Chip manufacturing equipment management method, device, electronic device and storage medium

Abstract

The present application provides a chip manufacturing equipment management method, device, electronic device and storage medium, the method comprising: for each furnace tube device in the target area, the processing accuracy of the furnace tube device is determined through the heating uniformity result of the furnace tube device, the processing test result of the test piece and the factory parameters, and the processing accuracy label is marked; when it is detected that the first rule is set in the first furnace tube device, the second furnace tube device with the same equipment capacity as the first furnace tube device is determined, and the target second furnace tube device with the same processing accuracy label as the first rule is determined; the priority synchronization order of the target second furnace tube device is determined according to the processing accuracy of the target second furnace tube device; according to the priority synchronization order, the first rule is synchronized to the target second furnace tube device. The embodiment of the present application can achieve rule synchronization between different devices through the above method.

Description

Technical Field

[0001] The present application relates to the field of chip manufacturing technology, and more specifically, to a chip manufacturing equipment management method, device, electronic device and storage medium. Background Art

[0002] In the wafer manufacturing process, it is necessary to set processing rules for processing equipment to ensure that the processing equipment can process different wafers under the constraints of the processing rules. If the processing equipment does not have processing rules set, it will cause problems such as the processing equipment being unable to be used. The inventor found in the research that in the prior art, when setting rules for equipment, it is necessary to set rules for each equipment separately, and it is impossible to achieve synchronization of rules between multiple equipment with the same function. Summary of the invention

[0003] In view of this, embodiments of the present application provide a chip manufacturing equipment management method, apparatus, electronic device and storage medium to achieve rule synchronization between different devices.

[0004] In a first aspect, an embodiment of the present application provides a chip manufacturing equipment management method, the method comprising:

[0005] For each furnace tube device in the target area, the processing accuracy of the furnace tube device is determined by testing the heating uniformity result of the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device;

[0006] According to the processing accuracy of each furnace tube device, marking a processing accuracy label for each furnace tube device;

[0007] When it is detected that a first rule is set in the first furnace tube equipment, at least one second furnace tube equipment with the same equipment capacity as the first furnace tube equipment in the target area is determined; wherein the first rule includes: product categories allowed to be processed by the furnace tube equipment, and processing accuracy labels required for processing each of the product categories;

[0008] Determining, from the at least one second furnace tube device, a target second furnace tube device having the same processing accuracy label as required by the first rule;

[0009] Determining a priority synchronization order of the target second furnace tube equipment according to the machining accuracy of each target second furnace tube equipment;

[0010] The first rule in the first furnace tube device is synchronized to the target second furnace tube device according to the priority synchronization order.

[0011] In a feasible implementation manner, after synchronizing the first rule in the first furnace tube device to the target second furnace tube device, the method further includes:

[0012] For each target furnace tube device, when receiving an execution request sent by the target furnace tube device, judging whether the target furnace tube device can process the target product according to the product category of the target product carried in the execution request, the processing accuracy label of the target furnace tube device, and the first rule in the target furnace tube device; the target furnace tube device includes the first furnace tube device and the second furnace tube device; the execution request is generated after the target furnace tube device detects the arrival of the target product; the product category includes the batch of the product, the batch type of the product, and the model of the product; the processing accuracy label includes the finishing label and the rough processing label; the correspondence between the product category and the processing accuracy requirement is preset;

[0013] When it is determined that the target furnace tube equipment can process the target product, the target furnace tube equipment is controlled to execute a processing program.

[0014] In a feasible embodiment, when the first rule is to allow the furnace tube equipment whose processing accuracy label is the finishing label to process the products of the first product category, the method further includes:

[0015] For each target furnace tube device, when an execution request sent by the target furnace tube device is received, if the processing accuracy label of the target furnace tube device in the execution request is the fine processing label, and the product category of the target product received by the target furnace tube device is the same as the first product category, then the target furnace tube device is controlled to process the products of the first product category.

[0016] In a feasible implementation manner, when receiving the execution request sent by the target furnace tube device, the method further includes:

[0017] If the processing accuracy label of the target furnace tube equipment in the execution request is the rough processing label, or the product category of the target product received by the target furnace tube equipment is different from the first product category, the transport robot is controlled to transport the target product away from the target furnace tube equipment.

[0018] In a feasible embodiment, before detecting that the first rule is set in the first furnace tube device, the method further includes:

[0019] For each furnace tube device, when it is detected that there is a negative rule in the furnace tube device, it is determined whether there is an additional special negative rule in the negative rule; the negative rule is that the furnace tube device is not allowed to process products of the second product category; the special negative rule is that the quantity of the products of the second product category that the furnace tube device is allowed to process is the first quantity;

[0020] If there is an additional special negative rule in the negative rule, determining a first quantity of the product of the second product category that the furnace tube equipment is allowed to process in the special negative rule;

[0021] When the second quantity of products of the second product category processed by the furnace tube equipment within a preset period is less than the first quantity, controlling the furnace tube equipment to process the products of the second product category;

[0022] When the second quantity of products of the second product category processed by the furnace tube equipment within a preset period is greater than or equal to the first quantity, the furnace tube equipment is controlled to stop processing products of the second product category.

[0023] In a feasible embodiment, before detecting that the first rule is set in the first furnace tube device, the method further includes:

[0024] For each furnace tube device, when a target rule is set in the furnace tube device, it is determined whether there is an additional exception rule in the target rule; the target rule includes a positive rule and a negative rule, and the positive rule allows the furnace tube device to process products of the third product category;

[0025] If the exception rule exists in the target rule, determining the product batch and product batch type in the product category specified in the exception rule; wherein the model of the product in the exception rule is the same as the model of the product in the target rule;

[0026] If the product batch and product batch type of the product to be processed are the same as the product batch and product batch type specified in the exception rule, the target rule is ignored in this operation.

[0027] In a feasible embodiment, before detecting that the first rule is set in the first furnace tube device, the method further includes:

[0028] For each furnace tube device, if a super positive constraint rule exists in the furnace tube device, it is determined that the furnace tube device enters the test phase after parameter adjustment; the super positive constraint rule allows the furnace tube device to process products whose batch type is a test batch in the product category;

[0029] Controlling the furnace tube equipment to process the test product of the batch type being the test batch according to the product category specified in the super positive constraint rule, so as to obtain the processing parameters of the test product; the product category of the test product is the same as the product category specified in the super positive constraint rule;

[0030] When the percentage of the number of processing parameters that meet the preset parameter requirements among at least one of the processing parameters obtained within the preset time period to the total number of processing parameters exceeds a preset threshold, adjusting the furnace tube equipment from the test stage to the normal operation stage;

[0031] When the furnace tube equipment is in the normal operation stage, the super forward constraint rule is deleted.

[0032] In a second aspect, an embodiment of the present application further provides a chip manufacturing equipment management device, the device comprising:

[0033] a calculation unit, for determining the processing accuracy of each furnace tube device in the target area by testing the heating uniformity result of the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device;

[0034] A marking unit, used for marking a processing accuracy label for each of the furnace tube devices according to the processing accuracy of each of the furnace tube devices;

[0035] A second determination unit is configured to determine at least one second furnace tube device having the same device capacity as the first furnace tube device in the target area when it is detected that a first rule is set in the first furnace tube device; wherein the first rule includes: a product category that the furnace tube device is allowed to process and a processing accuracy label required for processing each of the product categories;

[0036] a screening unit, configured to determine, from the at least one second furnace tube device, a target second furnace tube device having the same processing accuracy label as that required by the first rule;

[0037] A sorting unit, used for determining a priority synchronization order of the target second furnace tube equipment according to the processing accuracy of each target second furnace tube equipment;

[0038] A synchronization unit is used to synchronize the first rule in the first furnace tube device to the target second furnace tube device according to the priority synchronization order.

[0039] In a feasible embodiment, the device further comprises:

[0040] A first judgment unit is used for, after synchronizing the first rule in the first furnace tube device to the target second furnace tube device, for each target furnace tube device, when receiving an execution request sent by the target furnace tube device, judging whether the target furnace tube device can process the target product according to the product category of the target product carried in the execution request, the processing accuracy label of the target furnace tube device, and the first rule in the target furnace tube device; the target furnace tube device includes the first furnace tube device and the second furnace tube device; the execution request is generated after the target furnace tube device detects that the target product has arrived; the product category includes the batch of the product, the batch type of the product, and the model of the product; the processing accuracy label includes the finishing label and the rough processing label; the correspondence between the product category and the processing accuracy requirement is preset;

[0041] The first processing unit is used to control the target furnace tube equipment to execute a processing program when it is determined that the target furnace tube equipment can process the target product.

[0042] In a feasible embodiment, the device further comprises:

[0043] A second processing unit is used for, when the first rule is to allow the furnace tube equipment whose processing accuracy label is the fine processing label to process the products of the first product category, for each target furnace tube equipment, when receiving an execution request sent by the target furnace tube equipment, if the processing accuracy label of the target furnace tube equipment in the execution request is the fine processing label, and the product category of the target product received by the target furnace tube equipment is the same as the first product category, then controlling the target furnace tube equipment to process the products of the first product category.

[0044] In a feasible embodiment, the device further comprises:

[0045] The first control unit is used to control the transport robot to transport the target product away from the target furnace tube equipment when receiving an execution request sent by the target furnace tube equipment, if the processing accuracy label of the target furnace tube equipment in the execution request is the rough processing label, or the product category of the target product received by the target furnace tube equipment is different from the first product category.

[0046] In a feasible embodiment, the device further comprises:

[0047] The second judgment unit is used for, before detecting that the first rule is set in the first furnace tube device, for each furnace tube device, when detecting that the furnace tube device has a negative rule, judging whether there is an additional special negative rule in the negative rule; the negative rule is that the furnace tube device is not allowed to process the products of the second product category; the special negative rule is that the quantity of the products of the second product category that the furnace tube device is allowed to process is the first quantity;

[0048] a third determining unit, configured to determine, if there is an additional special negative rule in the negative rule, a first quantity of the products of the second product category that the furnace tube equipment is allowed to process in the special negative rule;

[0049] a second control unit, configured to control the furnace tube equipment to process products of the second product category when a second quantity of products of the second product category processed by the furnace tube equipment within a preset period is less than the first quantity;

[0050] and a third control unit, configured to control the furnace tube equipment to stop processing products of the second product category when a second quantity of products of the second product category processed by the furnace tube equipment within a preset period is greater than or equal to the first quantity.

[0051] In one possible embodiment, the device comprises:

[0052] A third judgment unit is used for judging, for each furnace tube device, whether there is an additional exception rule in the target rule when the furnace tube device is provided with a target rule; the target rule includes a positive rule and a negative rule, and the positive rule allows the furnace tube device to process products of the third product category;

[0053] a fourth determining unit, configured to determine, if the exception rule exists in the target rule, a product batch and a product batch type in the product category specified in the exception rule; wherein the model of the product in the exception rule is the same as the model of the product in the target rule;

[0054] A rule shielding unit is used to ignore the target rule in this operation if the product batch and product batch type of the product to be processed are the same as the product batch and product batch type specified in the exception rule.

[0055] In a feasible embodiment, the device further comprises:

[0056] a fifth determination unit, for each furnace tube device, determining that the furnace tube device enters a test phase after parameter adjustment if a super positive constraint rule exists in the furnace tube device; the super positive constraint rule allows the furnace tube device to process products whose batch type is a test batch in the product category;

[0057] a fourth control unit, controlling the furnace tube equipment to process the test product of the batch type being the test batch according to the product category specified in the super positive constraint rule, so as to obtain the processing parameters of the test product; the product category of the test product is the same as the product category specified in the super positive constraint rule;

[0058] An adjustment unit, configured to adjust the furnace tube equipment from the test phase to the normal operation phase when the percentage of the number of processing parameters that meet the preset parameter requirements among at least one of the processing parameters obtained within a preset time period to the total number of processing parameters exceeds a preset threshold;

[0059] A rule deleting unit is used to delete the super positive constraint rule when the furnace tube equipment is in a normal operation stage.

[0060] In a third aspect, an embodiment of the present application further provides an electronic device, comprising: a processor, a storage medium and a bus, wherein the storage medium stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor communicates with the storage medium through the bus, and the processor executes the machine-readable instructions to perform the steps of the method as described in any one of the first aspects.

[0061] In a fourth aspect, an embodiment of the present application further provides a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps of the method described in any one of the first aspects are executed.

[0062] The embodiment of the present application provides a chip manufacturing equipment management method, device, electronic device and storage medium, which calculates the processing accuracy of each furnace tube device by testing the heating uniformity result obtained by the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device for each furnace tube device in the target area, so as to determine the processing accuracy label of each furnace tube device after obtaining the processing accuracy of the furnace tube device. After detecting that the first rule is set in the first furnace tube device, by determining at least one second furnace tube device with the same equipment capacity as the first furnace tube device in the target area, the target second furnace tube device with the same processing accuracy label as the first rule is determined from the at least one second furnace tube device, and the priority synchronization order of the target second furnace tube device is determined according to the processing accuracy of each of the target second furnace tube devices, and the first rule in the first furnace tube device is synchronized to the target second furnace tube device according to the priority synchronization order.

[0063] The method provided in the embodiment of the present application calculates the processing accuracy of each furnace tube device by testing the heating uniformity result obtained from the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device. By providing a processing accuracy label for each furnace tube device, when performing rule synchronization, the first rule in the first furnace tube device can be synchronized to the target furnace tube device in the device that meets the requirements of the processing accuracy label. By determining the priority synchronization order of the target second furnace tube device, the first rule can be preferentially synchronized to the target second furnace tube device with relatively strong processing accuracy. Compared with the method of setting rules for each device separately in the prior art, the solution provided in the embodiment of the present application can realize rule synchronization between different devices.

[0064] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0065] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0066] Figure 1 A flow chart of a chip manufacturing equipment management method provided in an embodiment of the present application is shown.

[0067] Figure 2A flow chart of a control device processing method provided in an embodiment of the present application is shown.

[0068] Figure 3 A schematic diagram of the structure of a chip manufacturing equipment management device provided in an embodiment of the present application is shown.

[0069] Figure 4 A schematic structural diagram of an electronic device provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0070] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It should be understood that the drawings in the present application only serve the purpose of explanation and description and are not used to limit the scope of protection of the present application. In addition, it should be understood that the schematic drawings are not drawn in real proportion. The flowchart used in this application shows the operations implemented according to some embodiments of the present application. It should be understood that the operations of the flowchart can be implemented out of sequence, and the steps without logical context can be reversed in order or implemented simultaneously. In addition, those skilled in the art can add one or more other operations to the flowchart under the guidance of the content of the present application, or remove one or more operations from the flowchart.

[0071] In addition, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0072] It should be noted in advance that the term "comprising" will be used in the embodiments of the present application to indicate the existence of the features declared thereafter, but does not exclude the addition of other features.

[0073] It should be noted in advance that the devices or electronic devices involved in the embodiments of the present application can be executed on a single server or on a server group. The server group can be centralized or distributed. In some embodiments, the server can be local or remote relative to the terminal. For example, the server can access information and / or data stored in a service requester terminal, a service provider terminal, or a database, or any combination thereof via a network. As another example, the server can be directly connected to at least one of the service requester terminal, the service provider terminal, and the database to access the stored information and / or data. In some embodiments, the server can be implemented on a cloud platform; as an example only, the cloud platform can include a private cloud, a public cloud, a hybrid cloud, a community cloud, a distributed cloud, an inter-cloud, a multi-cloud, etc., or any combination thereof.

[0074] Figure 1 A flowchart of a chip manufacturing equipment management method provided in an embodiment of the present application is shown. Figure 1 As shown, the method comprises the following steps:

[0075] Step 101, for each furnace tube device in the target area, determine the processing accuracy of the furnace tube device by testing the heating uniformity result of the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device.

[0076] Specifically, the furnace tube equipment is the process chamber of the vertical oxidation furnace. In the process of chip manufacturing, it is mainly used for high-temperature oxidation and diffusion of wafers to form an insulating layer on the surface of the wafer. The most important parameter of the furnace tube is the temperature parameter. The temperature parameter that the furnace tube equipment can achieve when heating determines the processing accuracy. The target area can be determined according to actual needs and can include one device or multiple devices; wherein the devices in different target areas may be the same or different, for example, the devices in the first target area are all furnace tube devices, the devices in the second target area are all polishing devices, the devices in the third target area are all furnace tube devices, and the devices in the fourth target area are all grinding devices.

[0077] When the vertical oxidation furnace is heating, if the temperature difference between any two areas in the furnace tube can be stabilized within a smaller range, the heating uniformity of the furnace tube is better and the processing accuracy is also higher; the test piece is a sample used to test whether the furnace tube equipment can meet the processing requirements before using the furnace tube equipment for mass production of products. A preset number of test pieces are processed by the furnace tube equipment to obtain processed samples. Each processed sample is measured to obtain the processing test results, based on the actual processing test results; the factory parameters of the furnace tube equipment include the model, brand, operating temperature range, accuracy, equipment stability, etc. of the equipment issued by the manufacturer; the factory parameters, heating uniformity results and processing test results are used as three indicators to determine the processing accuracy of the furnace tube equipment, and weights are set for the above three indicators respectively to obtain the processing accuracy of each furnace tube equipment.

[0078] It should be noted that the embodiments of the present application are described based on furnace tube equipment, but the embodiments of the present application can also be applied to other processes in the chip manufacturing process. For example, when the furnace tube equipment is switched to a polishing equipment, since the important parameter of the polishing equipment is the polishing uniformity, the processing accuracy of the polishing equipment is determined based on the polishing uniformity results, the processing test results of the test piece after the polishing equipment is completed, and the factory parameters of the polishing equipment.

[0079] Step 102: Mark a processing accuracy label for each furnace tube device according to the processing accuracy of each furnace tube device.

[0080] Specifically, after the processing accuracy of each furnace tube device is calculated in step 101, a processing accuracy label is marked according to the size of the processing accuracy value of each furnace tube device. The processing accuracy label includes a finishing label and a roughing label; a finishing label is marked for furnace tube devices whose processing accuracy is greater than or equal to the preset finishing accuracy value, and a roughing label is marked for furnace tube devices whose processing accuracy is less than the finishing accuracy value but greater than or equal to the roughing accuracy value. It should be noted that if the processing accuracy of the furnace tube device is less than the roughing accuracy value, an abnormal state label is marked for the furnace tube device, and re-adjustment, maintenance or overhaul is required.

[0081] It should be noted that in actual applications, in addition to being divided according to the above-mentioned "fine processing label" and "rough processing label", the processing accuracy corresponding to each furnace tube equipment can also be divided into multiple levels of precision according to ten different levels of "1-10", among which the equipment carrying the "level 1" logo has the lowest processing accuracy, and the equipment carrying the "level 10" logo has the highest processing accuracy. When the processing accuracy of the equipment is divided according to the level of "1-10", the processing accuracy of the furnace tube equipment is determined specifically through "the factory accuracy of the equipment, the heating uniformity results obtained by testing the furnace tube equipment, the processing test results, and the factory parameters of the furnace tube equipment".

[0082] Step 103, when it is detected that the first furnace tube equipment is set with a first rule, at least one second furnace tube equipment with the same equipment capacity as the first furnace tube equipment in the target area is determined; wherein the first rule includes: product categories allowed to be processed by the furnace tube equipment, and processing accuracy labels required for processing each of the product categories.

[0083] Specifically, equipment capability refers to the specific processing purpose of the equipment in the chip manufacturing process. For example, when the target area includes other processing equipment such as furnace tube equipment and polishing equipment, the equipment capability of each furnace tube equipment is the same, and both are used for high-temperature oxidation of wafers; the equipment capability of each polishing equipment is the same, and both are used for polishing and grinding.

[0084] Detect whether there is a newly added rule in each furnace tube device. When it is detected that a new first rule is set in the first furnace tube device, determine the second furnace tube device in the target area that has the same equipment capacity as the first furnace tube device. The first rule is set by the user to determine the processing authority of each furnace tube device, including the product categories that can be processed and the processing accuracy level that can be achieved for products of different product categories.

[0085] Example 1: The target area includes equipment 1, equipment 2, equipment 3, and equipment 4; among them, equipment 1, equipment 2, and equipment 3 are furnace tube equipment, and equipment 4 is a polishing equipment; equipment 1 is selected as the first furnace tube equipment, and when the first rule is set for the first furnace tube equipment, it is determined that the equipment having the same equipment capacity as equipment 1 is equipment 2 and equipment 3.

[0086] The first rule can be set as: it is allowed to process product A with batch type of test batch and batch sequence of second batch, and the furnace tube equipment is marked with a finishing label. Among them, "test batch", "second batch" and "product A" represent the batch type of products in the product category, the batch of products and the model of products respectively. It should be noted that the processing accuracy label of equipment 1 can be a finishing label or a rough processing label. When the label of the first furnace tube equipment is a rough processing label, the first furnace tube equipment does not meet the standard of "the furnace tube equipment is marked with a finishing label" required by the first rule, and the first furnace tube equipment cannot process product A with batch type of test batch and batch sequence of second batch. When the first furnace tube equipment is adjusted, tested or with the increase of running volume, the processing accuracy of the first furnace tube equipment is calculated again in step 101, and the rough processing label of the first furnace tube equipment is modified to a finishing label according to the newly calculated processing accuracy, then the first furnace tube equipment can process product A with batch type of test batch and batch sequence of second batch.

[0087] Step 104: Determine, from the at least one second furnace tube device, a target second furnace tube device having the same processing accuracy label as that required by the first rule.

[0088] Specifically, the processing accuracy labels of the first furnace tube equipment and the second furnace tube equipment are obtained after step 102. First, each second furnace tube equipment having the same equipment capacity as the first furnace tube equipment is determined, and then the processing accuracy label of each second furnace tube equipment is determined, and the second furnace tube equipment having the same processing accuracy label as the processing accuracy label required by the first rule in each second furnace tube equipment is used as the target second furnace tube equipment.

[0089] Example 2: As in Example 1, assume that the machining accuracy labels of device 2 and device 3 are respectively “finishing label” and “roughing label”.

[0090] As shown in Example 1 of the first rule, both Equipment 2 and Equipment 3 are second furnace tube equipment, and the target second furnace tube equipment that meets the requirement of the first rule that "the furnace tube equipment is marked with a finishing label" is "Equipment 2".

[0091] Step 105: determining a priority synchronization sequence of the target second furnace tube equipment according to the machining accuracy of each target second furnace tube equipment.

[0092] Specifically, after determining the target second furnace tube equipment with the same processing accuracy label as required by the first rule according to step 104, sort the target furnace tube equipment from large to small according to the specific value of the processing accuracy of each target furnace tube equipment, list the equipment with the highest processing accuracy as the equipment with the first priority synchronization order, and determine the priority synchronization order of the target second furnace tube equipment.

[0093] Step 106: synchronize the first rule in the first furnace tube device to the target second furnace tube device according to the priority synchronization order.

[0094] Specifically, according to the priority synchronization order of the target second furnace tube equipment determined in step 105, the first rule is synchronized preferentially in the target second furnace tube equipment with a higher numerical value of machining accuracy to ensure the efficiency and effectiveness of synchronization.

[0095] The embodiment of the present application provides a chip manufacturing equipment management method, which calculates the processing accuracy of each furnace tube device in the target area by testing the heating uniformity result obtained by the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device, so as to determine the processing accuracy label of each furnace tube device after obtaining the processing accuracy of the furnace tube device. After detecting that the first rule is set in the first furnace tube device, at least one second furnace tube device with the same equipment capacity as the first furnace tube device in the target area is determined, and the target second furnace tube device with the same processing accuracy label as the first rule is determined from the at least one second furnace tube device, and the priority synchronization order of the target second furnace tube device is determined according to the processing accuracy of each of the target second furnace tube devices, and the first rule in the first furnace tube device is synchronized to the target second furnace tube device according to the priority synchronization order.

[0096] The method provided in the embodiment of the present application calculates the processing accuracy of each furnace tube device by testing the heating uniformity result obtained from the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device. By providing a processing accuracy label for each furnace tube device, when performing rule synchronization, the first rule in the first furnace tube device can be synchronized to the target furnace tube device in the device that meets the requirements of the processing accuracy label. By determining the priority synchronization order of the target second furnace tube device, the first rule can be preferentially synchronized to the target second furnace tube device with relatively strong processing accuracy. Compared with the method of setting rules for each device separately in the prior art, the solution provided in the embodiment of the present application can realize rule synchronization between different devices.

[0097] In a feasible implementation manner, after synchronizing the first rule in the first furnace tube device to the target second furnace tube device, the method further includes the following steps:

[0098] For each target furnace tube device, when an execution request sent by the target furnace tube device is received, it is determined whether the furnace tube device is capable of processing the target product according to the product category of the target product carried in the execution request, the processing accuracy label of the target furnace tube device, and the first rule in the target furnace tube device; the target furnace tube device includes the first furnace tube device and the second furnace tube device; the execution request is generated after the target furnace tube device detects the arrival of the target product; the product category includes the batch of the product, the batch type of the product, and the model of the product; the processing accuracy label includes the fine processing label and the rough processing label; the correspondence between the product category and the processing accuracy requirement is preset; when the product category of the target product and the processing accuracy label of the target furnace tube device meet the first rule, the furnace tube device is controlled to process the target product.

[0099] Specifically, the system transports the target product that can be processed by the target furnace tube equipment under the restriction of each rule to the target position of the target furnace tube equipment according to at least one rule set in the target furnace tube equipment.

[0100] When the target product is detected in the target area in the target furnace tube device, the code on the carrier used to load the target product is obtained, and the code corresponding to the batch, batch type, and product model of the target product loaded in the carrier is obtained according to the code. Based on the obtained code and the first rule stored in its own device and its own processing accuracy label, an execution request for processing the target product is sent to the system. When the system receives the execution request sent by the target furnace tube device, it determines whether the target furnace tube device can process the target product according to the code in the execution request and the first rule of the target furnace tube device. When it is determined that the target furnace tube device can process the target product, the target furnace tube device is controlled to execute the processing program. In the embodiment of the present application, the processing program of the target furnace tube device is a high-temperature oxidation program; the processing program of the polishing device is a polishing program, and the processing programs of other chip manufacturing equipment, etc.

[0101] It should be noted that the system does not transport the target product to the target furnace tube equipment for which the rules are not set. The target furnace tube equipment can directly send the execution request carrying the code to the system in the execution request, or obtain the batch, batch type, and product model of the target product according to the code, and send the execution request carrying the batch, batch type, and product model of the target product to the system. When there are multiple rules in the target furnace tube equipment, a priority is set for each rule, so as to determine whether the target furnace tube equipment can process the target product according to the priority. Product categories include but are not limited to: product production process, processing accuracy requirements, process steps, product batches, formulas, customers, and product batch types.

[0102] In a feasible embodiment, when the first rule is to allow the furnace tube equipment with the processing accuracy label as the finishing label to process the products of the first product category, the method further includes the following steps:

[0103] For each target furnace tube device, when an execution request sent by the target furnace tube device is received, if the processing accuracy label of the target furnace tube device in the execution request is the fine processing label, and the product category of the target product received by the target furnace tube device is the same as the first product category, then the target furnace tube device is controlled to process the products of the first product category.

[0104] Specifically, the product category is composed of the batch, batch type, and product model of the product. When the first rule is set, when the first rule is to allow the furnace tube equipment with the processing accuracy label as the finishing label to process the products of the first product category, the setting method of the first product category includes but is not limited to:

[0105] Setting method 1: Product category: B; Product batch type: mass production batch; Product batch: 1-100;

[0106] Setting method 2: Product category: B; Product batch type: test batch, mass production batch; Product batch: 1.

[0107] It can be seen that the first product category is not limited to one or a batch of target products. When the product category of the target product received by the target furnace tube equipment belongs to the range specified by the first product category, it is determined that the product category of the target product received by the target furnace tube equipment is the same as the first product category.

[0108] Example 3, when the first product category is set using setting method 1, assuming that the product category of the target product is: product category: B; product batch type: mass production batch; product batch: 20. It is determined that the product category of the target product received by the target furnace tube equipment is the same as the first product category.

[0109] In a feasible implementation manner, when receiving the execution request sent by the target furnace tube device, the method further includes the following steps:

[0110] If the processing accuracy label of the target furnace tube equipment in the execution request is the rough processing label, or the product category of the target product received by the target furnace tube equipment is different from the first product category, the transport robot is controlled to transport the target product away from the target furnace tube equipment.

[0111] Specifically, when the first product category is set using setting method 2, assuming that the product category of the target product is: product category: B; product batch type: mass production batch; product batch: 20. The product batch required in setting method 2 is 1, and it is determined that the product category of the target product received by the target furnace tube equipment is different from the first product category.

[0112] In one possible embodiment, Figure 2 A flow chart of a control device processing method provided in an embodiment of the present application is shown. Figure 2 As shown, before detecting that the first rule is set in the first furnace tube device, the method further includes the following steps:

[0113] Step 201, for each furnace tube equipment, when it is detected that there is a negative rule in the furnace tube equipment, determine whether there is an additional special negative rule in the negative rule; the negative rule is that the furnace tube equipment is not allowed to process products of the second product category; the special negative rule is that the furnace tube equipment is allowed to process products of the second product category in a first quantity.

[0114] Specifically, the second product category can be adjusted according to actual conditions. When a negative rule is set in the furnace tube equipment that does not allow the furnace tube equipment to process products of the second product category, it is determined whether a special negative rule is attached to the negative rule. For furnace tube equipment, when a negative rule is set in the equipment, it means that all products except the product categories specified in the negative rule can be processed. The product categories specified in the special negative rule include but are not limited to: product production process, processing accuracy requirements, process steps, batches, formulas, customers, batch types, etc. If special conditions are also attached, the special conditions include but are not limited to: the date on which production is allowed and the quantity allowed to be produced.

[0115] Step 202: If there is an additional special negative rule in the negative rule, determine the first quantity of the product of the second product category that the furnace tube equipment is allowed to process in the special negative rule.

[0116] Specifically, if a special negative rule is added to the negative rule, indicating that the furnace tube equipment can process a first quantity of products of the second product category, the first quantity is obtained. The first quantity can be set according to actual conditions.

[0117] Step 203: When the second quantity of products of the second product category processed by the furnace tube equipment within a preset period is less than the first quantity, control the furnace tube equipment to process the products of the second product category.

[0118] Specifically, when a special negative rule is attached to a negative rule, under the restriction of the special negative rule, when the number of products of the second product category processed by the furnace tube equipment within a preset period is equal to the first number, the negative rule takes effect; when the number of products of the second product category processed by the furnace tube equipment within a preset period is less than the first number, the negative rule becomes invalid. Among them, the invalidation of the negative rule means that the restriction condition of the negative rule does not have a restrictive effect on the furnace tube equipment. For example, when the negative rule does not allow the furnace tube equipment to process products of the second product category, then after the negative rule becomes invalid, the furnace tube equipment can process products of the second product category. The effectiveness of the negative rule means that the restriction condition of the negative rule has a restrictive effect on the furnace tube equipment. After the negative rule takes effect, the furnace tube equipment cannot process products of the second product category. It should be noted that the processing according to the negative rule or the special negative rule attached to the negative rule mentioned in the embodiment of the present application is to introduce the relationship between the above negative rule and the special negative rule and the constraint ability of the equipment, and is controlled when the furnace tube equipment only contains this negative rule (and the special negative rule attached to the negative rule). If the furnace tube equipment includes other negative rules, positive rules, super positive constraint rules, etc. in addition to this negative rule, it is necessary to comprehensively consider all the constraints to control the start and stop of the equipment.

[0119] Step 204: When the second quantity of products of the second product category processed by the furnace tube equipment within a preset period is greater than or equal to the first quantity, control the furnace tube equipment to stop processing products of the second product category.

[0120] Specifically, the number of times the furnace tube equipment processes the products of the second product category within a preset period is accumulated to obtain a second quantity. When the second quantity is equal to or greater than the first quantity, the negative rule of "the furnace tube equipment is not allowed to process the products of the second product category" takes effect, and the furnace tube equipment is controlled to stop processing the products of the second product category.

[0121] In a feasible embodiment, before detecting that the first rule is set in the first furnace tube device, the method further includes the following steps:

[0122] Step 211, for each furnace tube device, when a target rule is set in the furnace tube device, determine whether there is an additional exception rule in the target rule; the target rule includes a positive rule and a negative rule, and the positive rule allows the furnace tube device to process products of the third product category.

[0123] Specifically, when the rule set in the device is a positive rule, it means that the device can only process products of the third product category specified by the positive rule, and the range of product categories specified in the exception rule is less than or equal to the third product category; when the rule set in the device is a negative rule, it means that the device cannot process products of the second product category specified by the negative rule, and the range of product categories specified in the exception rule is less than or equal to the second product category.

[0124] Step 212: If the exception rule exists in the target rule, determine the product batch and product batch type in the product category specified in the exception rule; wherein the model of the product in the exception rule is the same as the model of the product in the target rule.

[0125] Step 213: If the product batch and product batch type of the product to be processed are the same as the product batch and product batch type specified in the exception rule, the target rule is ignored in this operation.

[0126] Specifically, when the target rule is a positive rule, the exception rule is not to allow the processing of some of the products allowed to be processed in the positive rule; when the target rule is a negative rule, the exception rule is to allow the processing of some of the products not allowed to be processed in the negative rule.

[0127] Example 4, assuming that the target rule is a negative rule, the negative rule is "furnace tube equipment is not allowed to process products with product model A, batch type mass production batch, and product batch number 1-100", and the exception rule is "furnace tube equipment is allowed to process products with product model A, batch type mass production batch, and product batch number 1". When the furnace tube equipment processes "product model A, batch type mass production batch, and product batch number 1", the requirement of the negative rule is ignored, that is, the furnace tube equipment is allowed to process the product with "product model A, batch type mass production batch, and product batch number 1".

[0128] In a feasible embodiment, before detecting that the first rule is set in the first furnace tube device, the method further includes the following steps:

[0129] Step 221, for each furnace tube device, if there is a super positive constraint rule in the furnace tube device, it is determined that the furnace tube device enters the test phase after parameter adjustment; the super positive constraint rule allows the furnace tube device to process products whose batch type is a test batch in the product category.

[0130] Specifically, the super positive constraint rule is set for the equipment after the equipment is modified, adjusted or maintained. After the furnace tube equipment is modified, adjusted or maintained, it is not allowed to set any other rules for the equipment except the super positive constraint rule, so as to ensure that the furnace tube equipment can only produce the test products specified in the super positive constraint rule, and will not process a large number of products, so as to prevent the processing of products with low precision. When the super positive constraint rule exists in the furnace tube equipment, it is determined that the equipment is in the test stage.

[0131] Step 222, control the furnace tube equipment to process the test product of the test batch type according to the product category specified in the super positive constraint rule to obtain the processing parameters of the test product; the product category of the test product is the same as the product category specified in the super positive constraint rule. It should be noted that if the product category specified in the super positive constraint rule conflicts with the product category specified in the negative rule in the furnace tube equipment, the priority of the negative rule is higher than the super positive constraint rule, that is, the products of the conflicting product category are not processed.

[0132] Specifically, the test product is the product received by the furnace tube equipment. After it is determined that the furnace tube equipment enters the test phase, the test product whose batch type is a test batch is processed according to the product category specified in the super positive constraint rule and the processing accuracy label required for the product category to obtain the processed test product and the processing parameters of the processed test product.

[0133] Step 223, when the percentage of the number of processing parameters that meet the preset parameter requirements among at least one of the processing parameters obtained within the preset time period to the total number of processing parameters exceeds a preset threshold, the furnace tube equipment is adjusted from the test phase to the normal operation phase.

[0134] Specifically, the preset parameter requirements include fine machining and rough machining, and the processing parameters required by the preset parameters include fine machining accuracy and rough machining accuracy; the total number of processing parameters is the total number of at least one processing parameter obtained within the preset time period. When the percentage of the number of processing parameters that meet the preset parameter requirements to the total number of processing parameters exceeds the preset threshold, it is determined that the furnace tube equipment can enter the normal operating state, and the test phase is adjusted to the normal operating phase.

[0135] Step 224: when the furnace tube equipment is in the normal operation stage, the super forward constraint rule is deleted.

[0136] Specifically, after deleting the super forward constraint rule, the furnace tube equipment is controlled to perform processing actions according to the priority of each rule in the furnace tube equipment.

[0137] It should be noted that the control of the furnace tube equipment under different rule constraints introduced above, if there are both positive rules and negative rules in the furnace tube equipment, the confirmation process before processing is:

[0138] Process 1: Determine each negative rule in the furnace tube equipment.

[0139] Process 2: For each negative rule, determine whether an exception rule is set for the negative rule; if an exception rule is set for the negative rule, the specific type of product specified in the exception rule is deemed to be a producible product, that is, regardless of the circumstances, the constraint of the negative rule on the specific type of product is deemed to be invalid.

[0140] Process 3: Determine whether there is a super positive constraint rule.

[0141] If there is a super positive constraint rule, then based on each negative rule confirmed in the above process, the products of the product category specified in the super positive constraint rule are processed. If the product category specified in the super positive constraint rule conflicts with the product category specified in the negative rule, the negative rule has a higher priority than the super positive constraint rule, that is, the products of the conflicting product category are not processed. After the processing is completed, the process ends.

[0142] Process 4: If there is no super positive constraint rule, for each negative rule, determine whether the negative rule has a special negative rule attached to it.

[0143] For each negative rule to which a special negative rule is attached, a first quantity of the products of the second product category that the furnace tube equipment is allowed to process in each special negative rule is determined.

[0144] Process 5: Determine the forward rules in the furnace tube equipment and the product categories that the forward rules allow to be processed.

[0145] Process 6: Determine the first condition: the product categories that each negative rule does not allow processing (excluding the specific type of products in the exception rule, and the products of the second product category that are allowed to be processed in the first quantity); determine the second condition: the product categories that the positive rule allows processing. Process the products that meet both the first and second conditions. After processing is completed, the process ends.

[0146] It should be noted that if the product category specified in the positive rule conflicts with the product category specified in the negative rule, the negative rule has a higher priority than the positive rule, that is, the products of the conflicting product category will not be processed. When the rules conflict with each other, the negative rule has a higher priority than the positive rule, the super positive constraint rule, and the exception rule attached to the positive rule; but the negative rule cannot have a higher priority than the special negative rule and exception rule attached to itself.

[0147] Figure 3 A schematic diagram of the structure of a chip manufacturing equipment management device provided in an embodiment of the present application is shown. Figure 3 As shown, the device includes: a calculation unit 301, a marking unit 302, a first determination unit 303, a screening unit 304, a sorting unit 305, and a synchronization unit 306.

[0148] The calculation unit 301 is used to determine the processing accuracy of each furnace tube device in the target area by testing the heating uniformity result of the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device.

[0149] The marking unit 302 is used to mark a processing accuracy label for each furnace tube device according to the processing accuracy of each furnace tube device.

[0150] The first determination unit 303 is used to determine at least one second furnace tube device with the same equipment capacity as the first furnace tube device in the target area when it is detected that the first rule is set in the first furnace tube device; wherein the first rule includes: the product categories allowed to be processed by the furnace tube device, and the processing accuracy label required for processing each of the product categories.

[0151] The screening unit 304 is configured to determine, from the at least one second furnace tube device, a target second furnace tube device having the same processing accuracy label as that required by the first rule.

[0152] The sorting unit 305 is used to determine the priority synchronization order of the target second furnace tube equipment according to the processing accuracy of each of the target second furnace tube equipment.

[0153] The synchronization unit 306 is used to synchronize the first rule in the first furnace tube device to the target second furnace tube device according to the priority synchronization order.

[0154] The device also includes:

[0155] The first judgment unit is used to, after synchronizing the first rule in the first furnace tube device to the target second furnace tube device, determine, for each target furnace tube device, whether the target furnace tube device can process the target product according to the product category of the target product carried in the execution request, the processing accuracy label of the target furnace tube device, and the first rule in the target furnace tube device when receiving the execution request sent by the target furnace tube device; the target furnace tube device includes the first furnace tube device and the second furnace tube device; the execution request is generated after the target furnace tube device detects the arrival of the target product; the product category includes the batch of the product, the batch type of the product, and the model of the product; the processing accuracy label includes the fine processing label and the rough processing label; the correspondence between the product category and the processing accuracy requirement is preset.

[0156] The first processing unit is used to control the target furnace tube equipment to execute a processing program when it is determined that the target furnace tube equipment can process the target product.

[0157] In a feasible embodiment, the device further comprises:

[0158] A second processing unit is used for, when the first rule is to allow the furnace tube equipment whose processing accuracy label is the fine processing label to process the products of the first product category, for each target furnace tube equipment, when receiving an execution request sent by the target furnace tube equipment, if the processing accuracy label of the target furnace tube equipment in the execution request is the fine processing label, and the product category of the target product received by the target furnace tube equipment is the same as the first product category, then controlling the target furnace tube equipment to process the products of the first product category.

[0159] In a feasible embodiment, the device further comprises:

[0160] The first control unit is used to control the transport robot to transport the target product away from the target furnace tube equipment when receiving an execution request sent by the target furnace tube equipment, if the processing accuracy label of the target furnace tube equipment in the execution request is the rough processing label, or the product category of the target product received by the target furnace tube equipment is different from the first product category.

[0161] In a feasible embodiment, the device further comprises:

[0162] The second judgment unit is used for, before detecting that the first rule is set in the first furnace tube device, for each furnace tube device, when detecting that there is a negative rule in the furnace tube device, judging whether there is an additional special negative rule in the negative rule; the negative rule is that the furnace tube device is not allowed to process the products of the second product category; the special negative rule is that the quantity of the products of the second product category processed by the furnace tube device is the first quantity.

[0163] The third determining unit is configured to determine, if there is an additional special negative rule in the negative rule, a first quantity of the products of the second product category that the furnace tube equipment is allowed to process in the special negative rule.

[0164] The second control unit is used to control the furnace tube equipment to process the products of the second product category when a second quantity of the products of the second product category processed by the furnace tube equipment within a preset period is less than the first quantity.

[0165] and a third control unit, configured to control the furnace tube equipment to stop processing products of the second product category when a second quantity of products of the second product category processed by the furnace tube equipment within a preset period is greater than or equal to the first quantity.

[0166] In one possible embodiment, the device comprises:

[0167] The third judgment unit is used to judge, for each furnace tube device, whether there are additional exception rules in the target rules when the furnace tube device is provided with the target rules; the target rules include positive rules and negative rules, and the positive rules allow the furnace tube device to process products of the third product category.

[0168] The fourth determining unit is used to determine the product batch and product batch type in the product category specified in the exception rule if the exception rule exists in the target rule; wherein the model of the product in the exception rule is the same as the model of the product in the target rule.

[0169] A rule shielding unit is used to ignore the target rule in this operation if the product batch and product batch type of the product to be processed are the same as the product batch and product batch type specified in the exception rule.

[0170] In a feasible embodiment, the device further comprises:

[0171] The fifth determination unit is used to determine, for each furnace tube device, that the furnace tube device enters a test phase after parameter adjustment if a super positive constraint rule exists in the furnace tube device; the super positive constraint rule allows the furnace tube device to process products whose batch type is a test batch in the product category.

[0172] The fourth control unit controls the furnace tube equipment to process the test product with batch type being a test batch according to the product category specified in the super positive constraint rule to obtain the processing parameters of the test product; the product category of the test product is the same as the product category specified in the super positive constraint rule.

[0173] The adjustment unit is used to adjust the furnace tube equipment from the test phase to the normal operation phase when the percentage of the number of processing parameters that meet the preset parameter requirements among at least one of the processing parameters obtained within the preset time period to the total number of processing parameters exceeds a preset threshold.

[0174] A rule deleting unit is used to delete the super positive constraint rule when the furnace tube equipment is in a normal operation stage.

[0175] The embodiment of the present application provides a chip manufacturing equipment management device, which calculates the processing accuracy of each furnace tube device in the target area by testing the heating uniformity result obtained by the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device, so as to determine the processing accuracy label of each furnace tube device after obtaining the processing accuracy of the furnace tube device. After detecting that the first rule is set in the first furnace tube device, at least one second furnace tube device with the same equipment capacity as the first furnace tube device in the target area is determined, and the target second furnace tube device with the same processing accuracy label as the first rule is determined from the at least one second furnace tube device, and the priority synchronization order of the target second furnace tube device is determined according to the processing accuracy of each of the target second furnace tube devices, and the first rule in the first furnace tube device is synchronized to the target second furnace tube device according to the priority synchronization order.

[0176] The device provided in the embodiment of the present application calculates the processing accuracy of each furnace tube device by testing the heating uniformity result obtained by testing the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device. By providing a processing accuracy label for each furnace tube device, when performing rule synchronization, the first rule in the first furnace tube device can be synchronized to the target furnace tube device in the device that meets the requirements of the processing accuracy label. By determining the priority synchronization order of the target second furnace tube device, the first rule can be preferentially synchronized to the target second furnace tube device with relatively strong processing accuracy. Compared with the method of setting rules for each device separately in the prior art, the solution provided in the embodiment of the present application can realize rule synchronization between different devices.

[0177] Figure 4 A structural schematic diagram of an electronic device provided in an embodiment of the present application is shown, including: a processor 401, a storage medium 402 and a bus 403, wherein the storage medium 402 stores machine-readable instructions executable by the processor 401, and when the electronic device runs a chip manufacturing equipment management method as in the embodiment, the processor 401 communicates with the storage medium 402 via the bus 403, and the processor 401 executes the machine-readable instructions to perform the steps as in the embodiment.

[0178] In an embodiment, the storage medium 402 may also execute other machine-readable instructions to execute other methods described in the embodiment. For specific execution method steps and principles, please refer to the description of the embodiment, which will not be described in detail here.

[0179] The embodiments of the present application further provide a computer-readable storage medium, on which a computer program is stored. The computer program is executed when a processor is running to perform the steps in the embodiments.

[0180] In the embodiment of the present application, the computer program can also execute other machine-readable instructions when run by the processor to execute other methods described in the embodiment. For the specific execution method steps and principles, please refer to the description of the embodiment, which will not be repeated here.

[0181] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the modules is only a logical function division. There may be other division methods in actual implementation. For example, multiple modules or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or modules can be electrical, mechanical or other forms.

[0182] The modules described as separate components may or may not be physically separated, and the components shown as modules may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0183] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0184] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art or the part of the technical solution, can be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for a computer device (which can be a personal computer, server, or network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as USB flash drives, mobile hard drives, ROM, RAM, magnetic disks, or optical disks.

[0185] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A chip manufacturing equipment management method, characterized in that: The method comprises: For each furnace tube device in the target area, the processing accuracy of the furnace tube device is determined by testing the heating uniformity result of the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device; According to the processing accuracy of each furnace tube device, marking a processing accuracy label for each furnace tube device; When it is detected that the first furnace tube equipment is set with a first rule, at least one second furnace tube equipment with the same equipment capacity as the first furnace tube equipment is determined in the target area; wherein the first rule includes: the product category that the furnace tube equipment is allowed to process, and the processing accuracy label required for processing each of the product categories; the equipment capacity refers to the processing purpose of the equipment in the chip manufacturing process; Determining, from the at least one second furnace tube device, a target second furnace tube device having the same processing accuracy label as required by the first rule; Determining a priority synchronization order of the target second furnace tube equipment according to the machining accuracy of each target second furnace tube equipment; The first rule in the first furnace tube device is synchronized to the target second furnace tube device according to the priority synchronization order.

2. The method according to claim 1, characterized in that After synchronizing the first rule in the first furnace pipe device to the target second furnace pipe device, the method further includes: For each target furnace tube device, when receiving an execution request sent by the target furnace tube device, judging whether the target furnace tube device can process the target product according to the product category of the target product carried in the execution request, the processing accuracy label of the target furnace tube device, and the first rule in the target furnace tube device; the target furnace tube device includes the first furnace tube device and the second furnace tube device; the execution request is generated after the target furnace tube device detects the arrival of the target product; the product category includes the batch of the product, the batch type of the product, and the model of the product; the processing accuracy label includes the finishing label and the rough processing label; the correspondence between the product category and the processing accuracy requirement is preset; the system does not transport the target product to the target furnace tube device for which the rule is not set; When it is determined that the target furnace tube equipment can process the target product, the target furnace tube equipment is controlled to execute a processing program.

3. The method according to claim 2, characterized in that When the first rule is to allow the furnace tube equipment whose processing accuracy label is the finishing label to process the products of the first product category, the method further includes: For each target furnace tube device, when an execution request sent by the target furnace tube device is received, if the processing accuracy label of the target furnace tube device in the execution request is the fine processing label, and the product category of the target product received by the target furnace tube device is the same as the first product category, then the target furnace tube device is controlled to process the products of the first product category.

4. The method according to claim 2, characterized in that: When the first rule is to allow the furnace tube equipment whose processing accuracy label is the finishing label to process the products of the first product category, the method further includes: For each target furnace tube equipment, when an execution request sent by the target furnace tube equipment is received, if the processing accuracy label of the target furnace tube equipment in the execution request is the rough processing label, or the product category of the target product received by the target furnace tube equipment is different from the first product category, the transport robot is controlled to transport the target product away from the target furnace tube equipment.

5. The method according to claim 1, characterized in that Before detecting that the first rule is set in the first furnace tube device, the method further includes: For each furnace tube device, when it is detected that there is a negative rule in the furnace tube device, it is determined whether there is an additional special negative rule in the negative rule; the negative rule is that the furnace tube device is not allowed to process products of the second product category; the special negative rule is that the quantity of the products of the second product category that the furnace tube device is allowed to process is the first quantity; If there is an additional special negative rule in the negative rule, determining a first quantity of the product of the second product category that the furnace tube equipment is allowed to process in the special negative rule; When the second quantity of products of the second product category processed by the furnace tube equipment within a preset period is less than the first quantity, controlling the furnace tube equipment to process the products of the second product category; When the second quantity of products of the second product category processed by the furnace tube equipment within a preset period is greater than or equal to the first quantity, the furnace tube equipment is controlled to stop processing products of the second product category.

6. The method according to claim 1, characterized in that Before detecting that the first rule is set in the first furnace tube device, the method further includes: For each furnace tube device, when a target rule is set in the furnace tube device, it is determined whether there is an additional exception rule in the target rule; the target rule includes a positive rule and a negative rule, and the positive rule allows the furnace tube device to process products of the third product category; If the exception rule exists in the target rule, determining the product batch and product batch type in the product category specified in the exception rule; wherein the model of the product in the exception rule is the same as the model of the product in the target rule; If the product batch and product batch type of the product to be processed are the same as the product batch and product batch type specified in the exception rule, the target rule is ignored in this operation.

7. The method according to claim 1, characterized in that Before detecting that the first rule is set in the first furnace tube device, the method further includes: For each furnace tube device, if a super positive constraint rule exists in the furnace tube device, it is determined that the furnace tube device enters the test phase after parameter adjustment; the super positive constraint rule allows the furnace tube device to process products whose batch type is a test batch in the product category; Controlling the furnace tube equipment to process the test product of the batch type being the test batch according to the product category specified in the super positive constraint rule, so as to obtain the processing parameters of the test product; the product category of the test product is the same as the product category specified in the super positive constraint rule; When the percentage of the number of processing parameters that meet the preset parameter requirements among at least one of the processing parameters obtained within the preset time period to the total number of processing parameters exceeds a preset threshold, adjusting the furnace tube equipment from the test stage to the normal operation stage; When the furnace tube equipment is in the normal operation stage, the super forward constraint rule is deleted.

8. A chip manufacturing equipment management device, characterized in that: The device comprises: a calculation unit, for determining the processing accuracy of each furnace tube device in the target area by testing the heating uniformity result of the furnace tube device, the processing test result of the test piece after the furnace tube device is processed, and the factory parameters of the furnace tube device; A marking unit, used for marking a processing accuracy label for each of the furnace tube devices according to the processing accuracy of each of the furnace tube devices; A first determination unit is used to determine at least one second furnace tube device in the target area that has the same device capability as the first furnace tube device when it is detected that a first rule is set in the first furnace tube device; wherein the first rule includes: product categories that the furnace tube device is allowed to process, and a processing accuracy label required for processing each product category; device capability refers to the processing purpose of the device in the chip manufacturing process; a screening unit, configured to determine, from the at least one second furnace tube device, a target second furnace tube device having the same processing accuracy label as that required by the first rule; A sorting unit, used for determining a priority synchronization order of the target second furnace tube equipment according to the processing accuracy of each target second furnace tube equipment; A synchronization unit is used to synchronize the first rule in the first furnace tube device to the target second furnace tube device according to the priority synchronization order.

9. An electronic device, characterized in that: include: A processor, a storage medium and a bus, wherein the storage medium stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor communicates with the storage medium via the bus, and the processor executes the machine-readable instructions to perform the steps of the chip manufacturing equipment management method as described in any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the chip manufacturing equipment management method according to any one of claims 1 to 7 are executed.

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