Cover for laser ablation pool, laser ablation device

By designing a cover for laser erosion pool and using an inlaid calcium fluoride glass sheet window assembly, the glass window of the existing large-size laser erosion pool cover is solved, and the effect of full laser coverage and cost reduction is achieved.

CN114609229BActive Publication Date: 2025-05-06UNIV OF SCI & TECH OF CHINA
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Patent Information

Application Number
CN202210250255.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-03-10
Publication Date
2025-05-06
Estimated Expiration
2042-03-10

AI Technical Summary

Technical Problem

The cover of the existing large-size laser erosion pool uses calcium fluoride glass windows, which are thin and brittle, limiting the processing size and increasing the cost. At the same time, it is easy to break during use, and cannot effectively cover large areas of laser erosion.

Method used

A cover for a laser erosion pool is designed, using a calcium fluoride glass sheet as a window assembly, and arranged in the second through-hole of the collar by inlay, ensuring that the glass sheet projectes the area between the geometric center of the cover opening and any inner edge in the direction perpendicular to the opening plane, thereby covering the entire opening during rotation.

Benefits of technology

While reducing the size of calcium fluoride glass sheets, it is achieved to ensure that the laser can irradiate to any position in the laser erosion tank, meet the needs of large-size laser erosion, reduce processing costs and improve the stability of the glass window.

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Abstract

A cover for a laser ablation pool, the cover comprising: a main body, configured to rotatably seal and cover an opening of the laser ablation pool, comprising an outer edge combined with the opening of the laser ablation pool and provided with a first through hole; and a window assembly, arranged in the first through hole of the cover and comprising a calcium fluoride glass sheet, through which laser is irradiated into the laser ablation pool to achieve ablation of a target arranged in the laser ablation pool; wherein the projection of the calcium fluoride glass sheet in a direction perpendicular to a plane defined by the opening is located in the opening and at least covers an area from the geometric center of the opening to any inner edge of the opening.
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Description

Technical Field

[0001] The invention belongs to the field of laser ablation, in particular to a cover body suitable for a large-size laser ablation pool and a laser ablation device comprising the cover body. Background Art

[0002] Laser ablation analysis plays an important role in modern analytical testing. It has the characteristics of micro-area (micrometer level), in-situ and real-time (online analysis). It is one of the most widely used solid sample element content and isotope ratio analysis techniques. After the solid sample is ablated by high-energy laser in the ablation cell, the generated aerosol is transported by carrier gas (usually helium) to the mass spectrometer for analysis and detection.

[0003] The commonly used ablation cell is affected by the structural parameters and ablation performance, and the effective volume that can be used is small. Therefore, it can usually only ablate regular samples with small diameter or volume and polished surface, such as mineral particle targets, mineral thin sections, cut ceramic pieces, etc. For some large-volume indestructible geological and environmental samples (such as fossils, meteorites or single mineral megacrystals, etc.) and large-volume samples (ceramics or jade, etc.) in the research fields of jewelry, archaeology, etc., it is necessary to use an ablation cell with a large internal volume or surface area for laser ablation analysis.

[0004] The structure of a large-scale ablation cell requires not only the ability to accommodate large irregular samples, but also the area of ​​the laser through the glass window is large enough to allow the laser to ablate all surface areas of the sample as much as possible. However, since the glass window on the cover of the ablation cell is made of calcium fluoride (CaF2), which is very thin and brittle, there are usually certain restrictions on the size of the processing. If the size of the glass is increased, not only will the processing cost increase significantly, but the glass window will also be easily broken during use (for example, due to finger pressure or vibration). Summary of the invention

[0005] In view of this, the present invention provides a cover for a laser ablation pool and a laser ablation device, in order to at least partially solve at least one of the above-mentioned technical problems.

[0006] According to an embodiment of the present disclosure, a cover for a laser ablation pool is provided, comprising: a main body configured to rotatably seal and cover an opening of the laser ablation pool, comprising an outer edge combined with the opening of the laser ablation pool and provided with a first through hole; and a window assembly disposed in the first through hole of the cover and comprising a calcium fluoride glass sheet, through which laser is irradiated into the laser ablation pool to achieve ablation of a target disposed in the laser ablation pool; wherein a projection of the calcium fluoride glass sheet in a direction perpendicular to a plane defined by the opening is located within the opening and at least covers an area from a geometric center of the opening to any inner edge of the opening.

[0007] According to an embodiment of the present disclosure, the calcium fluoride glass sheet is formed into a circle, and the area of ​​the calcium fluoride glass sheet is not less than one quarter of the area of ​​the opening and not more than one half of the area of ​​the opening; preferably, the diameter of the opening is not more than 140 mm, and the diameter of the calcium fluoride glass sheet is approximately 70 mm.

[0008] According to an embodiment of the present disclosure, the main body is coupled to the opening in a snap-fit ​​manner, so that the main body remains sealed and connected to the opening during rotation relative to the laser ablation pool.

[0009] According to an embodiment of the present disclosure, the window assembly further comprises a collar disposed in the first through hole of the cover body, and the calcium fluoride glass sheet is disposed in the second through hole of the collar.

[0010] According to an embodiment of the present disclosure, the first through hole is provided with an internal thread, and the collar is provided with an external thread combined with the internal thread.

[0011] According to an embodiment of the present disclosure, a flange protruding radially inward is provided at the lower portion of the internal thread, and a sealing groove is provided at the upper portion of the flange; the cover body also includes a sealing gasket arranged in the sealing groove and located at the lower portion of the ring.

[0012] According to an embodiment of the present disclosure, the calcium fluoride glass sheet is disposed in the second through hole of the ring by means of inlaying.

[0013] According to an embodiment of the present disclosure, the first through hole includes a circular shape, an elliptical shape, or a rectangular shape.

[0014] According to an embodiment of the present disclosure, the cover body is made of metal material, including aluminum alloy.

[0015] According to another embodiment of the present disclosure, there is also provided a laser ablation device, comprising: a laser ablation pool having a receiving space for receiving the target and an opening communicating with the receiving space; and the above-mentioned cover body.

[0016] According to the cover for the laser ablation pool of the above embodiment of the present disclosure, since the projection of the calcium fluoride glass sheet installed on the main body in the direction perpendicular to the plane defined by the opening of the laser ablation pool is located in the opening of the laser ablation pool and at least covers the area between the geometric center of the opening and any inner edge of the opening, it can be understood that the longest distance of the calcium fluoride glass sheet satisfies the distance greater than the distance between the geometric center of the opening and any inner edge of the opening. Therefore, during the process of rotating the main body for one circle, the projection of the calcium fluoride glass sheet in the direction perpendicular to the plane defined by the opening of the laser ablation pool can cover the entire opening of the laser ablation pool, and the corresponding laser penetrating the calcium fluoride glass sheet can irradiate any position in the laser ablation pool and ablate the target in the laser ablation pool. In this way, the size of the outer contour of the calcium fluoride glass sheet can be made smaller than the size of the contour of the opening, and while reducing the size of the calcium fluoride glass sheet, the laser can also be irradiated to any position in the laser ablation pool and ablate the target in the laser ablation pool. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a simplified top view of a cover for a laser ablation cell according to an illustrative embodiment of the present disclosure;

[0018] Figure 2 yes Figure 1 A simplified cross-sectional view of a cover for a laser ablation pool after being coupled to the laser ablation pool by snap-fit;

[0019] Figure 3 is a simplified schematic diagram of another exemplary embodiment of the present disclosure, in which the cover body for the laser ablation pool is a hemispherical structure and the cover body is combined with the laser ablation pool by snap-fitting;

[0020] Figure 4 yes Figure 1 A partial enlarged view of the junction between the collar and the main body of the cover body for the laser ablation pool is shown.

[0021] Description of Reference Numerals

[0022] 1: Main body;

[0023] 2: Calcium fluoride glass sheet;

[0024] 3: Ring;

[0025] 4: flange;

[0026] 5: Sealing gasket;

[0027] 6: Sealing groove;

[0028] 7: Internal thread;

[0029] 8: External thread;

[0030] 9: Sealing gasket;

[0031] 10: Laser ablation cell;

[0032] 100: target to be eroded;

[0033] 101: Accommodation space;

[0034] 102: Opening;

[0035] 103: groove;

[0036] 11: Raised part. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical scheme and advantages of the present disclosure more clear, the present disclosure is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. However, the present disclosure can be implemented in different forms and should not be construed as being limited to the embodiments presented herein. On the contrary, providing these embodiments will make the disclosure thorough and complete, and fully convey the scope of the present disclosure to those skilled in the art. In the accompanying drawings, for clarity, the sizes and relative sizes of layers and regions may be exaggerated, and the same reference numerals represent the same elements throughout.

[0038] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present disclosure. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.

[0039] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise", "include", etc. used herein indicate the existence of the features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0040] All terms (including technical and scientific terms) used herein have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification, and should not be interpreted in an idealized or overly rigid manner.

[0041] In order to facilitate those skilled in the art to understand the technical solution of the present disclosure, the following technical terms are explained.

[0042] In the case of using expressions such as "at least one of A, B, and C, etc.", it should generally be interpreted in accordance with the meaning of the expression generally understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.). In the case of using expressions such as "at least one of A, B, or C, etc.", it should generally be interpreted in accordance with the meaning of the expression generally understood by those skilled in the art (for example, "a system having at least one of A, B, or C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0043] Figure 1 is a simplified top view of a cover for a laser ablation cell according to an illustrative embodiment of the present disclosure; Figure 2 yes Figure 1 A simplified cross-sectional view of a cover for a laser ablation pool after being coupled to the laser ablation pool by snap-fitting is shown.

[0044] The embodiment of the present disclosure provides a cover for a laser ablation pool 10, wherein a receiving space 101 for receiving a target 100 to be ablated and an opening 102 communicating with the receiving space are formed in the laser ablation pool 10. Figure 1 and 2 As shown, the cover comprises: a main body 1 configured to rotatably seal and cover the opening of the laser ablation pool, the main body 1 being provided with a first through hole; a window assembly disposed in the first through hole of the cover and comprising a calcium fluoride glass sheet 2, through which the laser is irradiated into the laser ablation pool 10 to achieve ablation of the target disposed in the laser ablation pool. The main body 1 comprises an outer edge combined with the opening of the laser ablation pool; the projection of the calcium fluoride glass sheet 2 in a direction perpendicular to the plane defined by the opening is located in the opening and at least covers the area between the geometric center B of the opening and any inner edge of the opening.

[0045] In some embodiments, regular samples with small surface polishing diameter or volume, such as mineral particle targets, mineral slices, cut ceramic slices, etc.; large-volume indestructible geological and environmental samples, such as fossils, meteorites, or single mineral megacrystals; and large-volume samples in research fields, such as jewelry, ceramics, or jade, can be placed in a laser ablation pool, covered with the cover of the embodiment of the present disclosure, and then irradiated with laser to achieve laser ablation. Afterwards, the generated aerosol is transported by a carrier gas (usually helium) to a mass spectrometer for analysis and detection. Figure 3 yes Figure 1The cover body for the laser ablation pool shown is a simple schematic diagram of the cover body and the laser ablation pool being combined by snap-fit ​​when the cover body is a hemispherical structure.

[0046] In some embodiments, the cover body can be made of metal material, such as aluminum alloy; further, the cover body can be round, rectangular or spherical (such as Figure 3 The main body 1 of the cover is configured to rotatably seal and cover the opening of the laser ablation pool, that is, the main body 1 of the cover keeps sealing and covering the opening of the laser ablation pool during the rotation of the main body 1 of the cover relative to the laser ablation pool to ensure the sealing of the ablation process.

[0047] In detail, the projection of the calcium fluoride glass sheet 2 in the direction perpendicular to the plane defined by the opening is located in the opening and at least covers the area between the geometric center B of the opening and any inner edge of the opening, that is, when the main body 1 rotates one circle relative to the laser ablation pool, the vertical projection of the calcium fluoride glass sheet 2 into the laser ablation pool can cover the entire laser ablation pool, and when the laser is irradiated into the laser ablation pool through the calcium fluoride glass sheet 2, any target object in the laser ablation pool can be ablated, achieving full coverage of the ablation in the ablation pool. In this way, the size of the outer contour of the calcium fluoride glass sheet can be made smaller than the size of the contour of the opening, and while reducing the size of the calcium fluoride glass sheet, the laser can also be irradiated to any position in the laser ablation pool and ablate the target in the laser ablation pool.

[0048] In an exemplary embodiment, the first through hole includes a circle, an ellipse, or a rectangle.

[0049] In detail, the opening of the laser ablation pool can be circular or rectangular, the first through hole can be circular, elliptical, or rectangular, and the corresponding calcium fluoride glass sheet 2 can be circular, elliptical, or rectangular.

[0050] In detail, when the opening of the laser ablation pool is circular, the calcium fluoride glass sheet 2 can be any one of a circular, elliptical or rectangular shape. When the calcium fluoride glass sheet 2 is set to be circular, the diameter of the calcium fluoride glass sheet 2 can be selected to be any length between the radius of the opening of the laser ablation pool and the diameter of the opening of the laser ablation pool, that is, the diameter of the calcium fluoride glass sheet 2 is not less than the radius of the opening of the laser ablation pool but less than the diameter of the opening of the laser ablation pool, so that, as Figure 1As shown, during the rotation of the main body 1 of the cover body around the geometric center B of the opening, the geometric center A of the calcium fluoride glass sheet 2 is always located in the area between the geometric center B of the opening and any inner edge of the opening; when the calcium fluoride glass sheet 2 is set to be an ellipse, the farthest distance on the edge of the calcium fluoride glass sheet 2 can be selected as any length between the radius of the opening of the laser ablation pool and the diameter of the opening of the laser ablation pool; when the calcium fluoride glass sheet 2 is set to be a rectangle, the longest side of the calcium fluoride glass sheet 2 can be selected as any length between the radius of the opening of the laser ablation pool and the diameter of the opening of the laser ablation pool, so as to meet the requirement that the projection of the calcium fluoride glass sheet 2 in the direction perpendicular to the plane defined by the opening is located in the opening and at least covers the area between the geometric center of the opening and any inner edge of the opening, that is, when the laser is irradiated into the laser ablation pool through the calcium fluoride glass sheet 2, the laser can ablate any target object in the pool, so as to achieve full coverage of the ablation in the ablation pool.

[0051] In detail, when the opening of the laser ablation pool is rectangular, the calcium fluoride glass sheet 2 can be any one of circular, elliptical or rectangular. When the calcium fluoride glass sheet 2 is set to be circular, the diameter of the calcium fluoride glass sheet 2 can be selected to be any length between half of the longest side of the opening of the laser ablation pool and the longest side of the opening of the laser ablation pool; when the calcium fluoride glass sheet 2 is set to be elliptical, the farthest distance on the edge of the calcium fluoride glass sheet 2 can be selected to be any length between half of the longest side of the opening of the laser ablation pool and the longest side of the opening of the laser ablation pool; when the calcium fluoride glass sheet 2 is set to be rectangular, the longest side of the calcium fluoride glass sheet 2 can be selected to be any length between half of the longest side of the opening of the laser ablation pool and the longest side of the opening of the laser ablation pool, so as to meet the projection of the calcium fluoride glass sheet 2 in the direction perpendicular to the plane defined by the opening is located in the opening and at least covers the area between the geometric center of the opening and any inner edge of the opening, that is, when the laser is irradiated into the laser ablation pool through the calcium fluoride glass sheet 2, the laser from the outside can ablate any target object in the laser ablation pool, so as to achieve full coverage of the ablation in the ablation pool.

[0052] Furthermore, when the maximum length in the laser ablation pool is 90 mm and the maximum width is 80 mm, the minimum length of the traditional calcium fluoride glass sheet 2 needs to be designed to be 90 mm, and the length of the calcium fluoride glass sheet 2 in the embodiment of the present disclosure only needs to be not less than 45 mm.

[0053] In an exemplary embodiment, the calcium fluoride glass sheet 2 is formed into a circle, and the area of ​​the calcium fluoride glass sheet 2 is not less than one quarter of the opening area and not more than one half of the opening area; preferably, the diameter of the opening is not more than 140 mm, and the diameter of the calcium fluoride glass sheet 2 is approximately 70 mm.

[0054] In detail, when the opening of the laser ablation pool is circular and the calcium fluoride glass sheet 2 is circular, the area of ​​the calcium fluoride glass sheet 2 is not less than one quarter of the opening area and not more than one half of the opening area. Due to the processing characteristics of calcium fluoride glass, the cover body of the embodiment of the present disclosure can be applied to a laser ablation pool of a larger size than a conventional cover, such as a laser ablation pool with an opening diameter of not more than 140 mm. For example, when the diameter of the opening is 140 mm, the calcium fluoride glass sheet 2 can be set to about 70 mm or any value between the radius of the opening and 70 mm; when the diameter of the opening is less than 140 mm, the calcium fluoride glass sheet 2 can be set to about 70 mm.

[0055] Figure 4 yes Figure 1 A partial enlarged view of the junction between the collar 3 and the main body 1 of the cover body of the laser ablation pool is shown.

[0056] In an exemplary embodiment, Figure 2 and 4 As shown, the window assembly further includes a collar 3, which is disposed in the first through hole of the cover body, and the calcium fluoride glass sheet 2 is disposed in the second through hole of the collar 3. In this way, the calcium fluoride glass sheet 2 is mounted on the main body 1 through the collar 3.

[0057] In an exemplary embodiment, the first through hole is provided with an internal thread 7, and the collar 3 is provided with an external thread 8 combined with the internal thread 7; a flange 4 protruding radially inward is provided at the lower part of the internal thread 7, and a sealing groove 6 is provided at the upper part of the flange 4. The cover body further includes a sealing gasket 5 arranged in the sealing groove 6 and located at the lower part of the collar 3.

[0058] In detail, the window assembly of the cover body further includes a collar 3 and a sealing gasket 5, and the calcium fluoride glass sheet 2 is embedded in the second through hole of the collar 3. Figure 4 As shown, an internal thread 7 is provided in the first through hole of the main body 1, and an external thread 8 is provided on the outside of the collar 3. The collar 3 is rotated into the first through hole based on the internal and external threads to achieve the fixed connection of the collar 3 to the main body 1. A flange 4 protruding radially inward is provided at the lower part of the internal thread 7 to define the position of the collar 3. After the collar 3 is connected to the main body 1, the collar 3 is located on the upper surface of the flange 4. A sealing groove 6 is also provided between the upper surface of the flange 4 and the collar 3. A sealing gasket 5 is provided in the sealing groove 6, so that after the collar 3 is installed on the cover body, the collar 3 and the cover body are kept sealed.

[0059] In an exemplary embodiment, the main body 1 is coupled to the opening in a snap-fit ​​manner, so that the main body 1 remains sealed and connected to the opening during rotation relative to the laser ablation pool.

[0060] In detail, Figure 2 and Figure 3As shown, a groove 103 is provided on the outer wall of the laser ablation pool 10, and a protrusion 11 matching the groove on the outer wall of the laser ablation pool is provided on the outer edge of the cover body main body 1. Based on the groove 103 and the protrusion 11, the cover body main body 1 is combined with the laser ablation pool 10 in a snap-fit ​​manner, and a sealing gasket 9 is also provided between the outer edge of the cover body main body 1 and the outer wall of the laser ablation pool, so that the main body 1 remains sealed and connected with the opening during the rotation relative to the laser ablation pool.

[0061] The embodiment of the present disclosure further provides a laser ablation device, which includes: a laser ablation pool 10 having a receiving space 101 for receiving a target 100 to be ablated; and a cover as described above, wherein the receiving space of the laser ablation pool is connected to an opening 102 .

[0062] In detail, the laser ablation device can use a calcium fluoride glass sheet 2 that is smaller than that in a traditional cover body through the above-mentioned cover body in the case of a laser ablation pool with the same opening size, thereby achieving ablation of the target to be ablated at any position in the accommodating space of the laser ablation pool.

[0063] It should also be noted that the directional terms mentioned in the embodiments, such as "upper", "lower", "front", "back", "left", "right", etc., are only reference directions of the drawings and are not intended to limit the scope of protection of the present disclosure. Throughout the drawings, the same elements are represented by the same or similar reference numerals. Conventional structures or configurations will be omitted when they may cause confusion in the understanding of the present disclosure, and the shapes and sizes of the components in the drawings do not reflect the actual size and proportion, but only illustrate the contents of the embodiments of the present disclosure.

[0064] Unless otherwise indicated, the numerical parameters in this specification and the appended claims are approximate values ​​and can vary according to the desired properties obtained through the content of the present disclosure. Specifically, all numbers used in the specification and claims to express the content of the composition, reaction conditions, etc., should be understood to be modified by the term "about" in all cases. In general, the meaning of the expression is to include a variation of ±10% in some embodiments, ±5% in some embodiments, ±1% in some embodiments, and ±0.5% in some embodiments by a specific number.

[0065] The ordinal numbers used in the specification and claims, such as "first", "second", "third", etc., to modify the corresponding elements, do not themselves mean that the elements have any ordinal numbers, nor do they represent the order of one element and another element, or the order in the manufacturing method. The use of these ordinal numbers is only used to clearly distinguish a component with a certain name from another component with the same name.

[0066] In addition, unless the steps are specifically described or must occur in sequence, the order of the above steps is not limited to the above list, and can be changed or rearranged according to the required design. And the above embodiments can be mixed and matched with each other or with other embodiments based on design and reliability considerations, that is, the technical features in different embodiments can be freely combined to form more embodiments.

[0067] The specific embodiments described above further illustrate the purpose, technical solutions and beneficial effects of the present disclosure. It should be understood that the above description is only a specific embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A cover for a laser ablation pool, comprising: a main body configured to rotatably seal and cover the opening of the laser ablation pool, comprising an outer edge combined with the opening of the laser ablation pool and having a first through hole; and A window assembly is disposed in the first through hole of the cover body and includes a calcium fluoride glass sheet, through which the laser is irradiated into the laser ablation pool to ablate a target disposed in the laser ablation pool; The projection of the calcium fluoride glass sheet in a direction perpendicular to the plane defined by the opening is located in the opening and at least covers an area from the geometric center of the opening to any inner edge of the opening. When the main body rotates one circle relative to the laser ablation pool, the laser passes through the calcium fluoride glass sheet and irradiates any position in the laser ablation pool to ablate the target in the laser ablation pool.

2. The cover according to claim 1, characterized in that: The calcium fluoride glass sheet is formed in a circular shape, and an area of ​​the calcium fluoride glass sheet is not less than one quarter of an area of ​​the opening and not more than one half of the area of ​​the opening.

3. The cover according to claim 1, characterized in that: The main body is coupled to the opening in a snap-fit ​​manner, so that the main body remains sealed and connected to the opening during rotation relative to the laser ablation pool.

4. The cover according to claim 1, characterized in that: The window assembly further comprises a collar disposed in the first through hole of the cover body, and the calcium fluoride glass sheet is disposed in the second through hole of the collar.

5. The cover according to claim 4, characterized in that: The first through hole is provided with an internal thread, and the collar is provided with an external thread combined with the internal thread.

6. The cover according to claim 5, characterized in that: The lower part of the internal thread is provided with a flange protruding radially inward, and the upper part of the flange is provided with a sealing groove; The cover body also includes a sealing gasket, which is arranged in the sealing groove and located at the lower part of the collar.

7. The cover body according to claim 4, wherein the calcium fluoride glass sheet is disposed in the second through hole of the ring by means of an inlay.

8. The cover according to claim 1, characterized in that: The first through hole includes a circular shape, an elliptical shape, or a rectangular shape.

9. The cover according to claim 1, characterized in that: The cover body is made of metal material, including aluminum alloy.

10. The cover according to claim 1, characterized in that: The diameter of the opening is no greater than 140 mm, and the diameter of the calcium fluoride glass sheet is 70 mm.

11. A laser ablation device, comprising: A laser ablation pool is formed with a receiving space for receiving the target and an opening communicating with the receiving space; as well as A cover according to any one of claims 1 to 10.

Citation Information

Patent Citations

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    CN104777155A