Intelligent mask detection, cleaning, and storage apparatus

Abstract

The application discloses a kind of mask intelligent detection cleaning storage equipment, it is characterized by: including outer cabinet (1), respectively being placed in the placing rack (6) of the outer cabinet (1) inside, mask detection cleaning machine (7), intelligent manipulator (8) and storage rack (9);The intelligent manipulator (8) can drive mask (18) transfer between the placing rack (6), the mask detection cleaning machine (7) and the storage rack (9).The application integrates placing rack, mask detection cleaning machine, intelligent manipulator and storage rack in outer cabinet, so that the application can integrate mask detection, cleaning, storage in one, improve mask detection storage efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of photomask detection, and in particular to a photomask intelligent detection, cleaning and storage device. Background Art

[0002] A photomask, also known as a mask plate or a mask template, is made of quartz glass as a substrate, with a layer of metal chromium and photosensitive resin coated on it to become a photosensitive material. When in use, the designed circuit pattern is exposed on the photosensitive resin through an electronic laser device. The exposed area will be developed, and a circuit pattern will be formed on the metal chromium, becoming a photomask similar to an exposed film. The integrated circuit is then projected and positioned, and the projected circuit is photoetched by an integrated circuit lithography machine. It is an indispensable tool in the IC production process.

[0003] During transport, the photomask is usually placed in Figure 21 The photomask is stored in a storage box as shown, and when the mask is put into storage, it needs to be removed from the box and inspected for dust particles or damage on the surface to prevent defects on the mask surface from affecting the exposure quality of the subsequent circuit pattern. However, because there is currently no integrated equipment specifically for mask inspection, cleaning and storage, the traditional method is to manually open the mask storage box, remove the mask, and inspect it with the naked eye. Only the defect-free mask is then stored in the warehouse. This method is inefficient and prone to missed inspections. Moreover, the entire inspection process may cause damage to the mask due to human errors, resulting in unnecessary economic losses for the company. Summary of the Invention

[0004] The purpose of the present invention is to solve the above problems and provide a mask intelligent detection, cleaning and storage device, which can automatically complete the mask taking, detection, cleaning and storage work, thereby improving work efficiency.

[0005] The purpose of the present invention is achieved through the following technical solution: an intelligent detection, cleaning and storage device for photomasks, comprising an outer cabinet, placement racks respectively arranged inside the outer cabinet, a photomask detection and cleaning machine, an intelligent manipulator and a storage rack; the intelligent manipulator can drive the photomask to transfer between the placement rack, the photomask detection and cleaning machine and the storage rack.

[0006] Further, the mask inspection and cleaning machine comprises a machine table, a mask supporting mechanism arranged on the machine table for placing the mask, two detection mechanisms arranged on the machine table for detecting surfaces of the mask, and a dry ultrasonic dust remover arranged on the machine table; the machine table can drive the mask supporting mechanism to move below the cleaning head of the dry ultrasonic dust remover; the two detection mechanisms are arranged at intervals, and the machine table can drive the mask supporting mechanism to move between the two detection mechanisms, so that the two detection mechanisms can detect the front and back surfaces of the mask respectively.

[0007] Further, the detection mechanism comprises a back plate with an arc-shaped slot, a mounting structure mounted on the arc-shaped slot, and a 3D camera mounted on the mounting structure.

[0008] The mounting structure comprises an angle adjusting plate mounted on the arc-shaped slot, a mounting plate movably connected to the angle adjusting plate, and a distance adjusting block fixed to the angle adjusting plate; the 3D camera is mounted on the mounting plate, the angle adjusting plate can move along the arc-shaped slot to adjust the included angle between the 3D camera and the surface of the mask; the distance adjusting block is connected to the mounting plate through a connecting member, and the connecting member can drive the mounting plate to move up and down relative to the angle adjusting plate to adjust the distance between the 3D camera and the surface of the mask.

[0009] The mask supporting mechanism comprises a support connected to the machine table, at least two supporting rods arranged on the support for placing the mask, and a clamping cylinder mounted on the support; each of the two supporting rods is provided with a limiting part, and the mask is clamped between the cylinder extension end of the clamping cylinder and the limiting part.

[0010] As another preferred solution, the mask supporting mechanism further comprises two oppositely arranged clamping plates and a pneumatic finger arranged on the support and connecting the two clamping plates; the pneumatic finger can drive the two clamping plates to move, so that the two clamping plates can clamp the opposite two sides of the mask respectively.

[0011] The placing rack comprises a mounting rack and a plurality of mask storage box positioning and opening devices arranged on the mounting rack respectively; the mask storage box positioning and opening device comprises a frame, a pressing mechanism arranged on the frame, two side positioning mechanisms and a door opening mechanism; the pressing mechanism and the two side positioning mechanisms form a placing space for placing a mask storage box, the pressing mechanism is used for pressing the mask storage box from above, the two side positioning mechanisms are used for clamping the mask storage box from both sides, and the door opening mechanism is used for opening the door of the mask storage box; a limiting telescopic air cylinder and a limiting column for limiting the front and back positions of the mask storage box are arranged on the frame and / or the side positioning mechanism.

[0012] The door opening mechanism comprises a motor arranged on the frame and a rocker arm mounted on the main shaft of the motor.

[0013] The pressing mechanism comprises a pressing rod arranged on the frame, a pressing wheel arranged at the lower end of the pressing rod and a torsional spring arranged on the pressing rod; the pressing rod can rotate up and down, and the pressing rod can press the torsional spring when rotating upward.

[0014] The side positioning mechanism comprises a mounting seat arranged on the frame and a side guide wheel arranged on the mounting seat; the mounting seat is provided with a mounting groove, a mounting block is arranged in the mounting groove, and a compression spring is arranged between the mounting block away from the mask storage box and the groove wall of the mounting groove; the guide wheel is arranged on the mounting block, the mounting block can move in the mounting groove, and the mounting block can press the compression spring when moving; the side guide wheels on the two side positioning mechanisms can clamp the mask storage box from both sides.

[0015] As another preferred scheme, an air purifier and a control computer are arranged on the outer cabinet; the air purifier, the placing rack, the mask detection and cleaning machine and the intelligent manipulator are electrically connected with the control computer.

[0016] Compared with the prior art, the present application has the following beneficial effects:

[0017] (1) The placing rack, the mask detection and cleaning machine, the intelligent manipulator and the storage rack are integrated in the outer cabinet, the mask detection and cleaning machine can detect and clean the mask, the storage rack is used for storing the detected mask, and the intelligent manipulator can drive the mask to transfer between the placing rack, the mask detection and cleaning machine and the storage rack, so that the present application can integrate mask detection, cleaning and storage into one, and improve the mask detection and storage efficiency.

[0018] (2) The air purifier is arranged on the outer cabinet, which can improve the cleanliness of the air in the outer cabinet, and prevent dust particles in the air from falling on the surface of the photomask during storage, thereby affecting the subsequent use of the photomask.

[0019] (3) The photomask detection and cleaning machine is provided with two detection mechanisms, which can detect the front and back surfaces of the photomask respectively when the photomask bearing mechanism driven by the machine table moves between the two detection mechanisms, so that the photomask does not need to be turned over during the whole detection process, the detection efficiency is improved, and the photomask is also prevented from being damaged when being turned over. In addition, the photomask detection and cleaning machine is provided with a dry ultrasonic dust remover, which can well remove dust on the surface of the photomask, and compared with the traditional cleaning method of nitrogen blowing, the dry ultrasonic dust remover can prevent dust from flying and has better cleaning effect.

[0020] (4) The angle adjusting plate on the detection mechanism can move along the arc-shaped groove, and the mounting plate can move up and down relative to the angle adjusting plate, so that the angle and distance between the 3D camera and the surface of the photomask can be adjusted, the 3D camera can detect the surface of the photomask more accurately, and the detection effect is improved.

[0021] (5) The photomask bearing mechanism clamps the four side edges of the photomask through the clamping cylinder, the limiting part and the two clamping plates, so that the photomask can be placed more stably on the supporting rod, and the displacement of the photomask during detection is prevented, thereby affecting the detection effect.

[0022] (6) The photomask storage box positioning and opening device can fix the photomask storage box through the downward pressing mechanism and the side positioning mechanism, and then open the box door of the photomask storage box through the door opening mechanism, so as to facilitate the intelligent mechanical hand to take the photomask and improve the photomask detection efficiency.

[0023] (7) The photomask storage box positioning and opening device positions the front and rear positions of the photomask storage box through the limiting column and the telescopic cylinder, and detects the position of the photomask storage box through the front end infrared sensor and the rear end infrared sensor, which can ensure that the photomask storage box is placed in place, and improve the accuracy of the intelligent mechanical hand when taking the photomask.

[0024] Some of the additional features of the present application can be described in the following description. Some of the additional features of the present application are obvious to those skilled in the art through inspection of the following description and corresponding drawings or by practice or use of the examples. The features disclosed in the present application can be realized and achieved through the practice or use of various methods, means and combinations of the specific embodiments described below. BRIEF DESCRIPTION OF DRAWINGS

[0025] The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the application. In the drawings:

[0026] Figure 1 is a structural diagram of the present application.

[0027] Figure 2 is a structural diagram of the present application after removing the side plate of the outer cabinet.

[0028] Figure 3 is a partial enlarged diagram of Figure 2

[0029] Figure 4 is a diagram of the present application after removing the storage shelf.

[0030] Figure 5 is a structural diagram of the first perspective of the photomask detection and cleaning machine of the present application.

[0031] Figure 6 is a structural diagram of the second perspective of the photomask detection and cleaning machine of the present application.

[0032] Figure 7 is a structural diagram of the detection mechanism of the present application.

[0033] Figure 8 is a structural diagram of the mounting structure connected to the back plate of the present application.

[0034] Figure 9 is a structural diagram of the angle adjustment plate connected to the back plate of the present application.

[0035] Figure 10 is a structural diagram of the photomask bearing mechanism of the present application.

[0036] Figure 11 is a diagram of the photomask placed on the photomask bearing mechanism.

[0037] Figure 12 is a structural diagram of the placement shelf of the present application.

[0038] Figure 13 is a structural diagram of the first perspective of the photomask storage box positioning and opening device of the present application.

[0039] Figure 14 is a structural diagram of the second perspective of the photomask storage box positioning and opening device of the present application.

[0040] Figure 15 is a structural diagram of the side positioning mechanism of the present application.

[0041] Figure 16 ​This is a structural diagram of a mounting seat provided with a mounting groove according to the present invention.

[0042] Figure 17 This is a structural diagram of the side guide wheels of the present invention being arranged on the mounting block.

[0043] Figure 18 This is a schematic diagram of a mask storage box being placed in a mask storage box positioning and opening device.

[0044] Figure 19 It is a structural diagram of the storage rack of the present invention.

[0045] Figure 20 for Figure 19 A partial enlarged schematic diagram is shown in the figure.

[0046] Figure 21 This is a structural diagram of the mask storage box.

[0047] The figure marks in the above drawings are: 1-outer cabinet, 2-air purifier, 3-control computer, 4-placement opening, 5-alarm, 6-placement rack, 7-mask detection cleaning machine, 8-intelligent manipulator, 9-storage rack, 10-movable track, 11-machine table, 12-light lamp, 13-laser sensor, 14-X-axis moving mechanism, 15-dry ultrasonic dust collector, 16-code reader, 17-detection mechanism, 18-mask, 19-mask carrying mechanism, 20-Y-axis moving mechanism, 21-3D camera, 22-back plate, 23-mounting plate, 24-distance adjustment block, 25-angle adjustment plate, 26-arc groove, 27-slot hole, 28-limiting part, 29-cylinder extension End, 30—support rod, 31—clamping plate, 32—support block, 33—bracket, 34—clamping cylinder, 35—pneumatic finger, 36—mounting frame, 37—mask storage box positioning and opening device, 38—frame, 39—pressure rod, 40—torsion spring, 41—pressure wheel, 42—rocker arm, 43—motor, 44—side positioning mechanism, 45—limiting column, 46—bottom guide wheel, 47—limiting telescopic cylinder, 48—front end infrared sensor, 49—rear end infrared sensor, 50—mounting seat, 51—side guide wheel, 52—mounting block, 53—compression spring, 54—mounting slot, 55—storage rack outer frame, 56—box body, 57—box door, 58—handle, 59—mask storage box. DETAILED DESCRIPTION

[0048] In order to make the personnel in the technical field better understand the scheme of the present application, the technical scheme in the embodiments of the present application will be clearly and completely described below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor should fall within the scope of protection of the present application.

[0049] It should be noted that if the terms "first", "second" and the like are involved in the description and claims of the present application and the above drawings, they are used to distinguish similar objects, and do not necessarily indicate a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented. In addition, if the terms "include" and "have" and any variations thereof are involved, it is intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not necessarily limit to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0050] In the present application, if the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like are involved, the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0051] Also, in addition to indicating orientation or positional relationship, the above-mentioned part of the terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0052] In addition, in the present application, the terms "mounting", "setting", "provided with", "connecting", "connected", "sleeved" and the like should be understood broadly. For example, it can be fixedly connected, detachably connected, or integrally constructed; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those of ordinary skill in the art, the specific meaning of the above-mentioned terms in the present application can be understood according to the specific circumstances.

[0053] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other in the case of no conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0054] Embodiment 1

[0055] As shown in Figure 1 , 2 , the present embodiment discloses a photomask intelligent detection and cleaning storage device, which is used to take out the photomask 18 placed in the photomask storage box 59 and clean, detect and store the photomask 18; at the same time, it can also be used to clean and detect the photomask stored inside and then place it in the photomask storage box 59.

[0056] The photomask storage box 59 is a prior art. In order to facilitate the description of the photomask intelligent detection and cleaning storage device of the present application, the photomask storage box 59 will be introduced first. As shown in Figure 21 , it includes a box body 56, a box door 57 arranged on the box body 56, handles 58 arranged on both sides of the box body 56, and the photomask 18 stored in the box body 56. The box door 57 is pulled by a spring, and after the photomask is taken out or put in, the spring will pull the box door 57 to automatically close.

[0057] The photomask intelligent detection and cleaning storage device of the present application will be described in detail below. As shown in Figures 1 to 3 , the photomask intelligent detection and cleaning storage device includes an outer cabinet 1, a placing rack 6, a photomask detection and cleaning machine 7, an intelligent mechanical hand 8 and a storage rack 9 arranged in the inner part of the outer cabinet 1 respectively. The placing rack 6 is arranged at the front end of the outer cabinet 1 and is used to fix and open the photomask storage box 59; when specifically arranged, a placing opening 4 is opened on the side plate of the outer cabinet 1, and through the placing opening 4, the photomask storage box 59 can be placed on the placing rack 6. The storage rack 9 is arranged behind the placing rack 6 and the number thereof can be set to be multiple. In the present embodiment, the storage rack 9 is set to be two, and the two storage racks 9 are respectively distributed on both sides of the outer cabinet 1 and are used to store the detected photomask 18. The photomask detection and cleaning machine 7 is arranged between the placing rack 6 and the storage rack 9 and is used to clean and detect whether the surface of the photomask 18 is dusty or damaged. The intelligent mechanical hand 8 can move in the inner part of the outer cabinet 1 and can drive the photomask 18 to transfer between the placing rack 6, the photomask detection and cleaning machine 7 and the storage rack 9; when specifically arranged, the bottom of the outer cabinet 1 is provided with a moving track 10 for the movement of the intelligent mechanical hand 8, as shown in Figure 4 .

[0058] In this embodiment, the outer cabinet 1 is equipped with several air purifiers 2 on its top and a control computer 3 on its side panels. The air purifiers 2, storage rack 6, photomask inspection and cleaning machine 7, and intelligent manipulator 8 are all electrically connected to the control computer 3 and controlled by it. The air purifiers 2 improve the cleanliness of the air inside the outer cabinet 1 and prevent dust particles from falling onto the surface of the photomask 18 during storage, which could affect its subsequent use. Furthermore, the outer cabinet 1 is equipped with a door for operator access.

[0059] like Figure 12 As shown, the placement rack 6 includes a mounting rack 36 fixed to the interior of the outer cabinet 1 and a plurality of mask storage box positioning and opening devices 37 respectively arranged on the mounting rack 36. When specifically set, the mask storage box positioning and opening devices 37 are distributed on the mounting rack 36 in an array.

[0060] like Figure 13 、 14 As shown, the mask storage box positioning and opening device 37 comprises a frame 38, a downward pressing mechanism, two side positioning mechanisms 44, and a door opening mechanism, each mounted on the frame 38. The frame 38 comprises a base plate, a rear plate connected to the rear end of the base plate, and two crossbeams located on the left and right ends of the rear plate and above the base plate. The two side positioning mechanisms 44 are located on the left and right sides of the base plate, while the downward pressing mechanism is located on the crossbeams. Depending on actual usage, multiple downward pressing mechanisms can be provided, distributed on the left and right crossbeams. A storage space for a mask storage box 59 is formed between the downward pressing mechanism and the two side positioning mechanisms 44. An entrance can be provided on the rear plate, communicating with the storage opening 4. During use, the mask storage box 59 is pushed into the storage space through the entrance and the storage opening, with the downward pressing mechanism pressing the mask storage box 59 from above, while the two side positioning mechanisms 44 clamp the mask storage box 59 from both sides, securing it in place.

[0061] The door opening mechanism can be installed on the crossbeam, and is located near the front end of the bottom plate, and is used to open the box door 57 of the mask storage box 59.

[0062] Specifically, the door opening mechanism includes a motor 43 mounted on the frame 38 and a rocker arm 42 mounted on the main shaft of the motor 43. The motor 43 drives the rocker arm 42 to rotate. When the photomask storage box 59 is placed in the storage space, the motor 43 drives the rocker arm 42 to rotate. During the rotation, the front end of the rocker arm 42 abuts against the edge of the door 57 of the photomask storage box 59, thereby pushing the door 57 open. When the motor 43 drives the rocker arm 42 to reverse, the rocker arm 42 no longer applies thrust to the door 57, and the door 57 closes automatically under the tension of the spring within the photomask storage box 59.

[0063] The lower pressing mechanism comprises a pressing rod 39 arranged on the frame 38, a pressing wheel 41 arranged at the lower end of the pressing rod 39, and a torsion spring 40 arranged on the pressing rod 39. In particular, the pressing rod 39 has a rotating shaft, the entire pressing rod 39 is installed on the crossbeam of the frame 38 through the rotating shaft, and the pressing rod 39 can rotate up and down around the rotating shaft. The torsion spring 40 is sleeved on the rotating shaft of the pressing rod 39 and can be squeezed when the pressing rod 39 rotates upward. The pressing wheel 41 is installed at the lower end of the pressing rod 39 and can rotate, facilitating the pushing of the mask storage box 59 into the placing space.

[0064] Through the above structure, when the mask storage box 59 is pushed into the placing space, the mask storage box 59 lifts the pressing rod 39 upward, the pressing rod 39 rotates upward, the torsion spring 40 is squeezed at this time, and due to the restoring force of the torsion spring 40, the pressing rod 39 has a downward pressure, thereby pressing the upper surface of the mask storage box 59 downward.

[0065] As shown in Figures 15-17 The side positioning mechanism 44 comprises a mounting seat 50 arranged on the bottom plate of the frame 38 and a side guide wheel 51 arranged on the mounting seat 50. When the mask storage box 59 is pushed into the placing space, the side guide wheels 51 on the left and right two side positioning mechanisms 44 can clamp the mask storage box 59 from both sides. The side guide wheel 51 can rotate, facilitating the pushing of the mask storage box 59 into the placing space.

[0066] In addition, the mounting seat 50 is provided with a mounting groove 54 on the upper surface, the mounting groove 54 is provided with a mounting block 52, and a compression spring 53 is arranged between the mounting block 52 away from the mask storage box 59 and the groove wall of the mounting groove 54. The width of the mounting block 52 is less than the width of the mounting groove 54, so that the mounting block 52 can move in the mounting groove 54 and squeeze the compression spring 53 when the mounting block 52 moves, so that the compression spring 53 is contracted.

[0067] The side guide wheel 51 is arranged on the mounting block 52, and in the initial state, the distance between the side guide wheels 51 on the left and right two side positioning mechanisms 44 is slightly less than the width of the mask storage box 59. When the mask storage box 59 is pushed into the placing space, the mask storage box 59 squeezes the side guide wheels 51 of the left and right two side positioning mechanisms 44, so that the mounting block 52 moves in the mounting groove 54, and at this time the compression spring 53 is compressed, and due to the restoring force of the compression spring 53, the side guide wheels 51 of the left and right two side positioning mechanisms 44 clamp the mask storage box 59 from both sides.

[0068] In addition, the frame 38 is provided with a telescopic cylinder 47 and a limiting post 45 for limiting the front and rear positions of the mask storage box 59. Specifically, the limiting post 45 is located at the front end of the frame 38, while the telescopic cylinder 47 is located at the rear end of the frame 38. When the mask storage box 59 is pushed into place, the handle 58 of the mask storage box 59 abuts against the limiting post 45, and the limiting post 45 defines the position of the front end of the mask storage box 59. After the mask storage box 59 is pushed into place, the telescopic head of the telescopic cylinder 47 is controlled to extend, limiting the position of the mask storage box 59 from the rear end. Of course, the telescopic cylinder 47 and limiting post 45 can also be provided on the mounting base of the side positioning mechanism 44, or the telescopic cylinder 47 and limiting post 45 can be provided on both the frame 38 and the mounting base of the side positioning mechanism 44, with the limiting post 45 at the front and the telescopic cylinder 47 at the rear. The motor 43 , telescopic cylinder 47 and other electrical components are all connected to the control computer 3 and controlled by the control computer 3 .

[0069] When in use, the door 57 of the mask storage box 59 is oriented toward the front end and the mask storage box 59 is pushed from the entrance into the storage space, so that the handles on both sides of the mask storage box 59 are against the limiting columns 45. When the mask storage box 59 is pushed into place, the telescopic head of the telescopic cylinder 47 is controlled to extend to limit the mask storage box 59 from the rear end. At this time, the downward pressing mechanism presses the mask storage box 59 from the top, and the two side positioning mechanisms 44 clamp the mask storage box 59 from both sides, so that the mask storage box 59 is fixed. The motor 43 is controlled to work, and the motor 43 drives the rocker arm 42 to rotate. During the rotation of the rocker arm 42, its front end is against the edge of the door 57 of the mask storage box 59, thereby pushing the door 57 to open. Figure 18 As shown, the intelligent manipulator 8 takes out the photomask 18 from the front end. After the photomask 18 is taken out, the motor 43 is controlled to reverse, the box door 57 is closed, and the telescopic head of the telescopic cylinder 47 is controlled to retract, and the photomask storage box 59 can be taken out.

[0070] The intelligent manipulator 8 is provided with two supporting rods. When the intelligent manipulator 8 takes the mask 18, it lifts the mask 18 from the bottom, so as not to damage the surface of the mask 18. After the intelligent manipulator 8 takes the mask 18 from the placement rack 6, it places the mask on the mask detection and cleaning machine 7 for cleaning and detection.

[0071] In order to better clean and inspect the mask 18, Figure 5 、 6As shown, the photomask inspection and cleaning machine 7 includes a platform 11, which can be implemented using a workbench of existing equipment. It is provided with a column, an X-axis moving mechanism 14, a Y-axis moving mechanism 20 connected to the X-axis moving mechanism 14, and other components. The platform 11 is connected to a control computer 3 and controlled by the control computer 3. The control computer 3 can control the movement of the X-axis moving mechanism 14 and the Y-axis moving mechanism 20. Both the X-axis moving mechanism 14 and the Y-axis moving mechanism 20 include components such as a drag chain and a gantry. Since the platform 11 is conventional technology, it will not be described in detail here.

[0072] In this embodiment, a mask carrying mechanism 19 is provided on the machine 11, and the mask carrying mechanism 19 is installed on the X-axis moving mechanism 14 or the Y-axis moving mechanism 20, and is used to place the mask 18 to be inspected; the mask carrying mechanism 19 is driven to move along the X-axis and Y-axis directions by the X-axis moving mechanism 14 and the Y-axis moving mechanism 20.

[0073] The machine 11 is also equipped with a dry ultrasonic dust collector 15, the cleaning head of which is fixed to the column of the machine 11. The machine 11 can drive the mask carrier 19 to move below the cleaning head of the dry ultrasonic dust collector 15, and the dry ultrasonic dust collector 15 removes dust particles from the surface of the mask 18. The dry ultrasonic dust collector 15 used in this application to remove dust from the surface of the mask 18 can prevent dust from flying and achieve better cleaning results than the traditional nitrogen blowing cleaning method.

[0074] After cleaning the surface of the mask, the cleaning effect needs to be tested. Therefore, two detection mechanisms 17 for detecting the surface of the mask 18 are also provided on the machine 11. The two detection mechanisms 17 are installed on the column of the machine 11 with an upper and lower interval. When the X-axis moving mechanism 14 and the Y-axis moving mechanism 20 drive the mask carrying mechanism 19 to move between the two detection mechanisms 17, the two detection mechanisms 17 respectively detect the front and back surfaces of the mask 18, thereby improving the detection effect.

[0075] like Figure 10 、 11 As shown, the mask supporting mechanism 19 includes a bracket 33 connected to the X-axis moving mechanism 14 or the Y-axis moving mechanism 20 of the machine platform 11, and at least two support rods 30 mounted on the bracket 33 by bolts. In this embodiment, two support rods 30 are provided and spaced apart. The edges of the mask 18 are placed on the two support rods 30, and the mask 18 is supported by the two support rods 30.

[0076] In addition, a clamping cylinder 34 is provided on the bracket 33 , and a limiting portion 28 is provided on both support rods 30 in this embodiment.

[0077] During inspection, the light mask 18 is placed between the telescopic end 29 of the clamping cylinder 34 and the limit part 28. By controlling the telescopic end 29 of the clamping cylinder 34 to extend, the light mask 18 can be clamped between the telescopic end 29 and the limit part 28 to prevent the light mask 18 from shifting.

[0078] like Figure 7 、 8 As shown in Figures 9 and 9, the detection mechanism 17 includes a back plate 22, a mounting structure, and a 3D camera 21. Specifically, the back plate 22 can be mounted on the column of the machine platform 11, and is provided with an arcuate groove 26, and the mounting structure is mounted on the arcuate groove 26. During the specific installation, a bolt can be used to pass through the arcuate groove 26 from one side of the back plate 22 and then connected to the mounting structure, and locked with a nut. When in use, the nut can be loosened to move the mounting structure along the arcuate groove 26. The 3D camera 21 is mounted on the mounting structure. When the mounting structure moves along the arcuate groove 26, the angle between the 3D camera 21 and the surface of the light mask 18 can be adjusted.

[0079] In order to better install the 3D camera 21, such as Figure 8 、 9 As shown, the mounting structure includes an angle adjustment plate 25 connected to the arc groove 26, a mounting plate 23 movably connected to the angle adjustment plate 25, and a distance adjustment block 24 fixed to the angle adjustment plate 25; the 3D camera 21 is mounted on the mounting plate 23.

[0080] In a specific configuration, the mounting plate 23 may be provided with a slot 27, and a bolt may be inserted from one side of the angle adjustment plate 25 through the angle adjustment plate 25 and the slot 27, and then secured with a nut. The slot 27 allows the mounting plate 23 to move up and down a short distance relative to the angle adjustment plate 25, thereby adjusting the distance between the 3D camera 21 and the surface of the light shield 18.

[0081] Furthermore, the distance adjustment block 24 is connected to the mounting plate 23 via a connecting member, which can drive the mounting plate 23 to move up and down relative to the angle adjustment plate 25. This connecting member can be a bolt or a screw. During use, the bolt or screw is passed through the adjustment block 24 and then screwed into the mounting plate 23. The mounting plate 23 can be moved up and down by turning the bolt or screw forward or backward.

[0082] During inspection, the angle and spacing between the 3D camera 21 and the surface of the mask 18 are adjusted, and the equipment is started. The intelligent manipulator 8 removes the mask 18 to be inspected from the placement rack 6 and places it on the support rod 30 of the mask support mechanism 19. The clamping cylinder 34 is controlled to operate to clamp the mask 18. The control platform 11 operates, causing the X-axis movement mechanism 14 and the Y-axis movement mechanism 20 to drive the mask support mechanism 19 to move below the cleaning head of the dry ultrasonic dust collector 15. The dry ultrasonic dust collector 15 cleans the mask 18. After cleaning, the X-axis movement mechanism 14 and the Y-axis movement mechanism 20 drive the mask support mechanism 19 to pass between the two inspection mechanisms 17. During this process, the two 3D cameras 21 capture image information from both surfaces of the mask 18. The captured information is transmitted to the control computer 3. The control computer 3 analyzes the images to determine whether there are dust particles or damage on the surface of the mask 18. If not, the intelligent manipulator 8 is controlled to take the qualified mask 18 and store it on the storage rack 9. If there is dust, the X-axis moving mechanism 14 and the Y-axis moving mechanism 20 are controlled to drive the mask carrying mechanism 19 to move again to the bottom of the cleaning head of the dry ultrasonic dust collector 15 for repeated cleaning and detection. An alarm 5 is provided on the outer cabinet 1. When the mask 18 is damaged, the control computer 3 controls the alarm 5 to sound an alarm and remind the staff to deal with it. The entire detection process of this application does not require turning over the mask 18, which improves the detection efficiency and avoids damage to the mask caused by turning over the mask 18. The 3D camera 21, dry ultrasonic dust collector 15 and other components on the detection mechanism 17 are also controlled by the controller 3.

[0083] like Figure 19 、 20 As shown, the storage rack 9 includes a storage rack outer frame 55, which is equipped with several partitions. Several storage assemblies are arranged on two adjacent partitions from top to bottom. Specifically, the storage assemblies include two sets of support blocks 32 arranged opposite each other on the adjacent partitions. During storage, the intelligent robot 8 places the photomasks 18 that have passed inspection on the two opposite sets of support blocks 32. The storage rack 9 is numbered to facilitate recording the photomask 18 numbers.

[0084] Example 2

[0085] The embodiment is based on the embodiment 1, and a front-end infrared sensor 48 is arranged at the front end of the frame body 38, and a rear-end infrared sensor 49 is arranged at the rear end of the frame body 38. When the mask storage box 59 is pushed into the placing space, if the rear-end infrared sensor 49 detects the mask storage box 59 and the front-end infrared sensor 48 does not detect the mask storage box 59, it indicates that the mask storage box 59 needs to be further pushed forward. If the rear-end infrared sensor 49 does not detect the mask storage box 59 and the front-end infrared sensor 48 detects the mask storage box 59, it indicates that the mask storage box 59 is excessively pushed forward due to that the mask storage box 59 is not abutted against the limiting column 5 or the like. Only when the mask storage box 59 is pushed into place, the front-end infrared sensor 48 and the rear-end infrared sensor 49 both detect the mask storage box 59, and then the motor 43 performs the door opening action, and the intelligent mechanical arm 8 performs the subsequent mask taking action. The front-end infrared sensor 48 and the rear-end infrared sensor 49 are both electrically connected with the control computer 3, and the signal is transmitted to the control computer 3.

[0086] Embodiment 3

[0087] The embodiment is based on the embodiment 1 or 2, and a bottom guide wheel 46 is arranged on the frame body 38, the bottom guide wheel 46 is rotatable and is used for supporting the mask storage box 59. That is, when the mask storage box 59 is pushed into the entrance, the mask storage box 59 is placed on the bottom guide wheel 46, and the mask storage box 59 can be more smoothly pushed into the placing space by arranging the bottom guide wheel 46. Of course, the bottom guide wheel 46 can also be arranged on the mounting seat of the side positioning mechanism 44.

[0088] Embodiment 4

[0089] The embodiment is based on the embodiment 3, and the mask bearing mechanism 19 further comprises two clamping plates 31 and a pneumatic finger 35; the pneumatic finger 35 is mounted on the bracket 33, and the two clamping plates 31 are respectively connected at two ends of the pneumatic finger 35. The pneumatic finger 35 can drive the two clamping plates 31 to move, so that the two clamping plates 31 can clamp the opposite two sides of the mask 18, and the mask 18 can be clamped from the four side edges of the mask 18.

[0090] Embodiment 5

[0091] The embodiment is based on the embodiment 4, and a code reader 16 is arranged on the machine table 11, and the code reader 16 is located above the moving path of the mask 18 and is used for reading the number of the mask 18. The mask 18 is pasted with a bar code on the edge during the transfer, and the number of the mask 18 currently detected can be obtained by scanning the bar code by the code reader 16, so as to record the detection result and storage.

[0092] In addition, a light 12 may be provided on the machine 11 so that the barcode reader 16 can scan the barcode more clearly.

[0093] The machine 11 may also be provided with a laser sensor 13 for detecting whether the mask 18 is level. The code reader 16, the light 12, and the laser sensor 13 are all controlled by the control computer 3. Furthermore, the intelligent manipulator 8 may also be provided with a laser sensor 13 to improve the accuracy of the intelligent manipulator 8 in picking up the mask.

[0094] It should be noted that all features disclosed in this specification, or steps in all methods or processes disclosed, except for mutually exclusive features and / or steps, can be combined in any manner.

[0095] Furthermore, the above-described specific embodiments are merely illustrative. Persons skilled in the art may devise various solutions based on the disclosure of the present invention, and such solutions fall within the scope of the present invention and are intended to be protected by the present invention. Persons skilled in the art should understand that the present description and drawings are intended to be illustrative and not to limit the scope of the claims. The scope of protection of the present invention is defined by the claims and their equivalents.

Claims

1. Intelligent detection and cleaning storage device for photomasks, characterized by: It comprises an outer cabinet (1), a placement rack (6), a photomask detection and cleaning machine (7), an intelligent manipulator (8), and a storage rack (9) respectively arranged inside the outer cabinet (1); the intelligent manipulator (8) can drive the photomask (18) to transfer between the placement rack (6), the photomask detection and cleaning machine (7), and the storage rack (9); The placement rack (6) includes a mounting rack (36) and a plurality of mask storage box positioning and opening devices (37) respectively arranged on the mounting rack (36); the mask storage box positioning and opening device (37) includes a frame (38), a pressing mechanism respectively arranged on the frame (38), two side positioning mechanisms (44) and a door opening mechanism; a placement space for placing a mask storage box (59) is formed between the pressing mechanism and the two side positioning mechanisms (44), the pressing mechanism is used to press the mask storage box (59) from above, and the two side positioning mechanisms (44) are used to press the mask storage box (59) from above. The side positioning mechanism (44) is used to clamp the mask storage box (59) from both sides, and the door opening mechanism is used to open the box door (57) of the mask storage box (59); the frame (38) and / or the side positioning mechanism (44) are provided with a limiting telescopic cylinder (47) and a limiting column (45) for limiting the front and rear positions of the mask storage box (59); the frame (38) is provided with a bottom guide wheel (46); the front end of the frame (38) is provided with a front infrared sensor (48), and the rear end of the frame (38) is provided with a rear infrared sensor (49); The side positioning mechanism (44) includes a mounting seat (50) provided on the frame (38) and a side guide wheel (51) provided on the mounting seat (50); a mounting groove (54) is provided on the mounting seat (50), a mounting block (52) is installed in the mounting groove (54), and a compression spring (53) is provided between the side of the mounting block (52) facing away from the photomask storage box (59) and the groove wall of the mounting groove (54); the side guide wheel (51) is provided on the mounting block (52), the mounting block (52) can move in the mounting groove (54), and the mounting block (52) can squeeze the compression spring (53) when moving; the side guide wheels (51) on the two side positioning mechanisms (44) can clamp the photomask storage box (59) from both sides; The pressing mechanism comprises a pressing rod (39) arranged on the frame (38), a pressing wheel (41) arranged at the lower end of the pressing rod (39), and a torsion spring (40) arranged on the pressing rod (39); the pressing rod (39) can rotate up and down, and can squeeze the torsion spring (40) when the pressing rod (39) rotates upward.

2. The intelligent detection, cleaning and storage device for photomasks according to claim 1, characterized in that: The photomask inspection and cleaning machine (7) comprises a machine platform (11), a photomask carrying mechanism (19) arranged on the machine platform (11) for placing the photomask (18), two detection mechanisms (17) arranged on the machine platform (11) for detecting the surface of the photomask (18), and a dry ultrasonic dust collector (15) arranged on the machine platform (11); the machine platform (11) can drive the photomask carrying mechanism (19) to move below the cleaning head of the dry ultrasonic dust collector (15); the two detection mechanisms (17) are arranged at intervals, and the machine platform (11) can drive the photomask carrying mechanism (19) to move between the two detection mechanisms (17), so that the two detection mechanisms (17) can respectively detect the front and back surfaces of the photomask (18).

3. The intelligent detection, cleaning and storage device for photomasks according to claim 2, characterized in that: The detection mechanism (17) comprises a back plate (22) having an arc-shaped groove (26), a mounting structure mounted on the arc-shaped groove (26), and a 3D camera (21) mounted on the mounting structure; The mounting structure comprises an angle adjustment plate (25) mounted on the arc groove (26), a mounting plate (23) movably connected to the angle adjustment plate (25), and a distance adjustment block (24) fixed to the angle adjustment plate (25); the 3D camera (21) is mounted on the mounting plate (23), and the angle adjustment plate (25) can move along the arc groove (26) to adjust the angle between the 3D camera (21) and the surface of the light shield (18); the distance adjustment block (24) is connected to the mounting plate (23) through a connecting component, and the connecting component can drive the mounting plate (23) to move up and down relative to the angle adjustment plate (25), thereby adjusting the distance between the 3D camera (21) and the surface of the light shield (18).

4. The intelligent detection, cleaning and storage device for photomasks according to claim 2, characterized in that: The light mask carrying mechanism (19) comprises a bracket (33) connected to the machine platform (11), at least two support rods (30) arranged on the bracket (33) for placing the light mask (18), and a clamping cylinder (34) installed on the bracket (33); both support rods (30) are provided with a limiting portion (28), and the light mask (18) is clamped between the cylinder telescopic end (29) of the clamping cylinder (34) and the limiting portion (28).

5. The intelligent detection, cleaning and storage device for photomasks according to claim 4, characterized in that: The photomask carrying mechanism (19) further comprises two clamping plates (31) arranged opposite to each other, and a pneumatic finger (35) arranged on the bracket (33) and connected to the two clamping plates (31); the pneumatic finger (35) can drive the two clamping plates (31) to move, so that the two clamping plates (31) can respectively clamp the two opposite sides of the photomask (18).

6. The intelligent detection, cleaning and storage device for photomasks according to claim 1, characterized in that: The door opening mechanism includes a motor (43) arranged on the frame (38) and a rocker arm (42) mounted on the main shaft of the motor (43).

7. The intelligent detection, cleaning and storage device for photomasks according to claim 1, characterized in that: An air purifier (2) and a control computer (3) are provided on the outer cabinet (1); the air purifier (2), the placement rack (6), the mask detection cleaning machine (7) and the intelligent manipulator (8) are all electrically connected to the control computer (3).

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