A parallel calibration circuit and device for a multi-channel high-voltage source array

Abstract

In view of the low efficiency and long time of the existing single-channel metering calibration, which cannot meet the requirements of large-scale high-voltage source test facilities, the present invention proposes a multi-channel high-voltage source array parallel calibration circuit by using matrix switches and modular design. It includes a voltage regulator module, first, second, and third matrix switches, as well as a direct-through module and a rated resistance module connected in parallel between the first and second matrix switches, a load module, a voltage divider module, and a DC-blocking capacitor module connected in parallel between the second and third matrix switches, a data acquisition module connected to the third matrix switch, and a PC communication control module connected to each module. By controlling the on / off of each module through the PC communication control module, multi-channel parallel multi-parameter calibration is achieved, which not only has high efficiency and short calibration time, but also provides a new technical means for on-site in-situ metering and parallel calibration of other large-scale device test systems, filling the domestic technical gap of in-situ parallel calibration technology for high-voltage source arrays. At the same time, a calibration device is proposed based on this circuit.

Description

Technical Field

[0001] The present invention belongs to the field of high-voltage source metrology and calibration, and particularly relates to a parallel calibration circuit for a multi-channel high-voltage source array, and also relates to a calibration device based on the calibration circuit. Background Art

[0002] A high-voltage power supply is a DC high-voltage electronic instrument that can provide a certain energy output, and is widely used in high-voltage tests and experiments. Commonly used high-voltage power supplies have two display methods: digital display and pointer indication. Traditional power supplies generally adopt a combination of a transformer, a rectifier, and a voltage multiplier circuit. A high-voltage source array is the simultaneous output of multiple high-voltage sources generated by multiple high-voltage sources working in parallel (usually several hundred to thousands of channels).

[0003] In terms of metrology means, from the publicly available materials and literature, there is no report at home and abroad on a dedicated value traceability technology directly targeting a DC high-voltage source array. However, the metrology guarantee method develops with the metrology demand, and the future development trend of metrology guarantee is very clear. With the development of science and technology, a large number of domestic and foreign dedicated test equipment, ATE (Automatic Test Equipment), and comprehensive test consoles have emerged. Most of these devices have the characteristics of complex performance, numerous parameters, high integration, relatively large volume, difficult to disassemble, and some cannot be separated from the working site. This has led to an increasing demand for on-site in-situ metrology, comprehensive metrology, automated metrology, mobile accompanying guarantee, etc. in today's metrology guarantee, in addition to the pursuit of high-precision and cutting-edge technologies. Moreover, the metrology methods for such devices usually have strong pertinence. For different measurement items, different metrology methods are required, and it is necessary to conduct item-by-item research according to the actual measurement requirements. In the future, metrology guarantee will pay more attention to the scientific nature of metrology means and results. In terms of the efficiency of metrology guarantee, it will pursue more the timeliness and reliability of metrology guarantee. In terms of metrology guarantee methods, it is gradually moving from the laboratory to the field and from a controllable environment to an uncontrollable environment.

[0004] According to the metrological characteristics specified in GJB 8879-2016 "Verification Regulation for DC High-Voltage Regulated Power Supplies", the items that need to be calibrated for a high-voltage source array include DC voltage indication error, DC current indication error, load regulation rate, voltage regulation rate, ripple voltage, etc. Due to the reasons of instruments and equipment, the current metrology method is single-channel metrology. The main approach is as follows: Prepare various test instruments, loads, voltage-dividing devices, etc. according to the test requirements. Measure one device and one item at a time, that is, assemble the circuit according to the specific calibration item, complete the measurement, and then disassemble and reassemble the test circuit for the next calibration item, and keep cycling until all the parameters of this device are completed and then cycle to test the next device until all the calibration items of all devices are completed.

[0005] However, this single-channel metering method has low working efficiency and long calibration time, making it difficult to meet the actual needs of efficient, reliable, and convenient metering for large test facilities and systems. Usually, the number of high-voltage sources in a high-voltage source array is huge. If the full-project on-site verification of the high-voltage source array is carried out according to the above single-channel metering method, assuming that each high-voltage source has nearly 40 or so calibration points, taking 1080 high-voltage sources as an example, the verification time for a single high-voltage source is 0.3 hours. Without any rest of the standard equipment, it takes 324 hours, that is, 41 working days, which to a certain extent affects the progress of daily and large-scale tests.

[0006] Therefore, there is an urgent need to develop an in-situ, efficient, and convenient calibration circuit or device to meet the metering calibration of existing array-type high-voltage power supplies. For this purpose, we take the high-voltage source array as the research object and carry out the exploration and research on the multi-channel (up to 36 channels) on-site parallel calibration technology of high-voltage sources. Summary of the Invention

[0007] In view of this, the present design proposes a multi-channel high-voltage source array parallel calibration circuit and device:

[0008] A multi-channel high-voltage source array parallel calibration circuit includes a first matrix switch, a second matrix switch, a third matrix switch, a data acquisition module, a voltage regulator module, a direct-through module, a rated resistance module, a load module, a voltage divider module, a DC-blocking capacitor module, and a PC control communication module; the input end of the direct-through module is connected to the first matrix switch, and the output end of the direct-through module is connected to the second matrix switch; the input end of the rated resistance module is connected to the first matrix switch, and the output end of the rated resistance module is connected to the second matrix switch; the direct-through module and the rated resistance module are connected to different switch ports; the input end of the load module is connected to the second matrix switch, and the output end of the load module is connected to the third matrix switch; the input end of the voltage divider module is connected to the second matrix switch, and the output end of the voltage divider module is connected to the third matrix switch; the input end of the DC-blocking capacitor module is connected to the second matrix switch, and the output end of the DC-blocking capacitor module is connected to the third matrix switch; the load module, the voltage divider module, and the DC-blocking capacitor module are connected to different switch ports; the input end of the data acquisition module is connected to the third matrix switch, and the data acquisition module is used for signal acquisition of various project parameters; the PC control communication module is connected to the first matrix switch, the second matrix switch, the third matrix switch, the data acquisition module, the voltage regulator module, the direct-through module, the rated resistance module, the load module, the voltage divider module, and the DC-blocking capacitor module, and selectively controls the on / off of each module to achieve calibration of various project parameters of the high-voltage source.

[0009] Preferably, when calibrating the indication error of DC voltage, the PC control communication module selects the first matrix switch, the direct-through module, the second matrix switch, the voltage divider module, the third matrix switch, and the data acquisition module to form a DC voltage indication error calibration circuit to complete the calibration of the DC voltage indication error; the voltage division ratio of the voltage divider module is Vin / Vout = n / 1, where n = 500 - 1000. The structure between the input end and the output end of the voltage divider module is as follows: the input end is successively connected in series with the high-voltage arm resistor R1 and the low-voltage arm resistor R2, and the other end of the low-voltage arm resistor R2 is grounded; the high-voltage arm resistor R1 and the low-voltage arm resistor R2 are respectively connected in parallel with the capacitor C1 and the capacitor C2. The ratio of the high-voltage arm resistor R1 to the low-voltage arm resistor R2 is R1 / R2 = n / 1, and the ratio of the capacitor C1 to the capacitor C2 is C1 / C2 = 1 / n. Moreover, the capacitors C1 and C2 need to meet the characteristic of withstanding a high voltage of 5 kV; there is also an operational amplifier with a gain of 1 connected between the common end of the high-voltage arm resistor R1, the low-voltage arm resistor R2, the capacitor C1, and the capacitor C2 and the output end of the voltage divider module. The input resistance of the operational amplifier is ≥ 10 GΩ, and the bias current of the operational amplifier is in the picoampere level.

[0010] Preferably, when calibrating the indication error of DC current, the PC control communication module selects the first matrix switch, the direct-through module, the second matrix switch, the load module, the third matrix switch, and the data acquisition module to form a DC current indication error calibration circuit.

[0011] Preferably, when calibrating the load regulation rate under full-load conditions, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch, and the data acquisition module to form a calibration circuit for the load regulation rate under full-load conditions; when calibrating the load regulation rate under no-load conditions, the PC control communication module selects the first matrix switch, the direct-through module, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch, and the data acquisition module to form a calibration circuit for the load regulation rate under full-load conditions.

[0012] Preferably, when calibrating the voltage regulation rate, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch, the data acquisition module, and the voltage regulator module to form a voltage regulation rate calibration circuit; the input end of the voltage regulator module is connected to the mains supply to increase or decrease the voltage, and the output end of the voltage regulator module is connected to the object to be calibrated.

[0013] Preferably, when performing ripple voltage calibration, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the DC blocking capacitor module, the third matrix switch, and the data acquisition module to form a ripple voltage calibration circuit; the structure between the input end and the output end of the DC blocking capacitor module is as follows: a capacitor C3 and an operational amplifier are connected in series between the input end and the output end of the DC blocking capacitor module, and a resistor R3 is connected between the common end of the capacitor C3 and the operational amplifier and the ground; the resistor R3 is a megaohm-level resistor, the capacitor C3 is a nanofarad-level capacitor, and the capacitor C3 can withstand a high voltage of more than 5 kV.

[0014] Preferably, the calibration circuit is a multi-channel parallel calibration circuit.

[0015] A multi-channel high-voltage source array parallel calibration device includes one or more of the above calibration circuits.

[0016] The working process of the present invention: Connect the high-voltage source array to be measured to the multi-channel high-voltage source array parallel calibration device. Among them, the PC control communication module selects different functional modules to construct different calibration circuits in sequence, and the data acquisition module collects data to achieve the final calibration of different calibration items.

[0017] The beneficial effects of the present invention are as follows: (1) The overall measurement efficiency is significantly improved, and the measurement cost is greatly reduced. Taking the 1080-channel high-voltage source array of 5 kV as an example, it takes 41 working days, nearly two months, to complete the measurement of the 1080-channel high-voltage source array in the traditional way; after implementing the present invention, the measurement guarantee time can be shortened to within 1 week, and the quality and efficiency are significantly improved. (2) The present invention will greatly reduce the voltage boost during the measurement of the high-voltage source array, reduce the possibility of deviation in the technical state, ensure the normal service life of the instrument and equipment, and save unnecessary expenses. (3) The present invention can be applied to the on-site and laboratory of quite a number of high-voltage source equipment, realizing in-situ, multi-channel parallel, and rapid measurement, filling the domestic gap in the field of in-situ measurement of large test systems, and having good popularization value. Description of the Drawings

[0018] Figure 1 Schematic diagram of the internal circuit of the high-voltage source array calibration device;

[0019] Figure 2 Schematic diagram of the voltage divider module circuit;

[0020] Figure 3 Schematic diagram of a single-channel voltage division circuit;

[0021] Figure 4 Schematic diagram of the DC blocking capacitor module circuit;

[0022] Figure 5 Schematic diagram of a single-channel DC blocking capacitor circuit

[0023] In the figure: 1. First matrix switch, 2. Second matrix switch, 3. Third matrix switch, 4. Data acquisition module, 5. Voltage regulator module, 6. 36-channel high-voltage source, 7. Through module, 8. Rated resistance module, 9. Load module, 10. Voltage divider module, 11. DC-blocking capacitor module, 12. PC control communication module, 13. Grounding, 101. High-voltage arm resistor R1, 102. Low-voltage arm resistor R2, 103. Capacitor C1, 104. Capacitor C2, 105. Operational amplifier, 111. Capacitor C3, 112. Operational amplifier, 113. Resistor R3. Specific implementation mode

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other accompanying drawings can be obtained based on these drawings without creative efforts. The present invention will be described in detail below with reference to the accompanying drawings.

[0025] In order to make the purpose, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below in combination with specific implementation modes and the accompanying drawings.

[0026] Embodiment 1

[0027] Taking the calibration of a 1080-channel 5 kV high-voltage source array as an example.

[0028] A parallel calibration device for a multi-channel high-voltage source array is designed, and its structure is as Figure 1As shown in the figure, the device includes: a first matrix switch 1, a second matrix switch 2, a third matrix switch 3, a data acquisition module 4, a voltage regulator module 5, a through module 7, a rated resistance module 8, a load module 9, a voltage divider module 10, a DC blocking capacitor module 11, and a PC control and communication module 12. Among them, the ports 1-36 of the first matrix switch 1 are connected to 36 of the 1080 high-voltage source arrays to be measured. The ports 37-42 of the first matrix switch 1 are connected to the 6 input ends of the through module 7, and the 6 output ends of the through module 7 are connected to the ports 49-54 of the second matrix switch 2. The ports 43-48 of the first matrix switch 1 are connected to the 6 input ends of the rated resistance module 8, and the 6 output ends of the rated resistance module 8 are connected to the ports 55-60 of the second matrix switch 2. The 6 input ends of the load module 9 are connected to the ports 61-66 of the second matrix switch 2, and the 6 output ends of the load module 9 are connected to the ports 79-84 of the third matrix switch 3. The 6 input ends of the voltage divider module 10 are connected to the ports 67-72 of the second matrix switch 2, and the 6 output ends of the voltage divider module 10 are connected to the ports 85-90 of the third matrix switch 3. The 6 input ends of the DC blocking capacitor module 11 are connected to the ports 73-78 of the second matrix switch 2, and the 6 output ends of the DC blocking capacitor module 11 are connected to the ports 91-96 of the third matrix switch 3. The input end of the data acquisition module 4 is connected to the ports 97-102 of the third matrix switch 3, and the data acquisition module is used for signal acquisition of various project parameters. Among them, the PC control and communication module 12 is connected to the first matrix switch 1, the second matrix switch 2, the third matrix switch 3, the data acquisition module 4, the voltage regulator module 5, the through module 7, the rated resistance module 8, the load module 9, the voltage divider module 10, and the DC blocking capacitor module 11, and selectively controls the on / off of each module to construct a calibration circuit to realize the calibration of various project parameters of the high-voltage source.

[0029] Specific calibration items include: calibration of DC voltage indication error, calibration of DC current indication error, calibration of load regulation rate under full load or no-load conditions, calibration of voltage regulation rate, and calibration of ripple voltage. When connecting the equipment, first connect the voltage regulator module 5 to the mains, and then apply the output voltage of the voltage regulator module 5 to the high-voltage source 6 to be measured.

[0030] When calibrating the DC voltage indication error, the PC control and communication module 12 selects the first matrix switch 1, the through module 7, the second matrix switch 2, the voltage divider module 10, the third matrix switch 3, and the data acquisition module 4 to form a DC voltage indication error calibration circuit to realize the calibration of the DC voltage indication error; for the specific circuit structure of the voltage divider module 10, see Figure 2 、 Figure 3As shown, the voltage division ratio of the voltage divider module is Vin / Vout = 1000 / 1. Taking one path as an example, the circuit structure between the input end and the output end of the voltage divider module 10 is as follows: the input end is successively connected in series with the high-voltage arm resistor R1101 and the low-voltage arm resistor R2102, and the other end of the low-voltage arm resistor R2102 is grounded. In order to achieve the aforementioned voltage division ratio of Vin / Vout = 1000 / 1, the ratio of the high-voltage arm resistor R1101 to the low-voltage arm resistor R2102 is R1 / R2 = 1000 / 1. Because the parasitic capacitances of the high-voltage arm resistors distributed in the high-voltage arm and the low-voltage arm will divide the ripple voltage in the high voltage, and in fact the parasitic capacitances on the high-voltage arm and the low-voltage arm are quite equal, that is, the capacitive reactances on the high-voltage arm and the low-voltage arm are equivalent, which makes the ripple voltage in the input DC high voltage be distributed relatively evenly between the high-voltage arm and the low-voltage arm. This results in a relatively large ripple voltage being superimposed on the DC voltage output by the low-voltage arm, making Vin / Vout unable to accurately reach 1000 / 1, and the measurement accuracy needs to be improved. Therefore, a capacitor C1103 and a capacitor C2104 are respectively connected in parallel at the high-voltage arm resistor R1101 and the low-voltage arm resistor R2102, and the ratio of the capacitor C1103 to the capacitor C2104 is C1 / C2 = 1 / 1000, and the capacitor C1103 and the capacitor C2104 need to meet the characteristic of withstanding a high voltage of 5 kV. In order to enable the data acquisition module 4 to test a better test signal, an operational amplifier 105 with a gain of 1 is also connected between the common end of the high-voltage arm resistor R1101, the low-voltage arm resistor R2102, the capacitor C1103, the capacitor C2104 and the output end of the voltage divider module 10. The input resistance of the operational amplifier 105 is ≥ 10 GΩ, and the bias current of the operational amplifier 105 is in the picoampere level, that is, a JFET type operational amplifier.

[0031] When calibrating the DC current indication error, the PC control communication module 12 selects the first matrix switch 1, the direct-through module 7, the second matrix switch 2, the load module 9, the third matrix switch 3, and the data acquisition module 4 to form a DC current indication error calibration circuit.

[0032] When calibrating the load regulation rate under full-load conditions, the PC control communication module 12 selects the first matrix switch 1, the rated resistance module 8, the second matrix switch 2, the voltage divider module 10, the third matrix switch 3, and the data acquisition module 4 to form a calibration circuit for the load regulation rate under full-load conditions; when calibrating the load regulation rate under no-load conditions, the PC control communication module 12 selects the first matrix switch 1, the direct-through module 7, the rated resistance module 8, the second matrix switch 2, the voltage divider module 10, the third matrix switch 3, and the data acquisition module 4 to form a calibration circuit for the load regulation rate under full-load conditions.

[0033] When performing voltage regulation rate calibration, the PC control communication module 12 selects the first matrix switch 1, the rated resistance module 8, the second matrix switch 2, the voltage divider module 10, the third matrix switch 3, and the data acquisition module 4, and forms a voltage regulation rate calibration circuit with the voltage regulator module 5; adjusts the output voltage of the voltage regulator module 5 to 198V and 242V to complete the voltage regulation rate calibration.

[0034] When performing ripple voltage calibration, the PC control communication module 12 selects the first matrix switch 1, the rated resistance module 8, the second matrix switch 2, the DC-blocking capacitor module 11, the third matrix switch 3, and the data acquisition module 4 to form a ripple voltage calibration circuit; the circuit structure of the DC-blocking capacitor module 11 is as Figure 4 shown. Taking a single path as an example, the structure between its input terminal and output terminal is: a capacitor C3111 and an operational amplifier 112 are connected in series between the input terminal and the output terminal in sequence, and a resistor R3113 is connected between the common terminal of the capacitor C3111 and the operational amplifier 112 and the ground. Since the ripple has high-frequency characteristics, in order to accurately measure the ripple signal in the input DC high voltage, the DC-blocking circuit should first have the characteristics of a high-pass filter, and the resonant frequency of the high-pass filter needs to be as small as possible to ensure that the ripple signals in all frequency bands except DC can pass through the filter smoothly, so as to accurately measure it at the backend. In order to make the resonant frequency as small as possible, first of all, the resistor R3113 should be large enough. Here, the resistor R3113 should be selected as a megaohm-level resistor, but the capacitor C3111 cannot be large, which is due to the characteristics of the capacitor itself. The smaller the capacitor, the higher the operating frequency, so the higher the measured ripple signal frequency, and the more accurate the ripple measurement. The capacitor C3111 is a nanofarad-level capacitor and can withstand a high voltage of more than 5kV. The operational amplifier 112 here is the same as the operational amplifier 105.

[0035] When calibrating the 36 high-voltage sources connected to the matrix switch 1, the 1-36 high-voltage sources are grouped into groups of 6, and the six groups of high-voltage sources are tested in sequence, and each item or parameter of the high-voltage sources within each group is tested or calibrated in sequence. After completing the calibration of these 36 high-voltage sources, the next 36 high-voltage sources are calibrated until the calibration of 1080 high-voltage sources is completed.

[0036] Among them, when performing DC voltage indication error calibration, the selection range of Vin / Vout can be (500 - 1000) / 1, and the grounding in the whole circuit or device can be designed as the grounding of the overall calibration circuit or device.

Claims

1. A parallel calibration circuit for a multi-channel high-voltage source array, characterized in that It includes a first matrix switch, a second matrix switch, a third matrix switch, a data acquisition module, a voltage regulator module, a through module, a rated resistance module, a load module, a voltage divider module, a DC blocking capacitor module, and a PC control and communication module; The input end of the through module is connected to the first matrix switch, and the output end of the through module is connected to the second matrix switch; the input end of the rated resistance module is connected to the first matrix switch, and the output end of the rated resistance module is connected to the second matrix switch; The through module and the rated resistance module are connected to different switch ports; The input end of the load module is connected to the second matrix switch, and the output end of the load module is connected to the third matrix switch; the input end of the voltage divider module is connected to the second matrix switch, and the output end of the voltage divider module is connected to the third matrix switch; the input end of the DC blocking capacitor module is connected to the second matrix switch, and the output end of the DC blocking capacitor module is connected to the third matrix switch; the load module, the voltage divider module, and the DC blocking capacitor module are connected to different switch ports; The input end of the data acquisition module is connected to the third matrix switch, and the data acquisition module is used for signal acquisition of various project parameters; The PC control and communication module is connected to the first matrix switch, the second matrix switch, the third matrix switch, the data acquisition module, the voltage regulator module, the through module, the rated resistance module, the load module, the voltage divider module, and the DC blocking capacitor module, and selectively controls the on / off of each module to achieve calibration of various project parameters of the high-voltage source.

2. The parallel calibration circuit for a multi-channel high-voltage source array according to claim 1, wherein When calibrating the indication error of DC voltage, the PC control and communication module selects the first matrix switch, the through module, the second matrix switch, the voltage divider module, the third matrix switch, and the data acquisition module to form a calibration circuit for the indication error of DC voltage, and completes the calibration of the indication error of DC voltage; the voltage division ratio of the voltage divider module is Vin / Vout = n / 1, where n = 500 - 1000. The structure between the input end and the output end of the voltage divider module is as follows: the input end is sequentially connected in series with a high-voltage arm resistor R1 and a low-voltage arm resistor R2, and the other end of the low-voltage arm resistor R2 is grounded; the high-voltage arm resistor R1 and the low-voltage arm resistor R2 are respectively connected in parallel with a capacitor C1 and a capacitor C2, the ratio of the high-voltage arm resistor R1 to the low-voltage arm resistor R2 is R1 / R2 = n / 1, the ratio of the capacitor C1 to the capacitor C2 is C1 / C2 = 1 / n, and the capacitors C1 and C2 need to meet the characteristic of withstanding a high voltage of 5 kV; a operational amplifier with a gain of 1 is also connected between the common end of the high-voltage arm resistor R1, the low-voltage arm resistor R2, the capacitor C1, and the capacitor C2 and the output end of the voltage divider module. The input resistance of the operational amplifier is ≥ 10 GΩ, and the bias current of the operational amplifier is in the picoampere level.

3. The parallel calibration circuit for a multi-channel high-voltage source array according to claim 1, wherein When calibrating the indication error of DC current, the PC control and communication module selects the first matrix switch, the through module, the second matrix switch, the load module, the third matrix switch, and the data acquisition module to form a calibration circuit for the indication error of DC current.

4. The parallel calibration circuit for the multi-channel high-voltage source array according to claim 1, wherein When calibrating the load regulation rate under full load conditions, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch, and the data acquisition module to form a calibration circuit for the load regulation rate under full load conditions; when calibrating the load regulation rate under no-load conditions, the PC control communication module selects the first matrix switch, the through module, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch, and the data acquisition module to form a calibration circuit for the load regulation rate under full load conditions.

5. The parallel calibration circuit for a multi-channel high-voltage source array according to claim 1, wherein When calibrating the voltage regulation rate, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch, the data acquisition module, and the voltage regulator module to form a voltage regulation rate calibration circuit; the input end of the voltage regulator module is connected to the mains power supply to increase or decrease the voltage, and the output end of the voltage regulator module is connected to the calibration object.

6. The parallel calibration circuit for a multi-channel high-voltage source array according to claim 1, wherein When calibrating the ripple voltage, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the DC-blocking capacitor module, the third matrix switch, and the data acquisition module to form a ripple voltage calibration circuit; the structure between the input end and the output end of the DC-blocking capacitor module is as follows: a capacitor C3 and an operational amplifier are connected in series between the input end and the output end of the DC-blocking capacitor module, and a resistor R3 is connected between the common terminal of the capacitor C3 and the operational amplifier and the ground; the resistor R3 is a megaohm-level resistor, the capacitor C3 is a nanofarad-level capacitor, and the capacitor C3 can withstand a voltage of more than 5 kV.

7. The parallel calibration circuit for the multi-channel high-voltage source array according to any one of claims 1-6, characterized in that The calibration circuit is a multi-channel parallel calibration circuit.

8. A parallel calibration device for a multi-channel high-voltage source array, characterized in that, The calibration device includes the calibration circuit according to any one or more of claims 1-6.

Images