Two-dimensional scanning system and measurement method for high-throughput material characterization

Abstract

Two-dimensional scanning system and method for high-throughput material characterization are applied to the field of high-throughput material characterization and scanning.The application proposes two different two-dimensional scanning systems and methods, which are composed of a laser, an efficient light splitting unit, a sample and a photodetector, and realize material scanning with high sampling speed, large data volume and high spatial / time resolution. 2 The two-dimensional scanning system based on spatial point-by-point method adopts a single MEMS mirror and a two-dimensional 1x n 2 MEMS mirror combination to perform point-by-point scanning on the sample; the two-dimensional scanning system based on spatial parallel method utilizes two two-dimensional 1x n MEMS mirror combination to perform parallel scanning. Both methods can be used for high-throughput material characterization technology, and the scanning system based on MEMS time-to-two-dimensional space mapping and the scanning system based on direct mapping to two-dimensional space by spatial spreader / disperser can greatly improve the scanning speed.

Description

TECHNICAL FIELD

[0001] The present application relates to three two-dimensional scanning methods for material characterization, in particular to two-dimensional scanning using MEMS mirrors or spatial disperser / diffuser for high-throughput material characterization, belonging to the field of high-throughput material characterization and scanning. BACKGROUND

[0002] High-throughput materials refer to the preparation of a large number of material samples containing different components at one time, and the rapid acquisition of data such as components, microstructure and macroscopic performance of different materials through parallel processing method, so as to establish the mapping relationship among the three, and finally realize the rapid material optimization. After 40 years of development, high-throughput material preparation and characterization technology has made great progress and has been proven to effectively accelerate the process of material research and development, so it is listed as one of the three key technologies of the material genome project.

[0003] After preparing high-throughput materials, the next step is to measure the material performance parameters, so as to obtain the mapping table of material components-macroscopic performance parameters.

[0004] At present, high-throughput characterization technology based on optical methods is developing rapidly. For example, the United States integrated micro-area x-ray fluorescence and diffraction system developed a micro-area transient microwave probe microscope with a spatial resolution of 10 μm, which can simultaneously detect the composition and structure of high-throughput materials. Professor of University of Maryland reported a method for characterizing array samples based on ellipsometric surface imaging technology, which can realize high-throughput characterization of array sample thickness and refractive index. In addition to ellipsometric surface imaging technology, laser ellipsometer, cathode fluorometer, etc. can realize high-throughput micro-area optical property characterization.

[0005] Micro-electro-mechanical system (MEMS, Micro-Electro-Mechanical System) refers to a device with a size of several millimeters or even smaller, which is an independent intelligent system. MEMS micro-mirror refers to a micro-optical mirror integrated with a MEMS driver manufactured by optical MEMS technology.

[0006] Two-dimensional spatial disperser / diffuser can convert incident broadband light into light beams in two-dimensional spatial spectral mode, which is usually called spectral cluster. It creates a one-to-one mapping between two-dimensional spatial coordinates and light wavelengths.

[0007] The fundamental purpose of the present application is to use MEMS mirrors or two-dimensional spatial disperser / diffuser for two-dimensional scanning for high-throughput material characterization, which can realize high sampling speed, large data volume, high spatial / time resolution material scanning. SUMMARY

[0008] The application aims to provide a two-dimensional scanning system and a measuring method for high-throughput material characterization.

[0009] The application provides two two-dimensional scanning systems for high-throughput material characterization, which are composed of a laser, a high-efficiency light splitting unit, a sample and a photodetector, and high-throughput detection is realized through fast scanning.

[0010] The key of the application is to design a scanning system for converting from time to two-dimensional space and converting from frequency to two-dimensional space by using a MEMS mirror or a spatial diffuser / disperser, so that the speed of the scanning system is greatly improved.

[0011] The technical scheme adopted by the application is specifically as follows:

[0012] A two-dimensional scanning system based on a spatial point-by-point method, comprising:

[0013] A laser serving as a light source of the scanning system;

[0014] A first collimator located behind an optical fiber connected with the laser, used for collimating the laser transmitted by the optical fiber into free-space parallel light;

[0015] A first Wave plate located behind the first collimator, used for changing the polarization direction of the laser beam;

[0016] A polarization beam splitter located behind the first Wave plate, used for changing the propagation direction of the light beam reflected by the sample, so as to facilitate the photodetector to receive;

[0017] A second Wave plate located behind the polarization beam splitter, used for changing the polarization direction of the light beam emitted from the polarization beam splitter and changing the polarization direction of the light beam reflected by the sample;

[0018] A single MEMS mirror located behind the second Wave plate, used for controlling the direction of the laser beam, so that the laser beam is incident on a two-dimensional 1xN 2 MEMS mirror;

[0019] A two-dimensional 1xN 2 MEMS mirror, used for receiving the laser beam emitted from the single MEMS mirror, so that the light beam can be normally incident on the sample and return;

[0020] A sample located below the two-dimensional 1xN 2 MEMS mirror, which is a material to be characterized in high throughput;

[0021] A second collimator located in the direction of the light beam reflected by the polarization beam splitter, used for inputting the free-space parallel light reflected by the sample into an optical fiber and transmitting the light to a photodetector.

[0022] A photodetector, located after the second collimator, is used to receive the light signal returned from the sample;

[0023] The system consists of a single MEMS mirror and a two-dimensional 1×n 2 The scanning process using a combination of MEMS mirrors follows these steps:

[0024] Step 1: Construct the above two-dimensional scanning system according to the optical path.

[0025] Step 2: Control the rotation direction of the single MEMS mirror so that the laser beam is incident on a two-dimensional 1×n... 2 On one of the lenses of the MEMS reflector.

[0026] Step 3: Adjust the two-dimensional 1×n 2 The angle of the MEMS mirror is adjusted so that the laser beam is incident perpendicularly onto the corresponding sample point.

[0027] Step 4: The reflected light from the sample point passes sequentially through a two-dimensional 1×n... 2 MEMS mirror, single MEMS mirror, second A waveplate, a polarization beam splitter, emits light from the direction of reflection of the polarization beam splitter, which is received by the second collimator and transmitted to the photodetector.

[0028] Step 5: The photodetector receives the reflected light from the sample point.

[0029] Step Six: Control the rotation direction of the single MEMS mirror so that the laser beam is incident on the two-dimensional 1×n mirror in a certain point-by-point scanning manner. 2 On the MEMS reflector at different positions of the lens, and repeat steps three through five.

[0030] A two-dimensional scanning system based on spatial parallelism includes:

[0031] Laser, used as the light source for the scanning system;

[0032] A 1×N fiber beam splitter, located after the laser, is used to split a laser beam into 1×N beams.

[0033] N groups of 1×M fiber beam splitters are located after the 1×N fiber beam splitter and are used to split 1×N laser beams into M×N beams.

[0034] The first M×N collimator group, located after N 1×M fiber beam splitter groups, is used to collimate the laser transmitted in the fiber into free space parallel light.

[0035] First A waveplate, located after the first M×N collimator group, is used to change the polarization direction of the laser beam;

[0036] a polarization beam splitter, located behind the first a wave plate, located behind the polarization beam splitter, for changing the propagation direction of the light beam reflected by the sample, facilitating the receiving by the photodetector;

[0037] a second a wave plate, located behind the polarization beam splitter, for changing the polarization direction of the light beam emitted from the polarization beam splitter and the polarization direction of the light beam reflected by the sample;

[0038] a first two-dimensional 1×n 2 MEMS mirror, located behind the second wave plate, for controlling the direction of the laser light beam, so that the M×N laser light beams are incident on the corresponding mirrors of the second two-dimensional 1×n 2 MEMS mirror;

[0039] a second two-dimensional 1×n 2 MEMS mirror, for receiving the M×N laser light beams emitted by the first two-dimensional 1×n 2 MEMS mirror, so that the light beams can be normally incident on the sample;

[0040] a sample, located below the two-dimensional 1×n 2 MEMS mirror, a material to be characterized at high throughput;

[0041] a second M×N collimator group, located in the reflection direction of the polarization beam splitter, for inputting the M×N free-space parallel light beams reflected by the sample into optical fibers and transmitting them to photodetectors;

[0042] an M×N photodetector group, located behind the second M×N collimator, for receiving the optical signals returned from the sample;

[0043] The system is composed of a first two-dimensional 1×n 2 MEMS mirror and a second two-dimensional 1×n 2 MEMS mirror, and its working steps are as follows:

[0044] Step one: build the above two-dimensional scanning system according to the optical path.

[0045] Step two: control the mirror direction of the first two-dimensional 1×n 2 MEMS mirror, so that the M×N laser light beams are incident on the corresponding mirrors of the second two-dimensional 1×n 2 MEMS mirror, through the reflection of the second two-dimensional 1×n 2 MEMS mirror, so that the laser light beams are incident on the corresponding sample points.

[0046] Step three: the reflected light of the sample points successively passes through the second two-dimensional 1×n 2MEMS mirror, first two-dimensional 1 x n 2 MEMS mirror, second Wave plate, polarizing beam splitter, reflected direction from polarizing beam splitter, received by second M x N collimator group and transmitted to M x N photodetector group.

[0047] Step four: M x N photodetector group receives sample point reflected light. BRIEF DESCRIPTION OF DRAWINGS

[0048] Figure 1 The optical path diagram of the two-dimensional scanning system based on spatial point-by-point method.

[0049] In the figure, laser 101, first collimator 102a, first Wave plate 103a, polarizing beam splitter 104, second Wave plate 103b, single MEMS mirror 105, two-dimensional 1 x n 2 MEMS mirror 106, sample 107, second collimator 102b, photodetector 108.

[0050] Wherein the laser 101, the first collimator 102a is connected by optical fiber, the second collimator 102b, photodetector 109 is connected by optical fiber.

[0051] Figure 2 The scanning sequence diagram of the two-dimensional scanning system based on spatial point-by-point method.

[0052] In the figure, scanning time sequence 201, point t mn Indicates the time point, the arrow direction indicates the scanning sequence, scanning space sequence 202, point P mn Indicates the sample point, the arrow direction indicates the scanning sequence.

[0053] Figure 3 The optical path diagram of the two-dimensional scanning system based on spatial parallel method.

[0054] In the figure, laser 301, 1 x N optical fiber beam splitter 302, N 1 x M optical fiber beam splitter group 303, first M x N collimator group 304a, first Wave plate 305a, polarizing beam splitter 306, second Wave plate 305b, first two-dimensional 1 x n 2 MEMS mirror 307a, second two-dimensional 1 x n 2 MEMS mirror 307b, sample 308, second M x N collimator group 304b, M x N photodetector group 309.

[0055] Among them, the laser 301, the 1×N fiber beam splitter 302, the N 1×M fiber beam splitter groups 303, and the first M×N collimator group 304a are connected by optical fibers, and the second M×N collimator group 304b and the M×N photodetector group 309 are connected by optical fibers. Detailed Implementation

[0056] The specific embodiments of the present invention will be further described below with reference to the accompanying drawings:

[0057] Example 1:

[0058] This method uses a two-dimensional scanning device for material characterization based on MEMS mirrors. Figure 1 This is the optical path diagram of a two-dimensional scanning system based on the spatial point-by-point method. High-throughput material characterization is achieved through the rotation of MEMS mirrors.

[0059] Step 1: According to Figure 1 The optical path is constructed sequentially from laser 101, first collimator 102a, and first... Waveplate 103a, polarization beam splitter 104, second Wave plate 103b, single MEMS mirror 105, 2D 1×n 2 A two-dimensional scanning system consisting of MEMS mirror 106, sample 107, second collimator 102b, and photodetector 108.

[0060] Step 2: Control the rotation direction of the single MEMS mirror 105 so that the laser beam is incident on the two-dimensional 1×n 2 On one of the lenses of MEMS reflector 106.

[0061] Step 3: Adjust the two-dimensional 1×n 2 The angle of the MEMS reflector 106 is such that the laser beam is incident perpendicularly on the corresponding point of the sample 107.

[0062] Step 4: The reflected light from sample 107 passes sequentially through a two-dimensional 1×n... 2 MEMS mirror 106, single MEMS mirror 105, second Waveplate 103b, polarization beam splitter 104, emitted from the reflection direction of polarization beam splitter 104, received by second collimator 102b and transmitted to photodetector 108.

[0063] Step 5: The photodetector 108 receives the reflected light from the sample 107.

[0064] Step Six: Control the rotation direction of the single MEMS mirror 105 so that the laser beam follows the direction of rotation. Figure 2 The light is incident sequentially into the two-dimensional 1×n array in scanning order 202. 2The sample point 201 is scanned on different positions of the MEMS mirror 106, and steps three to five are repeated.

[0065] Example 2:

[0066] This method is based on a two-dimensional scanning system using spatial parallel methods, and is used for material characterization techniques, such as... Figure 3 This is the optical path diagram of the system.

[0067] Step 1: According to Figure 3 The optical path shown is constructed sequentially from a laser 301, a 1×N fiber beam splitter 302, N 1×M fiber beam splitter groups 303, a first M×N collimator group 304a, and a first... Waveplate 305a, polarization beam splitter 306, second Waveplate 305b, first two-dimensional 1×n 2 MEMS mirror 307a, second two-dimensional 1×n 2 A two-dimensional scanning system consisting of MEMS mirror 307b, sample 308, second M×N collimator group 304b, and M×N photodetector group 309.

[0068] Step 2: By controlling the first two-dimensional 1×n 2 The mirror orientation of MEMS mirror 307a allows M×N laser beams to be incident on the second two-dimensional 1×n... 2 On the lens at the corresponding position of MEMS reflector 307b, through the second two-dimensional 1×n 2 The reflection from MEMS mirror 307b causes the laser beam to be incident on the corresponding point of sample 308.

[0069] Step 3: The reflected light from sample 308 passes sequentially through the second two-dimensional 1×n 2 MEMS reflector 307b, first two-dimensional 1×n 2 MEMS reflector 307a, second Waveplate 305b, polarization beam splitter 306, emitted from the reflection direction of polarization beam splitter 306, received by the second M×N collimator group 304b and transmitted to the M×N photodetector group 309.

[0070] Step 4: The M×N photodetector group 309 receives the reflected light from the sample 308.

Claims

1. A two-dimensional scanning system for high-throughput material characterization based on spatial point-by-point method, characterized by comprising: The system is composed of a laser, a first collimator, a first 1 / 2 wave plate, a polarization beam splitter, a second 1 / 2 wave plate, a single MEMS mirror, a two-dimensional 1x n 2 The system is composed of a laser, a first collimator, a first 1 / 2 wave plate, a polarization beam splitter, a second 1 / 2 wave plate, a single MEMS mirror, a two-dimensional 1x n 2 The combination of MEMS mirrors scans as an efficient light splitting unit of the system.

2. The two-dimensional scanning system for high-throughput material characterization according to claim 1, characterized by comprising: a laser as a light source of the scanning system; a first collimator located behind an optical fiber connected with the laser, for collimating the laser transmitted by the optical fiber into free-space parallel light; a first 1 / 2 wave plate located behind the first collimator, for changing the polarization direction of the laser beam; a polarization beam splitter located behind the first 1 / 2 wave plate, for changing the propagation direction of the light beam reflected by the sample, so as to facilitate the reception by the photodetector; a second 1 / 2 wave plate located behind the polarization beam splitter, for changing the polarization direction of the light beam emitted from the polarization beam splitter and the polarization direction of the light beam reflected by the sample; A single MEMS mirror, located after the second 1 / 2 wave plate, is used to control the direction of the laser beam so that the laser beam is incident on the two-dimensional 1 x n 2 different positions of the MEMS mirror; Two-dimensional 1 x n 2 MEMS mirror for receiving the laser beam exiting from the single MEMS mirror so that the beam can be normally incident on the sample and returned; Samples, located in two dimensions 1 x n 2 Materials to be characterized at high throughput under MEMS mirrors; a second collimator located in the direction of the light beam reflected by the polarization beam splitter, for inputting the free-space parallel light reflected by the sample into the optical fiber and transmitting to the photodetector; a photodetector located behind the second collimator, for receiving the light signal returned from the sample.

3. A two-dimensional scanning method based on spatial point-by-point method, characterized by comprising the following steps: Step one: building the two-dimensional scanning system in claim 1; Step two: control the rotation direction of the single MEMS mirror, so that the laser beam is incident on a certain mirror of the two-dimensional 1 x n 2 MEMS mirror; Step three: adjust the two-dimensional 1 x n 2 the angle of the MEMS mirror so that the laser beam is normally incident on the corresponding sample point; Step four: the reflected light of the sample point passes through the two-dimensional 1x n 2 MEMS mirror, single MEMS mirror, second 1 / 2 wave plate, polarization beam splitter, reflected direction from the polarization beam splitter, received by the second collimator and transmitted to the photodetector; Step five: the photodetector receives the reflected light of the sample point. Step six: control the rotation direction of the single MEMS mirror, so that the laser beam is incident on the two-dimensional 1 x n 2 MEMS mirror lens at different positions, and repeat steps three to five.

4. The two-dimensional scanning method based on spatial point-by-point method according to claim 3, wherein the point-by-point scanning manner includes but is not limited to from top to bottom and from left to right.

5. A two-dimensional scanning system for high-throughput material characterization based on spatial parallel method, characterized by comprising: laser, 1xN fiber beam splitter, MxN collimator group, first 1 / 2 wave plate, polarization beam splitter, second 1 / 2 wave plate, first two-dimensional 1x n 2 MEMS mirror, second two-dimensional 1x n 2 MEMS mirror, sample, MxN collimator group, MxN photodetector group, and the system is composed of first two-dimensional 1x n 2 MEMS mirror and second two-dimensional 1x n 2 The combination of MEMS mirrors carries out parallel scanning, serving as an efficient light splitting unit of the system.

6. The two-dimensional scanning system for high-throughput material characterization according to claim 5, characterized by comprising: a laser as a light source of the scanning system; a 1×N optical fiber beam splitter located behind the laser, for splitting one laser beam into 1×N beams; a group of N 1×M optical fiber beam splitters located behind the 1×N optical fiber beam splitter, for splitting the 1×N laser beams into M×N beams; a first group of M×N collimators located behind the group of N 1×M optical fiber beam splitters, for collimating the laser transmitted by the optical fiber into free-space parallel light; a first 1 / 2 wave plate located behind the first group of M×N collimators, for changing the polarization direction of the laser beam; a polarization beam splitter located behind the first 1 / 2 wave plate, for changing the propagation direction of the light beam reflected by the sample, so as to facilitate the reception by the photodetector; a second 1 / 2 wave plate located behind the polarization beam splitter, for changing the polarization direction of the light beam emitted from the polarization beam splitter and the polarization direction of the light beam reflected by the sample; first two-dimensional 1 x n 2 a MEMS mirror, located behind the second 1 / 2 wave plate, for controlling the direction of the laser beam so that the M x N laser beams are incident on a second two-dimensional 1 x n 2 a corresponding mirror of the MEMS mirror; second two-dimensional 1 x n 2 a MEMS mirror for receiving the M x N laser beams emitted by the first two-dimensional 1 x n 2 a MEMS mirror for receiving the M x N laser beams emitted by the first two-dimensional 1 x n Samples, located in two dimensions 1 x n 2 Materials to be characterized at high throughput under MEMS mirrors; a second group of M×N collimators located in the reflection direction of the polarization beam splitter, for inputting the M×N free-space parallel light reflected by the sample into the optical fiber and transmitting to the photodetector; a group of M×N photodetectors located behind the second group of M×N collimators, for receiving the light signal returned from the sample.

7. A spatially parallel based two-dimensional scanning method, characterized by comprising the following steps: Step one: building the two-dimensional scanning system in claim 5 in order; Step two: by controlling the first two-dimensional 1 x n 2 MEMS mirror lens direction, so that M x N laser beams are incident on the second two-dimensional 1 x n 2 MEMS mirror corresponding position of the lens, through the second two-dimensional 1 x n 2 MEMS mirror reflection, so that the laser beam is incident on the corresponding sample point; Step three: the reflected light of the sample point passes through the second two-dimensional 1 x n 2 MEMS mirror, first two-dimensional 1 x n 2 MEMS mirror, second 1 / 2 wave plate, polarization beam splitter, exit from the reflected direction of the polarization beam splitter, received by the second M x N collimator group and transmitted to the M x N photodetector group; Step four: the group of M×N photodetectors receives the reflected light of the sample point.

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