Die ejector and die bonding apparatus including the same

Abstract

A die ejector and a die bonding apparatus including the same are disclosed. The die ejector includes a cover disposed below a dicing tape, an ejector unit configured to be raised through the cover to separate a die attached on the dicing tape from the dicing tape, an ejector driving part configured to lift the ejector unit, and a stopper member disposed below the ejector unit and configured to limit downward movement of the ejector unit. The ejector unit includes a plurality of ejector members extending in a raising direction and having a telescopic structure, the ejector members being simultaneously lifted by the ejector driving part and then sequentially lowered from the outside to the inside by the ejector driving part and the stopper member.

Description

Technical Field

[0001] This invention relates to a bare core ejector and a bare core bonding apparatus including the same. More specifically, this invention relates to a bare core ejector for separating a bare core from a cutting tape in a bare core bonding process, and a bare core bonding apparatus including the bare core ejector. Background Technology

[0002] Typically, semiconductor devices can be formed on a silicon wafer, which serves as a semiconductor substrate, by repeatedly performing a series of manufacturing processes. The semiconductor devices formed as described above can be individualized by a dicing process and can be bonded to the substrate by a bare die bonding process.

[0003] The die bonding apparatus includes a die pickup module for picking up dies from a wafer that has been divided into multiple dies by a dicing process, and a die bonding module for bonding the dies to a substrate such as a printed circuit board or lead frame. The die pickup module may include a gantry unit for supporting a dicing tape for attaching the wafer, a die ejector for separating the dies from the dicing tape, and a vacuum pickup for picking up the dies from the dicing tape.

[0004] A bare core ejector may include a cover having a vacuum hole for vacuum adsorption of the lower surface of the cutting strip, and an ejector unit disposed within the cover and configured to move vertically through the upper part of the cover. Specifically, the ejector unit can lift the bare core, separating the bare core from the cutting strip. For example, Korean Patent No. 10-2009922 discloses a bare core ejector comprising a plurality of ejector members arranged in a telescopic manner.

[0005] Specifically, plate-shaped (e.g., disc-shaped) support members can be respectively provided at the lower end of the ejector member, and elastic members can be provided between the support members. When the ejector member is lifted by the ejector drive, the ejector member can be lifted sequentially from the outside to the inside via the elastic members. However, when the ejector member is lifted sequentially from the outside to the inside, the bare core may be overlifted, which may cause damage to the bare core. Summary of the Invention

[0006] Embodiments of the present invention provide a bare core ejector capable of separating the bare core from the cutting tape while preventing damage to the bare core, and a bare core bonding device including the bare core ejector.

[0007] According to an aspect of the invention, a bare core ejector may include a cover disposed below the cutting strip; an ejector unit configured to rise through the cover to separate the bare core attached to the cutting strip from the cutting strip; an ejector drive configured to raise the ejector unit; and a stop member disposed below the ejector unit and configured to restrict downward movement of the ejector unit. Specifically, the ejector unit may include a plurality of ejector members extending in a rising direction and configured to have a telescopic structure, and the ejector members may be configured to be simultaneously raised by the ejector drive and then sequentially lowered from the outside to the inside by the ejector drive and the stop member.

[0008] According to some embodiments of the present invention, the ejector unit further includes a plurality of flanges respectively disposed at the lower end portion of the ejector member and arranged along the rising direction of the ejector member; at least one elastic member disposed between the remaining flanges except for the uppermost flange; a lifting head disposed below the lowermost flange; and a connecting member connecting the uppermost flange and the lifting head. In this case, the ejector drive unit can be connected to the lifting head.

[0009] According to some embodiments of the invention, the ejector unit may further include at least one second stop member that limits the height to which at least one remaining flange, other than the uppermost and lowermost flanges, is lifted by at least one elastic member.

[0010] According to some embodiments of the present invention, the bare core ejector may further include a stop drive, which raises the stop member to adjust the height of the stop member after the ejector drive raises the ejector member.

[0011] According to another aspect of the invention, a bare core ejector may include a cover configured to contact the lower surface of the cutting strip; a plurality of ejector members configured to rise through the cover to separate the bare core attached to the upper surface of the cutting strip from the cutting strip, and having a telescopic structure extending in the rising direction; a plurality of flanges respectively disposed at the lower end portions of the ejector members and arranged in the rising direction of the ejector members; a plurality of elastic members disposed between the remaining flanges except the uppermost flange; a lifting head disposed below the lowermost flange; a plurality of connecting pins passing through the remaining flanges except the uppermost flange and connecting the uppermost flange and the lifting head; an ejector drive unit connected to the lifting head and configured to raise the ejector members; a stop member disposed below the lowermost flange and configured to restrict downward movement of the lowermost flange; and a stop drive unit that, after the ejector drive unit raises the ejector members, raises the stop member to adjust the height of the stop member.

[0012] According to some embodiments of the invention, the cover may have an opening into which an ejector member is inserted, and the ejector member is inserted into the opening such that the upper surface of the ejector member is flush with the upper surface of the cover.

[0013] According to some embodiments of the present invention, the ejector component can be simultaneously lifted by the ejector drive unit.

[0014] According to some embodiments of the present invention, the elastic member may have a downwardly increasing elastic force, such that the remaining ejector members, except for the innermost ejector member, decrease sequentially from the outside to the inside.

[0015] According to some embodiments of the present invention, the ejector drive may include a first drive shaft connected to the lifting head and extending downward; and a first drive unit configured to raise the first drive shaft.

[0016] According to some embodiments of the present invention, the stop drive may include a second drive shaft connected to the stop member and extending downward; and a second drive unit configured to raise the second drive shaft.

[0017] According to some embodiments of the present invention, the second drive shaft may have a tubular shape surrounding the first drive shaft.

[0018] According to some embodiments of the present invention, the ejector drive may further include a first guide member disposed between the first drive shaft and the second drive shaft, and configured to guide the first drive shaft in the lifting direction.

[0019] According to some embodiments of the present invention, the bare core ejector may further include an ejector body connected to the lower part of the shroud and having a tubular shape surrounding the second drive shaft.

[0020] According to some embodiments of the present invention, the stop drive may further include a second guide member disposed between the second drive shaft and the ejector body, and configured to guide the second drive shaft in the lifting direction.

[0021] According to some embodiments of the present invention, the first drive unit may include a first cam member for raising the first drive shaft; a first motor for rotating the first cam member; a first bracket mounted on the lower part of the first drive shaft; and a first cam follower mounted on the first bracket and disposed on the first cam member.

[0022] According to some embodiments of the present invention, the ejector drive may further include a third guide member configured to guide the first support in the lifting direction.

[0023] According to some embodiments of the present invention, the second drive unit may include a second cam member for raising the second drive shaft; a second motor for rotating the second cam member; a second bracket mounted on the lower part of the second drive shaft; and a second cam follower mounted on the second bracket and disposed on the second cam member.

[0024] According to some embodiments of the present invention, the first bracket may include a connecting block coupled to the lower part of the first drive shaft; a pair of extensions extending downward from the connecting block; and a mounting portion that connects the lower ends of the extensions to each other, on which a first cam follower is mounted. In this case, a second cam member and a second cam follower may be disposed between the extensions.

[0025] According to some embodiments of the present invention, the cover may include a cover body having a cylindrical shape and being connected to an ejector body; a cover being connected to the upper part of the cover body and having a vacuum hole for vacuum adsorption of the lower surface of the cutting strip; and a third stop member protruding from the inner surface of the cover body to prevent the flange from separating from the cover body.

[0026] According to another aspect of the invention, the bare core bonding apparatus may include a bare core ejector for separating a bare core attached to a dicing tape from the dicing tape; and a bare core bonding module for bonding the bare core separated by the bare core ejector to a substrate. In this case, the bare core ejector may include a cover disposed below the dicing tape; an ejector unit configured to rise through the cover to separate the bare core from the dicing tape; an ejector drive configured to raise the ejector unit; and a stop member disposed below the ejector unit and configured to restrict downward movement of the ejector unit. Specifically, the ejector unit may include a plurality of ejector members extending in a rising direction and configured to have a telescopic structure, and the ejector members may be configured to be simultaneously raised by the ejector drive and then sequentially lowered from the outside to the inside by the ejector drive and the stop member.

[0027] The foregoing overview of the invention is not intended to describe every illustrated embodiment or every implementation of the invention. These embodiments are illustrated more specifically in the following detailed description and claims. Attached Figure Description

[0028] The embodiments of the present invention can be understood in more detail from the following description taken in conjunction with the accompanying drawings, wherein:

[0029] Figure 1 This is a schematic plan view of a bare core bonding device according to an embodiment of the present invention;

[0030] Figure 2 Is it like this? Figure 1 A schematic front view of the bare core pickup module shown;

[0031] Figure 3 Is it like this? Figure 2 A schematic cross-sectional view of the bare core ejector shown;

[0032] Figure 4 Is it like this? Figure 2 A schematic cross-sectional view of the ejector drive section and the stop drive section of the bare core ejector shown;

[0033] Figure 5 Is it like this? Figure 4 A schematic side view of the ejector drive and stop drive shown in the diagram;

[0034] Figure 6 Is it like this? Figure 4 A schematic front view of the first drive unit shown;

[0035] Figure 7 Is it like this? Figure 4 A schematic side view of the first drive unit shown;

[0036] Figure 8 Is it like this? Figure 4 A schematic front view of the second drive unit shown;

[0037] Figure 9 Is it like this? Figure 4 A schematic side view of the second drive unit shown;

[0038] Figure 10 Is it like this? Figure 5 A schematic rear view of the third guide member shown; and

[0039] Figures 11 to 17 This is to explain how Figure 3 and Figure 4 A schematic cross-sectional view of the operation of the bare core ejector shown.

[0040] While various embodiments are suitable for various modifications and alternatives, their specific details have been shown by way of example in the accompanying drawings and will be described in detail. However, it should be understood that the invention is not intended to limit the claimed invention to the specific embodiments described. Rather, it is intended to cover all modifications, equivalents, and alternatives falling within the substance and scope of the subject matter defined by the claims. Detailed Implementation

[0041] In the following description, embodiments of the invention are described in more detail with reference to the accompanying drawings. However, the invention is not limited to the embodiments described below, and the invention may be implemented in various other forms. The following embodiments are provided not to complete the invention, but to fully express the scope of the invention to those skilled in the art.

[0042] In the specification, when referring to a component as being on or connected to another component or layer, it may be directly on or connected to that component or layer, or there may be an intermediate component or layer. Conversely, when referring to a component as being directly on or connected to another component or layer, it implies that there is no intermediate component. Furthermore, although terms such as first, second, and third are used to describe various regions and layers in various embodiments of the invention, regions and layers are not limited to these terms.

[0043] The terminology used below is for describing specific embodiments only and does not limit the invention. Furthermore, unless otherwise defined herein, all terms, including technical or scientific terms, may have the same meaning as commonly understood by those skilled in the art.

[0044] Embodiments of the invention are described with reference to schematic diagrams of preferred embodiments. Therefore, variations in manufacturing methods and / or permissible tolerances can be anticipated from the form of the drawings. Consequently, embodiments of the invention are not described as limited to specific forms or areas in the drawings, but rather include deviations in form. These areas may be entirely schematic, their forms may not describe or depict the exact form or structure in any given area, and are not intended to limit the scope of the invention.

[0045] Figure 1 This is a schematic plan view of a bare core bonding device according to an embodiment of the present invention. Figure 2 Is it like this? Figure 1 A schematic front view of the bare core pickup module shown.

[0046] Reference Figure 1 and Figure 2 According to an embodiment of the present invention, a bare core 22, which is individualized by a cutting process, can be bonded to a substrate 30, such as a printed circuit board or a lead frame, using a bare core bonding device 10.

[0047] The bare die bonding apparatus 10 may include a bare die pickup module 300 for picking up bare dies 22 from a wafer 20 divided into bare dies 22, and a bare die bonding module 400 for bonding the bare dies 22 picked up by the bare die pickup module 300 to a substrate 30. For example, the bare die pickup module 300 may transfer the picked-up bare dies 22 to a bare die stand 310, while the bare die bonding module 400 may pick up the bare dies 22 on the bare die stand 310 and bond the bare dies 22 to the substrate 30.

[0048] The wafer 20 may include a dicing strip 24 to which a bare die 22 is attached, and a mounting frame 26 having a generally annular shape to which the dicing strip 24 is mounted. For example, the dicing strip 24 may be attached to the lower surface of the mounting frame 26, and the bare die 22 may be attached to the upper surface of the dicing strip 24.

[0049] The bare die pick-up module 300 may include a wafer caddy 320 for supporting the wafer 20. A support ring 322 for supporting the dicing tape 24, a clamp 324 for holding the mounting frame 26, and a clamp drive unit 326 for moving the clamp 324 in the vertical direction may be disposed on the wafer caddy 320. Specifically, as Figure 2 As shown, the support ring 322 can support the cutting strip 24 between the bare core 22 and the mounting frame 26, while the clamp drive unit 326 can expand the cutting strip 24 by lowering the clamp 324, and the mounting frame 26 is clamped by the clamp 324.

[0050] A bare core ejector 100 for selectively separating the bare core 22 from the cutting strip 24 can be disposed below the cutting strip 24 supported by the support ring 322. The bare core ejector 100 can vacuum-adsorb the lower surface of the cutting strip 24, and the bare core ejector 100 can include an ejector unit 110 for lifting the bare core 22 to be picked up, thereby separating the bare core 22 from the cutting strip 24.

[0051] The die pickup module 300 may include a vacuum pickup 330 disposed above the wafer stage 320 to pick up the die 22 separated from the dicing tape 24 by the die ejector 100, and a pickup drive 332 for moving the vacuum pickup 330 in the vertical and horizontal directions. For example, although not shown in the figures, the vacuum pickup 330 may include a chuck having a vacuum hole for vacuum adsorption of the die 22. The die stage 310 may be arranged horizontally spaced from the wafer stage 320, and the die 22 picked up by the vacuum pickup 330 may be transferred onto the die stage 310 by the pickup drive 332. Furthermore, a camera unit 340 for detecting the die 22 to be picked up may be disposed above the wafer stage 320.

[0052] Although not shown in the figures, the die bonding apparatus 10 may include a stage drive (not shown) for horizontally moving the wafer stage 320. The stage drive can adjust the position of the wafer stage 320 so that the die to be picked up in the die 22 is positioned on the die ejector 100.

[0053] Furthermore, such as Figure 1As shown, the bare die bonding device 10 may include a cassette loading port 42 on which a cassette 40 containing a plurality of wafers 20 is placed; a wafer transfer unit 44 for transferring the wafers 20 from the cassette 40 to a wafer caddy 320; and a wafer guide 46 for guiding the transfer of the wafers 20. Specifically, a caddy drive unit can move the wafer caddy 320 to be adjacent to the end of the wafer guide 46, and then the wafer transfer unit 44 can transfer the wafers 20 from the cassette 40 to the wafer caddy 320. Although not shown in detail, the wafer transfer unit 44 may include a clamp for holding the mounting frame 26 and a clamping drive unit for horizontally moving the clamp.

[0054] The bare core bonding module 400 can pick up bare cores 22 transferred onto the bare core stage 310 and bond the bare cores 22 to the substrate 30. For example, the bare core bonding module 400 may include a bonding head 410 for picking up and bonding the bare cores 22, a head drive 412 for moving the bonding head 410 in vertical and horizontal directions, and a substrate stage 420 for supporting the substrate 30. Although not shown in the figures, the bonding head 410 may include a vacuum hole for vacuum adsorption of the bare cores 22 and a bonding tool (not shown) for pressing the bare cores 22 onto the substrate 30. The substrate stage 420 may include a heater (not shown) for heating the substrate 30 to a predetermined bonding temperature.

[0055] The substrate 30 can be supplied from the first tray 50 and can be housed in the second tray 60 after the bare core bonding process is performed. For example, the bare core bonding apparatus 10 may include a first tray processing unit 52 for processing the first tray 50 and a second tray processing unit 62 for processing the second tray 60. In addition, the bare core bonding apparatus 10 may include a first tray loading port 54 on which the first tray 50 is placed, a second tray loading port 64 on which the second tray 60 is placed, a first tray transfer unit 56 for transferring the first tray 50 between the first tray loading port 54 and the first tray processing unit 52, and a second tray transfer unit 66 for transferring the second tray 60 between the second tray loading port 64 and the second tray processing unit 62.

[0056] Furthermore, the bare core bonding apparatus 10 may include a substrate transfer unit 70. The substrate transfer unit 70 can transfer the substrate 30 from the first tray 50 to the substrate stand 420, and after performing the bare core bonding process, transfer the substrate 30 from the substrate stand 420 to the second tray 60. The substrate transfer unit 70 may include a substrate guide rail 72 for guiding the transfer of the substrate 30, a clamp 74 for holding the substrate 30, a clamp drive unit 76 for moving the clamp 74, a first push rod 78 for moving the substrate 30 onto the substrate guide rail 72, and a second push rod 80 for moving the substrate 30 into the second tray 60.

[0057] Figure 3 Is it like this? Figure 2 A schematic cross-sectional view of the bare core ejector shown. Figure 4 Is it like this? Figure 2 A schematic cross-sectional view of the ejector drive section and the stop drive section of the bare core ejector shown, and Figure 5 Is it like this? Figure 4 A schematic side view of the ejector drive and stop drive shown.

[0058] Reference Figures 3 to 5 The die ejector 100 may be disposed below the dicing tape 24 supported by the wafer stage 320. According to an embodiment of the invention, the die ejector 100 may include a cover 110 configured to contact the lower surface of the dicing tape 24, and an ejector unit 120 configured to raise through the cover 110 to separate the die 22 attached to the dicing tape 24 from the dicing tape 24.

[0059] The ejector unit 120 may include a plurality of ejector members 122 extending in a rising direction and configured to have a telescopic structure. For example, each ejector member 122 may have a rectangular tube shape extending in a vertical direction and may be arranged in a telescopic structure. The ejector unit 120 may include, from the outside to the inside, a first ejector member 122A, a second ejector member 122B, a third ejector member 122C, and a fourth ejector member 122D. The cover 110 may have an opening 112A into which the ejector members 122 are inserted, and a plurality of vacuum holes 112B for vacuum adsorption cutting the lower surface of the tape 24.

[0060] The bare core ejector 100 may include an ejector drive 140 disposed below the ejector unit 120 and configured to raise the ejector unit 120 in a vertical direction, and a stop member 165 disposed below the ejector unit 120 and configured to restrict the downward movement of the ejector unit 120. Specifically, according to an embodiment of the present invention, the ejector member 122 may be simultaneously raised by the ejector drive 140 and then lowered sequentially from the outside to the inside by the ejector drive 140 and the stop member 165.

[0061] The ejector unit 120 may include a plurality of flanges 124 respectively disposed at the lower end portion of the ejector member 122 and arranged along the rising direction (i.e., the vertical direction) of the ejector member 122; an elastic member 126 disposed between the remaining flanges 124B, 124C, and 124D excluding the uppermost flange 124A; a lifting head 128 disposed below the lowermost flange 124D of the flanges 124; and a connecting member 130 connecting the uppermost flange 124A and the lifting head 128. For example, a coil spring may be used as the elastic member 126, and a connecting pin may be used as the connecting member 130.

[0062] The flange 124 may be disc-shaped. For example, the ejector unit 120 may include a first flange 124A surrounding the lower portion of a first ejector member 122A, a second flange 124B surrounding the lower portion of a second ejector member 122B, a third flange 124C surrounding the lower portion of a third ejector member 122C, and a fourth flange 124D surrounding the lower portion of a fourth ejector member 122D. Figure 3 As shown, four ejector components 122 and four flanges 124 are used, but the number of ejector components 122 and flanges 124 can be changed to varying degrees. Therefore, the scope of the present invention is not limited by the number of ejector components 122 and flanges 124.

[0063] The connecting pin 130 can be used to connect the uppermost flange 124A and the lifting head 128. The lower part of the connecting pin 130 can pass through the remaining flanges 124B, 124C and 124D other than the uppermost flange 124A, and can be connected to the lifting head 128 by bolt fastening, and the upper part of the connecting pin 130 can be installed to the uppermost flange 124A by fastening member 132 (e.g., bolt).

[0064] The ejector unit 120 may include a second stop member 134 for limiting the height to which the remaining flanges, namely the second flange 124B and the third flange 124C (excluding the uppermost flange 124A and the lowermost flange 124D, i.e., the first flange 124A and the fourth flange 124D in the flanges 124), are lifted by the elastic member 126. For example, a bolt can be used as the second stop member 134, which can pass through the remaining flanges 124B and 124C (excluding the uppermost flange 124A and the lowermost flange 124D) and can be fastened to the flanges 124C and 124D located below the remaining flanges 124B and 124C. That is, the second stop member 134 can pass through the second flange 124B and the third flange 124C and can be fastened to the third flange 124C and the fourth flange 124D, as shown below. Figure 3As shown. Specifically, the second flange 124B and the third flange 124C may have flat-bottomed countersunk holes into which the head of the second stop member 134 is inserted. The countersunk holes may be formed to be deeper than the head height of the second stop member 134, so that even when the flanges 124 are in close contact with each other, the head of the second stop member 134 will not protrude upward.

[0065] The ejector drive unit 140 can be disposed below the ejector unit 120 and can be connected to the lower part of the lifting head 128. For example, the lifting head 128 can be disc-shaped, and the lowermost flange 124D can be disposed on the lifting head 128. The ejector drive unit 140 can lift the lifting head 128, and the lowermost flange 124D can therefore be lifted by the ejector drive unit 140. In addition, the uppermost flange 124A can be lifted simultaneously with the lowermost flange 124D via the connecting pin 130, while the second flange 124B and the third flange 124C can be lifted simultaneously with the uppermost flange 124A and the lowermost flange 124D via the elastic member 126. Therefore, the ejector member 122 connected to the flange 124 can be lifted simultaneously by the ejector drive unit 140.

[0066] The height of the uppermost flange 124A can be determined by the length of the connecting pin 130. Furthermore, the distance between the remaining flanges 124B, 124C, and 124D (excluding the uppermost flange 124A) can be continuously maintained by the elastic member 126 and the second stop member 134. In this case, the distance between the uppermost flange 124A and the second flange 124B can be the same as the distance between the remaining flanges 124B, 124C, and 124D.

[0067] The ejector drive unit 140 may include a first drive shaft 144 connected to and extending downward from the lifting head 128, and a first drive unit 150 configured to raise the first drive shaft 144. For example, a disc-shaped drive head 142 may be coupled to the upper portion of the first drive shaft 144, and the lifting head 128 may be coupled to the upper surface of the drive head 142.

[0068] Specifically, an electromagnet 146 configured to surround the upper part of the first drive shaft 144 can be disposed below the drive head 142 and can provide electromagnetic force to connect the lifting head 128 to the upper surface of the drive head 142. As another example, a permanent magnet (not shown) can be used to connect the lifting head 128 to the drive head 142. In this case, the permanent magnet can be disposed in the drive head 142.

[0069] According to an embodiment of the present invention, the bare core ejector 100 may include a stop drive 170 for raising the stop member 165 to adjust the height of the stop member 165 after the ejector drive 140 raises the ejector member 122.

[0070] After the ejector member 122 is simultaneously lifted by the ejector drive unit 140, the stop drive unit 170 can lift the stop member 165 to a predetermined height. Thereafter, the ejector drive unit 140 can lower the ejector unit 120. After the lowermost flange 124D (i.e., the fourth flange 124D) is placed on the stop member 165, the uppermost flange 124A (i.e., the first flange 124A) can be lowered via the connecting pin 130 and the ejector drive unit 140, and then the second flange 124B and the third flange 124C can be lowered. In this case, the elastic member 126 can have a gradually increasing downward elastic force.

[0071] For example, the first elastic member 126A disposed between the second flange 124B and the third flange 124C can have a smaller elastic force than the second elastic member 126B disposed between the third flange 124C and the fourth flange 124D. Therefore, after the first flange 124A begins to descend, the second flange 124B and the third flange 124C can descend sequentially. Thus, except for the innermost ejector member 122D, the remaining ejector members 122A, 122B, and 122C can descend sequentially from the outside to the inside. That is, the first ejector member 122A connected to the first flange 124A, the second ejector member 122B connected to the second flange 124B, and the third ejector member 122C connected to the third flange 124C can be lowered in sequence.

[0072] The stop member 165 may have a cylindrical shape surrounding the lifting head 128 and the drive head 142, and the stop drive portion 170 may include a second drive shaft 174 connected to the stop member 165 and extending downward, and a second drive unit 180 for raising the second drive shaft 174. For example, a disc-shaped stop head 172 may be coupled to the upper end portion of the second drive shaft 174, and the stop member 165 may be mounted to the upper surface of the stop head 172 by a plurality of fastening members 176 (e.g., a plurality of bolts).

[0073] According to an embodiment of the present invention, the second drive shaft 174 may have a cylindrical shape surrounding the first drive shaft 144, and a first guide member 148 for guiding the first drive shaft 144 in the lifting direction (i.e., the vertical direction) may be disposed between the first drive shaft 144 and the second drive shaft 174. For example, a first linear ball bushing may be disposed between the first drive shaft 144 and the second drive shaft 174.

[0074] The cover 110 may include a disc-shaped lid 112 (with an opening 112A and a vacuum hole 112B formed therein) and a cover body 114 having a cylindrical shape. In this case, the lid 112 may be attached to the upper part of the cover body 114. Further, the bare core ejector 100 may include an ejector body 200 connected to the lower part of the cover 110, i.e., connected to the lower part of the cover body 114, and having a tubular shape surrounding the second drive shaft 174. For example, the ejector body 200 may include an intermediate tube 202 and a lower tube 204, and the first drive shaft 144 and the second drive shaft 174 may extend downward through the ejector body 200. In this case, a permanent magnet 206 for connecting the cover 110 and the ejector body 200 may be mounted on the intermediate tube 202.

[0075] According to an embodiment of the present invention, a second guide member 178 configured to guide the second drive shaft 174 in the lifting direction may be disposed between the second drive shaft 174 and the ejector body 200, for example, between the second drive shaft 174 and the lower tube 204. For example, a second linear ball bushing may be disposed between the second drive shaft 174 and the ejector body 200.

[0076] The first drive unit 150 may include a first cam member 152 for raising the first drive shaft 144, a first motor 154 for rotating the first cam member 152, a first bracket 156 mounted on the lower part of the first drive shaft 144, and a first cam follower 158 mounted to the first bracket 156 and disposed on the first cam member 152. The second drive unit 180 may include a second cam member 182 for raising the second drive shaft 174, a second motor 184 for rotating the second cam member 182, a second bracket 186 mounted on the lower part of the second drive shaft 174, and a second cam follower 188 mounted to the second bracket 186 and disposed on the second cam member 182. In this case, the first cam follower 158 and the second cam follower 188 may have a roller shape.

[0077] The bare core ejector 100 may include a base bracket 230, on which the ejector body 200 and the first drive unit 150 and the second drive unit 180 are mounted. For example, the base bracket 230 may include a horizontal bracket 232 on which the ejector body 200 is mounted, and a vertical bracket 234 on which the first motor 154 and the second motor 184 are mounted.

[0078] Figure 6 Is it like this? Figure 4 A schematic front view of the first drive unit shown. Figure 7 Is it like this? Figure 4 A schematic side view of the first drive unit shown. Figure 8 Is it like this? Figure 4 A schematic front view of the second drive unit shown. Figure 9 Is it like this? Figure 4 A schematic side view of the second drive unit shown. Figure 10 Is it like this? Figure 5 A schematic rear view of the third guide member shown.

[0079] Reference Figures 6 to 10 The first bracket 156 may include a connecting block 156A connected to the lower part of the first drive shaft 144, a pair of extension portions 156B extending downward from the connecting block 156A, and a mounting portion 156C connecting the lower ends of the extension portions 156B to each other and on which a first cam follower 158 is mounted. The second bracket 186 may include a connecting member 186A having a cylindrical shape and connected to the lower part of the second drive shaft 174, a pair of connecting rods 186B extending downward from the connecting member 186A, and a roller block 186C connected to the lower end portion of the connecting rods 186B and on which a second cam follower 188 is mounted.

[0080] The second cam member 182 and the second cam follower 188 can be disposed between the extension 156B of the first bracket 156. Specifically, the second cam follower 188 can be guided in the upward direction (i.e., the vertical direction) by the inner surface of the extension 156B of the first bracket 156, thereby preventing the second drive shaft 174 from rotating. That is, the extension 156B of the first bracket 156 can serve as a guide member for guiding the second drive shaft 174 in the vertical direction, thereby preventing the stop member 165 from rotating.

[0081] According to an embodiment of the present invention, the bare core ejector 100 may include a third guide member 208 for guiding the first support 156 in the lifting direction (i.e., the vertical direction). For example, as Figure 5 and Figure 10 As shown, the third guide member 208 may include a pair of guide rollers 210 mounted on the lower part of the ejector body 200 (i.e., the lower part of the lower tube 204) to make close contact with the side portion of the first support 156. Specifically, the guide rollers 210 may make close contact with the side surface of the extension portion 156B of the first support 156, thereby preventing the first support 156 from rotating. Thus, rotation of the ejector unit 120 and the first drive shaft 144 can be prevented.

[0082] Refer again Figures 3 to 5The second elastic member 160 may be disposed between the first guide member 148 and the first bracket 156 so that the first cam follower 158 is in close contact with the first cam member 152, and the third elastic member 190 may be disposed between the second guide member 178 and the second bracket 186 so that the second cam follower 188 is in close contact with the second cam member 182. For example, a coil spring may be used as the second elastic member 160 and the third elastic member 190.

[0083] The cover 110 may include a third stop member 116 protruding from the inner surface of the cover body 114 to prevent the flange 124 from separating from the cover body 114. For example, a retaining ring may be used as the third stop member 116. The retaining ring 116 may be mounted on the inner surface of the cover body 114, and the ejector unit 120 may be disposed above the retaining ring 116. When the cover 110 and the ejector unit 120 are replaced, the third stop member 116 can be used to simultaneously separate the cover 110 and the ejector unit 120 from the ejector body 200 and the ejector drive unit 140. At this time, the power supply to the electromagnet 146 can be cut off, so the cover 110 and the ejector unit 120 can be easily separated from the ejector body 200 and the ejector drive unit 140.

[0084] Vacuum pressure for vacuum absorption of the lower surface of the cutting strip 24 can be provided inside the cover 110 and the ejector body 200. For example, the lower tube 204 can be connected to a vacuum source 220, such as a vacuum pump or a vacuum ejector, and can have a second vacuum port 204A for providing vacuum pressure inside the cover 110 and the intermediate tube 202. Furthermore, as... Figure 3 As shown, a sealing member for preventing vacuum leakage can be disposed between the cover 110 and the intermediate tube 202, between the intermediate tube 202 and the lower tube 204, between the lower tube 204 and the second drive shaft 174, and between the stop head 172 and the first drive shaft 144.

[0085] Furthermore, a vacuum pressure for vacuum adsorption of the lower surface of the cutting strip 24 can be provided inside the innermost ejector member 122D (i.e., the fourth ejector member 122D) of the ejector member 122. For example, the ejector unit 120 may include an extension 124E having a cylindrical shape and extending downward from the lowermost flange 124D, and the interior of the extension 124E may be connected to the interior of the innermost ejector member 122D. The lifting head 128 may have a first through hole 128A into which the extension 124E is inserted. The first drive shaft 144 may have a cylindrical shape and can be connected to a vacuum source 222 for providing vacuum pressure, such as a vacuum pump or a vacuum ejector, via a connecting block 156A of the first bracket 156. Figure 5As shown. The connecting block 156A of the first bracket 156 may have a third vacuum hole 156D, which is used to connect the vacuum source 222 and the first drive shaft 144. The drive head 142 may have a second through hole 142A, which is used to connect the first through hole 128A of the lifting head 128 and the first drive shaft 144. Vacuum pressure can be provided to the innermost ejector member 122D through the connecting block 156A of the first bracket 156, the first drive shaft 144, the drive head 142, and the lifting head 128.

[0086] Specifically, such as Figure 3 As shown, the ejector member 122 can be inserted into the opening 112A so that the upper surface of the ejector member 122 is flush with the upper surface of the cover 110 (i.e., the upper surface of the cap 112). Therefore, the vacuum pressure provided by the vacuum hole 112B and the innermost ejector member 122D can vacuum-suction the cutting strip 24 onto the cover 110 and the ejector member 122.

[0087] According to an embodiment of the invention, compressed air for inflating the cutting strip 22 can be supplied to the innermost ejector member 122D. For example, a compressed air source 224 for supplying the compressed air, such as an air tank for storing compressed air, can be connected to the first drive shaft 144 via a connecting block 156A of the first bracket 156, as shown below. Figure 5 As shown. Furthermore, as... Figure 3 As shown, in order to prevent compressed air leakage, a sealing member can be provided between the lifting head 128 and the drive head 142, and between the inner surface of the first through hole 128A and the extension portion 124E.

[0088] Figures 11 to 17 This is to explain how Figure 3 and Figure 4 A schematic cross-sectional view of the operation of the bare core ejector shown.

[0089] Reference Figure 11 The ejector member 122 and the flange 144 can be simultaneously lifted by the ejector drive 140, and the ejector member 122 can protrude upward from the upper surface of the cover 110. Although not shown in the figure, the bare core 22 can be lifted by the ejector member 122, so that the edge portion of the bare core 22 can be separated from the cutting strip 24. Specifically, the lifting height of the ejector member 122 can be finely adjusted to prevent damage to the bare core 22. For example, the lifting height of the ejector member 122 can be adjusted between approximately tens of micrometers and hundreds of micrometers, and can be appropriately adjusted according to the size of the bare core 22 to prevent damage to the bare core 22.

[0090] Reference Figure 12The stop member 165 can be lifted by the stop drive unit 170. For example, the stop drive unit 170 can lift the stop member 165 so that the stop member 165 contacts the lower surface of the lowermost flange 124D. However, the height of the stop member 165 can be varied, so the scope of the invention is not limited by the lifting height of the stop member 165. In addition, the stop member 165 can be lifted simultaneously with the ejector unit 120.

[0091] Reference Figure 13 The ejector drive unit 140 can lower the ejector unit 120 after the stop member 165 is raised. Specifically, with the innermost ejector member 122D and the lowermost flange 124D supported by the stop member 165, the lifting head 128 can be lowered by the ejector drive unit 140. Therefore, the uppermost flange 124A and the outermost ejector member 122A connected to the lifting head 128 can be lowered by the connecting pin 130. Then, as... Figure 14 and 15 As shown, the second ejector member 122B connected to the second flange 124B and the third ejector member 122C connected to the third flange 124C can be lowered sequentially. Therefore, the cutting strip 24 can be separated from the bare core 22 along the direction from the edge portion toward the center portion of the bare core 22.

[0092] Reference Figure 16 After the remaining ejector components 122A, 122B, and 122C, excluding the innermost ejector component 122D, are lowered, the bare core 22 can be supported by the innermost ejector component 122D. The cutting strip 24 can be separated from the bare core 22 by the vacuum pressure provided within the cover 110 and by the innermost ejector component 122D. Then, as... Figure 17 As shown, compressed air can be supplied from compressed air source 224 to the interior of the innermost ejector member 122D, so that the cutting strip 24 can be inflated upward by compressed air. As a result, the bare core 22 can be fully separated from the cutting strip 24. Then, the bare core 22 can be picked up by vacuum pickup 330 and transferred to bare core stand 310.

[0093] According to an embodiment of the present invention, the ejector member 122 can be simultaneously raised and then lowered sequentially from the outside to the inside. Therefore, compared to a conventional bare core ejector, the height to which the bare core 22 is raised can be reduced, and damage to the bare core 22 by the ejector member 122 can be prevented when picking it up. Specifically, after the ejector member 122 and the flange 124 are raised, the stop member 165 can limit the descent height of the ejector member 122. That is, the raising and lowering heights of the ejector member 122 can be varied to different degrees depending on the size of the bare core 22, thus allowing for more efficient execution of various types of bare core 22 picking steps.

[0094] Although exemplary embodiments of the invention have been described with reference to specific examples, they are not limited thereto. Therefore, those skilled in the art will readily understand that various modifications and variations can be made without departing from the spirit and scope of the appended claims.

Claims

1.A die ejector comprising: a cover disposed to be in contact with a lower surface of a cutting tape; a plurality of ejector members configured to be raised by the cover so as to separate dies attached to an upper surface of the cutting tape from the cutting tape and having a telescopic structure extending in a raising direction; a plurality of flanges respectively disposed at lower end portions of the ejector members and arranged in the raising direction of the ejector members; a plurality of elastic members disposed between the flanges except for an uppermost flange; a lifting head disposed below a lowermost flange among the flanges; a plurality of connecting pins passing through the flanges except for the uppermost flange and connecting the uppermost flange and the lifting head; an ejector driving part connected to the lifting head and configured to raise the ejector members; a stop member disposed below the lowermost flange and configured to limit downward movement of the lowermost flange; and a stop driving part configured to raise the stop member to adjust a height of the stop member after the ejector driving part raises the ejector members; wherein the ejector driving part comprises: a first driving shaft connected to the lifting head and extending downward; and a first driving unit configured to raise the first driving shaft; wherein the stop driving part comprises: a second driving shaft connected to the stop member and extending downward; and a second driving unit configured to raise the second driving shaft; wherein the second driving shaft has a tubular shape surrounding the first driving shaft. 2.The die ejector of claim 1, wherein the cover has an opening into which the ejector members are inserted, and the ejector members are inserted into the opening such that upper surfaces of the ejector members are flush with an upper surface of the cover. 3.The die ejector of claim 1, wherein the ejector members are simultaneously raised by the ejector driving part. 4.The die ejector of claim 3, wherein the elastic members have a spring force that gradually increases downward, such that the ejector members except for an innermost ejector member among the ejector members are sequentially lowered from the outside to the inside. 5.The die ejector of claim 1, wherein the ejector driving part further comprises: a first guide member disposed between the first driving shaft and the second driving shaft and configured to guide the first driving shaft in the raising direction. 6.The die ejector of claim 1, further comprising: an ejector body connected to a lower portion of the cover and having a tubular shape surrounding the second driving shaft. 7.The die ejector of claim 6, wherein the stop driving part further comprises: a second guide member disposed between the second driving shaft and the ejector body and configured to guide the second driving shaft in the raising direction. 8.The die ejector of claim 6, wherein the first driving unit comprises: a first cam member for raising the first driving shaft; a first motor for rotating the first cam member; a first bracket mounted on a lower portion of the first driving shaft; and a first guide rail disposed on an inner surface of the first bracket. a first cam follower installed on the first bracket and disposed on the first cam member. 9.The die ejector of claim 8, wherein the ejector driving portion further comprises: a third guide member configured to guide the first bracket in a lifting direction. 10.The die ejector of claim 8, wherein the second driving unit comprises: a second cam member for lifting the second driving shaft; a second motor for rotating the second cam member; a second bracket installed on a lower portion of the second driving shaft; and a second cam follower installed on the second bracket and disposed on the second cam member. 11.The die ejector of claim 10, wherein the first bracket comprises: a connection block coupled to a lower portion of the first driving shaft; a pair of extension portions extending downward from the connection block; and a mounting portion connecting lower ends of the extension portions to each other, on which the first cam follower is installed, wherein the second cam member and the second cam follower are disposed between the extension portions. 12.The die ejector of claim 6, wherein the cover comprises: a cover body having a circular tube shape and coupled to the ejector body; a lid coupled to an upper portion of the cover body and having a vacuum hole for vacuum-sucking a lower surface of the cutting tape; and a third stop member protruding from an inner surface of the cover body to prevent the flange from being separated from the cover body.

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