Edge ring assembly, edge ring replacement method, and electrostatic chuck

Abstract

The application discloses an edge ring assembly, an edge ring replacement method and an electrostatic chuck, and belongs to the technical field of semiconductor manufacturing, and aims to solve the problems of complex operation and long time consumption in maintenance and repair of the edge ring in the prior art. The edge ring assembly comprises a plurality of axially stacked edge rings, a lifting assembly for driving the edge rings to move axially, and a mechanical hand for moving the edge ring at the top. The edge ring replacement method comprises the following steps: opening the lifting assembly, driving the plurality of edge rings to move upward by the lifting assembly, moving the edge ring at the top out of the wafer manufacturing area, moving the edge ring at the top to the outside of the reaction chamber by the mechanical hand, moving the edge ring below the edge ring at the top and adjacent to the edge ring at the top into the wafer manufacturing area as a new edge ring, and thus completing the replacement of the edge ring. The edge ring assembly, the edge ring replacement method and the electrostatic chuck can be used for wafer manufacturing.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor manufacturing, and particularly relates to an edge ring assembly, an edge ring replacement method and an electrostatic chuck. BACKGROUND

[0002] In the current wafer manufacturing process, the wafer is usually placed on an electrostatic chuck, and the top of the electrostatic chuck is provided with an edge ring.

[0003] The existing edge ring adopts a single structure, as shown in Figure 1 , and the number of edge rings is only one. When the original edge ring is damaged or reaches the service life, the reaction chamber needs to be opened, the original edge ring is taken out, and a new edge ring is installed. Obviously, the operation of maintenance and maintenance of the above-mentioned edge ring is complex and time-consuming. SUMMARY

[0004] In view of the above analysis, the present application aims to provide an edge ring assembly, an edge ring replacement method and an electrostatic chuck to solve the problem of complex operation and long time consumption of maintenance and maintenance of the edge ring in the prior art.

[0005] The purpose of the present application is mainly realized by the following technical solutions:

[0006] The present application provides an edge ring assembly, which comprises a plurality of axially stacked edge rings, a lifting assembly for driving the edge ring to move axially, and a mechanical hand for moving the edge ring at the top.

[0007] Further, the above-mentioned edge ring comprises a base ring and a plurality of support members arranged above and / or below the base ring, and the mechanical hand is inserted between the plurality of support members.

[0008] Further, the radial thickness of the above-mentioned base ring is 5.0-7.0mm.

[0009] Further, the radial thickness of the above-mentioned base ring is 5.0mm, 5.7mm, 6.0mm, 6.3mm or 7.0mm.

[0010] Further, the radial thickness of the above-mentioned mechanical hand along the base ring is 3.0-4.0mm.

[0011] Further, the radial thickness of the above-mentioned mechanical hand along the base ring is 3.0mm, 3.2mm, 3.5mm or 4mm.

[0012] Further, the number of the above-mentioned support members is two, and the two support members are arranged radially symmetrically relative to the base ring.

[0013] Further, the cross-sectional shape of the support member along the radial direction of the base ring is circular, square, rectangular, diamond, trapezoidal or fan ring.

[0014] Further, the gap between two adjacent edge rings is 5.0-7.0 mm.

[0015] Further, the gap between two adjacent edge rings is 5.0 mm, 5.7 mm, 6.0 mm, 6.3 mm or 7.0 mm.

[0016] Further, when the support is arranged above or below the base ring, the thickness of the support along the radial direction of the base ring is 5.0-7.0 mm.

[0017] Further, when the support is arranged above or below the base ring, the thickness of the support along the radial direction of the base ring is 5.0 mm, 5.7 mm, 6.0 mm, 6.3 mm or 7.0 mm.

[0018] Further, when the support is arranged above and below the base ring, the total thickness of the two supports along the radial direction of the base ring between two adjacent base rings is 5.0-7.0 mm.

[0019] Further, when the support is arranged above and below the base ring, the total thickness of the two supports along the radial direction of the base ring between two adjacent base rings is 5.0 mm, 5.7 mm, 6.0 mm, 6.3 mm or 7.0 mm.

[0020] Further, the lifting assembly comprises a support cylinder, a motor and a motor controller, the edge ring at the bottom is arranged at the top end of the support cylinder, the output shaft of the motor is connected with the top end of the support cylinder, and the motor controller controls the extension and retraction of the output shaft of the motor and drives the top end of the support cylinder to move along the radial direction of the edge ring.

[0021] Further, the number of lifting assemblies is multiple, and the multiple lifting assemblies are uniformly arranged along the axial direction of the edge ring.

[0022] Further, the output shaft of the motor is sleeved with a bellows sleeve, and the bellows sleeve is located between the support cylinder and the output shaft of the motor.

[0023] Further, in order to further protect the output shaft of the motor, the above-mentioned bellows sleeve comprises multiple layers of sleeved bellows.

[0024] Further, the number of layers of the bellows is two.

[0025] Further, the edge ring assembly further comprises a general controller, a plurality of signal transmitting ends and a signal receiving end, the inner wall of each edge ring is provided with a group of signal transmitting ends, the signal receiving end is arranged on the outer wall of the electrostatic chuck, each group of signal transmitting ends comprises a plurality of transmitting terminals arranged on the same radial plane of the edge ring, the transmitting terminals correspond to the motor output shaft one by one and are located directly above the motor output shaft, the signal receiving end comprises a plurality of receiving terminals arranged on the same radial plane of the electrostatic chuck, the transmitting terminals correspond to the receiving terminals in position. During the upward movement of the edge ring, the receiving terminals receive the signals transmitted by the plurality of transmitting terminals on one of the edge rings and send the signals to the general controller, the general controller records a plurality of time data of the received signals and calculates the average value of the plurality of time data, if a certain time data is equal to the average value, it indicates that the position of the edge ring corresponding to the time data does not need to be adjusted; if a certain time data is earlier than the average value, it indicates that one side of the edge ring corresponding to the time data is upwardly inclined, and the general controller drives the downward movement of the upwardly inclined side of the edge ring through the corresponding motor controller, motor and motor output shaft in sequence; if a certain time data is later than the average value, it indicates that one side of the edge ring corresponding to the time data is downwardly inclined, and the general controller drives the upward movement of the downwardly inclined side of the edge ring through the corresponding motor controller, motor and motor output shaft in sequence.

[0026] The application further provides an edge ring replacement method using the edge ring assembly, which comprises the following steps:

[0027] The lifting assembly is started to drive the plurality of edge rings to move upwardly, the top edge ring moves out of the wafer manufacturing area, the robot moves the top edge ring to outside the reaction chamber, the edge ring below the top edge ring and adjacent to the top edge ring enters the wafer manufacturing area as a new edge ring, thereby completing the replacement of the edge ring.

[0028] Further, when the plurality of edge rings stored in the edge ring assembly are all used up, the replacement method further comprises the following steps:

[0029] The plurality of edge rings are reinstalled on the lifting assembly, the lifting assembly is started to drive the plurality of edge rings to move downwardly, so that the top edge ring enters the wafer manufacturing area.

[0030] Further, the edge ring assembly further comprises a general controller, a plurality of signal transmitting ends and a signal receiving end. The edge ring replacement method further comprises the following steps: during the upward movement of the edge ring, the receiving terminals receive the signals transmitted by the plurality of transmitting terminals on one of the edge rings and send the signals to the general controller, the general controller records a plurality of time data of the received signals and calculates the average value of the plurality of time data;

[0031] If a certain time data is equal to the average value, it indicates that the position of the edge ring corresponding to the time data does not need to be adjusted;

[0032] If the time data is earlier than the average value, it indicates that the side of the edge ring corresponding to the time data is inclined upward, and the main controller drives the downward movement of the side of the edge ring inclined upward in sequence through the corresponding motor controller, motor and motor output shaft;

[0033] If the time data is later than the average value, it indicates that the side of the edge ring corresponding to the time data is inclined downward, and the main controller drives the upward movement of the side of the edge ring inclined downward in sequence through the corresponding motor controller, motor and motor output shaft.

[0034] The application provides an electrostatic chuck comprising the edge ring assembly.

[0035] Further, the electrostatic chuck further comprises a base and a chuck provided on the base, and the plurality of edge rings are provided on the edge of the chuck or the edge of the chuck and the base.

[0036] Further, the plurality of edge rings can be all provided on the edge of the chuck, or part of the plurality of edge rings is provided on the edge of the chuck and the other part is provided on the edge of the base.

[0037] Compared with the prior art, the application can achieve at least one of the following beneficial effects:

[0038] a) The edge ring assembly provided by the application adopts a composite structure, stores a plurality of edge rings in the reaction chamber at the same time, and drives the upward movement of the plurality of edge rings through the lifting assembly, so that the damaged or life-expired edge rings are moved out of the wafer manufacturing area, and the damaged or life-expired edge rings can be moved to the outside of the reaction chamber through the robot without opening the reaction chamber, and the new edge rings located below and adjacent to the damaged or life-expired edge rings enter the wafer manufacturing area, so that the operation is simple and time-saving and labor-saving.

[0039] b) The edge ring assembly provided by the application can prolong the maintenance and maintenance period of the whole edge ring assembly because the plurality of edge rings are provided in the edge ring assembly.

[0040] c) The edge ring assembly provided by the application can further simplify the maintenance and maintenance of the edge ring and the maintenance and maintenance of the reaction chamber because the plurality of edge rings are coaxially arranged, the lifting assembly only drives the upward movement of the plurality of edge rings along the axial direction of the edge ring, and the horizontal position of the edge ring does not change, so that the edge ring does not need to be recalibrated after replacement.

[0041] d) The edge ring assembly provided by the present application, the arrangement of the support can form a gap between the two adjacent base rings for accommodating the robot, so that the robot can be conveniently inserted between the base ring of the working edge ring and the base ring of the storage edge ring, thereby moving the damaged or life-expired edge ring out of the reaction chamber.

[0042] e) The edge ring assembly provided by the present application, the two symmetrically arranged supports can stably support the base ring, ensuring that the force on the base ring is uniform, thereby ensuring the overall stability of the plurality of edge rings stacked along the axis; in addition, by using symmetrically arranged supports, when the working edge ring is lifted by the robot, the weight distribution of the base ring and the support relative to the robot is uniform, and the working edge ring can basically avoid tilting or falling during movement.

[0043] f) The edge ring assembly provided by the present application, the arrangement of the bellows sleeve can effectively isolate the output shaft of the motor from the external environment, avoid the influence of dust and impurities in the external environment on the movement of the motor output shaft, and also avoid the interference between the motor output shaft and other components, thereby further ensuring the normal operation of edge ring maintenance and repair.

[0044] Other features and advantages of the present application will be set forth in the following description, and in part will become apparent to those skilled in the art from the description, or can be learned by practice of the present application. The objects and other advantages of the present application can be achieved and obtained by the structure particularly pointed out in the written description and the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0045] The accompanying drawings are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. In the drawings:

[0046] Figure 1 A schematic diagram of the process of replacing the edge ring in the prior art;

[0047] Figure 2 A schematic diagram of the structure of the edge ring assembly provided by embodiment one of the present application;

[0048] Figure 3 A schematic diagram of the process of replacing the edge ring of the edge ring assembly provided by embodiment one of the present application;

[0049] Figure 4 A schematic diagram of the structure of the edge ring in the edge ring assembly provided by embodiment one of the present application; the robot is inserted between the two supports;

[0050] Figure 5 A schematic diagram of the structure of the electrostatic chuck provided by embodiment three of the present application;

[0051] Figure 6The process schematic diagram of replacing the edge ring of the electrostatic chuck provided in the third embodiment of the present application.

[0052] Reference signs:

[0053] 1 - edge ring; 11 - base ring; 12 - support; 2 - manipulator; 3 - support cylinder; 4 - motor; 5 - motor output shaft; 6 - motor controller; 7 - bellows cover; 8 - chuck; 9 - base. DETAILED DESCRIPTION

[0054] The preferred embodiments of the present application will be described in detail below with reference to the drawings, which form a part of this application, and together with the embodiments of the present application serve to explain the principles of the present application.

[0055] In the description of the embodiments of the present application, it should be noted that unless otherwise explicitly specified and limited, the term "connected" should be interpreted in a broad sense, for example, it can be fixedly connected, or detachably connected, or integrally connected, which can be mechanically connected, or electrically connected, which can be directly connected, or indirectly connected through an intermediate medium. For those skilled in the art,

[0056] The terms "top", "bottom", "above", "under" and "on" used throughout the description are relative positions of the components of the device, for example, the relative positions of the top and bottom substrates inside the device. It can be understood that the device is multifunctional, regardless of their orientation in space.

[0057] The general working surface of the present application can be a plane or a curved surface, which can be inclined or horizontal. For the convenience of explanation, the embodiments of the present application are placed on a horizontal plane and used on the horizontal plane, and "high and low" and "up and down" are defined accordingly.

[0058] Embodiment one

[0059] The present embodiment provides an edge ring assembly, referring to Figures 1 to 4 , comprising a plurality of axially stacked edge rings 1, a lifting assembly for driving the edge rings 1 to move axially, and a manipulator 2 for moving the top edge ring 1.

[0060] For the convenience of description, the edge ring 1 is divided into a working edge ring located at the top and a storage edge ring located below the working edge ring. In the wafer manufacturing process, the working edge ring is in the wafer manufacturing area and plays a fixing role for the wafer. When the working edge ring is damaged or reaches the service life, the lifting assembly is opened, the lifting assembly drives the plurality of edge rings 1 to move upward, the working edge ring moves out of the wafer manufacturing area, the mechanical arm 2 removes the working edge ring, and the storage edge ring located below the working edge ring and adjacent to the working edge ring enters the wafer manufacturing area to serve as a new working edge ring, thereby completing the maintenance and repair of the edge ring 1. When the working edge ring and the storage edge ring stored in the edge ring assembly are used up, a plurality of edge rings 1 can be reinstalled on the lifting assembly, the lifting assembly drives the plurality of edge rings 1 to move downward, so that the edge ring 1 located at the top enters the wafer manufacturing area to serve as a new working edge ring.

[0061] Compared with the prior art, the edge ring assembly provided by the embodiment adopts a composite structure, simultaneously stores a plurality of edge rings 1 in the reaction chamber, and drives the plurality of edge rings 1 to move upward through the lifting assembly, so that the damaged or service-life edge ring 1 moves out of the wafer manufacturing area. Moreover, the damaged or service-life edge ring 1 can be removed to the outside of the reaction chamber through the mechanical arm 2 without opening the reaction chamber, and the new edge ring 1 located below the damaged or service-life edge ring 1 and adjacent to the damaged or service-life edge ring 1 enters the wafer manufacturing area, which is simple to operate and saves time and effort. At the same time, since a plurality of edge rings 1 are arranged in the edge ring assembly, the maintenance and repair period of the edge ring assembly as a whole can be prolonged.

[0062] In addition, since the plurality of edge rings 1 are coaxially arranged, the lifting assembly only drives the plurality of edge rings 1 to move upward along the axial direction of the edge ring 1, and the horizontal position of the edge ring 1 does not change. Therefore, after the edge ring 1 is replaced, the edge ring 1 does not need to be recalibrated, thereby further simplifying the maintenance and repair of the edge ring 1 and further simplifying the maintenance and repair of the reaction chamber.

[0063] In order to facilitate the mechanical arm 2 to remove the damaged or service-life edge ring 1 to the outside of the reaction chamber, the edge ring 1 includes a base ring 11 and a plurality of support members 12 arranged above and / or below the base ring 11, and the mechanical arm 2 is inserted between the plurality of support members 12. The arrangement of the support member 12 can form a gap between the adjacent two base rings 11 for accommodating the mechanical arm 2, so that the mechanical arm 2 can be conveniently inserted between the base ring 11 of the working edge ring and the base ring 11 of the storage edge ring, thereby removing the damaged or service-life edge ring 1 to the outside of the reaction chamber.

[0064] In order to ensure that the base ring 11 has sufficient mechanical strength and service life, the radial thickness of the base ring 11 is 5.0-7.0 mm (for example, 5.0 mm, 5.7 mm, 6.0 mm, 6.3 mm, or 7.0 mm).

[0065] Similarly, in order to ensure that the mechanical arm 2 has sufficient mechanical strength and service life, the radial thickness of the base ring 11 is 3.0-4.0 mm (for example, 3.0 mm, 3.2 mm, 3.5 mm, or 4 mm).

[0066] For example, the number of the support 12 is two, and the two supports 12 are symmetrically arranged with respect to the radial direction of the base ring 11. The two symmetrically arranged supports 12 can stably support the base ring 11, ensure that the base ring 11 is uniformly stressed, and thus ensure the overall stability of the plurality of edge rings 1 stacked along the axis. In addition, when the working edge ring is lifted by the mechanical arm 2, the symmetrically arranged supports 12 ensure that the weight of the base ring 11 and the support 12 is uniformly distributed with respect to the mechanical arm 2, and the working edge ring can basically avoid tilting or falling during movement.

[0067] As for the shape of the support 12, the cross-sectional shape thereof in the radial direction of the base ring 11 can be circular, square, rectangular, diamond, trapezoidal, fan-shaped, or other shapes, which can be selected according to actual conditions in practical applications.

[0068] In order to ensure smooth insertion of the mechanical arm 2, the gap between the two adjacent edge rings 1 is 5.0-7.0 mm (for example, 5.0 mm, 5.7 mm, 6.0 mm, 6.3 mm, or 7.0 mm). That is, when the support 12 is arranged above or below the base ring 11, the radial thickness of the support 12 along the base ring 11 is 5.0-7.0 mm (for example, 5.0 mm, 5.7 mm, 6.0 mm, 6.3 mm, or 7.0 mm); when the support 12 is arranged above and below the base ring 11, the total thickness of the two supports 12 between the two adjacent base rings 11 in the radial direction of the base ring 11 is 5.0-7.0 mm (for example, 5.0 mm, 5.7 mm, 6.0 mm, 6.3 mm, or 7.0 mm).

[0069] As for the structure of the lifting assembly, specifically, it includes a support cylinder 3, a motor 4, and a motor controller 6. The edge ring 1 at the bottom is arranged at the top end of the support cylinder 3, the motor output shaft 5 is connected to the top end of the support cylinder 3, and the motor controller 6 controls the extension and retraction of the motor output shaft 5 to drive the top end of the support cylinder 3 to move in the radial direction of the edge ring 1.

[0070] In order to improve the support stability of the lifting assembly, the number of the lifting assembly is multiple, and the multiple lifting assemblies are arranged uniformly along the axial direction of the edge ring 1. That is, the multiple support cylinders 3 jointly support the edge ring 1 along the axial direction of the edge ring 1, and correspondingly, the number of the motors 4 and the motor controllers 6 is also multiple, and the support cylinders 3, the motors 4 and the motor controllers 6 are one-to-one corresponding.

[0071] In order to protect the motor output shaft 5, the motor output shaft 5 is sleeved with a bellows sleeve 7, which is located between the support cylinder 3 and the motor output shaft 5. The arrangement of the bellows sleeve 7 can effectively isolate the motor output shaft 5 from the external environment, avoid the influence of dust and impurities in the external environment on the movement of the motor output shaft 5, and also avoid the interference between the motor output shaft 5 and other components, thereby further ensuring the normal maintenance of the edge ring 1.

[0072] In order to further protect the motor output shaft 5, the above-mentioned bellows sleeve 7 comprises multiple layers of sleeved bellows. For example, the number of layers of the bellows is two, which are divided into an inner layer of bellows and an outer layer of bellows. The two layers of bellows each have a sealing function. When one layer of bellows is damaged, the other layer of bellows can still play a protective role, thereby avoiding the influence of dust and impurities in the external environment on the movement of the motor output shaft 5, and further ensuring the normal maintenance of the edge ring 1.

[0073] Considering that the edge ring 1 is driven by multiple lifting assemblies, and there is a certain error between different motors 4 and motor controllers 6, in order to ensure that the edge ring 1 does not tilt, the above-mentioned edge ring assembly further comprises a total controller, multiple groups of signal emitting ends and a group of signal receiving ends. One group of signal emitting ends is arranged on the inner wall of each edge ring 1, and the signal receiving end is arranged on the outer wall of the electrostatic chuck. Each group of signal emitting ends comprises multiple emitting terminals in the same radial plane of the edge ring 1, and the emitting terminals are one-to-one corresponding to and located directly above the motor output shaft 5. The signal receiving end comprises multiple receiving terminals in the same radial plane of the electrostatic chuck, and the emitting terminals and the receiving terminals are positionally corresponding. During the upward movement of the edge ring 1, the receiving terminals receive the signals emitted by the multiple emitting terminals on one of the edge rings 1 and send them to the total controller. The total controller records multiple time data of the received signals and calculates the average value of the multiple time data. If a certain time data is equal to the average value, it means that the position of the edge ring 1 corresponding to the time data does not need to be adjusted. If a certain time data is earlier than the average value, it means that one side of the edge ring 1 corresponding to the time data is tilted upward, and the main controller drives the downward movement of the upwardly tilted side of the edge ring 1 through the corresponding motor controller 6, motor 4 and motor output shaft 5 in sequence. If a certain time data is later than the average value, it means that one side of the edge ring 1 corresponding to the time data is tilted downward, and the main controller drives the upward movement of the downwardly tilted side of the edge ring 1 through the corresponding motor controller 6, motor 4 and motor output shaft 5 in sequence, thereby completing the leveling of the edge ring 1.

[0074] Embodiment Two

[0075] The embodiment provides a method for replacing the edge rings, and the method comprises the following steps:

[0076] The lifting assembly is started, the lifting assembly drives the plurality of edge rings 1 to move upward, the edge ring 1 at the top moves out of the wafer manufacturing area, the robot 2 moves the edge ring 1 at the top to outside the reaction chamber, the edge ring 1 below the edge ring 1 at the top and adjacent to the edge ring 1 at the top enters the wafer manufacturing area and serves as a new edge ring 1, so that the replacement of the edge rings 1 is completed.

[0077] Compared with the prior art, the method for replacing the edge rings has the same beneficial effects as the edge ring assembly provided in Embodiment One, which will not be repeated here.

[0078] When the plurality of edge rings 1 stored in the edge ring assembly are all used up, the method further comprises the following steps:

[0079] The plurality of edge rings 1 are reinstalled on the lifting assembly, the lifting assembly is started, and the lifting assembly drives the plurality of edge rings 1 to move downward, so that the edge ring 1 at the top enters the wafer manufacturing area.

[0080] In order to ensure that the edge ring 1 does not tilt, the edge ring assembly further comprises a main controller, a plurality of signal transmitting ends and a signal receiving end, the inner wall of each edge ring 1 is provided with a group of signal transmitting ends, the signal receiving end is arranged on the outer wall of the electrostatic chuck, each group of signal transmitting ends comprises a plurality of transmitting terminals in the same radial plane of the edge ring 1, the transmitting terminals correspond to the motor output shaft 5 one by one and are located directly above the motor output shaft 5, the signal receiving end comprises a plurality of receiving terminals in the same radial plane of the electrostatic chuck, and the transmitting terminals correspond to the receiving terminals in position. The edge ring replacement method further comprises the following steps: during the upward movement of the edge ring 1, the receiving terminals receive the signals transmitted by the plurality of transmitting terminals on one of the edge rings 1 and send the signals to the main controller, the main controller records a plurality of time data of the received signals and calculates the average value of the plurality of time data, if a certain time data is equal to the average value, it indicates that the position of the edge ring 1 corresponding to the time data does not need to be adjusted; if a certain time data is earlier than the average value, it indicates that the edge ring 1 corresponding to the time data is tilted upward on one side, and the main controller drives the edge ring 1 tilted upward on one side to move downward through the corresponding motor controller 6, motor 4 and motor output shaft 5 in sequence; if a certain time data is later than the average value, it indicates that the edge ring 1 corresponding to the time data is tilted downward on one side, and the main controller drives the edge ring 1 tilted downward on one side to move upward through the corresponding motor controller 6, motor 4 and motor output shaft 5 in sequence, thereby completing the leveling of the edge ring 1.

[0081] Embodiment three

[0082] The electrostatic chuck provided by the embodiment comprises the edge ring assembly provided by the embodiment one. Figures 5 to 6 The electrostatic chuck provided by the embodiment comprises the edge ring assembly provided by the embodiment one.

[0083] Compared with the prior art, the electrostatic chuck provided by the embodiment has basically the same beneficial effects as the edge ring assembly provided by the embodiment one, which will not be described here.

[0084] It can be understood that the electrostatic chuck further comprises a base 9 and a chuck 8 arranged on the base 9, and the plurality of edge rings 1 are arranged on the edge of the chuck 8 or the edge of the chuck 8 and the base 9. That is, the plurality of edge rings 1 can be all arranged on the edge of the chuck 8, or part of the plurality of edge rings 1 are arranged on the edge of the chuck 8 and the other part are arranged on the edge of the base 9.

[0085] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any changes or replacements within the technical range disclosed by the present application can be easily thought by those skilled in the art, which should be covered within the protection scope of the present application.

Claims

1. A method of edge ring replacement, characterized by, The edge ring assembly comprises a plurality of axially stacked edge rings, a lifting assembly for driving the edge rings to move axially, and a mechanical hand for moving the top edge ring, the replacement method comprises the following steps: Turning on the lifting assembly, the lifting assembly drives the plurality of edge rings to move upward, the top edge ring moves out of the wafer manufacturing area, the mechanical hand moves the top edge ring out of the reaction chamber, the edge ring below and adjacent to the top edge ring enters the wafer manufacturing area as a new edge ring, thereby completing the replacement of the edge ring.

2. The edge ring replacement method of claim 1, wherein, The edge ring comprises a base ring and a plurality of supports arranged above and / or below the base ring, and the mechanical hand is inserted between the plurality of supports.

3. The edge ring replacement method of claim 2, wherein, The radial thickness of the base ring is 5.0-7.0mm. The gap between the two adjacent edge rings is 5.0-7.0mm.

4. The edge ring replacement method of claim 2, wherein, The number of supports is two, and the two supports are arranged radially symmetrically relative to the base ring.

5. The edge ring replacement method according to any one of claims 1 to 4, wherein, The lifting assembly comprises a support cylinder, a motor and a motor controller, the bottom edge ring is arranged at the top end of the support cylinder, the output shaft of the motor is connected with the top end of the support cylinder, and the motor controller controls the extension and retraction of the output shaft of the motor and drives the top end of the support cylinder to move radially along the edge ring.

6. The edge ring replacement method of claim 5, wherein, The output shaft of the motor is sleeved with a bellows sleeve, and the bellows sleeve is located between the support cylinder and the output shaft of the motor.

7. The edge ring replacement method of claim 1, wherein, When the plurality of edge rings stored in the edge ring assembly are all used up, the replacement method further comprises the following steps: Reinstall the plurality of edge rings on the lifting assembly, turn on the lifting assembly, and drive the plurality of edge rings to move downward so that the top edge ring enters the wafer manufacturing area.

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