Microelectromechanical Gyroscope and Electronic Product

Abstract

The present application relates to a micromechanical gyroscope and an electronic product. The micromechanical gyroscope includes a driving structure, a detecting structure, and a connecting member. The driving structure includes a first moving member and a driving member mounted on the first moving member. The first moving member can move along a first direction or a second direction perpendicular to the first direction. The driving member is used to drive the movement of the first moving member. The detecting structure includes a second moving member and a detecting member mounted on the second moving member. The second moving member can move along a third direction or a fourth direction perpendicular to the third direction. The detecting member is used to detect the movement distance of the second moving member along the third direction or the fourth direction. There is a preset included angle between the first direction and the third direction. Among them, the driving member is mounted inside the first moving member, and the detecting member is mounted inside the second moving member, which increases the number of driving members that can be installed in the micromechanical gyroscope. When the driving voltage is the same, a larger amplitude driving can be achieved, thereby improving the sensitivity of the micromechanical gyroscope.

Description

Technical Field

[0001] This application relates to the technical field of gyroscopes, and particularly to a micromechanical gyroscope and an electronic product. Background Art

[0002] A micromechanical gyroscope is a typical angular velocity microsensor, which has a very wide application in the consumer electronics market due to its advantages such as small size, low power consumption, and convenient processing. Usually, the geometric structure of the micromechanical gyroscope is highly symmetric, the driving mode and the detection mode of the gyro are exactly the same, with high sensitivity and simple structure. However, the existing micromechanical gyroscopes are limited by the structure and spatial layout, resulting in poor sensitivity of the micromechanical gyroscopes. Summary of the Invention

[0003] This application provides a micromechanical gyroscope and an electronic product, which can improve the sensitivity of the micromechanical gyroscope.

[0004] In the first aspect of this application, a micromechanical gyroscope is provided, including: a driving structure, a detection structure, and a connecting member. The driving structure includes a first moving member and a driving member. The first moving member can move along a first direction or a second direction perpendicular to the first direction. The driving member is installed inside the first moving member and is used to drive the movement of the first moving member. The detection structure includes a second moving member and a detection member. The second moving member can move along a third direction or a fourth direction perpendicular to the third direction. The detection member is installed inside the second moving member and is used to detect the movement distance of the second moving member along the third direction or the fourth direction. There is a preset included angle between the first direction and the third direction. One end of the connecting member is connected to the first moving member, and the other end of the connecting member is connected to the second moving member.

[0005] In this application, the driving member is installed inside the first moving member, and the detection member is installed inside the second moving member, so that the driving member and the detection member can be arranged inside the micromechanical gyroscope, thereby increasing the number of driving members that can be installed in the micromechanical gyroscope. When the driving voltage is the same, a larger amplitude driving can be achieved, thereby improving the sensitivity of the micromechanical gyroscope. At the same time, the integration and utilization rate of the micromechanical gyroscope are improved.

[0006] In a possible design, the driving member includes a driving device, and the driving member is provided with a first mounting hole, and the driving device is installed in the first mounting hole;

[0007] The detection member includes a detection device, and the detection member is provided with a second mounting hole, and the detection device is installed in the second mounting hole.

[0008] In a possible design, the driving structure further includes a first circumferential beam, and the detection structure further includes a second circumferential beam;

[0009] The driving member is connected to the first moving member through the first circumferential beam, and the driving member is connected to the second moving member through the second circumferential beam.

[0010] In a possible design, the driving structure includes a first radial beam, the detecting structure includes a second radial beam, and the microelectromechanical gyroscope further includes a fixing member;

[0011] One end of the fixing member is connected to the driving member through the first radial beam, and the other end of the fixing member is connected to the detecting member through the second radial beam.

[0012] In a possible design, along the moving direction of the first moving member, the number of driving members is at least two, and along the moving direction of the second moving member, the number of detecting members is at least two;

[0013] Adjacent driving members are connected to the fixing member through the first radial beam, and adjacent detecting members are connected to the fixing member through the second radial beam.

[0014] In a possible design, the number of the first moving members is multiple, and along the moving direction of the first moving member, the first moving members are symmetrically arranged;

[0015] The number of the second moving members is multiple, and along the moving direction of the second moving member, the second moving members are symmetrically arranged;

[0016] Along the circumferential direction of the microelectromechanical gyroscope, at least one second moving member is arranged between adjacent first moving members.

[0017] In a possible design, along the circumferential direction of the microelectromechanical gyroscope, the moving directions of the first moving member and the second moving member are evenly distributed.

[0018] In a possible design, the mass of the first moving member is greater than the mass of the second moving member.

[0019] In a possible design, the driving device is a capacitive structure and / or an inductive structure, and the detecting device is a capacitive structure and / or an inductive structure.

[0020] The second aspect of the present application provides an electronic product, including:

[0021] A body and the microelectromechanical gyroscope described in any one of the above, and the microelectromechanical gyroscope is installed on the body.

[0022] In the present application, the microelectromechanical gyroscope can calculate the angular velocity of the electronic product to facilitate the control of the electronic product. The microelectromechanical gyroscope has high sensitivity, thereby improving the use performance of the electronic product.

[0023] It should be understood that the above general description and the following detailed description are only exemplary and do not limit the present application. Description of the Drawings

[0024] Figure 1 Schematic diagram of the structure of the MEMS gyroscope provided by this application in an embodiment;

[0025] Figure 2 is Figure 1 Schematic diagram of the structure of the MEMS gyroscope in the driving mode in ;

[0026] Figure 3 is Figure 1 Schematic diagram of the structure of the MEMS gyroscope in the detection mode in ;

[0027] Figure 4 is Figure 1 Enlarged view of part I in ;

[0028] Figure 5 is Figure 1 Enlarged view of part II in.

[0029] Reference numerals:

[0030] 1 - Driving structure;

[0031] 11 - First moving part;

[0032] 12 - Driving member;

[0033] 121 - First mounting hole;

[0034] 13 - First radial beam;

[0035] 14 - First circumferential beam;

[0036] 2 - Detection structure;

[0037] 21 - Second moving part;

[0038] 22 - Detection member;

[0039] 221 - Second mounting hole;

[0040] 23 - Second radial beam;

[0041] 24 - Second circumferential beam;

[0042] 3 - Connecting member;

[0043] 4 - Fixing member.

[0044] The accompanying drawings here are incorporated into the specification and form a part of this specification, showing embodiments consistent with this application, and are used together with the specification to explain the principles of this application. Detailed implementation manners

[0045] To better understand the technical solution of the present application, the embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0046] It should be clear that the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope of protection of the present application.

[0047] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The singular forms of "a", "the" and "said" used in the embodiments of the present application and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise.

[0048] It should be understood that the term " / and" used herein is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this article generally represents an "or" relationship between the preceding and following associated objects.

[0049] It should be noted that the orientation terms such as "upper", "lower", "left", and "right" described in the embodiments of the present application are described from the angles shown in the drawings, and should not be construed as a limitation on the embodiments of the present application. In addition, in the context, it should also be understood that when it is mentioned that an element is connected "above" or "below" another element, it can not only be directly connected "above" or "below" another element, but also be indirectly connected "above" or "below" another element through an intermediate element.

[0050] The first aspect of the embodiments of the present application provides a micromachined gyroscope, such as Figure 1As shown, the micromechanical gyroscope includes: a driving structure 1 and a detecting structure 2; the driving structure 1 includes a first moving member 11 and a driving member 12, the first moving member 11 can move along a first direction X or a second direction Y perpendicular to the first direction X, the driving member 12 is mounted on the first moving member 11 for driving the movement of the first moving member 11, the number of the first moving members 11 is plural, and the first moving members 11 are symmetrically arranged along the movement direction of the first moving member 11; the detecting structure 2 includes a second moving member 21 and a detecting member 22, the second moving member 21 can move along a third direction L or a fourth direction K perpendicular to the third direction L, the detecting member 22 is mounted on the second moving member 21 for detecting the movement distance of the second moving member 21 along the third direction L or the fourth direction K, the number of the second moving members 21 is plural, and the second moving members 21 are symmetrically arranged along the movement direction of the second moving member 21; and at least one second moving member 21 is arranged between adjacent first moving members 11 along the circumferential direction of the micromechanical gyroscope.

[0051] In this embodiment, both the first moving member 11 and the second moving member 21 are arranged in pairs, and both the first moving member 11 and the second moving member 21 can be arranged in a single group or multiple groups. The present application does not make special limitations on the number of the first moving member 11 and the second moving member 21. When both the first moving member 11 and the second moving member 21 are two groups, there are a first direction X, a second direction Y, a third direction L and a fourth direction K. When the first moving member 11 and the second moving member 21 are multiple groups, the movement directions of the first moving member 11 and the second moving member 21 increase accordingly, but it is necessary to satisfy that the movement directions of the first moving member 11 and the second moving member 21 are evenly distributed along the circumferential direction of the micromechanical gyroscope to improve the working stability of the micromechanical gyroscope. Any of the following embodiments takes two groups of the first moving members 11 and two groups of the second moving members 21 as an example. At this time, the first direction X is the 0° direction, the second direction Y is the 90° direction, the third direction is the 45° direction, and the fourth direction is the 145° direction.

[0052] Among them, in this embodiment, the micromechanical gyroscope has a driving mode and a detecting mode, such as Figure 2As shown, when the micromachined gyroscope is in the driving mode, the driving member 12 can control the first moving member 11 to move along the first direction X and the second direction Y, and generate Coriolis forces along the first direction X and the second direction Y. When the micromachined gyroscope receives an externally applied angular velocity, according to the Coriolis principle, the angular velocity and the Coriolis forces act together and generate a resultant Coriolis force along the third direction L and the fourth direction K. The resultant Coriolis force will force the second moving member 21 to move along the third direction L and the fourth direction K, thereby activating the detection mode of the micromachined gyroscope. At this time, the detection member 22 mounted on the second moving member 21 will detect the moving distance of the second moving member 21 and transmit the detection result to a calculation system (not shown in the figure). The calculation system calculates the magnitude of the angular velocity applied to the micromachined gyroscope based on the received data. The first moving member 11 and the second moving member 21 are both symmetrically arranged along the moving direction, which can increase the smoothness of the movement of the first moving member 11 and the second moving member 21, and prevent the micromachined gyroscope from yawing due to the movement of the first moving member 11 or the second moving member 21 on one side of the micromachined gyroscope, thereby increasing the smoothness of the micromachined gyroscope. Along the circumferential direction of the micromachined gyroscope, at least one second moving member 21 is provided between adjacent first moving members 11, that is, the first moving members 11 and the second moving members 21 are arranged at intervals, so that both the first moving members 11 and the second moving members 21 can participate in the transmission of the Coriolis force, thereby being able to greatly improve the Coriolis gain and further improve the mechanical sensitivity.

[0053] In addition, in this embodiment, when the micromachined gyroscope only has the driving mode, the first moving member 11 moves along the first direction X and the second direction Y and drives the second moving member 21 to move along the circumferential direction of the micromachined gyroscope. At this time, the detection member 22 is in a non-displacement state, preventing the detection member 22 from moving and calculating an incorrect angular velocity; when the detection mode of the micromachined gyroscope is activated, the second moving member 21 moves along the third direction L and the fourth direction K and drives the first moving member 11 to move along the circumferential direction of the micromachined gyroscope. At this time, the driving member 12 is in a non-displacement state, preventing the driving member 12 from interfering with the movement of the first moving member 11 and reducing the smoothness of the movement of the micromachined gyroscope. Therefore, when the micromachined gyroscope only has the driving mode, the detection member 22 is in a non-displacement state, and when the detection mode of the micromachined gyroscope is activated, the driving member 12 is in a non-displacement state, thereby reducing the error of the measurement structure of the driving member 12 and improving the accuracy of the movement directions of the first moving member 11 and the second moving member 21, reducing the orthogonality error of the first moving member 11 and the second moving member 21, and further improving the stability of the movement of the micromachined gyroscope and the accuracy of the detection result.

[0054] Specifically, as Figure 1 shown, the driving member 12 is mounted inside the first moving member 11; the detection member 22 is mounted inside the second moving member 21; as Figure 4As shown, the micromechanical gyroscope further includes a connecting member 3. One end of the connecting member 3 is connected to the first moving member 11, and the other end of the connecting member 3 is connected to the second moving member 21.

[0055] In this embodiment, the driving member 12 is installed inside the first moving member 11, and the detecting member 22 is installed inside the second moving member 21, so that both the driving member 12 and the detecting member 22 can be arranged inside the micromechanical gyroscope, thereby increasing the number of driving members 12 that can be installed in the micromechanical gyroscope. When the driving voltage is the same, a larger amplitude driving can be achieved, thereby improving the sensitivity of the micromechanical gyroscope. At the same time, the integration and utilization rate of the micromechanical gyroscope are improved. Among them, as Figure 4 shown, along the length direction of the connecting member 3, both ends of the connecting member 3 can undergo elastic deformation. When the first moving member 11 or the second moving member 21 moves, the connecting member 3 can be stretched along the length direction to prevent the first moving member 11 and the second moving member 21 from interfering with each other, thereby improving the stability of the movement of the first moving member 11 and the second moving member 21.

[0056] In addition, the mass of the first moving member 11 is greater than the mass of the second moving member 21. During the processing, installation and use of the micromechanical gyroscope, the Coriolis gain can be greatly improved by reducing the mass of the detecting mass block and / or increasing the mass of the driving mass block, thereby improving the mechanical sensitivity.

[0057] Specifically, as Figure 1 shown, the driving member 12 includes a driving device. The driving member 12 is provided with a first mounting hole 121, and the driving device is installed in the first mounting hole 121; the detecting member 22 includes a detecting device. The detecting member 22 is provided with a second mounting hole 221, and the detecting device is installed in the second mounting hole 221.

[0058] In this embodiment, the driving device is used to control the movement of the first moving member 11, and the detecting device is used to detect the distance that the second moving member 21 moves along the third direction L or the fourth direction K. The driving device is installed in the first mounting hole 121, and the detecting member 22 is provided with a second mounting hole 221, which simplifies the installation structure of the driving device and the detecting device, facilitating the installation of the driving device and the detecting device.

[0059] Among them, in this embodiment, the driving member 12 is provided with a plurality of first mounting holes 121, and the detecting member 22 is provided with a plurality of second mounting holes 221 to increase the installation positions of the driving device and the detecting device, improve the layout area of the driving device and the detecting device, thereby increasing the driving amplitude and the detection signal, and further improving the sensitivity of the micromechanical gyroscope.

[0060] More specifically, the driving device is a capacitive structure and / or an inductive structure, and the detecting device is a capacitive structure and / or an inductive structure.

[0061] In this embodiment, the implementation manners of the driving device and the detecting device include, but are not limited to, a capacitive structure and an inductive structure. The present application does not make special limitations on the specific implementation manners of the driving device and the detecting device, so as to increase the flexibility of the structures of the driving device and the detecting device, and further increase the applicable scope of the driving device and the detecting device. In this embodiment, taking the driving device and the detecting device both being capacitive structures as an example, when there is only a driving mode in the microelectromechanical gyroscope, the distance between the positive electrode structure and the negative electrode structure of the driving capacitor of the driving device changes, so that the first moving member 11 moves along the first direction X and the second direction Y; when the microelectromechanical gyroscope receives an angular velocity applied from the outside, the second moving member 21 moves along the third direction L and the fourth direction K under the action of the Coriolis resultant force, so that the distance between the positive electrode structure and the negative electrode structure of the detecting capacitor changes to detect the moving distance of the second moving member 21. The detecting capacitor transmits the capacitance change value to the calculation system, and the calculation system calculates the magnitude of the angular velocity applied to the microelectromechanical gyroscope through the received value. Therefore, setting the driving device and the detecting device as a capacitive structure and / or an inductive structure can facilitate the control of the movements of the first moving member 11 and the second moving member 21, and at the same time facilitate the detection of the moving distance of the second moving member 21, thereby simplifying the structures of the driving device and the detecting device, and further simplifying the structure of the microelectromechanical gyroscope and reducing the installation space of the microelectromechanical gyroscope.

[0062] In any of the above embodiments, as Figure 1 shown, the driving structure 1 includes a plurality of first radial beams 13, the detecting structure 2 includes a plurality of second radial beams 23, the microelectromechanical gyroscope further includes a plurality of fixing members 4, one end of the fixing member 4 is connected to the driving member 12 through the first radial beam 13, and the other end of the fixing member 4 is connected to the detecting member 22 through the second radial beam 23; along the movement direction of the first moving member 11, adjacent driving members 12 are connected to the fixing member 4 through the first radial beam 13, and along the movement direction of the second moving member 21, adjacent detecting members 22 are connected to the fixing member 4 through the second radial beam 23. The driving structure 1 further includes a plurality of first circumferential beams 14, and the detecting structure 2 further includes a plurality of second circumferential beams 24; the driving member 12 is connected to the first moving member 11 through the first circumferential beam 14, and the driving member 12 is connected to the second moving member 21 through the second circumferential beam 24. Among them, as Figure 5As shown, along the movement direction of the first moving member 11, the first radial beam 13 can be deformed, and along the direction perpendicular to the movement of the first moving member 11, the first circumferential beam 14 can be deformed; along the movement direction of the second moving member 21, the second radial beam 23 can be deformed, and along the direction perpendicular to the movement of the second moving member 21, the second circumferential beam 24 can be deformed, avoiding damage to the first radial beam 13, the first circumferential beam 14, the second radial beam 23 and the second circumferential beam 24 under a large acting force, thereby prolonging the service life of the first radial beam 13, the first circumferential beam 14, the second radial beam 23 and the second circumferential beam 24, increasing the movement stability of the first moving member 11 and the second moving member 21, and further increasing the service life and working stability of the micro-machined gyroscope.

[0063] In a second aspect of the embodiments of the present application, an electronic product is provided, which includes: a body and the micro-machined gyroscope described in any one of the above embodiments, and the micro-machined gyroscope is installed on the body.

[0064] During the operation of the electronic product, the micro-machined gyroscope can calculate the angular velocity of the electronic product to facilitate the control of the electronic product, and the micro-machined gyroscope has high sensitivity, thereby improving the use performance of the electronic product.

[0065] The above are only the preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A micromechanical gyroscope, characterized in that, The micromachined gyroscope includes: A driving structure (1), the driving structure (1) includes a first moving member (11) and a driving member (12), the first moving member (11) can move along a first direction (X) or a second direction (Y) perpendicular to the first direction (X), and the driving member (12) is installed inside the first moving member (11) for driving the movement of the first moving member (11); A detection structure (2), the detection structure (2) includes a second moving member (21) and a detection member (22), the second moving member (21) can move along a third direction (L) or a fourth direction (K) perpendicular to the third direction (L), and the detection member (22) is installed inside the second moving member (21) for detecting the movement distance of the second moving member (21) along the third direction (L) or the fourth direction (K); There is a preset angle between the first direction (X) and the third direction (L); A connecting member (3), one end of the connecting member (3) is connected to the first moving member (11), and the other end of the connecting member (3) is connected to the second moving member (21); The driving structure (1) includes a first circumferential beam (14), the detection structure (2) includes a second circumferential beam (24), the driving member (12) is connected to the first moving member (11) through the first circumferential beam (14), and the driving member (12) is connected to the second moving member (21) through the second circumferential beam (24); Along the direction perpendicular to the movement of the first moving member (11), the first circumferential beam (14) can be deformed; along the direction perpendicular to the movement of the second moving member (21), the second circumferential beam (24) can be deformed.

2. The micromechanical gyroscope according to claim 1, characterized in that, The driving member (12) includes a driving device, and the driving member (12) is provided with a first mounting hole (121), and the driving device is installed in the first mounting hole (121); The detection member (22) includes a detection device, and the detection member (22) is provided with a second mounting hole (221), and the detection device is installed in the second mounting hole (221).

3. The micromechanical gyroscope according to claim 1, characterized in that, The driving structure (1) further includes a first radial beam (13), the detection structure (2) further includes a second radial beam (23), and the micromachined gyroscope further includes a fixing member (4); One end of the fixing member (4) is connected to the driving member (12) through the first radial beam (13), and the other end of the fixing member (4) is connected to the detection member (22) through the second radial beam (23).

4. The micromechanical gyroscope according to claim 3, characterized in that, Along the movement direction of the first moving member (11), the number of the driving members (12) is at least two, and along the movement direction of the second moving member (21), the number of the detection members (22) is at least two; Adjacent driving members (12) are connected to the fixing member (4) through the first radial beam (13), and adjacent detection members (22) are connected to the fixing member (4) through the second radial beam (23).

5. The micromechanical gyroscope according to any one of claims 1 to 4, characterized in that, The number of the first moving parts (11) is plural, and the first moving parts (11) are symmetrically arranged along the moving direction of the first moving parts (11). The number of the second moving parts (21) is plural, and the second moving parts (21) are symmetrically arranged along the moving direction of the second moving parts (21). At least one of the second moving parts (21) is arranged between adjacent first moving parts (11) along the circumferential direction of the micromechanical gyroscope.

6. The micromechanical gyroscope according to claim 5, characterized in that, Along the circumferential direction of the micromechanical gyroscope, the moving directions of the first moving parts (11) and the moving directions of the second moving parts (21) are evenly distributed.

7. The micromechanical gyroscope according to any one of claims 1 to 4, characterized in that, The mass of the first moving parts (11) is greater than the mass of the second moving parts (21).

8. The micromechanical gyroscope according to claim 2, characterized in that, The driving device is a capacitive structure and / or an inductive structure, and the detecting device is a capacitive structure and / or an inductive structure.

9. An electronic product, characterized in that, The electronic product includes: A body; The micromechanical gyroscope according to any one of claims 1 to 8, and the micromechanical gyroscope is installed on the body.

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