Coaxial light source holder

Abstract

The present invention discloses a coaxial light source seat, comprising: a coaxial light source base body with a through hole on the top, a reflective cube assembly, a light source reflection assembly and a point light source, the reflective cube assembly being installed in the through hole, a light inlet hole being provided on the side wall of the coaxial light source base body, the light source reflection assembly being fixed on the side wall where the light inlet hole is located, and the point light source being fixed on the light source reflection assembly, so that the point light source emits light, enters the reflective cube assembly from the light inlet hole through the light source reflection assembly, and then is emitted from the through hole of the reflective cube assembly. The present invention emits the light source through the light source reflection assembly and the reflective cube assembly, and the light source is evenly distributed during the optical path propagation process. The first spacing and the second spacing set in the cube fixing seat can not only limit the reflective cube, but also prevent the reflective surface of the cube from being scratched. Positioning by pins and fixing by machine screws can ensure that the cube fixing seat and the coaxial light source base body are fixed without looseness.

Description

Technical Field

[0001] The present invention relates to the technical field of industrial cameras, and in particular to a coaxial light source seat. Background Art

[0002] During the wafer laser invisible cutting, wafer low-k film grooving and wafer SDBG processing, the wafer posture and cutting path position need to be calibrated. The grain sizes in different batches of wafers are different. During the positioning process, it is necessary to switch the vision of different magnifications for the initial positioning and secondary positioning of the mark point; the low-magnification camera positions the wafer, and after the wafer MARK point is found, the image is matched with the wafer template, and the template MARK point is compared with the actual camera-found MARK point position, the wafer posture is adjusted, and the wafer center is found. Then, the low-magnification camera is used to find the approximate position of the grain template, and the high-magnification camera is switched to accurately position the grain template and calculate the cutting path position.

[0003] During the wafer invisible cutting process, the position of the wafer needs to be located. In the actual production process, two sets of visual systems with different magnifications are required. The physical installation distance of the two sets of cameras may cause errors, and the visual coordinate system needs to be transformed during the positioning process, which increases the instability of the program operation. Summary of the Invention

[0004] In order to solve the above technical problems, the present invention provides a coaxial light source holder that can evenly distribute the light source during the propagation process.

[0005] The specific plan is as follows:

[0006] The coaxial light source seat includes: a coaxial light source base body with a through hole on the top, a reflective cube component, a light source reflection component and a point light source. The reflective cube component is installed in the through hole. A light inlet hole is opened on the side wall of the coaxial light source base body. The light source reflection component is fixed on the side wall where the light inlet hole is located. The point light source is fixed on the light source reflection component, so that the point light source emits light, enters the reflective cube component from the light inlet hole through the light source reflection component, and then emits light out of the coaxial light source base body through the through hole of the reflective cube component.

[0007] The reflective cube assembly includes a cube fixing base and a reflective cube. A light source hole corresponding to the light inlet hole is provided on the side of the cube fixing base. A mounting hole is provided on the top of the cube fixing base. The radial cross-sectional shape of the mounting hole includes four semicircles symmetrical to the central axis, and adjacent semicircles are connected by oblique lines; the four oblique lines correspond to four planes in the mounting hole; a light outlet hole is provided at the bottom of the mounting hole, and the area of ​​the light outlet hole is smaller than the bottom area of ​​the reflective cube. The reflective cube is placed in the mounting hole, and after the reflective cube is placed in the mounting hole, the upper surface of the reflective cube does not exceed the upper surface of the cube fixing base, and the four planes of the mounting hole form the limiting surfaces of the reflective cube.

[0008] Among the four planes of the mounting hole, the distance between the highest points of two opposite planes on the axis of the light source hole is a first spacing, and the distance between the two planes decreases from top to bottom, thereby limiting the reflective cube; the distance between two opposite planes perpendicular to the axis of the light source hole is a second spacing and the two planes are parallel, and the length of the second spacing is greater than the first spacing by 0.4mm-0.9mm.

[0009] A semicircular positioning hole is provided on the edge of the top of the cube fixing seat and is connected to the semicircular fixing hole on the coaxial light source base body through a pin.

[0010] The top of the cube fixing seat is evenly distributed with screw holes, which are connected to the coaxial light source base body through machine screws.

[0011] The light source reflection assembly includes a light source reflector seat and a reflector; a light source mounting hole is provided on the top of the light source reflector seat, and a reflected light outlet corresponding to the light inlet hole is opened on the side wall of the light source reflector seat. The reflector is installed inside the light source reflector seat, receives light from the light source mounting hole, and reflects the light into the reflective cube assembly.

[0012] The reflector is a 45° reflector.

[0013] The present invention utilizes a light source reflector assembly and a reflective cube assembly to emit light, evenly distributing the light along the optical path. The first and second spacings provided in the cube holder not only limit the reflective cube's position but also prevent scratches on the cube's reflective surface. Positioning with pins and securing with machine screws ensures a secure fit between the cube holder and the coaxial light source base. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of an industrial camera explosion;

[0015] Figure 2 It is an exploded diagram of a zoom lens;

[0016] Figure 3 yes Figure 2 sectional view of

[0017] Figure 4 It is a structural diagram of the drive screw assembly;

[0018] Figure 5 This is an exploded view of the coaxial light source holder;

[0019] Figure 6 This is the parts diagram of the cube mount;

[0020] Figure 7 yes Figure 6 Top view of .

[0021] 1. Industrial camera body, 2. Rear lens, 3. Zoom lens, 31. Zoom lens body, 32. Zoom lens cover, 33. Drive screw assembly, 331. Movable nut, 332. Screw, 333. Drive gear, 334. Drive gear, 335. Planetary reducer, 34. Movable lens assembly, 35. Telecentric lens assembly, 36. Limiting guide rail, 4. Coaxial light source base, 41. Coaxial light source base body, 42. Reflective cube, 43. Light source reflector assembly, 431. Point light source, 432. Light source reflector base, 433. Reflector, 44. Cube mounting bracket. DETAILED DESCRIPTION

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the implementation of the present invention, not the entire implementation. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0023] like Figure 1-Figure 7 As shown, an industrial camera with electric zoom includes: an industrial camera body 1, a rear lens 2 connected to the industrial camera body 1, a zoom lens 3 connected to the rear lens 2, and a coaxial light source base 4 connected to the zoom lens 3. The zoom lens 3 is internally provided with a movable lens group 34 and a telecentric lens group 35 for zooming. The coaxial light source base 4 is provided with a reflective cube assembly 43. The reflective cube assembly 43 includes a cube holder 44 and a reflective cube 42. The cube holder 44 limits the position of the reflective cube 42, ensuring that the reflective cube 42, the movable lens group 34, the telecentric lens group 35, the rear lens 2, and the industrial camera body 1 are coaxial. The end of the rear lens 2 adopts a standard C-type interface, allowing a variety of industrial camera bodies 1 to be used.

[0024] The zoom lens 3 comprises a zoom lens body 31 and a zoom lens cover 32. Light-transmitting apertures are defined on both the upper and lower walls of the zoom lens body 31. A drive screw assembly 33 is located within one side of the zoom lens body 31. The drive screw assembly 33 includes a movable nut 331, which acts as a slider. The movable nut 331 connects to a movable lens group 34. The movable lens group 34 engages with retaining rails 36 on either side of the drive screw assembly 33, ensuring that the lenses in the movable lens group 34 are coaxial with the upper and lower light-transmitting apertures. A telecentric lens group 35 is mounted above the lower light-transmitting aperture. The movable lens group 34 is constructed of brass and contains a series of lenses. These lenses move with the movable nut 331, adjusting the distance between the movable lens group 34 and the telecentric lens group 35 to achieve zoom. The movable lens group 34 is always engaged by the retaining rails 36 during movement, preventing it from shifting and ensuring that the lenses in the movable lens group 34 are always coaxial with the upper and lower light-transmitting apertures. The light-transmitting hole at the top of the zoom lens body 31 is in the shape of an inverted cone, connecting the zoom lens body 31 to the rear lens 2. Two limiting guide rails 36 are fixedly disposed within the zoom lens body 31, specifically on either side of the movable lens assembly 34, and can be secured to the zoom lens body 31 via threaded connections. Guide grooves are formed on either side of the movable lens assembly 34, which mate with the limiting guide rails 36. The movable lens assembly 34 moves with the movement of the movable nut 331. The coordination between the guide grooves and the limiting guide rails 36 prevents the movable lens assembly 34 from shifting in center during movement.

[0025] The drive screw assembly includes a ball screw 332 rotatably connected to the zoom lens body 31 via a fixed base. The fixed base is fixed to the zoom lens body 31. A driven gear 333 is connected to the end of the ball screw 332. The driven gear 333 is connected to a planetary reducer 335 via a driving gear 334. The planetary reducer 335 is mounted on a drive motor base, which is fixed to a side wall of the zoom lens body 31. By controlling the planetary reducer 335, the driving gear 334 rotates, which in turn drives the driven gear 333. The rotation of the driven gear 333 drives the ball screw 332, causing the movable nut 331, which acts as a slider, to move. A DB connector base is also fixed to the side wall of the zoom lens body 31. A DB connector is fixed to the DB connector base. The DB connector is electrically connected to the planetary reducer 335 and provides feedback from the reflective lens assembly on the ball screw 332 to the control system. The DB connector is a D-type data interface connector used for data transmission and is a conventional connector.

[0026] The coaxial light source base 4 includes: a coaxial light source base body 41 with a through hole on the top, a reflective cube assembly, a light source reflection assembly 43, and a point light source 431. The reflective cube assembly is installed in the through hole. A light inlet is opened on the side wall of the coaxial light source base body 41. The light source reflection assembly 43 is fixed to the side wall where the light inlet is located. The point light source 431 is fixed to the light source reflection assembly 43, so that the point light source 431 emits light, enters the reflective cube assembly through the light inlet through the light source reflection assembly 43, and then exits the coaxial light source base body 41 through the through hole of the reflective cube assembly. A protective lens is provided at the bottom of the coaxial light source base body 41.

[0027] The reflective cube assembly includes a cube holder 44, a light source hole corresponding to the light inlet hole is provided on the side of the cube holder 44, and a mounting hole is provided on the top of the cube holder. The radial cross-section of the mounting hole includes four semicircles symmetrical about the central axis, and adjacent semicircles are connected by diagonal lines. The four diagonal lines correspond to four planes in the mounting hole. A light outlet hole is provided at the bottom of the mounting hole. The area of ​​the light outlet hole is smaller than the bottom area of ​​the reflective cube 42. When the reflective cube 42 is placed in the mounting hole, the upper surface of the reflective cube 42 does not exceed the upper surface of the cube holder. The four planes of the mounting hole form the limiting surfaces of the reflective cube. The cube holder 44 limits the position of the reflective cube 42, ensuring that the reflective cube 42, the movable lens assembly 34, and the telecentric lens are coaxial.

[0028] Of the four planes of the mounting hole, the distance between the highest points of two opposing planes on the axis of the light source hole is a first spacing, with the distance between the two planes decreasing from top to bottom, thus limiting the position of reflective cube 42. The distance between two opposing planes perpendicular to the axis of the light source hole is a second spacing, and the two planes are parallel and 0.4mm-0.9mm longer than the first spacing. The mounting hole of the cube holder is connected to the reflective cube 42 with glue, and the cube holder 44 restrains the reflective cube 42, preventing scratches on its surface.

[0029] The top edge of the cube holder 44 is provided with a semicircular positioning hole, which is connected via a pin to the semicircular fixing hole on the coaxial light source base body 41. By rotating the cube holder 44, the semicircular positioning hole mates with the semicircular fixing hole, thereby ensuring that the cube holder 44 is coaxial with the coaxial light source base body 41.

[0030] The light source reflection assembly 43 includes a light source reflector seat 432 and a reflector 433. A light source mounting hole is installed on the top of the light source reflector seat 432. A reflected light outlet corresponding to the light inlet is provided on the sidewall of the light source reflector seat. The reflector 433 is mounted within the light source reflector seat 432, receiving light from the light source mounting hole and reflecting it into the reflective cube assembly. The reflector 433 is a 45° reflector.

[0031] Point light source 431 is fixed to light source reflector mount 432. The light emitted by it is converted into parallel light by reflector 433 inside the light source reflector mount. The parallel light enters reflective cube 42, where it is emitted vertically and illuminates the surface of the object being measured. Planetary reducer 335 is controlled to cause drive gear 334 to begin rotating, which in turn causes driven gear 333, which meshes with drive gear 334, to begin rotating, driving ball screw 332 to begin rotating. The movable nut 331 on ball screw 332 moves on ball screw 332, causing movable lens assembly 34 to begin moving. The distance between movable lens assembly 34 and telecentric lens assembly 35 is adjusted to achieve zoom.

[0032] The light source is emitted through the light source reflection component 43 and the reflective cube component. The light source is evenly distributed during the propagation of the light path. The first spacing and the second spacing set in the cube fixing seat 44 can not only limit the reflective cube 42, but also prevent the reflective surface of the cube from being scratched. Positioning by pins and fixing by machine screws can ensure that the cube fixing seat 44 and the coaxial light source base body 41 are fixed without looseness. The zoom lens 3 drives the screw assembly so that the distance between the movable lens group 34 and the telecentric lens group 35 can be adjusted to achieve zooming. The driving screw assembly is controlled by the driving motor through gear transmission, which can completely solve the problems of zoom jamming and number limitation. The guide grooves on both sides of the movable lens group 34 cooperate with the limiting guide rails 36, so that during the zooming process, the movable lens group will not be offset from the center during movement.

[0033] The technical means disclosed in the solutions of the present invention are not limited to those disclosed in the above-mentioned embodiments, but also include technical solutions composed of any combination of the above-mentioned technical features. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. Coaxial light source holder, including: A coaxial light source base body with a through hole on the top, a reflective cube assembly, a light source reflection assembly, and a point light source, characterized in that the reflective cube assembly is installed in the through hole, a light inlet hole is opened on the side wall of the coaxial light source base body, the light source reflection assembly is fixed to the side wall where the light inlet hole is located, and the point light source is fixed to the light source reflection assembly, so that the point light source emits light, enters the reflective cube assembly from the light inlet hole through the light source reflection assembly, and then exits the coaxial light source base body through the through hole of the reflective cube assembly; The reflective cube assembly includes a cube holder and a reflective cube. A light source hole corresponding to the light inlet hole is provided on the side of the cube holder. A mounting hole is provided on the top of the cube holder. The radial cross-section of the mounting hole includes four semicircles symmetrical about the central axis, and adjacent semicircles are connected by oblique lines. The four oblique lines correspond to four planes in the mounting hole. A light outlet hole is provided at the bottom of the mounting hole. The area of ​​the light outlet hole is smaller than the bottom area of ​​the reflective cube. The reflective cube is placed in the mounting hole. After the reflective cube is placed in the mounting hole, the upper surface of the reflective cube does not exceed the upper surface of the cube holder. The four planes of the mounting hole form the limiting surfaces of the reflective cube. Among the four planes of the mounting hole, the distance between the highest points of the two opposite planes on the axis of the light source hole is a first spacing, and the distance between the two planes decreases from top to bottom, thereby limiting the reflective cube; the distance between the two opposite planes perpendicular to the axis of the light source hole is a second spacing and the two planes are parallel, and the length of the second spacing is 0.4mm-0.9mm greater than the first spacing; the mounting hole of the cube fixing seat and the reflective cube are connected by glue, and the cube fixing seat limits the reflective cube to prevent the surface of the reflective cube from being scratched; a semicircular positioning hole is provided on the edge of the top of the cube fixing seat, which is connected to the semicircular fixing hole on the coaxial light source base body by a pin; the cube fixing seat is rotated so that the semicircular positioning hole cooperates with the semicircular fixing hole, thereby ensuring that the cube fixing seat is coaxial with the coaxial light source base body; screw holes are evenly distributed on the top of the cube fixing seat, which is connected to the coaxial light source base body by machine screws; The light source reflection assembly includes a light source reflector seat and a reflector; a light source mounting hole is provided on the top of the light source reflector seat, and a reflected light outlet corresponding to the light inlet hole is opened on the side wall of the light source reflector seat. The reflector is installed inside the light source reflector seat, receives light from the light source mounting hole, and reflects the light into the reflective cube assembly.

2. The coaxial light source holder according to claim 1, wherein: The reflector is a 45° reflector.

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