Flowing nanoparticle measurement apparatus and method of determining nanoparticles using the apparatus

Abstract

A flow nanoparticle measurement apparatus and a method of determining nanoparticles using the apparatus are disclosed. The flow nanoparticle measurement apparatus includes a flow cell in which a liquid sample flows, a first laser beam irradiated to the flow cell, a laser generator configured to generate the first laser beam, and a flow controller configured to control a flow of the liquid sample in the flow cell.

Description

[0001] This application claims the priority benefit of Korean Patent Application No. 10-2020-0136344, filed October 20, 2020, and Korean Patent Application No. 10-2021-0063592, filed May 17, 2021, which are incorporated herein by reference for all purposes as if fully set forth herein. TECHNICAL FIELD

[0002] The present invention relates to a flow nanoparticle measurement apparatus and a method of determining nanoparticles using the same. More particularly, the present invention relates to a measurement apparatus for measuring trace amounts of nanoparticles present in a flowing sample.

[0003] The present invention relates to a high-sensitivity detection method capable of detecting a sample having a low concentration of ppt level of less than or equal to 100 nm when analyzing a high-purity chemical in a state having a flow rate, such as a liquid chemical, i.e., a solvent. The present invention relates to a measurement apparatus that collects and analyzes a signal generated by generating an induced plasma from a nanoparticle by a light source having a specific energy. BACKGROUND

[0004] Various organic and inorganic chemicals used in a manufacturing process of a product requiring high precision, such as a display and a semiconductor, require a chemical of higher purity than the current one to prevent yield reduction, and a high-level analysis technology has been developed and newly applied to check the quality of a high-purity chemical. Among them, the importance of particle analysis is gradually increasing. Since even a small particle of 10 nanometer level can affect yield reduction and high integration of a semiconductor manufacturing process, it is necessary to develop a stable analysis method for quality control, and it is also necessary to ensure scalability of the technology so that even the cause of a defect that can occur in a manufacturing process can be analyzed.

[0005] In general, a substance uniformly dispersed in a liquid in a molecular or ionic state is called a solution. A state in which a tiny particle having a diameter of about 1 nm to 1000 nm larger than a normal molecule or ion is dispersed in such a solution without aggregation or precipitation is called a colloidal state, and a particle in a colloidal state is called a colloid.

[0006] Research on microcolloids present in a solution has focused on obtaining information on physical and chemical properties of a substance to be analyzed or improving the detection ability of a separation analyzer. Until recently, analysis of colloidal particles still had a limit of 100 nm in size, and thus a technology for precise analysis of colloidal particles of less than or equal to 100 nm requiring a high concentration sample needs to be developed.

[0007] Methods of measuring colloidal nanoparticles generally use a light scattering analysis method to check the size of particles using light scattering intensity. However, when measuring minute nanoparticles having a size of less than 100 nm, the probability of detection at a low concentration rapidly decreases even though scattered light is generated, and thus it is difficult to obtain reliable results. In addition, the concentration of particles must be limited to parts per million (ppm) or more. Light scattering intensity increases as the size of particles increases, and light scattering area decreases as the size of particles decreases. Thus, it is difficult to measure the size of particles due to the decrease in light scattering intensity. Since a relatively large number of particles must contribute to scattering, sensitivity generally decreases at a concentration of less than ppm. SUMMARY

[0008] One aspect of the present application provides a flow nanoparticle measurement apparatus and a measurement method capable of detecting particles having a concentration of parts per trillion (ppt) that are less than or equal to 100 nm.

[0009] Another aspect of the present application provides a dynamic flow nanoparticle measurement apparatus and a measurement method for improving measurement reliability of measuring nanoparticles.

[0010] Another aspect of the present application provides a flow nanoparticle measurement apparatus and a measurement method that uses a chamber shaped such that nanoparticles can be detected in a flowing sample, and the apparatus includes a flow controller composed of a piston pump and a magnetic valve, so that flow can be controlled without vortexes, unlike a conventional nanoparticle analysis method that generates vortexes.

[0011] To achieve the above and other objects of the present application, in one aspect of the present application, there is provided a flow nanoparticle measurement apparatus including: a flow chamber in which a liquid sample flows, a first laser beam irradiated to the flow chamber; a laser generator configured to generate the first laser beam; and a flow controller configured to control flow of the liquid sample in the flow chamber.

[0012] In another aspect of the present application, there is provided a flow nanoparticle measurement method including: flowing a liquid sample containing nanoparticles in a flow chamber; irradiating a pulsed laser beam to a main flow portion inside the flow chamber; and detecting plasma generated by the pulsed laser beam in the main flow portion.

[0013] According to one aspect of the present application, the present application can measure nanoparticles of a liquid sample whose flow is controlled.

[0014] According to an aspect of the present application, the present application can reduce measurement errors that can occur when a measurement value of a very small area in a stationary chamber is used to calculate the number of nanoparticles, by measuring nanoparticles in a state in which a liquid sample flows, and thus can improve the reliability of nanoparticle measurement.

[0015] According to an aspect of the present application, the present application can improve the detection probability of nanoparticles and thus improve the reliability of nanoparticle detection.

[0016] An object of the present application is to improve the detection ability of micro-particles of a sample of less than or equal to 100 nm and low concentration by detecting a signal instantaneously generated in plasma detection by controlling the flow rate using a flow control device. BRIEF DESCRIPTION OF DRAWINGS

[0017] The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the principles of the application.

[0018] Figure 1 A flow nanoparticle measurement device according to an embodiment of the present application is schematically shown.

[0019] Figure 2 A configuration related to a flow device of a flow nanoparticle measurement device according to an embodiment of the present application is shown.

[0020] Figure 3A And Figure 3B A flow chamber of a flow nanoparticle measurement device according to an embodiment of the present application is shown.

[0021] Figure 4 An example of a flow controller of a flow nanoparticle measurement device according to an embodiment of the present application is shown.

[0022] Figure 5 is a flowchart showing a flow nanoparticle measurement method S100 according to an embodiment of the present application.

[0023] Figure 6 Time-dependent operations in a flow nanoparticle measurement device according to an embodiment of the present application are shown.

[0024] Figure 7 Time-dependent operations in a flow nanoparticle measurement device according to another embodiment of the present application are shown.

[0025] Figure 8 is a perspective view of a flow chamber according to an embodiment of the present application.

[0026] Figure 9 is a view alongFigure 8 A-A' cross-sectional view taken along the line

[0027] Figure 10 B-B' cross-sectional view taken along the line Figure 8 B-B' cross-sectional view taken along the line DETAILED DESCRIPTION

[0028] The detailed description and specific examples, while indicating embodiments of the application, are given by way of illustration only, since various changes and modifications within the spirit and scope of the application will become apparent to those skilled in the art from this detailed description.

[0029] Wherever possible, the same reference numbers will be used in the different drawings to refer to the same or like parts. In the drawings:

[0030] The terms used in the present application are used to explain embodiments, and are not intended to limit and / or restrict the present application. As long as there is no clearly different meaning in the context, the singular expression can include the plural expression. In the present application, the terms "include" and "have" should be understood to mean that there can be additional items in addition to the items shown, not to exclude the presence or possibility of one or more different features, numbers, steps, operations, components, parts, or combinations thereof, or an addition thereof.

[0031] The terms including ordinal numbers such as "first," "second," etc. can be used to describe various components, but the components are not limited by the terms. The terms are used only for the purpose of distinguishing one component from other components. For example, a first component can be referred to as a second component without departing from the spirit and scope of the present application, and likewise, a second component can be referred to as a first component. The term "and / or" includes a combination of a plurality of items related to the plurality or some of the items.

[0032] In addition, terms such as "part," "device," "block," "member," and "module" can refer to a unit processing at least one function or operation. For example, the terms can mean at least one hardware such as a field programmable gate array (FPGA) / application specific integrated circuit (ASIC), at least one software stored in a memory, or at least one process processed by a processor.

[0033] Reference will now be made in detail embodiments of the application, examples of which are illustrated in the accompanying drawings. The drawings illustrate embodiments of the application and serve to ease understanding of various technical features, and it should be understood that the embodiments presented herein are not limited by the drawings.

[0034] Although the present application can detect light emitted by using a laser to generate an induced plasma from a micro-particle, the description of the present application focuses on a method of analyzing the size of a shock wave and a plasma. This is called a laser-induced breakdown detection (LIBD) technique and is a particle analysis method that can obtain information such as the size, concentration, distribution, and components of a nano-particle by using various detection methods to detect the intensity and distribution of an induced plasma generated by focusing a high-energy pulsed laser on a particle present in an aqueous solution. Accordingly, compared to existing light scattering methods, transmission electron microscopy, atomic force microscopy, etc., this method has a lower detection limit as the particle size decreases. It is reported that this method can theoretically measure particles up to 1 nanometer, and it is a low-concentration nano-particle analysis method in which the concentration range is in the ppt concentration range.

[0035] Existing laser-induced breakdown detection methods measure a shock wave and a plasma flicker generated when an induced plasma is generated. The shock wave is measured using acoustics, and the plasma flicker is measured by attaching a camera near the chamber. However, even if a plasma is generated by impurities other than nano-particles of a target to be measured during measurement of the shock wave and the plasma flicker, the plasma can be detected and recognized as a shock wave or a flicker. Alternatively, a plasma can be generated again by continuously receiving energy from the generated plasma, and this plasma can be detected as noise.

[0036] The present application proposes a method for detecting an induced shock wave generated in a flowing liquid sample using a flow rate control device and quantifying it to classify the size. When the size of nano-particles of a flowing sample is determined using the control device, the present application can achieve a higher detection limit and non-contact real-time measurement than existing detection by measuring a specific area range, and can obtain reliable results by changing the measurement path in real time. In addition, the present application can measure nano-particles of all samples, unlike existing measurement methods that can only measure some samples, thereby improving the reliability of the results.

[0037] The measurement utilizes an actual laser light source irradiation area while maintaining a very high linear velocity in a fine flow path to measure a sample flowing in a very small area. In this case, the image of the plasma is greatly distorted due to the high velocity. In some cases, the reproducibility or detection sensitivity is reduced due to difficulty in detection due to a change in contrast ratio. To improve this situation, the present invention attempts to detect an image in a transient state using a flow pulse such as a pulsed laser. To this end, a flow chamber capable of flowing without vortexes and manufactured so that a laser beam is incident and generates a maximum signal value is required. Furthermore, a flow controller capable of controlling the velocity in a transient state controls the linear velocity by temporarily operating an internal piston pump having a pulse width. More specifically, the flow controller can be configured to control the flow rate of the liquid sample to correspond to the pulse width. The present invention can increase the detection probability and sensitivity of the plasma by detecting the plasma signal value generated by the pulsed laser beam in the transient state of the liquid sample generated by the flow controller, and can improve accompanying problems such as distortion or contrast ratio and shock wave sensitivity, thereby effectively improving the reliability of the results.

[0038] The flow nanoparticle measurement apparatus can use a LIBD method. The LIBD method allows a pulsed laser beam having a time width of several nanoseconds to be incident through a lens, and uses the principle of a laser beam-induced plasma generated in a focusing area of the lens at the time of laser beam incidence. More specifically, when a pulsed laser beam is irradiated to a nanoparticle, the energy level of the nanoparticle becomes an excited state, and then energy is released to be in a steady state, i.e., a ground state (or an excited state). Due to the energy released in this process, a plasma or a shock wave is generated in the nanoparticle.

[0039] In this case, the phenomenon of generating a plasma or a shock wave is called a breakdown phenomenon, which requires a minimum energy required for a particle to generate a plasma, which is called a threshold energy. The threshold energy depends on the phase of the material because the ionization energy required for each material is different. The threshold energy requires the highest energy in a gaseous state, and decreases in the order of liquid and solid.

[0040] The energy required for a laser beam to generate a laser-induced plasma increases in the order of solid, liquid, and gas. Therefore, when an appropriate laser beam energy is used, a laser-induced plasma state can be generated by breaking down only solid particles in an aqueous solution.

[0041] The concentration and size of the nanoparticle can be analyzed by utilizing the following characteristics: the breakdown probability varies according to the particle concentration under the condition that the laser beam energy is fixed; and the threshold energy of the laser beam required for breakdown varies according to the particle size.

[0042] The flow nanoparticle measurement apparatus can compensate for problems and reliability that can occur when detecting particles according to the above theory. In most particle analysis apparatuses, contamination can occur during the process of collecting and analyzing a sample, and there is a possibility that the value is mistaken for a value generated due to contamination. Since high-purity materials are easily contaminated, the developed apparatus allows sample injection and direct analysis by minimizing contamination using a flow cell specially designed.

[0043] Figure 1 A flow nanoparticle measurement apparatus according to an embodiment of the present application is schematically illustrated.

[0044] The flow nanoparticle measurement apparatus 1 can include a laser generator 10 and a flow apparatus 20. The flow apparatus 20 can include a flow cell 30, an inlet portion 41, and an outlet portion 42. A liquid sample can enter the flow apparatus 20 through the inlet portion 41. The liquid sample entering the flow apparatus 20 can pass through the flow cell 30. The liquid sample passing through the flow cell 30 can be discharged to the outside through the outlet portion 42.

[0045] The laser generator 10 can include a laser generation apparatus 12, a diaphragm 13, a mirror 14, a beam splitter 16, an energy detector 17, a lens 18, and a beam stop 19.

[0046] The laser generation apparatus 12 can generate a pulsed laser beam B. The wavelength of the pulsed laser beam B is not limited. The pulsed laser beam B can be irradiated using a Q-switch. The pulsed laser beam B can be irradiated with a predetermined period T1 (see Figure 6 ). That is, the laser generation apparatus 12 can irradiate the pulsed laser beam B such that the on / off is repeated with a first period T1. The pulsed laser beam B generated by the laser generation apparatus 12 can include an Nd:YAG pulsed laser beam having a wavelength of 532 nm. For example, the laser generation apparatus 12 can include an Nd:YAG pulsed laser. For example, the laser generation apparatus 12 can include a laser having a center wavelength of 532 nm. However, the present application is not limited thereto, and the type and energy size of the laser beam irradiated by the laser generation apparatus 12 can be variously applied.

[0047] The diaphragm 13 can be disposed on one side of the laser generation apparatus 12, and can adjust the diameter of the pulsed laser beam emitted by the laser generation apparatus 12 and then incident. The diaphragm 13 can variously adjust the diameter of the laser beam emitted by the laser generation apparatus 12.

[0048] The mirror 14 is disposed on the path of the pulsed laser beam B and can change the path of the pulsed laser beam B. Further, at least one mirror is disposed on the path of the pulsed laser beam B, and thus only the pulsed laser beam B having a desired wavelength can be allowed to reach the flow cell 30.

[0049] The beam splitter 16 can adjust a path of the pulsed laser beam B. The beam splitter 16 can split the pulsed laser beam B into several paths in a predetermined ratio. The beam splitter 16 can adjust intensities of laser beams split from the pulsed laser beam B.

[0050] The beam splitter 16 can adjust a path of at least a part of the beam B1 of the incident pulsed laser beam B to be directed to the flow cell 30. For example, the beam splitter 16 can split the pulsed laser beam B into a first laser beam B1 and a second laser beam B2. That is, the pulsed laser beam B incident on the beam splitter 16 can be split into the first laser beam B1 and the second laser beam B2. The optical characteristics of the first laser beam B1 can correspond to the optical characteristics of the pulsed laser beam B. For example, the first laser beam B1 can be a pulsed laser having a predetermined period. For example, the pulse period of the first laser beam B1 can be a first period T1 (see Figure 6 and Figure 7 ).

[0051] For example, the traveling direction of the first laser beam B1 can be different from the traveling direction of the pulsed laser beam B incident on the beam splitter 16. For example, the traveling direction of the first laser beam B1 can be perpendicular to the traveling direction of the pulsed laser beam B incident on the beam splitter 16. For example, the traveling direction of the second laser beam B2 can be the same as or parallel to the traveling direction of the pulsed laser beam B incident on the beam splitter 16.

[0052] For example, the power of the first laser beam B1 generated by the beam splitter 16 can be less than the power of the pulsed laser beam B incident on the beam splitter 16. For example, the power of the first laser beam B1 generated by the beam splitter 16 can be the same as the power of the second laser beam B2 generated by the beam splitter 16.

[0053] The energy detector 17 can measure the power (or energy) of the second laser beam B2. The energy detector 17 can face the beam splitter 16. The second laser beam B2 generated by the beam splitter 16 can be incident on the energy detector 17. The traveling direction of the second laser beam B2 can form an angle with the traveling direction of the first laser beam B1.

[0054] The power (or energy) of the first laser beam B1 can correspond to the power (or energy) of the second laser beam B2. Accordingly, the power (or energy) measurement value measured by the energy detector 17 can be used to calculate the power (or energy) of the first laser beam B1. For example, if the power of the first laser beam B1 is the same as the power of the second laser beam B2, the power measured by the energy detector 17 can be the power of the first laser beam B1.

[0055] The lens 18 can be disposed between the beam splitter 16 and the flow cell 30. For example, the first laser beam B1 generated by the beam splitter 16 can be incident on the lens 18. An optical property of the first laser beam B1 can be changed while passing through the lens 18. For example, a focal point of the first laser beam B1 passing through the lens 18 can be a point of the flow cell 30.

[0056] In other words, the lens 18 can adjust an irradiation area and a focal length of the first laser beam B1 incident on the flow cell 30. The focal length of the first laser beam B1 can refer to a distance between a focal point of the first laser beam B1 passing through the lens 18 and the lens 18. The lens 18 improves the detection capability of the nanoparticle by adjusting the irradiation area of the first laser beam B1 incident on the flow cell 30. The focal length of the lens 18 can be adjusted based on a Gaussian distribution regarding an induced plasma generating the nanoparticle by the first laser beam B1. The focal length of the first laser beam B1 can be set to 10 mm to 40 mm, but is not limited thereto.

[0057] A position where the induced plasma is generated in the flow cell 30 can correspond to a position where the first laser beam B1 hits the nanoparticle. The liquid sample flowing in the flow cell 30 can have a unique refractive index. Accordingly, the focal length of the first laser beam B1 can vary according to a type of the liquid sample flowing in the flow cell 30. In order to measure various liquid samples, it can be necessary to appropriately adjust the focal length. To this end, the position where the induced plasma is generated in the flow cell 30 can be controlled by adjusting a distance between the lens 18 and the flow cell 30 according to the type of the liquid sample. The distance between the lens 18 and the flow cell 30 can be adjusted by the controller 70. For example, the controller 70 can control the position of the lens 18 by moving the lens 18.

[0058] The beam stop 19 can face the flow cell 30. The flow cell 30 can be located between the lens 18 and the beam stop 19. For example, the first laser beam B1 can be incident on the beam stop 19 after passing through the flow cell 30. The beam stop 19 can inhibit the progress of the incident first laser beam B1. For example, the beam stop 19 can stop (or shield) the incident first laser beam B1.

[0059] The flow cell 30 can form a flow path F. In Figure 1 The flow path F can be indicated by a dotted line. The flow path F can be formed outside and inside the flow cell 30. The flow path F can indicate a path through which the liquid sample flows. The flow path F can indicate a direction in which the liquid sample flows. In this context, the flow path F can be referred to as a "flow direction".

[0060] In a narrow sense, the flow path F can refer to a path through which the liquid sample flows in the flow cell 30. The flow cell 30 can include a cell inlet 32 and a cell outlet 34.

[0061] The flow path F formed inside the flow cell 30 can extend from the cell inlet 32 and lead to the cell outlet 34. For example, the liquid sample can enter the inside of the flow cell 30 through the cell inlet 32 and can be discharged to the outside of the flow cell 30 through the cell outlet 34.

[0062] In a broad sense, the flow path F can refer to a path through which the liquid sample flows inside the flow device 20. The flow path F formed inside the flow device 20 can extend from the inlet portion 41 and lead to the outlet portion 42.

[0063] The flow nanoparticle measurement device 1 can include a detector 60, a flow controller 50, and a controller 70. The description of the detector 60, the flow controller 50, and the controller 70 can be included in the description of the flow device 20. Figure 2

[0064] Figure 2 A configuration related to a flow device of a flow nanoparticle measurement device according to an embodiment of the present application is illustrated. Figure 3A Figure 3B A flow cell of a flow nanoparticle measurement device according to an embodiment of the present application is illustrated.

[0065] The flow device 20 can be configured to flow the liquid sample.

[0066] The flow cell 30 can be configured to flow the liquid sample in the flow cell 30. The flow cell 30 can include a cell inlet 32 into which the liquid sample is introduced, and a cell outlet 34 from which the liquid sample is discharged. The flow cell 30 can be formed of a material including quartz, but is not limited thereto. For example, the flow cell 30 can be formed of a material including a polymer material such as acrylic.

[0067] The shape of the flow cell 30 is described and illustrated to have a rectangular outer shape, but the shape is not limited thereto. When the flow cell 30 consists of a rectangular cell, the detector 60 described later can be located in a direction perpendicular to the outer surface of the rectangular cell, or in a direction inclined by a predetermined angle from the outer surface of the rectangular cell. However, the shape of the flow cell 30 and the arrangement of the detector 60 according to the shape of the flow cell 30 are not limited.

[0068] The flow cell 30 can be configured to flow the liquid sample inside the flow cell 30. At least a portion of the flow cell 30 can be made of a light-transmissive material so that the first laser beam B1 is irradiated to the liquid sample located in the flow cell 30.

[0069] ​​The flow chamber 30 may include a flow section 36 for the flow of a liquid sample. The flow section 36 may be a space formed within the flow chamber 30. A narrow flow path F may be formed by the flow section 36. The flow section 36 may extend from the chamber inlet 32 ​​to the chamber outlet 34. For example, the flow section 36 may be connected to an opening formed in the chamber inlet 32. For example, the flow section 36 may be connected to an opening formed in the chamber outlet 34. The chamber outlet 34 may be spaced apart from the chamber inlet 32.

[0070] The flow section 36 can be formed to extend from the chamber inlet 32, bend and extend again, and lead to the chamber outlet 34. For example, the flow section 36 can be formed in a curved shape. One end of the flow section 36 can be connected to the chamber inlet 32, while the other end of the flow section 36 can lead to the chamber outlet 34.

[0071] The inner diameter of the flow section 36 can be formed within 10 mm, but is not limited to this. Different sizes and shapes of the inner diameter of the flow section 36 can be applied. For example, as... Figure 3A As shown, the cross-section of the flow section 36 can have a rectangular shape. Alternatively, such as Figure 3B As shown, the cross-section of the flow section 36 can have a circular shape.

[0072] When Figure 3B When the flow section 36 is formed with a circular cross-section, the distance between the flow section 36 and the detector 60 can be configured to remain the same even if the orientation of the detector 60 relative to the flow section 36 changes. Therefore, the restrictions on the arrangement of the detector 60 can be reduced, and thus the reliability of the detection results can be improved.

[0073] Furthermore, when such Figure 3A When the flow section 36 is formed with a rectangular cross-section, the first laser beam B1 can irradiate or receive plasma signals in a direction perpendicular to the flow section 36. Therefore, distortions such as signal refraction can be reduced. With this configuration, more accurate detection results can be obtained.

[0074] Furthermore, when such Figure 3A When the flow section 36 is formed into a rectangular cross-section, a larger flow path can be created relative to the same width, thus achieving a smooth flow of the liquid sample. However, the shape of the flow section 36 is not limited. For example, at least a portion of the flow section 36 can be formed as a curved surface, while the remaining portion of the flow section 36 can be formed as a flat surface. That is, the cross-section of the flow section 36 can be formed as a combination of curved surfaces and polygons. When a portion of the flow section 36 is formed as a curved surface, the detection intensity can be maximized, and the generation of bubbles in the liquid sample according to the flow rate can be minimized.

[0075] The inner diameter of the flow section 36 can be formed consistently along the entire flow path F, or it can vary along the flow path F. More specifically, the flow section 36 is divided into multiple segments, and each segment can have a different inner diameter, or the main flow section 38 of the flow section 36, which will be described later, can have a different inner diameter and a different shape than the other segments of the flow section 36. The size and shape of the inner diameter of the flow section 36 are not limited.

[0076] The flow section 36 may include a main flow section 38 that transmits the first laser beam B1. The main flow section 38 may form at least a portion of the flow space 37 in which the liquid sample flows. The first laser beam B1 may irradiate the main flow section 38. The flow space 37 may form a flow path through which the liquid sample flows in one direction. The main flow section 38 may form a portion of the flow space 37. The main flow section 38 that transmits the first laser beam B1 may be a portion of or all of the flow section 36. Figure 3A and Figure 3B As shown, the portion of flow section 36 before bending can be the main flow section 38. However, the invention is not limited thereto. For example, the portion of flow section 36 after bending can be the main flow section 38, and the entire flow section 36 can be defined as the main flow section 38. The position of the main flow section 38 on flow section 36 is not limited.

[0077] For example, such as Figure 2 As shown, the main flow section 38 can be configured to extend in one direction from the chamber inlet 32. In another example, the main flow section 38 can be configured to extend in one direction from the chamber outlet 34.

[0078] The first laser beam B1 can irradiate the flow path of the liquid sample passing through the main flow section 38. More specifically, the first laser beam B1 can irradiate the center of the flow path of the liquid sample passing through the main flow section 38. However, the irradiation position of the first laser beam B1 relative to the main flow section 38 is not limited to this.

[0079] The first laser beam B1 can pass through the main flow section 38. In other words, the main flow section 38 can be configured to extend in one direction and pass through the path of the first laser beam B1. For example, in the main flow section 38, the flow direction F of the liquid sample and the irradiation direction of the first laser beam B1 can be perpendicular to each other. That is, the extension direction of the main flow section 38 and the incident direction of the first laser beam B1 can be perpendicular to each other. The main flow section 38 can be configured to extend in one direction from the chamber inlet 32.

[0080] For the first laser beam B1 to irradiate, at least a portion of the flow chamber 30, including the main flow section 38, may include a light-transmitting material. Therefore, the first laser beam B1 can pass through the flow chamber 30 and irradiate the liquid sample passing through the main flow section 38.

[0081] However, the present invention is not limited thereto; the flow direction F of the liquid sample and the irradiation direction of the first laser beam B1 can be adjusted to a predetermined angle. The angle formed by the flow direction F and the irradiation direction of the first laser beam B1 can be applied differently depending on the type of detector 60. For example, the flow device 20 may include an inlet 41 and an outlet 42.

[0082] The liquid sample can pass through the inlet 41 and be introduced into the flow chamber 30. After the liquid sample is discharged from the flow chamber 30, it can be discharged to the outside of the flow device 20 through the outlet 42.

[0083] The flow device 20 can be connected to a container in which a liquid sample is stored. For example, an inlet 41 and an outlet 42 can be connected to the container. The liquid sample can be introduced from the container into the flow device 20 through the inlet 41. The liquid sample can be introduced from the flow device 20 into the container through the outlet 42. However, the invention is not limited thereto, and the inlet 41 and outlet 42 can be connected to separate containers.

[0084] The mobile device 20 may include a mobile controller 50.

[0085] The flow controller 50 can be positioned in the path of the liquid sample. The flow controller 50 can control the flow rate and volume of the liquid sample passing through the flow chamber 30. The controller 70 can control the flow rate or volume of the liquid sample passing through the flow chamber 30 by controlling the flow controller 50.

[0086] like Figure 1 As shown, the flow controller 50 can be located in the path between the flow chamber 30 and the outlet 42. That is, since the flow controller 50 is arranged downstream in the flow path of the liquid sample, contamination of the liquid sample to be measured can be minimized. However, the arrangement of the flow controller 50 is not limited.

[0087] For example, the flow controller 50 may be located on the path between the flow chamber 30 and the inlet 41. The flow controller 50 is configured to control the flow rate of the liquid sample flowing in the flow chamber 30, and the flow controller 50 can satisfy this requirement if it is arranged in a location where the liquid sample is not contaminated.

[0088] The flow controller 50 can control the flow rate so that the liquid sample at a predetermined flow rate is located in the main flow section 38 when stationary. In other words, the flow controller 50 can control the flow rate so that the liquid sample flows at a predetermined period T2 (see...). Figure 6 The flow is repeated in pulses. In other words, the flow controller 50 can control the flow rate of the liquid sample, so that the liquid sample flows in a pulsed manner during the second period T2 (see...).Figure 6 and Figure 7 ) in the form of a pulse wave.

[0089] The flow controller 50 can be configured to cause the flow state and the flow stop state of the liquid sample to alternate at a second period T2 (see Figure 6 and Figure 7 ). The flow state is a state in which the liquid sample flows through the flow section 36, and the flow stop state can indicate a state in which the flow of the liquid sample is stopped in the flow section 36.

[0090] As shown in Figure 6 , the flow controller 50 can be configured to cause the liquid sample to flow in the form of a pulse between the flow state and the flow stop state. When the flow controller 50 controls the liquid sample to be in the flow state, the liquid sample can flow through the flow section 36 at a first flow rate V1. For ease of description, Figure 6 the first flow rate V1 is shown to have a constant speed, but the magnitude and variation of the first flow rate V1 are not limited thereto. When the flow controller 50 controls the liquid sample to be in the flow stop state, the flow of the liquid sample in the flow section 36 can be stopped.

[0091] The flow controller 50 can repeat the operation in the flow state and the flow stop state based on a signal received from the controller 70, and can mechanically repeat the operation in the flow state and the flow stop state. The method of implementing the operation of the flow controller 50 is not limited. This can be satisfied if the flow of the liquid sample is controlled by the flow controller 50.

[0092] The flow operation of the liquid sample via the flow controller 50 can correspond to the irradiation of the first laser beam B1 via the laser generation device 12. For example, the first period T1 of the first laser beam B1 can be the same as the second period T2 of the flow controller 50. For example, the flow controller 50 can control the flow rate of the liquid sample passing through the flow chamber 30 so that the second period T2 of the flow controller 50 is the same as the first period T1 of the first laser beam B1.

[0093] Referring to Figure 6 , the time at which the flow stop state of the liquid sample starts can be synchronized with the time at which the output of the first laser beam B1 becomes the second output P2. Referring to Figure 7 , the time at which the output of the first laser beam B1 becomes the second output P2 can be later than the time at which the flow stop state of the liquid sample starts by a first delay time d1.

[0094] When the flow controller 50 stops the flow of the liquid sample through the main flow section 38, the laser generator 10 can generate an induced plasma in the nanoparticles in the liquid sample by irradiating the first laser beam B1 to the main flow section 38 of the flow chamber 30.

[0095] After the flow controller 50 controls the liquid sample to be in the flow state, the flow controller 50 can flow the liquid sample in which the induced plasma is generated by flowing the liquid sample to the downstream, and can introduce the liquid sample in which the induced plasma is not generated into the main flow part 38. While the liquid sample flows, the laser generator 10 can control the output of the first laser beam B1 so that the induced plasma is not generated in the liquid sample.

[0096] When the flow controller 50 stops the flow of the liquid sample through the main flow part 38, the first laser beam B1 as the second output P2 is irradiated to the main flow part 38 of the flow chamber 30 by the laser generator 10, and thus the induced plasma can be generated in the nanoparticles of the liquid sample.

[0097] The present application can measure the nanoparticles of the flowing liquid sample and can improve the reliability of the nanoparticle measurement by repeating the above process.

[0098] The flow device 20 can be configured so that the flow rate of the liquid sample passing through the main flow part 38 in the flow state is equal to or greater than the amount of the liquid sample located in the main flow part 38 in the flow stop state. Through this configuration, the liquid sample exposed to the first laser beam B1 of the second output P2 is again exposed to the first laser beam B1 of the second output P2, thereby preventing errors in the nanoparticle measurement.

[0099] The flow device 20 can include a separation unit (not shown) for separating the nanoparticles in the liquid sample before the liquid sample containing the nanoparticles is introduced into the flow chamber 30. The separation unit can be disposed between the flow chamber 30 and the inlet part 41 to separate the nanoparticles from the liquid sample introduced into the flow chamber 30. The separation of the nanoparticles can be performed based on the type of the nanoparticles or the size of the nanoparticles.

[0100] Figure 4 An example of a flow controller of a flow nanoparticle measurement device according to an embodiment of the present application is illustrated.

[0101] The flow controller 50 can be configured to control the flow of the liquid sample. The flow controller 50 can operate in response to a control signal received from the controller 70.

[0102] The flow controller 50 can include a single piston pump. However, the present application is not limited thereto. This can be satisfied if the flow controller 50 is configured to receive a signal from the controller 70 and control the flow rate of the liquid sample so that the signal corresponds to the pulse of the pulsed laser beam B. As an example, the flow controller 50 can include a magnetic valve for controlling the flow rate and the flow rate of the liquid sample.

[0103] The flow controller 50 can include a cam 51 rotating according to a first period T1 (see Figure 1 ) of the first laser beam B1 (see Figure 6 and Figure 7 ). The flow controller 50 can include a cylinder 54, a piston 52 moving inside the cylinder 54, and a connecting rod 53 rotatably connected to one end of the cam 51 and the other end of the piston 52 and transferring a rotational force of the cam 51 to the piston 52. An inner space 55 can indicate a space formed in the cylinder 51. A boundary of the inner space 55 can be determined by the piston 52. The piston 52 can be disposed in the inner space 55. The piston 52 can be coupled to the cylinder 54 to reciprocate in one direction.

[0104] The cam 51 can rotate about a rotation axis 51a. One end of the connecting rod 53 can be rotatably connected to the cam 51 at a position spaced apart from the rotation axis 51a. When the cam 51 rotates, the piston 52 can reciprocate inside the cylinder 54 through the connecting rod 53.

[0105] The flow controller 50 can adjust a flow period of the liquid sample by controlling a rotational speed of the cam 51. That is, the flow controller 50 can adjust a period of a flow state and a flow stop state of the liquid sample by controlling the rotational speed of the cam 51. A flow rate of the liquid sample can be controlled by the rotational speed of the cam 51, an arrangement relationship between the rotation axis 51a of the cam 51 and the connecting rod 53, an inner volume of the cylinder 54, etc. For example, the flow rate of the liquid sample can be controlled by adjusting the flow rate of the liquid sample.

[0106] The flow controller 50 can include valves 56a and 56b. In this embodiment, the valves 56a and 56b can include a pair of valves 56a and 56b. One valve 56a of the pair of valves 56a and 56b can be disposed at a liquid sample inlet of the cylinder 54. The other valve 56b of the pair of valves 56a and 56b can be disposed at a liquid sample outlet of the cylinder 54.

[0107] The valve 56a disposed at the liquid sample inlet of the cylinder 54 can be referred to as an inlet valve 56a. The valve 56b disposed at the liquid sample outlet of the cylinder 54 can be referred to as an outlet valve 56b. The inlet valve 56a can be connected to the flow chamber 30 (see Figure 1 ). The outlet valve 56b can be connected to the outlet portion 42 (see Figure 1 ).

[0108] The valves 56a and 56b can include anti-backflow valves. For example, the anti-backflow valves can be check valves. The inlet valve 56a allows the liquid sample to be introduced into the internal space 55, but can inhibit the liquid sample from being discharged outside the internal space 55. The outlet valve 56b allows the liquid sample to be discharged outside the internal space 55, but can inhibit the liquid sample from being introduced into the internal space 55.

[0109] The piston 52, the inlet valve 56a, and the outlet valve 56b can be connected to the internal space 55. In other words, the piston 52, the inlet valve 56a, and the outlet valve 56b can form a part of a boundary of the internal space 55.

[0110] When the internal space 55 of the cylinder 54 is pressurized by the piston 52, the inlet valve 56a can be closed, and the outlet valve 56b can be opened. In this process, the liquid sample in the internal space 55 can be discharged outside the flow controller 50 through the outlet valve 56b. When the inlet valve 56a is closed, the flow of the liquid sample located more upstream than the flow controller 50 can be stopped. That is, the flow of the liquid sample in the flow chamber 30 can be stopped when the internal space 55 of the cylinder 54 is pressurized by the piston 52. When the internal space of the cylinder 54 is pressurized by the piston 52, it can mean that the internal space of the cylinder 54 is reduced by the piston 52.

[0111] Conversely, when the piston 52 is operated in a direction opposite to the pressurization direction, the outlet valve 56b can be closed, and the inlet valve 56a can be opened. When the piston 52 is operated in a direction opposite to the pressurization direction, it can mean that the internal space 55 of the cylinder 54 is increased by the piston 52. In this process, the liquid sample outside the cylinder 54 can be introduced into the internal space 55 of the cylinder 54 through the opened inlet valve 56a.

[0112] When the internal space 55 of the cylinder 54 is increased by the piston 52, the inlet valve 56a is opened, and the liquid sample can be introduced into the internal space 55 of the cylinder 54 through the inlet valve 56a. When the liquid sample is introduced into the internal space 55 of the cylinder 54 through the inlet valve 56a, the liquid sample located in the flow chamber 30 can flow. That is, the liquid sample located in the flow chamber 30 can flow when the internal space 55 of the cylinder 54 is increased by the piston 52.

[0113] The flow chamber 30 is arranged at a position more upstream than the flow controller 50 is shown and described by way of example, but the present application is not limited thereto. When the flow chamber 30 is arranged at a position more downstream than the flow controller 50, the above-described operations can be performed in reverse.

[0114] That is, movement of the piston 52 in a pressurizing direction can allow the liquid sample in the flow chamber 30 to be in a flow state, and movement of the piston 52 in a direction opposite to the pressurizing direction can allow the liquid sample in the flow chamber 30 to stop flowing. In other words, for example, the inlet valve 56a can be connected to the inlet portion 41 (see Figure 1 ), and the outlet valve 56b can be connected to the flow chamber 30 (see Figure 1 ). For example, when the internal space 55 of the cylinder 54 is pressurized by the piston 52, the liquid sample in the flow chamber 30 (see Figure 1 ) can flow. For example, if the piston 52 moves in a direction opposite to the direction in which the cylinder 54 is pressurized, the liquid sample in the flow chamber 30 (see Figure 1 ) can not flow.

[0115] Through this process, the flow controller 50 can control the flow of the liquid sample at a predetermined cycle.

[0116] Referring to Figures 1 to 4 , the flow nanoparticle measurement apparatus 1 can include a detector 60.

[0117] Nanoparticles included in the liquid sample can be brought into a plasmonic state by the first laser beam B1. The detector 60 can detect a shock wave or a scintillation generated in this process. The detector 60 can detect at least one of a spectrum of an element, a shock wave, an image of a plasma, heat, and sound generated in the plasma.

[0118] The detector 60 can include a shock wave detector that measures a laser-induced shock wave accompanying generation of a laser-induced plasma. The detector 60 can include a scintillation detector 60 that detects a scintillation accompanying generation of a laser-induced plasma. Characteristics of the laser-induced plasma can vary according to the size of the nanoparticle when an induced plasma is generated in the nanoparticle by the first laser beam B1.

[0119] The shock wave detector can include at least one of a piezoelectric element and a microphone. A signal measured by the shock wave detector can be amplified by a lock-in amplifier.

[0120] The scintillation detector can include a CCD camera. The scintillation detector 60 can further include a notch filter disposed on an optical path toward the CCD camera to control a measurement error caused by scattered light. As shown in Figure 1 , the shock wave detector and the scintillation detector can be disposed adjacent to the flow chamber 30, respectively. At least one of the shock wave detector and the scintillation detector can be disposed adjacent to the flow chamber 30.

[0121] The detector 60 can acquire information about the nanoparticles by detecting the shock wave or the scintillation. The information about the nanoparticles can include the number and / or the size of the nanoparticles.

[0122] The detector 60 can be arranged inside the flow chamber 30, or can be arranged outside the flow chamber 30 as shown. Figure 1 Further, a plurality of detectors 60 can be arranged around the flow chamber 30. The controller 70 can correct the detection value based on a distance from the position where the induced plasma is generated inside the flow chamber 30 to the detector 60. The controller 70 can correct the detection value based on an angle between a direction toward the detector 60 at the position where the induced plasma is generated inside the flow chamber 30 and an irradiation direction of the first laser beam B1. The type of the detector 60 is not limited, and the detector 60 can include various detectors such as a thermal sensor.

[0123] The flow nanoparticle measurement apparatus 1 can include a controller 70.

[0124] The controller 70 can control the overall operation of the flow nanoparticle measurement apparatus 1. For example, the controller 70 can control the laser generation apparatus 12 and the flow controller 50. The controller 70 can control the laser generation apparatus 12 to control the first period T1 (see Figure 6 and Figure 7 ) and / or the output of the first laser beam B1. Further, the controller 70 can control the flow controller 50 to control the second period T2 (see Figure 6 and Figure 7 ) or the flow time of the liquid sample.

[0125] The control of the laser generation apparatus 12 and the flow controller 50 by the controller 70 can be performed independently of each other. That is, the controller 70 can control the laser generation apparatus 12 and the flow controller 50, respectively.

[0126] The controller 70 can move the lens 18 with respect to the flow chamber 30 to adjust the focal length of the first laser beam B1.

[0127] The controller 70 can obtain information about the nanoparticles from the detector 60.

[0128] The controller 70 can pre-process a signal transmitted from the detector 60. The controller 70 amplifies a signal detected by the detector 60 using a lock-in amplifier and can remove noise of a low frequency band less than or equal to 100 Hz using a band-pass filter. The filtered signal can be converted into a digital signal through a converter. The converted signal can be subjected to real-time fast Fourier transform (FFT) by extracting some section of signal values according to a condition. Through this process, the controller 70 can convert the signal from a function of time into a function of frequency and analyze a frequency component of the shock wave generated by the plasma. The controller 70 can determine the type, size, or number of nanoparticles based on the frequency component and the amplitude size converted from the detected shock wave.

[0129] The size of the induced plasma increases as the particle size increases under the same output condition, and thus the size of the shock wave can also increase. Based on the frequency component and the amplitude size of the shock wave, the controller 70 can determine the type, size, or number of nanoparticles.

[0130] The controller 70 can determine the size or number of nanoparticles based on the number and size of scintillations detected by the scintillation detector.

[0131] The controller 70 can measure the concentration of nanoparticles in the liquid sample based on the flow rate of the liquid sample flowing by the flow controller 50 and information about the nanoparticles detected by the detector 60.

[0132] The operation of the flow nanoparticle measurement apparatus according to the present application will be described below.

[0133] Figure 5 is a flowchart illustrating a flow nanoparticle measurement method (S100) according to an embodiment of the present application. Figure 6 The time-dependent operation in the flow nanoparticle measurement apparatus according to the embodiment of the present application is illustrated.

[0134] In Figure 5 In the flowchart illustrated in FIG. 10, the method is described by dividing the method into a plurality of steps, but at least some of the steps can be performed in a different order, in conjunction with other steps, omitted, subdivided into sub-steps, or performed by adding one or more steps not illustrated.

[0135] In Figure 6 , the second output P2 of the first laser beam B1 can be greater than the first output P1. For example, the first output P1 can be zero. The controller 70 can control the output of the first laser beam B1 over time.

[0136] Referring to Figures 1 to 5The flow nanoparticle measurement apparatus 1 can be configured to measure nanoparticles contained in a flowing liquid sample. The controller 70 can control the laser generation apparatus 12 and the flow controller 50.

[0137] The flow apparatus 20 can flow a liquid sample containing nanoparticles to the main flow section 38 of the flow chamber 30. More specifically, the flow apparatus 20 can introduce the liquid sample into the flow chamber 30 through the chamber inlet 32, and discharge the liquid sample outside the flow chamber 30 through the chamber outlet 34. The flow rate of the liquid sample flowing through the flow apparatus 20 can be controlled by the flow controller 50.

[0138] Referring to Figures 1 to 6 The flow controller 50 can control the flow rate of the liquid sample so that a predetermined amount of the liquid sample is located in the main flow section 38 in a stationary state. That is, the flow controller 50 can be configured to repeatedly flow the liquid sample at the second period T2.

[0139] The pulsed laser beam B generated by the laser generation apparatus 12 can be split into the first laser beam B1 and the second laser beam B2 by the beam splitter 16. The first laser beam B1 can pass through the lens 18 and can be irradiated to the main flow section 38 of the flow chamber 30. The first laser beam B1 can be repeatedly irradiated at the first period T1 of pulses.

[0140] The flow nanoparticle measurement method S100 according to the embodiment of the present application can include a step S110 of irradiating a pulsed laser beam to a liquid sample flowing in a flow chamber 30. In the step S110, the pulsed laser beam irradiated to the liquid sample can be the first laser beam B1. In the step S110, the controller 70 can control the output of the first laser beam B1 and irradiate the pulsed laser beam to the liquid sample.

[0141] The first period T1 of the first laser beam B1 can be the same as the period of the pulsed laser beam B. The first period T1 of the first laser beam B1 can be the same as the second period T2 of the flow controller 50. The flow controller 50 can control the flow rate of the liquid sample passing through the flow chamber 30 to correspond to the period of the pulsed laser beam. For example, the time at which the flow stop state of the liquid sample starts can be synchronized with the time at which the output of the first laser beam B1 becomes the second output P2. For example, the time at which the flow state of the liquid sample starts can be synchronized with the time at which the output of the first laser beam B1 becomes the first output P1.

[0142] Thereby, when the flow of the liquid sample through the main flow section 38 is stopped by the flow controller 50, the first laser beam B1 can be irradiated to the main flow section 38 of the flow chamber 30 to generate plasma in the nanoparticles in the liquid sample.

[0143] The flow nanoparticle measurement method S100 according to the embodiment of the present application can include a step S120 of obtaining a detection signal using the detector. The first laser beam B1 can generate a plasma or a shock wave in the nanoparticle of the liquid sample stopped by the flow controller 50. The detector 60 can detect the generated plasma or shock wave to generate a detection signal. The detection signal can include information about the shock wave. In the step S120, the controller 70 can obtain the detection signal using the detector 60.

[0144] The flow nanoparticle measurement method S100 according to the embodiment of the present application can include a step S130 of calculating concentration information of the liquid sample. In the step S130, the controller 70 can calculate the concentration information of the nanoparticle contained in the liquid sample based on the flow rate of the liquid sample controlled by the flow controller 50 and the detection signal obtained from the detector 60.

[0145] The controller 70 can be configured to control the flow controller 50 such that the liquid sample repeats the flow state and the flow stop state with a predetermined period, and control the laser generator 10 such that the first laser beam B1 is irradiated with a predetermined period. Accordingly, the method can improve the reliability of the nanoparticle measurement by measuring the nanoparticle of the liquid sample in flow.

[0146] Figure 7 An operation depending on time in the flow nanoparticle measurement apparatus according to another embodiment of the present application is illustrated.

[0147] Reference Figures 1 to 7 The flow nanoparticle measurement apparatus 1 can be configured to measure the nanoparticle contained in the liquid sample in flow.

[0148] The first period T1 of the first laser beam B1 can be the same as the second period T2 of the flow controller 50.

[0149] Further, the start time of the first period T1 of the first laser beam B1 can be delayed from the start time of the second period T2 of the flow controller 50 by a first delay time d1. In other words, the start time at which the first laser beam B1 operates as the second output P2 can be delayed from the start time at which the flow rate of the liquid sample becomes zero by the first delay time d1. Thereby, the first laser beam B1 can be irradiated to the flow cell 30 after the flow of the liquid sample is stopped by the flow controller 50 and after the first delay time d1 elapses.

[0150] The start time at which the flow rate of the liquid sample becomes the first flow rate V1may be delayed from the start time at which the first laser beam B1becomes the first output P1by a second delay time d2. Thereby, after the first laser beam B1irradiates to the flow cell 30 and after the second delay time d2passes, the liquid sample can flow at the first flow rate V1and can be discharged from the flow cell 30.

[0151] The time during which the flow rate of the liquid sample is maintained at zero during the second period T2may be greater than the time during which the first laser beam B1operates as the second output P2during the first period T1. Accordingly, the first laser beam B1irradiates to the nanoparticles in which the induced plasma is not formed, and the induced plasma can be stably generated.

[0152] Figure 8 is a perspective view of a flow cell according to an embodiment of the present application. Figure 9 is a cross-sectional view taken along Figure 8 A-A' of FIG. 1. Figure 10 is a cross-sectional view taken along Figure 8 B-B' of FIG. 1.

[0153] Referring to Figures 8 to 10 , the flow device 20 (see Figure 1 ) can include a flow cell 130. Figures 8 to 10 The shape of the flow cell 130 shown in Figure 3A may be different from the shape of the flow cell 30 shown in Figure 3B .

[0154] The flow cell 130 can be configured to flow the liquid sample in the flow cell 130. The flow cell 130 can include a cell inlet 131 through which the liquid sample is introduced into the flow cell 130 and a cell outlet 132 through which the liquid sample is discharged from the inside of the flow cell 130 to the outside.

[0155] The flow cell 130 can include a quartz material, but is not limited thereto. For example, the flow cell 130 can include a polymer material such as acrylic. The tube 131a and the tube 132a are connected to the flow cell 130 and thus can be connected to the outside of the flow cell 130. However, the present application is not limited thereto, and the tube 131a and the tube 132a can be integrally formed with the flow cell 130.

[0156] As Figure 8As shown, the chamber inlet 131 and the chamber outlet 132 can indicate openings of the tube 131a and the tube 132a, and can indicate openings into which the tube 131a and the tube 132a are inserted into the main body of the flow chamber 130. Also, when there are no tube 131a and tube 132a, the chamber inlet 131 and the chamber outlet 132 can indicate openings through which the liquid sample is introduced into the flow chamber 130 and through which the liquid sample is discharged from the flow chamber 130, respectively. The tube 131a and the tube 132a can be components of the flow chamber 130.

[0157] The flow chamber 130 can have a hexahedral shape as a whole. Although the shape of the flow chamber 130 has been shown and described as having a rectangular external shape (front surface or side surface), the shape thereof is not limited thereto. That is, the shape of the flow chamber 130 and the arrangement of the detector 60 according to the shape of the flow chamber 130 are not limited. For example, if the liquid sample is configured to flow in the flow chamber 130, and at least a portion of the flow chamber 130 is formed of a light-transmissive material so that the first laser beam B1 (see Figure 1 ) is irradiated to the liquid sample inside the flow chamber 130, this can be satisfied.

[0158] The flow chamber 130 can include a flow portion 134 in which the liquid sample flows. Figure 2 The flow portion shown in FIG. 3 has been shown and described as having a shape. Figures 8 to 10 The flow portion 134 shown in FIG. 4 can be formed in a shape extending in one direction.

[0159] The flow portion 134 can be connected to the inlet portion 41 and the outlet portion 42. However, the shape of the flow portion 134 is not limited. For example, the flow portion 134 can be disposed so that the liquid sample flows so that the liquid sample is introduced from the outside of the flow chamber 130, passes through the inside of the flow chamber 130, and is discharged to the outside of the flow chamber 130.

[0160] The flow portion 134 can include a main flow portion 150, an inlet guide portion 141, and an outlet guide portion 142. The liquid sample can flow through the inlet guide portion 141, the main flow portion 150, and the outlet guide portion 142 in order.

[0161] The inlet guide portion 141 can be connected to one end of the main flow portion 150. For example, the inlet guide portion 141 can be connected to an upstream end of the main flow portion 150. The outlet guide portion 142 can be connected to the other end of the main flow portion 150. For example, the outlet guide portion 142 can be connected to a downstream end of the main flow portion 150. The inner wall of the flow chamber 130 forming the flow portion 134 can include a quartz material. Thereby, flow frictional resistance of the liquid sample can be minimized.

[0162] The main flow portion 150 can be formed to extend from one end to the other end. In other words, the main flow portion 150 can be formed in a shape extending from one end and leading to the other end in one direction. The longitudinal direction of the main flow portion 150 can be parallel to the one direction.

[0163] The main flow portion 150 can form a flow space 153a in which a liquid sample containing nanoparticles flows. The main flow portion 150 can be configured such that the first laser beam B1 (see Figure 1 ) is irradiated to the flow space 153a. The flow space 153a of the main flow portion 150 can form a flow path through which the liquid sample flows in one direction. The main flow portion 150 can include a flow path forming surface 153 formed in a flow direction F of the liquid sample as a longitudinal direction to form the flow path of the liquid sample. The flow direction F of the liquid sample can be parallel to the longitudinal direction of the main flow portion 150. For example, the flow direction F of the liquid sample can be parallel to the one direction.

[0164] The inlet guide portion 141 can guide the liquid sample into the main flow portion 150. The outlet guide portion 142 can guide the liquid sample out of the main flow portion 150 to the outside of the flow chamber 130.

[0165] The inlet guide portion 141 and the outlet guide portion 142 can be connected to the chamber inlet 131 and the chamber outlet 132, respectively. The inlet guide portion 141 can guide the liquid sample introduced through the chamber inlet 131 to the main flow portion 150. The outlet guide portion 142 can guide the liquid sample in the main flow portion 150 to the chamber outlet 132.

[0166] The inlet guide portion 141 and the outlet guide portion 142 can be formed such that the main flow portion 150 is positioned within a predetermined depth from an outer surface of a main body of the flow chamber 130. For example, as Figures 8 to 10 shown, the inlet guide portion 141 and the outlet guide portion 142 can be formed to extend toward the inside of the flow chamber 130 such that the main flow portion 150 is positioned within a predetermined depth from an outer surface of the flow chamber 130.

[0167] However, the shape of the inlet guide portion 141 and the outlet guide portion 142 is not limited thereto. For example, the inlet guide portion 141 and the outlet guide portion 142 can extend to the chamber inlet 131 and the chamber outlet 132 of the flow chamber 130, and can extend up to the outside of the flow chamber 130.

[0168] The main flow portion 150 can be connected to the inlet guide portion 141 and the outlet guide portion 142. For example, one end of the main flow portion 150 can be connected to the inlet guide portion 141. For example, the other end of the main flow portion 150 can be connected to the outlet guide portion 142.

[0169] The other end of the main flow portion 150 can be located above the one end of the main flow portion 150. For example, the main flow portion 150 can form a shape extending upward from the one end and leading to the other end. For example, the longitudinal direction of the main flow portion 150 can be parallel to the up-down direction. For example, one direction of the main flow portion 150 can be parallel to the up-down direction. For example, the one end of the main flow portion 150 can be a lower end of the main flow portion 150. For example, the other end of the main flow portion 150 can be an upper end of the main flow portion 150.

[0170] The main flow portion 150 can be configured so that the liquid sample flows in the flow direction F opposite to the direction of gravity in the flow space 153a. That is, the main flow portion 150 can be configured so that the liquid sample flows from the lower portion to the upper portion of the flow space 153a.

[0171] Each of the inlet guide portion 141 and the outlet guide portion 142 is connected to the main flow portion 150, and can be connected to the main flow portion 150 in the same direction as the flow direction F. That is, the inlet guide portion 141, the main flow portion 150, and the outlet guide portion 142 are arranged in order, and can be arranged in order in the flow direction F opposite to the direction of gravity. For example, the inlet guide portion 141 can be connected to the lower end of the main flow portion 150. For example, the outlet guide portion 142 can be connected to the upper end of the main flow portion 150.

[0172] With this configuration, when the first laser beam B1 (see Figure 1 ) is irradiated to the liquid sample flowing through the main flow portion 150, the influence of the first laser beam B1 (see Figure 1 ) on the liquid sample flowing through the inlet guide portion 141 and the outlet guide portion 142 can be minimized, and the nanoparticle measurement accuracy of the liquid sample inside the main flow portion 150 can be improved.

[0173] Further, since the flow portion 134 is configured so that the liquid sample flows in the flow direction F opposite to the direction of gravity, bubbles and the like that can occur inside the flow portion 134 can be moved to the outlet guide portion 142 by buoyancy. Therefore, measurement errors caused by bubbles in the nanoparticle measurement of the liquid sample can be minimized.

[0174] The flow chamber 130 can include a transmission portion 154 (see Figure 1 ) that transmits the first laser beam B1 (see Figure 8 and Figure 10 ). The transmission portion 154 can be configured to transmit the first laser beam B1 (see Figure 1 ). In Figure 10In the present embodiment, in order to understand the drawings, the transmission portion 154 is hatched by way of example, but the transmission portion 154 can be formed of a light-transmissive material. That is, at least a portion of the transmission portion 154 can include a light-transmissive material. For example, the transmission portion 154 can include a quartz material.

[0175] The transmission portion 154 can form a front surface of the flow chamber 130. For example, the transmission portion 154 can form at least a portion of the front surface of the flow chamber 130. The thickness of the transmission portion 154 is not limited, and the thickness of the transmission portion 154 in the front-rear direction can be a thickness sufficient to transmit the first laser beam B1 (see Figure 1 ) incident on the transmission portion 154 from the front surface of the transmission portion 154.

[0176] The transmission portion 154 can be disposed on at least a portion of the circumference of the main flow portion 150. For example, the transmission portion 154 can be disposed on the front surface of the main flow portion 150. For example, the front surface of the main flow portion 150 can be formed so as to extend from the lower end to the upper end of the main flow portion 150.

[0177] The front surface of the main flow portion 150 can form a first edge 1541 and a second edge 1542. In other words, the front surface of the main flow portion 150 can be formed so as to extend from the first edge 1541 to the second edge 1542 or so as to extend from the second edge 1542 to the first edge 1541. The first edge 1541 and the second edge 1542 can form at least a portion of the boundary of the front surface of the main flow portion 150.

[0178] The transmission portion 154 can be located between the first edge 1541 and the second edge 1542. For example, the transmission portion 154 can be formed so as to extend from at least a portion of the first edge 1541 to at least a portion of the second edge 1542. For example, the transmission portion 154 can be formed so as to extend from at least a portion of the second edge 1542 to at least a portion of the first edge 1541.

[0179] The transmission portion 154 can include a transmission surface 154a exposed to the flow space 153a of the main flow portion 150. The transmission surface 154a can form a portion of the flow path of the main flow portion 150. That is, the transmission surface 154a can form a portion of the circumferential surface of the flow path through which the liquid sample flows. In other words, the transmission surface 154a can be formed as at least a portion of the flow path forming surface 153 that forms the flow path. The transmission surface 154a can be, for example, at least a portion of the back surface of the transmission portion 154.

[0180] The first laser beam B1 (see Figure 1 ) can be incident on the transmission portion 154. The direction in which the first laser beam B1 (see Figure 1 ) is incident on the transmission portion 154 can form a predetermined angle with the flow direction F of the liquid sample. For example, the first laser beam B1 (seeFigure 1 The irradiation direction of the first laser beam B1may be perpendicular to the flow direction F of the liquid sample. The angle formed by the flow direction F of the liquid sample and the first laser beam B1may vary depending on the type of the detector.

[0181] In other words, the irradiation direction of the first laser beam B1may cross the travel direction F of the liquid sample. For example, the travel direction of the first laser beam B1incident on the main flow portion 150 can cross the travel direction F of the liquid sample. For example, the first laser beam B1incident on the main flow portion 150 can cross the liquid sample flowing in the main flow portion 150.

[0182] The first laser beam B1(see Figure 1 ) forms a predetermined angle with the flow direction F of the liquid sample, thereby minimizing the interference of the first laser beam B1(see Figure 1 ) with the liquid sample flowing through the inlet guide portion 141 and the outlet guide portion 142.

[0183] The flow cell 130 can include an observation portion 155 (see Figure 8 and Figure 10 ). The detector 60 can be configured to detect a shock wave or a scintillation through the observation portion 155. In Figure 10 , for the understanding of the drawings, the observation portion 155 is hatched in an example, but at least a portion of the observation portion 155 can be formed of a light-transmissive material. For example, the observation portion 155 can include a quartz material.

[0184] The observation portion 155 can form an angle with respect to the transmission portion 154 based on the flow direction F of the liquid sample. For example, the observation portion 155 and the transmission portion 154 can be arranged perpendicularly with respect to the center line of the main flow portion 150. In other words, the direction from the center line of the main flow portion 150 toward the observation portion 155 (for example, the left direction with reference to Figure 8 ) can form an angle (for example, a right angle) with the direction from the center line of the main flow portion 150 toward the transmission portion 154 (for example, the front direction with reference to Figures 8 to 10 ). The center line of the main flow portion 150 can be a line (virtual line) in the up-down direction passing through the center of the main flow portion 150, and can form an up-down direction axis of the main flow portion 150.

[0185] In an example, Figure 1It is shown that the transmission portion 154 is arranged at one side of the flow chamber 130, and the observation portion 155 is arranged at the other side which has a different facing angle from the one side and is adjacent to the one side. For example, the observation portion 155 can have a shape extending backward from the first edge 1541 or can have a shape extending backward from the second edge 1542. For example, the observation portion 155 can form a shape extending backward from one edge (or a part of a boundary) of the transmission portion 154.

[0186] Accordingly, the present application can minimize disturbance of the plasma light or the shock wave exposed through the observation portion 155 by the first laser beam B1 (see Figure 1 ) and can improve detection efficiency. The angle formed by the observation portion 155 and the transmission portion 154 with respect to the center line of the main flow portion 150 is not limited to a right angle. This can be satisfied if the angle is set so that the direction in which the first laser beam B1 (see Figure 1 ) is incident is not consistent with the direction in which the plasma light or the shock wave is exposed through the observation portion 155. The observation portion 155 can be located outside the path of the first laser beam B1 (see ​ ). The observation portion 155 can be positioned to be distinguished from the transmission portion 154.

[0187] The observation portion 155 can include an observation face 155a forming at least a part of the flow path forming face 153. The observation face 155a can be exposed to the flow space 153a of the main flow portion 150. The observation portion 155 can be formed to be elongated along the flow path forming face 153 in the flow direction F of the liquid sample which is a longitudinal direction.

[0188] The flow path forming face 153 can include a transmission face 154a formed in the transmission portion 154, an observation face 155a formed in the observation portion 155, and an inner face 156a. The inner face 156a is a face forming the flow path forming face 153 other than the transmission face 154a and the observation face 155a, and can be formed to extend in the flow direction F of the liquid sample which is a longitudinal direction. The inner face 156a can be formed to extend in the flow direction F of the liquid sample which is a longitudinal direction. For example, the transmission face 154a, the observation face 155a, and the inner face 156a can form the flow path forming face 153. The lower end of the flow path forming face 153 can be connected to or communicate with the inlet guide portion 141. The upper end of the flow path forming face 153 can be connected to or communicate with the outlet guide portion 142.

[0189] A cross section of the flow path forming surface 153 (for example, a cross section based on the up-down direction) can have a shape including at least one of a circular shape or a polygonal shape. The transmission portion 154 and the transmission surface 154a can be arranged on at least a portion of the circumference of the main flow portion 150 and at least a portion of the flow path forming surface 153 corresponding thereto, respectively. The observation portion 155 and the observation surface 155a can be arranged on at least a portion of the remaining circumference of the main flow portion 150 and at least a portion of the flow path forming surface 153 corresponding thereto, respectively. For example, the cross section of the flow path forming surface 153 is a rectangular cross section, and can be formed by the transmission surface 154a, the observation surface 155a, and a flat surface adjacent to the transmission surface 154a and the observation surface 155a. However, the present application is not limited thereto, and the transmission surface 154a, the observation surface 155a, and the inner surface 156a can include curved surfaces extending in the longitudinal direction.

[0190] The cross-sectional shape of the flow path forming surface 153 is not limited to the above-described shape. The configuration of the flow path forming surface 153 can be formed so that generation of bubbles in the liquid sample flowing through the main flow portion 150 is minimized, and plasma information collected by the detector is not distorted.

[0191] The size of the inner diameter of the main flow portion 150 can be uniformly formed in the entire portion (from the lower end to the upper end), and can be configured to vary along the flow direction F of the liquid sample. For example, the entire portion of the main flow portion 150 from the lower end to the upper end is divided into a plurality of sections, and the size of the inner diameter of the main flow portion 150 can vary for each section. The size and shape of the inner diameter of the main flow portion 150 are not limited to the above size and shape.

[0192] The main flow portion 150 can include an observation flow portion 151 and a tapered flow portion 152. The flow path forming surface 153, the transmission portion 154, the transmission surface 154a, the observation portion 155, the observation surface 155a, the inner surface 156a, and the like can be formed in the observation flow portion 151. A plurality of tapered flow portions 152 can be provided. For example, a plurality of tapered flow portions 152 can be formed at one end and the other end of the observation flow portion 151, respectively. For example, a first tapered flow portion 152a and a second tapered flow portion 152b can be connected to or communicate with the lower end and the upper end of the observation flow portion 151, respectively.

[0193] The observation flow portion 151 can form a shape extending from the lower end to the upper end. The observation flow portion 151 can form a central portion of the main flow portion 150. Most of the plasma generated in the main flow portion 150 can be located in the observation flow portion 151.

[0194] The tapered flow portion 152 can be configured such that the observation flow portion 151 is connected to or communicates with the inlet guide portion 141 and the outlet guide portion 142. The width of the inner flow path of the tapered flow portion 152 can vary along the flow direction F such that the flow space 153a of the observation flow portion 151 communicates with each of the inlet guide portion 141 and the outlet guide portion 142.

[0195] For example, when the inner diameter of the inlet guide portion 141 and the inner diameter of the outlet guide portion 142 are smaller than the width of the flow space 153a of the main flow portion 150, the tapered flow portion 152 can be connected to or communicate with the inlet guide portion 141, the outlet guide portion 142, and the main flow portion 150 by a sloped structure.

[0196] The tapered flow portion 152 can include a first tapered flow portion 152a and a second tapered flow portion 152b. The first tapered flow portion 152a can be disposed between the observation flow portion 151 and the inlet guide portion 141. The second tapered flow portion 152b can be disposed between the observation flow portion 151 and the outlet guide portion 142.

[0197] The lower end of the first tapered flow portion 152a can be connected to or communicate with the inlet guide portion 141, and the other end of the first tapered flow portion 152a can be connected to or communicate with the observation flow portion 151. For example, the lower end of the first tapered flow portion 152a can be connected to or communicate with the inlet hole 141a of the inlet guide portion 141. For example, the other end of the first tapered flow portion 152a can be connected to or communicate with the flow path forming face 153 of the observation flow portion 151.

[0198] The first tapered flow portion 152a can be formed such that the width (or cross-section) of the first flow path 152aa formed therein increases along the flow direction F. For example, the width (or cross-section) of the first tapered flow portion 152a can increase as it goes from the inlet hole 141a to the flow path forming face 153.

[0199] The first tapered flow portion 152a can include a plurality of first inclined faces 152ab forming the first flow path 152aa. The plurality of first inclined faces 152ab can extend from the lower end of the flow path forming face 153 to the inlet hole 141a. The plurality of first inclined faces 152ab can form the first flow path 152aa.

[0200] The lower end of the second tapered flow portion 152b can be connected to or communicate with the observation flow portion 151, and the upper end of the second tapered flow portion 152b can be connected to or communicate with the outlet guide portion 142. For example, the lower end of the second tapered flow portion 152b can be connected to or communicate with the flow path forming face 153 of the observation flow portion 151. For example, the other end of the second tapered flow portion 152b can be connected to or communicate with the outlet hole 142a of the outlet guide portion 142.

[0201] The second tapered flow portion 152b can be formed such that the width (or cross section) of the second flow path 152ba formed therein in the flow direction F decreases. For example, the width (or cross section) of the second tapered flow portion 152b can decrease as it goes from the flow path forming face 153 to the outlet hole 142a.

[0202] The second tapered flow portion 152b can include a plurality of second inclined faces 152bb that form the second flow path 152ba. The plurality of second inclined faces 152bb can extend from the upper end of the flow path forming face 153 to the outlet hole 142a. The plurality of second inclined faces 152bb can form the second flow path 152ba.

[0203] The inclination angles of the plurality of first inclined faces 152ab and the plurality of second inclined faces 152bb are not limited. These inclination angles can be angles that can suppress the generation of vortexes in the liquid sample in the flow direction F of the liquid sample and can suppress the generation of bubbles.

[0204] Due to the configuration (or shape) of the tapered flow portion 152, bubbles and / or vortexes that can be caused by the difference in the flow path width or pressure in the liquid sample flowing through the inlet guide portion 141, the main flow portion 150, and the outlet guide portion 142 can be minimized.

[0205] For convenience of explanation, it has been shown and described that the main flow portion 150 is divided into the observation flow portion 151 and the tapered flow portion 152, and the flow space 153a and the flow path forming face 153 are a configuration of the observation flow portion 151. Also, it has been shown and described that the flow space 153a and the flow path forming face 153 of the observation flow portion 151 are distinguished from the first flow path 152aa and the second flow path 152ba and the plurality of first inclined faces 152ab and the plurality of second inclined faces 152bb. However, the scope of the present application is not limited thereto.

[0206] For example, the flow space 153a and the flow path forming surface 153 can be included in the main flow portion 150. For example, the first flow path 152aa and the second flow path 152ba can be a part of the flow space 153a. For example, the plurality of first inclined surfaces 152ab and the plurality of second inclined surfaces 152bb can be a part of the flow path forming surface 153.

[0207] In other words, the flow space 153a can include, for example, the first flow path 152aa and the second flow path 152ba. In another example, the flow space 153a can be a space located between the first flow path 152aa and the second flow path 152ba. In addition, the flow path forming surface 153 can include, for example, the plurality of first inclined surfaces 152ab and the plurality of second inclined surfaces 152bb. In another example, the flow path forming surface 153 can be a surface that forms a flow path, located between the plurality of first inclined surfaces 152ab and the plurality of second inclined surfaces 152bb.

[0208] The size of the inner diameter of the inlet guide portion 141 can be the same as the size of the inner diameter of the outlet guide portion 142. Since the inner diameter of the inlet guide portion 141 and the inner diameter of the outlet guide portion 142 are the same as each other, the pressure difference between the inlet guide portion 141 and the outlet guide portion 142 can be minimized. Thereby, the generation of vortexes and / or air bubbles in the liquid sample flowing through the flow portion 134 can be minimized. However, the relationship between the inner diameter of the inlet guide portion 141 and the inner diameter of the outlet guide portion 142 is not limited to the above-described relationship.

[0209] The inlet portion 41 and the outlet portion 42 can be connected to a reservoir in which a liquid sample is stored, and thus the liquid sample discharged from the reservoir to the inlet portion 41 can pass through the flow chamber 130 and can be introduced into the reservoir through the outlet portion 42. However, the present application is not limited thereto, and the inlet portion 41 and the outlet portion 42 can be connected to separate reservoirs, respectively.

[0210] While embodiments have been described with reference to several illustrative embodiments of the present application, numerous other variations and other embodiments can be devised by persons of ordinary skill in the art without departing from the spirit and scope of the present application. In particular, various variations and modifications of the components part and / or subject matter combination arrangements described in the specification, drawings, and appended claims can be made without departing from the scope of the present application. In addition to variations and modifications of the components part and / or arrangements, alternative uses will also become apparent to those skilled in the art. The scope of the present application should be determined, not with reference to the above description, but should be given with reference to the appended claims, along with their full scope of equivalents.

Claims

1. A device for measuring flowing nanoparticles, comprising: A flow chamber in which a liquid sample flows, and a first laser beam irradiates the flow chamber; A laser generator configured to generate the first laser beam; A flow controller comprising a cam rotating about a rotation axis, a cylinder spaced apart from the cam, and a piston that converts the rotational force of the cam into linear motion via a connecting rod and reciprocates within the cylinder; A detector configured to detect plasma generated in the main flow section; as well as A controller that independently controls the laser generator and the flow controller. The controller is configured to measure the concentration of the nanoparticles based on the flow rate of the liquid sample controlled by the flow controller and information about the nanoparticles obtained from the detector. The flow chamber includes the main flow section, which is configured to define a flow space in which the liquid sample flows, and is configured such that the first laser beam irradiates the flow space. The flow controller is configured to alternately repeat the flow state and flow stop state of the liquid sample. The flow state refers to the state in which the liquid sample flows through the main flow section. The flow-stopping state refers to the state in which the liquid sample stops flowing in the main flow section. The flow controller is configured to repeat the flow state and the flow stop state in a first cycle. The flow controller controls the flow cycle of the liquid sample in the flow chamber by controlling the rotation speed of the cam. The laser generator repeatedly irradiates the main flow section with the first laser beam at a second cycle corresponding to the first cycle. Wherein, the laser generator generates the first laser beam at a time that is a first delay time later than the start time of the flow cessation state of the liquid sample, and The time point at which the fluid state of the liquid sample begins is delayed by a second delay time compared to the time point at which the laser generator ends the generation of the first laser beam.

2. The flow nanoparticle measuring device as described in claim 1, wherein, The irradiation by the first laser beam generated by the laser generator and the flow of the liquid sample by the flow controller correspond to each other.

3. The flow nanoparticle measuring device as described in claim 1, wherein, When the liquid sample is in the stopped flow state, the laser generator irradiates the main flow section with the first laser beam.

4. The flow nanoparticle measuring device as described in claim 1, wherein, The flow controller is configured to allow the flow rate of the liquid sample through the main flow section in the flowing state to be equal to or greater than the amount of the liquid sample in the main flow section in the flow-stopped state.

5. The flow nanoparticle measuring device as described in claim 1, wherein, The main flow section is configured to allow the direction of travel of the liquid sample to intersect with the direction of travel of the first laser beam.

6. The flow nanoparticle measuring device as described in claim 5, wherein, At least a portion of the flow chamber includes a light-transmitting material, such that at least a portion of the first laser beam irradiates the interior of the main flow section.

7. The flow nanoparticle measuring device as described in claim 1, wherein, The flow controller is positioned further downstream of the flow chamber, and The liquid sample is discharged from the flow chamber and introduced into the flow controller.

8. The flow nanoparticle measuring device as described in claim 1, wherein, When the first laser beam irradiates the main flow section, the detector detects the plasma generated in the main flow section.

9. The flow nanoparticle measuring device as described in claim 8, wherein, The detector obtains information about the nanoparticles contained in the liquid sample based on the plasma.

10. The flow nanoparticle measuring device as described in claim 9, wherein, The information about the nanoparticles obtained by the detector includes the size and number of the nanoparticles based on the shock wave of the plasma, and Different plasmas are generated depending on the size of the nanoparticles.

11. The flow nanoparticle measuring device as described in claim 8, wherein, The detector includes at least one of a shock wave detector for detecting the shock wave of the plasma and a scintillation detector for detecting the scintillation of the plasma.

12. The flow nanoparticle measuring device as described in claim 11, wherein, The shock wave detector includes at least one of a piezoelectric element and a microphone.

13. The flow nanoparticle measuring device as described in claim 11, wherein, The scintillation detector includes a CCD camera.

14. The flow nanoparticle measuring device as described in claim 1, wherein, The laser generator includes: A laser generating device configured to generate a pulsed laser beam; An aperture, the aperture being configured to adjust the diameter of the pulsed laser beam; A reflector configured to adjust the optical path of the pulsed laser beam; A beam splitter, arranged in the optical path and configured to split the pulsed laser beam and form the first laser beam; and A lens is disposed between the beam splitter and the flow chamber and configured to adjust the focus of the first laser beam such that the focus of the first laser beam is located inside the main flow section.

15. The flow nanoparticle measuring device as described in claim 1, wherein, The laser generator includes an Nd:YAG laser with a center wavelength of 532 nm.

16. The flow nanoparticle measuring device as described in claim 1, wherein, The flow chamber includes: A main flow section having a flow space in which the liquid sample flows in a flow direction opposite to the direction of gravity, the main flow section being configured such that the first laser beam irradiates the flow space; An inlet guide, configured to guide the liquid sample into the main flow section; and An outlet guide, configured to guide the liquid sample out of the main flow section. The inlet guide and the outlet guide are sequentially connected to the main flow section in the flow direction.

17. The flow nanoparticle measuring device as described in claim 16, wherein, The inlet guide, the main flow section, and the outlet guide are arranged sequentially in the flow direction.

18. The flow nanoparticle measuring device as described in claim 16, wherein, The flow chamber further includes a transmission section having a transmission surface exposed to the flow space and configured to transmit at least a portion of the first laser beam incident on the transmission section.

19. The flow nanoparticle measuring device as described in claim 18, wherein, The transmission section is located on the front side of the main flow section.

20. The flow nanoparticle measuring device as described in claim 19, wherein, The flow chamber also includes an observation section located at the perimeter of the main flow section and outside the path of the first laser beam.

21. The flow nanoparticle measuring device as described in claim 20, wherein, The observation section is formed to extend rearward from one side of the transmission section.

22. The flow nanoparticle measuring device as described in claim 18, wherein, The transmissive portion is formed of a material including quartz.

23. The flow nanoparticle measuring device as described in claim 16, wherein, The inner diameters of the inlet guide and the outlet guide are smaller than the width of the main flow section, and The main flow section includes: The flow section is observed to have a shape that extends from the lower end to the upper end. A first conical flow section, located between the observation flow section and the inlet guide section, wherein the width of the first conical flow section increases from the inlet guide section to the observation flow section; and The second conical flow section is located between the observation flow section and the outlet guide section, and the width of the second conical flow section decreases from the observation flow section to the outlet guide section.

24. The flow nanoparticle measuring device as described in claim 23, wherein, The observed flow section includes multiple flow path forming surfaces that form the flow space. The first conical flow section includes a plurality of first inclined surfaces connected to the plurality of flow path forming surfaces, and The second conical flow section includes a plurality of second inclined surfaces connected to the plurality of flow path forming surfaces.

25. The flow nanoparticle measuring device as described in claim 16, wherein, The inner diameter of the inlet guide is equal to the inner diameter of the outlet guide.

26. A method for measuring flowing nanoparticles, comprising: The liquid sample containing nanoparticles is flowed in the flow chamber; A pulsed laser beam generated by a laser generator is irradiated onto the main flow section inside the flow chamber; The plasma induced by the pulsed laser beam in the main flow section is detected by a detector; as well as Based on the flow rate of the liquid sample controlled by the flow controller and information about the nanoparticles detected by the detector, the concentration of nanoparticles in the liquid sample is measured by the controller, which independently controls the laser generator and the flow controller. The process of causing the liquid sample to flow includes: operating the flow controller connected to the flow chamber to alternately repeat the flow state and the flow-stop state of the liquid sample. The flow controller includes a cam that rotates around a rotation axis, a cylinder spaced apart from the cam, and a piston. The piston converts the rotational force of the cam into linear motion via a connecting rod and reciprocates within the cylinder. The flow controller controls the flow cycle of the liquid sample in the flow chamber by controlling the rotation speed of the cam. The flow state refers to the state in which the liquid sample flows through the main flow section. The flow-stopping state refers to the state in which the liquid sample stops flowing in the main flow section. Wherein, the laser generator generates the pulsed laser beam at a time that is a first delay time later than the start time of the flow cessation state of the liquid sample, and The time point at which the fluid state of the liquid sample begins is delayed by a second delay time compared to the time point at which the generation of the pulsed laser beam ends.

27. The method for measuring flowing nanoparticles as described in claim 26, wherein, The process of causing the liquid sample to flow includes: controlling the flow of the liquid sample via the flow controller, thereby alternately repeating the flow state and the flow stop state in a first cycle; and The process of irradiating the pulsed laser beam includes: repeatedly irradiating the main flow section with the pulsed laser beam at a second period corresponding to the first period.

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