The utility model relates to the technical field of integrated circuits, in particular to a mark pattern structure. The mark pattern structure comprises a substrate, the substrate is provided with a mark pattern, the mark pattern comprises a mark groove, the mark pattern is provided with a first mark part and a second mark part, the first mark part extends in the first direction, the second mark part is connected to the two opposite sides of the first mark part in the second direction, and the first direction intersects with the second direction; the epitaxial layer is located on one side of the substrate, and the epitaxial layer is filled with the mark pattern and covers the upper surface of the substrate. The marked pattern structure can further comprise a substrate, wherein the substrate is provided with a marked pattern; the protruding structure is located on one side of the substrate and surrounds the mark pattern, and the protruding structure protrudes in the thickness direction of the substrate; the epitaxial layer is located on the side, away from the substrate, of the protruding structure, the epitaxial layer covers the protruding structure and the substrate, the surface, away from the substrate, of the epitaxial layer is provided with a protruding part, and the protruding part and the protruding structure are oppositely arranged.