Display Substrate, Method for Manufacturing the Same, and Three-Dimensional Display Device

Abstract

The present disclosure provides a display substrate, a manufacturing method thereof, and a three-dimensional display device, including a substrate substrate having a plurality of sub-pixels; at least two first electrodes are provided in each sub-pixel, and a light-emitting functional layer is located on a side of the first electrode facing away from the substrate substrate; the first electrode includes: a transparent conductive portion and a reflective conductive portion which are stacked; in at least one sub-pixel, a reflective structure is correspondingly provided for two adjacent first electrodes, the reflective structure includes a first portion and a second portion, a positive projection of the first portion on the substrate substrate overlaps with a positive projection of one of the first electrodes, and a positive projection of the second portion on the substrate substrate overlaps with a positive projection of the other first electrode.

Description

[0001] Cross - Reference to Related Applications

[0002] This disclosure claims the priority of the PCT patent application titled "An Organic Light-Emitting Display Substrate and a Display Device" with the application number PCT / CN2020 / 138592, which was filed with the Chinese Patent Office on December 23, 2020. Part or all of its content is incorporated herein by reference. Technical Field

[0003] This disclosure relates to the field of display technologies, and particularly to a display substrate, a manufacturing method thereof, and a three-dimensional display device. Background Art

[0004] The naked-eye three-dimensional (3D for short) display technology is a display technology that enables people to view vivid stereoscopic images without wearing 3D glasses. It liberates the wearer from the bondage of traditional 3D glasses and fundamentally solves the problem of dizziness caused by wearing 3D glasses for a long time, greatly improving the viewing comfort of people.

[0005] According to different display principles, the naked-eye 3D technology can be divided into the grating-type naked-eye 3D technology and the lenticular lens 3D display technology. A left view and a right view are formed through a parallax barrier similar to a grating or a lenticular lens. Since the left view and the right view seen by the two eyes of the viewer are two images with parallax, after the left view and the right view with parallax are superimposed and regenerated in the viewer's brain, the viewer can view a 3D display image without wearing glasses. Summary of the Invention

[0006] On the one hand, an embodiment of this disclosure provides a display substrate, including:

[0007] A substrate, where the substrate includes a plurality of sub-pixels; at least two first electrodes are provided in each of the sub-pixels, and a light-emitting functional layer is located on a side of the first electrode away from the substrate; the first electrode includes a transparent conductive part and a reflective conductive part that are stacked;

[0008] An insulating layer, located between the layer where the first electrode is located and the substrate;

[0009] A plurality of reflective structures, located between the insulating layer and the substrate;

[0010] In at least one of the sub-pixels, a reflective structure is arranged corresponding to two adjacent first electrodes, and the reflective structure includes a first part and a second part, the orthographic projection of the first part on the substrate overlaps with the orthographic projection of one of the first electrodes on the substrate, and the orthographic projection of the second part on the substrate overlaps with the orthographic projection of the other first electrode on the substrate.

[0011] Optionally, in the above-mentioned display substrate provided in the embodiment of the present disclosure, the reflective structure also includes a third part, and the distance between the third part and the light-emitting functional layer in the direction perpendicular to the base substrate is smaller than the distance between the first part and the light-emitting functional layer in the direction perpendicular to the base substrate, and smaller than the distance between the second part and the light-emitting functional layer in the direction perpendicular to the base substrate.

[0012] Optionally, in the above-mentioned display substrate provided in an embodiment of the present disclosure, the third part is located between the first part and the second part.

[0013] Optionally, in the above-mentioned display substrate provided in an embodiment of the present disclosure, an orthographic projection of the reflective conductive portion on the base substrate is located within an orthographic projection of the transparent conductive portion on the base substrate.

[0014] Optionally, in the above-mentioned display substrate provided by the embodiment of the present disclosure, the transparent conductive portion includes: a first transparent conductive portion located on the side of the reflective conductive portion facing the base substrate, and a second transparent conductive portion located on the side of the reflective conductive portion facing away from the base substrate; wherein,

[0015] The portion of the second transparent conductive portion extending beyond the reflective conductive portion includes: a slope surface extending obliquely toward the base substrate, and an edge flat portion contacting the slope surface.

[0016] Optionally, in the above-mentioned display substrate provided in the embodiment of the present disclosure, it further includes: a plurality of transparent protection electrodes located on a side of the layer where the plurality of first electrodes are located away from the base substrate;

[0017] The plurality of transparent protection electrodes are arranged corresponding to the plurality of first electrodes, and the orthographic projections of the transparent protection electrodes on the base substrate at least cover the orthographic projections of the edge flat portions of the corresponding first electrodes on the base substrate.

[0018] Optionally, in the above display substrate provided by an embodiment of the present disclosure, within the sub-pixel, the at least two first electrodes are arranged along the first direction and extend along the second direction;

[0019] The width of the transparent protective electrode in the first direction is greater than or equal to the width of the corresponding first electrode in the first direction, and the length of the transparent protective electrode in the second direction is greater than or equal to the length of the corresponding first electrode in the second direction.

[0020] Optionally, in the above-mentioned display substrate provided by the embodiments of the present disclosure, it further includes: a planarization layer located between the substrate and the layer where the plurality of reflection structures are located; the reflection structures are disposed in the grooves of the planarization layer.

[0021] Optionally, in the above-mentioned display substrate provided by the embodiments of the present disclosure, it further includes: a plurality of pixel driving circuits located between the substrate and the planarization layer;

[0022] The pixel driving circuit is electrically connected to the corresponding first electrode through a via hole penetrating through the inorganic insulating layer and the planarization layer.

[0023] Optionally, in the above-mentioned display substrate provided by the embodiments of the present disclosure, the via holes are arranged in sequence along the first direction at the same side edge corresponding to the first electrode.

[0024] Optionally, in the above-mentioned display substrate provided by the embodiments of the present disclosure, in the direction perpendicular to the substrate, the thickness of the reflective conductive portion is greater than or equal to and less than or equal to

[0025] Optionally, in the above-mentioned display substrate provided by the embodiments of the present disclosure, on one side adjacent to the reflective conductive portion, the included angle between the slope surface and the substrate is greater than or equal to 30° and less than or equal to 60°.

[0026] Optionally, in the above-mentioned display substrate provided by the embodiments of the present disclosure, within each sub-pixel, the maximum distance between the first portion and the second portion is greater than 2 μm and less than or equal to 5 μm, the minimum distance between the first portion and the second portion is greater than 1 μm and less than or equal to 2 μm, and the gap between the transparent protective electrodes is greater than 0 and less than or equal to 2 μm.

[0027] Optionally, in the above-mentioned display substrate provided by the embodiments of the present disclosure, the material of the insulating layer is an inorganic insulating layer.

[0028] On the other hand, the embodiments of the present disclosure also provide a three-dimensional display device, including the above-mentioned display substrate and a light splitting component located on the display side of the display substrate.

[0029] On the other hand, the embodiments of the present disclosure also provide a manufacturing method of the above-mentioned display substrate, including:

[0030] Provide a substrate;

[0031] Form a plurality of reflective structures on the substrate;

[0032] Form an insulating layer on the layer where the plurality of reflective structures are located;

[0033] Form a plurality of sub-pixels on the insulating layer, wherein each sub-pixel has at least two first electrodes and a light-emitting functional layer on a side of the first electrode facing away from the substrate; the first electrode includes a transparent conductive portion and a reflective conductive portion stacked;

[0034] In at least one of the sub-pixels, one of the reflective structures is correspondingly arranged for two adjacent first electrodes, the reflective structure includes a first part and a second part, a positive projection of the first part on the substrate overlaps with a positive projection of one of the first electrodes on the substrate, and a positive projection of the second part on the substrate overlaps with a positive projection of the other first electrode on the substrate.

[0035] Optionally, in the above manufacturing method provided by the embodiments of the present disclosure, forming a plurality of first electrodes specifically includes:

[0036] Form a first transparent conductive material layer, a reflective conductive material layer and a second transparent conductive material layer on the insulating layer in sequence;

[0037] Etch the first transparent conductive material layer, the reflective conductive material layer and the second transparent conductive material layer by the same etching process to form a plurality of first electrodes including a first transparent conductive portion, a reflective conductive portion and a second transparent conductive portion; wherein, a portion of the second transparent conductive portion exceeding the reflective conductive portion includes a slope extending obliquely towards the substrate and an edge flat portion in contact with the slope and the first transparent conductive portion; in the same sub-pixel, the first electrodes are arranged along a first direction and extend along a second direction.

[0038] Optionally, in the above manufacturing method provided by the embodiments of the present disclosure, after forming a plurality of first electrodes and before forming the light-emitting functional layer, it further includes:

[0039] Form a plurality of transparent protection electrodes on a side of the layer where the first electrodes are located facing away from the substrate; wherein, the plurality of transparent protection electrodes are correspondingly arranged with the plurality of first electrodes, a width of the transparent protection electrode in the first direction is greater than a width of the corresponding first electrode in the first direction, and a length of the transparent protection electrode in the second direction is greater than a length of the corresponding first electrode in the second direction. Description of the Drawings

[0040] Figure 1 Schematic diagram of a single-layer anode structure in the related art;

[0041] Figure 2 For Figure 1 Schematic diagram of the moiré effect of the single-layer anode shown;

[0042] Figure 3 Schematic diagram of a structure of a display substrate provided by an embodiment of the present disclosure;

[0043] Figure 4 Another schematic diagram of a structure of a display substrate provided by an embodiment of the present disclosure;

[0044] Figure 5 Another schematic diagram of a structure of a display substrate provided by an embodiment of the present disclosure;

[0045] Figure 6 Another schematic diagram of a structure of a display substrate provided by an embodiment of the present disclosure;

[0046] Figure 7 Flowchart of a manufacturing method of a display substrate provided by an embodiment of the present disclosure;

[0047] Figures 8 to 22 Schematic diagrams of the structure of a display substrate provided by an embodiment of the present disclosure during the manufacturing process, respectively;

[0048] Figure 23 Schematic diagram of the structure of a display device provided by an embodiment of the present disclosure. Detailed implementation manners

[0049] To make the objectives, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present disclosure. It should be noted that the sizes and shapes of the respective figures in the drawings do not reflect the actual scale, and the purpose is only to schematically illustrate the content of the present disclosure. Also, the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. Obviously, the described embodiments are a part of the embodiments of the present disclosure, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present disclosure without creative efforts fall within the scope of protection of the present disclosure.

[0050] Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meanings as understood by those of ordinary skill in the art to which this disclosure pertains. The terms "first", "second" and similar words used in the specification and claims of this disclosure do not denote any order, quantity or importance, but are only used to distinguish different components. Words such as "comprising" or "including" mean that the elements or items appearing before the word cover the elements or items listed after the word and their equivalents, without excluding other elements or items. Words such as "inside", "outside", "above", "below", etc. are only used to indicate relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0051] In the existing large and medium-sized naked-eye 3D technology, the resolution is low and it cannot achieve high-definition, high-brightness and high-contrast displays. To improve the 3D viewing effect, the number of viewpoints needs to be increased. The more the number of independently controlled sub-pixels, the higher the 3D display resolution and the better the display effect.

[0052] In some embodiments, as Figure 1 shown, on the basis of sub-pixels, the anodes of the sub-pixels can be further finely patterned into multiple independent sub-anodes, and the full gray-scale display and control of the sub-anodes can be realized by connecting independent pixel driving circuits and compensation circuits respectively, thereby improving the 3D display resolution, increasing the number of viewing angles, making the jumps at different viewing angles smoother, and enhancing the viewing experience of naked-eye 3D. However, the present disclosure finds that after the anodes of the sub-pixels are segmented, there is no parallel electric field generated by the metal electrodes at the gaps between adjacent sub-anodes to drive the carriers to move and couple to emit light (that is, no light is emitted at the space), and 3D display moiré defects will occur. The larger the space, the wider the non-light-emitting area and the more serious the 3D display moiré, as Figure 2 shown.

[0053] In view of the above problems existing in the related art, the embodiments of the present disclosure provide a display substrate, as Figures 3 to 5 shown, which may include:

[0054] Substrate 101, the substrate 101 includes a plurality of sub-pixels P; the plurality of sub-pixels P may include, but are not limited to, red sub-pixels, green sub-pixels, blue sub-pixels, white sub-pixels; each sub-pixel P has at least two first electrodes 102 and a light-emitting functional layer 103 located on the side of the first electrode 102 facing away from the substrate 101; the first electrode 102 includes a reflective conductive part 1021 and a transparent conductive part 1022 which are stacked; in some embodiments, a pixel definition layer (PDL) including a plurality of openings is provided on the substrate 101, each opening corresponds to a sub-pixel P, and the first electrode 102 exposed by one opening belongs to one sub-pixel P; each opening may expose all of each first electrode 102 or only a part of each first electrode 102.

[0055] Insulating layer 104, located between the layer where the plurality of first electrodes 102 are located and the substrate 101;

[0056] A plurality of reflective structures 105, located between the insulating layer 104 and the substrate 101;

[0057] In at least one sub-pixel P, one reflective structure 105 is correspondingly arranged for two adjacent first electrodes 102. The reflective structure 105 includes a first part 1051 and a second part 1052. The orthographic projection of the first part 1051 on the substrate 101 overlaps with the orthographic projection of one of the first electrodes 102 on the substrate 101, and the orthographic projection of the second part 1052 on the substrate 101 overlaps with the orthographic projection of the other first electrode 102 on the substrate 101.

[0058] In the above display substrate provided by the embodiments of the present disclosure, by providing the reflective structure 105 and using the insulating layer 104 to achieve electrical insulation between the first electrode 102 and the reflective structure 105, and the optimal microcavity (formed by the reflective structure 105 and the second electrode 106) gain of the light-emitting device at the gap can be achieved by adjusting the thickness of the insulating layer 104, so as to improve the light-emitting brightness at the gap and solve the moiré defect caused by the too large etching gap.

[0059] In some embodiments, the thickness of the insulating layer 104 has a negative correlation with the reflectivity of the reflective structure 105. In other words, under the condition of achieving the same microcavity gain effect, the greater the reflectivity of the reflective structure 105, the smaller the thickness of the insulating layer 104. In order to realize the thin and light design of the product, metals such as aluminum and silver with high reflectivity (for example, the reflectivity is greater than 90%) can be used to make the reflective structure 105. In addition, the material of the insulating layer 104 can be inorganic insulating materials such as silicon oxide, silicon nitride, silicon oxynitride, and aluminum oxide.

[0060] In some embodiments, the first electrode 102 may be an anode and the second electrode 106 may be a cathode; alternatively, the first electrode 102 may be a cathode and the second electrode 106 may be an anode. In some embodiments, the plurality of sub-pixels P include multiple light-emitting colors. At this time, the light-emitting functional layer 103 within each sub-pixel P may be an integral structure; in some embodiments, all the sub-pixels P have the same light-emitting color (such as white), then the light-emitting functional layer 103 within all the sub-pixels P may be an integral structure. The light-emitting functional layer 103 may include a hole injection layer, a hole transport layer, an electron blocking layer, a light-emitting material layer, a hole blocking layer, an electron transport layer, an electron injection layer, etc.

[0061] In addition, in the present disclosure, the reflective conductive portion 1021 refers to a conductive component having a reflective function, such as a metal or alloy material with a relatively high reflectivity, such as aluminum, silver, etc.; the transparent conductive portion 1022 refers to a conductive component having a transmissive function, such as a metal oxide such as indium tin oxide or a metal material that can transmit light after being thinned.

[0062] Optionally, in the above-mentioned display substrate provided by the embodiments of the present disclosure, as Figures 3 to 5 shown, the reflective structure 105 may further include a third portion 1053. The distance between the third portion 1053 and the light-emitting functional layer 103 in the direction perpendicular to the substrate 101 is less than the distance between the first portion 1051 and the light-emitting functional layer 103 in the direction perpendicular to the substrate 101, and less than the distance between the second portion 1052 and the light-emitting functional layer 103 in the direction perpendicular to the substrate 101. The third portion 1053 may be located between the first portion 1051 and the second portion 1052. Such a setting can make the gap between the orthographic projection of the reflective structure 105 on the substrate 101 and the reflective conductive portion 1021 approximately coincide, thereby minimizing the coupling capacitance generated by the overlap between the reflective structure 105 and the reflective conductive portion 1021 as much as possible.

[0063] It should be noted that in actual processes, due to process conditions or other factors, the above-mentioned "approximately coincide" may be completely coincident or there may be some deviations. Therefore, as long as the relationship of "approximately coincide" between the above features meets the error tolerance, it belongs to the protection scope of the present disclosure.

[0064] In some embodiments, the first portion 1051, the second portion 1052, and the third portion 1053 may be an integral structure provided on the same layer, or may be three independent portions provided on different layers. Preferably, in order to improve the flatness of the subsequent first electrode 102, the first portion 1051, the second portion 1052, and the third portion 1053 are provided on the same layer as an integral structure.

[0065] It should be noted that in the present disclosure, "same layer" refers to a layer structure formed by using the same film-forming process to form a film layer for making a specific pattern, and then using the same mask to form a layer structure through a single patterning process. That is, one patterning process corresponds to a mask (also called a photomask). Depending on the specific pattern, one patterning process may include multiple exposure, development or etching processes, and the specific patterns in the formed layer structure may be continuous or discontinuous, and these specific patterns may be at the same height or have the same thickness, or at different heights or have different thicknesses.

[0066] Optionally, in the above-mentioned display substrate provided in the embodiment of the present disclosure, if Figure 3 and Figure 4 As shown, the orthographic projection of the reflective conductive portion 1021 on the base substrate 101 is located within the orthographic projection of the transparent conductive portion 1022 on the base substrate 101 , so that the reflective conductive portion 1021 is protected from corrosion by water, oxygen, etc. by the transparent conductive portion 1022 .

[0067] Optionally, in the above-mentioned display substrate provided in the embodiment of the present disclosure, if Figure 3 and Figure 4 As shown, the transparent conductive portion 1022 may include: a first transparent conductive portion 1022a located on the side of the reflective conductive portion 1021 facing the base substrate 101, and a second transparent conductive portion 1022b located on the side of the reflective conductive portion 1021 facing away from the base substrate 101; wherein,

[0068] The portion of the second transparent conductive portion 1022 b extending beyond the reflective conductive portion 1021 includes a slope surface extending obliquely toward the base substrate 101 , and an edge flat portion in contact with the slope surface.

[0069] like Figure 3 and Figure 4 As shown, when forming the light-emitting functional layer 103 of the light-emitting device, since the slope of the first transparent conductive part 1021 is relatively gentle and has no vertical discontinuity, the light-emitting functional layer 103 will not be broken at the gap. In the light-emitting device, the holes of the first electrode 102 (e.g., anode) and the electrons of the second electrode 106 (e.g., cathode) are transmitted to the light-emitting layer for composite light emission. Since the carrier concentration in the light-emitting layer corresponding to the first electrode 102 is higher than the carrier concentration at the gap, the carriers will diffuse laterally from high concentration to low concentration, thereby utilizing the intrinsic crosstalk of the light-emitting device to increase the light-emitting brightness at the gap, thereby achieving continuous light emission in the same sub-pixel P, further reducing the moiré phenomenon.

[0070] In some embodiments, the material of the first transparent conductive part 1022a and the second transparent conductive part 1022b may be indium tin oxide (ITO), and the material of the reflective conductive part 1021 may be silver (Ag), that is, the first electrode 102 has an ITO / Ag / ITO laminated structure. Compared with laminated structures such as Al / ITO and AlNd / ITO, the anode reflectivity of the ITO / Ag / ITO laminated structure is higher, and the corresponding light-emitting device has higher current efficiency and longer life.

[0071] In some embodiments, the slope of the second transparent conductive portion 1022b may contact the first transparent conductive portion 1022a, and the flat edge portion of the second transparent conductive portion 1022b may overlap with the first transparent conductive portion 1022a. In other embodiments, the first transparent conductive portion 1022a is located within the orthographic projection of the second transparent conductive portion 1022b, and the flat edge portion of the second transparent conductive portion 1022b contacts the insulating layer 104.

[0072] In this disclosure, Figure 6 As shown, a pixel defining layer 107 is provided between adjacent sub-pixels P, and in order to achieve continuous light emission, the pixel defining layer 107 cannot be provided at the gap between adjacent first electrodes 102. Since the first transparent conductive portion 1022a and the second transparent conductive portion 1022b are two independent film layers, there is a certain gap between them. In the subsequent process of manufacturing the pixel defining layer 107, the curing process (230°C / 1hour) easily causes water and oxygen to enter the first electrode 102 through the gap, corroding the edge of the silver reflective conductive portion 1021, generating edge burrs, and causing serious leakage of the light-emitting device.

[0073] Based on this, in the above-mentioned display substrate provided in the embodiment of the present disclosure, if Figure 3 and Figure 4 As shown, it may also include: a plurality of transparent protection electrodes 108 located on a side of the layer where the plurality of first electrodes 102 are located away from the base substrate 101;

[0074] The plurality of transparent protection electrodes 108 are arranged corresponding to the plurality of first electrodes 102 , and the orthographic projection of the transparent protection electrode 108 on the base substrate 101 at least covers the orthographic projection of the edge flat portion of the second transparent conductive portion 1022 b of the corresponding first electrode 101 on the base substrate 101 .

[0075] The edge flat part of the first transparent conductive part 1021a overlaps with the edge of the second transparent conductive part 1022b. By providing the transparent protective electrode 108 covering the edge flat part, it is possible to prevent water, oxygen, etc. from entering the inside of the first electrode 102 through the gap at the edges of the first transparent conductive part 1021a and the second transparent conductive part 1022b. Thus, during the subsequent process of fabricating the pixel defining layer 107, the edge of the reflective conductive part 1021 can be ensured not to be corroded, improving the stability of the light-emitting device. In some embodiments, the material of the transparent protective electrode 108 can be indium tin oxide or the like.

[0076] It should be noted that when the transparent protective electrode 108 is conductive and directly wraps the first electrode 102, in order to avoid crosstalk of the driving signals applied to different first electrodes 102, the transparent protective electrode 108 can be provided to wrap the first electrodes 102 one by one; when the transparent protective electrode 108 is insulating, or there is an insulating layer between the transparent protective electrode 108 and the first electrode 102, one transparent protective electrode 108 can be provided to cover multiple first electrodes 102.

[0077] Optionally, in the above display substrate provided by the embodiments of the present disclosure, as Figure 5 shown, within the sub-pixel P, at least two first electrodes 102 are arranged along the first direction X and extend along the second direction Y; the width W1 of the transparent protective electrode 108 in the first direction X is greater than or equal to the width W2 of the corresponding first electrode 102 in the first direction X, and the length L1 of the transparent protective electrode 108 in the second direction Y is greater than or equal to the length L2 of the corresponding first electrode 102 in the second direction Y, so as to better protect the first electrode 102 and at the same time facilitate the film layer continuity of the subsequent light-emitting functional layer 103.

[0078] Specifically, in the present disclosure, the width W2 of the first electrode 102 in the first direction X is the maximum width value among the first transparent conductive part 1021a, the second transparent conductive part 1022b, and the reflective conductive part 1021. For example, in the first direction X, if the width of the first transparent conductive part 1021a is greater than the width of the second transparent conductive part 1022b and greater than the width of the reflective conductive part 1021, then the width W2 of the first electrode 102 in the first direction X refers to the width of the first transparent conductive part 1021a. Similarly, the length L2 of the first electrode 102 in the second direction Y is the maximum length value among the first transparent conductive part 1021a, the second transparent conductive part 1022b, and the reflective conductive part 1021.

[0079] Optionally, in the above display substrate provided by the embodiments of the present disclosure, as Figure 4As shown, it may further include: a flat layer 109 located between the substrate 101 and the layer where the multiple reflection structures 105 are located; the flat layer 109 has multiple grooves, and the reflection structures 105 are arranged in the grooves of the flat layer 109 to improve the flatness of the edge of the first electrode 102.

[0080] In some embodiments, in order to effectively improve the flatness of the edge of the first electrode 102 and solve the problem of abnormal light emission direction caused by the uneven surface of the first electrode 102, such as Figure 4 As shown, the distance between the upper surface of the groove of the flat layer 109 and the substrate 101 can be set to be equal to the distance between the upper surface of the reflection structure 105 and the substrate 101, that is, the reflection structure 105 can be just embedded in the groove of the flat layer 109.

[0081] Optionally, in the above display substrate provided by the embodiments of the present disclosure, such as Figure 3 and Figure 4 As shown, it may further include: multiple pixel driving circuits 110 located between the substrate 101 and the flat layer 109; the pixel driving circuits 110 (specifically, the source / drain electrodes 111 of the driving transistors in the pixel driving circuits 110) are correspondingly electrically connected to the first electrode 102 through vias H penetrating through the insulating layer 104 and the flat layer 109. In this way, the light-emitting devices corresponding to the first electrode 102 can be independently driven to emit light by the pixel driving circuits 110. In some embodiments, in order to improve the resolution of 3D display, each pixel driving circuit 110 can be set to be correspondingly electrically connected to a first electrode 102.

[0082] Optionally, in the above display substrate provided by the embodiments of the present disclosure, such as Figure 5 As shown, in order to simplify the manufacturing process, the vias H can be arranged in sequence along the first direction X at the same side edge of the corresponding first electrode 102.

[0083] Optionally, in the above display substrate provided by the embodiments of the present disclosure, the slope inclination of the second transparent conductive portion 1022b can be changed by adjusting the thickness of the reflective conductive portion 1021. In some embodiments, in the direction perpendicular to the substrate 101, the thickness of the reflective conductive portion 1021 can be greater than or equal to and less than or equal to

[0084] Optionally, in the above display substrate provided by the embodiments of the present disclosure, such as Figure 3 As shown, on one side adjacent to the reflective conductive portion 1021, the angle λ between the slope and the substrate 101 can be greater than or equal to 30° and less than or equal to 60°. With such a setting, by better utilizing the inclined slope, the light emission direction of the light-emitting device can be adjusted, so as to achieve "false" continuous light emission based on the optical crosstalk between adjacent light-emitting devices.

[0085] Optionally, in the above display substrate provided by the embodiments of the present disclosure, as Figures 3 to 5 shown, within each sub-pixel P, the maximum distance d1 (i.e., the gap between the reflective conductive parts 1021) between the first part 1051 and the second part 1052 is greater than 2 μm and less than or equal to 5 μm, the minimum distance d2 (i.e., the gap between the transparent conductive parts 1022) between the first part 1051 and the second part 1052 is greater than 1 μm and less than or equal to 2 μm, and the gap between the transparent protection electrodes 108 is greater than 0 and less than or equal to 2 μm.

[0086] In some embodiments, as Figure 5 shown, a row of first electrodes 102 is provided within a sub-pixel P. In this case, the above d1, d2, and d3 specifically refer to the dimensions in the first direction X; in some embodiments, multiple rows and multiple columns of first electrodes 102 may also be provided within a sub-pixel P. In this case, the above d1, d2, and d3 specifically refer to the dimensions in the first direction X and the second direction Y.

[0087] Optionally, in the above display substrate provided by the embodiments of the present disclosure, as Figure 3 and Figure 4 shown, it may further include a packaging layer 112, etc. In some embodiments, the packaging layer 112 may include a first inorganic packaging layer, an organic packaging layer, and a second inorganic packaging layer that are stacked. Other essential components of the display substrate are understood to be possessed by those of ordinary skill in the art and will not be elaborated herein, nor should they be considered as a limitation to the present disclosure.

[0088] Based on the same inventive concept, the embodiments of the present disclosure also provide a manufacturing method for the above display substrate. Since the principle of solving problems by this manufacturing method is similar to that of the above display substrate, therefore, the implementation of this manufacturing method provided by the embodiments of the present invention can refer to the implementation of the above display substrate provided by the embodiments of the present invention, and the repeated parts will not be elaborated.

[0089] Specifically, a manufacturing method for the above display substrate provided by the embodiments of the present disclosure, as Figure 7 shown, may include the following steps:

[0090] S701. Provide a substrate;

[0091] S702. Form a plurality of reflective structures on the substrate;

[0092] S703. Form an insulating layer on the layer where the plurality of reflective structures are located;

[0093] S704. Form a plurality of sub-pixels on the insulating layer. Each sub-pixel has at least two first electrodes and a light-emitting functional layer on the side of the first electrode facing away from the substrate. The first electrode includes a transparent conductive part and a reflective conductive part arranged in layers.

[0094] In at least one sub-pixel, a reflection structure is correspondingly arranged for two adjacent first electrodes. The reflection structure includes a first part and a second part. The orthographic projection of the first part on the substrate overlaps with the orthographic projection of one of the first electrodes on the substrate, and the orthographic projection of the second part on the substrate overlaps with the orthographic projection of the other first electrode on the substrate.

[0095] To better understand the technical solution of the manufacturing method of the present disclosure, a specific embodiment will be described in detail below.

[0096] The first step is to sequentially form a plurality of pixel driving circuits 110 and a planarization layer 109 on the substrate 101. Among them, the driving transistor in the pixel driving circuit 110 has source / drain electrodes 111, and the planarization layer 109 has a plurality of grooves C and vias H, as Figure 8 and Figure 9 shown.

[0097] The second step is to correspondingly form reflection structures 105 in the grooves C of the planarization layer 109, as Figure 10 and Figure 11 shown.

[0098] The third step is to form an insulating layer 104 on the side of the reflection structure 105 facing away from the substrate 101, and pattern to form vias H penetrating the insulating layer 104 and the planarization layer 109, as Figure 12 and Figure 13 shown.

[0099] The fourth step is to form a first transparent conductive material layer 1022a', a reflective conductive material layer 1021', and a second transparent conductive material 1022b' on the insulating layer 104, as Figure 14 shown.

[0100] The fifth step is to form a patterned photoresist layer PR on the second transparent conductive material 1022b'. The orthographic projection of the photoresist layer PR on the substrate 101 overlaps with the gap of the reflection structure 105 and the edge of the orthographic projection of the reflection structure 105, as Figure 15 shown.

[0101] The sixth step is to etch the second transparent conductive material layer 1022b' with the photoresist layer PR as a mask to form a plurality of second transparent conductive parts 1022b, as Figure 16 shown; continue to etch the reflective conductive material layer 1021' to form a plurality of reflective conductive parts 1021, asFigure 17 As shown; continue to etch the first transparent conductive material layer 1022a to form a plurality of first transparent electrical parts 1022a, such as Figure 18 shown.

[0102] In the seventh step, strip the photoresist PR, and thus the preparation of the first electrode 102 is completed. It should be understood that, since the part of the second transparent conductive part 1022b that extends beyond the reflective conductive part 1021 has no support from the reflective conductive part 1021, ultimately the part of the second transparent conductive part 1022b that extends beyond the reflective conductive part 1021 forms a slope under the influence of gravity and overlaps on the first transparent conductive part 1022a, as Figure 19 and Figure 20 shown.

[0103] In the eighth step, a plurality of transparent protective electrodes 108 are formed on the layer where the first electrode 102 is located, such as Figure 21 shown.

[0104] In the ninth step, a light-emitting functional layer 103, a second electrode 106, and a packaging layer 112 are sequentially formed on the layer where the transparent protective electrode 108 is located, such as Figure 22 shown. In some embodiments, the light-emitting functional layer 103 can be prepared by evaporation or printing.

[0105] It should be noted that, in the above manufacturing method provided by the embodiments of the present invention, the lithography processes involved in forming each layer structure may not only include some or all of the process steps such as deposition, photoresist coating, mask plate masking, exposure, development, etching, and photoresist stripping, but may also include other process steps, which are specifically determined by the pattern required in the actual manufacturing process and are not limited herein. For example, a post-baking process may also be included after development and before etching.

[0106] Among them, the deposition process can be chemical vapor deposition, plasma-enhanced chemical vapor deposition, or physical vapor deposition, which is not limited herein; the mask plate used in the masking process can be a half-tone mask plate (Half Tone Mask), a single-slit diffraction mask plate (Single Slit Mask), or a gray-tone mask plate (Gray Tone Mask), which is not limited herein; the etching can be dry etching or wet etching, which is not limited herein.

[0107] Based on the same inventive concept, the embodiments of the present disclosure also provide a three-dimensional display device, such as Figure 23As shown, it includes the above-mentioned display substrate 001 and a light splitting component 002 located on the display side of the display substrate 001. Since the principle of solving problems of this 3D display device is similar to that of the above-mentioned display substrate, the implementation of this 3D display device provided in the embodiments of the present invention can refer to the implementation of the above-mentioned display substrate provided in the embodiments of the present invention, and the repeated parts will not be elaborated.

[0108] In some embodiments, as Figure 23 shown, the light splitting component 002 may include a glass substrate 201, a base material 202, a high refractive index resin layer 203, a low refractive index resin layer 204, and a protective film 205; the display substrate 001 may also have a color filter layer 113 (including but not limited to a red color filter R-CF, a green color filter G-CF, and a blue color filter B-CF), a black matrix 114, a protective cover plate 115, and a barrier rib 116. And in some small and medium-sized products, the light-emitting device to which the first electrode 102 belongs under the red color filter R-CF is a red light-emitting device, the light-emitting device to which the first electrode 102 belongs under the green color filter G-CF is a green light-emitting device, and the light-emitting device to which the first electrode 102 belongs under the blue color filter B-CF is a blue light-emitting device; in some large and medium-sized products, all the light-emitting devices to which the first electrode 102 belongs can be white light-emitting devices.

[0109] It should be noted that the high refractive index resin layer 203 is composed of a plurality of cylindrical lenses (Lens), and each cylindrical lens can split the light of the light-emitting device to which the first electrode 102 belongs covered by it; and although continuous light emission is achieved within a sub-pixel P, the brightness at the light-emitting device to which the first electrode 102 belongs is greater than the brightness at the gap of the first electrode 102. For the above reasons, the above solution provided by the present disclosure can improve the moiré defect and will not affect the 3D display effect.

[0110] Obviously, those skilled in the art can make various changes and modifications to the embodiments of the present invention without departing from the spirit and scope of the embodiments of the present invention. Thus, if these modifications and variations of the embodiments of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention also intends to include these changes and modifications.

Claims

1. A display substrate, wherein, Comprising: A substrate, the substrate comprising a plurality of sub-pixels; Each of the sub-pixels has at least two first electrodes and a light-emitting functional layer located on a side of the first electrodes facing away from the substrate; The first electrode comprises a transparent conductive portion and a reflective conductive portion which are stacked; An insulating layer located between the layer where the first electrode is located and the substrate; A plurality of reflective structures located between the insulating layer and the substrate; In at least one of the sub-pixels, one of the reflective structures is correspondingly arranged for two adjacent first electrodes. The reflective structure comprises a first portion and a second portion. A positive projection of the first portion on the substrate overlaps with a positive projection of one of the first electrodes on the substrate, and a positive projection of the second portion on the substrate overlaps with a positive projection of the other first electrode on the substrate; wherein, a positive projection of the reflective structure on the substrate does not overlap with a positive projection of the reflective conductive portion on the substrate.

2. The display substrate according to claim 1, wherein, The reflective structure further comprises a third portion, and a distance between the third portion and the light-emitting functional layer in a direction perpendicular to the substrate is less than a distance between the first portion and the light-emitting functional layer in the direction perpendicular to the substrate, and less than a distance between the second portion and the light-emitting functional layer in the direction perpendicular to the substrate.

3. The display substrate according to claim 2, wherein, The third portion is located between the first portion and the second portion.

4. The display substrate according to claim 1, wherein A positive projection of the reflective conductive portion on the substrate is located within a positive projection of the transparent conductive portion on the substrate.

5. The display substrate according to claim 4, wherein, The transparent conductive portion comprises a first transparent conductive portion located on a side of the reflective conductive portion facing the substrate and a second transparent conductive portion located on a side of the reflective conductive portion facing away from the substrate; wherein, A portion of the second transparent conductive portion that extends beyond the reflective conductive portion comprises a slope that extends obliquely towards the substrate and an edge flat portion that contacts the slope.

6. The display substrate according to claim 5, wherein, Further comprising: A plurality of transparent protective electrodes located on a side of the layer where the plurality of first electrodes are located and facing away from the substrate; The plurality of transparent protective electrodes are correspondingly arranged with the plurality of first electrodes, and a positive projection of the transparent protective electrode on the substrate at least covers a positive projection of the edge flat portion in the corresponding first electrode on the substrate.

7. The display substrate according to claim 6, wherein, In the sub-pixel, the at least two first electrodes are arranged along a first direction and extend along a second direction; A width of the transparent protective electrode in the first direction is greater than or equal to a width of the corresponding first electrode in the first direction, and a length of the transparent protective electrode in the second direction is greater than or equal to a length of the corresponding first electrode in the second direction.

8. The display substrate according to any one of claims 1-7, wherein, Further comprising: A flat layer located between the substrate and the layer where the plurality of reflective structures are located; The reflective structure is arranged in a groove of the flat layer.

9. The display substrate according to claim 8, wherein, Further comprising: A plurality of pixel driving circuits located between the substrate and the flat layer; The pixel driving circuit is electrically connected to the first electrode through a via hole that penetrates the insulating layer and the flat layer.

10. The display substrate according to claim 9, wherein, The vias are arranged in sequence along a first direction at the same side edge corresponding to the first electrode.

11. The display substrate according to claim 1, wherein, In a direction perpendicular to the substrate, the thickness of the reflective conductive portion is greater than or equal to and less than or equal to 12. The display substrate according to claim 5, wherein, On a side adjacent to the reflective conductive portion, the included angle between the slope surface and the substrate is greater than or equal to 30° and less than or equal to 60°.

13. The display substrate according to claim 6, wherein, Within each sub-pixel, the maximum distance between the first portion and the second portion is greater than 2 μm and less than or equal to 5 μm, the minimum distance between the first portion and the second portion is greater than 1 μm and less than or equal to 2 μm, and the gap between the transparent protection electrodes is greater than 0 and less than or equal to 2 μm.

14. The display substrate according to claim 1, wherein, The material of the insulating layer is an inorganic insulating layer.

15. A three-dimensional display device, wherein, It includes a display substrate as described in any one of claims 1-14, and a light splitting component located on the display side of the display substrate.

16. A method for manufacturing a display substrate according to any one of claims 1-14, wherein, It includes: Providing a substrate; Forming a plurality of reflective structures on the substrate; Forming an insulating layer on the layer where the plurality of reflective structures are located; Forming a plurality of sub-pixels on the insulating layer, wherein each sub-pixel has at least two first electrodes and a light-emitting functional layer located on a side of the first electrode facing away from the substrate; the first electrode includes: a transparent conductive portion and a reflective conductive portion stacked; In at least one sub-pixel, a reflective structure is correspondingly arranged for two adjacent first electrodes, the reflective structure includes a first portion and a second portion, the orthographic projection of the first portion on the substrate overlaps with the orthographic projection of one of the first electrodes on the substrate, and the orthographic projection of the second portion on the substrate overlaps with the orthographic projection of the other first electrode on the substrate; wherein, the orthographic projection of the reflective structure on the substrate does not overlap with the orthographic projection of the reflective conductive portion on the substrate.

17. The manufacturing method according to claim 16, wherein, Forming a plurality of first electrodes specifically includes: Sequentially forming a first transparent conductive material layer, a reflective conductive material layer, and a second transparent conductive material layer on the insulating layer; Etching the first transparent conductive material layer, the reflective conductive material layer, and the second transparent conductive material layer by the same etching process to form a plurality of first electrodes including a first transparent conductive portion, a reflective conductive portion, and a second transparent conductive portion; wherein, the portion of the second transparent conductive portion exceeding the reflective conductive portion includes: a slope surface extending obliquely towards the substrate and an edge flat portion in contact with the slope surface; within the same sub-pixel, the first electrodes are arranged along a first direction and extend along a second direction.

18. The manufacturing method according to claim 16, wherein, After forming a plurality of first electrodes and before forming the light-emitting functional layer, it further includes: Forming a plurality of transparent protection electrodes on a side of the layer where the first electrodes are located facing away from the substrate; wherein, the plurality of transparent protection electrodes are correspondingly arranged with the plurality of first electrodes, the width of the transparent protection electrode in the first direction is greater than the width of the corresponding first electrode in the first direction, and the length of the transparent protection electrode in the second direction is greater than the length of the corresponding first electrode in the second direction.

Images