Calibration Device and Method for Radio Frequency Power Supply

Abstract

The present application discloses a calibration device and method for a radio frequency power supply, which are used to solve the problem of low measurement accuracy of the power measurement circuit in the radio frequency power supply. The device includes a radio frequency power measurement circuit, a controller, a voltage compensator, and a parameter regulator; the radio frequency power measurement circuit includes a measurement circuit, a multiplier, and an operational amplifier connected in sequence; the controller is respectively connected to the voltage compensator and the parameter regulator, and is used to control the voltage compensator to output a voltage compensation value and control the parameter value of the parameter regulator; the voltage compensator is connected to the multiplier and is used to provide a voltage compensation value to the multiplier; the parameter regulator is connected to the operational amplifier and is used to calibrate the output power value of the operational amplifier by adjusting the parameter value. The device reduces the measurement error caused by the offset voltage of the multiplier and the integrated operational amplifier in the measurement circuit, and realizes the real-time dynamic calibration effect of the output value of the radio frequency power measurement circuit, improving the accuracy of the output power of the radio frequency power supply.

Description

Technical Field

[0001] This application relates to the field of radio frequency measurement technologies, and particularly to a calibration device and method for a radio frequency power supply. Background Art

[0002] A radio frequency power supply is a core and key component in semiconductor manufacturing equipment, used to provide energy to the machines of semiconductor devices. The accuracy and linearity of its output power are among the most important indicators. In a radio frequency power supply, the performance of the radio frequency power measurement circuit determines the accuracy and linearity of the output power. The multiplicative radio frequency power measurement circuit is a commonly used radio frequency power measurement circuit in radio frequency power supplies, mainly including a signal acquisition circuit, a multiplier, a low-pass filter circuit, an output amplifier circuit, etc.

[0003] Traditional multiplicative power measurement circuits mainly have two problems: First, as the power changes, the measured signal accuracy and linearity will deviate; second, the multiplier and integrated operational amplifier have input offset voltage and offset current, and the multiplier also has multiplication error and linear error, all of which will affect the accuracy and linearity of the measured signal, resulting in inaccurate output power. Summary of the Invention

[0004] The purpose of the embodiments of this application is to provide a calibration device and method for a radio frequency power supply to solve the problem of low measurement accuracy of the power measurement circuit in existing radio frequency power supplies.

[0005] To solve the above technical problems, the embodiments of this application are implemented as follows:

[0006] On the one hand, the embodiments of this application provide a calibration device for a radio frequency power supply. The device includes a radio frequency power measurement circuit, a controller, a voltage compensator, and a parameter regulator; the radio frequency power measurement circuit includes a measurement circuit, a multiplier, and an operational amplifier connected in sequence; the controller is respectively connected to the voltage compensator and the parameter regulator, the voltage compensator is connected to the multiplier, and the parameter regulator is connected to the input end of the operational amplifier;

[0007] The controller is used to control the voltage compensator to output a voltage compensation value so that when the calibration device is in the standby state, the voltage output value of the radio frequency power measurement circuit is zero; control the parameter value of the parameter regulator according to the target output power value of the radio frequency power measurement circuit so that the actual output power value of the radio frequency power measurement circuit is calibrated to the target output power value;

[0008] The voltage compensator is used to provide the voltage compensation value to the multiplier;

[0009] The parameter regulator is used to calibrate the output power value of the operational amplifier by adjusting the parameter value.

[0010] On the other hand, an embodiment of the present application provides a calibration method for a radio frequency power supply, which is applied to the calibration device of the radio frequency power supply described in the above-mentioned one aspect; the method includes:

[0011] After the calibration device is powered on, control the voltage compensator to output a target voltage compensation value; when the voltage compensator outputs the target voltage compensation value, the voltage output value of the radio frequency power measurement circuit is zero;

[0012] Determine the target output power value of the radio frequency power measurement circuit; according to the calibration relationship between the resistance value of the parameter regulator and the output power value of the radio frequency power measurement circuit, determine the target parameter value corresponding to the target output power value; the target parameter value is used to calibrate the actual output power value of the radio frequency power measurement circuit to the target output power value;

[0013] Control the parameter value of the parameter regulator to be the target parameter value.

[0014] By using the calibration device of the radio frequency power supply provided by the embodiment of the present application, a controller, a voltage compensator and a parameter regulator are connected in the radio frequency power measurement circuit. Among them, the radio frequency power measurement circuit includes a measurement circuit, a multiplier, a filter circuit and an operational amplifier connected in sequence. The controller is respectively connected to the voltage compensator and the parameter regulator, the voltage compensator is connected to the multiplier, and the parameter regulator is connected to the input end of the operational amplifier. This enables the controller to control the voltage compensator to output a voltage compensation value, thereby providing this voltage compensation value to the multiplier, so that when the calibration device is in the standby state, the voltage output value of the radio frequency power measurement circuit is zero, that is, when the measured signal is zero, the output of the circuit is also zero, reducing the measurement error brought by the offset voltages of the multiplier and the operational amplifier in the radio frequency power measurement circuit. In addition, the controller can also control the parameter value of the parameter regulator according to the target output power value of the radio frequency power measurement circuit, thereby calibrating the output power value of the operational amplifier, so that the actual output power value of the radio frequency power measurement circuit is calibrated to the target output power value, achieving a real-time dynamic calibration effect on the output value of the radio frequency power measurement circuit and significantly improving the accuracy of the output power of the radio frequency power supply. Description of the Drawings

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments recorded in the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0016] Figure 1It is a schematic block diagram of a calibration device for a radio frequency power supply according to an embodiment of the present application;

[0017] Figure 2 It is a schematic block diagram of a calibration device for a radio frequency power supply according to another embodiment of the present application;

[0018] Figure 3 It is a schematic flowchart of a calibration method for a radio frequency power supply according to an embodiment of the present application;

[0019] Figure 4 It is a schematic structural diagram of a calibration device for a radio frequency power supply according to an embodiment of the present application;

[0020] Figure 5 It is a schematic structural diagram of a calibration device for a radio frequency power supply according to another embodiment of the present application. Detailed implementation manners

[0021] Embodiments of the present application provide a calibration device and method for a radio frequency power supply to solve the problem of low measurement accuracy of the power measurement circuit in existing radio frequency power supplies.

[0022] In order to enable those skilled in the art to better understand the technical solutions in the present application, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0023] Figure 1 It is a schematic block diagram of a calibration device for a radio frequency power supply according to an embodiment of the present application, as Figure 1 shown. The device includes: a radio frequency power measurement circuit 10, a controller 20, a voltage compensator 30, and a parameter regulator 40; the radio frequency power measurement circuit 10 includes a measurement circuit 11, a multiplier 12, and an operational amplifier 13 connected in sequence; the controller 20 is respectively connected to the voltage compensator 30 and the parameter regulator 40, the voltage compensator 30 is connected to the multiplier 12, and the parameter regulator 40 is connected to the input end of the operational amplifier 13.

[0024] The controller 20 is configured to control the voltage compensator 30 to output a voltage compensation value, so that when the calibration device is in the standby state, the voltage output value of the radio frequency power measurement circuit is zero; and control the parameter value of the parameter regulator 40 according to the target output power value of the radio frequency power measurement circuit, so that the actual output power value of the radio frequency power measurement circuit is calibrated to the target output power value.

[0025] The voltage compensator 30 is configured to provide a voltage compensation value to the multiplier 12.

[0026] A parameter regulator 40 for calibrating the output power value of the operational amplifier 13 by adjusting its own parameter value.

[0027] In this embodiment, the measurement circuit 11 is used to collect the measured signal, the multiplier 12 is used to perform a squaring operation on the measured signal, and the operational amplifier 13 is used to amplify the signal.

[0028] The voltage compensator 30 can be a bipolar DAC (digital-to-analog converter). The parameter regulator 40 can be a variable resistor, such as a digital potentiometer; or it can be a variable voltage regulator, such as a multiplicative digital-to-analog conversion chip MDACS.

[0029] Optionally, the operational amplifier 13 can be an integrated operational amplifier. The integrated operational amplifier includes a non-inverting input terminal, an inverting input terminal, and an output terminal. The parameter regulator 40 is connected to the non-inverting input terminal of the integrated operational amplifier.

[0030] By using the calibration device for the radio frequency power supply provided by the embodiment of the present application, a controller, a voltage compensator, and a parameter regulator are connected in the radio frequency power measurement circuit. Among them, the radio frequency power measurement circuit includes a measurement circuit, a multiplier, a filter circuit, and an operational amplifier connected in sequence. The controller is respectively connected to the voltage compensator and the parameter regulator. The voltage compensator is connected to the multiplier, and the parameter regulator is connected to the input terminal of the operational amplifier. So that the controller can control the voltage compensator to output a voltage compensation value, thereby providing this voltage compensation value for the multiplier, so that when the calibration device is in the standby state, the voltage output value of the radio frequency power measurement circuit is zero, that is, when the measured signal is zero, the output of the circuit is also zero, reducing the measurement error brought by the bias voltages of the multiplier and the operational amplifier in the radio frequency power measurement circuit. In addition, the controller can also control the parameter value of the parameter regulator according to the target output power value of the radio frequency power measurement circuit, thereby calibrating the output power value of the operational amplifier, so that the actual output power value of the radio frequency power measurement circuit is calibrated to the target output power value, achieving the real-time dynamic calibration effect of the output value of the radio frequency power measurement circuit, and significantly improving the accuracy of the output power of the radio frequency power supply.

[0031] In one embodiment, the controller 20 includes a serial data output port and a chip select control output port. The controller 20 sends control instructions to the voltage compensator 30 through the serial data output port to control the voltage compensator 30 to output a voltage compensation value; and sends control instructions to the parameter regulator 40 through the serial data output port to control the parameter regulator 40 to adjust the parameter value. The controller 20 controls the working states of the voltage compensator 30 and / or the parameter regulator 40 through the chip select control output port.

[0032] In this embodiment, if the chip select control output port outputs a first instruction, the operating states of the voltage compensator 30 and / or the parameter regulator 40 are to effectively receive control instructions. If the chip select control output port outputs a second instruction, the operating states of the voltage compensator 30 and / or the parameter regulator 40 are to ineffectively receive control instructions.

[0033] This embodiment does not limit the output forms of the first instruction and the second instruction, and they can be any form such as numbers, characters, symbols, etc. Taking numbers as an example, assuming the first instruction is "0" and the second instruction is "1", when the instruction "0" is output from the chip select control output port of the controller 20, the operating states of the voltage compensator 30 and / or the parameter regulator 40 are to effectively receive control instructions, that is, perform corresponding actions according to the data and instructions output by the controller 20. When the instruction "1" is output from the chip select control output port of the controller 20, the operating states of the voltage compensator 30 and / or the parameter regulator 40 are to ineffectively receive control instructions, that is, regardless of any data and instructions output by the controller 20, the voltage compensator 30 and / or the parameter regulator 40 do not respond and still maintain the previous output state unchanged.

[0034] Optionally, the controller 20 may include one or more chip select control output ports. If the controller 20 includes only one chip select control output port, both the voltage compensator 30 and the parameter regulator 40 are connected to this chip select control output port, and the controller 20 controls the operating states of the voltage compensator 30 and the parameter regulator 40 simultaneously through this chip select control output port. If the controller 20 includes multiple chip select control output ports, the voltage compensator 30 and the parameter regulator 40 may be respectively connected to different chip select control output ports. In this way, the controller 20 can control the operating states of the voltage compensator 30 and the parameter regulator 40 respectively through different chip select control output ports.

[0035] In this embodiment, the controller outputs different instructions through the chip select control output port to control the operating states of the voltage compensator and the parameter regulator, so that the calibration device of the radio frequency power supply can selectively perform measurement calibration control according to actual measurement requirements, improving the universality and flexibility of the calibration device.

[0036] In one embodiment, the parameter regulator 40 includes a variable resistor or a variable voltage regulator.

[0037] When the parameter regulator 40 is a variable resistor, the controller 20 is used to adjust the resistance value of the variable resistor according to the target output power value, so as to calibrate the output power value of the radio frequency power measurement circuit by adjusting the resistance value of the variable resistor. Optionally, the variable resistor can be a digital potentiometer.

[0038] When the parameter regulator 40 is an adjustable voltage regulator, the controller 20 is used to adjust the voltage value of the adjustable voltage regulator according to the target output power value, so as to calibrate the output power value of the radio frequency power measurement circuit by adjusting the voltage value of the adjustable voltage regulator. Optionally, the adjustable voltage regulator can be a multiplicative digital-to-analog conversion chip MDACS.

[0039] In this embodiment, the parameter regulator of the calibration device of the radio frequency power supply can select an adjustable resistor or an adjustable voltage regulator, so that the calibration device can use a variety of different components to achieve the calibration effect of the output power value, improving the flexibility of use of the calibration device.

[0040] In one embodiment, as Figure 2 shown, the calibration device of the radio frequency power supply further includes a voltage reference module 50, and the voltage compensator 30 includes a reference level input terminal and a voltage output terminal. Among them, the voltage reference module 50 is connected to the reference level input terminal of the voltage compensator 30, and is used to provide a reference voltage to the voltage compensator 30 through the reference level input terminal; the voltage compensator 30 provides a voltage compensation value to the multiplier 12 through the voltage output terminal.

[0041] In one embodiment, as Figure 2 shown, the calibration device of the radio frequency power supply further includes a voltage stabilizing module 60, and the parameter regulator 40 and the controller 20 respectively include a power supply input terminal. Among them, the voltage stabilizing module 60 is respectively connected to the power supply input terminals of the parameter regulator 40 and the controller 20; the voltage stabilizing module 60 is used to provide a preset voltage value to the parameter regulator 40 and the controller 20 respectively through each power supply input terminal.

[0042] Figure 3 is a schematic flowchart of a calibration method for a radio frequency power supply according to an embodiment of the present application. As Figure 3 shown, this method is applied to Figure 1 the calibration device of the radio frequency power supply shown. Specifically, it can be applied to the controller in this calibration device, and includes the following steps:

[0043] S302, after the calibration device is powered on, control the voltage compensator to output a target voltage compensation value; when the voltage compensator outputs the target voltage compensation value, the voltage output value of the radio frequency power measurement circuit is zero.

[0044] Among them, after the calibration device is powered on, the voltage output value of the radio frequency power measurement circuit is zero, indicating that the output of the circuit is also zero when the measured signal is zero, that is, the measurement error caused by the bias voltage of the multiplier and the integrated operational amplifier in the radio frequency power measurement circuit is eliminated. The calibration method of the target voltage compensation value will be described in detail in the following embodiments.

[0045] S304. Determine the target output power value of the radio frequency power measurement circuit; determine the target parameter value corresponding to the target output power value according to the calibration relationship between the resistance value of the parameter regulator and the output power value of the radio frequency power measurement circuit; the target parameter value is used to calibrate the actual output power value of the radio frequency power measurement circuit to the target output power value.

[0046] Among them, the calibration relationship between the resistance value of the parameter regulator and the output power value of the radio frequency power measurement circuit needs to be determined in advance, and the specific determination method will be described in detail in the following embodiments. The target parameter value of the parameter regulator determined by using this calibration relationship can make the actual output power value of the radio frequency power measurement circuit equal to the preset target output power value.

[0047] S306. Control the parameter value of the parameter regulator to be the target parameter value.

[0048] Adopting the technical solution of the embodiment of the present application, after the calibration device is powered on, the voltage compensator is controlled to output the target voltage compensation value, so that when the calibration device is in the standby state, the voltage output value of the radio frequency power measurement circuit is zero, that is, the output of the circuit is also zero when the measured signal is zero, reducing the measurement error caused by the bias voltage of the multiplier and the operational amplifier in the radio frequency power measurement circuit. And according to the calibration relationship between the parameter value of the parameter regulator and the output power value of the radio frequency power measurement circuit, the target parameter value corresponding to the target output power value is determined, so that the controller can also control the parameter value of the parameter regulator according to the target output power value of the radio frequency power measurement circuit, and then control the parameter value of the parameter regulator to be the target parameter value, so that the actual output power value of the radio frequency power measurement circuit is calibrated to the target output power value, realizing the real-time dynamic calibration effect of the output value of the radio frequency power measurement circuit, and significantly improving the accuracy of the output power of the radio frequency power supply.

[0049] In one embodiment, the target voltage compensation value of the voltage compensator can be determined by the following method:

[0050] First, when the radio frequency power measurement circuit is powered on for the first time, control (or adjust) the voltage compensator to output the first voltage compensation value in the standby state.

[0051] Second, when the voltage compensator outputs the first voltage compensation value, determine the voltage output value of the radio frequency power measurement circuit;

[0052] Third, determine whether the voltage output value of the radio frequency power measurement circuit is zero; if so, determine the first voltage compensation value as the target voltage compensation value; if not, adjust the first voltage compensation value at least once until the voltage output value of the radio frequency power measurement circuit is zero when the voltage compensator outputs the adjusted voltage compensation value; determine the adjusted voltage compensation value as the target voltage compensation value.

[0053] After determining the target voltage compensation value of the voltage compensator, the target voltage compensation value can be stored in the controller, so that when the calibration device works subsequently, the controller controls the voltage compensator to output the target voltage compensation value.

[0054] In this embodiment, the voltage compensation value output by the voltage compensator affects the voltage output value of the radio frequency power measurement circuit. Therefore, the voltage output value of the radio frequency power measurement circuit can be calibrated by adjusting the voltage compensation value output by the voltage compensator, so that the voltage output value of the radio frequency power measurement circuit is zero in the standby state, thereby eliminating the measurement error caused by the bias voltage of the multiplier and the operational amplifier in the radio frequency power measurement circuit. When adjusting the voltage value output by the voltage compensator, the number of adjustment times is not limited until the voltage output value of the radio frequency power measurement circuit is zero. At this time, the adjusted voltage compensation value is the target voltage compensation value.

[0055] In one embodiment, the calibration relationship between the resistance value of the parameter regulator and the output power value of the radio frequency power measurement circuit can be determined through the following steps A1 - A4:

[0056] Step A1, determine multiple preset output power values of the radio frequency power measurement circuit.

[0057] Step A2, for any preset output power value, adjust the resistance value of the parameter regulator to the first resistance value so that the actual output power value of the radio frequency power measurement circuit is consistent with the preset output power value.

[0058] Step A3, determine the corresponding relationship between each preset output power value and each first parameter value.

[0059] Step A4, according to the corresponding relationship between each preset output power value and each first parameter value, determine the calibration relationship between the parameter value of the parameter regulator and the output power value of the radio frequency power measurement circuit.

[0060] In this embodiment, after determining the calibration relationship between the parameter value of the parameter regulator and the output power value of the radio frequency power measurement circuit, the calibration relationship can be stored in the controller, so that when the calibration device works subsequently, the controller can calculate and control the parameter value of the parameter regulator according to the stored calibration relationship, thereby calibrating the power output value of the radio frequency power measurement circuit in real time.

[0061] In one embodiment, when controlling the voltage compensator to output the target voltage compensation value, a preset instruction can be output first. The preset instruction is used to indicate that the working state of the voltage compensator is to effectively receive the first control instruction; then send the first control instruction to the voltage compensator. The first control instruction carries the first adjustment information corresponding to the target voltage compensation value; furthermore, through the first control instruction, control the voltage compensator to output the target voltage compensation value based on the first adjustment information.

[0062] For example, the preset instruction is the number "0", and this instruction "0" is used to indicate that the working state of the voltage compensator is to effectively receive the first control instruction. Based on this, for the data and instructions output by the controller to the voltage compensator subsequently, the voltage compensator will perform corresponding actions. In this embodiment, the first control instruction carries the first adjustment information corresponding to the target voltage compensation value. For example, if the target voltage compensation value is 5V, the first adjustment information may be "5V", so that after receiving the first control instruction, the voltage compensator can adjust the output voltage value to "5V" according to the first adjustment information "5V".

[0063] In one embodiment, when the resistance value of the control parameter regulator is the target parameter value, a preset instruction may be output first, and this preset instruction is used to indicate that the working state of the parameter regulator is to effectively receive the second control instruction; then a second control instruction is sent to the parameter regulator, and this second control instruction carries the second adjustment information corresponding to the target parameter value; and further, through the second control instruction, the parameter regulator is controlled to output the target parameter value based on the second adjustment information.

[0064] For example, the preset instruction is the number "0", and this instruction "0" is used to indicate that the working state of the parameter regulator is to effectively receive the second control instruction. Based on this, for the data and instructions output by the controller to the parameter regulator subsequently, the parameter regulator will perform corresponding actions. In this embodiment, the second control instruction carries the second adjustment information corresponding to the target parameter value. For example, if the parameter regulator is a digital potentiometer and the target parameter value is the target resistance value, the second adjustment information may be the specific value corresponding to the target resistance value, so that after receiving the second control instruction, the digital potentiometer can adjust the output resistance value to the specific value corresponding to the target resistance value according to the second adjustment information.

[0065] In the above embodiments, the controller can control the working states of the voltage compensator and / or the parameter regulator by outputting preset instructions, so as to control whether the voltage compensator and / or the parameter regulator respond to the data and instructions of the controller in different situations, making the use of the calibration device more flexible and applicable to various calibration requirements.

[0066] The following uses specific embodiments to illustrate the calibration device and calibration method of the radio frequency power supply provided in this application.

[0067] Figure 4 is a schematic structural diagram of a calibration device for a radio frequency power supply according to another embodiment of the present application, as Figure 4As shown in the figure, the device includes a radio frequency power measurement circuit, a control chip 9 (i.e., a controller), a bipolar DAC 5 (i.e., a voltage compensator), a digital potentiometer 7 (i.e., a parameter regulator), a voltage reference chip 6 (i.e., a voltage reference module), and a 5V three-terminal voltage regulator 8 (i.e., a voltage regulation module). The radio frequency power measurement circuit 10 includes a measurement circuit 1, a multiplier 2, a low-pass filter circuit 3, and an integrated operational amplifier 4 connected in sequence.

[0068] The measurement circuit 1 is used to collect the measured signal. The multiplier 2 is used to perform a squaring operation on the measured signal. The low-pass filter circuit 3 is used to filter the signal after the multiplier performs the squaring operation. The integrated operational amplifier 4, the resistor R1, the resistor R2, and the resistor between the resistor B terminal and the cursor W terminal of the digital potentiometer 7 form an amplification circuit for amplifying the signal. The bipolar DAC 5 is used to provide a high-precision calibration voltage to the multiplier. The voltage reference chip 6 is used to provide a voltage reference to the bipolar DAC 5. The digital potentiometer 7 is used to adjust the amplification factor of the amplification circuit in real time. The 5V three-terminal voltage regulator 8 is used to provide a power supply voltage to the digital potentiometer 7 and the control chip 9. The control chip 9 is used to control the bipolar DAC 5 and the digital potentiometer 7 to implement an automatic control algorithm, thereby achieving the purpose of automatic real-time calibration.

[0069] The measured signal is the actual output of the radio frequency power supply. The measured signal is connected to the input terminal of the measurement circuit 1. The output terminal of the measurement circuit 1 is simultaneously connected to the positive input terminal "VX+" of the X channel and the positive input terminal "VY+" of the Y channel of the multiplier 2. The ground terminal "GND", the negative input terminal "VX-" of the X channel, the negative input terminal "VY-" of the Y channel, and the negative input terminal "VZ-" of the Z channel of the multiplier 2 are connected to AGND (i.e., analog ground). The negative power supply terminal "V-" of the multiplier 2 is connected to -15V, and the positive power supply terminal "V+" of the multiplier 2 is connected to +15V. The output terminal "VOUT" of the multiplier 2 is connected to the input terminal of the low-pass filter 3. The output terminal of the low-pass filter circuit 3 is connected to the inverting input terminal "-" of the integrated operational amplifier 4. The non-inverting input terminal "+" of the integrated operational amplifier 4 is connected to the common connection point of the resistor R1 and the resistor R2. The positive power supply terminal "V+" of the integrated operational amplifier 4 is connected to +15V, and the negative power supply terminal "V-" of the integrated operational amplifier 4 is connected to -15V. The measured signal is amplified by the integrated operational amplifier 4 and then output.

[0070] The positive power supply terminal "V+" of the bipolar DAC 5 is connected to +15V, the negative power supply terminal "V-" of the bipolar DAC 5 is connected to -15V, the analog ground terminal "AGND" is connected to the analog ground AGND, the digital ground terminal "DGND" is connected to the digital ground DGND, the serial communication interface "CS", "CLK", and "SDI" terminals are respectively connected to the "CS1", "CLK", and "SDO" terminals of the control chip 9 for receiving the control signals sent by the control chip 9. The reference level input terminal "REF" is connected to a 2.5V high-precision reference voltage, and the output terminal "OUT" is connected to the positive input terminal "VZ+" of the Z channel of the multiplier 2 for providing a high-precision compensation voltage to the multiplier 2.

[0071] The power supply input terminal "V+" of the voltage reference chip 6 is connected to +15V, the ground terminal "GND" is connected to AGND, and the output terminal "OUT" is connected to the reference level input terminal "REF" of the bipolar DAC 5 for providing a high-precision reference voltage to the bipolar DAC 5.

[0072] The power supply input terminal "V+" of the digital potentiometer 7 is connected to +5V, the analog ground terminal "AGND" and the digital ground terminal "DGND" are commonly connected to the digital ground DGND. The serial communication interface "CS", "CLK", and "SDI" terminals are respectively connected to the "CS2", "CLK", and "SDO" of the control chip 9 for receiving the control signals sent by the control chip 9. The B terminal of the resistor of the digital potentiometer 7 is connected to AGND, the A terminal of the resistor and the cursor W terminal are short-circuited and commonly connected to one end of the resistor R1, and the other end of the resistor R1 is connected to the non-inverting input terminal "+" of the integrated operational amplifier 4. One end of the resistor R2 is connected to the non-inverting input terminal "+" of the integrated operational amplifier 4, and the other end is connected to the output terminal of the integrated operational amplifier 4. The control chip 9 can send control signals to the digital potentiometer 7 through the serial communication bus to dynamically adjust the resistance between the B terminal of the resistor and the cursor W terminal, and further for dynamically adjusting the output voltage value of the integrated operational amplifier 4, so as to achieve the purpose of dynamically calibrating the output power value.

[0073] The power supply input terminal "V+" of the 5V three-terminal voltage regulator 8 is connected to +15V, the ground terminal "GND" is connected to AGND, and the output terminal "OUT" is connected to the power supply input terminal "V+" of the digital potentiometer 7 and the control chip 9 for providing 5V voltage to the digital potentiometer 7 and the control chip 9. It should be noted that in Figure 3 In the shown structure diagram, for the case where a line is too long and inconvenient to draw, directly using the same network name indicates an electrical connection. For example, Figure 3 The network name "+5V" shown in indicates that the "V+" terminal of the digital potentiometer 7 and the "V+" terminal of the control chip 9 are both connected to the output terminal "OUT" of the 5V three-terminal voltage regulator 8. For the same network names marked in other signal lines, it can be understood that there is an electrical connection between the signal lines corresponding to each network name.

[0074] The power supply input terminal "V+" of the control chip 9 is connected to +5V, the ground terminal "GND" is connected to DGND, and "SDO" is the serial data output port of the control chip 9, which is connected to the serial data input ports "SDI" of the bipolar DAC 5 and the digital potentiometer 7, and is used to send data and instructions to the bipolar DAC 5 and the digital potentiometer 7. "CLK" is the clock signal output port of the control chip 9, which is connected to the clock signal input ports "CLK" of the bipolar DAC 5 and the digital potentiometer 7, and is used to provide synchronous clock signals to the bipolar DAC 5 and the digital potentiometer 7. "CS1" is the chip select control output port of the control chip 9, which is connected to the chip select control input port "CS" of the bipolar DAC 5, and is used to control the working state of the bipolar DAC 5. When the digital quantity output by the "CS1" port of the control chip 9 is "0", the bipolar DAC 5 can effectively receive the data and instructions sent by the "SDO" port of the control chip 9, and execute corresponding actions according to the received data and instructions. When the digital quantity output by the "CS1" port of the control chip 9 is "1", no matter what data and instructions are sent by the "SDO" port of the control chip 9, the bipolar DAC 5 does not execute and keeps the previous output state unchanged. "CS2" is also the chip select control output port of the control chip 9, which is connected to the chip select control input port "CS" of the digital potentiometer 7, and is used to control the working state of the digital potentiometer 7. When the digital quantity output by the "CS2" port of the control chip 9 is "0", the digital potentiometer 7 can effectively receive the data and instructions sent by the "SDO" port of the control chip 9, and execute corresponding actions according to the received data and instructions. When the digital quantity output by the "CS2" port of the control chip 9 is "1", no matter what data and instructions are sent by the "SDO" port of the control chip 9, the digital potentiometer 7 does not execute and keeps the previous output state unchanged.

[0075] Before calibration using Figure 4 the calibration device shown, it is necessary to pre-calibrate the static zero point of the radio frequency power measurement circuit and the calibration relationship between the resistance value and the output power value of the digital potentiometer. Among them, calibrating the static zero point of the radio frequency power measurement circuit means adjusting the output voltage of the bipolar DAC 5 in the standby state to make the output voltage of the integrated operational amplifier 4 be 0V, recording the digital control quantity of the bipolar DAC 5 at this time (corresponding to the target voltage compensation value), storing it in the control system of the control chip 9, and making the bipolar DAC 5 maintain this digital control quantity.

[0076] When determining the calibration relationship between the resistance value of the digital potentiometer 7 and the output power value of the radio frequency power measurement circuit, first set the resistance between the B terminal and the cursor W terminal of the digital potentiometer 7 as the unknown y, the output power as the unknown x, and the rated power as P. Set x = 0.2P, turn on the radio frequency power output of the radio frequency power measurement circuit, measure the actual output power, and adjust y through the control system of the control chip 9 until the actual output power of the radio frequency power measurement circuit is equal to the preset target output power value, and record y = y1 at this time. Repeat the above steps. When setting x = 0.4P, 0.6P, 0.8P, and 1.0P respectively, adjust the y value until the actual output power of the radio frequency power measurement circuit is equal to the preset target output power value, and record the y values as y2, y3, y4, and y5 respectively, and store them in the control system. This step determines the corresponding relationship between each preset output power value and each resistance value.

[0077] Then, according to the recorded x and y above, calculate the resistance value of the digital potentiometer between each power segmentation point (i.e., 0.2P, 0.4P, 0.6P, 0.8P, 1.0P). In this embodiment, set the calibration relationship between the resistance value of the digital potentiometer 7 and the output power value of the radio frequency power measurement circuit as a linear relationship, that is, y = kx + b.

[0078] According to the above analysis, when x = 0.2P, 0.4P, 0.6P, 0.8P, 1.0P, y = y1, y2, y3, y4, y5. Then when x ≤ 0.2P, set y = y1; according to y = kx + b, it can be obtained:

[0079]

[0080] According to y = y1 + k(x - x1), when 0.2P < x ≤ 0.4P:

[0081]

[0082] When 0.4P < x ≤ 0.6P:

[0083]

[0084] When 0.6P < x ≤ 0.8P:

[0085]

[0086] When 0.8P < x ≤ 1.0P:

[0087]

[0088] According to the above algorithm, the y value required within the power range of 0.2P < x ≤ 1.0P can be obtained. That is, the calibration relationship between the resistance value of the digital potentiometer 7 and the output power value of the radio frequency power measurement circuit is determined.

[0089] After the segmented calibration point configuration is completed, the control chip 9 automatically calculates the y value according to the set target output power value and the calibration relationship between the resistance value of the digital potentiometer 7 and the output power value of the radio frequency power measurement circuit, and then automatically configures the digital potentiometer 7 according to the calculated y value. Assume that the current set target output power value ≤ 0.2P. The control chip 9 automatically calculates the required resistance value y1 between the resistance B terminal and the cursor W terminal of the digital potentiometer 7 through formula (1), and then automatically writes the corresponding digital control quantity to the digital potentiometer 7 through the serial communication bus, achieving the purpose of real-time calibration within the current power segment. When the set target output power value switches to 0.2P < x ≤ 0.4P, the control chip 9 automatically obtains the required resistance value y2 between the resistance B terminal and the cursor W terminal of the digital potentiometer 7 according to formula (2), and then automatically writes the corresponding digital control quantity to the digital potentiometer 7 through the serial communication bus, achieving the purpose of real-time calibration within the current power segment.

[0090] It can be seen that regardless of the set target output power value, the control chip 9 can automatically calculate the required resistance value y between the resistance B terminal and the cursor W terminal of the digital potentiometer 7 through the preset algorithm, and then calculate the required digital control quantity D of the digital potentiometer 7. Assume that the model of the digital potentiometer 7 is AD8402-1, the resistance RAB between the resistance A terminal and the resistance B terminal is 1kΩ, and the relationship between the resistance RWB between the resistance B terminal and the cursor W terminal and the corresponding digital control quantity is shown in Table 1 below. The calculation formula of the digital control quantity D is as follows:

[0091] D (decimal digital quantity) = 255 - (y - 50) / (1000 ÷ 256)

[0092] The control chip 9 automatically writes the corresponding digital control quantity to the digital potentiometer 7 through the serial communication bus, and the purpose of real-time dynamic calibration can be achieved.

[0093] Table 1

[0094] Digital quantity D (decimal) RWB (Ω) Output status 0 1046 Full scale 128 546 Mid-level 254 54 1 LSB 255 50 Zero level (cursor contact resistance)

[0095] After automatic calibration, the output voltage of the integrated operational amplifier 4 is linearly related to the measured signal. Assume that the measured signal is 0, then the output of the integrated operational amplifier 4 is 0. Assume that the measured signal is P, then the output of the integrated operational amplifier 4 is Vout. Assume that the measured signal is 0.5P, then the output voltage of the integrated operational amplifier 4 is 0.5Vout. The output voltage of the integrated operational amplifier 4 is always strictly linearly related to the measured signal, achieving the linearization of the calibration of the output power of the radio frequency power supply.

[0096] In addition, the control chip 9 can control the working state of the digital potentiometer 7 by outputting different instructions through the chip select control output port. Suppose the set output power of the current radio frequency power supply is 0.1P, and the required resistance value of the digital potentiometer 7 is y1. The control chip 9 automatically calculates the required digital control quantity D1 of the digital potentiometer 7 according to the above algorithm, and then sets the control quantity output from the "CS2" port to "1" to enable the digital potentiometer 7 to be controlled by the control chip 9. The control chip 9 then makes the "CLK" port output a clock control signal, and then outputs the corresponding digital control quantity D1 to the digital potentiometer 7 through the "SDO" port, making the resistance value of the digital potentiometer 7 become y1. At this time, the output voltage of the integrated operational amplifier 4 is 0.1Vout. Suppose the set output power of the radio frequency power supply is now 0.3P, and the required resistance value of the digital potentiometer 7 is y2. The control chip 9 automatically calculates the required digital control quantity D2 of the digital potentiometer 7 according to the above algorithm, and then sets the control quantity output from the "CS2" port to "1" to enable the digital potentiometer 7 to be controlled by the control chip 9. The control chip 9 then makes the "CLK" port output a clock control signal, and then outputs the corresponding digital control quantity D2 to the digital potentiometer 7 through the "SDO" port, making the resistance value of the digital potentiometer 7 become y2. At this time, the output voltage of the integrated operational amplifier 4 is 0.3Vout. Suppose the set output power of the radio frequency power supply is now P, and the required resistance value of the digital potentiometer 7 is y5. The control chip 9 automatically calculates the required digital control quantity D5 of the digital potentiometer 7 according to the above algorithm, and then sets the control quantity output from the "CS2" port to "1" to enable the digital potentiometer 7 to be controlled by the control chip 9. The control chip 9 then makes the "CLK" port output a clock control signal, and then outputs the corresponding digital control quantity D5 to the digital potentiometer 7 through the "SDO" port, making the resistance value of the digital potentiometer 7 become y5. At this time, the output voltage of the integrated operational amplifier 4 is Vout.

[0097] It can be seen that by adopting the radio frequency phase calibration method provided in this embodiment, not only can the measurement error caused by the offset voltage of the multiplier and the integrated operational amplifier in the radio frequency power measurement circuit be reduced. Moreover, according to the calibration relationship between the resistance value of the digital potentiometer and the output power value of the radio frequency power measurement circuit, the target resistance value corresponding to the target output power value is determined, so that the controller can also control the resistance value of the digital potentiometer according to the target output power value of the radio frequency power measurement circuit, and then control the resistance value of the digital potentiometer to be the target resistance value, so that the actual output power value of the radio frequency power measurement circuit is calibrated to the target output power value, realizing the real-time dynamic calibration effect of the output value of the radio frequency power measurement circuit, and significantly improving the accuracy and linearity of the output power of the radio frequency power supply.

[0098] Figure 5is a schematic structural diagram of a radio frequency phase calibration device according to another embodiment of the present application. As Figure 5 shown, the device includes a radio frequency power measurement circuit, a control chip 9 (i.e., a controller), a bipolar DAC 5 (i.e., a voltage compensator), MDACs 7 (i.e., a parameter regulator), a voltage reference chip 6 (i.e., a voltage reference module), and a 5V three-terminal voltage regulator 8 (i.e., a voltage regulation module). The radio frequency power measurement circuit 10 includes a measurement circuit 1, a multiplier 2, a low-pass filter circuit 3, and an integrated operational amplifier 4 connected in sequence. The output terminal of the integrated operational amplifier 4 is connected to the reference voltage input terminal "REF" of the MDACs 7. By changing the digital control quantity of the MDACs 7 in real time through a digital calibration algorithm, the output voltage Vout of the MDACs 7 can be dynamically changed, thereby achieving the purpose of dynamic calibration.

[0099] It can be seen from Figure 5 that, Figure 5 compared with the calibration device shown in Figure 4 , the only difference is the type of the parameter regulator. Figure 4 The calibration device shown in Figure 5 selects a digital potentiometer as the parameter regulator, while the calibration device shown in Figure 4 selects MDACs as the parameter regulator. For other components, including the connection relationships and functions of the bipolar DAC 5, the voltage reference chip 6, the 5V three-terminal voltage regulator 8, the control chip 9, etc., they are the same as the corresponding components in Figure 4 , and will not be described in detail here.

[0100] In summary, specific embodiments of the present subject matter have been described. Other embodiments are within the scope of the appended claims. In some cases, the actions recited in the claims may be performed in a different order and still achieve the desired result. Additionally, the processes depicted in the figures do not necessarily require the particular order or sequential order shown to achieve the desired result. In certain embodiments, multitasking and parallel processing may be advantageous.

[0101] Those skilled in the art should understand that the embodiments of the present application may be provided as a method, a system, or a computer program product. Therefore, the present application may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware aspects. Moreover, the present application may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) that contain computer-usable program code.

[0102] This application is described with reference to the flowcharts and / or block diagrams of methods, apparatuses (systems), and computer program products according to embodiments of the present application. It should be understood that each flow and / or block in the flowchart and / or block diagram can be implemented by computer program instructions, and the combination of flows and / or blocks in the flowchart and / or block diagram can also be implemented by computer program instructions. These computer program instructions can be provided to the processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing devices to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing devices generate a device for realizing the functions specified in one or more of the flows Figure 1 one or more of the flows and / or blocks Figure 1 or a device for realizing the functions specified in one or more of the blocks.

[0103] It should also be noted that the term "comprising", "including", or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, commodity, or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or elements inherent to such a process, method, commodity, or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, commodity, or device including the said element.

[0104] Each embodiment in this specification is described in a progressive manner. The same or similar parts among the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the description of the method embodiment.

[0105] The above description is only for the embodiments of the present application and is not intended to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the scope of the claims of the present application.

Claims

1. A calibration device for a radio frequency power supply, characterized in that, The device includes a radio frequency power measurement circuit, a controller, a voltage compensator, and a parameter regulator; the radio frequency power measurement circuit includes a measurement circuit, a multiplier, and an operational amplifier connected in sequence; the controller is respectively connected to the voltage compensator and the parameter regulator, the voltage compensator is connected to the multiplier, and the parameter regulator is connected to the input end of the operational amplifier; The controller is configured to control the voltage compensator to output a voltage compensation value, which is a target voltage compensation value, so that when the calibration device is in the standby state, the voltage output value of the radio frequency power measurement circuit is zero; control the parameter value of the parameter regulator according to the target output power value of the radio frequency power measurement circuit, so that the actual output power value of the radio frequency power measurement circuit is calibrated to the target output power value; The controlling the parameter value of the parameter regulator according to the target output power value of the radio frequency power measurement circuit includes: determining a target parameter value corresponding to the target output power value according to the calibration relationship between the parameter value of the parameter regulator and the output power value of the radio frequency power measurement circuit; controlling the parameter value of the parameter regulator to be the target parameter value; The voltage compensator is configured to provide the voltage compensation value to the multiplier; The parameter regulator is configured to calibrate the output power value of the operational amplifier by adjusting the parameter value.

2. The device according to claim 1, wherein The controller includes a serial data output port and a chip select control output port; The controller sends a control instruction to the voltage compensator through the serial data output port to control the voltage compensator to output the voltage compensation value; and sends a control instruction to the parameter regulator through the serial data output port to control the parameter regulator to adjust the parameter value; The controller controls the working states of the voltage compensator and / or the parameter regulator through the chip select control output port; wherein, if the chip select control output port outputs a first instruction, the working states of the voltage compensator and / or the parameter regulator are to effectively receive the control instruction; if the chip select control output port outputs a second instruction, the working states of the voltage compensator and / or the parameter regulator are to ineffectively receive the control instruction.

3. The device according to claim 1, characterized in that, The parameter regulator includes a variable resistor or a variable voltage regulator; When the parameter regulator is the variable resistor, the controller is configured to adjust the resistance value of the variable resistor according to the target output power value, so as to calibrate the output power value of the radio frequency power measurement circuit by adjusting the resistance value of the variable resistor; When the parameter regulator is the variable voltage regulator, the controller is configured to adjust the voltage value of the variable voltage regulator according to the target output power value, so as to calibrate the output power value of the radio frequency power measurement circuit by adjusting the voltage value of the variable voltage regulator.

4. The device according to claim 1, characterized in that, The device further includes a voltage reference module; the voltage compensator includes a reference level input end and a voltage output end; The voltage reference module is connected to the reference level input terminal of the voltage compensator, and is configured to provide a reference voltage to the voltage compensator through the reference level input terminal; The voltage compensator provides the voltage compensation value to the multiplier through the voltage output terminal.

5. The device according to claim 1, characterized in that, The device further includes a voltage stabilization module, and the parameter regulator and the controller respectively include power supply input terminals; The voltage stabilization module is respectively connected to the power supply input terminals of the parameter regulator and the controller; the voltage stabilization module is configured to provide a preset voltage value to the parameter regulator and the controller respectively through the respective power supply input terminals.

6. A calibration method for a radio frequency power supply, characterized in that, A calibration device applied to the radio frequency power supply according to any one of claims 1-5; the method includes: After the calibration device is powered on, controlling the voltage compensator to output a target voltage compensation value; when the voltage compensator outputs the target voltage compensation value, the voltage output value of the radio frequency power measurement circuit is zero; Determining a target output power value of the radio frequency power measurement circuit; determining a target parameter value corresponding to the target output power value according to a calibration relationship between the parameter value of the parameter regulator and the output power value of the radio frequency power measurement circuit; the target parameter value is used to calibrate the actual output power value of the radio frequency power measurement circuit to the target output power value; Controlling the parameter value of the parameter regulator to be the target parameter value.

7. The method according to claim 6, characterized in that, The method further includes: Controlling the voltage compensator to output a first voltage compensation value; When the voltage compensator outputs the first voltage compensation value, determining the voltage output value of the radio frequency power measurement circuit; Judging whether the voltage output value of the radio frequency power measurement circuit is zero; If so, determining the first voltage compensation value as the target voltage compensation value; If not, adjusting the first voltage compensation value at least once until the voltage output value of the radio frequency power measurement circuit is zero when the voltage compensator outputs the adjusted voltage compensation value; determining the adjusted voltage compensation value as the target voltage compensation value.

8. The method according to claim 6, wherein The method further includes: Determining a plurality of preset output power values of the radio frequency power measurement circuit; For any one of the preset output power values, adjusting the parameter value of the parameter regulator to a first parameter value so that the actual output power value of the radio frequency power measurement circuit is consistent with the preset output power value; Determining the corresponding relationship between each of the preset output power values and each of the first parameter values; According to the corresponding relationship, determining the calibration relationship between the parameter value of the parameter regulator and the output power value of the radio frequency power measurement circuit.

9. The method according to claim 6, characterized in that, The controlling the voltage compensator to output a target voltage compensation value includes: Outputting a preset instruction; the preset instruction is used to indicate that the working state of the voltage compensator is to effectively receive a first control instruction; Sending the first control instruction to the voltage compensator, and the first control instruction carries first adjustment information corresponding to the target voltage compensation value; Controlling the voltage compensator to output the target voltage compensation value based on the first adjustment information through the first control instruction.

10. The method according to claim 6, characterized in that Controlling the parameter value of the parameter regulator to be the target parameter value includes: Outputting a preset instruction; the preset instruction is used to indicate that the working state of the parameter regulator is to effectively receive a second control instruction; Sending the second control instruction to the parameter regulator; the second control instruction carries second adjustment information corresponding to the target parameter value; Controlling the parameter regulator to output the target parameter value based on the second adjustment information through the second control instruction.

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