Top plate assembly and motion positioning device having the same

Abstract

The present invention provides a top plate assembly and a motion positioning device having the same. The top plate assembly is disposed on the mounting plate of the motion positioning device for carrying and positioning a workpiece. The top plate assembly includes: a top plate disposed above the mounting plate for carrying the workpiece; a plurality of top plate sliders, the top plate is movably connected to the top plate guide rail on the mounting plate through the plurality of top plate sliders located below it, so as to move relative to the mounting plate under the interaction of the top plate motor stator and the top plate motor rotor; an adapter, the top plate motor stator is mounted on the mounting plate, and the top plate motor rotor is connected to the top plate through the adapter; the adapter includes a plurality of support portions, each support portion is in point contact with the top plate and the contact points are all directly above the top plate sliders, and the top plate provides a vertically upward supporting force to the adapter through the contact points, so as to solve the problem that the motion accuracy of the XY motion stage in the prior art will be reduced due to the magnetic attraction force between the stator and the rotor of the motor.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer detection equipment, and particularly to a top plate assembly and a motion positioning device having the same. Background Art

[0002] In the field of semiconductor silicon wafer manufacturing or detection, it is required that the workpiece stage carries the silicon wafer to complete the precise positioning of the silicon wafer for the convenience of silicon wafer manufacturing or detection. Therefore, in the workpiece stage device applied to silicon wafer manufacturing or detection, a two-axis motion device that realizes the precise positioning of the silicon wafer in the X and Y two-dimensional planes is its core component.

[0003] With the development of the semiconductor industry, the requirements for the manufacturing or detection efficiency and the manufacturing or detection accuracy of silicon wafers are continuously increasing. Therefore, the operating speed, acceleration, performance, etc. of the two-axis motion device for carrying the silicon wafer also need to be improved accordingly.

[0004] In order to increase the acceleration of the XY stage, a coreless motor is usually used to drive the movement in the X and Y directions, and the workpiece stage usually adopts a stacked structure. However, for the upper top plate, the magnetic attraction of the coreless motor and the heat generated during operation will increase the deformation of the upper top plate. This deformation directly affects the force balance of the guide rail and the slider connected to the top plate, and affects the movement accuracy of the guide rail and the slider, thereby reducing the movement and positioning accuracy of the two-axis motion device.

[0005] In response to this, someone proposed to set a top plate with a flexible mechanism to prevent the deformation of the guide rail from being transmitted to the silicon wafer carrier. However, the degree of weakening of the influence of the magnetic attraction of the coreless motor by this structural form is limited, and it cannot effectively solve the problem that the accuracy of the top plate and the guide rail connected to the top plate decreases when the top plate is affected by the magnetic attraction and thermal deformation of the coreless motor. At the same time, integrating the flexible mechanism inside the top plate is also not conducive to disassembly, adjustment, with high processing difficulty and high production cost. Summary of the Invention

[0006] The main purpose of the present invention is to provide a top plate assembly and a motion positioning device having the same, so as to solve the problem that the motion accuracy of the XY motion stage in the prior art decreases due to the influence of the magnetic attraction between the stator and the rotor of the motor.

[0007] In order to achieve the above-mentioned purpose, according to one aspect of the present invention, a top plate assembly is provided, which is arranged on the mounting plate of a motion positioning device for carrying and positioning a workpiece, and the top plate assembly includes: a top plate, which is arranged above the mounting plate for carrying the workpiece; a plurality of top plate sliders, the top plate is movably connected to the top plate guide rails on the mounting plate through the plurality of top plate sliders, so as to move relative to the mounting plate under the interaction between the top plate motor stator and the top plate motor mover; a plurality of top plate sliders are located below the top plate; an adapter, the top plate motor stator is installed on the mounting plate, and the top plate motor mover is connected to the top plate through the adapter; wherein the adapter includes a plurality of support parts, each of the support parts is in point contact with the top plate, and the contact points of each support part with the top plate are located directly above the top plate sliders, and the top plate provides a vertical upward supporting force to the adapter through the contact points.

[0008] Furthermore, a receiving groove is provided on the top plate, partially penetrating the top plate in the vertical direction for accommodating the adapter and the top plate motor mover; the first opening of the receiving groove for accommodating the adapter is arranged vertically upward, and the second opening of the receiving groove for accommodating the top plate motor mover is arranged vertically downward.

[0009] Furthermore, the adapter includes a main plate body and a plurality of sub-plate bodies connected to the main plate body, the plurality of sub-plate bodies are arranged at intervals around the circumference of the main plate body, the plurality of sub-plate bodies and the plurality of top plate sliders are arranged one-to-one correspondingly on the upper and lower sides of the top plate, each sub-plate body is located on the side of the corresponding top plate slider facing away from the top plate guide rail, and the plurality of sub-plate bodies constitute a plurality of support parts of the adapter.

[0010] Furthermore, the accommodating groove includes a first groove body, a plurality of second groove bodies and a third groove body that are connected to each other. The first groove body is arranged corresponding to the main plate body to accommodate the main plate body, the plurality of second groove bodies are arranged one by one corresponding to the plurality of sub-plate bodies, each second groove body is used to accommodate the corresponding sub-plate body, and the third groove body is used to accommodate the top plate motor rotor; the first groove body and the third groove body are at least partially connected and penetrate the top plate in the vertical direction, and the plurality of second groove bodies do not penetrate the top plate in the vertical direction; the first groove body and the plurality of second groove bodies jointly form a first opening above, and the third groove body forms a second opening below.

[0011] Furthermore, the main plate body is fixedly connected to the top plate motor rotor at the first slot body or the third slot body; each sub-plate body is located in the corresponding second slot body, and the lower surface of each sub-plate body is in point contact with the slot bottom surface of the corresponding second slot body; when the main plate body is deformed downward by the downward magnetic attraction force of the top plate motor rotor, each sub-plate body is tilted upward, but the sub-plate body is still located at the contact point due to the vertical upward supporting force, so as to avoid each sub-plate body transmitting the deformation to the corresponding top plate slider through the slot bottom surface of the corresponding second slot body.

[0012] Further, a convex portion is provided on the lower surface of the auxiliary plate body or the bottom surface of the second groove body, and at least a part of the outer surface of the convex portion is a curved surface, so as to achieve point contact between the lower surface of the auxiliary plate body and the bottom surface of the second groove body.

[0013] Further, the contact points are all directly above the center position of the top plate slider.

[0014] Further, a ball head set screw is provided on the lower surface of the auxiliary plate body or the bottom surface of the second groove body, and the convex portion is at least a part of the ball head of the ball head set screw; and / or the convex portion is provided on the auxiliary plate body and protrudes downward toward the auxiliary plate body.

[0015] Further, a mounting hole for mounting the threaded section of the ball head set screw is provided on the auxiliary plate body, and the ball head set screw is fixed to the adapter through the mounting hole, and the ball head is located at one end of the threaded section close to the bottom surface of the second groove body and at least a part of the ball head protrudes from the outer surface of the adapter.

[0016] Further, a locking nut is installed at one end of the threaded section of the ball head set screw away from the ball head to lock the ball head set screw and the adapter.

[0017] Further, the top plate assembly further includes a screw disposed opposite to the convex portion, and the screw is used for point contact with the convex portion to avoid direct contact between the top plate and the adapter; wherein, the convex portion is located on the lower surface of the auxiliary plate body, the screw is located on the bottom surface of the second groove body, or the convex portion is located on the bottom surface of the second groove body, and the screw is located on the auxiliary plate body.

[0018] Further, a screw mounting hole for mounting the screw is provided on the bottom surface of the receiving groove, and the screw is mounted in the screw mounting hole.

[0019] Further, the minimum depth of the receiving groove is greater than the maximum thickness of the adapter.

[0020] Further, the top plate assembly further includes a flexible connecting member, and the main plate body and the top plate are connected through the flexible connecting member, and at least a part of the flexible connecting member has flexibility in the vertical direction, so that the main plate body and the top plate are relatively movably arranged.

[0021] Further, the flexible connecting member includes: two connecting portions, the two connecting portions are respectively connected to the adapter and the top plate; a flexible portion, the flexible portion is located between the two connecting portions to connect the two connecting portions.

[0022] Further, the flexible connecting member further includes a reinforcing portion located between the two connecting portions. The number of flexible portions is one more than the number of reinforcing portions. Along the connecting direction of the flexible portions between the two connecting portions, the flexible portions and the reinforcing portions are arranged alternately and connected to each other to jointly form the portion between the two connecting portions. The minimum thickness of the reinforcing portion is greater than the maximum thickness of the flexible portion; and / or the thickness of the flexible portion ranges from 0.1 mm to 5 mm.

[0023] Further, a first connecting hole with a hole center line extending in the vertical direction is provided on the connecting portion for fixedly connecting with the adapter or the top plate in the vertical direction; and / or a second connecting hole with a hole center line extending in the horizontal direction is provided on the connecting portion for fixedly connecting with the adapter or the top plate in the horizontal direction.

[0024] Further, an installation groove for installing the flexible connecting member is provided on the top plate. The installation groove is located on the upper side of the top plate and communicates with the accommodation groove in the horizontal direction; and / or the number of flexible connecting members is two, and the two flexible connecting members are respectively arranged on the opposite sides in the horizontal direction of the adapter; or the number of flexible connecting members is at least three, and at least three flexible connecting members are arranged at intervals around the circumferential side in the horizontal direction of the adapter.

[0025] Further, the top plate is made of an aluminum alloy material.

[0026] According to another aspect of the present invention, a motion positioning device is provided, which includes a fixed component, a first moving component, and a second moving component connected in sequence. The first moving component is movably arranged on the fixed component along a first direction, and the second moving component is movably arranged on the fixed component along a second direction; the first moving component includes the above-mentioned mounting plate; the second moving component is the above-mentioned top plate assembly.

[0027] Applying the technical solution of the present invention, the top plate assembly of the present invention, which is arranged on the mounting plate of a motion positioning device for carrying and positioning a workpiece, includes: a top plate, which is arranged above the mounting plate for carrying the workpiece; a plurality of top plate sliders, the top plate is movably connected to the top plate guide rails on the mounting plate through the plurality of top plate sliders, so as to move relative to the mounting plate under the interaction between the top plate motor stator and the top plate motor mover; a plurality of top plate sliders are located below the top plate; an adapter, the top plate motor stator is installed on the mounting plate, and the top plate motor mover is connected to the top plate through the adapter; wherein the adapter includes a plurality of supporting parts, each of the supporting parts is in point contact with the top plate, and the contact points of each of the supporting parts with the top plate are located directly above the corresponding top plate sliders, and the top plate provides a vertical upward supporting force to the adapter through the contact points. In this way, when the adapter is deformed due to magnetic attraction or heat, the vertical downward force (gravity and the magnetic attraction generated by the motor) acting on the adapter will be dispersed to each contact point and act vertically downward. Since each contact point is located directly above the top plate slider, the force exerted by the adapter on the top plate slider through the top plate will still act directly above the top plate slider. The position and direction of the force acting on the adapter before and after deformation are almost unchanged, thereby avoiding the deformation of the adapter affecting the top plate slider through the top plate, solving the problem in the prior art that the motion accuracy of the XY motion table will be reduced due to the influence of the magnetic attraction between the stator and the mover of the motor, and also solving the problem in the prior art of top plate deformation caused by the heating of the mover of the iron core motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The drawings constituting a part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0029] Figure 1 A schematic structural diagram of an embodiment of a motion positioning device according to the present invention is shown;

[0030] Figure 2 A schematic structural diagram of an embodiment of a top plate assembly according to the present invention is shown;

[0031] Figure 3 Shows Figure 2 A top view of the top plate assembly is shown;

[0032] Figure 4 Shows Figure 2 A schematic structural diagram of a top plate of a top plate assembly shown;

[0033] Figure 5 Shows Figure 2 A schematic structural diagram of an adapter of a top plate assembly shown;

[0034] Figure 6 shows Figure 2 a schematic cross-sectional view of a first cross-section of the shown top plate assembly intercepted by a first plane perpendicular to the extension direction of the top plate guide rail;

[0035] Figure 7 shows Figure 6 a partial enlarged view of the combination of the ball head set screw and the screw in the shown schematic cross-sectional view;

[0036] Figure 8 a schematic structural view of a first embodiment of the flexible connecting member of the top plate assembly of the present invention;

[0037] Figure 9 a schematic structural view of a second embodiment of the flexible connecting member of the top plate assembly of the present invention;

[0038] Figure 10 shows the top plate assembly equipped with Figure 9 a schematic cross-sectional view of a second cross-section of the shown top plate assembly intercepted by a second plane perpendicular to the extension direction of the top plate guide rail.

[0039] Among them, the above-mentioned drawings include the following reference numerals:

[0040] 1, fixed assembly; 10, base; 11, mounting plate guide rail; 12, mounting plate motor stator;

[0041] 2, first moving assembly; 20, mounting plate; 21, top plate guide rail; 22, top plate motor stator; 23, mounting plate slider;

[0042] 3, second moving assembly; 30, top plate; 301, receiving groove; 3011, first groove; 3012, second groove; 3013, third groove; 302, threaded hole; 303, mounting groove; 304, relief groove; 305, wire harness card slot; 31, adapter; 311, main board body; 312, sub-board body; 313, mounting hole; 32, top plate slider; 33, top plate motor rotor; 34, ball head set screw; 341, threaded section; 342, ball head; 35, flexible connecting member; 351, connecting portion; 352, flexible portion; 353, reinforcing portion; 36, lock nut; 37, screw; 371, screw rod; 372, nut. Detailed Description of the Invention

[0043] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the drawings and in combination with the embodiments.

[0044] As Figures 1 to 10As shown in the figure, the present invention provides a top plate assembly. The top plate assembly is arranged on the mounting plate 20 of the motion positioning device for carrying and positioning a workpiece. The top plate assembly includes: a top plate 30 arranged above the mounting plate 20 for carrying the workpiece; a plurality of top plate sliders 32, the top plate 30 is movably connected to the top plate guide rail 21 on the mounting plate 20 through the plurality of top plate sliders 32 to move relative to the mounting plate 20 under the interaction of the top plate motor stator 22 and the top plate motor mover 33; the plurality of top plate sliders 32 are located below the top plate 30; an adapter 31, the top plate motor stator 22 is mounted on the mounting plate 20, and the top plate motor mover 33 is connected to the top plate 30 through the adapter 31; wherein, the adapter 31 includes a plurality of support portions, each support portion is in point contact with the top plate 30, and the contact points of each support portion with the top plate 30 are all directly above the corresponding top plate slider 32, and the top plate 30 provides a vertically upward supporting force to the adapter 31 through the contact points.

[0045] In the prior art, during the movement of the top plate assembly of the motion positioning device, the top plate motor stator is usually fixedly connected to the top plate. The top plate motor stator 22 will generate a relatively large magnetic suction force in the vertical direction, i.e., the Z direction, on the top plate motor mover 33. This magnetic suction force acts on the top plate 30 through the top plate motor mover 33, causing the top plate 30 to deform in the Z direction. In addition, the heat generated by the high-speed moving top plate motor mover 33 will also cause the deformation of the top plate 30. Since the volume of the top plate 30 is small and the strength of the structure of the top plate 30 is limited, the deformation of the top plate 30 will be transmitted to the top plate sliders 32 and the top plate guide rail 21, resulting in the deformation of the top plate guide rail 21, thereby affecting the positioning accuracy of the motion positioning device.

[0046] The top plate assembly arranged on the mounting plate 20 of the motion positioning device of the present invention for carrying and positioning the workpiece includes: a top plate 30 arranged above the mounting plate 20 for carrying the workpiece; a plurality of top plate sliders 32, the top plate 30 is movably connected to the top plate guide rail 21 on the mounting plate 20 through the plurality of top plate sliders 32 to move relative to the mounting plate 20 under the interaction of the top plate motor stator 22 and the top plate motor rotor 33; the plurality of top plate sliders 32 are located below the top plate 30; an adapter 31, the top plate motor stator 22 is mounted on the mounting plate 20, and the top plate motor rotor 33 is connected to the top plate 30 through the adapter 31; wherein, the adapter 31 includes a plurality of support parts, each support part is in point contact with the top plate 30, and the contact points of each support part with the top plate 30 are all directly above the corresponding top plate slider 32, and the top plate 30 provides a vertically upward supporting force to the adapter 31 through the contact points. In this way, when the adapter 31 is deformed due to magnetic attraction or heat, the vertically downward resultant force (gravity and magnetic attraction generated by the motor) received by the adapter 31 will be dispersed to each contact point and act vertically downward. Since each contact point is directly above the top plate slider 32, therefore, the acting force of the adapter 31 on the top plate slider 32 through the top plate 30 will still act directly above the top plate slider 32, and the acting position and acting direction of the acting force of the adapter 31 before and after deformation hardly change, avoiding the phenomenon that the deformation of the adapter 31 affects the top plate slider 32 through the top plate 30, solving the problem that the motion accuracy of the XY motion stage in the prior art will decrease due to the influence of the magnetic attraction between the stator and the rotor of the motor, and also solving the problem that the deformation of the top plate 30 caused by the heat generation of the rotor of the iron-core motor in the prior art.

[0047] As Figure 4 and Figure 6 shown, a receiving groove 301 is provided on the top plate 30 that partially penetrates the top plate 30 in the vertical direction for receiving the adapter 31 and the top plate motor rotor 33; the first opening of the receiving groove 301 for receiving the adapter 31 is arranged vertically upward, the adapter 31 enters the receiving groove 301 through the first opening, the second opening of the receiving groove 301 for receiving the top plate motor rotor 33 is arranged vertically downward, and the top plate motor rotor 33 enters the receiving groove 301 through the second opening and is arranged opposite to the top plate motor stator 22.

[0048] As Figure 5 shown, the adapter 31 includes a main board body 311 and a plurality of secondary board bodies 312 connected to the main board body 311. The plurality of secondary board bodies 312 are arranged at intervals around the circumferential side of the main board body 311. The plurality of secondary board bodies 312 and the plurality of top plate sliders 32 are arranged in one-to-one correspondence on the upper and lower sides of the top plate 30. Each secondary board body 312 is located on the side of the corresponding top plate slider 32 facing away from the top plate guide rail 21, and the plurality of secondary board bodies 312 constitute the plurality of support parts of the adapter 31.

[0049] Preferably, the number of the auxiliary plate bodies 312 is the same as that of the top plate sliders 32, and they are arranged in a one-to-one correspondence.

[0050] Specifically, the accommodating groove 301 includes a first groove body 3011, a plurality of second groove bodies 3012 and a third groove body 3013 that are communicated with each other. The first groove body 3011 is correspondingly arranged with the main plate body 311 for accommodating the main plate body 311. The plurality of second groove bodies 3012 are arranged in a one-to-one correspondence with the plurality of auxiliary plate bodies 312. Each second groove body 3012 is used for accommodating the corresponding auxiliary plate body 312. The third groove body 3013 is used for accommodating the top plate motor mover 33. At least part of the first groove body 3011 and the third groove body 3013 is communicated and penetrates through the top plate 30 in the vertical direction. The plurality of second groove bodies 3012 do not penetrate through the top plate 30 in the vertical direction. An upper portion of the first groove body 3011 and the plurality of second groove bodies 3012 together form a first opening of the accommodating groove 301, and a lower portion of the third groove body 3013 forms a second opening of the accommodating groove 301.

[0051] Wherein, the main plate body 311 and the top plate motor mover 33 are fixedly connected at the first groove body 3011 or the third groove body 3013. Each auxiliary plate body 312 is located in the corresponding second groove body 3012, and a lower surface of each auxiliary plate body 312 and a groove bottom surface of the corresponding second groove body 3012 are in point contact. When the main plate body 311 is deformed downward due to the downward magnetic suction force of the top plate motor mover 33, each auxiliary plate body 312 and the top plate 30 will still remain in contact at the corresponding contact points, so as to receive a vertically upward supporting force at the positions where the contact points are located, so as to prevent each auxiliary plate body 312 from transmitting the magnetic suction force to other positions of the corresponding top plate slider 32 through the groove bottom surface of the corresponding second groove body 3012, resulting in deformation of the top plate slider 32 and the top plate guide rail 21.

[0052] Optionally, a convex portion is provided on the lower surface of the auxiliary plate body 312 or the groove bottom surface of the second groove body 3012. At least part of an outer surface of the convex portion is a curved surface, so as to realize point contact between the lower surface of the auxiliary plate body 312 and the groove bottom surface of the second groove body 3012.

[0053] Preferably, the contact points are all directly above the central positions of the top plate sliders 32.

[0054] In at least one embodiment of the present invention, a spherical head set screw 34 is provided on the lower surface of the auxiliary plate body 312 or the groove bottom surface of the second groove body 3012, and the convex portion is at least part of a spherical head 342 of the spherical head set screw 34.

[0055] Specifically, the convex portion is provided on the auxiliary plate body 312 and protrudes downward toward the auxiliary plate body 312.

[0056] Such as Figure 6 And Figure 7As shown, the auxiliary plate body 312 is provided with an installation hole 313 for installing the threaded section 341 of the ball head set screw 34. The ball head set screw 34 is fixed on the adapter 31 through the installation hole 313. The ball head 342 is located at one end of the threaded section 341 close to the bottom surface of the second groove body 3012, and at least part of the ball head 342 protrudes from the lower surface of the adapter 31.

[0057] Preferably, a lock nut 36 is installed at one end of the threaded section 341 of the ball head set screw 34 away from the ball head 342 to lock the ball head set screw 34 and the adapter 31.

[0058] Further preferably, the top plate assembly further includes a screw 37 disposed opposite to the convex portion. The screw 37 is used for point contact with the convex portion to prevent direct contact between the top plate 30 and the adapter 31. Among them, the convex portion is located on the lower surface of the auxiliary plate body 312, the screw 37 is located on the bottom surface of the second groove body 3012, or the convex portion is located on the bottom surface of the second groove body 3012 and the screw 37 is located on the auxiliary plate body 312.

[0059] As Figure 4 and Figure 7 shown, a threaded hole 302 for installing the screw 37 is provided on the bottom surface of the second groove body 3012 of the receiving groove 301, and the screw 37 is installed in the threaded hole 302.

[0060] Specifically, the screw 37 includes a screw rod 371 and a nut 372. The screw rod 371 is inserted into the threaded hole 302, and the nut 372 is located above the screw rod 371 for point contact with the convex portion on the corresponding auxiliary plate body 312.

[0061] In at least one embodiment of the top plate assembly of the present invention, the number of the top plate guide rails 21 is two, and the two top plate guide rails 21 are arranged at intervals in the first direction. Correspondingly, the number of the top plate sliders 32 is also two groups. The two groups of top plate sliders 32 are slidably connected to the two top plate guide rails 21 in one-to-one correspondence. Each group of top plate sliders 32 includes two top plate sliders 32 arranged at intervals along the corresponding top plate guide rail 21 to jointly guide the movement of the top plate 30. The number of the top plate motor stators 22 is one, and the top plate motor stator 22 is located between the two top plate guide rails 21. Correspondingly, the number of the top plate motor rotors 33 is also one, and the top plate motor rotor 33 is arranged corresponding to the top plate motor stator 22 to drive the top plate 30 to move. Among them, the number of the auxiliary plate bodies 312 in the adapter 31 is four, and the four auxiliary plate bodies 312 are arranged in one-to-one correspondence with the above four top plate sliders 32 and are respectively located on the upper and lower sides of the top plate 30.

[0062] As Figure 6As shown in the figure, since the stator of the top plate motor 33 is located below the adapter 31, the adapter 31 is arranged on the top plate 30 and supported by four contact points. The vertical force F (gravity and magnetic suction force of the motor) acting on the stator of the top plate motor 33 can be decomposed into four acting forces F1, F2, F3, and F4 in the Z direction at the contact points. These four forces F1, F2, F3, and F4 act directly above the four top plate sliders 32 through the top plate 30 respectively. When the adapter 31 is deformed under force, the adapter 31 and the top plate 30 are coupled in a form of point contact between the ball head screw 34 and the screw 37, so that the four acting forces F1, F2, F3, and F4 still act directly above the top plate sliders 32. The acting positions and acting directions of the acting forces F1, F2, F3, and F4 change little compared with those before deformation, which can effectively prevent the deformation of the top plate 30, thereby reducing the deformation of the top plate sliders 32.

[0063] Preferably, the contact points are arranged directly above the central positions of the top plate sliders 32. The supporting forces provided by the four top plate sliders 32 at their respective central positions can be regarded as Fn1, Fn2, Fn3, and Fn4. At this time, F1, F2, F3, F4 and Fn1, Fn2, Fn3, Fn4 are arranged in one-to-one correspondence, and the two corresponding acting forces act on the same straight line to offset the influence of the deformation of the adapter 31 on the top plate 30 and the top plate sliders 32 to the greatest extent.

[0064] Specifically, the top plate slider 32 is in the shape of a cuboid, and the central position of the top plate slider 32 refers to the intersection point of the diagonals of the upper surface of the rectangle of the top plate slider 32.

[0065] Optionally, the adapter 31 is a plate body with uniform thickness, and the minimum depth of the receiving groove 301 is greater than the thickness of the adapter 31, so that the adapter 31 is completely located in the receiving groove 301; or the adapter 31 is a plate body with non-uniform thickness, at least part of the adapter 31 protrudes from the receiving groove 301, and the position on the top plate 30 for carrying the workpiece or the workpiece support is located on the periphery of the receiving groove 301 to avoid the influence of the protruding part of the adapter 31 on the position accuracy of the workpiece or the workpiece support.

[0066] As Figure 4 shown, a wire harness slot 305 is arranged on the top plate 30. The wire harness slot 305 is located below the top plate 30 and the mouth of the wire harness slot 305 faces downward for placing the connecting wire harness of the stator of the top plate motor 33.

[0067] As Figure 6As shown, an avoidance groove 304 for accommodating at least a part of the top plate slider 32 is provided on the top plate 30. The avoidance groove 304 is located below the top plate 30 and the opening of the avoidance groove 304 faces downward. The upper part of each top plate slider 32 is connected to the groove wall surface of the avoidance groove 304, and the lower part of each top plate slider 32 is connected to the top plate guide rail 21, so as to reduce the overall height of the top plate assembly in the vertical direction, thereby reducing the space occupancy rate of the top plate assembly.

[0068] As Figure 2 , Figure 4 and Figures 8 to 10 As shown, the top plate assembly further includes a flexible connecting member 35. The main board body 311 and the top plate 30 are connected by the flexible connecting member 35. At least a part of the flexible connecting member 35 has flexibility in the vertical direction, so that the main board body 311 and the top plate 30 are arranged to be relatively movable.

[0069] As Figure 8 and Figure 9 In the two embodiments shown, the flexible connecting member 35 includes: two connecting portions 351, and the two connecting portions 351 are respectively connected to the adapter 31 and the top plate 30; a flexible portion 352, and the flexible portion 352 is located between the two connecting portions 351 to connect the two connecting portions 351.

[0070] As Figure 8 In the embodiment shown, the flexible connecting member 35 further includes a reinforcing portion 353 located between the two connecting portions 351. The number of flexible portions 352 is one more than the number of reinforcing portions 353. Along the connecting direction of the flexible portions 352 between the two connecting portions 351, the flexible portions 352 and the reinforcing portions 353 are arranged in an alternating manner and connected to each other to jointly form the part between the two connecting portions 351. Among them, the minimum thickness of the reinforcing portion 353 is greater than the maximum thickness of the flexible portion 352, so that the flexible connecting member 35 is not easily damaged when deforming.

[0071] Preferably, the thickness of the flexible portion 352 ranges from 0.1 mm to 5 mm, and its specific value needs to be determined according to the allowable displacement amount of the adapter 31.

[0072] Optionally, a first connection hole with a hole center line extending in the vertical direction is provided on the connecting portion 351 for fixedly connecting with the adapter 31 or the top plate 30 in the vertical direction; and / or a second connection hole with a hole center line extending in the horizontal direction is provided on the connecting portion 351 for fixedly connecting with the adapter 31 or the top plate 30 in the horizontal direction.

[0073] As Figure 2 and Figure 8 In an embodiment of the flexible connecting member 35 shown, second connection holes with hole center lines extending in the horizontal direction are provided on both of the two connecting portions 351.

[0074] As Figure 9 and Figure 10 shown in another embodiment of the flexible connecting member 35, first connecting holes with the hole center lines extending in the vertical direction are provided on both of the two connecting portions 351.

[0075] As Figure 4 shown, an installation groove 303 for installing the flexible connecting member 35 is provided on the top plate 30. The installation groove 303 is located on the upper side of the top plate 30 and communicates with the accommodation groove 301 in the horizontal direction.

[0076] Optionally, the number of the flexible connecting members 35 is two, and the two flexible connecting members 35 are respectively arranged on the opposite sides in the horizontal direction of the adapter 31; or the number of the flexible connecting members 35 is at least three, and at least three flexible connecting members 35 are arranged at intervals around the circumferential side in the horizontal direction of the adapter 31.

[0077] As Figure 2 shown in the embodiment, one flexible connecting member 35 is arranged on each of the three side surfaces of the adapter 31. Two connecting portions 351 in each flexible connecting member 35 are respectively connected to the adapter 31 and the top plate 30. The flexible portion 352 allows a certain amount of deformation displacement of the adapter 31 in the vertical direction, i.e., the Z direction. Due to the buffering of the deformation by the flexible portion 352 of the flexible connecting member 35, the adapter 31 can allow a large deformation and the top plate 30 will not be affected by the deformation of the adapter 31.

[0078] The present invention can achieve high-acceleration and high-speed movement through the combination of a guide rail slider and a core motor. Considering the influence of the volume, heat generation and magnetic suction force of the motor, the driving mass should be reduced as much as possible. Therefore, lightweight design is required for the structural members. For example, the top plate 30 and the mounting plate 20 can be made of lightweight metal materials, such as aluminum alloy.

[0079] As Figure 1 shown, the present invention also provides a motion positioning device, which includes a fixed component 1, a first moving component 2 and a second moving component 3 connected in sequence. The first moving component 2 is movably arranged on the fixed component 1 along a first direction, and the second moving component 3 is movably arranged on the fixed component 1 along a second direction; the first moving component 2 includes the above-mentioned mounting plate 20; the second moving component 3 is the above-mentioned top plate assembly.

[0080] In Figure 1In [the device], the fixed component 1 includes a base 10, above which an installation plate guide rail 11 and an installation plate motor stator 12 are provided; the installation plate 20 of the first moving component 2 is arranged above the base 10 and is slidably connected to the installation plate guide rail 11 through an installation plate slider 23, and the installation plate motor mover matching the installation plate motor stator 12 is installed below the installation plate 20 and is arranged corresponding to the installation plate motor stator 12; above the installation plate 20, a top plate guide rail 21 and a top plate motor stator 22 are provided, and the top plate 30 of the second moving component 3, i.e., the top plate component, is arranged above the installation plate 20 and is slidably connected to the top plate guide rail 21 through a top plate slider 32, and the top plate motor mover 33 matching the top plate motor stator 22 is connected to the top plate 30 through an adapter 31 and is arranged corresponding to the top plate motor stator 22.

[0081] In at least one embodiment of the motion positioning device of the present invention, the installation plate guide rail 11 and the installation plate motor stator 12 extend along a first direction to respectively guide and drive the motion of the first moving component 2 along the first direction; wherein, the number of the installation plate guide rails 11 is three, and the three installation plate guide rails 11 are arranged at intervals along a second direction. Correspondingly, the number of the installation plate sliders 23 is also three groups, and the three groups of installation plate sliders 23 are slidably connected to the three installation plate guide rails 11 one by one to jointly guide the motion of the installation plate 20; the number of the installation plate motor stators 12 is two, and one installation plate motor stator 12 is arranged between every two adjacent installation plate guide rails 11. Correspondingly, the number of the installation plate motor movers is also two, and the two installation plate motor movers are arranged corresponding to the two installation plate motor stators 12 one by one to jointly drive the installation plate 20 to move.

[0082] Optionally, the installation plate slider 23 and the bottom of the installation plate 20 can be directly connected, or an installation plate slider adapter can be additionally provided for connection to prevent the force that deforms the installation plate 20 from being transmitted to the installation plate slider 23 and the installation plate guide rail 11.

[0083] During the motion of the first moving component 2, the stator of the installation plate motor stator 12 will generate a large Z-direction attraction force on the installation plate motor mover, and the deformation of the installation plate 20 caused by the interaction between the installation plate motor stator 12 and the installation plate motor mover can be reduced by increasing the structural strength of the installation plate 20.

[0084] In at least one embodiment of the motion positioning device of the present invention, the top plate guide rail 21 and the top plate motor stator 22 extend along the second direction to respectively guide and drive the movement of the second moving assembly 3 along the second direction; wherein, the number of the top plate guide rails 21 is two, and the two top plate guide rails 21 are arranged at intervals along the first direction. Correspondingly, the number of the top plate sliders 32 is also two groups, and the two groups of top plate sliders 32 are slidably connected to the two top plate guide rails 21 one by one to jointly guide the movement of the top plate 30; the number of the top plate motor stators 22 is one, and the top plate motor stator 22 is located between the two top plate guide rails 21. Correspondingly, the number of the top plate motor rotors 33 is also one, and the top plate motor rotor 33 is arranged corresponding to the top plate motor stator 22 to drive the top plate 30 to move.

[0085] Preferably, the first direction is the X direction, the second direction is the Y direction, the vertical direction is the Z direction, and the X direction, the Y direction and the Z direction are perpendicular to each other in pairs.

[0086] Optionally, the top plate slider 32 can be directly connected to the bottom of the top plate 30, or a top plate slider adapter can be additionally provided for connection to prevent the force that deforms the top plate 30 from being transmitted to the top plate slider 32 and the top plate guide rail 21.

[0087] Specifically, the carrying module located above the top plate 30 can be fixedly connected to the side surface of the top plate 30 through fasteners to ensure the position flatness of the workpiece.

[0088] In the prior art, when the top plate 30 is connected to the top plate motor rotor 33, the middle part of the bottom of the top plate 30 connected to the top plate motor rotor 33 will also be deformed in the Z direction due to the magnetic suction force received by the top plate motor rotor 33. In addition, the heat generated by the rotor under high-speed movement will also cause the overall deformation of the aluminum alloy top plate 30. Since the top plate 30 is small in volume and the strengthening effect of the ordinary structure is limited, this deformation will be transmitted from the top plate slider 32 to the top plate guide rail 21, resulting in the deformation of the top plate guide rail 21 and affecting the positioning accuracy of the motion positioning device. Therefore, the top plate assembly of the present invention can effectively avoid the adverse effect on the positioning accuracy caused by the deformation of the top plate 30.

[0089] From the above description, it can be seen that the above embodiments of the present invention achieve the following technical effects:

[0090] The top plate assembly arranged on the mounting plate 20 of the motion positioning device for carrying and positioning the workpiece includes: a top plate 30 arranged above the mounting plate 20 for carrying the workpiece; a plurality of top plate sliders 32, the top plate 30 is movably connected to the top plate guide rail 21 on the mounting plate 20 through the plurality of top plate sliders 32 to move relative to the mounting plate 20 under the interaction of the top plate motor stator 22 and the top plate motor rotor 33; the plurality of top plate sliders 32 are located below the top plate 30; an adapter 31, the top plate motor stator 22 is mounted on the mounting plate 20, and the top plate motor rotor 33 is connected to the top plate 30 through the adapter 31; wherein, the adapter 31 includes a plurality of support parts arranged in one-to-one correspondence with the plurality of top plate sliders 32, and each support part is in point contact with the top plate 30, and the contact points of each support part with the top plate 30 are all directly above the corresponding top plate slider 32, and the top plate 30 provides a vertically upward supporting force to the adapter 31 through the contact points. Thus, when the adapter 31 is deformed due to magnetic attraction or heat, the vertically downward resultant force (gravity and magnetic attraction generated by the motor) received by the adapter 31 will be dispersed to each contact point and act vertically downward. Since each contact point is directly above the top plate slider 32, therefore, the acting force of the adapter 31 on the top plate slider 32 through the top plate 30 will still act directly above the top plate slider 32. The acting position and acting direction of the acting force of the adapter 31 before and after deformation hardly change, avoiding the phenomenon that the deformation of the adapter 31 affects the top plate slider 32 through the top plate 30, solving the problem that the motion accuracy of the XY moving table in the prior art is reduced due to the magnetic attraction between the stator and the rotor of the motor, and also solving the problem that the deformation of the top plate 30 caused by the heat generation of the rotor of the iron-core motor in the prior art.

[0091] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or their combinations.

[0092] Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for the sake of convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0093] In the description of the present application, it should be understood that the orientation or positional relationships indicated by orientation terms such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom", etc., are usually based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description. Without contrary description, these orientation terms do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus should not be construed as limiting the protection scope of the present application; the orientation terms "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0094] For the convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "above" can be used here to describe the spatial positional relationships of one device or feature shown in the drawings with other devices or features. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation described in the drawings for the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations should be made for the spatial relative descriptions used here.

[0095] In addition, it should be noted that the use of terms such as "first", "second" to limit components is only for the convenience of distinguishing the corresponding components. Without additional statement, the above terms have no special meanings, and thus should not be construed as limiting the protection scope of the present application.

[0096] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A top plate assembly, characterized in that, The top plate assembly is arranged on the mounting plate (20) of the motion positioning device for carrying a workpiece and positioning the workpiece. The top plate assembly includes: A top plate (30), arranged above the mounting plate (20) for carrying the workpiece; A plurality of top plate sliders (32), the top plate (30) is movably connected to the top plate guide rail (21) on the mounting plate (20) through the plurality of top plate sliders (32) to move relative to the mounting plate (20) under the interaction of a top plate motor stator (22) and a top plate motor rotor (33); the plurality of top plate sliders (32) are located below the top plate (30); An adapter (31), the top plate motor stator (22) is mounted on the mounting plate (20), and the top plate motor rotor (33) is connected to the top plate (30) through the adapter (31); Wherein, the adapter (31) includes a plurality of supporting parts, each of the supporting parts is in point contact with the top plate (30), and the contact points of each of the supporting parts with the top plate (30) are all directly above the top plate sliders (32), and the top plate (30) provides a vertically upward supporting force to the adapter (31) through the contact points.

2. The top plate assembly according to claim 1, wherein A receiving groove (301) is provided on the top plate (30) and partially penetrates through the top plate (30) in the vertical direction for receiving the adapter (31) and the top plate motor rotor (33); A first opening of the receiving groove (301) for receiving the adapter (31) is arranged vertically upward, and a second opening of the receiving groove (301) for receiving the top plate motor rotor (33) is arranged vertically downward.

3. The top plate assembly according to claim 2, wherein The adapter (31) includes a main board body (311) and a plurality of secondary board bodies (312) connected to the main board body (311). The plurality of secondary board bodies (312) are arranged at intervals around the periphery of the main board body (311). The plurality of secondary board bodies (312) and the plurality of top plate sliders (32) are arranged in one-to-one correspondence on the upper and lower sides of the top plate (30). Each of the secondary board bodies (312) is located on the side of the corresponding top plate slider (32) facing away from the top plate guide rail (21), and the plurality of secondary board bodies (312) constitute the plurality of supporting parts of the adapter (31).

4. The top plate assembly according to claim 3, wherein The receiving groove (301) includes a first groove body (3011), a plurality of second groove bodies (3012) and a third groove body (3013) that are communicated with each other. The first groove body (3011) is arranged corresponding to the main board body (311) for receiving the main board body (311). The plurality of second groove bodies (3012) are arranged in one-to-one correspondence with the plurality of secondary board bodies (312). Each of the second groove bodies (3012) is used for receiving the corresponding secondary board body (312). The third groove body (3013) is used for receiving the top plate motor rotor (33); At least a part of the first tank body (3011) and the third tank body (3013) is communicated and penetrates through the top plate (30) in the vertical direction, and a plurality of the second tank bodies (3012) do not penetrate through the top plate (30) in the vertical direction; a first opening is formed jointly above the first tank body (3011) and the plurality of second tank bodies (3012), and a second opening is formed below the third tank body (3013).

5. The top plate assembly according to claim 4, wherein The main board body (311) is fixedly connected to the top plate motor mover (33) at the first tank body (3011) or the third tank body (3013); Each of the auxiliary board bodies (312) is located in a corresponding second tank body (3012), and a point contact is formed between the lower surface of each auxiliary board body (312) and the bottom surface of the corresponding second tank body (3012).

6. The top plate assembly according to claim 5, wherein, A convex portion is provided on the lower surface of the auxiliary board body (312) or the bottom surface of the second tank body (3012), and at least a part of the outer surface of the convex portion is a curved surface for realizing the point contact between the lower surface of the auxiliary board body (312) and the bottom surface of the second tank body (3012).

7. The top plate assembly according to claim 6, characterized in that, A ball head set screw (34) is provided on the lower surface of the auxiliary board body (312) or the bottom surface of the second tank body (3012), and the convex portion is at least a part of the ball head (342) of the ball head set screw (34).

8. The top plate assembly according to claim 6 or 7, wherein The top plate assembly further includes a screw (37) disposed opposite to the convex portion, and the screw (37) is used for point contact with the convex portion to prevent direct contact between the top plate (30) and the adapter (31); Wherein, the convex portion is located on the lower surface of the auxiliary board body (312), the screw (37) is located on the bottom surface of the second tank body (3012), or the convex portion is located on the bottom surface of the second tank body (3012), and the screw (37) is located on the auxiliary board body (312).

9. The top plate assembly according to claim 4, wherein The top plate assembly further includes a flexible connecting member (35), the main board body (311) and the top plate (30) are connected by the flexible connecting member (35), and at least a part of the flexible connecting member (35) is flexible in the vertical direction so that the main board body (311) and the top plate (30) are relatively movably arranged.

10. The top plate assembly according to claim 9, wherein, The flexible connecting member (35) includes: Two connecting portions (351), and the two connecting portions (351) are respectively connected to the adapter (31) and the top plate (30); A flexible portion (352), and the flexible portion (352) is located between the two connecting portions (351) to connect the two connecting portions (351).

11. The top plate assembly according to claim 10, wherein The flexible connecting member (35) further includes a reinforcing portion (353) located between the two connecting portions (351). The number of the flexible portions (352) is one more than the number of the reinforcing portions (353). Along the connecting direction of the flexible portions (352) between the two connecting portions (351), the flexible portions (352) and the reinforcing portions (353) are arranged alternately and connected to each other to jointly form the portion between the two connecting portions (351). The minimum thickness of the reinforcing portion (353) is greater than the maximum thickness of the flexible portion (352); and / or The thickness of the flexible portion (352) ranges from 0.1 mm to 5 mm.

12. The top plate assembly according to claim 10, wherein A first connection hole with a hole center line extending in the vertical direction is provided on the connecting portion (351) for fixedly connecting with the adapter (31) or the top plate (30) in the vertical direction; and / or A second connection hole with a hole center line extending in the horizontal direction is provided on the connecting portion (351) for fixedly connecting with the adapter (31) or the top plate (30) in the horizontal direction.

13. The top plate assembly according to any one of claims 9 to 12, wherein An installation groove (303) for installing the flexible connecting member (35) is provided on the top plate (30). The installation groove (303) is located on the upper side of the top plate (30) and communicates with the accommodation groove (301) in the horizontal direction; and / or The number of the flexible connecting members (35) is two, and the two flexible connecting members (35) are respectively arranged on the opposite sides in the horizontal direction of the adapter (31); or the number of the flexible connecting members (35) is at least three, and at least three flexible connecting members (35) are arranged at intervals around the circumferential side in the horizontal direction of the adapter (31).

14. The top plate assembly according to claim 1, characterized in that, The top plate (30) is made of aluminum alloy material.

15. A motion positioning device, comprising a fixed component (1), a first moving component (2) and a second moving component (3) connected in sequence, wherein the first moving component (2) is movably arranged on the fixed component (1) along a first direction, and the second moving component (3) is movably arranged on the fixed component (1) along a second direction; characterized in that, The first moving assembly (2) includes the mounting plate (20) according to any one of claims 1 to 14; the second moving assembly (3) is the top plate assembly according to any one of claims 1 to 14.

Images