Bionic Flexible Neuromorphic Device Integrating Visual and Tactile Perception and Preparation Method

Abstract

The present invention discloses a bionic flexible neuromorphic device integrating visual and tactile perception and a preparation method thereof. The bionic flexible neuromorphic device integrating visual and tactile perception includes: a flexible substrate; a back gate electrode, which is made of a transparent material and formed on the flexible substrate; a storage layer, which is an oxide thin film with oxygen vacancy type defects and formed on the back gate electrode; a two-dimensional material layer, which has a response in the visible light band range and at the same time changes its resistance state under a bent state, serving as a light sensing layer and a mechanical stress sensing layer, and formed on the storage layer; a source electrode and a drain electrode, which are respectively formed at both ends of the two-dimensional material layer. The resistance state of the device can be adjusted by using a laser in the visible light band and the way of pressing and folding, and the change of the device resistance is used as the collected information, so as to realize the bionic perception of visual and tactile information.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a bionic flexible neuromorphic device integrating visual and tactile perception and a preparation method thereof. Background Art

[0002] Using electronic devices to simulate the sensory functions of organisms so that electronics can have an operating mode closer to that of energy-efficient organisms and make intelligent perception and decisions in complex environments has become the development direction of the next generation of intelligent electronics.

[0003] Vision and touch are crucial components of the human sensory system. Image sensors and pressure sensors, respectively, can capture and extract image and pressure information, playing a key role in efficient information perception. However, most current sensors only have a single sensing function and are unable to simultaneously perceive multiple types of information. Furthermore, sensors typically respond when a stimulus is applied and then recover after the stimulus is removed. This necessitates that information storage and computation require the use of analog-to-digital converters and external circuits to transfer the information to independent storage and computation units, limiting information processing efficiency and resulting in high power consumption.

[0004] On the other hand, neuromorphic computing, through the use of integrated storage and computing devices, can perform both storage and computing tasks within the same device unit, avoiding the bandwidth mismatch and significant power loss caused by the physical separation of storage and computing units in traditional von Neumann computing architectures. Using neuromorphic computing devices to implement visual and tactile functions can integrate information perception, storage, and computing, enabling real-time perception and processing of information.

[0005] As Moore's Law continues to advance, the feature sizes of integrated circuits continue to shrink, but problems such as short-channel effects in transistors limit further scaling. Two-dimensional materials, which are atomically thin and can operate stably at thicknesses of just a few nanometers, offer the potential for next-generation semiconductor devices. Their application in physical components for multifunctional visual and tactile perception, storage, and computing is of great significance for the development of high-density, low-power electronics in the post-Moore era. Summary of the invention

[0006] In order to solve the above problems, the present invention designs and manufactures a planar bionic flexible neuromorphic device that integrates vision and tactile perception. It utilizes multiple modes such as light stimulation and pressure stimulation, and takes advantage of the natural light and pressure sensing capabilities of two-dimensional materials to realize information perception and neuromorphic computing functions, and is used to construct a brain-like neuromorphic computing system that integrates vision and tactile perception.

[0007] The present invention discloses a bionic flexible neuromorphic device integrating visual and tactile perception, comprising: a flexible substrate; a back gate electrode, made of a transparent material, formed on the flexible substrate; a storage layer, which is an oxide thin film with oxygen vacancy type defects, formed on the back gate electrode; a two-dimensional material layer, which has a response in the visible light band range and whose resistance state changes under a bent state, serving as a light sensing layer and a mechanical stress sensing layer, formed on the storage layer; a source electrode and a drain electrode, respectively formed at both ends of the two-dimensional material layer, and the resistance state of the device is adjusted by using a laser in the visible light band and a pressing and folding method, and the change information of the device resistance is collected, so as to realize the bionic perception of visual and tactile information.

[0008] In the bionic flexible neuromorphic device integrating visual and tactile perception of the present invention, preferably, the two-dimensional material is WSe2, MoS2 or WS2.

[0009] In the bionic flexible neuromorphic device integrating visual and tactile perception of the present invention, preferably, the flexible substrate is PEN, PET, PI or PDMS.

[0010] In the bionic flexible neuromorphic device integrating visual and tactile perception of the present invention, preferably, the storage layer is HfO2, ZrO2, Ta2O5, TiO2, MoO x or Al2O3.

[0011] In the bionic flexible neuromorphic device integrating visual and tactile perception of the present invention, preferably, the thickness of the two-dimensional material is 1 nm to 30 nm.

[0012] The present invention also discloses a preparation method of a bionic flexible neuromorphic device integrating visual and tactile perception, comprising the following steps: preparing a back gate electrode on a flexible substrate by using a transparent material; forming an oxide thin film with oxygen vacancy type defects on the back gate electrode as a storage layer; forming a two-dimensional material layer which has a response in the visible light band range and whose resistance state changes under a bent state on the storage layer by using a mechanical exfoliation method, serving as a light sensing layer and a mechanical stress sensing layer; forming a source electrode and a drain electrode at both ends of the two-dimensional material layer respectively, and adjusting the resistance state of the device by using a laser in the visible light band and a pressing and folding method, and collecting the change information of the device resistance to realize the bionic perception of visual and tactile information.

[0013] In the preparation method of the bionic flexible neuromorphic device integrating visual and tactile perception of the present invention, preferably, the two-dimensional material is WSe2, MoS2 or WS2.

[0014] In the preparation method of the bionic flexible neuromorphic device integrating visual and tactile perception of the present invention, preferably, the flexible substrate is PEN, PET, PI or PDMS.

[0015] In the preparation method of the bionic flexible neuromorphic device integrating visual and tactile perception of the present invention, preferably, the storage layer is HfO2, ZrO2, Ta2O5, TiO2, MoO x or Al2O3.

[0016] In the preparation method of the bionic flexible neuromorphic device integrating visual and tactile perception of the present invention, preferably, the thickness of the two-dimensional material layer is 1 nm to 30 nm.

[0017] Beneficial effects:

[0018] (1) Compared with traditional optoelectronic detectors or pressure sensors with single perception functions, the planar bionic device integrating light and touch senses can break through the bottleneck of traditional sensors, realize multi-functional perception behaviors similar to those of organisms, efficiently collect various types of information, and has more advantages than single sensors.

[0019] (2) Using neuromorphic devices to achieve visual and tactile perception can not only realize in-situ computing, solve the separation problem of storage and computing units, but also solve the separation problem of information acquisition and information processing units, and achieve more efficient information perception and processing.

[0020] (3) Using two-dimensional materials to realize multi-functional flexible neuromorphic devices can achieve excellent flexibility and size miniaturization, have the potential to be applied to sub-nanoscale electronic devices, and lay a foundation for the development of flexible electronics in the post-Moore era. Description of the drawings

[0021] Figure 1 is a flowchart of the preparation method of the bionic flexible neuromorphic device integrating visual and tactile perception.

[0022] Figure 2 is a schematic diagram of the device structure after forming metal marks.

[0023] Figure 3 is a schematic diagram of the device structure after forming a back gate electrode.

[0024] Figure 4 is a schematic diagram of the device structure after forming a storage layer.

[0025] Figure 5 is a schematic diagram of the device structure after forming a two-dimensional material layer.

[0026] Figure 6 is a schematic diagram of the device structure after forming source and drain electrodes.

[0027] Figure 7 It is a schematic diagram of the working principle of a bionic flexible neuromorphic device integrating visual and tactile perception. Specific implementation manners

[0028] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. The described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the protection scope of the present invention.

[0029] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by terms such as "upper", "lower", "vertical", "horizontal", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0030] In addition, many specific details of the present invention are described below, such as the structure, material, size, processing technology and techniques of the device, in order to understand the present invention more clearly. However, as those skilled in the art can understand, the present invention can be implemented without these specific details. Unless specifically pointed out below, each part in the device can be made of materials well known to those skilled in the art, or materials with similar functions developed in the future can be used.

[0031] Figure 1 It is a flow chart of the preparation method of a bionic flexible neuromorphic device integrating visual and tactile perception.

[0032] As Figure 1 shown, it includes the following steps:

[0033] Step S1, prepare a flexible polyethylene naphthalate (PEN) substrate 100 of 1.5 cm × 1.5 cm, and ultrasonically clean it with acetone, isopropyl alcohol and deionized water for 5 minutes respectively for later use. The flexible substrate can also be polyethylene terephthalate (PET), polyimide (PI), polydimethylsiloxane (PDMS), etc.

[0034] Step S2, use photolithography and physical vapor deposition processes to grow and prepare a metal mark Au101 on the substrate 100 for subsequent positioning of the film, asFigure 2 As shown. The metal marking material can also be Pt, Pd, etc.

[0035] Step S3, prepare indium tin oxide (ITO) on the substrate as the back gate electrode 102 by physical vapor deposition method, as Figure 3 shown. The back gate material can also be transparent electrode materials such as Ag nanowires and carbon nanotubes. The thickness range of the back gate electrode is 50 nm to 200 nm, preferably 100 nm.

[0036] Step S4, grow an Al2O3 thin film on the back gate electrode 102 by atomic layer deposition method as the storage layer 103 of the neuromorphic device, and use interface states to achieve storage, as Figure 4 shown. The storage layer material can also be oxide thin films with oxygen vacancy type defects such as HfO2, ZrO2, Ta2O5, TiO2, MoO x etc., and the thickness range is 10 - 40 nm, preferably 25 nm.

[0037] Step S5, obtain a WSe2 two-dimensional material layer 104 by mechanical exfoliation method and transfer it onto the storage layer 103 as the light sensing layer and the mechanical stress sensing layer, as Figure 5 shown. The two-dimensional material used can also be materials such as MoS2 and WS2 that can undergo band transitions of photo-generated carriers under the action of visible light, thereby changing the current state, and at the same time, different charge accumulations occur in the bent state and the flat state, thereby changing the resistance state; the thickness range of the two-dimensional material layer can be 1 nm to 30 nm, preferably 10 nm.

[0038] Step S6, prepare the source electrode 105 and the drain electrode 106 of the device at both ends of the two-dimensional material layer 104 by electron beam lithography and physical vapor deposition processes, as Figure 6 shown. The source electrode and drain electrode materials are Ti / Au, Ti / Pt, Cr / Au, Cr / Pt, Ti / Pd, Cr / Pd, etc.; among them, the thickness range of the upper layer metal can be 5 nm to 20 nm, and the thickness range of the lower layer metal can be 50 nm to 100 nm.

[0039] As Figure 6As shown, the biomimetic flexible neuromorphic device with integrated visual and tactile perception includes a flexible substrate 100; a back gate electrode 102, which is made of transparent material and formed on the flexible substrate 100; a storage layer 103, which is an oxide film with oxygen vacancy type defects, formed on the back gate electrode 102; a two-dimensional material layer 104, which can generate band transitions of photogenerated carriers under the action of visible light, thereby changing the current state, and at the same time, different charge accumulation occurs in the bent state and the flat state, thereby changing the resistance state, and is formed on the storage layer 103 as a light-sensitive layer and a mechanical stress sensing layer; a source electrode 105 and a drain electrode 106, which are respectively formed at both ends of the two-dimensional material layer 104. Figure 7 As shown, the resistance state of the device can be adjusted by using a laser in the visible light band and a folding method, and the change in device resistance is used as the collected information to achieve bionic perception of visual and tactile information.

[0040] The present invention utilizes multiple modes such as light stimulation and pressure stimulation, and leverages the natural light and pressure sensing capabilities of two-dimensional materials to achieve information perception and neuromorphic computing functions, and is used to construct a brain-like neuromorphic computing system that integrates vision and touch.

[0041] Compared with traditional photodetectors or pressure sensors with a single sensing function, planar bionic devices that integrate light and touch sensing can break the bottleneck of traditional sensors, achieve multifunctional sensing behaviors similar to those of biological organisms, and efficiently collect multiple types of information, which is more advantageous than a single sensor.

[0042] Using neuromorphic devices to achieve visual and tactile perception can not only realize in-situ computing and solve the problem of separation of storage and computing units, but also solve the problem of separation of information acquisition and information processing units, achieving more efficient information perception and processing.

[0043] The use of two-dimensional materials to realize multifunctional flexible neuromorphic devices can achieve excellent flexibility and miniaturization, and has the potential to be applied to sub-nanoscale electronic devices, laying the foundation for the development of flexible electronics in the post-Moore era.

[0044] The above description is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with this technical field within the technical scope disclosed by the present invention should be covered by the scope of protection of the present invention.

Claims

1. A bionic flexible neuromorphic device integrating visual and tactile perception, characterized in that it includes: A flexible substrate; A back gate electrode, made of a transparent material, formed on the flexible substrate; A storage layer, which is an oxide thin film with oxygen vacancy type defects, formed on the back gate electrode, and realizes storage by using interface states; A two-dimensional material layer, which responds in the visible light band range and changes its resistance state under a bent state, serves as a light sensing layer and a mechanical stress sensing layer, and is formed on the storage layer; A source electrode and a drain electrode, respectively formed at both ends of the two-dimensional material layer, The resistance state of the device is adjusted by using a laser in the visible light band and the method of pressing and folding, and the change information of the device resistance is collected to realize the bionic perception of visual and tactile information.

2. The bionic flexible neuromorphic device integrating visual and tactile perception according to claim 1, characterized in that The two-dimensional material is WSe2, MoS2 or WS2.

3. The bionic flexible neuromorphic device integrating visual and tactile perception according to claim 1, characterized in that The flexible substrate is PEN, PET, PI or PDMS.

4. The bionic flexible neuromorphic device integrating visual and tactile perception according to claim 1, characterized in that The storage layer is HfO2, ZrO2, Ta2O5, TiO2, MoO x or Al2O3.

5. The bionic flexible neuromorphic device integrating visual and tactile perception according to claim 1, characterized in that The thickness of the two-dimensional material layer is 1 nm to 30 nm.

6. A preparation method of a bionic flexible neuromorphic device integrating visual and tactile perception, characterized in that it includes the following steps: Prepare a back gate electrode on the flexible substrate by using a transparent material; Form an oxide thin film with oxygen vacancy type defects on the back gate electrode as a storage layer, and realize storage by using interface states; Use the mechanical exfoliation method to form a two-dimensional material layer on the storage layer that responds in the visible light band range and changes its resistance state under a bent state, as a light sensing layer and a mechanical stress sensing layer; Respectively form a source electrode and a drain electrode at both ends of the two-dimensional material layer, The resistance state of the device is adjusted by using a laser in the visible light band and the method of pressing and folding, and the change information of the device resistance is collected to realize the bionic perception of visual and tactile information.

7. The preparation method of the bionic flexible neuromorphic device integrating visual and tactile perception according to claim 6, characterized in that The two-dimensional material is WSe2, MoS2 or WS2.

8. The preparation method of the bionic flexible neuromorphic device integrating visual and tactile perception according to claim 6, characterized in that The flexible substrate is PEN, PET, PI or PDMS.

9. The preparation method of the bionic flexible neuromorphic device integrating visual and tactile perception according to claim 6, characterized in that The storage layer is HfO2, ZrO2, Ta2O5, TiO2, MoO x or Al2O3.

10. The preparation method of the bionic flexible neuromorphic device integrating visual and tactile perception according to claim 6, characterized in that The thickness of the two-dimensional material layer is 1 nm to 30 nm.

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