Method and apparatus for removing an impression mold

Abstract

The present invention relates to a method for separating an impression (17) from a substrate (12), particularly from a master impression (12), from an impression material (11), and / or from a product, wherein the impression (17) is deformed in the direction of the substrate (12) so as to separate the impression (17) from the substrate (12).

Description

Technical Field

[0001] This invention describes a method and apparatus for removing an impression mold. Background Technology

[0002] Prior art includes various equipment and methods for manufacturing impressions and the applications of said impressions. Impressions are broadly classified into hard impressions and / or soft impressions. A particular type of soft impression is a film impression, which consists of a relatively thin film onto which an imprinting structure is applied. The film and the imprinting structure here form a soft impression. In the prior art, the use of soft impressions is particularly preferred. Although soft impressions wear out faster than hard impressions, soft impressions can be reproduced quickly. Very expensive and precision-manufactured hard impressions are used as master impressions, and soft impressions are produced as negotiations for the hard impressions. These soft impressions are called working impressions. The product imprint material (from which the actual product should be imprinted) is then manufactured using only soft imprinting, while the hard imprint is reliably stored and kept protected. However, a common problem in the prior art is the demolding of the soft impression from the master impression or from the product imprint material.

[0003] Hard molds are very durable, but have the following drawbacks: demolding is relatively difficult without risking at least partial damage to structures in the nanometer and / or micrometer range. Soft molds, on the other hand, wear out quickly. Easy demolding is particularly due to their elasticity and very low bending resistance. Both characteristics enable the soft mold to be peeled off, or at least bent to such an extent that it can be removed sequentially, i.e., stepwise, from the impression material. However, soft molds have extremely low hardness values ​​and are therefore relatively prone to wear. Therefore, soft molds must be continuously reshaped from the master mold. Summary of the Invention

[0004] Therefore, the object of the present invention is to eliminate the disadvantages of the prior art, and in particular to facilitate the separation of the impression (i.e., the soft impression, also referred to hereinafter as the working impression) from the master impression (i.e., the hard impression) and / or the impression material. This object is achieved by the content of the independent claims. All combinations of at least two of the features described in the specification, claims, and / or drawings also fall within the scope of the invention. In the case of the stated value range, values ​​within the mentioned limits should also be considered as limit values ​​and claimed in any combination.

[0005] The impression mold (= flexible impression mold) according to the present invention particularly has the following characteristics or is made of the following materials:

[0006] Polydimethylsiloxane (PDMS)

[0007] • Perfluoropolyether (PFPE)

[0008] • Cage-type polysilsesquioxane (POSS)

[0009] Polydimethylsiloxane (PDMS)

[0010] Tetraethyl orthosilicate (TEOS)

[0011] • Poly(organo)siloxane (silicone)

[0012] The impression mold (= flexible impression mold) according to the present invention can, in principle, be derived from one of the following material categories:

[0013] Thermoplastics

[0014] · Elastomer

[0015] Thermosetting plastics

[0016] The master mold, imprint material, and product are also referred to as the substrate below.

[0017] The present invention relates to a method for separating an impression from a substrate, particularly from a master impression, an impression material and / or a product, wherein the impression is deformed along the direction of the substrate in order to separate the impression from the substrate.

[0018] In particular, as a separate subject of the present invention, the present invention also relates to a method for manufacturing an impression on a carrier, the method comprising the following steps, and in particular the following process:

[0019] - Apply the impression material to the master die.

[0020] - To bring the printing ink into contact with the carrier.

[0021] - To cure the embossing material.

[0022] -In particular, the method according to one of the foregoing embodiments is used to separate the master mold from the cured imprint material, wherein the resulting mold remains on the carrier, wherein the carrier is deformed in the direction of the master mold so as to separate the master mold from the mold.

[0023] In particular, as a separate subject of the present invention, the present invention also relates to a method for manufacturing a product from an embossing material, the method comprising the following steps, and in particular the following process:

[0024] - To make the printing ink come into contact with the printing mold.

[0025] - To cure the embossing material.

[0026] -In particular, the method according to one of the foregoing embodiments is used to separate the mold from the imprint material, wherein the mold is deformed in the direction of the product so as to separate the mold from the product.

[0027] In particular, as a separate subject of the invention, the invention also relates to an apparatus for separating an impression from a substrate, especially from a master impression, from an impression material and / or from a product, wherein the impression can be deformed along the direction of the substrate in order to separate the impression from the substrate.

[0028] In particular, as a separate subject of the invention, the invention also relates to an apparatus for manufacturing an impression on a carrier, particularly using the method according to one of the foregoing embodiments, the apparatus comprising:

[0029] - An application device used to apply imprint material to the master die.

[0030] - Contact device, which is used to bring the imprint material into contact with the carrier.

[0031] - A curing device for separating the master impression from the cured impression material, wherein the resulting impression remains on a carrier, wherein the carrier is deformable along the direction of the master impression so as to separate the master impression from the impression.

[0032] In particular, as a separate subject of the invention, the invention also relates to an apparatus for manufacturing products from embossing materials.

[0033] - A contact device used to bring the impression material into contact with the printing mold.

[0034] - A curing device used to cure the imprint material.

[0035] - A release device for separating the mold from the imprint material, wherein a deformation device is provided for deforming the mold along the direction of the product so as to separate the mold from the product.

[0036] Preferably, the mold and / or carrier are deformed by overpressure, or the mold and / or carrier can be deformed.

[0037] Furthermore, preferably, the maximum deformation occurs at the center of the mold and / or carrier, wherein, in particular, the deformation occurs symmetrically with respect to the center of the mold and / or carrier.

[0038] Furthermore, preferably, the deformation of the mold and / or carrier occurs from the inside out, particularly from the center of the mold and / or carrier to the edge of the mold and / or carrier.

[0039] Furthermore, preferably, the movement is carried out simultaneously with the deformation of the mold and / or carrier, in order to separate the substrate and the mold and / or carrier from each other.

[0040] Furthermore, preferably, the removal of the impression is carried out from the outside in, especially from the edge of the impression to the center of the impression.

[0041] Furthermore, preferably, the deformation results in the convex shaping and / or protrusion of the mold and / or carrier.

[0042] Furthermore, preferably, the movement is carried out simultaneously with the deformation of the carrier, in order to separate the main mold and the carrier from each other.

[0043] Furthermore, preferably, the carrier is a thin film and / or the impression is a thin film impression.

[0044] In another embodiment, the carrier is configured such that it is a very thin and flexible glass plate. The glass plate is particularly thinner than 20 mm, preferably thinner than 10 mm, even more preferably thinner than 5 mm, most preferably thinner than 2 mm, and of all these, most preferably thinner than 1 mm.

[0045] Furthermore, preferably, the device has at least one carrier forming element for deformation and / or at least one stretching element for stretching the carrier, wherein the carrier is stretched, in particular, via the carrier forming element.

[0046] Furthermore, preferably, the carrier forming element has at least one carrier forming element protrusion, wherein the carrier forming element protrusion lifts and / or stretches the carrier from the carrier forming element.

[0047] Furthermore, preferably, the carrier forming element has at least one fixing element for dynamically fixing the carrier, wherein the at least one fixing element is preferably switchable such that gas and / or gas mixture can be delivered via the at least one fixing element into the gap between the carrier forming element and the carrier.

[0048] Furthermore, preferably, at least one stretching element is a fluid element, wherein a gas and / or a gas mixture can be delivered via the fluid element to generate overpressure between the carrier forming element and the carrier.

[0049] In another exemplary embodiment, the carrier is held by a frame instead of a carrier forming element, particularly located behind the carrier. When a frame is used, the stretching element remains positioned on the back side of the carrier in the usual manner.

[0050] The core of this invention lies particularly in the fixation of the mold, which allows the mold (= soft mold) to detach from the main mold and / or the imprint material and / or the product from the edge to the center.

[0051] In one particular embodiment, the fixation is designed such that a continuous film (Endlosfolie) can be used on which multiple impressions are applied. In this case, the continuous film can be fixed in such a way that, on the one hand, significant distortion of the imprint structure does not occur, and on the other hand, demolding of the imprint structure or impressions can be carried out sequentially from the outside to the inside.

[0052] This demolding is particularly controlled and proceeds from the outside in. Embodiments with continuous films allow for the provision of an imprinting apparatus that can independently manufacture its soft imprint using a single master mold.

[0053] A particular advantage of the embodiments and processes according to the invention is that the demolding of the impression is independent of the size of the substrate, and especially independent of the thickness of the substrate. The substrate can remain completely flat and fixed during the deformation process, while the impression detaches from the substrate due to the deformation according to the invention, especially due to the resulting convex bending, and in particular detaches from the substrate sequentially from the outside to the inside. This prevents the substrate from cracking.

[0054] Another advantage is that there is no exclusion zone. Since it is not necessary to introduce objects such as blades (which could damage components and structures at the edges of the substrate) for separation, the structure can be imprinted down to the outermost edge of the substrate.

[0055] In principle, according to embodiments of the invention, it can be embossed on a substrate of any size and shape, provided that the substrate is accordingly designed.

[0056] Another advantage of the invention is particularly the reusability of the mold carrier. If the structure on the carrier is damaged or worn out due to repeated use, the carrier can be replaced or the carrier can be moved further to produce a new, defect-free working mold.

[0057] Another advantage of the invention is that the mold can cover the entire surface of the sheet to be imprinted and can even imprint the exclusion zone. This is particularly due to the fact that all the forming and deforming components are located behind the mold or the mold carrier, and therefore the mold is not laterally restricted by any component.

[0058] Compared to existing technologies, another advantage of the present invention is that the substrate to be imprinted is no longer demolded separately from the mold; rather, the mold is preferably demolded from the substrate. While demolding of the mold from the substrate can be supported by translational movement of the substrate away from the mold, the primary demolding is based on the bending of the carrier or the mold according to the invention. Thus, according to the invention, imprinting can be performed on very thin substrates, and the mold can then be demolded without damaging the substrate, since the substrate can be fixed in one surface and does not need to be bent itself.

[0059] Another advantage of the invention is particularly the rigidity of the mold or carrier during the embossing process and the flexibility of the mold or carrier during the demolding process. During the embossing process, the mold can be subjected to pressure loads because it is stabilized by the carrier and / or components located behind the carrier, while the mold and carrier can deform during the demolding process.

[0060] The demolding behavior of the mold can be easily affected by and adjusted by the thickness of the carrier. In particular, the carrier is thinner than 5 mm, preferably thinner than 1 mm, even more preferably thinner than 0.1 mm, most preferably thinner than 0.01 mm, and of all these, most preferably thinner than 0.001 mm.

[0061] According to embodiments of the present invention, the mold can be used to manufacture an impression mold on one hand, and on the other hand, the impression mold can be used in an embossing process. Therefore, compared with the prior art, two separate embodiments are no longer required.

[0062] In the prior art, a back plane is frequently used, which must be coated before the impression is manufactured, especially to ensure adhesion strength to the printing ink relative to the working impression. The back plane preferred by the present invention is supplied with a pre-coated back plane, thus eliminating the coating process for the impression manufacturer, resulting in cost and time savings.

[0063] According to embodiments of the present invention, there is particularly a device by means of which an impression can be generated on a carrier.

[0064] The device according to the invention particularly has at least one carrier forming element, through which a carrier can be tensioned. The carrier forming element preferably has at least one carrier forming element protrusion that lifts the carrier impression side of the tensioned carrier from the rest of the carrier forming element.

[0065] The carrier forming element particularly has at least one fixing element for fixing, especially dynamically fixing, the carrier. The fixing element of the carrier forming element can be switched on and off. The fixing element is used to keep the carrier fixed, especially to keep it fixed with as little tension as possible.

[0066] One or more fixing elements can be

[0067] Vacuum fixing mechanism, especially with

[0068] -Separately operable vacuum path

[0069] - Interconnected vacuum paths

[0070] Mechanical fixing mechanisms, especially

[0071] - Clamp

[0072] • Electrically fixed mechanisms, especially

[0073] - Static electricity fixing mechanism

[0074] -Magnetic fixing mechanism

[0075] Adhesive fixing mechanisms, especially

[0076] -Gel-Pak Fixing Mechanism

[0077] - A fixing mechanism with an adhesive, especially maneuverable, surface.

[0078] At least one fixing element is particularly capable of electronic control. A vacuum fixing mechanism is a preferred type of fixing element. The vacuum fixing mechanism preferably consists of multiple vacuum paths extending from the surface of the carrier forming element. These vacuum paths are preferably individually controllable.

[0079] In preferred applications, several vacuum paths are combined into vacuum path segments, which can be individually manipulated and thus evacuated or filled. However, each vacuum segment is independent of the others. Therefore, the possibility of constructing individually manipulated vacuum segments becomes available. The vacuum segments are preferably designed in annular shape. This allows the substrate to be targeted, radially symmetrically, and particularly from the inside out, secured and / or detached from the sample holder. Another preferred shape for the vacuum segments is rectangular.

[0080] The carrier forming element particularly has at least one element for lifting the carrier from the carrier forming element. Lifting of the carrier is also referred to hereinafter as stretching; the one or more elements causing the stretching are also referred to as stretching elements(s). At least one stretching element is preferably a fluid element through which gas and / or gas mixtures can flow to generate overpressure between the carrier forming element and the carrier.

[0081] In a particularly specific embodiment of the invention, the at least one vacuum section used as a fixing mechanism can be switched such that a gas and / or a gas mixture can be pumped via the vacuum section into the gap between the carrier forming element and the carrier. Thus, at least one fixing element can be used simultaneously as a stretching element. If other fixing elements are to be used, the stretching element is provided separately and independently of the fixing elements.

[0082] At least one carrier forming element preferably has rounded edges that allow the carrier to deflect as gently as possible. The radius of the rounded edges is greater than 0.1 mm, preferably greater than 1 mm, even more preferably greater than 5 mm, most preferably greater than 10 mm, and of all these, most preferably greater than 30 mm.

[0083] The carrier is preferably fixed to at least two sides, especially opposite sides, by means of a fixing unit that is independent of the carrier forming element and acts from the outside.

[0084] A force-measuring element should be installed in the fixing unit to measure and monitor the force used to fix the carrier to the carrier forming element. In particular, the carrier should not and must not be damaged by the fixing unit.

[0085] The fixing unit is particularly used for the coarse fixing of the carrier. The force that can be applied to the carrier by the fixing unit is preferably adjustable. The force used is between 0.001N and 1000N, preferably between 0.01N and 500N, even more preferably between 0.1N and 100N, most preferably between 1N and 50N, and most preferably between 1N and 25N.

[0086] It is more appropriate to specify the pressure that can be applied to the carrier so as not to damage the carrier. The mentioned force values ​​are standardized to one square meter, and then the corresponding pressure values ​​are derived. The pressure is between 0.001 MPa and 1000 MPa, preferably between 0.01 MPa and 500 MPa, even more preferably between 0.1 MPa and 100 MPa, most preferably between 1 MPa and 50 MPa, and of all most preferably between 1 MPa and 25 MPa.

[0087] During the manufacturing process of the working mold, the microcracks that appear in the carrier are preferably completely sealed by the working mold imprint material.

[0088] Imprint material

[0089] Further details will distinguish between working die stamping materials and product stamping materials. Working die stamping materials are those used to create working dies (= molds, soft molds). Product stamping materials are those used to press the work die to produce the desired product.

[0090] Imprinting inks and product imprinting inks can be different. Ideally, working imprinting inks and product imprinting inks differ in their hydrophobicity or hydrophilicity. A measure of hydrophobicity or hydrophilicity is the contact angle formed between the test droplet (especially water) and the surface to be measured. Hydrophilic surfaces flatten the droplet because the adhesive force between the liquid and the surface exceeds the cohesive force of the liquid, thus creating a lower contact angle. Hydrophobic surfaces result in a more spherical droplet shape because the cohesive force of the liquid exceeds the adhesive force between the liquid and the surface.

[0091] A common method for determining hydrophobicity or hydrophilicity is the contact angle method. The contact angle method is used in conjunction with Young's equation to obtain an indication of the surface energy of a solid by using a test liquid. This assesses the surface energy of the surface using some test liquid, typically water. The corresponding measurement and evaluation methods are known to those skilled in the art. The contact angle determined using the contact angle method can be converted to N / m or J / m. 2The surface energy is expressed in units. However, in order to make relative comparisons between different surfaces under the same test liquid conditions, the description of the contact angle is sufficient to obtain a relative estimate of the surface's adhesive ability. Thus, by using water as the test liquid, it can be said that a wetting surface that produces a contact angle of approximately 30° at the water droplet has higher adhesion than a surface that produces a contact angle of approximately 120° at the water droplet.

[0092] In a preferred embodiment of the present invention, the adhesion ability of the working impression material is configured to be less than 0.1 J / m. 2 Especially less than 0.01 J / m 2 Preferably less than 0.001 J / m 2 More preferably less than 0.0001 J / m 2 Ideally less than 0.00001 J / m 2 The surface energy is used to define it.

[0093] Alternatively or additionally, according to an advantageous embodiment of the invention, the adhesiveness of the contact surface is defined as having a contact angle greater than 20°, particularly greater than 50°, preferably greater than 90°, and even more preferably greater than 150°. The adhesiveness of a surface to another material can be determined using the contact angle method described above. Here, a drop of a known liquid, preferably water (referring to the value of water according to the invention) (alternatively glycerol or hexadecane), is dropped onto the surface to be measured. Using a microscope, the angle is precisely measured from the side, i.e., the angle between the tangent at the droplet and the surface.

[0094] The imprinting material used according to the present invention preferably has a viscosity between 1 cp and 25,000 cp, more preferably between 10 and 25,000 cp, even more preferably between 100 cp and 25,000 cp, most preferably between 1,000 cp and 25,000 cp, and most preferably between 10,000 and 25,000 cp.

[0095] Device

[0096] In a first preferred embodiment of the invention, a carrier is placed onto a carrier forming element. The carrier is preferably a film. The film is first pre-fixed using a dynamic carrier fixing mechanism, preferably a vacuum element. It is then laterally fixed using a static carrier fixing mechanism. This embodiment is designed to accommodate a trimmed film or a constrained rigid carrier. In particular, the size of the carrier is designed such that the static carrier fixing mechanism can fix the carrier. This embodiment has at least one stretching element by which the carrier can be stretched. The dynamic fixing mechanism preferably also functions as the stretching element.

[0097] In another preferred embodiment of the invention, an impression carrier apparatus is disclosed that uses a continuous film to enable the generation of multiple impressions along a carrier. The continuous film is preferably provided as a roll and mounted on a first shaft. A second shaft allows a protective film to be wound and removed from the continuous film. The continuous film can be guided onto additional elements and is guided between a first static carrier fixing mechanism and a carrier forming element. The continuous film passes through a static carrier fixing mechanism and a second static carrier fixing mechanism, and is finally wound onto a third shaft.

[0098] The static carrier fixing mechanism consists of a fixing unit that is movable and, in particular, clamps the continuous film to the carrier forming element, thereby preventing movement of the continuous film. In this state, portions of the continuous film can now be provided with corresponding embossing structures. This embodiment has at least one stretching element by means of which the carrier can be stretched. The dynamic fixing mechanism preferably also functions as a stretching element.

[0099] The film according to the invention can be pre-tightened using a force between 1N and 1000N, preferably between 2N and 800N, even more preferably between 5N and 600N, most preferably between 8N and 400N, and most preferably between 10N and 100N.

[0100] The device according to the invention can be part of a cluster as a module. The cluster is understood as a number of interconnected modules, all of which are interconnected in a vacuum-sealed manner, so that the substrate can be transported between the modules without contact with the external atmosphere.

[0101] Each module can preferably be evacuated individually. The entire cluster can be evacuated. The pressure can be adjusted in each module and / or the entire cluster to less than 1 bar, preferably less than 10. -1 mbar, and more preferably less than 10 -3 mbar, preferably less than 10 -5 mbar, preferably less than 10 among all. -7 mbar.

[0102] Modules and / or clusters can also be flushed, particularly with gases and / or gas mixtures. Modules and / or clusters can also be subjected to overpressure. In this case, the pressure is adjusted between 1 bar and 5 bar, more preferably between 1 bar and 4.5 bar, even more preferably between 1 bar and 4 bar, most preferably between 1 bar and 3.5 bar, and of all most preferably between 1 bar and 3 bar.

[0103] The modules in the cluster are interconnected, particularly through a central module, which preferably contains a robot that enables the base to move between loading containers and / or modules.

[0104] method

[0105] In the first preferred method according to the invention, the carrier is fixed to the device according to the invention.

[0106] In the first process step, the working die imprint material is deposited onto the main die using a deposition apparatus. Preferably, the working die imprint material is distributed as evenly and evenly as possible across the entire surface.

[0107] In the second process step, the device according to the invention is aligned relative to the master mold. Movement of the device and / or master mold according to the invention is conceivable. However, it is preferable to move the master mold. Alignment can be performed mechanically and / or optically. Purely coarse positioning of the master mold relative to the device according to the invention is conceivable. However, it is preferable that the alignment of the two objects is based on alignment marks. Alignment marks can be located on the carrier forming element and / or the carrier. However, alignment marks are preferably located on the carrier.

[0108] In the third process step, contact is made between the carrier and the working mold impression material. By applying pressure, the working mold material is planarized along the carrier, and the main mold structure is formed into a substrate within the working mold material.

[0109] In the fourth process step, the working impression material is cured. The working impression material can be heat-cured and / or cured by electromagnetic radiation.

[0110] Thermosetting occurs between 0°C and 500°C, preferably between 50°C and 450°C, even more preferably between 100°C and 400°C, most preferably between 150°C and 350°C, and most preferably between 200°C and 300°C.

[0111] The electromagnetic radiation preferably has a wavelength between 10 nm and 2000 nm, more preferably between 50 nm and 1500 nm, more preferably between 100 nm and 1000 nm, even more preferably between 150 nm and 500 nm, and most preferably between 200 nm and 370 nm.

[0112] In the fifth process step, the carrier with cured working die impression material is detached from the main die by having a stretching element responsible for stretching the carrier. Preferably, a gas or gas mixture flows between the carrier forming element and the carrier via a dynamic carrier fixing mechanism consisting of vacuum elements, thus creating a carrier with a convex bend when viewed from the outside. The carrier thus detaches from the outside in.

[0113] In the sixth process step, the carrier is re-fixed by a dynamic carrier fixing mechanism.

[0114] In a second preferred method according to the invention, a continuous film is fixed as a carrier onto the device according to the invention.

[0115] The first six process steps of the second method are essentially the same as the first six process steps of the first method.

[0116] In the seventh process step, the continuous film is released by retracting the static carrier fixing mechanism of the fixing unit. Subsequently, or simultaneously, the continuous film is wound onto the third roll. This removes the resulting working die impression material from the carrier forming element, and a new area of ​​the continuous film is ready for printing.

[0117] Therefore, it is very easy to manufacture multiple working impressions on a continuous thin film.

[0118] In a third preferred method according to the invention, a working mold produced by one of the aforementioned methods is used to imprint a product imprinting material. The actual product to be produced is made from the product imprinting material. Preferably, the product imprinting material is applied to a substrate, and the substrate is aligned relative to the working mold. An imprinting process, a curing process, and a demolding process are then performed. Attached Figure Description

[0119] Other advantages, features, and details of the invention will become apparent from the following description of preferred embodiments and from the accompanying drawings. Wherein:

[0120] Figure 1a A side view is shown of the first embodiment according to the present invention.

[0121] Figure 1b A bottom view is shown of the first embodiment according to the present invention.

[0122] Figure 2a The first process step according to the first process of the present invention is shown.

[0123] Figure 2b The second process step according to the first process of the present invention is shown.

[0124] Figure 2c The third process step according to the first process of the present invention is shown.

[0125] Figure 2d The fourth process step according to the first process of the present invention is shown.

[0126] Figure 2e This illustrates the fifth process step of the first process according to the present invention.

[0127] Figure 2f The sixth process step according to the first process of the present invention is shown.

[0128] Figure 3a The second process step according to the second process of the present invention is shown.

[0129] Figure 3b The third process step of the second process according to the present invention is shown.

[0130] Figure 3c The fourth process step of the second process according to the present invention is shown.

[0131] Figure 3d The fifth process step of the second process according to the present invention is shown.

[0132] Figure 3e The sixth process step according to the first process of the present invention is shown.

[0133] Figure 3f The seventh process step of the second process according to the present invention is shown.

[0134] In the figures, the same components or components with the same function are represented by the same reference numerals. Detailed Implementation

[0135] Figure 1aThe diagram shows a side view of a manually operated first impression device 1 according to the invention, which is provided with at least two fixing units 4, by means of which a carrier 3 can be fixed, particularly at two opposing sides. The two fixing units 4 are preferably connected to a carrier forming element 2. The carrier forming element 2 preferably has a carrier forming element protrusion 2e, through which the carrier 3 can be tensioned. The fixing unit 4 consists, for example, of a static carrier fixing mechanism 5, a spacer 7, and an upper member 8. The static carrier fixing mechanism 5, the spacer 7, and the upper member 8 can be detachably fixed to each other by fixing elements 9, particularly threaded elements. The carrier forming element 2 is preferably transparent to the wavelength range of electromagnetic radiation used to cure the working impression ink. The carrier forming element 2 has dynamic, on / off fixing elements 6 (hereinafter also referred to as dynamic carrier fixing mechanisms). The fixing elements 6 can be arbitrarily distributed on the surface 2o of the carrier forming element. The number of fixing elements 6 used is particularly greater than 2, preferably greater than 5, even more preferably greater than 10, most preferably greater than 50, and of all, most preferably greater than 100. In a particularly preferred embodiment of the invention, the fixing element 6 can be manipulated independently. The fixing element 6 is preferably controlled such that it causes a convex deformation of the carrier 3 as observed from the outside. This is achieved particularly simply by implementing the fixing element 6 as a channel that not only serves to evacuate the intermediate region between the carrier 3 and the carrier forming element 2, but also to generate overpressure. Therefore, the fixing element 6 is preferably a channel capable of creating a vacuum or overpressure. Another application of the fixing element 6 according to the invention is that, by means of the fixing element, the carrier 3 can be fixed without twisting before relatively twisted fixing via the static carrier fixing mechanism 5 of the fixing unit 4. Thus, the carrier 3 is not twisted or only very slightly twisted in the region to which the impression is applied during the subsequent imprinting process. The carrier 3 is held between the outer portion of the carrier forming element 2 and the static carrier fixing mechanism 5 on the left and right sides. Furthermore, alignment marks 14 are arranged on the surface of the carrier forming element.

[0136] Figure 1b A bottom view of the first manual device 1 according to the invention is shown, revealing the fixing element 9, particularly the threaded part, for the detachable screwing of the static carrier fixing mechanism 5, the spacer 7, and the upper part 8. The dynamic carrier fixing mechanism 6 is shown as a single, fully circumferential rectangular vacuum channel. The circular region is the impression region 16, in which subsequent impressions are pressed. The impression region can, of course, adopt any size and shape, but is presented as circular with reference to the circular standardized sheet shape in the semiconductor industry.

[0137] Figure 2aThe first process step according to the invention is shown in the first method according to the invention, in which working mold impression material 11 is applied to the main mold surface 12o of the main mold 12 having a plurality of main mold structures 13 via a deposition apparatus 10.

[0138] Figure 2b The diagram illustrates a second process step according to the invention's first method, in which the manual first impression device 1 is aligned relative to the master impression 12 by means of alignment marks 14. The alignment marks 14 of the master impression 12 and the impression device 1 are preferably aligned with each other by means of an optical alignment element 15. In particular, in the absence of alignment elements 15 and alignment marks 14, a purely mechanical, coarse alignment of the impression device 1 relative to the master impression 12 is also conceivable.

[0139] Figure 2c The diagram illustrates a third process step according to the first method of the invention, in which the carrier 3 contacts the working die imprint material 11 via the carrier imprint side 3s. This contact planarizes the working die imprint material 11.

[0140] Figure 2d The diagram illustrates a fourth process step according to the first method of the invention, in which the working mold impression material 11 is cured. Curing can be performed thermally, but preferably electromagnetically, particularly by means of UV light. Curing is preferably performed via a carrier forming element 2. When using electromagnetic radiation, the carrier forming element 2 must be sufficiently transparent within the corresponding wavelength range to achieve the appropriate curing of the working mold impression material 11.

[0141] Figure 2e The fifth process step according to the invention is shown in the first method according to the invention, in which the mold 17 (hereinafter also referred to as the working mold) produced according to the invention is detached according to the invention. The carrier 3 is removed from the carrier forming element 2. Removal is carried out, in particular, by overpressure of a fluid that exits through a dynamic carrier fixing mechanism 6 implemented as a vacuum path. It is also conceivable that elements exist independently of the dynamic carrier fixing mechanism 6 and that can achieve a corresponding bending of the carrier 3 and thus a corresponding bending of the mold 17. For example, an additionally mounted nozzle is conceivable. It is also conceivable that the carrier 3 is electrostatically charged, and that the carrier 3 repels the carrier forming element 2 due to a second potential of the same polarity of the elements in the carrier forming element 2. According to the invention, the cured working mold impression material 11 is detached from the main mold 12 from the outside in, particularly sequentially. This detachment method achieves a particularly gentle detachment of the cured working mold impression material 11 from the main mold structure 13 of the main mold 12. Therefore, the mold 17 thus produced can be produced without defects.

[0142] Figure 2f The sixth process step according to the invention is shown, in which the carrier 3, which forms the mold 17 with the cured working mold impression material 11, is once again completely fixed to the carrier forming element 2. Here, it is re-fixed via the dynamic carrier fixing mechanism 6. The mold 17 thus produced can now be used in the impression process. In the subsequent impression process, the mold 17 can be demolded from the impression material and... Figure 2e The demolding of the mold 17 is carried out in the same manner as the demolding of the main mold 12.

[0143] Figure 3a The second process step according to the invention is shown, performed using the second impression device 1' according to the invention. The first process step according to the invention is similar to... Figure 2a The process steps are not described again here. The second impression device 1' according to the invention is a device with a roll system. A carrier 3' covered with a protective film 19 is placed on a roll 18a. Compared with the carrier 3 according to the first embodiment of the invention, the carrier 3' is a "continuous film". The carrier 3' is tensioned and wound on a roll 18c via a carrier forming element 2. The protective film 19 can be peeled off and wound on a roll 18b. The fixing unit 4' is designed such that it can clamp the carrier 3' particularly laterally. The clamping of the carrier 3' is preferably achieved by an angled static carrier fixing mechanism 5', the clamping surface 5k' of which is parallel to the clamping surface 2k of the carrier forming element opposite to it. The angle α between the carrier forming element clamping surface 2k and the rear side 2r of the carrier forming element is here between 0° and 90°, preferably between 5° and 85°, even more preferably between 10° and 80°, most preferably between 15° and 75°, and most preferably between 20° and 70°. In an embodiment according to the invention, the main mold 12 preferably moves below the mold-making device.

[0144] Figure 3b The third process step according to the invention is shown using the second impression device 1' according to the invention. Because the impression device 1' is preferably designed such that the impression device as a whole is stationary, the main impression 12 moves toward the carrier 3' so that the working impression material 11 comes into contact with the carrier 3'.

[0145] Figure 3c Showing something similar Figure 2d The process steps according to the invention are carried out using the second impression device 1' according to the invention in the fourth process step according to the invention.

[0146] Figure 3d Showing something similar to Figure 2eThe fifth process step according to the invention is carried out using the second impression device 1' according to the invention.

[0147] Figure 3e Showing something similar to Figure 2f The sixth process step according to the invention is carried out using the second impression device 1' according to the invention.

[0148] Figure 3f The illustration shows a seventh process step according to the invention, performed using the second impression device 1', in which the fixing unit 4' is opened, allowing the carrier 3 to move further via the rolls 18a, 18c. According to the invention, the working impression 17 is removed from the carrier forming element 2. Because the carrier 3 is wound on the roll 18c, a new, unused section 3u of the carrier 3 reaches below the carrier forming element 2 and can be re-filled with impression material according to process steps 3a-3d.

[0149] List of reference numerals

[0150] 1,1' Imprinting Device

[0151] 2 Carrier molding element

[0152] 2e Carrier molding element protrusion

[0153] 2o Carrier molding element surface

[0154] 2r Carrier molding element side

[0155] 2k carrier molding element clamping surface

[0156] 3,3' carrier

[0157] 3u Unused carrier segment

[0158] 3s carrier impression side

[0159] 4,4' Fixed Unit

[0160] 5,5' Static carrier fixing mechanism

[0161] 5k' clamping surface

[0162] 6. Dynamic carrier fixing mechanism / fixing element

[0163] 7. Spacer components

[0164] 8. Upper component

[0165] 9. Fixing components

[0166] 10. Deposition Unit

[0167] 11. Working mold stamping material

[0168] 12 Master Imprint

[0169] 12° Main Imprint Surface

[0170] 13. Master Imprint Structure

[0171] 14 Alignment Marks

[0172] 15 Alignment elements

[0173] 16 Imprinting Area

[0174] 17 Imprints / Working Imprints

[0175] 18a, 18b, 18ac reels

[0176] 19 Protective Film

[0177] α Angle.

Claims

1. A method for detaching an impression (17) from a substrate, characterized in that, The method comprises the following steps: A carrier forming element is provided, on which a carrier is stretched and in contact with the carrier forming element, the carrier forming element being configured such that the carrier in contact with the mold (17) deforms and tensions to deform the mold (17) in the direction of the substrate so as to disengage the mold (17) in contact with the carrier from the substrate.

2. The method according to claim 1, wherein, The substrate is the main printing mold (12), the printing material (11), and / or the product.

3. The method according to claim 1 or 2, wherein, The mold (17) is deformed by overpressure.

4. The method according to claim 1 or 2, wherein, The maximum deformation occurs at the center of the mold (17).

5. The method according to claim 1 or 2, wherein, The maximum deformation occurs at the center of the mold (17), wherein the deformation is symmetrical with respect to the center of the mold (17).

6. The method according to claim 1 or 2, wherein, The deformation of the mold (17) occurs from the inside out.

7. The method according to claim 1 or 2, wherein, The deformation of the mold (17) occurs from the center of the mold (17) to the edge of the mold (17).

8. The method according to claim 1 or 2, characterized in that, Separation is achieved by moving the substrate and the impression (17) away from each other.

9. The method according to claim 1 or 2, characterized in that, Separation is achieved by simultaneously moving the substrate and the mold (17) away from each other due to deformation of the mold (17).

10. The method according to claim 1 or 2, wherein, The detachment of the impression (17) proceeds from the outside in.

11. The method according to claim 1 or 2, wherein, The detachment of the mold (17) proceeds from the edge of the mold (17) to the center of the mold (17).

12. A method for manufacturing an impression (17) on a carrier (3,3'), the method comprising the steps of: - Apply the imprinting material (11) to the main mold (12), - To bring the imprint material (11) into contact with the carrier (3,3'), - To cure the imprint material (11), - This causes the main mold (12) to separate from the cured imprint material (11), wherein, The resulting impression (17) remains on the carrier (3,3'). The method is characterized by the following steps: providing a carrier forming element, wherein the carrier (3,3') is stretched and in contact with the carrier forming element, the carrier forming element being configured such that the carrier (3,3') in contact with the mold (17) deforms and tensions to deform the mold (17) in the direction of the main mold (12) so as to disengage the mold (17) in contact with the carrier (3,3') from the main mold (12).

13. A method for manufacturing a product from an imprinting material (11), the method comprising the following steps: -Make the imprint material (11) come into contact with the mold (17), - To cure the imprint material (11), - This causes the printing mold (17) to separate from the printing material (11). Its features are, The method comprises the following steps: providing a carrier forming element, on which a carrier is stretched and in contact, the carrier forming element being configured such that the carrier in contact with the mold (17) deforms and tensions to deform the mold (17) in the direction of the product so as to disengage the mold (17) in contact with the carrier from the product.

14. An apparatus for detaching an impression (17) from a substrate, the apparatus comprising: A carrier forming element on which a carrier is stretched and in contact with the carrier forming element, the carrier forming element being configured such that the carrier in contact with the mold (17) deforms and tensions to deform the mold (17) in the direction of the substrate so as to disengage the mold (17) in contact with the carrier from the substrate.

15. The apparatus according to claim 14, characterized in that, The substrate is the main printing mold (12), the printing material (11), and / or the product.

16. An apparatus for manufacturing an impression (17) on a carrier (3,3'), the apparatus comprising: - An application device (10) for applying imprint material (11) onto the master mold (12), - A contact device for bringing the imprint material (11) into contact with the carrier (3,3'), - A curing device for separating the master mold (12) from the cured imprint material (11), wherein, The resulting impression (17) remains on the carrier (3,3'). The device is characterized in that it has a carrier forming element on which the carrier (3,3') is stretched and in contact, the carrier forming element being configured such that the carrier (3,3') in contact with the mold (17) deforms and tensions to deform the mold (17) in the direction of the main mold (12) so as to disengage the mold (17) in contact with the carrier (3,3') from the main mold (12).

17. An apparatus for manufacturing a product from an imprinting material (11), the apparatus comprising: - A contact device used to bring the imprint material (11) into contact with the mold (17), - A curing device for curing the imprint material (11), -A release device for releasing the impression (17) from the impression material (11), characterized in that, The device has a carrier forming element on which a carrier is stretched and in contact, the carrier forming element being configured such that the carrier in contact with the mold (17) deforms and tensions to deform the mold (17) in the direction of the product so that the mold (17) in contact with the carrier is disengaged from the product.

18. The apparatus according to claim 17, wherein the apparatus has at least one stretching element for stretching the carrier (3,3').

19. The apparatus according to claim 17 or 18, wherein, The carrier forming element (2) has at least one carrier forming element protrusion (2e), wherein the carrier forming element protrusion (2e) lifts and / or stretches the carrier (3,3') from the carrier forming element (2).

20. The apparatus according to claim 17 or 18, wherein, The carrier forming element (2) has at least one fixing element (6) for fixing the carrier (3,3').

21. The apparatus according to claim 17 or 18, wherein, The carrier forming element (2) has at least one fixing element (6) for dynamically fixing the carrier (3,3'), wherein the at least one fixing element (6) is switchable such that gas and / or gas mixture can be delivered via the at least one fixing element (6) into the gap between the carrier forming element (2) and the carrier (3,3').

22. The apparatus according to claim 18, wherein, The at least one stretching element is a fluid element, wherein a gas and / or a gas mixture can be delivered via the fluid element to generate overpressure between the carrier forming element (2) and the carrier (3,3').

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