Substrate storage container

Abstract

The present application provides a substrate storage container that improves the mounting force of a transport component. The substrate storage container (1) has a transport component (30) that is capable of being mounted to a container body (20) by being relatively displaced from the rear to the front with respect to the container body (20); wherein the container body (20) has a body-side protruding member (29) that protrudes upward, and the transport component (30) has a component-side protruding member (34) that protrudes downward; in the mounted state, the component-side protruding member (34) engages the front side of the body-side protruding member (29) to limit displacement toward the rear; the displacement amount when a predetermined load is applied to the component-side protruding member (34) toward the upper side is smaller than the displacement amount when the same predetermined load is applied to the body-side protruding member (29) toward the lower side.

Description

TECHNICAL FIELD

[0001] The present application relates to a substrate storage container provided with a conveying member. BACKGROUND

[0002] A substrate such as a semiconductor wafer is stored in a state of being stored in an internal space of a substrate storage container, and is subjected to storage in a warehouse, conveyance between semiconductor processing apparatuses, or transportation between factories. The substrate storage container is provided with a conveying member on a ceiling of a container main body, so that the conveying member can be handled by an automatic conveying device such as a ceiling traveling device or a robot.

[0003] For example, a substrate storage container is disclosed in Patent Literature 1, which is provided with a mounting mechanism in which a guide piece and an interference fitting member are combined to form a two-leg portion, and an elastic fitting piece provided on a conveying member for conveyance is detachably mounted on the two-leg portion of the mounting mechanism.

[0004] PRIOR ART

[0005] PATENT LITERATURE

[0006] Patent Literature 1: Japanese Patent Application Laid-Open No. 2011-181867 SUMMARY

[0007] PROBLEMS TO BE SOLVED BY THE INVENTION

[0008] However, in the mounting mechanism in which the elastic fitting piece is fitted as described in Patent Literature 1, there is a possibility that the conveying member is detached from the container main body due to an impact caused by sudden stop or movement in conveyance of the substrate storage container. In addition, it is desirable that the conveying member is not easily detached from the container main body even in a case where an operator handles it.

[0009] Therefore, in one aspect of the present application, an object is to provide a substrate storage container in which the mounting force of a conveying member is improved.

[0010] MEANS OF SOLVING THE PROBLEMS

[0011] One aspect of the present application provides a solution as follows.

[0012] (1) A substrate storage container characterized by comprising: a main body member; and a conveyance member capable of being attached to the main body member by relatively displacing the conveyance member in a first direction from a second side to a first side with respect to the main body member; wherein the main body member has a first protrusion member and a first engagement member protruding toward a third side in a second direction perpendicular to the first direction; the conveyance member has a second protrusion member and a second engagement member protruding toward a fourth side opposite to the third side in the second direction; in an attached state in which the conveyance member is attached to the main body member, the second engagement member restricts relative displacement between the main body member and the conveyance member in the second direction by engaging with the first engagement member; in the attached state, the second protrusion member is located on the first side of the first direction with respect to the first protrusion member, and restricts relative displacement of the conveyance member toward the second side of the first direction with respect to the main body member by engaging with the first protrusion member in the first direction; and when a predetermined load is applied to the second protrusion member toward the third side in the second direction, a displacement amount of the second protrusion member in the second direction is smaller than a displacement amount of the first protrusion member in the second direction when the same predetermined load is applied to the first protrusion member toward the fourth side in the second direction.

[0013] (2) The substrate storage container according to the above (1), characterized in that, in the attached state, an overlapping range of a top of the third side of the first protrusion member and a top of the fourth side of the second protrusion member in the second direction is 1.5 mm to 3.5 mm. In this specification, a numerical range represented by α to β indicates a range of α or more and β or less.

[0014] (3) The substrate storage container according to the above (1) or (2), characterized in that, when viewed in a third direction perpendicular to both the first direction and the second direction, the first protrusion member has a triangular shape with a vertex on the third side, and when viewed in the third direction, a top of the fourth side of the second protrusion member has a triangular shape with a vertex on the fourth side.

[0015] (4) The substrate storage container according to the above (3), characterized in that, when viewed in the third direction in the attached state, an inclination angle of a side of the second side of the triangular shape of the first protrusion member with respect to the second direction is larger than an inclination angle of a side of the first side; and when viewed in the third direction in the attached state, an inclination angle of a side of the first side of the triangular shape of the top of the second protrusion member with respect to the second direction is larger than an inclination angle of a side of the second side.

[0016] (5) In the substrate storage container constructed as described in (4) above, the inclination angle of the first side of the triangular shape of the top of the second protruding member is in the range of 60° to 80° when viewed from the third party in the installed state.

[0017] (6) In the substrate storage container constructed by (4) or (5) above, the inclination angle of the second side of the triangular shape of the top of the second protruding member is in the range of 0° to 5° when viewed from the third party in the installed state.

[0018] (7) In the substrate storage container formed by any one of (3) to (6) above, the base of the third side of the second protruding member is inclined relative to the second direction when viewed from the third direction upward.

[0019] (8) In the substrate storage container constructed in (7) above, the base forms an angle in the range of 40° to 50° relative to the second direction on the first side when viewed from the third side upward, and forms an angle in the range of 40° to 50° relative to the second direction on the second side.

[0020] (9) In the substrate storage container formed by any one of (1) to (8) above, the base of the third side of the second protruding member has a hole recessed in the first direction or a through hole in the first direction.

[0021] (10) In the substrate storage container formed by any one of (1) to (9) above, the height of the first protruding member is in the range of 6.5 mm to 10 mm.

[0022] (11) In the substrate storage container constructed by any one of (1) to (10) above, the characteristic is that when the predetermined load is applied to the first protruding member of the main body member toward the fourth side in the second direction, the portion around the first protruding member undergoes elastic deformation, thereby realizing the displacement of the first protruding member in the second direction.

[0023] Invention Effects

[0024] According to one technical solution of the present invention, a substrate storage container with improved installation force for transporting parts can be provided. Attached Figure Description

[0025] Figure 1 This is an exploded perspective view showing the substrate storage container according to an embodiment of the present invention.

[0026] Figure 2 is a plan view showing a portion of the substrate storage container to which the conveyance member is attached.

[0027] Figure 3 is a perspective view showing the conveyance member as viewed from the lower side.

[0028] Figure 4 is a perspective view showing a member-side protruding member of the conveyance member.

[0029] Figure 5 is a side view showing a member-side protruding member of the conveyance member.

[0030] Figure 6 is a perspective view showing a conveyance member-attaching member of the container main body.

[0031] Figure 7 is an explanatory view showing a method of attaching the conveyance member, and is a partial cross-sectional view taken along the A-A line of Figure 2 .

[0032] Figure 8 is an explanatory view showing a method of attaching the conveyance member, and is a partial cross-sectional view taken along the B-B line of Figure 2 . DETAILED DESCRIPTION

[0033] Hereinafter, an embodiment of the present application will be described with reference to the drawings. In addition, in the entire embodiment of the present specification, the same components are given the same reference numerals. Furthermore, in the drawings, the front-rear direction is indicated as the X-axis direction (first direction), the up-down direction is indicated as the Y-axis direction (second direction), and the left-right direction orthogonal to the X-axis direction and the Y-axis direction is indicated as the Z-axis direction (third direction).

[0034] [SUBSTRATE STORAGE CONTAINER]

[0035] Hereinafter, a substrate storage container will be described. Figure 1 is an exploded perspective view showing a substrate storage container according to the embodiment of the present application. Figure 2 is a plan view showing a portion of the substrate storage container to which the conveyance member is attached.

[0036] Figure 1 The substrate storage container 1 shown in FIG. 1 is provided with a lid body 10 and a container main body 20 (example of one main member) that stores two or more substrates W. As the substrate W stored in the substrate storage container 1, a semiconductor wafer or a mask glass having a diameter of 300 mm or 450 mm, for example, can be cited.

[0037] The container body 20 is a so-called front opening box type container formed of a front opening frame forming the opening portion 21, a back surface, left and right side surfaces 23, and a top surface 22 and a bottom surface. The opening portion 21 of the container body 20 is closed by the lid body 10. A conveyance member 30 described later is installed on the top surface 22 of the container body 20.

[0038] The lid body 10 and the container body 20 are configured by injection molding a plurality of members from a molding material containing a predetermined resin, and assembling the plurality of members. As the predetermined resin in the molding material, for example, polycarbonate, polyether ether ketone, polyether imide, polybutylene terephthalate, polyacetal, liquid crystal polymer, or cyclic olefin resin, or the like, which is excellent in mechanical properties or heat resistance, or the like, can be listed. In addition, carbon, metal fibers, conductive polymers, antistatic agents, or flame retardants, or the like, can also be selectively added to these resins as needed.

[0039] [Conveyance member]

[0040] Hereinafter, the conveyance member will be described. Figure 3 is a perspective view showing the conveyance member as viewed from the lower side. Figure 4 is a perspective view showing a second protruding member of the conveyance member. Figure 5 is a side view showing the second protruding member of the conveyance member.

[0041] Figure 3 The conveyance member 30 shown in the drawing is a member installed on the substantially central portion of the top surface 22 of the container body 20. The conveyance member 30 is also called a robot flange, and is held by a ceiling conveyance device to be conveyed in a state installed on the container body 20. From the viewpoint of reliably supporting the substrate-accommodating container 1 that accommodates the substrate W, the conveyance member 30 is formed of the same molding material as the lid body 10 and the container body 20.

[0042] When viewed from above, the conveyance member 30 has a substantially hollow frame-shaped member body 31. On both sides of the lower end portion of the member body 31, a pair of left and right sandwiching plates 32 (an example of a second engaging member) extend in the horizontal direction. On the other hand, a flange 33 that is held by the ceiling conveyance device is integrally formed on the upper end portion of the opening of the member body 31.

[0043] The pair of left and right sandwiching plates 32 are formed in a flat plate shape that overlaps the top surface 22 of the container body 20, and the outer side surfaces thereof are inclined so as to approach the front surface side of the container.

[0044] The flange 33 is formed in a planar rectangular shape with the four corner portions being chamfered, and a recess 330 is formed in the central portion of the top surface, and is sensed or positioned by the ceiling conveyance device.

[0045] In a region of the central portion of the lower surface of the flange 33 surrounded by the part body 31, a part-side protruding member 34 (an example of a second protruding member) protruding downward is formed. The top portion 340 of the lower side of the part-side protruding member 34 has a triangular shape with the apex on the lower side when viewed in the left-right direction. The side 341 of the front side of the triangular shape of the top portion 340 of the part-side protruding member 34 has a larger inclination angle with respect to the up-down direction than the side 342 of the rear side when viewed in the left-right direction in the installed state. For example, the inclination angle θ1 of the side 341 of the front side with respect to the up-down direction is in the range of 60° to 80°, and the inclination angle θ2 of the side 342 of the rear side with respect to the up-down direction is in the range of 0° to 5°. The reason will be described later.

[0046] The base portion 343 of the upper side of the part-side protruding member 34 is inclined with respect to the up-down direction when viewed in the left-right direction. For example, the face 344 of the front side of the base portion 343 forms an angle θ3 in the range of 40° to 50° with respect to the up-down direction when viewed in the left-right direction, and the face 345 of the rear side of the base portion 343 forms an angle θ4 in the range of 40° to 50° with respect to the up-down direction. That is, the base portion 343 has a trapezoidal shape in which the width from the front to the rear is wider as it is closer to the upper side when viewed in the left-right direction.

[0047] Further, the base portion 343 has a through-hole 346 penetrating the front-rear direction. According to such a through-hole 346, by suppressing appearance defects such as sink marks, voids, and the like at the time of molding, not only the moldability of the conveying part 30 can be improved, but also water remaining after cleaning can be suppressed. In addition, the base portion 343 can have a hole recessed in the front-rear direction instead of the through-hole 346.

[0048] [Conveying Part Mounting Member]

[0049] Next, the conveying part mounting member will be described. Figure 6 is a perspective view showing the conveying part mounting member of the container body.

[0050] The conveying part mounting member 24 for mounting the conveying part 30 is integrally formed in the top surface 22 of the container body 20. Therefore, the conveying part mounting member 24 is molded from the same molding material as the container body 20.

[0051] The conveying part mounting member 24 has: a support rail 25 (an example of a first engagement member) that restricts displacement of the conveying part 30 in the up-down direction and the left-right direction in the installed state; first to third stoppers 26 to 28 that restrict displacement of the conveying part 30 in the front direction in the installed state; and a body-side protruding member 29 (an example of a first protruding member) that restricts displacement of the conveying part 30 in the rear direction in the installed state.

[0052] The support rails 25 have first to fourth rail members 251 to 254 formed on the top surface 22 of the container body 20 in a manner of being aligned in the front-rear direction and in the left-right direction. The first rail member 251 supports the outer side surface portion of the clamped plate 32 on the left side of the conveyed part 30, the second rail member 252 supports the inner side surface portion of the clamped plate 32 on the left side of the conveyed part 30, the third rail member 253 supports the inner side surface portion of the clamped plate 32 on the right side of the conveyed part 30, and the fourth rail member 254 supports the outer side surface portion of the clamped plate 32 on the right side of the conveyed part 30.

[0053] The first rail member 251 and the second rail member 252 and the third rail member 253 and the fourth rail member 254 are inclinedly provided in a manner of gradually narrowing the width between the rails toward the front surface side of the container body 20. Further, in order to form a fitting groove with the top surface 22 of the container body 20, each of the rail members 251 to 254 is curved to have a substantially L-shaped cross section (see FIG. 6) rising from the top surface 22 and linearly extends in the front-rear direction. According to such support rails 25, in the installed state, by fittingly supporting the outer side surface portion and the inner side surface portion of the left and right pair of clamped plates 32 of the conveyed part 30, displacement of the conveyed part 30 in the up-down direction and the left-right direction can be at least restricted. Figure 7

[0054] On the top surface 22 of the container body 20, the first stopper 26 is formed in the left-right direction between the front end portion of the first rail member 251 and the front end portion of the second rail member 252, and the second stopper 27 is formed in the left-right direction between the front end portion of the third rail member 253 and the front end portion of the fourth rail member 254. The first stopper 26 and the second stopper 27 have a substantially L-shaped cross section similar to the support rails 25, and in the installed state, fit with the front end portions of the left and right pair of clamped plates 32 of the conveyed part 30, at least restrict displacement of the conveyed part 30 in the front direction.

[0055] On the top surface 22 of the container body 20, the third stopper 28 is formed in the left-right direction between the rear end portion of the second rail member 252 and the rear end portion of the third rail member 253. The third stopper 28 has a substantially L-shaped cross section similar to the support rails 25 (see FIG. 6), and in the installed state, fits with the rear end portion of the part body 31 of the conveyed part 30, at least restricts displacement of the conveyed part 30 in the front direction. Figure 8

[0056] ​​On the top surface 22 of the container main body 20, the main body side protruding member 29 is formed between the second rail member 252 and the third rail member 253. The main body side protruding member 29 is formed so as to protrude upward from the top surface 22 of the container main body 20 with a prescribed height Hl. For example, the height Hl of the main body side protruding member 29 is defined in a range of 6.5 mm to 10 mm.

[0057] The main body side protruding member 29 is in a plate shape in the left-right direction, and the top portion 290 thereof is formed with a rounded corner when viewed in the left-right direction. Further, the main body side protruding member 29 has a protruding main body 291 in a plate shape in the left-right direction, and a pair of left-right reinforcing ribs 292 extending rearward from both left and right end portions of the protruding main body 291. The pair of left-right reinforcing ribs 292 are in a triangular shape when viewed in the left-right direction, and the joining area of the protruding main body 291 and the top surface 22 of the container main body 20 is enlarged, thereby improving the pouring strength of the main body side protruding member 29.

[0058] [Mounting method of conveying parts]

[0059] Hereinafter, the mounting method of the conveying parts will be described. Figure 7 is a partial cross-sectional view taken along the A-A line of Figure 2 . Figure 8 is a partial cross-sectional view taken along the B-B line of Figure 2 .

[0060] In order to mount the conveying part 30 to the conveying part mounting member 24 of the container main body 20, the conveying part 30 is arranged on the rear side of the top surface 22 of the container main body 20, and the clamped plate 32 of the conveying part 30 is slidably inserted from the rear to the front between the plurality of rail members 251 to 254 constituting the support rail 25 of the conveying part mounting member 24. When the conveying part 30 is inserted to a prescribed mounting position, the left and right side surface portions of the clamped plate 32 are engaged and supported by the support rail 25, and the front end portion of the clamped plate 32 and the rear end portion of the part main body 31 are engaged and supported by each of the stoppers 26 to 28. Accordingly, the displacement of the mounted conveying part 30 in the up-down direction, the left-right direction, and the front-rear direction is restricted.

[0061] Further, when the conveying part 30 is slid from the rear to the front, the top portion 340 of the part side protruding member 34 of the conveying part 30 passes over the top portion 290 of the main body side protruding member 29 of the conveying part mounting member 24, and the top portion 340 of the part side protruding member 34 is engaged on the front side of the top portion 290 of the main body side protruding member 29. Accordingly, the displacement of the mounted conveying part 30 in the rear direction is also restricted.

[0062] In order for the top 340 of the component-side protruding member 34 to pass over the top 290 of the body-side protruding member 29 of the component mounting member 24, at least one of the body-side protruding member 29 and the component-side protruding member 34 needs to be elastically displaced in the up-and-down direction. In the substrate storage container 1 of the present application, the amount of upward displacement of the component-side protruding member 34 when a predetermined load is applied to the component-side protruding member 34 in the upward direction is smaller than the amount of downward displacement of the body-side protruding member 29 when the same predetermined load is applied to the body-side protruding member 29 in the downward direction.

[0063] For example, in the substrate storage container 1 of the present embodiment, when a predetermined load is applied to the body-side protruding member 29 in the downward direction, the peripheral portion of the body-side protruding member 29 (a portion of the top surface 22) is elastically deformed in the downward direction, thereby achieving the downward displacement of the body-side protruding member 29. Further, when a predetermined load is applied to the component-side protruding member 34 in the upward direction, the amount of upward displacement of the component-side protruding member 34 is much smaller than the amount of downward displacement of the body-side protruding member 29.

[0064] According to such a substrate storage container 1, the component mounting member 24 is mounted to the container body 20 by the engagement of the protruding members 29, 34 with each other, rather than the engagement of the conventional elastic engagement piece with the protruding member, and thus it is possible to increase the mounting force of the component mounting member 24. Thus, it is possible to prevent the component mounting member 24 from being detached from the container body 20 due to an impact caused by a sudden stop or movement of the substrate storage container 1 during conveyance, or the component mounting member 24 from being detached from the container body 20 when an operator performs a process.

[0065] In the above-described mounted state, the range of overlap in the up-and-down direction of the top 290 of the body-side protruding member 29 and the top 340 of the component-side protruding member 34 is 1.5 mm to 3.5 mm. The reason for this is that if the range of overlap in the up-and-down direction is less than 1.5 mm, the required mounting force (detaching load) cannot be achieved, and further, if it exceeds 3.5 mm, the load at the time of mounting (mounting load) increases and the mountability of the component mounting member 24 deteriorates.

[0066] Further, as described above, since the height Hl of the body-side protruding member 29 is defined in the range of 6.5 mm to 10 mm, the overlapping range in the up-and-down direction of the top 290 of the body-side protruding member 29 and the top 340 of the part-side protruding member 34 can be optimized, and breakage of the body-side protruding member 29 can be prevented. That is, when the height Hl of the body-side protruding member 29 is less than 6.5 mm, there is a possibility that the overlapping range in the up-and-down direction of the top 290 of the body-side protruding member 29 and the top 340 of the part-side protruding member 34 becomes small, and further, when it exceeds 10 mm, there is a possibility that the strength of the body-side protruding member 29 is insufficient, breakage occurs at the time of installation, or the required engagement force cannot be maintained in the installed state.

[0067] Further, as described above, the face 344 on the front side of the base 343 of the part-side protruding member 34 forms an angle Θ3 in the range of 40° to 50° with respect to the up-and-down direction when viewed in the left-and-right direction, and further, the face 345 on the rear side forms an angle Θ4 in the range of 40° to 50° with respect to the up-and-down direction, so that the front-and-rear width is wider on the upper side when viewed in the left-and-right direction, and has a trapezoidal shape having excellent strength, and thus not only breakage of the part-side protruding member 34 due to the load at the time of installation can be prevented, but also the required engagement force can be maintained in the installed state.

[0068] Further, as described above, the front side edge 341 of the triangular shape of the top 340 of the part-side protruding member 34 has a larger inclination angle with respect to the up-and-down direction than the rear side edge 342 when viewed in the left-and-right direction in the installed state, so that the top 340 of the part-side protruding member 34 easily passes over the top 290 of the body-side protruding member 29, and thus not only the installation load at the time of installation can be reduced, but also the required engagement force can be achieved.

[0069] Further, as described above, when the inclination angle Θl of the front side edge 341 with respect to the up-and-down direction is in the range of 60° to 80°, the installation load at the time of installation can be reduced, and the body-side protruding member 29 can be pressed downward by a predetermined amount (for example, 1.5 mm to 3.5 mm).

[0070] Further, as described above, when the inclination angle Θ2 of the rear side edge 342 with respect to the up-and-down direction is in the range of 0° to 5°, the engagement force in the installed state is improved.

[0071] In addition, the substrate storage container 1 of the present embodiment and the conventional substrate storage container shown in Patent Document 1 were compared in terms of whether the conveying member 30 mounted on the container body 20 was pressed toward the rear side and the conveying member 30 was detached from the container body 20. As a result, it was found that the substrate storage container 1 of the present embodiment further required a force of 1000 N or more to detach the conveying member 30 from the container body 20, compared to the conventional substrate storage container.

[0072] The above-described embodiments have been described in detail, but the present application is not limited to the specific embodiments, and various modifications and changes can be made within the scope of the claims. In addition, all or a plurality of the components of the above-described embodiments can be combined.

[0073] Explanation of Reference Numerals

[0074] 1 substrate storage container

[0075] 10 lid body

[0076] 20 container body

[0077] 21 opening portion

[0078] 22 top surface

[0079] 23 side surface

[0080] 24 conveying member mounting member

[0081] 25 support rail

[0082] 251 first rail member

[0083] 252 second rail member

[0084] 253 third rail member

[0085] 254 fourth rail member

[0086] 26 first stopper

[0087] 27 second stopper

[0088] 28 third stopper

[0089] 29 body-side protrusion member

[0090] 290 top portion

[0091] 291 protrusion body

[0092] 292 reinforcing rib

[0093] 30 conveying member

[0094] 31 part body

[0095] 32 clamped plate

[0096] 33 flange

[0097] 330 recess

[0098] 34 part-side protruding member

[0099] 340 top

[0100] 341 edge

[0101] 342 edge

[0102] 343 base

[0103] 344 face

[0104] 345 face

[0105] 346 through-hole

[0106] W substrate

Claims

1. A substrate storage container, characterized in that, have: Main components; as well as The conveying component is able to be mounted on the main body component by displacing it relative to the main body component from the second side to the first side in a first direction; The main body component has a first protruding component and a first engaging component that protrude from the surface of the main body portion toward a third side in a second direction perpendicular to the first direction; The conveying component has a second protruding member and a second engaging member that protrude from the surface of the conveying component in the second direction toward a fourth side opposite to the third side; When the conveying part is installed on the main body component, the second engaging component engages with the first engaging component in the second direction to limit the relative displacement between the main body component and the conveying part in the second direction. In the installed state, the second protruding member is located on the first side of the first direction relative to the first protruding member, and the relative displacement of the conveying part relative to the main body member toward the second side of the first direction is restricted by engaging with the first protruding member in the first direction; When a predetermined load is applied to the second protruding member toward the third side in the second direction, the displacement of the second protruding member in the second direction is less than the displacement of the first protruding member in the second direction when the same predetermined load is applied to the first protruding member toward the fourth side in the second direction.

2. The substrate storage container according to claim 1, characterized in that, In the installed state, the overlap between the top of the third side of the first protruding member and the top of the fourth side of the second protruding member in the second direction is 1.5mm to 3.5mm.

3. The substrate storage container according to claim 1 or 2, characterized in that, When viewed from a third direction perpendicular to both the first and second directions, the first protruding component has a triangular shape with its vertex located on the third side; When viewed from above by the third party, the top of the fourth side of the second protruding member has a triangular shape with the vertex located on the fourth side.

4. The substrate storage container according to claim 3, characterized in that, When viewed from a third party in the installed state, the second side of the triangular shape of the first protruding member has a larger angle of inclination than the first side relative to the second direction. When viewed from above in the installed state, the first side of the triangular shape at the top of the second protruding member has a larger angle of inclination relative to the second direction than the second side.

5. The substrate storage container according to claim 4, characterized in that, When viewed from above by a third party in the installed state, the tilt angle of the first side of the triangular shape at the top of the second protruding member is in the range of 60° to 80°.

6. The substrate storage container according to claim 4, characterized in that, When viewed from above by a third party in the installed state, the tilt angle of the second side of the triangular shape at the top of the second protruding member is in the range of 0° to 5°.

7. The substrate storage container according to claim 3, characterized in that, When viewed from the third-party upwards, the base of the third side of the second protruding member is inclined relative to the second direction.

8. The substrate storage container according to claim 7, characterized in that, When viewed from the third party upwards, the base forms an angle within the range of 40° to 50° on the first side relative to the second direction, and forms an angle within the range of 40° to 50° on the second side relative to the second direction.

9. The substrate storage container according to claim 1 or 2, characterized in that, The base of the third side of the second protruding member has a hole recessed in the first direction or a through hole in the first direction.

10. The substrate storage container according to claim 1 or 2, characterized in that, The height of the first protruding component is in the range of 6.5mm to 10mm.

11. The substrate storage container according to claim 1 or 2, characterized in that, When the predetermined load is applied to the first protruding part of the main body component toward the fourth side in the second direction, the area around the first protruding part undergoes elastic deformation, thereby achieving displacement of the first protruding part in the second direction.

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