Transport device

Abstract

In order to illustrate a transport device (1) of the type of a planar electric machine in an asymmetrical design which enables a more efficient operation, it is provided in accordance with the invention that the at least one transport section (2) is oriented relative to a movement path given in advance for the transport unit, which extends between a defined start point and a defined end point, in such a way that the movement path lies in the transport plane (3) in such a way that a first movement path proportion of the first main movement direction (H1) over the movement path length of the movement path is equal to or greater than a second main movement path proportion of the second main movement direction (H2) over the aforementioned movement path length.

Description

Technical Field

[0001] This invention relates to a transport device in the form of a planar motor, the transport device having at least one transport section constituting a transport plane and at least one transport unit capable of moving in at least two dimensions along two main motion directions in the transport plane, wherein a first coil group having a plurality of drive coils is provided on the transport section, the first coil group defining a first main motion direction; and a second coil group having a plurality of drive coils is provided, the second coil group defining a second main motion direction; and a plurality of drive magnets are provided on the transport unit, wherein the drive coils of the first coil group can be controlled by a control unit to electromagnetically interact with at least some of the drive magnets of the transport unit. The second coil group is used to move the transport unit in a first main motion direction, and its drive coils are controllable by a control unit to electromagnetically interact with at least a portion of the drive magnets of the transport unit to move the transport unit in a second main motion direction. The transport unit can move in the two main motion directions with different efficiencies and / or different maximum forces and / or different precisions, in such a way that the drive coils of the first and second coil groups have different coil characteristics affecting the magnetic field and / or the drive magnets of the transport unit interacting with the drive coils of the first coil group have different magnetic characteristics affecting the magnetic field compared to the drive magnets interacting with the drive coils of the second coil group. Furthermore, the present invention relates to a method for operating such a transport device. Background Technology

[0002] Planar motors are known in principle in the prior art. For example, US 9,202,719 B2 discloses the basic structure and working principle of such a planar motor. A planar motor basically has a stator that forms a transport plane, enabling one or more transport units to move at least two-dimensionally within this transport plane. The stator is typically composed of one or more transport sections. To enable the transport units to move within the transport plane, a driving force is generated acting on the transport units by the interaction of the stator's magnetic field (of the transport sections) with the transport unit's magnetic field. To cause the transport units to move in a specific direction, at least one magnetic field—the stator's magnetic field and / or the transport unit's magnetic field—must change over time to follow the movement of the transport units. However, in most cases, only one magnetic field, typically the stator's magnetic field, changes over time, while the corresponding other magnetic field (the transport unit's magnetic field) is usually constant, i.e., it does not change over time.

[0003] A time-varying magnetic field can be generated, for example, by a coil (electromagnet), which can be installed not only on the transport unit but also on the stator, especially the transport section. This coil is often also called a drive coil. A time-invariant, i.e., constant magnetic field is typically generated by permanent magnets. These components are usually called drive magnets. The drive magnet can also be installed not only on the transport unit but also on the transport section, depending on the implementation of the planar motor. For simpler control, the drive coil is typically installed on the transport section of the planar motor, while the drive magnet is installed on the transport unit.

[0004] The drive coil is typically controlled by a control unit to generate a kinetic magnetic field along the desired direction of motion. Drive magnets interacting with this kinetic magnetic field are arranged on the transport unit in at least two dimensions, enabling the generation of a drive and levitation force acting on the transport unit. This levitation force allows the transport unit to be held in a constant position, for example, by creating or adjusting and maintaining an air gap between the transport unit and the transport section. The additional driving force allows the transport unit to move along the desired direction of motion and generates a tilting force or tilting torque. To achieve the two-dimensional motion of the transport unit unique to planar motors, a two-dimensional interaction between the magnetic field of the transport section and the magnetic field of the transport unit is required, wherein one of the two types of magnetic fields must vary with time in at least two dimensions, or both types of magnetic fields must vary with time in at least one dimension (complementary to the corresponding other dimension). Here, the drive coil and drive magnets are advantageously arranged such that, in addition to one-dimensional motion along the axis defined by the transport plane, more complex two-dimensional motion of the transport unit within the transport plane is also possible.

[0005] Planar motors can be used, for example, as transport devices in production processes, enabling highly flexible transport processes with complex motion profiles. Such applications of planar motors as transport devices are shown, for example, in EP 3 172 156B1 and EP 3 172 134 B1.

[0006] The stator of such a planar motor can have drive coils arranged in different ways, and the arrangement of the drive magnets on the transport unit can also be quite different. For example, US 9,202,719 B2 discloses a planar motor with a multi-layered stator having multiple coil planes stacked vertically. The drive coils in adjacent coil planes are perpendicular to each other to form two main directions of motion in which the transport unit can move. Thus, on average, the coil planes have different distances from the drive magnets of the transport unit. This results in different efficiencies of the planar motor in the two main directions of motion. To balance this, it is proposed that a higher coil current be applied to the drive coils of the coil planes farther from the drive magnets of the transport unit than to the drive coils of the coil planes closer to the drive magnets of the transport unit to generate driving force.

[0007] In their paper "Design and measurements of the Double Layer Planar Motor," presented at the IEEE International Conference on Electrical Machines and Drives in Chicago from May 12-15, 2013, JMMRovers et al. disclosed a planar motor in which two coil planes are arranged in a layered configuration. To balance the varying efficiencies resulting from different spacing with the magnets of the transport unit, it was proposed to use drive coils of different heights for the two coil planes. Summary of the Invention

[0008] Therefore, the objective of this invention is to provide a transport device in the form of a planar motor and a method for operating the transport device in the form of a planar motor, wherein the device and method enable more efficient operation of the transport device.

[0009] According to the present invention, this task is solved by orienting the at least one transport segment relative to a pre-defined movement path extending between a defined starting point and a defined ending point for the transport unit in such a way that the proportion of the first movement path in the first main movement direction over the length of the movement path is equal to or greater than the proportion of the second movement path in the second main movement direction over the length of the movement path. This ensures that the movement of the transport unit primarily occurs in the first main movement direction, thereby achieving more efficient operation of the transport device.

[0010] Furthermore, the task is solved by a method for operating a transport device in the form of a planar motor. Attached Figure Description

[0011] The following is a reference to the appendix. Figure 1a To be continued Figure 10The invention will be described in more detail below, with the accompanying drawings illustrating advantageous embodiments of the invention in a illustrative, schematic, and non-limiting manner. The drawings are as follows:

[0012] Figure 1a The transport device, in the form of a planar motor, is shown in a top view.

[0013] Figure 1b and Figure 1c The transport device, which takes the form of a planar motor, is shown in side view.

[0014] Figures 2a to 2e This illustrates different possibilities for the arrangement of the drive coil on the transport section.

[0015] Figures 3a to 3f This demonstrates different possibilities for the 1D arrangement of the driving magnets on the transport unit.

[0016] Figures 4a to 4d This demonstrates different possibilities for the 2D arrangement of the driving magnets on the transport unit.

[0017] Figure 5 An exemplary construction of a transport device in the form of a planar motor is shown, which includes a process handling station.

[0018] Figure 6 Another exemplary construction of a transport device in the form of a planar motor is shown, which has multiple process processing stations.

[0019] Figure 7 This is a schematic diagram illustrating the interaction between the coil assembly of the transport section and the magnet assembly of the transport unit.

[0020] Figure 8 A graph showing the distribution coefficient of levitation force is provided.

[0021] Figure 9 The graph shows the copper loss curves for the two main directions of motion in the transport section.

[0022] Figure 10 A top view shows a transport device in the form of a planar motor in an alternative embodiment. Detailed Implementation

[0023] exist Figures 1a to 1c An exemplary construction scheme of a transport device 1 in the form of a planar motor is simplified here. Figure 1a The transport unit 1 is shown in a top view, while Figure 1b and Figure 1cThe transport device 1 is shown in a side view. The transport device 1 has at least one transport section 2 serving as a stator and at least one transport unit TE, the transport section forming a transport plane 3, and the transport unit being capable of moving at least two-dimensionally along two main motion directions H1 and H2 within the transport plane 3. Within the scope of this invention, the transport plane 3 can be understood as a flat surface of the transport section 2, determined by the size and shape of the transport section 2. For simplicity, in... Figure 1a Only one transport section 2 is shown, but of course, multiple (potentially different) transport sections 2 could be arranged sequentially to form a larger transport plane 3, for example in... Figure 5 and Figure 6 As shown in the diagram. Therefore, the transport device 1 can be modularly constructed, and transport planes 3 of varying shapes and areas can be realized. Of course, this modular structure is only optional, and it is also possible to have only one unique transport section 2 as a single component. Of course, it is also possible for multiple, possibly different, transport units TE to move simultaneously and independently within the transport plane 3 of the transport section 2.

[0024] The transport section 2 is provided with a first coil group SG1 having multiple drive coils AS1 defining a first main motion direction H1, and a second coil group SG2 having multiple drive coils AS2 defining a second main motion direction H2. The drive coils AS1 of the first coil group SG1 are arranged sequentially in a specific direction, here in the X direction, to form the first main motion direction H1 for the movement of the transport unit TE, which extends along the X-axis. The drive coils AS2 of the second coil group SG2 are arranged sequentially in a specific direction, here in the Y direction, to form the second main motion direction H2 for the transport unit TE, which extends along the Y-axis. Preferably, the drive coils AS1 and AS2 of the first coil group and the second coil groups SG1 and SG2 are arranged as follows: Figure 1a As shown, the two main motion directions H1 and H2 are arranged relative to each other such that they are orthogonal to each other. However, other relative arrangements of the main motion directions H1 and H2 may also be considered, such as angles other than right angles between the two main motion directions H1 and H2.

[0025] The drive coil AS1 of the first coil group SG1 and the drive coil AS2 of the second coil group SG2 are respectively configured as elongated, conventionally wound coils. Each drive coil AS1 of the first coil group SG1 has a longitudinal extension LAS1 in the Y direction and a lateral extension QAS1 in the X direction that is smaller than the longitudinal extension, and they are arranged sequentially in the direction of their lateral extension QAS1, i.e., in the X direction. The lateral extension QAS1 of the drive coil AS1 is typically related to the pole pitch Ti of the drive magnet 4 of the magnet group MG1 that interacts with it and / or the winding method of the drive coil AS1, i.e., whether it is concentrated winding (single-tooth winding) or distributed winding. The winding method is known in the prior art. Thus, the direction in which the drive coils AS1 of the first coil group SG1 are arranged sequentially defines the first main motion direction H1 for the movement of the transport unit TE. The drive coils AS1 of the first coil group SG1 are configured as so-called "long coils". This means that their longitudinal extension LAS1 is larger than the extension of the transport unit TE in the corresponding direction (i.e., the Y direction in this case), i.e., longer than the transport unit width BTE of the transport unit TE in this case. In the example shown, the longitudinal extension LAS1 is substantially equal to the extension dimension of the transport section 2 in the Y direction. Thus, at substantially every location in the Y direction, the transport unit TE is capable of movement in the X direction, i.e., in the first main motion direction H1.

[0026] The drive coil AS2 of the second coil group SG2 also has a longitudinal extension LAS2, which is smaller than the longitudinal extension LAS1 of the drive coil AS1 of the first coil group SG1. The longitudinal extension LAS2 of the drive coil AS2 of the second coil group SG2 extends in the X direction. Each drive coil AS2 of the second coil group SG2 also has a lateral extension QAS2, smaller than its longitudinal extension LAS2, in the Y direction. The lateral extension QAS2 is approximately equal in size to the lateral extension QAS1 of the drive coil AS1 of the first coil group SG1, but may be larger or smaller. The drive coil AS2 of the second coil group SG2 are also arranged sequentially in the direction of its lateral extension QAS2, in the Y direction. Thus, the direction in which the drive coils AS2 of the second coil group SG2 are sequentially arranged defines the second main motion direction H2 for the movement of the transport unit TE.

[0027] The drive coil AS2 of the second coil group SG2 is configured as a so-called "short coil". This means that its longitudinal extension LAS2 is equal to or less than the extension of the transport unit TE in the corresponding direction (here, the X direction), for example, the transport unit length LTE of the transport unit TE. However, in order to still enable the transport unit TE to move in the second main motion direction H2 throughout the entire transport plane 3, the drive coil AS2 of the second coil group SG2 is arranged in multiple rows side by side in the X direction, for example, three rows. However, the opposite arrangement is also possible, i.e., the "long" coil is used for the second main motion direction H2, and the "short" coil is used for the first main motion direction H1. It is also possible to use the "long" coil or the "short" coil separately for the two main motion directions H1 and H2. For example, if the same drive coil AS1 = AS2 is used for the two coil groups SG1 and SG2, this can be advantageous in terms of cost savings.

[0028] However, the illustrated embodiments are of course only to be understood as exemplary, and those skilled in the art may also specify other arrangements of coil groups SG1, SG2 and / or other construction methods of the drive coils. For example, so-called PCB coils may be used in a known manner. Here, PCB refers to "printed circuit board" and means that the coils are directly integrated into the printed circuit board. The two embodiments described are known in the prior art and will not be described in detail here. Other relative arrangements of coil groups SG1, SG2 with each other and / or with respect to transport section 2 may also be considered and / or there may also be additional coil groups SGi with drive coils AS1, AS2, which constitute another main direction of motion Hi. However, in the most common case, two coil groups SG1, SG2 with multiple drive coils AS1, AS2 of different orientations are sufficient, wherein each coil group SG1, SG2 defines a main direction of motion H1, H2. However, it is preferable that the at least two main directions of motion H1, H2 are orthogonal to each other as shown, thereby making the transport section 2 structurally simpler.

[0029] Furthermore, it is advantageous for the modular structure of the transport plane 3, which consists of multiple transport segments 2, that each transport segment 2 has a square or rectangular transport plane 3. Then, the transport segments 2 can be arranged sequentially in a simple manner, such that the corresponding first main motion direction H1 of the transport segment 2 extends parallel or orthogonal to the first main motion direction H1 of the corresponding adjacent transport segment 2, for example, in... Figure 6 As shown in the diagram. Therefore, the transport plane 3 can be simply and flexibly constructed from multiple transport segments 2. It is not mandatory for adjacent transport segments 2 to be aligned with each other; offsetting is also possible.

[0030] With the aid of the transport device 1 shown, it is possible for the transport unit TE to move substantially unrestricted in the two main motion directions H1 and H2 within the transport plane 3 of the transport section 2. Here, for example, it is possible for the transport unit TE to move only along the X-axis or only along the Y-axis, respectively. However, it is also possible for the transport unit TE to move simultaneously in both main motion directions H1 and H2, for example, by means of... Figure 1a The two-dimensional motion path BP with X and Y coordinates is shown on the transport unit TE in the transport plane 3. In the case of the corresponding construction embodiment of the transport section 2 and the corresponding transport unit TE, it is also possible to use at least four other degrees of freedom of motion (translational motion in the height direction Z and rotation about the three axes X, Y, and Z) in a known manner.

[0031] A control unit 5 is also provided in the transport device 1. This control unit can control the drive coils AS1 and AS2 of the transport section 2, such as... Figure 1a As shown in the diagram. Control unit 5 can also be connected to or integrated into a higher-level equipment control unit 6. If multiple transport sections 2 are provided in the transport device 1, a section control unit (not shown) can be provided for each transport section 2 or a group of transport sections 2, and / or a coil control unit can be provided for each drive coil ASi. These section control units and / or coil control units can also be integrated into control unit 5. The movement path BP of the transport unit TE can be predetermined via control unit 5 and / or equipment control unit 6, for example, based on a specific production process of the equipment in which the transport device 1 can be integrated.

[0032] As mentioned, multiple transport units TE can of course move simultaneously and independently on the transport device 1. Therefore, the control unit 5 and / or the equipment control unit 6 ensure that the movement of each transport unit TE is synchronized or coordinated, for example, to avoid collisions between transport units TE and / or with the transported objects. A control program runs on the control unit 5, which implements the desired movement paths of each transport unit TE. The control unit 5 or the equipment control unit 6 can also be connected, for example, to a planning module PLM for planning the movement path BP. The planning module PLM can be, for example, a computer, on which the actually constructed transport device 1, especially the transport plane 3, is virtually implemented.

[0033] A plurality of driving magnets 4 are provided on at least one transport unit TE. These driving magnets electromagnetically interact with the driving coils AS1 and AS2 of the at least two coil groups SG1 and SG2 to move the transport unit TE. For this purpose, the transport unit TE typically has a base 9, on the bottom side of which the driving magnets 4 are provided, such as in… Figure 1b As can be seen in [the text]. In [the text] Figure 1a In the diagram, the corresponding portion of the substrate 9 is shown cut open so that the arrangement of the driving magnet 4 can be seen.

[0034] In the example shown, two first magnet groups MGa and two second magnet groups MGb are arranged on the transport unit TE. It is generally sufficient to operate the transport device 1 by providing one unique first magnet group MGa and one unique second magnet group MGb for each transport unit TE. However, it is also possible to provide two or more first magnet groups MGa and two or more second magnet groups MGb for each transport unit TE. It is also possible to consider unequal numbers of first and second magnet groups MGa and MGb, for example, two first magnet groups MGa and one second magnet group MGb. In each magnet group MGa and MGb, multiple driving magnets 4 are provided, arranged sequentially in a specific arrangement direction with specific pole pitches Ta and Tb, and with different magnetization directions. The arrangement direction of the first magnet group MGa corresponds to the X direction, and the arrangement direction of the second magnet group MGb corresponds to the Y direction. Thus, the arrangement directions are orthogonal to the main motion directions H1 and H2. Preferably, the arrangement directions of the magnet groups MGa and MGb extend as parallel as possible to the main motion directions H1 and H2 in order to generate force as efficiently and electromagnetically as possible. The example shows a known 1D arrangement of the driving magnet 4 on the transport unit TE; however, a similarly known 2D arrangement may also be feasible, as will be determined according to... Figures 4a to 4d As explained in detail.

[0035] To enable the transport unit TE to move in the transport plane 3, the first drive coil and the second drive coils AS1 and AS2 can be individually controlled (energized) by the control unit 5. Power electronics that may be required for this can be located in the control unit 5 or on the transport section 2. By controlling each of the first drive coils AS1 in a time-staggered manner, a magnetic field for basic motion is generated in the first main motion direction H1. This magnetic field in the first main motion direction H1 interacts electromagnetically primarily with the drive magnet 4 of the first magnet group MGa to generate a driving force in the first main motion direction H1 for adjusting a predetermined motion state of the corresponding transport unit TE, such as acceleration, constant speed, or deceleration up to a stationary state. Similarly, by controlling each of the second drive coils AS2 in a time-staggered manner, a magnetic field for basic motion is generated in the second main motion direction H2. This magnetic field interacts electromagnetically primarily with the drive magnet 4 of the second magnet group MGb to generate a driving force for moving the transport unit TE in the second main motion direction H2. The superposition of the moving magnetic field caused by the control of the drive coils AS1 and AS2 enables the transport unit TE to move in the transport plane 3 in a desired manner along a pre-given two-dimensional motion path BP.

[0036] In addition to the two essentially unrestricted translational degrees of freedom in the main motion directions H1 and H2 within the transport plane 3, finite translational motion of the transport unit TE in the normal direction of the transport plane 3, specifically in the Z-axis direction. Based on the arrangement and structural configuration of the drive coils AS1 and AS2 of the coil groups SG1 and SG2, and the first and second magnet groups MGa and MGb interacting with them, finite rotation of the transport unit TE around the three spatial axes X, Y, and Z is also possible.

[0037] As mentioned, the adjacent driving magnets 4 of magnet groups MGa and MGb have different magnetic orientations and are spaced apart by specific pole pitches Ta and Tb (here, i.e., from the center of one driving magnet 4 to the center of the adjacent driving magnet 4, respectively). Typically, the magnetic field generated by magnet group MGa rotates 180° within the pole pitch Ti. Here, the spacing of the driving magnets 4 required to generate a magnetic field with the desired pole pitch Ti is also related to the arrangement of the driving magnets 4 within magnet group MGa, particularly to the gap width of any possible gaps between adjacent driving magnets 4, to the magnetization directions of adjacent driving magnets 4 (e.g., 180° opposite arrangement or a Halbach array arrangement), and to the magnet width MBi of the driving magnets 4. In the case of a Halbach array arrangement, it may be advantageous, for example, that each of the outermost driving magnets 4 of magnet group MGa has, for example, half the magnet width MBi of the driving magnet 4 between them.

[0038] This could mean, for example, that the magnetic north and south poles alternate, as in... Figure 1a As indicated by the shaded and unshaded drive magnets 4 on the transport unit TE, this corresponds to arranging adjacent drive magnets 4 rotated by 180°. The known Halbach array arrangement has also proven advantageous, in which the magnetization directions of adjacent drive magnets 4 differ from each other by 90°. Here, the pole pitches Ta and Tb can be understood as the spacing between two adjacent drive magnets 4 arranged in opposite magnetic orientations (north / south poles) in the arrangement direction. If the drive magnets 4 (in the arrangement direction) have the same magnet width MB, adjacent drive magnets have orientation directions differing by 180°, and the drive magnets 4 are directly adjacent to each other (as is usually the case), then the pole pitches Ta and Tb are equal to the corresponding magnet widths MBa and MBb. The pole pitches Ta and Tb and the magnet widths MBa and MBb are exemplarily shown in... Figure 4a and Figure 4c The transport unit TE is shown in the diagram.

[0039] During operation, an air gap L is provided between the transport plane 3 of the transport section 2 and the driving magnets 4 of the magnet groups MGa and MGb of the transport unit TE, such as in Figure 1b As can be seen in the image. Preferably, a cover layer with magnetic permeability is also provided on the transport section 2 to shield the drive coils AS1 and AS2 located beneath it from external influences and to form a substantially smooth transport plane 3. The cover layer is... Figure 1a The section is shown in half to identify the arrangement of the drive coils AS1 and AS2 located below it. Similarly, a covering layer for covering the drive magnet 4 can also be provided on the transport unit TE. The air gap L then extends between the covering layer of the corresponding transport unit TE and the drive magnet 4. In order to generate and, in particular, maintain the air gap L, the drive coils AS1 and AS2 and the drive magnet 4 interact in a known manner during operation, not only to generate the driving force (the driving force required for movement in the main motion directions H1 and H2), but also to generate the levitation force FS, which here is the levitation force in the Z direction. The levitation force FS also functions in the stationary state of the transport unit TE to generate and maintain the air gap L. In addition to the basically horizontal mounting position of the transport section 2 shown, an inclined mounting position in the form of an inclined plane can also be considered. A basically vertical mounting position may also be feasible.

[0040] Here, levitation force FS refers to the portion of the electromagnetically generated force acting on the transport unit TE that is opposite in the direction of gravity to the gravity FG and the possible process force FP (e.g., the gravity of the transported object O and, optionally, the process force acting on the transport unit TE based on the working process in the process handling station of the transport device 1). Thus, levitation force FS is numerically approximately equal to the vector sum of gravity FG and the process force FP (in the direction of gravity), achieving a static equilibrium state for the transport unit TE while maintaining the air gap. Driving force refers to the portion of the electromagnetically generated force that causes a change in the motion state of the transport unit TE (e.g., uniform speed, acceleration, deceleration, etc.) or, in the case of the process force FP which is not acting in the direction of gravity, must be added to levitation force FS to keep the transport unit TE stationary. Therefore, in addition to two-dimensional motion in the transport plane 3, specific motion of the transport unit TE in the height direction, i.e., orthogonal to the transport plane 3, is also possible. By controlling the drive coils AS1 and AS2 accordingly, the air gap L can be increased or decreased to a limited extent, thereby enabling the transport unit TE to move in the height direction, i.e., in the Z direction, as shown in... Figure 1b As indicated by the double arrows on the transport unit TE. Here, the size of the range of motion available in the vertical direction is primarily related to the structural design of the transport device 1, especially to the maximum magnetic field that the drive coils AS1 and AS2 and the drive magnet 4 can generate, as well as the mass and load of the transport unit TE. Depending on the size and design of the transport device 1, the range of motion available in the vertical direction can range, for example, from a few millimeters to a few centimeters.

[0041] Furthermore, it is stipulated that the drive coils AS1 and AS2 of the first coil group and the second coil group SG1, SG2 have different coil characteristics affecting the magnetic field, and / or the drive magnet 4 (here, the first magnet group MGa) that mainly interacts with the drive coil AS1 of the first coil group SG1 of the transport unit TE has different magnetic characteristics affecting the magnetic field than the drive magnet 4 (here, the second magnet group MGb) that mainly interacts with the drive coil AS2 of the second coil group SG2. This enables the transport unit TE to move in the two main motion directions H1, H2 with different efficiencies μH1≠μH2 and / or different maximum forces and / or different precisions.

[0042] Here, the coil characteristics affecting the magnetic field can be understood as the variable structural or energy parameters of the driving coil ASi, which can influence the magnetic field generated by the driving coil ASi, especially the magnetic flux. This includes, for example, the average coil spacing Si between the driving coil ASi in the normal direction and the driving magnet 4 of the transport unit TE interacting with it. Figure 1bThe following parameters are considered in the coil group STi: the coil spacing TASi of adjacent drive coils ASi, the conductor resistance of drive coil ASi, the maximum coil current that can be applied to drive coil ASi, the number of turns of drive coil ASi, and the coil geometry of drive coil ASi. The coil geometry can be understood in particular as the longitudinal extension LASi and the transverse extension QASi of drive coil ASi parallel to the transport plane 3, and the coil height h of drive coil ASi orthogonal to the transport plane 3. ASi ,like Figure 1b As shown in the driving coil AS2. Furthermore, the winding method, i.e., whether it is concentrated winding or distributed winding, also affects the coil geometry of the driving coil ASi. The magnetic characteristics of the driving magnet 4 of the transport unit TE, influencing the magnetic field, can be understood, for example, as the remanent magnetic flux density of the driving magnet 4, the relative orientation between the driving magnet 4 and the driving coil ASi interacting with it, the pole pitch Ti of the driving magnet 4, and the magnetic geometry of the driving magnet. The magnetic geometry, in particular, relates to the magnet length LMi, magnet width MBi, and magnet height HMi, as shown, for example in... Figure 1b and Figure 3d As shown in the diagram.

[0043] The following are exemplary measures on how to improve the efficiency μHi of electromagnetic force formation in the main direction of motion Hi of the transport device 1 by means of the magnetic properties and / or the coil properties that affect the magnetic field. Of course, it is also possible to change multiple magnetic properties and / or coil properties.

[0044] The relative orientation between the driving magnet 4 and the driving coil ASi should be achieved as much as possible such that the conductor orientation of the driving coil ASi is perpendicular to the magnetic field generated by the driving magnet 4. In a practical embodiment, this is achieved, for example, by using an elongated driving coil ASi and an elongated driving magnet 4, with the magnet assembly MGi interacting therewith, positioned as parallel as possible to the longitudinal extension LASi (see, for example, [link to relevant documentation]). Figure 1a Furthermore, the relative orientation between the driving coil ASi of coil group SGi (e.g., SG1) and the magnet group MGi (e.g., MGb) that primarily interacts with the driving coil ASi of other corresponding coil groups SGi (e.g., SG2) should be as perpendicular as possible, so that little to no coupling effect is generated. This is based on... Figure 1a In one example, this is achieved by arranging the driving magnet 4 of the second magnet group MGb as parallel as possible to the lateral extension QAS1 of the driving coil ASi of the first coil group SG1. The spacing between the conductor of the driving coil ASi and the driving magnet 4 interacting with it (corresponding to the average coil spacing Si in each example) should be as small as possible because the flux density decreases exponentially with the normal spacing.

[0045] The conductor resistance of the drive coil ASi should be as low as possible. This can be achieved, for example, by having the drive coil ASi with the highest possible so-called "coverage length" and / or increasing the cross-sectional area of ​​the conductor. Here, "coverage length" refers to the portion of the conductor within the influence range of the magnetic field of the drive magnet 4. Preferably, the "coverage length" should correspond as closely as possible to the entire extension of the conductor, or the drive coil ASi. If multiple conductors are used to generate driving force / levitation force (which is typically achieved using the drive coil ASi), a high copper fill factor is advantageous (the definition of copper fill factor is known in principle and is essentially equal to the ratio of the sum of the cross-sectional areas of the individual conductors of the coil to the total cross-sectional area of ​​the coil). Since the resistivity of the conductor increases with increasing temperature, the efficiency of the conductor can be improved by lowering the temperature, for example, through heat dissipation.

[0046] The maximum force that can be generated acting on the transport unit TE (not only in the direction of motion but also in the height direction) may be affected, for example, by the maximum coil current that can be applied to the drive coil ASi (which is substantially limited by the power electronics) and / or by the coil geometry and number of turns. The positioning accuracy of the transport unit TE may be affected, for example, by the size of the coil spacing TASi. The coil spacing TASi refers to the distance between adjacent drive coils ASi, typically the distance between the coil axes, as exemplarily shown in… Figure 1a As shown in the driving coil AS2 of the second coil group SG2. It can be seen that there are numerous parameters that can affect the movement of the transport unit TE, including the efficiency μHi, the maximum force that can be generated on the transport unit TE, and / or the positional accuracy of the transport unit TE's movement. Of course, it is possible to try to optimize all or as many of the characteristics in the coil characteristics of the influencing magnetic field of the driving coil AS1 and the magnetic characteristics of the influencing magnetic field of the driving magnet 4. However, this is usually not feasible or undesirable, for example, for cost and efficiency reasons. For cost reasons, it may be advantageous, for example, to use coils constructed identically for the driving coil AS1 of the first coil group SG1 and the driving coil AS2 of the second coil group SG2, thereby generating an efficiency difference substantially automatically, for example, when the average coil spacing of the driving coils AS1 and AS2 is unequal, S1 ≠ S2. The following is based on... Figures 1a to 1c The case of different average coil spacing S1≠S2 for the drive coils AS1 and AS2 is discussed only by way of example, wherein the remaining coil characteristics and magnet characteristics that affect the magnetic field are consistent in the two main motion directions H1 and H2.

[0047] The drive coil AS1 of the first coil group SG1 is spaced apart from the first magnet group MGa by a first average coil spacing S1 in the normal direction of the transport plane 3 (i.e., in the Z direction), and the drive coil AS2 of the second coil group SG2 is spaced apart from the second magnet group MGb by a second average coil spacing S2, which is larger than the first average coil spacing S1, in the normal direction of the transport plane 3. Figure 1b As can be seen in the diagram. Therefore, the driving coil AS1 of the first coil group SG1 is closer to the driving magnet 4 of the first magnet group MGa in the Z direction than the driving coil AS2 of the second coil group SG2 is closer to the driving magnet 4 of the second magnet group MGb. Figure 1b In the example, the two coil groups SG1 and SG2 are arranged vertically overlapping each other.

[0048] Here, the average coil spacing S1 and S2 are measured from the position of the coil center when viewed in the Z direction from the corresponding drive coils AS1 and AS2. To avoid interfering magnetic attraction between the corresponding transport unit TE and transport section 2, the drive coils AS1 and AS2 are preferably implemented without an iron core, i.e., so-called "air coils". Figure 1a and Figure 1b In the example shown, the drive coils AS1 and AS2 are implemented as elongated coils with a generally elliptical shape, conventionally wound, each having a coil axis in the normal direction of the transport plane 3. However, the drive coils AS1 and AS2 may also be implemented as so-called PCB coils. However, the drive coils AS1 and AS2 of the corresponding coil groups SG1 and SG2 can also be, for example, layered and overlapped vertically in the normal direction of the transport plane 3 on the transport section 2 in a plurality of first coil planes SE1 having the first drive coil AS1 and a plurality of second coil planes SE2 having the second drive coil AS2, as shown in... Figure 1c As shown in the diagram.

[0049] exist Figure 1c In the example on the left, coil blocks with four first coil planes SE1 and coil blocks with four second coil planes SE2 are arranged vertically overlappingly on transport section 2. Figure 1c In the diagram on the right, four first coil planes and four second coil planes SE1 and SE2 are alternately arranged in the Z direction on the transport section 2. Here, the average coil spacings S1 and S2 are the average spacings between the coil planes SE1 and SE2 and the transport plane 3 in the Z direction, respectively. Where S1.i and S2.i are the coil spacings of the first coil plane and the second coil planes SE1 and SE2, and j and k are the number of the first coil plane and the second coil planes SE1 and SE2.

[0050] Under the same boundary conditions in terms of construction (same geometry (length, width, height), same number of turns, etc.) and energy (same maximum current or voltage, etc.), the drive coil AS1 of the first coil group SG1 generates the same (maximum) magnetic field as the drive coil AS2 of the second coil group SG2. The magnet groups MGa and MGb on the transport unit TE are implemented substantially identically (same geometry (magnet length, magnet width, magnet height), same number of drive magnets 4, same pole pitch Ti, same magnetization direction, same magnetic field strength, etc.), causing the magnet groups MGa and MGb to generate magnetic fields of substantially the same magnitude, which interact with the magnetic fields generated by the drive coils AS1 and AS2. However, because the drive coil AS1 of the first coil group SG1 is on average closer to the drive magnet 4 of the first magnet group MGa than the drive coil AS2 of the second coil group SG2 is closer to the drive magnet 4 of the second magnet group MGb, this results in a higher efficiency of electromagnetically forming force in the first main motion direction H1 than in the second main motion direction H2. This involves not only the generation of driving force but also the generation of levitation force. Therefore, higher efficiency is achieved in the first primary motion direction H1 in a known manner compared to the second primary motion direction H2.

[0051] exist Figures 2a to 2e The diagram schematically illustrates different possibilities for the arrangement of the drive coils AS1 and AS2 of the first coil group and the second coil group SG1 and SG2 on the transport section 2. Figure 2a and Figure 2b The so-called “singer-layer” or “single-layer” variant is shown, in which the first coil group and the second coil groups SG1 and SG2 are arranged in the same plane. Figures 2c to 2e This illustrates a so-called "multi-layer" or multi-layer construction method, in which the first coil group and the second coil groups SG1 and SG2 are arranged in a layered, overlapping manner in the height direction, as previously described. Figure 1b and Figure 1c As explained, in the case of a "double-layer" construction, for example, two layers of drive coils AS1 and AS2 are arranged vertically overlapping each other. In this case, the first main direction of motion H1 (with higher efficiency μH1 > μH2) is basically automatically determined (assuming that the characteristics of other coils affecting the magnetic field and the characteristics of the magnet affecting the magnetic field are the same), because the drive coil AS1 of the first coil group SG1 is closer to the transport plane 3 in the normal direction of the transport plane 3 than the drive coil AS2 of the second coil group SG2.

[0052] The "single-layer" construction method is typically used in transport devices 1 with two equivalent main motion directions H1 and H2. Here, the drive coils AS1 and AS2 of the first coil group and the second coil groups SG1 and SG2 each have a coil spacing S1 = S2 equal to the transport plane 3. Under the condition that other coil characteristics and magnet characteristics affecting the magnetic field are the same, essentially the same efficiency μH1 = μH2 can be obtained for the two main motion directions H1 and H2. However, as mentioned above, besides the coil spacing Si, there are many other coil characteristics and magnet characteristics affecting the magnetic field, and by changing these characteristics, the efficiency μH1 and μH2 can be changed. Therefore, in principle, it is also possible to consider, in the case of the "single-layer" construction method, that the two main motion directions H1 and H2 produce different efficiencies μH1 ≠ μH2, for example, due to the different pole pitches Ta ≠ Tb of the drive magnets 4 of the two magnet groups MGa and MGb and / or the different magnet geometries of the drive magnets 4 of the two magnet groups MGa and MGb.

[0053] exist Figure 2a The diagram shows the so-called "fishbone" arrangement of the drive coils AS1 and AS2 of the two coil groups SG1 and SG2. Figures 2b to 2e Unlike other embodiments, the two main directions of motion H1 and H2 do not extend parallel to the edge of transport section 2 (i.e., in the X and Y directions), but rather extend at an angle relative to it. Related details are disclosed, for example, in JW Jansen's 2007 paper, *Magnetically Levitated Planar Actuator with Moving Magnets*, published in *Electromechanical Analysis and Design Eindhoven* (published by Technische Universiteit Eindhoven, DOI: 10.6100 / IR630846). Figure 2c The diagram shows a "double-layer" implementation in which "long" drive coils AS1 and AS2 are provided not only in the first coil group SG1 but also in the second coil group SG2. Figure 2d An embodiment is shown having a "long" drive coil AS1 in the first coil group SG1 and a "short" drive coil AS2 in the second coil group SG2, compared with... Figure 1a Similar to the Chinese. Figure 2e An example is shown with a “short” drive coil AS1 in the first coil group SG1 and a “short” drive coil AS2 in the second coil group SG2.

[0054] exist Figures 3a to 3f and Figures 4a to 4d The diagram schematically illustrates different arrangements of the driving magnet 4 on the transport unit TE. In principle, these can be categorized into so-called 1D arrangements (…). Figures 3a to 3f ) and 2D layout ( Figures 4a to 4d In the 1D arrangement, as detailed above, at least one first magnet group MGa with multiple driving magnets 4 is provided for the first main motion direction H1 (i.e., the X-axis), and at least one second magnet group MGb with multiple driving magnets 4 is provided for the second main motion direction H2 (i.e., the Y-axis). Magnet groups MGa and MGb each have a specific number of driving magnets 4, particularly permanent magnets, arranged sequentially in a specific arrangement direction (i.e., MGa in the X-direction and MGb in the Y-direction). Here, adjacent driving magnets 4 have different magnetization directions. For example, the magnetization directions of adjacent driving magnets 4 can differ from each other by 180°, i.e., alternating magnetic north and south poles, as shown by the driving magnets 4 with and without shaded lines. However, as mentioned, the driving magnets 4 of the magnet group MGI can also be arranged in a known Halbach array configuration, where, for example, driving magnets 4 with magnetization directions 90° out of phase are arranged between driving magnets 4 with opposite magnetization directions (north pole, south pole). The Halbach array configuration has the advantage that the magnetic flux on one side of the magnet group MGI (preferably the side facing the transport plane 3) is greater than the magnetic flux on the opposite side. If the corresponding outermost driving magnet 4 of the magnet group MGI has a reduced, especially halved, magnet width MBi compared to the driving magnets 4 in between, for example in... Figure 7 As shown, a particularly advantageous sinusoidal magnetic field pattern of the magnetic field of the magnet group MGi can be achieved. The Halbach array type arrangement is known in the prior art and will not be described further here.

[0055] In the 2D arrangement, the driving magnets 4 with different magnetization directions are arranged in a basically checkerboard pattern on the transport unit TE. Here, the driving magnets 4 with different magnetization directions are arranged alternately and offset in two arrangement directions (i.e., the X and Y directions). Preferably, these two directions are oriented relative to each other, such as the two main motion directions H1 and H2, i.e., orthogonal to each other. It is immediately apparent that a variety of different arrangement possibilities are obtained, among which the most common variation of the 1D arrangement is... Figures 3a to 3f As shown in the diagram, the most common variation of the 2D arrangement is... Figures 4a to 4dAs shown in the diagram. In the 2D arrangement, the first magnet group MGa corresponds to the driving magnets 4 alternately arranged in one direction (e.g., in the X direction), and the second magnet group MGb corresponds to the driving magnets 4 alternately arranged in the corresponding other direction (e.g., in the Y direction). Thus, the magnet groups MGa and MGb are not separated in the 2D arrangement as they are in the 1D arrangement; instead, the driving magnets 4 are not only part of the first magnet group MGa, but also part of the second magnet group MGb.

[0056] For example, in order to arrange coil groups SG1 and SG2 in a "single layer" on transport section 2 ( Figure 2a and Figure 2b In the case of (where the other coil characteristics affecting the magnetic field of the drive coils AS1 and AS2 are the same), different efficiencies μH1, μH2 and / or different maximum forces and / or different positioning accuracies of the transport unit TE can be achieved, and the magnetic characteristics of the magnetic field affecting the drive magnet 4 of the transport unit TE can also be changed as mentioned. One possibility is, for example, that the pole pitch Ta of the first magnet group MGa is different from the pole pitch Tb of the second magnet group MGb, as exemplarily in a 1D arrangement. Figure 3d and Figure 3f The shown and in the 2D arrangement Figure 4c and Figure 4d As shown in [the document]. If in [the document] Figures 1a to 1c In the case of the "double-layer" implementation of the transport section 2 shown, the drive coil AS1 of the first coil group SG1 has a smaller coil pitch S1 than the drive coil AS2 of the second coil group SG2, and different pole pitches Ta≠Tb are also provided on the magnet groups MGa and MGb of the transport unit TE. Preferably, the pole pitch Ta of the first magnet group MGa (which interacts with the first coil group SG1) is smaller than the pole pitch Tb of the second magnet group MGb. This is advantageous because the magnetic field generated by the drive magnet 4 further penetrates into the transport section 2 in the Z direction as the pole pitch Ti increases. Therefore, the magnet group MGa with a larger pole pitch Ti interacts more efficiently with the drive coil AS1 of the more distant coil group SGi.

[0057] As mentioned at the beginning, prior art has attempted to compensate for the efficiency difference between the two main motion directions H1 and H2 in order to achieve the most equivalent main motion directions in terms of available electromagnetic force. In contrast, in the case of the present invention, the efficiency difference between the two main motion directions H1 and H2 is specifically utilized, as explained in more detail below.

[0058] exist Figure 5The diagram shows a transport device 1, which includes multiple adjacent transport sections 2 to form a transport plane 3 with a desired shape and size. Each transport section 2, as described, has a first main direction of motion H1 and a second main direction of motion H2 orthogonal to the first main direction of motion. Here, the second main direction of motion H2 has a lower efficiency μH2 < μH1 relative to the first main direction of motion H1. The transport sections 2 can, for example, be configured as described in... Figures 1a to 1c The structure is as shown. Specifically, there are eight identical transport sections 2, each constructed as a rectangle. Thus, each transport section 2 constitutes a rectangular segment of the entire transport plane 3. However, in a very simple case, there may only be one transport section 2. Of course, according to... Figure 5 The arrangement is to be understood as exemplary only, and transport section 2 may also have other shapes, such as being square as shown by transport section 2a and / or possibly joined in other ways to form transport plane 3 with other shapes. In the simplest case, there may also be only one single transport section 2.

[0059] Each transport segment 2 is adjacent to the short side of an adjacent transport segment 2 and to the long side of another adjacent transport segment 2. Thus, the first and second main motion directions H1 and H2 of each transport segment 2 extend parallel to each other. However, this is not mandatory and can be arranged arbitrarily. Thus, the adjacent transport segments 2 constitute a unique large transport plane 3, enabling one or more transport units TE to move at least two-dimensionally within this transport plane. As described, depending on the construction scheme of the transport unit TE (e.g., depending on the arrangement of the drive magnet 4 in 1D...), Figures 3a to 3f ) or 2D layout ( Figures 4a to 4d (Different implementation schemes and arrangements in )) Other degrees of freedom are also possible (movement in the height direction, rotation around the three spatial axes).

[0060] Within the scope of this invention, the movement of the transport unit TE is pre-defined along a path BP between a defined starting point AP and a defined ending point EP. Thus, this path BP is initially independent of the transport device 1 and can be determined, for example, according to a pre-defined production process in which the transport device 1 is used. For example, the production process may require that objects be transported along the pre-defined path BP from the starting point AP to the ending point EP. To perform the transport process, different process handling stations PSi can also be provided on the transport device 1, and the transport unit TE can move between these stations, as will be further explained below. Figure 6 As explained in more detail.

[0061] To take advantage of the difference in efficiency between the two main motion directions H1 and H2 of the transport device 1 (where μH1 > μH2) (and / or the difference in the maximum force acting on the transport unit TE and / or the difference in positioning accuracy), according to the present invention, the at least one transport section 2 is oriented relative to a pre-given motion path BP in such a way that the motion path BP is positioned in the transport plane 3 such that the first motion path proportion BPA1 of the first main motion direction H1 on the motion path length LBP of the motion path BP is equal to or greater than the second motion path proportion BPA2 of the second main motion direction H2 on the motion path length LBP. Here, the motion path length LBP can be understood as the actual geometric length of the motion path BP, that is, the length between the starting point PA and the ending point PE of the motion path BP in the motion direction. In other words, the motion path length LBP is the distance traveled by the transport unit TE along the motion path BP from the starting point PA to the ending point PE.

[0062] In other words, the transport section 2 is oriented relative to a pre-defined external movement path BP such that the movement path BP is entirely within the transport plane 3, thereby enabling the transport unit TE to move between the starting point AP and the ending point EP within the transport plane 3. Furthermore, the orientation of the transport section 2 relative to the movement path BP according to the invention ensures that the main portion of the movement of the transport unit TE is carried out with high efficiency μH1 in the first main movement direction H1. Particularly advantageous for achieving the most efficient operation is that the at least one transport section 2 is oriented relative to the movement path BP such that the proportion of the first movement path in the first main movement direction H1, BPA1, is maximized over the movement path length LBP of the movement path BP.

[0063] Of course, if the arrangement of transport section 2 is predetermined but the motion path BP can be freely chosen, the opposite approach can also be selected. Here, instead of matching the orientation of transport section 2 to the predetermined motion path BP, the motion path BP is determined in transport plane 3 such that the first motion path proportion BPA1 in the first main motion direction H1 along the motion path length LBP is equal to or greater than the second motion path proportion BPA2 in the second main motion direction H2 along the same motion path length LBP. This also applies similarly to the process motion path PBPi and transition path UPi in the embodiments below.

[0064] The motion path BP is basically composed of coordinates in two main motion directions, H1 and H2, specifically in the X and Y directions. Figure 5In the arrangement of transport sections 2 shown, which have parallel first and second main motion directions H1 and H2, the X direction corresponds to the first main motion direction H1 throughout the transport plane 3, and the Y direction corresponds to the second main motion direction H2 throughout the transport plane 3. If multiple transport sections 2 are assembled to form the transport plane 3, the motion path BP can extend on part or the entire transport plane 3, that is, it can extend on multiple transport sections 2. If only one transport section 2 is provided in the transport device 1, the motion path BP extends only in the transport plane 3 formed by this one transport section 2.

[0065] To enable each transport unit TE to move along the motion path BP, the corresponding drive coils AS1 and AS2 of the transport section 2 can be controlled, for example, by the control unit 5 of the transport device 1. Alternatively, each transport section 2 can have a separate section control unit connected to the control unit 5 of the transport device 1, and / or one or more drive coils AS1 and AS2 can have independent coil control units. As mentioned, the control unit 5 of the transport device 1 can, for example, be connected to a planning module PLM for determining the motion path BP. This allows different motion paths BP to be planned and then transmitted to the control unit 5 of the transport device 1, which accordingly controls the drive coils AS1 and AS2 so that the transport unit TE moves along the desired motion path BP.

[0066] According to an advantageous construction scheme, at least one process processing station PS is provided in the transport device 1 to perform the work processes on the object O transported by means of the transport unit TE, such as in Figure 5 As schematically illustrated, a process motion path PBP, which is part of the motion path BP, is defined within the area of ​​the process processing station PS. The transport unit TE is able to move along the process motion path in the transport plane 3 to perform the work process (in... Figure 5 (Shown as dashed lines). The process processing station PS can be constructed arbitrarily, i.e., it can have any shape and size. For example, the process processing station PS can be arranged laterally next to the transport section 2, such that the process processing station PS (viewed orthogonally to the transport plane 3) is outside the transport plane 3 (see...). Figure 6 However, the process station PS can also be located inside transport plane 3 (viewed orthogonally to transport plane 3), as illustrated below. Figure 5 As shown in the process processing station PS.

[0067] However, the specific construction, type, shape, and size of the process processing station PS are irrelevant to the present invention and are essentially related to the production process to be performed in which the transport device 1 is used. For example, a container may be transported as an object O by means of a transport unit TE, and the process processing station PS may be a filling device for a specific process medium, such as a bottle filling device. Thus, for example, the transport unit TE may move below the filling device along a pre-defined process motion path PBP and fill continuously or intermittently during the movement. However, specific processing steps may also be performed on the workpiece (as object O) transported by means of the transport unit TE in the process processing station PS. Another example of a process processing station may be a measuring station, in which specific measurement processes can be performed on object O by means of suitable measuring tools, such as a camera system. Loading and unloading object O by the transport unit TE is also an exemplary working process within the process processing station PS. Thus, a large number of different possible process processing stations PS can exist.

[0068] A representative example of this is Figure 5 The diagram shows a general-purpose process station PS used to perform typical work processes. The process station PS has a generally rectangular base and (in the top view of transport plane 3) is positioned inside transport plane 3. The transport unit TE, as part of the motion path BP, extends along the long side of the process station PS along its process motion path PBP, which allows it to move within transport plane 3. The process motion path PBP extends substantially parallel to the long side of the process station PS between the process start point PAP and the process end point PEP, as shown by the dashed line.

[0069] For example, if only a portion of the process station PS is used (e.g., if only a portion of the available filling units are used in a filling facility), the process motion path PBP does not necessarily extend across the entire process station PS. The process motion path PBP is typically a segment of the motion path BP located within the area of ​​the process station PS, where the interaction between the transport unit TE (or the object O transported by it) and the process station PS is realized to perform the work process. Figure 5 The process station PS shown in the figure (exemplary only) is set at an angle such that the process motion path PBP (which extends parallel to the long side of the process station PS) extends neither parallel to the X direction nor parallel to the Y direction.

[0070] Preferably, the process processing station PS and the transport section 2 (or multiple transport sections 2) are oriented relative to each other such that the first process motion path proportion PBPA1 in the first main motion direction H1 along the process motion path length LPBP of the process motion path PBP is equal to or greater than the second process motion path proportion PBPA2 in the second main motion direction H2 along the process motion path length LPBP. Particularly preferred is this orientation to maximize the first process motion path proportion PBPA1. This ensures that the transport unit TE moves primarily in the highly efficient first main motion direction H1, even within the area of ​​the process processing station PS, thereby further improving the operating efficiency of the transport device 1. This arrangement is also advantageous if a higher maximum force can be generated on the transport unit TE in the first main motion direction H1 than in the second main motion direction H2, because this allows for better electromagnetic support of the process forces acting on the transport unit TE, for example, during operation in the process processing station PS.

[0071] However, the transport device 1 typically includes multiple process processing stations PSi for performing work processes on the object O transported by the transport unit TE, such as by... Figure 6 As shown in the transport device 1, multiple identical transport sections 2.1-2.12 are arranged sequentially to form a transport plane 3. As previously described, each transport section 2.1-2.12 is constructed as a rectangle with a long side and a short side, and each includes a first main motion direction H1 with higher efficiency μH1 and a second main motion direction H2 with relatively lower efficiency μH2 < μH1. The first main motion direction H1 extends parallel to the long side of the rectangular transport section 2, and the second main motion direction H2 extends parallel to the short side. Of course, it is also possible to similarly be as previously described in... Figure 5 As in the example, alternatively or additionally, transport sections 2 may be provided with other configurations. Only four generally square transport sections 2a are shown as an example, which may be arranged in place of transport section 2.4. It should be noted that the transport device 1 shown is merely exemplary and not a limiting construction for the invention.

[0072] Each transport section 2.1-2.4 is arranged sequentially and aligned in the longitudinal direction (X direction), with their respective short sides adjacent to each other. Thus, the first main direction of motion H1 of each transport section 2.1-2.4 is oriented parallel to and substantially coaxially in the X-axis direction, and the corresponding second main direction of motion H2 extends parallel to each other in the Y-axis direction.

[0073] Processing stations PS1-PS4 are provided on both sides of each transport section 2.1-2.4, and these processing stations partially extend from two of the transport sections 2.1-2.3. This allows the transport unit TE to move parallel to the process processing stations PS1-PS4 along a first main motion direction H1 in the transport plane 3 and orthogonal to the process processing stations PS1-PS4 in a second main motion direction H2. Two additional transport sections 2.5 and 2.6 are connected to and grounded in the transport section 2.4, with their respective short sides adjacent to the long side of transport section 2.4. Thus, the first main motion direction H1 of each of the two transport sections 2.5 and 2.6 is orthogonal to the first main motion direction H1 of transport section 2.4.

[0074] The remaining transport sections 2.7-2.12 are assembled in a similar manner to form the remaining sections of transport plane 3. Processing station PS5 is centrally located in the Y direction between transport sections 2.7, 2.8 and transport sections 2.9, 2.10. For example, work processes may be performed only on one side of process processing station PS5 (e.g., only on transport sections 2.7, 2.8), but work processes may also be performed on both sides. In the case of a unilateral work process, the corresponding other side (e.g., transport sections 2.9, 2.10) may be used as a bypass, allowing transport units TE to move through process processing station PS5 without performing work processes. Transport units TE can be regrouped on transport section 2.11. Furthermore, the path can be used as a loop path for repeating work processes. Bypasses and / or loop paths can also be implemented on individual transport sections, provided the geometry of the transport units TE allows. Exemplarily in… Figure 6 The diagram illustrates different possibilities for the motion path BP, along which the transport unit TE can move in the transport plane TE.

[0075] The motion path BP can also have a virtual turnout VW, at which it is divided into two (or more) parallel motion path segments, as exemplarily shown on transport segment 2.2 via a first virtual turnout VW1. It is virtual because the turnout is not a physical unit, but can be determined substantially arbitrarily in transport plane 3, for example, within the planning module PLM. In the illustrated example, the motion path BP is divided in the first virtual turnout VW1 into an (upper) fourth process motion path PBP4 extending along the fourth process processing station PS4 and a (lower) third process motion path PBP3 extending along the third process processing station PS3. The process motion paths PBPi of each process processing station PSi are... Figure 6The dashed lines represent this. This means, for example, that a specific transport unit TE can be selectively deflected along the fourth process movement path PBP4 and other transport units TE can be deflected along the third process movement path PBP3. The two parallel movement path segments, here the fourth process movement path PBP4 and the third process movement path PBP3, can be redirected together at appropriate locations, for example, on transport segment 2.3, to form a common movement path BP.

[0076] This also applies similarly to the second virtual turnout VW2 on transport section 2.4, where the movement path is split into two parallel movement path segments BPa and BPb. The first movement path segment BPa extends partially on transport section 2.6 and continues on transport sections 2.7 and 2.8 to guide transport unit TE to the fifth process station PS5. Within the area of ​​the fifth process station PS5, the first movement path segment BPa has a fifth process movement path PBP5 as part of the movement path BP. The second movement path segment BPb extends partially on transport section 2.5 and continues on transport sections 2.9 and 2.10 to allow transport unit TE to move through the fifth process station PS5. On transport section 2.11, the first and second movement path segments BPa and BPb rejoin and extend as a common movement path BP until the end of transport plane 3 at transport section 2.12.

[0077] If already based on Figure 5 As explained, according to the present invention, the first motion path proportion BPA1 of the first main motion direction H1 on the motion path length LBP of the motion path BP is equal to or greater than the second motion path proportion BPA2 of the second main motion direction H2 on the same motion path length LBP. An advantageous embodiment of the present invention can specify that the first process motion path proportion PBPA1 of the first main motion direction H1 on the sum of the process motion path lengths LBPPi of the process motion paths PBPi is equal to or greater than the second process motion path proportion PBPA2 of the second main motion direction H2 on the same process motion path lengths LBPPi. That is, a comparison is made of the actual proportions of the main motion directions H1 and H2 in the sum of the geometric lengths of the process motion paths PBPi.

[0078] Therefore, even in the presence of multiple process processing stations PSi, it can be ensured that the total movement of the transport unit TE within the area of ​​the process processing station PSi is primarily carried out in the first main movement direction H1, which has higher efficiency μH1. Thus, for example, the transport device 1 may have one or more process processing stations PSi, whose process movement path PBPi extends only or mostly in the second main movement direction H2 (with lower efficiency μH2), and even so, it can still be ensured that the total movement across all process processing stations PSi is primarily carried out in the first main movement direction H1.

[0079] Furthermore, a transition path UP, which is part of the movement path BP, can be determined within the area between two process processing stations PSi, and the transport unit TE can move along the transition path from one process processing station to another PSi in the transport plane 3. Figure 6 The transition path UP, with a transition length LUP (in the direction of movement), between the fifth process station PS5 and the sixth process station PS6 is illustrated by a dashed line. Preferably, for the transition path UP, the first transition path proportion UPA1 in the first main direction of movement H1 along the transition path length LUP is equal to or greater than the second transition path proportion UPA2 in the second main direction of movement H2. This also allows the transport unit TE to move primarily in the first main direction of movement H1 between the two process stations PSi. This is advantageous, for example, for situations where the drive coil AS1 traveling through the first main direction of movement H1 can generate a greater maximum force (driving force + levitation force) than the drive coil AS2 traveling through the second main direction of movement H2. For example, if the movement of transport unit TE along transition path UP requires relatively high force, such as if a relatively heavy object O is loaded and accelerated for transport unit TE in fifth process station PS5, and then decelerated and unloaded again in sixth process station PS6, then the drive coil AS1 of the first main motion direction H1 (with a large maximum force that can be generated) can be used in an advantageous manner to generate the driving force and levitation force acting on transport unit TE.

[0080] The following describes, according to another advantageous construction according to the invention, how a transport device 1 comprising at least one transport section 2 with two main motion directions H1 and H2 having different efficiencies μH1 > μH2 can be operated as efficiently as possible. It is well known that the efficiency μ of the main motion direction Hi describes the ratio of available energy to input energy, and in the case of the current transport device 1 in the form of a planar motor, it can be expressed by the formula... Here, Pm is the output mechanical power and Pe is the input electrical power. Mechanical power can be expressed as the product of force F and the velocity v of the transport unit TE, as Pm = F * v, while electrical power Pe is expressed as the product of current I and voltage U on the drive coil ASi, as Pe = U * I. From the losses caused by energy conversion, the efficiency will always be less than 1. These losses can also be expressed as loss power, as Pv = Pe - Pm. From this, we can conclude that the conductor loss of the drive coil ASi plays a decisive role in the total loss of the planar motor. If copper is used as the conductor material of the drive coil ASi (which is usually the case), it is also called copper loss Pcu instead of conductor loss. Without limiting the invention to copper, the following example is illustrated based on copper loss, which is representative of conductor loss. However, this certainly applies equally to any other conductor material.

[0081] For the presence of current I L Copper loss P in conductor L cu,L Applicable P cu,L =k I,L *I L 2 The proportionality constant k I,L Typically, the electromagnetic (Lorentz) force FL of a current-carrying conductor L in an external magnetic field is related to the conductor's cross-section, material, temperature, and length. This force can be simplified using the factor k. F,L According to F L =k F,L *I L This means that the factor k F,L It is a function of the orientation and length of conductor L in the vector magnetic field. Since the mathematical relationships are generally known, they will not be elaborated upon here. Therefore, the electromagnetic force F generated by conductor L... L copper loss P cu,L Able to be based on calculate.

[0082] The following simplifies this process by classifying the drive coils AS1 of the planar motor into two types of conductors L—conductor LH1 and conductor LH2. Here, conductor LH1 corresponds to drive coil AS1 in the first main motion direction H1 (with higher efficiency μH1), while conductor LH2 corresponds to drive coil AS2 in the second main motion direction H2 (with relatively lower efficiency μH2 < μH1). To maintain the levitation state of the air gap L, i.e., the transport unit TE, it is necessary for a levitation force FS (generated by the electromagnetic interaction between drive coil AS1 and the drive magnet 4 of the first magnet group MGa, and the electromagnetic interaction between drive coil AS2 and the drive magnet 4 of the second magnet group MGb) to compensate for the gravity FG of the transport unit TE and the possible constant process force FP (in the direction of gravity). However, depending on the installation configuration of the transport section 2 of the transport device 1, the levitation force FS may not necessarily act in the normal direction of the transport plane 3 of the transport section 2.

[0083] Therefore, the levitation force FS compensates for the gravity FG caused by the mass of the transport unit TE, as well as the force component of the possible process force FP in the direction of gravity, such as that generated by the transported object O. Thus, the levitation force FS enables the position of the transport unit TE relative to the transport section 2 to remain constant during operation. As mentioned at the beginning, specific movements of the transport unit TE in the height direction (i.e., in the Z direction here) can also be achieved, which can be realized by corresponding control drive coils AS1 and AS2.

[0084] The electromagnetic levitation force F generated by conductor LH1 (=first drive coil AS1) S,H1 copper loss P cu,H1 according to Calculations are performed on the electromagnetic levitation force F generated by coil LH2 (=second drive coil AS2). S,H2 copper loss P cu,H2 according to Perform the calculation. The total levitation force required is FS = F. S,H1 +F S,H2 At this point, it is advantageous to use the relation F S,H1 =κ*FS and F S,H2 =(1-κ)*FS is distributed across coil categories H1 (drive coil AS1) and H2 (drive coil AS2), where the distribution coefficient 0≤κ≤1 favors the drive coil AS1 (here, the drive coil AS1 in the first main motion direction H1) with higher efficiency μ. Here, the distribution coefficient k is advantageously chosen such that the total copper loss P cu =P cu,H1 +P cu,H2 Minimize. That is, make the expression... minimize.

[0085] For symmetrical implementation, the same efficiency μH1=μH2, i.e., k H1 =k H2 In the case of a planar motor with the main motion direction, the total copper loss P cu As expected, the symmetrical allocation k = 0.5 is extremely small. In the asymmetric case of the invention, the first principal motion direction H1 has an efficiency μ H1 Furthermore, the second principal motion direction H2 has an efficiency μ H2 <μ H1 , i.e., k H1 ≠k H2 Then the optimized distribution coefficient k is k H1 and k H2 The function can be obtained by solving the above total copper loss P. cu The extreme value task in the equation is to determine

[0086] Depending on the installation configuration, the levitation force FS is calculated based on the inclination angle of the transport section 2, including its components in the first main motion direction H1, the second main motion direction H2, and the normal direction of the transport plane 3. The normal component of the levitation force FS is generally applied not only by the drive coil AS1 of the first coil group SG1 but also by the drive coil AS2 of the second coil group SG2. The component of the levitation force FS in the first main motion direction H1 is generally applied only by the drive coil AS1 of the first coil group SG1, while the component in the second main motion direction H2 is generally applied only by the drive coil AS2 of the second coil group SG2. Therefore, when the levitation force FS is tilted about more than one axis, it is distributed angularly to the drive coils AS1 and AS2. Thus, when the transport section 2 is not horizontally installed, the distribution coefficient k of the levitation force FS is a function of the inclination angle of the transport section 2.

[0087] The following will also be based on Figure 7 To elaborate further on the selection of the optimal distribution coefficient k for horizontal installation, for ease of understanding, we start from this: namely, the first principal direction of motion H1 (X direction, see, for example, see...) Figure 1a The higher efficiency μH1 (relative to the second main motion direction H2) is achieved only by the smaller average coil spacing S1 < S2 of the driving coils AS1 and AS2, and other coil characteristics and magnet characteristics affecting the magnetic field are the same in both main motion directions H1 and H2. Therefore, the efficiency μi is generally a function of the coil spacing Si.

[0088] Based on the findings so far, the levitation force F in the main motion directions H1 and H2 is...S,H1 F S,H2 Able to be based on or To determine. Here, Bi corresponds to the (average) value of the magnetic flux density and for the two main directions of motion H1, H2, it can be determined according to or To determine, the coil height h of the drive coil ASi (here, the drive coil ASi block) is... AS1 =h AS2 Si represents the average coil spacing of the corresponding magnet group MGI, and Ti represents the pole pitch of the corresponding magnet group MGI. When the coil heights are unequal h... AS1 ≠h AS2 Applicable in the following circumstances or

[0089] exist Figure 7 In the example shown, for easier identification, the two main motion directions H1 and H2 are shown side-by-side separately. On the left is the drive coil AS1 of the first coil group SG1 in the first main motion direction H1 and the first magnet group Mga interacting with it, and on the right is the drive coil AS2 of the second coil group SG2 in the second main motion direction H2 and the second magnet group MGb interacting with it. The drive magnets 4 of the magnet groups Mga and MGb are arranged on the transport unit TE using a known Halbach array. This means that the magnetization directions of adjacent drive magnets 4 differ from each other by 90°, as shown by... Figure 7 As indicated by the arrow (pointing towards the magnetic south pole). For clarity, the remaining components of the transport device 1 (e.g., transport section 2, base 9 of transport unit TE) are not shown here. The field lines of the respective generated magnetic fields are shown only schematically.

[0090] The drive coil AS1 of the first coil group SG1 in the first main motion direction H1 is spaced apart from the first magnet group MGa by an average coil spacing S1. The drive coil AS2 of the second coil group SG2 in the second main motion direction H2 is spaced apart from the second magnet group MGb by a second average coil spacing S2. Here, S1 applies. <S2、h AS1 =h AS2 And Ta = Tb, satisfying the condition μH1 > μH2. To maximize the (overall) efficiency μ of transport device 1, the aforementioned (total) copper loss P needs to be minimized. cu Minimize the right side of the equation. This leads to the optimization of the distribution coefficient.

[0091] exist Figure 8 The optimized distribution coefficient K is shown in the figure. optThe graph shows the average coil spacing difference ΔS = S2 - S1 (with a constant air gap L). From the above relationship, we can derive the optimal distribution coefficient K when the drive coils AS1 and AS2 of the planar motor have equal average coil spacing S1 = S2 (assuming other coil characteristics and magnet characteristics affecting the magnetic field are the same). opt As expected, it is κ. opt =0,5. The larger the difference ΔS between the average coil spacings S1 and S2, that is, the farther the driving coil AS2 of the second coil group SG2 is from the driving coil AS1 of the first coil group SG1 in the normal direction of the transport plane 3 and the corresponding magnet groups MGa and MGb, the better the optimized distribution coefficient K. opt The larger it is, the better the distribution coefficient K becomes. opt The distribution coefficient K is independent of the absolute size of the air gap L, meaning it only depends on the difference ΔS between the coil spacings S1 and S2. Therefore, by selecting an optimized distribution coefficient K... opt This reduces losses in the transport device 1, which has a first main motion direction H1 with an efficiency of μH1 and a second main motion direction H2 with an efficiency of μH2 < μH1, thereby ensuring the most efficient operation of the transport device 1. The higher the efficiency difference between the two main motion directions H1 and H2, the more optimized the distribution coefficient K should be. opt The greater the advantage, the better.

[0092] Figure 9 The copper loss P is shown for the two main motion directions H1 and H2. cu,H1 and P cu,H2 Qualitative curve of levitation force FS. The solid line with an asterisk shows the copper loss P in the second principal motion direction H2 when κ = 0.5. cu,H2 The curve trend, and the solid line without markings represents the copper loss P in the main motion direction H1 when κ=0,5. cu,H1 The curve trend. In contrast, the dashed line with circular markers indicates an optimized distribution coefficient K. opt Copper loss P in the second principal motion direction H2 cu,H2 The curve trend is shown, while the unmarked dashed line indicates the distribution coefficient K with optimization. opt Copper loss P in the first principal motion direction H1 cu,H1 The curve trend. It can be seen from this that by selecting an optimized distribution coefficient K... opt The copper loss P in the two main motion directions H1 and H2 cu,H1 The sum can be significantly reduced compared to conventional control, thereby improving the overall efficiency of transport device 1.

[0093] According to another advantageous embodiment of the invention, when selecting the distribution coefficient k to generate the levitation force FS, kinematic parameters of the transport unit TE, such as the velocity v and / or acceleration a of the transport unit TE, can also be considered. For example, it may be advantageous to select a different distribution coefficient k than that used in the stationary state or during the uniform velocity v phase, for example, during the acceleration of the transport unit TE, for example, in the first main motion direction H1. Thus, an optimized distribution coefficient K is obtained. opt During the acceleration phase (a>0), the distribution coefficient can be less than the optimized distribution coefficient in the stationary state if possible, because a driving force must be generated in the first principal motion direction H1 in addition to generating the levitation force FS. Therefore, in addition to generating the levitation force FS, an additional load is applied to the first drive coil AS1, which typically requires applying a higher coil current I to the drive coil AS1 than in the stationary state or at a constant velocity v. Since the coil current I, as described, has a higher current I... L The copper loss P is affected quadratically by the conductor L. cu,L =k I,L *I L 2 Therefore, excessive copper losses may occur, for example, during the acceleration phase of the transport unit TE. Thus, the distribution coefficient K used for optimizing the stationary state of the transport unit TE... opt This is no longer applicable to the acceleration phase where possible. Therefore, it may be advantageous to determine different optimal distribution coefficients κ for different kinematic operating states j of the transport unit TE, such as velocity v or acceleration a. opt_j =f{v,a}. Then, for example, it is possible to optimize the distribution coefficient K. opt_j The data is stored in control unit 5, and control unit 5 is able to select the distribution coefficient K optimized for the current operating state of transport unit TE. opt_j Furthermore, the corresponding coil current I is used to control the drive coils AS1 and AS2.

[0094] exist Figure 10 The top view of transport plane 3 shows another advantageous embodiment of transport device 1. This transport device basically corresponds to... Figures 1a to 1c The implementation scheme described herein will be discussed here only for its key differences. The stator of the transport device 1 here has multiple, particularly four, transport sections 2 of the same type, which together form a transport plane 3 in which at least one transport unit TE can move. However, unlike the implementation scheme described herein... Figure 1aIn one embodiment, the transport segments 2 are not constructed as rectangles, but rather each has a rhomboid shape. Similarly, the at least one transport unit TE is constructed such that the surface of the transport unit TE projected onto the transport plane 3 is rhomboid. However, the transport unit may also be constructed as a rectangle, as has been done according to… Figures 3a to 4d As described. The first main motion direction H1 is, for example, orthogonal to the first edge K1 of the rhombic transport plane 3, and the second main motion direction H2 is orthogonal to the second edge K2 of the rhombic transport plane 3 adjacent to the first edge K1. Each transport segment 2 is constructed such that the first edge K1 and the second edge K2 are arranged at a rhombic angle ω < 90° to form a rhombic shape. The opposing sides extend parallel to each other, as in... Figure 10 As shown in the diagram.

[0095] As already detailed, the directions of the two main motion directions H1 and H2 are derived from the arrangement of the drive coils AS1 and AS2 of the coil groups SG1 and SG2. (This is in accordance with...) Figure 1a Similarly, in the example, the drive coils AS1 and AS2 of the first coil group and the second coil group SG1, SG2 are configured in this example as elongated coils having longitudinal extensions LAS1, LAS2 and transverse extensions QAS1, QAS2 that are orthogonal to the longitudinal extensions and smaller than the longitudinal extensions. Here, in order to achieve different coil characteristics affecting the magnetic field, the drive coil AS1 of the first coil group SG1 is, for example, closer to the transport plane 3 in the normal direction (in this case, in the Z direction) than the drive coil AS2 of the second coil group SG2. As a result, the first main motion direction H1 extends perpendicular to the longitudinal extension LAS1 of the first drive coil AS1, which is orthogonal to the first edge K1 of the transport section 2. The second main motion direction H2 extends perpendicular to the longitudinal extension LAS2 of the second drive coil AS2, which is orthogonal to the second edge K2 of the transport section 2. Therefore, the second main motion direction H2 extends at a rhomboid angle ω relative to the first main motion direction H1 in this example. The rhomboid shape is advantageously suited for situations where the desired angle between the main directions of motion H1 and H2 is less than 90°. In the case where the transport section 2 has a rectangular shape (e.g., according to...), Figure 1a While this may also be feasible, at least one of the drive coils AS1, AS2 in the main motion directions H1, H2 may have to be arranged such that their longitudinal extensions no longer extend parallel to the edge of the rectangular transport plane 3, which may be more complex in terms of construction.

[0096] On the transport unit TE, a first magnet group MGa and a second magnet group MGb, each having multiple driving magnets 4 with different magnetic orientations, are arranged. Here, the arrangement of the driving magnets 4 can be as follows: Figure 10As shown in the figure, it is implemented in a 1D arrangement with multiple elongated driving magnets 4 (see also [reference]). Figures 3a to 3f However, a 2D arrangement of the driving magnets 4 with a checkerboard pattern is certainly also possible (see, for example, [link to relevant documentation]). Figures 4a to 4d The 1D and 2D arrangements have been described in detail and will not be repeated here. Here, the first magnet group MGa is based on... Figure 10 In the example, the arrangement is preferably such that the longitudinal direction of the driving magnet 4 of the first magnet group MGa extends as orthogonally as possible to the first main motion direction H1. Similarly, the second magnet group MGb is preferably arranged such that the longitudinal direction of the driving magnet 4 of the second magnet group MGb extends as orthogonally as possible to the second main motion direction H2. Of course, deviations may occur from the movement of the transport unit TE, especially due to the rotation of the transport unit TE around the vertical axis (i.e., the Z-axis in this case), which may, for example, lead to a decrease in the efficiency μH1, μH2 of the two main motion directions H1, H2. However, if the magnet groups MGa and MGb have the same magnetic characteristics affecting the magnetic field, the allocation of the two main motion directions H1, H2 will not be changed. The arrangement of the transport section 2 according to the invention relative to the predetermined motion path BP, as described in detail, is of course also applicable to the arrangement according to the invention. Figure 10 Examples of these embodiments are not described in detail here.

Claims

1. A transport device (1) in the form of a planar motor, the transport device having at least one transport section (2) constituting a transport plane (3) and having at least one transport unit (TE) capable of moving in at least two dimensions along two main motion directions in the transport plane (3), wherein, A first coil group having multiple first drive coils (AS1) defining a first main motion direction (H1) and a second coil group having multiple second drive coils (AS2) defining a second main motion direction (H2) are provided on the transport section (2). A drive magnet (4) is provided on the transport unit (TE). The first drive coils (AS1) of the first coil group can be controlled by the control unit (5) to electromagnetically interact with at least a portion of the drive magnet (4) of the transport unit (TE) to move the transport unit (TE) in the first main motion direction (H1). The second drive coils (AS2) of the second coil group can be controlled by the control unit (5) to electromagnetically interact with at least a portion of the drive magnet (4) of the transport unit (TE) to move the transport unit (TE) in the second main motion direction (H2). The transport unit (TE) can move in the two main motion directions with different efficiencies and / or different maximum forces and / or different precisions. The first driving coil of the first coil group and the second driving coil of the second coil group have different coil characteristics affecting the magnetic field and / or the driving magnet (4) of the transport unit (TE) interacting with the first driving coil (AS1) of the first coil group (SG1) has different magnetic characteristics affecting the magnetic field compared with the driving magnet (4) interacting with the second driving coil (AS2) of the second coil group (SG2), characterized in that the at least one transport section (2) is oriented relative to a motion path (BP) given in advance for the transport unit (TE) and extending between a defined starting point (AP) and a defined ending point (EP) in such a way that the motion path (BP) is in the transport plane (3) such that the first motion path percentage (BPA1) in the first main motion direction (H1) of the motion path length (LBP) of the motion path (BP) is equal to or greater than the second motion path percentage (BPA2) in the second main motion direction (H2) of the motion path length (LBP).

2. The transport device (1) according to claim 1, characterized in that, The first main motion direction and the second main motion direction are orthogonal to each other.

3. The transport device (1) according to claim 2, characterized in that, The at least one transport section (2) is constructed in a rectangular shape to form a rectangular transport plane (3).

4. The transport device (1) according to claim 1, characterized in that, The at least one transport section is constructed in a rhombus shape, such that the transport plane (3) forming the rhombus and / or the projection surface of the at least one transport unit (TE) onto the transport plane (3) is constructed in a rhombus shape.

5. The transport device (1) according to claim 4, characterized in that, The first main motion direction (H1) is orthogonal to the first edge (K1) of the rhomboid transport plane (3) and the second main motion direction (H2) is orthogonal to the second edge (K2) of the rhomboid transport plane (3) adjacent to the first edge (K1).

6. The transport device (1) according to any one of claims 1 to 5, characterized in that, The transport device (1) is provided with a plurality of transport sections (2), which constitute the transport plane (3) of the transport device (1). At least two transport sections (2) are adjacent to each other. The movement path (BP) extends on the plurality of transport sections (2) and the first main movement direction (H1) of the transport section (2) extends parallel to the first main movement direction or the second main movement direction of the adjacent transport section (2).

7. The transport device (1) according to any one of claims 1 to 5, characterized in that, The at least one transport segment (2) is oriented relative to the movement path (BP) such that the proportion of the first movement path (BPA1) is maximized.

8. The transport device (1) according to any one of claims 1 to 5, characterized in that, The transport device (1) is provided with at least one process processing station (PSi) for performing work processes on the transport unit (TE), wherein a process motion path (PBPi) is defined as part of a motion path (BP) within the area of ​​the process processing station (PSi), and the transport unit (TE) is capable of moving along the process motion path in the transport plane (3), wherein the at least one transport section (2) and the at least one process processing station (PSi) are oriented relative to each other such that the first process motion path percentage (PBPA1) in the first main motion direction (H1) of the process motion path length (LPBPi) of the process motion path (PBPi) is equal to or greater than the second process motion path percentage (PBPA2) in the second main motion direction (H2) of the process motion path length (LPBPi).

9. The transport device (1) according to claim 8, characterized in that, The at least one transport section (2) and the at least one process processing station (PSi) are oriented relative to each other such that the proportion of the first process motion path (PBPA1) is maximized.

10. The transport device (1) according to any one of claims 1 to 5, characterized in that, The transport device (1) is provided with a plurality of process processing stations (PSi) for performing a work process on the transport unit (TE) respectively. A process motion path (PBPi) is defined as part of a motion path (BP) in the area of ​​each process processing station (PSi). The transport unit (TE) is able to move along the process motion path in the transport plane (3). The at least one transport section (2) and the process processing station (PSi) are oriented relative to each other such that the first process motion path ratio (PBPA1) in the first main motion direction (H1) of the sum of process motion path lengths (LPBPi) (∑LPBPi) of the process motion paths (PBPi) is equal to or greater than the second process motion path ratio (PBPA2) in the second main motion direction (H2) of the sum of process motion path lengths (LPBPi) (∑LPBPi).

11. The transport device (1) according to claim 10, characterized in that, The at least one transport section (2) and the process processing station (PSi) are oriented relative to each other such that the proportion of the first process motion path (PBPA1) is maximized.

12. The transport device (1) according to any one of claims 1 to 5, characterized in that, The transport device (1) is provided with at least two process processing stations (PSi) for performing a work process on the transport unit (TE), wherein a transition path (UP) is defined as part of a motion path (BP) in the area between each process processing station (PSi), and the transport unit (TE) is able to move along the transition path in the transport plane (3), wherein the first transition path proportion (UPA1) in the first main motion direction (H1) of the transition path length (LUP) of the transition path (UP) is equal to or greater than the second transition path proportion (UPA2) in the second main motion direction (H2) of the transition path length (LUP) of the transition path (UP).

13. The transport device (1) according to any one of claims 1 to 5, characterized in that, The average coil spacing (S1) between the driving coil of the coil group and the driving magnet (4) of the transport unit (TE) in the normal direction and / or the conductor resistance of the driving coil of the coil group and / or the maximum coil current of the driving coil of the coil group and / or the number of turns of the driving coil of the coil group and / or the coil geometry of the driving coil are set as coil characteristics that affect the magnetic field; and / or the residual magnetic flux density of the driving magnet (4) and / or the relative orientation between the driving magnet (4) and the driving coil of the coil group and / or the pole pitch (Ta, Tb) of the driving magnet (4) and / or the magnetic geometry of the driving magnet (4) are set as magnetic characteristics that affect the magnetic field of the driving magnet (4) of the transport unit (TE).

14. The transport device (1) according to any one of claims 1 to 5, characterized in that, The control unit (5) is configured to control the first drive coil (AS1) of the first coil group (SG1) to interact with the drive magnet (4) of the transport unit (TE) to generate a first levitation force component of the levitation force (FS) acting on the transport unit (TE) in the opposite direction to gravity, and to control the second drive coil (AS2) of the second coil group (SG2) to interact with the drive magnet (4) of the transport unit (TE) to generate a second levitation force component in the levitation force (FS) that is complementary to the first levitation force component, wherein the first levitation force component of the first drive coil (AS1) with a first main motion direction (H1) having higher efficiency (μH1) is larger.

15. The transport device (1) according to claim 14, characterized in that, The first levitation force component and the second levitation force component are determined based on the efficiency of the main motion direction or based on at least one coil characteristic of the driving coil in the main motion direction that affects the magnetic field and / or at least one magnet characteristic of the driving magnet (4) in the main motion direction that affects the magnetic field.

16. The transport device (1) according to claim 15, characterized in that, The first levitation force component and the second levitation force component are determined based on the difference (ΔS) between the driving coil of the coil group and the coil spacing of the driving magnet (4).

17. The transport device (1) according to claim 14, characterized in that, The first levitation force component and the second levitation force component are determined according to the motion parameters of the transport unit (TE) during the movement of the transport unit (TE).

18. The transport device (1) according to claim 14, characterized in that, The first and second levitation force components are determined based on the transport unit velocity (v) and / or transport unit acceleration (a) during the movement of the transport unit (TE).

19. A method for operating a transport device (1) in the form of a planar motor, said transport device having at least one transport section (2) constituting a transport plane (3) and having at least one transport unit (TE) that moves at least two-dimensionally along two main motion directions in said transport plane (3), wherein, A first coil group (SG1) having multiple first drive coils (AS1) and defining a first main motion direction (H1) is provided on the transport section (2), and a second coil group (SG2) having multiple second drive coils (AS2) and defining a second main motion direction (H2) is provided. A drive magnet (4) is provided on the transport unit (TE). The first drive coils (AS1) of the first coil group (SG1) interact electromagnetically with at least a portion of the drive magnet (4) of the transport unit (TE) to make the transport unit (TE) move in the first main motion direction (H1), and the second drive coils (AS2) of the second coil group (SG2) interact electromagnetically with at least a portion of the drive magnet (4) of the transport unit (TE) to make the transport unit (TE) move in the second main motion direction (H2). The transport unit (TE) moves in the two main motion directions with different efficiencies and / or different maximum forces and / or different precisions by: the first drive coil of the first coil group... The second driving coil of the second coil group and the second driving coil of the second coil group are provided with different coil characteristics affecting the magnetic field, and / or in such a way as: the driving magnet (4) of the transport unit (TE) interacting with the first driving coil (AS1) of the first coil group (SG1) is provided with different magnetic characteristics affecting the magnetic field compared with the driving magnet (4) interacting with the second driving coil (AS2) of the second coil group (SG2), characterized in that the at least one transport section (2) is oriented relative to a motion path (BP) given in advance for the transport unit (TE) extending between a defined starting point (AP) and a defined ending point (EP), such that the transport unit (TE) moves along the motion path (BP) in the transport plane (3) and such that the first motion path percentage (BPA1) in the first main motion direction (H1) of the motion path length (LBP) of the motion path (BP) is equal to or greater than the second motion path percentage (BPA2) in the second main motion direction (H2) of the motion path length (LBP).

20. The method according to claim 19, characterized in that, The transport unit (TE) is moved along a process motion path (PBP) that forms part of the motion path (BP) within the area of ​​the process processing station (PS) of the transport device (1) to perform the work process on the transport unit (TE), such that the at least one transport section (2) and the process processing station (PS) are oriented relative to each other such that the first process motion path percentage (PBPA1) in the first main motion direction (H1) of the process motion path length (LPBP) of the process motion path (PBP) is equal to or greater than the second process motion path percentage (PBPA2) in the second main motion direction (H2) of the process motion path length (LPBP).

21. The method according to claim 20, characterized in that, The proportion of the motion path in the first process is maximized.

22. The method according to claim 19, characterized in that, The transport unit (TE) is moved along a process motion path (PBPi) that constitutes a part of the motion path (BP) in a plurality of process processing stations (PSi) of the transport device (1) to perform a work process on the transport unit (TE) respectively, and the at least one transport section (2) and the process processing station (PSi) are oriented relative to each other such that the first process motion path percentage (PBPA1) in the first main motion direction (H1) of the sum of process motion path lengths (LPBPi) (∑LPBPi) of the process motion paths (PBPi) is equal to or greater than the second process motion path percentage (PBPA2) in the second main motion direction (H2) of the sum of process motion path lengths (LPBPi) (∑LPBPi).

23. The method according to claim 22, characterized in that, The proportion of the motion path in the first process is maximized.

24. The method according to any one of claims 19 to 23, characterized in that, The transport unit (TE) in the transport device (1) moves along a transition path (UP) that forms part of the motion path (BP) between two process processing stations (PSi) that perform a work process on the transport unit (TE), wherein the first transition path proportion (UPA1) in the first main motion direction (H1) of the transition path length (LUP) is equal to or greater than the second transition path proportion (UPA2) in the second main motion direction (H2) of the transition path length (LUP).

25. The method according to any one of claims 19 to 23, characterized in that, The first drive coil (AS1) of the first coil group (SG1) interacts with the drive magnet (4) of the transport unit (TE) to generate a first levitation force component of the levitation force (FS) that acts on the transport unit (TE) in the opposite direction to gravity, and the second drive coil (AS2) of the second coil group (SG2) interacts with the drive magnet (4) of the transport unit (TE) to generate a second levitation force component of the levitation force (FS) that is complementary to the first levitation force component, wherein the first drive coil (AS1) with a first main motion direction (H1) having a higher efficiency (μH1) generates a larger levitation force component.

26. The method according to claim 25, characterized in that, The first levitation force component and the second levitation force component are determined based on the efficiency of the main motion direction or based on at least one coil characteristic of the driving coil that affects the magnetic field and / or at least one magnet characteristic of the driving magnet (4) that affects the magnetic field.

27. The method according to claim 26, characterized in that, The first levitation force component and the second levitation force component are determined based on the difference (ΔS) between the average coil spacing (S1, S2) between the driving coil of the coil group and the driving magnet (4) of the transport unit (TE) in the normal direction.

28. The method according to claim 25, characterized in that, The first levitation force component and the second levitation force component are determined based on the motion parameters of the transport unit (TE) during the movement of the transport unit (TE).

29. The method according to claim 28, characterized in that, The first levitation force component and the second levitation force component are determined based on the transport unit velocity (v) and / or transport unit acceleration (a) during the movement of the transport unit (TE).

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