Transmission correction mechanism and silicon wafer production line

Abstract

The present invention relates to a transmission correction mechanism and a silicon wafer production line. The silicon wafer production line includes a transmission correction mechanism, which includes a drive module, a transmission module, and a correction module. The transmission module is connected to the drive module by transmission, and the transmission module can transmit a workpiece along a first direction under the drive of the drive module; the correction module is connected to the transmission module, and the correction module has a correction gap. The size of the correction gap along a second direction can be reduced or increased under the drive of the drive module, and the second direction is perpendicular to the first direction. When the size of the correction gap along the second direction is reduced, the correction module can touch the opposite ends of the workpiece to correct the position of the workpiece placed on the transmission module. Only one motor is required to simultaneously drive the transmission module and the correction module to complete the two actions of transmission and correction at one time, thereby solving the problems of low correction accuracy, long time required for transmission correction, and high production and maintenance costs of existing transmission correction mechanisms.

Description

Technical Field

[0001] The present invention relates to the technical field of photovoltaic manufacturing and production, and in particular to a transmission correction mechanism and a silicon wafer production line. Background Art

[0002] Solar cells are photoelectric conversion devices developed based on the photovoltaic effect. Currently, the main types of solar cells on the international photovoltaic market include crystalline silicon (including single-crystal silicon and polycrystalline silicon), amorphous / single-crystal heterojunction (HITheterojunction with Intrinsic Thin Film), amorphous silicon thin film, cadmium telluride thin film, and copper indium selenide thin film solar cells. Silicon wafers are the primary raw material in the production of solar cells.

[0003] In processes such as silicon wafer texturing, etching, PECVD (Plasma Enhanced Chemical Vapor Deposition), and printing, wafer calibration is a fundamental requirement for each step. A typical wafer transfer and calibration mechanism consists of one motor driving the wafer transfer and another motor calibrating the wafer, pushing the wafer on both sides to achieve calibration. However, configuring two or more motors often makes it impossible to synchronize the transfer and calibration of the wafer. The wafer may not be transferred to the correct position or may have already been transferred before the push-and-calibration action is performed, reducing the accuracy of wafer calibration. In this case, to improve the accuracy of wafer calibration, the wafer must first be transferred to the correct position and then calibrated. This in turn prolongs the entire transfer and calibration process. Configuring two or more motors also makes the transfer and calibration mechanism relatively complex, resulting in high production and maintenance costs, making it unsuitable for large-scale promotion and use. Summary of the Invention

[0004] Based on this, it is necessary to provide a transmission correction mechanism and a silicon wafer production line to address the problem that the existing transmission correction mechanism needs to be equipped with at least two motors to complete the two actions of transmission and correction respectively, which leads to low correction accuracy, long time required for transmission correction, and high production and maintenance costs. The purpose is to achieve the purpose of improving correction accuracy, shortening correction time, simplifying procedures and reducing production and maintenance costs.

[0005] According to one aspect of the present application, a transmission correction mechanism is provided, comprising:

[0006] Driver module;

[0007] a transmission module, drivingly connected to the driving module, wherein the transmission module is capable of transmitting the workpiece along a first direction under the drive of the driving module; and

[0008] a correction module connected to the transmission module, the correction module being connected to the driving module via the transmission module, the correction module having a correction gap, the size of the correction gap along the second direction being capable of being reduced or increased under the drive of the driving module;

[0009] When the size of the correction gap along the second direction decreases, the correction module can touch the opposite ends of the workpiece to correct the position of the workpiece placed on the transmission module;

[0010] The first direction is perpendicular to the second direction.

[0011] In one embodiment, the transmission module includes a driving shaft assembly and a first linear motion conversion mechanism connected to the driving shaft assembly;

[0012] The correction module includes a driven shaft assembly, a second linear motion conversion mechanism, and two correction assemblies, wherein the driven shaft assembly is transmission-connected to the driving shaft assembly, and the two correction assemblies are transmission-connected to the driven shaft assembly via the second linear motion conversion mechanism, and the two correction assemblies are spaced apart along the second direction to form the correction gap;

[0013] When the driving shaft assembly rotates around its own axis, it can drive the driven shaft assembly to rotate synchronously around its own axis, and drive the two correction assemblies to move away from or closer to each other through the second linear motion conversion mechanism.

[0014] In one embodiment, the first linear motion conversion mechanism includes a transmission component, which is connected to the active shaft component. The active shaft component can rotate around its own axis under the drive of the drive module to drive the transmission component to transmit the workpiece along the first direction.

[0015] In one embodiment, the transmission component includes:

[0016] A first synchronous wheel is fixedly mounted on one end of the driving shaft assembly;

[0017] a plurality of second synchronous wheels arranged at intervals, wherein the first synchronous wheels are arranged between two adjacent second synchronous wheels; and

[0018] A first synchronous belt is wound around the outer circumference of the first synchronous wheel and the plurality of second synchronous wheels;

[0019] The first synchronous wheel can rotate around its own axis under the rotation of the driving shaft assembly, and drive all the second synchronous wheels to rotate synchronously around their own axis through the first synchronous belt.

[0020] In one embodiment, the second linear motion conversion mechanism includes two connecting rod assemblies, which are connected to each other and symmetrically arranged along the second direction. One end of the driven shaft assembly is connected to the driving shaft assembly, and the other end of the driven shaft assembly is connected to one of the connecting rod assemblies.

[0021] In one embodiment, each of the connecting rod assemblies comprises:

[0022] a correction gear, meshing with the correction gear of the other connecting rod assembly;

[0023] a correction link, one end of which is rotatably and eccentrically mounted on the correction gear; and

[0024] a slider rotatably mounted on the other end of the correction link;

[0025] The correction gear of one of the connecting rod assemblies is connected to the driven shaft assembly and can rotate around its own axis under the rotation of the driven shaft assembly, so as to drive the correction gear of the other connecting rod assembly to rotate synchronously around its own axis in the opposite direction; when the correction gear rotates around its own axis, it can pull one of the sliders to perform reciprocating linear motion along the second direction through one of the correction connecting rods.

[0026] In one embodiment, the correction assembly includes a correction wheel mounting plate and a correction wheel, the correction wheel mounting plate is mounted on the slider, and the correction wheel is mounted on the correction wheel mounting plate.

[0027] In one embodiment, the driving shaft assembly includes a driving shaft and a first transfer gear, wherein the first transfer gear is sleeved on the driving shaft; the driven shaft assembly includes a driven shaft and a second transfer gear, wherein the second transfer gear is sleeved on the driven shaft;

[0028] The first transfer gear and the second transfer gear are meshed with each other, and an axis of the first transfer gear and an axis of the second transfer gear are perpendicular to each other.

[0029] In one embodiment, the driving module is connected to the transmission module via a second synchronous belt transmission, one end of the second synchronous belt is sleeved on one end of the driving module, and the other end of the second synchronous belt is sleeved on one end of the driving shaft assembly.

[0030] According to another aspect of the present application, a silicon wafer production line is provided, comprising the transmission correction mechanism as described above.

[0031] The above-mentioned transmission correction mechanism and silicon wafer production line are provided with a transmission module, a correction module, and a drive module, so that the transmission module is connected to the drive module via a synchronous belt drive, and the correction module is connected to the transmission module, so that the correction module is connected to the drive module via the transmission module drive. Under the drive of the drive module, the transmission module can transmit the workpiece along a first direction, and at the same time, the correction gap of the correction module can be reduced or increased in size along a second direction. When the workpiece is transmitted into place, the correction gap is reduced in size along the second direction and can touch the opposite ends of the workpiece to correct the position of the workpiece placed in the transmission module. Therefore, only one motor is required to simultaneously drive the transmission module and the correction module to complete the two actions of transmission and correction at one time. Compared with the transmission correction mechanism of the prior art, the total time of the entire transmission and correction process is saved, and the problems of low correction accuracy, long time required for transmission correction, and high production and maintenance costs of the existing transmission correction mechanism are solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A left side view of a transmission correction mechanism according to an embodiment of the present invention;

[0033] Figure 2 A top view of a transmission correction mechanism according to an embodiment of the present invention;

[0034] Figure 3 A front view of a transmission correction mechanism according to an embodiment of the present invention;

[0035] Figure 4 A schematic diagram of a transmission correction mechanism according to an embodiment of the present invention when the correction gap is at its maximum size along the second direction;

[0036] Figure 5 A schematic diagram of the eccentric rotation of the correction link in the transmission correction mechanism according to an embodiment of the present invention;

[0037] Figure 6 This is a schematic diagram of a transmission correction mechanism according to an embodiment of the present invention when the correction gap is minimized along the second direction.

[0038] Description of reference numerals:

[0039] 10. Transmission correction mechanism; 100. Drive module; 110. Fixing unit; 120. Output unit; 200. Transmission module; 210. Active shaft assembly; 211. Active shaft; 212. Third synchronous pulley; 213. First transfer gear; 220. First linear motion conversion mechanism; 221. Transmission assembly; 2211. First synchronous belt; 2212. First synchronous pulley; 2213. Second synchronous pulley; 300. Correction module; 310. Sliding platform; 320. Correction assembly; 321. Correction wheel mounting plate; 3211. Waist hole; 322. Correction wheel; 330. Driven shaft assembly; 331. Driven shaft; 332. Second transfer gear; 340. Second linear motion conversion mechanism; 341. Connecting rod assembly; 3411. Correction gear; 3412. Correction connecting rod; 3413. Slide rail; 3414. Slider; 400. Second synchronous belt; 50. Silicon wafer. DETAILED DESCRIPTION

[0040] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0041] It should be noted that when an element is referred to as being “fixed to” another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or there may be an intermediate element.

[0042] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used in this specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0043] As described in the background art, a typical silicon wafer transfer and correction mechanism utilizes one motor to drive the silicon wafer transfer, while another motor corrects the silicon wafer, pushing the wafer on both sides to achieve the correction purpose. Some silicon wafer transfer and correction mechanisms even have a motor on each side of the silicon wafer to control the pushing of the wafer on both sides. However, configuring two or more motors often makes it impossible to synchronize the two actions of silicon wafer transfer and correction. It is possible that the silicon wafer is not yet transferred to the correct position or has already been transferred before the push correction action is performed, resulting in reduced accuracy of silicon wafer correction. In this case, to improve the accuracy of silicon wafer correction, it is necessary to first transfer the silicon wafer to the correct position and then correct the silicon wafer. This in turn increases the time required for the entire transfer and correction process. Furthermore, configuring two or more motors also makes the transfer and correction mechanism relatively complex, resulting in high production and maintenance costs, which is not conducive to large-scale promotion and use.

[0044] To address this issue, the structure of the conventional transmission and correction mechanism can be improved. The inventors of this application have devised a method of utilizing a single motor to simultaneously provide both transmission power in the transmission direction and correction power in the correction direction. Specifically, the rotational motion of the motor's output shaft can be converted into synchronized linear motion in both the transmission and correction directions, thereby enabling a single motor to simultaneously control both transmission and correction actions.

[0045] Based on the above considerations, in order to address the problem that existing transmission and correction mechanisms require at least two motors to simultaneously complete both transmission and correction, resulting in low correction accuracy, long transmission and correction times, relatively complex procedures, and high production and maintenance costs, the inventors of this application, after in-depth research, have designed a transmission and correction mechanism. The mechanism comprises a transmission module, a correction module, and a drive module, wherein the transmission module is transmission-connected to the drive module, and the correction module is in turn transmission-connected to the drive module via the transmission module. Driven by the drive module, the transmission module can transport a workpiece in one direction, while the correction gap of the correction module can be reduced or increased along a dimension perpendicular to the direction. When the workpiece is in place, the correction gap is reduced and can contact opposite ends of the workpiece to correct the position of the workpiece in the transmission module. This mechanism allows only a single motor to simultaneously drive the transmission module and the correction module to complete both transmission and correction actions, thereby addressing the problems of low correction accuracy and long transmission and correction times in existing transmission and correction mechanisms.

[0046] The transmission correction mechanism disclosed in the embodiment of the present application can be used, but is not limited to, in a silicon wafer production line. The transmission correction mechanism disclosed in the present application can also be used in production lines of other types of workpieces to transmit and correct the position of the workpieces, which is not limited here.

[0047] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

[0048] like Figures 1 to 3 As shown, a silicon wafer production line (not shown) includes a transmission and correction mechanism 10 for transmitting and positionally correcting a silicon wafer 50. The transmission and correction mechanism 10 includes a drive module 100, a transmission module 200, and a correction module 300. The drive module 100 is fixedly installed in the silicon wafer production line, the transmission module 200 is transmission-connected to the drive module 100, and the correction module 300 is connected to the transmission module 200. The correction module 300 has a correction gap. Driven by the drive module 100, the transmission module 200 can transmit the workpiece along a first direction, while the correction gap can be reduced or increased in a second direction. When the correction gap is reduced in the second direction, the correction module 300 can contact opposite ends of the silicon wafer 50 in the second direction, thereby correcting the position of the silicon wafer 50 placed on the transmission module 200. In the figure, the X direction is the first direction, the Y direction is the second direction, and the Z direction is the third direction. The three directions X, Y, and Z are perpendicular to each other.

[0049] In some embodiments, as Figure 1 As shown, the drive module 100 can be a motor, comprising a fixed portion 110 and an output portion 120. The fixed portion 110 is fixedly installed in the silicon wafer production line. One end of the output portion 120 is movably installed in the fixed portion 110, and the other end extends from the fixed portion 110. The end extending from the fixed portion 110 is a synchronous pulley for transmission connection to the transmission module 200. The output portion 120 can rotate about its own axis relative to the fixed portion 110. The drive module 100 can be a stepper motor or a servo motor, which is not limited here.

[0050] In some embodiments, the output part 120 of the driving module 100 is connected to the transmission module 200 at one end away from the fixed part 110 through a second synchronous belt 400, wherein one end of the second synchronous belt 400 is sleeved on the output part 120 of the driving module 100, and the other end is connected to the transmission module 200, so that when the driving module 100 is running, the transmission module 200 can be driven by the second synchronous belt 400.

[0051] In some embodiments, the transmission module 200 includes a driving shaft assembly 210 and a first linear motion conversion mechanism 220 connected to the driving shaft assembly 210. The driving shaft assembly 210 is connected to a second synchronous belt 400. The driving shaft assembly 210 can rotate around its own axis through the second synchronous belt 400 under the drive of the driving module 100, thereby driving the linear motion conversion mechanism to transmit the silicon wafer 50 along the first direction.

[0052] Specifically, in an alternative embodiment, the driving shaft assembly 210 includes a driving shaft 211, a third synchronous gear 212, and a first transfer gear 213. The driving shaft 211 is connected to a transmission assembly 221 at each of its two opposite ends along the axial direction, i.e., along the second direction. The third synchronous gear 212 and the first transfer gear 213 are spaced apart and coaxially sleeved on the outer circumference of the driving shaft 211, and are capable of rotating along the driving shaft 211 about its own axis. The first transfer gear 213 is used to connect to the correction module 300, and the third synchronous wheel 212 is used to connect to the second synchronous belt 400. The end of the second synchronous belt 400 away from the driving module 100 is sleeved on the third synchronous wheel 212, so that the opposite ends of the second synchronous belt 400 are respectively sleeved on the output part 120 of the driving module 100 and the third synchronous wheel 212 of the transmission module 200. When the output part 120 of the driving module 100 rotates around its own axis, the second synchronous belt 400 can drive the driving shaft 211, the synchronous wheel and the first transfer gear 213 to rotate synchronously around their own axis.

[0053] In a preferred embodiment, Figure 1 and Figure 3 As shown, the first linear motion conversion mechanism 220 includes two transmission components 221, and the two transmission components 221 are installed at opposite ends of the driving shaft component 210 at intervals along the second direction. Each transmission component 221 includes a first synchronous belt 2211, a first synchronous wheel 2212, and a plurality of second synchronous wheels 2213 arranged at intervals. The first synchronous belt 2211 is used to transmit the silicon wafer 50, and the first synchronous wheel 2212 and the second synchronous wheel 2213 are used to drive the first synchronous belt 2211 to transmit along the first direction. In the embodiment shown in the figure, there are four second synchronous wheels 2213, wherein the first synchronous wheel 2212 is fixedly installed at one end of the driving shaft 211 in the driving shaft component 210, and the four second synchronous wheels 2213 are divided into two groups, each group having two second synchronous wheels 2213, and the first synchronous wheel 2212 and the two groups of second synchronous wheels 2213 are arranged in sequence at intervals along the third direction. The first synchronous wheel 2212 is located at the center and the bottom. The two second synchronous wheels 2213 in each group of second synchronous wheels 2213 are arranged at intervals along the first direction, and the two second synchronous wheels 2213 in each group of second synchronous wheels 2213 are located on both sides of the first synchronous wheel 2212 along the first direction. The distance between the two second synchronous wheels 2213 at the top is greater than the distance between the two second synchronous wheels 2213 in the middle. The axes of the first synchronous wheel 2212 and the four second synchronous wheels 2213 are parallel to each other and consistent with the second direction.

[0054] The first synchronous belt 2211 is wound around the first synchronous wheel 2212 and all the second synchronous wheels 2213, wherein one side of the first synchronous belt 2211 is in contact with the outer circumference of the first synchronous wheel 2212 and the outer circumference of the two second synchronous wheels 2213 at the top, and the other side of the first synchronous belt 2211 is in contact with the outer circumference of the two second synchronous wheels 2213 in the middle. Such staggered contact enables the first synchronous wheel 2212 and multiple second synchronous wheels 2213 to tighten the first synchronous belt 2211 without slipping.

[0055] In this way, when the output part 120 of the driving module 100 rotates around its own axis, the second synchronous belt 400 can drive the active shaft component 210 of the transmission component 221 to rotate around its own axis, and then drive the first synchronous wheel 2212 in the transmission component 221 to rotate around its own axis, and then drive all the second synchronous wheels 2213 and the first synchronous wheel 2212 to rotate synchronously around their own axis through the first synchronous belt 2211.

[0056] It should be noted that the synchronous belt structure in the transmission component 221 can also be a gear transmission structure, etc., as long as it can achieve linear transmission, and is not limited here.

[0057] Please continue reading Figure 1 In some embodiments, the correction module 300 includes a sliding platform 310, a correction component 320, a driven shaft component 330 and a second linear motion conversion mechanism 340, wherein the sliding platform 310 is fixedly installed in the silicon wafer production line for installing the correction component 320, and the correction component 320 has two, which are arranged at intervals along the second direction to form a correction gap. The two correction components 320 are transmission-connected to the driven shaft component 330 through the second linear motion conversion mechanism 340. The driven shaft component 330 is arranged on the sliding platform 310, one end of which is connected to the second linear motion conversion mechanism 340, and the other end is connected to the first transfer gear 213 of the transmission module 200.

[0058] Specifically, the driven shaft assembly 330 includes a driven shaft 331 and a second transfer gear 332. The second transfer gear 332 is coaxially sleeved on one end of the driven shaft 331 and is used to connect to the first transfer gear 213 of the driving shaft assembly 210 in the transmission module. The first transfer gear 213 and the second transfer gear are preferably bevel gears. The central axes of the first transfer gear 213 and the second transfer gear 332 are perpendicular to each other, so the axis direction of the second transfer gear 332 and the driven shaft 331 is consistent with the third direction. The first transfer gear 213 and the second transfer gear 332 each have a plurality of meshing teeth arranged at intervals along the circumference. The first transfer gear 213 and the second transfer gear 332 mesh with each other through the meshing teeth to achieve the purpose of mutual transmission. The end of the driven shaft 331 away from the second transfer gear 332 is connected to the second linear motion conversion mechanism 340.

[0059] The second linear motion conversion mechanism 340 includes two interconnected connecting rod assemblies 341 symmetrically arranged along the second direction. Each connecting rod assembly 341 includes a correction gear 3411, a correction connecting rod 3412, a slide rail 3413, and a slider 3414. The slide rail 3413 extends along the second direction and is fixedly mounted on the sliding platform 310. The slider 3414 is fixedly mounted on the slide rail 3413 and can slide back and forth along the slide rail 3413. One end of the slider 3414 is rotatably connected to one end of the correction connecting rod 3412, and the end of the correction connecting rod 3412 away from the slider 3414 is connected to the correction gear 3411.

[0060] Specifically, the correction gear 3411 has a plurality of meshing teeth arranged at intervals along the circumferential direction, which is used to mesh with the correction gear 3411 of another connecting rod assembly 341. The central axes of the two correction gears 3411 are parallel to each other and extend along the third direction. The correction gear 3411 of one connecting rod assembly 341 is coaxially connected to the driven shaft 331 of the driven shaft assembly 330.

[0061] Thus, when the driving shaft assembly 210 rotates about its own axis under the drive module 100, a series of transmissions can be used to drive the driven shaft 331 to rotate about its own axis through the first transfer gear 213 and the second transfer gear 332. This in turn drives the correction gear 3411 of one connecting rod assembly 341 to rotate about its own axis, and further drives the correction gear 3411 of the other connecting rod assembly 341 to rotate synchronously about its own axis in the opposite direction. The correction gear 3411 can be a spur gear or a helical gear, which is not limited here.

[0062] In a preferred embodiment, combined with Figure 1 and Figure 2 As shown, each correction link 3412 is preferably a long rod-shaped structure, one end of which is rotatably eccentrically mounted on one side of the correction gear 3411 along the axial direction, and the other end is rotatably mounted on a slider 3414. The correction gear 3411 of one connecting rod assembly 341 is connected to the driven shaft 331 of the driven shaft assembly 330, and can rotate around its own axis under the rotation of the driven shaft assembly 330, and drive the correction gear 3411 of the other connecting rod to rotate synchronously around its own axis. When the correction gear 3411 rotates around its own axis, it can pull the corresponding slider 3414 to perform reciprocating linear motion along the second direction through a correction link 3412.

[0063] In a preferred embodiment, the calibration assembly 320 includes a calibration wheel mounting plate 321 and a plurality of calibration wheels 322. The calibration wheel mounting plate 321 is mounted on the end of the slider 3414 away from the calibration link 3412. Each calibration assembly 320 has a plurality of calibration wheels 322, which are mounted on the calibration wheel mounting plate 321 in an interval arrangement along a first direction.

[0064] In this manner, the multiple correction wheels 322 of one correction assembly 320 and the multiple correction wheels 322 of the other correction assembly 320 jointly define a correction gap. When the correction link 3412 in each linkage assembly 341 pulls a slider 3414 to perform reciprocating linear motion in the second direction, the correction wheels 322 of the two correction assemblies 320 follow the slider 3414 and move closer or further away from each other along the guide rail 3413, thereby reducing or increasing the size of the correction gap in the second direction. When the correction gap in the second direction is reduced, the correction wheels 322 can contact both ends of the silicon wafer 50 being transported on the transport module 200 in the second direction, thereby correcting the position of the silicon wafer 50 on the transport module 200.

[0065] It should be noted that the slider 3414 and the slide rail 3413 can be replaced with linear bearings. The guide rails of the linear bearings are fixedly mounted on the sliding platform 310, and the sliding bearings of the linear bearings are connected to the correction link 3412, allowing the sliding bearings of the linear bearings to move controllably relative to the guide rails. The correction wheel 322 can also be replaced with an aluminum plate or other tool to calibrate the silicon wafer 50. When the size of the silicon wafer 50 changes, the diameter of the correction wheel 322 can be changed or the correction wheel mounting plate 321 can be mounted on the slider 3414 by being constrained in the waist hole 3211. The initial size of the correction gap along the second direction can be adjusted by adjusting the position of the correction wheel mounting plate 321 in the waist hole 3211, thereby allowing correction of silicon wafers 50 of different sizes.

[0066] Since the gears are made of steel, the above-mentioned transmission correction mechanism 10 is through the mutual engagement of the first transfer gear 213 and the second transfer gear 332, and the mutual engagement of the correction gears 3411 of the two correction modules, so that the above-mentioned meshing parts have a longer service life, better wear resistance, and higher correction accuracy than traditional synchronous belts, and the transmission conversion between the gears is also more conducive to achieving synchronization of transmission and correction.

[0067] See also Figure 1 、 Figure 2 、 Figure 4 、 Figure 5 and Figure 6 The transmission correction mechanism 10 provided in this application has the following operation process:

[0068] When the silicon wafer 50 is transported along the first direction in the silicon wafer production line to the position where the transport correction mechanism 10 just contacts the first synchronous belt 2211 , the correction gap formed by the two correction modules in the correction module 300 is at its largest size along the second direction.

[0069] At this time, the drive module 100 starts to operate, driving the driving shaft 211 in the transmission module 200 to rotate about its own axis through the second synchronous belt 400, and driving the synchronous wheel mounted on the driving shaft 211 and the first transfer gear 213 to rotate about their own axis. When the synchronous wheel rotates, it drives all the second synchronous wheels 2213 to rotate through the first synchronous belt 2211, so that the first synchronous belt 2211 transmits the silicon wafer 50 along the first direction.

[0070] At the same time, the rotation of the first transfer gear 213 drives the second transfer gear 332 engaged with it to rotate synchronously in the opposite direction, thereby driving the driven shaft 331 and a correction gear 3411 connected to the driven shaft 331 to rotate around its own axis. At the same time, the correction gear 3411 also drives another correction gear 3411 engaged with it to rotate synchronously in the opposite direction. The synchronous rotation of the two correction gears 3411 also drives the correction links 3412 of the two connecting rod assemblies 341 to pull the correction assemblies 320 connected to them closer to each other along the second direction, so that the correction gap formed by the correction wheels 322 of the two correction assemblies 320 is reduced in size along the second direction.

[0071] When the transmission module 200 transmits the silicon wafer 50 to the middle of the first synchronous belt 2211 along the first direction, the correction gap is minimized along the second direction at this time, and the correction wheel 322 can touch the opposite ends of the silicon wafer 50 along the second direction, thereby correcting the position of the silicon wafer 50.

[0072] Subsequently, the driving module 100 continues to operate, the active shaft 211 continues to rotate and drives the first synchronous wheel 2212 and the first transfer gear 213 to rotate, so that the first synchronous belt 2211 continues to transmit the silicon wafer 50 along the first direction, and the rotation of the first transfer gear 213 also drives the driven shaft 331 to rotate, thereby driving the two correction gears 3411 meshing with each other in the two connecting rod assemblies 341 to continue to rotate, so that the two correction connecting rods 3412 drive the two correction assemblies 320 respectively connected thereto to move away from each other along the second direction, and the size of the correction gap along the second direction increases and returns to the original size, and the silicon wafer 50 is also transmitted out of the transmission correction mechanism 10 along the first direction.

[0073] This cycle repeats itself, and the silicon wafer 50 subsequently transmitted to the transmission correction mechanism 10 continues to be transmitted forward along the first direction. The size of the correction gap along the second direction is reduced again, and the silicon wafer 50 transmitted to the middle of the first synchronous belt 2211 is cyclically corrected, thereby achieving the purpose of a driving module 100 simultaneously driving the transmission module 200 and the correction module 300 to complete the two actions of transmission and correction at one time.

[0074] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0075] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. A transmission correction mechanism, characterized in that: include: Driver module; A transmission module, comprising a driving shaft assembly and a first linear motion conversion mechanism connected to the driving shaft assembly, wherein the driving shaft assembly is drivingly connected to the driving module, and the driving shaft assembly can rotate around its own axis under the drive of the driving module, and drive the first linear motion conversion mechanism to transmit the workpiece along a first direction; and a correction module, wherein the correction module includes a driven shaft assembly, a second linear motion conversion mechanism and two correction assemblies, the driven shaft assembly is transmission-connected to the active shaft assembly so as to be transmission-connected to the driving module through the transmission module, the two correction assemblies are transmission-connected to the driven shaft assembly through the second linear motion conversion mechanism, the two correction assemblies are spaced apart along the second direction to form a correction gap, when the active shaft assembly rotates around its own axis, it can drive the driven shaft assembly to rotate synchronously around its own axis, and the two correction assemblies are driven to move away from or approach each other through the second linear motion conversion mechanism, so that the size of the correction gap along the second direction can be reduced or increased under the drive of the driving module; When the size of the correction gap along the second direction decreases, the correction module can touch the opposite ends of the workpiece to correct the position of the workpiece placed on the transmission module; The first direction is perpendicular to the second direction.

2. The transmission correction mechanism according to claim 1, characterized in that: The first linear motion conversion mechanism includes a transmission component, which is connected to the active shaft component. The active shaft component can rotate around its own axis under the drive of the driving module to drive the transmission component to transmit the workpiece along the first direction.

3. The transmission correction mechanism according to claim 2, characterized in that: The transmission component includes: A first synchronous wheel is fixedly mounted on one end of the driving shaft assembly; a plurality of second synchronous wheels arranged at intervals, wherein the first synchronous wheels are arranged between two adjacent second synchronous wheels; and A first synchronous belt is wound around the outer circumference of the first synchronous wheel and the plurality of second synchronous wheels; The first synchronous wheel can rotate around its own axis under the rotation of the driving shaft assembly, and drive all the second synchronous wheels to rotate synchronously around their own axis through the first synchronous belt.

4. The transmission correction mechanism according to claim 1, characterized in that: The second linear motion conversion mechanism includes two connecting rod assemblies, which are connected to each other and arranged symmetrically along the second direction. One end of the driven shaft assembly is connected to the driving shaft assembly, and the other end of the driven shaft assembly is connected to one of the connecting rod assemblies.

5. The transmission correction mechanism according to claim 4, characterized in that: Each of the connecting rod assemblies comprises: a correction gear, meshing with the correction gear of the other connecting rod assembly; a correction link, one end of which is rotatably and eccentrically mounted on the correction gear; and a slider rotatably mounted on the other end of the correction link; The correction gear of one of the connecting rod assemblies is connected to the driven shaft assembly and can rotate around its own axis under the rotation of the driven shaft assembly, so as to drive the correction gear of the other connecting rod assembly to rotate synchronously around its own axis in the opposite direction; when the correction gear rotates around its own axis, it can pull one of the sliders to perform reciprocating linear motion along the second direction through one of the correction connecting rods.

6. The transmission correction mechanism according to claim 5, characterized in that: The correction assembly includes a correction wheel mounting plate and a correction wheel. The correction wheel mounting plate is mounted on the slider, and the correction wheel is mounted on the correction wheel mounting plate.

7. The transmission correction mechanism according to claim 6, characterized in that: The correction module also includes a sliding platform, and each of the connecting rod assemblies also includes a slide rail. The slide rail extends along the second direction and is fixedly installed on the sliding platform. The slider is limitedly installed on the slide rail and can slide back and forth along the slide rail. The driven shaft assembly is passed through the sliding platform.

8. The transmission correction mechanism according to claim 1, characterized in that: The driving shaft assembly includes a driving shaft and a first transfer gear, wherein the first transfer gear is sleeved on the driving shaft; the driven shaft assembly includes a driven shaft and a second transfer gear, wherein the second transfer gear is sleeved on the driven shaft; The first transfer gear and the second transfer gear are meshed with each other, and an axis of the first transfer gear and an axis of the second transfer gear are perpendicular to each other.

9. The transmission correction mechanism according to claim 1, characterized in that: The driving module is connected to the transmission module via a second synchronous belt transmission, one end of the second synchronous belt is sleeved on one end of the driving module, and the other end of the second synchronous belt is sleeved on one end of the driving shaft assembly.

10. A silicon wafer production line, characterized in that: The silicon wafer production line includes the transmission correction mechanism according to any one of claims 1 to 9.

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