing away from the power transmission mechanism 104. In addition, a positioning pin 178 protruding from the front surface 176a is provided on the holding portion 176. The front end portion of the positioning pin 178 is formed corresponding to the position and size of the concave portion 48b of the support shaft 48 formed on the mounting base 44 (see Figure 2 ) and can be inserted into the concave portion 48b.

[0176] A plurality of gripping members 180 for gripping the convex portion 52b of the cutting tool 50 (see Figure 2 ) are arranged around the holding portion 176 at substantially equal intervals in the circumferential direction of the holding portion 176. The gripping members 180 are each formed in a columnar shape, and the base end portion (one end side) of the gripping member 180 is fixed to the outer peripheral surface of the holding portion 176.

[0177] Figure 10 An example is shown in which four gripping members 180 are provided on the outer peripheral surface of the convex portion 52b of the cutting tool 50 that grip the cutting tool 50 from all around. The front end portion (the other end side) of the gripping member 180 protrudes from the front surface 176a of the holding portion 176, and a contact portion 180a that contacts the outer peripheral surface of the convex portion 52b of the cutting tool 50 is formed at the front end portion.

[0178] The front end side of the gripping member 180 moves in the radial direction of the holding portion 176 through a moving mechanism (not shown) housed inside the holding portion 176, for example. The moving mechanism is in contact with the convex portion 52b of the cutting tool 50 at the contact portion 180a (see Figure 2The state in which the cutting tool 50 is held by contacting the outer peripheral surface (closed state) and the state in which the contact portion 180a is disposed on the radially outer side of the holding portion 176 compared to the closed state and the holding of the cutting tool 50 is released (open state) are switched between each other.

[0179] The tool holding unit 170A replaces the cutting tool 50 mounted on the cutting unit 38A. Specifically, the tool holding unit 174A of the tool holding unit 170A holds and retains the used cutting tool 50 mounted on the cutting unit 38A. In addition, the tool holding unit 174B of the tool holding unit 170A holds and retains the replacement cutting tool 50 stored in the tool storage unit 70A (see Figure 3 ).

[0180] Similarly, the tool holding unit 170B replaces the cutting tool 50 mounted on the cutting unit 38B. Specifically, the tool holding unit 174A of the tool holding unit 170B holds and retains the used cutting tool 50 mounted on the cutting unit 38B. In addition, the tool holding unit 174B of the tool holding unit 170B holds and retains the replacement cutting tool 50 stored in the tool storage unit 70B (see Figure 3 ).

[0181] When the convex portion 52b of the cutting tool 50 is held from all around by a plurality of holding members 180, the cutting tool 50 is held such that its central position overlaps with the central position of the holding portion 176 in the Y-axis direction. Therefore, even if there is a slight deviation in the positional relationship between the cutting tool 50 and the holding portion 176 immediately before the cutting tool 50 is held by the holding portion 176, the cutting tool 50 is held by the plurality of holding members 180, and thus the alignment of the cutting tool 50 and the holding portion 176 is automatically performed.

[0182] In addition, a second marking portion 182 indicating the position of the holding portion 176 is provided on the holding portion 176. For example, the second marking portion 182 is attached to the center of the front end portion of the positioning pin 178 and can be imaged by a camera 86 (see Figure 4 ). Figure 10 The holding portion 176 to which a cross-shaped mark is attached as the second marking portion 182 is shown.

[0183] Similar to Figure 5 and the like, the second marking portion 182 is used for alignment between the storage portions 78 of the tool storage units 70A and 70B and the holding portions 176 of the tool holding units 174A and 174B. The method of alignment using the second marking portion 182 is the same as the method of alignment using the second marking portion 118. In addition, the type, shape, position, etc. of the second marking portion 182 can also be appropriately changed in the same manner as the second marking portion 118.

[0184] In addition, in the above-described embodiment, the cutting units 38A and 38B in which the cutting tool 50 is fixed by the nut 56 have been described. However, the cutting units 38A and 38B may also have a mechanism for attracting and holding the cutting tool 50. In this case, the nut 56 for fixing the cutting tool 50 is not required. Thus, the nut loading and unloading unit 130 of the loading and unloading unit 98 can be omitted, and the loading and unloading unit 98 can be made lighter.

[0185] In addition, in the above-described embodiment, an example in which the tool attracting units 114A and 114B are configured to face the side of the tool loading and unloading unit 100 has been described (see Figure 5 etc.). However, the tool loading and unloading unit 100 may also be configured such that the tool attracting units 114A and 114B can move (rotate) so as to face the lower side of the tool loading and unloading unit 100. In this case, the rotation shaft 74 (see Figure 4 etc.) may be arranged along the Z-axis direction, and the front surface 76a of the support member 76 (the front surface 80a of the support member 80) may be arranged in a direction parallel to the X-axis direction and the Y-axis direction.

[0186] As described above, when the tool attracting units 114A and 114B and the front surface 76a of the support member 76 face each other in the Z-axis direction, the support member 76 is provided directly below the moving path of the tool attracting units 114A and 114B. In addition, a moving mechanism (such as a robotic arm) for moving the tool attracting units 114A and 114B to an arbitrary position may be connected to the loading and unloading unit 98.

[0187] In addition to the above, the configurations, methods, etc. of the above-described embodiment can be appropriately changed and implemented without departing from the object of the present invention.

Claims

1. A method for adjusting a tool changing device, which changes a cutting tool fixed to the front end of a spindle of a cutting device and cutting a workpiece. Characterized in that, The tool changing device has: A tool storage section having a movable storage section for storing the cutting tool on the front side of a transparent support member; A transfer unit having a holding section for holding the cutting tool and a moving mechanism for moving the holding section between the storage section and the spindle to transfer the cutting tool; A camera disposed on the back side of the support member for photographing the holding section positioned on the front side of the support member through the support member; And A control unit having an operation control section and a position registration section, the operation control section controlling the operations of the tool storage section and the transfer unit, and the position registration section registering the positions of the storage section and the holding section when loading and unloading the cutting tool relative to the tool storage section; The storage section has a first marking section that can be photographed by the camera; The holding section has a second marking section that can be photographed by the camera; The method for adjusting the tool changing device has the following steps: A registration step of photographing the first marking section with the camera and photographing the second marking section through the support member to obtain an image including the first marking section and the second marking section, and registering the positions of the storage section and the holding section when the first marking section and the second marking section are arranged in a specified positional relationship as specified positions in the position registration section according to the image; A determination step of moving the storage section and the holding section so as to be arranged at the specified positions registered in the position registration section, and determining whether the first marking section and the second marking section are arranged in the specified positional relationship; And An overwriting step of, when it is determined in the determination step that the first marking section and the second marking section are not arranged in the specified positional relationship, adjusting the positions of the storage section or the holding section so that the first marking section and the second marking section are arranged in the specified relationship, and then overwriting the positions of the storage section and the holding section as the specified positions in the position registration section.

2. The method for adjusting a tool changing device according to claim 1, Characterized in that, The holding section is a suction holding section for suction-holding the cutting tool or a gripping section for gripping the cutting tool.

3. A tool changing device that changes a cutting tool fixed to the front end of a spindle of a cutting device and cutting a workpiece. Characterized in that, The tool changing device has: A tool storage section having a movable storage section for storing the cutting tool on the front side of a transparent support member; A transfer unit having a holding section for holding the cutting tool and a moving mechanism for moving the holding section between the storage section and the spindle to transfer the cutting tool; A camera disposed on the back side of the support member for photographing the holding section positioned on the front side of the support member through the support member; And A control unit having an operation control section and a position registration section, the operation control section controlling the operations of the tool storage section and the transfer unit, and the position registration section registering the positions of the storage section and the holding section when loading and unloading the cutting tool with respect to the tool storage section. The storage section has a first marking section that can be photographed by the camera. The holding section has a second marking section that can be photographed by the camera.

4. The tool changing device according to claim 3, characterized in that the holding section is a suction holding section that suction holds the cutting tool or a gripping section that grips the cutting tool.

Images