Water-cooled single-side polishing machine

Abstract

The embodiment of the present invention discloses a water-cooled single-sided polishing machine, including an upper grinding disc device and a lower grinding disc device, the upper grinding disc device including an upper base, a lifting seat, an upper grinding disc mechanism and a rotating drive mechanism, a slide rail is vertically arranged on the upper base, a slider is arranged on the slide rail, and the lifting seat is arranged on the slider; a lifting drive mechanism for driving the lifting seat to move up and down is arranged on the upper base; the upper grinding disc mechanism includes a jig disc, a chassis, a self-aligning bearing, a flange, a rotating shaft tube, a rotary joint A, and an air pipe, and the lower grinding disc device includes an inner shaft tube, an outer shaft tube, a tray, a water distributor, a rotary joint B, a lower base and a lower grinding disc. The present invention adopts a self-aligning bearing to realize the universal polishing of the jig disc, so that the polishing force of products at different positions on the jig disc is consistent; at the same time, inner and outer shaft tubes are used for water inlet and outlet, and are connected through a rotary joint, so the structure is simple, and only the rotary joint and the inner and outer shaft tubes need to be sealed.

Description

Technical Field

[0001] The invention relates to the technical field of polishing, and in particular to a water-cooled single-side polishing machine. Background Art

[0002] The existing polishing machine can polish multiple products at the same time, which greatly improves the polishing efficiency. However, the upper plate structure of the existing polishing machine has the problem of uneven polishing force, resulting in inconsistent polishing surface flatness of different products on the upper grinding plate, which in turn leads to low product yield.

[0003] In addition, the existing polishing machine generates a lot of heat due to the friction between the grinding disc and the product to be polished during polishing, so the grinding disc needs to be cooled. Since the grinding disc is in a high-speed rotation state during operation, it is difficult to design a corresponding water cooling structure; and the existing water cooling structure is complex and the joints are difficult to seal. After a long time, it is easy to leak, and additional glue is needed to repair and seal. Summary of the invention

[0004] The technical problem to be solved by the embodiments of the present invention is to provide a water-cooled single-side polishing machine to simplify the heat dissipation structure, reduce the difficulty of sealing, and achieve balanced polishing.

[0005] In order to solve the above technical problems, the embodiment of the present invention provides a water-cooled single-side polishing machine, including an upper grinding disc device and a lower grinding disc device.

[0006] The upper grinding disc device includes an upper base, a lifting seat, an upper grinding disc mechanism and a rotating drive mechanism arranged on the lifting seat. A slide rail is vertically arranged on the upper base, a slider is arranged on the slide rail, and the lifting seat is arranged on the slider; a lifting drive mechanism for driving the lifting seat to move up and down is arranged on the upper base; the upper grinding disc mechanism includes a fixture plate, a chassis, a self-aligning bearing, a flange, a rotating shaft tube, a rotating joint A, and an air pipe. The rotating joint A includes a channel, and the rotating joint A is connected to an external vacuum pump through the channel; the rotating joint A is connected to the top of the rotating shaft tube, the rotating shaft tube is hollow inside, and the rotating shaft tube is arranged on the lifting seat through a bearing; the rotating drive mechanism is connected to the rotating shaft tube, The rotating shaft tube is driven to rotate; the self-aligning bearing is connected to the bottom end of the rotating shaft tube; the fixture disk is arranged at the bottom of the chassis, and the bottom of the fixture disk is provided with a plurality of fixture grooves for adsorbing and fixing the product to be processed, and the fixture grooves are provided with through holes; the flange is arranged on the chassis, and the chassis is connected to the outer ring of the self-aligning bearing through the flange; the bottom of the rotating shaft tube is provided with a fixed disk, and the fixed disk is provided with a limiting hole, and the outer ring of the self-aligning bearing is provided with a pin whose top passes through the limiting hole, and the diameter of the limiting hole is larger than the diameter of the pin; the chassis is provided with an air pipe direct joint, and the air pipe direct joint is communicated with the through hole in the fixture groove on the fixture disk; the air pipe is arranged in the rotating shaft tube, connecting the air pipe direct joint and the rotary joint A;

[0007] The lower grinding disc device includes an inner shaft tube, an outer shaft tube, a tray, a water divider, a rotating joint B, a lower base and a lower grinding disc. The inner shaft tube and the outer shaft tube are hollow inside, and the inner shaft tube is arranged in the middle of the outer shaft tube; a heat dissipation water channel is provided on the tray, and the water divider is arranged in the middle of the tray, and the water divider is connected to the water inlet and the water outlet of the heat dissipation water channel; the lower grinding disc is arranged on the tray; the rotating joint B includes two channels, one inlet and one outlet; one end of the inner shaft tube and the outer shaft tube are respectively connected to the two channels of the rotating joint B, and the other ends are respectively connected to the water divider, and the water inlet and the water outlet of the heat dissipation water channel are respectively connected through the water divider.

[0008] Furthermore, the lifting drive mechanism includes a lifting cylinder and a force sensor, and the piston rods of the upper and lower cylinders are connected to the lifting seat through the force sensor.

[0009] Furthermore, a locking hook is provided on the lifting seat, a locking cylinder is correspondingly provided on the upper base, and a locking pin matching the locking hook is provided on the piston rod of the locking cylinder.

[0010] Furthermore, the rotary drive mechanism is composed of a planetary reducer, a synchronous belt and a pulley.

[0011] Furthermore, an angle sensor for detecting whether the rotating shaft tube is rotated to a preset angle is provided on the lifting seat.

[0012] Furthermore, the upper grinding disc device also includes a disc cleaning mechanism arranged on the upper base, the disc cleaning mechanism includes a cleaning cylinder, a cleaning pipe, and a cleaning arm, the front end of the cleaning arm is provided with a water outlet and an air outlet, and the tail end of the cleaning arm is connected to the bottom end of the cleaning pipe; the interior of the cleaning pipe is hollow, and the top of the cleaning pipe is passed through another bearing on the upper base, and a cam is provided on the top of the cleaning pipe; the piston rod of the cleaning cylinder is connected to the cam, and the cleaning arm is driven to swing through the cam and the cleaning pipe.

[0013] Furthermore, there are multiple heat dissipation water channels on the tray, all of which are connected to the inner shaft tube and the outer shaft tube through a water distributor.

[0014] Furthermore, the water outlet flux of the rotary joint B is less than or equal to the water inlet flux.

[0015] The beneficial effects of the present invention are as follows: the present invention adopts a self-aligning bearing to realize universal polishing of the jig disk, so that the polishing force of products at different positions on the jig disk is consistent; at the same time, a force sensor is used to control the polishing force, so as to realize precise control of the polishing force during product polishing, with a simple structure and a high yield rate; the present invention adopts inner and outer shaft tubes for water inlet and outlet, and connects them through a rotary joint, with a simple structure, and only needs to seal the rotary joint and the inner and outer shaft tubes; even after a long time, there will be no water leakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional structural diagram of a water-cooled single-side polishing machine according to an embodiment of the present invention.

[0017] Figure 2 It is a side view of a water-cooled single-side polishing machine according to an embodiment of the present invention.

[0018] Figure 3 yes Figure 2 Cross-sectional view at BB in the middle.

[0019] Figure 4 It is a three-dimensional structural diagram of a grinding disc device on a polishing machine according to an embodiment of the present invention at one angle.

[0020] Figure 5 It is a three-dimensional structural diagram of the grinding disc device on the polishing machine according to an embodiment of the present invention from another angle.

[0021] Figure 6 It is a side view of the grinding disc device on the polishing machine according to an embodiment of the present invention.

[0022] Figure 7 yes Figure 6 Cross-sectional view at HH in the figure.

[0023] Figure 8 It is a three-dimensional structural diagram of the upper grinding disc mechanism of an embodiment of the present invention.

[0024] Fig. 9 It is a side view of the upper grinding disc mechanism according to an embodiment of the present invention.

[0025] Fig.10 yes Fig. 9 Cross-sectional view at II in the middle.

[0026] Fig.11 It is a three-dimensional structural diagram of the lifting drive mechanism of an embodiment of the present invention.

[0027] Fig.12 It is a three-dimensional structural diagram of a liquidation mechanism according to an embodiment of the present invention.

[0028] Fig.13 It is a three-dimensional structural diagram of the water cooling mechanism of the lower grinding plate of the polishing machine according to an embodiment of the present invention.

[0029] Fig.14 It is a side view of the water cooling mechanism of the lower grinding plate of the polishing machine according to an embodiment of the present invention.

[0030] Fig.15 yes Fig.14 Cross-sectional view at AA in the middle.

[0031] Fig.16 yes Fig.15 Cross-sectional view at CC.

[0032] Fig.17 It is a three-dimensional structural diagram of a water divider according to an embodiment of the present invention at one angle.

[0033] Fig.18It is a three-dimensional structural diagram of the water divider according to an embodiment of the present invention from another angle.

[0034] Fig.19 It is a three-dimensional structural diagram of a tray according to an embodiment of the present invention.

[0035] Fig. 20 4 is a top view of a tray according to an embodiment of the present invention.

[0036] Description of Figure Numbers

[0037] Lower grinding disc device 1, upper grinding disc device 2, lower base 10, tray 11, heat dissipation water channel 12, water distributor 13, inner shaft tube 14, outer shaft tube 15, rotary joint 16, lower grinding disc 17, water dividing cone 18, upper base 20, lifting seat 21, slide rail 22, lifting cylinder 23, force sensor 24, locking hook 25, locking cylinder 26, locking pin 27, angle sensor 28, slider 29, upper grinding disc mechanism 30, fixture disc 31, chassis 32, self-aligning bearing 33, flange 34, rotating shaft tube 35, rotary joint 36, fixed disc 37, pin 38, air pipe direct connector 39, rotary drive mechanism 40, planetary reducer 41, synchronous belt 42, pulley 43, plate cleaning mechanism 50, cleaning cylinder 51, cleaning pipe 52, cleaning arm 53, cam 54, lower grinding disc drive mechanism 60. DETAILED DESCRIPTION

[0038] It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The present invention is further described in detail below in conjunction with the drawings and specific embodiments.

[0039] In the embodiments of the present invention, if there are directional indications (such as up, down, left, right, front, back, etc.), they are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0040] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features.

[0041] Please refer to Figures 1 to 20 The water-cooled single-side polishing machine of the embodiment of the present invention comprises an upper grinding disc device and a lower grinding disc device. The upper grinding disc device comprises an upper base, a lifting seat, and an upper grinding disc mechanism and a rotating driving mechanism arranged on the lifting seat.

[0042] A slide rail is vertically arranged on the upper base, a slider is arranged on the slide rail, and a lifting seat is arranged on the slider. A lifting driving mechanism for driving the lifting seat to move up and down is arranged on the upper base. The upper grinding disc mechanism includes a fixture disc, a chassis, a self-aligning bearing, a flange, a rotating shaft tube, a rotary joint A, and an air pipe. There are multiple groups of the upper grinding disc mechanism, preferably 4 groups.

[0043] The rotary joint A includes a channel, through which the rotary joint A is connected to an external vacuum pump; the rotary joint A is connected to the top of the rotating shaft tube, the interior of the rotating shaft tube is hollow, and the rotating shaft tube is arranged on the lifting seat through a bearing; the rotating drive mechanism is connected to the rotating shaft tube to drive the rotating shaft tube to rotate; the self-aligning bearing is connected to the bottom of the rotating shaft tube; the fixture plate is arranged at the bottom of the chassis, and the bottom of the fixture plate is provided with a plurality of fixture grooves for adsorbing and fixing the product to be processed, and the fixture grooves are provided with through holes. The fixture grooves are evenly distributed on the outer side of the fixture plate. The flange plate is arranged on the chassis, and the chassis is connected to the outer ring of the self-aligning bearing through the flange plate; a fixed plate is arranged at the bottom of the rotating shaft tube, and a limiting hole is arranged on the fixed plate, and a pin is arranged on the outer ring of the self-aligning bearing, and the diameter of the limiting hole is larger than the diameter of the pin. Through the action of the pin and the limiting hole, the chassis and the fixture plate can swing in a universal direction within a preset range; at the same time, the rotating shaft tube can drive the chassis and the fixture plate to rotate together.

[0044] The chassis is provided with an air pipe joint, which is connected to the through hole in the fixture slot on the fixture plate; the air pipe is arranged in the rotating shaft tube, connecting the air pipe joint and the rotary joint A. The external air pump is connected to the rotary joint A, and then the product in the fixture slot is vacuum adsorbed through the air pipe, the air pipe joint and the through hole.

[0045] As an implementation method, the lifting drive mechanism includes a lifting cylinder and a force sensor, and the piston rods of the upper and lower cylinders are connected to the lifting seat through the force sensor. The force sensor can monitor the pulling force and pushing force of the lifting cylinder on the lifting seat, thereby controlling the polishing force of the upper grinding disc mechanism.

[0046] As an implementation method, a locking hook is provided on the lifting seat, a locking cylinder is correspondingly provided on the upper base, and a locking pin matching the locking hook is provided on the piston rod of the locking cylinder. When the lifting seat is raised to the top, the locking cylinder controls the locking pin to extend and lock with the locking hook to prevent the lifting seat from sliding; when the upper grinding disc mechanism descends, the locking cylinder controls the locking pin to retract and separate from the locking hook to unlock.

[0047] As an implementation method, the rotary drive mechanism is composed of a planetary reducer, a synchronous belt and a pulley. The pulley is arranged on the rotating shaft tube, and the planetary reducer controls the rotation of the pulley through the synchronous belt, thereby controlling the rotation of the rotating shaft tube.

[0048] As an implementation method, an angle sensor is provided on the lifting seat to detect whether the rotating shaft tube is rotated to a preset angle. Through the detection of the angle sensor, the rotary drive mechanism rotates the fixture plate to a fixed angle, making it convenient for the mechanical claw to deliver the product to the fixture slot.

[0049] As an implementation method, the upper grinding disc device also includes a cleaning mechanism arranged on the upper base, and the cleaning mechanism includes a cleaning cylinder, a cleaning pipe, and a cleaning arm. The front end of the cleaning arm is provided with a water outlet and an air outlet, and the tail end of the cleaning arm is connected to the bottom end of the cleaning pipe; the cleaning pipe is hollow inside, and the top of the cleaning pipe is passed through another bearing on the upper base, and a cam is provided on the top of the cleaning pipe; the piston rod of the cleaning cylinder is connected to the cam, and the cleaning arm is driven to swing through the cam and the cleaning pipe. The cam is a 90-degree swing cam. The cleaning cylinder drives the cleaning arm to swing 90 degrees. When cleaning, the water outlet and the air outlet at the front end of the cleaning arm are rotated 90 degrees to the bottom of the fixture plate, and reset to the side of the fixture plate after cleaning. The water outlet and the air outlet can be connected to a water pump and an air pump through a vent pipe and a water pipe passing through the cleaning pipe. The water outlet discharges water to clean the products on the fixture plate, and the air outlet discharges air to dry after cleaning. In specific implementation, the water outlet and the air outlet can also be replaced by a water outlet valve and an air outlet valve.

[0050] The lower grinding disc device comprises a lower base, a lower grinding disc, an inner shaft tube, an outer shaft tube, a tray, a water distributor, and a rotary joint B. The lower grinding disc device also comprises a lower grinding disc driving mechanism for driving the outer shaft tube and the lower grinding disc to rotate.

[0051] The inner shaft tube and the outer shaft tube are hollow inside, and the inner shaft tube is arranged in the middle of the outer shaft tube. A heat dissipation water channel is arranged on the tray, and a water distributor is arranged in the middle of the tray, and the water distributor connects the water inlet and the water outlet of the heat dissipation water channel.

[0052] The lower grinding disc is arranged on the tray. Preferably, the lower grinding disc is sealed with the tray, and cold water flows between the lower grinding disc and the tray. The rotary joint B comprises two channels, one for inlet and one for outlet, which are connected to an external chiller through a water pipe. The rotary joint B is arranged on the lower base. One end of the inner shaft tube and the outer shaft tube are respectively connected to the two channels of the rotary joint B, and the other ends are respectively connected to the water divider, which are respectively connected to the water inlet and the water outlet of the heat dissipation water channel through the water divider. The polishing machine also includes a driving mechanism for driving the lower grinding disc to rotate. When the driving mechanism drives the lower grinding disc to rotate, the inner shaft tube and the outer shaft tube rotate accordingly under the drive of the water divider. After the cooling water (ice water) of the external chiller enters the rotary joint B, it enters the inner shaft pipe or the outer shaft pipe, and enters the water inlet of the heat dissipation water channel on the tray through the water distributor; the ice water cools the lower grinding disc in the heat dissipation water channel, and then enters the water distributor from the water outlet of the heat dissipation water channel, enters the inner shaft pipe or the outer shaft pipe through the water distributor, and then passes through the rotary joint B from the water outlet channel of the rotary joint B. A water diversion cone is provided in the middle of the lower grinding disc, which is used to divert the water source to flow in all directions and speed up the flow rate.

[0053] As an implementation method, there are multiple groups of heat dissipation channels on the tray, all of which are connected to the inner shaft tube and the outer shaft tube through a water distributor. Preferably, there are three groups of heat dissipation channels, each group of heat dissipation channels is in the shape of a maze-shaped circuit, with a reflux design that enters from one end and exits from the other end.

[0054] As an implementation mode, the water outlet flux of the rotary joint B is less than or equal to the water inlet flux, so that the water outlet is slow and the water inlet is fast.

[0055] The present invention allows water to enter and exit through the inner shaft tube and the outer shaft tube, and the inner shaft tube or the outer shaft tube rotates along with the lower grinding disc, thereby making the sealing simple and preventing water leakage after a long time.

[0056] The working principle of the present invention is as follows: the robot grips the product into the fixture groove and absorbs the product through vacuum; the locking pin retracts, and the lifting drive mechanism drives the lifting seat to descend, so that the product in the fixture groove fits the lower grinding disc; the rotating drive mechanism drives the fixture disc to rotate, driving the product to rotate and polish, and the lower grinding disc driving mechanism drives the lower grinding disc to rotate and polish; after polishing is completed, the lifting drive mechanism drives the lifting seat to rise, and the locking pin extends; the cleaning cylinder drives the cleaning arm to rotate to the bottom of the fixture disc, and sprays water through the water outlet for cleaning, and the fixture disc continues to rotate at this time; after cleaning is completed, the air outlet blows out air to dry, and after drying, the robot takes away the polished product.

[0057] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A water-cooled single-sided polishing machine, comprising an upper grinding disc device and a lower grinding disc device, characterized in that: The upper grinding disc device includes an upper base, a lifting seat, an upper grinding disc mechanism and a rotating drive mechanism arranged on the lifting seat. A slide rail is vertically arranged on the upper base, a slider is arranged on the slide rail, and the lifting seat is arranged on the slider; a lifting drive mechanism for driving the lifting seat to move up and down is arranged on the upper base; the upper grinding disc mechanism includes a fixture plate, a chassis, a self-aligning bearing, a flange, a rotating shaft tube, a rotating joint A, and an air pipe. The rotating joint A includes a channel, and the rotating joint A is connected to an external vacuum pump through the channel; the rotating joint A is connected to the top of the rotating shaft tube, the rotating shaft tube is hollow inside, and the rotating shaft tube is arranged on the lifting seat through a bearing; the rotating drive mechanism is connected to the rotating shaft tube, The rotating shaft tube is driven to rotate; the self-aligning bearing is connected to the bottom end of the rotating shaft tube; the fixture disk is arranged at the bottom of the chassis, and the bottom of the fixture disk is provided with a plurality of fixture grooves for adsorbing and fixing the product to be processed, and the fixture grooves are provided with through holes; the flange is arranged on the chassis, and the chassis is connected to the outer ring of the self-aligning bearing through the flange; the bottom of the rotating shaft tube is provided with a fixed disk, and the fixed disk is provided with a limiting hole, and the outer ring of the self-aligning bearing is provided with a pin whose top passes through the limiting hole, and the diameter of the limiting hole is larger than the diameter of the pin; the chassis is provided with an air pipe direct joint, and the air pipe direct joint is communicated with the through hole in the fixture groove on the fixture disk; the air pipe is arranged in the rotating shaft tube, connecting the air pipe direct joint and the rotary joint A; The lower grinding disc device includes an inner shaft tube, an outer shaft tube, a tray, a water divider, a rotating joint B, a lower base and a lower grinding disc. The inner shaft tube and the outer shaft tube are hollow inside, and the inner shaft tube is arranged in the middle of the outer shaft tube; a heat dissipation water channel is provided on the tray, and the water divider is arranged in the middle of the tray, and the water divider is connected to the water inlet and the water outlet of the heat dissipation water channel; the lower grinding disc is arranged on the tray; the rotating joint B includes two channels, one inlet and one outlet; one end of the inner shaft tube and the outer shaft tube are respectively connected to the two channels of the rotating joint B, and the other ends are respectively connected to the water divider, and the water inlet and the water outlet of the heat dissipation water channel are respectively connected through the water divider.

2. The water-cooled single-side polishing machine according to claim 1, characterized in that: The lifting drive mechanism includes a lifting cylinder and a force sensor, and the piston rods of the upper and lower cylinders are connected to the lifting seat through the force sensor.

3. The water-cooled single-side polishing machine according to claim 1, characterized in that: A locking hook is arranged on the lifting seat, a locking cylinder is correspondingly arranged on the upper base, and a locking pin matching the locking hook is arranged on the piston rod of the locking cylinder.

4. The water-cooled single-side polishing machine according to claim 1, characterized in that: The rotary drive mechanism consists of a planetary reducer, a synchronous belt and a pulley.

5. The water-cooled single-side polishing machine according to claim 4, characterized in that: An angle sensor is arranged on the lifting seat to detect whether the rotating shaft tube rotates to a preset angle.

6. The water-cooled single-side polishing machine according to claim 1, characterized in that: The upper grinding disc device also includes a disc cleaning mechanism arranged on the upper base, the disc cleaning mechanism includes a cleaning cylinder, a cleaning pipe, and a cleaning arm. The front end of the cleaning arm is provided with a water outlet and an air outlet, and the rear end of the cleaning arm is connected to the bottom end of the cleaning pipe; the cleaning pipe is hollow inside, and the top of the cleaning pipe is passed through another bearing on the upper base, and a cam is provided on the top of the cleaning pipe; the piston rod of the cleaning cylinder is connected to the cam, and the cleaning arm is driven to swing through the cam and the cleaning pipe.

7. The water-cooled single-side polishing machine according to claim 1, characterized in that: There are multiple heat dissipation water channels on the tray, all of which are connected to the inner shaft tube and the outer shaft tube through a water distributor.

8. The water-cooled single-side polishing machine according to claim 1, characterized in that: The water outlet flux of the rotary joint B is less than or equal to the water inlet flux.

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