Offset Error Determination Method and Apparatus, Computer-Readable Storage Medium, and Terminal Device

Abstract

A method and device for determining offset error, a computer-readable storage medium, and a terminal device. The method for determining offset error includes: obtaining a layout to be simulated, and setting a simulation box based on the shape and size of a target geometric figure in the layout, wherein the size of the simulation box in the width direction of the target geometric figure is greater than the width of the target geometric figure; starting from a starting position, moving the simulation box along a preset route, wherein the starting position is the coincidence point of the center point of the target geometric figure and the center point of the simulation box, and the preset route is located in the target geometric figure, and at least a part of the preset route has an angle with the horizontal direction, and the angle is greater than a preset angle and less than 90 degrees; based on each moving operation, calculating the characteristic size corresponding to the moved simulation box; and determining the offset error of the layout according to the multiple characteristic sizes calculated by multiple moving operations. The present invention can improve the efficiency of calculating the offset error during optical proximity correction.

Description

Technical Field

[0001] The present invention relates to the field of computer technologies, and in particular, to a method and apparatus for determining offset error, a computer-readable storage medium, and a terminal device. Background Art

[0002] In the calculation process of Optical Proximity Correction (OPC), the sampling of signals is discrete, and the signals between sampling points need to be obtained through an interpolation algorithm. Therefore, the signal values of polygon edges are mostly the results of interpolation calculations. The range of changes in the critical dimension (CD) at each sampling point is called the shift variance. The shift variance is one of the important indicators for evaluating the stability of the model and the consistency of OPC results.

[0003] For a single polygon, the prior art is to sample array positions and calculate the critical dimensions at multiple array positions to obtain the shift variance.

[0004] However, in order to calculate the critical dimension, a large amount of calculation is required. When the number of polygons to be tested is very large, the calculation time will become very long and the calculation efficiency is low. Summary of the Invention

[0005] The present invention provides a method and apparatus for determining offset error, which can improve the efficiency of calculating offset error during optical proximity correction.

[0006] To solve the above technical problems, an embodiment of the present invention provides a method for determining offset error. The method for determining offset error includes: obtaining a layout to be simulated, and setting a simulation frame based on the shape and size of a target geometric figure in the layout, where the size of the simulation frame in the width direction of the target geometric figure is greater than the width of the target geometric figure; starting from a starting position, moving the simulation frame along a preset route, where the starting position is the coincidence point of the center point of the target geometric figure and the center point of the simulation frame, and the preset route is located in the target geometric figure, and at least a part of the preset route has an included angle with the horizontal direction, and the included angle is greater than a preset angle and less than 90 degrees; based on each moving operation, calculating a characteristic dimension corresponding to the moved simulation frame; and determining the offset error of the layout according to multiple characteristic dimensions calculated by multiple moving operations.

[0007] Optionally, the included angle between the preset route and the horizontal direction of the target geometric figure is 45 degrees.

[0008] Optionally, the preset route includes a first route along the horizontal direction and a second route having an angle with the horizontal direction, or the preset route includes a third route along the vertical direction and a fourth route having an angle with the horizontal direction.

[0009] Optionally, the step of obtaining the layout to be simulated and setting the simulation box based on the shape and size of the target geometric figure in the layout includes: determining the target geometric figure in the layout, where the target geometric figure is a quadrilateral; obtaining the width of the target geometric figure; determining the corresponding first side of the simulation box and the second side opposite to the first side based on the width of the target geometric figure and the set boundary distance; determining the third side of the simulation box and the fourth side opposite to the third side based on the width of the target geometric figure.

[0010] Optionally, calculating the characteristic dimension corresponding to the moved simulation box includes: using the target geometric figure within the moved simulation box, other figures of the layout within the moved simulation box, and the optical parameters of a preset optical model to calculate the signal values at each calculation position; calculating the characteristic dimension based on the signal values at each calculation position.

[0011] Optionally, determining the offset error of the layout based on the multiple characteristic dimensions calculated from multiple moving operations includes: selecting the maximum value and the minimum value from the multiple characteristic dimensions; calculating the difference between the maximum value and the minimum value as the offset error.

[0012] Optionally, the type of the target geometric figure is of 1D type.

[0013] Optionally, the number of the first routes in the preset route is one or more, the number of the second routes is one or more, the number of the third routes in the preset route is one or more, and the number of the fourth routes is one or more.

[0014] To solve the above technical problems, an embodiment of the present invention also discloses an offset error determination device, which includes: an acquisition module, which acquires a layout to be simulated and sets a simulation frame based on the shape and size of a target geometric figure in the layout, wherein the size of the simulation frame in the width direction of the target geometric figure is greater than the width of the target geometric figure; a movement module, which is used to start from a starting position and move the simulation frame along a preset route, wherein the starting position is the coincidence point of the center point of the target geometric figure and the center point of the simulation frame, and the preset route is located in the target geometric figure, and at least a part of the preset route has an included angle with the horizontal direction, and the included angle is greater than a preset angle and less than 90 degrees; a feature size calculation module, which is used to calculate the feature size corresponding to the moved simulation frame based on each movement operation; an offset error calculation module, which is used to determine the offset error of the layout according to the multiple feature sizes calculated by multiple movement operations.

[0015] An embodiment of the present invention also discloses a computer-readable storage medium, on which a computer program is stored, and when the computer program is run by a processor, it executes the steps of the offset error determination method.

[0016] An embodiment of the present invention also discloses a terminal device, which includes a memory and a processor. A computer program that can run on the processor is stored on the memory, and when the processor runs the computer program, it executes the steps of the offset error determination method.

[0017] Compared with the prior art, the technical solution of the embodiment of the present invention has the following beneficial effects:

[0018] In the technical solution of the present invention, a simulation frame is set according to the target geometric figure to be measured, and the simulation frame is moved along a preset route. Each movement operation can calculate a corresponding feature size, and the offset error can be calculated according to the multiple feature sizes calculated by multiple movement operations. Since at least a part of the preset route for moving the simulation frame in the technical solution of the present invention has an included angle with the horizontal direction, multiple feature sizes can be calculated while reducing the number of movements of the simulation frame, thereby reducing the calculation time and improving the calculation efficiency. In addition, when the simulation frame moves from the starting position to the end position of the preset route, the movement range can cover each coordinate value in the horizontal direction and each coordinate value in the vertical direction, thereby ensuring the comprehensiveness of the feature size and further ensuring the accuracy of the offset error calculation.

[0019] Further, the included angle between the preset route and the horizontal direction is 45 degrees. When the included angle between the preset route and the horizontal direction is 45 degrees, the route for the simulation frame to move is the shortest and the number of movements is the least, thereby further improving the calculation efficiency of the offset error. Description of the Drawings

[0020] Figure 1 is a flowchart of a method for determining offset error in an embodiment of the present invention;

[0021] Figure 2 and Figure 3 is a schematic diagram of the positional relationship between the simulation frame and the target geometric figure in an embodiment of the present invention;

[0022] Figures 4 to 6 is a schematic diagram of multiple preset routes in an embodiment of the present invention;

[0023] Figure 7 is a schematic structural diagram of an offset error determination device in an embodiment of the present invention. Detailed implementation manners

[0024] As described in the background art, in order to calculate the key dimensions at multiple positions, a large amount of calculations need to be performed. When the number of polygons to be tested is very large, the calculation time will become very long and the calculation efficiency is low. Exemplarily, the key dimensions at multiple positions can be obtained by collecting multiple points in the horizontal and vertical directions.

[0025] Since at least a part of the preset route of the moving simulation frame in the technical solution of the present invention has an angle with the horizontal direction, multiple feature sizes can be calculated while reducing the number of movements of the simulation frame, thereby reducing the calculation time and improving the calculation efficiency. Specifically, compared with the prior art where the center point of the simulation frame moves along the horizontal and vertical directions to form a dot matrix, and each point in the dot matrix corresponds to one calculation, in this application, the center point of the simulation frame only moves along the route in the preset direction in the dot matrix. In this way, the number of points that the simulation frame moves is reduced, and the number of calculations is also reduced. In addition, when the simulation frame moves from the starting position to the end position of the preset route, the moving range can cover all coordinate values in the horizontal direction and all coordinate values in the vertical direction, thereby ensuring the comprehensiveness of the feature sizes and further ensuring the accuracy of the offset error calculation.

[0026] The feature size referred to in the embodiments of the present invention may also be referred to as the critical dimension (CD), or any other implementable name. The embodiments of the present invention do not limit this.

[0027] To make the above objects, features, and advantages of the present invention more obvious and understandable, the following will describe the specific embodiments of the present invention in detail with reference to the accompanying drawings.

[0028] Figure 1 is a flowchart of a method for determining offset error in an embodiment of the present invention.

[0029] The offset error determination method in the embodiments of the present invention can be used on the terminal device side, that is, each step of the method can be executed by the terminal device. The terminal device can specifically be a mobile phone, a computer, a tablet computer, etc.

[0030] Specifically, the offset error determination method may include the following steps:

[0031] Step 101: Obtain the layout to be simulated, and set a simulation box based on the shape and size of the target geometric figure in the layout, where the size of the simulation box in the width direction of the target geometric figure is greater than the width of the target geometric figure;

[0032] Step 102: Starting from the starting position, move the simulation box along a preset route, where the starting position is the coincidence point of the center point of the target geometric figure and the center point of the simulation box, and at least a part of the preset route has an included angle with the horizontal direction, and the included angle is greater than a preset angle and less than 90 degrees;

[0033] Step 103: Based on each movement operation, calculate the characteristic size corresponding to the moved simulation box;

[0034] Step 104: Determine the offset error of the layout according to the multiple characteristic sizes calculated by multiple movement operations.

[0035] It should be noted that the sequence numbers of the steps in this embodiment do not represent the limitation of the execution sequence of each step.

[0036] It can be understood that in specific implementation, the offset error determination method can be implemented in the form of a software program, and the software program runs in a processor integrated inside a chip or a chip module.

[0037] In this embodiment, the layout to be simulated may include multiple geometric figures, and when calculating the offset error, it is calculated separately for each geometric figure. Therefore, it is necessary to select a target geometric figure in the layout.

[0038] In a non-limiting embodiment, the type of the target geometric figure in the embodiments of the present invention is of the 1D type. That is to say, the target geometric figure is a quadrilateral, the quadrilateral has a long side and a short side, and the long side of the quadrilateral is greater than or much greater than the short side.

[0039] It should be noted that first, the target geometry (to be simulated) in the layout needs to be located, that is, the geometry to be measured. In the embodiments of the present invention, by importing a Comma-Separated Values (CSV) file, the geometry to be measured is determined according to the coordinate positions given in the CSV file, and then this geometry is the target geometry. Specifically, the positions given in the CSV file and the positions within a certain range near the calculation direction are the specific positions to be calculated.

[0040] In the specific implementation of step 101, a simulation frame is set based on the shape and size of the target geometry. Since the characteristic dimension required for calculating the offset error actually reflects the width of the short side of the quadrilateral, it is necessary to ensure that the simulation frame can cover the width of the target geometry, that is, the dimension of the simulation frame along the width direction of the target geometry is greater than the width of the target geometry. Specifically, according to the diffraction principle in the optical principle, the geometries within a certain range around the target geometry will also affect the signal intensity at the target geometry, so it is necessary for the simulation frame to cover the graphic area within a certain range centered on the target geometry. For example, if the target geometry is a quadrilateral, the distance between the boundary of the simulation frame and the long side of the quadrilateral (the long side of the target geometry closest to the boundary of the simulation frame) is greater than or equal to 1024 nm, and the distances of the other two sides of the simulation frame can be directly determined using the distances of these two sides of the simulation frame.

[0041] Specifically, reference can be made together to Figure 2 , Figure 2 In the figure, reference numeral 201 represents the simulation frame, and the simulation frame 201 is a square. Among them, the simulation frame 201 can cover the short-side width of the target geometry 202, and the long side of the target geometry 202 can extend beyond the simulation frame 201. At the starting position of the preset route, the center point of the simulation frame 201 coincides with the center point of the target geometry 202.

[0042] In a specific implementation manner of step 101, the target geometry in the layout is determined, where the target geometry is a quadrilateral; the first side of the simulation frame is determined based on the first side along the length direction of the target geometry and the set boundary distance; it is determined that the simulation frame is a quadrilateral, and the simulation frame is determined based on the first side.

[0043] Reference is made together to Figure 2 , in order to avoid the interference of other geometries around the target geometry, the distance between the boundary of the simulation frame and the boundary of the target geometry should be greater than the set boundary distance d1, such as 1024 nanometers (nm). The larger the set boundary distance d1, the higher the calculation accuracy.

[0044] Specifically, the position of the target geometric figure 202 is determined. Then, according to the set boundary distance, the first side a of the simulation frame 201 can be determined. The first side a is the side parallel to the long side of the target geometric figure 202. Furthermore, the simulation frame 201 is determined in combination with the shape and size of the simulation frame 201. Among them, the shape and size of the simulation frame 201 can be preset.

[0045] As Figure 2 shown, the shape of the simulation frame 201 is a square. After the position of the first side a is determined, the side length of the simulation frame is also determined, and then the position of the simulation frame 201 can be determined.

[0046] In an implementation manner of the present invention, please refer to Figure 3 together. The target geometric figure 202 is a rectangle. After the target geometric figure 202 is determined through the ASD file, the short side width of the target geometric figure 202 (the distance between the two long sides of the geometric figure) can be determined. Taking one long side of the target geometric figure 202 as an example, one side of the simulation frame 201 and the other opposite side, that is, the first side a1 and the second side a2, are determined by the sum of half of the short side width and the set boundary distance d1. Its height (side length) can be determined by the long side height of the target geometric figure 202. As Figure 3 shown, the height (side length) can be less than the long side height of the target geometric figure 202. Based on the long side height of the first side a1 and the second side a2, the third side a3 of the simulation frame 202 and the fourth side a4 opposite to the third side a3 are determined. It can also be said that the distance between the first side and the second side is determined as the length of the third side and the fourth side.

[0047] It should be noted that the simulation frame can also be in the shape of a rectangle or other polygons, such as a pentagon or a hexagon, etc., as long as the requirements of the above set boundary distance are met. The embodiments of the present invention do not limit this.

[0048] Continue to refer to Figure 1 . In the specific implementation of step 102, starting from the coincidence point of the center point of the target geometric figure and the center point of the simulation frame, the simulation frame is moved along a preset route. At least a part of the preset route has an angle with the horizontal direction, and the angle is greater than a preset angle and less than 90 degrees.

[0049] Specifically, the preset angle can be 0 degrees.

[0050] The preset route in the embodiments of the present invention has an end position. When the center point of the simulation frame moves to the end position, it will no longer move. Specifically, when moving the simulation frame, the simulation frame can be moved along the preset route at a certain interval.

[0051] In the embodiments of the present invention, the so-called horizontal direction may be a direction parallel to the short side of the target geometric figure, and the vertical direction may be a direction parallel to the long side of the target geometric figure. Or it may also be that the horizontal direction is a direction parallel to the long side of the target geometric figure, and the vertical direction may be a direction parallel to the short side of the target geometric figure.

[0052] In a non-limiting embodiment, please refer to Figure 4 . Figure 4 In, the direction indicated by the x-axis is the horizontal direction, the direction indicated by the y-axis is the vertical direction, the dotted line part indicates the preset route, the S point represents the starting position, and the T point represents the ending position. The included angle between the preset route and the horizontal direction is 45 degrees. Figure 4 The dot shown in indicates the center point of the simulation box, and the position of the center point is used to represent the change in the position of the simulation box.

[0053] In the prior art, when the simulation box can be moved from the starting position to the ending position, first move the simulation box 1 nm along the x-axis direction, and then move it 8 times along the y-axis direction, each time moving 1 nm; then move 1 nm along the x-axis direction again... and so on until moving 8 times in the x-axis direction. Each time moving to a new position in the x-axis direction, there will be 8 changes in the y-axis direction. That is to say, in the prior art, it is necessary to move the simulation box 64 times and calculate the characteristic dimensions corresponding to 81 position points. This is a more rigorous calculation method for offset error, covering a larger range of changes, and the calculated result is more credible.

[0054] In order to reduce the calculation time in this application, through the analysis of the offset error calculation process, it is limited to only this special type of 1D target geometric figure, and through a large number of actual verifications of this type of target geometric figure, it is obtained that the influence of the movement of the simulation box along the long side direction of the target geometric figure on the calculation result is very small, but it cannot be completely ignored. Therefore, it is finally decided to move the 1D type of target geometric figure along the diagonal direction.

[0055] In Figure 4 In the shown scenario, when moving the simulation box each time, the simulation box moves simultaneously in the horizontal direction and the vertical direction, for example, increasing 1 nm simultaneously on the x-axis and the y-axis. The simulation box only needs to move 8 times from the starting position to the ending position. The change range of the characteristic dimensions calculated by moving the simulation box along the diagonal basically covers the change range of the characteristic dimensions of the original 81 points. Therefore, only by calculating the characteristic dimensions when the simulation box moves along the diagonal can the offset error be obtained, thereby avoiding a large amount of redundant calculations and reducing the running time.

[0056] In another non - restrictive embodiment, the preset route includes a first route along the horizontal direction and a second route having an angle with the horizontal direction, or the preset route includes a third route along the vertical direction and a fourth route having an angle with the horizontal direction.

[0057] Specifically, the number of the first route, the second route, the third route, and the fourth route can be one or multiple. The first route and the second route can cover each coordinate value in the horizontal direction and each coordinate value in the vertical direction. Correspondingly, the third route and the fourth route can also cover each coordinate value in the horizontal direction and each coordinate value in the vertical direction.

[0058] Refer to Figure 5 simultaneously. As shown by the dashed - line part, the preset route includes a first route and a second route. The first route is parallel to the x - axis, and the angle between the second route and the x - axis is greater than 45 degrees and less than 90 degrees. Compared with the 64 times of movement required for the simulation box in the prior art, the simulation box of the embodiment of the present invention only needs to move 8 times along the first route and the second route to cover the change range of the feature sizes of the original 81 points.

[0059] It should be noted that Figure 5 the number of the first routes shown in

[0060] is one, and the number of the second routes is one. However, in the actual application scenario, the number of the first routes can be multiple, and the number of the second routes can also be multiple. The embodiment of the present invention does not limit this. Figure 6 Refer to

[0061] simultaneously. As shown by the dashed - line part, the preset route includes a third route and a fourth route. The third route is parallel to the y - axis, and the angle between the fourth route and the x - axis is greater than 0 degree and less than 45 degrees. Similar to the first route and the second route, the simulation box of the embodiment of the present invention only needs to move 8 times along the third route and the fourth route to cover the change range of the feature sizes of the original 81 points. Figure 6 It should be noted that

[0062] the number of the third routes shown in

[0063] is one, and the number of the fourth routes is one. However, in the actual application scenario, the number of the third routes can be multiple, and the number of the fourth routes can also be multiple. The embodiment of the present invention does not limit this. Figure 1 In the specific implementation of step 103, continue to refer to , based on each movement operation, calculate the feature size corresponding to the moved simulation box.

[0064] In specific implementation, a preset optical model can be pre-configured. The preset optical model is obtained by fitting with the OPC software (such as the OPC software Progen of Synopsys) based on actual measurement data, layout files, and CSV files specifying simulation positions. For example, it can be the SimStar optical model. The preset optical model, layout files, and CSV files specifying specific simulation positions in the layout are jointly used as the input of the OPC software, and the output is the feature size at a certain simulation position in the layout.

[0065] Specifically, after each movement of the simulation frame, the relative position between the center point of the simulation frame and the center point of the target geometry is different, and the signals calculated at the boundary of the target geometry are not exactly the same. Therefore, the feature sizes calculated after each movement of the simulation frame position are also different.

[0066] Specifically, after each movement of the simulation frame, the optical parameters of the preset optical model, all the graphics including the target geometry within the simulation frame, and the specific calculation positions of the target geometry provided by the CSV file are jointly used as the input. The OPC software program uses a series of equations such as the Hopkins equation to calculate the signal values within a certain range on the left and right of the target geometry at the calculation position, such as the signals within a certain distance range on the left and right of the left boundary of the quadrilateral, and the signals within a certain distance range on the left and right of the right boundary of the quadrilateral. And calculate the intersection position of the threshold and the signal. Assume the signal at the position where the signal at the left boundary of the quadrilateral intersects the threshold is x1, and the signal at the position where the signal at the right boundary of the quadrilateral intersects the threshold is x2. Then the range x2 - x1 of the signal values greater than the preset threshold is the corresponding feature size at this position, and the OPC software outputs this feature size.

[0067] It should be noted that in actual calculation, the signal may be flipped up and down. Then, the signal less than the threshold needs to be selected for calculating the feature size. The specific implementation method can refer to the foregoing embodiments and will not be elaborated here.

[0068] Continue to refer to Figure 1 , in the specific implementation of step 104, according to the multiple feature sizes calculated from multiple movement operations, determine the offset error of the layout.

[0069] In specific implementation, the maximum value and the minimum value among the multiple feature sizes can be selected, and the difference between the maximum value and the minimum value is the offset error of the target geometry.

[0070] It can be understood that in addition to calculating the difference between the maximum value and the minimum value, other methods can also be used to calculate the offset error, such as calculating the average value of multiple feature sizes, etc. The embodiments of the present invention do not limit this.

[0071] Embodiments of the present invention can calculate multiple characteristic dimensions while reducing the number of movements of the simulation frame, thereby reducing the calculation time and improving the calculation efficiency.

[0072] Please refer to Figure 7 for a schematic structural diagram of a device for determining offset error disclosed in an embodiment of the present invention.

[0073] Figure 7 The offset error determination device 60 shown in the figure may include:

[0074] An acquisition module 601, which acquires a layout to be simulated and sets a simulation frame based on the shape and size of a target geometric figure in the layout, wherein the size of the simulation frame in the width direction of the target geometric figure is greater than the width of the target geometric figure;

[0075] A movement module 602, which is used to move the simulation frame along a preset route starting from a starting position, wherein the starting position is the coincidence point of the center point of the target geometric figure and the center point of the simulation frame, and the preset route is located in the target geometric figure, and at least a part of the preset route has an included angle with the horizontal direction, and the included angle is greater than a preset angle and less than 90 degrees;

[0076] A characteristic dimension calculation module 603, which is used to calculate the characteristic dimension corresponding to the moved simulation frame based on each movement operation;

[0077] An offset error calculation module 604, which is used to determine the offset error of the layout according to multiple characteristic dimensions calculated by multiple movement operations.

[0078] For more content about the working principle and working mode of the offset error determination device 60, reference can be made to Figures 1 to 6 for the relevant description therein, which will not be elaborated here.

[0079] In specific implementation, the above offset error determination device may correspond to a chip with a calculation function in a terminal device, such as an SOC (System-On-a-Chip), a baseband chip, etc.; or correspond to a device including a chip module with a calculation function; or correspond to a chip module with a chip having a data processing function, or correspond to a terminal device.

[0080] Regarding each device and product described in the above embodiments, each module / unit included therein can be a software module / unit, a hardware module / unit, or can be partially a software module / unit and partially a hardware module / unit. For example, for each device and product applied to or integrated into a chip, each module / unit included therein can be implemented in the form of hardware such as circuits, or at least some of the modules / units can be implemented in the form of software programs that run on a processor integrated inside the chip, and the remaining (if any) part of the modules / units can be implemented in the form of hardware such as circuits; for each device and product applied to or integrated into a chip module, each module / unit included therein can be implemented in the form of hardware such as circuits, and different modules / units can be located in the same component (such as a chip, a circuit module, etc.) or different components of the chip module, or at least some of the modules / units can be implemented in the form of software programs that run on a processor integrated inside the chip module, and the remaining (if any) part of the modules / units can be implemented in the form of hardware such as circuits; for each device and product applied to or integrated into a terminal, each module / unit included therein can be implemented in the form of hardware such as circuits, and different modules / units can be located in the same component (such as a chip, a circuit module, etc.) or different components inside the terminal, or at least some of the modules / units can be implemented in the form of software programs that run on a processor integrated inside the terminal, and the remaining (if any) part of the modules / units can be implemented in the form of hardware such as circuits.

[0081] An embodiment of the present invention also discloses a storage medium. The storage medium is a computer-readable storage medium, on which a computer program is stored, and when the computer program runs, it can execute Figure 1 the steps of the method shown in . The storage medium can include ROM, RAM, a magnetic disk, an optical disc, etc. The storage medium can also include non-volatile memory or non-transitory memory, etc.

[0082] An embodiment of the present invention also discloses a terminal device. The terminal device can include a memory and a processor, and a computer program that can run on the processor is stored on the memory. When the processor runs the computer program, it can execute Figure 1 the steps of the method shown in . The user equipment includes, but is not limited to, terminal devices such as mobile phones, computers, and tablet computers.

[0083] It should be understood that the term "and / or" in this text is merely a description of the association relationship between associated objects, indicating that there can be three relationships. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. Additionally, the character " / " in this text indicates that the associated objects before and after are in an "or" relationship.

[0084] In the embodiments of this application, "a plurality of" means two or more.

[0085] In the embodiments of this application, the descriptions such as first and second are only for illustration and to distinguish the described objects, without any order, nor do they represent a special limitation on the number of devices in the embodiments of this application, and cannot constitute any limitation to the embodiments of this application.

[0086] In the embodiments of this application, "connection" refers to various connection methods such as direct connection or indirect connection to achieve communication between devices, and this application does not make any limitation on this.

[0087] It should be understood that in the embodiments of this application, the processor can be a central processing unit (CPU for short), and this processor can also be other general-purpose processors, digital signal processors (DSP for short), application specific integrated circuits (ASIC for short), field programmable gate arrays (FPGA for short), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor can be a microprocessor or this processor can also be any conventional processor, etc.

[0088] It should also be understood that the memory in the embodiments of the present application can be a volatile memory or a non-volatile memory, or can include both volatile and non-volatile memories. Among them, the non-volatile memory can be a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory. The volatile memory can be a random access memory (RAM), which is used as an external cache. By way of example but not limitation, many forms of random access memory (RAM) are available, such as static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchlink dynamic random access memory (SLDRAM), and direct rambus random access memory (DR RAM).

[0089] The above embodiments can be implemented in whole or in part by software, hardware, firmware, or any other combination. When implemented using software, the above embodiments can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions or computer programs. When the computer instructions or computer programs are loaded or executed on a computer, the processes or functions described in the embodiments of the present application are generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions can be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center in a wired or wireless manner. The computer-readable storage medium can be any available medium that can be accessed by a computer or a data storage device such as a server or a data center that contains one or more collections of available media.

[0090] It should be understood that in various embodiments of the present application, the sequence numbers of the above processes do not imply the order of execution, and the execution order of each process should be determined by its function and internal logic, and should not constitute any limitation to the implementation process of the embodiments of the present application.

[0091] In several embodiments provided by the present application, it should be understood that the disclosed methods, devices, and systems can be implemented in other ways. For example, the device embodiments described above are merely illustrative; for example, the division of the units is only a logical function division, and there can be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed couplings or direct couplings or communication connections to each other can be through some interfaces, and the indirect couplings or communication connections of the devices or units can be in electrical, mechanical, or other forms.

[0092] The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0093] In addition, in each embodiment of the present invention, the functional units can be integrated into one processing unit, or each unit can be physically included separately, or two or more units can be integrated into one unit. The above integrated units can be implemented in the form of hardware or in the form of a combination of hardware and software functional units.

[0094] The above integrated units implemented in the form of software functional units can be stored in a computer-readable storage medium. The above software functional units stored in a storage medium include several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to execute some steps of the methods described in each embodiment of the present invention.

[0095] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be subject to the scope defined by the claims.

Claims

1. A method for determining an offset error, characterized in that, Including: Obtain the layout to be simulated, and set a simulation box based on the shape and size of the target geometric figure in the layout, where the size of the simulation box in the width direction of the target geometric figure is greater than the width of the target geometric figure; Starting from the starting position, move the simulation box along a preset route, where the starting position is the coincidence point of the center point of the target geometric figure and the center point of the simulation box, and the preset route is located in the target geometric figure, and at least a part of the preset route has an included angle with the horizontal direction, and the included angle is greater than a preset angle and less than 90 degrees; Based on each movement operation, calculate the characteristic size corresponding to the moved simulation box; Determine the offset error of the layout according to the multiple characteristic sizes calculated by multiple movement operations, and the type of the target geometric figure is 1D type.

2. The offset error determination method according to claim 1, wherein The included angle between the preset route and the horizontal direction of the target geometric figure is 45 degrees.

3. The offset error determination method according to claim 1, characterized in that The preset route includes a first route along the horizontal direction and a second route having an included angle with the horizontal direction, or the preset route includes a third route along the vertical direction and a fourth route having an included angle with the horizontal direction.

4. The offset error determination method according to claim 1, wherein The step of obtaining the layout to be simulated and setting a simulation box based on the shape and size of the target geometric figure in the layout includes: Determine the target geometric figure in the layout, where the target geometric figure is a quadrilateral; Obtain the short side width of the target geometric figure; Based on the short side width of the target geometric figure and the set boundary distance, determine the corresponding first side of the simulation box and the second side opposite to the first side; Based on the long side height of the target geometric figure, determine the third side of the simulation box and the fourth side opposite to the third side.

5. The offset error determination method according to claim 1, wherein The calculation of the characteristic size corresponding to the moved simulation box includes: Using the target geometric figure in the moved simulation box, other figures of the layout in the moved simulation box, and the optical parameters of a preset optical model, calculate the signal values at each calculation position; Calculate the characteristic size according to the signal values at each calculation position.

6. The offset error determination method according to claim 1, characterized in that The determination of the offset error of the layout according to the multiple characteristic sizes calculated by multiple movement operations includes: Select the maximum value and the minimum value among the multiple characteristic sizes; Calculate the difference between the maximum value and the minimum value as the offset error.

7. The offset error determination method according to any one of claims 1 to 6, characterized in that The target geometric figure and the simulation box are rectangles.

8. An offset error determination device, characterized in that, Including: An acquisition module, which acquires the layout to be simulated and sets a simulation box based on the shape and size of the target geometric figure in the layout, where the size of the simulation box in the width direction of the target geometric figure is greater than the width of the target geometric figure; A movement module, which is used to move the simulation box along a preset route starting from the starting position, where the starting position is the coincidence point of the center point of the target geometric figure and the center point of the simulation box, and the preset route is located in the target geometric figure, and at least a part of the preset route has an included angle with the horizontal direction, and the included angle is greater than a preset angle and less than 90 degrees; A feature size calculation module, configured to calculate the feature size corresponding to the simulated box after movement based on each movement operation; An offset error calculation module, configured to determine the offset error of the layout according to a plurality of feature sizes obtained by calculating a plurality of movement operations, wherein the type of the target geometric figure is a 1D type.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is run by a processor, it executes the steps of the offset error determination method according to any one of claims 1 to 7.

10. A terminal device, comprising a memory and a processor, wherein a computer program capable of running on the processor is stored on the memory, characterized in that, When the processor runs the computer program, it executes the steps of the offset error determination method according to any one of claims 1 to 7.

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