Head alignment device and substrate processing system having a head alignment device

Abstract

A head alignment device and a substrate processing system having the head alignment device are provided which determine a reference position using position synchronization and align a plurality of head modules based on the reference position. The head alignment device includes a reference position determining section which determines a first reference position of a head conveyor on which a plurality of inkjet head modules are arranged, and a mounting position determining section which determines a second reference position of the inkjet head modules based on the first reference position so that the inkjet head modules can be moved from a current position to the second reference position, wherein the reference position determining section determines the first reference position using a first image sensor arranged on the same plane as the inkjet head modules and a second image sensor arranged facing the inkjet head modules.

Description

Technical Field

[0001] This invention relates to a head alignment device for aligning head modules and a substrate processing system having the head alignment device. More specifically, it relates to a head alignment device for aligning inkjet head modules and a substrate processing system having the head alignment device. Background Technology

[0002] When performing printing processes (e.g., RGB patterning) on ​​transparent substrates to manufacture display devices such as LCD panels, PDP panels, and LED panels, printing equipment with an inkjet head module can be used. Summary of the Invention

[0003] Printing equipment can have multiple inkjet head modules for large-area printing, etc. However, traditionally, when setting up the head for alignment, the head's position has been checked after installation, and if the head's position is inaccurate, the process of reinstalling the head and checking its position has been repeated.

[0004] However, the following problems may occur when setting up this type of head. First, the operation may take a long time to complete. Second, depending on the operator's skill level, deviations in installation accuracy may occur, and the time required to complete the operation may vary. Third, when setting up multiple heads, errors may accumulate, which may reduce the quality of the printing equipment and make it difficult to ensure the performance of the printing equipment.

[0005] The technical problem to be solved by the present invention is to provide a head alignment device that uses position synchronization to determine a reference position and aligns multiple head modules according to the reference position, and a substrate processing system having the head alignment device.

[0006] The technical problems of the present invention are not limited to those described above, and those skilled in the art can clearly understand other technical problems not mentioned in the following description.

[0007] According to one aspect of the head alignment apparatus of the present invention, which aims to solve the above-mentioned technical problems, it includes: a reference position determining unit that determines a first reference position of a head conveyor on which a plurality of inkjet head modules are provided; and an installation position determining unit that determines a second reference position of the inkjet head modules based on the first reference position, so that the inkjet head modules can be moved from a current position to the second reference position, wherein the reference position determining unit determines the first reference position using a first image sensor provided on the same plane as the inkjet head modules and a second image sensor provided facing the inkjet head modules.

[0008] The reference position determination unit can determine the first reference position based on the position synchronization between the first image sensor and the second image sensor.

[0009] The reference position determination unit can determine the first reference position using a structure with markings attached to its surface.

[0010] The first image sensor can acquire a first image of a structure with markings attached to its surface, and the second image sensor can acquire a second image of the structure. The reference position determination unit can determine a first reference position based on whether the first image is the same as the second image.

[0011] The reference position determination unit can determine whether the first image and the second image are the same by comparing the position of the mark on the first image with the position of the mark on the second image.

[0012] If the first image and the second image are not the same, the reference position determination unit can move the first image sensor to determine the first reference position.

[0013] When synchronizing the positions between the first image sensor and the second image sensor, the structure can be arranged between the first image sensor and the second image sensor.

[0014] The structure can be made of transparent material.

[0015] The installation location determination unit can determine the second reference position by adding the first reference value to the first reference position.

[0016] The installation position determination unit can determine the second reference position of another inkjet head module based on the second reference position of any one of the multiple inkjet head modules.

[0017] The installation location determination unit can determine the second reference position of another inkjet head module by adding the second reference value to the second reference position of any one inkjet head module.

[0018] The head alignment device may also include a mounting position display unit, which visually displays the current position and the second reference position when the inkjet head module moves from the current position to the second reference position.

[0019] The installation position display unit can simultaneously show the current position and the second reference position on one screen.

[0020] According to another aspect of the head alignment apparatus of the present invention, which aims to solve the above-mentioned technical problems, it includes: a reference position determining unit that determines a first reference position of a head conveyor on which a plurality of inkjet head modules are provided; and an installation position determining unit that determines a second reference position of the inkjet head modules based on the first reference position, so that the inkjet head modules can be moved from a current position to the second reference position. The reference position determining unit uses a first image sensor disposed on the same plane as the inkjet head modules and a second image sensor disposed facing the inkjet head modules to determine the first reference position. When the first image sensor acquires a first image of a structure with markings attached to its surface arranged between the first image sensor and the second image sensor, and the second image sensor acquires a second image of the structure, the reference position determination determines the first reference position by judging whether the first image is the same as the second image based on the position of the markings on the first image and the second image.

[0021] According to one aspect of the substrate processing system of the present invention, which aims to solve the above-mentioned technical problems, the system includes: a substrate support member disposed on a base and supporting a substrate to be printed; a gantry unit disposed movably on the substrate support member and provided with a head conveyor having a plurality of inkjet head modules, the inkjet head modules ejecting droplets onto the substrate; and a head alignment device for aligning the inkjet head modules, wherein the head alignment device includes: a reference position determining unit for determining a first reference position of the head conveyor; and a mounting position determining unit for determining a second reference position of the inkjet head modules based on the first reference position, so that the inkjet head modules can be moved from a current position to the second reference position, wherein the reference position determining unit determines the first reference position using a first image sensor disposed on the same plane as the inkjet head modules and a second image sensor disposed facing the inkjet head modules.

[0022] Specific details of other embodiments are included in the detailed description and accompanying drawings. Attached Figure Description

[0023] Figure 1 It is a perspective view schematically showing the internal structure of the substrate processing system.

[0024] Figure 2 It is a schematic plan view showing the internal structure of the substrate processing system.

[0025] Figure 3 This is a conceptual diagram illustrating the internal structure of a head alignment device according to an embodiment of the present invention.

[0026] Figure 4 This is an example diagram used to illustrate the head transmitter.

[0027] Figure 5This is an example diagram illustrating the function of the reference position determining part constituting a head alignment device according to an embodiment of the present invention.

[0028] Figure 6 This is a first example diagram used to illustrate a position synchronization method between a first image sensor and a second image sensor.

[0029] Figure 7 This is a second example diagram used to illustrate a method for position synchronization between a first image sensor and a second image sensor.

[0030] Figure 8 This is a flowchart showing the position synchronization method between the first image sensor and the second image sensor in sequence.

[0031] Figure 9 This is a third example diagram used to illustrate the position synchronization method between the first image sensor and the second image sensor.

[0032] Figure 10 This is a fourth example diagram used to illustrate the position synchronization method between the first image sensor and the second image sensor.

[0033] Figure 11 This is a first example diagram illustrating the function of the mounting position determining part of the head alignment device according to an embodiment of the present invention.

[0034] Figure 12 This is a second example diagram illustrating the function of the mounting position determination part of the head alignment device according to an embodiment of the present invention.

[0035] Figure 13 This is a first example diagram illustrating the function of the movement control component of a head alignment device according to an embodiment of the present invention.

[0036] Figure 14 This is a first example diagram illustrating the function of the mounting position display section of the head alignment device according to an embodiment of the present invention.

[0037] Explanation of reference numerals in the attached figures

[0038] 100: Printing process equipment; 130: Gantry unit

[0039] 300: Head alignment device; 310: Reference position determining unit

[0040] 320: Installation position determination unit; 330: Installation position display unit

[0041] 410: Head Transmitter

[0042] 420a, 420b, ..., 420k, ..., 420n: Inkjet head modules

[0043] 440: First image sensor; 450: Second image sensor

[0044] 460: Structure 470: Marking

[0045] 480: First image 490: Second image

[0046] 610: Motion control unit; 620: Monitor screen

[0047] 630: Base position 640: Current position Detailed Implementation

[0048] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. The advantages and features of the present invention, as well as methods for achieving these advantages and features, will be explained below with reference to the accompanying drawings. Figure 1 The invention becomes clear from the detailed description of the embodiments. However, the invention is not limited to the embodiments disclosed below, but can be implemented in many different forms. These embodiments are provided only to make the disclosure of the invention complete and to fully inform those skilled in the art of the scope of the invention, which is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same constituent elements.

[0049] When a component or layer is referred to as "on" or "above" another component or layer, it includes not only that it is directly above another component or layer, but also that other components or layers are in between. Conversely, when a component is referred to as "directly" on or "directly above" another component or layer, it indicates that there are no other components or layers in between.

[0050] To readily describe the relationship between one element or component and another, as shown in the figure, spatial relative terms such as "below," "below," "lower," "above," and "upper" can be used. It should be understood that, in addition to the orientation shown in the figure, spatial relative terms also include terms indicating the different orientations of the elements during use or operation. For example, when the element shown in the figure is flipped, an element described as "below" or "below" of another element may be located "above" of that element. Therefore, the exemplary term "below" can include both "below" and "above" orientations. An element may also be oriented in another direction, thus allowing the spatial relative terms to be interpreted according to orientation.

[0051] Although the terms "first," "second," etc., are used to describe various elements, constituent elements, and / or parts, these elements, constituent elements, and / or parts are obviously not limited by these terms. These terms are only used to distinguish one element, constituent element, and / or part from another element, constituent element, and / or part. Therefore, the first element, first constituent element, or first part mentioned below can obviously also be a second element, second constituent element, or second part within the technical concept of the present invention.

[0052] The terminology used in this specification is for illustrative purposes and is not intended to limit the invention. In this specification, the singular form includes the plural form unless specifically stated otherwise. The terms "comprises" and / or "comprising" as used in this specification do not exclude the presence or addition of one or more other constituent elements, steps, operations, and / or components besides those mentioned.

[0053] Unless otherwise defined, all terms used in this specification (including technical and scientific terms) may be used in the sense that can be commonly understood by one of ordinary skill in the art to which this invention pertains. Furthermore, unless explicitly defined otherwise, terms as defined in commonly used dictionaries are not to be idealized or over-interpreted.

[0054] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing the invention with reference to the drawings, the same or corresponding constituent elements are given the same reference numerals regardless of the reference numerals, and repeated descriptions thereof are omitted.

[0055] The present invention relates to a head alignment device for aligning multiple head modules in a substrate processing system (e.g., printing process equipment) and a substrate processing system having a head alignment device.

[0056] The head alignment device according to the present invention can use position synchronization to determine a reference position, and can determine the installation position and spacing of multiple head modules based on this reference position to align multiple head modules.

[0057] According to the present invention, the installation accuracy of each head module can be improved, thus ensuring the quality and performance of the printing process equipment. Furthermore, the time spent aligning multiple head modules can be reduced.

[0058] The present invention will now be described in detail with reference to the accompanying drawings. First, a substrate processing system having a head alignment device will be described.

[0059] Figure 1 It is a perspective view schematically showing the internal structure of the substrate processing system, and Figure 2 It is a schematic plan view showing the internal structure of the substrate processing system.

[0060] A substrate processing system is used to process substrates. Such a substrate processing system can be, for example, implemented as a printing process apparatus that uses an inkjet head module to spray droplets onto the substrate. The following explanation uses the case where the substrate processing system is a printing process apparatus as an example.

[0061] according to Figure 1 and Figure 2 The printing process equipment 100 can be configured to include a base 110, a substrate support unit 120, a gantry unit 130, a gantry moving unit 140, an inkjet head module 150, a head moving unit 160, a droplet ejection volume measurement unit 170, and a nozzle inspection unit 180.

[0062] The base 110 forms the main body of the printing process equipment 100. The base 110 can be configured as a cuboid shape with a certain thickness. In addition, a substrate support unit 120 can be provided on the upper surface of the base 110.

[0063] The substrate support unit 120 is used to support the substrate S. This substrate support unit 120 may have a support plate 121 on which the substrate S is placed.

[0064] The support plate 121 is used to mount the substrate S. This support plate 121 can be a flat plate with a quadrilateral shape. In addition, the rotation drive component 122 can be connected to the lower surface of the support plate 121.

[0065] The rotary drive component 122 is used to rotate the support plate 121. For this purpose, the rotary drive component 122 can be implemented as a rotary motor. The rotary drive component 122 can rotate the support plate 121 using a rotation center axis formed in a direction perpendicular to the support plate 121.

[0066] If the support plate 121 rotates via the rotation drive member 122, the substrate S can also rotate with the support plate 121. For example, when the long side of the shell formed on the substrate S to be coated with droplets is oriented toward the second direction 20, the rotation drive member 122 can rotate the substrate S so that the long side of the shell is oriented toward the first direction 10.

[0067] The linear drive component 123 is used to linearly move the support plate 121 and the rotary drive component 122. This linear drive component 123 can linearly move the support plate 121 and the rotary drive component 122 along a first direction 10.

[0068] The linear drive component 123 may include a slider 124 and a guide component 125. In this case, the rotary drive component 122 may be disposed on the upper surface of the slider 124.

[0069] The guide member 125 can extend along a first direction 10 at the center of the upper surface of the base 110. A linear motor (not shown) can be embedded in the slider 124, and the slider 124 can move linearly along the first direction 10 with the guide member 125 via the linear motor.

[0070] A gantry unit 130 is used to support multiple inkjet head modules 150. This gantry unit 130 can be positioned above the movement path of the support plate 121.

[0071] The gantry unit 130 can be spaced upward from the upper surface of the base 110. In addition, the gantry unit 130 can be arranged such that its length direction is oriented toward the second direction 20.

[0072] The gantry moving unit 140 is used to move the gantry unit 130 linearly along a first direction 10. This gantry moving unit 140 may include a first moving unit 141 and a second moving unit 142.

[0073] The first moving unit 141 can be disposed at one end of the gantry unit 130, and the second moving unit 142 can be disposed at the other end of the gantry unit 130. In this case, the first moving unit 141 can slide along the first guide rail 211 disposed on one side of the base 110, and the second moving unit 142 can slide along the second guide rail 212 disposed on the other side of the base 110, so as to move the gantry unit 130 linearly in the first direction 10.

[0074] The inkjet head module 150 is used to spray droplets such as ink onto the substrate S. This inkjet head module 150 can be disposed on the side of the gantry unit 130 and supported by the gantry unit 130.

[0075] The inkjet head module 150 can move linearly along the length direction of the gantry unit 130, i.e., the second direction 20, via the head moving unit 160, or linearly along the third direction 30. Furthermore, the inkjet head module 150 can rotate relative to the head moving unit 160 about an axis parallel to the third direction 30.

[0076] Multiple inkjet head modules 150 can be mounted on the gantry unit 130. For example, the inkjet head modules 150 can be configured as three units: a first head unit 151, a second head unit 152, and a third head unit 153. For example, the multiple inkjet head modules 150 can be arranged side by side in a row along the second direction 20 and coupled to the gantry unit 130.

[0077] The inkjet head module 150 can be configured to include a plurality of nozzles (not shown) that eject droplets and a nozzle plate (not shown) having the plurality of nozzles formed thereon. For example, the inkjet head module 150 may have 128 nozzles or 256 nozzles.

[0078] The inkjet head module 150 may be equipped with piezoelectric elements corresponding to the number of nozzles. By controlling the voltage applied to the piezoelectric elements, the droplet ejection volume of each of the multiple nozzles can be adjusted independently.

[0079] The head moving unit 160 is used to linearly move the inkjet head module 150. This head moving unit 160 can be arranged inside the printing process equipment 100 in a manner corresponding to the number of inkjet head modules 150. For example, when the inkjet head modules 150 are configured as three, such as a first head unit 151, a second head unit 152, and a third head unit 153, the head moving unit 160 can also be configured as three.

[0080] In addition, the head moving unit 160 can also be configured as a single unit, in which case the inkjet head modules 150 can move together simultaneously, rather than moving individually.

[0081] The droplet ejection volume measurement unit 170 is used to measure the droplet ejection volume of the inkjet head module 150. This droplet ejection volume measurement unit 170 can be arranged on one side of the substrate support unit 120 on the base 110.

[0082] The droplet ejection volume measurement unit 170 can measure the amount of droplets ejected from all nozzles for each inkjet head module 150. By measuring the droplet ejection volume of the inkjet head module 150, it is possible to macroscopically confirm whether there are any abnormalities in all nozzles of the inkjet head module 150. That is, if the droplet ejection volume of the inkjet head module 150 exceeds a reference value, it can be determined that at least one of the inkjet head modules 150 is abnormal.

[0083] The inkjet head module 150 can be moved along a first direction 10 and a second direction 20 via the gantry moving unit 140 and the head moving unit 160 to be positioned above the droplet ejection volume measurement unit 170. The head moving unit 160 can move the inkjet head module 150 along a third direction 30 to adjust the vertical distance between the inkjet head module 150 and the droplet ejection volume measurement unit 170.

[0084] The nozzle inspection unit 180 is used to check whether there are any abnormalities in the individual nozzles provided in the inkjet head module 150. For example, this nozzle inspection unit 180 can check whether there are any abnormalities in the individual nozzles through optical inspection.

[0085] When the droplet ejection quantity measurement unit 170 macroscopically confirms whether there is an abnormality in the nozzle, and the result is that there is an abnormality in a non-specific nozzle, the nozzle inspection unit 180 can perform a full inspection of the nozzles while confirming whether there is an abnormality in a single nozzle.

[0086] The nozzle inspection unit 180 can be arranged on one side of the substrate support unit 120 on the base 110. The inkjet head module 150 can be moved along the first direction 10 and the second direction 20 via the gantry moving unit 140 and the head moving unit 160, and is located above the nozzle inspection unit 180. The head moving unit 160 can move the inkjet head module 150 along the third direction 30 to adjust the vertical distance between the inkjet head module 150 and the nozzle inspection unit 180.

[0087] In addition, the printing process equipment 100 may also include a droplet supply device 190.

[0088] The droplet supply device 190 can be disposed on the upper part and side of the gantry unit 130. This droplet supply device 190 may include a droplet supply module 191 and a pressure regulating module 192.

[0089] The droplet supply module 191 is used to supply liquids such as ink to the inkjet head module 150. This droplet supply module 191 can receive liquid from a storage tank (not shown) that stores liquid, and then supply the liquid to the inkjet head module 150.

[0090] The pressure regulating module 192 is used to regulate the pressure of the droplet supply module 191. This pressure regulating module 192 can regulate the pressure of the droplet supply module 191 by providing positive or negative pressure to the droplet supply module 191.

[0091] In addition, the droplet supply module 191 and the pressure regulation module 192 can be connected to the gantry unit 130.

[0092] Next, the head alignment device will be explained.

[0093] Figure 3 This is a conceptual diagram illustrating the internal structure of a head alignment device according to an embodiment of the present invention.

[0094] according to Figure 3 The head alignment device 300 may be configured to include a reference position determining unit 310, an installation position determining unit 320, an installation position display unit 330, a power supply unit 340, and a main control unit 350.

[0095] The head alignment device 300 is used to align multiple inkjet head modules. This head alignment device 300 can be linked with an image sensor to align multiple inkjet head modules.

[0096] The head alignment device 300 can be implemented as a device equipped with a processor having calculation and control functions to perform the aforementioned functions. For example, the head alignment device 300 can be implemented as a PC or a server.

[0097] The power supply unit 340 has the function of supplying power to each component constituting the head alignment device 300. Furthermore, the main control unit 350 has the function of controlling the overall operation of each component constituting the head alignment device 300.

[0098] like Figure 4 As shown, multiple inkjet head modules 420a, 420b, ..., 420n aligned by the head alignment device 300 can be mounted on the head conveyor 410. Figure 4 This is an example diagram used to illustrate the head transmitter. See below for reference. Figure 4 Please provide an explanation.

[0099] The head conveyor 410 is used to support multiple inkjet head modules 420a, 420b, ..., 420n. This head conveyor 410 can be arranged on the bottom surface of the gantry unit 130 (i.e., the surface facing the substrate S) with multiple inkjet head modules 420a, 420b, ..., 420n installed.

[0100] Each inkjet head module 420a, 420b, ..., 420n may have multiple nozzles to eject droplets. Each inkjet head module 420a, 420b, ..., 420n may be mounted on a head conveyor 410 such that the nozzles face downwards (i.e., negative third direction 30).

[0101] Multiple inkjet head modules 420a, 420b, ..., 420n can be arranged so that adjacent inkjet head modules are not arranged side by side (e.g., in a zigzag pattern). However, this embodiment is not limited to this. Multiple inkjet head modules 420a, 420b, ..., 420n can also be arranged so that adjacent inkjet head modules are arranged side by side.

[0102] Multiple inkjet head modules 420a, 420b, ..., 420n can be arranged in two columns. However, this embodiment is not limited to this. Multiple inkjet head modules 420a, 420b, ..., 420n can be arranged in one column, or in three or more columns.

[0103] The reference position determination unit 310 has the function of determining a reference position. This reference position determination unit 310 can utilize an image sensor to determine the reference position. For example, such as... Figure 5 As shown, the reference position determination unit 310 can use two image sensors 440 and 450, namely, the first image sensor 440 and the second image sensor 450, to determine the reference position.

[0104] In this embodiment, the position of the head transmitter 410 can be determined before determining the position of the inkjet head modules 420a, 420b, ..., 420n mounted on the head transmitter 410. The reference position determination unit 310 can determine the reference position as the position of the head transmitter 410.

[0105] Figure 5 This is an example diagram illustrating the function of the reference position determining unit constituting a head alignment device according to an embodiment of the present invention. Hereinafter, referring to... Figure 5 Please provide an explanation.

[0106] When the first image sensor 440 and the second image sensor 450 are used to determine the reference position, the reference position determination unit 310 can determine the reference position based on the position synchronization between the first image sensor 440 and the second image sensor 450.

[0107] Figure 6 This is a first example diagram illustrating a position synchronization method between a first image sensor and a second image sensor. Below, refer to... Figure 6 Please provide an explanation.

[0108] The first image sensor 440 can be arranged on the first side (the side parallel to the head transmitter 410). In this case, the first image sensor 440 can be fixed to the side or bottom of the head transmitter 410.

[0109] The second image sensor 450 can be arranged on the second side (the side facing the head transmitter 410). The second image sensor 450 can be arranged to face the first image sensor 440. For example, the first image sensor 440 can be arranged to face the substrate S, and the second image sensor 450 can be arranged to face the gantry unit 130.

[0110] Structure 460 is made of a transparent material and can be disposed between the first image sensor 440 and the second image sensor 450. For example, structure 460 can be a transparent glass substrate.

[0111] Mark 470 can be attached to structure 460. Mark 470 can be attached to one surface of structure 460 or to both surfaces of structure 460. When attached to both surfaces of structure 460, mark 470 can be attached to the corresponding positions.

[0112] The mark 470 can have the same shape when viewed from the front and from the back. For example, as Figure 7 As shown, the mark 470 can be in the shape of a cross. However, this embodiment is not limited to this. The mark 470 can be in various shapes such as polygonal, circular, and elliptical. Figure 7 This is a second example diagram used to illustrate a method for position synchronization between a first image sensor and a second image sensor.

[0113] Next, the position synchronization method between the first image sensor 440 and the second image sensor 450 will be described. Figure 8 This is a flowchart illustrating the position synchronization method between the first and second image sensors in sequence. Below, refer to... Figure 8 Please provide an explanation.

[0114] First, fix the position of the structure 460 (S510).

[0115] Then, a second image related to the mark 470 is obtained by using the second image sensor 450 to capture the mark 470 on the structure 460 (S520).

[0116] Then, a first image related to the mark 470 is obtained by using the first image sensor 440 to capture the mark 470 on the structure 460 (S530).

[0117] Then, the reference position determination unit 310 determines whether the first image is the same as the second image by comparing the first image with the second image (S540).

[0118] The reference position determination unit 310 can determine whether the first image and the second image are the same based on whether the positions of the markers 470 on the images are the same. For example, such as Figure 9 As shown, if the position of the mark 470 on the first image 480 is the same as the position of the mark 470 on the second image 490, the reference position determination unit 310 can determine that the first image 480 and the second image 490 are the same, and as... Figure 10 As shown, if the position of the mark 470 on the first image 480 is not the same as the position of the mark 470 on the second image 490, the reference position determination unit 310 can determine that the first image 480 and the second image 490 are not the same. Figure 9 This is a third illustrative diagram used to illustrate the position synchronization method between the first image sensor and the second image sensor, and Figure 10 This is the fourth illustration used to illustrate the position synchronization method between the first image sensor and the second image sensor.

[0119] If the first image is determined to be the same as the second image, the reference position determination unit 310 considers the positions of the first image sensor 440 and the second image sensor 450 to be synchronized, and determines the position of the head transmitter 410 as the reference position (S550).

[0120] Conversely, if it is determined that the first image and the second image are not the same, the reference position determination unit 310 considers that the positions of the first image sensor 440 and the second image sensor 450 are out of sync, and moves the first image sensor 440 (S560). At this time, the head conveyor 410, on which the first image sensor 440 is fixed, obviously also moves along with it.

[0121] The reference position determination unit 310 repeatedly executes steps S530, S540 and S560 until the positions of the first image sensor 440 and the second image sensor 450 are synchronized.

[0122] Refer again Figure 3 Please provide an explanation.

[0123] The mounting position determination unit 320 has the function of determining the mounting position. If the position of the head conveyor 410 is determined by the reference position determination unit 310, it is also necessary to determine the position of each inkjet head module 420a, 420b, ..., 420n provided on the head conveyor 410. The mounting position determination unit 320 can determine the mounting position as the reference position of the inkjet head modules 420a, 420b, ..., 420n.

[0124] The installation location determination unit 320 can determine the position of each inkjet head module 420a, 420b, ..., 420n based on absolute intervals. For example... Figure 11 As shown, when the first image sensor 440 is disposed together with multiple inkjet head modules 420a, 420b, ..., 420n inside the head conveyor 410, the first image sensor 440 can be configured to be spaced apart from the first inkjet head module 420a located at the nearest distance by a component design processing value k. In this case, this component design processing value k can be an absolute interval. Figure 11 This is a first example diagram illustrating the function of the mounting position determining part constituting a head alignment device according to an embodiment of the present invention.

[0125] If position synchronization is achieved between the first image sensor 440 and the second image sensor 450, the position of the second image sensor 450 can be determined. For example... Figure 12 As shown, the mounting position determination unit 320 can move the second image sensor 450 from its current position by an absolute interval (i.e., the component design processing value k). At this time, the mounting position determination unit 320 can move the second image sensor 450 along the arrangement direction of the plurality of inkjet head modules 420a, 420b, ..., 420n. Figure 12 This is a second example diagram illustrating the function of the mounting position determining part constituting the head alignment device according to an embodiment of the present invention.

[0126] Furthermore, the second inkjet head module 420b can be arranged adjacent to the first inkjet head module 420a. In this case, the second inkjet head module 420b can also be arranged to be spaced apart from the first inkjet head module 420a by a reference value. Here, although the reference value can be the component design processing value k, it can also be a value predetermined by the manufacturer. In this embodiment, the plurality of inkjet head modules 420a, 420b, ..., 420n can be arranged such that adjacent inkjet head modules are spaced apart from each other by a reference value. If the reference position of the preceding inkjet head module (e.g., the first inkjet head module 420a) is determined, the mounting position determination unit 320 can move the second image sensor 450 along the arrangement direction of the plurality of inkjet head modules 420a, 420b, ..., 420n by a reference value, thereby determining the reference position of the following inkjet head module (e.g., the second inkjet head module 420b).

[0127] Furthermore, the second inkjet head module 420b may not determine its reference position based on the distance from the first inkjet head module 420a (e.g., the component design processing value k), but may also determine its reference position based on the distance from the head conveyor 410 (e.g., a value equivalent to twice the component design processing value k), just like the first inkjet head module 420a.

[0128] Refer again Figure 3 Please provide an explanation.

[0129] The installation position display unit 330 has the function of displaying the installation position. If the reference position of each inkjet head module 420a, 420b, ..., 420n is determined, each inkjet head module 420a, 420b, ..., 420n needs to be moved from its current position to the reference position. In this embodiment, if the reference position of each inkjet head module 420a, 420b, ..., 420n is determined by the installation position determination unit 320, each inkjet head module 420a, 420b, ..., 420n can be moved from its current position to the reference position using a movement control component (e.g., a meter, a motor, etc.).

[0130] When the inkjet head modules 420a, 420b, ..., 420n are moved from their current positions to reference positions using the motion control unit, the installation position display unit 330 can display this information on a monitor screen, etc.

[0131] like Figure 13 As shown, the movement control unit 610 can be located at each inkjet head module 420a, 420b, ..., 420k, ..., 420n. This movement control unit 610 can be used to move each inkjet head module 420a, 420b, ..., 420k, ..., 420n to a designated position.

[0132] The movement control unit 610 can move one side of each inkjet head module 420a, 420b, ..., 420k, ..., 420n while one side is fixed, to move each inkjet head module 420a, 420b, ..., 420k, ..., 420n to a designated position. However, this embodiment is not limited to this. The movement control unit 610 can also move both sides of each inkjet head module 420a, 420b, ..., 420k, ..., 420n to a designated position.

[0133] In this embodiment, when each inkjet head module 420a, 420b, ..., 420k, ..., 420n is moved to a designated position, a specific nozzle in the inkjet head module 420a, 420b, ..., 420k, ..., 420n can be moved to the designated position. Figure 13 This is a first example diagram illustrating the function of a movement control component constituting a head alignment device according to an embodiment of the present invention.

[0134] like Figure 14 As shown, when the motion control unit 610 is used, the installation position display unit 330 can simultaneously display on the monitor screen 620 the current position 640 of each inkjet head module 420a, 420b, ..., 420k, ..., 420n and the reference position 630 determined by the installation position determination unit 320. Figure 14 This is a first example diagram illustrating the function of the mounting position display section constituting a head alignment device according to an embodiment of the present invention.

[0135] The installation position display unit 330 can simultaneously and visually provide the reference position 630 and current position 640 of each inkjet head module 420a, 420b, ..., 420k, ..., 420n, thus serving as an operator's guide and ensuring that each inkjet head module 420a, 420b, ..., 420k, ..., 420n is accurately installed in the required position on the device. Furthermore, by visually displaying the reference position 630, the spacing between the heads required to ensure device performance can be calculated and provided, or the installation and replacement of heads can be facilitated by displaying the positions of existing, quality-verified heads on the operation screen. This technology can be provided as a means to maintain device quality in inkjet equipment with multiple heads.

[0136] Reference above Figures 3 to 14 A head alignment device 300 according to an embodiment of the present invention is described. When aligning multiple head modules in a printing process apparatus, the head alignment device 300 can determine a reference position and thereby automatically calculate the mounting position of each head module and visually display that position on a monitor.

[0137] The head alignment device 300 can synchronize the positions of two cameras and determine them as reference positions. Based on the reference positions, it can calculate the required installation interval of the head modules and determine the installation position of each head module in software (SW). The calculated installation positions can be displayed on the operation monitor screen so that the head modules are installed in the positions required to ensure performance.

[0138] When determining the reference position, the camera mounted on the head module and the camera mounted on the bottom of the device can be synchronized to the same position in the vertical direction, and the corresponding position can be set as the reference position. Furthermore, when determining the installation position of the head module, the two cameras can be moved from the synchronized reference position to the desired installation position, and the corresponding position will be displayed on the operator's monitor screen.

[0139] By performing the above functions, the head alignment device 300 can determine a reference position using two synchronized cameras. Furthermore, the head alignment device 300 can adjust the position of a single head module by determining the mounting position of the head module based on the reference position. Additionally, the head alignment device 300 allows for real-time monitoring of the head module installation status via a monitor while the head module is being installed. Moreover, the head alignment device 300 can automatically calculate the mounting position of the head module using software based on the reference position, thereby installing the head module in the position required to ensure performance.

[0140] Furthermore, even when multiple head modules are installed, the spacing between the head modules can be set to an absolute spacing, so that the head modules are installed at an absolute position from the reference position, and the head modules can be installed in the same position even when the head modules are replaced and reinstalled.

[0141] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, those skilled in the art should understand that the present invention can be implemented in other specific forms without changing its technical concept or essential features. Therefore, the above embodiments should be understood as exemplary in all respects, and not restrictive.

Claims

1. A head alignment device, comprising: The reference position determination unit determines the first reference position of the head conveyor, which is equipped with multiple inkjet head modules. The installation position determination unit determines a second reference position for the inkjet head module based on the first reference position, so that the inkjet head module can move from its current position to the second reference position. A movement control unit is located at each of the plurality of inkjet head modules. The reference position determination unit uses a first image sensor positioned on the same plane as the inkjet head module and a second image sensor positioned facing the inkjet head module to determine the first reference position. The movement control unit moves each of the plurality of inkjet head modules to a designated position.

2. The head alignment device according to claim 1, wherein, The reference position determination unit determines the first reference position based on the position synchronization between the first image sensor and the second image sensor.

3. The head alignment device according to claim 1, wherein, The reference position determination unit uses a structure with markings attached to its surface to determine the first reference position.

4. The head alignment device according to claim 1, wherein, The first image sensor acquires a first image of a structure with markings attached to its surface. The second image sensor acquires a second image of the structure, and The reference position determination unit determines the first reference position based on whether the first image is the same as the second image.

5. The head alignment device according to claim 4, wherein, The reference position determination unit determines whether the first image and the second image are the same by comparing the position of the mark on the first image with the position of the mark on the second image.

6. The head alignment device according to claim 5, wherein, If the first image is not the same as the second image, the reference position determination unit moves the first image sensor to determine the first reference position.

7. The head alignment device according to claim 3, wherein, The structure is positioned between the first image sensor and the second image sensor when synchronizing their positions.

8. The head alignment device according to claim 3, wherein, The structure is made of a transparent material.

9. The head alignment device according to claim 1, wherein, The installation position determination unit determines the second reference position by adding a first reference value to the first reference position.

10. The head alignment device according to claim 1, wherein, The installation position determination unit determines the second reference position of another inkjet head module based on the second reference position of any one of the plurality of inkjet head modules.

11. The head alignment device according to claim 10, wherein, The installation position determination unit determines the second reference position of the other inkjet head module by adding the second reference value to the second reference position of any one of the inkjet head modules.

12. The head alignment device according to claim 1, further comprising: The mounting position display unit visually displays the current position and the second reference position when the inkjet head module moves from the current position to the second reference position.

13. The head alignment device according to claim 12, wherein, The installation position display unit simultaneously displays the current position and the second reference position on a single screen.

14. A head alignment device, comprising: The reference position determination unit determines the first reference position of the head conveyor, which is equipped with multiple inkjet head modules. The installation position determination unit determines a second reference position for the inkjet head module based on the first reference position, so that the inkjet head module can move from its current position to the second reference position. A movement control unit is located at each of the plurality of inkjet head modules. The reference position determination unit uses a first image sensor positioned on the same plane as the inkjet head module and a second image sensor positioned facing the inkjet head module to determine the first reference position. Specifically, when the first image sensor acquires a first image of a structure with markings attached to its surface, which is arranged between the first image sensor and the second image sensor, and the second image sensor acquires a second image of the structure, the reference position determination unit determines whether the first image is the same as the second image based on the positions of the markings on the first image and the second image, thereby determining the first reference position. The movement control unit moves each of the plurality of inkjet head modules to a designated position.

15. A substrate processing system, comprising: Base; A substrate support member is disposed on the base and supports the substrate to be printed; A gantry unit is movably mounted on the substrate support member and is provided with a head conveyor having multiple inkjet head modules that spray droplets onto the substrate. as well as The head alignment device aligns the inkjet head module. The head alignment device includes: A reference position determining unit determines a first reference position of the head transmitter; The installation position determination unit determines a second reference position for the inkjet head module based on the first reference position, so that the inkjet head module can move from its current position to the second reference position. A movement control unit is located at each of the plurality of inkjet head modules. The reference position determination unit uses a first image sensor positioned on the same plane as the inkjet head module and a second image sensor positioned facing the inkjet head module to determine the first reference position. The movement control unit moves each of the plurality of inkjet head modules to a designated position.

16. The substrate processing system according to claim 15, wherein, The reference position determination unit determines the first reference position based on the position synchronization between the first image sensor and the second image sensor.

17. The substrate processing system according to claim 15, wherein, The first image sensor acquires a first image of a structure with markings attached to its surface. The second image sensor acquires a second image of the structure, and The reference position determination unit determines whether the first image is the same as the second image by comparing the position of the mark on the first image with the position of the mark on the second image, and determines the first reference position based on whether the first image is the same as the second image.

18. The substrate processing system according to claim 15, wherein, The installation position determination unit determines the second reference position by adding a first reference value to the first reference position.

19. The substrate processing system according to claim 15, wherein, The installation position determination unit determines the second reference position of another inkjet head module based on the second reference position of any one of the plurality of inkjet head modules.

20. The substrate processing system according to claim 15, wherein, The head alignment device also includes an installation position display unit. When the inkjet head module moves from the current position to the second reference position, the installation position display unit visually displays the current position and the second reference position.

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