Impedance adjustment method, radio frequency circuit, and radio frequency power supply device

Abstract

The application discloses an impedance adjustment method, a radio frequency circuit and a radio frequency power supply device. The radio frequency power supply device is used for outputting a radio frequency signal to a load. The radio frequency power supply device comprises an impedance detection module and an impedance matching module. The impedance adjustment method comprises the following steps: obtaining output power and reflected power of the radio frequency signal, and determining a reflection coefficient of the load according to the output power and the reflected power; when the reflection coefficient is outside a preset reflection coefficient interval, obtaining a voltage value detected by the impedance detection module, and adjusting an impedance value of the impedance matching module according to the voltage value detected by the impedance detection module and an impedance preset table, so as to adjust the reflection coefficient to be within the preset reflection coefficient interval. When the impedance of the impedance matching module is not matched with the load impedance, the impedance of the impedance matching module is adjusted in real time, so that the impedance matching module is matched with the load impedance, the output efficiency of the radio frequency power supply device is improved, and energy consumption is reduced.

Description

Technical Field

[0001] This invention relates to the field of medical devices, and in particular to an impedance adjustment method, a radio frequency circuit, and a radio frequency power supply device. Background Technology

[0002] The impedance of an RF power supply is typically set at the factory. However, different loads have different impedances. When an RF power supply is connected to different loads, an impedance mismatch can occur, causing the RF power supply's output power to fall short of the load's requirements. Existing RF power supplies detect the load impedance and then adjust the output power accordingly to meet the load's power needs. However, due to the impedance mismatch between the RF power supply and the load, the actual output efficiency of the RF power supply remains relatively low, resulting in significant energy consumption. Summary of the Invention

[0003] The main objective of this invention is to provide an impedance adjustment method, a radio frequency circuit, and a radio frequency power supply device, which aim to adjust the impedance in real time to match the load impedance.

[0004] To achieve the above objectives, this invention proposes an impedance adjustment method for an RF power supply device. The RF power supply device outputs an RF signal to a load. The RF power supply device includes a power detection module, an impedance detection module, and an impedance matching module. The impedance adjustment method includes:

[0005] The output power and reflected power of the radio frequency signal are obtained by the power detection module, and the reflection coefficient of the load is determined based on the output power and the reflected power.

[0006] When the reflection coefficient is outside the preset reflection coefficient range, the equivalent internal resistance of the RF power supply device is obtained, the load impedance is obtained through the impedance detection module, and the impedance adjustment direction of the impedance matching module is determined based on the equivalent internal resistance of the RF power supply device and the load impedance.

[0007] Adjust the impedance value of the impedance matching module according to the impedance adjustment direction until the reflection coefficient is adjusted to within the preset reflection coefficient range.

[0008] In one embodiment, when the reflection coefficient is outside the preset reflection coefficient range, the equivalent internal resistance of the RF power supply device is obtained, the load impedance is obtained through the impedance detection module, and the impedance adjustment direction of the impedance matching module is determined based on the equivalent internal resistance of the RF power supply device and the load impedance. Specifically, this involves:

[0009] When the reflection coefficient is outside the preset reflection coefficient range, the equivalent internal resistance of the RF power supply device is obtained, and the load impedance is obtained through the impedance detection module.

[0010] The equivalent internal resistance of the RF power supply is compared with the load impedance. If the load impedance is greater than the equivalent internal resistance of the RF power supply, the impedance of the impedance matching module is adjusted to increase the equivalent internal resistance of the RF power supply.

[0011] If the load impedance is less than the equivalent internal resistance of the RF power supply, the impedance of the impedance matching module is adjusted to reduce the equivalent internal resistance of the RF power supply.

[0012] In one embodiment, adjusting the impedance value of the impedance matching module according to the impedance adjustment direction until the reflection coefficient is adjusted to within a preset reflection coefficient range specifically involves:

[0013] When reducing the impedance of the impedance matching module, the impedance value of the impedance matching module is reduced sequentially according to the preset impedance interval until the reflection coefficient is adjusted to within the preset reflection coefficient range;

[0014] When increasing the impedance of the impedance matching module, the impedance value of the impedance matching module is increased sequentially according to the preset impedance interval until the reflection coefficient is adjusted to within the preset reflection coefficient range.

[0015] The present invention also provides a radio frequency circuit for a radio frequency power supply device, the radio frequency circuit comprising:

[0016] A control module, comprising an input terminal, an output terminal, a first feedback receiver, a second feedback receiver, and a control output terminal, wherein the input terminal of the control module is used for connection to a host computer; and

[0017] Radio frequency output module, the radio frequency output module includes:

[0018] A radio frequency (RF) generator module, wherein the input terminal of the RF generator module is connected to the output terminal of the control module, and the RF generator module is used to output RF signals under the control of the control module;

[0019] A power detection module has an input terminal, an output terminal, and a feedback terminal. The input terminal of the power detection module is connected to the output terminal of the radio frequency generation module, and the feedback terminal of the power detection module is connected to the first feedback receiving terminal of the control module. The power detection module is used to detect the output power and reflected power of the radio frequency generation module.

[0020] An impedance detection module has an input terminal, an output terminal, and a feedback terminal. The input terminal of the impedance detection module is connected to the output terminal of the power detection module, and the feedback terminal of the impedance detection module is connected to the second feedback receiving terminal of the control module. The impedance detection module is used to detect the load impedance.

[0021] An impedance matching module has an input terminal, an output terminal, and a controlled terminal. The input terminal of the impedance matching module is connected to the output terminal of the impedance detection module, the output terminal of the impedance matching module is used to connect to a load, and the controlled terminal of the impedance matching module is connected to the control output terminal of the control module.

[0022] The control module is used to determine the reflection coefficient of the load based on the output power and reflected power detected by the power detection module. When the reflection coefficient is outside the preset reflection coefficient range, the control module determines the impedance adjustment direction of the impedance matching module based on the equivalent internal resistance of the RF power supply device and the load impedance, and adjusts the impedance value of the impedance matching module according to the impedance adjustment direction until the reflection coefficient is adjusted to within the preset reflection coefficient range. The control module is also used to adjust the power of the RF signal output by the corresponding RF generation module based on the output power and reflected power.

[0023] In one embodiment, the number of radio frequency output modules is multiple.

[0024] In one embodiment, the power detection module includes an output power detection module and a reflected power detection module;

[0025] The input terminal of the output power detection module is connected to the output terminal of the radio frequency generation module, and the output terminal of the output power detection module is connected to the control module. The output power detection module is used to convert the radio frequency signal output by the radio frequency generation module into a corresponding electrical signal and output it to the control module.

[0026] The input terminal of the reflected power detection module is connected to the input terminal of the impedance detection module, and the output terminal of the output power detection module is connected to the control module. The reflected power detection module is used to convert the reflected radio frequency signal into a corresponding electrical signal and output it to the control module.

[0027] In one embodiment, the reflected power detection module includes a detector circuit and a rectifier circuit;

[0028] The input terminal of the detector circuit is the input terminal of the reflected power detection circuit, the output terminal of the detector circuit is connected to the input terminal of the rectifier circuit, and the output terminal of the rectifier circuit is the output terminal of the reflected power detection circuit. The detector circuit is used to detect the received radio frequency signal, and the rectifier circuit is used to convert the AC signal into a DC signal for output.

[0029] In one embodiment, the output power detection module includes a detection circuit and a rectifier circuit;

[0030] The input terminal of the detector circuit is the input terminal of the output power detection circuit, the output terminal of the detector circuit is connected to the input terminal of the rectifier circuit, and the output terminal of the rectifier circuit is the output terminal of the output power detection circuit. The detector circuit is used to detect the received radio frequency signal, and the rectifier circuit is used to convert the AC signal into a DC signal for output.

[0031] In one embodiment, the impedance matching module includes N impedance adjustment circuits, each impedance adjustment circuit having an input terminal, an output terminal, and a controlled terminal;

[0032] When N is 1, the input terminal of the impedance adjustment circuit is the input terminal of the impedance matching module, the output terminal of the impedance adjustment circuit is the output terminal of the impedance matching module, and the controlled terminal of the impedance adjustment circuit is connected to the control module.

[0033] When N is greater than 1, the N impedance adjustment circuits are electrically connected;

[0034] The control module is used to adjust the impedance of the corresponding impedance adjustment circuit to adjust the reflection coefficient to a preset reflection coefficient range.

[0035] In one embodiment, the radio frequency output module further includes an isolation circuit;

[0036] The input terminal of the isolation circuit is connected to the output terminal of the impedance matching module in a one-to-one correspondence. The output terminal of the isolation circuit is used to connect to the load. The isolation circuit is used to prevent signal interference between the radio frequency circuit and the load, and to suppress electromagnetic interference generated by the radio frequency circuit.

[0037] The present invention also provides a radio frequency power supply device, the radio frequency power supply device including a protection circuit and a radio frequency circuit as described above;

[0038] The input terminal of the protection circuit is used to connect to a power source, and the output terminal of the protection circuit is connected to the input terminal of the radio frequency circuit. The radio frequency circuit has multiple output terminals, which are used to connect to multiple loads.

[0039] This invention determines impedance matching by using the reflection coefficient, determines the impedance adjustment direction by real-time monitoring of the load impedance using an impedance detection module, and sequentially configures the impedance adjustment circuit according to the impedance preset table based on the impedance adjustment direction until the reflection coefficient is adjusted to within the preset reflection coefficient range. This invention also adjusts the impedance of the impedance matching module in real-time when there is a mismatch between the impedance of the impedance matching module and the load impedance, thereby matching the impedance of the impedance matching module with the load impedance, improving the output efficiency of the RF power supply device, and reducing energy consumption. Attached Figure Description

[0040] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0041] Figure 1 This is a flowchart illustrating the steps of the impedance adjustment method of the present invention;

[0042] Figure 2 This is a schematic diagram of the structure of an embodiment of the radio frequency circuit of the present invention;

[0043] Figure 3 This is a schematic diagram of an embodiment of the power detection circuit of the present invention;

[0044] Figure 4 This is a schematic diagram of an embodiment of the impedance adjustment circuit of the present invention;

[0045] Figure 5 This is a schematic diagram of the structure of the radio frequency power supply device of the present invention.

[0046] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0047] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0048] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0049] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, if the word "and / or" appears throughout the text, it means including three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution that simultaneously satisfies A and B. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0050] Reference Figure 1 This invention proposes an impedance adjustment method for an RF power supply device. The RF power supply device outputs RF signals to a load and includes a power detection module, an impedance detection module, and an impedance matching module. The impedance adjustment method includes:

[0051] S100: The output power and reflected power of the radio frequency signal are obtained by the power detection module, and the reflection coefficient of the load is determined based on the output power and the reflected power;

[0052] S200: When the reflection coefficient is outside the preset reflection coefficient range, obtain the equivalent internal resistance of the RF power supply device, obtain the load impedance through the impedance detection module, and determine the impedance adjustment direction of the impedance matching module based on the equivalent internal resistance of the RF power supply device and the load impedance.

[0053] S300: Adjust the impedance value of the impedance matching module according to the impedance adjustment direction until the reflection coefficient is adjusted to within the preset reflection coefficient range.

[0054] When an RF power supply is connected to a load, the reflection coefficient varies depending on the impedance of the load. A power detection module acquires the output power and reflected power of the RF signal to determine the load's reflection coefficient. If the reflection coefficient is outside a preset range, it indicates a mismatch between the RF power supply's equivalent internal resistance and the load impedance, requiring adjustment. An impedance detection module determines the load impedance by detecting the voltage or current value when the load is connected and determines the impedance adjustment direction of the impedance matching module based on the RF power supply's equivalent internal resistance and the load impedance. The inductor and capacitor values ​​in the impedance matching module are adjusted according to the determined direction, thereby adjusting the RF power supply's equivalent internal resistance until the reflection coefficient is adjusted to within the preset range. At this point, impedance matching between the RF power supply and the load is achieved.

[0055] This invention determines impedance matching by real-time detection of the reflection coefficient, determines the impedance adjustment direction by detecting the load impedance through an impedance detection module, and adjusts the impedance of the impedance adjustment circuit according to the impedance adjustment direction until the reflection coefficient is adjusted to within a preset reflection coefficient range. This invention also adjusts the impedance of the impedance matching module in real time when the equivalent internal resistance of the RF power supply device does not match the load impedance, thus ensuring impedance matching between the RF power supply device and the load. This allows the output efficiency of the RF power supply device to remain within a high range when connected to different loads, reducing energy consumption.

[0056] In one embodiment, when the reflection coefficient is outside the preset reflection coefficient range, the equivalent internal resistance of the RF power supply device is obtained, the load impedance is obtained through the impedance detection module, and the impedance adjustment direction of the impedance matching module is determined based on the equivalent internal resistance of the RF power supply device and the load impedance. Specifically, this involves:

[0057] When the reflection coefficient is outside the preset reflection coefficient range, the equivalent internal resistance of the RF power supply device is obtained, and the load impedance is obtained through the impedance detection module.

[0058] The equivalent internal resistance of the RF power supply is compared with the load impedance. If the load impedance is greater than the equivalent internal resistance of the RF power supply, the impedance of the impedance matching module is adjusted to increase the equivalent internal resistance of the RF power supply.

[0059] If the load impedance is less than the equivalent internal resistance of the RF power supply, the impedance of the impedance matching module is adjusted to reduce the equivalent internal resistance of the RF power supply.

[0060] The load impedance can be determined by consulting an impedance preset table. An impedance preset table maps voltage values ​​to load impedance values ​​or current values ​​to load impedance values; each voltage or current value corresponds to a unique load impedance value. When a load is connected to the RF power supply, the current or voltage in the circuit changes. The impedance detection module can determine the load impedance by detecting the voltage or current value when the load is connected and consulting the impedance preset table based on the detected value. Alternatively, the load impedance value can be calculated directly from the detected voltage or current value. The equivalent internal resistance of the RF power supply is then compared to the load impedance to determine the direction of impedance adjustment.

[0061] This embodiment makes it easier to detect load impedance by converting the direct detection of load impedance into the detection of current or voltage.

[0062] In one embodiment, adjusting the impedance value of the impedance matching module according to the impedance adjustment direction until the reflection coefficient is adjusted to within a preset reflection coefficient range specifically involves:

[0063] When reducing the impedance of the impedance matching module, the impedance value of the impedance matching module is reduced sequentially according to the preset impedance interval until the reflection coefficient is adjusted to within the preset reflection coefficient range;

[0064] When increasing the impedance of the impedance matching module, the impedance value of the impedance matching module is increased sequentially according to the preset impedance interval until the reflection coefficient is adjusted to within the preset reflection coefficient range.

[0065] When it is necessary to reduce the impedance value of the impedance matching module, the impedance value of the impedance matching module is reduced sequentially according to the preset impedance interval, thereby reducing the equivalent internal resistance of the RF power supply device until the reflection coefficient is adjusted to within the preset reflection coefficient range. At this time, the RF power supply device and the load achieve impedance matching.

[0066] When it is necessary to increase the impedance value of the impedance matching module, the impedance value of the impedance matching module is increased sequentially according to the preset impedance interval, thereby increasing the equivalent internal resistance of the RF power supply device until the reflection coefficient is adjusted to within the preset reflection coefficient range. At this time, the RF power supply device and the load achieve impedance matching.

[0067] Specifically, the preset impedance interval is set as follows: if the voltage value detected by the impedance detection module differs significantly from the preset voltage value, or the current value detected by the impedance detection module differs significantly from the preset current value, a larger preset impedance interval is set; if the voltage value detected by the impedance detection module differs significantly from the preset voltage value, or the current value detected by the impedance detection module differs significantly from the preset current value, a smaller preset impedance interval is selected.

[0068] Determining the load impedance value directly based on the detected voltage or current value may be inaccurate. In this embodiment, the impedance value of the impedance matching circuit is gradually adjusted according to the preset impedance interval until the reflection coefficient is adjusted to within the preset reflection coefficient range, making the impedance adjustment more accurate and efficient.

[0069] The present invention also provides a radio frequency circuit for a radio frequency power supply device, the radio frequency circuit including a control module 100 and a radio frequency output module 200.

[0070] The RF output module 200 includes an RF generation module 210, a power detection module 220, an impedance detection module 230, and an impedance matching module 240.

[0071] The control module 100 has an input terminal, an output terminal, a first feedback receiving terminal, a second feedback receiving terminal, and a control output terminal. The input terminal of the control module 100 is used to connect to a host computer.

[0072] The input terminal of the radio frequency generator module 210 is connected to the output terminal of the control module 100. The radio frequency generator module 210 is used to output radio frequency signals under the control of the control module 100.

[0073] The power detection module 220 has an input terminal, an output terminal, and a feedback terminal. The input terminal of the power detection module 220 is connected to the output terminal of the radio frequency generation module 210, and the feedback terminal of the power detection module 220 is connected to the first feedback receiving terminal of the control module 100. The power detection module 220 is used to detect the output power and reflected power of the radio frequency generation module 210.

[0074] The impedance detection module 230 has an input terminal, an output terminal, and a feedback terminal. The input terminal of the impedance detection module 230 is connected to the output terminal of the power detection module 220, and the feedback terminal of the impedance detection module 230 is connected to the second feedback receiving terminal of the control module 100. The impedance detection module 230 is used to detect the load impedance.

[0075] Impedance matching module 240 has an input terminal, an output terminal, and a controlled terminal. The input terminal of impedance matching module 240 is connected to the output terminal of impedance detection module 230, the output terminal of impedance matching module 240 is used to connect to the load, and the controlled terminal of impedance matching module 240 is connected to the control output terminal of control module 100.

[0076] The control module 100 is used to determine the reflection coefficient of the load based on the output power and reflected power detected by the power detection module. When the reflection coefficient is outside the preset reflection coefficient range, the control module 100 determines the impedance adjustment direction of the impedance matching module based on the equivalent internal resistance of the RF power supply device and the load impedance, and adjusts the impedance value of the impedance matching module according to the impedance adjustment direction until the reflection coefficient is adjusted to within the preset reflection coefficient range. The control module 100 is also used to adjust the power of the RF signal output by the corresponding RF generation module 210 based on the output power and reflected power.

[0077] The power detection module 40 uses a balun circuit.

[0078] When an RF power supply is connected to different loads, the reflection coefficients vary due to the different impedances of the loads. A power detection module acquires the output power and reflected power of the RF signal to determine the load's reflection coefficient. When the reflection coefficient is outside a preset range, it indicates a mismatch between the RF power supply's equivalent internal resistance and the load impedance, requiring adjustment. An impedance detection module determines the load impedance by detecting the voltage or current value when the load is connected and determines the impedance adjustment direction of the impedance matching module based on the RF power supply's equivalent internal resistance and the load impedance. The impedance value of the impedance matching module is adjusted at preset impedance intervals according to the determined adjustment direction, thereby adjusting the RF power supply's equivalent internal resistance until the reflection coefficient is adjusted to within the preset range. At this point, impedance matching between the RF power supply and the load is achieved.

[0079] The power detection module 220 converts the received RF signal output from the RF generator module 210 and the RF signal reflected back from the impedance matching module into voltage signals and outputs them to the control module 100 to determine the output power and reflected power. The control module 100 calculates the difference between the output power and the reflected power to determine the load absorbed power. When the load absorbed power is greater than the preset power, it indicates that the RF power output from the RF circuit to the load is too high, and the control module 100 controls the RF generator module 210 to output a lower-power RF signal. When the load absorbed power is less than the preset power, it indicates that the RF power output from the RF circuit to the load is too low, and the control module 210 controls the RF generator module 210 to output a higher-power RF signal to keep the RF signal power output by the RF generator module 210 constant.

[0080] The RF output module 200 also includes an amplifier, the input of which is connected to the output of the RF generator module 210, and the output of which is connected to the input of the power detection module 220. When the RF power supply is connected to different loads, the control module 100 can adjust the power of the RF signal actually output to the load by controlling the amplification factor of the amplifier to meet the power requirements of the load.

[0081] This invention determines impedance matching by real-time detection of the reflection coefficient, determines the impedance adjustment direction by detecting the load impedance through an impedance detection module, and adjusts the impedance of the impedance adjustment circuit according to the impedance adjustment direction until the reflection coefficient is adjusted to within a preset reflection coefficient range. This invention also adjusts the impedance of the impedance matching module in real time when the equivalent internal resistance of the RF power supply device does not match the load impedance, thus ensuring impedance matching between the RF power supply device and the load. This allows the output efficiency of the RF power supply device to remain within a high range when connected to different loads, reducing energy consumption.

[0082] In one embodiment, there are multiple radio frequency output modules 200.

[0083] Multiple RF output modules 200 can independently output multiple RF signals, allowing connection to multiple loads. The impedance of the corresponding RF output module 200 and the output power of the RF signal are adjusted according to the load's impedance and reflection coefficient.

[0084] In one embodiment, the power detection module includes an output power detection module 221 and a reflected power detection module 222.

[0085] The input terminal of the output power detection module 221 is connected to the output terminal of the radio frequency generation module 210, and the output terminal of the output power detection module 221 is connected to the control module 100. The output power detection module 221 is used to convert the radio frequency signal output by the radio frequency generation module 210 into a corresponding electrical signal and output it to the control module 100.

[0086] The input terminal of the reflected power detection module 222 is connected to the input terminal of the impedance detection module, and the output terminal of the output power detection module 221 is connected to the control module 100. The reflected power detection module 222 is used to convert the reflected radio frequency signal into a corresponding electrical signal and output it to the control module 100.

[0087] The power detection module also includes an isolation circuit. The input terminal of the isolation circuit is connected to the output terminal of the RF generation module 210, and the input terminal of the isolation circuit is connected to the input terminal of the impedance detection module. The isolation circuit is used for isolation matching between upstream and downstream circuits, preventing signal interference between them.

[0088] This embodiment can be connected to different loads. The power detection module 220 detects the output power and reflected power of different loads, and controls the power of the radio frequency signal output to each load individually based on the output power and reflected power. This makes the output control of the radio frequency signal of each load more precise and safer.

[0089] In one embodiment, the output power detection module 221 includes a detection circuit 221a and a rectifier circuit 221b.

[0090] The input terminal of the detector circuit 221a is the input terminal of the output power detection circuit, and the output terminal of the detector circuit 221a is connected to the input terminal of the rectifier circuit 221b. The output terminal of the rectifier circuit 221b is the output terminal of the output power detection circuit. The detector circuit 221a is used to detect the received radio frequency signal, and the rectifier circuit 221b is used to convert the AC signal into a DC signal for output.

[0091] The output power detection module 221 also includes a filter circuit 222c. The input terminal of the filter circuit 222c is connected to the output terminal of the rectifier circuit 221b, and the output terminal of the filter circuit 222c is grounded. The filter circuit 222c is used to filter the DC signal output by the rectifier circuit 221b.

[0092] The reflected power detection module 222 includes a detection circuit 222a and a rectifier circuit 222b.

[0093] The input terminal of the detector circuit 222a is the input terminal of the reflected power detection circuit, and the output terminal of the detector circuit 222a is connected to the input terminal of the rectifier circuit 222b. The output terminal of the rectifier circuit 222b is the output terminal of the reflected power detection circuit. The detector circuit 222a is used to detect the received radio frequency signal, and the rectifier circuit 222b is used to convert the AC signal into a DC signal for output.

[0094] The reflected power detection module 222 also includes a filter circuit 222c. The input terminal of the filter circuit 222c is connected to the output terminal of the rectifier circuit 222b, and the output terminal of the filter circuit 222c is grounded. The filter circuit 222c is used to filter the DC signal output by the rectifier circuit 222b.

[0095] In this embodiment, the radio frequency signal is detected and rectified and then converted into a corresponding DC signal and output to the control module 100, making the output power and reflected power easier to detect.

[0096] In one embodiment, the impedance matching module 240 includes N impedance adjustment circuits, each impedance adjustment circuit having an input terminal, an output terminal, and a controlled terminal.

[0097] When N is 1, the input terminal of the impedance adjustment circuit is the input terminal of the impedance matching module 240, the output terminal of the impedance adjustment circuit is the output terminal of the impedance matching module 240, and the controlled terminal of the impedance adjustment circuit is connected to the control module 100.

[0098] When N is greater than 1, the N impedance adjustment circuits are electrically connected.

[0099] The control module 100 is used to adjust the impedance of the corresponding impedance adjustment circuit so as to adjust the reflection coefficient to within the preset reflection coefficient range.

[0100] When N is greater than 1, the connection method between multiple impedance adjustment circuits can be determined according to the actual application scenario and is not limited here. For example, multiple impedance adjustment circuits can be connected in series, in parallel, in series first and then in parallel, or in parallel first and then in series.

[0101] In practical applications, the number of impedance adjustment circuits can be selected to achieve different ranges of impedance adjustment. The more impedance adjustment circuits there are, the wider the adjustable impedance range.

[0102] In one embodiment, the impedance adjustment circuit includes a switching circuit 241, a first adjustment circuit 242, and a second adjustment circuit 243.

[0103] The switching circuit 241 has an input terminal, a controlled terminal, a first output terminal, and a second output terminal. The input terminal of the switching circuit 241 is the input terminal of the impedance adjustment circuit. The controlled terminal of the switching circuit 241 is connected to the control module 100. The first output terminal of the switching circuit 241 is the output terminal of the impedance adjustment circuit. The second output terminal of the switching circuit 241 is connected to the first output terminal of the second adjustment circuit 243.

[0104] The input terminal of the first output circuit is connected to the input terminal of the switch circuit 241, and the output terminal of the first output circuit is connected to the first output terminal of the switch circuit 241.

[0105] The second terminal of the second output circuit is grounded.

[0106] The switching circuit 241 is used to connect the input terminal of the switching circuit 241 to the first output terminal under the control of the control module 100, so that the first adjustment circuit 242 and the second adjustment circuit 243 are not working, or to connect the input terminal of the switching circuit 241 to the second output terminal so that the first adjustment circuit 242 and the second adjustment circuit 243 are working.

[0107] When the input terminal of the switching circuit 241 is connected to the first output terminal, the first adjustment circuit 242 is short-circuited and the second adjustment circuit 243 is not connected. At this time, the impedance value of the impedance adjustment circuit is zero. When the input terminal of the switching circuit 241 is connected to the second output terminal, the first adjustment circuit 242 and the second adjustment circuit 243 are working. At this time, the impedance value of the impedance adjustment circuit is not zero.

[0108] In this embodiment, by controlling the connection between the input terminal of the switch circuit 241 in the corresponding impedance adjustment circuit and the first output terminal, the impedance of the impedance matching module 240 can be reduced. By controlling the connection between the input terminal of the switch circuit 241 in the corresponding impedance adjustment circuit and the second output terminal, the impedance of the impedance matching module 240 can be increased.

[0109] In one embodiment, the first regulating circuit 242 includes a first inductor L1.

[0110] The input terminal of the first inductor L1 is connected to the input terminal of the switching circuit 241, and the output terminal of the first inductor L1 is connected to the first output terminal of the switching circuit 241.

[0111] In one embodiment, the second regulating circuit 243 includes a first capacitor C1 and a second capacitor C2.

[0112] The first terminals of the first capacitor C1 and the second capacitor C2 are connected to the first output terminal of the second adjustment circuit 243, and the second terminals of the first capacitor C1 and the second capacitor C2 are grounded.

[0113] In one embodiment, the impedance adjustment circuit further includes a status indication circuit.

[0114] The switching circuit 241 also includes a third output terminal. The input terminal of the status indicator circuit is connected to the third output terminal of the switching circuit 241. The output terminal of the status indicator circuit is grounded. The status indicator circuit is used to light up when the input terminal of the switching circuit 241 is connected to the second output terminal.

[0115] In this embodiment, the operating status of the first adjustment circuit 242 and the second adjustment circuit 243 is indicated by a status indicator circuit, so that the user can intuitively know the impedance matching status.

[0116] In one embodiment, the status indication circuit includes a first resistor R1 and an indicator light D1.

[0117] The input terminal of the first resistor R1 is connected to the third output terminal of the switch circuit 241, the output terminal of the first resistor R1 is connected to the input terminal of the indicator light D1, and the output terminal of the indicator light D1 is grounded.

[0118] In this embodiment, indicator light D1 indicates the working status of the first adjustment circuit 242 and the second adjustment circuit 243. The indicator light is on when the first adjustment circuit 242 and the second adjustment circuit 243 are working, and it is off when the first adjustment circuit 242 and the second adjustment circuit 243 are not working. Users can intuitively understand the impedance matching status.

[0119] In one embodiment, the radio frequency circuit further includes an isolation circuit 250.

[0120] The input terminal of the isolation circuit 250 is connected to the output terminal of the impedance matching module 240. The output terminal of the isolation circuit 250 is used to connect to the load. The isolation circuit 250 is used to prevent signal interference between the radio frequency circuit and the load, and to suppress electromagnetic interference generated by the radio frequency circuit.

[0121] This embodiment protects the radio frequency circuit from interference through an isolation circuit, making the output radio frequency signal more stable.

[0122] In one embodiment, the isolation circuit 250 includes an electromagnetic interference suppression circuit and a DC blocking circuit.

[0123] Electromagnetic interference suppression circuits are used to suppress electromagnetic interference in circuits, while DC blocking circuits are used to isolate DC signals.

[0124] Electromagnetic interference suppression circuits are used to suppress electromagnetic interference in circuits, preventing electromagnetic energy generated by radio frequency (RF) circuits from interfering with other devices or electromagnetic energy generated by other devices. DC blocking circuits are used to isolate DC signals, preventing interference between the DC signals of RF signals and the DC signals of the load.

[0125] Reference Figure 5 The present invention also provides a radio frequency power supply device, which includes a protection circuit 300 and a radio frequency circuit 400 as described above.

[0126] The input terminal of the protection circuit 300 is used to connect to the power supply, and the output terminal of the protection circuit 300 is connected to the input terminal of the radio frequency circuit 400. The radio frequency circuit 400 has multiple output terminals, which are used to connect to multiple loads.

[0127] It is understood that since the radio frequency circuit 400 is used in the above-mentioned radio frequency power supply device, the embodiments of the radio frequency power supply device include all the technical solutions of all embodiments of the radio frequency circuit 400, and the technical effects achieved are exactly the same, so they will not be repeated here.

[0128] In one embodiment, the protection circuit 300 includes an interference suppression circuit 310, an overcurrent protection circuit 320, a filter circuit 330, and a current detection circuit 340.

[0129] The input terminal of the interference suppression circuit 310 is used to connect to the power supply, and the output terminal of the interference suppression circuit 310 is connected to the input terminal of the overcurrent protection circuit 320. The interference suppression circuit 310 is used to suppress electromagnetic interference generated by the radio frequency circuit 400.

[0130] The output terminal of the overcurrent protection circuit 320 is connected to the input terminal of the filter circuit 330. The overcurrent protection circuit 320 is used to disconnect the power supply from the radio frequency circuit 400 when the current value in the circuit is greater than the first preset current value.

[0131] The output of the filter circuit 330 is connected to the current detection circuit 340. The filter circuit 330 is used to filter the input power supply.

[0132] The output of the current detection circuit 340 is connected to both the controller and the RF amplifier circuit of the RF circuit 400. The current detection circuit 340 is used to detect the magnitude of the current output by the filter circuit 330. The controller of the RF circuit 400 is used to control the RF circuit 400 to stop working when the current value detected by the current detection circuit 340 is greater than the second preset current value.

[0133] Interference suppression circuit 310 is used to suppress electromagnetic interference in the circuit, preventing the electromagnetic energy generated by RF circuit 400 from interfering with other devices or the electromagnetic energy generated by other devices from interfering with RF circuit 400. When the power supply voltage is too high, overcurrent protection circuit 320 can disconnect the power input in time to protect the RF power supply device from damage. Filtering circuit 330 filters the power supply to make the power signal input to the RF power supply device more stable. Power detection circuit monitors the current in the circuit in real time. When the current is high, the controller controls RF circuit 400 to stop working, avoiding damage to the RF power supply device and load due to high current.

[0134] The above description is merely an optional embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention's specification and drawings under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. An impedance adjustment method for a radio frequency power supply device for outputting a radio frequency signal to a load, the radio frequency power supply device comprising a power detection module, an impedance detection module, and an impedance matching module, characterized by, The impedance adjustment method includes: The output power and reflected power of the radio frequency signal are obtained by the power detection module, and the reflection coefficient of the load is determined based on the output power and the reflected power. When the reflection coefficient is outside the preset reflection coefficient range, the equivalent internal resistance of the RF power supply device is obtained, the load impedance is obtained through the impedance detection module, and the impedance adjustment direction of the impedance matching module is determined based on the equivalent internal resistance of the RF power supply device and the load impedance. Adjust the impedance value of the impedance matching module according to the impedance adjustment direction until the reflection coefficient is adjusted to within the preset reflection coefficient range.

2. The impedance adjustment method of claim 1, wherein, When the reflection coefficient is outside the preset reflection coefficient range, the equivalent internal resistance of the RF power supply device is obtained, the load impedance is obtained through the impedance detection module, and the impedance adjustment direction of the impedance matching module is determined based on the equivalent internal resistance of the RF power supply device and the load impedance. Specifically: When the reflection coefficient is outside the preset reflection coefficient range, the equivalent internal resistance of the RF power supply device is obtained, and the load impedance is obtained through the impedance detection module. The equivalent internal resistance of the RF power supply is compared with the load impedance. If the load impedance is greater than the equivalent internal resistance of the RF power supply, the impedance of the impedance matching module is adjusted to increase the equivalent internal resistance of the RF power supply. If the load impedance is less than the equivalent internal resistance of the RF power supply, the impedance of the impedance matching module is adjusted to reduce the equivalent internal resistance of the RF power supply.

3. The impedance adjustment method of claim 1, wherein, The step of adjusting the impedance value of the impedance matching module according to the impedance adjustment direction until the reflection coefficient is adjusted to within the preset reflection coefficient range specifically involves: When reducing the impedance of the impedance matching module, the impedance value of the impedance matching module is reduced sequentially according to the preset impedance interval until the reflection coefficient is adjusted to within the preset reflection coefficient range; When increasing the impedance of the impedance matching module, the impedance value of the impedance matching module is increased sequentially according to the preset impedance interval until the reflection coefficient is adjusted to within the preset reflection coefficient range.

4. A radio frequency circuit for a radio frequency power supply device, characterized by The radio frequency circuit includes: A control module, comprising an input terminal, an output terminal, a first feedback receiver, a second feedback receiver, and a control output terminal, wherein the input terminal of the control module is used for connection to a host computer; and Radio frequency output module, the radio frequency output module includes: A radio frequency (RF) generator module, wherein the input terminal of the RF generator module is connected to the output terminal of the control module, and the RF generator module is used to output RF signals under the control of the control module; A power detection module has an input terminal, an output terminal, and a feedback terminal. The input terminal of the power detection module is connected to the output terminal of the radio frequency generation module, and the feedback terminal of the power detection module is connected to the first feedback receiving terminal of the control module. The power detection module is used to detect the output power and reflected power of the radio frequency generation module. An impedance detection module has an input terminal, an output terminal, and a feedback terminal. The input terminal of the impedance detection module is connected to the output terminal of the power detection module, and the feedback terminal of the impedance detection module is connected to the second feedback receiving terminal of the control module. The impedance detection module is used to detect the load impedance. An impedance matching module has an input terminal, an output terminal, and a controlled terminal. The input terminal of the impedance matching module is connected to the output terminal of the impedance detection module, the output terminal of the impedance matching module is used to connect to a load, and the controlled terminal of the impedance matching module is connected to the control output terminal of the control module. The control module is used to determine the reflection coefficient of the load based on the output power and reflected power detected by the power detection module. When the reflection coefficient is outside the preset reflection coefficient range, the control module determines the impedance adjustment direction of the impedance matching module based on the equivalent internal resistance of the RF power supply device and the load impedance, and adjusts the impedance value of the impedance matching module according to the impedance adjustment direction until the reflection coefficient is adjusted to within the preset reflection coefficient range. The control module is also used to adjust the power of the RF signal output by the corresponding RF generation module based on the output power and reflected power.

5. The radio frequency circuit of claim 4, wherein, The number of radio frequency output modules is multiple.

6. The radio frequency circuit of claim 4, wherein, The power detection module includes an output power detection module and a reflected power detection module; The input terminal of the output power detection module is connected to the output terminal of the radio frequency generation module, and the output terminal of the output power detection module is connected to the control module. The output power detection module is used to convert the radio frequency signal output by the radio frequency generation module into a corresponding electrical signal and output it to the control module. The input terminal of the reflected power detection module is connected to the input terminal of the impedance detection module, and the output terminal of the output power detection module is connected to the control module. The reflected power detection module is used to convert the reflected radio frequency signal into a corresponding electrical signal and output it to the control module.

7. The radio frequency circuit of claim 6, wherein, The reflected power detection module includes a detector circuit and a rectifier circuit; The input terminal of the detector circuit is the input terminal of the reflected power detection module, and the output terminal of the detector circuit is connected to the input terminal of the rectifier circuit. The output terminal of the rectifier circuit is the output terminal of the reflected power detection module. The detector circuit is used to detect the received radio frequency signal, and the rectifier circuit is used to convert the AC signal into a DC signal for output.

8. The radio frequency circuit of claim 7, wherein, The output power detection module includes a detector circuit and a rectifier circuit; The input terminal of the detector circuit is the input terminal of the output power detection module, and the output terminal of the detector circuit is connected to the input terminal of the rectifier circuit. The output terminal of the rectifier circuit is the output terminal of the output power detection module. The detector circuit is used to detect the received radio frequency signal, and the rectifier circuit is used to convert the AC signal into a DC signal for output.

9. The radio frequency circuit of claim 4, wherein, The impedance matching module includes N impedance adjustment circuits, each impedance adjustment circuit having an input terminal, an output terminal, and a controlled terminal. When N is 1, the input terminal of the impedance adjustment circuit is the input terminal of the impedance matching module, the output terminal of the impedance adjustment circuit is the output terminal of the impedance matching module, and the controlled terminal of the impedance adjustment circuit is connected to the control module. When N is greater than 1, the N impedance adjustment circuits are electrically connected; The control module is used to adjust the impedance of the corresponding impedance adjustment circuit to adjust the reflection coefficient to a preset reflection coefficient range.

10. The radio frequency circuit as described in claim 4, characterized in that, The radio frequency output module also includes an isolation circuit; The input terminal of the isolation circuit is connected to the output terminal of the impedance matching module in a one-to-one correspondence. The output terminal of the isolation circuit is used to connect to the load. The isolation circuit is used to prevent signal interference between the radio frequency circuit and the load, and to suppress electromagnetic interference generated by the radio frequency circuit.

11. A radio frequency power supply device, characterized in that, The radio frequency power supply device includes a protection circuit and a radio frequency circuit as described in any one of claims 4 to 10; The input terminal of the protection circuit is used to connect to a power source, and the output terminal of the protection circuit is connected to the input terminal of the radio frequency circuit. The radio frequency circuit has multiple output terminals, which are used to connect to multiple loads.

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