An X-ray detection mechanism with a common focus of X-rays and visible light

Abstract

The present invention provides an X-ray detection mechanism with a common focus of X-rays and visible light, comprising: a detector, an X-ray generating device, a filter switching device, a collimator switching device, a mirror reflection device, and a zoom camera device. The X-rays emitted by the X-ray generating device sequentially pass through the filter switching device and the collimator switching device, then penetrate the mirror reflection device placed at a 45-degree angle, and are perpendicularly incident on the surface of the sample to be detected at 90 degrees. At the same time, the mirror reflection device reflects the image of the sample to be detected to the zoom camera device, and the detector is aligned with the sample to be detected at an angle of 45 degrees relative to the X-rays emitted by the X-ray generating device to receive the characteristic X-rays from the sample to be detected. The overall structure of the present invention has high integration, stable operation, low noise, can measure various samples, has high clarity of the imaging screen, high degree of enclosure of the test space, and less external interference, etc.

Description

Technical Field

[0001] The present invention relates to the field of nondestructive testing, and particularly to an X-ray detection mechanism with a common focus of X-rays and visible light. Background Art

[0002] When designing the moving parts of the X-ray detection device in the prior art, due to taking care of the camera, the X-rays can only be emitted at a 45-degree angle to excite the sample, thus the concave position of the sample cannot be tested, and when the position of the sample is too high, it cannot be accurately excited onto the sample. Summary of the Invention

[0003] The present invention provides an X-ray detection mechanism with a common focus of X-rays and visible light to solve at least one of the above technical problems.

[0004] To solve the above problems, as an aspect of the present invention, there is provided an X-ray detection mechanism with a common focus of X-rays and visible light, including: a detector, an X-ray generating device, a filter switching device, a collimator switching device, a specular reflection device, and a zoom camera device. The X-rays emitted by the X-ray generating device sequentially pass through the filter switching device and the collimator switching device, then penetrate the specular reflection device placed at a 45-degree angle, and vertically enter the surface of the sample to be detected at a 90-degree angle. At the same time, the specular reflection device reflects the image of the sample to be detected to the zoom camera device, and the detector is aligned with the sample to be detected at an angle of 45 degrees relative to the X-rays emitted by the X-ray generating device to receive the characteristic X-rays from the sample to be detected.

[0005] Preferably, the filter switching device includes a filter driving motor, a worm, a worm gear, and a plurality of filters. The filter driving motor is connected to the worm, the worm is meshed with the worm gear, and a plurality of mounting holes are formed on the web of the worm gear, and each mounting hole is provided with a filter.

[0006] Preferably, the filter switching device further includes an inductor and a first induction head cooperating with the inductor. The inductor is mounted on the base, and the first induction head is mounted on the worm gear.

[0007] Preferably, the collimator switching device includes a collimator driving motor, a ball screw, a ball nut, and a multi-hole collimator. The collimator driving motor is connected to the ball screw, the multi-hole collimator is movably mounted on the ball screw through the ball nut, and the multi-hole collimator is located above the worm gear.

[0008] Preferably, the collimator drive motor is connected to the ball screw through a second coupling. A ball screw positioning bearing block is provided at each end of the ball screw. The multi-hole collimator is slidably arranged on the guide rail.

[0009] Preferably, the collimator switching device further includes a first photoelectric position switch and an induction sheet used in cooperation with the first photoelectric position switch. The first photoelectric position switch is installed on the base, and the induction sheet is installed on the multi-hole collimator.

[0010] Preferably, the mirror reflection device includes a reflection base and a reflection sheet. The reflection base is installed on one of the ball screw positioning bearing blocks, and the reflection sheet is arranged on the reflection base.

[0011] Preferably, the zoom camera device includes a camera drive motor, a trapezoidal screw, a trapezoidal nut moving seat, and a camera. The camera drive motor is connected to the trapezoidal screw, and the camera is installed on the trapezoidal screw through the trapezoidal nut moving seat.

[0012] Preferably, a backlash eliminator nut and a preloading compression spring are installed on the trapezoidal screw. One end of the preloading compression spring abuts against the backlash eliminator nut, and the other end abuts against the trapezoidal nut moving seat.

[0013] Preferably, the zoom camera device further includes a second photoelectric position switch, a second induction head used in cooperation with the second photoelectric position switch, and a lighting lamp board. The second photoelectric position switch and the lighting lamp board are both installed on the base, and the second induction head is installed on the trapezoidal nut moving seat.

[0014] Preferably, the filter drive motor is connected to the worm through a first coupling. A worm positioning bearing block is installed at each end of the worm.

[0015] Due to the adoption of the above technical solutions, the present invention realizes the co-focus of X-rays and visible light. The use of an ultra-thin aluminized mirror can well solve the problem of obtaining a sample image in real time and making the X-rays vertically irradiate the surface of the sample. Even if the position of the sample is increased or decreased, it is ensured that the same point position is tested, solving the problem in the prior art that the traditional solution cannot test the same point with the adjustment of the height of the sample position. At the same time, the present invention supports the switching of multiple collimators and multiple filters, and the high-definition camera adjusts the focal length with the height adjustment of the detected position of the sample to obtain a more accurate test position image.

[0016] The overall structure of the present invention has a high integration degree, operates smoothly, has low noise, can measure a variety of samples, has a high imaging picture clarity, a high test space closure degree, and less external interference, etc. Description of the Drawings

[0017] Figure 1 A perspective view of the present invention is schematically shown;

[0018] Figure 2 An exploded view of the present invention is schematically shown;

[0019] Figure 3 A schematic diagram of the installation structure of the filter sheet is schematically shown;

[0020] Figure 4 A schematic diagram of the installation structure of the worm and worm gear is schematically shown;

[0021] Figure 5 A schematic diagram of the installation structure of the filter switching device is schematically shown;

[0022] Figure 6 A schematic diagram of the installation structure of the collimator switching device is schematically shown Figure 1 ;

[0023] Figure 7 A schematic diagram of the installation structure of the collimator switching device is schematically shown Figure 2 ;

[0024] Figure 8 A schematic diagram of the installation structure of the zoom camera device is schematically shown Figure 1 ;

[0025] Figure 9 A schematic diagram of the installation structure of the zoom camera device is schematically shown Figure 2 ;

[0026] Figure 10 A schematic diagram of the optical path propagation of the present invention is schematically shown.

[0027] Reference numerals in the figure: 1, detector; 2, X-ray generating device; 3, sample to be detected; 4, filter driving motor; 5, worm; 6, worm gear; 7, filter; 8, inductor; 9, first induction head; 10, base; 11, collimator driving motor; 12, ball screw; 13, ball nut; 14, multi-hole collimator; 15, second coupling; 16, ball screw positioning bearing seat; 17, guide rail; 18, first photoelectric position switch; 19, induction piece; 20, reflection seat; 21, reflection piece; 22, camera driving motor; 23, trapezoidal screw; 24, trapezoidal nut moving seat; 25, camera; 26, backlash eliminating nut; 27, preloading compression spring; 28, second photoelectric position switch; 29, second induction head; 30, lighting lamp board; 31, first coupling; 32, worm positioning bearing seat; 33, control adapter board; 34, guide rail; 35, camera fixing bracket; 36, filter pressing plate. Detailed implementation manners

[0028] The following is a detailed description of the embodiments of the present invention. However, the present invention can be implemented in many different ways defined and covered by the claims.

[0029] As an aspect of the present invention, an X-ray detection mechanism with a common focus of X-rays and visible light is provided, which can be used in an X-ray energy dispersive spectrometer and includes: a detector 1, an X-ray generating device 2, a filter switching device, a collimator switching device, a mirror reflection device, and a zoom camera device. The X-rays emitted by the X-ray generating device 2 sequentially pass through the filter switching device and the collimator switching device, then penetrate the mirror reflection device placed at a 45-degree angle, and vertically enter the surface of the sample 3 to be detected at a 90-degree angle. At the same time, the mirror reflection device reflects the image of the sample 3 to be detected to the zoom camera device, and the detector 1 is aligned with the sample 3 to be detected at an angle of 45 degrees relative to the X-rays emitted by the X-ray generating device 2 to receive the characteristic X-rays from the sample 3 to be detected.

[0030] The present invention integrates four major functions: filter switching, collimator switching, mirror reflection, and camera zoom. The X-rays excited by the X-ray generating device 2 (including the X-ray tube) vertically penetrate the filter 7, the collimator holes of the multi-hole collimator 14, and the reflector 21 (such as a reflective glass lens), and vertically enter the sample 3 to be detected. The detector 1 is aligned with the sample 3 to be detected at an angle of 45 degrees relative to the vertically incident X-rays, so as to receive the characteristic X-rays from the sample 3 to be detected. The reflector 21 forms an angle of 45° with the X-rays and reflects the image of the sample 3 to be detected to the camera 25 located on its horizontal right side, so that the X-rays and visible light are co-focused. The reflector 21 adopts an ultra-thin processing technology and will not cause a large impact on the attenuation of the X-ray energy. In addition, on this basis, functions such as multi-collimator and multi-filter switching and automatic focusing according to the item to be measured are realized.

[0031] Preferably, the filter switching device comprises a filter driving motor 4, a worm 5, a worm wheel 6, and a plurality of filters 7, wherein the filter driving motor 4 is connected to the worm 5, the worm 5 is meshed with the worm wheel 6, a plurality of mounting holes are provided on the web of the worm wheel 6, and a filter 7 is installed in each mounting hole. Preferably, the filter driving motor 4 is connected to the worm 5 through a first coupling 31, and a worm positioning bearing seat 32 is installed at both ends of the worm 5. Preferably, the filter switching device further comprises a sensor 8 and a first sensor head 9 matched with the sensor 8, wherein the sensor 8 is mounted on a base 10, and the first sensor head 9 is mounted on the worm wheel 6. In this embodiment, a plurality of filters 7 are mounted on the worm wheel 6, and the worm wheel pair is driven to rotate by a closed-loop motor, and the origin sensor switch (sensor 8) returns to the origin in time to eliminate the error, thereby realizing the precise switching of different filters 7; an X-ray shielding position is reserved on the worm wheel 6, and the operation is safer. The sensor 8 may be a photoelectric sensor switch, and the first sensor head 9 may be a metal sensor head.

[0032] The filter drive motor 4 is fixed on the motor mounting plate, and is connected to the worm 5 on the worm positioning bearing seat 32 through the first coupling 31. The rotation of the worm 5 drives the worm wheel 6 on the vertical staggered axis to rotate; the filter 7 is fixed on the worm wheel 6, and the switching of multiple filters 7 is realized through the operation of the worm wheel pair. The sensor 8 is installed on the base 10, and the first sensor head 9 is installed on the worm wheel 6. After each cycle of the worm wheel 6, the sensor 8 approaches the first sensor head 9 and sends a signal. The control system drives the closed-loop motor to accurately return the worm wheel 6 to the origin, eliminating the operation error and ensuring the accurate switching of the filter. Specifically, a plurality of holes for installing the optical filters 7 are opened on the belly plate of the worm gear 6, and no less than three types of optical filters 7 can be installed according to the requirements of the machine model, and can be flexibly adjusted; the worm gear pair has a compact structure, smooth transmission, no noise and a certain self-locking ability, which can ensure that the filter position is not dislocated due to external forces after position switching. The combination design of the closed-loop motor with real-time position feedback and the origin position switch can ensure the accuracy of the filter position switching to the greatest extent.

[0033] Preferably, the collimator switching device includes a collimator drive motor 11, a ball screw 12, a ball nut 13, and a multi-hole collimator 14. The collimator drive motor 11 is connected to the ball screw 12. The multi-hole collimator 14 is movably mounted on the ball screw 12 through the ball nut 13, and the multi-hole collimator 14 is located above the worm gear 6. Preferably, the collimator drive motor 11 is connected to the ball screw 12 through a second coupling 15. A ball screw positioning bearing block 16 is provided at each end of the ball screw 12, and the multi-hole collimator 14 is slidably provided on a guide rail 17. Preferably, the collimator switching device further includes a first photoelectric position switch 18 and an induction piece 19 used in cooperation with the first photoelectric position switch 18. The first photoelectric position switch 18 is mounted on the base 10, and the induction piece 19 is mounted on the multi-hole collimator 14. The multi-hole collimator 14 is provided with collimator holes of multiple apertures. Through the reciprocating motion of the high-precision ball screw pair driven by a closed-loop motor, the photoelectric position switch (the first photoelectric position switch 18) feeds back the position to achieve high-precision switching of the collimator. When the multi-hole collimator 14 moves back and forth, it drives the induction piece 19 to move back and forth. When the induction piece 19 moves to the occlusion position of the first photoelectric position switch 18, the collimator drive motor 11 stops operating. The multi-hole collimator 14 is provided with a plurality of holes of different apertures, and the holes are arranged along the movement direction. The collimator is switched by driving the multi-hole collimator 14 to move back and forth by the collimator drive motor 11 to switch to different apertures.

[0034] Preferably, the mirror reflection device includes a reflection seat 20 and a reflection piece 21. The reflection seat 20 is mounted on one of the ball screw positioning bearing blocks 16, and the reflection piece 21 is provided on the reflection seat 20. The glass mirror (the reflection piece 21) forms a 45-degree angle with the vertical direction and reflects the sample image to the camera 25 located on its right side.

[0035] The collimator drive motor 11 is fixed on the collimator motor mounting plate and is drivingly connected to the ball screw 12 on the ball screw positioning bearing block 16 through the second coupling 15. The ball nut 13 is installed on the multi-hole collimator 14, and the multi-hole collimator 14 is installed on the sliding side of the guide rail 17. The fixed side of the guide rail 17 is installed on the base 10. The rotation of the ball screw drives the ball nut 13 to reciprocate to realize the switching of the multi-hole collimator 14. The reflection seat 20 is installed on the ball screw positioning bearing block 16, the reflection sheet 21 is fixed on the reflection seat 20, and the camera 25 images through the reflection sheet to the external human-machine interface; the first photoelectric position switch 18 is fixed on the base 10, the induction sheet 19 is installed on the multi-hole collimator 14, and after the multi-hole collimator 14 reciprocates for one cycle, the photoelectric inductor emits a signal, and the control system drives the closed-loop motor to make the collimator accurately return to the origin, improving the positioning accuracy of the multi-hole collimator. The multi-hole collimator 14 is arranged above the worm gear 6 of the filter 7, and the switching of the multi-hole collimator is realized through the transmission of the high-precision ball screw pair and the positioning and guiding of the crossed roller guide rail. The high positioning accuracy, small friction and high transmission efficiency of the ball screw pair and the crossed roller guide rail make the switching of the multi-hole collimator accurate, and at the same time, the cooperation with the filter switching can meet various test requirements.

[0036] Preferably, the zoom camera device includes a camera drive motor 22, a trapezoidal screw 23, a trapezoidal nut moving seat 24, and a camera 25. The camera drive motor 22 is connected to the trapezoidal screw 23, and the camera 25 is installed on the trapezoidal screw 23 through the trapezoidal nut moving seat 24. Preferably, a backlash eliminating nut 26 and a preloading compression spring 27 are installed on the trapezoidal screw 23. One end of the preloading compression spring 27 abuts against the backlash eliminating nut 26, and the other end abuts against the trapezoidal nut moving seat 24. Preferably, the zoom camera device further includes a second photoelectric position switch 28, a second induction head 29 cooperating with the second photoelectric position switch 28, and a lighting lamp board 30. The second photoelectric position switch 28 and the lighting lamp board 30 are both installed on the base 10, and the second induction head 29 is installed on the trapezoidal nut moving seat 24. The camera drive motor 22 drives the trapezoidal nut moving seat 24 to reciprocate to drive the camera 25 to zoom by using a precision lead screw motor. The built-in backlash eliminating nut 26 of the trapezoidal lead screw pair ensures the movement accuracy and the smooth movement of the camera 25, and the feedback position of the photoelectric position switch (second photoelectric position switch 28) ensures the clarity of the zoomed image. The lighting lamp board 30 provides a good visual environment for the camera 25.

[0037] The camera driving motor 22 of the zoom camera device is fixed on the motor mounting plate. The trapezoidal lead screw output shaft of the camera driving motor 22 is screwed onto the trapezoidal nut moving seat 24 mounted on the guide rail. The trapezoidal nut moving seat 24 is installed on the sliding side of the guide rail. The camera 25 is installed on the trapezoidal nut moving seat 24 through the camera fixing bracket. The guide rail is fixed on the base 10. The rotation of the lead screw motor drives the trapezoidal nut moving seat 24 to reciprocate to realize the zoom of the camera 25. The pre-tightening compression spring 27 and the backlash eliminating nut 26 are installed in the lead screw pair to ensure the stable operation of the camera 25. The second photoelectric position switch 28 and the lighting lamp board 30 are fixed on the base 10. The second sensing head 29 is installed on the trapezoidal nut moving seat 24. After the lead screw pair reciprocates for one cycle, the photoelectric sensor emits a signal to make the camera return to the origin. The control system drives the closed-loop motor according to the distance of the measured object to drive the camera to automatically zoom, ensuring a clear picture. The focusing of the camera 25 is achieved by changing the overall position. The visual acquisition system is installed on the trapezoidal nut moving seat 24. The trapezoidal lead screw pair makes the picture of the camera 25 stable during movement and does not shake when stopped through the backlash eliminating component and the crossed roller bearing combination. The closed-loop motor cooperates with the photoelectric switch to form a complete closed-loop control loop, which can adjust the camera focus according to the actual situation of the measured object and collect clear image quality. Among them, the pre-tightening compression spring is placed between the trapezoidal nut moving seat and the backlash eliminating nut to ensure that the pre-tightening compression spring is in a compressed state, and then they are screwed together on the trapezoidal lead screw. By adjusting the relative distance between the trapezoidal nut moving seat and the backlash eliminating nut, the elastic force of the pre-tightening compression spring is controlled to eliminate the fitting clearance between the two nuts and the trapezoidal lead screw through preloading, thereby ensuring the stability of the operation. The two sides of the backlash eliminating nut are prominently formed with limit blocks that cooperate with the guide rail. In this way, the backlash eliminating nut moves on the guide rail together with the trapezoidal nut moving seat 24. Through the pre-tightening compression spring 27, the fitting clearance between the backlash eliminating nut, the trapezoidal nut moving seat 24 and the trapezoidal lead screw can be eliminated through preloading, thereby ensuring the stability of the operation.

[0038] During operation, the high-voltage power supply of the instrument system outputs a voltage of 10Kv - 50Kv to the X-ray tube. The high-speed electron flow inside the tube is excited onto the target to generate primary X-rays. The X-rays penetrate the filter 7, pass through the multi-hole collimator 14, and then penetrate the ultra-thin reflective glass sheet to reach the sample, exciting the measured sample to generate secondary characteristic X-rays. When these secondary characteristic X-rays are detected by the detector 1, after photoelectric conversion and signal processing, they are converted into spectral data and given to the external embedded computer. Then the embedded computer software analyzes according to the fundamental parameter method to obtain the types and contents of the elements of the measured sample. In addition, the filter needs to be switched according to different detected elements; and the appropriate aperture collimator can be switched according to the size of the detected sample and the size of the acquisition range; the camera focal length is adjusted according to the distance from the test point of the measured sample to the plane of the bearing ring to ensure clear imaging. Finally, more accurate test qualitative and quantitative results are obtained.

[0039] Due to the adoption of the above technical solution, the present invention realizes the co - focus of X - rays and visible light. The use of an ultra - thin aluminized mirror can well solve the problem that both the sample image can be obtained in real - time and the X - rays can be vertically irradiated onto the surface of the sample. Even if the position of the sample is increased or decreased, it is ensured that the same point position is tested, solving the problem in the prior art that the traditional solution cannot test the same point as the height of the sample position is adjusted. At the same time, the present invention supports the switching of multiple collimators and multiple filters, and the high - definition camera adjusts the focal length as the height of the detected position of the sample changes, so as to obtain a more accurate test position image.

[0040] The overall structure of the present invention has high integration, stable operation, low noise, can measure a variety of samples, high imaging picture clarity, high test space closure, and less external interference, etc.

[0041] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. An X-ray detection mechanism with a common focus of X-rays and visible light, Characterized in that, It includes: A detector (1), an X-ray generating device (2), a filter switching device, a collimator switching device, a mirror reflection device, and a zoom camera device. The X-rays emitted by the X-ray generating device (2) sequentially pass through the filter switching device and the collimator switching device, then penetrate the mirror reflection device placed at a 45-degree angle, and perpendicularly enter the surface of the sample to be detected (3) at 90 degrees. At the same time, the mirror reflection device reflects the image of the sample to be detected (3) to the zoom camera device. The detector (1) is aligned with the sample to be detected (3) at an angle of 45 degrees relative to the X-rays emitted by the X-ray generating device (2) to receive the characteristic X-rays from the sample to be detected (3).

2. The X-ray detection mechanism with a common focus of X-rays and visible light according to claim 1, Characterized in that, The filter switching device includes a filter driving motor (4), a worm (5), a worm gear (6), and a plurality of filters (7). The filter driving motor (4) is connected to the worm (5), the worm (5) meshes with the worm gear (6), and a plurality of mounting holes are provided on the web of the worm gear (6), and each mounting hole is provided with one of the filters (7).

3. The X-ray detection mechanism with a common focus of X-rays and visible light according to claim 2, Characterized in that, The filter switching device further includes a sensor (8) and a first induction head (9) cooperating with the sensor (8). The sensor (8) is installed on the base (10), and the first induction head (9) is installed on the worm gear (6).

4. The X-ray detection mechanism with a common focus of X-rays and visible light according to claim 2, Characterized in that, The collimator switching device includes a collimator driving motor (11), a ball screw (12), a ball nut (13), and a multi-hole collimator (14). The collimator driving motor (11) is connected to the ball screw (12), and the multi-hole collimator (14) is movably installed on the ball screw (12) through the ball nut (13). The multi-hole collimator (14) is located above the worm gear (6).

5. The X-ray detection mechanism with a common focus of X-rays and visible light according to claim 4, Characterized in that, The collimator driving motor (11) is connected to the ball screw (12) through a second coupling (15). A ball screw positioning bearing seat (16) is provided at each end of the ball screw (12), and the multi-hole collimator (14) is slidably provided on the guide rail (17).

6. The X-ray detection mechanism with a common focus of X-rays and visible light according to claim 4, Characterized in that, The collimator switching device further includes a first photoelectric position switch (18) and an induction sheet (19) used in cooperation with the first photoelectric position switch (18). The first photoelectric position switch (18) is installed on the base (10), and the induction sheet (19) is installed on the multi-hole collimator (14).

7. The X-ray detection mechanism with co-focal X-rays and visible light according to claim 5, wherein, the mirror reflection device includes a reflection base (20) and a reflection sheet (21). The reflection base (20) is installed on one of the ball screw positioning bearing seats (16), and the reflection sheet (21) is disposed on the reflection base (20).

8. The X-ray detection mechanism with co-focal X-rays and visible light according to claim 6, wherein, the zoom camera device includes a camera drive motor (22), a trapezoidal lead screw (23), a trapezoidal nut moving seat (24), and a camera (25). The camera drive motor (22) is connected to the trapezoidal lead screw (23), and the camera (25) is installed on the trapezoidal lead screw (23) through the trapezoidal nut moving seat (24).

9. The X-ray detection mechanism with co-focal X-rays and visible light according to claim 8, wherein, a backlash eliminator nut (26) and a pre-tightening compression spring (27) are installed on the trapezoidal lead screw (23). One end of the pre-tightening compression spring (27) abuts against the backlash eliminator nut (26), and the other end abuts against the trapezoidal nut moving seat (24).

10. The X-ray detection mechanism with co-focal X-rays and visible light according to claim 8, wherein, the zoom camera device further includes a second photoelectric position switch (28), a second induction head (29) used in cooperation with the second photoelectric position switch (28), and a lighting lamp board (30). The second photoelectric position switch (28) and the lighting lamp board (30) are both installed on the base (10), and the second induction head (29) is installed on the trapezoidal nut moving seat (24).

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