Position determination device, control method of position determination device, and storage medium

Abstract

The position determination device, the control method of the position determination device, and the storage medium of the present application can determine the position of the detection object with high precision even during movement of at least one of the detection object and the detection device. The position determination device (10) determines the position (Pw) of the workpiece (40) based on the position of the imaging device (33) at the time of detection (Td) and a detection deviation amount (Qd) calculated based on an imaging image (Im) imaged during movement of the imaging device (33).

Description

TECHNICAL FIELD

[0001] The present application relates to a position determination device that determines a position of a detection object, a control method of a position determination device, and a storage medium. BACKGROUND

[0002] In the past, for a control device that outputs an instruction value generated in accordance with a target track to a servo control system in each control cycle to control the servo control system, there has been an attempt to high-precisionize control by the servo control system by taking into account a response delay time of the servo control system.

[0003] For example, Patent Literature 1 below discloses a control device that performs the following processing in order to suppress a track deviation caused by a deviation in response delay time between multiple axes (multiple servo motors). That is, a control device is disclosed that adjusts an instruction timing to each servo driver in accordance with a response delay time of each servo motor.

[0004] [Related Art Literature]

[0005] [Patent Literature]

[0006] [Patent Literature 1] Japanese Patent Application Publication No. 2017-102616 SUMMARY

[0007] [Problems to be Solved by the Invention]

[0008] If the detection position is made to coincide with the position of the detection object (for example, the center position of the detection object) during movement of at least one of the detection object and the detection device using the control device, the position of the detection object should be able to be determined only from the detection position.

[0009] However, even if the response delay time of the servo control system is taken into account, it is difficult to make the detection position coincide with the position of the detection object during movement of at least one of the detection object and the detection device. Therefore, during movement of at least one of the detection object and the detection device, the position of the detection object cannot be determined only from the detection position.

[0010] An object of an embodiment of the present application is to determine the position of the detection object with high precision even during movement of at least one of the detection object and the detection device.

[0011] [Technical Means to Solve the Problems]

[0012] To solve the problem, a position determination device of an embodiment of the present application determines a position of an object of detection, the position determination device including: an instruction section that outputs an instruction value calculated based on a target track to a servo control system that controls a position of at least one of a detection device and the object of detection, the target track including a target position that is a desired detection position set in advance as a position at which the object of detection should be; an acquisition section that acquires a detection result of the detection device at a detection timing, the detection timing being a timing during movement of at least one of the detection device and the object of detection, and being a timing at which a target position of the servo control system calculated taking into account a response delay time of the servo control system coincides with the desired detection position; a detection deviation amount calculation section that calculates a detection deviation amount, which is an amount of deviation of a detection position from a position of the object of detection, from an amount of deviation of a reference position from the position of the object of detection in the detection result, the detection position being a position corresponding to the reference position; a detection position calculation section that calculates the detection position from a position of the detection device at the detection timing; and a position determination section that corrects the detection position using the detection deviation amount, thereby determining the position of the object of detection.

[0013] According to the structure, the position determination device calculates the detection deviation amount, which is an amount of deviation of the detection position from the position of the object of detection, from the detection result. Also, the position determination device calculates the detection position from a position of the detection device at the detection timing. Also, the position determination device determines the position of the object of detection from the detection deviation amount and the detection position.

[0014] (High precision of position detection)

[0015] Therefore, the position determination device has the following effect: even if the position of the object of detection and the detection position do not coincide at the detection timing, the position of the object of detection can be determined with high precision using the amount of deviation of the two.

[0016] (High precision and high speed of detection result)

[0017] Also, according to the structure, the position determination device calculates the detection deviation amount from the detection result at the detection timing at which the target position of the servo control system calculated taking into account the response delay time of the servo control system coincides with the desired detection position.

[0018] Here, if the object of detection is not in a range in which the detection device can detect the object of detection at a timing at which the detection device performs detection, the detection deviation amount cannot be calculated from the detection result.

[0019] Therefore, in order to avoid the situation that "at the timing when the detection is performed by the detection device, the detection object is not in the range where the detection device can detect the detection object", the position determination device acquires the detection result at the detection timing.

[0020] For example, in a case where the servo control system only moves the detection device, the detection object does not move, and the detection object is placed in advance at the expected detection position or at a position sufficiently close to the expected detection position, the position determination device performs the following processing. That is, the position determination device sets the timing at which the target position of the servo control system calculated in consideration of the response delay time of the servo control system that controls the position of the detection device coincides with the expected detection position as the detection timing.

[0021] Here, it is generally considered that, by taking into account the response delay time of the servo control system, the "target position of the servo control system at each timing" will coincide with the "feedback position of the servo control system at each timing", or the amount of deviation between the two will become sufficiently small. Also, the feedback position of the servo control system that controls the position of the detection device can be regarded as the position of the detection device. Therefore, the "position of the detection device at each timing moved by the servo control system" should coincide with the "target position of the servo control system at each timing calculated in consideration of the response delay time of the servo control system", or the amount of deviation between the two should become sufficiently small.

[0022] As described above, at the detection timing, the "position of the detection device moved by the servo control system" should coincide with the expected detection position, or the amount of deviation between the two should become sufficiently small. Also, as described above, the detection object is placed in advance at the expected detection position or at a position sufficiently close to the expected detection position. Therefore, at the detection timing, the "position of the detection device moved by the servo control system" coincides with the position of the detection object, or the amount of deviation between the two becomes sufficiently small.

[0023] As a result, the position determination device can avoid the situation that "at the timing when the detection is performed by the detection device, the detection object is not in the range where the detection device can detect the detection object".

[0024] Further, for example, in a case where the detection device is not moved by the servo control system, and the detection device is placed in advance at the expected detection position, or is placed at a position sufficiently close to the expected detection position, the position determination device performs the following processing. That is, the position determination device sets, as the detection timing, a timing at which the target position of the servo control system, which is calculated taking into account the response delay time of the servo control system that controls the position of the detection object, coincides with the expected detection position.

[0025] As described above, it is generally considered that, by taking into account the response delay time of the servo control system, the target position of the servo control system at each timing coincides with the feedback position of the servo control system at each timing, or the amount of deviation between the two becomes sufficiently small. Further, the feedback position of the servo control system that controls the position of the detection object can be regarded as the position of the detection object. Therefore, the position of the detection object moved by the servo control system at each timing should coincide with the target position of the servo control system at each timing calculated taking into account the response delay time of the servo control system, or the amount of deviation between the two should become sufficiently small.

[0026] As described above, at the detection timing, the position of the detection object moved by the servo control system should coincide with the expected detection position, or the amount of deviation between the two should become sufficiently small. Further, as described above, the detection device is placed in advance at the expected detection position, or is placed at a position sufficiently close to the expected detection position. Therefore, at the detection timing, the position of the detection object moved by the servo control system coincides with the position of the detection device, or the amount of deviation between the two becomes sufficiently small.

[0027] As a result, the position determination device can avoid a situation in which the detection object is not in a range in which the detection device can detect the detection object at a timing at which the detection device performs detection.

[0028] Further, for example, in a case where the detection device is moved by a first servo control system, and the detection object is moved by a second servo control system, the position determination device sets, as the detection timing, a timing at which the target position of the first servo control system and the target position of the second servo control system each calculated taking into account the response delay time of each of the first servo control system and the second servo control system coincide with the expected detection position.

[0029] As described above, it is generally considered that the target position of the servo control system at each timing coincides with the feedback position of the servo control system at each timing, or the amount of deviation between the two becomes sufficiently small, by taking into account the response delay time of the servo control system.

[0030] Further, the feedback position of the first servo control system that controls the position of the detection device can be regarded as the position of the detection device. Also, the feedback position of the second servo control system that controls the position of the detection object can be regarded as the position of the detection object.

[0031] Therefore, the position of the detection device during movement at each timing should coincide with the target position of the first servo control system at each timing calculated taking into account the response delay time of the first servo control system, or the amount of deviation between the two should become sufficiently small. Also, the position of the detection object during movement at each timing should coincide with the target position of the second servo control system at each timing calculated taking into account the response delay time of the second servo control system, or the amount of deviation between the two should become sufficiently small.

[0032] As described above, at the detection timing, the position of the detection device during movement, the position of the detection object during movement, and the intended detection position should coincide, or the amount of deviation between the three should become sufficiently small.

[0033] As a result, the position determination device can avoid a situation in which the detection object is not in a range in which the detection device can detect the detection object at the timing at which the detection device performs detection.

[0034] The position determination device acquires the detection result at the detection timing, which is a timing during movement of at least one of the detection device and the detection object, and a timing at which the position of the detection object coincides with the position of the detection device, or the amount of deviation between the two becomes sufficiently small.

[0035] Here, the position of the detection device at the detection timing corresponds to the detection position, and therefore it can be considered that the amount of deviation between the reference position and the position of the detection object in the detection result at the detection timing is sufficiently small. Also, if it is known in advance that the amount of deviation between the reference position and the position of the detection object in the detection result is sufficiently small, it is possible to make the analysis of the detection result more accurate compared to a case in which the amount of deviation between the two cannot be predicted or the amount of deviation between the two is predicted to be large in the detection result.

[0036] Therefore, the position determination device can acquire the detection result at the detection time that enables high-precision analysis, i.e., can highly accurately calculate the detection deviation amount from the detection result at the detection time.

[0037] Further, the position determination device calculates the detection deviation amount from the detection result detected by the detection device during movement of at least one of the detection object and the detection device. Therefore, compared to a case where the detection device performs detection after movement of the detection object and the detection device is stopped to generate the detection result, the position determination device can acquire the detection result at high speed, and as a result, can speed up calculation of the detection deviation amount.

[0038] (High-precision and high-speed of position determination of detection object)

[0039] As described thus far, the position determination device can acquire the detection result that enables high-precision analysis at high speed, and can highly accurately calculate the detection deviation amount from the detection result at high speed. Further, the position determination device determines the position of the detection object from the calculated detection deviation amount and the detection position.

[0040] Therefore, the position determination device has the effect of being able to determine the position of the detection object at high speed and high precision.

[0041] The position determination device of an embodiment of the present application can also communicate with the servo control system at each control period, and in a case where the position of the detection device is controlled by the servo control system, the detection position calculation section calculates the position of the detection device at the detection time by interpolation calculation from a feedback position of the servo control system that controls the position of the detection device at each control period.

[0042] According to the structure, the position determination device calculates the feedback position of the servo control system that controls the position of the detection device at the detection time by interpolation calculation from the feedback position of the servo control system at each control period.

[0043] For example, in a case where n is set to "an integer of 0 or more" and the detection timing is a timing between the nth control cycle and the (n+1)th control cycle, the position determination device calculates the feedback position of the servo control system at the detection timing as follows. That is, the position determination device calculates the feedback position of the servo control system at the detection timing from the feedback position of the servo control system at the nth control cycle and the feedback position of the servo control system at the (n+1)th control cycle.

[0044] Therefore, the position determination device has an effect that the feedback position of the servo control system at the detection timing can be calculated with high precision even in a case where the detection timing is not an integral multiple of the communication cycle of the servo control system, i.e., the control cycle.

[0045] The position determination device of an embodiment of the present application can also output command values that take into account the response delay times of a plurality of servo control systems that are synchronized with each other, with respect to the plurality of servo control systems, respectively.

[0046] According to the configuration, the position determination device outputs command values that take into account the response delay times of a plurality of servo control systems that are synchronized with each other, with respect to the plurality of servo control systems, respectively.

[0047] Therefore, the position determination device has an effect that the plurality of servo control systems can be controlled in a synchronized state, and thus high-precision position control of the workpiece can be achieved.

[0048] The position determination device of an embodiment of the present application can also specify, in a control signal that is transmitted to a communication control device in each control cycle, a detection instruction timing at which the detection timing is corrected in consideration of the response delay time of the detection device, the communication control device communicating with a detection control device that controls a detection operation performed by the detection device, and by causing the communication control device to perform output of a detection instruction to the detection control device at the detection instruction timing, the detection device detects the detection object at the detection timing.

[0049] According to the configuration, the position determination device calculates a timing at which the detection timing is corrected in consideration of the response delay time of the detection device, i.e., a detection instruction timing. Also, the position determination device specifies the detection instruction timing in the control signal that is output to the communication control device in each control cycle.

[0050] The communication control device that receives the control signal transmits the detection instruction to the detection control device at the detection instruction timing, and the detection control device that receives the detection instruction causes the detection device to detect the detection object. Thus, the timing at which the detection device detects the detection object becomes the timing at which the detection instruction timing is delayed by the response delay time of the detection device, that is, the detection timing.

[0051] Here, if the detection device is to be caused to perform detection without taking into account the response delay time of the detection device, the timing at which the detection device actually performs detection is delayed from the timing at which the detection device is instructed to perform detection by the response delay time of the detection device.

[0052] Thus, the position determination device calculates the detection instruction timing that is corrected from the detection timing in accordance with the response delay time of the detection device. Also, the position determination device specifies the detection instruction timing as the timing at which the detection device is instructed to perform detection.

[0053] Thus, the position determination device has the effect of being able to cause the detection device to perform detection at the detection timing by specifying the detection instruction timing that takes into account the response delay time of the detection device as the timing at which the detection device is instructed to perform detection.

[0054] Also, the position determination device specifies the detection instruction timing in the control signal that the position determination device transmits every control period, for example, the position determination device specifies the detection instruction timing in the control signal of the control period that precedes the detection instruction timing.

[0055] Thus, the position determination device has the effect of being able to detect the detection object at the detection timing even if the detection instruction timing is not an integral multiple of the communication period of the communication control device, that is, the control period, by specifying the detection instruction timing in the control signal.

[0056] The position determination device according to an embodiment of the present application can also be such that the detection device is an imaging device, and the detection deviation calculation section calculates the detection deviation in accordance with the deviation of the reference position in the captured image from the detection object in the captured image that is captured by the imaging device.

[0057] According to the structure, the position determination device calculates the detection deviation in accordance with the deviation of the reference position in the captured image from the position of the detection object in the captured image. Also, the position determination device corrects the detection position in accordance with the detection deviation, thereby determining the position of the detection object.

[0058] Here, there is known an image analysis technique that determines a position and the like of a photographed object (a detection object) in a photographed image at high speed and with high precision.

[0059] Therefore, the position determination device has an effect that high-speed and high-precision position determination of the detection object is achieved by using the detection deviation amount and the detection position that are calculated at high speed and with high precision from the photographed image.

[0060] Also, as described above, at the detection timing, the position of the detection object and the position of the detection device become coincident, or the amount of deviation of both becomes sufficiently small. Therefore, for example, in a case where a central position of the photographed image is set as the reference position, the detection object will be disposed at substantially the center in the photographed image.

[0061] By using the photographed image in which the detection object is disposed at substantially the center, the position determination device can reduce a check region for determining the position of the detection object in the photographed image, compared to a case where the photographed image in which the detection object is not disposed at substantially the center is used. Therefore, the position determination device can achieve high-speed of image analysis processing required for detecting the detection object from the photographed image.

[0062] Also, in the photographed image, the detection object is disposed at substantially the center, so the position determination device can increase a proportion of a region in which the detection object is photographed in the entire photographed image, compared to the photographed image in which the detection object is not disposed at substantially the center. That is, the position determination device can generate the photographed image in which the detection object is photographed at a magnification. Therefore, the position determination device can perform high-precision image analysis on the photographed image in which the detection object is photographed at a magnification.

[0063] Therefore, the position determination device has an effect that high-speed and high-precision image analysis of the photographed image is achieved, and high-speed and high-precision position control of the detection object is achieved by using a result of the image analysis.

[0064] In one embodiment of the present invention, the position determination device can also sequentially determine the positions of multiple detection objects. A reference displacement is calculated based on the difference between a first expected detection position and a second expected detection position. The first expected detection position is the position where a first detection object, one of the multiple detection objects, should be located. The second expected detection position is the position where a second detection object, whose position should be determined after the first detection object, should be located. The position obtained by adding the reference displacement to the position of the first detection object determined by the position determination unit is set as the corrected second expected detection position. The moment when the expected position of at least one of the second detection object and the detection device coincides with the corrected second expected detection position is set as the detection time for detecting the second detection object. At the detection time, the detection device generates the detection result related to the second detection object.

[0065] According to the structure, the position determining device calculates the reference displacement based on the difference between the first expected detection position and the second expected detection position, and sets the position obtained by adding the calculated reference displacement to the position of the first detection object as the corrected second expected detection position. Furthermore, when the position of at least one of the second detection object and the detection device is expected to coincide with the corrected second expected detection position, the position determining device causes the detection device to generate the detection result regarding the second detection object.

[0066] Therefore, the position determination device has the following effect: when determining the position of each of the plurality of detection objects, by using the previously determined positions of the detection objects, it is possible to predict with high accuracy the position of the detection object whose position is to be determined next.

[0067] For example, suppose that, relative to the difference between the first and second expected detection positions (i.e., the reference displacement), the difference between the actual position of the first detection object and the actual position of the second detection object (i.e., the actual displacement) is less than the difference dP. Similarly, suppose that, relative to the difference between the second expected detection position and the expected detection position of the third detection object (whose position should be determined after the second detection object) (i.e., the reference displacement), the difference between the actual position of the second detection object and the actual position of the third detection object (i.e., the actual displacement) is less than the difference dP.

[0068] Therefore, the actual position of the third detection object will be 2 dP smaller than the expected detection position of the third detection object, that is, 2 dP smaller.

[0069] On the other hand, if a position obtained by adding the reference displacement amount to the actual position of the second detection object is set as a corrected third expected detection position, the amount of deviation of the actual position of the third detection object from the corrected third expected detection position is a difference value dP.

[0070] That is, compared to a case where the expected detection position of the third detection object is used without taking the position of the second detection object into consideration, by using the corrected third expected detection position that is corrected in accordance with the position of the second detection object, it is possible to improve the prediction accuracy of the position of the third detection object.

[0071] To solve the problem, a control method of an embodiment of the present application is a control method of a position determination device that determines a position of a detection object, and includes: an instruction step of outputting an instruction value calculated in accordance with a target track to a servo control system that controls a position of at least one of a detection device and the detection object, the target track including an expected detection position that is set in advance as a position at which the detection object should be, as a target position; a detection result acquisition step of acquiring a detection result of the detection device at a detection time, the detection time being a time during movement of at least one of the detection device and the detection object, and being a time at which the target position of the servo control system coincides with the expected detection position, calculated taking into consideration a response delay time of the servo control system; a detection deviation amount calculation step of calculating a detection deviation amount, which is an amount of deviation of a detection position from a position of the detection object, from an amount of deviation of a reference position from the position of the detection object in the detection result, the detection position being a position corresponding to the reference position; a detection position calculation step of calculating the detection position from a position of the detection device at the detection time; and a position determination step of correcting the detection position using the detection deviation amount, thereby determining the position of the detection object.

[0072] According to the structure, the control method calculates the detection deviation amount, which is an amount of deviation of the detection position from the position of the detection object, from the detection result. Also, the control method calculates the detection position from the position of the detection device at the detection time. Also, the control method determines the position of the detection object from the detection deviation amount and the detection position.

[0073] (Improvement of accuracy of position detection)

[0074] Therefore, the control method has the following effect: at the detection time, even if the position of the detection object does not coincide with the detection position, it is possible to determine the position of the detection object with high accuracy using the amount of deviation of the two.

[0075] (high precision and high speed of detection results)

[0076] Further, according to the structure, the control method calculates the detection deviation amount based on the detection result at the detection timing at which the target position of the servo control system calculated in consideration of the response delay time of the servo control system coincides with the expected detection position.

[0077] Here, if the detection object is not in a range in which the detection device can detect the detection object at the timing at which the detection device performs detection, the detection deviation amount cannot be calculated based on the detection result.

[0078] Therefore, in order to avoid the situation in which the detection object is not in a range in which the detection device can detect the detection object at the timing at which the detection device performs detection, the control method acquires the detection result at the detection timing.

[0079] For example, in a case in which the servo control system only moves the detection device, the detection object does not move, and the detection object is placed in advance at the expected detection position or at a position sufficiently close to the expected detection position, the control method performs the following processing. That is, the control method sets the timing at which the target position of the servo control system calculated in consideration of the response delay time of the servo control system that controls the position of the detection device coincides with the expected detection position as the detection timing.

[0080] Here, it is generally considered that, by taking the response delay time of the servo control system into consideration, the target position of the servo control system at each timing coincides with the feedback position of the servo control system at each timing, or the deviation amount thereof becomes sufficiently small. Further, the feedback position of the servo control system that controls the position of the detection device can be regarded as the position of the detection device. Therefore, the position of the detection device moved by the servo control system at each timing should coincide with the target position of the servo control system at each timing calculated in consideration of the response delay time of the servo control system, or the deviation amount thereof should become sufficiently small.

[0081] As explained above, at the detection timing, the position of the detection device moved by the servo control system should coincide with the intended detection position, or the amount of deviation between the two should become sufficiently small. Also, as explained above, the detection object is placed in advance at the intended detection position, or at a position sufficiently close to the intended detection position. Therefore, at the detection timing, the position of the detection object moved by the servo control system coincides with the position of the detection device, or the amount of deviation between the two becomes sufficiently small.

[0082] As a result, the control method can avoid the situation where "at the timing when the detection device performs detection, the detection object is not in the range where the detection device can detect the detection object".

[0083] Also, for example, in the case where the servo control system only moves the detection object, the detection device is not moved, and the detection device is placed in advance at the intended detection position, or at a position sufficiently close to the intended detection position, the control method performs the following processing. That is, the control method sets the timing when the target position of the servo control system calculated in consideration of the response delay time of the servo control system that controls the position of the detection object coincides with the intended detection position as the detection timing.

[0084] As explained above, it is generally considered that, by taking into account the response delay time of the servo control system, the target position of the servo control system at each timing will coincide with the feedback position of the servo control system at each timing, or the amount of deviation between the two will become sufficiently small. Also, the feedback position of the servo control system that controls the position of the detection object can be regarded as the position of the detection object. Therefore, the position of the detection object moved by the servo control system at each timing should coincide with the target position of the servo control system at each timing calculated in consideration of the response delay time of the servo control system, or the amount of deviation between the two should become sufficiently small.

[0085] As explained above, at the detection timing, the position of the detection device moved by the servo control system should coincide with the intended detection position, or the amount of deviation between the two should become sufficiently small. Also, as explained above, the detection object is placed in advance at the intended detection position, or at a position sufficiently close to the intended detection position. Therefore, at the detection timing, the position of the detection object moved by the servo control system coincides with the position of the detection device, or the amount of deviation between the two becomes sufficiently small.

[0086] As a result, the control method can avoid a situation in which "at the timing at which the detection device performs detection, the detection target is not in a range in which the detection device can detect the detection target."

[0087] Further, for example, in a case in which the first servo control system moves the detection device and the second servo control system moves the detection target, the control method sets, as the detection timing, a timing at which the target position of each of the first servo control system and the second servo control system, which is calculated in consideration of the response delay time of each of the first servo control system and the second servo control system, coincides with the expected detection position.

[0088] As described above, it is generally considered that, by taking into account the response delay time of the servo control system, the target position of each timing of the servo control system coincides with the feedback position of each timing of the servo control system, or the amount of deviation between the two becomes sufficiently small.

[0089] Further, the feedback position of the first servo control system that controls the position of the detection device can be regarded as the position of the detection device. Also, the feedback position of the second servo control system that controls the position of the detection target can be regarded as the position of the detection target.

[0090] Therefore, the position of the detection device at each timing during movement should coincide with the target position of each timing of the first servo control system calculated in consideration of the response delay time of the first servo control system, or the amount of deviation between the two should become sufficiently small. Also, the position of the detection target at each timing during movement should coincide with the target position of each timing of the second servo control system calculated in consideration of the response delay time of the second servo control system, or the amount of deviation between the two should become sufficiently small.

[0091] As described above, at the detection timing, the position of the detection device during movement, the position of the detection target during movement, and the expected detection position should coincide, or the amount of deviation between the three should become sufficiently small.

[0092] As a result, the control method can avoid a situation in which "at the timing at which the detection device performs detection, the detection target is not in a range in which the detection device can detect the detection target."

[0093] The control method obtains the detection result at the detection time, where the detection time is the moment during the movement of at least one of the detection device and the detection object, and is the moment when "the position of the detection object is consistent with the position of the detection device or the deviation between the two becomes sufficiently small".

[0094] Here, the position of the detection device at the detection time corresponds to the detection position. Therefore, it can be assumed that the deviation between the reference position and the position of the detected object in the detection result at the detection time is sufficiently small. Furthermore, if it is known in advance that "the deviation between the reference position and the position of the detected object in the detection result is sufficiently small," then compared to the case where "the deviation between the two in the detection result cannot be predicted or the deviation between the two is large," the analysis of the detection result can be made more precise.

[0095] Therefore, the control method can obtain the "detection result at the detection time" that can perform high-precision analysis, that is, it can calculate the detection deviation with high precision based on the "detection result at the detection time".

[0096] Furthermore, the control method calculates the detection deviation based on the detection result detected by the detection device during the movement of the detection object and at least one of the detection device. Therefore, compared to the case where the detection device performs detection and generates the detection result after the movement of the detection object and the detection device stops, the control method can acquire the detection result at a high speed, thereby enabling the calculation of the detection deviation to be performed at a high speed.

[0097] (High-precision and high-speed location determination of the detected object)

[0098] As explained so far, the control method can acquire the detection results at high speed, enabling high-precision analysis, and can calculate the detection deviation amount at high speed and with high precision based on the detection results. Furthermore, the control method determines the position of the detected object based on the calculated detection deviation amount and the detection position.

[0099] Therefore, the control method achieves the following effect: it can determine the position of the detected object at high speed and with high accuracy.

[0100] [The effects of the invention]

[0101] According to an embodiment of the present invention, the following effect is achieved: the position of the object being detected can be determined with high accuracy even during the movement of at least one of the object being detected and the detection device. Attached Figure Description

[0102] Figure 1 is a view showing the main part structure of the position determination apparatus of Embodiment 1 of the present application.

[0103] Figure 2 is a view showing the overall outline of the control system of the position determination apparatus including Figure 1 .

[0104] Figure 3 is a view showing the applicable case of the control system of Figure 2 .

[0105] Figure 4 is a view showing the applicable case of the position determination apparatus of Figure 3 via the servo control system to control the position of the workpiece. Figure 1

[0106] Figure 5 is a view showing a modification of the photographing method of the workpiece.

[0107] Figure 6 is a view showing the "amount of positional deviation within the image" calculated from the photographed image.

[0108] Figure 7 is a view showing the servo positional deviation and the like when the response delay time of the servo control system is not taken into account.

[0109] Figure 8 is a view showing the servo positional deviation and the like when the response delay time of the servo control system is taken into account.

[0110] Figure 9 is a view showing an example of the action profile when the expected detection position is set to "100".

[0111] Figure 10 is a view showing the deviation of the feedback position at the detection timing from the target position taking into account the response delay time of the servo control system.

[0112] Figure 11 is a view showing an example of the action profile when the expected detection position is set to "40".

[0113] Figure 12 is a view showing the pixel resolution required for the image analysis of the photographed image due to the difference in the required accuracy with respect to the position of the workpiece to be determined.

[0114] Figure 13 is a view showing the processing performed by the position determination apparatus of Figure 1 when sequentially determining the positions of a plurality of workpieces.

[0115] Figure 14 is a view showing​Figure 1 A flowchart outlining the overall process performed by the location determination device.

[0116] Figure 15 This is an explanation Figure 14 The flowchart shows a case where the detection indication determines the processing time.

[0117] Figure 16 This is an explanation Figure 14 The flowchart shows an example of the calculation and processing of the detection deviation and the calculation and processing of the detection position.

[0118] [Explanation of reference numerals in the attached figures]

[0119] 10: Position Determination Device

[0120] 20: Servo Control System

[0121] 30: Detection System

[0122] 31: Communication device (communication location determination device)

[0123] 32: Shooting control device (detection control device)

[0124] 33: Camera (Detection) Device

[0125] 40: Workpiece

[0126] 1210: Command Section

[0127] 1220: Control Quantity Acquisition Unit (Acquisition Unit)

[0128] 1160: Deviation Calculation Department

[0129] 1170: Detection Position Calculation Unit

[0130] 1180: Location Determination Department

[0131] aTd: Detection indication time

[0132] Cc: Control cycle

[0133] Cm: Command value

[0134] Cs: Control signal

[0135] Dd: Response delay time of the detection system

[0136] Ds: Response delay time of the servo control system

[0137] Im: Image capture

[0138] Pd: Detection location

[0139] Pf: Feedback Location

[0140] pPd: expected detection position

[0141] Pt: target position

[0142] Qd: detection deviation amount

[0143] Rb: reference position

[0144] S130: acquisition step

[0145] S140: detection deviation amount calculation step

[0146] S150: detection position calculation step

[0147] S160: position determination step

[0148] Td: detection timing

[0149] Tt: target track DETAILED DESCRIPTION

[0150] [Embodiment 1]

[0151] Hereinafter, an embodiment of one aspect of the present application (hereinafter also referred to as "the present embodiment") will be described based on the drawings. Also, the same signs are attached to the same or equivalent portions in the drawings, and the description thereof will not be repeated. In the present embodiment, a position determination device 10 that determines the position Pw of a workpiece 40 based on a detection result detected in the movement of at least one of the workpiece 40 as a detection object and a camera device 33 as a detection device will be described as a typical example of a "position determination device that determines the position of a detection object".

[0152] §1. Applicable case

[0153] (Summary of control system)

[0154] In order to facilitate understanding of the position determination device 10 of one embodiment of the present application, first, a summary of a control system 1 including the position determination device 10 will be described using Figure 2 as an example of a scenario in which the present application is applied.

[0155] Figure 2Fig. 1 is a diagram showing an overall outline of a control system 1. The control system 1 is a kind of master-slave control system, which includes: a position determination device 10 as a master; and one or more servo control systems 20 and detection systems 30 as slaves connected to the master via a network. The position determination device 10 is referred to as a "master" in the control system 1 in the sense of managing data transmission via the network, and on the other hand, the "slave" is managed by the master to perform, for example, data collection and control of equipment provided in a factory. In the control system 1, as a network connecting the position determination device 10 as the master and the servo control systems 20 and the detection systems 30 as the slaves, for example, EtherCAT (registered trademark) can be used.

[0156] In addition, the "master" and the "slave" are defined with a view to control functions of data transmission on the network, and there is no particular limitation on what kind of information is transmitted and received between the devices.

[0157] (Position determination device)

[0158] The position determination device 10 as the master acquires (receives) data indicating control results (for example, control amounts and detection results) output by the slaves such as the servo control systems 20 and the detection systems 30 at every control cycle Cc. Also, the position determination device 10 as the master outputs (transmits) command values Cm and a control signal Cs (control instruction) including a detection instruction time point aTd to the slaves such as the servo control systems 20 and the detection systems 30 at every control cycle Cc.

[0159] The position determination device 10 is, for example, an industrial position determination device such as a programmable logic controller (PLC) that executes a user program for controlling a control machine such as a servo motor 22. In the control system 1, the position determination device 10 is an upper-level controller with respect to the servo drivers 21 as lower-level controllers.

[0160] Specifically, the position determining device 10 outputs, to the servo control system 20 including the servo driver 21, a command value Cm generated in each control cycle Cc in accordance with the target track Tt. In the servo control system 20, the servo driver 21 receiving the command value Cm performs feedback control of an output, i.e., a control amount, of the servo motor 22 or the like as a control object so as to follow the command value Cm. Also, the position determining device 10 acquires, from the servo control system 20 (particularly, the servo driver 21), data relating to the output (control amount, such as torque, speed, position, or the like) of the servo motor 22 in each control cycle Cc. The position determining device 10 further generates the command value Cm for the servo control system 20 on the basis of the control amount (e.g., the feedback position Pf in each control cycle Cc) received from the servo control system 20, and transmits the generated command value Cm to the servo control system 20, thereby controlling the servo control system 20.

[0161] Here, the position determining device 10 controls a plurality of servo control systems 20, specifically, in the following manner. That is, the position determining device 10 generates, for each of the plurality of servo control systems 20, a command track Co for each servo control system 20 in accordance with the target track Tt. Also, the position determining device 10 outputs, in each control cycle Cc for each of the plurality of servo control systems 20, a "command value Cm for each servo control system 20" generated in accordance with the command track Co for each servo control system 20, so as to perform coordinated control of the plurality of servo control systems 20. The position determining device 10 generates the "command value Cm for each servo control system 20" taking into account the response delay time Ds of each of the plurality of servo control systems 20, thereby synchronizing the plurality of servo control systems 20 in terms of the level of action results (control amounts).

[0162] Figure 2 In the illustrated example, the position determining device 10 generates the command track Co(A) and the command track Co(B) for each of the servo control system 20(A) and the servo control system 20(B) in accordance with the target track Tt. The position determining device 10 generates the command value Cm(A) and the command value Cm(B) for each of the servo control system 20(A) and the servo control system 20(B) in accordance with the command track Co(A) and the command track Co(B), respectively. Particularly, the position determining device 10 generates the command value Cm(A) and the command value Cm(B) taking into account the response delay time Ds(A) and the response delay time Ds(B) of each of the servo control system 20(A) and the servo control system 20(B). The position determining device 10 outputs the command value Cm(A) and the command value Cm(B) in each control cycle Cc of the servo control system 20, thereby performing coordinated control of each of the servo control system 20(A) and the servo control system 20(B).

[0163] Moreover, in the control system 1, the position determination device 10 outputs a control signal Cs that specifies a detection instruction time aTd, for example, at each control cycle Cc. Moreover, the position determination device 10 acquires (receives) a result of a detection action (for example, an imaging action) performed by the detection system 30, that is, a detection result (for example, an imaging image Im), from the detection system 30, for example, at each control cycle Cc.

[0164] Details will be described later, but the position determination device 10 specifies, in the control signal Cs, a time at which the detection time Td has been corrected using the "response delay time Dd of the detection system 30", that is, a detection instruction time aTd. Moreover, the position determination device 10 outputs the control signal Cs in which the detection instruction time aTd is specified, to the detection system 30, whereby the imaging device 33 (detection device) performs a detection action (imaging action) at the detection time Td.

[0165] Figure 2 In the example shown, an example is shown in which, with respect to the position determination device 10 as a master, two servo control systems 20, that is, the servo control system 20(A) and the servo control system 20(B), are connected as slaves to one detection system 30. However, the servo control systems 20 connected to the position determination device 10 are not necessarily two, and in the control system 1, the servo control systems 20 connected to the position determination device 10 as a master can be one or more, for example, five.

[0166] In the following description, with respect to the servo control systems 20, in a case where it is necessary to distinguish each of a plurality of servo control systems 20, a suffix such as "(A)", "(B)", "(C)",..., "(Z)" is added to the symbol to distinguish. For example, it is described as "servo control system 20(A)", "servo control system 20(B)", "servo control system 20(C)",..., "servo control system 20(Z)" to distinguish. In a case where it is not necessary to particularly distinguish each of a plurality of servo control systems 20, it is simply referred to as "servo control system 20".

[0167] Moreover, with respect to the workpieces 40, in a case where it is necessary to distinguish each of a plurality of workpieces 40, a suffix such as "(A)", "(B)", "(C)",..., "(Z)" is added to the symbol to distinguish. For example, it is described as "workpiece 40(A)", "workpiece 40(B)", "workpiece 40(C)",..., "workpiece 40(Z)" to distinguish. In a case where it is not necessary to particularly distinguish each of a plurality of workpieces 40, it is simply referred to as "workpiece 40". The same applies to "position Pw of the workpiece 40", "imaging image Im", "detection time Td", "intended detection position pPd", and the like.

[0168] (servoc control system)

[0169] The servo control system 20 is a feedback control system that controls the output (e.g., position) of the servo control system 20, specifically, the position of at least one of the imaging device 33 and the workpiece 40, in accordance with the command value Cm from the position determining device 10. For example, Figure 3 In the example shown, the servo control system 20 controls the position of the imaging device 33, Figure 4 In the example shown, the servo control system 20 controls the position Pw of the workpiece 40 (more specifically, the position of the substrate on which the workpiece 40 is placed).

[0170] The servo control system 20 includes a servo motor 22 as an actuator that changes the position of at least one of the imaging device 33 and the workpiece 40, and a servo driver 21 that controls the servo motor 22.

[0171] The servo driver 21 is a control device of the servo motor 22 that receives the control signal Cs (specifically, the command value Cm) from the position determining device 10 at each control cycle Cc, and controls the drive of the servo motor 22 in accordance with the received control signal Cs. Also, the servo driver 21 acquires measured values related to the output of the servo motor 22 such as position, speed, torque, and the like from a position sensor and a torque sensor connected to the shaft of the servo motor 22. The servo driver 21 outputs data related to these acquired measured values to the position determining device 10 at each control cycle Cc.

[0172] The servo motor 22 is an actuator such as a linear actuator that controls the output (specifically, the position of at least one of the imaging device 33 and the workpiece 40) in accordance with the control of the servo driver 21. The servo motor 22 changes the position of the imaging device 33, i.e., the detection position Pd, for example, by driving the shaft of the manipulator including the imaging device 33 at the fingertip. In the following description, the "output position of the servo control system 20" as a measured value related to the output of the servo motor 22 is sometimes referred to as the "feedback position Pf".

[0173] In the case where the servo control system 20 controls the position of the imaging device 33, for example, the position of the imaging device 33 on each of the X-axis and the Y-axis orthogonal to each other is determined in accordance with the output of each of the servo motor 22(A) and the servo motor 22(B). That is, the value of the position of the imaging device 33 (in other words, the detection position Pd) on each of the X-axis and the Y-axis is determined in accordance with the output of each of the servo motor 22(A) and the servo motor 22(B). Each of the servo driver 21(A) and the servo driver 21(B) controls the output of each of the servo motor 22(A) and the servo motor 22(B), i.e., controls the drive of each.

[0174] For example, in a case where the servo control system 20 controls the position of the imaging device 33, the servo driver 21(A) transmits a feedback position Pf(A) of the imaging device 33 on the X-axis to the position determining device 10 as one of the measured values (control amounts) related to the output of the servo motor 22(A). Likewise, the servo driver 21(B) transmits a feedback position Pf(B) of the imaging device 33 on the Y-axis to the position determining device 10 as one of the control amounts of the servo motor 22(B).

[0175] (Detection system)

[0176] The detection system 30 generates a result of detection of the workpiece 40, that is, a detection result, and particularly generates information for calculating "an amount of deviation of the position Pw of the workpiece 40 from the detection position Pd" as the detection result, and notifies (transmits) the generated detection result to the position determining device 10. Figure 2 The illustrated detection system 30 includes the imaging device 33 as a detection device, an imaging control device 32 that controls a detection operation (for example, an imaging operation) performed by the imaging device 33, and a communication device 31 that performs communication with the imaging control device 32.

[0177] The imaging device 33 performs a detection operation (imaging operation) upon receiving a detection trigger (imaging trigger) from the imaging control device 32, and outputs (transmits) a result of the performed detection operation, for example, an imaging image Im generated by the performance of the imaging operation, to the imaging control device 32.

[0178] The imaging control device 32 outputs (transmits) a detection trigger (imaging trigger) to the imaging device 33, thereby causing the imaging device 33 to perform a detection operation (imaging operation), and receives a result of the performance of the detection operation, that is, a detection result (for example, an imaging image Im) from the imaging device 33. In particular, the imaging control device 32 transmits a detection trigger to the imaging device 33 upon receiving an output instruction (detection instruction) from the communication device 31, the output instruction (detection instruction) instructing the output of the detection trigger (imaging trigger) to the imaging device 33.

[0179] The imaging control device 32 outputs (transmits) the received detection result to the position determining device 10 via the network upon receiving a result of the performance of the detection operation, that is, a detection result (for example, an imaging image Im) from the imaging device 33. For example, the imaging control device 32 outputs (transmits) a result of the performance of the detection operation, that is, a detection result (for example, an imaging image Im) of the imaging device 33 to the position determining device 10 via the network within a certain control period Cc after a detection time point Td.

[0180] Details will be described later, but the photographing control device 32 can also analyze the received detection result when receiving the detection result (e.g., the photographed image Im) of the execution result of the detection operation from the photographing device 33, and output the analysis result to the position determination device 10 via the network. For example, the photographing control device 32 can also perform image analysis on the photographed image Im generated by the photographing device 33, and output the result of the image analysis to the position determination device 10 via the network within a certain control period Cc after the detection time Td.

[0181] Specifically, the photographing control device 32 can also calculate the amount of deviation of the position Pw of the workpiece 40 (e.g., the center position of the workpiece 40) from the reference position Rb, i.e., the amount of "in-image position deviation" by performing image analysis on the photographed image Im. Also, the photographing control device 32 can output the calculated amount of "in-image position deviation" to the position determination device 10 via the network. For example, the photographing control device 32 can also transmit the calculated amount of "in-image position deviation" to the position determination device 10 within a certain control period Cc after the detection time Td.

[0182] The communication device 31 receives the control signal Cs from the position determination device 10 every control period Cc, and outputs (transmits) the output instruction (detection instruction) to the photographing control device 32 at the detection instruction time aTd specified in the received control signal Cs.

[0183] In the detection system 30, a certain time, which is also referred to as the "response delay time Dd of the detection system 30", is required from when the output instruction is transmitted from the communication device 31 to the photographing control device 32 until the detection operation is performed by the photographing device 33. The "response delay time Dd of the detection system 30" is also referred to as the "response delay time of the photographing device 33 (detection device)".

[0184] (Application examples of the control system)

[0185] Figure 3 is a diagram illustrating an application example of the control system 1. Specifically, it is a diagram illustrating an example of applying the control system 1 to an application of moving the photographing device 33 to generate the photographed image Im with respect to each of a plurality of workpieces 40 in order to determine the position Pw of each of the plurality of workpieces 40 placed on the substrate.

[0186] The control system 1 (especially the position determination device 10) is as follows Figure 3As exemplified, the imaging device 33 is moved by a trajectory that passes above each of the plurality of workpieces 40 placed on the substrate. Also, the position-determining device 10 causes the imaging device 33 to perform imaging above each of the plurality of workpieces 40, generating an imaging image Im for each of the plurality of workpieces 40. Also, the position-determining device 10 determines the position Pw of each of the plurality of workpieces 40 from the position of the imaging device 33 at the time of generation of the imaging image Im for each of the plurality of workpieces 40 by the imaging device 33, and the imaging image Im for each of the plurality of workpieces 40.

[0187] For example, as indicated by the dotted arrows in FIG. 4, the position-determining device 10 causes the imaging device 33 to first move above the workpiece 40(A), and then move above the workpiece 40(B), and further sequentially move above the workpiece 40(C), the workpiece 40(D), and the workpiece 40(E). Figure 3

[0188] Also, the position-determining device 10 causes the imaging device 33 to perform imaging above each of the workpieces 40(A) to 40(E), generating an imaging image Im for each of the workpieces 40(A) to 40(E), i.e., generating the imaging image Im(A) to the imaging image Im(E).

[0189] Also, the position-determining device 10 determines the position Pw(A) of the workpiece 40(A) from the position of the imaging device 33 at the time of generation of the imaging image Im(A) by the imaging device 33, i.e., the detection time Td(A), and the imaging image Im(A). The position-determining device 10 determines the position Pw(B) of the workpiece 40(B) from the position of the imaging device 33 at the time of generation of the imaging image Im(B) by the imaging device 33, i.e., the detection time Td(B), and the imaging image Im(B). The position-determining device 10 determines the position Pw(C) of the workpiece 40(C) from the position of the imaging device 33 at the time of generation of the imaging image Im(C) by the imaging device 33, i.e., the detection time Td(C), and the imaging image Im(C). The position-determining device 10 determines the position Pw(D) of the workpiece 40(D) from the position of the imaging device 33 at the time of generation of the imaging image Im(D) by the imaging device 33, i.e., the detection time Td(D), and the imaging image Im(D). The position-determining device 10 determines the position Pw(E) of the workpiece 40(E) from the position of the imaging device 33 at the time of generation of the imaging image Im(E) by the imaging device 33, i.e., the detection time Td(E), and the imaging image Im(E).

[0190] Here, Figure 3 ​In the example shown, the workpiece 40 is a microelectronic component of 1 mm or less, such as a multilayer ceramic capacitor, a crystal oscillator, an integrated circuit (IC) chip, or another various element. As the miniaturization of components and circuits advances, higher precision is required for work to determine the position of such electronic components on a substrate (position determination work, inspection work). Furthermore, as the number of components used increases, the number of inspection sites also increases, so it is also required to speed up the position determination work and the inspection work to shorten the time required for the position determination work and the inspection work. That is, there is an urgent need to achieve position inspection at high speed and high precision for micro components and micro printed patterns.

[0191] Therefore, the control system 1 (particularly, the position determination device 10) uses the following two values to determine the position Pw of the workpiece 40 with high precision. That is, the position determination device 10 determines the position Pw of the workpiece 40 with high precision from the "detection position Pd (i.e., the position of the imaging device 33 at the detection time Td)" and the "detection deviation Qd, which is the amount of deviation of the detection position Pd from the position Pw of the workpiece 40". The detection position Pd corresponds to the reference position Rb in the captured image Im, and therefore the detection deviation Qd corresponds to the "amount of deviation of the position Pw of the workpiece 40 from the reference position Rb in the captured image Im", i.e., the "amount of positional deviation within the image".

[0192] Furthermore, the control system 1 (particularly, the position determination device 10) does not stop the movement of the imaging device 33, but causes the imaging device 33 to capture the workpiece 40 during the movement of the imaging device 33, and calculates the detection deviation Qd from the finally obtained captured image Im. Therefore, compared to a method of generating a captured image Im after stopping the movement of the imaging device 33, the control system 1 (particularly, the position determination device 10) can achieve high-precision position determination of the workpiece 40 taking into account the detection deviation Qd at high speed.

[0193] (Example of moving the detection device)

[0194] Figure 3 In the control system 1 exemplified, the position of the imaging device 33 as the detection device is controlled by the servo control system 20, i.e., the position of the imaging device 33 is determined in accordance with the output of the servo control system 20. That is, the position determination device 10 causes the servo driver 21 to control the output (output position) of the servo motor 22 by sending an instruction value Cm to the servo driver 21. For example, the position of the imaging device 33 on each of the X-axis and the Y-axis orthogonal to each other is the output (output position) of each of the two servo control systems 20 (A), 20 (B).

[0195] Specifically, the servo driver 21(A) that receives the command value Cm(A) from the position determination device 10 controls the servo motor 22(A) through which the imaging device 33 moves in the X-axis direction. Also, the control result (output) of the servo motor 22(A) is fed back to the servo driver 21(A). Similarly, the servo driver 21(B) that receives the command value Cm(B) from the position determination device 10 controls the servo motor 22(B) through which the imaging device 33 moves in the Y-axis direction. Also, the control result of the servo motor 22(B) is fed back to the servo driver 21(B).

[0196] Also, Figure 3 In the illustrated control system 1, the position determination device 10 transmits the control signal Cs that specifies the detection instruction time point aTd to the detection system 30 (particularly, the communication device 31), whereby the imaging device 33 performs imaging at the detection time point Td. The detection time point Td is a time point at which the position of the imaging device 33 and the position Pw of the workpiece 40 become coincident, or the amount of deviation of the two becomes sufficiently small. The imaging image Im generated by the imaging performed by the imaging device 33 at the detection time point Td is transmitted to the position determination device 10 by the imaging control device 32. The imaging control device 32 can also output, instead of the imaging image Im, the amount of deviation of the position Pw of the workpiece 40 from the reference position Rb in the imaging image Im, i.e., the amount of "position deviation within the image", calculated by image analysis of the imaging image Im, to the position determination device 10.

[0197] Here, the detection position Pd of the workpiece 40 detected by the imaging device 33 can be regarded as the position of the imaging device 33 at the detection time point Td. Therefore, the position determination device 10 can calculate the detection position Pd from the position of the imaging device 33 at the detection time point Td.

[0198] Also, the detection position Pd, i.e., the position of the imaging device 33 at the detection time point Td, corresponds to the reference position Rb in the imaging image Im, i.e., the detection result generated by the imaging device 33, such as the center position of the imaging image Im. Therefore, the position determination device 10 can calculate the amount of deviation (detection deviation Qd) of the detection position Pd corresponding to the reference position Rb from the position Pw of the workpiece 40 from the amount of deviation of the reference position Rb from the position Pw of the workpiece 40 in the imaging image Im. Figure 3 In the illustrated example, the reference position Rb in the imaging image Im is indicated as a point at which a chain line of two points in the imaging image Im intersects.

[0199] Also, the position determination device 10 determines the position Pw of the workpiece 40 using the detection position Pd calculated from the position of the imaging device 33 at the detection time point Td and the detection deviation Qd calculated from the imaging image Im.

[0200] Figure 3 In the example shown, an example in which the position determining device 10 controls the position of the photographing device 33 via the servo control system 20 is explained, but the position determining device 10 can also control the position Pw of the workpiece 40 via the servo control system 20. Hereinafter, an example in which the position determining device 10 controls the position Pw of the workpiece 40 (more specifically, the position of the substrate on which the workpiece 40 is placed) will be explained using Figure 4

[0201] (Example of moving the detection object)

[0202] Figure 4 is an example of the same control system 1 as shown in Figure 3 , indicating an example in which the position determining device 10 controls the position Pw of the workpiece 40 (more specifically, the position of the substrate on which the workpiece 40 is placed) as the detection object via the servo control system 20. That is, Figure 3 , the position Pw of the workpiece 40 is fixed and the photographing device 33 is moved, and in contrast to this, Figure 4 , the position of the photographing device 33 is fixed and the position Pw of the workpiece 40 is moved. However, in other respects, the contents of the processing performed by the position determining device 10 are roughly the same in the example shown in Figure 4 and the example shown in Figure 3

[0203] Figure 4 In the control system 1 exemplified, the position Pw of the workpiece 40 is controlled by the servo control system 20, that is, the position Pw of the workpiece 40 is decided in accordance with the output of the servo control system 20. That is, the position determining device 10 sends the command value Cm to the servo driver 21, thereby causing the servo driver 21 to control the output (output position) of the servo motor 22. For example, the values of the position Pw of the workpiece 40 on each of the X-axis and the Y-axis, which are orthogonal to each other, are the outputs (output positions) of the two servo control systems 20, the servo control system 20(A) and the servo control system 20(B), respectively.

[0204] Specifically, the servo driver 21(A) that has received the command value Cm(A) from the position determining device 10 controls the servo motor 22(A), and by the servo motor 22(A), the workpiece 40 is moved in the X-axis direction. Also, the control result (output) of the servo motor 22(A) is fed back to the servo driver 21(A). Similarly, the servo driver 21(B) that has received the command value Cm(B) from the position determining device 10 controls the servo motor 22(B), and by the servo motor 22(B), the workpiece 40 is moved in the Y-axis direction. Also, the control result of the servo motor 22(B) is fed back to the servo driver 21(B).

[0205] ​​Figure 4 In the example shown, the position determination device 10 also sends a control signal Cs specifying the detection instruction time point aTd to the detection system 30, whereby the imaging device 33 is caused to perform imaging at the detection time point Td. Also, the position determination device 10 determines the position Pw of the workpiece 40 using the detection position Pd calculated from the position of the imaging device 33 and the detection deviation Qd calculated from the captured image Im. Figure 3 In the example shown, the reference position Rb in the captured image Im is represented as the point at which the two-dot chain line crosses in the captured image Im. Figure 4 In the example shown, the position determination device 10 also sends a control signal Cs specifying the detection instruction time point aTd to the detection system 30, whereby the imaging device 33 is caused to perform imaging at the detection time point Td. Also, the position determination device 10 determines the position Pw of the workpiece 40 using the detection position Pd calculated from the position of the imaging device 33 and the detection deviation Qd calculated from the captured image Im. Figure 3 In the example shown, the reference position Rb in the captured image Im is represented as the point at which the two-dot chain line crosses in the captured image Im.

[0206] Figure 3 In the example shown, the position determination device 10 also sends a control signal Cs specifying the detection instruction time point aTd to the detection system 30, whereby the imaging device 33 is caused to perform imaging at the detection time point Td. Also, the position determination device 10 determines the position Pw of the workpiece 40 using the detection position Pd calculated from the position of the imaging device 33 and the detection deviation Qd calculated from the captured image Im. Figure 4 In the example shown, the reference position Rb in the captured image Im is represented as the point at which the two-dot chain line crosses in the captured image Im.

[0207] For example, in the control system 1, the position of the imaging device 33 on the X axis is determined in accordance with the output of the servo control system 20(A), and the value of the position Pw of the workpiece 40 on the Y axis is determined in accordance with the output of the servo control system 20(B). That is, the position determination device 10 sends an instruction value Cm(A) to the servo driver 21(A), whereby the servo driver 21(A) controls the output (output position) of the servo motor 22(A), that is, controls the position of the imaging device 33 on the X axis. Also, the position determination device 10 sends an instruction value Cm(B) to the servo driver 21(B), whereby the servo driver 21(B) controls the output (output position) of the servo motor 22(B), that is, controls the value of the position Pw of the workpiece 40 on the Y axis.

[0208] Specifically, the servo driver 21(A) that has received the instruction value Cm(A) from the position determination device 10 controls the servo motor 22(A), whereby the imaging device 33 moves in the X axis direction by the servo motor 22(A). Also, the control result (output) of the servo motor 22(A) is fed back to the servo driver 21(A). Likewise, the servo driver 21(B) that has received the instruction value Cm(B) from the position determination device 10 controls the servo motor 22(B), whereby the workpiece 40 moves in the Y axis direction by the servo motor 22(B). Also, the control result of the servo motor 22(B) is fed back to the servo driver 21(B).

[0209] In a case where the position-determining device 10 controls the positions of both the photographing device 33 and the workpiece 40, the "position-determining method of the position Pw of the workpiece 40" performed by the position-determining device 10 is also the same as that described using Figure 3 and Figure 4 described. That is, the position-determining device 10 transmits the control signal Cs that specifies the detection instruction time point aTd to the detection system 30, whereby the photographing device 33 performs photographing at the detection time point Td. Also, the position-determining device 10 determines the position Pw of the workpiece 40 using the detection position Pd calculated from the position of the photographing device 33 at the detection time point Td and the detection deviation Qd calculated from the photographed image Im.

[0210] In addition, hereinafter, for the sake of convenience of understanding the processing performed by the position-determining device 10, the "position-determining method of the position Pw of the workpiece 40" performed by the position-determining device 10 is described using the example of the position-determining device 10 controlling the position of the photographing device 33 via the servo control system 20. However, as described above, the position-determining device 10 can control the position of at least one of the photographing device 33 and the workpiece 40, and it is not necessary for the position-determining device 10 to control the position of the photographing device 33.

[0211] Also, it is not necessary for the position-determining device 10 to perform image analysis of the photographed image Im. The position-determining device 10 can determine the detection deviation Qd of the position Pw of the workpiece 40 from the detection position Pd as long as it can determine the "in-image position deviation" of the position Pw of the workpiece 40 from the reference position Rb from the photographed image Im. The photographing control device 32 can also calculate the "in-image position deviation" by performing image analysis of the photographed image Im. At this time, the position-determining device 10 acquires the "in-image position deviation" from the photographing control device 32 and determines (calculates) the detection deviation Qd from the acquired "in-image position deviation".

[0212] (First invention related to a photographing method of a workpiece: generation of a photographed image without stopping)

[0213] Figure 5 is a diagram that explains a variation of the photographing method of the workpiece 40. Figure 5 (A) of is a diagram that explains a method of always generating a photographed image Im for "calculating a detection deviation Qd of a detection position Pd corresponding to the reference position Rb from the position Pw of the workpiece 40".

[0214] That is, in the past, the general method was to stop the movement of the imaging device 33 and image the workpiece 40 to generate the captured image Im. Specifically, the control system in the past temporarily set the movement speed (servo speed Vs) of the imaging device 33 to "0", and after the vibration of the imaging device 33 and the like converged, that is, after a standby time (vibration decay waiting time) had elapsed, output a detection trigger to cause the imaging device to perform imaging. Also, the control system in the past determined the position Pw of the workpiece 40 using the captured image Im generated by the imaging device to check whether the workpiece 40 was in the desired position.

[0215] The method of "stopping the movement of the imaging device 33 and generating the captured image Im" has the advantage that it is possible to generate a captured image Im that can accurately detect the amount of deviation (detection deviation Qd) of the detection position Pd corresponding to the reference position Rb from the position Pw of the workpiece 40.

[0216] However, the control system in the past performed imaging after the processes of "stopping the movement of the imaging device 33" and "waiting until the standby time has elapsed", and the like, so as shown in (A) of Figure 5 , there was a problem in that the time required for the execution of imaging became long.

[0217] Figure 5 (B) is a diagram that explains the method performed by the control system 1 (particularly the position determination device 10) of generating a captured image Im used to "calculate the amount of deviation (detection deviation Qd) of the detection position Pd corresponding to the reference position Rb from the position Pw of the workpiece 40". The position determination device 10 does not stop the movement of the imaging device 33, that is, generates the captured image Im without stopping. Specifically, as shown in (B) of Figure 5 , the position determination device 10 does not set the movement speed (servo speed Vs) of the imaging device 33 to "0", but outputs a detection trigger to cause the imaging device 33 to perform imaging during the movement of the imaging device 33.

[0218] Figure 5 The method of "generating the captured image Im without stopping" of the position determination device 10 shown in (B) can improve the tempo compared to the method of "stopping the movement of the imaging device 33 and generating the captured image Im" shown in (A) of Figure 5

[0219] Especially, as shown in (B) of Figure 5 , the difference between the method in the past and the method performed by the position determination device 10 becomes large in the case where it is desired to generate a plurality of captured images Im for a plurality of workpieces 40 in order to determine the position Pw of each of the plurality of workpieces 40.

[0220] ​In the conventional method, whenever an image Im is to be generated, the moving speed of the imaging device 33 is temporarily set to "0", and the image Im is generated after a standby time. Therefore, generating multiple images Im requires a large amount of time. In contrast, the position determining device 10 does not stop the movement of the imaging device 33. That is, multiple images Im are generated sequentially during the movement of the imaging device 33. Therefore, compared with the conventional method, the time required to generate multiple images Im can be significantly reduced.

[0221] like Figure 5 As shown in (A), when the movement of the imaging device 33 is stopped and the position of the imaging device 33 is configured to a predetermined position before generating the image Im, the time required to generate the image Im becomes longer. However, since the position of the imaging device 33 at the moment of generating the image Im is fixed, that is, the detection position Pd is fixed, the position Pw of the workpiece 40 can be determined based on the preset detection position Pd and the "deviation of the position Pw of the workpiece 40 from the detection position Pd". Furthermore, the "deviation of the position Pw of the workpiece 40 from the detection position Pd" can be accurately calculated based on the "deviation of the position Pw of the workpiece 40 from the reference position Rb" in the image Im.

[0222] In contrast, such as Figure 5 As shown in (B), the time required to generate the captured image Im without stopping the movement of the capturing device 33 can be shortened compared to "stopping the movement of the capturing device 33 every time the captured image Im is generated". However, the position of the capturing device 33 at the point in time of generating the captured image Im is not fixed, that is, the detection position Pd is not fixed.

[0223] Therefore, without accurately determining the "position of the detection position Pd that changes at each moment at the time of image Im generation (i.e., detection time Td)" and the "deviation of the workpiece 40's position Pw from the detection position Pd," the position Pw of the workpiece 40 cannot be calculated. That is, in order to determine the position Pw of the workpiece 40, the position determining device 10 must first accurately calculate the detection position Pd at detection time Td; in other words, it must accurately calculate the "position of the imaging device 33 at detection time Td." Second, the position determining device 10 must accurately calculate the "deviation of the workpiece 40's position Pw from the reference position Rb" based on the "deviation of the workpiece 40's position Pw from the reference position Rb" in the image Im.

[0224] In order to determine the position Pw of the workpiece 40 from the captured image Im captured during the movement of the capturing device 33 without stopping the movement of the capturing device 33, the position determining device 10 accurately calculates the following two values. That is, the position determining device 10 accurately calculates the "amount of deviation of the position Pw of the workpiece 40 from the reference position Rb" in the captured image Im and the "position of the capturing device 33 at the detection time Td".

[0225] Here, the position of the capturing device 33 is controlled by the servo control system 20, and thus the position of the capturing device 33 can be regarded as the feedback position Pf of the servo control system 20. Therefore, the "position of the capturing device 33 at the detection time Td" can be regarded as the "feedback position Pf of the servo control system 20 at the detection time Td".

[0226] Further, the "amount of deviation of the position Pw of the workpiece 40 from the detection position Pd" corresponds to the "amount of deviation of the position Pw of the workpiece 40 from the reference position Rb" in the captured image Im. In the following description, the "amount of deviation of the position Pw of the workpiece 40 from the reference position Rb" in the captured image Im is sometimes simply referred to as "position deviation within the image".

[0227] Therefore, the relationship that "the position Pw of the workpiece 40 can be determined from the 'amount of deviation of the position Pw of the workpiece 40 from the detection position Pd' and the 'detection position Pd at the detection time Td'" can be expressed as follows. That is, it can be expressed as {the position Pw of the workpiece 40 = the position deviation within the image + "the feedback position Pf (actual position) of the servo control system 20 at the detection time Td"}.

[0228] (Regarding the amount of deviation of the reference position in the captured image from the position of the workpiece)

[0229] Figure 6 is a diagram illustrating the "amount of deviation within the image" calculated from the captured image Im. As described above, the position determining device 10 calculates the "amount of deviation within the image" from the captured image Im, that is, the "amount of deviation of the position Pw of the workpiece 40 from the reference position Rb" in the captured image Im. Further, the position determining device 10 calculates the amount of deviation (detection deviation Qd) of the position Pw of the workpiece 40 from the detection position Pd corresponding to the reference position Rb from the "amount of deviation within the image".

[0230] Figure 6 In the diagram, the point at which the two-dot chain lines intersect indicates the "reference position Rb (for example, the center point of the captured image Im) in the captured image Im corresponding to the detection position Pd". Further, the five-pointed star indicates the "position Pw of the workpiece 40 (for example, the center position of the workpiece 40)".

[0231] As described above, the position determining device 10 calculates the "amount of deviation of the position Pw of the workpiece 40 from the detection position Pd" from the captured image Im, and calculates the "detection position Pd at the detection time Td" from the "amount of deviation of the position Pw of the workpiece 40 from the detection position Pd" and the "feedback position Pf of the servo control system 20 at the detection time Td". Figure 6In the case where the imaging device 33 performs imaging in a state in which the position Pw of the workpiece 40 deviates to the right with respect to the position of the imaging device 33 as shown in (A) of FIG. 10, the position Pw of the workpiece 40 also deviates to the right with respect to the reference position Rb in the captured image Im.

[0232] Likewise, in the case where the imaging device 33 performs imaging in a state in which the position Pw of the workpiece 40 deviates to the left with respect to the position of the imaging device 33 as shown in (B) of FIG. 10, the position Pw of the workpiece 40 also deviates to the left with respect to the reference position Rb in the captured image Im. Figure 6

[0233] (Adjustment of timing of performing detection)

[0234] (Consideration of response delay time of servo control system)

[0235] Here, in a case where the workpiece 40 is not in a range in which the imaging device 33 can image the workpiece 40 at the timing (i.e., the detection timing Td) at which the imaging device 33 performs imaging, the position determining device 10 cannot calculate the "in-image positional deviation amount" from the captured image Im.

[0236] Therefore, in order to avoid the situation in which the workpiece 40 is not in a range in which the imaging device 33 can image the workpiece 40 at the detection timing Td, the position determining device 10 performs the following processing. That is, the position determining device 10 causes the imaging device 33 to perform imaging at a timing at which the position of the imaging device 33 (i.e., the detection position Pd) coincides with the position Pw of the workpiece 40.

[0237] For example, the position determining device 10 acquires in advance the "position at which the workpiece 40 should be placed" (in other words, a position that is set in advance as a position at which the workpiece 40 is placed in a design drawing or the like) that is the expected detection position pPd from a design drawing or the like of the "substrate on which the workpiece 40 is placed". Also, the position determining device 10 performs the following processing in order to "determine the position Pw of the workpiece 40 that is actually placed on the substrate, to confirm whether the workpiece 40 is placed as in the design drawing or the like".

[0238] That is, the position determining device 10 controls the servo control system 20 to move the imaging device 33 so that the imaging device 33 passes above the "workpiece 40 that should be placed in advance at the expected detection position pPd on the substrate or at a position sufficiently close to the expected detection position pPd". Specifically, the position determining device 10 controls the servo control system 20 along a target track Tt that has the expected detection position pPd of the workpiece 40 that is the detection target as a target position Pt. In a case where the position determining device 10 controls the position of the imaging device 33 via the servo control system 20, the target track Tt corresponds to a movement path of the imaging device 33.​

[0239] Here, regarding the position control of the shooting device 33 by the servo control system 20, without considering the response delay time Ds of the servo control system 20, the following will occur: Figure 7 The large servo position deviation illustrated is the difference between the target position Pt and the feedback position Pf of the servo control system 20.

[0240] Figure 7 This is a graph illustrating the servo position deviation (the difference between the target position Pt and the feedback position Pf) without considering the response delay time Ds of the servo control system 20. For example... Figure 7 As shown in (A), the feedback position Pf of the servo control system 20 is relative to the "target position Pt of the servo control system 20 without considering the response delay time Ds of the servo control system 20", while delaying the response delay time Ds of the servo control system 20. As a result, without considering the response delay time Ds of the servo control system 20, as... Figure 7 As shown in (B), a relatively large servo position deviation will be generated periodically.

[0241] Figure 8 This is a diagram illustrating the servo position deviation (the difference between the target position Pt and the feedback position Pf) when the response delay time Ds of the servo control system 20 is taken into account. Figure 8 In (A), "the target position Pt of the servo control system 20 considering the response delay time Ds of the servo control system 20" is represented by a dashed line. For example... Figure 8 As shown in (A), the feedback position Pf of the servo control system 20 is approximately consistent with the target position Pt of the servo control system 20, taking into account the response delay time Ds of the servo control system 20. As a result, considering the response delay time Ds of the servo control system 20, as... Figure 8 As shown in (B), the servo position deviation becomes sufficiently small.

[0242] Therefore, in order to "cause the imaging device 33 to perform imaging at the moment when the expected position of the imaging device 33 (i.e., the detection position Pd) coincides with the position Pw of the workpiece 40", the position determination device 10 determines the detection time Td as follows: That is, the position determination device 10 sets the moment when "the target position Pt of the servo control system 20 calculated taking into account the response delay time Ds of the servo control system 20" coincides with the expected detection position Ppd as the detection time Td.

[0243] like Figure 8As exemplified, by taking into account the response delay time Ds of the servo control system 20, the "target position Pt of the servo control system 20 at each time" coincides with the "feedback position Pf of the servo control system 20 at each time", or the amount of deviation between the two becomes sufficiently small. Also, as described above, the feedback position Pf of the servo control system 20 can be regarded as the position of the imaging device 33. Therefore, the "position of the imaging device 33 at each time" should coincide with the "target position Pt of the servo control system 20 at each time calculated taking into account the response delay time Ds of the servo control system 20", or the amount of deviation between the two should become sufficiently small.

[0244] As described above, at the detection time Td, the "position of the imaging device 33" should coincide with the intended detection position pPd, or the amount of deviation between the two should become sufficiently small. Also, as described above, the workpiece 40 is placed in advance at the intended detection position pPd, or at a position sufficiently close to the intended detection position pPd. Therefore, at the detection time Td, the position of the imaging device 33 coincides with the position Pw of the workpiece 40, or the amount of deviation between the two becomes sufficiently small.

[0245] As a result, the position determination device 10 can avoid the situation where "at the detection time Td, the workpiece 40 is not in the range where the imaging device 33 can image the workpiece 40".

[0246] In particular, the position determination device 10 causes the imaging device 33 to perform imaging at the detection time Td at which the detection position Pd coincides with the position Pw of the workpiece 40, or the amount of deviation between the two becomes sufficiently small, thereby being able to generate the following imaged image Im. That is, the position determination device 10 can generate the imaged image Im in which the reference position Rb corresponding to the detection position Pd coincides with the position Pw of the imaged workpiece 40, or the amount of deviation between the two is sufficiently small. For the imaged image Im in which the reference position Rb corresponding to the detection position Pd coincides with the position Pw of the imaged workpiece 40, or the amount of deviation between the two is sufficiently small, high-resolution image analysis can be performed, and therefore the position determination device 10 can calculate the detection deviation Qd with high accuracy.

[0247] Figure 9 is a graph showing an example of the action profile when the intended detection position pPd (in other words, the target position Pt) is set to "100". Specifically, Figure 9 (A) of FIG. 10 is about the case where the intended detection position pPd is set to "100", and shows the "target position Pt of the servo control system 20 at each time taking into account the response delay time Ds of the servo control system 20", and the "target speed of the servo control system 20 corresponding thereto". Figure 9(B) is a case where the expected detection position pPd is set to "100", and indicates an amount of deviation of the "feedback position Pf of the servo control system 20" at each time point with respect to the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20".

[0248] In the case where the expected detection position pPd is set to "100", the amount of deviation of the "feedback position Pf of the servo control system 20" at each time point with respect to the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" converges in the following range. It converges in the range of "-0.005 mm (i.e., -5 μm)" to "+0.005 mm (i.e., +5 μm)".

[0249] As shown in (B) of FIG. 10, even if the response delay time Ds of the servo control system 20 is taken into account, the feedback position Pf of the servo control system 20 at each time point of the servo control system 20 does not completely coincide with the target position Pt of the servo control system 20 at each time point of the servo control system 20. That is, even if the response delay time Ds of the servo control system 20 is taken into account, the position of the imaging device 33 at each time point does not completely coincide with the target position Pt of the servo control system 20. Figure 9

[0250] Here, as described above, at the detection time point Td, the target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20 coincides with the expected detection position pPd. Also, at the detection time point Td, the target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20 does not coincide with the feedback position Pf of the servo control system 20 (i.e., the position of the imaging device 33). Therefore, at the detection time point Td, the position of the imaging device 33 does not completely coincide with the expected detection position pPd. However, as described above, by taking into account the "response delay time Ds of the servo control system 20", the difference between the target position Pt of the servo control system 20 and the feedback position Pf of the servo control system 20 becomes sufficiently small. That is, at the detection time point Td, the amount of deviation of the expected detection position pPd from the position of the imaging device 33 becomes sufficiently small.

[0251] Figure 10 (B) of FIG. 10 is a graph illustrating the deviation of the feedback position Pf of the servo control system 20 from the target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20 at the detection time point Td. Specifically, (B) of FIG. 10 indicates the amount of deviation of the feedback position Pf of the servo control system 20 from the target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20 at the detection time point Td. Figure 10 (B) of FIG. 10 indicates the amount of deviation of the feedback position Pf of the servo control system 20 from the target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20 at the detection time point Td. Figure 9 (B) of FIG. 10 and the target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20 near the detection time point Td. Figure 9 ​(B) is an enlarged view of (A). In the enlarged view, the deviation (amount) of the "feedback position Pf of the servo control system 20" from the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" at the detection time Td is indicated with a dotted chain line arrow.

[0252] Figure 11 (A) is a graph showing an example of an operation profile when the expected detection position pPd (in other words, the target position Pt) is set to "40". Specifically, Figure 11 (A) is about the case where the expected detection position pPd is set to "40", and shows the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" and the "target speed of the servo control system 20 corresponding thereto" at each time. Figure 11 (B) is about the case where the expected detection position pPd is set to "40", and shows the deviation amount of the "feedback position Pf of the servo control system 20" from the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" at each time.

[0253] In the case where the expected detection position pPd is set to "40", the deviation amount of the "feedback position Pf of the servo control system 20" from the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" at each time converges within the following range. It converges within the range of "-0.2 mm (i.e., -200 pm)" to "+0.2 mm (i.e., +200 pm)".

[0254] (B) shown in (A) is an enlarged view of (A). In the enlarged view, the deviation (amount) of the "feedback position Pf of the servo control system 20" from the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" at the detection time Td is indicated with a dotted chain line arrow. Figure 9 (B) shown in (A) is an enlarged view of (A). In the enlarged view, the deviation (amount) of the "feedback position Pf of the servo control system 20" from the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" at the detection time Td is indicated with a dotted chain line arrow. Figure 11 (B) shown in (A) is an enlarged view of (A). In the enlarged view, the deviation (amount) of the "feedback position Pf of the servo control system 20" from the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" at the detection time Td is indicated with a dotted chain line arrow. Figure 9 (B) shown in (A) is an enlarged view of (A). In the enlarged view, the deviation (amount) of the "feedback position Pf of the servo control system 20" from the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" at the detection time Td is indicated with a dotted chain line arrow. Figure 11 (B) shown in (A) is an enlarged view of (A). In the enlarged view, the deviation (amount) of the "feedback position Pf of the servo control system 20" from the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" at the detection time Td is indicated with a dotted chain line arrow.

[0255] (B) shown in (A) is an enlarged view of (A). In the enlarged view, the deviation (amount) of the "feedback position Pf of the servo control system 20" from the "target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20" at the detection time Td is indicated with a dotted chain line arrow. Figure 11As shown in (A), when the moving distance of the imaging device 33 is shortened, the motion profile becomes a triangular wave, making it more difficult for the feedback position Pf to follow the target position Pt of the servo control system 20, taking into account the response delay time Ds of the servo control system 20. However, as mentioned above, by taking into account the response delay time Ds of the servo control system 20, the deviation between the expected detection position pPd at the detection time Td and the position of the imaging device 33 can be reduced.

[0256] (Consideration of response delay time of the detection system)

[0257] As explained so far, the position determining device 10 generates the captured image Im at the moment when the position of the imaging device 33 and the position Pw of the workpiece 40 become consistent or the deviation between them becomes sufficiently small, i.e., the detection time Td.

[0258] However, even if the position determination device 10 outputs a shooting instruction to the imaging device 33 at the detection time Td, the imaging device 33 cannot perform shooting at the detection time Td. This is because, as mentioned above, the communication between the detection system 30, which includes the imaging device 33, and the position determination device 10 is performed in each control cycle Cc, and there is also a response delay time Dd of the detection system 30 (e.g., the response delay time Dd of the imaging device 33). Therefore, the position determination device 10 outputs the detection instruction time aTd to the detection system 30 in advance so that the imaging device 33 can perform shooting at the detection time Td.

[0259] That is, the position determination device 10 (especially) Figure 1 The detection timing determination unit 1150 first sets the detection timing Td as "the moment when the target position Pt of the servo control system 20, taking into account the response delay time Ds of the servo control system 20, coincides with the expected detection position pPd". For example, the detection timing determination unit 1150 sets the detection timing Td as the moment when the response delay time Ds of the servo control system 20 has elapsed from the moment when the target position Pt of the servo control system 20 coincides with the expected detection position pPd. Furthermore, the detection timing determination unit 1150 sets the detection indication time aTd as "the moment when the detection timing Td is corrected using the response delay time Dd of the detection system 30". For example, the detection timing determination unit 1150 sets the detection indication time aTd as "the moment when the response delay time Dd of the detection system 30 has been traced back from the detection timing Td". Furthermore, the position determination device 10 (especially Figure 1 The instruction unit 1210) pre-outputs the detection indication time aTd to the detection system 30.

[0260] The position determination device 10 outputs the detection indication time aTd, which is the time when the detection time Td is corrected using the response delay time Dd of the detection system 30, to the detection system 30 in advance. This enables the imaging device 33 to perform imaging at the detection time Td. Furthermore, at the detection time Td, the target position Pt of the servo control system 20, taking into account the response delay time Ds of the servo control system 20, coincides with the expected detection position pPd. Therefore, if the target position Pt of the servo control system 20, taking into account the response delay time Ds of the servo control system 20, coincides with the feedback position Pf of the servo control system 20, then the following relationship holds: At the detection time Td, the feedback position Pf of the servo control system 20 coincides with the expected detection position pPd. In other words, at the detection time Td, the position of the imaging device 33 coincides with the expected detection position pPd; that is, at the detection time Td, the detection position Pd coincides with the expected detection position pPd.

[0261] (A summary of the techniques used to obtain test results that can be analyzed with high precision)

[0262] The content explained so far is summarized as follows. Specifically, the position determining device 10 (especially...) Figure 1 The detection timing determination unit 1150 first determines the detection timing Td based on the moment when "the target position Pt of the servo control system 20 calculated based on the target trajectory Tt coincides with the expected detection position pPd" and the response delay time Ds of the servo control system 20.

[0263] Furthermore, the position determination device 10 (detection time determination unit 1150) calculates the detection indication time aTd, which is the time when the detection time Td is corrected using the "response delay time Dd of the detection system 30". The position determination device 10 sends the detection indication time aTd to the detection system 30 (especially the communication device 31) in advance, thereby causing the imaging device 33 to perform imaging at the detection time Td.

[0264] The imaging device 33 performs imaging at the detection time Td, thereby generating an image Im that is consistent with the expected detection position pPd, which is the target position Pt of the servo control system 20 considering the response delay time Ds of the servo control system 20.

[0265] As mentioned earlier, the target position Pt of the servo control system 20, taking into account the response delay time Ds of the servo control system 20, should be consistent with the position of the imaging device 33, or the deviation between the two should be sufficiently small. Furthermore, the position of the imaging device 33 and the detection position Pd can be considered to be the same position.

[0266] Therefore, at the detection time Td, the intended detection position pPd and the detection position Pd should coincide, or the amount of deviation of the two should become sufficiently small. Also, the workpiece 40 is placed in advance at the intended detection position pPd, or at a position sufficiently close to the intended detection position pPd.

[0267] Therefore, in the captured image Im captured at the detection time Td, the position Pw of the workpiece 40 (for example, the center position of the workpiece 40) and the reference position Rb (for example, the center point of the captured image Im) should coincide, or the amount of deviation of the two should become sufficiently small. That is, in the captured image Im, the workpiece 40 will be disposed around the reference position Rb, for example, in the approximate center of the captured image Im.

[0268] Therefore, the position determination device 10 can increase the proportion of the area in which the workpiece 40 is captured in the entire captured image Im, that is, can generate a captured image Im in which the workpiece 40 is captured in an enlarged manner, compared to the captured image Im in which the workpiece 40 is not disposed in the approximate center. Therefore, the position determination device 10 can perform high-precision image analysis with improved pixel resolution of the captured image Im in which the workpiece 40 is captured in an enlarged manner.

[0269] Regarding the captured image Im, the required capturing range is determined in accordance with the size of the workpiece 40 (the area of the surface of the workpiece 40 to be captured) and the assumed "magnitude of positional deviation (gripping deviation)".

[0270] Difference in influence of analysis result of detection position (amount of detection deviation) due to difference in required precision

[0271] Figure 12 is a diagram that explains the pixel resolution required for image analysis of the captured image Im due to the difference in the precision (high precision) with which the position Pw of the workpiece 40 is determined, that is, due to the difference in the required precision with respect to the position Pw of the workpiece 40 to be determined. Figure 12 (A) of Figure 12 In each of the diagrams of (A) of and (B) of, the point at which the two-dot chain lines intersect indicates the "reference position Rb in the captured image Im corresponding to the detection position Pd (for example, the center point of the captured image Im)". The pentagram indicates the "position Pw of the workpiece 40 (for example, the center position of the workpiece 40)". Also, Figure 12 (A) of Figure 12 In the example shown in each of the diagrams of (A) of and (B) of, the amount of deviation of the detection position Pd and the position Pw of the workpiece 40, that is, the detection deviation Qd, is assumed to be "±5 μm".

[0272] In the following description, the "increasing the pixel resolution (or the required accuracy)" means "reducing the value of the pixel resolution (or the required accuracy)". If the position Pw of the workpiece 40 is to be determined with high accuracy, the detection deviation Qd, which is the amount of deviation of the detection position Pd from the position Pw of the workpiece 40, must be calculated with high accuracy. Also, if the detection deviation Qd, which is the amount of deviation of the detection position Pd from the position Pw of the workpiece 40, is to be calculated with high accuracy, the pixel resolution of the captured image Im must be increased. That is, increasing the required accuracy is increasing the pixel resolution. Details are described below.

[0273] For example, if the required accuracy is a low value such as "100 μm", the amount of deviation of the detection position Pd from the position Pw of the workpiece 40, which is "± 5 μm", is not problematic when the position Pw of the workpiece 40 is determined. That is, even if the detection deviation Qd, which is the amount of deviation of the detection position Pd from the position Pw of the workpiece 40, cannot be calculated as "± 5 μm" based on the image analysis of the captured image Im, it is not problematic. Therefore, the pixel resolution can be, for example, about "10 μm".

[0274] On the other hand, if the required accuracy is a high value such as "10 μm", the amount of deviation of the detection position Pd from the position Pw of the workpiece 40, which is "± 5 μm", must be calculated when the position Pw of the workpiece 40 is determined. Also, in order to calculate "± 5 μm" as the detection deviation Qd, which is the amount of deviation of the detection position Pd from the position Pw of the workpiece 40, based on the image analysis of the captured image Im, the pixel resolution must be set to about "1 μm".

[0275] Therefore, in order to determine the position Pw of the workpiece 40 with high accuracy, that is, in order to determine the position Pw of the workpiece 40 to satisfy a high required accuracy, the pixel resolution required when the image analysis of the captured image Im is performed must be increased.

[0276] Figure 12 The captured image Im in which the ratio of the region of the workpiece 40 captured in the entire captured image Im is large as shown in (B) of FIG. 10 can increase the pixel resolution of the workpiece 40 in the captured image Im compared to the captured image Im in which the ratio of the region of the workpiece 40 captured in the entire captured image Im is small as shown in (A) of FIG. 10. Figure 12 The captured image Im in which the ratio of the region of the workpiece 40 captured in the entire captured image Im is large as shown in (B) of FIG. 10 can increase the pixel resolution of the workpiece 40 in the captured image Im compared to the captured image Im in which the ratio of the region of the workpiece 40 captured in the entire captured image Im is small as shown in (A) of FIG. 10.

[0277] That is, in order to accurately calculate the "amount of deviation of the detection position Pd from the position Pw of the workpiece 40", that is, the detection deviation Qd, based on the image analysis of the captured image Im, it is necessary to increase the possible pixel resolution with respect to the captured image Im. Also, in order to increase the possible pixel resolution with respect to the captured image Im, it is desirable to increase the proportion of the region of the workpiece 40 captured in the entire captured image Im, for example, it is desirable to enlarge the captured image Im of the workpiece 40.

[0278] (Modification of the Servo Target Position)

[0279] Figure 13 is a diagram illustrating the process performed by the position determining device 10 when sequentially determining the positions Pw of the plurality of workpieces 40. Figure 13 In the example shown, for example, it is assumed that the position determining device 10 sequentially determines the positions Pw(A), Pw(B), Pw(C),... Pw(Z) of the workpiece 40(A), the workpiece 40(B), the workpiece 40(C),... the workpiece 40(Z) placed on one substrate.

[0280] Here, it is assumed that in the design drawing of the substrate on which the workpiece 40(A), the workpiece 40(B), the workpiece 40(C),... the workpiece 40(Z) are placed, the diameters of the workpiece 40(A), the workpiece 40(B), the workpiece 40(C),... the workpiece 40(Z) are respectively set in advance. Figure 13 The following two information is exemplified.

[0281] First, it is assumed that the diameters of the workpiece 40(A), the workpiece 40(B), the workpiece 40(C),... the workpiece 40(Z) are respectively set in advance. to be about 200 μm.

[0282] Second, it is assumed that the expected detection positions pPd of the workpiece 40(A), the workpiece 40(B), the workpiece 40(C),... the workpiece 40(Z) are set apart from each other by 500 μm. That is, the expected detection position pPd(A) of the workpiece 40(A) and the expected detection position pPd(B) of the workpiece 40(B) are set apart from each other by 500 μm. The expected detection position pPd(B) of the workpiece 40(B) and the expected detection position pPd(C) of the workpiece 40(C) are set apart from each other by 500 μm. The expected detection position pPd(C) of the workpiece 40(C) and the expected detection position pPd(D) of the workpiece 40(D) are set apart from each other by 500 μm. The expected detection position pPd(Y) of the workpiece 40(Y) and the expected detection position pPd(Z) of the workpiece 40(Z) are set apart from each other by 500 μm.

[0283] (Method of Setting the Detection Timing in Accordance with the Design Drawing)

[0284] Therefore, the position determining device 10 controls the position of the imaging device 33 in accordance with the "design drawing of the substrate on which the workpiece 40(A), the workpiece 40(B), the workpiece 40(C),... the workpiece 40(Z) are placed" and causes the imaging device 33 to perform imaging. For example, the position determining device 10 causes the imaging device 33 to perform imaging every time the imaging device 33 is moved by 500 μm during movement of the imaging device 33.

[0285] For example, if the expected detection position pPd(A) of the workpiece 40(A) is 500 μm, the expected detection position pPd(B) of the workpiece 40(B) is 1000 μm, and the expected detection position pPd(C) of the workpiece 40(C) is 1500 μm, the position determining device 10 performs the following processing. That is, the position determining device 10 causes the imaging device 33 to perform imaging at predetermined times, i.e., detection times Td(A), Td(B), and Td(C), at which the imaging device 33 reaches 500 μm, 1000 μm, and 1500 μm, respectively.

[0286] (Method for predicting the position of the next detection object based on the position of the previous detection object)

[0287] However, if the position determining device 10 determines the position Pw(P) of the workpiece 40(P), the position determining device 10 can also predict the position at which the workpiece 40(Q) that is the object whose position Pw is to be determined next after the workpiece 40(P) should be located, using the determined position Pw(P).

[0288] That is, it is known in advance that the expected detection position pPd(P) of the workpiece 40(P) and the expected detection position pPd(Q) of the workpiece 40(Q) are separated from each other by 500 μm. Therefore, the position determining device 10 predicts the position at which the workpiece 40(Q) should be located, based on the position Pw(P) of the workpiece 40(P) and the displacement amount (reference displacement amount Rd(PQ), i.e., "500 μm") of the expected detection position pPd(P) from the expected detection position pPd(Q).

[0289] Specifically, the position determining device 10 sets the position advanced from the position Pw(P) of the workpiece 40(P) by the reference displacement amount Rd(PQ) (i.e., 500 μm) as the position at which the workpiece 40(Q) should be located (i.e., the corrected expected detection position pPd'(Q) of the workpiece 40(Q)).

[0290] Further, the position determining device 10 can set the time at which the position of the imaging device 33 coincides with the corrected expected detection position pPd'(Q) as the corrected detection time Td'(Q) and cause the imaging device 33 to perform imaging at the corrected detection time Td'(Q).

[0291] For example, assume that the expected detection position pPd(P) of the workpiece 40(P) is "5500 μm" and the actual position Pw(P) of the workpiece 40(P) is "5499 μm". In this case, the position determination device 10 calculates the "corrected expected detection position pPd'(Q) of the workpiece 40(Q)" as follows. That is, the position determination device 10 sets the position advanced from the position Pw(P) (i.e., "5499 μm") by the reference displacement amount Rd(PQ) (i.e., "500 μm") as the "corrected expected detection position pPd'(Q) of the workpiece 40(Q)". Specifically, the position determination device 10 sets "5999 μm" as the "corrected expected detection position pPd'(Q) of the workpiece 40(Q)".

[0292] In a case where the expected detection positions pPd of the plurality of workpieces 40 are separated from each other by 500 μm and the actual positions Pw of the plurality of workpieces 40 are actually separated from each other by 499 μm, the expected detection position pPd and the position Pw are separated from each other by 10 μm for the 11th workpiece 40. As a result, for example, even if the photographing device 33 performs photographing at the detection timing Td at which the expected detection position pPd of the 11th workpiece 40 coincides with the position of the photographing device 33, it can be impossible to photograph the 11th workpiece 40 in the photographed image Im.

[0293] If the "difference between the expected detection positions pPd of the plurality of workpieces 40 (e.g., 500 μm)" is referred to as a "reference displacement amount Rd" and the "difference between the actual positions Pw of the plurality of workpieces 40 (e.g., 499 μm)" is referred to as an "actual displacement amount Ad", the following can be stated for both. That is, although the difference dP between the reference displacement amount Rd and the actual displacement amount Ad is a sufficiently small value (1 μm in the example above), if the difference dP is accumulated "n" times, the amount of deviation between the expected detection position pPd and the position Pw can become "n x difference dP" in the "n+1"th workpiece 40.

[0294] Therefore, in order to avoid a case where the amount of deviation between the expected detection position pPd and the position Pw with respect to a certain workpiece 40 (e.g., the workpiece 40(Q)) becomes large due to accumulation of the difference dP, the position determination device 10 performs the following processing.

[0295] That is, the position determining device 10 predicts the position where the workpiece 40 (Q) should be, based on the position Pw (P) of the workpiece 40 (P) and the "displacement amount of the expected detection position pPd (P) from the expected detection position pPd (Q), that is, the reference displacement amount Rd (PQ)". For example, the position determining device 10 sets the position advanced from the position Pw (P) by the "displacement amount of the expected detection position pPd (P) from the expected detection position pPd (Q), that is, the reference displacement amount Rd (PQ)" as the corrected "position where the workpiece 40 (Q) should be". That is, the position determining device 10 sets the position advanced from the position Pw (P) by the reference displacement amount Rd (PQ) as the "corrected expected detection position pPd' (Q) with respect to the workpiece 40 (Q)".

[0296] §2. Structure Example

[0297] For the position determining device 10 whose outline has been explained so far, details thereof will be explained next using Figure 1 .

[0298] Figure 1 is a diagram showing a structure example of the position determining device 10. The position determining device 10 includes, for example, as functional blocks, a target track acquisition section 1110 that acquires the target track Tt and a position command generation section 1120 that generates the target position Pt at each timing based on the target track Tt.

[0299] Further, the position determining device 10 includes, for example, as functional blocks, a detection deviation amount calculation section 1160 that calculates the detection deviation amount Qd and a detection position calculation section 1170 that calculates the detection position Pd. Furthermore, the position determining device 10 includes, for example, as a functional block, a position determination section 1180 that determines the position Pw of the workpiece 40 based on the detection deviation amount Qd and the detection position Pd.

[0300] Figure 1 The illustrated position determining device 10 includes, for example, as functional blocks, a response delay time calculation section 1130 that calculates the response delay time Ds of the servo control system 20 and a detection timing decision section 1150 that decides the detection instruction timing aTd. Furthermore, the position determining device 10 includes, for example, as functional blocks, a command value generation section 1140 that generates the command value Cm based on the "target position Pt at each timing" and a communication section 1200 that performs communication with the servo control system 20 or the like.

[0301] In addition to the functional blocks described above, the position determination device 10 may also include, for example, the following structures (functional blocks). That is, the position determination device 10 may also include a servo control unit, which makes the feedback position Pf of the servo control system 20 at each moment consistent with the target position Pt of the servo control system 20 at each moment (especially considering the target position Pt taking into account the response delay time Ds of the servo control system 20). For the sake of brevity, the structures of the position determination device 10 that are not directly related to this embodiment are omitted from the description and block diagrams. However, depending on the actual implementation, the position determination device 10 may also include these omitted structures.

[0302] The functional blocks included in the location determination device 10 can be implemented, for example, by having a central processing unit (CPU) or the like read a program stored in a storage device (storage unit 1300) implemented as a read-only memory (ROM), non-volatile random access memory (NVRAM), etc., and execute it in a random access memory (RAM) (not shown). Hereinafter, details of the functional blocks other than the storage unit will be explained first.

[0303] (Regarding functional blocks other than the storage unit)

[0304] The target track acquisition unit 1110 receives target track data (target track Tt) from an external source (e.g., a user) and outputs the received target track Tt to the position command generation unit 1120. The target track Tt includes the expected detection position pPd of the workpiece 40 at which the position determination device 10 should determine position Pw (i.e., the position where the workpiece 40 should be) as the target position Pt, for example, indicating that the movement path of the imaging device 33 via the location is set above the expected detection position pPd.

[0305] Figure 3In the illustrated substrate, the arrow indicated by a dashed line is an example of the target track Tt. For example, in a case where the position-determining device 10 wants to determine the respective positions Pw(A), Pw(B), Pw(C),..., Pw(Z) of the workpieces 40(A), 40(B), 40(C),..., 40(Z) placed on the substrate, the target track Tt includes the following target positions Pt. That is, the target track Tt includes the expected detection positions pPd(A), pPd(B), pPd(C),..., pPd(Z) of the workpieces 40(A), 40(B), 40(C),..., 40(Z), respectively, as the target positions Pt.

[0306] The position command generation section 1120 generates the "target position Pt at each time" from the target track Tt, and outputs the generated "target position Pt at each time" to the command value generation section 1140.

[0307] The command value generation section 1140 acquires the "target position Pt at each time" from the position command generation section 1120, and acquires the "response delay time Ds of the servo control system 20" from the response delay time calculation section 1130. The command value generation section 1140 generates the "command value Cm for each control cycle Cc of the servo control system 20" from the "target position Pt at each time", taking into account the "response delay time Ds of the servo control system 20". The command value generation section 1140 outputs the generated "command value Cm for each control cycle Cc of the servo control system 20" to the communication section 1200, particularly to the command section 1210.

[0308] For example, if the expected detection position pPd(n) at the time T(n) is P(n) in the "target position Pt at each time" acquired from the position command generation section 1120, the command value generation section 1140 generates the following command value Cm. That is, the command value generation section 1140 generates the command value Cm that sets the expected detection position pPd(n) of the "time that is retrogressed by the'response delay time Ds of the servo control system 20' from the time T(n)" to P(n).

[0309] Here, in a case where the position specifying apparatus 10 controls a plurality of servo control systems 20, the command value generating section 1140 executes the following processing in order to synchronize the control results (control amounts) of the plurality of servo control systems 20. That is, for each of the plurality of servo control systems 20, the time from when each of the plurality of servo drives 21 receives the command value Cm until the corresponding servo motor 22 responds (response delay time Ds) is sometimes different among the plurality of servo control systems 20. Therefore, the command value generating section 1140 generates the command value Cm for each of the plurality of servo control systems 20 in consideration of the response delay time Ds of each of the plurality of servo control systems 20.

[0310] Specifically, the command value generating section 1140 generates the command value Cm(A) for each control cycle Cc of the servo control system 20(A) in consideration of the response delay time Ds(A) of the servo control system 20(A) from the "target position Pt at each timing". The command value generating section 1140 generates the command value Cm(B) for each control cycle Cc of the servo control system 20(B) in consideration of the response delay time Ds(B) of the servo control system 20(B) from the "target position Pt at each timing".

[0311] By generating the command value Cm for each of the plurality of servo control systems 20 in consideration of the response delay time Ds that is different among the plurality of servo control systems 20, the command value generating section 1140 is able to synchronize the control results of each of the plurality of servo control systems 20.

[0312] The response delay time calculating section 1130 acquires servo parameters that indicate the control characteristics of the servo control systems 20 (particularly, the servo drives 21), and calculates the "response delay time Ds of the servo control system 20" from the acquired servo parameters. The response delay time calculating section 1130 outputs the calculated "response delay time Ds of the servo control system 20" to the command value generating section 1140 and the detection timing deciding section 1150.

[0313] The response delay time calculating section 1130 can also use the position loop gain of the servo drive 21 as the servo parameter that indicates the control characteristics of the servo control system 20 to calculate the response delay time Ds of the servo control system 20. For example, the response delay time calculating section 1130 can set the response delay time Ds(A) of the servo control system 20(A) to the inverse of the position loop gain that is one of the servo parameters of the servo drive 21(A). The response delay time calculating section 1130 can set the response delay time Ds(B) of the servo control system 20(B) to the inverse of the position loop gain that is one of the servo parameters of the servo drive 21(B).

[0314] The detection time decision section 1150 acquires the "target position Pt at each time" from the position command correction section 1120 and acquires the "response delay time Ds of the servo control system 20" from the response delay time calculation section 1130. Also, the detection time decision section 1150 refers to the storage section 1300, acquires the "information related to the expected detection position pPd" from the expected detection position table 1310, and acquires the "response delay time Dd of the detection system 30" from the detector response delay time table 1320. The detection time decision section 1150 calculates the detection time Td and the detection instruction time aTd based on the "target position Pt at each time", the "response delay time Ds of the servo control system 20", the "information related to the expected detection position pPd", and the "response delay time Dd of the detection system 30". Also, the detection time decision section 1150 outputs the calculated detection instruction time aTd to the communication section 1200, particularly to the command section 1210.

[0315] Specifically, the detection time decision section 1150 first calculates the detection time Td based on the "target position Pt at each time", the "response delay time Ds of the servo control system 20", and the "information related to the expected detection position pPd". That is, the detection time decision section 1150 sets the time calculated as the time at which the target position Pt coincides with the expected detection position pPd as the detection time Td, taking into account the "response delay time Ds of the servo control system 20".

[0316] The detection time decision section 1150 next calculates the detection instruction time aTd based on the detection time Td and the "response delay time Dd of the detection system 30". That is, the detection time decision section 1150 sets the time in which the detection time Td is corrected using the "response delay time Dd of the detection system 30" as the detection instruction time aTd.

[0317] For example, if the time at which the target position Pt coincides with the expected detection position pPd in the absence of the "response delay time Ds of the servo control system 20" is time TO, the detection time decision section 1150 calculates the detection time Td and the detection instruction time aTd as follows. That is, the detection time decision section 1150 sets the time at which the time TO at which the "target position Pt coincides with the expected detection position pPd" has elapsed by the "response delay time Ds of the servo control system 20" as the detection time Td. Also, the detection time decision section 1150 sets the time at which the detection time Td is traced back by the "response delay time Dd of the detection system 30" as the detection instruction time aTd.

[0318] The detection deviation amount calculation section 1160 acquires the captured image Im from the communication section 1200, particularly from the control amount acquisition section 1220. The detection deviation amount calculation section 1160 performs image analysis on the captured image Im, and calculates the "in-image positional deviation amount" in the captured image Im (i.e., the "deviation amount of the position Pw of the workpiece 40 from the reference position Rb" in the captured image Im). The detection deviation amount calculation section 1160 determines the detection deviation amount Qd (i.e., the "deviation amount of the detection position Pd from the position Pw of the workpiece 40") from the calculated "in-image positional deviation amount". The detection deviation amount calculation section 1160 outputs the determined detection deviation amount Qd to the position determination section 1180.

[0319] Specifically, the detection deviation amount calculation section 1160 performs image analysis on the captured image Im, and calculates the "in-image positional deviation amount" of the position Pw of the workpiece 40 (e.g., the center position of the workpiece 40) from the reference position Rb in the captured image Im. Also, the detection deviation amount calculation section 1160 determines the "deviation amount of the position Pw of the workpiece 40 at the detection time point Td from the detection position Pd" corresponding to the "in-image positional deviation amount", i.e., the detection deviation amount Qd, from the calculated "in-image positional deviation amount".

[0320] However, the detection deviation amount calculation section 1160 can also acquire the image analysis result of the captured image Im from the communication section 1200 (particularly, the control amount acquisition section 1220) instead of the captured image Im, and particularly, can acquire the "in-image positional deviation amount" in the captured image Im. The detection deviation amount calculation section 1160 can calculate the "in-image positional deviation amount" from the captured image Im as long as it can determine the detection deviation amount Qd from the "in-image positional deviation amount" in the captured image Im. The calculation of the "in-image positional deviation amount" from the captured image Im can be performed by the detection deviation amount calculation section 1160 or the detection system 30.

[0321] That is, the position determination apparatus 10 (particularly, the control amount acquisition section 1220) can also receive the "in-image positional deviation amount" calculated by the detection system 30 (e.g., the captured control apparatus 32) through image analysis on the captured image Im. Also, the detection deviation amount calculation section 1160 can calculate the detection deviation amount Qd from the "in-image positional deviation amount" received by the captured control apparatus 32.

[0322] The detection position calculation section 1170 acquires the "feedback position Pf of the servo control system 20 for each control period Cc" from the communication section 1200, particularly from the control amount acquisition section 1220. The detection position calculation section 1170 calculates the "feedback position Pf at the detection time point Td" by interpolation calculation from the "feedback position Pf of the servo control system 20 for each control period Cc". The detection position calculation section 1170 outputs the calculated "feedback position Pf at the detection time point Td" to the position determination section 1180.

[0323] For example, in a case where n is set to "an integer of 0 or more" and the detection time Td is a time between the "n-th control period Cc(n)" and the "(n+1)-th control period Cc(n+1)", the detection position calculating section 1170 performs the following processing. That is, the detection position calculating section 1170 first acquires the "feedback position Pf(n) in the control period Cc(n)" and the "feedback position Pf(n+1) in the control period Cc(n+1)". Then, the detection position calculating section 1170 calculates the "feedback position Pf at the detection time Td" by interpolation calculation based on the feedback position Pf(n) and the feedback position Pf(n+1). For example, the detection position calculating section 1170 calculates the "feedback position Pf at the detection time Td" based on an intersection of a straight line (or a curved line) connecting the feedback position Pf(n) and the feedback position Pf(n+1) and a straight line indicating the detection time Td.

[0324] That is, the detection position calculating section 1170 can also calculate the "feedback position Pf at the detection time Td" by interpolation calculation based on a plurality of "feedback positions Pf of the servo control system 20 in each control period Cc" acquired in each control period Cc.

[0325] The position determining section 1180 acquires the detection deviation Qd (i.e., the deviation of the detection position Pd from the position Pw of the workpiece 40) from the detection deviation calculating section 1160 and acquires the "feedback position Pf at the detection time Td" from the detection position calculating section 1170. As described above, the "feedback position Pf at the detection time Td" is the "position of the imaging device 33 at the detection time Td", i.e., corresponds to the detection position Pd. Therefore, the position determining section 1180 determines the position Pw of the workpiece 40 based on the detection deviation Qd (i.e., the deviation of the detection position Pd from the position Pw of the workpiece 40) and the "feedback position Pf at the detection time Td" (i.e., the detection position Pd).

[0326] The communication section 1200 periodically performs communication with the servo control system 20 and the detection system 30 as slaves in each control period Cc, including the command section 1210 and the control amount acquiring section 1220.

[0327] The command section 1210 acquires the "command value Cm for each control period Cc of the servo control system 20" from the command value generating section 1140 and acquires the detection instruction time aTd from the detection time deciding section 1150. The command section 1210 outputs (transmits) the command value Cm and the control signal Cs (control instruction) including the detection instruction time aTd to the servo control system 20 and the detection system 30 as slaves in each control period Cc.

[0328] The control amount acquisition section 1220 acquires (receives) data indicating the control results (e.g., the control amounts and the detection results) output from the slave servo control system 20 and the detection system 30 as the slaves every control cycle Cc. That is, the control amount acquisition section 1220 acquires information indicating the "feedback position Pf of the servo control system 20 every control cycle Cc" from the servo control system 20 and acquires the captured image Im from the detection system 30. The control amount acquisition section 1220 transmits the information indicating the "feedback position Pf of the servo control system 20 every control cycle Cc" to the detected position calculation section 1170 and outputs the captured image Im to the detected deviation calculation section 1160.

[0329] The information indicating the "feedback position Pf of the servo control system 20 every control cycle Cc" can include information indicating the time at which the feedback position Pf is detected, i.e., the measured time Tm, in addition to the "feedback position Pf of the servo control system 20 every control cycle Cc". In this case, the detected position calculation section 1170 acquires, for example, the "feedback position Pf(n) in the control cycle Cc(n)" and the "measured time Tm(n) at which the feedback position Pf(n) is detected". Also, the detected position calculation section 1170 acquires the "feedback position Pf(n+1) in the control cycle Cc(n+1)" and the "measured time Tm(n+1) at which the feedback position Pf(n+1) is detected". Furthermore, the detected position calculation section 1170 calculates the "feedback position Pf at the detection time Td" from the feedback position Pf(n) at the measured time Tm(n) and the feedback position Pf(n+1) at the measured time Tm(n+1).

[0330] Also, as described above, the control amount acquisition section 1220 can acquire, instead of the captured image Im, the "position deviation within the image" calculated by the detection system 30 (e.g., the imaging control device 32) through image analysis of the captured image Im from the detection system 30. In this case, the control amount acquisition section 1220 outputs the acquired "position deviation within the image" to the detected deviation calculation section 1160.

[0331] (Regarding the case where the positions of a plurality of workpieces are sequentially determined)

[0332] In the case where the position determination device 10 sequentially determines the positions Pw of a plurality of workpieces 40 placed on one substrate, for example, each functional block included in the position determination device 10 can perform the following processing.

[0333] For example, when the position determination section 1180 determines the position Pw(P) of a certain workpiece 40(P), the position determination section 1180 notifies the position command generation section 1120 of the determined position Pw(P) of the certain workpiece 40(P).

[0334] The position command generating section 1120 refers to the expected detection position table 1310 to acquire the "expected detection position pPd(P) of the workpiece 40 (P)" and the "expected detection position pPd(Q) of the workpiece 40 (Q) in which the position Pw should be determined after the workpiece 40 (P)". Further, the position command generating section 1120 calculates the reference displacement amount Rd(PQ) from the expected detection position pPd(P) to the expected detection position pPd(Q). The position command generating section 1120 calculates the position in which the workpiece 40 (Q) in which the position Pw should be determined after the workpiece 40 (P) should be positioned, based on the calculated reference displacement amount Rd(PQ) and the "position Pw(P)" notified from the position determining section 1180. That is, the position command generating section 1120 sets the position advanced from the position Pw(P) by the reference displacement amount Rd(PQ) as the position in which the workpiece 40 (Q) should be positioned (i.e., the "corrected expected detection position pPd'(Q) of the workpiece 40 (Q)").

[0335] The position command generating section 1120 generates the "target position Pt' at each timing" based on the target track Tt' in which the "corrected expected detection position pPd'(Q) of the workpiece 40 (Q)" is included instead of the "expected detection position pPd(Q) of the workpiece 40 (Q)" as the target position Pt. Further, the position command generating section 1120 notifies the "target position Pt' at each timing" to the command value generating section 1140 and the detection timing deciding section 1150.

[0336] The command value generating section 1140 generates the "command value Cm' for each control period Cc of the servo control system 20" based on the "target position Pt' at each timing" notified from the position command generating section 1120, taking into account the response delay time Ds of the servo control system 20.

[0337] The detection timing deciding section 1150 calculates the timing in which the workpiece 40 (Q) should be imaged by the imaging device 33, i.e., the detection timing Td'(Q), using the "target position Pt' at each timing" notified from the position command generating section 1120. The detection timing deciding section 1150 calculates the detection timing Td'(Q) based on the "target position Pt' at each timing", the response delay time Ds of the servo control system 20, and the "corrected expected detection position pPd'(Q) of the workpiece 40 (Q)". That is, the detection timing deciding section 1150 sets the timing at which the "target position Pt' at each timing" coincides with the "corrected expected detection position pPd'(Q) of the workpiece 40 (Q)" taking into account the response delay time Ds of the servo control system 20, as the detection timing Td'(Q).

[0338] For example, if the time at which the target position Pt' coincides with the "corrected expected detection position pPd'(Q)" in the absence of the "response delay time Ds of the servo control system 20" is time T'0, the detection time decision section 1150 calculates the detection time Td'(Q) as follows. That is, the detection time decision section 1150 sets the time at which the "response delay time Ds of the servo control system 20" has elapsed from the time T'0 at which the target position Pt' coincides with the "corrected expected detection position pPd'(Q)" as the detection time Td'(Q).

[0339] Also, the detection time decision section 1150 sets the time at which the "response delay time Dd of the detection system 30" has elapsed from the detection time Td'(Q) as the detection instruction time aTd'(Q). The instruction section 1210 notifies the detection instruction time aTd'(Q) to the detection system 30 in advance, whereby the imaging device 33 is caused to perform imaging at the detection time Td'(Q).

[0340] (Regarding the storage section)

[0341] The storage section 1300 is a storage device that stores various data used by the position determination device 10. In addition, the storage section 1300 can also non-temporarily store (1) a control program, (2) an OS program, (3) an application program for executing various functions possessed by the position determination device 10, and (4) various data read out when the application program is executed, which are executed by the position determination device 10. The data of (1) to (4) is stored, for example, in a non-volatile storage device such as a read only memory (ROM), a flash memory, an erasable programmable ROM (EPROM), an electrically EPROM (EEPROM (registered trademark)), a hard disc drive (HDD), or the like. The position determination device 10 can also include a temporary storage section not shown. The temporary storage section is a so-called work memory that temporarily stores data used in the calculation and the calculation results and the like in the course of various processes executed by the position determination device 10, and includes a volatile storage device such as a random access memory (RAM). As for which data is stored in which storage device, it is appropriately decided in terms of convenience for the purpose of use of the position determination device 10, cost, or physical limitations, or the like. The storage section 1300 further stores an expected detection position table 1310 and a detector response delay time table 1320.

[0342] The expected detection position table 1310 stores "information related to the expected detection position pPd", specifically, it stores "information for determining the expected detection position pPd". The expected detection position pPd is stored in advance in the expected detection position table 1310 as "the position where the workpiece 40 should be" based on the design drawing of "the substrate on which the workpiece 40 is placed".

[0343] The "response delay time Dd of detection system 30" is stored in the detector response delay time schedule 1320.

[0344] In addition to the expected detection position table 1310 and the detector response delay table 1320, the storage unit 1300 can also store servo parameters representing the control characteristics of the servo control system 20 (especially the servo driver 21). In particular, the storage unit 1300 can also store servo parameters representing the control characteristics of each of the multiple servo control systems 20 (especially the servo driver 21).

[0345] (A summary of information regarding location determination devices)

[0346] Used up to this point Figures 1 to 13 The content described can be summarized as follows. The position determination device 10 is a position determination device for determining the position Pw of the workpiece 40, which is the object of detection. The position determination device 10 includes an instruction unit 1210, a control quantity acquisition unit 1220 (acquisition unit), a detection deviation calculation unit 1160, a detection position calculation unit 1170, and a position determination unit 1180.

[0347] The command unit 1210 outputs the command value Cm calculated based on the target track Tt to the servo control system 20, which controls the position of at least one of the imaging device 33 (detection device) and the workpiece 40. The target track Tt includes a pre-set expected detection position pPd, which is the "position where the workpiece 40 should be", as the target position Pt.

[0348] The control quantity acquisition unit 1220 acquires the detection result, i.e., the captured image Im, of the imaging device 33 at the detection time Td. The detection time Td is the moment during the movement of at least one of the imaging device 33 and the workpiece 40. The detection time Td is the moment when the target position Pt of the servo control system 20, calculated considering the response delay time Ds of the servo control system 20, coincides with the expected detection position pPd.

[0349] The detection deviation calculation unit 1160 calculates the "deviation between the position corresponding to the reference position Rb and the position Pw of the workpiece 40" (i.e., the detection position Pd) based on the "deviation between the reference position Rb in the captured image Im and the position Pw of the workpiece 40", which is the detection deviation amount Qd.

[0350] The detection position calculation section 1170 calculates the detection position Pd from the position of the imaging device 33 at the detection timing Td.

[0351] The position determination section 1180 corrects the detection position Pd calculated by the detection position calculation section 1170 based on the detection deviation Qd calculated by the detection deviation calculation section 1160, thereby determining the position Pw of the workpiece 40.

[0352] According to the configuration, the position determination device 10 calculates the detection deviation Qd, which is the deviation between the detection position Pd and the position Pw of the workpiece 40, from the captured image Im. Further, the position determination device 10 calculates the detection position Pd from the position of the imaging device 33 at the detection timing Td. Furthermore, the position determination device 10 determines the position Pw of the workpiece 40 from the detection deviation Qd and the detection position Pd.

[0353] (High accuracy of position detection)

[0354] Therefore, the position determination device 10 has the following effect: even when the position Pw of the workpiece 40 and the detection position Pd are not coincident at the detection timing Td, the position Pw of the workpiece 40 can be determined with high accuracy using the deviation between them.

[0355] (High accuracy and high speed of detection result)

[0356] Further, according to the configuration, the position determination device 10 calculates the detection deviation Qd from the captured image Im at the detection timing Td at which the target position Pt of the servo control system 20 calculated taking into account the response delay time Ds of the servo control system 20 coincides with the expected detection position pPd.

[0357] Here, if the workpiece 40 is not in the range in which the workpiece 40 can be detected by the imaging device 33 at the timing at which the imaging device 33 performs detection, the detection deviation Qd cannot be calculated from the captured image Im.

[0358] Therefore, in order to avoid the situation in which the workpiece 40 is not in the range in which the workpiece 40 can be detected by the imaging device 33 at the timing at which the imaging device 33 performs detection, the position determination device 10 acquires the captured image Im at the detection timing Td.

[0359] For example, in a case where the servo control system 20 moves only the imaging device 33, the workpiece 40 does not move, and the workpiece 40 is placed in advance at the expected detection position pPd or at a position sufficiently close to the expected detection position pPd, the position determination device 10 performs the following processing. That is, the position determination device 10 sets, as the detection timing Td, a timing at which the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 that controls the position of the imaging device 33 coincides with the expected detection position pPd.

[0360] Here, it is generally considered that, by taking into account the response delay time Ds of the servo control system 20, the target position Pt of the servo control system 20 at each timing coincides with the feedback position Pf of the servo control system 20 at each timing, or the amount of deviation between the two becomes sufficiently small. Also, the feedback position Pf of the servo control system 20 that controls the position of the imaging device 33 can be regarded as the position of the imaging device 33. Therefore, the position of the imaging device 33 at each timing should coincide with the target position Pt of the servo control system 20 at each timing calculated in consideration of the response delay time Ds of the servo control system 20, or the amount of deviation between the two should become sufficiently small.

[0361] As described above, at the detection timing Td, the position of the imaging device 33 moved by the servo control system 20 should coincide with the expected detection position pPd, or the amount of deviation between the two should become sufficiently small. Also, as described above, the workpiece 40 is placed in advance at the expected detection position pPd or at a position sufficiently close to the expected detection position pPd. Therefore, at the detection timing Td, the position of the imaging device 33 moved by the servo control system 20 coincides with the position Pw of the workpiece 40, or the amount of deviation between the two becomes sufficiently small.

[0362] As a result, the position determination device 10 can avoid the situation where, at the timing at which the imaging device 33 performs detection, the workpiece 40 is not in the range in which the imaging device 33 can detect the workpiece 40.

[0363] Also, for example, in a case where the servo control system 20 moves only the workpiece 40, the imaging device 33 does not move, and the imaging device 33 is placed in advance at the expected detection position pPd or at a position sufficiently close to the expected detection position pPd, the position determination device 10 performs the following processing. That is, the position determination device 10 sets, as the detection timing Td, a timing at which the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 that controls the position Pw of the workpiece 40 coincides with the expected detection position pPd.

[0364] As described above, it is generally considered that, by taking into account the response delay time Ds of the servo control system 20, the "target position Pt of the servo control system 20 at each time" will coincide with the "feedback position Pf of the servo control system 20 at each time", or the amount of deviation between the two will become sufficiently small. Also, the feedback position Pf of the servo control system 20 that controls the position Pw of the workpiece 40 can be regarded as the position Pw of the workpiece 40. Therefore, the "position of the workpiece 40 at each time" should coincide with the "target position Pt of the servo control system 20 at each time calculated taking into account the response delay time Ds of the servo control system 20", or the amount of deviation between the two should become sufficiently small.

[0365] As described above, at the detection time Td, the "position Pw of the workpiece 40 moved by the servo control system 20" should coincide with the intended detection position pPd, or the amount of deviation between the two should become sufficiently small. Also, as described above, the imaging device 33 is placed in advance at the intended detection position pPd, or at a position sufficiently close to the intended detection position pPd. Therefore, at the detection time Td, the "position Pw of the workpiece 40 moved by the servo control system 20" coincides with the position of the imaging device 33, or the amount of deviation between the two becomes sufficiently small.

[0366] As a result, the position determination device 10 can avoid the situation where "at the timing when the imaging device 33 performs detection, the workpiece 40 is not in the range where the imaging device 33 can detect the workpiece 40".

[0367] Further, for example, in the case where the first servo control system 20(1) moves the imaging device 33 and the second servo control system 20(2) moves the workpiece 40, the position determination device 10 sets the time when the "target position Pt of each of the first servo control system 20(1) and the second servo control system 20(2) calculated taking into account the response delay time Ds of each of the first servo control system 20(1) and the second servo control system 20(2) coincides with the intended detection position pPd" as the detection time Td. At the detection time Td, the "target position Pt(1) of the first servo control system 20(1) calculated taking into account the response delay time Ds(1) of the first servo control system 20(1)" coincides with the intended detection position pPd. Also, at the detection time Td, the "target position Pt(2) of the second servo control system 20(2) calculated taking into account the response delay time Ds(2) of the second servo control system 20(2)" coincides with the intended detection position pPd.

[0368] As described above, it is generally considered that, by taking into account the response delay time Ds of the servo control system 20, the "target position Pt of the servo control system 20 at each timing" will coincide with the "feedback position Pf of the servo control system 20 at each timing", or the amount of deviation between the two will become sufficiently small.

[0369] Also, the feedback position Pf(l) of the first servo control system 20(l) that controls the position of the imaging device 33 can be regarded as the position of the imaging device 33. Also, the feedback position Pf(2) of the second servo control system 20(2) that controls the position Pw of the workpiece 40 can be regarded as the position Pw of the workpiece 40.

[0370] Therefore, the "position of the imaging device 33 at each timing during movement" should coincide with the "target position Pt(l) at each timing calculated taking into account the response delay time Ds(l) of the first servo control system 20(l)", or the amount of deviation between the two should become sufficiently small. Also, the "position of the workpiece 40 at each timing during movement" should coincide with the "target position Pt(2) at each timing calculated taking into account the response delay time Ds(2) of the second servo control system 20(2)", or the amount of deviation between the two should become sufficiently small.

[0371] As described above, at the detection timing Td, the "position of the imaging device 33 during movement", the "position Pw of the workpiece 40 during movement", and the intended detection position pPd should coincide, or the amount of deviation between the three should become sufficiently small.

[0372] As a result, the position determination device 10 can avoid the situation where "at the timing when the imaging device 33 performs detection, the workpiece 40 is not in the range where the imaging device 33 can detect the workpiece 40".

[0373] The position determination device 10 acquires the captured image Im at the detection timing Td, which is a timing during movement of at least one of the detection device and the workpiece 40, and is a timing where the "position Pw of the workpiece 40 coincides with the position of the imaging device 33, or the amount of deviation between the two becomes sufficiently small".

[0374] Here, the position of the imaging device 33 at the detection timing Td corresponds to the detection position Pd, and therefore it can be considered that, in the captured image Im at the detection timing Td, the amount of deviation between the reference position Rb and the position Pw of the workpiece 40 is sufficiently small. Also, if it is known in advance that "the amount of deviation between the reference position Rb and the position Pw of the workpiece 40 in the captured image Im is sufficiently small", it is possible to make the analysis of the captured image Im more accurate compared to the case where "the amount of deviation between the two cannot be predicted, or the amount of deviation between the two is large" in the captured image Im.

[0375] Therefore, the position determining apparatus 10 is able to acquire the "captured image Im at the detection timing Td" on which high-precision analysis can be performed, that is, is able to calculate the detection deviation Qd with high precision from the "captured image Im at the detection timing Td".

[0376] Further, the position determining apparatus 10 calculates the detection deviation Qd from the "captured image Im detected by the capturing apparatus 33 during movement of at least one of the workpiece 40 and the capturing apparatus 33". Therefore, compared to the case where the capturing apparatus 33 performs detection after movement of the workpiece 40 and the capturing apparatus 33 is stopped, and the captured image Im is generated, the position determining apparatus 10 is able to acquire the captured image Im at high speed, and as a result, is able to speed up calculation of the detection deviation Qd.

[0377] (High-precision and high-speed of position determination of detection target)

[0378] As explained thus far, the position determining apparatus 10 is able to acquire the captured image Im on which high-precision analysis can be performed at high speed, and is able to calculate the detection deviation Qd at high speed and with high precision from the captured image Im. Further, the position determining apparatus 10 determines the position Pw of the workpiece 40 from the calculated detection deviation Qd and the detection position Pd.

[0379] Therefore, the position determining apparatus 10 has the effect of being able to determine the position Pw of the workpiece 40 at high speed and with high precision.

[0380] The position determining apparatus 10 performs communication with the servo control system 20 at each control cycle Cc. In the case where the position of the capturing apparatus 33 is controlled by the servo control system 20, the position determining apparatus 10 calculates the position of the capturing apparatus 33 at the detection timing Td by interpolation calculation from the feedback position Pf of the servo control system 20 at each control cycle Cc that controls the position of the capturing apparatus 33.

[0381] According to the described structure, the position determining apparatus 10 calculates the feedback position Pf of the servo control system 20 that controls the position of the capturing apparatus 33 at the detection timing Td by interpolation calculation from the feedback position Pf of the servo control system 20 at each control cycle Cc.

[0382] In a case where n is set to "an integer of 0 or more" and, for example, the detection time Td is a time between the nth control cycle Cc and the (n+l)th control cycle Cc, the position determination device 10 calculates the feedback position Pf of the servo control system 20 at the detection time Td as follows. That is, the position determination device 10 calculates the feedback position Pf at the detection time Td from the feedback position Pf of the nth control cycle Cc and the feedback position Pf of the (n+l)th control cycle Cc of the servo control system 20.

[0383] Therefore, the position determination device 10 exerts the following effect: even in a case where the detection time Td is not an integral multiple of the communication cycle, that is, the control cycle Cc, of the servo control system 20, the feedback position Pf of the servo control system 20 at the detection time Td can be calculated with high precision.

[0384] The position determination device 10 outputs the command value Cm that takes into account the response delay time Ds of each of the plurality of servo control systems 20, with respect to the plurality of servo control systems 20 that are synchronized with each other. For example, the position determination device 10 outputs the command value Cm(A) that takes into account the response delay time Ds(A) of the servo control system 20(A), with respect to the servo control system 20(A). Also, the position determination device 10 outputs the command value Cm(B) that takes into account the response delay time Ds(B) of the servo control system 20(B), with respect to the servo control system 20(B).

[0385] According to the above-described structure, the position determination device 10 outputs the command value Cm that takes into account the response delay time Ds of each of the plurality of servo control systems 20, with respect to the plurality of servo control systems 20 that are synchronized with each other.

[0386] Therefore, the position determination device 10 exerts the following effect: the plurality of servo control systems 20 can be controlled in a state of being synchronized with each other, and thus high-precision position control of the workpiece 40 can be achieved.

[0387] In the control system 1, the photographing control device 32 (detection control device) controls a detection operation (specifically, a photographing operation) performed by the photographing device 33, and communication is performed between the photographing control device 32 and the communication device 31 (communication control device).

[0388] The position specifying device 10 specifies the detection instruction time aTd in which the detection time Td is corrected in consideration of the response delay time Dd of the detection system 30 (the response delay time Dd of the imaging device 33) in the control signal Cs transmitted to the communication device 31 at each control cycle Cc. The position specifying device 10 causes the communication device 31 to perform output of the detection instruction to the imaging control device 32 at the detection instruction time aTd by specifying the detection instruction time aTd in the control signal Cs. The imaging control device 32 transmits a detection trigger to the imaging device 33 upon receipt of the detection instruction from the communication device 31, and causes the imaging device 33 to perform a detection operation (specifically, an imaging operation).

[0389] According to the above-described configuration, the position specifying device 10 calculates the detection instruction time aTd in which the detection time Td is corrected in consideration of the response delay time Dd of the imaging device 33. Further, the position specifying device 10 specifies the detection instruction time aTd in the control signal Cs output to the communication device 31 at each control cycle Cc.

[0390] The communication device 31 receiving the control signal Cs transmits the detection instruction to the imaging control device 32 at the detection instruction time aTd, and the imaging control device 32 receiving the detection instruction causes the imaging device 33 to detect the workpiece 40. Thus, the time at which the imaging device 33 detects the workpiece 40 becomes the time delayed from the detection instruction time aTd by the response delay time Dd of the imaging device 33, that is, the detection time Td.

[0391] Here, if the imaging device 33 is caused to perform detection without considering the response delay time Dd of the imaging device 33, the time at which the imaging device 33 actually performs detection is delayed from the time at which the imaging device 33 is instructed to perform detection by the response delay time Dd of the imaging device 33.

[0392] Thus, the position specifying device 10 calculates the detection instruction time aTd in which the detection time Td is corrected in consideration of the response delay time Dd of the imaging device 33. Further, the position specifying device 10 specifies the detection instruction time aTd as the time at which the imaging device 33 is instructed to perform detection.

[0393] Thus, the position specifying device 10 has the following effect: by specifying the detection instruction time aTd in consideration of the response delay time Dd of the imaging device 33 in the control signal Cs, it is possible to cause the imaging device 33 to perform detection at the detection time Td.

[0394] Further, the position specifying device 10 specifies the detection instruction time aTd in the control signal Cs transmitted at each control cycle Cc, for example, the position specifying device 10 specifies the detection instruction time aTd in the control signal Cs of the control cycle Cc prior to the detection instruction time aTd.

[0395] Thus, the position determination apparatus 10 functions to specify the detection instruction time point aTd in the control signal Cs, so that the workpiece 40 can be detected at the detection time point Td even when the detection instruction time point aTd is not an integral multiple of the control period Cc.

[0396] As the detection apparatus that can detect the amount of deviation of the position Pw of the workpiece 40 from the detection position Pd, the imaging apparatus 33 is used with respect to the position determination apparatus 10. The detection deviation amount calculation section 1160 calculates the detection deviation amount Qd from the amount of deviation of the reference position Rb in the captured image Im from the position Pw of the workpiece 40 in the captured image Im.

[0397] According to the configuration, the position determination apparatus 10 calculates the detection deviation amount Qd from the amount of deviation of the reference position Rb in the captured image Im from the position Pw of the workpiece 40 in the captured image Im. Further, the position determination apparatus 10 corrects the detection position Pd based on the detection deviation amount Qd, thereby determining the position Pw of the workpiece 40.

[0398] Here, image analysis techniques that determine the position of a captured object (detection object) in a captured image and the like at high speed and with high accuracy are known.

[0399] Thus, the position determination apparatus 10 functions to specify the detection instruction time point aTd in the control signal Cs, so that the workpiece 40 can be detected at the detection time point Td even when the detection instruction time point aTd is not an integral multiple of the control period Cc.

[0400] Further, as described above, at the detection time point Td, the position Pw of the workpiece 40 coincides with the position of the imaging apparatus 33, or the amount of deviation of the two becomes sufficiently small. Thus, for example, in a case where the center position of the captured image Im is set as the reference position Rb, the workpiece 40 will be disposed at substantially the center in the captured image Im.

[0401] By using the captured image Im in which the workpiece 40 is disposed at substantially the center, the position determination apparatus 10 can reduce the inspection region for determining the position Pw of the workpiece 40 in the captured image Im compared to a case where a captured image in which the workpiece 40 is not disposed at substantially the center is used. Thus, the position determination apparatus 10 can achieve high speed of image analysis processing required for detecting the workpiece 40 from the captured image Im.

[0402] Moreover, in the captured image Im, the workpiece 40 is disposed at substantially the center, and thus the position determining apparatus 10 can increase the proportion of the area in which the workpiece 40 is captured in the entire captured image Im, as compared with a captured image in which the workpiece 40 is not disposed at substantially the center. That is, the position determining apparatus 10 can generate a captured image Im in which the workpiece 40 is captured in an enlarged manner. Thus, the position determining apparatus 10 can perform high-precision image analysis on the captured image Im in which the workpiece 40 is captured in an enlarged manner.

[0403] Thus, the position determining apparatus 10 has the following effects: high-speed and high-precision image analysis of the captured image Im can be achieved, and high-speed and high-precision position control of the workpiece 40 can be achieved by using the result of the image analysis.

[0404] The position determining apparatus 10 sequentially determines the positions Pw of the plurality of workpieces 40, and for example, performs the following processing when the position Pw(2) of the second workpiece 40(2) is determined after the position Pw(l) of the first workpiece 40(l) that is one of the plurality of workpieces 40 is determined. That is, the position determining apparatus 10 calculates the reference displacement amount Rd(12) from the difference between (A) the position at which the first workpiece 40(l) should be located, that is, the first expected detection position pPd(l), and (B) the position at which the second workpiece 40(2) should be located, that is, the second expected detection position pPd(2). Moreover, the position determining apparatus 10 sets the position obtained by adding the reference displacement amount Rd(12) to the position Pw(l) of the first workpiece 40(l) determined by the position determining section 1180 as the corrected second expected detection position pPd'(2).

[0405] The position determining apparatus 10 sets the timing at which the position of at least one of the second workpiece 40(2) and the capturing apparatus 33 is expected to coincide with the corrected second expected detection position pPd'(2) as the detection timing Td'(2) at which the second workpiece 40(2) is detected. Moreover, the position determining apparatus 10 causes the capturing apparatus 33 to generate a captured image Im related to the second workpiece 40(2) at the detection timing Td'(2).

[0406] According to the structure, the position determining apparatus 10 calculates the reference displacement amount Rd(12) from the difference between the first expected detection position pPd(l) and the second expected detection position pPd(2).

[0407] The position-determining device 10 sets the position obtained by adding the calculated reference displacement amount Rd(12) to the position Pw(l) of the first workpiece 40(l) as a corrected second expected detection position pPd'(2). Also, the position-determining device 10 causes the imaging device 33 to generate an imaging image Im with respect to the second detection object at the time when the position of at least one of the second workpiece 40(2) and the imaging device 33 is expected to coincide with the corrected second expected detection position pPd'(2).

[0408] Therefore, the position-determining device 10 has the following effect: when determining the positions of the plurality of workpieces 40, by using the positions Pw of the workpieces 40 determined previously, it is possible to predict the positions of the workpieces 40 whose positions are to be determined next with high accuracy.

[0409] For example, the difference between the actual position Pw(l) of the first workpiece 40(l) and the actual position Pw(2) of the second workpiece 40(2) is set as "actual displacement amount Ad(12)". Also, it is assumed that the actual displacement amount Ad(12) is smaller than the reference displacement amount Rd(12) by a difference dP. Further, the difference between the expected detection position pPd(2) and the expected detection position pPd(3) of the third workpiece 40(3) which is to be determined after the second workpiece 40(2) is set as "reference displacement amount Rd(23)". Furthermore, the difference between the actual position Pw(2) of the second workpiece 40(2) and the actual position Pw(3) of the third workpiece 40(3) is set as "actual displacement amount Ad(23)". Also, it is assumed that the actual displacement amount Ad(23) is smaller than the reference displacement amount Rd(23) by the difference dP.

[0410] Then, the actual position Pw(3) of the third workpiece 40(3) will be smaller than the expected detection position pPd(3) of the third workpiece 40(3) by 2 differences dP, i.e., by 2dP.

[0411] On the other hand, if the position obtained by adding the reference displacement amount Rd(23) to the actual position Pw(2) of the second workpiece 40(2) is set as a corrected third expected detection position pPd'(3), the following can be said with respect to the corrected third expected detection position pPd'(3). That is, the amount of deviation of the actual position Pw(3) of the third workpiece 40(3) from the corrected third expected detection position pPd'(3) is the difference dP.

[0412] That is, compared to the case where the expected detection position pPd(3) is used, by using the corrected third expected detection position pPd'(3) which is corrected based on the actual position Pw(2) of the second workpiece 40(2), it is possible to improve the prediction accuracy of the position Pw(3) of the third workpiece 40(3).

[0413] §3. Action Example

[0414] (Overall summary of the processing)

[0415] Figure 14 is a flowchart illustrating an overall summary of the processing performed by the position determination apparatus 10. As shown in Figure 14 , in the position determination apparatus 10, the detection time decision section 1150 performs detection instruction time decision processing (S110). Next, the communication section 1200 (particularly, the instruction section 1210) transmits the detection instruction time aTd decided through the detection instruction time decision processing and the command value Cm generated by the command value generation section 1140 (S120).

[0416] The communication section 1200 (particularly, the control amount acquisition section 1220) receives the detection result (e.g., the captured image Im) of the detection system 30 and the control result (e.g., the feedback position Pf for each control cycle Cc) of the servo control system 20 (S130). Also, the control amount acquisition section 1220 notifies the detection deviation amount calculation section 1160 of the received detection result of the detection system 30, and notifies the detection position calculation section 1170 of the received control result of the servo control system 20.

[0417] The detection deviation amount calculation section 1160 performs detection deviation amount calculation processing using the detection result of the detection system 30 (S140). Also, the detection position calculation section 1170 performs detection position calculation processing using the control result of the servo control system 20 (S150).

[0418] The position determination section 1180 corrects the detection position Pd calculated in S150 based on the detection deviation amount Qd calculated in S140 to determine the position Pw of the workpiece 40 (S160).

[0419] (Regarding the detection instruction time decision processing)

[0420] Figure 15 is a flowchart illustrating an example of the detection instruction time decision processing (S110) of Figure 14 . As shown in Figure 15 , the detection time decision section 1150 first calculates the target position Pt(t) for each time based on the target track Tt, taking into account the response delay time Ds of the servo control system 20 (S210). The detection time decision section 1150 determines the time at which the target position Pt(t) taking into account the response delay time Ds of the servo control system 20 coincides with the expected detection position pPd as the detection time Td (S220). The detection time decision section 1150 decides the detection instruction time aTd with respect to the detection time Td, taking into account the response delay time Dd of the detection system 30 (S230).

[0421] (Regarding the detection deviation amount calculation processing and the detection position calculation processing)

[0422] Figure 16 is a flowchart illustrating an example of the detection deviation amount calculation processing (S140) and the detection position calculation processing (S150) respectively. Figure 14 Figure 16 (A) of Figure 16 (B) is a flowchart illustrating an example of the detection position calculation processing.

[0423] As shown in (A) of Figure 16 , the detection deviation amount calculation section 1160 first performs image analysis on the captured image Im at the detection timing Td, and determines the position Pw of the workpiece 40 (for example, the center position of the workpiece 40) in the captured image Im (S310).

[0424] The detection deviation amount calculation section 1160 calculates the deviation amount between the determined "position Pw of the workpiece 40 in the captured image Im" and the "reference position Rb (for example, the center point of the captured image Im) corresponding to the expected detection position pPd in the captured image Im" (that is, the "position deviation amount within the image") (S320).

[0425] The detection deviation amount calculation section 1160 calculates the "deviation amount of the expected detection position pPd from the position Pw of the workpiece 40", that is, the detection deviation amount Qd, from the deviation amount calculated in S320 (S330).

[0426] As shown in (B) of Figure 16 , the detection position calculation section 1170 first calculates the "feedback position Pf of the servo control system 20 at the detection timing Td" from the "feedback position Pf of the servo control system 20 for each control period Cc" (S410). The detection position calculation section 1170 sets the calculated "feedback position Pf of the servo control system 20 at the detection timing Td" as the detection position Pd (S420).

[0427] The processing performed by the position determination device 10 described in (B) of Figures 14 to 16 up to now can be summarized as follows. That is, the control method performed by the position determination device 10 is a control method of a position determination device that determines the position Pw of the workpiece 40 that is a detection target. The control method includes the instruction step (S120), the acquisition step (S130), the detection deviation amount calculation step (S140), the detection position calculation step (S150), and the position determination step (S160).

[0428] ​The instruction step outputs the instruction value Cm calculated based on the target trajectory Tt to the servo control system 20, which controls the position of at least one of the imaging device 33 (detection device) and the workpiece 40. The target trajectory Tt includes a pre-set expected detection position pPd, which is the "position where the workpiece 40 should be", as the target position Pt.

[0429] The control quantity acquisition step acquires the detection result of the imaging device 33 at the detection time Td, i.e., the captured image Im. The detection time Td is the time during the movement of at least one of the imaging device 33 and the workpiece 40. The detection time Td is the time when the target position Pt of the servo control system 20, calculated considering the response delay time Ds of the servo control system 20, coincides with the expected detection position pPd.

[0430] like Figure 16 As illustrated in (A), the detection deviation calculation step calculates the "deviation between the detection position Pd and the position Pw of the workpiece 40", i.e., the detection deviation Qd, based on the "deviation between the reference position Rb in the captured image Im and the position Pw of the workpiece 40".

[0431] like Figure 16 As illustrated in (B), the detection position calculation step calculates the detection position Pd based on the position of the imaging device 33 at the detection time Td.

[0432] The position determination step corrects the detection position Pd calculated by the detection position calculation unit 1170 based on the detection deviation Qd calculated by the detection deviation calculation unit 1160, thereby determining the position Pw of the workpiece 40.

[0433] According to the aforementioned structure, the control method calculates the deviation (Qd) between the detection position Pd and the position Pw of the workpiece 40 based on the captured image Im. Furthermore, the control method calculates the detection position Pd based on the position of the imaging device 33 at the detection time Td. Finally, the control method determines the position Pw of the workpiece 40 based on the detection deviation Qd and the detection position Pd.

[0434] (High-precision position detection)

[0435] Therefore, the control method achieves the following effect: at the detection time Td, even if the position Pw of the workpiece 40 is inconsistent with the detection position Pd, the position Pw of the workpiece 40 can be determined with high precision by using the deviation between the two.

[0436] (High precision and high speed of detection results)

[0437] Further, according to the configuration, the control method calculates the detection deviation Qd from the captured image Im at the detection timing Td at which the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 coincides with the expected detection position pPd.

[0438] Here, if the workpiece 40 is not in the range in which the camera 33 can detect the workpiece 40 at the timing at which the camera 33 performs detection, the detection deviation Qd cannot be calculated from the captured image Im.

[0439] Therefore, in order to avoid the situation in which the workpiece 40 is not in the range in which the camera 33 can detect the workpiece 40 at the timing at which the camera 33 performs detection, the control method acquires the captured image Im at the detection timing Td.

[0440] For example, in a case in which the servo control system 20 only moves the camera 33, the workpiece 40 does not move, and the workpiece 40 is placed in advance at the expected detection position pPd or at a position sufficiently close to the expected detection position pPd, the control method performs the following processing. That is, the control method sets the timing at which the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 that controls the position of the camera 33 coincides with the expected detection position pPd as the detection timing Td.

[0441] Here, it is generally considered that, by taking the response delay time Ds of the servo control system 20 into consideration, the target position Pt of the servo control system 20 at each timing coincides with the feedback position Pf of the servo control system 20 at each timing, or the deviation therebetween becomes sufficiently small. Further, the feedback position Pf of the servo control system 20 that controls the position of the camera 33 can be regarded as the position of the camera 33. Therefore, the position of the camera 33 at each timing should coincide with the target position Pt of the servo control system 20 at each timing calculated in consideration of the response delay time Ds of the servo control system 20, or the deviation therebetween should become sufficiently small.

[0442] As described above, at the detection timing Td, the position of the camera 33 moved by the servo control system 20 should coincide with the expected detection position pPd, or the deviation therebetween should become sufficiently small. Further, as described above, the workpiece 40 is placed in advance at the expected detection position pPd or at a position sufficiently close to the expected detection position pPd. Therefore, at the detection timing Td, the position of the camera 33 moved by the servo control system 20 coincides with the position Pw of the workpiece 40, or the deviation therebetween becomes sufficiently small.

[0443] As a result, the control method can avoid the situation that "at the timing when the photographing device 33 performs detection, the workpiece 40 is not in the range where the photographing device 33 can detect the workpiece 40".

[0444] Further, for example, in the case where the servo control system 20 only moves the workpiece 40, the photographing device 33 does not move, and the photographing device 33 is placed in advance at the expected detection position pPd or at a position sufficiently close to the expected detection position pPd, the control method performs the following processing. That is, the control method sets the timing when the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 that controls the position Pw of the workpiece 40 coincides with the expected detection position pPd as the detection timing Td.

[0445] As described above, it is generally considered that, by considering the response delay time Ds of the servo control system 20, the "target position Pt of the servo control system 20 at each timing" will coincide with the "feedback position Pf of the servo control system 20 at each timing", or the amount of deviation between the two will become sufficiently small. Further, the feedback position Pf of the servo control system 20 that controls the position Pw of the workpiece 40 can be regarded as the position Pw of the workpiece 40. Therefore, the "position of the workpiece 40 at each timing" should coincide with the "target position Pt of the servo control system 20 at each timing calculated in consideration of the response delay time Ds of the servo control system 20", or the amount of deviation between the two should become sufficiently small.

[0446] As described above, at the detection timing Td, the "position Pw of the workpiece 40 moved by the servo control system 20" should coincide with the expected detection position pPd, or the amount of deviation between the two should become sufficiently small. Further, as described above, the photographing device 33 is placed in advance at the expected detection position pPd or at a position sufficiently close to the expected detection position pPd. Therefore, at the detection timing Td, the "position Pw of the workpiece 40 moved by the servo control system 20" coincides with the position of the photographing device 33, or the amount of deviation between the two becomes sufficiently small.

[0447] As a result, the control method can avoid the situation that "at the timing when the photographing device 33 performs detection, the workpiece 40 is not in the range where the photographing device 33 can detect the workpiece 40".

[0448] Further, for example, in a case where the first servo control system 20(1) moves the imaging device 33 and the second servo control system 20(2) moves the workpiece 40, the control method sets a time at which the respective target positions Pt calculated in consideration of the respective response delay times Ds of the first servo control system 20(1) and the second servo control system 20(2) coincide with the expected detection position pPd as the detection time Td. At the detection time Td, the target position Pt(1) of the first servo control system 20(1) calculated in consideration of the response delay time Ds(1) of the first servo control system 20(1) coincides with the expected detection position pPd. Also, at the detection time Td, the target position Pt(2) of the second servo control system 20(2) calculated in consideration of the response delay time Ds(2) of the second servo control system 20(2) coincides with the expected detection position pPd.

[0449] As described above, it is generally considered that, by taking into account the response delay time Ds of the servo control system 20, the target position Pt of the servo control system 20 at each time coincides with the feedback position Pf of the servo control system 20 at each time, or the amount of deviation between the two becomes sufficiently small.

[0450] Also, the feedback position Pf(1) of the first servo control system 20(1) that controls the position of the imaging device 33 can be regarded as the position of the imaging device 33. Also, the feedback position Pf(2) of the second servo control system 20(2) that controls the position Pw of the workpiece 40 can be regarded as the position Pw of the workpiece 40.

[0451] Therefore, the position of the imaging device 33 at each time during movement should coincide with the target position Pt(1) at each time calculated in consideration of the response delay time Ds(1) of the first servo control system 20(1), or the amount of deviation between the two should become sufficiently small. Also, the position of the workpiece 40 at each time during movement should coincide with the target position Pt(2) at each time calculated in consideration of the response delay time Ds(2) of the second servo control system 20(2), or the amount of deviation between the two should become sufficiently small.

[0452] As described above, at the detection time Td, the position of the imaging device 33 during movement, the position Pw of the workpiece 40 during movement, and the expected detection position pPd should coincide, or the amount of deviation between the three should become sufficiently small.

[0453] As a result, the control method can avoid a situation in which, at the timing at which the imaging device 33 performs detection, the workpiece 40 is not in a range in which the imaging device 33 can detect the workpiece 40.

[0454] The control method acquires the captured image Im at the detection timing Td, which is a timing during movement of at least one of the detection device and the workpiece 40, and is a timing at which the position Pw of the workpiece 40 and the position of the capturing device 33 coincide or the amount of deviation of the two becomes sufficiently small.

[0455] Here, the position of the capturing device 33 at the detection timing Td corresponds to the detection position Pd, and thus it can be considered that the amount of deviation of the reference position Rb and the position Pw of the workpiece 40 in the captured image Im at the detection timing Td is sufficiently small. Also, if it is known in advance that the amount of deviation of the reference position Rb and the position Pw of the workpiece 40 in the captured image Im is sufficiently small, the analysis of the captured image Im can be made more accurate than in a case where the amount of deviation of the two cannot be predicted or the amount of deviation of the two is predicted to be large in the captured image Im.

[0456] Thus, the control method can acquire the captured image Im at the detection timing Td, which can be subjected to a high-accuracy analysis, that is, the detection deviation Qd can be calculated with high accuracy from the captured image Im at the detection timing Td.

[0457] Further, the control method calculates the detection deviation Qd from the captured image Im detected by the capturing device 33 during movement of at least one of the workpiece 40 and the capturing device 33. Thus, the control method can acquire the captured image Im at a high speed compared to a case where the capturing device 33 is caused to perform detection after movement of the workpiece 40 and the capturing device 33 is stopped, and as a result, the calculation of the detection deviation Qd can be speeded up.

[0458] (Improvement in accuracy and speed of position determination of detection target)

[0459] As described thus far, the control method can acquire the captured image Im, which can be subjected to a high-accuracy analysis, at a high speed, and can calculate the detection deviation Qd at a high speed and with high accuracy from the captured image Im. Further, the control method determines the position Pw of the workpiece 40 from the calculated detection deviation Qd and the detection position Pd.

[0460] Thus, the control method has the effect of being able to determine the position Pw of the workpiece 40 at a high speed and with high accuracy.

[0461] §4. Modified Example

[0462] Thus far, the example in which the position determination device 10 controls a plurality of servo control systems 20 has been described, but the servo control system 20 controlled by the position determination device 10 can also be one. Also, thus far, the example in which the detection device that detects the amount of deviation of the position Pw of the workpiece 40 from the detection position Pd is the imaging device 33 has been described, but the detection device is not necessarily the imaging device 33. The position determination device 10 can acquire a detection result that can calculate the amount of deviation of the position Pw of the workpiece 40 from the intended detection position pPd from a detection device that can detect the amount of deviation of the position Pw of the workpiece 40 from the intended detection position pPd. Further, thus far, the example in which the position determination device 10 moves the imaging device 33 to determine the position Pw of the fixed workpiece 40 has been described, but the object moved by the position determination device 10 can also not be the imaging device 33. For example, the position determination device 10 can also fix the position of the imaging device 33, move the workpiece 40 to determine the position Pw of the workpiece 40, and move both the imaging device 33 and the workpiece 40 to determine the position Pw of the workpiece 40.

[0463] 〔Example of Implementation by Software〕

[0464] The control blocks of the position determination device 10 (particularly, the target track acquisition section 1110, the position command generation section 1120, the response delay time calculation section 1130, the command value generation section 1140, the detection timing decision section 1150, the detection deviation amount calculation section 1160, the detection position calculation section 1170, the position determination section 1180, and the communication section 1200) can be implemented by logic circuits (hardware) formed on integrated circuits (IC chips) or the like, or by software.

[0465] In the latter case, the position determination device 10 includes a computer that executes commands of a program that realizes each function. The computer includes one or more processors, for example, and includes a computer-readable storage medium on which the program is stored. Also, in the computer, the program is read by the processor from the storage medium and executed, thereby achieving the object of the present application. As the processor, a central processing unit (CPU), for example, can be used. As the storage medium, a "tangible medium other than a transitory one" such as a tape, a disk, a card, a semiconductor memory, a programmable logic circuit, or the like, can be used in addition to a read only memory (ROM) or the like. Also, a random access memory (RAM) or the like that expands the program can also be included. Also, the program can be provided to the computer via any transmission medium (a communication network or a broadcast wave or the like) that can transmit the program. In addition, an embodiment of the present application can also be realized in the form of a data signal embedded in a carrier wave by electronic transmission of the program.

[0466] The present application is not limited to the embodiments described above, and various modifications can be made within the scope of the claims, and embodiments obtained by appropriately combining the technical means disclosed in the different embodiments are also included in the technical scope of the present application.

Claims

1. A position determination device that determines a position of an object to be detected, the position determination device characterized by comprising: an instruction section that outputs an instruction value calculated in accordance with a target track to a servo control system that controls a position of at least one of a detection device and the object to be detected, and that outputs a detection instruction time that is corrected using a response delay time of the detection device to the detection device, the target track containing a target position that is a desired detection position set in advance as a position at which the object to be detected should be, the detection time being a time during movement of at least one of the detection device and the object to be detected, and being a time at which the target position of the servo control system coincides with the desired detection position, calculated taking into account a response delay time of the servo control system; an acquisition section that acquires a detection result of the detection device at the detection time; a detection deviation amount calculation section that calculates a detection deviation amount, which is an amount of deviation of a detection position from the position of the object to be detected, from an amount of deviation of a reference position from the position of the object to be detected in the detection result, the detection position being a position corresponding to the reference position; a detection position calculation section that calculates the detection position from a position of the detection device at the detection time; and a position determination section that corrects the detection position using the detection deviation amount, thereby determining the position of the object to be detected.

2. The position determination device according to claim 1, characterized in that: the servo control system performs communication every control period, and in a case where the position of the detection device is controlled by the servo control system, the detection position calculation section calculates the position of the detection device at the detection time by interpolation calculation from a feedback position of the servo control system that controls the position of the detection device every control period.

3. The position determination device according to claim 1 or 2, characterized in that: instruction values that take into account response delay times of a plurality of servo control systems, respectively, are output to the plurality of servo control systems that are synchronized with each other.

4. The position determination device according to claim 1 or 2, characterized in that: the detection instruction time is specified in a control signal transmitted to a communication control device every control period, the communication control device communicating with a detection control device that controls a detection operation of the detection device, and the detection device detects the object to be detected at the detection time by causing the communication control device to perform output of a detection instruction to the detection control device at the detection instruction time.

5. The position determination device according to claim 1 or 2, characterized in that: the detection device is an imaging device, and the detection deviation amount calculation section calculates the detection deviation amount from an amount of deviation of the reference position from the object to be detected in an imaging image imaged by the imaging device.

6. The position determination device according to claim 1 or 2, characterized in that: positions of a plurality of the objects to be detected are sequentially determined. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ calculating a reference displacement amount based on a difference between a first expected detection position, which is a position at which a first detection object, which is one of the plurality of detection objects, should be, and a second expected detection position, which is a position at which a second detection object, which should be determined after the first detection object, should be, setting a position obtained by adding the reference displacement amount to the position of the first detection object determined by the position determining section as a corrected second expected detection position, setting a time at which a position of at least one of the second detection object and the detection device is expected to coincide with the corrected second expected detection position as the detection time at which the second detection object is detected, generating the detection result related to the second detection object by the detection device at the detection time.

7. A control method of a position determining device that determines a position of a detection object, the control method characterized by comprising: an instruction step of outputting an instruction value calculated based on a target track to a servo control system that controls a position of at least one of a detection device and the detection object, the target track including an expected detection position that is set in advance as a position at which the detection object should be as a target position, and outputting a detection instruction time that is corrected for a detection time using a response delay time of the detection device, the detection time being a time during movement of at least one of the detection device and the detection object, and being a time at which the target position of the servo control system coincides with the expected detection position, calculated taking into account the response delay time of the servo control system; an acquisition step of acquiring a detection result of the detection device at the detection time; a detection deviation amount calculation step of calculating a detection deviation amount, which is a deviation amount of a detection position from a position of the detection object, from a deviation amount of a reference position from the position of the detection object in the detection result, the detection position being a position corresponding to the reference position; a detection position calculation step of calculating the detection position based on a position of the detection device at the detection time; and a position determination step of correcting the detection position using the detection deviation amount, thereby determining the position of the detection object.

8. A storage medium that stores an information processing program for causing a computer to function as a position determining device described in any one of claims 1 to 6, and that is readable by the computer. ​

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