Display device manufacturing apparatus

Abstract

The present invention provides a manufacturing device for a display device, which can not only measure droplets but also measure abnormal vibrations, thereby simplifying the structure and saving costs while achieving accurate droplet discharge. The manufacturing device for the display device includes: a test substrate; a droplet discharge unit, which has a nozzle for discharging droplets; a measuring unit, which can move in a first direction above the test substrate and is used to measure the outer surface shape of the test substrate in a measurement area; and a control unit, which is used to derive vibration data from the outer surface shape and analyze the vibration data.

Description

Technical Field

[0001] The present invention relates to a manufacturing device for a display device. Background Art

[0002] Electronic devices based on mobility are widely used. As mobile electronic devices, in addition to small electronic devices such as mobile phones, tablet computers are now widely used.

[0003] These mobile electronic devices include display devices to provide users with various functions, namely visual information such as images and videos. Recently, the proportion of display devices in electronic devices has been increasing, and structures that can be bent from a flat state to a specified angle are being developed.

[0004] Furthermore, a display device may include multiple layers formed through various processes. For example, a display device may include a layer composed of an organic material, which may be formed by a process, such as a printing process, that deposits organic droplets onto a display substrate. To achieve precise images on a display device, droplets of precise volume must be deposited onto precise locations on the display substrate. Summary of the Invention

[0005] To achieve precise images on display devices, a process can be performed before the printing process by discharging organic droplets onto a test substrate to measure the droplet discharge position and volume. Furthermore, it may be necessary to detect abnormal vibrations in the manufacturing equipment performing the printing process. Typically, separate devices are used to measure the droplet discharge position and volume, and to measure abnormal vibrations.

[0006] However, an embodiment of the present invention aims to provide a display device manufacturing apparatus capable of not only inspecting the ejection position and volume of liquid droplets but also analyzing whether the manufacturing apparatus has abnormal vibrations. However, this subject is merely illustrative and the scope of the present invention is not limited to this subject.

[0007] According to one aspect of the present invention, a manufacturing device for a display device is provided, comprising: a test substrate; a droplet discharge unit having a nozzle for discharging droplets; a measuring unit capable of moving in a first direction above the test substrate and for measuring an outer surface shape of the test substrate in a measurement area; and a control unit for deriving vibration data from the outer surface shape and analyzing the vibration data.

[0008] According to this embodiment, the measured outer surface shape may include a first contour extending along the first direction, and the vibration data may include height information of the first contour.

[0009] According to this embodiment, the control unit may determine whether there is an abnormal state by comparing a maximum variation range of the height of the first contour in the first section of the first contour with a predetermined set value.

[0010] According to this embodiment, the control unit may calculate a first average height line from the height information of the first contour, and analyze the shape of the first average height line to determine whether there is an abnormal state.

[0011] According to this embodiment, the measured outer surface shape may include: a liquid droplet region where the liquid droplet discharged from the liquid droplet discharge portion is located; and a peripheral region surrounding the liquid droplet region, and the first contour may overlap with the peripheral region.

[0012] According to this embodiment, at least a portion of the first outline may overlap with a region where the liquid droplets discharged by the liquid droplet discharge portion onto the test substrate are located.

[0013] According to this embodiment, the measured outer surface shape may further include a second contour extending along the first direction and spaced apart from the first contour along a second direction intersecting the first direction, and the vibration data may further include height information of the second contour.

[0014] According to this embodiment, the control unit can determine whether there is an abnormal state by comparing the maximum change range of the height of the first contour with a predetermined set value in the first interval of the first contour and comparing the maximum change range of the height of the second contour with a predetermined set value in the second interval of the second contour.

[0015] According to this embodiment, the control unit may determine whether there is an abnormal state by analyzing the shapes of the first average height line calculated from the height information of the first contour and the second average height line calculated from the height information of the second contour.

[0016] According to this embodiment, the measured outer surface shape may include: a droplet region where the droplets ejected by the droplet ejection portion are located; and a surrounding region surrounding the droplet region, and one of the first contour and the second contour may overlap with the surrounding region.

[0017] According to this embodiment, at least a portion of one of the first contour and the second contour may overlap with a region where the droplets discharged by the droplet discharge portion onto the test substrate are located.

[0018] Other aspects, features, and advantages besides those described above will become apparent from the following detailed description, claims, and accompanying drawings for implementing the invention.

[0019] These general and specific aspects may be implemented using a system, a method, a computer program, or any combination of systems, methods, and computer programs.

[0020] According to the embodiment of the present invention constructed as described above, a display device manufacturing apparatus can be realized that can measure not only droplets but also abnormal vibrations simultaneously, thereby simplifying the structure and reducing costs while achieving precise droplet discharge. Of course, the scope of the present invention is not limited to this effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a perspective view schematically illustrating a display device manufacturing apparatus according to an embodiment of the present invention.

[0022] Figure 2 This is a perspective view schematically showing a portion of a display device manufacturing apparatus according to an embodiment of the present invention.

[0023] Figure 3 Graphs show simulation results of the test substrate and the outer surface shapes of the discharged droplets.

[0024] Figure 4a and Figure 4b Yes Figure 3 A graph of the height information of the contours in the outer surface shape.

[0025] Figure 5 This is a plan view illustrating the outer surface shape measured by a manufacturing apparatus for a display device according to an embodiment of the present invention.

[0026] Figure 6 This is a plan view of the outer surface shape measured by an apparatus for manufacturing a display device according to another embodiment of the present invention.

[0027] Figure 7 This is a plan view of the outer surface shape measured by an apparatus for manufacturing a display device according to still another embodiment of the present invention.

[0028] Figure 8 FIG. 1 is a plan view schematically showing a display device manufactured by the display device manufacturing apparatus according to an embodiment of the present invention.

[0029] Figure 9 This is a cross-sectional view schematically showing a portion of a display device manufactured by the display device manufacturing apparatus according to one embodiment of the present invention. DETAILED DESCRIPTION

[0030] The present invention is susceptible to various modifications and embodiments. Specific embodiments are schematically illustrated in the accompanying drawings and described in detail in the detailed description. The effects and features of the present invention, as well as methods for achieving these effects and features, will become apparent with reference to the accompanying drawings and the embodiments described in detail below. However, the present invention is not limited to the embodiments disclosed below and may be implemented in a variety of forms.

[0031] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing with reference to the accompanying drawings, the same or corresponding components will be denoted by the same reference numerals, and repeated description of the components will be omitted.

[0032] In the following embodiments, the terms "first" and "second" do not have a restrictive meaning but are used to distinguish one structural element from other structural elements.

[0033] In the following embodiments, regarding an expression in a singular form, if it is not obvious that a different meaning is expressed in the context, the expression in the singular form includes an expression in a plural form.

[0034] In the following embodiments, terms such as “including” or “having” indicate the presence of features or structural elements described in the specification, and are not intended to preclude the possibility of adding one or more other features or structural elements.

[0035] In the following embodiments, when a part such as a film, a region or a structural element is mentioned as being located "above" or "on" another part, this includes not only the case where it is "directly" located above the other part, but also the case where there are other films, regions or structural elements in between.

[0036] For the convenience of explanation, the sizes of the structural elements in the drawings may be exaggerated or reduced. For example, the sizes and thicknesses of the structures shown in the drawings are arbitrarily shown for the convenience of explanation, and the present invention is not necessarily limited to the contents shown in the drawings.

[0037] In the case of alternative implementations of a certain embodiment, a specific process sequence may be implemented in an order different from the order described. For example, two processes described in succession may be implemented substantially simultaneously or in an order opposite to the order described.

[0038] In this specification, "A and / or B" means A or B, or A and B. Furthermore, "at least one of A and B" means A or B, or A and B.

[0039] In the following embodiments, when a film, region, or structural element is mentioned as being connected, this also includes the case where the film, region, or structural element is directly connected, and / or the case where another film, region, or structural element exists between the film, region, or structural element and the connection is indirect. For example, in this specification, when a film, region, or structural element is mentioned as being electrically connected, this refers to the case where the film, region, or structural element is directly electrically connected, and / or the case where another film, region, or structural element exists between the film, region, or structural element and the connection is indirect.

[0040] The x-axis, y-axis, and z-axis are not limited to the three axes on the rectangular coordinate system, but can be interpreted in a broad sense including the three axes. For example, the x-axis, y-axis, and z-axis can be orthogonal to each other, but can also refer to different directions that are not orthogonal to each other.

[0041] Figure 1 This is a perspective view schematically illustrating a display device manufacturing apparatus according to an embodiment of the present invention.

[0042] Reference Figure 1 The manufacturing apparatus 100 for a display device may include a supporting portion 110 , a first gantry 120 , a first moving portion 130 , a droplet discharge portion 140 , a measuring portion 150 , a second gantry 160 , a second moving portion 170 , a control portion 180 , and a test substrate TS.

[0043] The support portion 110 may include a workbench 111 , a plurality of guide members 112 , a substrate moving member 113 , and a substrate rotating member 114 .

[0044] The stage 111 may include an alignment mark (not shown) for aligning the display substrate S.

[0045] Here, the display substrate S may be a display device under manufacture. The display substrate S may be glass or include a polymer resin, such as polyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyimide, polycarbonate (PC), cellulose triacetate (TAC), or cellulose acetate propionate.

[0046] The plurality of guide members 112 may be spaced apart and disposed on both sides of the substrate moving member 113. The length of the plurality of guide members 112 may be longer than the edge length of the display substrate S. Figure 1 The lengths of the plurality of guide members 112 and the edge length of the display substrate S are measured in the y direction.

[0047] A first gantry 120 may be disposed on the plurality of guide members 112. In one embodiment, the plurality of guide members 112 may include a predetermined guide rail to enable the first gantry 120 to move linearly along the length of the plurality of guide members 112. For example, the plurality of guide members 112 may include a linear motion rail.

[0048] The substrate moving member 113 may be disposed on the workbench 111. The substrate moving member 113 may extend along the length of the plurality of guide members 112. For example, the substrate moving member 113 may extend along the y-direction. Furthermore, the substrate moving member 113 may include a guide rail to enable linear movement of the substrate rotating member 114. For example, the substrate moving member 113 may include a linear motion rail.

[0049] The substrate rotating component 114 may be configured to be rotatable on the substrate moving component 113. When the substrate rotating component 114 rotates, the display substrate S disposed on the substrate rotating component 114 may rotate. In one embodiment, the substrate rotating component 114 may rotate around a rotation axis that is perpendicular to a side of the workbench 111 on which the display substrate S is mounted. When the substrate rotating component 114 rotates around a rotation axis that is perpendicular to a side of the workbench 111 on which the display substrate S is mounted, the display substrate S disposed on the substrate rotating component 114 may also rotate around a rotation axis that is perpendicular to a side of the workbench 111 on which the display substrate S is mounted. In this case, the substrate rotating component 114 may fix the display substrate S after the display substrate S is mounted. For example, the substrate rotating component 114 may include one of a vacuum chuck, an electrostatic chuck, and an adhesive chuck.

[0050] The first gantry 120 may be installed on the plurality of guide members 112. That is, the first gantry 120 may be installed on the plurality of guide members 112 that are spaced apart and installed on both sides with the substrate moving member 113 interposed therebetween.

[0051] The first gantry 120 can move along the length of the plurality of guide members 112. In one embodiment, the first gantry 120 can be manually moved linearly, or automatically moved linearly by a motor, cylinder, or the like. For example, the first gantry 120 can include a linear motion block that moves along a linear motion guide rail to automatically move linearly.

[0052] The first movable portion 130 can move linearly on the first gantry 120. For example, the first gantry 120 can include a predetermined guide rail to enable the linear movement of the first movable portion 130. In this case, the droplet discharge unit 140 is disposed on the first movable portion 130 and can move along with the first movable portion 130 when the first movable portion 130 moves.

[0053] The first moving part 130 and the droplet discharge part 140 can be provided in various ways. For example, one first moving part 130 and one droplet discharge part 140 can be provided. In this case, the droplet discharge part 140 can include a head and a nozzle provided on the head for discharging the droplet DR (see FIG. Figure 2 ) at least one nozzle.

[0054] As another example, multiple droplet discharge units 140 may be provided, and a single first moving unit 130 may be provided. In this case, the multiple droplet discharge units 140 may be provided on a single first moving unit 130, so that they move simultaneously with the movement of the first moving unit 130. In this case, the droplet discharge unit 140 may include at least one head having at least one nozzle.

[0055] As another example, a plurality of first moving parts 130 and a plurality of droplet discharge parts 140 may be provided. In this case, one droplet discharge part 140 may be provided on one first moving part 130, or a portion of the plurality of droplet discharge parts 140 may be provided on one first moving part 130, and the remaining portion of the plurality of droplet discharge parts 140 may be provided on another first moving part 130.

[0056] For the sake of convenience, the following detailed description will focus on the case where one droplet discharge unit 140 is provided on one first moving unit 130 .

[0057] The first moving unit 130 may be provided in plurality. In this case, the number of the first moving units 130 may be set to correspond to the number of the droplet discharge units 140. For example, the first moving unit 130 may include a 1-1 moving unit 131, a 1-2 moving unit 132, and a 1-3 moving unit 133.

[0058] The 1-1 moving portion 131 and the 1-2 moving portion 132 may be spaced apart, and the spacing between them may be equal to the spacing between the 1-2 moving portion 132 and the 1-3 moving portion 133. In another embodiment, the spacing between the 1-1 moving portion 131 and the 1-2 moving portion 132 may be different from the spacing between the 1-2 moving portion 132 and the 1-3 moving portion 133. In this case, the 1-1 moving portion 131 to the 1-3 moving portion 133 may move independently of each other.

[0059] The first moving portion 130 can move linearly on the first gantry 120. Specifically, the first moving portion 130 can move along the length direction of the first gantry 120. For example, at least one of the 1-1 moving portion 131, the 1-2 moving portion 132, and the 1-3 moving portion 133 can move along the x direction or the -x direction.

[0060] In one embodiment, the first moving portion 130 can be manually moved linearly. In another embodiment, the first moving portion 130 can be equipped with a motor, a cylinder, etc. to automatically move linearly. For example, the first moving portion 130 can include a linear motion block that moves along a linear motion guide rail.

[0061] The droplet discharge unit 140 may be provided on the first moving unit 130 . For example, the first droplet discharge unit 141 may be provided on the 1-1 moving unit 131 , the second droplet discharge unit 142 may be provided on the 1-2 moving unit 132 , and the third droplet discharge unit 143 may be provided on the 1-3 moving unit 133 .

[0062] The droplet discharge unit 140 can discharge droplets DR onto the display substrate S. The droplets DR can be liquid crystals, alignment liquids, or red, green, or blue ink containing pigment particles mixed in a solvent. In another embodiment, the droplets DR can be a high-molecular-weight or low-molecular-weight organic substance corresponding to the light-emitting layer of an organic light-emitting display device. In yet another embodiment, the droplets DR can include a solution containing inorganic particles such as quantum dots.

[0063] In addition, the droplet discharge unit 140 can discharge droplets DR onto the test substrate TS. The test substrate TS can be set on the workbench 111 and can be set between the multiple guide components 112. In one embodiment, the shape of the test substrate TS can be the same as the shape of the display substrate S. In another embodiment, the test substrate TS may include a film supply unit, a film recovery unit, and a film. In this case, the film can be set in a roll-type manner in the film supply unit and the film recovery unit. That is, the film can be wound around the film supply unit and the film recovery unit. The following detailed description mainly focuses on the case where the shape of the test substrate TS is the same as that of the display substrate S.

[0064] The first, second, and third droplet discharge units 141, 142, and 143 of the droplet discharge unit 140 can each independently adjust the amount of droplets DR supplied. In this case, the first, second, and third droplet discharge units 141, 142, and 143 can each be electrically connected to the control unit 180. Therefore, the control unit 180 can independently adjust the amount of droplets DR discharged from each of the first, second, and third droplet discharge units 141, 142, and 143. In this case, at least one of the first, second, and third droplet discharge units 141, 143 can include at least one nozzle for discharging the droplets DR.

[0065] The measuring unit 150 can measure the droplet DR discharged onto the test substrate TS. To this end, the measuring unit 150 can obtain the outer surface shape ES (refer to Figure 3 The acquired outer surface shape ES may include a partial outer surface shape TS-S of the test substrate TS (refer to Figure 3 ) and the outer surface shape DR-S of the droplet DR on the test substrate TS (refer to Figure 3 ).

[0066] This measuring unit 150 can have various forms. For example, the measuring unit 150 can include a confocal microscope, an interferometric microscope, or a chromatic confocal line sensor. In this case, the confocal microscope is a microscope that can obtain multiple two-dimensional images of an object at different depths and reconstruct the three-dimensional structure of the object based on the two-dimensional images. The confocal microscope can be, for example, a chromatic confocal microscope or a chromatic line confocal microscope. The interferometric microscope is a microscope that performs quantitative measurements by observing changes in the concavity and convexity of the object's microstructure or phase changes. The interferometric microscope can be, for example, a laser interferometric microscope or a white light interferometric microscope. For convenience of explanation, the following detailed description focuses on the case where the measuring unit 150 includes a chromatic confocal line sensor.

[0067] The measuring unit 150 may be disposed on the second moving unit 170 , and the second moving unit 170 may be disposed on the second gantry 160 .

[0068] The second gantry 160 may be provided on one side of each guide member 112 provided on both sides across the test substrate TS. For example, one end of the second gantry 160 may be provided on one side of one guide member 112 among the plurality of guide members 112, and the other end of the second gantry 160 may be provided on one side of the remaining guide member 112 among the plurality of guide members 112. Figure 1 The figure shows a case where the second gantry 160 is installed on the plurality of guide members 112 on which the first gantry 120 is installed. However, as another embodiment, the second gantry 160 may be installed on other guide members instead of on the guide members 112 .

[0069] The second gantry 160 can move along the length of the plurality of guide members 112. For example, the second gantry 160 can move in the y-direction or the -y-direction. In one embodiment, the second gantry 160 can be manually linearly moved, or can be automatically linearly moved by a motor, a cylinder, or the like. For example, the second gantry 160 can include a linear motion block that moves along the linear motion rails of the guide members 112.

[0070] The second movable portion 170 can move along the length of the second gantry 160. For example, the second movable portion 170 can move in the x-direction or the -x-direction. In one embodiment, the first movable portion 130 can be manually linearly moved. In another embodiment, the first movable portion 130 can be automatically linearly moved by a motor, a cylinder, or the like. For example, the second movable portion 170 can include a linear motion block that moves along a linear motion guide rail provided on the second gantry 160.

[0071] The control unit 180 can calculate at least one of the discharge position and volume of the droplet DR based on the outer surface shape DR-S of the test substrate TS and the droplet DR measured by the measurement unit 150. Based on the calculated result, the control unit 180 can control the ink discharge amount of the droplet discharge unit 140 or the position of the droplet discharge unit 140. To this end, the control unit 180 can be electrically connected to the first gantry 120, the first moving unit 130, the droplet discharge unit 140, and the measurement unit 150.

[0072] Furthermore, the control unit 180 can derive and analyze data on vibration of the display device manufacturing apparatus 100 from the outer surface shape ES measured by the measuring unit 150. This allows diagnosis of the state of the display device manufacturing apparatus 100 and efficient equipment management.

[0073] The display device manufacturing apparatus 100 described above can supply droplets DR to the display substrate S, and form, for example, an organic layer on the display substrate S. At this time, in order to manufacture a high-quality display device, it is necessary to accurately supply droplets DR to the display substrate S in the display device manufacturing apparatus 100. To confirm this, the droplet discharge unit 140 can discharge droplets DR onto a test substrate TS before discharging the droplets DR onto the display substrate S, and the measuring unit 150 can measure the droplets DR on the test substrate TS. The control unit 180 of one embodiment of the present invention can comprehensively judge whether the discharge of the droplets DR is good and whether the state of the display device manufacturing apparatus 100 is good based on the results measured by the measuring unit 150, and can also judge whether the droplets DR are accurately supplied. Based on the above judgment results, the control unit 180 can control the display device manufacturing apparatus 100 or notify the user of equipment abnormality information.

[0074] Figure 2 This is a perspective view schematically showing a portion of a display device manufacturing apparatus according to an embodiment of the present invention, mainly showing a test substrate and a measurement unit. Figure 3 Graphs show simulation results of the test substrate and the outer surface shapes of the discharged droplets.

[0075] Reference Figure 2 and Figure 3 The measuring unit 150 can move along the x direction and / or the -x direction on the test substrate TS and can measure the outer surface shape ES by scanning the measurement area of ​​the test substrate TS. Figure 3 As shown, a three-dimensional outer surface shape ES can be obtained, which may include position information of the outer surface in the x-, y-, and z-directions. The outer surface shape ES may include a local outer surface shape TS-S of the test substrate TS and an outer surface shape DR-S of the droplet DR on the test substrate TS. The measurement results of the measurement unit 150 may be transmitted to the control unit 180, which may calculate and analyze the ejection position and volume of the droplet DR based on the three-dimensional position information included in the outer surface shape DR-S of the droplet DR.

[0076] In addition, according to one embodiment of the present invention, the control unit 180 can derive vibration data of the manufacturing device 100 of the display device from the outer surface shape ES of the test substrate TS and the droplet DR measured by the measuring unit 150, and can obtain the vibration state of the manufacturing device 100 of the display device by analyzing the vibration data. The measured outer surface shape ES may include a profile PF extending along a first direction, and the height information of the profile PF may be obtained as vibration data. Here, the first direction may be the same as the moving direction of the measuring unit 150, for example, it may be the x direction or the -x direction. The height of the profile PF may be defined as the distance from a reference height to the position of the profile PF in the z direction, and the reference height may be, for example, one side of the workbench 111. The profile PF may include two-dimensional position information, for example, it may include height information in the extension direction of the profile PF. For example, Figure 3 The profile PF may include position information in the z direction on the x direction position.

[0077] Because the measurement unit 150 scans the measurement area of ​​the test substrate TS while moving, for example, in the x-direction, the profile PF along the x-direction in the measured outer surface shape ES may include temporal variations in the height of the outer surface of the test substrate TS. This height variation may be caused by vibrations of the display device manufacturing apparatus 100. Therefore, the vibration state of the display device manufacturing apparatus 100 can be determined by analyzing the profile PF of the measured outer surface shape ES.

[0078] Next, a method of judging whether the state of the display device manufacturing apparatus 100 is good or not based on the profile PF will be described in detail.

[0079] Figure 4a and Figure 4b Yes Figure 3 A graph of the height information of the contours in the outer surface shape.

[0080] Reference Figure 4a and Figure 4b , the horizontal axis of the chart can be Figure 3 The x-axis corresponds to the position of the profile PF in the x-direction, and the vertical axis can correspond to the height of the profile PF, that is, the position in the z-direction. The height information of the profile PF can be illustrated by a solid line graph, which can be understood as a set of coordinate values ​​consisting of the values ​​of the horizontal axis indicating the position of the profile PF in the x-direction (hereinafter referred to as x-values ​​for convenience) and the values ​​of the vertical axis indicating the height of the profile PF (hereinafter referred to as z-values ​​for convenience).

[0081] The height average line LA is shown by a dotted line. According to one embodiment of the present invention, the height average line LA can be calculated from the height information of the profile PF. For example, a prescribed range including continuous x values ​​can be set in the solid line diagram, and the average value of the z values ​​corresponding to the x values ​​within the above range can be calculated. The height average line LA can be obtained by calculating the average value of the z values ​​while continuously moving within the above prescribed range. Figure 4a The middle height average line LA has a predetermined inclination, which may be caused by the fact that the moving direction of the measuring unit 150 and the one surface of the test substrate TS are not precisely parallel to each other.

[0082] Reference Figure 4a The maximum variation dz of the height of the profile PF can be calculated within a predetermined interval dx on the horizontal axis. This maximum variation dz can be compared with a predetermined set value to determine whether the display device manufacturing apparatus 100 is in an abnormal state. The predetermined interval dx can be set by the user. If the maximum variation dz of the height of the profile PF exceeds the predetermined set value, it can be determined that the display device manufacturing apparatus 100 is experiencing abnormal vibration.

[0083] Reference Figure 4b ,and Figure 4a The height average line LA is different, Figure 4b The height average line LA' is shown as an irregular curve. This may be caused by abnormal movement of the measurement unit 150 or by a bend in the worktable 111 supporting the test substrate TS or the test substrate TS itself. This phenomenon may hinder the accurate measurement of the droplets DR and adversely affect the manufacturing quality of the display device. Therefore, this phenomenon can be considered an abnormal state. As one embodiment, an abnormal state can be determined when the height average line LA' is zigzag or wavy.

[0084] As described above, according to one embodiment of the present invention, the control unit 180 can not only analyze the ejection position and volume of the droplet DR based on the outer surface shape ES measured by the measuring unit 150, but can also analyze whether the display device manufacturing apparatus 100 has entered an abnormal state due to abnormal vibration, etc. This eliminates the need for separate devices for measuring the ejection position and volume of the droplet and for measuring abnormal vibration. This allows for a display device manufacturing apparatus that can accurately eject droplets while simplifying the structure and reducing costs.

[0085] Figure 5 This is a plan view illustrating the outer surface shape measured by a manufacturing apparatus for a display device according to an embodiment of the present invention.

[0086] Reference Figure 5 , by the measuring unit 150( Figure 2) The outer surface shape ES measured by the liquid droplet discharge unit 140 may include a liquid droplet area DRA where the liquid droplet DR is located and a surrounding area SRA surrounding the liquid droplet area DRA. Figure 5 18 droplets DR and droplet areas DRA are shown in the figure, but the present invention is not limited thereto.

[0087] As one embodiment, the profile PF used to derive the vibration data analyzed by the control unit 180 can overlap with the surrounding area SRA. In this case, the profile PF can be located between adjacent droplet areas DRA or adjacent to the edge of the outer surface shape ES. This allows for the acquisition of vibration data independent of the position, surface shape, or vibration of the droplet DR, making it easier to analyze abnormal vibrations.

[0088] Figure 6 It is a plan view showing the outer surface shape measured by a manufacturing apparatus for a display device according to another embodiment of the present invention.

[0089] Reference Figure 6 As another embodiment, at least a portion of the profile PF used to derive the vibration data analyzed by the control unit 180 may overlap with the region where the droplets DR discharged by the droplet discharge unit 140 onto the test substrate TS are located. In other words, at least a portion of the profile PF may overlap with the droplet area DRA. In this case, only the portion of the profile PF that does not overlap with the droplet area DRA may be used to derive the vibration data.

[0090] Thus, even when the droplets DR are densely discharged onto the test substrate TS, vibration data can be acquired, thereby making it possible to discharge more droplets DR onto the test substrate TS of the same area, thereby improving the utilization rate of the test substrate TS.

[0091] Figure 7 This is a plan view illustrating the outer surface shape measured by a manufacturing apparatus for a display device according to still another embodiment of the present invention.

[0092] Reference Figure 7 As another embodiment, the measured outer surface shape ES may include a plurality of profiles PF extending along the first direction, and height information of the plurality of profiles PF may be acquired as vibration data.

[0093] As an example, the plurality of profiles PF may include a first profile PF1 and a second profile PF2. As another example, the plurality of profiles PF may include a first profile PF1, a second profile PF2, and a third profile PF3. Hereinafter, for convenience of explanation, the case where the plurality of profiles PF include the first to third profiles PF1, PF2, and PF3 will be described.

[0094] The first to third profiles PF1, PF2, and PF3 may extend along a first direction, such as the x-direction, which may be the same as the moving direction of the measuring unit 150. The first to third profiles PF1, PF2, and PF3 may be spaced apart from each other along a second direction intersecting the first direction, such as the y-direction.

[0095] One of the first to third profiles PF1, PF2, and PF3 may overlap with the surrounding area SRA, and at least a portion of the other profile may overlap with the droplet area DRA. In other words, at least a portion of the other profile may overlap with the area where the droplets DR discharged by the droplet discharge unit 140 onto the test substrate TS are located.

[0096] The first to third profiles PF1, PF2, PF3 may include two-dimensional position information, for example, may include height information in the extending direction of each of the first to third profiles PF1, PF2, PF3. The control unit 180 may perform the aforementioned reference on the height information of each of the first to third profiles PF1, PF2, PF3. Figure 4a and Figure 4b Such an analysis method will be described, and whether the state of the display device manufacturing apparatus 100 is abnormal will be analyzed.

[0097] Specifically, the first maximum variation range of the height of the first profile PF1 is compared with a predetermined set value in the first interval of the first profile PF1, the second maximum variation range of the height of the second profile PF2 is compared with the set value in the second interval of the second profile PF2, and the third maximum variation range of the height of the third profile PF3 is compared with the set value in the third interval of the third profile PF3. When at least one of the first maximum variation range to the third maximum variation range exceeds the set value, it can be determined that abnormal vibration occurs in the manufacturing device 100 of the display device.

[0098] In addition, after calculating the first average height line from the height information of the first profile PF1, the second average height line from the height information of the second profile PF2, and the third average height line from the height information of the third profile PF3, if the shape of at least one of the first to third average height lines is tortuous or wavy at any position, it can be judged as an abnormal state.

[0099] In this way, by analyzing the height information of each of the plurality of profiles PF, it is possible to more accurately determine whether the state of the display device manufacturing apparatus 100 is abnormal.

[0100] Figure 8 FIG. 1 is a plan view schematically showing a display device manufactured by the display device manufacturing apparatus according to an embodiment of the present invention.

[0101] Reference Figure 8The display device 1 includes a display area DA for displaying images and a non-display area NDA for displaying no images. The display device 1 can provide images using light emitted by a plurality of pixels PX disposed in the display area DA. Each pixel PX can emit red, green, blue, or white light.

[0102] The display device 1 is a device for displaying images, and may be a portable mobile device such as a game console, a multimedia device, or an ultra-small computer. The display device 1 described below may include a liquid crystal display device (Liquid Crystal Display), an electrophoretic display device (Electrophoretic Display), an organic light emitting display device (Organic Light Emitting Display), an inorganic light emitting display device (Inorganic Light Emitting Display), a field emission display device (Field Emission Display), a surface-conduction electron-emitter display device (Surface-conduction Electron-emitter Display), a quantum dot display device (Quantum dot display), a plasma display device (Plasma Display), or a cathode ray tube display device (Cathode Ray Display). Below, as a display device 1 manufactured by a display device manufacturing device 100 according to an embodiment of the present invention, an organic light emitting display device is used as an example for description, but the embodiment of the present invention can be used in the manufacture of display devices in various forms as described above.

[0103] Figure 9 This is a cross-sectional view schematically showing a portion of a display device manufactured by a display device manufacturing apparatus according to an embodiment of the present invention. Figure 9 Can be used with Figure 8 The cross section is corresponding to the cross section taken along the IX-IX' line.

[0104] Reference Figure 9The substrate 10 may be glass or include a polymer resin, such as polyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyimide, polycarbonate, cellulose triacetate, or cellulose acetate propionate.

[0105] A pixel circuit layer PCL is provided on the substrate 10. Figure 9 The pixel circuit layer PCL shown in the figure includes a thin film transistor TFT, a buffer layer 11 arranged below and / or above the structural elements of the thin film transistor TFT, a first gate insulating layer 13a, a second gate insulating layer 13b, an interlayer insulating layer 15 and a planarizing insulating layer 17.

[0106] The buffer layer 11 may include an inorganic insulator such as silicon nitride, silicon oxynitride, or silicon oxide, and may have a single-layer or multi-layer structure including the aforementioned inorganic insulator.

[0107] The thin film transistor (TFT) includes a semiconductor layer 12, which may include polycrystalline silicon. Alternatively, the semiconductor layer 12 may include amorphous silicon, an oxide semiconductor, or an organic semiconductor. The semiconductor layer 12 may include a channel region 12c, a drain region 12a, and a source region 12b, respectively disposed on either side of the channel region 12c. The gate electrode 14 may overlap the channel region 12c.

[0108] The gate electrode 14 may include a low-resistance metal material. The gate electrode 14 may include a conductive material such as molybdenum (Mo), aluminum (Al), copper (Cu), or titanium (Ti). The gate electrode 14 may be formed into a multi-layer or single-layer structure including the above materials.

[0109] The first gate insulating layer 13a between the semiconductor layer 12 and the gate electrode 14 may include silicon oxide (SiO2), silicon nitride (SiN X ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2) or zinc oxide (ZnO2) and other inorganic insulators.

[0110] The second gate insulating layer 13b may be provided to cover the gate electrode 14. Similar to the first gate insulating layer 13a, the second gate insulating layer 13b may include silicon oxide (SiO2), silicon nitride (SiN X ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2) or zinc oxide (ZnO2) and other inorganic insulators.

[0111] An upper electrode Cst2 of the storage capacitor Cst may be disposed above the second gate insulating layer 13b. The upper electrode Cst2 may overlap the gate electrode 14 thereunder. In this case, the gate electrode 14 and the upper electrode Cst2, overlapping with the second gate insulating layer 13b interposed therebetween, may form a storage capacitor Cst. In other words, the gate electrode 14 may function as the lower electrode Cst1 of the storage capacitor Cst.

[0112] In this way, the storage capacitor Cst and the thin film transistor TFT can be formed to overlap. In some embodiments, the storage capacitor Cst can also be formed to not overlap with the thin film transistor TFT.

[0113] The upper electrode Cst2 may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W) and / or copper (Cu), and may be a single layer or a multilayer structure of the foregoing substances.

[0114] The interlayer insulating layer 15 may cover the upper electrode Cst2. The interlayer insulating layer 15 may include silicon oxide (SiO2), silicon nitride (SiN X ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2), etc. The interlayer insulating layer 15 may be a single layer or a multilayer structure including the aforementioned inorganic insulators.

[0115] The drain electrode 16a and the source electrode 16b may be respectively located on the interlayer insulating layer 15. The drain electrode 16a and the source electrode 16b may be connected to the drain region 12a and the source region 12b respectively through contact holes in the insulating layer below them. The drain electrode 16a and the source electrode 16b may include a material with excellent conductivity. The drain electrode 16a and the source electrode 16b may include a conductive material, which includes molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc. The drain electrode 16a and the source electrode 16b may be formed into a multilayer or single-layer structure including the above materials. As one embodiment, the drain electrode 16a and the source electrode 16b may have a multilayer structure of Ti / Al / Ti.

[0116] The planarization insulating layer 17 may include an organic insulating layer. The planarization insulating layer 17 may include a common general-purpose polymer such as polymethyl methacrylate (PMMA) or polystyrene (PS), a polymer derivative having a phenolic group, an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluorine polymer, a paraxylene polymer, a vinyl alcohol polymer, or a mixture thereof.

[0117] A display element layer DEL is provided on the pixel circuit layer PCL of the aforementioned structure. The display element layer DEL may include an organic light emitting diode OLED, and a pixel electrode 21 of the organic light emitting diode OLED may be electrically connected to a thin film transistor TFT through a contact hole in the planarization insulating layer 17 .

[0118] The pixel PX may include an organic light emitting diode (OLED) and a thin film transistor (TFT). Each pixel PX may emit red, green, or blue light, or red, green, blue, or white light through the organic light emitting diode (OLED).

[0119] The pixel electrode 21 may include a conductive oxide such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In2O3), indium gallium oxide (IGO), or aluminum zinc oxide (AZO). As another embodiment, the pixel electrode 21 may include a reflective film including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), or compounds thereof. As another embodiment, the pixel electrode 21 may further include a film formed of ITO, IZO, ZnO, or In2O3 above or below the aforementioned reflective film.

[0120] A pixel-defining film 19 is disposed on the pixel electrode 21. The pixel-defining film 19 has an opening 19OP that exposes the central portion of the pixel electrode 21. The pixel-defining film 19 may include an organic insulator and / or an inorganic insulator. The opening 19OP may define an emission area EA for light emitted by the organic light-emitting diode OLED. For example, the width of the opening 19OP corresponds to the width of the emission area EA.

[0121] A light-emitting layer 22 may be provided in the opening 19OP of the pixel defining layer 19. The light-emitting layer 22 may include a high-molecular-weight or low-molecular-weight organic substance that emits light of a predetermined color. The light-emitting layer 22 may be formed by discharging liquid droplets using the display device manufacturing apparatus 100 as an embodiment of the present invention.

[0122] Although not shown in the figure, a first functional layer and a second functional layer may be provided below and above the light-emitting layer 22, respectively. The first functional layer may include, for example, a hole transport layer (HTL), or a hole transport layer and a hole injection layer (HIL). The second functional layer is a structural element provided above the light-emitting layer 22, and is an optional structural element. The second functional layer may include an electron transport layer (ETL) and / or an electron injection layer (EIL). Similar to the common electrode 23 described later, the first functional layer and / or the second functional layer may be a common layer formed in a manner that entirely covers the substrate 10.

[0123] The common electrode 23 may be made of a conductive material with a low work function. For example, the common electrode may include a (semi-)transparent layer comprising silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), or alloys thereof. Alternatively, the common electrode 23 may further include a layer such as ITO, IZO, ZnO, or In2O3 on the (semi-)transparent layer comprising the aforementioned materials.

[0124] In one embodiment, the thin film encapsulation layer TFE includes at least one inorganic encapsulation layer and at least one organic encapsulation layer. As an embodiment, Figure 9 The thin film encapsulation layer TFE shown in the figure includes a first inorganic encapsulation layer 31 , an organic encapsulation layer 32 and a second inorganic encapsulation layer 33 stacked in sequence.

[0125] The first inorganic encapsulation layer 31 and the second inorganic encapsulation layer 33 may include one or more inorganic materials selected from the group consisting of aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride. The organic encapsulation layer 32 may include a polymer material. Examples of polymer materials include acrylic resins, epoxy resins, polyimides, and polyethylene. In one embodiment, the organic encapsulation layer 32 may include acrylate.

[0126] A touch electrode layer (not shown) including touch electrodes may be provided on the thin film encapsulation layer TFE, and an optical functional layer (not shown) may be provided on the touch electrode layer. The touch electrode layer can obtain coordinate information related to external pressure, such as a touch event. The optical functional layer can reduce the reflectivity of light (external light) incident from the outside toward the display device 1, and / or can improve the color purity of the light emitted by the display device 1. As one embodiment, the optical functional layer may include a phase retarder and / or a polarizer. The phase retarder may be a thin film type or a liquid crystal coating type, and may include a λ / 2 phase retarder and / or a λ / 4 phase retarder. The polarizer may also be a thin film type or a liquid crystal coating type. The thin film type polarizer may include a stretched synthetic resin film, and the liquid crystal coating type polarizer may include liquid crystals arranged in a prescribed array. The phase retarder and the polarizer may further include a protective film.

[0127] As another embodiment, the optical functional layer may include a black matrix and color filters. The color filters may be arranged based on the color of light emitted by each pixel of the display device 1. Each color filter may include a red, green, or blue pigment or dye. Alternatively, each color filter may further include quantum dots in addition to the aforementioned pigments or dyes. Alternatively, a portion of the color filters may not include the aforementioned pigments or dyes and may include scattering particles such as titanium oxide. The color filters described above may be formed by discharging droplets from a manufacturing apparatus for a display device as an embodiment of the present invention.

[0128] As another embodiment, the optical functional layer may include a destructive interference structure. The destructive interference structure may include a first reflective layer and a second reflective layer disposed on different layers. The first reflected light and the second reflected light reflected from the first reflective layer and the second reflective layer, respectively, may destructively interfere with each other, thereby reducing the reflectivity of external light.

[0129] An adhesive component may be provided between the touch electrode layer and the optical functional layer. The adhesive component may be any common adhesive component known in the art without limitation. The adhesive component may be a pressure sensitive adhesive (PSA).

[0130] The present invention has been described with reference to the embodiments illustrated in the accompanying drawings. However, these embodiments are merely illustrative embodiments of the present invention. Those skilled in the art will appreciate that various modifications and equivalent embodiments are possible based on the embodiments described above. Therefore, the true scope of protection of the present invention should be determined by the technical principles of the appended claims.

[0131] Description of Reference Numerals

[0132] 1: Display device

[0133] 10: Substrate

[0134] 100: Display device manufacturing device

[0135] 110: Support

[0136] 140: Liquid droplet discharge unit

[0137] 150: Measurement Department

[0138] 180: Control Department

[0139] DR: Droplet

[0140] ES: External surface shape

[0141] PF: Profile

[0142] S: Display substrate

[0143] TS: Test substrate

Claims

1. A manufacturing apparatus for a display device, comprising: Test substrate; a supporting portion on which the display device to be manufactured and the test substrate are mounted; a liquid droplet discharge unit having a nozzle for discharging liquid droplets; a measuring portion, movable along a first direction above the test substrate and configured to measure an outer surface shape of the test substrate in a measurement area; as well as A control unit is configured to derive vibration data of the display device manufacturing apparatus from the outer surface shape and analyze the vibration data.

2. The manufacturing apparatus of a display device according to claim 1, wherein: The measured outer surface shape includes a first contour extending along the first direction, The vibration data includes height information of the first profile.

3. The manufacturing apparatus of a display device according to claim 2, wherein: The control unit determines whether an abnormal state exists by comparing a maximum variation range of the height of the first contour in a first section of the first contour with a predetermined set value.

4. The manufacturing apparatus of a display device according to claim 2, wherein: The control unit calculates a first height average line from the height information of the first contour, and analyzes a shape of the first height average line to determine whether an abnormal state exists.

5. The manufacturing apparatus of a display device according to claim 2, wherein: The measured outer surface shape includes: a liquid droplet region where liquid droplets discharged from the liquid droplet discharge portion are located; and a surrounding area surrounding the droplet area, The first outline overlaps the surrounding area.

6. The manufacturing apparatus of a display device according to claim 2, wherein: At least a portion of the first contour overlaps with a region where the droplets discharged by the droplet discharge unit are located on the test substrate.

7. The manufacturing apparatus of a display device according to claim 2, wherein: The measured outer surface shape further includes a second contour extending along the first direction and spaced apart from the first contour along a second direction intersecting the first direction. The vibration data further includes height information of the second profile.

8. The manufacturing apparatus of a display device according to claim 7, wherein: The control unit determines whether an abnormal state exists by comparing a maximum height change width of the first contour with a predetermined set value in a first section of the first contour and comparing a maximum height change width of the second contour with a predetermined set value in a second section of the second contour.

9. The manufacturing apparatus of a display device according to claim 7, wherein: The control unit determines whether an abnormal state exists by analyzing the shapes of a first height average line calculated from the height information of the first contour and a second height average line calculated from the height information of the second contour.

10. The manufacturing apparatus of a display device according to claim 7, wherein: The measured outer surface shape includes: a liquid droplet region where liquid droplets discharged from the liquid droplet discharge portion are located; and a surrounding area surrounding the droplet area, One of the first outline and the second outline overlaps with the surrounding area.

11. The manufacturing apparatus of a display device according to claim 7, wherein: At least a portion of one of the first contour and the second contour overlaps with a region where the droplets discharged by the droplet discharge unit onto the test substrate are located.

Images