A control method for synchronous scanning of actuator, host computer and control system

Abstract

The present application provides a control method, a host computer and a control system for synchronous scanning of actuators, the control method comprising: obtaining the scanning time interval of each subsystem actuator involved in the scanning; determining the scanning time value according to the time intersection relationship between the multiple scanning time intervals obtained, and determining the preparation time value according to the scanning time value; issuing scanning control instructions to each subsystem actuator at the same time according to the scanning time value and the preparation time value, and controlling multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed. The technical solution provided by the present application can determine the scanning time value and the preparation time value by obtaining the scanning time interval and the preparation time interval, and control multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed by the scanning time value and the preparation time value, thereby improving the working efficiency of wafer exposure while ensuring the quality of the exposure image.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a control method for synchronous scanning of an actuator, a host computer, and a control system. Background Art

[0002] The wafer exposure process uses light to project the pattern on the mask onto the wafer through an optical system to achieve pattern transfer. It is one of the important steps in the photolithography process in integrated circuit manufacturing. Before the wafer is exposed, it is necessary to scan the wafer to be exposed. At present, the scanning mode is that each subsystem executes the scanning process sequentially. This mode will cause the exposure time to be the sum of the execution time of all subsystems, so it leads to low exposure efficiency. Therefore, how to improve the exposure efficiency while ensuring the quality of the exposure image has become a problem that needs to be solved urgently. Summary of the invention

[0003] In view of this, the purpose of the present application is to provide a control method, a host computer and a control system for synchronous scanning of an actuator, which can determine the scanning time value and the preparation time value by obtaining the scanning time interval and the preparation time interval, and control multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed through the scanning time value and the preparation time value, thereby improving the work efficiency of wafer exposure while ensuring the quality of the exposure image.

[0004] This application mainly includes the following aspects:

[0005] In a first aspect, an embodiment of the present application provides a control method for synchronous scanning of an actuator, which is applied to a host computer, and the control method includes:

[0006] Obtaining the scanning time interval of each subsystem actuator involved in the scanning; wherein the scanning time interval is determined according to the action data sent by the host computer, and the action data includes the starting position and the ending position of the subsystem actuator scanning;

[0007] Determine a scan time value according to the time intersection relationship between the multiple scan time intervals obtained, and determine a preparation time value according to the scan time value;

[0008] According to the scanning time value and the preparation time value, a scanning control instruction is simultaneously issued to each subsystem actuator to control the multiple subsystem actuators to synchronously scan the wafer to be exposed.

[0009] Further, the scan time value is determined by the following steps:

[0010] Determine whether there is an intersection between the multiple scanning time intervals according to the obtained multiple scanning time intervals;

[0011] If there is an intersection, the lower limit time value of the intersection interval or the intersection time value is determined as the scanning time value;

[0012] If there is no intersection, a display message indicating that the execution cannot be performed is generated.

[0013] Further, the preparation time value is determined by the following steps:

[0014] According to the scan time value, obtaining the preparation time interval of multiple subsystem actuators; wherein the preparation time interval is determined after the subsystem actuator replans the motion path according to the scan time value;

[0015] Determine, according to the obtained multiple preparation time intervals, whether there is an intersection between the multiple preparation time intervals;

[0016] If there is an intersection, the lower limit time value of the intersection interval or the intersection time value is determined as the preparation time value;

[0017] If there is no intersection, a display message indicating that the execution cannot be performed is generated.

[0018] Furthermore, the control method further includes:

[0019] Receive a synchronous scan completion signal, obtain corresponding scan results from each subsystem executor, and update the available status of each subsystem executor;

[0020] Data analysis is performed based on the scanning results, the subsystem actuator is optimized, and the next synchronous scanning process is performed based on the state of the subsystem actuator.

[0021] In a second aspect, an embodiment of the present application further provides a host computer, the host computer comprising:

[0022] An acquisition module, used to acquire the scanning time intervals of multiple subsystem actuators participating in the scanning; wherein the scanning time interval is determined according to the action data sent by the host computer, and the action data includes the starting position and the ending position of the scanning of the subsystem actuator;

[0023] A determination module, used to determine a scan time value according to the time intersection relationship between the multiple scan time intervals obtained, and determine a preparation time value according to the scan time value;

[0024] The control module is used to send scanning control instructions to each subsystem actuator at the same time according to the scanning time value and the preparation time value, so as to control multiple subsystem actuators to synchronously scan the wafer to be exposed.

[0025] In a third aspect, an embodiment of the present application further provides a control system for synchronous scanning of an actuator, the system comprising a host computer, a single board computer card, a synchronization card, and at least one subsystem actuator as described above;

[0026] The host computer is used to determine multiple subsystems involved in the scan according to the scan data, and send action data to the subsystem actuators of each determined subsystem; receive the corresponding scan time intervals sent by each subsystem actuator, and determine the scan time value according to the received multiple scan time intervals; send the scan time value to the subsystem actuator of each determined subsystem; receive the corresponding preparation time intervals sent by each subsystem actuator, and determine the preparation time value according to the received preparation time intervals; send the scan time value and the preparation time value as scan parameters to the single board computer board;

[0027] The single board computer board is used to receive the scanning parameters sent by the host computer and send the scanning parameters to the synchronization board;

[0028] The synchronization board is used to receive the scanning parameters sent by the single board computer board, generate a synchronization trigger signal according to the scanning parameters, and send the synchronization trigger signal to the subsystem actuator;

[0029] The subsystem executor is used to receive and store the action data sent by the host computer, determine a scan time interval based on the action data, and send the scan time interval to the host computer; receive a scan time value sent by the host computer, determine a preparation time interval based on the scan time value, and send the preparation time interval to the host computer; receive a synchronization trigger signal sent by the synchronization board, and execute corresponding actions according to the synchronization trigger signal and the stored action data.

[0030] Furthermore, the host computer is also used to receive the synchronous scanning completion signal sent by the single-board computer board through the synchronization board, obtain the scanning result from each subsystem actuator according to the synchronous scanning completion signal, perform data analysis according to the scanning result, and optimize the subsystem actuator.

[0031] Furthermore, the host computer is further configured to update the state of the subsystem actuator from an unavailable state to an available state after receiving the scanning result.

[0032] Furthermore, the subsystem executor is further used to maintain the subsystem state, wherein the subsystem state includes any one of an initialization command, a start preparation, a start scan, an end, and an exception;

[0033] When receiving the synchronization trigger signal sent by the synchronization board, determine whether the synchronization trigger signal conforms to the current subsystem state. If not, generate abnormal information to notify the host computer through the synchronization board and the single-board computer board to perform abnormal processing.

[0034] Furthermore, the synchronization board has a timer, and sends a synchronization trigger signal to the corresponding subsystem actuator according to the timer.

[0035] An embodiment of the present application provides a control method, a host computer and a control system for synchronous scanning of an actuator, the control method comprising: obtaining a scanning time interval of each subsystem actuator involved in the scanning; wherein the scanning time interval is determined based on action data sent by the host computer, and the action data includes a starting position and an ending position of the scanning of the subsystem actuator; determining a scanning time value based on a time intersection relationship between multiple scanning time intervals obtained, and determining a preparation time value based on the scanning time value; and simultaneously issuing scanning control instructions to each subsystem actuator based on the scanning time value and the preparation time value, to control multiple subsystem actuators to perform synchronous scanning on a wafer to be exposed.

[0036] In this way, the technical solution provided by the present application can determine the scanning time value and the preparation time value by obtaining the scanning time interval and the preparation time interval, and control multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed through the scanning time value and the preparation time value, thereby improving the work efficiency of wafer exposure while ensuring the quality of the exposure image.

[0037] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0039] Figure 1 A flow chart of a method for controlling synchronous scanning of an actuator provided in an embodiment of the present application is shown;

[0040] Figure 2 A flow chart showing another method for controlling synchronous scanning of an actuator provided in an embodiment of the present application is shown;

[0041] Figure 3A schematic diagram of the structure of a host computer provided in an embodiment of the present application is shown;

[0042] Figure 4 A schematic diagram of the structure of a control system for synchronous scanning of an actuator provided in an embodiment of the present application is shown;

[0043] Figure 5 A schematic structural diagram of an electronic device provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0044] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It should be understood that the drawings in the present application only serve the purpose of explanation and description and are not used to limit the scope of protection of the present application. In addition, it should be understood that the schematic drawings are not drawn in real proportion. The flowchart used in this application shows the operations implemented according to some embodiments of the present application. It should be understood that the operations of the flowchart can be implemented out of sequence, and the steps without logical context can be reversed in order or implemented simultaneously. In addition, those skilled in the art, under the guidance of the content of the present application, can add one or more other operations to the flowchart, or remove one or more operations from the flowchart.

[0045] In addition, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0046] In order to enable those skilled in the art to use the contents of this application, the following implementation is provided in combination with a specific application scenario of "multiple actuators performing synchronous scanning". For those skilled in the art, the general principles defined herein can be applied to other embodiments and application scenarios without departing from the spirit and scope of this application.

[0047] The control method, host computer and control system described below in the embodiments of the present application can be applied to any scenario requiring synchronous scanning of the actuator. The embodiments of the present application are not limited to specific application scenarios. Any solution of the control method, device and control system for synchronous scanning of the actuator provided in the embodiments of the present application is within the protection scope of the present application.

[0048] It is worth noting that synchronous scanning means that multiple actuators of the equipment need to keep consistent in motion time, start at a specified time and reach a specified position at a specified time to ensure the efficiency and accuracy of the equipment operation; semiconductor process equipment, as an important part of semiconductor integrated circuit processing, has extremely high requirements for the accuracy of synchronous scanning. During exposure and other operations, each actuator needs to move strictly according to the time baseline to ensure that the final exposure image is clear and complete. Therefore, semiconductor process equipment needs to pay attention to the following issues during exposure: First, in order to ensure that the scan is completed in the fastest possible time during the exposure process, each motion actuator needs to plan the motion path in advance before the movement, and only needs to move according to the predetermined path during the movement; the lighting actuator sets the correct dose information in advance before exposure; secondly, each subsystem needs to follow the same time base to ensure the consistency of the start time and end time, so the motion actuator needs to reach the correct position at the correct speed at the beginning of the scan.

[0049] At present, the scanning mode during the exposure and other operations is that each subsystem executes the scanning process sequentially. This mode causes the exposure time to be the sum of the execution time of all subsystems, resulting in low exposure efficiency. Therefore, how to improve the exposure efficiency while ensuring the quality of the exposure image has become a problem that needs to be solved urgently.

[0050] Based on this, the present application proposes a control method, a host computer and a control system for synchronous scanning of actuators, the control method comprising: obtaining a scanning time interval of each subsystem actuator involved in the scanning; wherein the scanning time interval is determined based on the action data sent by the host computer, and the action data includes the starting position and the ending position of the scanning of the subsystem actuator; determining the scanning time value based on the time intersection relationship between the multiple scanning time intervals obtained, and determining the preparation time value based on the scanning time value; based on the scanning time value and the preparation time value, simultaneously issuing scanning control instructions to each subsystem actuator to control multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed.

[0051] In this way, the technical solution provided by the present application can determine the scanning time value and the preparation time value by obtaining the scanning time interval and the preparation time interval, and control multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed through the scanning time value and the preparation time value, thereby improving the work efficiency of wafer exposure while ensuring the quality of the exposure image.

[0052] To facilitate the understanding of the present application, the technical solution provided by the present application is described in detail below in conjunction with specific embodiments.

[0053] See also Figure 1 , Figure 1A flowchart of a control method for synchronous scanning of an actuator provided in an embodiment of the present application is applied to a host computer, such as Figure 1 As shown in, the control method includes:

[0054] S101, obtaining a scanning time interval of each subsystem actuator involved in the scanning;

[0055] In this step, the scanning time interval is determined by each subsystem actuator according to the action data sent by the host computer, and the action data includes the starting position and the ending position of the scanning of the subsystem actuator.

[0056] S102, determining a scan time value according to the time intersection relationship between the multiple scan time intervals obtained, and determining a preparation time value according to the scan time value;

[0057] In this step, the host computer obtains the scan time interval from each subsystem actuator participating in the scan, and determines the scan time value from the multiple scan time intervals obtained; here, the steps for determining the scan time value refer to Figure 2 , Figure 2 This is a flow chart of another control method for synchronous scanning of an actuator provided in an embodiment of the present application. Figure 2 As shown in , the scan time value is determined by the following steps:

[0058] S201, determining whether there is an intersection between the multiple scanning time intervals according to the acquired multiple scanning time intervals;

[0059] In this step, the host computer determines a scan time value from the acquired multiple scan time intervals. Exemplarily, the scan time value may be determined by a negotiation algorithm, such as by calculating an intersection interval or an intersection value of the multiple scan time intervals.

[0060] S202: If there is an intersection, determine the lower limit time value of the intersection interval or the intersection time value as the scanning time value;

[0061] In this step, if multiple scan time intervals have an intersection interval or an intersection value, the lower limit time value of the intersection interval or the largest of the intersection time values ​​can be determined as the scan time value; for example, the host computer obtains the scan time intervals of the three subsystem actuators, which are 1-2s, 1-3s, and 1-2s, respectively, and the intersection interval is 1-2s, so the lower limit time value 1s is determined as the scan time value.

[0062] S203: If there is no intersection, generate display information that cannot be executed.

[0063] In this step, if multiple scan time intervals do not have an intersection interval or intersection value, the lower limit time of the scan time interval with the largest time is determined as the scan time value; for example, the host computer obtains the scan time intervals of the three subsystem actuators, which are 1-2s, 3-4s, and 5-6s, respectively, and do not have an intersection interval, so the display information that cannot be executed is generated.

[0064] Here, the host computer sends the determined scan time value to the subsystem executor involved in the scan. The subsystem executor replans the path according to the scan time, determines the preparation time interval, and sends the preparation time interval to the host computer. The host computer calculates the preparation time value based on the obtained multiple preparation time intervals. Similarly, the preparation time value is determined through the following steps:

[0065] 1) According to the scan time value, obtaining the preparation time interval of multiple subsystem actuators;

[0066] In this step, the preparation time interval is determined after the subsystem actuator replans the motion path according to the scan time value.

[0067] In this step, the preparation time interval refers to the time period in which the subsystem actuator prepares to enter scanning after re-planning the path according to the scanning time value and before executing the scanning process according to the new path, that is, before the scanning time.

[0068] 2) determining whether there is an intersection between the multiple preparation time intervals according to the obtained multiple preparation time intervals;

[0069] In this step, the host computer determines the preparation time value from the obtained multiple preparation time intervals. Exemplarily, it can be determined by a negotiation algorithm, for example, by calculating the intersection interval or intersection value of the multiple preparation time intervals.

[0070] 3) If there is an intersection, the lower limit time value of the intersection interval or the intersection time value is determined as the preparation time value;

[0071] In this step, if multiple preparation time intervals have an intersection interval or an intersection value, the lower limit time value of the intersection interval or the largest of the intersection time values ​​can be determined as the preparation time value; for example, the host computer obtains the preparation time intervals of three subsystem actuators, which are 1-2s, 2-3s, and 3-4s, respectively, and the intersection values ​​are 2s and 3s, so 3s is determined as the preparation time value.

[0072] 4) If there is no intersection, an unexecutable display message is generated.

[0073] In this step, if multiple preparation time intervals do not have an intersection interval or intersection value, the lower limit time of the preparation time interval with the largest time is determined as the preparation time value; for example, the host computer obtains the preparation time intervals of three subsystem actuators, which are 1-2s, 3-4s, and 5-6s, respectively, and do not have an intersection interval, so the display information that cannot be executed is generated.

[0074] S103 , issuing scanning control instructions to each subsystem actuator simultaneously according to the scanning time value and the preparation time value, so as to control the multiple subsystem actuators to synchronously scan the wafer to be exposed.

[0075] In this step, synchronous scanning means that the multiple subsystem actuators of the equipment need to keep consistent in movement time, start at the specified time and reach the specified position at the specified time to ensure the efficiency and accuracy of the equipment operation. As an important part of semiconductor integrated circuit processing, semiconductor process equipment has extremely high requirements for the accuracy of synchronous scanning. During exposure and other operations, each actuator needs to move strictly according to the time baseline to ensure that the final exposure image is clear and complete.

[0076] Here, the scanning control instruction is sent from the synchronization board to each subsystem actuator. Since the host computer and the synchronization board cannot communicate directly, the information needs to be transferred through the single-board computer board, that is, the host computer sends the scanning time value and the preparation time value to the synchronization board through the single-board computer board, thereby sending scanning control instructions to each subsystem actuator to control multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed. For example, the preparation time value is 2s, the scanning time is 3s, and a preparation trigger signal is generated to the subsystem actuator. After 2s, the scanning trigger signal is sent to the multiple subsystem actuators participating in the scanning for synchronous scanning. After 3s, the scanning trigger signal is sent again to the multiple subsystem actuators participating in the scanning for synchronous scanning until the scanning is completed, wherein the number of scans is stored in the memory.

[0077] Here, after the subsystem actuator performs synchronous scanning, the control method further includes:

[0078] 1) Receive the synchronous scanning completion signal, obtain the corresponding scanning results from each subsystem actuator, and update the available status of each subsystem actuator;

[0079] In this step, after the scan is completed, the synchronization board generates a synchronization scan completion signal and sends it to the host computer through the single-board computer board. After receiving the synchronization scan completion signal, the host computer obtains the scanning result from the subsystem executors participating in the scan and updates the available status of each subsystem executor. Exemplarily, the status of the subsystem executor includes an available status and an unavailable status. When the subsystem executor is in the scanning stage or the abnormal stage, the status of the subsystem executor is an unavailable status. If the subsystem executor is in the normal and idle stage, the status of the subsystem executor is an available status.

[0080] 2) Perform data analysis based on the scanning results, optimize the subsystem actuator, and perform the next synchronous scanning process based on the state of the subsystem actuator.

[0081] In this step, the host computer can send the acquired scanning results to the caller for data analysis, optimize the subsystem actuator, and perform the next synchronous scanning process according to the scanning requirements of the caller and the available status of the subsystem actuator; illustratively, if a certain scanning result obtained shows that the jitter data of the actuator is abnormal, the actuator can be optimized based on the abnormal data to improve the quality of the wafer exposure operation.

[0082] An embodiment of the present application provides a control method for synchronous scanning of an actuator, the control method comprising: obtaining a scanning time interval of each subsystem actuator involved in the scanning; wherein the scanning time interval is determined based on action data sent by a host computer, and the action data includes a starting position and an ending position of the scanning of the subsystem actuator; determining a scanning time value based on a time intersection relationship between multiple scanning time intervals obtained, and determining a preparation time value based on the scanning time value; and simultaneously issuing scanning control instructions to each subsystem actuator based on the scanning time value and the preparation time value, to control multiple subsystem actuators to perform synchronous scanning on a wafer to be exposed.

[0083] In this way, the technical solution provided by the present application can determine the scanning time value and the preparation time value by obtaining the scanning time interval and the preparation time interval, and control multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed through the scanning time value and the preparation time value, thereby improving the work efficiency of wafer exposure while ensuring the quality of the exposure image.

[0084] Based on the same application concept, an upper computer corresponding to a control method for synchronous scanning of an actuator provided in the above embodiment is also provided in the embodiment of the present application. Since the principle of solving the problem by the upper computer in the embodiment of the present application is similar to the control method for synchronous scanning of an actuator provided in the above embodiment of the present application, the implementation of the upper computer can refer to the implementation of the method, and the repeated parts will not be repeated.

[0085] See also Figure 3 , Figure 3 A schematic diagram of the structure of a host computer provided in an embodiment of the present application is shown in FIG. Figure 3 As shown in , the host computer 300 includes:

[0086] The acquisition module 310 is used to acquire the scanning time intervals of the multiple subsystem actuators involved in the scanning; wherein the scanning time interval is determined according to the action data sent by the host computer, and the action data includes the starting position and the ending position of the subsystem actuator scanning;

[0087] The determination module 311 is used to determine the scan time value according to the time intersection relationship between the multiple scan time intervals obtained, and determine the preparation time value according to the scan time value;

[0088] The control module 312 is used to send a scan control instruction to each subsystem actuator at the same time according to the scan time value and the preparation time value, so as to control the multiple subsystem actuators to synchronously scan the wafer to be exposed.

[0089] Optionally, the determining module 311 determines the scan time value by the following steps:

[0090] Determine whether there is an intersection between the multiple scanning time intervals according to the obtained multiple scanning time intervals;

[0091] If there is an intersection, the lower limit time value of the intersection interval or the intersection time value is determined as the scanning time value;

[0092] If there is no intersection, a display message indicating that the execution cannot be performed is generated.

[0093] Optionally, the determination module 311 determines the preparation time value through the following steps:

[0094] According to the scan time value, obtaining the preparation time interval of multiple subsystem actuators; wherein the preparation time interval is determined after the subsystem actuator replans the motion path according to the scan time value;

[0095] Determine, according to the obtained multiple preparation time intervals, whether there is an intersection between the multiple preparation time intervals;

[0096] If there is an intersection, the lower limit time value of the intersection interval or the intersection time value is determined as the preparation time value;

[0097] If there is no intersection, a display message indicating that the execution cannot be performed is generated.

[0098] Optionally, the host computer 300 further includes an update module 313, and the update module 313 is used to:

[0099] Receive a synchronous scan completion signal, obtain corresponding scan results from each subsystem executor, and update the available status of each subsystem executor;

[0100] Data analysis is performed based on the scanning results, the subsystem actuator is optimized, and the next synchronous scanning process is performed based on the state of the subsystem actuator.

[0101] An embodiment of the present application provides a host computer, which includes: an acquisition module, used to acquire scan time intervals of multiple subsystem actuators involved in scanning; wherein the scan time interval is determined based on action data sent by the host computer, and the action data includes the start position and end position of the subsystem actuator scan; a determination module, used to determine the scan time value based on the time intersection relationship between the multiple scan time intervals acquired, and determine the preparation time value based on the scan time value; a control module, used to send scan control instructions to each subsystem actuator at the same time based on the scan time value and the preparation time value, and control the multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed.

[0102] In this way, the technical solution provided by the present application can determine the scanning time value and the preparation time value by obtaining the scanning time interval and the preparation time interval, and control multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed through the scanning time value and the preparation time value, thereby improving the work efficiency of wafer exposure while ensuring the quality of the exposure image.

[0103] Based on the same application concept, the embodiment of the present application also provides a control system for actuator synchronous scanning corresponding to the control method for actuator synchronous scanning provided in the above embodiment. Since the principle of solving the problem by the system in the embodiment of the present application is similar to the control method for actuator synchronous scanning in the above embodiment of the present application, the implementation of the system can refer to the implementation of the method, and the repeated parts will not be repeated.

[0104] See also Figure 4 , Figure 4 A schematic diagram of a control system for synchronous scanning of an actuator provided in an embodiment of the present application is shown in FIG. Figure 4As shown in the figure, the system 400 includes a host computer 300, a single board computer board 410, a synchronization board 411 and a subsystem executor 412; the host computer 300 parses the action data in the scan data according to the received scan data, that is, the scan demand, and sends it to multiple subsystem executors 412 participating in the scan. Each subsystem executor 412 performs path planning according to the received action data, and feeds back the scan time interval determined by each to the host computer 300. The host computer 300 determines the scan time value according to the received multiple scan time intervals, and sends the scan time value to the multiple subsystem executors participating in the scan. The executor 412 of each subsystem executor 412 replans the path according to the received scanning time value, determines the preparation time interval and feeds it back to the host computer 300, the host computer 300 determines the preparation time value according to the received multiple preparation time intervals, and sends the preparation time value and the scanning time value as scanning parameters to the synchronization board 411 through the single board computer board 410, the synchronization board 411 sends a synchronization trigger signal to the subsystem executor 412 participating in the scanning according to the scanning parameters, and the multiple subsystem executors 412 perform corresponding scanning operations according to the received synchronization trigger signal to realize the synchronous scanning process.

[0105] Specifically, the host computer 300 is used to determine multiple subsystems involved in the scan according to the scan data, and send action data to the subsystem executor 412 of each determined subsystem; receive the corresponding scan time interval sent by each subsystem executor 412, and determine the scan time value according to the received multiple scan time intervals; send the scan time value to the subsystem executor 412 of each determined subsystem; receive the corresponding preparation time interval sent by each subsystem executor 412, and determine the preparation time value according to the received preparation time intervals; send the scan time value and the preparation time value as scan parameters to the single board computer board 410;

[0106] Here, the host computer 300 and the single board computer card 410 communicate with each other via the TCP / IP protocol.

[0107] Further, the single board computer board 410 is used to receive the scanning parameters sent by the host computer 300, and send the scanning parameters to the synchronization board 411;

[0108] Here, the single board computer card 410 and the synchronization card 411 communicate with each other via the VME bus.

[0109] Further, the synchronization board 411 is used to receive the scanning parameters sent by the single board computer board 410, generate a synchronization trigger signal according to the scanning parameters, and send the synchronization trigger signal to the subsystem actuator 412;

[0110] Here, the synchronization board 411 and the subsystem actuator 412 communicate with each other via the SPI bus.

[0111] Furthermore, the subsystem executor 412 is used to receive and store the action data sent by the host computer 300, determine a scan time interval based on the action data, and send the scan time interval to the host computer 300; receive a scan time value sent by the host computer 300, determine a preparation time interval based on the scan time value, and send the preparation time interval to the host computer 300; receive a synchronization trigger signal sent by the synchronization board 411, and perform corresponding actions according to the synchronization trigger signal and the stored action data.

[0112] Here, the scanning data includes scanning type and action data, wherein the scanning type is used to determine the subsystems involved in the scanning; illustratively, scanning type 1 represents subsystems 1, 3, and 5, and scanning type 2 represents subsystems 2 and 7; if the scanning type in the scanning data received by the host computer 300 is 1, the corresponding action data is sent to the subsystem executor 412 of subsystems 1, 3, and 5; before sending, the scanning data is also verified for rationality. illustratively, if the scanning type does not exist or the subsystem represented by the scanning type does not exist or is unavailable, the scanning data is unreasonable; until the scanning data is verified to be reasonable, the host computer 300 will send the action data to the corresponding subsystem executor 412.

[0113] Furthermore, the host computer 300 is also used to receive the synchronous scanning completion signal sent by the single-board computer board 410 through the synchronization board 411, obtain the scanning result from each subsystem executor 412 according to the synchronous scanning completion signal, perform data analysis according to the scanning result, and optimize the subsystem executor 412.

[0114] Furthermore, the host computer 300 is further configured to update the state of the subsystem executor 412 from an unavailable state to an available state after receiving the scanning result.

[0115] Furthermore, the subsystem executor 412 is also used to maintain the subsystem status, which includes any one of an initialization command, start preparation, start scanning, end, and exception; when receiving a synchronization trigger signal sent by the synchronization board 411, it is determined whether the synchronization trigger signal conforms to the current subsystem status. If not, an exception message is generated to notify the host computer 300 through the synchronization board 411 and the single-board computer board 410 to perform exception processing.

[0116] Furthermore, the synchronization board 411 has a timer, and sends a synchronization trigger signal to the corresponding subsystem executor 412 according to the timer.

[0117] The embodiment of the present application provides a control system for synchronous scanning of an actuator, the system comprising a host computer, a single-board computer board, a synchronization board and at least one subsystem actuator; the host computer is used to determine multiple subsystems involved in the scanning according to the scanning data, and send action data to the subsystem actuators of each determined subsystem; receive the corresponding scanning time interval sent by each subsystem actuator, determine the scanning time value according to the received multiple scanning time intervals; send the scanning time value to the subsystem actuator of each determined subsystem; receive the corresponding preparation time interval sent by each subsystem actuator, determine the preparation time value according to the received each preparation time interval; send the scanning time value and the preparation time value as scanning parameters to the single-board computer board; the single-board computer The computer board is used to receive the scanning parameters sent by the host computer and send the scanning parameters to the synchronization board; the synchronization board is used to receive the scanning parameters sent by the single-board computer board, generate a synchronization trigger signal according to the scanning parameters, and send the synchronization trigger signal to the subsystem executor; the subsystem executor is used to receive and store the action data sent by the host computer, determine the scanning time interval according to the action data, and send the scanning time interval to the host computer; receive the scanning time value sent by the host computer, determine the preparation time interval according to the scanning time value, and send the preparation time interval to the host computer; receive the synchronization trigger signal sent by the synchronization board, and perform corresponding actions according to the synchronization trigger signal and the stored action data.

[0118] In this way, the technical solution provided by the present application can determine the scanning time value and the preparation time value by obtaining the scanning time interval and the preparation time interval, and control multiple subsystem actuators to perform synchronous scanning on the wafer to be exposed through the scanning time value and the preparation time value, thereby improving the work efficiency of wafer exposure while ensuring the quality of the exposure image.

[0119] See also Figure 5 , Figure 5 This is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application. Figure 5 As shown in , the electronic device 500 includes a processor 510 , a memory 520 and a bus 530 .

[0120] The memory 520 stores machine-readable instructions executable by the processor 510. When the electronic device 500 is running, the processor 510 communicates with the memory 520 via the bus 530. When the machine-readable instructions are executed by the processor 510, the above-mentioned Figure 1 as well as Figure 2 The specific implementation of the steps of the method for controlling synchronous scanning of the actuator in the method embodiment shown can be found in the method embodiment, and will not be repeated here.

[0121] The present application also provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the computer program can execute the above-mentioned Figure 1 as well as Figure 2 The specific implementation of the steps of the method for controlling synchronous scanning of the actuator in the method embodiment shown can be found in the method embodiment, and will not be repeated here.

[0122] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0123] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.

[0124] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0125] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0126] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present application can essentially be embodied in the form of a software product, or in other words, the part that contributes to the prior art or the part of the technical solution. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0127] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application, rather than to limit them. The protection scope of the present application is not limited thereto. Although the present application is described in detail with reference to the above-mentioned embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-mentioned embodiments within the technical scope disclosed in the present application, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A control method for synchronous scanning of an actuator, characterized in that: Applied to a host computer, the control method includes: Obtaining the scanning time interval of each subsystem actuator involved in the scanning; wherein the scanning time interval is determined according to the action data sent by the host computer, and the action data includes the starting position and the ending position of the subsystem actuator scanning; Determine a scan time value according to the time intersection relationship between the multiple scan time intervals obtained, and determine a preparation time value according to the scan time value; According to the scanning time value and the preparation time value, a scanning control instruction is simultaneously issued to each subsystem actuator to control the multiple subsystem actuators to synchronously scan the wafer to be exposed.

2. The control method according to claim 1, characterized in that: Use the following steps to determine the scan time value: Determine whether there is an intersection between the multiple scanning time intervals according to the obtained multiple scanning time intervals; If there is an intersection, the lower limit time value of the intersection interval or the intersection time value is determined as the scanning time value; If there is no intersection, a display message indicating that the execution cannot be performed is generated.

3. The control method according to claim 1, characterized in that: Determine the setup time value by following these steps: According to the scan time value, obtaining the preparation time interval of multiple subsystem actuators; wherein the preparation time interval is determined after the subsystem actuator replans the motion path according to the scan time value; Determine, according to the obtained multiple preparation time intervals, whether there is an intersection between the multiple preparation time intervals; If there is an intersection, the lower limit time value of the intersection interval or the intersection time value is determined as the preparation time value; If there is no intersection, a display message indicating that the execution cannot be performed is generated.

4. The control method according to claim 1, characterized in that: The control method further comprises: Receive a synchronous scan completion signal, obtain corresponding scan results from each subsystem executor, and update the available status of each subsystem executor; Data analysis is performed based on the scanning results, the subsystem actuator is optimized, and the next synchronous scanning process is performed based on the state of the subsystem actuator.

5. A host computer, characterized in that: The host computer comprises: An acquisition module, used to acquire the scanning time intervals of multiple subsystem actuators participating in the scanning; wherein the scanning time interval is determined according to the action data sent by the host computer, and the action data includes the starting position and the ending position of the scanning of the subsystem actuator; A determination module, used to determine a scan time value according to the time intersection relationship between the multiple scan time intervals obtained, and determine a preparation time value according to the scan time value; The control module is used to send scanning control instructions to each subsystem actuator at the same time according to the scanning time value and the preparation time value, so as to control multiple subsystem actuators to synchronously scan the wafer to be exposed.

6. A control system for synchronous scanning of an actuator, characterized in that: The system comprises a host computer as claimed in claim 5, a single board computer board, a synchronization board and at least one subsystem actuator; The host computer is used to determine multiple subsystems involved in the scan according to the scan data, and send action data to the subsystem actuators of each determined subsystem; receive the corresponding scan time interval sent by each subsystem actuator, and determine the scan time value according to the received multiple scan time intervals; Sending the scan time value to the determined subsystem executors of each subsystem; receiving the corresponding preparation time intervals sent by each subsystem executor, and determining the preparation time value according to each received preparation time interval; sending the scan time value and the preparation time value as scan parameters to the single board computer board; The single board computer board is used to receive the scanning parameters sent by the host computer and send the scanning parameters to the synchronization board; The synchronization board is used to receive the scanning parameters sent by the single board computer board, generate a synchronization trigger signal according to the scanning parameters, and send the synchronization trigger signal to the subsystem actuator; The subsystem executor is used to receive and store the action data sent by the host computer, determine a scan time interval based on the action data, and send the scan time interval to the host computer; receive a scan time value sent by the host computer, determine a preparation time interval based on the scan time value, and send the preparation time interval to the host computer; receive a synchronization trigger signal sent by the synchronization board, and execute corresponding actions according to the synchronization trigger signal and the stored action data.

7. The control system according to claim 6, characterized in that: The host computer is also used to receive the synchronous scanning completion signal sent by the single-board computer board through the synchronization board, obtain the scanning result from each subsystem actuator according to the synchronous scanning completion signal, perform data analysis according to the scanning result, and optimize the subsystem actuator.

8. The control system according to claim 7, characterized in that: The host computer is further configured to update the state of the subsystem actuator from an unavailable state to an available state after receiving the scanning result.

9. The control system according to claim 6, characterized in that: The subsystem executor is further used to maintain the subsystem state, wherein the subsystem state includes any one of an initialization command, a start preparation, a start scan, an end, and an exception; When receiving the synchronization trigger signal sent by the synchronization board, determine whether the synchronization trigger signal conforms to the current subsystem state. If not, generate abnormal information to notify the host computer through the synchronization board and the single-board computer board to perform abnormal processing.

10. The control system according to claim 6, characterized in that: The synchronization board has a timer, and sends a synchronization trigger signal to the corresponding subsystem actuator according to the timer.

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