A vacuum flange device for a strong radiation area

Abstract

The present invention relates to a vacuum flange device for a strong radiation area, which comprises: a split all-metal vacuum flange structure, which includes an inner ring flange, an outer ring flange, a fixed flange and a corrugated pipe structure; the inner ring flange is movably connected to the inner side of the outer ring flange, and the outer ring flange is connected to one end of the fixed flange through the corrugated pipe structure; the other end of the fixed flange is connected to the target chamber; a vacuum beam pipeline flange, one end of which is connected to the vacuum beam pipeline, and the other end of which is connected to the inner ring flange and the outer ring flange together to form a vacuum sealing flange pair. The present invention solves the connection problem between the target chamber and the vacuum beam pipeline under high vacuum; and solves the key problem of remote maintenance of the target chamber equipment when the equipment needs to be maintained; it can be applied in the field of heavy ion accelerator radioactive engineering technology.

Description

Technical Field

[0001] The present invention relates to the technical field of heavy ion accelerator radioactive engineering, and particularly to a vacuum flange device for connecting a vacuum beam pipeline and a target chamber in a high-radioactivity target area. Background Art

[0002] In the High Intensity heavy ion Accelerator Facility (HIAF), the High-Resolution Radioactive Separator (HFRS) is a large experimental device that uses high-energy intense heavy ion beams to bombard a target to generate secondary beams and then separates the primary beam from the secondary beam. Since the primary target area is at the bombardment position and more than 99% of the primary beam is lost at this position, this area has high radiation characteristics. According to calculations, the dose in the high-radioactivity area is about 500 Gy / h, and organic sealing materials cannot be used for the flange connection between the target chamber and the vacuum beam pipeline; when the target and the target chamber need to be maintained, their flange connections must be remotely disassembled. Therefore, it is necessary to design a reliable, remotely dismountable, and low-leakage connection flange to ensure the normal operation and maintenance of the equipment under high vacuum. Summary of the Invention

[0003] Aiming at the above problems, the purpose of the present invention is to provide a vacuum flange device for a strong radiation area, which solves the connection problem between the target chamber and the vacuum beam pipeline under high vacuum; and solves the key problem of remote maintenance of the target chamber equipment when the equipment needs to be maintained.

[0004] To achieve the above purpose, the present invention adopts the following technical solutions: A vacuum flange device for a strong radiation area, comprising: a split all-metal vacuum flange structure, which includes an inner ring flange, an outer ring flange fixed flange, and a bellows structure; the inner ring flange is movably connected inside the outer ring flange, and the outer ring flange is connected to one end of the fixed flange through the bellows structure; the other end of the fixed flange is connected to the target chamber; a vacuum beam pipeline flange, one end of which is connected to the vacuum beam pipeline, and the other end is connected to the inner ring flange and the outer ring flange together to form a vacuum sealing flange pair.

[0005] Further, the cross-section of the outer ring flange adopts a similar L-shaped structure, the inner ring flange is movably connected to the long side of the outer ring flange through a spring and a limiting structure, and there is a first distance between the outer side of the inner ring flange and the short side of the outer ring flange; after being connected to the vacuum beam pipeline flange, a vacuum space is formed by this first distance.

[0006] Further, the inner ring flange adopts a convex platform structure, a groove is formed between the inner side of the inner ring flange and the long side of the outer ring flange, and a partition bellows is welded in this groove.

[0007] Further, on the opposite surfaces of the inner flange and the outer flange, a plurality of corresponding blind holes are respectively provided along the circumferential direction, and the springs are arranged in two corresponding blind holes.

[0008] Further, four through holes are provided on the inner side edge of the inner flange, and limiting holes with the same diameter are provided at corresponding positions on the outer flange. The limiting holes are composed of a light hole and a threaded hole; the limiting structure composed of a limiting column and a countersunk head bolt for limiting is arranged in the through hole and the limiting hole.

[0009] Further, the limiting column adopts a hollow cylindrical structure; the limiting column passes through the through hole and extends into the light hole provided on the outer flange to reach the limiting position; the countersunk head bolt for limiting passes through the hollow structure of the limiting column and is connected to the threaded hole to form the limiting structure.

[0010] Further, the sealing surface of the inner flange protrudes from the sealing surface of the outer flange.

[0011] Further, a sandwich extraction port is provided on the outer flange for extracting the vacuum in the space between the inner flange and the outer flange.

[0012] Further, the corrugated pipe structure includes an inner corrugated pipe and an outer corrugated pipe; one end of the inner corrugated pipe and one end of the outer corrugated pipe are both welded to the bottom surface of the long side of the outer flange, and the other end of the inner corrugated pipe and the other end of the outer corrugated pipe are both welded to one end of the fixed flange; the inner corrugated pipe is located inside, the outer corrugated pipe is located outside, and there is a second distance between the two.

[0013] Further, the flange surfaces of the inner flange, the outer flange, and the vacuum beam pipeline flange all adopt a mechanical grinding method, the flatness of the sealing surface < 0.002 mm, and the roughness Rt < 0.08 μm;

[0014] A silver film is plated on the flange surface of the inner flange by sputtering coating after grinding.

[0015] Due to the adoption of the above technical solutions, the present invention has the following advantages:

[0016] The present invention can effectively solve the problem of flange connection with different sizes and different shapes adopted according to different beam envelope positions in a high-radioactivity area, and avoid the remote maintenance of the target chamber equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the sealing fit of the vacuum flange in the embodiment of the present invention;

[0018] Figure 2Schematic diagram of the split all-metal vacuum flange structure in the embodiment of the present invention;

[0019] Reference numerals: 1 - split all-metal vacuum flange structure, 2 - vacuum beam pipeline flange, 12 - inner ring flange, 11 - outer ring flange, 13 - fixed flange, 14 - partition bellows, 15 - inner bellows, 16 - outer bellows, 17 - spring, 18 - limit post, 19 - sandwich pumping port. Detailed implementation manners

[0020] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present invention fall within the scope of protection of the present invention.

[0021] It should be noted that the terms used herein are only for describing specific implementation manners and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular forms are also intended to include the plural forms. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they specify the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0022] The vacuum flange device for the high-radiation area of the present invention is applied to the accelerator technology field, and includes: a split all-metal vacuum flange structure, which includes an inner ring flange, an outer ring flange, a fixed flange, and a bellows structure; the inner ring flange is movably connected to the inside of the outer ring flange, and the outer ring flange is connected to one end of the fixed flange through the bellows structure; the other end of the fixed flange is connected to the target chamber; a vacuum beam pipeline flange, one end of which is connected to the vacuum beam pipeline, and the other end is connected to the inner ring flange and the outer ring flange together to form a vacuum sealing flange pair. The present invention solves the connection problem between the target chamber and the vacuum beam pipeline under high vacuum; and solves the key problem of remote maintenance of the target chamber equipment when the equipment needs to be maintained.

[0023] In an embodiment of the present invention, as Figure 1 shown, a vacuum flange device for the high-radiation area is provided. In this embodiment, the connection between the vacuum beam pipeline and the target chamber in the high-radioactivity target area is taken as an example, including but not limited to the high-radioactivity target area. In this embodiment, the vacuum flange device includes:

[0024] Split-type all-metal vacuum flange structure 1, which includes an inner ring flange 12, an outer ring flange 11, a fixed flange 13 and a bellows structure; the inner ring flange 12 is movably connected to the inner side of the outer ring flange 11, and the outer ring flange 11 is connected to one end of the fixed flange 13 through the bellows structure;

[0025] Vacuum beam pipeline flange 2, one end of which is connected to the vacuum beam pipeline, and the other end is connected to the inner ring flange 12 and the outer ring flange 11 together to form a vacuum sealing flange pair.

[0026] In the above embodiment, the cross-section of the outer ring flange 11 adopts a similar L-shaped structure, and the inner ring flange 12 is movably connected to the long side of the outer ring flange 11 through a spring 17 and a limiting structure, and there is a first distance between the outer side of the inner ring flange 12 and the short side of the outer ring flange 11; after being connected to the vacuum beam pipeline flange 2, a vacuum space is formed by this first distance. Preferably, this first distance is 2mm.

[0027] Among them, the inner ring flange 12 adopts a convex platform structure, and a groove is formed between the inner side of the inner ring flange 12 and the long side of the outer ring flange 11. A partition bellows 14 is welded in this groove. When the inner ring flange 12 and the outer ring flange 11 move relative to each other, the partition bellows 14 effectively blocks the vacuum between the inner ring flange 12 and the outer ring flange 11 and the vacuum flow in the beam channel.

[0028] In the above embodiment, on the opposite surfaces of the inner side of the inner ring flange 12 and the outer ring flange 11, a plurality of corresponding blind holes are respectively opened along the circumference. Springs 17 are arranged in two corresponding blind holes of the inner side of the inner ring flange 12 and the outer ring flange 11, and the springs 17 are positioned and limited through the two corresponding blind holes.

[0029] In this embodiment, 16 blind holes are respectively arranged at intervals on the inner side of the inner ring flange 12 and the outer ring flange 11. The depth of each blind hole is preferably 5mm; 16 springs 17 are correspondingly arranged. The spring constant of the springs 17 is between 25N / mm and 40N / mm, the free length is 15mm, and the springs 17 are in a compressed state with a length of 12mm.

[0030] In the above embodiment, four through holes are also arranged on the inner side of the inner ring flange 12, and limiting holes with the same diameter are opened at the corresponding positions of the outer ring flange 11. The limiting holes are composed of a light hole and a threaded hole; in this embodiment, preferably, the depth of the light hole is 1mm + the depth of the threaded hole is 4mm; a limiting structure composed of a limiting column 18 and a limiting countersunk bolt is arranged in the through holes and the limiting holes.

[0031] Among them, the limit post 18 adopts a hollow cylindrical structure. The limit post 18 passes through the through hole and extends to a depth of 1 mm in the optical hole opened on the outer ring flange 11 to reach the limit position; the limit countersunk bolt passes through the hollow structure of the limit post 18 and is connected to the threaded hole on the outer ring flange 11 to form a limit structure.

[0032] Preferably, the depth of the optical hole is 1 mm, the diameter is 8 mm, the threaded hole is an internal thread of M5, and the depth is 4 mm.

[0033] In the above embodiment, the sealing surface of the inner ring flange 12 protrudes from the sealing surface of the outer ring flange 11; preferably, the sealing surface of the inner ring flange 12 protrudes 1 mm from the sealing surface of the outer ring flange 11.

[0034] In the above embodiment, a sandwich extraction port 19 is provided on the outer ring flange 11 for extracting the vacuum in the space between the inner ring flange 12 and the outer ring flange 11, which can effectively solve the problem of flange connection with different sizes and different shapes adopted at different beam envelope positions in a high-radioactivity area.

[0035] In the above embodiment, the corrugated pipe structure includes an inner corrugated pipe 15 and an outer corrugated pipe 16. One end of the inner corrugated pipe 15 and one end of the outer corrugated pipe 16 are both welded to the bottom surface of the long side of the outer ring flange 11, and the other end of the inner corrugated pipe 15 and the other end of the outer corrugated pipe 16 are both welded to one end of the fixed flange 13; the inner corrugated pipe 15 is located on the inner side, the outer corrugated pipe 16 is located on the outer side, and there is a second distance between the two. A space for providing compressive force is formed by the second distance, the inner corrugated pipe 15, the outer corrugated pipe 16, the outer ring flange 11 and the fixed flange 13. During use, the force generated by the compressed gas filled is utilized, and the outer ring flange 11 is pushed by the inner corrugated pipe 15 and the outer corrugated pipe 16, and a sealing fastening force is applied.

[0036] In the above embodiment, the vacuum beam pipeline flange 2 is a circular ring structure. In this embodiment, the thickness of the vacuum beam pipeline flange 2 is preferably 30 mm. The annular part between the inner and outer diameters of the flange is a plane sealing surface, and the flatness of the plane sealing surface < 0.002 mm, the roughness Rt < 0.08 μm, and Ra < 0.02 μm.

[0037] In the above embodiment, the flange surfaces of the inner ring flange 12, the outer ring flange 11 and the vacuum beam pipeline flange 2 all adopt mechanical grinding, and the flatness of the sealing surface < 0.002 mm, and the roughness Rt < 0.08 μm;

[0038] Preferably, a silver film is plated on the flange surface of the inner ring flange 12 by sputtering coating after grinding; the thickness of the silver film is preferably 2 μm.

[0039] In the above embodiments, the inner ring flange 12, the outer ring flange 11, and the vacuum beam pipeline flange 2 are all made of stainless steel materials.

[0040] In summary, when connecting the split all-metal vacuum flange structure 1 and the vacuum beam pipeline flange 2, the inner ring flange 12 first contacts the flat sealing surface of the vacuum beam pipeline flange 2. When the pre-tightening force is further increased, the outer ring flange 11 begins to contact the flat sealing surface of the vacuum beam pipeline flange 2; the sealing pre-tightening force received by the inner ring flange 12 is the pressure of the spring 17, and it will not be further increased when the flat sealing surface of the outer ring flange 11 contacts the flat sealing surface of the vacuum beam pipeline flange 2. At this time, the force magnitude is the maximum compression force of the spring 17, that is, 1600 N; the connection is completed.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum flange device for a strong radiation area, characterized in that, it includes: A split all-metal vacuum flange structure (1), which includes an inner ring flange (12), an outer ring flange (11), a fixed flange (13) and a bellows structure; the inner ring flange (12) is movably connected to the inside of the outer ring flange (11), and one end between the outer ring flange (11) and the fixed flange (13) is connected through the bellows structure; the other end of the fixed flange (13) is connected to the target chamber; A vacuum beam pipeline flange (2), one end of which is connected to the vacuum beam pipeline, and the other end is connected to the inner ring flange (12) and the outer ring flange (11) together to form a vacuum sealing flange pair; The cross-section of the outer ring flange (11) adopts a structure similar to an L shape, and the inner ring flange (12) is movably connected to the long side of the outer ring flange (11) through a spring (17) and a limiting structure, and there is a first distance between the outer side of the inner ring flange (12) and the short side of the outer ring flange (11); after being connected to the vacuum beam pipeline flange (2), a vacuum space is formed by this first distance; The inner ring flange (12) adopts a convex platform structure, and a groove is formed between the inner side of the inner ring flange (12) and the long side of the outer ring flange (11), and a partition bellows is welded in this groove.

2. The vacuum flange device for a strong radiation area according to claim 1, characterized in that, On the opposite surfaces of the inner side of the inner ring flange (12) and the outer ring flange (11), a plurality of corresponding blind holes are respectively opened in the circumferential direction, and the springs are arranged in two corresponding blind holes.

3. The vacuum flange device for a strong radiation area according to claim 1, characterized in that, The inner side of the inner ring flange (12) is provided with four through holes, and limiting holes with the same diameter are opened at corresponding positions on the outer ring flange (11), and the limiting holes are composed of a light hole and a threaded hole; the limiting structure composed of a limiting column and a limiting countersunk head bolt is arranged in the through holes and the limiting holes.

4. The vacuum flange device for a strong radiation area according to claim 3, characterized in that, The limiting column (18) adopts a hollow cylindrical structure; the limiting column (18) passes through the through hole and extends into the light hole opened on the outer ring flange (11) to reach the limiting position; the limiting countersunk head bolt passes through the hollow structure of the limiting column (18) and is connected to the threaded hole together to form the limiting structure.

5. The vacuum flange device for a strong radiation area according to claim 1, characterized in that, The sealing surface of the inner ring flange (12) protrudes from the sealing surface of the outer ring flange (11).

6. The vacuum flange device for a strong radiation area according to claim 1, characterized in that, A sandwich extraction port (19) is opened on the outer ring flange (11) for extracting the vacuum in the space between the inner ring flange (12) and the outer ring flange (11).

7. The vacuum flange device for a strong radiation area according to claim 1, characterized in that, The corrugated pipe structure includes an inner corrugated pipe (15) and an outer corrugated pipe (16); one end of the inner corrugated pipe (15) and one end of the outer corrugated pipe (16) are both welded to the bottom surface of the long side of the outer ring flange (11), and the other end of the inner corrugated pipe (15) and the other end of the outer corrugated pipe (16) are both welded to one end of the fixed flange (13); the inner corrugated pipe (15) is located on the inner side, the outer corrugated pipe (16) is located on the outer side, and there is a second distance between the two.

8. The vacuum flange device for a strong radiation area according to claim 1, characterized in that, the flange surfaces of the inner ring flange (12), the outer ring flange (11), and the vacuum beam pipeline flange (2) all adopt mechanical grinding, the flatness of the sealing surface is <0.002 mm, and the roughness Rt <0.08 μm; a silver film is plated on the flange surface of the inner ring flange (12) by sputtering coating after grinding.

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