Capacitive sensors

Abstract

Capacitive sensor. The present invention increases the possibility that a conductive deposit causes a change in capacitance between a detection electrode and a drive electrode. The capacitive sensor (S1) includes a substrate (100), a detection electrode (200), a drive electrode (300), and a controller (500). One or more layers (110) of the substrate include a first surface (110a) and a second surface (110b). The detection electrode includes a plurality of first detection lines (210) arranged at intervals on the first surface. The drive electrode includes a plurality of first drive lines (310), each of which is located between two adjacent first detection lines on one of the first surface or the second surface. The controller is configured to charge and discharge the detection electrode and supply a drive pulse to the drive electrode (300). The controller (500) is further configured to detect a detection target based on a change in a first capacitance between the detection electrode (200) and the detection target and a change in a second capacitance between the detection electrode (200) and the drive electrode (300).

Description

Technical Field

[0001] The present invention relates to capacitive sensors. Background Art

[0002] JP 2019-29166 A describes a conventional capacitive sensor. The capacitive sensor includes a detection electrode, a drive electrode, a circuit board, and a controller. The detection electrode and the drive electrode can be configured so that the detection electrode and the drive electrode are arranged side by side on one side of the circuit board, so that the detection electrode is arranged on one side of the circuit board and the drive electrode surrounds the detection electrode on that side of the circuit board, or so that the detection electrode is arranged on one side of the circuit board and the drive electrode is arranged on the other side of the circuit board and overlaps with the detection electrode.

[0003] The controller is configured to perform self-capacitance sensing, mutual-capacitance sensing, and combined-capacitance sensing combining the self-capacitance sensing and the mutual-capacitance sensing, so as to determine whether a detection target (ie, a human body) has touched the detection surface.

[0004] In self-capacitance sensing, a controller activates the detection electrodes and deactivates the drive electrodes. In this state, when a detection target contacts the detection surface and approaches the detection electrodes, the first capacitance between the detection electrodes and the detection target changes. Based on this change in first capacitance, the controller detects a touch on the detection target.

[0005] In mutual capacitance sensing, a controller deactivates the detection electrodes and activates the drive electrodes, resulting in electrostatic coupling between the drive and detection electrodes. In this state, when a detection target comes into contact with the detection surface and approaches the drive and detection electrodes, the second capacitance between the drive and detection electrodes changes. Based on this change in second capacitance, the controller detects a touch on the detection target.

[0006] In combined capacitive sensing, a controller activates both the detection electrode and the drive electrode. In this state, when a detection target contacts the detection surface and approaches the drive and detection electrodes, the first capacitance between the detection electrode and the detection target changes, and the second capacitance between the drive and detection electrodes changes. Based on these changes in the first and second capacitances, the controller detects a touch on the detection target.

[0007] Comparing a case where a detection target is in contact with the detection surface and present near the detection electrodes and drive electrodes with a case where a conductive deposit, such as water, is present on the detection surface and near the detection electrodes and drive electrodes, the first capacitance changes in a similar manner, but the second capacitance changes in a different manner. Therefore, the controller can detect a touch of the detection target based on the changes in the first and second capacitances obtained through combined capacitive sensing, thereby distinguishing it from a conductive deposit. Summary of the Invention

[0008] Technical issues

[0009] As described above, the detection electrode and the drive electrode are arranged side by side, the drive electrode surrounds the detection electrode, or the detection electrode overlaps the detection electrode. In either of these situations, if a conductive deposit adheres to the detection surface, for example, such that it is located above the center portion of the detection electrode, the conductive deposit is positioned away from the drive electrode. Due to the presence of the conductive deposit, this arrangement can change the capacitance between the conductive deposit and the detection electrode, but not the capacitance between the detection electrode and the drive electrode. In this case, the controller may mistakenly detect the conductive deposit as a detection target based solely on the change in the first capacitance.

[0010] The present invention provides a capacitance sensor that increases the likelihood that conductor deposits will cause capacitance changes between a sense electrode and a drive electrode.

[0011] Solution to the problem

[0012] To address the above issues, the present invention provides a capacitive sensor comprising a substrate, a detection electrode, a drive electrode, and a controller. The substrate comprises one or more layers. The one or more layers comprise a first surface and a second surface that are different from each other in a first direction. The layer or layers are insulated. The first direction is the thickness direction of the substrate. The detection electrode comprises a plurality of first detection lines that are electrically connected to each other and arranged at intervals on the first surface. The drive electrode comprises a plurality of first drive lines that are electrically connected to each other. Each first drive line is arranged on one of the first surface and the second surface so as to be located between two adjacent first detection lines when viewed from one side in the first direction. The controller is configured to charge and discharge the detection electrode and supply drive pulses to the drive electrode. When a detection target approaches the detection electrode while the detection electrode is charging and discharging, the proximity causes a change in a first capacitance between the detection electrode and the detection target. When the detection target approaches the detection electrode and the drive electrode while the drive pulse is supplied to the drive electrode, the proximity causes a change in a second capacitance between the detection electrode and the drive electrode. The controller is further configured to detect the detection target based on the changes in the first and second capacitances.

[0013] In this capacitive sensor, each first drive line of the drive electrode is located between adjacent first detection lines. Therefore, the conductive deposit is located substantially to the side in the Z direction relative to at least one first drive line and the adjacent first detection line, thereby varying the mutual capacitance of the second capacitance formed between the at least one first drive line and the adjacent first detection line. This increases the likelihood that the second capacitance will vary due to the conductive deposit, and reduces the likelihood that the controller will mistakenly detect the conductive deposit as a detection target.

[0014] The detection electrode may further include at least one second detection line electrically connected to the first detection line. The at least one second detection line may be arranged on one of the first surface and the second surface.

[0015] The driving electrode may further include at least one second driving line electrically connected to the first driving line. The at least one second driving line may be arranged on one of the first surface and the second surface.

[0016] The first detection lines may extend in a second direction and may be arranged at intervals in a third direction. The second direction may be substantially orthogonal to the first direction, and the third direction may be substantially orthogonal to the first direction and intersect with the second direction. The at least one second detection line may extend in the third direction and may intersect with the first detection line on the first surface. The at least one second detection line may include a plurality of second detection lines. In this case, the second detection lines may be arranged at intervals in the second direction on the first surface and may intersect with the first detection line.

[0017] The first driving line may extend in the second direction and may be arranged on the second surface at intervals in the third direction. The at least one second driving line may extend in the third direction. The at least one second driving line may include a plurality of second driving lines.

[0018] In a case where the at least one second detection line includes a plurality of second detection lines and the at least one second driving line includes a plurality of second driving lines, each second driving line may be arranged on the second surface so as to be located between two adjacent second detection lines and intersect with the first driving line when viewed from one side in the first direction.

[0019] The drive electrode may further include at least one third drive line electrically connected to the first drive line and the at least one second drive line. The at least one third drive line may be arranged on the second surface so as to extend along the at least one first detection line and overlap with the at least one first detection line when viewed from one side in the first direction.

[0020] The drive electrode may further include at least one fourth drive line electrically connected to the first drive line, the at least one second drive line, and the at least one third drive line. In this case, the at least one second detection line may be arranged on the first surface. The at least one fourth drive line may be arranged on the second surface so as to overlap at least one of the at least one second detection line when viewed from one side in the first direction.

[0021] The at least one third driving line may include a plurality of third driving lines. The third driving lines may be arranged on the second surface so as to overlap with corresponding first detection lines when viewed from one side in the first direction. The third driving lines and the first driving lines may be arranged alternately in their arrangement direction.

[0022] When the at least one second detection line includes a plurality of second detection lines, the at least one fourth driving line may include a plurality of fourth driving lines. The fourth driving lines may be arranged on the second surface so as to overlap with corresponding second detection lines when viewed from one side in the first direction. The fourth driving lines and the second driving lines may be arranged alternately in their arrangement direction.

[0023] In the case where the first detection lines extend in the second direction and are arranged at intervals in the third direction, each of the first detection lines may include a first end on one side in the second direction and a second end on the other side in the second direction. The first detection lines may include a first detection line on one side of the third direction and a first detection line on the other side of the third direction. The first detection line on the one side of the third direction may be the one of the first detection lines located on the one side of the third direction, and the first detection line on the other side of the third direction may be the one of the first detection lines located on the other side of the third direction.

[0024] The at least one second detection line may include a pair of second detection lines arranged on the first surface. The second detection lines may include one second detection line and another second detection line, wherein the one second detection line may be connected to the first end of each first detection line, and the other second detection line may be connected to the second end of the first detection line.

[0025] The at least one second drive line may include a body having a ring shape or a partially discontinuous ring shape and disposed on the second surface of the substrate. The body may include a first portion serving as an inner peripheral portion of the body. The first portion of the body may be positioned so as to overlap with the first detection line on one side of the third direction, the first detection line on the other side of the third direction, and the pair of second detection lines when viewed from one side in the first direction.

[0026] The first driving lines may each have a first end portion on one side in the second direction and a second end portion on the other side in the second direction.

[0027] The at least one second drive line may further include a plurality of first connection portions and a plurality of second connection portions. In the case where the first drive line is arranged on the first surface, each first connection portion may extend on the second surface from the first portion of the main body to a position on the other side of the first end portion of the corresponding first drive line in the first direction, and the distal end of each of the first connection portions may be connected to the first end portion of the corresponding first drive line via a through-hole electrode of the substrate. Each second connection portion may extend on the second surface from the first portion of the main body to a position on the other side of the second end portion of the corresponding first drive line in the first direction, and the distal end of each second connection portion may be connected to the second end portion of the corresponding first drive line via another through-hole electrode of the substrate. The first and second connection portions may be omitted, in which case the first drive line may extend on the second surface from a portion on one side of the first portion of the main body in the second direction to a portion on the other side of the first portion of the main body in the first direction.

[0028] In the case where the at least one second detection line includes a plurality of second detection lines, the first detection line and the second detection line may intersect with each other to form a grid pattern on the first surface, and may be electrically connected to each other at their intersections. When viewed from one side in the first direction, the grid formed by the first detection line and the second detection line may have a plurality of first gaps, each of which includes four spaces. In this case, the four spaces of each first gap may be defined by two adjacent first detection lines, two adjacent second detection lines intersecting with the two adjacent first detection lines, a first drive line located between the two adjacent first detection lines, and a second drive line located between the two adjacent second detection lines. Alternatively, the first drive line and the second drive line may intersect with each other to form a grid pattern on the first surface, and may be electrically connected to each other at their intersections, and when viewed from one side in the first direction, the grid formed by the first drive line and the second drive line may have a plurality of third gaps, each of which includes four spaces.

[0029] The detection electrode may further include a third detection line. The third detection line may have a ring shape or a partially discontinuous ring shape, may be arranged on the first surface so as to surround at least the first detection line, and may be connected to opposite ends of the first detection line in the longitudinal direction. When the at least one second detection line is arranged on the first surface, the third detection line may be arranged on the first surface so as to surround at least the first detection line and at least the second detection line, and may be connected to opposite ends of the first detection line in the longitudinal direction and opposite ends of the second detection line in the longitudinal direction.

[0030] The layer of the substrate may further include a third surface. The third surface may be different from the first surface and the second surface in the first direction and arranged on the other side of the second surface in the first direction.

[0031] The capacitive sensor of any of the above aspects may further include a ground electrode. The ground electrode may include a plurality of first ground lines and / or at least one second ground line on the third surface. The first ground line may be arranged to overlap with the corresponding first detection line or the corresponding first drive line when viewed from one side in the first direction. The at least one second ground line may be arranged on the third surface so as to overlap with the at least one second detection line when viewed from one side in the first direction. The at least one second ground line may include a plurality of second ground lines. The second ground line may be arranged to overlap with the corresponding second detection line or the corresponding second drive line when viewed from one side in the first direction.

[0032] In the case where the first ground line and the second ground line are provided, the first ground line and the second ground line may intersect with each other to form a grid pattern on the third surface and may be electrically connected to each other at the intersection thereof.

[0033] The grid formed by the first and second ground lines has a plurality of gaps, each of which is a plurality of intervals. Each interval is defined by two adjacent first ground lines and two adjacent second ground lines intersecting the adjacent two first ground lines, and is located on the other side of the four spaces in the first direction.

[0034] Two spaces may be provided between two adjacent first detection lines and one first driving line located between the two adjacent first detection lines. Alternatively, when viewed from one side in the first direction, two spaces may be provided between two adjacent first driving lines and one first detection line located between the two adjacent first driving lines.

[0035] A gap may be provided between two adjacent first ground lines, and the gap may be located on the other side of the two spaces in the first direction.

[0036] The detection electrode may further include a fifth drive line having a ring shape or a partially discontinuous ring shape. If the third detection line is provided, the fifth drive line may be arranged on the first surface so as to surround the third detection line. If the third detection line is not provided, the fifth drive line may be arranged on the first surface so as to surround at least the first detection line.

[0037] The ground electrode may include a third ground line having a ring shape or a partially discontinuous ring shape. The third ground line may be disposed on the first surface so as to surround the fifth driving line. The third ground line may be disposed on the first surface so as not to surround the fifth driving line but to surround the first detection line, the second detection line, and / or the third detection line.

[0038] The ground electrode may further include at least one fourth ground line electrically connected to the first ground line. The at least one fourth ground line may be arranged on the third surface so as to overlap with at least one first drive line when viewed from one side in the first direction. The fourth ground line, or each fourth ground line, may be located between two adjacent first ground lines, such that a gap exists between the fourth ground line, or each fourth ground line, and the two adjacent first ground lines. In this case, the gap may be located on the other side of the space in the first direction.

[0039] The at least one fourth ground line may include a plurality of fourth ground lines.The fourth ground lines may be arranged on the third surface so as to overlap with corresponding first driving lines when viewed from one side in the first direction.

[0040] The ground electrode may include a plurality of sixth ground lines and a plurality of seventh ground lines. The sixth and seventh ground lines may intersect with each other to form a grid pattern on the third surface and may be electrically connected to each other at their intersections. The sixth ground line may include a plurality of first ground lines. The sixth ground line may also include a plurality of fourth ground lines.

[0041] The grid formed by the sixth ground line and the seventh ground line may have a plurality of gaps, wherein the plurality of gaps are a plurality of intervals. The intervals may include a plurality of intervals located between two adjacent first ground lines and the fourth ground line and located on the other side of the space in the first direction.

[0042] The detection electrode may further include a plurality of fourth detection lines. When the first driving lines are arranged on the first surface, the fourth detection lines may be arranged on the second surface so as to overlap with corresponding first driving lines when viewed from one side in the first direction.

[0043] The detection electrode may further include at least one fifth detection line electrically connected to the first detection line, the at least one second detection line, and the fourth detection line. The at least one fifth detection line may intersect the fourth detection line on the second surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1A 1 is a schematic plan view of a capacitance sensor according to a first embodiment of the present invention (wherein a substrate of the capacitance sensor is shown as transparent), illustrating a superimposed relationship among a detection electrode, a drive electrode, and a ground electrode.

[0045] Figure 1B FIG. 1 is a schematic bottom view of the capacitance sensor of the first embodiment (wherein the substrate of the capacitance sensor is shown as transparent), illustrating the superimposed relationship between the detection electrode, the drive electrode, and the ground electrode.

[0046] Figure 1C 1 is a diagram illustrating the relationship between the detection electrodes, the drive electrodes, and the controller of the capacitance sensor according to the first embodiment.

[0047] Figure 2A The capacitance sensor of the first embodiment is along Figure 1A A cross-sectional view taken along line 2A-2A in FIG.

[0048] Figure 2B The capacitance sensor of the first embodiment is along Figure 1A A cross-sectional view taken along line 2B-2B in FIG.

[0049] Figure 2C The capacitance sensor of the first embodiment is along Figure 1A A cross-sectional view taken along line 2C-2C in FIG.

[0050] Figure 2D The capacitance sensor of the first embodiment is along Figure 1A A cross-sectional view taken along line 2D-2D in FIG.

[0051] Figure 3A 1 is a schematic plan view showing relative positions of first to third detection lines of the detection electrodes and a fifth driving line of the driving electrodes on the first surface of the substrate of the capacitance sensor according to the first embodiment.

[0052] Figure 3B 1 is a schematic plan view showing relative positions of first to fourth driving lines of the driving electrodes on the second surface of the substrate of the capacitance sensor according to the first embodiment.

[0053] Figure 3C 1 is a schematic plan view showing relative positions of a first ground line and a second ground line of a ground electrode on the third surface of the substrate of the capacitance sensor according to the first embodiment.

[0054] Figure 4A It is a schematic plan view of a first modified form of the capacitance sensor of the first embodiment (in which the substrate of the capacitance sensor is shown as transparent), illustrating the superimposed relationship among the detection electrode, the drive electrode, and the ground electrode.

[0055] Figure 4B FIG. 1 is a schematic bottom view of a capacitive sensor in a first modified form (wherein the substrate of the capacitive sensor is shown as transparent), illustrating the superimposed relationship between the detection electrode, the driving electrode, and the ground electrode.

[0056] Figure 5A The first variant of the capacitive sensor is along Figure 4A A cross-sectional view taken along line 5A-5A in FIG.

[0057] Figure 5B The first variant of the capacitive sensor is along Figure 4A A cross-sectional view taken along line 5B-5B in FIG.

[0058] Figure 5C The first variant of the capacitive sensor is along Figure 4A A cross-sectional view taken along line 5C-5C in FIG.

[0059] Figure 5D The first variant of the capacitive sensor is along Figure 4A A cross-sectional view taken along line 5D-5D in FIG.

[0060] Figure 6A 1 is a schematic plan view showing relative positions of first to third detection lines of the detection electrodes and a fifth drive line of the drive electrodes on the first surface of the substrate of the capacitance sensor of the first modification.

[0061] Figure 6B FIG. 1 is a schematic plan view showing relative positions of a first driving line and a second driving line of a driving electrode on a second surface of a substrate of a capacitive sensor of a first modification.

[0062] Figure 6C 1 is a schematic plan view showing relative positions of a first ground line and a second ground line of a ground electrode on a third surface of a substrate of a capacitance sensor of a first modification.

[0063] Figure 7A This is a schematic plan view of a second modified form of the capacitance sensor of the first embodiment (wherein the substrate of the capacitance sensor is shown as transparent), illustrating the superimposed relationship among the detection electrode, the drive electrode, and the ground electrode.

[0064] Figure 7B 1 is a schematic plan view of a second modified form of a capacitance sensor, illustrating the positional relationship among the first and second detection lines of the detection electrode, the fifth drive line of the drive electrode, and the third ground line of the ground electrode on the first surface of the substrate.

[0065] Figure 8A This is a schematic plan view of a third modified form of the capacitance sensor of the first embodiment, illustrating the positional relationship between the first and second detection lines on the first surface of the substrate of the capacitance sensor and the first and second drive lines on the second surface of the substrate.

[0066] Figure 8B This is a schematic plan view of a fourth modified form of the capacitance sensor of the first embodiment, illustrating the positional relationship between the first and second detection lines on the first surface of the substrate of the capacitance sensor and the first drive line and the second drive line on the second surface of the substrate.

[0067] Figure 8C This is a schematic plan view of a fifth variation of the capacitance sensor of the first embodiment, illustrating the positional relationship between the first and second detection lines and the second drive lines on the first surface of the substrate of the capacitance sensor and the first drive lines on the second surface of the substrate.

[0068] Figure 8DThis is a schematic plan view of a sixth modification of the capacitance sensor of the first embodiment, illustrating the positional relationship between the first and second detection lines and the first and second drive lines on the first surface of the substrate of the capacitance sensor.

[0069] Figure 8E This is a schematic plan view of a seventh variation of the capacitance sensor of the first embodiment, illustrating the positional relationship between the first detection line and the first and second drive lines on the first surface of the substrate of the capacitance sensor and the first detection line on the second surface of the substrate.

[0070] Figure 8F This is a schematic plan view of an eighth variation of the capacitance sensor of the first embodiment, illustrating the positional relationship between the first detection line and the second drive line on the first surface of the substrate of the capacitance sensor and the second detection line and the first drive line on the second surface of the substrate.

[0071] Figure 8G This is a schematic plan view of a ninth variation of the capacitance sensor of the first embodiment, illustrating the positional relationship between the first detection line and the first drive line on the first surface of the substrate of the capacitance sensor and the second detection line and the second drive line on the second surface of the substrate.

[0072] Figure 8H This is a schematic plan view of a tenth variation of the capacitance sensor of the first embodiment, illustrating the positional relationship between the first detection line on the first surface of the substrate of the capacitance sensor, the second detection line on the second surface of the substrate, and the first drive line and the second drive line.

[0073] Figure 9A 1 is a schematic plan view of a capacitance sensor according to a second embodiment of the present invention (wherein a substrate of the capacitance sensor is shown as transparent), illustrating a superimposed relationship among a detection electrode, a drive electrode, and a ground electrode.

[0074] Figure 9B FIG. 1 is a schematic bottom view of the capacitance sensor according to the second embodiment (wherein the substrate of the capacitance sensor is shown as transparent), illustrating the superimposed relationship among the detection electrode, the drive electrode, and the ground electrode.

[0075] Figure 10A The capacitance sensor of the second embodiment is along Figure 9A A cross-sectional view taken along line 10A-10A in FIG.

[0076] Figure 10B The capacitance sensor of the second embodiment is along Figure 9A A cross-sectional view taken along line 10B-10B in FIG.

[0077] Figure 10CThe capacitance sensor of the second embodiment is along Figure 9A A cross-sectional view taken along line 10C-10C in FIG.

[0078] Figure 10D The capacitance sensor of the second embodiment is along Figure 9A A cross-sectional view taken along line 10D-10D in FIG.

[0079] Figure 11A Schematic plan view showing relative positions of first and second detection lines of detection electrodes and first and fifth drive lines of drive electrodes on the first surface of the substrate of the capacitance sensor according to the second embodiment.

[0080] Figure 11B 1 is a schematic plan view showing relative positions of second and third drive lines of drive electrodes on the second surface of the substrate of the capacitance sensor according to the second embodiment.

[0081] Figure 11C 1 is a schematic plan view showing relative positions of a first ground line, a second ground line, and a fourth ground line and a fifth ground line of a ground electrode on the third surface of a substrate of a capacitance sensor according to a second embodiment.

[0082] Figure 12A 1 is a schematic plan view of a capacitance sensor according to a third embodiment of the present invention (wherein a substrate of the capacitance sensor is shown as transparent), illustrating a superimposed relationship between detection electrodes and drive electrodes.

[0083] Figure 12B FIG. 4 is a schematic bottom view of a capacitance sensor according to a third embodiment (wherein the substrate of the capacitance sensor is shown as transparent), illustrating the superimposed relationship between the detection electrodes and the drive electrodes.

[0084] Figure 13A The capacitance sensor of the third embodiment is along Figure 12A A cross-sectional view taken along line 13A-13A in FIG.

[0085] Figure 13B The capacitance sensor of the third embodiment is along Figure 12A A cross-sectional view taken along line 13B-13B in FIG.

[0086] Figure 13C The capacitance sensor of the third embodiment is along Figure 12A A cross-sectional view taken along line 13C-13C in FIG.

[0087] Figure 13D The capacitance sensor of the third embodiment is along Figure 12A A cross-sectional view taken along line 13D-13D in FIG.

[0088] Figure 14A Schematic plan view showing relative positions of first and second detection lines of detection electrodes and first and fifth drive lines of drive electrodes on the first surface of the substrate of the capacitance sensor according to the third embodiment.

[0089] Figure 14B 1 is a schematic plan view showing relative positions of fourth and fifth detection lines of the detection electrodes and third and fourth drive lines of the drive electrodes on the second surface of the substrate of the capacitance sensor according to the third embodiment.

[0090] Figure 15A 1 is a schematic plan view of a capacitance sensor according to a fourth embodiment of the present invention (wherein a substrate of the capacitance sensor is shown as transparent), illustrating a superimposed relationship among detection electrodes, drive electrodes, and ground electrodes.

[0091] Figure 15B FIG. 4 is a schematic bottom view of a capacitance sensor according to a fourth embodiment (wherein the substrate of the capacitance sensor is shown as transparent), illustrating the superimposed relationship among the detection electrode, the drive electrode, and the ground electrode.

[0092] Reference Symbol List

[0093] S1, S2, S3, S4: Capacitive sensors

[0094] 100: Substrate

[0095] 110: layer; 110a: first surface; 110b: second surface; 110c: third surface; 130 to 140: through-hole electrodes

[0096] 200, 200', 200": Detection electrodes

[0097] 210: First test line; 220: Second test line; 230: Third test line; 240: Fourth test line; 250: Fifth test line

[0098] 300, 300', 300": driving electrodes

[0099] 310: first driving line; 320: second driving line; 330: third driving line; 340: fourth driving line; 350: fifth driving line; 360: sixth driving line

[0100] 400, 400': Ground electrode

[0101] 410: First ground wire; 420: Second ground wire; 430: Third ground wire; 440: Fourth ground wire; 450: Fifth ground wire; 460: Sixth ground wire; 470: Seventh ground wire

[0102] 500: Controller

[0103] 510: Analog-to-digital converter (ADC); 520: I / O port; 530 to 550: External pins; CADC: Internal capacitor; CRX: External capacitor DETAILED DESCRIPTION

[0104] Hereinafter, the first, second, and third embodiments of the present invention and their variations will be described. It should be noted that the components of the embodiments and the variations described below can be combined with each other as long as no conflicts exist. It should also be noted that in various aspects of the embodiments and variations described below, the materials, shapes, sizes, quantities, and arrangements of the components are merely examples and can be designed and modified in any manner as long as the same functions are achieved.

[0105] First embodiment

[0106] In the following, reference Figures 1A to 8H A capacitive sensor S1 (may be simply referred to as sensor S1 ) according to various embodiments of the present invention will be described, including a first embodiment and variations thereof. Figures 1A to 3C A sensor S1 according to a first embodiment is shown. Figures 4A to 6C A first variant of the sensor S1 of the first embodiment is shown. Figure 7A and Figure 7B A second variant of the sensor S1 of the first embodiment is shown. Figures 8A to 8H Third to tenth modified forms of the sensor S1 of the first embodiment are shown. Figures 2A to 2D and 5A to 5D The ZZ' direction (first direction) corresponds to the thickness direction of the substrate 100 of the sensor S1 and includes the Z direction (one side in the first direction) and the Z' direction (the other side in the first direction). Figure 1A 、 Figure 1B 、 Figures 3A to 3C 、 Figure 4A 、 Figure 4B and Figures 6A to 8H The Y-Y' direction (second direction) and the X-X' direction (third direction) are shown. The Y-Y' and X-X' directions are substantially orthogonal to the Z-Z' direction. The Y-Y' direction includes the Y direction (one side in the second direction) and the Y' direction (the other side in the second direction). The X-X' direction only needs to intersect the Y-Y' direction and may be substantially orthogonal to the Y-Y' direction. The X-X' direction includes the X direction (one side in the third direction) and the X' direction (the other side in the third direction).

[0107] The sensor S1 is configured to detect a touch of a detection target, such as a user's finger, on the detection surface from the Z-direction side, thereby distinguishing the detection target from conductive deposits, such as water, that may adhere to the detection surface. When in use, the sensor S1 is housed in a housing of a vehicle or electronic device. The detection surface can be arranged in the housing on the Z-direction side relative to the sensor S1. Alternatively, the detection surface can be the surface of the substrate 100 on the most Z-direction side. These two detection surfaces will be described herein without distinguishing between them, but it should be noted that the detection surface can be arranged in the housing as described above, that is, it may not be a component of the sensor S1.

[0108] The sensor S1 includes the substrate 100 mentioned above. The substrate 100 includes at least one layer 110. The layer 110 or each layer 110 is insulating. In the case where the at least one layer 110 includes a single layer 110 (not shown), the substrate 100 is composed of the layer 110. In this case, the layer 110 is composed of, for example, a single-phase plate or a synthetic resin film. In the case where the at least one layer 110 includes a plurality of layers 110 (see Figures 2A to 2D and 5A to 5D ), the substrate 100 is composed of a plurality of layers 110 laminated in the Z-Z' direction. In this case, the substrate 100 is composed of, for example, a multilayer board or a multilayer film, and the plurality of layers 110 are composed of a plurality of layers of the multilayer board laminated in the Z-Z' direction, or alternatively, are composed of a plurality of synthetic resin films laminated in the Z-Z' direction of a multilayer film. The synthetic resin film is made of, for example, one of the following materials or a polymer alloy in which multiple materials are selected from the following materials or a mixture thereof: polycarbonate (PC), polystyrene (PS), cyclic olefin copolymer (COC), cyclic olefin polymer (COP), polymethyl methacrylate (PMMA), or polypropylene (PP). The substrate 100 may be flat, or may be partially or fully curved to form a curved surface.

[0109] One or more layers 110 have a first face 110a and a second face 110b. The layer 110 or each layer 110 has a face on the Z-direction side and a face on the Z'-direction side. The first face 110a is one of the faces on the Z-direction side and the Z'-direction side of the one or more layers 110. The second face 110b is a face on the Z-direction side and the Z'-direction side of the one or more layers 110 that is different from the first face 110a. The second face 110b can be a face on the Z-direction side and the Z'-direction side of the one or more layers 110 that is located on the Z'-direction side relative to the first face 110a. The one or more layers 110 may also include a plurality of through-hole electrodes (not shown). The plurality of through-hole electrodes may be omitted.

[0110] When the at least one layer 110 includes a plurality of layers 110, the layer 110 may further include a third surface 110c in addition to the first surface 110a and the second surface 110b. The third surface 110c is one of the surfaces different from the first surface 110a and the second surface 110b and located on the Z' direction side relative to the first surface 110a and the second surface 110b.

[0111] The sensor S1 also includes a detection electrode 200. The detection electrode 200 serves the dual function of a detection electrode for self-capacitance sensing and a detection electrode for mutual capacitance sensing. The detection electrode 200 includes a plurality of first detection lines 210 electrically connected to each other. The first detection lines 210 are made of a conductive material. For example, the first detection lines 210 may be: (a) formed of a conductor formed on the first surface 110a of the substrate 100 by a known printing method, photolithography, or other means; or (b) formed by forming a conductor on the first surface 110a of the substrate 100 by sputtering, chemical plating, or vapor deposition and then removing unnecessary portions of the conductor by laser etching or chemical etching. The first detection lines 210 may extend straight in the Y-Y' direction, or may be partially or completely curved but extend generally in the Y-Y' direction. The Y-Y' direction may be, but is not necessarily, the direction in which a conductor deposit adhered to the detection surface falls under the action of its own weight (wherein, if the conductor deposit is water, this direction is the direction in which the water moves under the action of its own weight). The first inspection lines 210 are arranged at intervals in the XX' direction on the first surface 110a of the substrate 100. The YY' direction corresponds to the longitudinal direction of the first inspection lines 210, and the XX' direction corresponds to the arrangement direction of the first inspection lines 210.

[0112] The sensor S1 also includes a driving electrode 300. The driving electrode 300 is a driving electrode for mutual capacitance sensing. The driving electrode 300 includes a plurality of first driving lines 310 electrically connected to each other. The first driving line 310 is made of a material that is the same as or similar to the material of the first detection line 210. The first driving line 310 may extend straight in the Y-Y' direction, or may be partially or completely bent but generally extend in the Y-Y' direction. The first driving line 310 is arranged on one of the first surface 110a and the second surface 110b of the substrate 100, and when viewed from the Z direction side, each of them is located between two adjacent first detection lines 210. In other words, when viewed from the Z direction side, the first driving line 310 and the first detection line 210 are alternately arranged one after another in the X-X' direction. In the case where the first driving line 310 is provided on the first surface 110a (see Figure 8B 、 Figure 8D 、 Figure 8E and Figure 8G), each first driving line 310 is spaced apart from two adjacent first detection lines 210. Therefore, the first driving line 310 is not electrically connected to any first detection line 210. In the case where the first driving line 310 is disposed on the second surface 110b (see Figure 8A 、 Figure 8C 、 Figure 8F and Figure 8H ), the first driving line 310 is disposed on the second surface 110b, which is different from the first surface 110a on which the first detection line 210 is disposed. Therefore, the first driving line 310 is not electrically connected to any first detection line 210. Figure 8B 、 Figure 8D 、 Figure 8E and Figure 8G The first detection lines 210 and the first driving lines 310 on the first surface 110 a are shown by solid lines. Figure 8A 、 Figure 8C 、 Figure 8F and Figure 8H The first detection lines 210 on the first surface 110 a are shown by solid lines, and the first driving lines 310 on the second surface 110 b are shown by dotted lines.

[0113] The size of the first driving line 310 in the YY′ direction may be larger than, substantially equal to, or smaller than that of the first testing line 210 .

[0114] The detection electrode 200 may further include at least one second detection line 220. The one or more second detection lines 220 are electrically connected to the plurality of first detection lines 210, but are not electrically connected to the plurality of first drive lines 310. The one or more second detection lines 220 are made of a material that is the same as or similar to that of the first detection lines 210. The one or more second detection lines 220 may extend straight in the XX' direction, or may be partially or completely bent but generally extend in the XX' direction. The one or more second detection lines 220 are arranged on one of the first surface 110a and the second surface 110b of the substrate 100. For example, the one or more second detection lines 220 may have one of the following configurations (1) to (4). Figures 8A to 8D The second detection line 220 on the first surface 110a is shown by a solid line. Figures 8E to 8H The second detection line 220 on the second surface 110 b is shown by a dotted line.

[0115] (1) The at least one second inspection line 220 includes a single second inspection line 220 disposed on the first surface 110a of the substrate 100. The second inspection line 220 intersects with the plurality of first inspection lines 210 and is electrically connected to the first inspection lines 210 at the intersections.

[0116] (2) The at least one second inspection line 220 includes a plurality of second inspection lines 220 arranged at intervals in the YY′ direction on the first surface 110 a of the substrate 100 (see Figures 8A to 8D ). The second detection line 220 intersects with the plurality of first detection lines 210 and is electrically connected to the first detection lines 210 at the intersection. For example, the first detection lines 210 and the second detection lines 220 may intersect with each other to form a grid pattern (see Figures 1A to 7B In this case, the first and second inspection lines 210 and 220 may be formed of the aforementioned conductors or a metal plate in a mesh pattern.

[0117] (3) The at least one second detection line 220 includes a single second detection line 220 arranged on the second surface 110b of the substrate 100. The second detection line 220 intersects with the plurality of first detection lines 210 when viewed from the Z direction and is electrically connected to the first detection lines 210 via the through-hole electrodes of the substrate 100.

[0118] (4) The at least one second inspection line 220 includes a plurality of second inspection lines 220 arranged at spaced intervals on the second surface 110b of the substrate 100 (see Figures 8E to 8H The second inspection lines 220 intersect with the plurality of first inspection lines 210 when viewed from the Z direction side, and are electrically connected to the first inspection lines 210 via corresponding through-hole electrodes of the substrate 100 .

[0119] In the case where at least one second detection line 220 and the plurality of first driving lines 310 are provided on the same surface (the first surface 110a or the second surface 110b) of the substrate 100, the at least one second detection line 220 is arranged away from the first driving lines 310 (see FIG. Figure 8B 、 Figure 8D 、 Figure 8F and Figure 8H For example, at least one second detection line 220 may intersect one end portion of the first detection line 210 in the longitudinal direction when viewed from the Z direction side, and the first driving line 310 may be arranged between the other end portions of the first detection line 210 in the longitudinal direction.

[0120] The driving electrode 300 may further include at least one second driving line 320. The one or more second driving lines 320 are electrically connected to the plurality of first driving lines 310, but are not connected to the plurality of first detection lines 210, nor are they connected to the one or more second detection lines 220. The one or more second driving lines 320 are made of a material that is the same as or similar to that of the first detection lines 210. The one or more second driving lines 320 may extend straight in the XX' direction, or may be partially or completely bent but extend generally in the XX' direction. The one or more second driving lines 320 are arranged on one of the first surface 110a and the second surface 110b of the substrate 100. For example, the at least one second driving line 320 may have one of the following configurations (5) to (12). Figure 8C 、 Figure 8D 、 Figure 8E and Figure 8F The second driving line 320 on the first surface 110a is shown by a solid line. Figure 8A 、 Figure 8B 、 Figure 8G and Figure 8H The second driving lines 320 on the second face 110 b are shown by dashed lines.

[0121] (5) On the premise that one or more second detection lines 220 are provided on the first surface 110a of the substrate 100 and a plurality of first driving lines 310 are provided on the second surface 110b of the substrate 100 (see Figure 8A ), one or more second driving lines 320 are arranged on the second surface 110b of the substrate 100, intersecting with the first driving lines 310, and electrically connected to the first driving lines 310 at the intersection. In the case where the at least one second driving line 320 includes a plurality of second driving lines 320 and the at least one second detection line 220 includes a plurality of second detection lines 220, the first detection lines 210 and the second detection lines 220 may intersect with each other to form a grid pattern on the first surface 110a, and the first driving lines 310 and the second driving lines 320 may intersect with each other to form a grid pattern on the second surface 110b (see Figures 4A to 7BIn this case, each first drive line 310 is arranged on the second surface 110b between two adjacent first detection lines 210 when viewed from the Z-direction side, and each second drive line 320 is arranged on the second surface 110b between two adjacent second detection lines 220 when viewed from the Z-direction side. In other words, the first drive lines 310 and the first detection lines 210 are arranged alternately in succession in the XX' direction when viewed from the Z-direction side, and the second drive lines 320 and the second detection lines 220 are arranged alternately in succession in the YY' direction when viewed from the Z-direction side. The first drive lines 310 and the second drive lines 320 that intersect in a grid pattern can be formed from the above-mentioned conductors or from a metal plate in a grid pattern, similar to the formation of the first detection lines 210 and the second detection lines 220 that intersect in a grid pattern.

[0122] (6) On the premise that one or more second detection lines 220 are provided on the second surface 110b of the substrate 100 and a plurality of first driving lines 310 are provided on the first surface 110a of the substrate 100 (see Figure 8G ), one or more second driving lines 320 are arranged on the second surface 110b of the substrate 100 away from the one or more second detection lines 220, and intersect with the first driving line 310 when viewed from the Z direction. One second driving line 320 is electrically connected to the first driving line 310 at the intersection via a through-hole electrode of the substrate 100, or alternatively, multiple second driving lines 320 are electrically connected to the first driving line 310 at the intersection via corresponding through-hole electrodes of the substrate 100.

[0123] (7) On the premise that one or more second detection lines 220 are provided on the first surface 110a of the substrate 100 and a plurality of first driving lines 310 are provided on the second surface 110b of the substrate 100 (see Figure 8C ), one or more second driving lines 320 are arranged on the first surface 110a of the substrate 100 away from the first detection line 210 and the one or more second detection lines 220, and intersect with the first driving line 310 when viewed from the Z direction side. One second driving line 320 is electrically connected to the first driving line 310 at the intersection via the through-hole electrode of the substrate 100, or alternatively, multiple second driving lines 320 are electrically connected to the first driving line 310 at the intersection via corresponding through-hole electrodes of the substrate 100.

[0124] (8) On the premise that one or more second detection lines 220 are provided on the second surface 111b of the substrate 100 and a plurality of first driving lines 310 are provided on the first surface 110a of the substrate 100 (see Figure 8E ), one or more second driving lines 320 are arranged on the first surface 110a of the substrate 100 away from the first detection line 210, intersect with the first driving line 310, and are electrically connected to the first driving line 310 at the intersection.

[0125] (9) On the premise that one or more second detection lines 220 and a plurality of first driving lines 310 are provided on the first surface 110a of the substrate 100 (see Figure 8B ), one or more second driving lines 320 are arranged on the second surface 110b of the substrate 100 and intersect with the first driving line 310 when viewed from the Z direction. One second driving line 320 is electrically connected to the first driving line 310 at the intersection via the through-hole electrode of the substrate 100, or alternatively, multiple second driving lines 320 are electrically connected to the first driving line 310 via corresponding through-hole electrodes of the substrate 100.

[0126] (10) On the premise that one or more second detection lines 220 and a plurality of first driving lines 310 are provided on the first surface 110a of the substrate 100 (see Figure 8D ), one or more second driving lines 320 are arranged on the first surface 110a of the substrate 100 away from the multiple first detection lines 210 and the one or more second detection lines 220, intersect with the first driving lines 310, and are electrically connected to the first driving lines 310 at the intersection.

[0127] (11) On the premise that one or more second detection lines 220 are provided on the second surface 110b of the substrate 100 and a plurality of first driving lines 310 are provided on the second surface 110b of the substrate 100 (see Figure 8F ), one or more second driving lines 320 are arranged on the first surface 110a of the substrate 100 away from the plurality of first detection lines 210, and intersect with the first driving lines 310 when viewed from the Z direction. One second driving line 320 is electrically connected to the first driving line 310 at the intersection via a through-hole electrode of the substrate 100, or alternatively, multiple second driving lines 320 are electrically connected to the first driving line 310 via corresponding through-hole electrodes of the substrate 100.

[0128] (12) On the premise that one or more second detection lines 220 are provided on the second surface 111b of the substrate 100 and a plurality of first driving lines 310 are provided on the second surface 110b of the substrate 100 (see Figure 8H ), one or more second driving lines 320 are arranged on the second surface 110b of the substrate 100 away from the one or more second detection lines 220, intersect with the first driving lines 310, and are electrically connected to the first driving lines 310 at the intersection.

[0129] The dimension of the or each second driving line 320 in the XX′ direction may be greater than, substantially equal to, or smaller than a dimension of the at least one second detection line 220 .

[0130] The driving electrode 300 may further include at least one third driving line 330. The one or more third driving lines 330 are electrically connected to the plurality of first driving lines 310 and the one or more second driving lines 320, but are not electrically connected to the plurality of first detection lines 210 or the one or more second detection lines 220. The one or more third driving lines 330 are made of a material that is the same as or similar to that of the first detection lines 210.

[0131] When the at least one third driving line 330 includes a single third driving line 330 , the third driving line 330 is arranged on the second surface 110 b of the substrate 100 so as to extend substantially along one first sensing line 210 and overlap with the first sensing line 210 when viewed from the Z direction side.

[0132] In the case where the at least one third driving line 330 includes a plurality of third driving lines 330, the third driving lines 330 are arranged on the second surface 110b of the substrate 100 so as to extend substantially along the corresponding first detection lines 210 and overlap with the corresponding first detection lines 210 when viewed from the Z direction. In this case, the third driving lines 330 and the first driving lines 310 are alternately arranged in succession in the arrangement direction (XX' direction) thereof.

[0133] The width dimension (dimension in the XX' direction) of the third drive line 330 or each third drive line 330 can be substantially the same as the width dimension of the overlapping first detection line 210, but this is not required. In the case where one or more second detection lines 220 are arranged on the second surface 110b, the one or more third drive lines 330 are arranged away from the one or more second detection lines 220 on the second surface 110b. The dimension of the third drive line 330 or each third drive line 330 in the YY' direction can be greater than, substantially equal to, or less than the dimension of the overlapping first detection line 210.

[0134] The driving electrode 300 may further include at least one fourth driving line 340. In this case, at least one second sensing line 220 is arranged on the first surface 110a of the substrate 100. The one or more fourth driving lines 340 are electrically connected to the plurality of first driving lines 310, the one or more second driving lines 320, and the one or more third driving lines 330, but are not electrically connected to the plurality of first sensing lines 210 or the one or more second sensing lines 220. The one or more fourth driving lines 340 are made of a material that is the same as or similar to that of the first sensing lines 210.

[0135] When the at least one fourth driving line 340 includes a single fourth driving line 340, the fourth driving line 340 is arranged on the second surface 110b of the substrate 100 so as to extend substantially along the second detection line 220 or one of the second detection lines 220 and overlap with the second detection line 220 or one of the second detection lines 220 when viewed from the Z direction. The fourth driving line 340 intersects at least one or more third driving lines 330 and is electrically connected to the one or more third driving lines 330 at one or more intersections.

[0136] In the case where the at least one fourth driving line 340 includes a plurality of fourth driving lines 340 and the at least one second detection line 220 includes a plurality of second detection lines 220 (see Figures 1A to 2D and Figure 3B ), the fourth driving lines 340 are arranged on the second surface 110b of the substrate 100 so as to extend along the corresponding second detection lines 220 and overlap with the corresponding second detection lines 220 when viewed from the Z direction. The fourth driving lines 340 intersect with at least one or more third driving lines 330 and are electrically connected to the one or more third driving lines 330 at the intersection.

[0137] The width (dimension in the YY' direction) of the fourth driving line 340 or each fourth driving line 330 may be substantially the same as the width of the overlapping second detection line 220, but this is not required. The dimension in the XX' direction of the fourth driving line 340 or each fourth driving line 340 may be greater than, substantially equal to, or less than the dimension of the overlapping second detection line 220.

[0138] In the case where the plurality of second sensing lines 220 are provided on the first face 110 a of the substrate 100 and the plurality of first driving lines 310, the plurality of second driving lines 320, the plurality of third driving lines 330, and the plurality of fourth driving lines 340 are provided on the second face 110 b, the plurality of first sensing lines 210 and the second sensing lines 220 may intersect with each other to form a grid pattern on the first face 110 a, and the first driving lines 310, the second driving lines 320, the third driving lines 330, and the fourth driving lines 340 may be arranged to form a grid pattern on the second face 110 b. Figures 1A to 3C ). Similarly, in this case, each first driving line 310 is located between two adjacent first detection lines 210 when viewed from the Z direction, and each second driving line 320 is located between two adjacent second detection lines 220 when viewed from the Z direction. The first driving lines 310 and the third driving lines 330 are alternately arranged in sequence in their arrangement direction (XX' direction), and the second driving lines 320 and the fourth driving lines 340 are alternately arranged in sequence in their arrangement direction (YY' direction).

[0139] Regardless of whether the plurality of third driving lines 330 and the plurality of fourth driving lines 340 are provided, the plurality of first detection lines 210 and the plurality of second detection lines 220 intersect with each other to form a grid pattern on the first surface 110a, and the plurality of first driving lines 310 and the plurality of second driving lines 320 intersect with each other to form a grid pattern on the second surface 110b (see Figure 1A and Figure 4A ), when viewed from the Z direction, the grid formed by the first detection lines 210 and the second detection lines 220 has multiple gaps, each of which includes four spaces S. In other words, there are multiple groups of four spaces S. Each group of four spaces S is defined by two adjacent first detection lines 210, two adjacent second detection lines 220 intersecting the two adjacent first detection lines 210, a first driving line 310 located between the two adjacent first detection lines 210, and a second driving line 320 located between the two adjacent second detection lines 220.

[0140] The detection electrode 200 may further include a third detection line 230 (see Figure 1A 、 Figure 3A 、 Figure 4A 、 Figure 6A 、 Figure 7A and Figure 7B The third sense lines 230 are electrically connected to the plurality of first sense lines 210 and the one or more second sense lines 220, but are not electrically connected to the plurality of first drive lines 310, the one or more second drive lines 320, the one or more third drive lines 330, or the one or more fourth drive lines 340. The third sense lines 230 have a loop shape or a partially discontinuous loop shape and are made of a material that is the same as or similar to that of the first sense lines 210. The third sense lines 230 are disposed on the first surface 110a of the substrate 100, surround at least the first sense lines 210, and are coupled to opposite ends of the first sense lines 210 in the longitudinal direction. In the case where the one or more second inspection lines 220 are provided on the first surface 110a of the substrate 100 and the plurality of first driving lines 310 and the one or more second driving lines 320 are provided on the second surface 110b of the substrate 100, the third inspection line 230 is provided on the first surface 110a of the substrate 100, surrounds the first inspection lines 210 and the one or more second inspection lines 220, and is connected to opposite ends of the first inspection lines 210 and opposite ends of the one or more second inspection lines 220 in the longitudinal direction (see FIG. Figure 3A 、 Figure 6A and Figure 7B ). The third detection line 230 may be omitted.

[0141] In the case where the third detection line 230 is provided, the driving electrode 300 may further include a fifth driving line 350 (see FIG. Figure 1A 、 Figure 3A、 Figure 4A 、 Figure 6A 、 Figure 7A and Figure 7B The fifth driving line 350 has a loop shape or a partially discontinuous loop shape and is made of a material that is the same as or similar to that of the first sense lines 210. The fifth driving line 350 is arranged on the first side 110a of the substrate 100 and surrounds the third sense lines 230. The fifth driving line 350 is electrically connected to the plurality of first driving lines 310, the one or more second driving lines 320, the one or more third driving lines 330, and the one or more fourth driving lines 340, but is not electrically connected to the first sense lines 210, the one or more second sense lines 220, and the third sense lines 230. For example, when a plurality of first driving lines 310, one or more second driving lines 320, one or more third driving lines 330, and / or one or more fourth driving lines 340 are disposed on the second side 110b of the substrate 100, the fifth driving line 350 is electrically connected to the plurality of first driving lines 310, the one or more second driving lines 320, the one or more third driving lines 330, and / or the one or more fourth driving lines 340 via corresponding through-hole electrodes of the substrate 100. The fifth driving line 350 may be omitted.

[0142] In any of the above aspects, at least one second detection line 220 may be omitted. In addition, in any of the above aspects, at least one second drive line 320, at least one third drive line 330, and / or at least one fourth drive line 340 may be omitted. The sensor S1 of the first embodiment has substantially the same configuration as the sensor S1 of the first variant, except for the presence or absence of a plurality of third drive lines 330 and a plurality of fourth drive lines 340. Therefore, in order to refer to the aspect in which the third drive line 330 and the fourth drive line 340 are omitted, it is recommended to refer to the sensor S1 of the first variant. Figures 4A to 6C .

[0143] The sensor S1 may further include a ground electrode 400 electrically connected to the ground of the substrate 100. The ground electrode 400 includes a plurality of first ground lines 410 electrically connected to one another. The first ground lines 410 are made of a material that is the same as or similar to that of the first sense lines 210. The first ground lines 410 generally extend along the corresponding first sense lines 210. In the absence of at least one third drive line 330, the first ground lines 410 are arranged on the third surface 110 c of the substrate 100 so as to overlap with the corresponding first sense lines 210 when viewed from the Z direction. The width dimension (dimension in the XX′ direction) of each first ground line 410 may be slightly larger than, substantially equal to, or smaller than the width dimension of the overlapping first sense lines 210. In the absence of at least one third drive line 330, the first ground lines 410 are arranged on the third surface 110 c of the substrate 100 so as to overlap with the corresponding first sense lines 210 and the corresponding third drive lines 330 when viewed from the Z direction. In this case, the width dimension (dimension in the XX′ direction) of each first ground line 410 may be slightly larger than or substantially equal to the width dimension of each of the overlapped first detection line 210 and the overlapped third driving line 330 .

[0144] The ground electrode 400 may further include at least one second ground line 420. The second ground line 420 or each second ground line 420 is made of a material that is the same as or similar to that of the first detection line 210. The second ground line 420 or each second ground line 420 extends along the at least one second detection line 220, intersects with the plurality of first ground lines 410, and is electrically connected to the first ground lines 410 at the intersection.

[0145] When the at least one second ground line 420 includes a single second ground line 420 and at least one fourth driving line 340 is not provided, the second ground line 420 is arranged on the third surface 110c of the substrate 100 so as to overlap with the single second detection line 220 or one of the second detection lines 220 when viewed from the Z direction side.

[0146] When at least one second ground line 420 includes multiple second ground lines 420, at least one second detection line 220 includes multiple second detection lines 220, and multiple fourth driving lines 340 are not provided, the second ground line 420 is arranged on the third surface 110c of the substrate 100, thereby overlapping with the corresponding second detection line 220 when viewed from the Z direction side.

[0147] The or each second ground line 420 may have a width (dimension in the XX′ direction) that is slightly larger than, substantially equal to, or smaller than a width of the overlapped second detection line 220 .

[0148] In the case where the at least one second ground line 420 includes a single second ground line 420 and at least one fourth driving line 340 is provided, the second ground line 420 is arranged on the third surface 110c of the substrate 100 so as to overlap with the single second detection line 220 and the single fourth driving line 340 when viewed from the Z-direction side, or alternatively, overlap with one of the second detection line 220 and the fourth driving line 340 when viewed from the Z-direction side.

[0149] When at least one second ground line 420 includes multiple second ground lines 420, at least one second detection line 220 includes multiple second detection lines 220, and multiple fourth driving lines 340 are provided, the second ground line 420 is arranged on the third surface 110c of the substrate 100 so as to overlap with the corresponding second detection line 220 and the corresponding fourth driving line 340 when viewed from the Z direction side.

[0150] The width (dimension in the YY′ direction) of the or each second ground line 420 may be slightly larger than, substantially equal to, or smaller than the width of each of the overlapping second detection line 220 and the overlapping fourth driving line 340 .

[0151] When the plurality of first detection lines 210 and the plurality of second detection lines 220 intersect with each other to form a grid pattern on the first surface 110a, the plurality of first ground lines 410 and the plurality of second ground lines 420 may also intersect with each other to form a grid pattern on the third surface 110c (see Figures 1A to 7B The first ground line 410 and / or the at least one second ground line 420 may be omitted. If both the first ground line 410 and the at least one second ground line 420 are omitted, the third surface 110 c of the substrate 100 may also be omitted. The plurality of first ground lines 410 and the plurality of second ground lines 420 intersecting in a grid pattern may be formed from the aforementioned conductors or from a metal plate in a grid pattern, similar to the first detection lines 210 and the second detection lines 220 intersecting in a grid pattern.

[0152] When the plurality of first ground lines 410 and the plurality of second ground lines 420 intersect each other to form a grid pattern, the grid formed by the first ground lines 410 and the second ground lines 420 has a plurality of gaps (second gaps), that is, a plurality of intervals G (see Figure 3C and Figure 6C Each interval G is defined by two adjacent first ground lines 410 and two adjacent second ground lines 420 intersecting the two adjacent first ground lines 410. Each interval G is relative to the four spaces S of the corresponding group (see Figure 1B and Figure 4B ) is located on the Z' direction side.

[0153] The ground electrode 400 may further include a third ground line 430. The third ground line 430 has a ring shape or a partially discontinuous ring shape and is made of a material that is the same as or similar to that of the first detection line 210. In the case where the fifth driving line 350 is provided, the third ground line 430 is arranged on the first surface 110a of the substrate 100, thereby surrounding the fifth driving line 350 (see Figure 7A and Figure 7B ). In the case where the fifth driving line 350 is not provided, the third ground line 430 is provided on the first surface 110a of the substrate 100 and surrounds at least the first detection line 210. The third ground line 430 may be omitted (see Figures 1A to 6C ).

[0154] The sensor S1 may further include a controller 500. The controller 500 only needs to be composed of a logic circuit such as a detection IC, software for processing by a processor, etc., and is electrically connected to the detection electrode 200 and the drive electrode 300. The controller 500 can be mounted on the substrate 100 or arranged in the substrate 100, but it does not have to be so. The controller 500 is configured to charge and discharge the detection electrode 200 and supply a drive pulse to the drive electrode 300. When the detection target approaches the detection electrode 200 while the detection electrode 200 is charging and discharging, the approach causes the first capacitance between the detection electrode 200 and the detection target to change. When the detection target approaches the detection electrode 200 and the drive electrode 300 while the drive pulse is supplied to the drive electrode 300 (which can be simply referred to as "during the supply of the drive pulse"), the approach causes the second capacitance between the detection electrode 200 and the drive electrode 300 to change. The controller 500 is also configured to detect the detection target based on the changes in the first capacitance and the second capacitance.

[0155] For example, the controller 500 may include an internal capacitor CADC, an analog-to-digital converter (ADC) 510, an I / O port 520, an external pin 530, an external pin 540, and an external pin 550 (see FIG. Figure 1C ). The internal capacitor CADC can be connected to external pins 530 and 540. The external pin 540 can be connected to the ground of the substrate 100. The external pin 530 can be connected to the detection electrode 200, and the external capacitor CRX can be set between the detection electrode 200 and the ground. The I / O port 520 can be connected to the drive electrode 300 via the external pin 550, and the drive pulse can be supplied to the drive electrode 300 from the I / O port 520. By supplying the drive pulse to the drive electrode 300, a mutual capacitance CTXRX (which can be referred to as a second capacitance CTXRX) is formed between the drive electrode 300 and the detection electrode 200. The controller 500 includes a memory (not shown) that stores the first threshold value and the second threshold value.

[0156] The second capacitor CTXRX includes at least a first mutual capacitance. Because each first driving line 310 of the driving electrode 300 is located between two adjacent first detection lines 210 of the detection electrode 200 when viewed from the Z direction, a first mutual capacitance is formed between the first driving line 310 and the adjacent first detection lines 210 during the supply of a driving pulse.

[0157] In the case where the plurality of first sense lines 210 and the plurality of second sense lines 220 of the sense electrode 200 intersect with each other to form a grid pattern, and the plurality of first drive lines 310 and the plurality of second drive lines 320 of the drive electrode 300 intersect with each other to form a grid pattern, and each second drive line 320 is located between two adjacent second sense lines 220 when viewed from the Z direction, the second capacitance CTXRX further includes a second mutual capacitance, a third mutual capacitance, and a fourth mutual capacitance. During the supply of a drive pulse, a second mutual capacitance is formed between the second drive line 320 and the second sense lines 220 adjacent thereto, a third mutual capacitance is formed between the first drive line 310 and portions of the plurality of intersections with the plurality of second sense lines 220 on the X-direction side and the X'-direction side, and a fourth mutual capacitance is formed between the second drive line 320 and portions of the plurality of intersections with the plurality of first sense lines 210 on the Y-direction side and the Y'-direction side. The intersection of the second detection line 220 is the portion where the second detection line 220 intersects the first driving line 310 when viewed from the Z direction. The intersection of the first detection line 210 is the portion where the first detection line 210 intersects the second driving line 320 when viewed from the Z direction.

[0158] When the third detection line 230 and the fifth driving line 350 are provided, the second capacitor CTXRX also includes a fifth mutual capacitance. Since the fifth driving line 350 surrounds the third detection line 230 with a spaced relationship, a fifth mutual capacitance is formed between the third detection line 230 and the fifth driving line 350 during the supply of the driving pulse.

[0159] When the third detection line 230 is provided and the dimension of each first drive line 310 in the Y-Y' direction is larger than the dimension of each first detection line 210 in the Y-Y' direction, the second capacitor CTXRX also includes a sixth mutual capacitance. In this case, each first drive line 310 includes a first portion and a second portion located on the Y-direction side and the Y'-direction side, respectively, relative to the third detection line 230 (the first portion and the second portion of each first drive line 310 are located outside the third detection line 230). During the supply of a drive pulse, a sixth mutual capacitance is formed between the third detection line 230 and the first portion and the second portion of the first drive line 310. When the third detection line 230 is provided and the dimension of the or each second drive line 320 in the XX' direction is larger than the or each second detection line 220, the second capacitor CTXRX also includes a seventh mutual capacitance. In this case, the second drive line 320, or each second drive line 320, includes a first portion and a second portion located on the X-direction side and the X'-direction side, respectively, relative to the third detection line 230 (the first portion and the second portion of the second drive line 320, or each second drive line 320, are located outside the third detection line 230). During the supply of a drive pulse, a seventh mutual capacitance is formed between the third detection line 230 and the first portion and the second portion of at least one second drive line 320. If a third detection line 230 is provided and the dimension of the third drive line 330, or each third drive line 330, in the Y-Y' direction is larger than the dimension of the overlapping first detection line 210, the second capacitance CTXRX also includes an eighth mutual capacitance. In this case, the third drive line 330, or each third drive line 330, includes a first portion and a second portion located on the Y-direction side and the Y'-direction side, respectively, relative to the third detection line 230 (the first portion and the second portion of the third drive line 330, or each third drive line 330, are located outside the third detection line 230). During the supply of a drive pulse, an eighth mutual capacitance is formed between the third detection line 230 and the first and second portions of at least one third drive line 330. If the third detection line 230 is provided and the dimension of the fourth drive line 340 or each fourth drive line 340 in the XX' direction is greater than the dimension of the second detection line 220 or each second detection line 220 in the XX' direction, the second capacitance CTXRX also includes a ninth mutual capacitance. In this case, the fourth drive line 340 or each fourth drive line 340 includes a first and second portion located on the X-direction side and the X'-direction side, respectively, relative to the third detection line 230 (the first and second portions of the fourth drive line 340 or each fourth drive line 340 are located outside the third detection line 230). During the supply of a drive pulse, a ninth mutual capacitance is formed between the third detection line 230 and the first and second portions of the at least one fourth drive line 340.

[0160] The controller 500 is configured to supply a driving pulse to the driving electrode 300 and repeat the following process steps (A) to (D).

[0161] (A) The controller 500 charges the internal capacitor CADC to the level VDD and discharges the external capacitor CRX to the level VSS.

[0162] (B) After step (A), the controller 500 connects the internal capacitor CADC to the external capacitor CRX and stabilizes the voltage of the two capacitors at the midpoint. At this point, charge moves from the internal capacitor CADC to the external capacitor CRX. After the voltage of the capacitors stabilizes, the controller 500 disconnects the internal capacitor CADC from the external capacitor CRX. The voltage of the internal capacitor CADC is then input to the ADC 510. This timing will be referred to as the first timing.

[0163] (C) After step (B), the controller 500 charges the external capacitor CRX to the level VDD and discharges the internal capacitor CADC to the level VSS.

[0164] (D) After step (C), the controller 500 connects the internal capacitor CADC to the external capacitor CRX and stabilizes the voltage of the two capacitors at the midpoint. At this point, charge moves from the external capacitor CRX to the internal capacitor CADC. After the voltage of the capacitors stabilizes, the controller 500 disconnects the internal capacitor CADC from the external capacitor CRX. The voltage of the internal capacitor CADC is then input to the ADC 510. This timing will be referred to as the second timing.

[0165] The signal of the drive pulse is at a low level in the above step (A), changes from a low level to a high level in the above step (B), remains at a high level in the above step (C), and changes from a high level to a low level in the above step (D). At the first timing in the above step (B), since the signal of the drive pulse is at a high level, the voltage of the internal capacitor CADC input to the ADC 510 increases compared to the case where the drive pulse is not supplied. At the second timing (D), since the signal of the drive pulse is at a low level, the voltage of the internal capacitor CADC input to the ADC 510 decreases compared to the case where the drive pulse is not supplied.

[0166] When the detection target touches the detection surface (i.e., the detection target approaches the detection electrode 200 and the drive electrode 300 from the Z direction side), the first capacitance between the detection target and the detection electrode 200 is added to the external capacitor CRX, and the charge of the second capacitance CTXRX between the drive electrode 300 and the detection electrode 200 is moved to the ground through the detection target, causing the second capacitance CTXRX to decrease. At the first timing, the voltage of the internal capacitor CADC decreases as the first capacitance increases, and the voltage of the internal capacitor CADC decreases as the second capacitance CTXRX decreases. In other words, at the first timing, the voltage of the internal capacitor CADC decreases according to the change in the first capacitance and the change in the second capacitance CTXRX. Therefore, compared with the case where the voltage of the internal capacitor CADC decreases according to the change in only the first capacitance or only the change in the second capacitance CTXRX, the voltage of the internal capacitor CADC decreases significantly. At the second timing, the voltage of the internal capacitor CADC increases as the first capacitance increases, and the voltage of the internal capacitor CDC increases as the second capacitance CTXRX decreases. In other words, at the second timing, the voltage of the internal capacitor CADC increases according to the change in the first capacitance and the change in the second capacitance CTXRX. Therefore, compared with a case where the voltage of the internal capacitor CADC increases in accordance with a change in only the first capacitance or only the second capacitance CTXRX, the voltage of the internal capacitor CADC significantly increases.

[0167] The controller 500 is configured to compare the voltage of the internal capacitor CADC at a first timing with a first threshold value and make a first determination as to whether the voltage of the internal capacitor CADC at the first timing is equal to or less than the first threshold value. The controller 500 compares the voltage of the internal capacitor CADC at a second timing with a second threshold value and makes a second determination as to whether the voltage of the internal capacitor CADC at the second timing is equal to or greater than the first threshold value. If the result of the first determination is that the controller 500 determines that the voltage of the internal capacitor CADC is equal to or less than the first threshold value and / or the result of the second determination is that the controller 500 determines that the voltage of the internal capacitor CADC is equal to or greater than the second threshold value, the controller 500 determines that the detection target has touched the detection surface.

[0168] On the other hand, when a conductive deposit such as water adheres to the detection surface (i.e., when the conductive deposit is present on the Z-direction side relative to the detection electrode 200), the first capacitance between the conductive deposit and the detection electrode 200 is added to the external capacitor CRX. Since the conductive deposit electrically floats relative to the ground, the capacitance of the conductive deposit is added to the second capacitance CTXRX between the drive electrode 300 and the detection electrode 200, so the second capacitance CTXRX increases by the capacitance of the conductive deposit. In this case, at the first timing, the voltage component of the internal capacitor CADC, which should decrease with the increase of the first capacitance, is offset by the voltage component of the internal capacitor CDC, which should increase with the increase of the second capacitance CTXRX. This offset causes the voltage of the internal capacitor CADC to change little or slightly at the first timing. At the second timing, the voltage component of the internal capacitor CADC, which should increase with the increase of the first capacitance, is offset by the voltage component of the internal capacitor CDC, which should decrease with the increase of the second capacitance CTXRX. This offset causes the voltage of the internal capacitor CADC to change little or slightly at the second timing. Therefore, when conductive deposits such as water adhere to the detection surface, the voltage of the internal capacitor CADC at the first timing does not drop to or below the first threshold, and the voltage of the internal capacitor CADC at the second timing does not reach or exceed the second threshold. Therefore, the controller 500 does not erroneously determine that the conductive deposit is the detection target in the results of the first and / or second determinations. Therefore, the controller 500 can detect the detection target touching the detection surface, thereby distinguishing the detection target from the conductive deposit.

[0169] The spacing in the XX' direction between the first drive lines 310 can be adjusted so that the first capacitance is substantially the same as the second capacitance CTXRX. For example, when the first capacitance is greater than the second capacitance CTXRX, the second capacitance CTXRX can be reduced by reducing the spacing in the XX' direction of the first drive lines 310 of the drive electrodes 300 so that the first capacitance is substantially the same as the second capacitance CTXRX. In this case, the spacing in the XX' direction between the first drive lines 310 can be smaller than the spacing in the XX' direction between the first detection lines 210. When the second capacitance CTXRX is greater than the first capacitance, the arrangement can be reversed. More specifically, the second capacitance CTXRX can be increased by expanding the spacing in the XX' direction between the first drive lines 310 of the drive electrodes 300 so that the first capacitance is substantially the same as the second capacitance CTXRX.

[0170] When multiple second detection lines 220 and multiple second drive lines 320 are provided, the spacing between the first drive lines 310 in the XX' direction and the spacing between the second drive lines 320 in the YY' direction can be adjusted so that the first capacitance and the second capacitance CTXRX are substantially the same. For example, if the first capacitance is greater than the second capacitance CTXRX, the second capacitance CTXRX can be reduced by reducing the spacing between the first drive lines 310 in the XX' direction and the spacing between the second drive lines 320 in the YY' direction of the drive electrode 300 so that the first capacitance and the second capacitance CTXRX are substantially the same. In this case, the spacing between the first drive lines 310 in the XX' direction can be smaller than the spacing between the first detection lines 210 in the XX' direction, and the spacing between the second drive lines 320 in the YY' direction can be smaller than the spacing between the second detection lines 220 in the YY' direction. If the second capacitance CTXRX is greater than the first capacitance, this arrangement can be reversed. More specifically, the second capacitance CTXRX may be increased by expanding the XX′-direction spacing between the first driving lines 310 of the driving electrodes 300 and the YY′-direction spacing between the second driving lines 320 so that the first capacitance and the second capacitance CTXRX are substantially the same.

[0171] The sensor S1 configured as described above provides the following technical features and effects.

[0172] Technical Features and Effects (1): When viewed from the Z-direction side, each first driving line 310 of the driving electrode 300 is located between two adjacent first detection lines 210 of the detection electrode 200. With this arrangement, the conductive deposit adhered to the detection surface is substantially located on the Z-direction side relative to at least one first driving line 310 and the first detection line 210 adjacent thereto, thereby making it possible to change the first mutual capacitance of the second capacitance CTXRX formed between at least one first driving line 310 and the first detection line 210 adjacent thereto. This change in the first mutual capacitance increases the possibility that the conductive deposit adhered to the detection surface changes the second capacitance CTXRX, thereby reducing the possibility that the controller 500 erroneously detects the conductive deposit as a detection target.

[0173] In a case where the plurality of first sense lines 210 and the plurality of second sense lines 220 of the sense electrode 200 intersect to form a grid pattern, and the plurality of first drive lines 310 and the plurality of second drive lines 320 of the drive electrode 300 intersect to form a grid pattern, each first drive line 310 is located between two adjacent first sense lines 210 of the sense electrode 200 when viewed from the Z direction, and each second drive line 320 is located between two adjacent second sense lines 220 when viewed from the Z direction, the conductive deposit adhered to the sense surface is substantially located in the Z direction relative to at least one first drive line 310 and its adjacent first sense line 210 and / or at least one second drive line 320 and its adjacent second sense line 220, thereby varying the first mutual capacitance, the second mutual capacitance, the third mutual capacitance, and / or the fourth mutual capacitance of the second capacitance CTXRX. A first mutual capacitance is formed between the at least one first drive line 310 and its adjacent first sense line 210, and a second mutual capacitance is formed between the at least one second drive line 320 and its adjacent second sense line 220. A third mutual capacitance is formed between each first drive line 310 and a portion on the X-direction side and the X'-direction side of the intersection portion with respect to the second detection line 220. A fourth mutual capacitance is formed between each second drive line 320 and a portion on the Y-direction side and the Y'-direction side of the intersection portion with respect to the first detection line 210. This change in mutual capacitance increases the likelihood that conductive deposits adhering to the detection surface will further change the second capacitance CTXRX, thereby further reducing the likelihood that the controller 500 will erroneously detect conductive deposits as detection targets.

[0174] In the case where the third sensing line 230 of the sensing electrode 200 and the fifth driving line 350 of the driving electrode 300 are provided, the conductive deposit adhered to the sensing surface is substantially located on the Z-direction side relative to the fifth driving line 350 and the third sensing line 230, thereby changing the fifth mutual capacitance of the second capacitance CTXRX formed between the fifth driving line 350 and the third sensing line 230. This change in the fifth mutual capacitance increases the likelihood that the conductive deposit adhered to the sensing surface will change the second capacitance CTXRX, thereby further reducing the likelihood that the controller 500 will erroneously detect the conductive deposit as a detection target.

[0175] In a case where the third detection line 230 of the detection electrode 200 is provided and the plurality of first drive lines 310, at least one second drive line 320, at least one third drive line 330, and / or at least one fourth drive line 340 of the drive electrode 300 each include a first portion and a second portion located outside the third detection line 230, the conductive deposit adhered to the detection surface is substantially located to the side in the Z direction relative to the first portion and / or second portion of at least one of the first drive line 310, the second drive line 320, the third drive line 330, and / or the fourth drive line 340 and the third detection line 230, thereby varying the sixth, seventh, eighth, and / or ninth mutual capacitances of the second capacitance CTXRX. A sixth mutual capacitance is formed between the third detection line 230 and the first portion and / or second portion of the at least one first drive line 310. A seventh mutual capacitance is formed between the third detection line 230 and the first portion and / or second portion of the at least one second drive line 320. An eighth mutual capacitance is formed between the third sense line 230 and the first portion and / or the second portion of the at least one third drive line 330. A ninth mutual capacitance is formed between the third sense line 230 and the first portion and / or the second portion of the at least one fourth drive line 340. This change in mutual capacitance increases the likelihood that conductive deposits adhering to the detection surface will change the second capacitance CTXRX, thereby further reducing the likelihood that the controller 500 will erroneously detect conductive deposits as detection targets.

[0176] Technical features and effects (2): When at least one third driving line 330 is provided, the third driving line 330 or each third driving line 330 on the second surface 110b of the substrate 100 overlaps with a corresponding first detection line 210 on the first surface 110a of the substrate 100, thereby playing the role of electromagnetic shielding to shield the corresponding first detection line 210 from the Z' direction side. Therefore, at least one first detection line 210 is not easily affected by electromagnetic waves from the Z' direction side. In addition, when at least one fourth driving line 340 is provided, the fourth driving line 340 or each fourth driving line 340 on the second surface 110b of the substrate 100 overlaps with the second detection line 220 or a corresponding second detection line 220 on the first surface 110a of the substrate 100, thereby playing the role of electromagnetic shielding to shield the corresponding second detection line 220 from the Z' direction side. Therefore, at least one second detection line 220 is not easily affected by electromagnetic waves from the Z' direction side.

[0177] Technical features and effects (3): When a plurality of first ground lines 410 are provided, the first ground line 410 or each first ground line 410 on the third surface 110c of the substrate 100 overlaps with a corresponding first detection line 210 on the first surface 110a of the substrate 100, thereby playing the role of electromagnetic shielding to shield the corresponding first detection line 210 from the Z' direction side. Therefore, at least one first detection line 210 is not easily affected by electromagnetic waves from the Z' direction side. In addition, when at least one second ground line 420 is provided, the second ground line 420 or each second ground line 340 on the third surface 110c of the substrate 100 overlaps with the second detection line 220 or a corresponding second detection line 220 on the first surface 110a or the second surface 110b of the substrate 100, thereby playing the role of electromagnetic shielding to shield the corresponding second detection line 220 from the Z' direction side. Therefore, at least one second detection line 220 is not easily affected by electromagnetic waves from the Z' direction side.

[0178] Technical Features and Effects (4): When the plurality of first detection lines 210 and the plurality of second detection lines 220 of the detection electrode 200 intersect with each other to form a grid pattern, and the plurality of first driving lines 310 and the plurality of second driving lines 320 of the driving electrode 300 intersect with each other to form a grid pattern, a plurality of groups of four spaces S are provided as described above and intervals G (i.e., a plurality of gaps in a grid formed by a plurality of first ground lines 410 and a plurality of second ground lines 420) are provided, and each interval G exists on the Z' direction side relative to the corresponding group of four spaces S. With this arrangement, during the supply of a driving pulse, some of the charges from the first driving line 310 and the second driving line 320 do not move to the plurality of intervals G, but move to the adjacent first detection line 210 and the second detection line 220, thereby suppressing the reduction of the first mutual capacitance to the fourth mutual capacitance.

[0179] Second embodiment

[0180] In the following, reference 9A to 11C A capacitive sensor S2 (may be simply referred to as sensor S2 ) according to various embodiments of the present invention will be described, including the second embodiment and its variations. 9A to 11C A sensor S2 according to a second embodiment is shown. 10A to 10D The ZZ' direction is also shown as in sensor S1. Figure 9A and Figure 9B as well as Figures 11A to 11C The XX' and YY' directions are also shown as in the sensor S1.

[0181] Sensor S2 has a configuration similar to that of sensor S1, but differs in the following points: (1) the detection electrode 200' includes a plurality of first detection lines 210 and a pair of second detection lines 220 on the first side 110a of the substrate 100; and (2) the drive electrode 300' includes a plurality of first drive lines 310 on the first side 110a of the substrate 100 and second drive lines 320' on the second side 110b of the substrate 100. These differences will be described in detail, and descriptions of sensor S2 that overlap with those of sensor S1 will be omitted.

[0182] The plurality of first detection lines 210 of the detection electrode 200' extend in the YY' direction and are arranged at intervals in the XX' direction (see Figure 9A and Figure 11A ). Each of the first detection lines 210 has a first end on the Y-direction side and a second end on the Y'-direction side. The first detection lines 210 include a first detection line 210 on the X-direction side and a first detection line 210 on the X'-direction side. The first detection line 210 on the X-direction side is the first detection line 210 located most toward the X-direction side. The first detection line 210 on the X'-direction side is the first detection line 210 located most toward the X'-direction side.

[0183] The pair of second detection lines 220 of the detection electrode 200' includes one and the other of the second detection lines 220. One second detection line 220 extends in the XX' direction and is connected to the first end of the first detection line 210. The other second detection line 220 extends in the XX' direction and is connected to the second end of the first detection line 210. The first detection line 210 on the X-direction side, the first detection line 210 on the X'-direction side, and the pair of second detection lines 220 form a detection line in a generally rectangular ring shape. This detection line can be referred to as a "ring-shaped detection line." It should be noted that only one of the pair of second detection lines 220 can be provided.

[0184] The plurality of first drive lines 310 of the drive electrode 300' extend in the Y-Y' direction. When viewed from the Z-direction side, each of the first drive lines 310 is arranged between two adjacent first detection lines 210. Each of the first drive lines 310 has a first end in the Y-direction and a second end in the Y' direction. The size of each first drive line 310 in the Y-Y' direction is smaller than the size of each first detection line 210 in the Y-Y' direction. The first end of the first drive line 310 is spaced apart from one second detection line 220 in the Y-Y' direction, and the second end of the first drive line 310 is spaced apart from another second detection line 220 in the YY direction. Therefore, the first drive line 310 is not electrically connected to the second detection line 220.

[0185] The driving electrode 300' may further include the fifth driving line 350. In this case, the fifth driving line 350 surrounds the ring-shaped detection line in a spaced relationship on the first surface 110a of the substrate 100. The fifth driving line 350 may be omitted.

[0186] The second driving line 320' of the driving electrode 300' includes a main body 321' having a ring shape or a partially discontinuous ring shape. The main body 321' includes a first part 321a' and / or a second part 321b'. In the case where the first part 321a' is provided, the first part 321a' is the inner peripheral part of the main body 321' and is positioned to overlap with the ring-shaped detection line when viewed from the Z-direction side, and the second part 321b' is the part of the main body 321' having a ring shape or a partially discontinuous ring shape and is located outside the first part 321a' of the main body 321' and outside the ring-shaped detection line. In the case where the first part 321a' is not provided, the second part 321b' is the part of the main body 321' having a ring shape or a partially discontinuous ring shape and is located outside the ring-shaped detection line. When the fifth driving line 350 is provided, regardless of whether the first portion 321a' is provided, the second portion of the main body 321' is located between the fifth driving line 350 and the ring-shaped detection line when viewed from the Z direction. When the fifth driving line 350 is provided, the main body 321' is connected to the fifth driving line 350 via the through-hole electrode of the substrate 100. The second portion of the main body 321' can be omitted.

[0187] The second driving line 320' may also include a plurality of first connection portions 322' and a plurality of second connection portions 323'. In this case, the substrate 100 includes a plurality of through-hole electrodes 130 and a plurality of through-hole electrodes 140. Each first connection portion 322' extends in the Y' direction, from a portion of the first portion 321a' of the main body 321' on the Y-direction side to a position on the Z'-direction side relative to the first end of the corresponding first driving line 310. The distal end of each first connection portion 322' is connected to the first end of the corresponding first driving line 310 via a corresponding one of the through-hole electrodes 130 of the substrate 100. When viewed from the Z-direction side, each first connection portion 322' is arranged between two adjacent first detection lines 210 and also between the first end of the corresponding first driving line 310 and a second detection line 220. Each second connection portion 323' extends in the Y' direction, from a portion of the first portion 321a' of the main body 321' on the Y-direction side to a position on the Z'-direction side relative to the second end of the corresponding first driving line 310. The distal end of each second connection portion 323' is connected to the second end of the corresponding first driving line 310 via a corresponding one of the through-hole electrodes 140 of the substrate 100. When viewed from the Z direction, each second connection portion 323' is arranged between two adjacent first sensing lines 210 and also between the second end of the corresponding first driving line 310 and another second sensing line 220.

[0188] The first driving wire 310 may not be disposed on the first side 110a of the substrate 100, but may be disposed on the second side 110b of the substrate 100. In this case, the first connection portion 322' and the second connection portion 323' may be omitted, and the first and second ends of the first driving wire 310 may extend to and be coupled to the body 321'.

[0189] Regardless of whether the plurality of first driving lines 310 are disposed on the first surface 110a or the second surface 110b of the substrate 100, when viewed from the Z direction, two elongated spaces S exist between two adjacent first detection lines 210 and a first driving line 310 located between the two adjacent first detection lines. For each set of two adjacent first detection lines 210, two spaces S exist. In other words, multiple sets of two spaces S exist.

[0190] The drive electrode 300' may further include at least one third drive line 330. The or each third drive line 330 extends from a portion of the first portion 321a' on the Y-direction side to a portion of the first portion 321a' on the Y'-direction side of the main body 321'. The one or more third drive lines 330 of the drive electrode 300' are arranged on the second surface 110b of the substrate 100, extending along the one or more first detection lines 210 and overlapping with the one or more first detection lines 210 when viewed from the Z-direction side. The at least one third drive line 330 may be omitted.

[0191] The sensor S2 may further include a ground electrode 400' electrically connected to the ground of the substrate 100. The ground electrode 400' may include the plurality of first ground lines 410 and / or at least one second ground line 420. The at least one second ground line 420 may include two second ground lines 420, each of which is arranged so as to overlap with one of the pair of second detection lines 220. The two second ground lines 420 include a second ground line 420 on the Y direction side and a second ground line 420 on the Y' direction side.

[0192] When at least one third driving line 330 is provided, the ground electrode 400' may further include at least one fourth ground line 440 electrically connected to at least one of the plurality of first ground lines 410. The at least one fourth ground line 440 is made of a material that is the same as or similar to that of the first detection line 210. The at least one fourth ground line 440 is arranged on the third surface 110c of the substrate 100, extending along the at least one first driving line 310 and overlapping the at least one first driving line 310 when viewed from the Z direction. The at least one fourth ground line 440 may include a plurality of fourth ground lines 440 arranged on the third surface 110c of the substrate 100, overlapping corresponding first driving lines 310. In this case, the fourth ground lines 440 and the first ground lines 410 are arranged alternately in sequence in the XX' direction.

[0193] The ground electrode 400' may include a plurality of sixth ground lines 460 and a plurality of seventh ground lines 470. The sixth ground lines 460 and the seventh ground lines 470 are made of the same or similar material as the first detection lines 210. The sixth ground lines 460 are disposed on the third surface 110c of the substrate 100, extend in the YY' direction, and are arranged at intervals in the XX' direction. The seventh ground lines 470 are disposed on the third surface 110c of the substrate 100, extend in the XX' direction, and are arranged at intervals in the YY' direction. The sixth ground lines 460 and the seventh ground lines 470 intersect with each other to form a grid pattern and are electrically connected to each other at the intersections. The sixth ground lines 460 include a plurality of first ground lines 410 and at least one fourth ground line 440, and the plurality of seventh ground lines 470 include at least one second ground line 420.

[0194] The plurality of through-hole electrodes 130 and the plurality of through-hole electrodes 140 of the substrate 100 may reach the third surface 110c of the substrate 100 (see Figure 10D In this case, the ground electrode 400 ′ may further include a plurality of fifth ground lines 450 . The fifth ground lines 450 are substantially ring-shaped and made of a material that is the same as or similar to that of the first detection line 210 .

[0195] Each fifth ground line 450 is arranged on the third surface 110c of the substrate 100 so as to be located between and connected to two adjacent first ground lines 410. The fifth ground lines 450 include a plurality of fifth ground lines 450 on the Y-direction side, each surrounding a through-hole electrode 130, and a plurality of fifth ground lines 450 on the Y'-direction side, each surrounding a through-hole electrode 140. The fifth ground lines 450 on the Y-direction side are located on the Y'-direction side, adjacent to and connected to the second ground lines 420 on the Y-direction side. The fifth ground lines 450 on the Y-direction side divide a seventh ground line 470 on the Y'-direction side relative to the second ground lines 420 on the Y-direction side and are connected thereto. The fifth ground lines 450 on the Y'-direction side are located on the Y-direction side, adjacent to and connected to the second ground lines 420 on the Y'-direction side. The fifth ground lines 450 on the Y'-direction side divide a seventh ground line 470 on the Y-direction side relative to the second ground lines 420 on the Y'-direction side and are connected thereto. In addition, each of the fifth ground lines 450 on the Y direction side and each of the fifth ground lines 450 on the Y′ direction side divides and connects a corresponding one of the fourth ground lines 440 .

[0196] Multiple first ground lines 410, at least one second ground line 420, at least one fourth ground line 440, multiple fifth ground lines 450 and / or at least one sixth ground line 460 may be omitted. On the other hand, ground electrode 400' may further include the third ground line 430 as in ground electrode 400 of sensor S1.

[0197] In the absence of at least one fourth ground line 440, an elongated space may be provided between and extending along each two adjacent first ground lines 410. In this case, each space is located on the Z' direction side relative to the two spaces S of the corresponding group.

[0198] When a plurality of fourth ground lines 440 are provided, an elongated gap may be provided between each fourth ground line 440 and a first ground line 410 adjacent to the fourth ground line 440 and extending along the fourth ground line 410. Each gap exists for each pair of adjacent fourth ground lines 440 and first ground lines 410. Each gap is located on the Z' direction side relative to a corresponding one of the spaces S.

[0199] When the plurality of sixth ground lines 460 and the plurality of seventh ground lines 470 intersect with each other to form a grid pattern, the grid formed by the sixth ground lines 460 and the seventh ground lines 470 has a plurality of gaps (i.e., a plurality of spaces). Each space is defined by two adjacent sixth ground lines 460 and two adjacent seventh ground lines 470 intersecting the adjacent six ground lines 460. The spaces in the grid include a plurality of groups of spaces G, each group of spaces G being located between two adjacent first ground lines 410 and fourth ground lines 440 of the sixth ground lines 460. Each space G is located on the Z' direction side relative to a corresponding one of the spaces S.

[0200] Similar to the controller 500 of sensor S1, the controller 500 of sensor S2 is configured to charge and discharge the detection electrode 200' and supply a drive pulse to the drive electrode 300'. When a detection target approaches the detection electrode 200' while the detection electrode 200' is charging and discharging, the approach causes a change in the first capacitance between the detection electrode 200' and the detection target. When a detection target approaches the detection electrode 200' and the drive electrode 300' while a drive pulse is being supplied to the drive electrode 300' (which may be simply referred to as "during the supply of the drive pulse"), the approach causes a change in the second capacitance between the detection electrode 200' and the drive electrode 300'. Similar to the controller 500 of sensor S1, the controller 500 of sensor S2 is also configured to detect the detection target based on a change in the first capacitance between the detection electrode 200' and the detection target and a change in the second capacitance between the detection electrode 200' and the drive electrode 300'.

[0201] The second capacitance CTXRX of sensor S2 includes at least the first mutual capacitance described above. When the second portion 321b' of the main body 321' of the second drive line 320' is arranged outside the looped detection line, the second capacitance CTXRX also includes a tenth mutual capacitance. During the supply of a drive pulse, a tenth mutual capacitance is formed between the second portion 321b' of the main body 321' and the looped detection line. When multiple first connection portions 322' and multiple second connection portions 323' are provided for the second drive line 320', the second capacitance CTXRX also includes eleventh, twelfth, thirteenth, and fourteenth mutual capacitances. During the supply of a drive pulse, an eleventh mutual capacitance is formed between the first connection portion 322' and the adjacent first detection line 210, a twelfth mutual capacitance is formed between the second connection portion 323' and the adjacent first detection line 210, a thirteenth mutual capacitance is formed between the first connection portion 322' and one second detection line 220, and a fourteenth mutual capacitance is formed between the second connection portion 323' and another second detection line 220. When the fifth driving line 350 surrounds the ring-shaped detection line in a spaced relationship, the second capacitor CTXRX further includes a fifteenth mutual capacitor formed between the fifth driving line 350 and the ring-shaped detection line during supply of the driving pulse.

[0202] The sensor S2 described above provides the following technical features and effects.

[0203] Technical Features and Effects (1): When viewed from the Z-direction side, each first driving line 310 of the driving electrode 300' is located between two adjacent first detection lines 210 of the detection electrode 200'. With this arrangement, the conductive deposit adhered to the detection surface is substantially located on the Z-direction side relative to at least one first driving line 310 and the first detection line 210 adjacent thereto, thereby making it possible to change the first mutual capacitance of the second capacitance CTXRX formed between at least one first driving line 310 and the first detection line 210 adjacent thereto. This change in the first mutual capacitance increases the possibility that the conductive deposit adhered to the detection surface changes the second capacitance CTXRX, thereby reducing the possibility that the controller 500 erroneously detects the conductive deposit as a detection target.

[0204] When the second portion 321b' of the main body 321' of the second drive wire 320' surrounds the looped detection line, the conductive deposit adhered to the detection surface is substantially located on the Z-direction side relative to the second portion 321b' of the main body 321' of the second drive wire 320' and the looped detection line, thereby changing the tenth mutual capacitance of the second capacitance CTXRX formed between the second portion 321b' of the main body 321' and the looped detection line. This change in the tenth mutual capacitance increases the likelihood that the conductive deposit adhered to the detection surface will change the second capacitance CTXRX, thereby reducing the likelihood that the controller 500 will erroneously detect the conductive deposit as a detection target.

[0205] When multiple first connection portions 322' and multiple second connection portions 323' are provided for the second drive line 320', conductive deposits adhered to the detection surface are substantially located on the Z-direction side relative to at least one of the first connection portions 322' and the second connection portions 323', thereby varying the eleventh, twelfth, thirteenth, and / or fourteenth mutual capacitances of the second capacitance CTXRX. An eleventh mutual capacitance is formed between each first connection portion 322' and the adjacent first detection line 210. A twelfth mutual capacitance is formed between each second connection portion 323' and the adjacent first detection line 210. A thirteenth mutual capacitance is formed between each first connection portion 322' and one second detection line 210. A fourteenth mutual capacitance is formed between each second connection portion 323' and another second detection line 210. This variation in mutual capacitance increases the likelihood that conductive deposits adhered to the detection surface will vary the second capacitance CTXRX, thereby reducing the likelihood that the controller 500 will mistakenly detect conductive deposits as detection targets.

[0206] When the fifth drive wire 350 surrounds the looped detection line in a spaced relationship, the conductive deposit adhered to the detection surface is substantially located on the Z-direction side relative to the fifth drive wire 350 and the looped detection line, thereby changing the fifteenth mutual capacitance of the second capacitance CTXRX formed between the fifth drive wire 350 and the looped detection line. This change in the fifteenth mutual capacitance increases the likelihood that the conductive deposit adhered to the detection surface will change the second capacitance CTXRX, thereby reducing the likelihood that the controller 500 will erroneously detect the conductive deposit as a detection target.

[0207] Technical features and effects (2): When viewed from the Z direction side, the first portion 321a' of the main body 321' of the second driving line 320' overlaps with the annular detection line, thereby acting as an electromagnetic shield to shield the annular detection line (i.e., the first detection line 210 and the pair of second detection lines 220 on the X and X' direction sides) from the Z' direction side. Therefore, the annular detection line is not easily affected by electromagnetic waves from the Z' direction side. In addition, when at least one third driving line 330 is provided, one or more third driving lines 330 on the second surface 110b of the substrate 100 overlap with at least one first detection line 210 on the first surface 110a of the substrate 100, thereby acting as an electromagnetic shield to shield at least one first detection line 210 from the Z' direction side. Therefore, at least one first detection line 210 is easily affected by electromagnetic waves from the Z' direction side.

[0208] Technical Features and Effects (3): In the case where there are multiple groups of two spaces S, when the two spaces S in each group are located between two adjacent first detection lines 210 and the first driving line 310 located therebetween when viewed from the Z direction, at least one fourth ground line 440 is not provided, and there are multiple intervals, each of which is located between two adjacent first ground lines 410 of the ground electrode 400', and each of which is located on the Z' direction side relative to the corresponding group of two spaces S. In this case, part of the charge from the first driving line 310 does not move to the interval, but moves to the adjacent first detection line 210, thereby suppressing the reduction of the first mutual capacitance.

[0209] In addition, when multiple groups of two spaces S are provided, multiple fourth ground lines 440 are provided, and multiple gaps each exist between one fourth ground line 440 and one first ground line 410 adjacent to the fourth ground line 440, each gap is located on the Z' direction side with respect to a corresponding one of the spaces S. In this case, during the supply of a driving pulse, some of the charges from the first driving line 310 do not move to the gaps but move to the adjacent first detection line 210, thereby suppressing a reduction in the first mutual capacitance.

[0210] Furthermore, when there are multiple groups of two spaces S, the multiple sixth ground lines 460 and the multiple seventh ground lines 470 intersect with each other to form a grid pattern. The grid formed by the sixth ground lines 460 and the seventh ground lines 470 has multiple gaps, that is, multiple gaps including multiple groups of gaps G. The gaps G of each group are located between two adjacent first ground lines 410 and fourth ground lines 440, and each gap G is located on the Z' side relative to the corresponding space S. In this case, some charge from the first drive line 310 does not move to the gaps G, thereby suppressing the reduction of the first mutual capacitance.

[0211] In the case where the first ground line 410 and / or the second ground line 420 of the ground electrode 400 ′ are provided, the sensor S2 exhibits the same technical features and effects as those of the sensor S1 (3).

[0212] Third embodiment

[0213] In the following, reference Figures 12A to 14B A capacitive sensor S3 (may be simply referred to as sensor S3 ) according to various embodiments of the present invention will be described, including a third embodiment and its variations. Figures 12A to 14B A second embodiment of a capacitive sensor S3 is shown. 13A to 13D The ZZ' direction is also shown as in sensor S1. Figure 12A and Figure 12B as well as FIG. 14A to FIG. 14B The XX' and YY' directions are also shown as in the sensor S1.

[0214] The sensor S3 has a similar configuration to the sensor S1, but differs in the following points: (1) the detection electrode 200" includes a plurality of first detection lines 210 and at least one second detection line 220 on the first surface 110a of the substrate 100 and a plurality of fourth detection lines 240 on the second surface 110b of the substrate 100, and (2) the drive electrode 300" includes a plurality of first drive lines 310 on the first surface 110a of the substrate 100 and a plurality of third drive lines 330 on the second surface 110b of the substrate 100. These differences will be described in detail, and the description of the sensor S3 that is repeated with respect to the sensor S1 will be omitted.

[0215] The plurality of first detection lines 210 of the detection electrode 200 ″ extend in the YY′ direction and are arranged at intervals in the XX′ direction (see Figure 12A and Figure 14A ). Each of the first detection lines 210 includes a first end portion on the Y-direction side, a second end portion on the Y'-direction side, and a middle portion between the first end portion and the second end portion. At least one second detection line 220 of the detection electrode 200" extends in the XX' direction, intersects with the middle portion of the first detection line 210, and is electrically connected to the first detection line 210 at the intersection. In the case where the at least one second detection line 220 includes a plurality of second detection lines 220, the second detection lines 220 can be arranged at intervals separated in the YY' direction.

[0216] The plurality of first driving lines 310 of the driving electrode 300 ″ extend in the YY′ direction. The dimension of each first driving line 310 in the YY′ direction is smaller than the dimension of each first detection line 210 in the YY′ direction. The first driving lines 310 are provided on the first surface 110 a of the substrate 100 . The first driving lines 310 include a plurality of first driving lines 310 located on the Y-direction side, each located between first end portions of two adjacent first detection lines 210 when viewed from the Z-direction side, and a plurality of first driving lines 310 located on the Y′-direction side, each located between second end portions of two adjacent first detection lines 210 when viewed from the Z-direction side. Each of the first driving lines 310 has a first end and a second end on an opposite side, and each first end is closer to the at least one second detection line 220 than the corresponding second end. The first end of the first driving line 310 is provided spaced apart from the at least one second detection line 220 in the YY′ direction. Therefore, the first driving line 310 is not electrically connected to the at least one second detection line 220.

[0217] The driving electrode 300″ may further include the fifth driving line 350 described above. The fifth driving line 350 surrounds the plurality of first driving lines 310, the plurality of first sensing lines 210, and the at least one second sensing line 220 on the first side 110a of the substrate 100. The second ends of the first driving lines 310 are coupled to the fifth driving line 350. The fifth driving line 350 is arranged in a spaced relationship from the plurality of first sensing lines 210 and the at least one second sensing line 220.

[0218] The plurality of third driving lines 330 of the driving electrode 300″ are electrically connected to the plurality of first driving lines 310, but are not electrically connected to the plurality of first sensing lines 210, nor are they electrically connected to the at least one second sensing line 220. The third driving lines 330 are arranged on the second surface 110b of the substrate 100 so as to extend along the corresponding first sensing lines 210 and overlap with the corresponding first sensing lines 210 when viewed from the Z direction side. Each of the third driving lines 330 includes a first end portion on the Y direction side, a second end portion on the Y′ direction side, and an intermediate portion between the first end portion and the second end portion.

[0219] The driving electrode 300″ may further include at least one fourth driving line 340. The fourth driving line 340 or each fourth driving line 340 is arranged on the second side 110b of the substrate 100 so as to extend generally along the corresponding second detection line 220 and overlap with the corresponding second detection line 220 when viewed from the Z direction. The at least one fourth driving line 340 intersects with the middle portion of the plurality of third driving lines 330 and is electrically connected to the plurality of third driving lines 330 at the intersection. In other words, the at least one fourth driving line 340, the first driving line 310, and the third driving lines 330 are electrically connected to each other.

[0220] The plurality of fourth detection lines 240 of the detection electrode 200″ are made of a material that is the same as or similar to that of the first detection lines 210, extend substantially along the plurality of first driving lines 310, and are arranged to overlap with the first driving lines 310 when viewed from the Z direction side. The fourth detection lines 240 include the fourth detection lines 240 on the Y direction side that overlap with the first driving lines 310 on the Y direction side, and the fourth detection lines 240 on the Y′ direction side that overlap with the first driving lines 310 on the Y′ direction side. More specifically, the fourth detection lines 240 on the Y direction side include the fourth detection lines 240 on the YX direction side and the fourth detection lines 240 on the YX′ direction side. The fourth detection line 240 on the YX direction side is the one most on the X direction side among the fourth detection lines 240 on the Y direction side, and the fourth detection line 240 on the YX' direction side is the one most on the X' direction side among the fourth detection lines 240 on the Y direction side. The fourth detection lines 240 on the Y' direction side include the fourth detection line 240 on the Y'X direction side and the fourth detection line 240 on the Y'X' direction side. The fourth detection line 240 on the Y'X direction side is the one most on the X direction side among the fourth detection lines 240 on the Y' direction side, and the fourth detection line 240 on the Y'X' direction side is the one most on the X' direction side among the fourth detection lines 240 on the Y' direction side.

[0221] The plurality of fourth sense lines 240 on the Y-direction side are alternately arranged with the first end portions of the plurality of third drive lines 330 at intervals in the XX' direction, and the plurality of fourth sense lines 240 on the Y'-direction side are alternately arranged with the second end portions of the plurality of third drive lines 330 at intervals in the XX' direction. Therefore, the fourth sense lines 240 are not electrically connected to the third drive lines 330. Each fourth sense line 240 has a first end and a second end on an opposite side, and each first end is closer to at least one fourth drive line 340 than the corresponding second end. The first end of the fourth sense line 240 is positioned spaced apart from the at least one fourth drive line 340 in the YY' direction. Therefore, the fourth sense line 240 is not electrically connected to the at least one fourth drive line 340. The fourth sense line 240 is connected to the plurality of first sense lines 210 and the at least one second sense line 220. At least one fourth drive line 340 may be omitted.

[0222] The detection electrode 200″ may further include a plurality of fifth detection lines 250 on the second surface 110b of the substrate 100. The fifth detection lines 250 are made of a material that is the same as or similar to that of the first detection lines 210 and extend in the XX′ direction. The fifth detection lines 250 include fifth detection lines 250 on the Y direction side and fifth detection lines 250 on the Y′ direction side. The fifth detection lines 250 on the Y direction side are coupled to the second ends of the fourth detection lines 240 on the Y direction side and are electrically connected to the fourth detection lines 240 on the Y direction side. However, the fifth detection lines 250 on the Y direction side are arranged in a spaced relationship from the first end portions of the third driving lines 330 in the Y-Y′ direction and are therefore not electrically connected to the third driving lines 330. The fifth detection lines 250 on the Y′ direction side are coupled to the second ends of the fourth detection lines 240 on the Y direction side. The second end of the fourth detection line 240 on the Y' direction side is electrically connected to the fourth detection line 240 on the Y' direction side. However, the fifth detection line 250 on the Y' direction side is arranged in a separated relationship with the second end of the third drive line 330 in the Y-Y' direction and is therefore not electrically connected to the third drive line 330. The plurality of fifth detection lines 250 are electrically connected to the plurality of first detection lines 210 and at least one second detection line 220 via the through-hole electrodes of the substrate 100. As a result, the fifth detection line 250 on the Y direction side is electrically connected to the fifth detection line 250 on the Y' direction side. The fifth detection line 250 on the Y direction side may intersect with the fourth detection line 240 on the Y direction side. The fifth detection line 250 on the Y' direction side may intersect with the fourth detection line 240 on the Y' direction side. The plurality of fifth detection lines 250 may be omitted.

[0223] The driving electrode 300″ may further include a sixth driving line 360. In this case, the sixth driving line 360 has a ring shape or a partially discontinuous ring shape and is made of a material that is the same as or similar to that of the first detection line 210. The sixth driving line 360 is provided on the second surface 110b of the substrate 100, thereby surrounding the plurality of third driving lines 330, at least one fourth driving line 340, the plurality of fourth detection lines 240, and the plurality of fifth detection lines 250. The sixth driving line 360 is connected to the fourth detection lines 240 on the YX direction side, the fourth detection lines 240 on the YX' direction side, the fourth detection lines 240 on the Y'X direction side, and the fourth detection lines 240 on the Y'X direction side. The fourth detection line 240 on the X'-direction side, the fifth detection line 250 on the Y-direction side, and the fifth detection line 250 on the Y'-direction side are arranged in a spaced relationship. Therefore, the sixth drive line 360 is not electrically connected to the plurality of fourth detection lines 240 or the plurality of fifth detection lines 250. The sixth drive line 360 can be connected to at least one of the fourth drive lines 340, but this is not required. In addition, when the fifth drive line 350 is provided, the sixth drive line 360 is electrically connected to the fifth drive line 350 via another through-hole electrode of the substrate 100. The fifth drive line 350 and / or the sixth drive line 360 can be omitted.

[0224] Similar to the controller 500 of sensor S1, the controller 500 of sensor S3 is configured to charge and discharge the detection electrode 200″ and supply a drive pulse to the drive electrode 300″. When the detection target approaches the detection electrode 200″ while the detection electrode 200″ is charging and discharging, the approach causes the first capacitance between the detection electrode 200″ and the detection target to change. When the detection target approaches the detection electrode 200″ and the drive electrode 300″ while the drive pulse is supplied to the drive electrode 300″ (which can be simply referred to as “during the supply of the drive pulse”), the approach causes the second capacitance between the detection electrode 200″ and the drive electrode 300″ to change. Similar to the controller 500 of sensor S1, the controller 500 of sensor S3 is also configured to detect the detection target based on the change in the first capacitance between the detection electrode 200″ and the detection target and the change in the second capacitance between the detection electrode 200″ and the drive electrode 300″.

[0225] The second capacitance CTXRX of sensor S3 includes at least a first mutual capacitance, a sixteenth mutual capacitance, and a seventeenth mutual capacitance. The first mutual capacitance is as described above. Since the plurality of fourth detection lines 240 and the plurality of third drive lines 330 are alternately arranged at intervals, during the supply of a drive pulse, a sixteenth mutual capacitance is formed between the third drive line 330 and the adjacent fourth detection line 240. Since the first drive line 310 is spaced apart from at least one second detection line 220 in the Y-Y' direction, a seventeenth mutual capacitance is formed between the first drive line 310 and the second detection line 220 during the supply of a drive pulse.

[0226] When at least one fourth driving line 340 is provided, the second capacitor CTXRX also includes an eighteenth mutual capacitance. Since the plurality of fourth detection lines 240 are spaced apart from the at least one fourth driving line 340 in the YY' direction, the eighteenth mutual capacitance is formed between the fourth detection line 240 and the fourth driving line 340 during the supply of the driving pulse.

[0227] When the fifth driving line 350 is provided, the second capacitor CTXRX also includes a nineteenth mutual capacitor. Since the fifth driving line 350 surrounds the plurality of first detection lines 210 in a spaced relationship, the nineteenth mutual capacitor is formed between the fifth driving line 350 and the first detection line 210 during the supply of the driving pulse.

[0228] When multiple fifth sense lines 250 are provided, the second capacitor CTXRX also includes a twentieth mutual capacitance. Among the multiple fifth sense lines 250, the fifth sense lines 250 on the Y-direction side are spaced apart from the first ends of the multiple third drive lines 330 in the Y-Y' direction, and the fifth sense lines 250 on the Y'-direction side are spaced apart from the second ends of the third drive lines 330 in the Y-Y' direction. Therefore, during the supply of a drive pulse, a twentieth mutual capacitance is formed between the fifth sense lines 250 on the Y-direction side and the first ends of the third drive lines 330, and between the fifth sense lines 250 on the Y'-direction side and the second ends of the third drive lines 330.

[0229] When the sixth drive line 360 is provided, the second capacitor CTXRX also includes a twenty-first mutual capacitance. The sixth drive line 360 is spaced apart from the fourth detection line 240 on the YX, YX', Y'X, and Y'X' directions and the fifth detection line 250 on the Y and Y' directions. Therefore, during the supply of a drive pulse, a twenty-first mutual capacitance is formed between the sixth drive line 360 and the fourth detection line 240 on the YX direction, between the sixth drive line 360 and the fourth detection line 240 on the YX' direction, between the sixth drive line 360 and the fourth detection line 240 on the Y'X direction, between the sixth drive line 360 and the fourth detection line 240 on the Y'X' direction, between the sixth drive line 360 and the fourth detection line 240 on the Y'X' direction, between the sixth drive line 360 and the fourth detection line 240 on the Y direction, between the sixth drive line 360 and the fifth detection line 250 on the Y direction, and between the sixth drive line 360 and the fifth detection line 250 on the Y' direction.

[0230] The sensor S3 described above provides the following technical features and effects.

[0231] Technical features and effects (1): When viewed from the Z-direction side, each first driving line 310 of the driving electrode 300" is located between two adjacent first detection lines 210 of the detection electrode 200". With this arrangement, the conductor deposit adhered to the detection surface is basically located on the Z-direction side relative to at least one first driving line 310 and one first detection line 210 adjacent thereto, thereby making it possible to change the first mutual capacitance of the second capacitance CTXRX formed between at least one first driving line 310 and the first detection line 210 adjacent thereto. This change in the first mutual capacitance increases the possibility that the conductor deposit adhered to the detection surface changes the second capacitance CTXRX, thereby reducing the possibility that the controller 500 erroneously detects the conductor deposit as a detection target.

[0232] Because the plurality of fourth sense lines 240 and the plurality of third drive lines 330 are alternately arranged at spaced intervals, the conductive deposits adhered to the detection surface are substantially located on the Z-direction side relative to at least one third drive line 330 and the adjacent fourth sense line 240. This allows for a change in the sixteenth mutual capacitance of the second capacitance CTXRX formed between the at least one third drive line 330 and the adjacent fourth sense line 240. This change in the sixteenth mutual capacitance increases the likelihood that the conductive deposits adhered to the detection surface will change the second capacitance CTXRX, thereby reducing the likelihood that the controller 500 will erroneously detect the conductive deposits as detection targets.

[0233] Because the plurality of first drive lines 310 are arranged in a spaced relationship from the at least one second detection line 220 in the YY' direction, the conductive deposits adhered to the detection surface are substantially located on the Z-direction side relative to at least one of the first drive lines 310 and the second detection lines or an adjacent detection line 220, thereby changing the seventeenth mutual capacitance of the second capacitance CTXRX formed between the at least one first drive line 310 and the second detection line or an adjacent detection line 220. This change in the seventeenth mutual capacitance increases the likelihood that the conductive deposits adhered to the detection surface will change the second capacitance CTXRX, thereby reducing the likelihood that the controller 500 will erroneously detect the conductive deposits as a detection target.

[0234] When at least one fourth drive line 340 is provided, the plurality of fourth detection lines 240 are spaced apart from the at least one fourth drive line 340 in the Y-Y' direction. Therefore, conductive deposits adhered to the detection surface are substantially located on the Z-direction side relative to the at least one fourth detection line 240 and the fourth drive line or one of the fourth drive lines 340 adjacent thereto. This allows for the eighteenth mutual capacitance of the second capacitance CTXRX formed between the at least one fourth detection line 240 and the fourth drive line or one of the fourth drive lines 340 adjacent thereto to be changed. This change in the eighteenth mutual capacitance increases the likelihood that conductive deposits adhered to the detection surface will change the second capacitance CTXRX, thereby reducing the likelihood that the controller 500 will erroneously detect conductive deposits as detection targets.

[0235] In the case where the fifth drive line 350 is provided, the fifth drive line 350 surrounds the plurality of first detection lines 210 in a spaced relationship. With this arrangement, the conductive deposit adhered to the detection surface is substantially located on the Z-direction side relative to at least one of the first drive lines 210 and the fifth drive line 350, thereby making it possible to change the nineteenth mutual capacitance of the second capacitance CTXRX formed between the at least one first detection line 210 and the fifth drive line 350. This change in the nineteenth mutual capacitance increases the likelihood that the conductive deposit adhered to the detection surface will change the second capacitance CTXRX, thereby reducing the likelihood that the controller 500 will erroneously detect the conductive deposit as a detection target.

[0236] When multiple fifth sense lines 250 are provided, the fifth sense lines 250 on the Y-direction side are spaced apart from the first end portions of the plurality of third drive lines 330 in the Y-Y' direction, and the fifth sense lines 250 on the Y'-direction side are spaced apart from the second end portions of the plurality of third drive lines 330 in the Y-Y' direction. With this arrangement, the conductive deposit adhered to the detection surface is substantially located in the Z-direction relative to at least one of the first end portions of the third drive lines 330 and the fifth sense lines 250 on the Y-direction side, and / or relative to at least one of the second end portions of the third drive lines 330 and the fifth sense lines 250 on the Y'-direction side. This allows for the second mutual capacitance CTXRX formed between at least one first end portion of the third drive line 330 and the fifth sense lines 250 on the Y-direction side and / or between at least one second end portion of the third drive line 330 and the fifth sense lines 250 on the Y'-direction side to be varied. This change in the twentieth mutual capacitance increases the possibility that the conductor deposit adhered to the detection surface changes the second capacitance CTXRX, thereby reducing the possibility that the controller 500 erroneously detects the conductor deposit as a detection target.

[0237] When the sixth drive line 360 is provided, the sixth drive line 360 is spaced apart from the fourth detection line 240 on the YX, YX', Y'X, and Y'X' directions and the fifth detection line 250 on the Y and Y' directions. With this arrangement, conductive deposits adhering to the detection surface are substantially located on the Z-direction side relative to the sixth drive line 360 and at least one of the fourth detection lines 240 on the YX, YX', Y'X, and Y'X' directions, and the fifth detection line 250 on the Y and Y' directions. This allows the twenty-first mutual capacitance of the second capacitance CTXRX formed between the sixth drive line 360 and the at least one detection line to be changed. This change in the twenty-first mutual capacitance increases the likelihood that conductive deposits adhering to the detection surface will change the second capacitance CTXRX, thereby reducing the likelihood that the controller 500 will erroneously detect the conductive deposits as detection targets.

[0238] Technical Features and Effects (2): Each third driving line 330 on the second surface 110b of the substrate 100 overlaps with a corresponding first detection line 210 on the first surface 110a of the substrate 100, thereby acting as an electromagnetic shield to shield the corresponding first detection line 210 from the Z' direction side. Therefore, the first detection line 210 is not easily affected by electromagnetic waves from the Z' direction side. Each fourth detection line 240 on the second surface 110b of the substrate 100 overlaps with a corresponding first driving line 310 on the first surface 110a of the substrate 100, thereby acting as an electromagnetic shield to shield the first driving line 310 from the Z' direction side. Therefore, the first driving line 310 is not easily affected by electromagnetic waves from the Z' direction side. Furthermore, when at least one fourth driving line 340 is provided, the at least one fourth driving line 340 on the second surface 110b of the substrate 100 overlaps with the at least one second detection line 220 on the first surface 110a of the substrate 100, thereby providing an electromagnetic shield to shield the at least one second detection line 220 from the Z' direction. Therefore, the at least one second detection line 220 is less susceptible to electromagnetic influences from the Z' direction.

[0239] Fourth embodiment

[0240] In the following, reference Figure 15A and Figure 15B Capacitive sensors S4 (may be simply referred to as sensor S4 ) according to various embodiments of the present invention are described, including the fourth embodiment and its variations. Figure 15A and Figure 15B A fourth embodiment of a capacitive sensor S4 is shown.

[0241] Sensor S4 has a similar configuration to that of sensor S1, but differs in the following points: when viewed from the Z direction side, the first ground line 410 of the ground electrode 400 overlaps with the plurality of first drive lines 310 of the drive electrode 300, rather than the plurality of first detection lines 210 of the detection electrode 200; and when viewed from the Z direction side, the second ground line 420 of the ground electrode 400 overlaps with the plurality of second drive lines 320 of the drive electrode 300, rather than the plurality of second detection lines 220 of the detection electrode 200. These differences will be described in detail, and the description of sensor S3 that overlaps with sensor S1 will be omitted.

[0242] When viewed from the Z direction, the grid composed of the plurality of first driving lines 310 and the plurality of second driving lines 320 has a plurality of gaps (third gaps), each of which includes four spaces S. In other words, there are a plurality of groups of four spaces S. Each group of four spaces S is defined by two adjacent first driving lines 310, two adjacent second driving lines 320 intersecting the two adjacent first driving lines 310, one first detection line 210 located between the two adjacent first driving lines 310, and one second detection line 220 located between the two adjacent second driving lines 320.

[0243] The grid composed of the plurality of first ground lines 410 and the plurality of second ground lines 420 has a plurality of gaps (fourth gaps), that is, a plurality of spaces G. Each space G is defined by two adjacent first ground lines 410 and two adjacent second ground lines 420 intersecting the two adjacent first ground lines 410. Each space G is located on the Z' direction side relative to the four spaces S of the corresponding group.

[0244] The sensor S4 described above provides the same technical features and effects (1) and (2) as those of the sensor S1.

[0245] Technical Features and Effects (3): The plurality of first ground lines 410 and the plurality of second ground lines 420 on the third surface 110 c of the substrate 100 overlap with the plurality of first driving lines 310 and the plurality of second driving lines 320 on the second surface 110 b of the substrate 100, respectively, thereby acting as an electromagnetic shield to shield the first driving lines 310 and the second driving lines 320 from the Z′ direction. Therefore, the first driving lines 310 and the second driving lines 320 are less susceptible to electromagnetic influences from the Z′ direction.

[0246] Technical Features and Effects (4): Each gap G exists on the Z'-direction side relative to the corresponding group of four spaces S. With this arrangement, during the supply of a drive pulse, some of the charges from the first drive line 310 and the second drive line 320 do not move to the gap G, but instead move to the adjacent first detection line 210 and the second detection line 220, thereby suppressing the reduction of the first to fourth mutual capacitances.

[0247] It should be understood that the capacitance sensor of the present invention is not limited to the above-described embodiment, but can be appropriately modified within the scope of the claims (within the disclosure of the present invention).

[0248] The ground electrode 400 of the sensor S1 may further include at least one fourth ground line 440. The ground electrode 400 of the sensor S1 may further include multiple fifth ground lines 450. The ground electrode in any of the above aspects may be connected to the ground of the substrate 100 as described above, but may be electrically floating. The sensor S3 may further include the ground electrode 400 or the ground electrode 400'.

[0249] The plurality of first ground lines 410 of the sensor S1 or S2 can be disposed on the third surface 110 c of the substrate 100 so as to overlap with the plurality of first driving lines 310 rather than the plurality of first detection lines 210 when viewed from the Z direction. In this case, two spaces can be provided between two adjacent first driving lines 310 and the first detection line 210 located therebetween, and a gap between the two adjacent first ground lines 410 can be arranged on the Z′ direction side associated with the corresponding two spaces.

[0250] The means for electrically connecting between the detection lines of any of the above aspects is not limited to the above examples, but may be an internal line such as a through-hole electrode in a substrate or a conductive line of a substrate, or an external line such as a lead. The means for electrically connecting between the drive lines of any of the above aspects is not limited to the above examples, but may be an internal line such as a through-hole electrode in a substrate or a conductive line of a substrate, or an external line such as a lead. The means for electrically connecting between the ground lines of any of the above aspects is not limited to the above examples, but may be an internal line such as a through-hole electrode in a substrate or a conductive line of a substrate, or an external line such as a lead. The detection lines, drive lines and / or ground lines of any of the above aspects do not need to be elongated, but may have any shape.

[0251] The controller 500 may be configured only to charge and discharge the detection electrodes of any of the above aspects, or may be configured only to supply drive pulses to the drive electrodes of any of the above aspects. In this case, the controller 500 may also be configured to detect the detection target based on a change in a first capacitance between the detection electrodes of any of the above aspects and the detection target, or based on a change in a second capacitance between the detection electrodes of any of the above aspects and the drive electrodes of any of the above aspects.

[0252] The capacitive sensor of any of the above aspects may include a plurality of detection electrodes and a plurality of drive electrodes of any of the above aspects. In other words, the capacitive sensor of the present invention may be a touch sensing panel to detect the coordinate position of the touch of the detection target on the detection surface. In addition, the capacitive sensor of any of the above aspects may be configured to detect the approach of the detection target rather than the touch of the detection target on the detection surface. In this case, the detection surface is omitted.

Claims

1. A capacitive sensor, comprising: substrate, detection electrodes, drive electrodes, and a controller, The substrate comprises one or more layers, the layers comprising a first face and a second face that are different from each other in a first direction, the first direction being the thickness direction of the substrate, the or each layer being insulating, The detection electrode includes a plurality of first detection lines electrically connected to each other, at least one second detection line electrically connected to the plurality of first detection lines, and a third detection line having a ring shape or a partially discontinuous ring shape. The first detection lines are arranged at spaced intervals on the first surface, extend in a second direction and are arranged at spaced intervals in a third direction, the second direction is orthogonal to the first direction, the third direction is orthogonal to the first direction and intersects the second direction, The at least one second detection line includes a plurality of second detection lines, the plurality of second detection lines extending in the third direction, being arranged on the first surface at intervals in the second direction, and intersecting the plurality of first detection lines. The third detection line is arranged on the first surface so as to surround at least the plurality of first detection lines and the plurality of second detection lines, and the third detection line is connected to opposite ends in the longitudinal direction of the plurality of first detection lines and opposite ends in the longitudinal direction of the plurality of second detection lines, The driving electrode includes a plurality of first driving lines electrically connected to each other and at least one second driving line electrically connected to the plurality of first driving lines. The plurality of first driving lines extend in the second direction and are arranged on the second face at spaced intervals in the third direction, Each of the first driving lines is arranged to be located between two adjacent first detection lines when viewed from one side in the first direction, The at least one second driving line includes a plurality of second driving lines, the plurality of second driving lines extending in the third direction and arranged on the second surface, such that each of the plurality of second driving lines is located between two adjacent second detection lines among the plurality of second detection lines and intersects with the plurality of first driving lines when viewed from one side in the first direction. The dimensions of the plurality of first driving lines in the second direction are greater than the dimensions of the plurality of first detection lines in the second direction, and the plurality of first driving lines include a first portion and a second portion located on one side of the second direction and on the other side of the second direction relative to the third detection line. The plurality of second driving lines have a size in the third direction greater than that of the plurality of second sensing lines in the third direction, and the plurality of second driving lines include a first portion and a second portion located on one side of the third direction and on the other side of the third direction relative to the third sensing lines. The controller is configured to charge and discharge the detection electrode and supply a drive pulse to the drive electrode, When a detection target approaches the detection electrode while the detection electrode is being charged and discharged, the approach causes a change in the first capacitance between the detection electrode and the detection target. When the detection target approaches the detection electrode and the drive electrode while a drive pulse is supplied to the drive electrode, the approach causes a change in the second capacitance between the detection electrode and the drive electrode, and The controller is further configured to detect the detection target based on changes in the first capacitance and the second capacitance.

2. The capacitive sensor according to claim 1, wherein The driving electrode further includes at least one third driving line electrically connected to the first driving line and the plurality of second driving lines, and The at least one third driving line is arranged on the second face so as to extend along the at least one first detection line and overlap with the at least one first detection line when viewed from one side in the first direction.

3. The capacitive sensor according to claim 2, wherein: The driving electrode further includes at least one fourth driving line electrically connected to the first driving line, the plurality of second driving lines and the at least one third driving line, The at least one fourth driving line is arranged on the second face so as to overlap with at least one of the plurality of second detection lines when viewed from one side in the first direction.

4. The capacitive sensor according to claim 2 or 3, wherein: The at least one third driving line includes a plurality of third driving lines, the plurality of third driving lines being arranged on the second surface so as to overlap with corresponding first detection lines when viewed from one side in the first direction, and The third driving lines and the first driving lines are arranged alternately in an arrangement direction thereof.

5. The capacitive sensor according to claim 3, wherein: The at least one fourth driving line includes a plurality of fourth driving lines, the plurality of fourth driving lines being arranged on the second surface so as to overlap with corresponding second detection lines when viewed from one side in the first direction, and The fourth driving lines and the second driving lines are alternately arranged in an arrangement direction thereof.

6. The capacitive sensor according to any one of claims 1 to 3, wherein: The layer of the substrate further includes a third surface that is different from the first surface and the second surface in the first direction and is arranged on the other side of the second surface in the first direction, The first detection lines and the second detection lines intersect with each other to form a grid pattern on the first surface, and are electrically connected to each other at the intersections. When viewed from one side in the first direction, a grid formed by the first detection lines and the second detection lines has a plurality of first gaps, each of the first gaps including four spaces. The four spaces of each first gap are defined by two adjacent first detection lines, two adjacent second detection lines intersecting the two adjacent first detection lines, one first driving line located between the two adjacent first detection lines, and one second driving line located between the two adjacent second detection lines. The capacitive sensor further includes a ground electrode, wherein the ground electrode includes a plurality of first ground lines and a plurality of second ground lines. The first ground line and the second ground line intersect with each other to form a grid pattern on the third surface and are electrically connected to each other at the intersection thereof, the first ground line is arranged to overlap with the corresponding first detection line when viewed from one side in the first direction, and the second ground line is arranged to overlap with the corresponding second detection line when viewed from one side in the first direction. The grid formed by the first ground line and the second ground line has a plurality of second gaps, the plurality of second gaps being a plurality of intervals, and Each of the intervals is defined by two adjacent first ground lines and two adjacent second ground lines intersecting the two adjacent first ground lines, and each of the intervals is located on the other side of the four spaces of a corresponding first gap in the first direction.

7. The capacitive sensor according to any one of claims 1 to 3, wherein: The layer of the substrate further includes a third surface, the third surface being different from the first surface and the second surface in the first direction and being arranged on the other side of the second surface in the first direction, The first detection lines and the second detection lines intersect with each other to form a grid pattern on the first surface, and the first detection lines and the second detection lines are electrically connected to each other at the intersections thereof. When viewed from one side in the first direction, the grid formed by the first driving lines and the second driving lines has a plurality of third gaps, each of the third gaps including four spaces. The four spaces of each third gap are defined by two adjacent first driving lines, two adjacent second driving lines intersecting the two adjacent first driving lines, one first detection line located between the two adjacent first driving lines, and one second detection line located between the two adjacent second driving lines. The capacitive sensor further includes a ground electrode, wherein the ground electrode includes a plurality of first ground lines and a plurality of second ground lines. The first ground line and the second ground line intersect with each other to form a grid pattern on the third surface, and the first ground line and the second ground line are electrically connected to each other at the intersection thereof, the first ground line is arranged to overlap with the corresponding first driving line when viewed from one side in the first direction, and the second ground line is arranged to overlap with the corresponding second driving line when viewed from one side in the first direction. The grid formed by the first ground line and the second ground line has a plurality of fourth gaps, the plurality of fourth gaps being a plurality of intervals, and Each of the intervals is defined by two adjacent first ground lines and two adjacent second ground lines intersecting the two adjacent first ground lines, and is located on the other side of the four spaces of a corresponding one of the third gaps in the first direction.

8. The capacitive sensor according to any one of claims 1 to 3, wherein: When viewed from one side in the first direction, two spaces are provided between two adjacent first detection lines and one first driving line located between the two adjacent first detection lines, or alternatively, between two adjacent first driving lines and one first detection line located between the two adjacent first driving lines. The layer of the substrate further includes a third surface, the third surface being different from the first surface and the second surface in the first direction and being arranged on the other side of the second surface in the first direction, The capacitive sensor further includes a ground electrode, wherein the ground electrode includes a plurality of first ground lines electrically connected to each other. The first ground line is arranged on the third surface so as to overlap with the corresponding first detection line or the corresponding first driving line when viewed from one side in the first direction, A gap is provided between two adjacent first ground lines, and the gap is located on the other side of the corresponding two spaces in the first direction.

9. The capacitive sensor according to any one of claims 1 to 3, wherein: The driving electrode further includes a fifth driving line, The fifth driving line has a ring shape or a partially discontinuous ring shape, is electrically connected to the first driving line, and is arranged on the first surface so as to surround the third detection line. The capacitive sensor further includes a ground electrode, wherein the ground electrode includes a third ground line. The third ground line has a ring shape or a partially discontinuous ring shape, and is arranged on the first surface so as to surround the fifth driving line.

10. The capacitive sensor according to any one of claims 1 to 3, wherein: The layer of the substrate further includes a third surface that is different from the first surface and the second surface in the first direction and is arranged on the other side of the second surface in the first direction, Two spaces are set between two adjacent first detection lines and one first driving line located between the two adjacent first detection lines. The capacitive sensor further includes a ground electrode, wherein the ground electrode includes: a plurality of first ground lines arranged on the third face so as to overlap with corresponding first detection lines when viewed from one side in the first direction, and at least one fourth ground line, the at least one fourth ground line being electrically connected to the first ground line and arranged on the third surface so as to overlap with at least one first driving line when viewed from one side in the first direction, the fourth ground line or each fourth ground line being located between two adjacent first ground lines, so that there is a gap between the fourth ground line or each fourth ground line and the two adjacent first ground lines, and The gap is located on the other side of the space in the first direction.

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